Chapter 12 Physical Vapor Deposition (PVD)
Chapter 12 Physical Vapor Deposition (PVD)
Chapter 12 Physical Vapor Deposition (PVD)
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When an energetic ion strikes the surface of a material --<br />
1) Ions with low energies may bounce of the surface<br />
2) Ions may adsorb to the surface, giving up its energy to<br />
phonons (heat)<br />
3) Ion penetrates t into material, depositing energy deep into the<br />
substrate<br />
Figure <strong>12</strong>.13 Possible outcomes for an ion<br />
incident on the surface of a wafer.
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