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Unified Lifetime Measurement for Silicon PV - PVMC

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<strong>Unified</strong> <strong>Lifetime</strong> <strong>Measurement</strong> <strong>for</strong> <strong>Silicon</strong> <strong>PV</strong><br />

Authors<br />

Lubek Jastrzebski 1 , Marshall Wilson 1 , Jacek Lagowski 1 , Piotr Edelman 1 ,Alexandre Savtchouk 1<br />

Andrew Findlay 1 , Sara Olibet 2 and Valentin Mihailetchi 2<br />

1<br />

Semilab SDI LLC, Tampa, FL 3361, USA<br />

2<br />

International Solar Energy Research Center-ISC Konstanz, Germany<br />

Outline of presentation<br />

1. Introduction to the Approach: Method and Goals<br />

2. QSS-µPCD small perturbation lifetime, τ eff.d<br />

3. Quality of Decay Control Method<br />

4. Results and Discussion<br />

• Parameter free extraction of steady-state lifetime, τ eff.ss<br />

• Correlation with QSSPC<br />

• Advantages of τ eff.d and J 0 based on Basore-Hansen<br />

5. Example of applications to wafer mapping<br />

6. Summary and Conclusions<br />

7. Acknowledgements<br />

8/21/2012 www.semilab.com<br />

1


Introduction<br />

●<br />

●<br />

●<br />

●<br />

●<br />

●<br />

Microwave detected photoconductance decay, µPCD is a powerful<br />

metrology of recombination properties that is widely used in silicon photovoltaics.<br />

The advantages are:<br />

parameter free non-contact fast suitable <strong>for</strong> mapping<br />

Further advantages in precision and control of the injection level were demonstrated<br />

with QSS-µPCD (Quasi-Steady-State) that operates under a small perturbation carrier<br />

decay condition originally described by Basore and Hansen (1990).<br />

Further improvements to QSS-µPCD reliability, precision, and application range, where<br />

demonstrated using a novel “Quality of Decay Control” method that recognizes and<br />

eliminates common problems of non-exponential decays.<br />

QSS-µPCD with Quality of Decay Control enables enhanced precision measurements<br />

of not only the carrier decay lifetime, and also carries advantages of a parameter-free<br />

determination of the effective steady-state lifetime.<br />

The goal of the present work is to present a unified lifetime measurement approach that<br />

provides self-consistent, parameter free determination of carrier decay lifetime and<br />

steady-state lifetime. Excellent correlation with QSSPC effective lifetime is<br />

demonstrated.<br />

8/21/2012 www.semilab.com<br />

2


Apparatus <strong>for</strong> QSS-µPCD with QD Control<br />

Key elements:<br />

• adjustable large spot pulsed laser excitation<br />

• adjustable steady-illumination up to 25 suns<br />

(980nm laser)<br />

• Semilab proprietary high sensitivity<br />

resonance microwave detection<br />

Discussion of large spot benefits can be found<br />

in several publications; <strong>for</strong> example: Basore<br />

and Hansen (1990) or Aberle et.al (1999).<br />

8/21/2012 www.semilab.com<br />

3


QSS-µPCD is Based on Small Perturbation<br />

<strong>Measurement</strong>; Basore-Hansen (1990)<br />

Small perturbation decay lifetime, τ eff.d , is also referred to as “differential lifetime”<br />

Brendel (1995); Aberle, Schmidt and Brendel (1996).<br />

• The steady-state illumination, I, is varied in steps I 1 , I 2 …I k<br />

• Small perturbation decay lifetime τ eff.d is measured <strong>for</strong> each step<br />

• During decay, the injection level is locked at the corresponding steady-state values, n k .<br />

Reducing decay distortions due to injection dependent recombination.<br />

• For mono-exponential decay, measurement related factors should also be eliminated.<br />

8/21/2012 www.semilab.com<br />

4


Common Factors Causing Non-exponential Decay<br />

A. Wafer Related<br />

• injection dependent bulk recombination<br />

• injection dependent surface recombination<br />

• trapping of excess carriers<br />

• modulation of depletion region by excess carriers<br />

B. <strong>Measurement</strong> Related<br />

• nonlinear microwave reflection response to excess carriers<br />

• too small carrier excitation spot compared to microwave detection area<br />

• lateral spreading of injected carriers during decay measurement interval<br />

• too small or non-uni<strong>for</strong>m light bias spot<br />

Factor A can be eliminated using strictly controlled small perturbation conditions.<br />

Factor B can be controlled by tuning microwave detection system and by careful<br />

adjustment of illumination system.<br />

8/21/2012 www.semilab.com<br />

5


Quality of Decay, QD [arb. units]<br />

Two Elements of Quality of Decay Control<br />

Quality of Decay Parameter, QD<br />

Quality of Decay Control Chart<br />

1.30<br />

1.20<br />

small light spots<br />

optimized condition<br />

1.10<br />

1.00<br />

0.90<br />

UCL = 1.02<br />

LCL = 0.98<br />

0.80<br />

0.70<br />

0.01 0.1 1 10 100<br />

Steady-state Light Intensity [suns]<br />

QD parameter is obtained as a ratio<br />

of half-life values in progressing carrier decay.<br />

Ideally QD=1 ; QD1 identifies<br />

measurements that erroneously underestimate<br />

and overestimate the lifetime, respectively.<br />

QD Control chart which specifies QD<br />

limits <strong>for</strong> mono-exponential decay.<br />

Optimized condition with QD close to 1<br />

eliminates measurement errors in broad<br />

intensity range from 0.02 to 25suns.<br />

8/21/2012 www.semilab.com<br />

6


Typical Photoconductance Decay Distortions<br />

Progressively faster decay typical <strong>for</strong> passivated<br />

emitter measured without bias light.<br />

Progressively slower decay observed <strong>for</strong> higher<br />

injection levels due to lateral carrier spreading<br />

Note: “Linear” decay is a consequence of injection dependent effective lifetime<br />

τ − 1<br />

eff<br />

const ∆n →<br />

∂∆n<br />

∂t<br />

= − ∆n<br />

τ eff<br />

= −const<br />

8/21/2012 www.semilab.com<br />

7


Effective <strong>Lifetime</strong> [s]<br />

<strong>Lifetime</strong> Overestimation in <strong>Measurement</strong>s<br />

Outside QD Control Limits<br />

p + /n/p + emitter test structure<br />

1.0E-02<br />

outside QDC limits<br />

too small illumination<br />

spots<br />

1.0E-03<br />

within QDC limits<br />

optimized measurement<br />

1.0E-04<br />

0.01 0.1 1 10 100<br />

Steady-state Light Intensity [suns]<br />

Note: illustrated errors are caused by injection dependent recombination and<br />

lateral carrier spreading during decay measurement interval.<br />

8/21/2012 www.semilab.com<br />

8


Effective <strong>Lifetime</strong> [s]<br />

Parameter-Free Determination of τ eff.ss<br />

• Steady-state lifetime τ eff.ss is obtained from decay lifetime τ eff.d by integration<br />

over light intensity (procedure of Schuurmans et. al 1997)<br />

• No wafer parameters are required<br />

• Results are compared with QSSPC<br />

1.0E-03<br />

1.0E-03<br />

Effective <strong>Lifetime</strong> [s]<br />

1.0E-04<br />

t eff<br />

Integrated Steady State teff<br />

1.0E-04<br />

Integrated Steady State teff<br />

Sinton QSSPC<br />

t eff<br />

t eff<br />

teff.d from QSS-uPCD with QDC<br />

t eff.d<br />

Sinton QSSPC<br />

t eff<br />

p + /n/p + test structure<br />

1.0E-05<br />

0.01 0.1 1 10 100<br />

Steady-state Light Intensity [suns]<br />

1.0E-05<br />

0.01 0.1 1 10 100<br />

Steady-state Light Intensity [suns]<br />

• Integrated and QSSPC values practically coincide<br />

• Consistent with the theory, in the emitter dominated range τ eff.d ≈ 1 2 τ eff.ss<br />

8/21/2012 www.semilab.com<br />

9


τ eff.d and τ eff.ss Correlation with QSSPC<br />

• A series of measurements of the integrated τ eff.ss were done with stringent quality of<br />

decay control values within 0.98 and 1.02 control limits<br />

• The same wafers were measured with QSSPC <strong>for</strong> comparison.<br />

Small Perturbation Decay <strong>Lifetime</strong> teff,d [s]<br />

1.0E-03<br />

1.0E-04<br />

1.0E-05<br />

0.02 sun<br />

1 sun<br />

5 sun<br />

10 sun<br />

1.0E-05 1.0E-04 1.0E-03<br />

<strong>Unified</strong> Steady-state teff [s]<br />

1.0E-03<br />

0.02 sun<br />

1 sun<br />

R 2 = 0.9947<br />

5 sun<br />

10 sun<br />

1.0E-04<br />

1.0E-05<br />

1.0E-05 1.0E-04 1.0E-03<br />

Sinton QSSPC t eff [s]<br />

QSSPC t eff [s]<br />

• The results demonstrate 1:1 correlation with R 2 = 0.9947<br />

8/21/2012 www.semilab.com<br />

10


<strong>Measurement</strong> of J 0 and Self-consistency Test<br />

• Small perturbation decay lifetime vs. light intensity enables a direct determination of the<br />

−2<br />

emitter saturation current, J 0 from the slope of τ eff.d vs. G ss (Basore-Hansen)<br />

• τ eff.d data after integration gives the steady-state lifetime τ eff.ss . The injection level is<br />

calculated as ∆n = G ss ∙ τ eff.ss , and J 0 is obtained from τ eff.ss<br />

−1<br />

vs. ∆n (Kane-Swanson)<br />

• Quantitative 1:1 correlation between two J 0 methods proves self-consistency of the approach.<br />

10000<br />

10000<br />

J0 from Steady-State <strong>Lifetime</strong> [fA/cm 2 ]<br />

1000<br />

100<br />

(Kane-Swanson Method)<br />

R 2 = 0.9952<br />

Sinton QSSPC J0 [fA/cm 2 ]<br />

1000<br />

100<br />

(Kane-Swanson Method)<br />

R 2 = 0.9934<br />

10<br />

(Basore-Hansen Method)<br />

10 100 1000 10000<br />

J 0 from Small Perturbation <strong>Lifetime</strong> [fA/cm 2 ]<br />

(Basore-Hansen Method)<br />

10<br />

10 100 1000 10000<br />

J 0 from Small Perturbation <strong>Lifetime</strong> [fA/cm 2 ]<br />

• QSS-µPCD J 0 values correlate very well with results of Sinton QSSPC<br />

8/21/2012 www.semilab.com<br />

11


J 0e Wafer Mapping<br />

Wafer Mapping Example with QSS-µPCD on p + /n/p + Emitter Test Structure<br />

• Advantage of direct J 0 mapping using small perturbation decay lifetime at<br />

two light intensities<br />

J 0e [fA/cm 2 ]<br />

Avg = 92.27<br />

Max = 160.2<br />

Min = 27.8<br />

• Mapping exposes weak <strong>PV</strong> spots with high J 0 that can degrade solar cell per<strong>for</strong>mance<br />

8/21/2012 12


Conclusions<br />

• Quality of Decay Control offers an effective solution to problems with nonexponential<br />

photoconductance decay.<br />

• The high precision small perturbation QSS-µPCD technique unifies carrier decay<br />

lifetime and steady-state lifetime measurements and enables parameter-free<br />

determination of both lifetimes.<br />

• One to one correlation is demonstrated with QSSPC results<br />

• Unique usefulness of τ eff.d is demonstrated <strong>for</strong> silicon <strong>PV</strong> wafers by the example of<br />

direct determination of J 0 and J 0 mapping<br />

Acknowledgements<br />

• We would like to thank Prof. Isidro Martin of Universitat Politecnica de Catalunya <strong>for</strong><br />

his stimulating ideas regarding the relationship between small perturbation and<br />

steady state lifetimes. We would also like to thank Dr. Paul Basore <strong>for</strong> bringing to<br />

our attention his excellent work on mPCD.<br />

8/21/2012 13

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