ISMI ESH Technology Center - Sematech

SEMATECH/ISMI Symposium
Taiwan 2008
Accelerating Manufacturing Sustainability
ISMI ESH Technology Center
Accelerating Manufacturing Technology
Scott Kramer
Vice President of
Manufacturing Technology
SEMATECH
9 December 2008
Copyright ©2008
SEMATECH, Inc. SEMATECH, and the SEMATECH logo are registered servicemarks of SEMATECH, Inc. International SEMATECH Manufacturing Initiative, ISMI, Advanced Materials Research Center
and AMRC are servicemarks of SEMATECH, Inc. All other servicemarks and trademarks are the property of their respective owners.

Global ESH Challenges
Environment
• Protecting the environment through energy conservation, efficient use of
natural resources, pollution prevention, and regulatory compliance
Safety
• Ensuring safe manufacturing environments through development of
processes, procedures, and guidelines to protect facilities and workers
Health
• Protecting human health through evaluation of harmful characteristics
and development of guidelines for control of process materials
2 December 2008 2

ISMI ESH Program Goal & Vision
• Ensure semiconductor manufacturing
sustainability through industry technology
leadership in:
– Chemical management and regulatory initiatives
– Assessing ESH impact of semiconductor
materials, equipment, and processes
– Green semiconductor operations and
processes
– Energy and resource conservation
– Assessing risk of manufacturing operations
– Developing creative cost-effective ESH
technology solutions
2 December 2008 3

ISMI ESH Program: Today and
Tomorrow
• Today, to serve our ISMI members, we have projects in:
– Evolving regulatory initiatives
– Climate change and environmental impact
– Advanced technology ESH assessments
– Green buildings and processes
– Energy and resource conservation
– Supply chain ESH leadership
• Tomorrow, we plan to build on our existing work and
expand each of the above areas to provide greater
member value
ISMI ESH Technology Center
2 December 2008 4

ISMI ESH Technology Center
Membership - NEW
• Open to integrated device manufacturers (IDMs)
and foundries who are not ISMI member
companies
• Open to equipment and material suppliers
• Kickoff and promotion coming soon
2 December 2008 5

ISMI ESH Technology Center -
Evolving Regulatory Initiatives
Provide solutions to emerging regulatory and climate change
initiatives affecting the semiconductor and other industries
Learn latest regulatory initiatives and potential impacts, access to and
opportunity to provide input into industry specific solutions
Activities
• REACH Advisory Team efforts to assure chemical supply continuity (current)
• Workshops and industry forums (current)
• White papers, position papers, email flashes, webinars, training, industry
regulatory newsletter, etc. (future)
• REACH chemical tracking module (future)
• Department of Homeland Security Chemical Regulations Application Guide and
training for fabs (future)
2 December 2008 6

ISMI ESH Technology Center -
Climate Change and Environmental Impact
Identify and provide solutions to emerging regulatory and climate
change initiatives affecting the electronics industry
Access to latest accounting and assessment tools, opportunity to provide
input into industry specific solutions
Activities
• Development of Key Environmental Performance Indicators (KEPIs) metrics for the
semiconductor industry (current)
• Once KEPI metrics have been developed, provide information and solutions to
reduce environmental impact (future)
• Industry greenhouse gas accounting model (future)
• Climate change impact and risk assessment (future)
• Product/process environmental impact assessment tool (future)
2 December 2008 7

ISMI ESH Technology Center -
Advanced Technology ESH
Assessments
Provide information and guidance for members to attain certification
of operations
Access to industry specific solutions and training
Activities
• Three projects on understanding the effects of nano-particles used by the
semiconductor industry (current)
• Advanced technology ESH assessments for semiconductor (future)
• Expand into other electronics (future)
2 December 2008 8

ISMI ESH Technology Center -
Green Semiconductor Operations and
Processes
Ensure new chemistries, materials, and processes can be used in
manufacturing with minimal ESH impact
Leverage resources and costs to introduce low environmental impact
materials and processes
Activities
• Leadership in Energy and Environmental Design (LEED) green fab application
guide (current)
• LEED training (current)
• ESH benchmarking and best known methods (current)
• LEED audits and certification, green building certification (future)
– Existing and new buildings
• LEED application guide for flat panel display, solar, equip. suppliers, electronic
board mfg, electronic mfg, materials mfg., etc. (future)
2 December 2008 9

ISMI ESH Technology Center -
Energy and Resource Conservation
Provide industry-leading solutions for energy and resource
conservation to the electronics and other high tech manufacturing
industries
Access to industry specific solutions and input into energy projects and
methods
Activities
• Energy conservation workshops and industry working group forums (current)
• Benchmark surveys (current)
• Optimizing ultrapure water use on wet benches and CMP tools (current)
• Reducing the use of hazardous chemicals (current)
• Industry energy conservation forums for suppliers, users, utilities, etc. (future)
• Best practices workshops for energy and resource conservation (future)
• Fab energy and resource conservation guidelines and best practices (future)
• Fab utility guidelines for improved energy and resource conservation (future)
• Energy and utility conservation audits (future)
2 December 2008 10

ISMI ESH Technology Center -
Supply Chain ESH Leadership and
Influence
Influence the electronics industry supply chain to reduce tool and
processing resources (energy, water, & materials)
Access to resource saving information and input on input to
recommendations to electronics industry supply chain
Activities
• Supplier ESH leadership forums and energy conservation workshops (current)
• Supplier application guide for energy conservation (current)
• SEMI S23 Standard total equivalent energy calculator (current)
• Expanded supply chain ESH management - equipment, materials, resources (future)
• Expanded supplier energy conservation workshops (future)
• Expanded supplier resource conservation application guide (future)
• ISMI industry technical education programs (regulatory areas, resource conservation,
ESH) (future)
• Tools for measuring equipment and supplier environmental and safety performance
(future)
2 December 2008 11

ESH Challenges – Present and
Future
Current ISMI ESH program
~46%
Next Generation Fabs
- Development of Key
Environmental Performance
Indicators
- Viability analysis of process
equipment idle and sleep mode
states for resource conservation
- PFOA* use in fabs
~54%
Existing Fabs
- Mature equipment energy
reduction
- Control and reduction of
gaseous fluorine (F2) and
hydrofluoric acid (HF) emissions
- Water and energy use survey of
Assembly/Test sites
*Perfluorooctanoic acid
2 December 2008 12

Examples of ESH Program
Project Surveys
• Point of use abatement process identification and technologies
• Greenhouse gas emission calculation methods
• ESH audit methods
• Energy cost forecasting methods
• Live electrical work policies and procedures
• ESH and facility reliability assessment methods
• Employee involvement in ESH programs
• Personal protective equipment requirements and procedures for
handling hazardous production materials
• Vacuum pump supplier survey on sleep/idle mode
• Member company input on mature equipment energy reduction
2 December 2008 13

ISMI ESH Technology Center -
Value to IC Manufacturers
• Benchmarking and participation in various ESH surveys
• Networking of ESH professionals
• Access to ideas, knowledge, technical database
• Leveraged funding of R&D projects
• Ability to influence project work that is of particular interest
to your company
• Collaboration in ESH working groups
• Industry influence gained by being part of consortium with
suppliers and regulators
2 December 2008 14

ISMI ESH Technology Center -
Value to Suppliers
• Direct access to IDM customer base
• Real time feedback from IDMs to ideas leading to supplier market
share improvement
• Benchmarking and participation in various ESH surveys
• Networking of ESH professionals
• Access to ideas, knowledge, technical database
• Leveraged funding of R&D projects
• Ability to influence project work that is of particular interest to your
company
• Collaboration in ESH working groups
• Industry influence gained by being part of consortium with suppliers
and regulators
2 December 2008 15

Summary
• Environmental sustainability challenges are
immediate and urgent
• ISMI is starting an ESH Technology Center
– Built on existing ESH program
– Membership is open to IC makers and suppliers
– Kickoff and promotion coming soon!
• Collaboration across the industry – key to success
2 December 2008 16

Accelerating Manufacturing Sustainability
Thank You
Copyright ©2008
SEMATECH, Inc. SEMATECH, and the SEMATECH logo are registered servicemarks of SEMATECH, Inc. International SEMATECH Manufacturing Initiative, ISMI, Advanced Materials Research Center
and AMRC are servicemarks of SEMATECH, Inc. All other servicemarks and trademarks are the property of their respective owners.