08-Optical Tables.pdf - Qioptiq Q-Shop

Microbench Nanobench Tube System C Positioners Rail Systems Mounts and Posts Mirror Mounts
Vibration Isolation System
Gimbal Piston TM
Depending on the location and surrounding
environ•ment of a room in which a work
area is situated, vertical and horizontal
floor vibration may occur. This vibration is
between 2 and 50 Hz and has amplitudes
in the micrometer range. Typical sources of
this interference are vibrations in buildings
and randomly occurring interference, such
as impact sound waves caused by people
walking down a corridor and traffic noise.
This vibration negatively affects work
conditions and results to a considerable
degree. To prevent most of this vibration
from being transferred to a work surface,
a vibration isolation system must be used.
The Gimbal Piston vibration isolation system
ensures reliable protection against vertical
and horizontal floor vibration, even in highly
sensitive applications.
A criterion for assessing the quality of a
damping system is its resonant frequency.
This frequency depends on the load of a
system and on the amplitude of the vibration
or oscillation causing resonance. Vibration
is only ab•sorbed at frequencies that are 1.4
times higher than the resonant frequency. As
a result, the resonant frequency must be kept
as low as possible.
This is exactly where the patented Gimbal
Piston system stands out from other vibration
isolation systems. The Gimbal Piston features
extremely low resonant frequency even in the
critical range of very low amplitudes.
At excitation amplitudes of 0.1 mm, the
resonant fre•quen•cy is 1.5 Hz in the vertical
and 1.7 Hz in the horizontal direction. For
amplitudes of 1 mm, this frequency is 1.0 Hz
in the vertical and 1.2 Hz in the horizontal
direction. At an excitation frequency of
just 5 Hz, the Gimbal Piston’s isolation
efficiency is 95% in the vertical and 80% in
the horizontal direction. An integrated level
controller ensures automatic return to the
original position as the load applied to a work
surface changes. This repositioning accuracy
is ±1 mm and can be increased to ±0.1 mm
by using precision valves.
Amplitude (nm)
200
20
2
0.2
isolator
floor
0.02
0 5 10 15 20 25 30 35 40 45 50
Isolator
floor
Gimbal Piston TM vibration isolation
Frequency (Hz)
High Quality
The patented Gimbal Pistonvibration
isolating system is distinguished
from competitive models
by the excellent damping properties
it exhibits even in the range of
very small amplitudes.
Transmissibility
theoretical curve,
no damping action
theoretical curve for a
damping coefficient of 0.2
Gimbal Piston TM Isolator
Frequency (Hz)
Attenuation Amplification
Typical transmissibility curve of a Gimbal Piston TM
Isolator
The Gimbal Piston isolation system works
using air only. Since it does not require any
hydraulic damping or absorption media,
it is ideal for use in clean rooms, ensuring
maintenance-free operation with consistent
technical specifications over many years.
302 Phone numbers: US +1 585 223 2370 UK +44 2380 744 500 Singapore +65 6499 7766