2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group 2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
Slurry Disposal • Lower tech applications abound • Reclaim and re-use of spent CMP slurries • Concentrate used slurry • Reduce heavy metal contamination • Road filler or ?? • Does it pay to be green? KHolland@Techcet.com AVS CMP-UG 07/2009 18
The Techcet Group, LLC • Techcet Partners • John Housley • Lita Shon-Roy • Steven Holland, Ph.D. • Karey Holland, Ph.D. • CMP Technical Associates • Michael Fury, Ph.D. • Robert Rhoades, Ph.D. © 2009 Techcet Group, LLC NCCAVS CMPUG July 14, 2009 19
- Page 1 and 2: 2009 Market Slurries and Particles
- Page 3 and 4: Major Slurry Trends • For IC manu
- Page 5 and 6: Annual Revenue (M$USD) IC CMP Slurr
- Page 7 and 8: Abrasive and Slurry Suppliers • N
- Page 9 and 10: IC CMP Slurry Suppliers Cu Barrier
- Page 11 and 12: IC CMP Slurry Suppliers Cu Barrier
- Page 13 and 14: Transition to Copper 100% Interconn
- Page 15 and 16: IC CMP Slurry Suppliers • High gr
- Page 17: Si Wafer and Slurry • SiC for Si
Slurry Disposal<br />
• Lower tech applications abound<br />
• Reclaim <strong>and</strong> re-use of spent <strong>CMP</strong> slurries<br />
• Concentrate used slurry<br />
• Reduce heavy metal contam<strong>in</strong>ation<br />
• Road filler or ??<br />
• Does it pay to be green?<br />
KHoll<strong>and</strong>@<strong>Techcet</strong>.com AVS <strong>CMP</strong>-UG 07/<strong>2009</strong> 18
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