EDWARDS AND THE ENVIRONMENT

EDWARDS
AND THE ENVIRONMENT
VACUUM & ABATEMENT INNOVATIVE TECHNOLOGY GLOBAL STRENGTH LOCAL SUPPORT

Our Commitment
We will be the leader in the field of vacuum pumping and abatement by applying technology,
products and services to benefit the environment for future generations.
Edwards is committed to excellence in the management of the environment and there is no
higher priority for us.
• Over our product’s lifecycle we are Green House Gas or Carbon equivalent negative, in
other words our abatement products destroy compounds that have a very high global
warming potential.
• Our technologies enable the manufacturing of a wide range of environmental products
- vacuum is essential for the production of solar
cells and solid state lighting.
• When our products need replacing we offer ways
to refurbish them for reuse – we already refurbish
35,000 of them each year. At the end of their life
cycle, our vacuum products are disassembled so
that their primary materials are recycled keeping
them out of landfills.
• We’re also investing in new facilities that meet
or exceed environmental norms and changing the
ways we work.
Read on to find out how we are doing it...
and see our website for live updates on our progress.
Matthew Taylor - CEO, Edwards
Our Policy & Goals
We are committed to constantly improving our environmental systems and our performance.
• Climate change
——
Reduce our products’ energy consumption
——
Working to SEMI, ITRS & S23 guidelines*
——
Reduce our emissions
——
Reduce our customers’ emissions
• Resource Conservation
——
Reduce/Reuse/Recycle
——
Reduce hazardous content of our products
——
Remanufacturing & Service
* SEMI = Semiconductor Equipment & Materials International
ITRS = International Technology Roadmap for Semiconductors
S23 = Guide for conservation of energy, utilities and materials used by semiconductor manufacturing equipment

Our Aims
To support these aims, we have published a set of Green Goals covering our plans to reduce the impact of
our operations of our products. We will …
• Reduce our customers’ carbon footprints through the use of our products - by providing equipment to
abate our customers’ emissions and introducing high efficiency vacuum and abatement products.
• Reduce the carbon intensity of our operations.
• Reduce waste - from our facilities, eliminating all waste to landfill - and by enabling the reuse of our
products through service and remanufacture.
• Reduce water usage at our facilities.
Strong environmental systems in place
• Major sites certified to ISO14001
——
International standard for environmental management systems.
• Member of Electronic Industries Citizenship Coalition (EICC)
——
An electronics industry scheme to improve the social, economic and environmental
conditions of the industry and its supply chain.
• Member of SEMI Global Care
——
Semiconductor industry program encouraging improvement and excellence in environment,
safety and product stewardship.
• Member of the International Sematech Manufacturing Initiative (ISMI)
——
World-wide collaborative program dedicated to cooperatively finding and implementing the
most cost-effective, environmentally-friendly manufacturing processes and procedures.
• Member of Mayday Network
——
UK’s largest group of businesses committed to taking action on climate change.
• Contributing to case studies, such as the Special Report on GHG Management and
Reporting, with Institute of Environmental Management and Assessment (IEMA) the
professional membership body for promoting best practice standards in environmental
management, auditing and assessment for all industry sectors.

“... over our products’ life cycle
we are carbon negative”
Carbon Report
The carbon footprint converts all materials, transport and energy use into an equivalent amount of
Carbon Dioxide (CO 2
) generated.
To calculate our carbon footprint we need to look at the CO 2
generated by our operations and our
products in use in the following key areas:
• Materials • Facilities • Transport • Product use • Abatement
Annual CO 2
e reduction due to Edwards
products - production and use (millions tonnes)
2
2006
2008
2009
1
0
-1
-2
-3
-4
Materials
use p.a.
Factory energy
use p.a. †
Transport Product energy
emissions p.a. use p.a.
(installed base)
† Scope 1 (Direct emissions) and Scope 2
(emissions from electricity use) carbon
emissions as defined by the Greenhouse
Gas Protocol. All other data is Scope 3
(Indirect emissions).
-5
Overall eCO 2
reduction p.a.
-6
-7
PFC emissions
abated p.a.
(installed base)
-8
The graph shows the results for these calculations for the calendar year 2009.
Manufacturing, remanufacturing and product use generates ~2 million tonnes of CO 2
equivalent p.a.
at Edwards, our supply chain and our customers’ facilities.
Abatement prevents the emission of ~6 million tonnes CO 2
equivalent p.a. at our customers’ facilities.

Enabling Environmental Technology
SOLID STATE LIGHTING
Solid-state lighting sources, such as light emitting diodes (LEDs), offer energy
savings and environmental benefits compared to traditional incandescent
or fluorescent lamps. In some cases they can offer a 95% energy saving over
conventional lighting systems. LEDs are semiconductor devices manufactured
under vacuum using gases that need careful handling – Edwards vacuum and
abatement systems enable the process and protect the environment.
SOLAR CELLS
A photovoltaic solar cell (PV cell) is also a semiconductor device which, in the
presence of light, generates electricity. Solar cells provide clean renewable
energy, producing zero air pollution, hazardous waste or noise. As economies
of scale take effect, the size of the process chambers has increased – again
Edwards vacuum and abatement equipment is at the forefront of enabling
the development of this environmentally beneficial technology ensuring it is
achieved with minimum environmental impact from production.
GLASS COATING
Vacuum coated glass is primarily used to control the solar generated thermal
energy load on buildings. Multiple layers comprising exotic metal oxides create
infrared reflecting properties. Reducing the heat load on buildings reduces the
need for electrical power to run air conditioning in hot countries. Conversely
in cold countries these same reflective properties are used to retain heat and
reduce fuel used for heating. By upgrading the vacuum pumping technology
(from diffusion pumps to STP turbo molecular pumps) we have reduced the
energy consumption of this process by up to 95%, with a CO 2
reduction of 22.6
tonnes per year.
BIOFUEL PRODUCTION
The term biofuel applies to any solid, liquid or gaseous fuel produced from
organic (once-living) matter. The word biofuel covers a wide range of products,
some of which are commercially available today and some of which are still
in research and development. Processing this material under vacuum, using
Edwards chemical dry pumps, avoids contamination of oil and water that is an
integral part of other vacuum technologies.
STEEL DEGASSING
Vacuum degassing (VD) and vacuum oxygen decarburisation (VOD) are used
in the production of speciality steel alloys to reduce the levels of hydrogen,
carbon and other impurities during the secondary steel making process.
Edwards dry mechanical vacuum pumps offer considerable energy savings
compared to the traditional multi-stage steam ejector systems, backed with
liquid ring pumps.

Products
Reduced Carbon Emissions o
There are two main ways in which Edwards impacts the environment, firstly making our products
more efficient and effective at what they do, and secondly how we manage our impact on the
environment within our business.
We care about sustainability and we are working to ensure the things we do, and the way we do
them, become more sustainable.
We have made several major step changes in product design driven by environmental
considerations. Efficient use of resources is crucial in our product design and development,
lowering cost of ownership for customers with particular emphasis on reducing power and water
consumption.
Primary Pumps
Reducing our customers’ energy use
In the semiconductor industry process pumps are one of the largest energy users on a process tool
which in turn can account for over a third of a fab’s energy use (SEMATECH Energy research). The
global installed base of semiconductor vacuum pumps consumes the equivalent energy of Sheffield
in the UK or Plano in Texas, USA.
At Edwards, we design in energy saving and reduced utility costs without compromising reliability.
Using a platform design process each successive generation of our primary pumps consumes less
energy. For example the latest generation dry pumps use around 30% less energy than previously.
And now, with the introduction of Active Utility Control (AUC) we reduce consumption of energy
and utilities even further when pumps are idle using signals from the tool.
We make sure that the benefits of our latest generation platform technology are used throughout
our pump range. These benefits are made available to customers running older generation pumps
through Edwards’ energy efficiency upgrade programmes.
We also advise customers how to minimise energy used by our equipment.

f Latest Generation Products
Secondary Pumps
Reducing our customers’ energy use
Reducing global energy consumption is key in the fight against global warming. In
addition to minimising the energy our production facilities and offices consume, our
latest generations of turbo molecular pump ranges enable our customers to meet their
energy reduction targets. Edwards offers upgrade programmes enabling customers to
switch to energy efficient turbo molecular pump technology.
For example, benefits of switching from oil diffusion pumps to STP turbo molecular
pumps:
• Lower utility cost (Power and Water)
• No annual maintenance or oil changes
• Increased pumping performance
• Very low ambient noise and low vibration
• Reduced space requirements
Utility Use
14
12
slm or kW
10
8
6
4
Power
Water
2
0
HT16 Diffusion
pump
HT10 diffusion
pump
STP Maglev Turbo

Reduced Carbon Emissions o
Abatement
Reducing our customers’ emissions
Semiconductor manufacturing processes use gases, such as per fluorocarbons and sulphur
hexafluoride, which are of high environmental concern due to their persistence and high Global
Warming Potential (GWP). These substances may have GWP’s 1000’s of times that of carbon dioxide.
For example:
If CO 2
has a global warming potential (GWP) of 1 over 100 years, over the same time period -
SF 6
has a GWP of 23,900
NF 3
has a GWP of 10,970
CF 4
has a GWP of 6,500
Edwards has been helping our customers achieve high levels of destruction removal efficiency of
these substances since the mid 1990s using our combustion abatement technology. More recently
with plasma technology, our customers have been able to achieve CO 2
reductions of >90% across
entire fabs - in line with The World Semiconductor Council’s targets.
For production of flat panels and emerging environmental devices such as solar panels and LED
lighting, we have developed the Specta Z and G abatement systems to cope with higher gas flows.
In fact we estimate that Edwards abatement products prevent CO 2
output equivalent to 1% of the
UK’s annual CO 2
output.
Reducing our customers’ energy use
The Atlas range of abatement products use up to 50% less fuel than previous ranges. Edwards also
offers Atlas technology as an energy efficiency upgrade to previous ranges of abatement products.
By combining pumps and abatement systems we have saved energy as well by applying idle mode
technology.
10
Utility Use per Chamber
0.4
Fuel
N2
Water
Power
8
0.3
slm
6
4
0.2
kW
2
0.1
0
TCS4 Atlas TCS4 Atlas TCS6
0.0

f Latest Generation Products
eZenith
Reducing our customers’ energy use
Edwards has combined abatement and pumping systems as well as using other techniques
similar to those on pumps, to reduce the environmental impact of abatement products. This
has resulted in energy reductions of up to 50% on some abatement products such as the
Zenith Atlas system.
eZenith is the latest iteration of the Zenith concept which incorporates state of the art iGX
and iXH pumps. The iXH is the most energy efficient pump for its size ever produced – and
the latest Atlas abatement equipment, where intensive lab work has enabled the size of the
combustor to be reduced by about half without any sacrifice in performance. As a result fuel
consumption is reduced by a similar amount, giving significant environmental and cost of
ownership benefits. In addition, eZenith provides benefits of Space saving and small footprint,
centralised controls and speed of install.
A key attraction of the eZenith is that it is already green mode enabled. Process tools tend
to be idle about 25% of the time, and when this happens the eZenith switches to green
mode which reduces the fuel consumption by 90%. Energy is major item of expenditure in a
fab – in Korea it is estimated that Samsung’s semiconductor activities alone use 1% of all the
country’s power – so reduced running costs and the ability to switch to green mode represent
a significant saving for the customer.
Edwards Spectra Z
Green Solar Manufacturing Award
Edwards Spectra Z 300 was shortlisted for the Green Solar Manufacturing Award - for
technology which reduces emissions or impacts positively on the environment during the
solar manufacturing process. Solar cell manufacturing is becoming increasingly important
as an environmentally-friendly means of generating electrical power, and the growth of
thin films of micro crystalline silicon will form a key part of this. The PECVD growth of this
material poses a number of significant challenges regarding the treatment of the resultant
exhaust gases, in terms of removing toxic, corrosive, global warming, and flammable gases
safely, at low cost, whilst also minimising the environmental impact. This award is one of the
International Solar Technology Awards which are organised by a group of leading solar media,
research organisations and industry associations

Operations
Actions on Resource Conservation
We have an excellent track record in the environment, helping bring benefits to some of the
world’s biggest businesses by reducing customers’ power and water consumption, treating
hazardous waste and remanufacturing used pumps. Our remanufacturing story is a particularly
significant environmental success story. Imagine a car industry able to offer complete recycling,
but that’s what happened in the world of vacuum pumps. In the last thirty years we are now the
global leader of recycling pumps and remanufacturing is now a significant part of Edwards’ service
business.
Remanufacturing and Service
Re-Use through Re-Manufacture
After use many Edwards products are contaminated with hazardous process by-products, and - if
disposed of - would need to be treated as hazardous waste.
A global network of service and remanufacturing facilities which safely decontaminate and
remanufacture over 35,000 used vacuum pumps a year.
Most vacuum pumps run 24/7 and are re-used 4-10 times over a 10-20 year
lifetime. That’s equivalent to a car travelling around 2 million miles!
Remanufacture typically involves the reuse of over 90% by weight of a pump’s
components – with a corresponding saving in raw materials and their embodied
carbon dioxide. In Europe we offer a free recycling service for gauges and
controllers.

Energy Efficiency Upgrades
Edwards latest generation energy efficient products not only offer energy savings, reduced
utilities consumption and reduced carbon emissions, but also potentially offer future-proofing
against carbon taxes and may qualify for “Green Grants”. We enable customers running older
generation pumping and abatement products to benefit from these features with our upgrade
programmes, which include the responsible recycling of upgraded products returned to us
through our Remanufacturing operations.
Reducing our Emissions
Organic solvents containing Volatile Organic Compounds are a major source of pollution in the
lower atmosphere and especially in built-up areas where respiratory problems can be caused.
Water based cleaning has eliminated the use of solvents in our production and
remanufacturing processes.
In addition, the use of closed-loop recirculating water systems in our remanufacturing
facilities reduces their water consumption by more than 90%.
Reduced Hazardous Material Content
There is a growing amount of legislation around the world (for example EU RoHS Directive*)
to eliminate trace levels of heavy metals from electronic products, as these have the
potential to leach out of landfill sites.
Although vacuum equipment is outside the scope of the RoHS Directive, we are
implementing a voluntary policy to eliminate all ‘RoHS 6’ chemicals from our new product
ranges.
Information on RoHS compliance of Edwards products can be found on the product section
of our website.
Reducing Waste
Reduce/Reuse/Recycle
It is Edwards policy that all major facilities are certified to ISO14001. As part of our
ISO14001 management systems, our environmental policy incorporates a number
of initiatives to minimise unnecessary waste. For a number of years we have been
implementing a successful recycling policy as part of our active company policy on
reducing landfill waste.
* EU Directive 2002/95/EC on the Restriction of certain Hazardous Substances controls the levels of lead,
mercury, cadmium, hexavalent chromium, polybrominated biphenyls and polybrominated diphenyl
ethers in certain categories of electrical equipment.

Edwards — the company you have known and trusted for nearly 100 years – continues to deliver
innovative vacuum pumps and related systems. We strive to lower your cost of ownership,
increase your productivity and enhance your final product quality. Edwards products are based on
a solid foundation of manufacturing excellence, field-proven technologies and are supported by a
renowned global services network.
Edwards stands behind each product with exceptional integrity and strength, supporting our
customers beyond standard expectations. Edwards is essential to your process.
PRODUCTS:
SERVICES:
© Edwards Limited 2011. All rights reserved. Edwards and the Edwards logo are trade marks of Edwards Limited.
• Dry Vacuum Pumps
• Oil-sealed Vacuum Pumps
• Turbomolecular Pumps
• Exhaust Management
• Integrated Vacuum and Abatement
• Liquid Abatement
• Vacuum System Components
GLOBAL CONTACTS:
BELGIUM
Brussels +32 2 300 0730
BRAZIL
Sao Paulo +55 11 3952 5000
CHINA
Shanghai +86 21 5866 9618
FRANCE
Paris +33 1 4121 1256
GERMANY
Munich 0800 000 1456
• Equipment Service and Repair
• Product Exchange
• Refurbished Equipment
• Field and On-site Services
• Remote e-Diagnostics
• Product Training
INDIA
Pune +91 20 4075 2222
ISRAEL
Qiryat Gat +972 8 681 0633
ITALY
Milan +39 02 48 4471
JAPAN
Yachiyo +81 47 458 8831
KOREA
Bundang +82 31 716 7070
SINGAPORE
Singapore +65 6546 8408
TAIWAN R.O.C.
Jhunan Town +886 3758 1000
UNITED KINGDOM
Crawley +44 1293 528844
UK Local Rate (UK Only) 08459 212223
UNITED STATES
Toll Free (US Only) +1 800 848 9800
info@edwardsvacuum.com
Publication Number: J35000895, Issue B. Rev 01/2011