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08-Optical Tables.pdf - Qioptiq Q-Shop

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Microbench Nanobench Tube System C Positioners Rail Systems Mounts and Posts Mirror Mounts<br />

Platforms Equipped with High-Performance Vibration-<br />

Isolation Systems<br />

TMC has developed special platforms<br />

equipped with Gimbal Piston TM vibration<br />

isolators for vibrationally isolating large,<br />

heavy, vibration-sensitive, equipment.<br />

These de couple equip ment from typical<br />

floor-transmitted vibrations. We have<br />

already designed, built, tested, and<br />

installed platforms tailored to suit<br />

numerous equipment supplied by various<br />

manufacturers.<br />

Send us a drawing of the platform you<br />

require, and we will respond with a<br />

solution to your particular vibrationisolation<br />

problem.<br />

Application areas include vibrationally<br />

isolating:<br />

••<br />

Scanning electron microscopes,<br />

••<br />

Mask-inspection and manufacturing<br />

equipment used in the<br />

semiconductor/microelectronics<br />

industries,<br />

••<br />

Mass spectrometers<br />

••<br />

Dimensional profilers<br />

••<br />

NMR-spectrometers<br />

Further information on platforms<br />

equipped with various types of vibrationisolation<br />

systems is available from our<br />

sales department.<br />

Underfloor platform designed for use under<br />

ultra-strin gent cleanroom conditions in the<br />

semiconductor-device manu facturing industry<br />

Typical installation of an electron microscope on a<br />

plaform equipped with Gimbal Piston TM<br />

vibration-isolators<br />

Platform for a large dimensional profiler<br />

334 Phone numbers: US +1 585 223 2370 UK +44 2380 744 500 Singapore +65 6499 7766

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