Quanta™ DualBeam™ and SEM Family Brief - FEI Company

a n y w a y y o u l o o k a t i t ,
f E i p r o v i d E s t h E w o r l d ’ s b E s t v i E w .
Right the first time
FiRst
First to market
Fast to volume
Quanta DualBeam
and SEM Family
Flexible Solutions for Sample
Imaging in Semiconductor Labs
The affordable SEM and DualBeam solution
Technologies, materials and samples are changing across
nodes at an ever-increasing rate, and so is the diagnostics
function in analytical labs. To win the race to volume, not
only do your analytical tools need to be reliable, they must
accommodate very different materials while collecting
more data in less time. Meanwhile, there is increasing
demand for nondestructive analysis and functionality
that can accommodate advanced analytical requirements
into the future. The Quanta family is ideally suited to go
beyond where optical microscopes fall short. Offering an
array of easy-to-use systems, the Quanta family can also
deliver cost-effective sectioning, imaging, analyzing and
inspecting for a variety of samples. Advanced, flexible,
highly affordable imaging and analytical solutions come
easy with Quanta.
Enjoy these key benefits across the family:
• Fast and simple imaging for complete structural analysis
• Seamless “point-and-click” transition between imaging modes
• Multi-vacuum mode enables in-situ, dynamic experiments
and imaging and analysis on any sample
• Accurate, efficient and easy-to-use automation software
• Speed your time to answer by eliminating the need for
sample preparation
• Versatile system allows a wide range of accessories for
analysis and sample manipulation

p r o d u c t f a m i l y d a t a
Applications:
Failure Analysis
Cross section
High-res FIB milling and imaging
HR-SEM imaging
General purpose SEM imaging
Low damage TEM sample preparation
Wet sample/packaging analysis
TEM prep automation
X-Ray analysis
CAD navigation
Probe compatible
Metal deposition
Metal etch
Dielectric etch
Dielectric deposition
STEM detector
EMI active cancellation
Circuit Edit
Front-side edits
Back-side edits
Electrical feed-through for probes
Characterization and Analysis
STEM (low kV)
Standard
Some capabilites
Optional
The Quanta series is capable of generating and collecting all available
information from any type of sample material. The Quanta 3D includes
the capability of an ion column for ion beam imaging, material
removal and material deposition.
Versatile sample handling
FEI developed the Quanta family to provide maximum
imaging and microanalysis data on a wide range of
samples, with or without preparation. In Quanta, you have
a single tool with capabilities that used to require several
systems. Making difficult samples suitable for conventional,
high-vacuum scanning electron microscopy (SEM)
environments is time consuming and can lead to
unacceptable delays in the data-collection process. Across
the family, Quanta features three imaging modes – high
vacuum, low vacuum and environmental scanning electron
microscopy (ESEM) – to significantly reduce your time to
data by enabling analysis for the most difficult samples with
one tool. The Quanta family also allows you to conduct
analysis while leaving specimens intact for possible further
investigation to complement the diagnostics dataset. You
get repeatable, reliable results, ensuring the highest degree
of accuracy from your data. Whatever your specific needs,
you can predict a significant return on your investment,
thanks to Quanta’s versatile sample handling.

Product ESEM Mode
Low-Vacuum
Mode
High-Vacuum
Mode
SEM
Technology
p r o d u c t f a m i l y d a t a
FIB
Technology
Stage
Travel
Quanta 200 3.5 nm @ 30 kV 15 nm @ 3 kV 3.5 nm @ 30 kV Tungsten 50 mm
Quanta 400 3.5 nm @ 30 kV 15 nm @ 3 kV 3.5 nm @ 30 kV Tungsten 100 mm
Quanta 600 3.5 nm @ 30 kV 15 nm @ 3 kV 3.5 nm @ 30 kV Tungsten 150 mm
Quanta 3D 200 3.5 nm @ 30 kV 15 nm @ 3 kV 3.5 nm @ 30 kV Tungsten Magnum 50 mm
Quanta 200 FEG 2 nm @ 30 kV 3.5 nm @ 3 kV 3.5 nm @ 30 kV FEG 50 mm
Quanta 400 FEG 2 nm @ 30 kV 3.5 nm @ 3 kV 2 nm @ 30 kV FEG 100 mm
Quanta 600 FEG 2 nm @ 30 kV 3.5 nm @ 3 kV 2 nm @ 30 kV FEG 150 mm
Quanta used to investigate contamination for quality control
The Quanta FEG is capable of large field-of-view imaging and the
low-vacuum mode enables the device to be kept uncoated during
the analysis
Package bump cross-sectioned in Quanta 3D and imaged with
electron beam
High-magnification image of transistor showing versatility of
Quanta FEG

a n y w a y y o u l o o k a t i t ,
f E i p r o v i d E s t h E w o r l d ’ s b E s t v i E w .
Seeing more comes easy
Easy to use, the Quanta family features a four-quadrant
image display that simultaneously provides surface
characterization and phase distribution through the live
imaging of secondary electron (SE) and back-scattered
electron (BSE) images. Switching imaging modes is as
simple as a single mouse click. And the Quanta user
interface offers embedded microanalysis to deliver results
in the shortest time possible. What’s more, the highly
versatile system can be equipped for further analysis
with techniques such as energy dispersive spectrometry
(EDS), wave dispersive x-ray spectrometry (WDS) and
electron backscattered diffraction (EBSD). The Quanta
field emission SEM (FEG-SEM) can also be equipped
with a scanning transmission electron microscopy (STEM)
detector for bright-field and dark-field imaging of
samples. Now you can enjoy fast and easy access to results
that simply aren’t possible with an optical microscope.
Fast, affordable cross-section capabilities
When you need to extend SEM characterization below
the surface, the Quanta 3D series complements your
existing characterization laboratory tools and extends
your applications range for three-dimensional character-
ization, transmission electron microscopy (TEM) sample
preparation and structural modification of sample surfaces
at the nanoscale. For sectioning, imaging, analyzing and
inspecting packaged parts or other back-end samples that
may be wet or dirty, the Quanta 3D is an ideal tool. A full
DualBeam (FIB/SEM) equipped with a tungsten electron
column, focused ion beam column and gas injector system,
the Quanta 3D offers a highly cost-effective and reliable
means of site-specific cross-sectioning, complex ion-beam
patterning, material deposition and etching, as well as the
imaging and analysis Quanta offers across the family.
Quanta FEG images of lead frames. The flexible imaging arrangement
allows imaging with more surface detail with the SE detector in
low-vacuum mode, then imaging of the phase distribution in low
vacuum with the BSE detector.
A faster return on your technology investment
By virtue of their quality components and functions, FEI
products such as those featured in the Quanta family, deliver
reliable, superior solutions that provide an exceptional return
on your technology investment. What’s more, a partnership
with FEI means enjoying the peace of mind that comes from
a long history of leading the industry with products that
provide the highest-quality characterization, analytic and
metrology data in the shortest amount of time. FEI remains
the only company offering the range of products necessary to
address all of the imaging and sample preparation needs of
today’s semiconductor lab. Now and in the future you can
count on FEI to provide the most innovative, cost-effective
solutions available for cross-sectional imaging, analysis and
sample preparation. Wherever you are on your technology
roadmap, FEI remains committed to helping you get
designs right the first time, get to market first and ramp
to volume fast.
See more at www.fei.com.
FEI Company
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www.fei.com
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©2006. We are constantly improving the performance of our products, so all
specifications are subject to change without notice. The FEI logo, Quanta, ESEM,
Magnum and DualBeam are trademarks of FEI Company.
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