Chapter 12 Physical Vapor Deposition (PVD)
Chapter 12 Physical Vapor Deposition (PVD)
Chapter 12 Physical Vapor Deposition (PVD)
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S versus Ion atomic number<br />
Figure <strong>12</strong>.15 Sputter yield as a function of the bombarding ion<br />
atomic number for 45-keV ions incident on silver, copper, and<br />
tantalum targets (after Wehner, reprinted by permission, AIP).