08-Optical Tables.pdf - Qioptiq Q-Shop

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Microbench Nanobench Tube System C Positioners Rail Systems Mounts and Posts Mirror Mounts STACIS® 2100 Active Piezoelectric Vibration Cancellation System More and more that is equipment sensitive to vibration, such as scanning electron microscopes, requires high vibration isolation, particularly when it comes to low-frequency interference below 2 Hz. For this equipment, pneumatic isolators are inadequate. As a result, LINOS and TMC offer the STACIS®2100 active vibration cancellation system to meet the requirements of this equipment. Typical applications include the following: •• Coordinate measuring machines •• Holography •• Interferometry •• Scanning electron microscopy •• Scanning probe microscopy •• Wafer Stepper Featuring active isolation ranging from 0.6 to 250 Hz, STACIS® 2100 provides the widest band of vibration isolation available on the market. Thanks to its compact design, it can be used anywhere sensitive machines or equipment assemblies have to be isolated from building vibration or the impact sound of people walking by. Within an industrial manufacturing site, this equipment can be, for example, wafer steppers or wafer inspection systems, and in the research field, interferometers or complete Optical Table systems. The STACIS®2100 system is a combination of active and passive vibration isolators. In the lower frequency range of 0.6 to 250 Hz, five piezoelectric actuators per isolator provide for vibration isolation in all six degrees of freedom. Disturbances in the upper frequency range above 250 Hz are dampened by a passive elastomer isolator. At the core of the system is a controller that processes the interference signals detected by the absolute velocity sensors integrated into the isolator housings. The controller sends control signals to the piezoelectric actuators independently from one another, causing them to expand or contract as needed so that they move out of the way of vibration, thus diminishing its impact. STACIS®2100 below the final chamber of the prototype of the LIGO interferometer at the California Institute of Technology, the most precise measuring instrument ever built. Its resolution is better than 10 -18 m. STACIS®2100 is ideal for use in tough environments, such as in clean rooms or near strong magnetic fields. In addition, this system is simple to install and easy to use. The STACIS®2100 vibration cancellation system is available on request. We will be happy to give you a quote for a customized system that meets your individual requirements. Just contact us! STACIS®2100 with platform STACIS®2100 Isolator 316 Phone numbers: US +1 585 223 2370 UK +44 2380 744 500 Singapore +65 6499 7766
Optical Tables 10 10 0 0 Transmissibility (dB) -10 -20 -30 -40 Transmissibility (dB) -10 -20 -30 -40 -50 -0.1 1 10 100 1000 Vertical transmission curve Frequency (Hz) -50 -0.1 1 10 100 1000 Frequency (Hz) Horizontal transmission curve DC-2000 Digital Controller Analog inputs/outputs Digital inputs/outputs 16 Sampling rate Front panel Power 16 channels (16/14 bit) 6.5 kHz nominal Two-line LCD with soft menue keys BNC input and output for signal monitoring Two RS-232 communication ports (second port on rear) Tri-color system status lamp 90-240 VAC, 50-60 Hz, max. 600 W Performance Specifications Active degrees of freedom 6 Active bandwidth 0.6 to 250 Hz Resonant frequency (passive) 18 Hz Resonant frequency (active) 0.5 Hz Transmissibility at resonance < 1.1 Isolation above 2 Hz > 90 % Setting time after a 4.5 kg step input 0.3 s Internal noise < 0.1 nm RMS Operating load range per isolator 200 – 2000 kg Isolator overload safety factor > 2:1 Number of isolators 3 or 4 Max. displacement 15 µm Stiffness of the actuators 73 x 105 N/m Magnetic field emitted < 2 x 10-12 Tesla broadband rms Dimensions, Environmental and Utility Requirements Optical Tables Isolator dimensions (wxlxh) 300 x 320 x 275 mm Isolator weight 34 kg Controller dimensions (wxlxh) 330 x 431 x 44 mm Operating temperature 10 to +32 °C Storage temperature - 40 to +125 °C Humidity 100% to 20 °C Power requirements 100, 120, 230 or 240 Volt, 50/60 Hz Floor displacement < 500 µ in. (13 µm) below 15 Hz Phone numbers: Germany +49 551 69 350 France +33 47 25 20 420 317
Page 1 and 2: The LINOS Optical Tables Optical Ta
Page 3 and 4: Optical Tables Optical Tables Techn
Page 5 and 6: Optical Tables Vibration-Isolation
Page 7 and 8: Optical Tables Sidewalls Sidewalls
Page 9 and 10: Optical Tables Selection Criteria T
Page 11 and 12: Optical Tables Quality Feature 5 Qu
Page 13 and 14: Optical Tables 77 Series CleanTop I
Page 15 and 16: Optical Tables Selection guide Plea
Page 23 and 24: Optical Tables CleanTop II Optical
Page 31 and 32: Optical Tables Lasershelf The Laser
Page 33 and 34: Optical Tables S-Series Passive Vib
Page 35 and 36: Optical Tables Vibrational isolatio
Page 37 and 38: Optical Tables 4-Post Systems with
Page 39 and 40: Optical Tables Without Isolation Sy
Page 41 and 42: Optical Tables Passive Isolators, S
Page 43 and 44: Optical Tables Pasive Isolators, S
Page 45 and 46: Optical Tables S-Series Vibration I
Page 47: Optical Tables A closer look To acc
Page 51 and 52: Optical Tables Active Piezoelectric
Page 53 and 54: Optical Tables Laboratory Tables, T
Page 55 and 56: Optical Tables High-Performance Lab
Page 57 and 58: Optical Tables Top size 30 in. x 48
Page 59 and 60: Optical Tables ClassOne Laboratory
Page 61 and 62: Optical Tables Articulated Arm Rest
Page 63 and 64: Optical Tables BenchTop Faraday Cag
Page 65 and 66: Optical Tables Custom Configuration
Page 67 and 68: Optical Tables Optical Tables Phone

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