Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
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5*10 -3 mbar and the red point means 3*10 -3 mbar. From the picture, we can see that thehighest cubic edge length is that <strong>of</strong> 1.2 A <strong>sputtering</strong> current.0.33200.33150.3310cubic edge length (nm)0.33050.33000.32950.32905E-3mbar3E-3mbartheory0.32850.32800.8 0.9 1.0 1.1 1.2 1.3 1.4 1.5current (A)Fig. 2.45 the cubic edge length versus <strong>sputtering</strong> current2.3 DiscussionSample analysis <strong>of</strong> sputtered niobium films is the primary step for the Nb 3 Snmultilayer thin film deposition. <strong>Film</strong> crystalline structure, thickness, T c and RRR areimportant diagnosis <strong>of</strong> the sputter deposition. The further investigation is needed.40