Chapter 12 Physical Vapor Deposition (PVD)
Chapter 12 Physical Vapor Deposition (PVD)
Chapter 12 Physical Vapor Deposition (PVD)
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Film morphology<br />
Zone model (Zones 1, 2, 3, T) indicates the films final<br />
characteristics based on the substrate temperature and ion energy;<br />
T-region is characterized by very small grains<br />
Zone1-low T, low ion energy<br />
yields amorphous, porous<br />
materials; Raise T or lower P<br />
moves to T-zone<br />
Zone2-Increase T and/or<br />
increase ion energy will<br />
increase grain size - tall<br />
columnar grains<br />
Zone3-Increase T, film has<br />
large 3-D grains– surface may<br />
be rough and hazy<br />
Figure <strong>12</strong>.21 The three-zone model of film deposition as proposed by<br />
Movchan and Demchishin (after Thornton, reprinted by permission, AIP).
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