08-Optical Tables.pdf - Qioptiq Q-Shop

Microbench Nanobench Tube System C Positioners Rail Systems Mounts and Posts Mirror Mounts
STACIS® 2100
Active Piezoelectric Vibration
Cancellation System
More and more that is equipment
sensitive to vibration, such as scanning
electron microscopes, requires high vibration
isolation, particularly when it comes
to low-frequency interference below
2 Hz. For this equipment, pneumatic
isolators are inadequate. As a result,
LINOS and TMC offer the STACIS®2100
active vibration cancellation system to
meet the requirements of this equipment.
Typical applications include the following:
••
Coordinate measuring machines
••
Holography
••
Interferometry
••
Scanning electron microscopy
••
Scanning probe microscopy
••
Wafer Stepper
Featuring active isolation ranging from
0.6 to 250 Hz, STACIS® 2100 provides the
widest band of vibration isolation
available on the market. Thanks to its
compact design, it can be used anywhere
sensitive machines or equipment
assemblies have to be isolated from
building vibration or the impact sound of
people walking by. Within an industrial
manufacturing site, this equipment can
be, for example, wafer steppers or wafer
inspection systems, and in the research
field, interferometers or complete
Optical Table systems.
The STACIS®2100 system is a combination
of active and passive vibration
isolators. In the lower frequency range of
0.6 to 250 Hz, five piezoelectric actuators
per isolator provide for vibration
isolation in all six degrees of freedom.
Disturbances in the upper frequency
range above 250 Hz are dampened by a
passive elastomer isolator. At the core of
the system is a controller that processes
the interference signals detected by the
absolute velocity sensors integrated into
the isolator housings. The controller
sends control signals to the piezoelectric
actuators independently from one
another, causing them to expand or
contract as needed so that they move
out of the way of vibration, thus
diminishing its impact.
STACIS®2100 below the final chamber of the
prototype of the LIGO interferometer at the
California Institute of Technology, the most precise
measuring instrument ever built. Its resolution is
better than 10 -18 m.
STACIS®2100 is ideal for use in tough
environments, such as in clean rooms or
near strong magnetic fields. In addition,
this system is simple to install and easy to
use.
The STACIS®2100 vibration cancellation
system is available on request. We will be
happy to give you a quote for a customized
system that meets your individual
requirements. Just contact us!
STACIS®2100 with platform
STACIS®2100 Isolator
316 Phone numbers: US +1 585 223 2370 UK +44 2380 744 500 Singapore +65 6499 7766