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Traditional CL approach<br />
CONFIDENTIAL<br />
Cathodoluminescence in a SEM<br />
• Acquire an SEM<br />
• Buy a CL add-on (light collection mirror<br />
and detection system) and combine<br />
Major drawbacks<br />
• At least two manufacturers involved<br />
• Interfacing difficulties, especially at low<br />
temperature<br />
• Cumbersome alignment, unstable<br />
+<br />
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