download - Gaia Science
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Applications<br />
Failure analysis on Silicon<br />
X 2.4K<br />
SE<br />
CONFIDENTIAL<br />
Detection of defects at 1.6 µm in<br />
Silicon<br />
4<br />
3<br />
Exciton peak<br />
6<br />
Defect<br />
20 µm<br />
2<br />
5<br />
1000<br />
8<br />
7<br />
6<br />
Intensity (a.u.)<br />
100<br />
5<br />
4<br />
3<br />
2<br />
8<br />
7<br />
6<br />
5<br />
Intensity (a.u.)<br />
3x10 2 4<br />
4<br />
3<br />
1000<br />
1050<br />
1100<br />
1150<br />
Wavelength (nm)<br />
1200<br />
1500<br />
1550<br />
1600<br />
Wavelength (nm)<br />
1650<br />
1700<br />
© 2013 Attolight AG. All Rights Reserved.<br />
20
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