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SILICON PRESSURE SENSORS<br />

FEATURES<br />

Amplified Output 0.2....4.9V, 0 .. 5V or others, Serial I 2 C-Bus<br />

Temperature Compensated 0..50 C, 0..70 C, -40..85 C<br />

Zero and Span Calibrated<br />

Internal Voltage Reference or ratiometric<br />

Wide Supply Voltage range for internal Ref Type 9...24V<br />

Differential, Gage and Absolute Pressure Types<br />

Small Outline easy to assemble<br />

DESCRIPTION<br />

The <strong>SCPA</strong>...-Series of amplified pressure<br />

sensors use state of the art silicon micromachined<br />

pressure sensors in conjunction with<br />

stress free packaging techniques to provide<br />

cost effective temperature compensated<br />

pressure sensors and liable precision signal conditioning.<br />

<strong>SCPA</strong>-... <strong>SERIES</strong><br />

Amplified Pressure Sensors<br />

Referenced and ratiometric<br />

Voltage Output, I 2 C-Bus Slave<br />

On devices 5PSI above the top side of the chip is protected against humidity by a SILGEL<br />

coating. The general design is for use with non corrosive, non ionic pressure media.<br />

Several gases especially in medical applications can be allowed on request.<br />

The <strong>SCPA</strong>-V-sensors provide an internal voltage referenced 0 .. 5V, 0.2 .. 4.9V or individual<br />

calibrated Voltage ouput. The unstabilised supply voltage for the <strong>SCPA</strong>-F ranges from 9V to 24V.<br />

The offset is precisely adjusted and needs no external potentiometer. <strong>SCPA</strong>-R works with 5V +-10%<br />

Supply and delivers a ratiometric output signal.Standard output is 0.2 .. 4.9V but individual calibration<br />

ranges can be provided. <strong>SCPA</strong>...I 2 C has a I 2 C-Bus interface and delivers continuously serial data<br />

as a slave from power on or waits for a I 2 C Master’s request..<br />

<strong>SCPA</strong>..V<br />

Output Characteristics<br />

Vout<br />

<strong>SCPA</strong>.. I 2 C<br />

Output Characteristics<br />

FSO(Full Scale Output) 5V<br />

Serial Dataword out<br />

FSO(Full Scale Output) 4.2V<br />

-Pressure<br />

2.5V<br />

2.2V<br />

<strong>SCPA</strong>..-x/x-D(A,G)0.2V4.2R<br />

0.2V<br />

<strong>SCPA</strong>..-x/x-D0V5<br />

<strong>SCPA</strong>..0/x-D(A,G)0.2V4.2R<br />

<strong>SCPA</strong>..0/x-D0V5<br />

0 +Pressure Full Scale P<br />

(nominal<br />

pressure)<br />

FSO 4050 counts<br />

(Full Scale Output)<br />

2050 counts<br />

50 counts<br />

-Pressure<br />

<strong>SCPA</strong>-B-x/x D(G) 50 i2C 4050<br />

<strong>SCPA</strong>-B 0/x D(G, A) 50 i2C 4050<br />

0<br />

+Pressure<br />

Full scale<br />

(nominal<br />

pressure)<br />

Doc#08-03-01-0004 Rev. C<br />

23.3.2007 by AB<br />

Copyright: SensDev Ltd.<br />

SensDev Ltd Tel. +49-3724-669 055<br />

International Sales<br />

Kressnerstr. 12 Fax.+49-3724-669 087<br />

D-09217 Burgstaedt eMail: sensprom@maltanet.net


SILICON PRESSURE SENSORS<br />

STANDARD TYPES <strong>SCPA</strong>... R-Series<br />

<strong>SCPA</strong>...R-<strong>SERIES</strong><br />

Ratiometric Voltage Output @Vs=5V<br />

0.2 ... 4.9V or 2.55 – 2.35V<br />

PART NUMBER NOMINAL PRESSURE PROOF PRESSURE OUTPUT VOLTAGE<br />

<strong>SCPA</strong>-MB0/5G(D)0.2V4.9R<br />

<strong>SCPA</strong>-MB0/10G(D)0.2V4.9R<br />

<strong>SCPA</strong>-MB0/20G(D)0.2V4.9R<br />

<strong>SCPA</strong>-MB0/50G(D)0.2V4.9R<br />

<strong>SCPA</strong>-MB0/100G(D)0.2V4.9R<br />

<strong>SCPA</strong>-MB0/200 G(D)0.2V4.9R<br />

<strong>SCPA</strong>-MB0/500 G(D)0.2V4.9R<br />

<strong>SCPA</strong>-B0/1G(D,A)0.2V4.9R<br />

<strong>SCPA</strong>-B0/2G(D,A)0.2V4.9R<br />

<strong>SCPA</strong>-B0/5G(D,A)0.2V4.9R<br />

<strong>SCPA</strong>-B07G(D,A)0.2V4.9R<br />

<strong>SCPA</strong>-B0/10G(D,A)0.2V4.9R<br />

<strong>SCPA</strong>-B0/16G(D,A)0.2V4.9R<br />

<strong>SCPA</strong>-MB-5/5G(D)0.2V4.9R<br />

<strong>SCPA</strong>-MB-10/10G(D)0.2V4.9R<br />

<strong>SCPA</strong>-MB-20/20G(D)0.2V4.9R<br />

<strong>SCPA</strong>-MB-50/50G(D)0.2V4.9R<br />

<strong>SCPA</strong>-MB-100/100 G(D)0.2V4.9R<br />

<strong>SCPA</strong>-MB-200/200 G(D)0.2V4.9R<br />

<strong>SCPA</strong>-MB-500/500 G(D)0.2V4.9R<br />

<strong>SCPA</strong>-B-1/1G(D)0.2V4.9R<br />

<strong>SCPA</strong>-B-2/2G(D)0.2V4.9R<br />

<strong>SCPA</strong>-B-5/5G(D)0.2V4.9R<br />

<strong>SCPA</strong>-B-7/7G(D)0.2V4.9R<br />

5mb/0.5kPa gage(diff.) unidirectional<br />

10mb/1kPa gage(diff.) unidirectional<br />

20mb/2kPa gage(diff.) unidirectional<br />

50mb/5kPa gage(diff.) unidirectional<br />

100mb/10kPa gage(diff.) unidirectional<br />

200mb/20kPa gage(diff.) unidirectional<br />

500mb/50kPa gage(diff.,abs) unidirectional<br />

1b/100kPa gage(diff.,abs) unidirectional<br />

2b/200kPa<br />

unidirectional<br />

5b/500kPa<br />

7b/700kPa<br />

10b/1MPa<br />

16b/1.6MPa<br />

unidirectional<br />

unidirectional<br />

unidirectional<br />

unidirectional<br />

–5mb/0.5kPa<br />

–10mb/1kPa<br />

–20mb/2kPa<br />

–50mb/5kPa<br />

–100mb/10kPa<br />

–200mb/20kPa<br />

–500mb/50kPa<br />

–1b/100kPa<br />

–2b/200kPa<br />

–5b/500kPa<br />

–7b/700kPa<br />

gage(diff.,abs)<br />

gage(diff.,abs)<br />

gage(diff.,abs)<br />

gage(diff.,abs)<br />

gage(diff.,abs)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

70 mb / 7kPa<br />

350 mb / 35 kPa<br />

350 mb / 35kPa<br />

1b /100kPa<br />

1b/100kPa<br />

1b/100kPa<br />

5b/500kPa<br />

5b/500kPa<br />

10b/1MPa<br />

35b/3.5MPa<br />

35b/3.5MPa<br />

40b/4MPa<br />

50b/5MPa<br />

70 mb / 7kPa<br />

350 mb / 35 kPa<br />

350 mb / 35kPa<br />

1b /100kPa<br />

1b/100kPa<br />

1b/100kPa<br />

5b/500kPa<br />

5b/500kPa<br />

10b/1MPa<br />

35b/3.5MPa<br />

35b/3.5MPa<br />

0.20 - 4.90 V<br />

0.20 - 4.90 V<br />

0.20 - 4.90 V<br />

0.20 - 4.90 V<br />

0.20 - 4.90 V<br />

0.20 - 4.90 V<br />

0.20 - 4.90 V<br />

0.20 - 4.90 V<br />

0.20 - 4.90 V<br />

0.20 - 4.90 V<br />

0.20 - 4.90 V<br />

0.20 - 4.90 V<br />

0.20 - 4.90 V<br />

2.55 – 2.35 V<br />

2.55 – 2.35 V<br />

2.55 – 2.35 V<br />

2.55 – 2.35 V<br />

2.55 – 2.35 V<br />

2.55 – 2.35 V<br />

2.55 – 2.35 V<br />

2.55 – 2.35 V<br />

2.55 – 2.35 V<br />

2.55 – 2.35 V<br />

2.55 – 2.35 V<br />

CHARACTERISTICS<br />

Note: All parameters are measured with 5 Volt supply at 25 C, unless otherwise stated.<br />

PARAMETER MINIMUM NOMINAL MAXIMUM UNITS<br />

DC Supply Voltage<br />

Compensated Temperature Effect *4)<br />

Temperature Effect on Span *1)<br />

Temperature Effect on Offset 1*)<br />

Supply Current<br />

Linearity & Hysteresis *2)<br />

Repeatability<br />

4.50<br />

0<br />

0<br />

0<br />

0<br />

5.00<br />

25<br />

–0.25<br />

–0.25<br />

5.0<br />

–0.1<br />

–0.3<br />

5.50<br />

70<br />

–0.5<br />

–0.5<br />

9.6<br />

–0.25<br />

V<br />

C<br />

% FSS *3)<br />

% FSS *3)<br />

mA<br />

% FSS *3)<br />

% FSS *3)<br />

Zero Offset Calibration unidir./bidirct. Press. 0.175/2.538 0.200/2.550 0.225/2.562 V<br />

Span Calibration unidirectional/ bidirct. Press. 4.675/2.338 4.700/2.350 4.725/2.362 V<br />

Burst Pressure<br />

1.4 ... 20<br />

b<br />

Full Scale Pressure<br />

0.005 ... 16<br />

b<br />

Full Scale Span unidirectional/ bidirct. Pressure<br />

4.700/2.350<br />

V<br />

Max. Pressure applied to the Housing<br />

Response Time<br />

Cycle Time<br />

11<br />

10<br />

ms<br />

ms<br />

Power up Time to first result shifted out<br />

40<br />

ms<br />

Humidity (ambient)<br />

Gravitational Dependence<br />

0 95(100) % r.H.<br />

70mb Types<br />

20mb Types<br />

–0.05<br />

–0.25<br />

% FSS/g *3)<br />

% FSS/g *3)<br />

10mb Types<br />

–0.50 % FSS/g *3)<br />

5mb Types –1.00 % FSS/g *3)<br />

Notes:<br />

*1) Temperature specifications are relative to 25 C<br />

over the compensated temperature range<br />

*2) Best straigt line curve fit methode<br />

(through Zero, Full Scale and Half Full Scale)<br />

3.5 ... 20<br />

*3) FSS: Full Scale Span = Full Sale Output - Zero Offset<br />

*4) Extended temp. comp. available -40 C to 85 C(125 C).<br />

*5) other calibration values - incl. below 5 mb - on request<br />

b<br />

Doc#08-03-01-0014 Rev. B<br />

23.07.2007 by AB<br />

Copyright: SensDev Ltd.<br />

SensDev Ltd Tel. +49-3724-669 055<br />

International Sales<br />

Kressnerstr. 12 Fax.+49-3724-669 087<br />

D-09217 Burgstaedt eMail: sensprom@maltanet.net


SILICON PRESSURE SENSORS<br />

STANDARD TYPES <strong>SCPA</strong>... 5-Series<br />

<strong>SCPA</strong>...F-<strong>SERIES</strong><br />

Fixed referenced Voltage Output @10-25 V<br />

0.0... 5.0V or 2.5 – 2.5V<br />

PART NUMBER NOMINAL PRESSURE PROOF PRESSURE OUTPUT VOLTAGE<br />

<strong>SCPA</strong>-MB0/5G(D)0V5F<br />

<strong>SCPA</strong>-MB0/10G(D)0V5F<br />

<strong>SCPA</strong>-MB0/20G(D)0V5F<br />

<strong>SCPA</strong>-MB0/50G(D)0V5F<br />

<strong>SCPA</strong>-MB0/100G(D)0V5F<br />

<strong>SCPA</strong>-MB0/200 G(D)0V5F<br />

<strong>SCPA</strong>-MB0/500 G(D)0V5F<br />

<strong>SCPA</strong>-B0/1G(D,A)0V5F<br />

<strong>SCPA</strong>-B0/2G(D,A)0V5F<br />

<strong>SCPA</strong>-B0/5G(D,A)0V5F<br />

<strong>SCPA</strong>-B07G(D,A)0V5F<br />

<strong>SCPA</strong>-B0/10G(D,A)0V5F<br />

<strong>SCPA</strong>-B0/16G(D,A)0V5F<br />

<strong>SCPA</strong>-MB-5/5G(D)0V5F<br />

<strong>SCPA</strong>-MB-10/10G(D)0V5F<br />

<strong>SCPA</strong>-MB-20/20G(D)0V5F<br />

<strong>SCPA</strong>-MB-50/50G(D)0V5F<br />

<strong>SCPA</strong>-MB-100/100 G(D)0V5F<br />

<strong>SCPA</strong>-MB-200/200 G(D)0V5F<br />

<strong>SCPA</strong>-MB-500/500 G(D)0V5F<br />

<strong>SCPA</strong>-B-1/1G(D)0V5F<br />

<strong>SCPA</strong>-B-2/2G(D)0V5F<br />

<strong>SCPA</strong>-B-5/5G(D)0V5F<br />

<strong>SCPA</strong>-B-7/7G(D)0V5F<br />

5mb/0.5kPa gage(diff.) unidirectional<br />

10mb/1kPa gage(diff.) unidirectional<br />

20mb/2kPa gage(diff.) unidirectional<br />

50mb/5kPa gage(diff.) unidirectional<br />

100mb/10kPa gage(diff.) unidirectional<br />

200mb/20kPa gage(diff.) unidirectional<br />

500mb/50kPa gage(diff.,abs) unidirectional<br />

1b/100kPa gage(diff.,abs) unidirectional<br />

2b/200kPa<br />

unidirectional<br />

5b/500kPa<br />

7b/700kPa<br />

10b/1MPa<br />

16b/1.6MPa<br />

unidirectional<br />

unidirectional<br />

unidirectional<br />

unidirectional<br />

–5mb/0.5kPa<br />

–10mb/1kPa<br />

–20mb/2kPa<br />

–50mb/5kPa<br />

–100mb/10kPa<br />

–200mb/20kPa<br />

–500mb/50kPa<br />

–1b/100kPa<br />

–2b/200kPa<br />

–5b/500kPa<br />

–7b/700kPa<br />

gage(diff.,abs)<br />

gage(diff.,abs)<br />

gage(diff.,abs)<br />

gage(diff.,abs)<br />

gage(diff.,abs)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

gage(diff.)<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

bidirectional<br />

70 mb / 7kPa<br />

350 mb / 35 kPa<br />

350 mb / 35kPa<br />

1b /100kPa<br />

1b/100kPa<br />

1b/100kPa<br />

5b/500kPa<br />

5b/500kPa<br />

10b/1MPa<br />

35b/3.5MPa<br />

35b/3.5MPa<br />

40b/4MPa<br />

50b/5MPa<br />

70 mb / 7kPa<br />

350 mb / 35 kPa<br />

350 mb / 35kPa<br />

1b /100kPa<br />

1b/100kPa<br />

1b/100kPa<br />

5b/500kPa<br />

5b/500kPa<br />

10b/1MPa<br />

35b/3.5MPa<br />

35b/3.5MPa<br />

0.0 - 5.0 V<br />

0.0 - 5.0 V<br />

0.0 - 5.0 V<br />

0.0 - 5.0 V<br />

0.0 - 5.0 V<br />

0.0 - 5.0 V<br />

0.0 - 5.0 V<br />

0.0 - 5.0 V<br />

0.0 - 5.0 V<br />

0.0 - 5.0 V<br />

0.0 - 5.0 V<br />

0.0 - 5.0 V<br />

0.0 - 5.0 V<br />

2.5 – 2.5 V<br />

2.5 – 2.5 V<br />

2.5 – 2.5 V<br />

2.5 – 2.5 V<br />

2.5 – 2.5 V<br />

2.5 – 2.5 V<br />

2.5 – 2.5 V<br />

2.5 – 2.5 V<br />

2.5 – 2.5 V<br />

2.5 – 2.5 V<br />

2.5 – 2.5 V<br />

CHARACTERISTICS<br />

Note: All parameters are measured with 12 Volt supply at 25 C, unless otherwise stated.<br />

PARAMETER MINIMUM NOMINAL MAXIMUM UNITS<br />

DC Supply Voltage<br />

Compensated Temperature Effect *4)<br />

Temperature Effect on Span *1)<br />

Temperature Effect on Offset 1*)<br />

Supply Current<br />

Linearity & Hysteresis *2)<br />

Repeatability<br />

8.00<br />

0<br />

0<br />

0<br />

0<br />

12.00<br />

25<br />

–0.25<br />

–0.25<br />

5<br />

–0.1<br />

–0.3<br />

30.00<br />

70<br />

–0.5<br />

–0.5<br />

10<br />

–0.25<br />

V<br />

C<br />

% FSS *3)<br />

% FSS *3)<br />

mA<br />

% FSS *3)<br />

% FSS *3)<br />

Zero Offset Calibration unidir./bidirct. Press. 0.0/2.488 0.025/2.500 0.050/2.512 V<br />

Span Calibration unidirectional/ bidirct. Press. 4.975/2.488 5.00/2.50 5.025/2.512 V<br />

Burst Pressure<br />

1.4 ... 20<br />

b<br />

Full Scale Pressure<br />

0.005 ... 16<br />

b<br />

Full Scale Span unidirectional/ bidirct. Pressure<br />

5.00/2.50<br />

V<br />

Max. Pressure applied to the Housing<br />

Response Time<br />

Cycle Time<br />

11<br />

10<br />

ms<br />

ms<br />

Power up Time to first result shifted out<br />

40<br />

ms<br />

Humidity (ambient)<br />

Gravitational Dependence<br />

0 95(100) % r.H.<br />

70mb Types<br />

20mb Types<br />

–0.05<br />

–0.25<br />

% FSS/g *3)<br />

% FSS/g *3)<br />

10mb Types<br />

–0.50 % FSS/g *3)<br />

5mb Types –1.00 % FSS/g *3)<br />

Notes:<br />

*1) Temperature specifications are relative to 25 C<br />

over the compensated temperature range<br />

*2) Best straigt line curve fit methode<br />

(through Zero, Full Scale and Half Full Scale)<br />

3.5 ... 20<br />

*3) FSS: Full Scale Span = Full Sale Output - Zero Offset<br />

*4) Extended temp. comp. available -40 C to 85 C(125 C).<br />

*5) other calibration values - incl. below 5 mb - on request<br />

b<br />

Doc#08-03-01-0015 Rev.B<br />

23.7.2007 by AB<br />

Copyright: SensDev Ltd.<br />

SensDev Ltd Tel. +49-3724-669 055<br />

International Sales<br />

Kressnerstr. 12 Fax.+49-3724-669 087<br />

D-09217 Burgstaedt eMail: sensprom@maltanet.net


SILICON PRESSURE SENSORS<br />

S<br />

TM<br />

SEN PECIAL<br />

<strong>SCPA</strong>...-<strong>SERIES</strong><br />

OUTLINE DRAWING<br />

<strong>SCPA</strong>_D<br />

10.5<br />

7.9<br />

4.5<br />

+ Pressure Port<br />

4.60<br />

3.18<br />

1<br />

5.5<br />

0.25<br />

<strong>SCPA</strong>_D<br />

with V-Pinout<br />

15.5<br />

1.1<br />

0.63 Ceramic<br />

1.7<br />

16.00<br />

0.5<br />

3.68<br />

11.7<br />

2 3 4<br />

2.54<br />

0.5<br />

3.84<br />

11.7<br />

<strong>SCPA</strong>.. V<br />

PINOUT<br />

Dimensions in mm<br />

5.34<br />

11.53<br />

ceramic base AL2O3, glass filled nylon cap<br />

2 +Vsupply 5V/8 30V<br />

3 Ground<br />

4 Analog Voltage Output<br />

OUTLINE DRAWING<br />

<strong>SCPA</strong>_G/A<br />

10.5<br />

4.5<br />

7.9<br />

5.5<br />

1<br />

3.18<br />

4.60<br />

<strong>SCPA</strong>.. I²C<br />

PINOUT<br />

1 Clock SCL<br />

0.25<br />

<strong>SCPA</strong>_G/A<br />

with I2C-Pinout<br />

0.63 Ceramic<br />

16.00<br />

2 +Vsupply 5V/8 30V<br />

3 GND<br />

4 Analog Voltage Output<br />

5 Digital In/Out SDA<br />

15.5<br />

1.1<br />

1<br />

1.7<br />

11.7<br />

0.52<br />

2.54<br />

3.84<br />

2<br />

3 4 5<br />

0.5<br />

11.7<br />

6.2<br />

Dimensions in mm<br />

ceramic base AL2O3, glass filled nylon cap<br />

Doc#08-03-01-0011 Rev. B<br />

06.9.2007 by AB<br />

SensDev Ltd Tel. +49 3724 669055<br />

International Sales Fax.+49 3724 669087<br />

Kressenerstra e 12 eMail: sensprom@maltanet.net<br />

D-09217 Burgstaedt www.senspecial.com


SILICON PRESSURE SENSORS<br />

S<br />

TM<br />

SEN PECIAL<br />

Nomenclature<br />

Connection Diagram<br />

<strong>SCPA</strong>- I2C<br />

Sensor<br />

P<br />

2 V+ Supply<br />

3<br />

Ground<br />

<strong>SCPA</strong>-... <strong>SERIES</strong><br />

Amplified Pressure Sensors<br />

Voltage Output and<br />

I 2 C-Bus Slave<br />

<strong>SCPA</strong>-B0/1.5A0.1V4.9RW50I (example)<br />

<strong>SCPA</strong> Compensated/Calibrated Pressure Sensor Series Amplified output<br />

B Pressure Unit bar (also available: PSI = P, mb=MB, Pascal = Pa, kiloPascal=KPA,<br />

Inches Waterculomb= "H2O, Centimeter Wassers ule = CMWS)<br />

0/1.5 from 0 to 1.5 (Pressure Range)<br />

A Absolute Pressure (A); also available Relative (G+,G-), Gage (G+) / Vacuum (G-), Differential (D)<br />

0V5 Output: Voltage 0Volt to 5Volt<br />

I2C I 2 C-Bus Version; 12 bit Serial output and 11bit accuracy Voltage Output<br />

R Output Ratiometric supply to voltage or (F) for fixed output with internal voltage reference<br />

W50 Wires of 50 cm length soldered to the sensor leads<br />

I Industrial temperature range -40 C ... 85 C<br />

Vsupply: 5 V +-10%<br />

Analogue Vout is ratiometric to Supply Voltage<br />

7bit Slave Adresses (fixed): 1111 000<br />

V<br />

4<br />

5<br />

1<br />

Analog V-Out<br />

Digital In-Out SDA<br />

Clock Signal SCL<br />

Connection Diagram<br />

<strong>SCPA</strong>..V (with internal V-Reference)<br />

Vsupply: 8-30V<br />

Analogue Vout is independent from Supply Voltage<br />

Connection Diagram<br />

<strong>SCPA</strong>..V-R (ratiometric)<br />

Vsupply: 5 V+-10%<br />

Analogue Vout is ratiometric to Supply Voltage<br />

VRef<br />

2<br />

V+<br />

8-30V<br />

2<br />

V+<br />

5V<br />

-<br />

+<br />

4<br />

Vout<br />

-<br />

+<br />

4<br />

Vout<br />

3<br />

GND<br />

3<br />

GND<br />

Pressure Ports:<br />

Port P1 gage (G+)<br />

Port P2 vacuum (G-)<br />

+differential (D+)<br />

-differential (D-)<br />

absolute (A)<br />

Doc#08-03-01-0003 Rev. D<br />

06.09.2007 by AB<br />

SensDev Ltd Tel. +49 3724 669055<br />

International Sales Fax.+49 3724 669087<br />

Kressenerstra e 12 eMail: sensprom@maltanet.net<br />

D-09217 Burgstaedt www.senspecial.com

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