AuSn Solder Sputtering Targets - Materion

AuSn Solder
Sputtering Targets
Microelectronics
& services

Optimal AuSn Target Composition
The Challenge
New applications for LEDS and other products have
increased the demand for solders deposited by PVD
technology. The exact composition of AuSn solder
is critical for flow, strength and device properties.
The challenge is:
■ You want the best possible ratio of Au to Sn in
your deposited film to ensure optimal soldering.
■ There are concerns about the loss of tin that occurs
during the sputtering process.
■ It is accepted practice to increase the amount
of Sn in the sputtering target in order to
off-set the loss of Sn during sputtering.
■ Often 4 to 8 wt% of supplementary tin must be
added to the sputtering target to achieve the
desired ratio of Au to Sn in the deposited film.
You want excellent thin film uniformity.
The Solution
Materion’s analytical support team can address your
challenge! We will:
■ Analyze your individual sputtering process,
set-up and procedures.
■ Optimize your manufacturing methods to control
deposition power and chamber pressure.
■ Partner with you to adjust and create an optimal
composition of AuSn solder.
■ Resolve the loss of Sn and achieve the highest quality
final product.
■ Improve thin film uniformity with our unique
Patented VCT TM (Vibration Cast Technology) that
produces consistent small grain sizes that ensure a
uniform coating..
The Benefits
Materion’s innovative solution to your AuSn target challenge will:
■ Determine the best target composition
■ Effectively compensate for Sn loss
■ Improve thin film uniformity
■ Improve end product quality
■ Reduce costs
■ Customize manufacturing
Materion provides AuSn sputtering targets manufactured with
our VCT TM technology in a range of sizes, shapes and configurations
to meet customer needs.

Materion Microelectronics & Services supplies thin film deposition materials, electronic
packaging products, high purity and specialty materials, precision parts
cleaning, and precious metals refining to the semiconductor, LED, photonics, data storage,
wireless, military, medical and other demanding markets.
Specifications
■ Purity - We can achieve up to 4N’s 5 purity on various
compositions of AuSn
■ Size - Rounds up to 13 inch diameter and rectangular up to 31”
long. Also, various other shapes and configurations according
to customer needs.
■ Composition tolerance: Au-Sn composition held to ± 0.25.
■ Targets can be metallically bonded and bond integrity verified
by means of C-Scan
Capabilities
Materion provides enabling and advanced materials technologies
and services that fully support the manufacturing of LEDs.
■ Full array of materials, including Au, TiW, Cr, Pt, Pd, Cr and Ni.
■ Newly developed AuSn and AuGe sputtering targets featuring
our VCT TM technology.
■ Other Au alloys
Environmental Leadership and Compliance
Materion complies with all state and federal regulations
for disposal. Customers are invited to review or audit our
manufacturing, environmental or financial policies and practices
with respect to their refines. We are accredited:
■ ISO 9001:2008 Quality System;
■ ISO 14001:2004 Environmental & Safety
Management System,
■ ISO 17025:2005 Analytical Laboratory
■ LeanSigma
Other Related Services
Materion’s full Metal Management service provides value-added cost
solutions for by-products of thin film deposition processes including:
■ Precision parts cleaning
■ Chamber scrapings
■ Scrap Wafers and materials
■ Precious metal reclaim & refining
AuSn Phase Diagram
Near the Eutectic Composition
Calculated AuSn phase diagram (liquidus)
Au % wt.
81.50 81.00 80.50 80.00 79.50 79.00 87.50
330
320
310
300
290
280
Composition
after Soldering
Composition
after Deposition
270
18.50 19.00 19.50 20.00 20.50 21.00 21.50
Sn % wt.
The liquidus slope of the hypo-eutectic (gold rich) solder is double
that of the hyper-eutectic (tin rich) so gold rich solders will develop
a wider melting range and a higher liquidus temperature rapidly and
therefore will not solder properly. It is preferable for the deposited
solder layer to begin as hyper-eutectic before soldering and end as
hypo-eutectic after soldering.
Materion...
Smarter Solutions, Simplified Support and Stronger Relationships

Materion is a global advanced materials company, dedicated to providing solutions that enable our customers’ technologies and drive their growth. Our products include
precious and non-precious specialty metals, precision optical filters, inorganic chemicals and powders, specialty coatings, specialty-engineered beryllium alloys, beryllium
and beryllium composites, and engineered clad and plated metal systems. The Materion business is structured to enhance our ability to provide customers with innovative,
best total-cost solutions.
microelectronics & services
2978 Main Street
Buffalo, NY 14214
Phone: +1 716.837.1000
www.materion.com/microelectronics
Europe: +44 1 488.686056
Asia: +65 6559.4450
materion corporation
www.materion.com
ME AuSn Solder Rev 04 02’12