Quanta Morphologi Datasheet - FEI Company
Quanta Morphologi Datasheet - FEI Company
Quanta Morphologi Datasheet - FEI Company
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P R O D U C T D A T A<br />
Essential specifications<br />
Electron optics<br />
• High resolution field emission SEM column optimized for<br />
high brightness, high current<br />
• 45° objective lens geometry with through the lens<br />
differential pumping and heated objective apertures<br />
• Accelerating voltage: 200 V to 30 kV<br />
• Probe current: up to 100 nA, continuously adjustable<br />
Electron beam resolution<br />
• High vacuum<br />
- 0.8 nm at 30 kV (STEM)<br />
- 1.2 nm at 30 kV (SE)<br />
- 2.5 nm at 30 kV (BSE)<br />
- 3.0 nm at 1 kV (SE)<br />
• Low vacuum<br />
- 1.5 nm at 30 kV (SE)<br />
- 2.5 nm at 30 kV (BSE)<br />
- 3.0 nm at 3 kV (SE)<br />
• Extended vacuum mode (ESEM)<br />
- 1.5 nm at 30 kV (SE)<br />
Detectors<br />
• Symmetrical low vacuum detector<br />
• Everhardt-Thornley SED<br />
• Low vacuum SED (LVD)<br />
• Gaseous SED (GSED) - used in ESEM mode<br />
• IR-CCD<br />
• Solid-state BSED<br />
• Gaseous analytical BSED (GAD)<br />
• STEM detector<br />
• Scintillator BSED/CLD<br />
• Gaseous BSED<br />
Vacuum system<br />
• 1 x 240 l/s TMP, 2 x PVP<br />
• Patented through the lens differential pumping<br />
• Beam gas path length: 10 mm or 2 mm<br />
Chamber<br />
• 284 mm left to right<br />
• 10 mm analytical working distance<br />
• 8 ports<br />
• EDX take-off: 35°<br />
Stage<br />
• Eucentric goniometer stage<br />
• X - Y = 50 mm<br />
• Z = 50 mm (25 mm motorized)<br />
• T = -15° to +75°<br />
• R = 360° continuous<br />
• Repeatability: 2 µm<br />
System control<br />
• Windows® XP SP 2, keyboard, optical mouse<br />
• Image display: 19 inch LCD, SVGA 1280 x 1024<br />
Image processor<br />
• Up to 4096 x 3536 pixels<br />
System options<br />
• Support PC<br />
• Multi-functional control panel<br />
• Image archive software<br />
• Software controlled Peltier cooled specimen stage<br />
• Software controlled WETSTEM system<br />
• Software controlled 1000 °C and 1500 °C heating stage<br />
• Remote control software<br />
• Video printer<br />
• Specimen holder kit<br />
• EDS<br />
• WDS<br />
• EBSD<br />
• E-beam litho package<br />
• CL system
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