Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film Magnetron sputtering of Superconducting Multilayer Nb3Sn Thin Film
The UHV system is controlled by the control panel, which include the controllerof the pump, the switch of the gate valve, the controller of the baking system, thecontroller of the inductor annealing system and the vacuum display.Fig. 2.5 Control panelFig.2.6 Vacuum gaugeFig.2.7 Gate valve22
Fig.2.8 turbomolecular pumpFig. 2.9 Rotary PumpFig.2.10 Heating ElementBefore pumping the system, we first open the all metal valve of the usedchamber, and close that of other chamber. We also need to close the all metal leakvalve of Ar and N 2 . And then, we open the gate valve, press starting pump button, andswitch on the gauge.23
- Page 1: UNIVERSITÀ DEGLISTUDI DI PADOVAFac
- Page 7 and 8: IndexINDEX ........................
- Page 9 and 10: IntroductionThe superconductor acce
- Page 11 and 12: Fig. 1.1 Disc-loaded traveling-wave
- Page 13 and 14: In Type-II superconductors, vortex
- Page 15 and 16: needed for preventing the supercond
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- Page 25 and 26: two types of electrons at the Fermi
- Page 27 and 28: Of course, there are some other kin
- Page 29: as shown in Fig.2.3. The four opera
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- Page 35 and 36: Fig. 2.17 the gasket and the magnet
- Page 37 and 38: shown in Fig. 2.21 and Fig. 2.22. T
- Page 39 and 40: Fig. 2.26 The interface of the surf
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- Page 43 and 44: Fig. 2.34 the performance of the th
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- Page 47 and 48: 2dsinθ= nλ (2.3)Fig.2.44 the diff
- Page 49 and 50: Chapter 3 Multilayer deposition of
- Page 51 and 52: 1 minute. The time of depositing mu
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- Page 63 and 64: frequency of the cavity which is in
- Page 65 and 66: Fig. 3.28 the inductor coilDuring t
- Page 67 and 68: Fig. 3.32 fixing the sample with Nb
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Fig.2.8 turbomolecular pumpFig. 2.9 Rotary PumpFig.2.10 Heating ElementBefore pumping the system, we first open the all metal valve <strong>of</strong> the usedchamber, and close that <strong>of</strong> other chamber. We also need to close the all metal leakvalve <strong>of</strong> Ar and N 2 . And then, we open the gate valve, press starting pump button, andswitch on the gauge.23
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