Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

2dsinθ= nλ (2.3)Fig.2.44 the different distance of the different crystal planeWhere d is the interplanar spacing. However, the distance is different with thedifferent crystal plane as shown in Fig.2.44. For the cubic crystal, there is arelationship:d12( h,k,l)222( h + k + l )= (2.4)2aWhere, h,k,l stand for the direction of the crystal plane, a is the cubic edge length.And then we have:24sin ( θ )=2 2n λ( h2+ ka22+ l2)(2.5)According to the Eq.(2.4), Eq.(2.5) and the XRD results from Fig.2.35 toFig.2.42, we can obtain the d-space of {110} crystal plane, and then the cubic edgelength can be obtained of each sample as shown in Table2.3.Table2.3 the cubic edge length of each sampleThe relationship between the cubic edge length and sputtering current is shownin Fig.2.45, where the black point means that the pressure of proceeding gas is39