Three - University of Arkansas Physics Department
Three - University of Arkansas Physics Department
Three - University of Arkansas Physics Department
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APPLIED PHYSICS LETTERS VOLUME 77, NUMBER I8 3n 0('1'0[31 R lr100<br />
Thermal annealing recovery <strong>of</strong> intersubband transitions in proton-irradiated .<br />
.<br />
.a<br />
GaAsIAIGaAs multiple quantum wells<br />
F. Hegeler and M. 0. ~anasreh~)<br />
Deparlmenl <strong>of</strong>'Electriccr1 and Computer Engineering, Universiy qf'iVew h.le,rico, Albuquercpe,<br />
:Vew Mexico 87/31<br />
C. Morath<br />
Air Force Research Lab (.4FRL/VSSS), 3550 Aber-&en Avenue SE, El& 426, Kirtland AFB.<br />
New .blexico 871 17<br />
P. Ballet, H. Yang, and G. J. Salarno<br />
Depczrtment <strong>of</strong> <strong>Physics</strong>, Crniversiy 0/'.4rkansas. Fqetteville, drk[~nsas 72701<br />
H. H. Tan and Chennupati Jagadish<br />
.<br />
Departnrrtit qf'Elsctronic hlaterials Engirreer-irlg, Reser~rch School <strong>of</strong> Physictrl Sciences ond Engineering,<br />
.4ustraliun rVutionc11 Universit): Cunberra ACT OOO. Austrcrlic~<br />
(Received 12 May 2000; accepted for publication I September 2000)<br />
Intersubband transitions in 1 MeV proton-irradiated GaAs/AIGaAs multiple quantum wells were<br />
studied using an optical absorption technique and isochronal thermal annealing. The intersubband<br />
transitions were completely depleted in sa~nplcs irradiated with doses as low as 4 X l0I4 cm-I. Morc<br />
than 80% recovery <strong>of</strong> these depleted transitions was achieved after the samples were thermally<br />
anncaled at teniperatures lcss than 650 "C. The total integrated areas and peak position energies <strong>of</strong><br />
the intersubband transitions in irradiated and unirradiated samples were monitored as a hnction <strong>of</strong><br />
annealing temperature. It was noted that the recovery <strong>of</strong> the depleted intersubband transitions in<br />
irradiated samples depend on the irradiation dose and thermal annealing temperature. O 2000<br />
A4merican Itrstitzite <strong>of</strong> <strong>Physics</strong>. [S0003-695 1 (00)00444-71<br />
.<br />
Irradiation induced atomic displacement in semiconductors<br />
affccts both material properties and devicc performance.<br />
Rcccntly, the proton irradiation effect on the intersubband<br />
transitions in GaAs/AIGaAs multiple quantum wells was<br />
reported.' It was shown that the intensity <strong>of</strong> the intersubband<br />
transitions is decreased as the proton irradiation dose is increased.<br />
This was explained in terms <strong>of</strong> trapping <strong>of</strong> the twodimensional<br />
electron gas in the GaAs quanh~m wells by<br />
irradiation-induced defects such as vacancies, antisites, and<br />
more complex defects. A reduction <strong>of</strong> the intensity <strong>of</strong> the<br />
intersubband transitions in electron irradiated GaAsIAIGaAs<br />
multiple quantum wells was also observed.'<br />
In this letter, we report on the themla! recovery <strong>of</strong> depleted<br />
intersubband transitions in proton irradiated GaAs/<br />
AlGaAs ~nultiple quantum well samples. The intersubband<br />
transitions were nieasured bcforc and after proton irradiation<br />
and it was observed that the intcrsubband transitions wcre<br />
co~npletcly washed out in samples irradiated with 1 MeV<br />
protons and doses higher than 4 X 10'~cm-'. Upon isochronal<br />
thermal annealing, these transitions were observed to recover<br />
at annealing temperatures (To) as low as 250°C in<br />
samples that received low irradiation doses. Both the total<br />
integrated areas and the peak position energies <strong>of</strong> the intersubband<br />
transitions in irradiated samples and in onereference<br />
sample were measured as a function <strong>of</strong> To. The T,<br />
two-dimensional electron gas. The behav~ui , . ' ":' rvdl ;n~ugrated<br />
areas and the peak position energies <strong>of</strong> tl-.A: !.ILL rs~; 3-<br />
band transitions will be explained in terms <strong>of</strong> energy lcvel<br />
shifts due to interdiffusion.<br />
Two nlultiple quantum well structures used in !his study<br />
were grown by the molecular-beam epitaxy technique on a<br />
semi-insulating GaAs substrate with a 0.5 pm thick GaAs<br />
buffer layer and an - 200 A thick GaAs cap layer.' he structures<br />
<strong>of</strong> the two wafers are shown in Table I. Thc barriers <strong>of</strong><br />
the wafer labeled "A" are bulk AlGaAs. Wllilc t!~c barricks<br />
<strong>of</strong> the wafer labeled "B" are made <strong>of</strong> five periods AICin!\s/<br />
GaAs superlattices. The well regions were Si-dopcil {[Si]<br />
= 2X lot8 ~rn-~}. Several samples were cut and ~rradiated<br />
with diffcrcnt doscs <strong>of</strong> 1 MeV proton beams. Ttrc infrared<br />
absorption spectra were recorded at the Brewsterfs anglc ~f<br />
GaAs (73") from the normal using a B0ME.M 1:ouriiir:<br />
transform interferometer in conjunction with n ~ont~nutirs<br />
flow cryostat. The te~npcraturc was controlled ~\.itl!in I .O'K<br />
and the spectra were measured at either 77 or 300 K. Furnace<br />
TABLE 1. Structures <strong>of</strong> the wafcrs used in the present stu~);. ~ iwater<br />
l<br />
wcre Si doped in the well ([Si]=3.0X 1O1%rn-I). The bariicr inarcrinl <strong>of</strong><br />
wafer "H" is made <strong>of</strong> AlGaAslGaAs superlanice. . .<br />
--<br />
Wafer A 11 ,<br />
Wcll thickness (A) 75