Bellows- sealed gate valves
Bellows- sealed gate valves
Bellows- sealed gate valves
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Installation<br />
elements<br />
Valves<br />
<strong>Bellows</strong><strong>sealed</strong><br />
<strong>gate</strong><br />
<strong>valves</strong><br />
Manually actuated - CF-F<br />
Flange sizes from<br />
DN 40 CF-F to DN 200 CF-F<br />
<strong>Bellows</strong><strong>sealed</strong><br />
<strong>gate</strong><br />
<strong>valves</strong><br />
For UHV applications in industry<br />
and research<br />
Seal: Stainless steel bellows feedthrough<br />
SVV = Gate valve<br />
HF/HM = Manually actuated<br />
Dimensions<br />
DN 40<br />
DN 63<br />
DN 100<br />
72<br />
40<br />
16<br />
45<br />
58.7<br />
42<br />
48.3<br />
70<br />
82 73<br />
198 55<br />
70 77<br />
83<br />
70<br />
115<br />
11<br />
57 192 184<br />
408 180<br />
70 77<br />
83<br />
70<br />
145<br />
9<br />
73 247 184<br />
462 220<br />
6xM6<br />
35 7 76<br />
27<br />
112<br />
27<br />
142<br />
113.5<br />
70<br />
77.4<br />
82.5<br />
8xM8<br />
92.1<br />
151.6<br />
100<br />
115.5<br />
120.65<br />
16xM8<br />
130.2<br />
70<br />
13 („51”)<br />
70<br />
13 („51”)<br />
SVV 040 HM SVV 063 HF SVV 100 HF<br />
DN 160<br />
DN 200<br />
70<br />
70 77<br />
83<br />
ø10 DN 160/200<br />
200<br />
25<br />
99 336 184<br />
552 290<br />
80<br />
90 94<br />
103<br />
ø10 DN 160/200<br />
250<br />
38.5<br />
125 430 200<br />
660 350<br />
27<br />
192<br />
35<br />
240<br />
202.4<br />
150<br />
166<br />
171.45<br />
181<br />
20xM8<br />
70<br />
13 („51”)<br />
253.2<br />
200<br />
217<br />
222.3<br />
231.8<br />
24xM8<br />
80<br />
13 („51”)<br />
SVV 160 HF<br />
SVV 200 HF<br />
Page<br />
Page<br />
720<br />
720<br />
www.pfeiffer-vacuum.net<br />
www.pfeiffer-vacuum.net
Technical data SVV 040 HM SVV 063 HF SVV 100 HF<br />
Flange (in) DN 40 CF-F DN 63 CF-F DN 100 CF-F<br />
Flange (out) DN 40 CF-F DN 63 CF-F DN 100 CF-F<br />
Actuator Hand wheel Hand wheel Hand wheel<br />
Bakeout temperature: Valve open, under vacuum 250 °C 250 °C 250 °C<br />
Bakeout temperature: Valve closed 200 °C 200 °C 200 °C<br />
Tightness: Housing 5·10 -10 mbar l/s 5·10 -10 mbar l/s 5·10 -10 mbar l/s<br />
Tightness: Valve seat 1·10 -9 mbar l/s 1·10 -9 mbar l/s 1·10 -9 mbar l/s<br />
Seal: Housing Metal Metal Metal<br />
Seal: Valve seat FPM FPM FPM<br />
Pressure max. 2 bar 1.6 bar 1.6 bar<br />
Pressure min. 1·10 -10 mbar 1·10 -10 mbar 1·10 -10 mbar<br />
Feedthrough <strong>Bellows</strong> <strong>Bellows</strong> <strong>Bellows</strong><br />
Housing Stainless steel Stainless steel Stainless steel<br />
Weight 1.5 kg 9 kg 12 kg<br />
Conductance for molecular flow 220 l/s 600 l/s 1700 l/s<br />
Can be opened to a pressure difference of 3·10 1 mbar 3·10 1 mbar 3·10 1 mbar<br />
Service life 50000 cycles 50000 cycles 50000 cycles<br />
Valve plate Stainless steel Stainless steel Stainless steel<br />
Order number<br />
<strong>Bellows</strong>-<strong>sealed</strong> <strong>gate</strong> <strong>valves</strong> PF F51 031 PF F61 031 PF F71 031<br />
Technical data SVV 160 HF SVV 200 HF<br />
Flange (in) DN 160 CF-F DN 200 CF-F<br />
Flange (out) DN 160 CF-F DN 200 CF-F<br />
Actuator Hand wheel Hand wheel<br />
Bakeout temperature: Valve open, under vacuum 250 °C 250 °C<br />
Bakeout temperature: Valve closed 200 °C 200 °C<br />
Tightness: Housing 5·10 -10 mbar l/s 5·10 -10 mbar l/s<br />
Tightness: Valve seat 1·10 -9 mbar l/s 1·10 -9 mbar l/s<br />
Seal: Housing Metal Metal<br />
Seal: Valve seat FPM FPM<br />
Pressure max. 1.6 bar 1.6 bar<br />
Pressure min. 1·10 -10 mbar 1·10 -10 mbar<br />
Feedthrough <strong>Bellows</strong> <strong>Bellows</strong><br />
Housing Stainless steel Stainless steel<br />
Weight 18 kg 28 kg<br />
Conductance for molecular flow 6000 l/s 12000 l/s<br />
Can be opened to a pressure difference of 3·10 1 mbar 3·10 1 mbar<br />
Service life 50000 cycles 50000 cycles<br />
Valve plate Stainless steel Stainless steel<br />
Steuergeräte<br />
Order number<br />
<strong>Bellows</strong>-<strong>sealed</strong> <strong>gate</strong> <strong>valves</strong> PF F81 031 PF F91 031<br />
Valves<br />
www.pfeiffer-vacuum.net Page Page 721 721