EDWARDS AND THE ENVIRONMENT
EDWARDS AND THE ENVIRONMENT
EDWARDS AND THE ENVIRONMENT
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<strong>EDWARDS</strong><br />
<strong>AND</strong> <strong>THE</strong> <strong>ENVIRONMENT</strong><br />
VACUUM & ABATEMENT INNOVATIVE TECHNOLOGY GLOBAL STRENGTH LOCAL SUPPORT
Our Commitment<br />
We will be the leader in the field of vacuum pumping and abatement by applying technology,<br />
products and services to benefit the environment for future generations.<br />
Edwards is committed to excellence in the management of the environment and there is no<br />
higher priority for us.<br />
• Over our product’s lifecycle we are Green House Gas or Carbon equivalent negative, in<br />
other words our abatement products destroy compounds that have a very high global<br />
warming potential.<br />
• Our technologies enable the manufacturing of a wide range of environmental products<br />
- vacuum is essential for the production of solar<br />
cells and solid state lighting.<br />
• When our products need replacing we offer ways<br />
to refurbish them for reuse – we already refurbish<br />
35,000 of them each year. At the end of their life<br />
cycle, our vacuum products are disassembled so<br />
that their primary materials are recycled keeping<br />
them out of landfills.<br />
• We’re also investing in new facilities that meet<br />
or exceed environmental norms and changing the<br />
ways we work.<br />
Read on to find out how we are doing it...<br />
and see our website for live updates on our progress.<br />
Matthew Taylor - CEO, Edwards<br />
Our Policy & Goals<br />
We are committed to constantly improving our environmental systems and our performance.<br />
• Climate change<br />
——<br />
Reduce our products’ energy consumption<br />
——<br />
Working to SEMI, ITRS & S23 guidelines*<br />
——<br />
Reduce our emissions<br />
——<br />
Reduce our customers’ emissions<br />
• Resource Conservation<br />
——<br />
Reduce/Reuse/Recycle<br />
——<br />
Reduce hazardous content of our products<br />
——<br />
Remanufacturing & Service<br />
* SEMI = Semiconductor Equipment & Materials International<br />
ITRS = International Technology Roadmap for Semiconductors<br />
S23 = Guide for conservation of energy, utilities and materials used by semiconductor manufacturing equipment
Our Aims<br />
To support these aims, we have published a set of Green Goals covering our plans to reduce the impact of<br />
our operations of our products. We will …<br />
• Reduce our customers’ carbon footprints through the use of our products - by providing equipment to<br />
abate our customers’ emissions and introducing high efficiency vacuum and abatement products.<br />
• Reduce the carbon intensity of our operations.<br />
• Reduce waste - from our facilities, eliminating all waste to landfill - and by enabling the reuse of our<br />
products through service and remanufacture.<br />
• Reduce water usage at our facilities.<br />
Strong environmental systems in place<br />
• Major sites certified to ISO14001<br />
——<br />
International standard for environmental management systems.<br />
• Member of Electronic Industries Citizenship Coalition (EICC)<br />
——<br />
An electronics industry scheme to improve the social, economic and environmental<br />
conditions of the industry and its supply chain.<br />
• Member of SEMI Global Care<br />
——<br />
Semiconductor industry program encouraging improvement and excellence in environment,<br />
safety and product stewardship.<br />
• Member of the International Sematech Manufacturing Initiative (ISMI)<br />
——<br />
World-wide collaborative program dedicated to cooperatively finding and implementing the<br />
most cost-effective, environmentally-friendly manufacturing processes and procedures.<br />
• Member of Mayday Network<br />
——<br />
UK’s largest group of businesses committed to taking action on climate change.<br />
• Contributing to case studies, such as the Special Report on GHG Management and<br />
Reporting, with Institute of Environmental Management and Assessment (IEMA) the<br />
professional membership body for promoting best practice standards in environmental<br />
management, auditing and assessment for all industry sectors.
“... over our products’ life cycle<br />
we are carbon negative”<br />
Carbon Report<br />
The carbon footprint converts all materials, transport and energy use into an equivalent amount of<br />
Carbon Dioxide (CO 2<br />
) generated.<br />
To calculate our carbon footprint we need to look at the CO 2<br />
generated by our operations and our<br />
products in use in the following key areas:<br />
• Materials • Facilities • Transport • Product use • Abatement<br />
Annual CO 2<br />
e reduction due to Edwards<br />
products - production and use (millions tonnes)<br />
2<br />
2006<br />
2008<br />
2009<br />
1<br />
0<br />
-1<br />
-2<br />
-3<br />
-4<br />
Materials<br />
use p.a.<br />
Factory energy<br />
use p.a. †<br />
Transport Product energy<br />
emissions p.a. use p.a.<br />
(installed base)<br />
† Scope 1 (Direct emissions) and Scope 2<br />
(emissions from electricity use) carbon<br />
emissions as defined by the Greenhouse<br />
Gas Protocol. All other data is Scope 3<br />
(Indirect emissions).<br />
-5<br />
Overall eCO 2<br />
reduction p.a.<br />
-6<br />
-7<br />
PFC emissions<br />
abated p.a.<br />
(installed base)<br />
-8<br />
The graph shows the results for these calculations for the calendar year 2009.<br />
Manufacturing, remanufacturing and product use generates ~2 million tonnes of CO 2<br />
equivalent p.a.<br />
at Edwards, our supply chain and our customers’ facilities.<br />
Abatement prevents the emission of ~6 million tonnes CO 2<br />
equivalent p.a. at our customers’ facilities.
Enabling Environmental Technology<br />
SOLID STATE LIGHTING<br />
Solid-state lighting sources, such as light emitting diodes (LEDs), offer energy<br />
savings and environmental benefits compared to traditional incandescent<br />
or fluorescent lamps. In some cases they can offer a 95% energy saving over<br />
conventional lighting systems. LEDs are semiconductor devices manufactured<br />
under vacuum using gases that need careful handling – Edwards vacuum and<br />
abatement systems enable the process and protect the environment.<br />
SOLAR CELLS<br />
A photovoltaic solar cell (PV cell) is also a semiconductor device which, in the<br />
presence of light, generates electricity. Solar cells provide clean renewable<br />
energy, producing zero air pollution, hazardous waste or noise. As economies<br />
of scale take effect, the size of the process chambers has increased – again<br />
Edwards vacuum and abatement equipment is at the forefront of enabling<br />
the development of this environmentally beneficial technology ensuring it is<br />
achieved with minimum environmental impact from production.<br />
GLASS COATING<br />
Vacuum coated glass is primarily used to control the solar generated thermal<br />
energy load on buildings. Multiple layers comprising exotic metal oxides create<br />
infrared reflecting properties. Reducing the heat load on buildings reduces the<br />
need for electrical power to run air conditioning in hot countries. Conversely<br />
in cold countries these same reflective properties are used to retain heat and<br />
reduce fuel used for heating. By upgrading the vacuum pumping technology<br />
(from diffusion pumps to STP turbo molecular pumps) we have reduced the<br />
energy consumption of this process by up to 95%, with a CO 2<br />
reduction of 22.6<br />
tonnes per year.<br />
BIOFUEL PRODUCTION<br />
The term biofuel applies to any solid, liquid or gaseous fuel produced from<br />
organic (once-living) matter. The word biofuel covers a wide range of products,<br />
some of which are commercially available today and some of which are still<br />
in research and development. Processing this material under vacuum, using<br />
Edwards chemical dry pumps, avoids contamination of oil and water that is an<br />
integral part of other vacuum technologies.<br />
STEEL DEGASSING<br />
Vacuum degassing (VD) and vacuum oxygen decarburisation (VOD) are used<br />
in the production of speciality steel alloys to reduce the levels of hydrogen,<br />
carbon and other impurities during the secondary steel making process.<br />
Edwards dry mechanical vacuum pumps offer considerable energy savings<br />
compared to the traditional multi-stage steam ejector systems, backed with<br />
liquid ring pumps.
Products<br />
Reduced Carbon Emissions o<br />
There are two main ways in which Edwards impacts the environment, firstly making our products<br />
more efficient and effective at what they do, and secondly how we manage our impact on the<br />
environment within our business.<br />
We care about sustainability and we are working to ensure the things we do, and the way we do<br />
them, become more sustainable.<br />
We have made several major step changes in product design driven by environmental<br />
considerations. Efficient use of resources is crucial in our product design and development,<br />
lowering cost of ownership for customers with particular emphasis on reducing power and water<br />
consumption.<br />
Primary Pumps<br />
Reducing our customers’ energy use<br />
In the semiconductor industry process pumps are one of the largest energy users on a process tool<br />
which in turn can account for over a third of a fab’s energy use (SEMATECH Energy research). The<br />
global installed base of semiconductor vacuum pumps consumes the equivalent energy of Sheffield<br />
in the UK or Plano in Texas, USA.<br />
At Edwards, we design in energy saving and reduced utility costs without compromising reliability.<br />
Using a platform design process each successive generation of our primary pumps consumes less<br />
energy. For example the latest generation dry pumps use around 30% less energy than previously.<br />
And now, with the introduction of Active Utility Control (AUC) we reduce consumption of energy<br />
and utilities even further when pumps are idle using signals from the tool.<br />
We make sure that the benefits of our latest generation platform technology are used throughout<br />
our pump range. These benefits are made available to customers running older generation pumps<br />
through Edwards’ energy efficiency upgrade programmes.<br />
We also advise customers how to minimise energy used by our equipment.
f Latest Generation Products<br />
Secondary Pumps<br />
Reducing our customers’ energy use<br />
Reducing global energy consumption is key in the fight against global warming. In<br />
addition to minimising the energy our production facilities and offices consume, our<br />
latest generations of turbo molecular pump ranges enable our customers to meet their<br />
energy reduction targets. Edwards offers upgrade programmes enabling customers to<br />
switch to energy efficient turbo molecular pump technology.<br />
For example, benefits of switching from oil diffusion pumps to STP turbo molecular<br />
pumps:<br />
• Lower utility cost (Power and Water)<br />
• No annual maintenance or oil changes<br />
• Increased pumping performance<br />
• Very low ambient noise and low vibration<br />
• Reduced space requirements<br />
Utility Use<br />
14<br />
12<br />
slm or kW<br />
10<br />
8<br />
6<br />
4<br />
Power<br />
Water<br />
2<br />
0<br />
HT16 Diffusion<br />
pump<br />
HT10 diffusion<br />
pump<br />
STP Maglev Turbo
Reduced Carbon Emissions o<br />
Abatement<br />
Reducing our customers’ emissions<br />
Semiconductor manufacturing processes use gases, such as per fluorocarbons and sulphur<br />
hexafluoride, which are of high environmental concern due to their persistence and high Global<br />
Warming Potential (GWP). These substances may have GWP’s 1000’s of times that of carbon dioxide.<br />
For example:<br />
If CO 2<br />
has a global warming potential (GWP) of 1 over 100 years, over the same time period -<br />
SF 6<br />
has a GWP of 23,900<br />
NF 3<br />
has a GWP of 10,970<br />
CF 4<br />
has a GWP of 6,500<br />
Edwards has been helping our customers achieve high levels of destruction removal efficiency of<br />
these substances since the mid 1990s using our combustion abatement technology. More recently<br />
with plasma technology, our customers have been able to achieve CO 2<br />
reductions of >90% across<br />
entire fabs - in line with The World Semiconductor Council’s targets.<br />
For production of flat panels and emerging environmental devices such as solar panels and LED<br />
lighting, we have developed the Specta Z and G abatement systems to cope with higher gas flows.<br />
In fact we estimate that Edwards abatement products prevent CO 2<br />
output equivalent to 1% of the<br />
UK’s annual CO 2<br />
output.<br />
Reducing our customers’ energy use<br />
The Atlas range of abatement products use up to 50% less fuel than previous ranges. Edwards also<br />
offers Atlas technology as an energy efficiency upgrade to previous ranges of abatement products.<br />
By combining pumps and abatement systems we have saved energy as well by applying idle mode<br />
technology.<br />
10<br />
Utility Use per Chamber<br />
0.4<br />
Fuel<br />
N2<br />
Water<br />
Power<br />
8<br />
0.3<br />
slm<br />
6<br />
4<br />
0.2<br />
kW<br />
2<br />
0.1<br />
0<br />
TCS4 Atlas TCS4 Atlas TCS6<br />
0.0
f Latest Generation Products<br />
eZenith<br />
Reducing our customers’ energy use<br />
Edwards has combined abatement and pumping systems as well as using other techniques<br />
similar to those on pumps, to reduce the environmental impact of abatement products. This<br />
has resulted in energy reductions of up to 50% on some abatement products such as the<br />
Zenith Atlas system.<br />
eZenith is the latest iteration of the Zenith concept which incorporates state of the art iGX<br />
and iXH pumps. The iXH is the most energy efficient pump for its size ever produced – and<br />
the latest Atlas abatement equipment, where intensive lab work has enabled the size of the<br />
combustor to be reduced by about half without any sacrifice in performance. As a result fuel<br />
consumption is reduced by a similar amount, giving significant environmental and cost of<br />
ownership benefits. In addition, eZenith provides benefits of Space saving and small footprint,<br />
centralised controls and speed of install.<br />
A key attraction of the eZenith is that it is already green mode enabled. Process tools tend<br />
to be idle about 25% of the time, and when this happens the eZenith switches to green<br />
mode which reduces the fuel consumption by 90%. Energy is major item of expenditure in a<br />
fab – in Korea it is estimated that Samsung’s semiconductor activities alone use 1% of all the<br />
country’s power – so reduced running costs and the ability to switch to green mode represent<br />
a significant saving for the customer.<br />
Edwards Spectra Z<br />
Green Solar Manufacturing Award<br />
Edwards Spectra Z 300 was shortlisted for the Green Solar Manufacturing Award - for<br />
technology which reduces emissions or impacts positively on the environment during the<br />
solar manufacturing process. Solar cell manufacturing is becoming increasingly important<br />
as an environmentally-friendly means of generating electrical power, and the growth of<br />
thin films of micro crystalline silicon will form a key part of this. The PECVD growth of this<br />
material poses a number of significant challenges regarding the treatment of the resultant<br />
exhaust gases, in terms of removing toxic, corrosive, global warming, and flammable gases<br />
safely, at low cost, whilst also minimising the environmental impact. This award is one of the<br />
International Solar Technology Awards which are organised by a group of leading solar media,<br />
research organisations and industry associations
Operations<br />
Actions on Resource Conservation<br />
We have an excellent track record in the environment, helping bring benefits to some of the<br />
world’s biggest businesses by reducing customers’ power and water consumption, treating<br />
hazardous waste and remanufacturing used pumps. Our remanufacturing story is a particularly<br />
significant environmental success story. Imagine a car industry able to offer complete recycling,<br />
but that’s what happened in the world of vacuum pumps. In the last thirty years we are now the<br />
global leader of recycling pumps and remanufacturing is now a significant part of Edwards’ service<br />
business.<br />
Remanufacturing and Service<br />
Re-Use through Re-Manufacture<br />
After use many Edwards products are contaminated with hazardous process by-products, and - if<br />
disposed of - would need to be treated as hazardous waste.<br />
A global network of service and remanufacturing facilities which safely decontaminate and<br />
remanufacture over 35,000 used vacuum pumps a year.<br />
Most vacuum pumps run 24/7 and are re-used 4-10 times over a 10-20 year<br />
lifetime. That’s equivalent to a car travelling around 2 million miles!<br />
Remanufacture typically involves the reuse of over 90% by weight of a pump’s<br />
components – with a corresponding saving in raw materials and their embodied<br />
carbon dioxide. In Europe we offer a free recycling service for gauges and<br />
controllers.
Energy Efficiency Upgrades<br />
Edwards latest generation energy efficient products not only offer energy savings, reduced<br />
utilities consumption and reduced carbon emissions, but also potentially offer future-proofing<br />
against carbon taxes and may qualify for “Green Grants”. We enable customers running older<br />
generation pumping and abatement products to benefit from these features with our upgrade<br />
programmes, which include the responsible recycling of upgraded products returned to us<br />
through our Remanufacturing operations.<br />
Reducing our Emissions<br />
Organic solvents containing Volatile Organic Compounds are a major source of pollution in the<br />
lower atmosphere and especially in built-up areas where respiratory problems can be caused.<br />
Water based cleaning has eliminated the use of solvents in our production and<br />
remanufacturing processes.<br />
In addition, the use of closed-loop recirculating water systems in our remanufacturing<br />
facilities reduces their water consumption by more than 90%.<br />
Reduced Hazardous Material Content<br />
There is a growing amount of legislation around the world (for example EU RoHS Directive*)<br />
to eliminate trace levels of heavy metals from electronic products, as these have the<br />
potential to leach out of landfill sites.<br />
Although vacuum equipment is outside the scope of the RoHS Directive, we are<br />
implementing a voluntary policy to eliminate all ‘RoHS 6’ chemicals from our new product<br />
ranges.<br />
Information on RoHS compliance of Edwards products can be found on the product section<br />
of our website.<br />
Reducing Waste<br />
Reduce/Reuse/Recycle<br />
It is Edwards policy that all major facilities are certified to ISO14001. As part of our<br />
ISO14001 management systems, our environmental policy incorporates a number<br />
of initiatives to minimise unnecessary waste. For a number of years we have been<br />
implementing a successful recycling policy as part of our active company policy on<br />
reducing landfill waste.<br />
* EU Directive 2002/95/EC on the Restriction of certain Hazardous Substances controls the levels of lead,<br />
mercury, cadmium, hexavalent chromium, polybrominated biphenyls and polybrominated diphenyl<br />
ethers in certain categories of electrical equipment.
Edwards — the company you have known and trusted for nearly 100 years – continues to deliver<br />
innovative vacuum pumps and related systems. We strive to lower your cost of ownership,<br />
increase your productivity and enhance your final product quality. Edwards products are based on<br />
a solid foundation of manufacturing excellence, field-proven technologies and are supported by a<br />
renowned global services network.<br />
Edwards stands behind each product with exceptional integrity and strength, supporting our<br />
customers beyond standard expectations. Edwards is essential to your process.<br />
PRODUCTS:<br />
SERVICES:<br />
© Edwards Limited 2011. All rights reserved. Edwards and the Edwards logo are trade marks of Edwards Limited.<br />
• Dry Vacuum Pumps<br />
• Oil-sealed Vacuum Pumps<br />
• Turbomolecular Pumps<br />
• Exhaust Management<br />
• Integrated Vacuum and Abatement<br />
• Liquid Abatement<br />
• Vacuum System Components<br />
GLOBAL CONTACTS:<br />
BELGIUM<br />
Brussels +32 2 300 0730<br />
BRAZIL<br />
Sao Paulo +55 11 3952 5000<br />
CHINA<br />
Shanghai +86 21 5866 9618<br />
FRANCE<br />
Paris +33 1 4121 1256<br />
GERMANY<br />
Munich 0800 000 1456<br />
• Equipment Service and Repair<br />
• Product Exchange<br />
• Refurbished Equipment<br />
• Field and On-site Services<br />
• Remote e-Diagnostics<br />
• Product Training<br />
INDIA<br />
Pune +91 20 4075 2222<br />
ISRAEL<br />
Qiryat Gat +972 8 681 0633<br />
ITALY<br />
Milan +39 02 48 4471<br />
JAPAN<br />
Yachiyo +81 47 458 8831<br />
KOREA<br />
Bundang +82 31 716 7070<br />
SINGAPORE<br />
Singapore +65 6546 8408<br />
TAIWAN R.O.C.<br />
Jhunan Town +886 3758 1000<br />
UNITED KINGDOM<br />
Crawley +44 1293 528844<br />
UK Local Rate (UK Only) 08459 212223<br />
UNITED STATES<br />
Toll Free (US Only) +1 800 848 9800<br />
info@edwardsvacuum.com<br />
Publication Number: J35000895, Issue B. Rev 01/2011