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08-Optical Tables.pdf - Qioptiq Q-Shop

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<strong>Optical</strong> <strong>Tables</strong><br />

Active Piezoelectric Cancellation Floor Platform<br />

for ​Scanning Electron Microscopes<br />

STACIS iX SEM-Base<br />

Active Piezoelectric Vibration Cancellation<br />

Floor Platform for Scanning Electron ​<br />

Microscopes<br />

STACIS®iX SEM-Baseactive vibration ​<br />

cancellation floor platform system is ​<br />

designed for use with scanning electron ​<br />

microscopes (SEMs). SEMs are among the ​<br />

most vibration sensitive tools made and ​<br />

these precision instruments typically ​<br />

incorporate an internal vibration isolation<br />

system. SEM-Base is compatible with ​<br />

all internal SEM vibration isolation ​<br />

systems.<br />

SEM-Base is a compact, cost-effective ​<br />

alternative to our 65 Series STACIS®2100<br />

Floor Platform. It incorporates STACIS ​<br />

technology but has a much smaller footprint<br />

and installs easily with minimal ​<br />

tuning. Simply put the SEM on the<br />

plat form, power up, and you are done.<br />

• Incorporates patented STACIS®<br />

tech nology<br />

• Active inertial vibration cancellation ​<br />

system<br />

• 902 x 1130 x 165 mm (35.5 x 44.5<br />

x 6.5 ​inches), fits most commercial<br />

SEMs<br />

• Load capacity: 400 to 1100 kg<br />

(900 - ​2,500 lb)<br />

• Vibration cancellation starts<br />

below 1 ​Hz<br />

• Extended stroke piezoelectric<br />

actu ators, up to 60 microns<br />

• 6 active degrees-of-freedom<br />

• Installs easily, minimal tuning required<br />

• Compatible with all internal tool ​<br />

vibration isolation systems<br />

• No soft air suspension<br />

Simple, robust, and cost-effective<br />

• Optional casters allow easy portability, ​<br />

no lifting required<br />

• Ask about our SEM-LiftSystem for ​<br />

installation<br />

With vibration cancellation starting ​<br />

below 1 Hz, SEM-Base features extended ​<br />

stroke piezoelectric actuators and<br />

damped, ​powder-coated steel plates that<br />

sand wich four isolators and TMC’s DC<br />

2000 digital ​controller. The system is only<br />

165 mm ​(6.5") tall, measures 902 mm x<br />

1130 mm ​(35.5" x 44.5"), weighs less<br />

than 180 kg ​(400 lb), and can support<br />

400 to 1100 kg ​(900 to 2,500 lb) with no<br />

soft air suspen sion.<br />

SEM-Base<br />

Item Title<br />

Part No.<br />

SEM-Base G25 3739 401<br />

<strong>Optical</strong> <strong>Tables</strong><br />

Phone numbers: Germany +49 551 69 350<br />

France +33 47 25 20 420<br />

319

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