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Robust Optimization: Design in MEMS - University of California ...

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48Bibliography[1] What is <strong>MEMS</strong> Technology? <strong>MEMS</strong>net. November 27, 2002.[2] Petersen, Kurt E. “Silicon as a Mechanical Material.” Proceed<strong>in</strong>gs <strong>of</strong> theIEEE vol. 70 no. 5 (May 1982): pp. 420-457.[3] Tang, W.C. PhD Thesis, <strong>University</strong> <strong>of</strong> <strong>California</strong>, Berkeley, CA (1990).[4] Maluf, Nadim. An Introduction to Microelectromechanical Systems Eng<strong>in</strong>eer<strong>in</strong>g.Boston: Artech House, 2000.[5] Pister, Kris. Introduction to <strong>MEMS</strong> <strong>Design</strong> and Fabrication. EECS 245Reader <strong>University</strong> <strong>of</strong> <strong>California</strong>, Berkeley, CA (Fall 2001). pp. 9-45.[6] Sharpe, W. N., K.T. Turner, and R.L. Edwards. “Tensile Test<strong>in</strong>g <strong>of</strong> Polysilicon.”Experimental Mechanics vol. 39 no. 3 (September 1999): pp. 162-170.[7] Nocedal, Jorge, and Stephen J. Wright. Numerical <strong>Optimization</strong>. New York:Spr<strong>in</strong>ger-Verlag, 1999.[8] Strang, Gilbert. L<strong>in</strong>ear Algebra and its Applications. Orlando: HarcourtBrace Jovanovich College Publishers, 1988.[9] Rao, S<strong>in</strong>giresu S. Eng<strong>in</strong>eer<strong>in</strong>g <strong>Optimization</strong>. New York: John Wiley & Sons,Inc., 1996.

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