Pike Technologies Comprehensive Catalog of FTIR ... - Madatec

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Special Applications Products PIKE Technologies offers several FTIR accessories specially designed for use in a dedicated sampling environment. Our semiconductor sampling accessories highlight our dedication to providing tools to ease and streamline FTIR sampling technology. If you have special sampling needs not shown in our catalog, please contact us – we may be able to help. Page 100 Vertical Wafer Accessory For Analysis of Semiconductor Wafers Page 101 MappIR For Fully Automated Analysis of 200 mm Semiconductor Wafers Page 101 MAP300 For Fully Automated Analysis of 300 mm Semiconductor Wafers Page 103 TGA/FTIR Accessory Identification and Qualification of Evolved Gases from Thermogravimetric Analyzer Page 105 Semiconductor Applications FTIR Sampling Techniques Overview
P IKE T ECHNOLOGIES WWW. PIKETECH. COM 608-274-2721 Vertical Wafer Accessory – For Analysis of Semiconductor Wafers FEATURES OF THE VERTICAL WAFER ACCESSORY • Transmission analysis of semiconductor wafers for Carbon, Oxygen and BPSG • Manual and/or fully-automated operation • R-theta (rotation/translation) motion control providing complete wafer analysis • Contamination-free wafer mount • 6", 5", 4", 3" and 2" wafer sizes and custom mounts and blanks PIKE Technologies offers the Vertical Wafer Accessory for analysis of semiconductor wafers. The Vertical Wafer Accessory is an in-compartment tool for transmission analysis of semiconductor wafers for Carbon, Oxygen and BPSG. The accessory accommodates wafers up to 6 inches (150 mm) in diameter. Wafers are located in a demountable ring. Dimensional tolerances conform to SEMI standards. Delrin (hard polymer) mounting clips eliminate contact between the wafer and metal surfaces during the analysis. The clip mechanism facilitates convenient and repeatable wafer placement. The wafer support ring may be rotated through 360° and translated laterally through a distance of over 3" (75 mm) to produce an R-theta motion covering the entire surface of the wafer. The ring may be rotated and translated manually or automatically under stepper motor control using PIKE Technologies AutoPRO software. A scale is provided for each motion, providing verification of sample position. The automated system incorporates two precision stepper motors for rotation and translation of the plate. The motors are driven by the Motion Control Unit connected to a PC. The operation is managed by PIKE AutoPRO software which provides full user programmability and an easy to learn “point-and-click” environment. Polar or Cartesian (X, Y) coordinates may also be used to define test points. The AutoPRO software is written in Visual BASIC and allows complex test sequences to be setup, stored as methods and implemented with full flexibility. The Motion Control Unit features a smart power supply and operates at 85-265 VAC, 47-63 Hz. The PIKE Technologies Vertical Wafer Accessory requires minimum 3.5" beam height FTIR spectrometers. Please contact us for more product details. Vertical Wafer Accessory P ART N UMBER O RDERING I NFORMATION D ESCRIPTION 073-16XX Vertical Wafer Accessory, Manual Version Includes mount for your FTIR 073-26XX Vertical Wafer Accessory, Automated Version Includes the Motion Control Unit and AutoPRO software Notes: Please insert FTIR XX code found on the fold-out on the last page of this catalog. Requires 3.5" beam height or greater in FTIR. Options for Vertical Wafer Accessory P ART N UMBER D ESCRIPTION 073-3600 6" Wafer Mount, Blank 073-3660 Additional Wafer Mount 073-3650 Insert to Support 5" Wafer 073-3640 Insert to Support 4" Wafer 073-3630 Insert to Support 3" Wafer 073-3620 Insert to Support 2" Wafer Notes: For options not describe here, please contact PIKE Technologies. 100
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FTIR Instrument Code XX ABB Bomem F
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TABLE O F C ONTENTS Pages 1 - 6 Pag
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Sampling Kits If you are not sure w
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Comprehensive Transmission Sampling
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Valu-Line - High Performance Set of
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Attenuated Total Reflectance Sampli
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Table 1: MIRacle Crystal Plate Spec
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MIRacle Base Optics (must select, i
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GladiATR Base Optics (must select,
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HATR Crystal Plate Choices PIKE Tec
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HATR and HATRPlus Pressure Clamp (m
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Optimized FTIR spectrum of polymer
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VeeMAX II with ATR - Variable Angle
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Classic VATR - Variable Angle ATR f
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Table 1 ATR Sampling ZnSe, Diamond
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Diffuse Reflectance Products Diffus
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DiffusIR - Research Grade Diffuse R
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UpIR - Upward Looking Diffuse Refle
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X, Y Autosampler - Transmission and
Page 40 and 41:
Diffuse Reflectance - Theory and Ap
Page 42 and 43:
Specular Reflectance Products Specu
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Changing the angle of incidence wit
Page 46 and 47:
80Spec - Grazing Angle Specular Ref
Page 48 and 49:
10Spec - Measures Sample Reflectanc
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Specular Reflectance - Theory and A
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Polarization Products Polarizers ma
Page 54 and 55: Infrared Polarizers - Theory and Ap
Page 56 and 57: Integrating Sphere Products Integra
Page 58 and 59: NIR IntegratIR - Integrating Sphere
Page 60 and 61: Integrating Spheres - Introduction
Page 62 and 63: Fiber Optic Sampling Products Fiber
Page 64 and 65: FlexIR - NIR Fiber Optic Accessory
Page 66 and 67: Microsampling Products Microsamplin
Page 68 and 69: Switching from transmission to refl
Page 70 and 71: Microsampling Tools - Compression C
Page 72 and 73: Beam Condensers - 4X and 6X Version
Page 74 and 75: Transmission Sampling Products Tran
Page 76 and 77: RotatIR - Automated Rotating Sample
Page 78 and 79: X, Y Autosampler - Transmission and
Page 80 and 81: Demountable Liquid Cells - For Vers
Page 82 and 83: Long-Path Quartz Liquid Cells - For
Page 84 and 85: Demountable Liquid Cell Windows (mu
Page 86 and 87: Bolt Press & Hydraulic Die - Low-Co
Page 88 and 89: PIKE CrushIR - Digital Hydraulic Pr
Page 90 and 91: Sample Preparation Accessories - Fo
Page 92 and 93: Disks, Windows and Powders - For Tr
Page 94 and 95: Disks, 41 mm Diameter 3 mm Thicknes
Page 96 and 97: Short Path Gas Cells - For Samples
Page 98 and 99: Long-Path Gas Cells - For Measureme
Page 100 and 101: Transmission Sampling Techniques -
Page 102 and 103: An alternate method for analysis of
Page 106 and 107: MappIR and MAP300 - For Automated A
Page 108 and 109: TGA/FTIR Accessory - Identification
Page 110 and 111: Semiconductor Applications - FTIR S
Page 112 and 113: Other Useful Products for Spectrosc
Page 114 and 115: ATR spectra are somewhat different
Page 116 and 117: ATR Spectral Data Bases - Optimize
Page 118 and 119: Alphabetical Index A 10Spec, specul
Page 120 and 121: T Teflon gaskets, demountable cell
Page 122 and 123: 022-5340 HATR Liquid Jacketed Troug
Page 124 and 125: 160-1007 25 x 2 mm ZnSe (6 pack) 88
Page 126 and 127: 162-1130 Press-On Demountable Liqui
Page 128: We are PIKE Technologies, a small c
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Pike Technologies Comprehensive Catalog of FTIR ... - Madatec

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