Focused ion beam technology, capabilities and ... - FEI Company

More documents

Recommendations

Info

16 Figure 42: FIB machined photonic array with customized pitch. 30 micron field of view. Time to production is 15 minutes. Figure 45: SE image made with the low current ion beam, showing a piezoelectric Lithium Niobate tip with FIB deposited electrodes and connections. AFM (SPM) If the standard methods of nano-device research are no longer applicable, the rules can be changed and the toolset customized for the new challenges ahead. Scanning probe microscopes rely on the characteristics of the probes they use. This single part of an AFM (SPM) has not changed a lot since the technique was invented. By harnessing the ability of focused ion beam techniques to customize all the characteristics of the tips individually, the true capabilities of AFM can be used for the first time. It is now possible to change the tip profile, the tip material, or the tip conductivity to allow it to measure Figure 43: Image of a sapphire tip sharpened locally by FIB milling. This ‘Super tip’ on the tip is extremely sharp, as is shown by comparing the two radii. the data you need. Instead of measuring the topography of the surface, measure the forces exerted during a catalytic reaction, or the attraction between magnetic domains, or the effects of applying a voltage to an individual muscle fiber. The ability to rapidly adapt and innovate is distilled into one single instrumental solution. The FIB will expand the capabilities of the AFM by allowing customized tip modification that suits to discover the information required. An example is a modification of the light emitting tip of the scanning near-field optical microscope, one of the variants of the AFM. Structural Nano-Prototyping Creating structures at the micro to nano scale relies on processes that operate with the tightest control standards. To understand whether the behavior of a structure within a certain environment is attributable to its chemistry, its electrical or magnetic characteristics, its dynamic behavior or even just its shape can be challenging and time consuming. The structure itself may not be trivial Figure 44: SE image made with FIB showing a silicon AFM tip machined to be a super-tip, with very small radius for high resolution AFM imaging. to create, and understanding the failure modes of unique sites seems impossible using conventional techniques. The direct etch/deposition combination of FIB combined with its digitally addressed patterning system provides a nano-prototyping engine with exciting new capabilities to assist the researcher in nano technology. In fact, the focused ion beam system operates at micro and nano scale and hence can also be used to actually create the structures required, in addition to its analytical capability. New higher precision control and structural analysis have become a new routine using FIB. Figure 46: Optical image of the extracted TEM foil on a TEM grid. The vertical interface between resin and ceramic matrix is clearly visible.
Figure 47: SE image of Pt group material. TEM lamella in preparation. Imaging with FIB perpendicular to the surface. Industrial Process Solutions The length of time it takes to confirm that a fabrication process works normally or, more importantly, to understand the reasons why it is not working properly, has a price. It can be measured in lost production, in customer purchasing confidence and in simple product functionality. Minimizing the period of uncertainty means cost savings, and spending money to save money is the easiest way to drive innovation and boost competitiveness. The rapid 3D analysis capabilities and the direct applicability and robustness of the FIB technique lends itself uniquely to industrial applications. Sample preparation for FIB limits itself to ensuring the sample can withstand the vacuum in the chamber. Sometimes samples for microscopy need to be cleaned up to remove an oxide layer or a hydro-carbon contamination on top. For FIB these layers can be removed in-situ by the beam itself, avoiding any preparation of this kind. These processes are only done locally at the site of the analysis leaving the rest of the sample in its original state, and this can be useful for other subsequent tests. FIB technology already assists industrial research in many leading analysis laboratories: • within nuclear research for the ability to analyze and manipulate samples • without any mechanical preparation • within the polymer industry for artifact-free nonmechanical 3D investigations • within the metallurgy industry for zero damage inspec- tion of corrosion products, grain information well below 1µm and true 3D surface coating analysis • within composite materials manufacturing because of the ability to image and cut materials with different hardness with zero artifacts • within the ceramics industry for 3D analysis and ease of handling of hard, insulating materials. The results shown in this brochure are from metallurgy samples, composite samples and polymer samples, each showing FIB 3D cross-section analysis or TEM sample preparation of a specific failure site, and each was done in less than one hour. Ion beam cross-sectioning can also be done both laterally and transversely at the same location, even on the same sub-micron feature, providing a level of immediate, site-specific information that is just not available with any other technique. Figure 48: FIB cross-section through an uncoated bi-phase polymer. This shows a mixing process failure in the molded polymer product. Insert: detailed view showing separation of polymer phases around air pockets. 17
Page 1: Focused ion beam technology, capabi
Page 4 and 5: Technology 4 Electrons replaced by
Page 6 and 7: 6 Useful signals As many signals ar
Page 8 and 9: 8 Anode Lens 1 Scan & Stig Coils El
Page 10 and 11: 10 Deposition As FIB technology is
Page 12 and 13: 12 Figure 21: Cantilever with proof
Page 14 and 15: Application examples 14 The New Dim
Page 18 and 19: 18 Figure 49: SE image made with io
Page 20: FEI Company World Headquarters and

Focused ion beam technology, capabilities and ... - FEI Company

You also want an ePaper? Increase the reach of your titles

Delete template?

Save as template?