Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
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Chapter 3 <strong>Multilayer</strong> deposition <strong>of</strong> Nb 3 Sn3.1 Technique <strong>of</strong> depositionFig. 3.1 the structure <strong>of</strong> multilayer<strong>Multilayer</strong> deposition can improve the H c <strong>of</strong> superconductor. However, we usethe multilayer to produce the A15 crystal structure <strong>of</strong> Nb 3 Sn. If the thin film is made<strong>of</strong> multilayer as shown in Fig. 3.1, when we heat the thin film, the Sn atom and the Nbatom move little distance and the A15 Nb 3 Sn crystal is easy to be obtained. In order toimprove the adherence <strong>of</strong> the thin film, the Nb buffer layer is first deposited. Becausethe vapour pressure <strong>of</strong> Sn is very low, the Nb over layer is needed to prevent the Snvaporizing.Fig. 3.2 Sketch <strong>of</strong> the UHV multilayer deposition systemFor the deposition <strong>of</strong> the multilayer in the cylindrical stainless steel vacuum41