2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
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Major Slurry Trends<br />
• For IC manufactur<strong>in</strong>g, silica dom<strong>in</strong>ates the slurry<br />
market <strong>in</strong> amount used<br />
• For STI, ceria is preferred for more advanced<br />
technologies, but is much more expensive per<br />
gram.<br />
• For Wire Cutt<strong>in</strong>g of the Si Ingot (IC <strong>and</strong> Solar)<br />
SiC particles are used as cutt<strong>in</strong>g fluid<br />
• For Si wafer manufactur<strong>in</strong>g polish it’s silica<br />
KHoll<strong>and</strong>@<strong>Techcet</strong>.com<br />
AVS <strong>CMP</strong>-UG 07/<strong>2009</strong> 3
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