Silicon-based solar cells Characteristics and production processes ...
Silicon-based solar cells Characteristics and production processes ...
Silicon-based solar cells Characteristics and production processes ...
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<strong>Silicon</strong>-<strong>based</strong> <strong>solar</strong> <strong>cells</strong> – characteristics <strong>and</strong> <strong>production</strong> <strong>processes</strong><br />
Fig. 17. Scheme of the RPECVD method of deposition a Si x N y :H layer formed as a result of<br />
decomposition of silane SiH 4 <strong>and</strong> ammonia NH 4 , in which only the ammonia is decomposed<br />
into plasma, in the generator located outside the reaction chamber.<br />
Fig. 18. Scheme of a plate section after the elimination of phosphosilicate glass (a) <strong>and</strong> after<br />
the deposition of a hydrogenated silicon nitride Si x N y :H (b).<br />
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