Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

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uniform baking temperature and better baking, we cover the main chamber and thechamber that you want to use with aluminum foils. The vacuum gauge can not becovered. And then, we set the temperature of baking and the time of baking.It should be sure that thermocouples are connected to their own zones and heatonly the chambers that you are pumping, and we should not set T>120℃ if you havemounted windows, magnetrons and viton o-rings. The cooling water should be givenbefore the baking start for the protection of the permanent magnet. When the baking isfinished, we wait for the natural cooling of the system till it near the room temperature.From the cooling curve of Fig.2.15, the pressure decrease with the temperaturedecreasing.2.2 Nb thin film on sapphireIn order to research the performance of the thin film and the parameters ofsputtering, the Nb thin film on sapphire should be first researched.2.2.1 Sputtering configurationFig.2.16 The assembly of the Nb magnetronThe sputtering is proceeded by a 2 inch of magnetron, which of component isshown as Fig.2.16. The magnetron is mounted with a new copper gasket from thebottom of the sputtering chamber after cleaning with acetone and alcohol. A flangewith glass window is mounted from the top of the chamber.26
Fig. 2.17 the gasket and the magnetronFig. 2.18 mounting the magnetron from the bottom of the chamberFig. 2.19 the flange with glass window27
Page 1: UNIVERSITÀ DEGLISTUDI DI PADOVAFac
Page 7 and 8: IndexINDEX ........................
Page 9 and 10: IntroductionThe superconductor acce
Page 11 and 12: Fig. 1.1 Disc-loaded traveling-wave
Page 13 and 14: In Type-II superconductors, vortex
Page 15 and 16: needed for preventing the supercond
Page 17 and 18: The B1 crystal structure has a cubi
Page 19 and 20: NbN cavities literature, is often h
Page 21 and 22: superconducting magnet construction
Page 23 and 24: 775°C. From the same diagram, it i
Page 25 and 26: two types of electrons at the Fermi
Page 27 and 28: Of course, there are some other kin
Page 29 and 30: as shown in Fig.2.3. The four opera
Page 31 and 32: Fig.2.8 turbomolecular pumpFig. 2.9
Page 33: Fig. 2.14 The chamber covered with
Page 37 and 38: shown in Fig. 2.21 and Fig. 2.22. T
Page 39 and 40: Fig. 2.26 The interface of the surf
Page 41 and 42: Fig. 2.30 put the sample into the T
Page 43 and 44: Fig. 2.34 the performance of the th
Page 45 and 46: 1008038.5°{110}69.6°{211}sample1s
Page 47 and 48: 2dsinθ= nλ (2.3)Fig.2.44 the diff
Page 49 and 50: Chapter 3 Multilayer deposition of
Page 51 and 52: 1 minute. The time of depositing mu
Page 53 and 54: chamber 1 and is connected to the s
Page 55 and 56: 3.2.2.2 Analysis resultⅠ The thic
Page 57 and 58: In order to detect the component of
Page 59 and 60: measure the RRR. So the resistance
Page 61 and 62: 110100903480relative Intensity70605
Page 63 and 64: frequency of the cavity which is in
Page 65 and 66: Fig. 3.28 the inductor coilDuring t
Page 67 and 68: Fig. 3.32 fixing the sample with Nb
Page 69 and 70: second transition temperature is th
Page 71 and 72: source is the bulk Nb sample. Altho
Page 73 and 74: of 1A in the Fig. 3.37 and Fig. 3.4
Page 75 and 76: Table 3.10 the description of the p
Page 77 and 78: 1101001.0A10'-IND3 45 6 7 9 1011 12
Page 79 and 80: 1101009080341.8A10'INDrelative inte
Page 81 and 82: Reference1. A. Godeke, Nb3Sn FOR RA

Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

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