Focused ion beam technology, capabilities and ... - FEI Company

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Figure 21: Cantilever with proof-mass
machined from a Si 2N 3 membrane.
Figure 22: Image of a spring, supporting the
proof-mass of a MEMS accelerometer. The
support spring has been weakened by ion
beam removal of half of the spring thickness.
Figure 23: Image of the spring, that has now
been strengthened with ion beam deposited
SiO 2.
Courtesy: “University of Birmingham, Research Centre
for Micro Engineering and Nano-technology.
Figure 24: Low magnification SE image of a
fungal infection in wood. This untreated
sample was imaged at low magnification and
low beam current for 30 minutes without
noticeable deterioration.
manufacturing process matures. New
product development can be ramped
up and product introduction cycles
shortened by including direct device
customization into the product
development process. Demonstrate
functioning devices and debug your
control systems while the production
process is fine-tuned. For example,
change the spring constant of an
accelerometer or simply create a new
structure in and on a thin film.
Optical MEMS
Check the structure, the robustness
and the failure mechanisms of optical
devices. Monitor the applied
process and maximize the yield for
cost effective production.
Routers, multiplexers, wave-guides
and transmission media all rely on
exact dimensions for their performance.
High aspect ratio microstructures
provide conventional top down
metrology solutions with unavoidable
physical restrictions. Only by
progressing to three-dimensional
characterization can a true understanding
of the manufacturing performance
be acquired.
The metrology of wave-guides can be
automated and process failures identified
and eliminated before costly
device yield is affected. The communication
bandwidth requirements for
optical devices are continuously
increasing and therefore process control
is becoming increasingly important.
Now the device producer can
switch to the enhanced control and
cost savings already enjoyed by the
semiconductor industry.
Figure 25: Image of a biopsy of bone material.
The biopsy-to-be is completely created by
FIB milling only.
Figure 26: Bone material biopsy after extraction.
Figure 27: An AFM tip, CVD gold coated and
then FIB machined to remove the gold on the
pyramid slope to leave only a gold tip at the
point of surface contact. Different bio-materials
can be grown here as they easily bind to
the gold and the forces exerted on this specimen
during subsequent interactions can be
directly monitored.