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High-power rf generation in a hollow-cathode - Physics@Technion

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<strong>High</strong>-<strong>power</strong> radio frequency <strong>generation</strong> <strong>in</strong> a <strong>hollow</strong>-<strong>cathode</strong> discharge<br />

D. Arbel, Z. Bar-Lev, J. Felste<strong>in</strong>er, a) A. Rosenberg, and Ya. Z. Slutsker<br />

Physics Department, Technion-Israel Institute of Technology, 32000 Haifa, Israel<br />

�Received 23 September 1994; accepted for publication 10 January 1995�<br />

<strong>High</strong>-<strong>power</strong> <strong>rf</strong> oscillations are obta<strong>in</strong>ed <strong>in</strong> a resistive load <strong>in</strong>stalled <strong>in</strong> the external electrical circuit<br />

of a low-pressure magnetic-field-free <strong>hollow</strong>-<strong>cathode</strong> discharge. These <strong>in</strong>tense <strong>rf</strong> oscillations have<br />

been shown to be due to a collisionless <strong>in</strong>stability of the <strong>cathode</strong> sheath. A very simple device based<br />

on this effect is shown to serve as a convenient and <strong>power</strong>ful <strong>rf</strong> oscillator. Typical results first<br />

achieved without any optimization, for frequencies of 20–30 MHz and load resistances of several<br />

tens of ohms, are as follows: <strong>power</strong> of about 5 kW and efficiency �25%. © 1995 American<br />

Institute of Physics.<br />

We have obta<strong>in</strong>ed high <strong>rf</strong> <strong>power</strong> <strong>in</strong> the resistive load of a<br />

low-pressure <strong>hollow</strong>-<strong>cathode</strong> discharge. The <strong>rf</strong> oscillations <strong>in</strong><br />

the discharge current have been shown to be due to a<br />

<strong>cathode</strong>-sheath <strong>in</strong>stability <strong>in</strong> the discharge. 1 This <strong>in</strong>stability<br />

causes current oscillations with a frequency slightly lower<br />

than the ion plasma frequency near the <strong>cathode</strong>-sheath edge.<br />

The <strong>in</strong>stability appears when, for a certa<strong>in</strong> <strong>cathode</strong>-fall voltage,<br />

the time taken for the ions to cross the sheath is approximately<br />

equal to the period of the <strong>rf</strong> oscillations. A similar<br />

<strong>in</strong>stability is known for the electrons cross<strong>in</strong>g the sheath near<br />

a positively charged electrode. 2,3 In this letter we present<br />

experimental results show<strong>in</strong>g that a device based on this phenomenon<br />

can serve as a <strong>power</strong>ful <strong>rf</strong> oscillator.<br />

The experimental apparatus is shown <strong>in</strong> Fig. 1. We used<br />

a discharge tube composed of an open-ended cyl<strong>in</strong>drical<br />

<strong>cathode</strong>, 10 cm long, hav<strong>in</strong>g an <strong>in</strong>side diameter of 8.6 or 6.2<br />

cm. The anode shape, its diameter, its location, or its material<br />

had no <strong>in</strong>fluence on the experimental results. Typically, the<br />

anode was located at one of the ends of the <strong>cathode</strong> cyl<strong>in</strong>der.<br />

The <strong>cathode</strong> and anode were mounted <strong>in</strong>side a glass vacuum<br />

vessel filled with He. The operat<strong>in</strong>g pressure P had no significant<br />

<strong>in</strong>fluence on the experimental results provided that<br />

PD�3.0 Torr cm �here, D is the cyl<strong>in</strong>der diameter�. 1 Typical<br />

operat<strong>in</strong>g pressures were 0.1–0.2 Torr. The discharge was<br />

driven by a pulse generator with a pulse duration of 2 �s.<br />

The discharge current studied was <strong>in</strong> the range 5–50 A. The<br />

oscillations <strong>in</strong> the current appeared when the discharge current<br />

was above 6 A. In order to separate the average and <strong>rf</strong><br />

components of the discharge current a simple LC filter was<br />

used. A variable load resistor R was placed <strong>in</strong> series with the<br />

capacitor C �see Fig. 1�. The cutoff frequency of the filter<br />

was chosen to be �5 MHz, so that it was transparent to the<br />

2 �s pulse. The <strong>rf</strong> oscillations �which were above 20 MHz�<br />

were coupled through the capacitor C to the load R. The <strong>rf</strong><br />

current through R was measured by a Rogovsky coil. A typical<br />

scope trace of the <strong>rf</strong> current is shown <strong>in</strong> the <strong>in</strong>sert to Fig.<br />

1. The voltage across the tube was measured us<strong>in</strong>g a resistive<br />

divider. In Fig. 2 we show the dependence of the tube voltage<br />

V a on the average discharge current I a . It is seen that<br />

V a grows up monotonically with I a . For the range of I a<br />

between 5 and 50 A, the voltage V a varied just between 350<br />

a� Electronic mail: phr01ya@technion.technion.ac.il<br />

and 600 V. The voltages measured for different tube diameters<br />

and pressures were approximately the same.<br />

The dependence of the amplitude of the <strong>rf</strong> current I R<br />

through the load on the discharge current I a for two different<br />

<strong>cathode</strong> diameters and two different values of R are shown <strong>in</strong><br />

Fig. 3. It is seen that I R grows up monotonically with I a and<br />

under certa<strong>in</strong> conditions, namely a low value of R and a large<br />

<strong>cathode</strong> diameter, I R becomes closer to I a . When R is<br />

shorted, I R becomes comparable to I a , which is the same as<br />

the situation described <strong>in</strong> Ref. 1. In Fig. 4 we show the<br />

dependence of I R on the load resistance R for particular values<br />

of I a and <strong>cathode</strong> diameter. It is seen that I a decreases<br />

with <strong>in</strong>creas<strong>in</strong>g R. For different values of I a and <strong>cathode</strong><br />

diameters we obta<strong>in</strong>ed a similar behavior. From the data <strong>in</strong><br />

Fig. 4 it is easy to estimate the <strong>in</strong>ternal resistance R i of the<br />

present <strong>hollow</strong>-<strong>cathode</strong> <strong>rf</strong> generator device. We f<strong>in</strong>d<br />

R i�120 � for I a�38 A and 8.6 cm <strong>cathode</strong> diameter. The<br />

value of R i does not depend significantly on either I a or the<br />

<strong>cathode</strong> diameter. For example, for I a�15 A and 6.2 cm<br />

<strong>cathode</strong> diameter we get R i�100 �.<br />

It has been shown 1 that the oscillation frequency <strong>in</strong>creases<br />

either when the discharge current goes up or when<br />

the <strong>cathode</strong> diameter is reduced. We note that the value of<br />

the load resistance had no effect on the oscillation frequency.<br />

However, for a high value of the load resistance a slight<br />

<strong>in</strong>crease <strong>in</strong> the discharge current was needed to start the os-<br />

FIG. 1. Experimental apparatus. �1� Cathode cyl<strong>in</strong>der with 8.6 or 6.2 cm<br />

diameter; �2� anode; �3� 2 �H <strong>in</strong>ductor; �4� 660 pF capacitor; �5� load<br />

resistor; �6� Rogovsky coil; �7� typical scope trace of the <strong>rf</strong> current pass<strong>in</strong>g<br />

through the load resistor �sensitivity 5 A/div, time base 40 ns/div�.<br />

Appl. Phys. Lett. 66 (10), 6 March 1995 0003-6951/95/66(10)/1193/3/$6.00 © 1995 American Institute of Physics<br />

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1193


FIG. 2. Dependence of the tube voltage on the average discharge current.<br />

FIG. 3. Dependence of the peak <strong>rf</strong> current through the load on the average<br />

discharge current: �1� for 8.6 cm tube, 23 � load; �2� for 8.6 cm tube, 82 �<br />

load; �3� for 6.2 cm tube, 23 � load.<br />

FIG. 4. Dependence of the peak <strong>rf</strong> current through the load on the load<br />

resistance for 8.6 cm tube and 38 A discharge current.<br />

FIG. 5. Dependence of the <strong>rf</strong> <strong>power</strong> <strong>in</strong> the load �a� and of the efficiency �b�<br />

on the average discharge current: �1� for 8.6 cm tube, 82 � load; �2� for 8.6<br />

cm tube, 23 � load; and �3� for 6.2 cm tube, 23 � load.<br />

FIG. 6. Dependence of the <strong>rf</strong> <strong>power</strong> <strong>in</strong> the load �a� and of the efficiency �b�<br />

on the load resistance for 8.6 cm tube and 38 A discharge current.<br />

1194 Appl. Phys. Lett., Vol. 66, No. 10, 6 March 1995 Arbel et al.<br />

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cillations. For example, when R�80 �, the oscillations<br />

started from Ia�10 A, compared to Ia�6 A for R�10 �.<br />

Know<strong>in</strong>g the peak <strong>rf</strong> current IR through the load and its<br />

resistance R, it is easy to calculate the output <strong>rf</strong> <strong>power</strong>; WR �I R<br />

2 R/2. A graph of WR as a function of I a is shown <strong>in</strong> Fig.<br />

5�a� for two different <strong>cathode</strong> diameters and two different<br />

values of R. As it is seen, the <strong>rf</strong> <strong>power</strong> grows up monotonically<br />

for both diameters and for both values of R. From Fig.<br />

2, for each value of I a one can obta<strong>in</strong> the dc <strong>power</strong> W<br />

�V aI a which drives the discharge. The ratio W R /W, which<br />

is the efficiency of this device as an <strong>rf</strong> generator, is shown <strong>in</strong><br />

Fig. 5�b� as a function of I a for the same values of R and<br />

diameters. It is seen that this ratio decreases as I a grows up.<br />

Figs. 6�a� and 6�b� show, respectively, the output <strong>rf</strong> <strong>power</strong><br />

and the efficiency versus the load resistance, for certa<strong>in</strong> values<br />

of discharge current and <strong>cathode</strong> diameter. It is seen that<br />

both the <strong>rf</strong> <strong>power</strong> and the efficiency are maximal at about<br />

120 �. Similar curves, with a maximum at about the same<br />

place, were obta<strong>in</strong>ed for different values of discharge current<br />

<strong>in</strong> the <strong>in</strong>vestigated range of 10–45 A. Note that the maximal<br />

<strong>power</strong> occurs when the value of the load resistance R is close<br />

to that of the <strong>in</strong>ternal <strong>rf</strong> resistance R i .<br />

To conclude, the present very simple device can be used<br />

as a new k<strong>in</strong>d of a pulsed <strong>rf</strong> <strong>power</strong> generator, with an output<br />

<strong>power</strong> of 4 –5 kW and efficiency of about 25%. This efficiency<br />

is comparable to that of conventional <strong>rf</strong> <strong>power</strong> generators.<br />

The present results have been obta<strong>in</strong>ed without optimization<br />

of the device so more efficiency and <strong>power</strong> can, <strong>in</strong><br />

fact, be expected. The advantages of this device are simplicity<br />

and very low cost. F<strong>in</strong>ally, we also note that this device<br />

has an <strong>in</strong>stantaneous start<strong>in</strong>g which is an advantage over<br />

conventional <strong>power</strong>ful hot-<strong>cathode</strong> electron tubes.<br />

This research was supported <strong>in</strong> part by Technion V. P. R.<br />

Fund-Harry Werksman Research Fund.<br />

1<br />

D. Arbel, Z. Bar-Lev, J. Felste<strong>in</strong>er, A. Rosenberg, and Ya. Z. Slutsker,<br />

Phys. Rev. Lett. 71, 2919 �1993�.<br />

2<br />

R. L. Stenzel, Phys. Rev. Lett. 60, 704 �1988�; Phys. Fluids B 1, 2273<br />

�1989�.<br />

3<br />

Yu. Ya. Brodskii, S. I. Nechuev, Ya. Z. Slutsker, A. M. Feig<strong>in</strong>, and G. M.<br />

Fraiman, Fiz. Plazmy 15, 1187 �1989� �Sov. J. Plasma Phys. 15, 688<br />

�1989��.<br />

Appl. Phys. Lett., Vol. 66, No. 10, 6 March 1995 Arbel et al.<br />

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1195

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