Lai - Keck Institute for Space Studies
Lai - Keck Institute for Space Studies
Lai - Keck Institute for Space Studies
- No tags were found...
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
Sub 50 nm T-gate<br />
• >5:1 ratio gate top to gate length <strong>for</strong> low Rg<br />
• Single recess, 100 nm length typical<br />
• 20 KeV exposure, two layer resist scheme