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CONFIDENTIAL 

© 2011 Attolight AG. All Rights Reserved. 

CONFIDENTIAL 

1

attolight 

 

CONFIDENTIAL 

Attolight AG 

EPFL Innovation Square 

PSE D 

1015 Lausanne 

Switzerland 

t +41 21 626 0100 

March 21, 2013 

The Attolight CL System 

www.attolight.com 

Jean Berney 

Attolight AG Switzerland / www.attolight.com 


2

Who are we 

CONFIDENTIAL 

Swiss 

Company 

Spin-Off of EPFL 

Swiss Federal Institute of Technology 

Located in PSE on EPFL campus 

over 100 companies 


3

Introduction 

CONFIDENTIAL 

Cathodoluminescence refers to the light 

emitted by a sample under electron 

irradiation. 

An e-beam generates several signals 

• Back Scattered Electrons (BSE) 

BSE 

primary e - beam 

SE 

• X Rays 

• Secondary Electrons (SE) 

• Cathodoluminescence (CL) 

• Auger electrons 

• .... 

X rays 

CL 


4

Introduction 

CONFIDENTIAL 

Text 

• Level 1 

Cathodoluminescence (CL) is a Spectroscopy method 

featuring nanometer spatial resolution 

study • Level of nanometer 2 sized structures 

100 nm 

study of crystallographic 

defects 

5 µm 

TiO2 nanoparticles for solar cells 

TDs on GaN surface 


5

Traditional CL approach 

CONFIDENTIAL 

Cathodoluminescence in a SEM 

• Acquire an SEM 

• Buy a CL add-on (light collection mirror 

and detection system) and combine 

Major drawbacks 

• At least two manufacturers involved 

• Interfacing difficulties, especially at low 

temperature 

• Cumbersome alignment, unstable 

+ 


6

Attolight CL System 

Integrated Cathodoluminescence 

CONFIDENTIAL 

• One System - One Supplier 

• Hybrid Microscope 

• Optimized for CL 

• Low beam energy 

• High flexibility 

• Easy to use 


7


• NO clean room environment 

• Fast installation in less than 24 

hours 

• Remote control interface


Embedded Optical Microscope 

CONFIDENTIAL 

• Zero Alignment 

High Stability 

• Achromatic 

UV - IR without realignment 

• High Aperture (NA 0.71) 

Highest Collection Efficiency 

• Evolutive Optical System 

Optical Hub to easily interface 

PL, µPL, Raman, ... 

• Large Field of View 

Quantitative Measurements & 

Optical Imaging 

Attolight CL 

FOV 300µm 

OM 300µm 

FOV 

Standard CL 

Focal Spot 


9


Cryogenic Nanopositioning Stage 

CONFIDENTIAL 

• Helium Cryostat 

Allows for temperature 

dependent studies 15K - 300K 

• SEM optimized Designed 

Low vibration and low drift 

• 6-degrees-of-freedom 

positioning stage 

All possible degrees of freedom 

& Pivot Point Lock 


10


Time-Resolved Cathodoluminescence 

CONFIDENTIAL 

SE 

• Optimized for pulsed operation 

No degradation of spatial 

resolution in pulsed mode 

• Field upgradable 

Upgrade from standard system 

can be done in the user 

laboratory 

• New dimension to your data 

Measure local lifetime and 

charge carrier dynamics 

intensity (a.u.) 

100 

10 

0 400 800 1200 

time (ps) 


11


Intuitive control interface 

CONFIDENTIAL 

• Computer controlled switching 

between measurement modes 

• UV - IR without re-alignment 

• Remote control and 

surveillance 

• Open data format to read on 

any platform 

• Fast user training, ideal for 

multi-user facility 

• Easy to use touch screen based 

control console 


12

Applications 

Gallium Arsenide single photon emitters 

CONFIDENTIAL 

AlGaAs Quantum Dots in 

Core-Shell Nanowires 

• GaAs QDs embedded in 

AlGaAs shell 

• Emission Range 620 nm 

- 750 nm 

(1 -1 2) 

(-2 -1 1) 

(1 2 1) 

GaAs AlGaAs (Al rich) AlGaAs (Al poor) (Al)GaAs QD 

«Self-assembled quantum dots in a nanowire system for quantum photonics», Heiss, Fontcuberta, Fontana et al., 

Nature Mater. 2013 


13

Applications 

Gallium Arsenide single photon emitters 

CONFIDENTIAL 

2500 

GaAs 

blue: QDs 

red: GaAs core 

2000 

CL Intensity (counts) 

1500 

1000 

QDs 

500 nm 

500 

Conditions 

0 

600 

700 

800 

Wavelength (nm) 

900 

• T = 10K, controlled 

• 5 keV 

• 1 ms / spectrum 

1 µm 

• 128 x 128 spectra 

• measurement time < 2 min 


14

Applications 

Sulfur diffusion in CdTe Solar Cell Junction 

CONFIDENTIAL 

CdTe 

Cd(Te,S) 

CdS 

Clear interdiffusion of sulfur a the solar cell junction 

Dr. Aidan Taylor, Researcher of thin film materials, Durham University 


15

Applications 

Carrier diffusion length in Diamond 

CONFIDENTIAL 

• CL line mapping on FIB lamella 

• Exciton diffusion in Boron 

doped diamond 

• Measurement of diffusion 

length in function of dopant 

concentration 

José Pinero, Specialist on high power device application of diamond, University of Cadiz, paper submitted for publication. 


16

Applications 

Strain analysis in Zinc Oxide 

CONFIDENTIAL 

SE 

spectral shifts of exciton peak depending on local strain 

386 nm 

CL 

384 nm 

100µm 

382 nm 

380 nm 

378 nm 

Xuewen Fu, Specialist on electronic and mechanical coupling an applications of ZnO nanowires, Beijing University 


17

Applications / Production 

Validation of new product generation 

CONFIDENTIAL 

GaN based alloys for power 

electronics 

• Verification of growth 

homogeneity 

• Each AlGaN layer emits at a 

different wavelength 

CL 

SE 

5 µm 

Rapid qualification of new 

designs and fabrication 

processes 


18

Applications / Production 

Qualification of LED substrates 

CONFIDENTIAL 

• TDs show as dark spot due to 

non-radiative recombination in 

their vicinity 

• Easy measure of TDD 

• TDD ≃ 30 ⨉ 10 6 cm -2 

10µm 

10µm 

SE 

LED failure analysis 

CL 


19

Applications 

Failure analysis on Silicon 

X 2.4K 

SE 

CONFIDENTIAL 

Detection of defects at 1.6 µm in 

Silicon 

4 

3 

Exciton peak 

6 

Defect 

20 µm 

2 

5 

1000 

8 

7 

6 

Intensity (a.u.) 

100 

5 

4 

3 

2 

8 

7 

6 

5 

Intensity (a.u.) 

3x10 2 4 

4 

3 

1000 

1050 

1100 

1150 


1200 

1500 

1550 

1600 


1650 

1700 


20

Applications 

Local Lifetime Measurements - ZnO 

CONFIDENTIAL 

Nanobelts 

Text 

• Level 1 

• Level 2 

XX 

D o X 

X 

Intensity (arb. units) 

• Week emission from the green band at 

300K 

• well resolved excitionic transmission 

=> excellent material for optoelectronics 

3.28 3.30 3.32 3.34 3.36 3.38 3.40 3.42 3.44 3.46 

© 2013 Attolight AG. All Rights Reserved.

Applications 

CONFIDENTIAL 

Local Lifetime Measurements - ZnO Nanobelts 

CL energy shift (10 meV) 

CL intensity fluctuation 


Applications 

CONFIDENTIAL 

Local Lifetime Measurements - ZnO Nanobelts 

Exciton CL decay 

constant t rad 

I X 

(t)∝ 1 ) 

Exp+ 

−t 

τ r * + 

# 1 

% + 1 

$ τ r 

τ nr 

I X 

(0)∝ 1 η = τ nr 

τ r τ r 

+τ nr 

Local variation of exciton non-radiative 

lifetime along the nanobelt axis 

& 

( 

' 

−1 

, 

. 

-. 

non-radiative lifetime 

100% 

87% 

77% 

60% 

53% 

40% 

Excitation spot 


energy (nm) 

Applications 

Wide bandgap material 

CONFIDENTIAL 

Other Spectroscopy Tools 

Attolight CL 

• expensive (far UV) 

• low spatial resolution 

• difficult to use 

• not versatile 

260 

230 

Boron Nitride 

200 

0 200 400 

time (ps) 


24

attolight 

Attolight AG 


PSE D 

1015 

Description 

Lausanne 

Switzerland 

t 

The 

+41 

core 

21 626 

piece 

0100 

of Attolight's instrument is a 

custom designed scanning electron microscope 


(SEM). SEM is a widely used scanning probe 

technology since it has the ability to image the 

surface features of a sample with very high 

spatial resolutions going below one nanometer 

(10 -9 m) today. An SEM consists of an electron 

source and electron optics that focuses the 

electron beam to a nanometer sized spot. The 

image (or map) is constructed by scanning the 

electron beam over the sample point by point 

(see Fig. 1). The impinging electron beam on 

the sample surface creates secondary electrons 

and photons that are emitted. At each scanned 

point on the sample, the intensity of the secondary 

electron (SE) signal is recorded and a 

pixel is shown on the screen with a grey scale 

level proportional to the SE signal intensity. 

incoming 

electron beam 

TECHNOLOGY BRIEF 

Attolight uses a proprietary technology to create 

ultrashort electron pulses instead of a continuous 

electron beam (see Fig. 2). The SEM 

and electron source have to be custom designed 

to reach high spatial resolutions and 

short pulses. Our new tool will deliver a few 

nanometers spatial resolution and pulses 

shorter than 10 picoseconds (1 picosecond = 

10 -12 s) at a repetition rate of typical 80 MHz 

(repetition rate can be changed easily). The 

photoelectric effect is used to create such short 

electron pulses: short UV laser pulses are sent 

on a thin metal film which creates short electron 

pulses. The design and manufacturing of 

the electron source is a core competence of 

Attolight. A lot of care has to be taken in designing 

the electron source and the electron 

optics in order to keep the pulses short and 

well focused and still intense enough to carry 

out measurements. 

electrons 

incoming 

electron beam 

Sample 

light 

Fig. 2 Attolight technology 

electrons 

Sample 

light 

Fig. 1 Principle of standard SEM 

Time resolved spectroscopy 

This is our “home” application in the R&D market. 

Initially, the tool was built for this application. 

We exploit a phenomena called cathodoluminescence 

(CL): some semiconductors emit 

light when they are bombarded with an electron 

beam containing electrons carrying a certain 

energy. This light is called CL and contains 

a lot of information on optical properties of the 

material under test. CL is often used to analyse 

semiconductor based nanostructures since the 

spatial resolution is very high. CL is a excitation 

spectroscopy technique with very high spatial 

resolution. 

Our idea was not just to look at a continuous 

CL signal but also at the lifetime of the signal 

in the picosecond regime. To achieve this we 

adapted an ultrafast light detector (STREAK 

camera) to our instrument. We call this tool 

pTRCL (picosecond time-resolved CL). 

© 2011 Attolight AG - All rights reserved.

attolight 

Attolight AG 


PSE D 

1015 

TRCL is 

Lausanne 

a High-Resolution Technique 

Switzerland 

t 

Given 

+41 21 

the 

626 

context 

0100 

of developing nanosciences, 

there is currently a growing interest in obtaining 

local information about light-emitting 


phenomena in condensed matter. In particular, 

dynamical information such as the luminescence 

decay time is of major importance to 

analyse the competition between radiative and 

nonradiative processes in materials and nanostructures 

designed to serve in optoelectronic 

devices. 

However, while it is easy to measure the photoluminescence 

decay dynamics with a spatial 

resolution of a few hundreds of squared micrometers, 

achieving such measurements at 

the scale of a few tens of nanometers is still 

challenging. 

Therefore, in most instances, TR-PL experiments 

only provide information that is integrated 

over a number of light-emitting nanoobjects 

and over a number of competitive 

processes: radiative processes themselves, carrier 

transfer among different radiative or nonradiative 

centers, nonradiative carrier recombination… 

In the case of individual nano-objects or of 

materials comprising a variety of light-emitting 

sub-structures, such integrated information is 

not detailed enough and leads to conjectural 

analyses of the recorded data. 

On the other hand, thanks to a strongly localized 

excitation, TRCL permits to isolate (spatially 

and spectrally) the different light sources 

and to analyse their dynamical characteristics 

separately. 

Interest of Temperature-dependent TRCL 

Like for other spectroscopic techniques the 

possibility to use cryogenic temperatures has 

several beneficial effects. 

First of all, by hindering thermally-enhanced 

nonradiative recombinations, low temperatures 

increase drastically the signal-to-noise ratio. 

For the same reason, the CL decay dynamics 

measured at low-temperatures are closer (if 

TECHNICAL NOTE 

not exactly identical) to the purely radiative 

dynamics. 

Indeed, the effective decay time, τCL, is related 

to the radiative (τR) and nonradiative (τNR) 

lifetimes by: τCL =(τR-1 + τNR-1)-1. In other 

words, when the sample is placed at low temperatures, 

the nonradiative lifetime becomes 

so long that the effective lifetime is close to the 

radiative lifetime. The latter is a precious piece 

of information, especially in the study of lowdimensional 

semiconductor systems such as 

quantum wells or quantum dots. 

The second favourable effect of low temperatures 

is the reduction of emission linewidths. 

Whenever several optical transitions, corresponding 

to various recombination mechanisms, 

are close in energy, this linewidth reduction 

permits to separate these mechanisms. 

In CL, this point is quite often very profitable 

because the different mechanisms can correspond 

to different localizations in space. In 

TRCL, the temporal behaviours pertaining to 

these different mechanisms can be studied 

separately. 

The third advantage of low temperatures is 

that it reduces the diffusion of carriers across 

the sample and generally favours optical recombination 

of localised excitons. Consequently, 

the CL images obtained are sharper: 

the resolution, specially in monochromatic detection 

mode, is enhanced. 

There is also clearly an interest for experiments 

conducted under variable temperature conditions. 

This is particularly true when dealing 

with carrier diffusion/capture processes that 

can be studied by analysing the CL rise-times. 

Their behaviour when T is changed, along with 

the appropriate modelling, provides crucial 

information on diffusion coefficients, energy 

transfer mechanisms, activation energies… 

TRCL is an Excitation Spectroscopy Technique 

Contrary to the intuitive approach, cathodoluminescence, 

when seen as a mapping method, 

does not show, strictly speaking, where the 

emitted light comes from. In fact, it rather correlates, 

with very high resolution, the 2D coor- 


attolight 

dinates of the excitation spot with the emission 

of light AG by the sample, wherever this 

Attolight 

EPFL emission Innovation really takes Square place. 

PSE In other D words, in CL, the high resolution is a 

1015 unique Lausanne characteristic of the excitation, not of 

Switzerland 

the emission. 

t +41 21 626 0100 

In many cases, especially in low-quality samples, 

where the carrier diffusion lengths are 


small, the 

above remark is of little relevance: the CL emission 

indeed takes place where the electronic 

excitation has been 

delivered, at least within the accuracy limited 

by the size of the generation volume and by 

the carrier diffusion lengths. Typically, a resolution 

of a few hundred nanometers is reached. 

But in high-quality samples, the situation can 

be totally different. For example, for the complex 

pyramidal quantum systems of Ref. [1], 

wherever the excitation spot is placed on the 

pyramid, the quantum dot at the tip of the 

pyramid is efficiently alimented by scattered 

carriers and it efficiently emits light at a characteristic 

wavelength. Therefore the CL image 

shows an entirely “white” pyramid although it 

is quite clear that light does not come from the 

entire pyramid, but rather from a zone that 

does not exceed a few nanometers at the tip of 

the pyramid. 

In this case of high-quality samples, the high 

diffusion length paradoxically destroys the spatial 

resolution of the CL experiment. 

Luckily, “time is on our side”: the temporal 

resolution provided by TRCL allows measuring 

the rising dynamics of luminescence signals at 

a given wavelength, as a function of the position 

of the excitation spot. It therefore provides 

an unprecedented insight into dynamical phenomena 

such as carrier diffusion and capture. 

In the above example, the rise-time of the CL 

from the tip-quantum dot is a growing function 

of the distance between the excitation 

spot and the tip and a simple model yields important 

characteristics such as diffusion 

lengths. 

In summary, for the study of high-quality 

samples where the carrier diffusion lengths are 

large, the time-resolution is a necessary ingredient. 

By careful analysis of luminescence rise-times 

under variable conditions of temperature and 

of distance from the emitting object, TRCL 

permits to characterize the ambipolar transport 

of electron-hole pairs (or excitons), which the 

other techniques (µPL – SNOM) cannot achieve. 

[1] M. Merano et al., Nature 438, 479 (2005) 

About the author 

Pierre Lefebvre 

Research Director at CNRS 

Pierre Lefebvre is a senior researcher 

in Physics specialized 

in optical properties of semiconductors, 

nanosciences and 

nanotechnology. He was the founder and first 

director of the Center of Competence in Nanosciences 

for the South-West of France. Interested 

in testing and promoting new concepts 

based on nanophysics for novel applications in 

optics, information technologies, solar energy. 


Be Part of the New 

Cathodoluminescence 

Revolution 

Attolight CL / Discover Quantitative Cathodoluminescence 

at High Space and Time Resolution 

Overview 

The Attolight CL system is the first quantitative cathodoluminescence system offering a spatial 

resolution below 10 nm, a field of view of 300 µm, and an optional 10 ps time resolution mode. 

Attolight CL combines a proprietary scanning electron microscope (SEM) with an integrated 

light microscope. The light microscope is embedded within the electron objective lens of the 

SEM so that their field of view match each other. Acquiring cathodoluminescence (CL) maps 

has never been easier : no optical alignment is required and the specimen is positioned thanks 

to the light microscope. The system is optimized to achieve superior CL performance without 

compromising the SEM performance. It offers an outstanding optical aperture (f/0.5), a constant 

and superior photon collection efficiency over the whole field of view, and a low electron beam 

energy range (3–10 kV) for enhanced resolution of CL maps. 

Attolight CL is the only system on the market that enables quantitative benchmarking of 

cathodoluminescence emission from one specimen to the other. Its unique ability to reveal 

ultra-trace impurities and crystallographic defects not visible using other imaging modes 

opens new possibilities for research and development of semiconductor materials, phosphor, 

ceramic, rock and glass. 

A 6-degrees-of-freedom displacement system insures arbitrary positioning of your specimen 

with 1 nm increments. For advanced applications requiring a deep understanding of the 

fundamental properties of a material or high cathodoluminescence emission efficiency, 

an optional cryogenic nanopositioning stage can be installed. It features temperature control 

between 20 K and 300 K and includes a patented mechanical design to minimize drifts 

and vibrations. 

Attolight CL is also the first cathodoluminescence microscope featuring an optional timeresolved 

detector with an unmatched 10 picoseconds time resolution. Time-resolved 

cathodoluminescence is the perfect technology for charge carrier dynamics and lifetime 

measurements in opto-electronic materials. 

Key Benefits 

– Zero alignment : patented achromatic light microscope 

embedded in the column of a proprietary scanning 

electron microscope 

– No compromise : up to 10 nm spatial resolution in both 

continuous and time-resolved mode from 3 kV to 10 kV 

– Specimen benchmarking : very large field of view (300 µm) 

enabling quantitative cathodoluminescence 

– High light collection efficiency : numerical aperture of 

0,71 (f/0,5) 

– Arbitrary movements : innovative 6-degrees-of-freedom 

nano-positioning stage (down to 1 nm displacement 

increments) 

– Optional innovative low vibration cryostat for temperature 

measurements between 20K and 300K 

– Optical hub for integration of the Attolight CL instrument 

in a larger spectroscopic system 

– Optional Time-Resolved Cathodoluminescence (TRCL) 

mode : optimized for pulse operations up to 10 ps without 

any degradation of the spatial resolution. Enables lifetime 

and charge carrier dynamics measurements

Applications 

– LED performance and reliability 

– GaN power transistors 

– Threading Dislocation Density (TDD) 

– Carriers lifetimes and dynamics 

– Solar cells efficiency 

– Development of nanoscale optolectronic devices 

ZnO nano-belts. The acquisition of a CL map (left) does not affect the detection 

of secondary electrons (right) 

Cathodoluminescence is the ideal tool to measure threading dislocations density 

in GaN (left) ; they appear as dark spots because of non radiative recombination 

in their vicinity. A secondary electron scan of the same region cannot identify any 

threading dislocations (right). 

Product Specifications 

Measurements Mode 

– Optical microscope imaging 

– Cathodoluminescence mapping (polychromatic, 

monochromatic and hyperspectral) 

– Secondary electrons (SE) mapping 

– Time-resolved cathodoluminescence (time-resolved option) 

– Simultaneous SE and CL imaging 

Electron Optics 

– Schottky field emission gun (continuous system) or 

picosecond pulsed photoelectron gun (time-resolved 

option). Acceleration voltage : 3–10 kV 

– Electron optical column with electro-magnetic lenses, 

magnetic deflectors and astigmatism correctors. Optimized 

for continuous and pulsed operation. 

– Highest spatial resolution : < 10 nm from 3 to 10 kV 

– Analytical working distance : 3 mm 

– No loss of SE resolution in cathodoluminescence mode 

– Field-upgradable to picosecond pulsed photoelectron gun 

Probe Current 

– E-beam : 1pA to 20 nA 

Light Optics 

– Light microscope embedded within the electron optics 

– Fully achromatic reflective objective : 180 nm – 1.6 µm 

– Aperture : NA 0.71 (f/0.5) 

– Field of View : >300 µm (electronic and optical) 

– Optical Resolution :



Revolution 

Nanopositioning Stage 

– Specimen diameter : ø 25x1.5 mm 

– 6 degrees of freedom for arbitrary movements (compatible 

with cryostat option) 

– Travel range : 25 mm (X and Y), 3 mm (Z), 3° tilt (X and Y), 

35° rotation (Z) 

– Smallest increment : 1nm 

– Repeatability (full travel range) : 100nm 

– Repeatability (100 nm range) : < 2nm 

Low Temperature Cryostat 

– Helium cold finger for low vibrations 

– Minimal temperature range : 20K–300K 

– Advanced digital temperature controller 

Facility Specifications 

– Power : 7 standard wall plugs (230V, 50Hz) delivering 

10A each 

– Pressurized air for microscope valves and optical table, 

pressure of 551 kPa (80psi) max. 

– Nitrogen to purge the chamber 

– Weight : 

CL system : 250 kg 

Optical Table : 650kg 

– Environment: temperature 20°C +/-3°C, relative humidity 

below 70 % RH, stray AV magnetic fields 

< 100 nT asynchronous 

< 300 nT synchronous for line times > 20 ms 

(50 Hz mains) 

260 

Lay-out 

The Attolight CL is mounted on an optical table with four 

active isolation legs. Its footprint is 1.2 m x 1.5 m. Allow for 

1 to 1.5m space around the table to circulate and install an 

operator. 

230 

wavelength (nm) 

200 

1514 

0 

200 400 

3200 

1209 

time (ps) 

1500 

Time and spectrum-resolved cathodoluminescence of Boron Nitride. The 

spectrum is generated by focusing a pulsed electron beam on a specific point of 

the specimen. A streak camera is used for the detection. Deep UV spectroscopy 

becomes as simple as visible spectroscopy. 

1000 

4000 

Attolight AG © 2012. We are constantly improving the performance of our products, so all specifications are subject to change without notice.



Revolution 

Attolight CL / Analytical Services : Get an immediate and easy 

access to critical data to boost your material research programs 

Attolight has developed breakthrough technology in cathodoluminescence which will open 

a new area of investigation in semiconductor material research. Attolight now offers immediate 

access to data that will significantly impact your processes, your technological research and 

development roadmap. 

Q. Why does Attolight, an equipment manufacturer, provide analytical and consulting services 

A. Typically in response to one of two situations : 

a → Our client needs to push forward their research or process development but 

has no budget to add capital equipment : 

– Your current characterization methods do not allow you to achieve a full understanding 

of your material system or structure, perhaps cathodoluminescence will 

fill in the gaps and allow you to reach clear conclusions. 

– You have come up against a specific process (or quality) issue and would like to see 

if cathodoluminescence could provide the information needed to solve the issue. 

– You already use photoluminescence technique but have found you need a higher 

spatial resolution or sensitivity to acquire the data you really need. 

b → Our client is making (or has made) a case for capital funding confident that 

high reso lution CL is a game changing technology for their research and process 

development. 

– You are confident, but your funding authorities still demand proof in the form 

of preliminary results showing the type of data that can not be obtained by other 

methods available to you. 

– You have a material/device with unique properties, you believe high resolution 

CL will provide the key data with which you can explain those properties in order 

to win funding for further development of your new material/device. 

– You have applied for funding but it will take many months to arrive, you need 

to push the research forward to maintain your lead until the Attolight system 

is delivered. 

Our laboratory in Switzerland provides analytical testing services and solutions, using the latest 

cathodoluminescence technology developed by Attolight. Our solutions enables the characterization 

of a variety of nano scale structures including : nanoparticles, nanotubes, quantum 

dots, defects, dopant inclusions, silicon wafer and ingot quality control for PV applications, GaN 

wafer quality control for LED and power devices. Attolight has also developed a proprietary 

solution to count the threading dislocation densities on wafers, offering a significant cost ownership 

benefit over the traditional TEM method. 

For more application on our analytical 

service capabilities please contact us : 

t + 41 21 626 0100

Headquarter – Attolight AG 

EPFL Innovation Square / PSE D 

1015 Lausanne / Switzerland 

t +41 21 626 0100 

contact@attolight.com 

www.attolight.com

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