Chapter 12 Physical Vapor Deposition (PVD)
Chapter 12 Physical Vapor Deposition (PVD)
Chapter 12 Physical Vapor Deposition (PVD)
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Fig. <strong>12</strong>.18 in text, p. 340 shows cross section of a planar magnetron<br />
target using permanent magnets to supply the field<br />
The region of the target beneath the ringshaped<br />
volume where the plasma density is<br />
highest is sputtered the most rapidly and this<br />
target erosion is called the race-track<br />
Target showing erosion in the race-track<br />
From: Fundamentals of High Power Impulse<br />
Magnetron Sputtering, dissertation by Johan Böhlmark<br />
Figure <strong>12</strong>.18 Detailed cross section of a<br />
rectangular planar magnetron target using<br />
permanent magnets to supply the field (after<br />
Wasa and Hayakawa, reprinted by<br />
permission, Noyes Publications).
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