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Introduction<br />

CONFIDENTIAL<br />

Cathodoluminescence refers to the light<br />

emitted by a sample under electron<br />

irradiation.<br />

An e-beam generates several signals<br />

• Back Scattered Electrons (BSE)<br />

BSE<br />

primary e - beam<br />

SE<br />

• X Rays<br />

• Secondary Electrons (SE)<br />

• Cathodoluminescence (CL)<br />

• Auger electrons<br />

• ....<br />

X rays<br />

CL<br />

© 2013 Attolight AG. All Rights Reserved.<br />

4

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