Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

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Fig. 3.4 The Niobium-Tin phase diagramThe annealing should be performed in vacuum for good purity and performance.If without vacuum, the gas atom of environment can enter into the thin film or reactwith the atom of the thin film. So, the base pressure should be also ultra high vacuum,and the baking is also needed. There are two methods of annealing which includingthe lamp annealing and the inductor annealing.3.2.2.1 The technique description of lamp annealingFig. 3.5 the UHV lamp annealing chamberThe lamp annealing is proceeded in the chamber 4 which is similar with the44
chamber 1 and is connected to the same pumping system as shown in Fig. 3.5. Aheater, which is composed of an Inconel cup and an infrared lamp in the cup, permitsto heat the sample up to 1000°C.In order to detect the temperature during the annealing, a thermal sensor shouldbe made and mounted in the chamber. The thermal sensor is welded with alumel andchromel on the graphite, and it need to be isolated by a ceramic.The feed through is needed to isolate the heater and thermal sensor by ceramic.The power is provide by a variac and isolation transformer. The different annealingtemperature can be obtained by changing the input voltage of the heater.Fig. 3.6 Mounting the lamp for annealing heaterFig. 3.7 welding the thermal sensorFig. 3.8 the thermal sensor after welding45
Page 1: UNIVERSITÀ DEGLISTUDI DI PADOVAFac
Page 7 and 8: IndexINDEX ........................
Page 9 and 10: IntroductionThe superconductor acce
Page 11 and 12: Fig. 1.1 Disc-loaded traveling-wave
Page 13 and 14: In Type-II superconductors, vortex
Page 15 and 16: needed for preventing the supercond
Page 17 and 18: The B1 crystal structure has a cubi
Page 19 and 20: NbN cavities literature, is often h
Page 21 and 22: superconducting magnet construction
Page 23 and 24: 775°C. From the same diagram, it i
Page 25 and 26: two types of electrons at the Fermi
Page 27 and 28: Of course, there are some other kin
Page 29 and 30: as shown in Fig.2.3. The four opera
Page 31 and 32: Fig.2.8 turbomolecular pumpFig. 2.9
Page 33 and 34: Fig. 2.14 The chamber covered with
Page 35 and 36: Fig. 2.17 the gasket and the magnet
Page 37 and 38: shown in Fig. 2.21 and Fig. 2.22. T
Page 39 and 40: Fig. 2.26 The interface of the surf
Page 41 and 42: Fig. 2.30 put the sample into the T
Page 43 and 44: Fig. 2.34 the performance of the th
Page 45 and 46: 1008038.5°{110}69.6°{211}sample1s
Page 47 and 48: 2dsinθ= nλ (2.3)Fig.2.44 the diff
Page 49 and 50: Chapter 3 Multilayer deposition of
Page 51: 1 minute. The time of depositing mu
Page 55 and 56: 3.2.2.2 Analysis resultⅠ The thic
Page 57 and 58: In order to detect the component of
Page 59 and 60: measure the RRR. So the resistance
Page 61 and 62: 110100903480relative Intensity70605
Page 63 and 64: frequency of the cavity which is in
Page 65 and 66: Fig. 3.28 the inductor coilDuring t
Page 67 and 68: Fig. 3.32 fixing the sample with Nb
Page 69 and 70: second transition temperature is th
Page 71 and 72: source is the bulk Nb sample. Altho
Page 73 and 74: of 1A in the Fig. 3.37 and Fig. 3.4
Page 75 and 76: Table 3.10 the description of the p
Page 77 and 78: 1101001.0A10'-IND3 45 6 7 9 1011 12
Page 79 and 80: 1101009080341.8A10'INDrelative inte
Page 81 and 82: Reference1. A. Godeke, Nb3Sn FOR RA

Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

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