Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film

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Fig.2.11 Argon leak valve and all metal valve Fig.2.12 Nitrogen Vent ValveFig. 2.13 Argon Bottle24

Fig. 2.14 The chamber covered with aluminum foils.Fig. 2.15 The cooling curve after baking.In order to reduce the pumping time, the system baking is needed for obtainingthe UHV higher than 10 -7 mbar. We must wait the pressure up to 10 -6 mbar before startbaking in order to be sure that the system don’t have big leak. In order to obtain the25

Fig. 2.14 The chamber covered with aluminum foils.Fig. 2.15 The cooling curve after baking.In order to reduce the pumping time, the system baking is needed for obtainingthe UHV higher than 10 -7 mbar. We must wait the pressure up to 10 -6 mbar before startbaking in order to be sure that the system don’t have big leak. In order to obtain the25

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