2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
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Annual Revenue (M$USD)<br />
IC <strong>CMP</strong> Slurry Growth ?<br />
1,200<br />
1,000<br />
800<br />
600<br />
400<br />
200<br />
Cu Barrier<br />
Cu Step 1<br />
Tungsten<br />
Oxide<br />
☺<br />
?<br />
<br />
0<br />
S-STI<br />
2006 2007 2008 <strong>2009</strong> 2010 2011 2012<br />
KHoll<strong>and</strong>@<strong>Techcet</strong>.com AVS <strong>CMP</strong>-UG 07/<strong>2009</strong> 5
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