Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

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Table 3.7 the description of the peaks of Run s50.52940.5292Nb3Snthoerycubic edge length (nm)0.52900.52880.52860.52841.0 1.2 1.4 1.6 1.8current (A)Fig.3.25 the cubic edge length versus Nb sputtering currentUsing the same method of 2.3.3.3 section, we can obtain the cubic edge length ofeach sample. According to Fig.3.25, the cubic edge length increases with the Nbsputtering current increasing, except the point of 1.4A.3.3 Deposition on Nb sampleIf we fabricate the accelerator cavity with thin film, the thin film should bedeposited on substrate, which including the Nb and copper. The advantage of the Nbsubstrate is that Nb is superconductor, which means that when the part zone of thethin film is not the superconductor, the Nb is still the superconductor which make sureof that the whole accelerator cavity is superconductor. But the disadvantage is that thethermal conductor of the Nb is poor. The advantage of the copper substrate is that thethermal conductor and the mechanical property are very good. The good thermalconductor can quickly transfer the heat produced by the microwave in the thin film,which can reduce the thermal unstable of the superconductor because that if the heatcan not transfer in time, the temperature of some zone of the thin film will increaseand higher than T c . The good mechanical property can reduce the detuning of the54
frequency of the cavity which is induced by the Lorentz force acting on thesuperconductor by the microwave. But the copper is not superconductor.Fig. 3.26 the Nb sample and its holderThe Nb sample and its holder before and after mounting are shown in Fig3.26and Fig.3.27. The Nb sample is 2cm length, 1cm width and 3mm thickness with twogrooves of 2mm width. Before the deposition, the Nb sample is preceded with thebuffer chemical polish (BCP) for 5 minute. The sputtering and the depositing systemare same with that of sapphire sample.Fig. 3.27 fixing the sample on its holder55
Page 1:
UNIVERSITÀ DEGLISTUDI DI PADOVAFac
Page 7 and 8:
IndexINDEX ........................
Page 9 and 10:
IntroductionThe superconductor acce
Page 11 and 12: Fig. 1.1 Disc-loaded traveling-wave
Page 13 and 14: In Type-II superconductors, vortex
Page 15 and 16: needed for preventing the supercond
Page 17 and 18: The B1 crystal structure has a cubi
Page 19 and 20: NbN cavities literature, is often h
Page 21 and 22: superconducting magnet construction
Page 23 and 24: 775°C. From the same diagram, it i
Page 25 and 26: two types of electrons at the Fermi
Page 27 and 28: Of course, there are some other kin
Page 29 and 30: as shown in Fig.2.3. The four opera
Page 31 and 32: Fig.2.8 turbomolecular pumpFig. 2.9
Page 33 and 34: Fig. 2.14 The chamber covered with
Page 35 and 36: Fig. 2.17 the gasket and the magnet
Page 37 and 38: shown in Fig. 2.21 and Fig. 2.22. T
Page 39 and 40: Fig. 2.26 The interface of the surf
Page 41 and 42: Fig. 2.30 put the sample into the T
Page 43 and 44: Fig. 2.34 the performance of the th
Page 45 and 46: 1008038.5°{110}69.6°{211}sample1s
Page 47 and 48: 2dsinθ= nλ (2.3)Fig.2.44 the diff
Page 49 and 50: Chapter 3 Multilayer deposition of
Page 51 and 52: 1 minute. The time of depositing mu
Page 53 and 54: chamber 1 and is connected to the s
Page 55 and 56: 3.2.2.2 Analysis resultⅠ The thic
Page 57 and 58: In order to detect the component of
Page 59 and 60: measure the RRR. So the resistance
Page 61: 110100903480relative Intensity70605
Page 65 and 66: Fig. 3.28 the inductor coilDuring t
Page 67 and 68: Fig. 3.32 fixing the sample with Nb
Page 69 and 70: second transition temperature is th
Page 71 and 72: source is the bulk Nb sample. Altho
Page 73 and 74: of 1A in the Fig. 3.37 and Fig. 3.4
Page 75 and 76: Table 3.10 the description of the p
Page 77 and 78: 1101001.0A10'-IND3 45 6 7 9 1011 12
Page 79 and 80: 1101009080341.8A10'INDrelative inte
Page 81 and 82: Reference1. A. Godeke, Nb3Sn FOR RA
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Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

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