Logo IFPAN po polsku - Instytut Fizyki PAN

INSTYTUT FIZYKI POLSKIEJ AKADEMII NAUK
PL - 02-668 WARSAW, POLAND, AL. LOTNIKÓW 32/46
Tel. (48-22) 843 66 01 Fax. (48-22) 843 09 26
REGON: P-000326061, NIP: 525-000-92-75
DZPIE/004/2009
Specification of essential
terms of the contract
Object of the contract: RTP System.
CPV code: 39.71.13.00-2
Procedure for awarding The public procurement contract will be awarded under the
the contract:
unlimited tendering procedure, in accordance with the Act of
January 29 th , 2004 (Polish Journal of Law 19/2004 chapter 177
Awarding entity:
dated February 9, 2004 with further amendments).
Instytut Fizyki Polskiej Akademii Nauk
02-668 Warsaw, POLAND, Al. Lotników 32/46.
NIP: 525-000-92-75; Regon: P-000326061
The purchase is partially supported by the European Union within European Regional
Development Fund, through grant Innovative Economy (POIG.01.01.02-00-008/08).
§1. Object of the contract:
Technical requirements of RTP System:
1. Wafer Size 2” to 4” configuration
2. Single Wafer Process.
3. Gold coated aluminum chamber with water cooling
4. Three gas lines for: Oxygen, Argon, Nitrogen
5. Shut-off valves for each gas line after MFT
6. Radiation heating lamp module
7. Process Temp Range: 100ºC to 1250ºC
8. Precise Temperature/Time control, Temperature measuring precision ± 1ºC.
9. Temperature measurement performed with Pyrometer and thermocouple
10. Multiple cycle processing capability
11. Steady state process time 0 to 30000 sec programmable
12. Temp Ramp-up Speed: 10 to 100ºC/s for wafer, Programmable
13. Ramp down speed 10 - 100ºC/s for wafer, Non-Progammable.
14. Computer and software with on line help function.
15. Software watch dog to eliminate machine damage duo to the computer locks up or
freeze
16. Lamp damage detect in process.
17. Sensor status detect function
18. A/D and D/A precision is 14 to 16 bits
19. Set of Spare kit for 1 replace including all quartz parts.

§2. Time limit for contract performance:
Required time of final delivery of whole device is not later than June 30, 2009.
§3. Description of the conditions for participation in the procedure and
the description of the method used for the evaluation of the fulfillment
of those conditions:
Eligible to compete for a contract shall be economic operators who:
1) are authorized to perform specific activities or actions, if such authorizations are
required by the law;
2) have the necessary knowledge and experience, and have at their disposal the
technical potential and personnel capable of performing the contract; or present a
written commitment of other entities where the technical potential and personnel
capable of performing the contract is made available to them;
3) are in a financial and economic situation ensuring the performance of the contract;
4) are not liable to exclusion from the award procedure.
The awarding entity will check the tenders, if there is a statement about the fulfilment of
conditions for the participation in contract award procedure.
§4. Information concerning declarations and documents to be provided by
economic operators to confirm the fulfillment of the conditions for
participation in the procedure:
1 Statement about the fulfillment of conditions for the participation in contract award
procedure.
§5. Information on the manner of communication between the awarding
entity and economic operators, indication of persons authorised to
communicate with the economic operators:
1 The awarding entity will contact with economic operators by fax or in writing. Exception
to this rule is lodging the protest, which will be accept only in writing.
2 Person authorised to communicate with the economic operators:
Maciej Zajączkowski – fax: (+48 22) 843 09 26.
§6. Time limit during which an economic operator must maintain its
tender:
1 The awarding entity determine the time limit during which tender must be maintained on
30 days from the date of time limit for submission of tenders.

§7. Description of the manner of the tender preparation:
1 The tender should be drawn up in Polish or English language in writing, using durable,
readable technique.
2 The technical specification of the offered products should be attached to the tender.
3 Every economic operator may submit only one tender. The economic operator, which
will submit more than one tender, will be excluded.
4 The tender should relates to whole contract according to requirements and conditions of
the specification.
5 All pages of the tender should be numbered, signed and stitched.
6 The economic operator should place the tender in two envelopes:
The inside envelopes should be addressed with awarding entity’s address and full name,
and marked with the inscription "Postępowanie o udzielenie zamówienia publicznego w
trybie przetargu nieograniczonego na RTP [DZPIE/004/2009]", outside envelope should
be marked like inside with address and full name of the economic operator.
§8. Date and place of the submission and of the opening of tenders:
1 The tender should be deposit in the awarding entity’s seat, building I room 101, between
9:00 am and 3:00 p.m. business days, till 12:00 a.m. March 30, 2009.
2 For tenders sent by post, the delivery time is the date and time of reception, not the date
of the postmark.
3 The opening of tenders will take place in the awarding entity’s seat, building I room 203
at 1:00 p.m., on the last day of the tender’s submission.
§9. Description of the method of the price calculation:
1 The price will be expressed in Polish currency (PLN) or US dollars (USD).
2 The total price should take into:
price of the products;
packing, delivery, installation, training;
taxes, insurance outside Poland.
§10. Description of criteria which the awarding entity will apply in
selecting a tender, specifying also the importance of particular criteria
and method of evaluation of tenders:
1 Total price 40 points
2 Technical parameters 40 points
3 Delivery date 20 points
4 The awarding entity will calculate total’s price points according to formula:
where:
C min – price of the cheapest tender;

C bad – price of the analysed tender.
5 The awarding entity will calculate technical’s parameters points by adding:
30 points for including spare parts in total price (2 lamps, chamber o-ring and all
quartz parts);
10 points for additional gas line.
6 The awarding entity will calculate delivery’s date points by adding 10 points for every 7
days of earlier than June 30, 2009 delivery (max. 14 days).
§11. Information concerning formalities which should be met following the
selection of a tender in order to conclude a public procurement
contract:
1 The economic operator, which will award the public procurement contract procedure,
should sign the contract in 7 days from the date of the end of time limit for lodging the
protests, according to conditions defined in this specification of essential terms of the
contract, but not later than time limit during which tender must be maintained.
§12. Provisions of essence to the parties which will be introduced into the
concluded public procurement contract:
1 Terms of payment: 100% of the contract value NET 30 from the date of protocol
acceptance object of the contract and receiving the invoice.
3 The economic operator, in case of delay, is obligated to pay in favor of awarding entity
penalties 0,1% of value of the contract for each day of default, starting from the first day
after the contractual performance date.
§13. Information on legal protection measures:
The economic operators can protect his rights according Section VI of the Act of Public
Procurement January 29th, 2004 (Polish Journal of Law 19/2004 chapter 177 dated February
9, 2004 with further amendments).

……………………………
address stamp of the economic operator
……………………………
date
Statement
We declare, that we are eligible to compete for a contract, and as a economic operator we:
5) are authorized to perform specific activities or actions, if such authorizations are
required by the law;
6) have the necessary knowledge and experience, and have at their disposal the
technical potential and personnel capable of performing the contract; or present a
written commitment of other entities where the technical potential and personnel
capable of performing the contract is made available to them;
7) are in a financial and economic situation ensuring the performance of the contract;
8) are not liable to exclusion from the award procedure.
…………………………
person stamp of the economic operator

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address stamp of the economic operator
……………………………
date
Parts of the contract which
the economic operator intends to subcontract.
Item
Parts of the contract which
the economic operator intends to subcontract
1
2
3
4
5
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person stamp of the economic operator