Quanta™ DualBeam™ and SEM Family Brief - FEI Company

a n y w a y y o u l o o k a t i t ,
f E i p r o v i d E s t h E w o r l d ’ s b E s t v i E w .
Seeing more comes easy
Easy to use, the Quanta family features a four-quadrant
image display that simultaneously provides surface
characterization and phase distribution through the live
imaging of secondary electron (SE) and back-scattered
electron (BSE) images. Switching imaging modes is as
simple as a single mouse click. And the Quanta user
interface offers embedded microanalysis to deliver results
in the shortest time possible. What’s more, the highly
versatile system can be equipped for further analysis
with techniques such as energy dispersive spectrometry
(EDS), wave dispersive x-ray spectrometry (WDS) and
electron backscattered diffraction (EBSD). The Quanta
field emission SEM (FEG-SEM) can also be equipped
with a scanning transmission electron microscopy (STEM)
detector for bright-field and dark-field imaging of
samples. Now you can enjoy fast and easy access to results
that simply aren’t possible with an optical microscope.
Fast, affordable cross-section capabilities
When you need to extend SEM characterization below
the surface, the Quanta 3D series complements your
existing characterization laboratory tools and extends
your applications range for three-dimensional character-
ization, transmission electron microscopy (TEM) sample
preparation and structural modification of sample surfaces
at the nanoscale. For sectioning, imaging, analyzing and
inspecting packaged parts or other back-end samples that
may be wet or dirty, the Quanta 3D is an ideal tool. A full
DualBeam (FIB/SEM) equipped with a tungsten electron
column, focused ion beam column and gas injector system,
the Quanta 3D offers a highly cost-effective and reliable
means of site-specific cross-sectioning, complex ion-beam
patterning, material deposition and etching, as well as the
imaging and analysis Quanta offers across the family.
Quanta FEG images of lead frames. The flexible imaging arrangement
allows imaging with more surface detail with the SE detector in
low-vacuum mode, then imaging of the phase distribution in low
vacuum with the BSE detector.
A faster return on your technology investment
By virtue of their quality components and functions, FEI
products such as those featured in the Quanta family, deliver
reliable, superior solutions that provide an exceptional return
on your technology investment. What’s more, a partnership
with FEI means enjoying the peace of mind that comes from
a long history of leading the industry with products that
provide the highest-quality characterization, analytic and
metrology data in the shortest amount of time. FEI remains
the only company offering the range of products necessary to
address all of the imaging and sample preparation needs of
today’s semiconductor lab. Now and in the future you can
count on FEI to provide the most innovative, cost-effective
solutions available for cross-sectional imaging, analysis and
sample preparation. Wherever you are on your technology
roadmap, FEI remains committed to helping you get
designs right the first time, get to market first and ramp
to volume fast.
See more at www.fei.com.
FEI Company
World Headquarters and
North American Sales
5350 NE Dawson Creek Drive
Hillsboro, OR 97124-5793 USA
Tel: +1 503 726 7500
Fax: +1 503 726 7509
e-mail: sales@feico.com
www.fei.com
European Sales
Tel: +31 40 27 66 768
Fax: +31 40 27 66 786
Asia-Pacific Sales
Tel: +65 6272 0050
Fax: +65 6272 0034
Japan Sales
Tel: +81 3-3740-0970
Fax: +81 3-3740-0975
©2006. We are constantly improving the performance of our products, so all
specifications are subject to change without notice. The FEI logo, Quanta, ESEM,
Magnum and DualBeam are trademarks of FEI Company.
03PB-FR0211