2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
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Transition to Copper<br />
100%<br />
Interconnects<br />
80%<br />
71%<br />
74%<br />
Percent Wafer Starts w/ Cu<br />
60%<br />
40%<br />
20%<br />
2%<br />
15%<br />
37%<br />
51%<br />
45%<br />
56%<br />
0%<br />
RAM MPU<br />
180 nm<br />
RAM MPU<br />
130 nm<br />
RAM MPU<br />
90 nm<br />
RAM MPU<br />
65 nm<br />
RAM MPU<br />
45 nm<br />
KHoll<strong>and</strong>@<strong>Techcet</strong>.com AVS <strong>CMP</strong>-UG 07/<strong>2009</strong> 13
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