Photoresist
Photoresist
Photoresist
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Substitute:<br />
Methyl group<br />
Chlorine<br />
Additional<br />
Benzene ring<br />
Figure 8.2 Some aromatic-based compounds based on (A) single-site substitution,<br />
Figure 8.2 Some aromatic based compounds based on (A) single site substitution,<br />
(B) double-site substitution, where the first term defines the position (ortho, meta, or<br />
para) of the second substitution relative to the first, and (C) aromatic condensation.
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