2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
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<strong>Slurries</strong> & <strong>Particles</strong> <strong>in</strong> High Tech<br />
• IC <strong>CMP</strong> is by far the largest <strong>in</strong> Revenues<br />
• Si Wafer production<br />
• Cutt<strong>in</strong>g the Si Ingot <strong>in</strong>to wafers uses SiC<br />
cutt<strong>in</strong>g fluids<br />
• Si Wafer polish<strong>in</strong>g <strong>and</strong> f<strong>in</strong>al polish use high<br />
purity & excellent surface quality <strong>CMP</strong> with<br />
silicas<br />
• Lower tech applications abound … re-use<br />
of spent <strong>CMP</strong> slurries?<br />
KHoll<strong>and</strong>@<strong>Techcet</strong>.com AVS <strong>CMP</strong>-UG 07/<strong>2009</strong> 2
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