Pike Technologies Comprehensive Catalog of FTIR ... - Madatec

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Semiconductor Applications – FTIR Sampling Techniques Overview FTIR spectroscopy has established itself as a method of choice in several areas of industrial manufacturing. One of them is the quality control of semiconductor wafers. Here, the FTIR spectrometers are commonly used to measure Phosphosilicate glass (PSG) and Borophosphosilicate glass (BPSG) films, epitaxial film (EPI) thickness and interstitial oxygen and substitution carbon content. Addition of boron and phosphorus to silicate glass during manufacturing improves the final product uniformity and reduces glass forming temperatures. Borophosphosilicate glass (BPSG) melts 100 degrees lower than Phosphosilicate glass (PSG) and offers better flow characteristics. To maintain and optimize production processes, evaluation and verification of doping levels is required. FTIR allows simultaneous measurements of boron and phosphorus as well as the thickness of the glass in a quick and nondestructive procedure. The measurements are based on the interpretation of transmission spectra and quantification of boron, phosphorus and Si-O bands. K-matrix or Partial Least Squares (PLS) methods are used for concentration/thickness calculations. The epitaxial film (EPI) is a grown crystal layer having the same crystallographic orientation as the substrate crystal wafer. The epitaxial film differs from the substrate base as it is modified with various additives. Accurate, fast and precise determination of the EPI film thickness is important in the manufacturing process since film thickness and uniformity play a critical role in etching time and device yield across the wafer surface. Specular reflectance is used in FTIR measurements of the epitaxial layer thickness. The infrared beam enters the EPI layer, reflects off the substrate surface and makes another pass through the film when exiting. The film thickness calculations are based on one of the following methods: • Interference measurements – also called Constant Angle Reflection Interference Spectroscopy or CARIS. This method uses the interference fringe pattern obtained in the specular reflectance experiment. • Interferogram subtraction – based on the measurement of the primary and secondary interferogram of the sample and subtraction of this signal from that of the reference material. • Second Fourier Transform of spectral response data (CEPSTRUM). This method takes the difference of two spectral response curves and performs a second Fourier transform which provides signal intensity vs. sample thickness information. FTIR spectrum of BPSG on silicon wafer – transmission sampling mode Oxygen and carbon may be introduced to the molten silicon during the manufacturing process. These impurities can be trapped in the crystal lattice and affect final product characteristics. For these reasons, both need to be monitored and quantified. FTIR spectroscopy (transmission measurements) provides excellent means to perform this analysis. The application uses the absorption bands of Si-C and Si-O-Si to calculate concentration levels of substitution carbon and interstitial oxygen. Beer’s law is typically used to determine their concentrations. S PECIAL A PPLICATIONS 105
P IKE T ECHNOLOGIES WWW. PIKETECH. COM 608-274-2721 N OTES 106
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FTIR Instrument Code XX ABB Bomem F
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TABLE O F C ONTENTS Pages 1 - 6 Pag
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Sampling Kits If you are not sure w
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Comprehensive Transmission Sampling
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Valu-Line - High Performance Set of
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Attenuated Total Reflectance Sampli
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Table 1: MIRacle Crystal Plate Spec
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MIRacle Base Optics (must select, i
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GladiATR Base Optics (must select,
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HATR Crystal Plate Choices PIKE Tec
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HATR and HATRPlus Pressure Clamp (m
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Optimized FTIR spectrum of polymer
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VeeMAX II with ATR - Variable Angle
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Classic VATR - Variable Angle ATR f
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Table 1 ATR Sampling ZnSe, Diamond
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Diffuse Reflectance Products Diffus
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DiffusIR - Research Grade Diffuse R
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UpIR - Upward Looking Diffuse Refle
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X, Y Autosampler - Transmission and
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Diffuse Reflectance - Theory and Ap
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Specular Reflectance Products Specu
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Changing the angle of incidence wit
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80Spec - Grazing Angle Specular Ref
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10Spec - Measures Sample Reflectanc
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Specular Reflectance - Theory and A
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Polarization Products Polarizers ma
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Infrared Polarizers - Theory and Ap
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Integrating Sphere Products Integra
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NIR IntegratIR - Integrating Sphere
Page 60 and 61: Integrating Spheres - Introduction
Page 62 and 63: Fiber Optic Sampling Products Fiber
Page 64 and 65: FlexIR - NIR Fiber Optic Accessory
Page 66 and 67: Microsampling Products Microsamplin
Page 68 and 69: Switching from transmission to refl
Page 70 and 71: Microsampling Tools - Compression C
Page 72 and 73: Beam Condensers - 4X and 6X Version
Page 74 and 75: Transmission Sampling Products Tran
Page 76 and 77: RotatIR - Automated Rotating Sample
Page 78 and 79: X, Y Autosampler - Transmission and
Page 80 and 81: Demountable Liquid Cells - For Vers
Page 82 and 83: Long-Path Quartz Liquid Cells - For
Page 84 and 85: Demountable Liquid Cell Windows (mu
Page 86 and 87: Bolt Press & Hydraulic Die - Low-Co
Page 88 and 89: PIKE CrushIR - Digital Hydraulic Pr
Page 90 and 91: Sample Preparation Accessories - Fo
Page 92 and 93: Disks, Windows and Powders - For Tr
Page 94 and 95: Disks, 41 mm Diameter 3 mm Thicknes
Page 96 and 97: Short Path Gas Cells - For Samples
Page 98 and 99: Long-Path Gas Cells - For Measureme
Page 100 and 101: Transmission Sampling Techniques -
Page 102 and 103: An alternate method for analysis of
Page 104 and 105: Special Applications Products PIKE
Page 106 and 107: MappIR and MAP300 - For Automated A
Page 108 and 109: TGA/FTIR Accessory - Identification
Page 112 and 113: Other Useful Products for Spectrosc
Page 114 and 115: ATR spectra are somewhat different
Page 116 and 117: ATR Spectral Data Bases - Optimize
Page 118 and 119: Alphabetical Index A 10Spec, specul
Page 120 and 121: T Teflon gaskets, demountable cell
Page 122 and 123: 022-5340 HATR Liquid Jacketed Troug
Page 124 and 125: 160-1007 25 x 2 mm ZnSe (6 pack) 88
Page 126 and 127: 162-1130 Press-On Demountable Liqui
Page 128: We are PIKE Technologies, a small c
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