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Traditional CL approach CONFIDENTIAL Cathodoluminescence in a SEM • Acquire an SEM • Buy a CL add-on (light collection mirror and detection system) and combine Major drawbacks • At least two manufacturers involved • Interfacing difficulties, especially at low temperature • Cumbersome alignment, unstable + © 2013 Attolight AG. All Rights Reserved. 6
Attolight CL System Integrated Cathodoluminescence CONFIDENTIAL • One System - One Supplier • Hybrid Microscope • Optimized for CL • Low beam energy • High flexibility • Easy to use © 2013 Attolight AG. All Rights Reserved. 7
Page 1 and 2: CONFIDENTIAL © 2011 Attolight AG.
Page 3 and 4: Who are we CONFIDENTIAL Swiss Compa
Page 5: Introduction CONFIDENTIAL Text •
Page 9 and 10: Attolight CL System Embedded Optica
Page 11 and 12: Attolight CL System Time-Resolved C
Page 13 and 14: Applications Gallium Arsenide singl
Page 15 and 16: Applications Sulfur diffusion in Cd
Page 17 and 18: Applications Strain analysis in Zin
Page 19 and 20: Applications / Production Qualifica
Page 21 and 22: Applications Local Lifetime Measure
Page 23 and 24: Applications CONFIDENTIAL Local Lif
Page 25 and 26: attolight Attolight AG EPFL Innovat
Page 27 and 28: attolight dinates of the excitation
Page 29 and 30: Applications - LED performance and
Page 31 and 32: Be Part of the New Cathodoluminesce

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