Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
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Fig. 3.4 The Niobium-Tin phase diagramThe annealing should be performed in vacuum for good purity and performance.If without vacuum, the gas atom <strong>of</strong> environment can enter into the thin film or reactwith the atom <strong>of</strong> the thin film. So, the base pressure should be also ultra high vacuum,and the baking is also needed. There are two methods <strong>of</strong> annealing which includingthe lamp annealing and the inductor annealing.3.2.2.1 The technique description <strong>of</strong> lamp annealingFig. 3.5 the UHV lamp annealing chamberThe lamp annealing is proceeded in the chamber 4 which is similar with the44