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Three - University of Arkansas Physics Department

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APPLIED PHYSICS LETTERS VOLUME 77, NUMBER I8 3n 0('1'0[31 R lr100<br />

Thermal annealing recovery <strong>of</strong> intersubband transitions in proton-irradiated .<br />

.<br />

.a<br />

GaAsIAIGaAs multiple quantum wells<br />

F. Hegeler and M. 0. ~anasreh~)<br />

Deparlmenl <strong>of</strong>'Electriccr1 and Computer Engineering, Universiy qf'iVew h.le,rico, Albuquercpe,<br />

:Vew Mexico 87/31<br />

C. Morath<br />

Air Force Research Lab (.4FRL/VSSS), 3550 Aber-&en Avenue SE, El& 426, Kirtland AFB.<br />

New .blexico 871 17<br />

P. Ballet, H. Yang, and G. J. Salarno<br />

Depczrtment <strong>of</strong> <strong>Physics</strong>, Crniversiy 0/'.4rkansas. Fqetteville, drk[~nsas 72701<br />

H. H. Tan and Chennupati Jagadish<br />

.<br />

Departnrrtit qf'Elsctronic hlaterials Engirreer-irlg, Reser~rch School <strong>of</strong> Physictrl Sciences ond Engineering,<br />

.4ustraliun rVutionc11 Universit): Cunberra ACT OOO. Austrcrlic~<br />

(Received 12 May 2000; accepted for publication I September 2000)<br />

Intersubband transitions in 1 MeV proton-irradiated GaAs/AIGaAs multiple quantum wells were<br />

studied using an optical absorption technique and isochronal thermal annealing. The intersubband<br />

transitions were completely depleted in sa~nplcs irradiated with doses as low as 4 X l0I4 cm-I. Morc<br />

than 80% recovery <strong>of</strong> these depleted transitions was achieved after the samples were thermally<br />

anncaled at teniperatures lcss than 650 "C. The total integrated areas and peak position energies <strong>of</strong><br />

the intersubband transitions in irradiated and unirradiated samples were monitored as a hnction <strong>of</strong><br />

annealing temperature. It was noted that the recovery <strong>of</strong> the depleted intersubband transitions in<br />

irradiated samples depend on the irradiation dose and thermal annealing temperature. O 2000<br />

A4merican Itrstitzite <strong>of</strong> <strong>Physics</strong>. [S0003-695 1 (00)00444-71<br />

.<br />

Irradiation induced atomic displacement in semiconductors<br />

affccts both material properties and devicc performance.<br />

Rcccntly, the proton irradiation effect on the intersubband<br />

transitions in GaAs/AIGaAs multiple quantum wells was<br />

reported.' It was shown that the intensity <strong>of</strong> the intersubband<br />

transitions is decreased as the proton irradiation dose is increased.<br />

This was explained in terms <strong>of</strong> trapping <strong>of</strong> the twodimensional<br />

electron gas in the GaAs quanh~m wells by<br />

irradiation-induced defects such as vacancies, antisites, and<br />

more complex defects. A reduction <strong>of</strong> the intensity <strong>of</strong> the<br />

intersubband transitions in electron irradiated GaAsIAIGaAs<br />

multiple quantum wells was also observed.'<br />

In this letter, we report on the themla! recovery <strong>of</strong> depleted<br />

intersubband transitions in proton irradiated GaAs/<br />

AlGaAs ~nultiple quantum well samples. The intersubband<br />

transitions were nieasured bcforc and after proton irradiation<br />

and it was observed that the intcrsubband transitions wcre<br />

co~npletcly washed out in samples irradiated with 1 MeV<br />

protons and doses higher than 4 X 10'~cm-'. Upon isochronal<br />

thermal annealing, these transitions were observed to recover<br />

at annealing temperatures (To) as low as 250°C in<br />

samples that received low irradiation doses. Both the total<br />

integrated areas and the peak position energies <strong>of</strong> the intersubband<br />

transitions in irradiated samples and in onereference<br />

sample were measured as a function <strong>of</strong> To. The T,<br />

two-dimensional electron gas. The behav~ui , . ' ":' rvdl ;n~ugrated<br />

areas and the peak position energies <strong>of</strong> tl-.A: !.ILL rs~; 3-<br />

band transitions will be explained in terms <strong>of</strong> energy lcvel<br />

shifts due to interdiffusion.<br />

Two nlultiple quantum well structures used in !his study<br />

were grown by the molecular-beam epitaxy technique on a<br />

semi-insulating GaAs substrate with a 0.5 pm thick GaAs<br />

buffer layer and an - 200 A thick GaAs cap layer.' he structures<br />

<strong>of</strong> the two wafers are shown in Table I. Thc barriers <strong>of</strong><br />

the wafer labeled "A" are bulk AlGaAs. Wllilc t!~c barricks<br />

<strong>of</strong> the wafer labeled "B" are made <strong>of</strong> five periods AICin!\s/<br />

GaAs superlattices. The well regions were Si-dopcil {[Si]<br />

= 2X lot8 ~rn-~}. Several samples were cut and ~rradiated<br />

with diffcrcnt doscs <strong>of</strong> 1 MeV proton beams. Ttrc infrared<br />

absorption spectra were recorded at the Brewsterfs anglc ~f<br />

GaAs (73") from the normal using a B0ME.M 1:ouriiir:<br />

transform interferometer in conjunction with n ~ont~nutirs<br />

flow cryostat. The te~npcraturc was controlled ~\.itl!in I .O'K<br />

and the spectra were measured at either 77 or 300 K. Furnace<br />

TABLE 1. Structures <strong>of</strong> the wafcrs used in the present stu~);. ~ iwater<br />

l<br />

wcre Si doped in the well ([Si]=3.0X 1O1%rn-I). The bariicr inarcrinl <strong>of</strong><br />

wafer "H" is made <strong>of</strong> AlGaAslGaAs superlanice. . .<br />

--<br />

Wafer A 11 ,<br />

Wcll thickness (A) 75

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