2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
2009 Market Slurries and Particles in CMP & a Bit ... - Techcet Group
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IC <strong>CMP</strong> Slurry Suppliers<br />
• Mostly ≤ 65 nm<br />
S‐STI<br />
Cu Barrier 1 strong supplier, >70% • S<strong>in</strong>gle process per wafer<br />
start<br />
• Cerium is costly<br />
Oxide<br />
Cu Step 1<br />
Tungsten<br />
KHoll<strong>and</strong>@<strong>Techcet</strong>.com
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