OptoSigma Katalog

Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

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1

Light Solutions for Life
COMPONENTS
Laser Solution
UNITS
APPRICATION SYSTEMS
ENVIRONMENT & SAFETY
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3

INDEX
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5

Your contact contact
Your
D-A-CH
Laser 2000 GmbH
82234 Wessling
Phone +49 8153 405-0
E-Mail info@laser2000.de
www.laser2000.de
NORDICS
Laser 2000 GmbH
112 51 Stockholm
Phone +46 8 555 36 235
E-Mail info@laser2000.se
www.laser2000.se
FRANCE – Photonic
Laser 2000 SAS
33600 Pessac
Phone +33 5 57 10 92 80
E-Mail info@laser2000.fr
www.laser2000.fr
FRANCE – Telecom
Laser 2000 SAS
78860 Saint-Nom la Bretèche
Phone +33 1 30 80 00 60
E-Mail info@laser2000.fr
www.laser2000.fr
IBERIA
Laser 2000 SAS
28034 Madrid
Phone +34 650 529 806
E-Mail info@laser2000.es
www.laser2000.es

Application Systems
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

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Application Systems
I N D E X
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Application Systems
Microscope Unit Guide
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
We provide three different types of observation system.
For the purposes of experiment or work, you can select an appropriate observation system.
■Zoom Microscope
Just mounting the camera can change continuously the magnification from the image of the low magnification and also
get the image of high magnification.
It is suitable for observation of those with complex and dense structure, such as semiconductor devices, MEMS and so on.
Moreover, with the longest 500mm working distance, it is quite useful to observe inside of the high-temperature furnace
or the vacuum chamber.
■Observation unit with coaxial illumination
Attaching the objective lens for a microscope, it displays an enlarged image on the monitor or laptop PC by using the camera.
By using a compact barrel with ports for illumination, there is flexibility of installation, and it also can be incorporated into
the production equipment such as a laser processing machine.
It is quite useful to observe the high magnification in particular.
■Stereo Microscope
Since it can obtain the observed image that there is very wide field of view by binocular and a disparity of the left and
right eyes, it is suitable for the observation of irregularities such as electronic components and processed parts.
With a long working distance, it is suitable for observation while moving the sample and for the visual inspection by
frequent exchanging of a sample.
Performance comparison between the observation unit
with coaxial illumination and zoom microscope
Between the size of the subject can be observed and the working distance, there is roughly a proportional relationship.
In general, by increasing the magnification, WD will be shorter.
The observation unit with coaxial illumination is better for the observation of a high magnification because it is possible to
replace the objective lens and select WD and the magnification.
It does not have zoom function, but you can observe the fine structure of the sample in an excellent resolution.
However, when using the camera, it will be limited by the resolution of the camera and the monitor side.
The zoom microscope is inferior to the objective lens in the resolution, but by varying the magnification, it can project a size
that is easily observed on the monitor.
For the observation size, there is no significant difference from the observation unit with coaxial illumination, you can select
the very long WD.
100
10
The size of the observation object [mm]
1
0.1
0.01
Observation unit
with coaxial illumination
Zoom Microscope
Variable zoom Range
0.001
0.0001
1 10 100 1000
Work Distance WD [mm]
A004
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System Diagram
Zoom Microscope
Color Camera
Rear Converter
Controller
Application
Systems
Optics &
Optical
Coatings
A026
A016
A023
Holders
Partial Light blocking cassette
Lens tube with zoom
Bases
Manual
Stages
LED light source
A017
Focus Block / Pole stand
Actuators
Motoeized
Stages
H032 − H034
A014
A016
Light
Sources
Ring light guide
Long working distance objective lenses
Ultra Long working distance
objective lenses
Front converter lenses
Index
Microscope Unit
* ZOL-15 only
A016
A015
A015
A015
Alignment
Observation unit with coaxial illumination
C mount Color Camera
C mount Color Camera
Focus Block / Pole stand
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
A026
A019
Observation Unit with Coaxial Illumination
A016
Fiber Illumination Systems
Auto Focus
H032 − H034
A021
A018
Adapter
A022
Actuator
Dichroic case for laser introduction
Controller
Lens Positioners
A023
A022
G116
G072
A019
Objective Lens
Visible Ultraviolet Nearinfrared
Nearultraviolet
3-Wavelengths
B194
B195 B190 B192 B193 B189
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A005

Application Systems
Alignment System Guide
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
YAG Laser Welding Automatic Alignment System
TOSA/ROSA/BOSA Assembling System
DAS-01AA
◦Assembling (alignment) system for active devices.
◦A system equipment that was pursued reliability and
cost performance.
◦The structure of the device holders offers high repeatability
and easy installation and removal of devices.
◦Compatible with many devices by replacing the device
holders.
◦Each device holder comes in two types. (Other holders
will be quoted separately.)
◦You can make alignment algorithms most efficient for
each device by yourself.
◦Significantly reduced the time required for device
assembly with the adoption of a Gimballed fitting
mechanism.
◦Operation switches are available for remote control of
various equipment.
◦There is also the ultra-high speed alignment version
which utilizes a special optical system. Please contact
our International Sales Division for more detail.
Index
Microscope Unit
System Configuration Example
Alignment
Interferometers
Inspection/
Observation
Slave Chuck Unit
Bio-photonics
Laser Processing
YAG Laser Head Unit
1
YAG Laser Head Unit
3
Motorized Stage Unit
for Xyθ axes
(Gimballed Mechanism)
YAG Laser Head Unit
2
■Configuration Example
Product Name
Motorized Stage Unit
Multi Controller
YAG Laser Head Unit (1)
Driver Box
YAG Laser Head Unit (2)
Base + Frame
YAG Laser Head Unit (3)
Cable set
Slave Chuck Unit
A006
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Automated 12-axis Optical Fiber Alignment System Configuration Guide
Waveguide (AWG/PLC) Alignment System
◦Assembling (alignment) system for passive devices.
◦A system equipment that was pursued reliability and
cost performance.
◦A 6-axis unit is placed respectively on the entrance and
exit sides of the waveguide device to perform automated
optical fiber alignment, assessment and assembly of
various devices.
◦The center device holder station has a contact sensor
allowing control of gaps between devices and thickness
of UV curing resin.
◦Capable of single-fiber array or single-fiber through
hole alignment.
◦The positioning magnet type fixing system of the device
holders offers excellent repeatability and easy installation
and removal of devices. Also, having a presetting
system, these holders can reduce assembly cycle time.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
System Configuration Example
Microscope Unit
Alignment
Interferometers
Observation Unit 1
Motorized Stage
Lens Tube
Inspection/
Observation
Bio-photonics
Laser Processing
CCD Camera × 2
Fiber Optics Holder
Monitor
NFP Observation Unit
Image Sensor
Lens Tube
Motorized Stage Unit
Device Unit
Device Holder
Monitor
Controller
Load Cell Sensor
■Configuration Example
Product Name
Motorized Stage Unit
Multi Controller
Observation Unit 1
Driver Box
NFP Observation Unit
Base + Frame
Device Holder
Stage Cable
Device Unit
GP-IB Cable
Fiber Holder
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A007

Application Systems
Interferometers Guide
Components
Application
Systems
Optics &
Optical
Coatings
Holders
We introduce the interferometer unit of three types such
as Michelson interferometer, Mach-Zehnder interferometer
and Fizeau interferometer, and the various components
composing these units.
Users can freely change the arrangement of the components
and also to rearrange to other interferometers It is
used in the education field and experiment for training.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
D-TOP Optics
For the purpose of more practical experimental tools, we
propose an optical system can be made functionally and
compactly.
Since D-TOP can use the existing holders, it can change
the conventional equipment into a compact type with a
small budget.
D-TOP is also advantageous for a good compatibility with
compact laser, anti-vibration, and the observation of a
smaller sample.
In addition, when moving the optical system assembled
and having storage, it is possible to effectively utilize the
experiment space.
Inspection/
Observation
Bio-photonics
Laser Processing
Principle of Interferometer
Reference surface (standard)
Surface flatness
Sample
For the first time users of the interferometer, we have
summarized the point of alignment of the interferometer.
By using drawings and photos, it has been described
realistically.
There are useful alignment method and skill that can not
be obtained from other sources.
Half mirror
Measurement
Surface flatness ∆t = M/
: measurement wavelength range
M: number of interference fringes
Interference fringes
Experimental guidance
Before starting a full-scale experiment in the
interferometer, we introduce a simple experiment
to understand the features of the interferometer.
It is not required the special equipment or
device other than the interferometer.
Users can experience a significant impact on
the interference fringes even by high sensitivity
of the interferometer and a small environmental
change.
A008
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APAS (Automatic Polarization Analysis System) Guide
What’s a polarization analysis system?
By measuring and analyzing the polarization state, it is possible to analyze the various items such as the internal state and
the surface shape of the material, and the optical properties,etc.
Automatic polarization analysis system of Sigma Koki provides the software and an optical system that are combined with
a standard light source, optics, holder and detector. And it is available for dedicated measuring device as well as simple
evaluation system. Furthermore, we can propose for a wide variety of measurement and evaluation applications.
Polarization measurement software
■Simple polarization analysis software “SimpleAPAS”
For corresponding to the extinction ratio and phase difference measurements at specific wavelength such as a laser light, it
is software that can also add-on to an existing optical system of the customer.
[Main function]
◦Automatic adjustment for wave plate, the axis direction of analyzer.
◦Measurement of polarization and phase difference by rotation compensator system
◦The phase difference measurement by the Senarmont method
◦Log measurement of each operation
■Integrated polarization analysis software “SKPola”
It is the software that supports up to spectral data characteristics in combination
with the optical system dedicated to using the UV, Visible and Nearinfrared
light source.
Since it is available to correspond to both the spectroscopy and single wavelength
measurement and also multi-order phase difference measurement, it
covers all the primary evaluation items of polarization optics.
[Main function]
◦Automatic adjustment of the polarization optical axis direction
◦Polarization measurement by rotating analyzer method
◦Spectral transmittance ratio measurement
◦Phase difference measurement by Senarmont method
◦Circularly polarized light contrast measurement
◦Log measurement
◦Polarization measurement by rotating compensator method
◦Polarizer transmission polarization ratio measurement
Export to spreadsheet
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Extinction ratio measurement
Poincare sphere display
Example of polarization measurement application
For customer’s requirements, we can provide
customized products and also design newly.
Polarizing film transmission polarization ratio measuring system
Coaxial observation system with
phase difference measuring system
Circularly polarized light measuring system
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A009

Application Systems
BIO-Photonics Guide
Application
Systems
Optics &
Optical
Coatings
Holders
Based on technologies developed in the field of optics, it supports the work using the microscope.
It is possible to the customization suitable for a work and a research.
Laser Microscope Systems
◦Micro manipulation System
◦IR-LEGO Infrared Laser-Evoked Gene Operator
Laser Introduction Units
◦Laser Optical tweezers - Mini type
◦IR-LEGO Infrared Laser-Evoked Gene Operator
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Motorized XY Stage System for microscopes
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
◦BIOS-Light-T (For inverted microscopes)
◦BIOS-Light-S (For upright microscope)
(low cost standard model)
◦BIOS-T Series (For inverted microscopes / High-end type)
◦BIOS-S Series (For upright microscope / High-end type)
(Built-in feedback control by optical linear scale)
Microscope peripheral equipment (Laser combiner, shutter unit, CCD camera)
A010
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Laser Processing Systems Guide
Due to commercialization of the laser oscillators with high power and diversification in the field of
semiconductor laser, femtosecond laser, and fiber laser, laser processing machines have been
using not only for cutting and welding but also for various applications. In addition, by improving
the beam quality, maskless processing has been expanding to the microprocessing field.
[Types of laser processing]
Laser Processing
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Romoval
Cutting
Sealing
Welding
Surface Improval
Hardening
Manual
Stages
Drilling
Brazing
Annealing
Actuators
Scribing
Grinding
Motoeized
Stages
Trimming
Glazing
Light
Sources
Marking
Classification by “The Institute of Laser Processing Society”
Laser Deposition
Plating Accelation
Index
Microscope Unit
Laser processing system as production equipment
There are several considerations to realize the stable laser processing.
They need variable attenuator for the stability of the laser output, laser beam expander for the light focusing performance,
high power shutter for the safety of the operator, auto-focus unit for the correction of the focus position corresponding to
the low-depth of focus at the time of the focused to the diffraction limit, and selection of the XY stage for good straightness.
In addition, in order to improve productivity, it needs a software that is high compatibility with CAD and good operability.
System production suitable for a certain purpose is requested.
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
System diagram
High Power Shutter
Laser Beam Expander
Auto Focus Unit
Mirror holder
Galvano Unit
Objective Lens
Motorized Stage
Variable Attenuator
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A011

Application Systems
Measurement, Inspection & Power Supply Guide
Measurement, Inspection
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Reflection Measurement Systems
SGRM-200R
This device allows the measurement of
spectral reflectivity in fine areas and curvature
surfaces.
For ultra-slim samples such as lenses with curvature or
functional sheets, high-speed and high-accuracy measurement
of spectral reflectivity can be realized without
being affected by reflected light on the rear surface.
Actuators
Motoeized
Stages
Light
Sources
Reflection Rate Graph Image
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
LD Power Supply Series
Power Supply Series
This is the power supply (supporting CW and pulse) for
driving the laser diode (LD). The power supply for driving
a Peltier element and cooling unit all-in-one type required
for driving LD is also part of our lineup.
Power supply for LD driving
Precise digital control environment-friendly highly efficient Laser
Diode power supply
Power supply for Peltier
Precise digital control highly efficient power supply for peltier optics
drive for low electric power and high-power lined up
PC
Possible to control by PC via
serial interface connection.
* Need RS232C interface and
cable.
PC
PC control using serial interface
* RS232C interface and cable
required.
SLD/SMD power supply
It can control LD current by
panel operation.
Various setting also can be
done by the panel.
Outside I/F
It can be operated by connecting
I/O signal and / or emergency stop
signal from the customer’s
systems.
LD
LD supplied by customer.
STD/STDS power supply
Various settings can be done by
panel operation.
Thermistor
10kΩ±1% (25°C)
* Cable is 2m long.
Cooling unit
Heatsink
Fan
Peltier (80W×2EA)
Cable for LD
A012
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Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
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WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
A013

Application Systems
Zoom Microscope
Ultra Long Working distance Zoom Microscope
LWZ/LWZ-M
ULWZ/ULWZ-M
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
LWZ/LWZ-M
Microscope unit with combination of high resolution objective lenses and 12× zoom range.
This single unit covers from the overall image check to the magnified observation.
Specifications
Manual type Part Number LWZ-15 LWZ-30 LWZ-50
Motorized type Part Number LWZ-15M LWZ-30M LWZ-50M
Optical magnification 1.25 – 15× 2.5 – 30× 4.16 – 50×
N.A. 0.03 – 0.2 0.06 – 0.36 0.1 – 0.45
WD [mm] 46.2 35.2 14
Image size [mm]
φ8 (for 1/2 inch sensor size, C mount)
Corrected Wavelength range [nm] 400 – 700
Actual field of view [mm] 6.4 – 0.5 3.2 – 0.3 1.9 – 0.2
Resolution (at Mercury e-line) [μm] 11.18 – 1.68 5.59 – 0.93 3.36 – 0.75
Depth of field (at Mercury e-line) [μm] ±305.6 – ±6.9 ±76.4 – ±2.1 ±27.5 – ±1.4
Catalog
Code
W2007
◦The light, compact body is suitable for assembly in a small space.
◦A single unit can cover everything from confirmation of the whole image
to enlarged observation, with a zoom ratio 12× for optical
performance.
◦Coaxial epi-illumination, which is regularly mounted on the product,
enables the observation of bright fields.
◦Dark fields can be observed by using optional products, ring light
guides and partial emission cassettes. A017
◦The lineup also includes motorized type suitable for embedding in
equipment or for automatic measurements.
◦Manual type is switching the magnification manually and consisting of
the zoom lens tube (SZL) and objective lens (ZOL series).
◦Motorized type is switching the magnification by controller and consisting
of the zoom lens tube (SZLM), the objective lens (ZOL series),
the switching controller (GIP-101) and the zoom control cable (ZCA-2).
◦C mount 1/2-inch camera is supported.
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
ULWZ/ULWZ-M
Maximum working distance of 500mm.
Suitable for observing the inside of vacuum chambers and ovens in the special environment.
Catalog
Code
W2008
Specifications
◦Light, compact body is suitable for assembly in a small space.
◦A single unit can cover everything from confirmation of the whole
image to enlarged observation, with an optical performance of zoom
ratio 12×.
◦The optical magnification and stroke distance can be easily changed
by assembling and or replacing the front converter lens (ULWZ-100
is not supported).
◦Coaxial epi-illumination, which is regularly mounted on the product,
enables the observation of bright field.
◦The lineup also includes an motorized type suitable for embedding in
equipment or for automatic measurements.
◦Manual type is switching the magnification manually and consisting of
the zoom lens tube (SZL) and objective lens (UZOL/UFCL series).
◦Motorized type is switching the magnification by controller and consisting
of the zoom lens tube (SZLM), the objective lens (UZOL/UFCL
series), the switching controller (GIP-101) and the zoom control cable
(ZCA-2).
◦C mount 1/2-inch camera is supported.
Part Number ULWZ-100 ULWZ-200 ULWZ-300 ULWZ-400 ULWZ-500
Part Number ULWZ-100M ULWZ-200M ULWZ-300M ULWZ-400M ULWZ-500M
Optical magnification 1.25 – 15× 0.58 – 7× 0.37 – 4.48× 0.28 – 3.41× 0.23 – 2.74×
N.A. 0.03 – 0.2 0.014 – 0.08 0.009 – 0.052 0.007 – 0.039 0.006 – 0.032
WD [mm] 101 206 305 404 502
Image size [mm]
φ8 (for 1/2 inch sensor size, C mount)
Corrected Wavelength range [nm] 400 – 700
Actual field of view [mm] 6.4 – 0.5 13.8 – 1.1 21.6 – 1.8 28.6 – 2.3 34.8 – 2.9
Resolution (at Mercury e-line) [μm] 11.2 – 1.7 24.0 – 4.2 37.3 – 6.5 47.9 – 8.6 55.9 – 10.5
Depth of field (at Mercury e-line) [μm] ±305.6 – ±6.9 ±1403 – ±43 ±3395 – ±102 ±5612 – ±181 ±7639 – ±269
A014
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System Diagram
Controller
Cable
SZLM (Motorized type)
ZOL-50/WD14.0mm
Application
Systems
G094
ZCA-2
SZL (Manual type)
ZOL-30/WD35.2mm
ZOL-15/WD46.2mm
Optics &
Optical
Coatings
Holders
GIP-101
UZOL-15/WD101mm
Bases
(Part Number) Zoom Microscope
LWZ- 15 M
Suffix “M” is motorized type
Magnification
(Part Number) Ultra Long Working distance Zoom Microscope
ULWZ- 100 M
Outline Drawing
Zoom Lens Tube
Suffix “M” is motorized type
WD
UZOL-7/WD206mm
UFCL-300/WD305mm
UFCL-400/WD404mm
UFCL-500/WD502mm
(in mm)
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
SZL (Manual)
SZLM (Motorized)
[Detail of co-axial epi-illumination port]
14 +0.1
+0.05
+0.1
8 +0.05
Microscope Unit
Co-axial epi-illumination port
54769 8 10
21.3
C mount
174.5 17.5
Co-axial epi-illumination port
Connector
C mount
174.5 17.5
10
10
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
61
56
35
12 38
61
35
12 38
85.5
45
4-M4 depth 6 100.7
45 4-M4 depth 6
113
Long working distance objective lenses
31.8
7.8
ZOL-15 ZOL-30 ZOL-50
33.4
45 33.4
57.75
8
54.5
7.5
WD 46.2
WD 35.2
WD 14
Long working distance objective lenses
Part Number ZOL-15 ZOL-30 ZOL-50
Ultra Long working distance objective lenses
Front convertor lenses
UZOL-15 UZOL-7 UFCL-300/400/500
110.2 8
67
105.5 7.5
62
16 4
62
Ultra Long working distance objective lenses
Part Number UZOL-15 UZOL-7
WD 101
WD 206
Front convertor lenses
Part Number UFCL-300 UFCL-400 UFCL-500
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A015

Application Systems
Zoom Microscope Option
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Rear converter lens—ZRCL
By mounting this rear converter lens between the camera and lens barrel, it will be able to enlarge the optical magnification without changing the working distance.
Guide
▶A variety of microscope for C-mount
compatible and camera are provided.
(Microscope, Zoom Microscope,
OUCI-2, Camera)
Attention
Catalog
Code
Reference image Zoom Microscope LWZ-15 (Optical Magnification 15x)
W2037
▶It is only for C mount, so it can not be used to the CS mount
products such as microscopes, observation systems or cameras.
▶Optical performance and resolution will not be improved even if
mounting the rear converter lens. It will be depending on the
performance of the microscope.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Specifications
Part Number
ZRCL-1.5 ZRCL-2.0
Magnification 1.5× 2.0×
Camera mount
(Lens side / Camera side)
Ring Light Guide—ZRL-ZOL15
Specifications
Part Number
Covering
C mount
ZRL-ZOL15
SUS flexible
Length [mm] 1,000
Bending radius [mm] 60
Inward angle of the light emitted [ °] 15
Bundle Diameter [mm] 7
Inner diameter [mm] 31
Without Rear converter
Observation Field of View About 0.55×0.45mm
It is suitable for the case that you do not want to generate a shadow of the lighting from
360° diagonal direction and that you observe the highlighted unevenness of the surface.
Guide
▶A variety of light source is
available.
(LED light sorce,
Tungsten Halogen light sorce and
Metal Halide light sorce)
Attention
▶This product is only for Zoom
microscope (LWZ-15/LWZ-15M).
If it is used with other products,
there is a possibility that optimal
illumination can not be done.
ZRCL-1.5
Observation Field of View About 0.37×0.3mm
Outline Drawing
7
20 +0.1
0
13 −0.05
−0.10
90° V groove,
Depth 0.5
(60)
15 15 30
11.5 10.05
25
16
1000 +20
0
U groove, Depth,
Width 2, Depth 0.5
ZRCL-2
Observation Field of View About 0.28×0.22mm
25
20
11
Catalog
Code
W2038
31 +0.1
+0.02
35
15
M43 P0.75
60
(in mm)
120
120
4
3
25
Focusing unit / Pole stand—ZAS-FAC-PST / PS-S/L
The focusing unit can be installed to the
observation unit with coaxial illumination and
Zoom microscope. And it can be used as a
microscope stand when combined with the
pole stand.
Guide
▶It can be installed the manual stage by using the M4 holes on the base plate
of the pole stand.
Attention
Catalog
Code
W2039
▶Screws are not supplied with focusing unit for fixing to observation unit with
coaxial illumination and zoom microscope.
▶When using a focusing unit and pole stand, please check that required
working distance is ensured. ULWZ series is not available for long working
distance.
Outline Drawing
(in mm)
ZAS-FAC-PST PS-S PS-L
400
32
299
25
25
25
25
M4
Specifications
Part Number ZAS-FAC-PST
Travel [mm] 30
Specifications
Part
Number
PS-S
PS-L
29
50
2525
60
84
208
4-M4 depth5
124
53
88
32
M4
359
220
32
359
320
A016
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Partial light blocking cassette—ZPSC-T1
By blocking the co-axial illumination partially, surface is
illuminated with grazing-incidence and microscopic asperity is
emphasized during observation
Mounted state to the Lens tub
Catalog
Code
W2040
Theory of partial light blocking
Application
Systems
Optics &
Optical
Coatings
Holders
Illumination from
an oblique direction
Objective lens
Bases
Specifications
Part Number
ZPSC-T1
Manual
Stages
Actuators
Image measurement software—SGMMSE
This is an integrated software system that easily can be used by a PC mouse, and it enables to
carry out image measurement and analysis, image storage, focus synthesis and so on to support
the zoom microscope.
◦This software is for image processing and measurement with 2.0 Mega pixels USB2.0 Color Camera (SK-TC202USB-AT).
Windows ® XP / 7 (32bit) is supported.
Catalog
Code
W2010
Motoeized
Stages
Light
Sources
Index
Specifications
Part Number
SGMMS
[Measurement functions]
◦Image and video capture
Image by BMP, JPG, GIF, and PNG format and Video by AVI format can be
saved.
◦Measurement function
It easily measures the size of an object by clicking the mouse on the screen.
It can measure the distance between two points, the radius and diameter
from the point of three or more points, angle, etc.
◦Calibration function
11 types of calibration settings can be registered depending on the magnification
of the zoom microscope.
◦Camera control
Camera’s gain, shutter speed, white balance and reversal can be displayed.
◦Line display (cross line, scale display)
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
HDR (High Dynamic Range Imaging) Function
When observed objects with
different reflection, an image can
be obtained by reducing the
overexposure and underexposure.
It can be taken completely the
state of the sample.
Normal image
HDR image
Normal image
HDR image
Hyperfocus / 3D display function
By using the motorized Z-axis stage, it can take an “in-focus” picture over the
entire screen. 3D images can be displayed from the image of the composed focus.
Example of Synthetic Image
amera
USB2.0
22
llumination
iber
tage ontroller
onsumers P
WindosP7 (2bit)
E
3D display
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A017

Application Systems
Observation unit with coaxial illumination
OUCI-2
Catalog
Code
W2012
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
This compact microscope is a customizable high performance imaging system for use in a wide
range of applications from scientific research to industrial production equipment.
◦A wide variety of options is available for Infinity corrected optical systems.
◦Possible to be combined with a large range of optional parts in accordance with its application.
◦Optional parts such as translation stages or Illumination light-source could be found in our catalog.
◦Besides products in the catalog, for fine laser processing application, the model for YAG lasers at 266nm, 355nm, 532nm
and 1064nm, and also 2 camera ports model at low/high magnification can be available.
Guide
▶Support Infinity corrected objective lenses
▶Support Olympus made objective lenses at various
magnifications as standard
▶The coaxial epi-illumination of the light guide enables
the observation of bright fields. The contrast of the
illuminated light can be adjusted with an aperture stop.
Specifications
Part Number OUCI-2 OUCI-M1M1
Camera port 1 2
Imaging lens focal length [mm] 200 200
Camera mount C mount (less than 2/3)
Mounting screw for
Objective lens
M20.32 P=0.706
M26 P=0.706
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Outline Drawing
OUCI-2
Counterbored hole
for attachment
4-M4
Port for illumination
Clamp screw for
fixing illumination
Aperture diaphragm
adjustment lever
94.9
47.9
C mount
60
50
30
50
17.53
154.1
47
φ34
27
60
158.6
OUCI-M1M1
Port for
illumination
186.2
85 50
C mount Port 1
4-φ4.5
Counterbored hole
for attachment
50
75
Forcus
adjustment ring
C mount
Port 2
Knob for centering
adjustment
(in mm)
53
Objective lens adapter
40
M26 P=0.706
64.9 97
161.9
33.5
27
OUCI-2 and OUCI-M1M1 Common Specification
φ14
+0.1
φ8
φ6.5
+0.1
+0.05
+0.05
M26 P=0.706
10
20
Detail drawing of port for illumination
3
7.5
M20.32 P=0.706
Detail drawing of objective lens adapter
Reference product / Observcation unit with laser input port
◦Please contact International Sales Division for more detail.
Specifications
Wavelemgth range [nm] YAG Laser 266, 355, 532, 1064
Port 3 (Camera port 1, Illumination port 1, Laser input port 1)
Imaging lens focal length [mm] 200
Camera mount
C mount
Mounting thread for Objective lens
M20.32 P=0.706, M26 P=0.706
A018
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Observation unit with coaxial illumination
Dichroic case for laser introduction —DIMC
It is a product that is mounted to observation
unit with coaxial illumination, and that
introducing a laser beam to the observation
optical system and coaxial.
Specifications
Part Number
DIMC-355R DIMC-532R DIMC-1064R
Wavelength Range 355 532 1064
Input aperture [mm] 20 20 20
Reflectance [%]
>99.5 (355nm) >99.5 (532nm) >99.5 (1064nm)
Laser Damage Threshold* [J/cm 2 ] 5 (355nm) 8 (532nm) 20 (1064nm)
Mounting screw thread for Observation unit
Mounting screw for Objective lens
M26 P=0.706
M26 P=0.706
Weight (Kg) 0.12 0.12 0.12
* Laser pulse width 10ns, repetition frequency 20Hz
DIMC-355R
R [%]
100
80
60
40
20
0
300
400
500 600 700 800 900 1000 1100
λ [nm]
P polarization
S polarization
Average
DIMC-532R
R [%]
100
80
60
40
20
0
300
Guide
Spectral Distribution
400
▶Laser introduction direction can be adjusted in any direction of 360º. Please
check the product instruction manual about the adjustment method. *Not
included adjustment tool (Hex wrench).
▶The tilt adjustment of the internal mirror can be available. Please check the
product instruction manual about the adjustment method. *Not included
adjustment tools (Hex wrench and screwdriver).
▶Mounting standard of the objective lens is M26 P=0.706, but for mounting
the conversion adapter attached to the observation unit with coaxial
illumination conversion adapter, M20.32 P=0.706 can be available.
▶A wide variety of objective lenses is available.
B189 – (Long
working distance objective lens, NUV objective lens and NIR objective lens)
Attention
▶There is an adjustment mechanism in the internal mirror, but it is for
only fine adjustment.
▶Incident of the laser beam is requested vertically as much as possible.
▶There is a possibility that the image of the coaxial observation in
the laser introduction is not clear.
Outline Drawing
500 600 700 800 900 1000 1100
λ [nm]
P polarization
S polarization
Average
Mounting screw for Observation unit
φ26 P=0.706
Catalog
Code
Mounting thread
for Objective lens
21.6
40 4 φ26 P=0.706
40
DIMC-1064R
R [%]
100
80
60
40
20
0
300
Laser input
400
19
P polarization
S polarization
Average
20
W2041
43
500 600 700 800 900 1000 1100
λ [nm]
(in mm)
R: Reflectance
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
C mount adapter—CACM
This is the adapter for attachment to the observation unit with illumination and for the position
alignment of the C mount camera. When combining with the dichroic case, it is used for
adjustment the focal position of the laser beam entering to the dichroic case and the centering
position of the camera or the focusing position.
Catalog
Code
W2042
Attention
▶It does not correspond to a camera other than the C mount. In the case of the CS mount
camera, intermediate ring of 5mm thickness is required.
▶When mounting to the Observation unit, it needs the hex wrench (1.5mm). The Hex wrench
is not included.
Outline Drawing
(in mm)
Knob for centering
Knob for centering
CACM-1 adjustment CACM-2 adjustment CACM-3
Specifications
Part Number
CACM-1 CACM-2 CACM-3
Centering adjustment
range [mm]
φ2 φ2 −
Focusing adjustment
range [mm]
− 3 3
Weight [Kg] 0.1 0.11 0.08
34 17.526
10.5 Flange back
φ40
C mount
Clamp for
centering adjustment
Fixing screw
φ27 +0.033
0
Clamp for
focusing adjustment
17.526
Flange back
34 +2
−1
10.2
φ40
C mount
Clamp for
centering adjustment
Forcus
adjustment ring
Fixing screw
φ27 +0.033
0
Clamp for
focusing adjustment
17.526
Flange back
34 +2
−1
11
φ40
C mount
Forcus
adjustment ring
Fixing screw
φ27 +0.033
0
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A019

Application Systems
Auto Focus (TTL type) TAF-SS-OBL-3
Catalog
Code
W2014
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
The TTL method is a built-in laser diode radiates to surface of
works through an objective lens, and optical sensor receives its
reflected beam also through the objective lens and detects the
difference from graticule.
[Characteristics]
◦High speed tracking with real-time adjustment the focus by only moving the
objective lens.
◦The Laser TTL method focusing system can be used for glass and film inspection.
◦Small and compact make it easy to be integrated into an inspection equipment
system.
◦Supports 1/2-inch or less CCD camera (C mount).
Manual
Stages
Actuators
Motoeized
Stages
Specifications
Part Number
TAF-SS-OBL-3
Configuration
Light
Sources
Objective Lens 2× − 100×
Camera C mount CCD camera (Size is less than 2/3″)
Index
Microscope Unit
Alignment
Focusing methods
Travel
Trace Range
(Tracking capable range)
Reproducibility (Focus)
TTL (Through The Lens), active method by
semiconductor laser (equivalent to class 2, light
output 2mW or less, wavelength 670nm)
3mm
2×, 5×, 10× : ±1.5mm
20× : ±500μm
50× : ±250μm
100× : ±100μm
±6.0μm(5×), ±1.0μm(10×)
±0.5μm(20×, 50×, 100×)
I/O
RS-232C
Slave
Cable length 10m
Cable length 2m
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
5Hz≦
Response frequency* * The specification differs by the combination of
the actuator
Illumination optical systems Coaxial epi-illumination (aperture stop built in)
Dimension
(W)160 × (H)258 × (D)47mm
Weight (head part) 1.6kg
Focus Actuator SGSP-OBL-3 (stepping motor driving actuator)
Master
Auto focus controller
Cable length 5m
AF Z-axis
stepping motor
Auto focus head
Outline Drawing
(in mm)
5 25 50 25
3-M4 attachment hole
From back
4-M4 depth 5
27
Parfocal length:45 22.5
25
50
50
5 100
160
37.2 245
54
47
112
A020
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Auto Focus (Separate type) TAF-ES-DM-40
Catalog
Code
W2013
The focus laser with large spot and laser detector are aligned at a large angle; outside of the
objective lens. The focus is maintained by minimizing the error signal generated by the sensor.
[Characteristics]
◦As the observation optical system and auto focus
optical system are independent, enabling to be
matched with various magnification objective lenses
at high accuracy inspection application.
◦Support transparent surface such as glass and film
inspection.
◦Small and compact make it easy to be integrated into
an inspection equipment system
◦Supports 2/3-inch or less CCD camera (C mount).
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Specifications
Part Number
TAF-ES-DM-40
2× − 50×
Objective Lens
(Outer diameter φ32mm WD11mm Objective lens)
Camera C mount CCD camera (Size is less than 2/3″)
Off-axis (out of Lens) reflection active system by
Focusing methods semiconductor laser (equivalent to class 3R, light
output 4.5mW or less, wavelength at 670nm)
Configuration
Observation unit
with coaxial
illumination
OUCI-2
Motoeized
Stages
Light
Sources
Index
Travel
Trace Range
(Tracking capable range)
10mm
Regular reflector: ±3mm
Transparent body: contact us separately
Reference) thickness 0.7mm, glass ±0.3mm
Reproducibility (focus) ±0.5μm
Response frequency About 5Hz (regular reflector step ±10μm)
Illumination optical systems Coaxial epi-illumination (aperture stop built in)
Dimension
(W)202 × (H)230 × (D)87mm
Weight (head part) 2.2kg
Focus Actuator TSDM (stepping motor drive stage)
I/O
RS-232C
Cable length 2m
Slave
Cable length 10m
Cable length 5m
AF Z-axis
stepping motor
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Master
Auto focus controller
Cable length 5m
Auto focus head
Objective lens
offset Z-axis
Outline Drawing
(in mm)
(151.2) 17.52
127.5
LED Light Source Device
26.5 (89.5)
95 21
50
C mount
Sensor cable
(2m)
(80)
Observation Unit with Coaxial Illmination
OUCI-2
Main unit
TAF-ES
Actuator for Objective Lenses
SGSP-OBL-3
Objective lens
SPAHL-5
Focus stage
TSDM40-15
203.5
60
50
6-φ4.5 fixation
attachment hole
58.5 50 50
29
96 106
202
51
12
90
Movable range
Stage cable (10m)
DMINIS-CA-10
31
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A021

Application Systems
Lens Positioners
LACR/LACS
Catalog
Code
W2016
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
This is an objective lens positioner that realizes both high performance and lower prices with our
company’s original positioning technology and processing technology developed through the
manufacture of stages and other items. We offer the optimiged lens positioner for both
manufacturing equipment and inspection equipment that require high throughput.
◦Motorized turret has better accuracy and durability than traditional turrets due to
elimination of mechanical detents.
◦Includes 5-phase micro stepping motor and can achieve a resolution of less than a
micron at the tip of objective lens.
◦When used with the GIP-101 controller, objectives can be switched quickly and
accuarately either manually, using the push buttons on the controller, or automatically,
using the computer interface.
◦Motorized lens switcher is designed to hold 2 objective lenses, to provide precise
movements and feasible speed.
◦Using our proprietary extended contact bearing design to improve straightness.
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Specifications
Part Number LACR-4H LACS-2H-A
Number of switched lens
4 holes (90°×4)
(1hole: datum hole, 3holes: one-directional center core adjustment)
2 holes
(1hole: datum hole, 1holes: one-directional center core adjustment)
Travel ∞ for both of clockwise and anticlockwise directions 35mm (Switcing distance)
Motor 5-phase stepping motor (0.75A/phase) 5-phase stepping motor (0.75A/phase)
Guide Method Bearing system Extended contact bearing
Feeding Mechanism Worm and worm wheel Ball screw φ4 (1mm lead)
Travel per 1 pulse 0.01° (FULL) / 0.0002° (1/50 DIV) 2μm (FULL) / 0.1μm (20 divided)
Total pulse per table rotation 36,000 pulse (FULL) −
Positional repeatability ≦0.02deg. −
Switching reproducibility ≦ +/−3μm (at the tip of objective lens) ≦ ±3μm (by the tip of objective lens)
Maximum travel speed (switch) 60°/sec (A⇒B, about 2.0sec) 35mm/sec (A⇒B, about 1.0sec)
Objective lens size M26 P=0.706 M26 P=0.706
Load capacity [kg] 2 2
Weight [kg] 0.85 0.7
Laser Processing
Outline Drawing
(in mm)
LACR-4H
LACS-2H-A
(10)
128
51
4-M26 P=0.706
(quartered on circle)
PCD66
35.5
10 16
92.8
102
25
102
51
28.5
43
40
M26 P=0.706
50
40
passed through 4-φ3.5
Front rear side φ6.5
spot face depth 3.5
102.5
142.5 4.3
43.5
6
16
Adapter—AOR-M26.0/AOS-M26.0
This is the adapter for connecting the lens positioners
(electric revolver/lens switching slider) to observation unit
with coaxial illumination .
Outline Drawing
(in mm)
Specifications
Part Number AOR-M26.0 AOS-M26.0
Compatible models
Motorized Lens
Turret
Lens switching
slider
Weight [kg] 0.1 0.08
AOR-M26.0
φ16
through hole
M26.0 P=0.706
(M26 P=1/36)
3-M3 fixing screw
4.5
13 5
22.5
M20.32 P=0.706
(W0.8 P=1/36)
φ40
locking hole (φ2)
AOS-M26.0
2-M3 fixing screw
M26.0 P=0.706
(M26× P=1/36)
4.5
13
17.5
4-M3 depth 10
50
40
25
40
50
2-φ3 +0.015
0
depth 3
42
25
A022
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Catalog
Intelligent Positioning System GIP-101 Code W9046
A single axis controller with built-in micro-step driver having a 5-point preset function.
◦Compatible with objective lens turrets and other LASER accessory units in addition to motorized stages fitted with
5-phase stepping motor.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Specifications
Part Number
GIP-101
Model
5 Phase Stepping Motor
Motor
0.23 – 0.75 A/phase (Stop Current)
Excitation Method Micro-step (16 divisions setting of 1 – 250)
Maximum Operating Pulse Rate 22,000
Minimum Operating Pulse Rate 50
Acceleration/Deceleration Time [ms]
20 – 1,000(16 steps)
Interface
RS232C (D sub 9pin: female)
I/O D-Sub25pin: female (I/O 24V)
Power Supply AC 100 – 240V ±10% 50/60Hz apparent power 100VA
Operating Environment
Temperature: 0 – 40ºC Humidity: 20 – 80% RH (non-condensing)
Weight [kg] 2.0
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Outline Drawing
(in mm)
145
81
205
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A023

Application Systems
Microscope Systems & Option
Catalog
Code
W2017
Application
Systems
Optics &
Optical
Coatings
Holders
These microscope systems can be utilized for research and
development in manufacturing fields with superior cost
performance.
They can be freely customized with multiple options.
◦Equipped with transmitted illumination and epi-illumination, these microscope
systems can adjust the brightness of both types of illumination respectively.
◦When used with a C mount adapter (option), capturing of images from a C
mount color camera is available.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Specifications
Binocular
Trinocular
Part Number
ZMM-45B1 ZMM-45B2 ZMM-45T1 ZMM-45T2
Illumination Without Transparent / epifluorescent Without Transparent / epifluorescent
Total Magnification
7× – 45× (Zoom Type)
Working Distance [mm] 100
Focusing Rack & Pinion Trave [mm] 47
Weight [kg] 4.8 6.3 5 6.3
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
C Mount Adapter for Trinocular Scope—SKSZMCTV1/2
This product is for mounting a C mount color camera on a trinocular microscope
system. You can capture the images while looking in the eyepieces.
Guide
Specifications
Part Number
SKSZMCTV1/2
Camera Mount
C mount
Focal Point Adjustment Range [mm] 4
Weight [kg] 0.08
▶Various C mount color cameras are available.
A026
Attention
▶Not compatible with cameras other than C
mount cameras. To use with a CS mount
camera, an intermediate ring of 5 mm thickness
is required.
C Mount Adapter for Eyepiece Port—EPCMA
This product is for mounting a C mount color camera on an eyepiece port of a microscope
system. It can mount on either a binocular or trinocular type microscope system.
Guide
Specifications
Part Number
EPCMA
Camera Mount
C mount
Magnification 0.5×
Weight [kg] 0.1
▶Various C mount color cameras are available.
A026
Attention
▶Not compatible with cameras other than C
mount cameras. To use with a CS mount
camera, an intermediate ring of 5 mm thickness
is required.
A024
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LED Ring Illuminators—SKLIR-1
These illuminates direct light at an angle from oblique of all 360 degree onto the observation target.
Suitable for observing the target without a shadow or emphasizing irregularity of the surface.
Assisted Objective Lenses—SKSZMAO
◦These illuminators have long life because LED is used as the light source.
◦Use the dial located on the side of the main body to adjust the brightness.
Specifications
Part Number
SKLIR-1
Cable Lengh [m] 1
Power supply
AC100V
Weight [kg] 0.32
▶Can mount on either a binocular or trinocular
type microscope system. To mount these
illuminators on microscope systems, use
illuminator adapter rings that come with the
microscope systems.
Please attach these lenses at the end of a microscope system to
change the total magnification.
Guide
▶Can mount on either a binocular or trinocular
type microscope system.
8-inch TFT LCD Monitor—SKH-8003
Guide
Attention
▶When a ring illuminator adapter is attached,
the working distance is shortened by 10 mm.
Please make sure that there will be no interference
with peripheral equipment beforehand.
Attention
▶Working distance varies. Please make sure
that there will be no interference with peripheral
equipment beforehand.
Specifications
Part Number SKSZMAO0.5 SKSZMAO1.5 SKSZMAO2
Magnification 0.5 1.0 2.0
Working Distance [mm] 165 45 30
Weight [kg] 0.08 0.08 0.08
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Output images from a CCD camera (analog output).
Specifications
Part Number
SKH-8003
Monitor Size
8 inch
Pixels 640×480
VGA Cable
D-Sub15 pin
Image System PAL/NTSC automatic switching
Power Supply
AC100V – 240V
60/50HZ
Guide
▶Accessories: AC adapter × 1, AV cable × 1,
VGA cable × 1, stand × 1, remote control × 1
▶Various CCD cameras (analog output) are
available. A026
▶Various connecting cables and conversion
plugs are available. A025
Cable / Conversion Plug
8-inch TFT LCD Monitors
SKH-8003
BNC-RCA terminal
connection cable
SKBNCF-RCAF
RCA female -RCA
female conversion plug
SKRCAF-RCAF
BNC-BNC connection cable
SKBNC-BNC-1.5 (1.5m)
SKBNC-BNC-3.0 (3.0m)
BNC female -RCA
female conversion plug
SKBNC-RCA-1.5 (1.5m)
SKBNC-RCA-3.0 (3.0m)
Color Camera
(Analog)
SK-620BJ2
(Imaging Device 1/2 inch)
SK-N63CJ-C
(Imaging Device 1/3 inch)
Specifications
Product Name
BNC-BNC connection cable
BNC-RCA terminal connection cable
RCA female -RCA female conversion plug
BNC female -RCA female conversion plug
Part Number
SKBNC-BNC-1.5
SKBNC-BNC-3.0
SKBNC-RCA-1.5
SKBNC-RCA-3.0
SKRCAF-RCAF
SKBNCF-RCAF
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A025

Application Systems
Color Camera SK/SKDCE/STC
Catalog
Code
W2043
Three types of interface are available to suit your application.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦Analog (Bayonet Connector)
Best suited for installation in devices because the cable length between the camera and a monitor can be long.
◦USB
By installing the viewer software that comes with the camera in a PC, it is easy to save images
It is provided either 2 million pixels and 5 million pixels according to the required resolution.
◦HDMI
The camera can be directly connected to a high-definition compatible monitor. Best suited for visual inspection which
requires high resolution and high frame rate.
Using the remote control unit that comes with the camera, you can display a cross line or shadow mask at any position
on the screen, or make adjustments such as brightness (gain) or contrast while looking at the display on the screen.
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Specifications
Part Number SK-N63CJ-C SK-620BJ2 SK-TC202USB-AT SKDCE-3 STC-MCA5MUSB3 SK-HD133DV
Interface BNC BNC USB2.0 USB2.0
Imaging Device
1/3
(40 Mega-pixels)
1/2
(40 Mega-pixels)
1/1.8
(200 Mega-pixels)
1/2
(200 Mega-pixels)
USB3.0
Super Speed
1/2.5
(500 Mega-pixels)
HDMI connector
DIV 1.0 compliant
1/3
(Hi-Vision)
Chip Size [H×Vmm] 4.9×3.7 6.4×4.8 7.1×5.4 6.7×5.0 5.7×4.28 4.8×2.7
Pixels [H×V] 768×494 768×494 1628×1236 1600×1200 2592×1944 1280×720
Cell Size [H×Vμm] 7.4×6.3 7.4×5.95 4.4×4.4 4.2×4.2 2.2×2.2 3.75×3.75
Frame Rate [ps] 30 30 15 10 14 60
Lens Mount C mount C mount C mount C mount CS mount C mount
Accessory AC adapter AC adapter
Operating System (OS) − −
◦Viewer Software
(USB camera driver
Image loading software)
Windows ® XP, Vista, 7
(32bit/64bit)
◦Viewer Software
(USB camera driver
Image loading software)
Windows ® XP, Vista, 7
(32bit/64bit)
◦Viewer Software
(USB camera driver
Image loading software)
◦C mount conversion
adapter
Windows ® XP, Vista, 7
(32bit/64bit)
◦Remote control unit
◦AC adapter
External Dimensions [mm]
(excluding connector/protrusion)
36×36×42 51×51×60.5 51×51×46.1 40×38×50 28×28×33.8 40×40×45.8
Weight [kg] 0.065 0.19 0.145 0.15 0.038 0.12
−
Guide
▶Common
◦Various C mount compatible microscopes are available.
(Microscope systems, zoom microscopes, OUCI-2)
▶Analog (Bayonet Connector)
◦Connecting cables and conversion plugs are available.
A025
▶USB
◦The lengths of the accessory cables for connecting SKDCE-3 is
1.5m and SK-TC202USB-AT is 1.8m.
◦STC-MCA5MUSB3 comes with a C mount conversion adapter
so that it can be used with CS mount microscopes in addition to
C mount microscopes.
▶HDMI
◦Cables for connecting the camera and a monitor are available.
Part Number
SKHDMI-
HDMI-1.8
SKHDMI-
HDMI-3.0
SKHDMI-
DVI-1.8
SKHDMI-
DVI-3.0
Output /
HDMI/HDMI HDMI/HDMI HDMI/DVI HDMI/DVI
Input Cable
Cable Lengh(m) 1.8 3 1.8 3
Attention
▶The resolution of the monitor display may not increase depending
on the resolution of the microscope or observation system. Please
make sure that the resolution of the microscope or observation
system is smaller than the camera cell size.
▶The cameras except for STC-MCA5MUSB3 are C mount cameras.
They cannot be used with CS mount products (microscopes and
lenses).
▶SK-N63CJ-C, SK-620BJ2 and SK-HD133DV come with an AC
adapter. Please do not use AC adapters other than the one which
comes with the product.
▶To record images from SK-N63CJ-C, SK-620BJ2 and SK-HD-
133DV, equipment which can record analog signals and HDMI
signals is required.
▶STC-MCA5MUSB3 does not come with a cable for connecting with
a monitor. Please prepare these by the customer.
A026
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Machine Vision and Image Transfer Optics Machine Vision
The quality control, productivity and cost-effectiveness are highly required in every industry such as
semiconductor, electronics, chemicals, packaging, medical equipment, automobiles and consumer
goods. The demand for high-precision positioning, measurement, inspection and evaluation with an
image processing is increasing. Taking advantage of optical design and manufacturing technology
in-house, we bring high-precision and cost efficient Machine Vision optical lens units into the market.
High Resolution Telecentric Lenses
◦Support 0.5× to 1.0× optical magnification
◦By widening the chromatic aberration correction range to 436nm - 656nm from conventional model, it is possible to
achieve high NA and low distortion to capture a clear image.
◦A wide field of view in a compact optical design is realized. (Corresponding to the imaging element up to 1.1″.)
High Magnification Telecentric Lenses
Specifications
Magnification 1.0× 0.5×
W.D. 65mm 70mm
Barrel length 152.5mm 147.9mm
Imaging element size ≦1.1″ ≦1.1″
Telecentricity 0.03° 0.02°
Distortion 0.03% 0.01%
Effective F# 5.5 5
Object side NA 0.091 0.05
Wavelength range 436nm – 656nm 436nm – 656nm
◦High magnification (10×) lens with widened chromatic aberration correction range of 436nm - 656nm.
◦Realizing the long working distance and low distortion together with NA0.23 comparable to the objective lens, it is
possible to capture fine image.
◦A wide field of view in a compact optical design is realized. (Corresponding to the imaging element up to 1.1″.)
Specifications
Magnification 10×
W.D.
55mm
Barrel length
172.5mm
Imaging element size
≦1.1″
Distortion –0.1%
Effective F# 22
Object side NA 0.23
Wavelength range
436nm – 656nm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Lens units for Machine Vision and Image Transfer
◦We offer a wide range of lens line-up
to cover various requirements.
(Macro lens, Telecentric lens, CCTV
lens for industry use, Line sensor
lens, etc.)
◦Illumination unit, power supply, camera
and lens barrel are also available.
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WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
A027

Application Systems
Manual 12-axis (6-axis) Optical Fiber Alignment Stage Unit
Motorized 12-axis (6-axis) Optical Fiber Alignment Stage Unit
DAU-080M
DAU-080A
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
DAU-080M
X axis θx
Y axis
θy
θz
Specifications
◦Use of the high resolution stages enables alignment with high
repeatability.
◦The magnet mounting method and the positioning mechanism used
in the holders ensure positional repeatability.
◦Replacing the holders with compatible holders enables application
extension associated with device change. (Fiber holders, fiber
rotation holders, fiber array holders, etc.)
Part Number Axis X Y Z θx θy θz
DAU-080M-L
DAU-080M-R
Z axis
Travel
Resolution
Travel
Resolution
Coarse: ±6.5mm
Fine: ±0.25mm
Coarse: 0.01mm
Fine: 0.0005mm
Coarse: ±6.5mm
Fine: ±0.25mm
Coarse: 0.01mm
Fine: 0.0005mm
Coarse: ±6.5mm
Fine: ±0.25mm
Coarse: 0.01mm
Fine: 0.0005mm
Coarse: ±6.5mm
Fine: ±0.25mm
Coarse: 0.01mm
Fine: 0.0005mm
Part Number
DAU-080M-0
DAU-080M-L
DAU-080M-R
Coarse: ±6.5mm
Fine: ±0.25mm
Coarse: 0.01mm
Fine: 0.0005mm
Coarse: ±6.5mm
Fine: ±0.25mm
Coarse: 0.01mm
Fine: 0.0005mm
Catalog
Code
Axis
12 axes
6 axes
6 axes
±2.5° ±2.5° ±5°
27.8″ 27.8″ 26.8″
±2.5° ±2.5° ±5°
W2032
Manual 12-axis (6-axis) optical fiber alignment stage units.
These units are best suited for alignment of passive
devices such as optical waveguide and fiber array.
27.8″ 27.8″ 26.8″
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
DAU-080A
Catalog
Code
W2033
Motorized 12-axis (6-axis) alignment stage units with six
pairs of symmetrical axes.
These units are best suited for alignment of passive
devices such as optical waveguide and fiber array.
◦Use of the high resolution stages enables alignment with high rigidity
and high efficiency.
◦The magnet mounting method and the positioning mechanism used
in the holders ensure positional repeatability.
◦Replacing the holders with compatible holders enables application
extension associated with device change. (Fiber holders, fiber
rotation holders, fiber array holders, etc.)
Part Number
DAU-080A-0
DAU-080A-L
DAU-080A-R
Axis
12 axes
6 axes
6 axes
Specifications
Part Number Axis X Y Z θx θy θz
Resolution 30mm 30mm 30mm ±9° ±7° ±5°
(Full) 2μm 2μm 2μm ≒0.00229° ≒0.00198° ≒0.0217°
Resolution
DAU-080A-L
(Half) 1μm 1μm 1μm ≒0.00115° ≒0.00095° ≒0.0108°
Positioning Accuracy

Motorized 3-axis XYθ Stage Unit
DAU-120A
Outline Drawing
(in mm)
DAU-080M
11
6.5
90
90
6.5
11
Application
Systems
120
(197.4)
100
55
100
120
55
(197.4)
Optics &
Optical
Coatings
35
12
24
23
36 36
(4)
(240)
Rotation center
23
24
35
12
Holders
Bases
(208.5)
3.5
5
102
130
10
110
(20) 110
10
5
Manual
Stages
DAU-080A
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
DAU-120A
Catalog
Code
W2034
◦The Gimballed fitting mechanism unit for YAG laser welding can be mounted.
◦It is effective to use this unit in combination with a Z axis stage.
◦Use of the high stiffness and high performance stages enabled alignment with
excellent repeatability.
◦Replacing the holders with compatible holders enables application extension
associated with device change. (Fiber holders, fiber rotation holders, fiber array
holders, etc.)
Inspection/
Observation
Bio-photonics
Laser Processing
Part Number
Axis
Outline Drawing
DAU-120A
3 axes
204.5
Specifications
Part Number Axis X Y θ
DAU-120A
Resolution 50mm 50mm
Move in the counterclockwise
CCW direction to ∞, and stop
at near 0 degree (−2.5°) in the
clockwise CW direction.
(Full) 2μm 2μm 0.005°/pulse
Resolution
(Half) 1μm 1μm 0.0025°/pulse
Positioning Accuracy

Application Systems
Multi Controller
Micro-step Driver Box with I/O
SMC
SDB
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
SMC
Multi controllers developed for controlling alignment systems.
W2035
◦These controllers come with expansion boards installed, which are necessary for equipment production together with the
alignment software developed by Sigma Koki.
◦The desktop type FAPC comes with the alignment software ASS-02 installed, and the rack mount type FAPC comes with
ASS-04 installed.
Main Specifications
OS Windows ® 7
Catalog
Code
MC8042P (manufactured by NOVA electronics, Inc.)
Motion 4axis/1
4-axis independent control
MC8082P (manufactured by NOVA electronics, Inc.)
Motion 8axis/1
8-axis independent control
PCI-3155 (manufactured by Interface Corporation)/16
AD
bit high speed AD conversion/Single end 16CH,
differential 8CH input
PCI-4304 (manufactured by Interface Corporation) IEE
GP-IB
488 compliant GP-IB 1CH type equipped with FIFO
* Option
PCI-2726CM (manufactured by Interface Corporation) (This board can be
added when the number of inputs/outputs exceeds the inputs/outputs of
the standard driver box.)
◦Sink type current drive photocoupler 32 inputs
◦Sink type high current open collector 32 outputs
Index
Specifications
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Part Number Axis Software
SMC-04A2 4 axes ASS-02
SMC-08A2 8 axes ASS-02
SMC-08A4 8 axes ASS-04
SMC-12A4 12 axes ASS-04
SMC-16A4 16 axes ASS-04
SDB
Catalog
Code
W2036
◦Low-profile 19-inch rack mount type (1U).
◦These micro-step driver boxes have the same shape, emphasizing extensibility.
◦Compact design achieved by built-in drive power supply.
◦Capable of setting 16 types of micro-steps, allowing high precision control according to the application.
◦It is shipped with such as remote control for peripheral devices, the driving of the solenoid valve, signal tower display,
and digital IO required for production equipment.
Outline Drawing
(in mm)
430
430
480
Specifications
460
Part Number
Axis
A
[mm]
B
[mm]
6
A
B
SDB-04 4 axes 31.75 88
SDB-08 8 axes 57.1 132.5
A030
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Softwares
ASS
Alignment Software
■ASS-2
Catalog
Code
W2037
The standard type alignment software which has the
functions required for alignment coded into the
standard motion control software for multi-axis
control.
◦Excellent in cost performance, having virtually all commands
required for alignment.
◦Best suited for device assembly systems which do not require
image observation functions.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
■ASS-4
Other Custom-made Software
Image of Software
Software with an image impose function added to the
alignment software ASS-02.
◦Best suited for cases where device assembly or experiments
cannot be monitored directly and need to be performed while
checking images, such as YAG laser welding.
◦To manage product devices, this software has a function to save
data and output it into a CSV file.
◦Control/software unit used for alignment and
assembling systems of optical communication
modules. We can build software such as image
processing software combined with motion
control or image observation optical systems, or
control software linked with other control equipment.
We also provide hardware building and
software as a unit or as a total system according
to your request. Contact our International Sales
Division for more information.
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Main
JOG & JOG setting screen
Alignment setting screen
Axis setting screen
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A031

Application Systems
Interferometers Technical Note
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Guide
It is requested a lot of time and effort, even to experienced professionals, in order to make an optical laboratory system
from assembling optical elements, holders and bases.
In addition, it is expected that people who use the optical system for the first time does not know well where and how to
treat. And, it will cause trouble.
We offer interferometer and a unit of Schlieren optics which is a base not only to beginner but also for experienced ones
who want to save time.
●General Interferometers … A interferometer unit used in the field of education or for teaching practice. Users can freely
change component arrangement to assemble various interferometers. It can also be used for simple verification experiments,
and is an indispensable item for optical training.
●Fluid Visibility Optics …… It is often confused with an interferometer, but we redesigned the schlieren optical system,
which is used for quantitative observation of fluid. We used white light as the light source to enable observation of subtle
contrast, and a configuration that allows loading of observed images into a PC.
●D-TOP Optics …………… An optical system that is one step more advanced than the general interferometer, and slightly
closer to an optical instrument. It is useful for verifying both functionality and compactification. This optical system
enables observation of minute samples that the general interferometer cannot check.
Features of Interferometers
Observation of dynamic phenomena of 1μm or less that are unrecognizable by human senses often uses interferometers.
For example, all the basic principles such as surface accuracy measurement of optics, an end measuring machine used for
precise measurement of distance or travel, equipment capable of measuring fast and minute changes such as speedometer
or vibrometer utilize interference of light.
An interferometer provides high resolution, but the range that an optical system can measure is not so broad. This is
because the periodicity of waves makes identification of a phase difference of an integral multiple of waves difficult.
Most of the commercially available interferometry devices consist of an optical system of interferometer and an analysis
device for interference signals.
Advanced electronics used in the analysis device enable measurement both with high resolution and broad measurement range.
This chapter introduces interferometers consisting of only an optical system, not fitted with an analysis device for interference
signals. The range available for observation is therefore very limited. However these interferometers are sufficient for the
purpose of basic interferometry experiments or theory testing. Interference is utilized for practical purposes in many fields.
These fields can use the interferometers as basic experiment devices.
Principle of Interferometer
When you split a light wave having regular periods such as a laser beam into two waves and then recombine them, you can
observe an interference phenomenon of light waves. When superimposing the two waves, the resultant wave has a part
with amplified intensity and a part with diminished intensity alternately, making fringes of light and dark.
These interference fringes indicate the phase difference between the two optical path lengths, and one fringe is equivalent
to the phase difference of the length of light source wavelength (half of the wavelength in the case of round-trip optical path).
Since it is impossible to identify components of phases different by an integral multiple of waves of interference fringes,
what you can actually observe is limited to either variation of phases different by lower than an integral multiple of waves or
continuous phase variation.
The wavelength of the light source is 632.8nm in the case of a He-Ne laser, therefore the one phase between fringes of an
interferometer of round-trip optical path becomes very short, 0.3μm. This is why an interferometer is capable of measuring
minute displacement or variation.
High sensitivity provides precise measured values however, at the same time detects influences of disturbance such as
vibration or air turbulence. To prevent this, experiments need to be performed on a vibration isolator bench or the entire
experiment system needs to be shut off from the outside with black-out curtains or the like.
◦Interference is a superimposition of two waves.
◦Interference fringes appear when waves have regular
periods.
A
Light source
Reference surface (standard)
Surface flatness
Sample
ψ
A’
Half mirror
Measurement
Simulation diagram of the two-beam interference
Surface flatness ∆t = Mλ/2
λ: measurement wavelength range
M: number of interference fringes
Interference fringes
To measure surface accuracy with an interferometer, install a sample in one optical path, and superimpose the wavefront
reflected by the measuring surface with the plane wave reflected by the reference surface. Interference fringes generated
at this time are folded, reflecting the shape of the measuring surface.
The shape of the measuring surface can be found from the amount of fold of these fringes.
A032
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Points for Assembly
It is easy to assemble an interferometer once you master the knack of it.
The following are some points that require attention during assembly.
First of all, to align the optical axis of all components, adjust the height of holders using posts and post holders. To make
the laser beam horizontal to the installation stand, adjust the angle of a He-Ne laser. Roughly arrange each component
while keeping some space required for adjustment of the holders.
To enter light correctly into optics, adjust components in sequence starting from the laser light source.
3Wave separator, combiner adjustment
Reference surface mirror
(standard)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
He-Ne Laser
Wavelength Range:
632.8nm
1Spatial filter
2Collimated lens
Screen
Half mirror
Adjustment
lens
Mirror
4Interference
fringes
adjustment
When installing components, firmly
fasten various joints or clamps so
that holders do not move. Such
parts include the coarse/fine
switching clamps for elevation and
azimuth of a mirror holder, or clamp
of a post holder, the on/off of the
lever of a magnet base.
If joints or clamps are not fastened,
vibrations tend to occur, making
stable observation of interference
fringes difficult.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
1Spatial Filter Holders
A spatial filter holder is a device consisting of an objective lens and a
pinhole, and makes a diverging ray from a laser beam while at the same
time eliminating distortion in beam wavefronts or diffraction rings caused
by particles to convert it to a clean Gaussian distribution.
Adjust the position of the spatial filter component so that the laser beam
can be perpendicular to the center point of the objective lens. Move the
pinhole away from the objective lens using the micrometer of the objective
lens stage, and find a weak light that passed the pinhole A. Then move
the vertical and horizontal axes of the pinhole, and find the position where
the passed light becomes maximum B. When gradually moving the objective
lens closer to the pinhole, the light that passed the pinhole becomes
bright, but if the objective lens keeps approaching toward the pinhole, the
light becomes darker. When it gets darker, adjust the pinhole and find the
position where the light becomes bright. Repeat this operation until the
brightness reaches maximum and there are no diffraction rings C.
Pinhole
Objective
lens
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
A B C
2Collimated Light
The lens component receives light diverging
from the spatial filter component, and
converts it to thick collimated light.
For collimation adjustment, place a screen
at a distance, and adjust the lens position
toward the direction of the optical axis so
that the beam diameter projected to the
screen is the same as the beam diameter
immediately after the lens.
1Spatial filter
2Lens
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A033

Application Systems
Interferometers Technical Note
3Splitting of a Beam and Recombination
Mirror
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
A collimated light is split and re-combined by using a half mirror. A half mirror
is positioned so that a beam is flexed to a right angle, but a plate type half
mirror causes shade on part of the beam because of its thickness and holder
frame, limiting observation of interference fringes to a small area at the center
of the half mirror. (It is especially noticeable in a Michelson interferometer.) To
solve this problem, attach the half mirror in the reverse orientation (the coated
surface faces the retaining ring side) and adjust the half mirror component so
that the clear aperture of the transmitted beam is maximized.
* A beamsplitter holder (BHAN) that will not cause shade on a beam even when
the coated surface is facing the front is also available. C020
Install the mirror component so that the collimated beam fits in the clear
aperture of the mirror, and adjust positioning of each holder so that the two
beams are projected on the screen to be over lap at the same size.
When a wedged plate type half mirror is used, a transmitted beam is slightly
refracted due to the refractive index of the half mirror. The two optical paths
divided by the half mirror, therefore, are not at precisely 90 degrees, but it will
not affect measurement or observation of interference fringes.
Screen
Half mirror
Mirror
Coated
Clear aperture
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
4Angle Adjustment of the Beam
Even if the two beams are perfectly superimposed by the adjustment in 3, interference fringes cannot be observed in
most cases. To observe interference fringes, the parallelism of the two beams needs to be set to one minute or less.
There are various adjustment methods, but here we introduce one method that uses an adjustment lens.
Prepare an adjustment lens that has a long focal length (adjustment lens component IFC2-AL A040), insert it
between the half mirror and the screen, and adjust the lens position so that the focal spots of the beams are on the
screen. Picture A
To completely superimpose the two spots, make fine adjustment by moving only the mirror of one optical path. Picture B
(To make the adjustment easier, make the spots as small as possible and somewhat diminish the brightness of the spots.)
You can observe fine interference fringes when you remove the adjustment lens. Picture C (Repeat the aforementioned
steps until fringes are visible.)
Next, while keeping the interference fringes visible, gradually increase the spacing between fringes by making fine
adjustment on one side of the mirror holder. (At this time, if you adjust both mirror holders at the same time, the adjustment
may become irreversible.)
Adjustment of the azimuth (θy) of the mirror holder increases or decreases the horizontal spacing between fringes, and
adjustment of the elevation (θx) of the mirror holder increases or decreases the vertical spacing between fringes.
The interference pattern most suitable for observation is when the number of vertical or horizontal interference fringes is
three or four. Picture D
A
B
C
D
A034
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Experiment Method
After assembling an interferometer, to understand the features of the interferometer, having a
simple experiment before entering a full-scale experiment is suggested.
From which, you can acquire a lot of information that cannot be obtained from textbooks or math
formulas. The following four experiment methods are simple and do not require any special tools.
■Fringe Control
To change the direction of interference fringes, adjust the elevation and azimuth of a mirror. To increase spacing between
fringes and make even brightness on the entire surface, further make ultra fine adjustment. The number of fringes indicates
the crossing angle of the two beams. When the number of fringes is zero, the two beams are completely parallel.
Then, to increase the number of interference fringes, rotate the mirror. The crossing angle can be found from the number
of interference fringes.
sinψ =
Nλ
2D
N: Number of interference fringes, D: Beam diameter,
ψ: Crossing angle, λ: Wavelength
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
■Phase Shift
When no fringes are present, if you lightly touch (press) the mirror on one side
toward the direction of the optical axis, the brightness of the interference
fringes changes drastically. Brighter interference fringes indicate that the
phases of two beams match, and darker fringes indicate that the two beams
diminish each other because their phases are different by half the wavelength.
When moving for half the wavelength, the brightness and darkness alternate.
Reference surface (measure)
Movable mirror
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
■Air Turbulence
If you slowly insert your hand from underneath
one optical path of an interferometer, you can
observe fringe deflection. This is because the
air is warmed by the temperature of the palm,
changing the refractive index of the air like a
heat haze. Fringe deflection is greater near
the palm due to heat dissipated from the palm.
■Distortion of the Mirror
If you tighten and slightly loosen the mirror
retaining screw (set bolt) that fixes the mirror
on a mirror holder of an interferometer, you
can observe changes in the shape of interference
fringes. When the screw is strongly
tightened, the mirror is distorted by the stress,
resulting in distortion of the flat surface of the
reflector. The distortion is too minute for
humans to detect, but is observed as a
drastic change in fringes in the interferometer.
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A035

Application Systems
Interferometers Unit
Michelson Interferometer—IFS2-MI-25
Catalog
Code
W1001
Application
Systems
Screen
Optics &
Optical
Coatings
He-Ne Laser
Wavelength Range:
632.8nm
Half mirror
Mirror
(measuring surface)
Holders
Spatial filter
Lens
Bases
Manual
Stages
◦Clear aperture is φ25mm
Mirror
(reference surface)
Actuators
Motoeized
Stages
Light
Sources
Product Name Part Number Quantity
Optical Axis Height
[mm]
Laser Components IFC2-L 1 171
Spatial Filter Component IFC2-SF 1 165
Collimator Lens Component IFC2-CL 1 160
Mirror Component IFC2-M 2 173
Beamsplitter Component IFC2-BS 1 178
Screen Component IFC2-SC 1 222.5
Index
Mach-Zehnder Interferometer—IFS2-MZ-25
Catalog
Code
W1002
Microscope Unit
He-Ne Laser
Wavelength Range:
632.8nm
Lens
Half mirror
Mirror
Alignment
Spatial filter
Interferometers
Screen
Inspection/
Observation
Bio-photonics
Laser Processing
◦Clear aperture is φ25mm
Mirror
Transmissive
sample
Half mirror
Product Name Part Number Quantity
Optical Axis Height
[mm]
Laser Components IFC2-L 1 171
Spatial Filter Component IFC2-SF 1 165
Collimator Lens Component IFC2-CL 1 160
Mirror Component IFC2-M 2 173
Beamsplitter Component IFC2-BS 2 178
Screen Component IFC2-SC 1 222.5
Fizeau Interferometer—IFS2-FZ-25
Catalog
Code
W1003
He-Ne Laser
Wavelength Range:
632.8nm
Lens
Half mirror
Half mirror
(reference surface)
Spatial filter
Mirror
(measuring surface)
Screen
◦Clear aperture is φ25mm
Product Name Part Number Quantity
Optical Axis Height
[mm]
Laser Components IFC2-L 1 171
Spatial Filter Component IFC2-SF 1 165
Collimator Lens Component IFC2-CL 1 160
Mirror Component IFC2-M 1 173
Beamsplitter Component IFC2-BS 2 178
Screen Component IFC2-SC 1 222.5
A036
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Camera Observation Unit—IFS2-CMR
You can load interference fringe images onto a PC by replacing the screen component of an
interferometer to the imaging lens component and camera component.
Before purchase, check the focus position of the camera and the available range for observation
by the camera.
In addition, direct irradiation of laser light will cause saturation due to the high sensitivity of
the USB camera. To prevent this, insert a polarization filter for light intensity adjustment on
the laser side, and an ND filter on the camera side.
Catalog
Code
W1043
Application
Systems
Optics &
Optical
Coatings
Holders
Product Name Part Number Quantity
Optical Axis Height
[mm]
Polarization Filter Component IFC2-PF 1 175
Imaging Lens Component IFC2-KL 1 178
Filter Component IFC2-AF 1 171
Camera Component IFC2-UC 1 178
Bases
Manual
Stages
Actuators
Schlieren—SRS
Optical system for quantitative observation of air flow or streams in glass (striae).
It expresses invisible minute variations in refractive index with intensity of optical luminance.
Projection images of Schlieren can be observed on a monitor using an image sensor.
Catalog
Code
W1005
Motoeized
Stages
Light
Sources
Index
White light source
Microscope Unit
Spatial filter
Alignment
Mirror
Lens
Sample
Lens
Slit
Mirror
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Imaging lens
Camera
Product Name Part Number Quantity
Optical Axis Height
[mm]
White Light Source Component SRS-WL 1 171
Iris Diaphragm Component IFC2-IR 1 169.5
Collimator Lens Component IFC2-CL 2 160
Mirror Component IFC2-M 2 173
Slit Component SRS-SL 1 170
Imaging Lens Component IFC2-KL 1 178
Camera Component IFC2-UC 1 178
◦Use of white light source provides clear images without irrelevant
noises or diffraction fringes.
◦Since the intensity of white light is low, requires a darkroom to
observe images projected on the screen.
◦Allows variations in observation area by changing focal length of
the imaging lens or position of a sample, lens or camera. Before
purchase, check the observation area.
◦The maximum observation area is φ27mm. Contact us if you need
a larger observation area.
Observation of Air Flow ejected by Air Blower
Ejection Volume is Low
Ejection Volume is High
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A037

Application Systems
Components
Application
Systems
Optics &
Optical
Coatings
An optical unit consists of various components.
You can assemble a different optical unit or change the configuration of the unit according to the
purpose of an experiment by purchasing additional components. (For example, replacing the screen
component with the imaging lens and camera components enables loading of observed images.)
In addition, we offer variety of components required for optical adjustment and safety control.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Laser Component—IFC2-L
Catalog
Code
W1006
He-Ne laser component excellent in
coherence and provides linear
polarized beam with stable output
Wavelength: 632.8nm, Output: 1mW
Product Name Part Number Quantity
Optical Axis
Height
[mm]
He-Ne Laser 05-LHP-111 1
Laser Power Source 05-LPL-911-065 1
Laser Holders LAH-1 1 71
Post Holder BRS-20-80 1 80
Magnet Base MB-L65C-M4 1 20
Total 171
Spatial Filter Component—IFC2-SF
Catalog
Code W1007
Emits diverging rays of Gaussian
distribution without distortion by
transmitting a laser beam focused by
an objective lens through a pinhole.
To provide clean spherical waves, it
can remove wavefront distortion
caused by dirt on the objective lens
or the like from the laser beam.
Product Name Part Number Quantity
Optical Axis
Height
[mm]
Spatial Filter Holders SFB-16RO-OBL20-25 1 65
Post Holder BRS-20-80 1 80
Magnet Base MB-L65C-M4 1 20
Total 165
Collimator Lens Component—IFC2-CL
Catalog
Code W1008
Converts spherical waves emitted
from the spatial filter holder to
collimated light.
Not fitted with a stage.
Focal length: 300mm
Mirror Component—IFC2-M
Catalog
Code W1009
Uses an aluminum total-reflection
mirror having high surface accuracy,
providing straight interference fringes.
The mirror component is fitted with a
stage for optical axis adjustment or
interference fringe phase shift
experiments.
Product Name Part Number Quantity
Optical Axis
Height
[mm]
Achromatic Lens DLB-30-300PM 1
Lens Holder LHCM-30 1 60
Post Holder BRS-20-80 1 80
Magnet Base MB-L65C-M4 1 20
Total 160
Product Name Part Number Quantity
Optical Axis
Height
[mm]
Aluminum Total-reflection Mirror TFA-50C08-20 1
Kinematic Mirror Holder MHG-MP50-NL 1 35
Post RO-20-80 1 40
Post Holder BRS-20-60 1 60
Linear Stage TSD-601S 1 18
Magnet Base MB-L65C-M4 1 20
Total 173
A038
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Beamsplitter Component—IFC2-BS
Catalog
Code W1010
Utilizes a plate-type dielectric multilayer
half mirror that provides lower
intensity loss by dividing light into
transmitted light and reflected light
to 1:1.
The beamsplitter component is fitted
with a stage for optical adjustment.
Product Name Part Number Quantity
Optical Axis
Height
[mm]
Multi-layer Half Mirror PSMH-50C08-10W-550 1
Gimbal Mirror Holders MHAN-50S 1 90
Post Holder BRS-20-50 1 50
Linear Stage TSD-601S 1 18
Magnet Base MB-L65C-M4 1 20
Total 178
Screen Component—IFC2-SC
Catalog
Code W1011
Projects interference fringes on a
□200mm white plate.
Product Name Part Number Quantity
Optical Axis
Height
[mm]
Flare Plate BBP-200 1 100
Square Optics Holder KMH-80 1 42.5
Post Holder BRS-12-60 1 60
Magnet Base MB-L65C-M4 1 20
Total 222.5
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Imaging Lens Component—IFC2-KL
Catalog
Code W1012
An imaging lens for loading interference fringe
images into a camera. Focal length: 50mm
To observe the entire clear aperture φ25mm
Sample to imaging lens: 401.5mm
Imaging lens to camera: 57.11mm
Before purchase, check the observation range.
Fitted with a stage for focus adjustment.
Product Name Part Number Quantity
Optical Axis
Height
[mm]
Plano Convex Lens SLB-30-50PM 1
Lens Holder LHCM-30 1 60
Post Holder BRS-20-80 1 80
Linear Stage TSD-601S 1 18
Magnet Base MB-L65C-M4 1 20
Total 178
Camera Component—IFC2-UC
Catalog
Code W1013
Loads observation images into a PC
by simply connecting the 1/2″2
million pixel USB camera to a USB
port of the PC.
The camera component is fitted with
an YX axis stage, allowing adjustment
of focus and image position.
Product Name Part Number Quantity
Optical Axis
Height
[mm]
USB Camera SKDCE-3 1 19
Inch Screw Thread Post ROU-12-80 1 40
Post Holder BRS-12-60 1 60
Spacer SP-127-1 1 7
Linear Stage TSD-602S 1 32
Magnet Base MB-L65C-M4 1 20
Total 178
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Filter Component—IFC2-AF
Catalog
Code W1014
An ND filter installed immediately in
front of a camera to attenuate the
intensity of laser light to 1% because
direct irradiation of laser light into
the camera causes saturation.
Product Name Part Number Quantity
Optical Axis
Height
[mm]
Absorptive Filter AND-20C-01 1
Lens Holder LHF-20 1
Cross Clamps CCHN-12-12 1 14
Post PO-12-150 1 102
Magnet Base MB-CB-PB 1 55
Total 171
Stray Light Block Component—IFC2-BD
Catalog
Code W1015
Reflected light from the reverse side
of a half mirror or multiple-reflected
light inside an interferometer sometimes
spread out of a laboratory
bench as stray light. This component
safely blocks such optical paths. It
can also be used as a filter since an
absorptive ND filter is used.
Product Name Part Number Quantity
Optical Axis
Height
[mm]
Absorptive Filter AND-50S-01 1
Filter Holders FHS-50 1 70
Post Holder BRS-12-80 1 80
Magnet Base MB-L65C-M4 1 20
Total 170
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A039

Application Systems
Components
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Polarization Filter Component—IFC2-PF
Catalog
Code W1016
Used for adjusting the intensity of
He-Ne laser. Use this component
when changing laser intensity
continuously for optical axis adjustment
or camera brightness adjustment.
When two units are used in a
line, it can turn down the intensity
close to zero.
Product Name Part Number Quantity
Optical Axis
Height
[mm]
Visible Sheet Polarizer SPF-30C-32 1
Polarizer Holder PH-30-ARS 1 60
Post Holder BRS-12-60 1 60
Magnet Base MB-CB-PB 1 55
Total 175
Iris Diaphragm Component—IFC2-IR
Catalog
Code W1017
Used for clipping a beam into a circle,
or cutting out unnecessary light to
obtain only necessary light.
It is convenient to use the iris diaphragm
component as the reference
for alignment.
Product Name Part Number Quantity
Optical Axis
Height
[mm]
Iris Diaphragm IH-30 1 54.5
Post Holder BRS-12-60 1 60
Magnet Base MB-CB-PB 1 55
Total 169.5
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Slit Component—SRS-SL
Catalog
Code
W1018
A slit positioned at the focus spot of
light transmitted through a sample in
Schlieren. Contrast of projected
images changes by fine adjustment
of slit position or width.
Product Name Part Number Quantity
Optical Axis
Height
[mm]
Adjustable Slit PSL-0 1 55
Post Holder BRS-12-60 1 60
Magnet Base MB-CB-PB 1 55
Total 170
Adjustment Lens Component—IFC2-AL
Catalog
Code W1019
Used when correctly overlapping
two beams in parallel during interference
fringe adjustment.
After superimposing the spots,
remove it from the optical path.
Focal length: 300mm
Product Name Part Number Quantity
Optical Axis
Height
[mm]
Plano Convex Lens SLB-30-300PM 1
Lens Holder LHF-30 1 55
Post Holder BRS-12-60 1 60
Magnet Base MB-CB-PB 1 55
Total 170
White Light Source Component—SRS-WL
Catalog
Code W1020
White light source of halogen lamp
used as the light source of Schlieren.
It will not heat the optical system
because light is transmitted by the
light guide.
Lamp power consumption: 150W
(with intensity adjustment)
Product Name Part Number Quantity
Optical Axis
Height
[mm]
Halogen Light Source LS-LHA 1
Light Guide MSL-1000S-10 1
Adjustable Round Lens Holder LHA-25 1
Cross Clamps CCHN-12-12 1 14
Post PO-12-150 1 102
Magnet Base MB-CB-PB 1 55
Total 171
A040
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Steel Honeycomb Optical Tabie—OSDVIO-R-1209M100t(800H)
Catalog
Code W6502
Darkroom Kits—DRU-2017
Catalog
Code
W6016
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Interferometers are highly sensitive and always require
vibration isolator benches to eliminate floor vibrations.
Table face: 1,200×900mm, Height: 800mm
Magnetic stainless steel plate
M6 tapped holes 25×25mm matrix
D009
When observing interference fringes projected on a screen
or Schlieren projection images, the room needs to be
dark. In such cases, having a darkroom is convenient.
Covering an experiment area is also very effective as a
laser safety control.
Size: (W)2,000 × (D)1,700 × (H)2,000mm
D018
Actuators
Motoeized
Stages
Light
Sources
Index
Special Order
Catalog
Code
W1021
In addition to the optical units introduced so far, we will produce custom-made optical units
according to your request.
We will flexibly support your request from a holder to fit your sample to a packaged optical instrument.
We will also review the configurations of products in our catalog to suit your experiment.
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Photo credit: Meiji University, Theoretical Physics Experiment
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A041

Application Systems
D-TOP Optics Guide
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
D-TOP optical system offers a new alternative to the optical experiment. By breaking the stereotype
that says “optical system can not be moved due to the heavy and large”, we propose a highly stable
optical system that is capable of carrying with a compact size.
In case of D-TOP optical system, optical elements and holders, which have been used until now,
can be used as it is, you can save the initial investment. Moreover, by replacing the experimental
system of surface plate with the D-TOP optical system, it becomes possible to remove or for space
saving and enables effective use of the space occupied by the optical system.
[Characteristics of D-TOP]
◦Low optical axis (45mm recommended) … well match to low optical axis laser
◦High rigidity ………………………………… less affected by vibration, interferometry is possible at simple vibration isolation
◦Advantage for small sample ……………… possible approaching between each element, the magnification of image system
can be enlarged
◦Compact …………………………………… can be carried in a B4 size, and packable in bookshelf
◦Easy assembly ……………………………… possible to place accurately a holder by refined and simple structure on the
optical axis. Also, possible to change the position of the holder and the
height of the optical axis.
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
D-TOP Base plateDBSP-2
Setting bolt is accessible from anywhere
in the four directions for fixing the post
stand of φ20mm. Post stand approaching
is possible until it contacts. In addition,
several post stands can be arranged in
a narrow space.
Holders
It is available for the use of various holders in
the catalog.
Kinematic mirror holder (MHG-MP30-NL) with
an offset (20mm) can also be used.
φ20 Post HolderPS20
Compatible with a various mounting holders.
(M4 tapped holes, M4 male screw, M6 male screw)
You can freely specify the length of the post.
D-TOP Base plateDBSP-1
It is fixed the post stand of φ20mm with a slotted
and clamping screw. Both the center fixed and
correction fixed of the offset of 20mm.
It can be replaced the post stand without
removing the base plate. Post stand of minimum
height of 9mm is available.
D-TOP BreadboardDOBC-2632
Allows for fine assembly of the holder (M3-16mm matrix).
Optimized compact size (B4 size) to carry. If four plates
are connected, it is available to use as breadboard (B2 size).
D-TOP optics can be sold from one base plate. Referring to the configuration of the practical example and module, please
select a various device.
There may not be fixed a light source, sample with a special shape and detector in the existing holders. In this case,
custom-made base, holder and adapter are available. If D-TOP base and catalog products can be combined, the custommade
manufacturing is reduced, and it is possible for configuration at low cost. If the custom-made holder and base are
requested, please inform us the exact shape of each device and the height of the optical axis.
In addition, it is also available for design, production, adjustment and functional verification of the optical system based on
the D-TOP optical system.
To meet customers’ needs, we will answer to the needs of every stage.
φ20 Post Holder—PS20
W1039
It is a post stand of φ20mm that has been optimized for the low optical axis and compact for D-TOP.
It is very useful when holders of different heights of optical axis are adjusted to the same heights of
optical axis.
Catalog
Code
Outline Drawing
PS20
M4 dedicated screw
…2 screws
M6-M4 dedicated
conversion screw
…2 screws
φ20 −0.02
−0.05
L
(in mm)
2
14
M4
[M4 dedicated screw]
◦L length can be specified in any length. According to
the height of the optical axis of the holder, please
specify the L dimension.
◦Other than the hexagonal socket head cap screws of
M4, the mounting of the holder can be mounted to the
tap hole of M4 rod and M6 rod by using the screws
provided
◦ It can be used as the rod of 20mm or less (RO-20-L).
2-C0.5
3
55
Specifications
M4 through hole
M6 P1 M4
[M6-M4 dedicated conversion screw]
Part Number
PS20-L
L Specified range
[mm]
10≦L≦30
A042
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D-TOP Base plate—DBSP-1
It is a base plate to fix φ20mm post stand. By only a little loosing a clamping screw of slotted, it can be replaced holders
without changing position and adjusted the height of the optical axis. It is also possible for the offset (20mm) correction
between the mounting position of Kinematic Mirror Holder (MHG-MP20-NL/MP25-NL/MP30-NL) and the mirror surface.
◦It can be placed that the center of the cube beam splitter (NPCH) and polarization beam splitter (PBS) is arranged on the
optical axis (tap sequence of the base).
◦By using the long hole (2.6mm shift) in the mounting, it can do fine-tuning the position of the optical element and be used
to correct the optical axis deviation.
◦Since the post stand is fixed by the clamping screw, it can be fixed at random in the horizontal direction of the optical
element.
Outline Drawing
DBSP-1
Hexagonal socket
head cap screw
M3×10…3screws
D-TOP Base plate—DBSP-2
It is a base plate to fix φ20mm post stand. It is used when thin elements such as a lens and a
polarizer are placed close to the optical axis. It is a base plate to fix φ20mm post stand.
Outline Drawing
DBSP-2
Hexagonal socket
head cap screw
M3×10…2 screw
18
φ20 +0.1
−0 2.6
6.5
3.5
9
9
37°
9
6
3.5
4
9.1
6.1
20
16
22.5
40
45
22.5
16 16
32
16
45
5
φ20 +0.1
−0
4-M3 setbolt
(in mm)
(in mm)
11
14.5
17
5
Guide
Specifications
Part Number
Catalog
Code
Catalog
Code
W1040
▶When it is fixed the long hole with a screw by the side of slotted
clamp, it becomes the 20mm offset mounting of MHG series holder.
Attention
▶Slotted was made harder in order to maintain accuracy. Please securely
tighten until tighten the post stand does not turn.
▶There are four mounting holes, but please fix either side of slotted
without tightening of screw. There are four mounting holes, but
please fix either side of slotted without tightening of screw.
W1041
◦Due to the thickness of the base plate, the optical axis
height is 5mm raising.
◦Since the width is 2mm shorter than a post stand,
the interference of the base plate does not cause,
even in approaching of optical elements.
◦Post stand can be fixed by setting bolt of 1 – 2 positions
from the side. It is accessible from any direction
because of set bolt attached to the four directions.
Specifications
Part Number
Offset (Diagonal direction)
[mm]
Optical Axis Height
[mm]
DBSP-2 5
Optical Axis Height
[mm]
DBSP-1 0 – 2.6, 20 – 22.6 0 – 5
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
D-TOP Breadboard—DOBC-2632
W1042
It is a breadboard of B4 size for D-TOP. To remove wasted space regarding the placement of the
existing holders, it adopted a matrix M3-16mm tap hole.
As arranging four breadboards squarely, on the surface plate with prepared M6 tap holes, it can be
used as a single breadboard of 704mm × 512mm (poster size).
Outline Drawing
DOBC-2632
Hexagonal socket
head cap screw
M6×8…4 screw
16
6
16
352
320 (16×20) 16
11
311-M3
7
(in mm)
31
Catalog
Code
◦It can be carried in a state of assembled optical system
of B4 size.
◦It is designed to fit properly the position of the tap even
if four breadboards are combined. (It may slip off the
error of the processing and mounting.)
256
224 (16×14)
16
17
13
10
27
352 25 25
25 25 200
3
Specifications
Part Number
Top-mounted
Top-mounted
[mm]
DOBC-2632 M3-16mm matrix 10
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A043

Application Systems
D-TOP Optical System
DTM
Micro Observation Interferometer—DTM-MMHI
Catalog
Code
W1004
Application
Systems
Optics &
Optical
Coatings
2
3
2
1
7
Mirror
Polarizer
Half mirror
Mirror
He-Ne Laser
Holders
256
Sample
6
Bases
Manual
Stages
4
2
13
14
5
Mirror
Half mirror
352
Imaging lens
Camera
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Sample
Interference Fringes of Transmitted
Wavefronts of the Sample
Mach-Zehnder interferometer that can be observed transmitted wavefront of the glass
substrate of about 1mm. By using a base of D-TOP, it shortens the distance to the imaging
lens from the sample and is imaged an enlarged image of the sample onto the camera.
Images captured by the camera can be taken directly to a PC via USB and kept on
record about stop and moving images. In addition, it allows to adjust the brightness of
the laser by using two polarizing plates and to be observed in the best image without
saturation.
Product Name Part Number Quantity
1 Laser Module DTM-05-LHP-111 1
2 Mirror Module DTM-TFA-30C05-10 3
3 Polarizer Module DTM-DTPF-15C-32 2
4 Cube Half Mirror Module DTM-HBCH-20-550 1
5 Plate Half Mirror Module DTM-PSMH-30C03-10-550 1
14 Small Sample Holder Module DTM-MLF-SF 1
6 Lens Module (Plano Convex Lenses) DTM-SLB-30-50PM 1
7 USB Camera Module DTM-SKDCE-3 1
13 D-TOP Breadboad DOBC-2632 1
Inspection/
Observation
Bio-photonics
R Measuring Interferometer—DTM-RMFI
Catalog
Code
W1022
Laser Processing
1
Mirror
Laser Beam Expanders
He-Ne Laser
2
15
18
256
Polarizer
Half mirror
Prototype Beam Spilitte
3
5
7
Mirror
Polarizer
Concave
sample
Camera
2
13
3
16
19
17
Mirror
Achromatic Lens
352
It is a device that uses an interferometer and measures the radius of curvature of the
concave surface of the small curvature. There are two positions where can be observed
interference fringes reflected on the concave surface. One position is that the focus is on
a concave surface of the achromatic lens, and the other position is that the focus is on
the center of curvature of the concave surface. When reading the micrometer on the stage
carrying the sample, the distance between the two positions can be observed the interference
fringes of concave sample, and it can be used to determine the precise radius of curvature.
Interference pattern of concave
Concave sample and achromatic lens
Product Name Part Number Quantity
1 Laser Module DTM-05-LHP-111 1
15 Laser Beam Expanders LBED-10 1
2 Mirror Module DTM-TFA-30C05-10 3
3 Polarizer Module DTM-DTPF-15C-32 2
5 Plate Half Mirror Module DTM-PSMH-30C03-10-550 1
16 Prototype Beam Spliter Module DTM-PSM33-30C03-10W-550 1
17 Achromatic Doublets Lens Module DTM-DLB-15-50PM 1
18 Cancave Sample Holder Module TAT-AD20-TSD-40801S 1
19 Lens Module (Plano Convex Lenses) DTM-SLB-15-100PM 1
7 USB Camera Module DTM-SKDCE-3 1
13 D-TOP Breadboad DOBC-2632 1
A044
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Coherent Length Measuring Machine—DTM-CLMI
21
22
3
2
25
20
3
1
7
24
23
2
13
256
Optical Path Switching Mirror Polarizer
Polarizer
Biconcave
Lense
1/2 Waveplate
Mirror
Moveable Mirror
Camera
1/4 Waveplate
352
Mirror
Catalog
Code
He-Ne Laser
W1023
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Interference pattern of the optical
path difference of 0μm
A movable mirror for changing
the optical path difference
Custom-made
Interference pattern of the optical
path difference of 10μm
As a polarizing Michelson interferometer using PBS and 1/4 wave plate,
we have measured the coherent length of the background light of the
semiconductor laser. First, it takes the alignment of the interferometer
in the He-Ne laser and retracts mirrors on the stage, and then collimating
light of the semiconductor laser is incident to the interferometer. After
removing the laser light by the polarizing plate, the semiconductor laser
is observed only the background light by the camera. By adjusting the
movable mirror little by little, it can be found the position that the
interference fringes appear. The length of the range that is visible the
interference fringes will be coherent length.
Product Name Part Number Quantity
1 Laser Module DTM-05-LHP-111 1
3 Polarizer Module DTM-DTPF-15C-32 2
20 Optical Path Switching Mirror Module TFA-30C05-10-TSD-40801S 1
21 1/2 Waveplate Module DTM-WPP-15C-633-2M 1
22 PBS Module DTM-PBS-20-6328 1
23 1/4 Waveplate Module DTM-WPP-15C-633-4M 2
2 Mirror Module DTM-TFA-30C05-10 2
24 Moveable Mirror Module TFA-30C05-10-TSD-401S 1
25 Biconcave Lense Module DTM-SLB-10-30NM 1
7 USB Camera Module DTM-SKDCE-3 1
13 D-TOP Breadboad DOBC-2632 1
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
TOP is configured using the catalog product primarily, but it may be requested a adapter, holder and base that are not in the
catalog in order to fix a light source, special shape sample and detector. In such a case, if you can tell us the specifications
(dimension) of the light source, sample and detector, we can produce the dedicated holder. In addition, for a possible combination
of catalog products, we can do the alteration of the products and produce the custom-made connecting plate. Please
contact our International Sales Department.
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A045

Application Systems
D-TOP Module
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Laser Module—DTM-05-LHP-111
Catalog
Code W1024
Module for He-Ne laser of the linearly
polarized light with excellent coherence
Wavelength Range: 632.8nm
Output: 1mW
Beam height and angle can be
adjusted.
Product Name Part Number
Optical Axis Height
Quantity
[mm]
He-Ne Laser 05-LHP-111 1
Laser Power Source 05-LPL-911-065 1
Laser Holders LAH-1 1 41
Spacer LAH-SP 1 4
Optical Axis Height 45
Mirror Module—DTM-TFA-30C05-10
Catalog
Code W1025
Module that is bent 90 degrees to
the optical path using a mirror with
high surface accuracy. Optical axis
will be able to match to the center of
the mirror.
Product Name Part Number
Optical Axis Height
Quantity
[mm]
Mirror TFA-30C05-10 1
Mirror Holder MHG-MP30-NL 1 25
φ20 Post Holder PS20-20 1 20
D-TOP Base Plate DBSP-1 1 0
Optical Axis Height 45
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Polarizer Module—DTM-DTPF-15C-32
Catalog
Code W1026
Module for converting the
polarization direction and adjusting
the light amount.
Extinction Ratio: 10 –4
Product Name Part Number
Optical Axis Height
Quantity
[mm]
Visible Polarized Filter DTPF-15C-32 1
Polarizer Holders MPH-15R 1 20
φ20 Post Holder PS20-20 1 20
D-TOPBase Plate DBSP-2 1 5
Optical Axis Height 45
Plate Half Mirror Module—DTM-PSMH-30C03-10-550
Catalog
Code W1028
Module using a plate half mirror.
The branching ratio of reflected light
and transmitted light is 1:1.
Chromatic aberration and spherical
aberration by the thickness of the
glass are small.
Product Name Part Number
Optical Axis Height
Quantity
[mm]
Broadband Dielectric Half Mirrors PSMH-30C03-10-550 1
Mirror Holder MHG-MP30-NL 1 25
φ20 Post Holder PS20-20 1 20
D-TOP Base Plate DBSP-1 1 0
Optical Axis Height 45
Hybrid Cube Half Mirror Module—DTM-HBCH-20-550
Catalog
Code W1027
Module using a half mirror of broadband
cube. The branching ratio of reflected
light and transmitted light is 1:1.
The ratio remains unchanged even if the
polarization state of the incident light is
changed.
Product Name Part Number
Optical Axis Height
Quantity
[mm]
Hybrid Cube Half Mirrors HBCH-20-550 1 10
Prism Holder KSP-DT 1 7
θ axis Rotation Stages KSP-406M 1 13
Spacer SP-40T 1 5
φ20 Post Holder PS20-10 1 10
D-TOP Base Plate DBSP-1 1 0
Optical Axis Height 45
Lens Module (Plano Convex Lenses)—DTM-SLB-30-50PM
Catalog
Code W1029
Modules for forming the sample to
the image sensor or focusing the
light on the detector
Focal length: 50mm
Clear aperture:φ27mm
Product Name Part Number
Optical Axis Height
Quantity
[mm]
Plano Convex Lenses (BK7) SLB-30-50PM 1
Lens Holder LHCM-30 1 30
φ20 Post Holder PS20-10 1 10
D-TOP Base Plate DBSP-2 1 5
Optical Axis Height 45
Camera Module—DTM-SKDCE-3
Catalog
Code W1030
Module using a color camera of USB
output.
It is possible to project the image to a
PC. There is a mechanism to focus by
adjusting the camera position, Easy
replacement in case of C-mount camera.
Product Name Part Number
Optical Axis Height
Quantity
[mm]
2Mega-pixels USB2.0 Camera SKDCE-3 1
C-mount Camera Holder DTCH-C-20 1 20
Dovetail Stage TARW-25501 1 22
Base Plate DTCBP-4050 1 3.5
Optical Axis Height 45.5
1/4 (or 1/2) Waveplate Module—DTM-WPP-15C-633-4M (or -2M)
Catalog
Code W1031
Module converting the polarization state by
using a wavelength plate. 1/4 wavelength
plate converts linearly polarized light to
circularly polarized, 1/2 wavelength plate
rotates the polarization direction.
Wavelength: 632.8nm
Product Name Part Number
Optical Axis Height
Quantity
[mm]
1/4 (or 1/2) Waveplates (633nm) WPP-15C-633-4M (or 2M) 1
Mini-Polarizer Holders MPH-15R 1 20
φ20 Post Holder PS20-25 1 20
D-TOP Base Plate DBSP-2 1 5
Optical Axis Height 45
A046
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PBS Module—DTM-PBS-20-6328
Catalog
Code W1032
Combined or separated vertically
polarized light and horizontally
polarized light.
Wavelength Range: 632.8nm
Product Name Part Number
Optical Axis Height
Quantity
[mm]
He-Ne Laser PBS-20-6328 1 10
Prisms Holders KSP-DT 1 7
θ axis Rotation Stages KSP-406M 1 13
Specer SP-40T 1 5
φ20 Post Holders PS20-10 1 10
D-TOP Base Plate DBSP-1 1 0
Optical Axis Height 45
Moveable Mirror Module—TFA-30C05-10-TSD-401S
Catalog
Code W1034
Module that can vary the optical path
length by moving a mirror reflected
vertically to a stage.
Travel: ±6.5mm
Product Name Part Number
Optical Axis Height
Quantity
[mm]
Aluminum Mirrors TFA-30C05-10 1
Mirror Holder MHG-MP30-NL 1 25
Aluminum Spacers MSP-4002 2 4
X axis Steel Extended Contact Slide Stages TSD-401S 1 16
Optical Axis Height 45
Small Sample Holder Module—DTM-MLF-SF
Catalog
Code W1036
In order to grab a very small sample,
module that is diverted to SELFOC ®
lens holder.
Sample image size: φ15 – φ3mm
Lens Module—DTM-SLB (or DLB) -***-***
Catalog
Code W1033
Module that can specify the lineup of achromatic
lens or single lens of the outer diameter of φ15mm
and φ10mm.
When selecting a LHCM-10 to the lens holder, due
to the interference with φ20mm post stand, two
washers are inserted in between.
Product Name Part Number
Optical Axis Height
Quantity
[mm]
Lens SLB (or DLB) -***-*** 1
Lens Holder LHCM-** 1 **
M4 Washers (t=1mm) W1 (MLHC-10R only) 2 2
φ20 Post Holder PS20-** 1 **
D-TOP Base Plate DBSP-2 1 5
Optical Axis Height 45
Optical Path Switching Mirror Module—TFA-30C05-10-TSD-40801S
Catalog
Code W1035
Module that can remove the mirror
holder in the long stroke stage from
the optical axis.
Product Name Part Number
Optical Axis Height
Quantity
[mm]
Aluminum Mirrors TFA-30C05-10 1
Mirror Holder MHG-MP30-NL 1 25
Mirror Spacers DSP-4080 1 4
X axis Steel Extended Contact Slide Stages TSD-40801S 1 16
Optical Axis Height 45
Concave Sample Holder Module—TAT-AD20-TSD-40801S
Catalog
Code W1037
Module that can fix the test concave
sample and adjust precisely.
Test concave mirror
outer diameter: φ20mm
Thickness: –6mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Product Name Part Number
Optical Axis Height
Quantity
[mm]
Selfoc ® Lens Claws MLH-SF 1
Selfoc ® Lens Claws MLH-10ADP-2 1
Fiber Optics Holders FOP-1 1 25
φ20 Post Holder PS20-15 1 15
D-TOP Base Plate DBSP-2 1 5
Optical Axis Height 45
Product Name Part Number
Optical Axis Height
Quantity
[mm]
Lens Adapters TAT-AD20 1
Two-axis Pinhole / Objective Holders TAT-16DM-M3 1 30
X axis Steel Extended Contact Slide Stages TSD-40801S 1 16
Optical Axis Height 46
Prototype Beam Splitter Module—DTM-PSM33-30C03-0W-550
Catalog
Code W1038
Beam splitter module that is used for the
reference surface of the Fizeau
interferometer.
To enhance the contrast of the interference
fringes, the branching ratio of reflection and
transmission is adjusted to 1:2
Product Name Part Number
Optical Axis Height
Quantity
[mm]
Dielectric Plate Beam splitters PSM33-30C05-10W-550 1
Mirror Holder MHG-MP30-NL 1 25
φ20 Post Holder PS20-20 1 20
D-TOP Base Plate DBSP-1 1 0
Optical Axis Height 45
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A047

Application Systems
APAS: Automatic Polarization Analysis System
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
[Basic configuration example]
It is a sample configuration of optical system which is the base of various measurement and analysis.
It will be also provided the model selection and recombination of the basic configuration to match
the performance requirements and purpose of the customer.
Light source of arbitrary polarization
◦It is the light source which outputs in an arbitrary polarization state by installing the polarization operation optical system
at the rear end of light source.
◦All settings related to the polarization are possible such as setting the direction of rotation, aspect ratio and each polarization
state of linear polarization, circular polarization and elliptical polarization.
◦Because of the dynamic control by PC is possible, it can be used to evaluate the sample of polarization dependence,
and polarization compensation in the subsequent stage after passing through the device.
Light source
Polarization operation optical system
output light souce
[Specification example]
◦output wavelength: 532nm, 633nm, various possible.
◦output power: various possible
◦Stokes parameter setting resolution:
S1: ±0.001
S2: ±0.001
S3: ±0.001
Index
Microscope Unit
Alignment
Interferometers
Stage Controller
GSC-02
Simplified polarization
analyzing software
SimpleAPAS
Inspection/
Observation
Bio-photonics
Laser Processing
Polarization measurement system
◦It is a measurement system for measuring and analyzing the polarization state of the input light source.
◦It can be made a calculation all of the stokes parameter S0 - S3 of the input light source polarization.
Input light source
Polarization analysisoptical system
[Specification example]
◦input wavelength : 532nm, 633nm, various possible.
◦input power : various possible
◦Stokes parameter setting resolution:
S1: ±0.001
S2: ±0.001
S3: ±0.001
◦Polarization extinction ratio measurement dynamic
range: ≧ 60dB (possible customized)
Photodiode Amplifier
Corresponding each company
instrument system
Simplified polarization
analyzing software
SimpleAPAS
Stage Controller
GSC-02
A048
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Catalog
Code
W2044
Optical Characteristics Measurement System
◦A composition of system with light source unit, sample holding mechanism and detector unit.
◦Configuration that combines a reflective and transmissive type is also possible.
◦Reflective type is also usable as an ellipsometer addition to polarization characterization system.
Polarization
detector unit
[Specification example]
◦Adaptive wavelengths: 532nm, 633nm and others
◦Retardation resolution: 0.23deg (*)
◦Retardation accuracy: 0.23deg (*)
◦Extinction measurement range: ≧60dB (*)
* A model with higher specification is available
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Sample holding mechanism
Light source unit
Polarization
detector unit
Actuators
Motoeized
Stages
Light
Sources
Light source unit
Index
Microscope Unit
Sample holding mechanism
Alignment
Interferometers
Inspection/
Observation
Optical Strain Measurement System
Bio-photonics
Laser Processing
◦A device for visualizing internal stress-strain such as striae and processing strain.
◦It is possible to capture the video of the distribution of the stress-strain.
Image
sensor
Monitor screen
[Specification example]
◦Adaptive light source:
532nm, 633nm, White light etc.
◦Sample size: □300mm or smaller
◦2D mapping pixels: over 640×480
◦Other specifications are available as options
Sample holding
mechanism
Polarization
analysis optics
Sample stage
Sheet
polarizer
Simplified polarization
analyzing software
SimpleAPAS
Stage Controller
GSC-02
Light source unit
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A049

Application Systems
APAS: Automatic Polarization Analysis System
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
[Circularly polarized light measuring device]
As a measuring device and production equipment, we also provide the production of dedicated
device. To achieve both cost reduction and quality and stable performance by using a catalog
standard products in main part, in addition, we propose according to customers’ applications to
improve the throughput by adding the necessary unit as a dedicated machine.
Circularly polarized light measuring device
◦It is a system for the characterization of polarization optics in transmission optical system of the vertical.
◦It can be evaluated all the main characteristics by only setting the sample to the sample bench.
◦The spectral phase difference, spectroscopic data of the polarization parameters, and transmission polarization ratio of
the polarizer can be measurable.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
LD light source
Optical path
switching mechanism
Collimating lens
(From halogen light source)
[Specification example]
◦Automatic adjustment of polarization optics axis
direction
◦Senarmont type phase difference measurement
◦Rotation compensation operator expression polarization
measurement
◦Rotating analyzer-type polarization measurement
◦Circularly-polarized light contrast measurement
◦Polarizer transmission polarization ratio measurement
◦Spectral transmittance measurement
◦Log measurement
Microscope Unit
[Application example for film type sample]
Alignment
Interferometers
Inspection/
Observation
Polarizer
Bio-photonics
Laser Processing
( )
1/4 Waveplate
Analyzer
condenser lens
(To the spectrometer)
optical Power meter
Polarization measurement system control software
SKPola
A050
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Polarization component
We will provide the holder and various polarizing element as a device for assembling and research
and experimental applications. From a wide range of line-up, you can choose in accordance with
the objectives, specifications and budget.
■Polarization Beam splitters
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Plate Type
B074
Cube Type
B079
High Power Laser Type
B076
Actuators
■Polarizer
Motoeized
Stages
Light
Sources
Index
Plastic polarizer
B102
Sheet Polarizer
B099
Rochon Polarizer
B098
Microscope Unit
■Polarization Prisms
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Glan Thompson Prisms
B094
Glan Laser Prisms
B095
■Waveplates
Quartz Waveplates
B087
Mica Waveplates
B090
Fresnel Rhomb Waveplate
B091
■Holders
Polarizer Holders
C046
Rotation Motorized Polarizer Holder
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A051

Application Systems
Reflection Measurement Systems
SGRM-200R
Application
Systems
This device allows the measurement of spectral reflectivity in fine areas and curvature surfaces.
For ultra-slim samples such as lenses with curvature or functional sheets, high-speed and highaccuracy
measurement of spectral reflectivity can be realized without being affected by reflected
light on the rear surface.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
◦Allows efficient reflected light into the spectrophotometer
fast measurement even at the low reflection samples.
◦Blocks reflections from rear surface, giving accurate measurements
without special preparation of the sample.
◦The 512 element linear PDA, 16bit A/D converter and USB
2.0 interface contributes to high-speed processing.
◦The light-harvesting system from fiber to slit and alignment
mechanism improve the usage rate of the light amount to
maximum, enabling very speedy and highly reproducible
measurement.
◦Samples a very small area (φ50μm) of the surface being
measured, making measurement of curved lens surface and
coating uniformity possible.
◦Data to be saved to an Excel spreadsheet.
◦Multiple measurement results to be overlaid for comparison.
Fast, Good/Bad analysis
Specifications
Part Number
SGRM-200R
Wavelength Range
360 − 800nm
Object Side N.A,
0.13
(When used with 10× objective lens)
Measurement Area
about φ50μm
(When used with 10× objective lens)
Measurable Surface Curvature of Object −2R − −∞, +2R − ∞
±0.1% (360 − 450nm)
Measurement Reproducibility ±0.01% (450 − 750nm)
±0.1% (750 − 800nm)
Readable Resolution
1nm
Measurement Time
Several seconds
(depends on the sampling time)
Outer Dimension (Main unit) (W)230 × (H)530 × (D)460mm
Operating Temperature 18 − 28°C
Ambient Humidity
≦ 60% (Non-condensing)
Reflection Rate Graph Image
A052
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Catalog
Code
W2019
Application
Systems
Objects Lens
PLAPON1.25×
Objective Lens
Objects Lens
UPLFLN10×
Objects Lens
UPLFLN20×
Standard Diffusing Reflector
Optical Color Glass
Optics &
Optical
Coatings
Holders
Measurement range: 400µm
2.0 Mega-pixels
USB2.0 Camera
Measurement range: 50µm
for Thin plate: 0.4mm
Measurement range: 25µm
for Thin plate: 0.3mm
WS-3
* Be used as a standard when measuring the color
Spectroscope
V-30
* With calibration data
Standard specification: wavelength 360 − 800nm
Bases
Manual
Stages
Actuators
Motoeized
Stages
Motorized XY Stage for Remote Inspection
Light
Sources
SKDCE-3
A026
Index
Super C Mount
Zoom Adapter
NY-CZ
(×0.35 − ×0.7)
W.D.=10mm
The sample thickness t20mm
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Option Parts
Controller
Halogen lamp (5 pcs set)
SGRM-200-PCL919
Low reflection rate reference plate
SGRM-G03-09001A OFB-25C05
(rear surface: ground)
High reflection rate reference plate
TFAN-25C05-1-Rdata
(Standard item + Data)
* An electronic data (R%, 330 − 1100nm, angle of incidence 5°, interval 1nm) is attached.
2 axis stage controller
SHOT-302GS
G102
Reflection Measurement Software
High precision measuring of thin target.
Measument data overlay function (MAX 64 times)
Installed the interface function of motorized stage as
standard
Installed the interface software for camera
Installed export function of data in Excel format
Installed Good/Bad analysis function
(be able to set Good/Bad criteria by each 1nm wavelength)
Added film thickness measuring function.
2 axis stage controller
GSC-02 +
Joystick Terminal
SJT-02
G099, G106
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A053

Application Systems
Micro manipulation System
MMS
Catalog
Code
W2001
Cells and biomolecules can be freely handled with an optical hand.
Application
Systems
Optics &
Optical
Coatings
◦Utilize laser beam to freely trap or remove cells, biomolecules, and etc. with non-contact method.
◦1064nm near-infrared laser trapping minimizes the damage on cells and biomolecules.
◦A particle of 1μm can also be trapped.
◦Two-beam optical system enables multiple operations such as stretching the micro-object or pressing them each other.
Two beams can also be individually controlled.
◦Vibration Isolation Table(option) provides you high stability in operation.
Holders
Bases
Manual
Stages
Actuators
■Granule in a living cell is optically trapped.
Motoeized
Stages
Light
Sources
Index
■Altering orientation of a cell with 2 beams
Microscope Unit
Alignment
Laser Optical tweezers
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
It is a means of wrapping cells or particles or
etc., using radiation pressure of light occurred
in laser irradiation to an object, like seizing an
object with a pair of tweezers, which was first
thought up by Arthur Ashkin in 1970s. Recent
applications of its feature, the feasibility in
trapping particles of μm order, to engineering
science, medical science, biology, etc., have
been reported and it made the development of
this device be watched with keen interest.
Sigma Koki’s Micro Manipulation System has
realized introduction of laser in optical unit by
application of Opticsand Opto-mechanics
produced by SIGMA KOKI which enabled
space-saving and high efficiency.
◎Optical System for 1laser 2beam type
BE
M1
Nd: YAG laser
WP
Sample
M3
PBS1
OL
SH2
SH1
DM
M2
L2
L1 PBS2
BE
Beam Expander
WP
Wavelength plate
SH1, 2
Shutter unit
DM
Dichroic mirror
M1M3
Dielectric multilayer mirror
PBS1, 2
Polarization beamsplitter
L1,2
Lens
OL
Objective lens
a
Cell
Fa
Objective lens
Laser beam
Cell
2laser 2beam type / Trapping Laser 2W
Part Number
Equipment Configuration
MMS-1064-2000-2L/2M/2S
Manual 2axis / Shutter
MMS-1064-2000-2L/1M1E/2S
Motorized 2axis / Shutter
MMS-1064-2000-2L/2E/2S
Manual 1axis & Motorized 1axis / Shutte
1laser 2beam type / Trapping Laser 2W
Part Number
Equipment Configuration
MMS-1064-2000-1L/2M/2S
Manual 2axis / Shutter
MMS-1064-2000-1L/1M1E/2S
Motorized 2axis / Shutter
MMS-1064-2000-1L/2E/2S
Manual 1axis & Motorized 1axis / Shutter
Use in combination with Epi-Fluocescence microscopy
Introduction of trapping laser into microscopes allows
continued usages of existing Camera Port or Fluorescent
Lamp Port. This enables laser trapping while doing Total
Internal Reflection Fluorescence Microscopy or Epi-illumination
Microscopy.
For customized Dichroic mirrors for different trapping laser
or observation wavelength, please contact our International
Sales Division.
* All sorts of operating methods and optical systems can be
selected to suit sample and research purpose.
Supplementary attachment of a piezo actuator, etc is
available to operate beams, in addition to manual or
motorized control.
* Use in combination with Motorized XY stage for microscope
(optional) makes various operations possible.
A060, A061
1laser 1beam type / Trapping Laser
Part Number
Equipment Configuration
MMS-1064-2000/1M
MMS-1064-2000/1M/1S
MMS-1064-2000/1E/1S
Manual
Manual / Shutter
Motorized / Shutter
*1 Above lists do not include prices for microscope and vibration isolation table.
*2 Please inform us of the maker and part number(model) of your existing microscope before
purchase.
*3 Some models of microscopes may not be supported. Please contact the sales department.
A054
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Laser Optical tweezers - Mini type
LMS
Catalog
Code
W2002
A new lineup of Laser Optical tweezers - Mini type is now available.
◦1064nm near-infrared laser trapping minimizes the damage on cells and biomolecules.
◦Laser irradiation is fixed to center of field of view in microscope.
◦Downsized optical unit is directly connectable to the microscope port.
◦Optional microscope motorized stage system broaden the variety of biological applications.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Advantages of Mini type Laser Optical tweezers
◎Entry model with competitive prices.
◎Directly connected to the existing microscope port, which offers great extensibility.
(Please inform us of the manufacturer and model number of your existing microscope when inquiring.)
◎Upgrading to the full-featured Micro Manipulation System is available.
(Reutilizing the 2W trapping laser and the internal optical elements are possible. Please contact to the sales for details.)
◎Laser optical tweezers are usuful tool for various types of feasibility test and applications of near-infrared irradiation.
Mini Optical tweezers / Trapping Laser 2W
Part Number
Equipment Configuration
LMS-M1064-2000
LMS-M1064-2000/1S
LMS-M1064-2000/E
LMS-M1064-2000/E/1S
LMS-AD-NI-BP * 1
LMS-AD-OL-BP * 1 * 2
LMS-AD-OL-RP * 1
Basic model / without shutter
Basic model / with shutter
Electric focus model / without shutter
Electric focus model / with shutter
Adapter for Nikon (Ti, TE2000 supported)
*1 Please select an adapter that fits your microscope.
*2 Some models of microscopes may not be supported. Please contact the sales department.
Adapter for Olympus microscopes (IX73, 83 supported)
Adapter for Olympus microscopes right side port (IX71, 81 supported)
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A055

Application Systems
IR-LEGO Infrared Laser-Evoked Gene Operator
IR-LEGO Systems
Catalog
Code
W2003
A system to trigger expression of desired genes under biological microscope.
Application
Systems
Optics &
Optical
Coatings
Holders
◦Localized heating feature with 1480nm near infrared laser
◦Simultaneous application of laser irradiation and fluorescent observation is possible
◦Add-on type system for existing upright/inverted fluorescence microscopes
(Adaptive models: Olympus BX51, BX61, IX71, IX81 Nikon Ti, TE2000)
■Result of Gene Expression Check Test
Bases
Manual
Stages
Actuators
Motoeized
Stages
Before laser irradiation
After laser irradiation
[Photo credit]
Dr. Shunsuke Yuba, National Institute of Advanced Industrial Science and Technology (AIST)
Dr. Yasuhiro Kamei, National Institute for Basic Biology (NIBB)
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
What is IR-LEGO ?
Infrared Laser-Evoked Gene Operator (IR-LEGO) is developed as the world’s first technology by consolidated research team led by Dr. Shunsuke
Yuba at National Institute of Advanced Industrial Science and Technology (AIST). This is a technique to induce specified genes that are under
the control of a heat shock promoter at defined time, by heating single cells that consist of genetically-modified organisms, with an infrared
laser. IR-LEGO could be adopted to all the genetically-modified experimental organisms that the heat shock promoters function and the internal
focus of infrared laser are available. Because of its high efficiency and reproducibility, and less detrimental effect from laser, IR-LEGO is a new
and prospective tool for future gene function analysis.
Inspection/
Observation
Bio-photonics
Laser Processing
IR-LEGO System (Set up on a vibration isolated table)
Part Number
Equipment Configuration
IR-LEGO-1000
1W, CW laser/Electric focus
IR-LEGO-490
490mW, CW laser/Electric focus
IR-LEGO-490/P
490mW, CW and pulsed laser/Electric focus
IR-LEGO-200
200mW, CW laser/Electric focus
IR-LEGO-200/P
200mW, CW and pulsed laser/Electric focus
Applications of IR-LEGO for Various Species
Utilizing a strain (cell) that carries a heat
shock promoter driven transgene, an infrared
(IR) laser is irradiated at parts indicated by
white arrowhead marks.
A
B
IR-LEGO Mini (Direct installation to a biological microscope)
Part Number
Equipment Configuration
IR-LEGO-1000/mini 1W, CW laser
IR-LEGO-1000/mini/E 1W, CW laser/Electric focus
IR-LEGO-490/mini 490mW, CW laser
IR-LEGO-490/P/mini 490mW, CW and pulsed laser
IR-LEGO-490/P/mini/E 490mW, CW and pulsed laser/Electric focus
IR-LEGO-200/mini 200mW, CW laser
IR-LEGO-200/P/mini 200mW, CW and pulsed laser
IR-LEGO-200/P/mini/E 200mW, CW and pulsed laser/Electric focus
LMS-AD-NI-BP
Adapter for Nikon microscopes (compatible with Ti and TE2000)
LMS-AD-OL-BP Adapter for Olympus microscopes (compatible with IX73 and IX83)
LMS-AD-OL-RP Adapter for Olympus microscopes (compatible with IX71 and IX81)
*1 Specify the manufacturer and model of your microscope.
*2 Some models of microscopes are not compatible. Contact our International Sales Division for
more information.
*3 Carrying-in and adjustment fees for system setup are required separately.
*4 The electric focus models are equipped with a function to correct the laser focal position based
on chromatic aberration of each objective lens (preset system).
C
D
A Example of induced RFP expression by IR laser irradiation on the GFP
marked neuron of the nematode (C. elegans) The white arrow indicate a
neuron not irradiated. The red flourescence by RFP is obtained on a
neuron and neuraxon that irradiated by a laser (white arrowhead).
[Photo credit] Dr. Motoshi Suzuki & Dr. Shin Takagi, Nagoya University
B Example of induced GFP expression by IR laser irradiation on a pineal
gland of medaka (O. latipes) larvae.
[Photo credit] Dr. Tomonori Deguchi,
National Institute of Advanced Industrial Science and Technology (AIST)
Dr. Yasuhiro Kamei,
National Institute for Basic Biology (NIBB)
C Example of induced Kaede expression by IR laser irradiation (2 points)
on a part of zebrafish (D. relio) retina. Kaede is partially photoconverted
after its expression (purple arrow).
[Photo credit] Dr. Mariko Itoh & Dr. Kohei Hatta, University of Hyogo
D Example of induced GUS expression by IR laser irradiation on lateral
root tips of Arabidopsis (A. thaliana).
[Photo credit] Dr. Hiroko Urawa & Dr. Kiyotaka Okada,
National Institute for Basic Biology (NIBB)
A056
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Shutter Systems for Microscope
BSH2
Catalog
Code
W2030
Electromagnetic shutter systems for microscope illumination. Compatible with incorporation into
an existing microscope, and easy to install and remove. These shutter systems are best suited for
microscopy such as multi-point time lapse microscopy and fluorescence microscopy.
◦A release shutter with the aperture size of φ24mm is
utilized.
◦Both one axis and two axis controllers are available.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Specifications
Part Number Equipment Configuration System Configuration
BSH2-RIX-2-1 Olympus IX71, IX81, IX73, IX83 (common to transmitted/epi-illumination) 2-axis controller + Release 1 axis
BSH2-RIX-2-2 Olympus IX71, IX81, IX73, IX83 (common to transmitted/epi-illumination) 2-axis controller + Release 2 axes
BSH2-RIX-1-1 Olympus IX71, IX81, IX73, IX83 (common to transmitted/epi-illumination) 1-axis controller + Release 1 axis
BSH2-RTi-2-1 Nikon Ti, TE2000 (for epi-illumination) 2-axis controller + Release 1 axis
BSH2-RTi-1-1 Nikon Ti, TE2000 (for epi-illumination) 1-axis controller + Release 1 axis
BSH2-TTi-2-1 Nikon Ti (for transmitted illumination) 2-axis controller + Release 1 axis
BSH2-TTi-1-1 Nikon Ti (for transmitted illumination) 1-axis controller + Release 1 axis
BSH2-R/TTi-2-2 Nikon Ti (for epi-illumination and for transmitted illumination) 2-axis controller + Release 2 axes
BSH2-TTE-2-1 Nikon TE2000 (for transmitted illumination) 2-axis controller + Release 1 axis
BSH2-TTE-1-1 Nikon TE2000 (for transmitted illumination) 1-axis controller + Release 1 axis
BSH2-R/TTE-2-2 Nikon TE2000 (for epi-illumination and for transmitted illumination) 2-axis controller + Release 2 axes
*1 Please check the model and connection type of your microscope.
*2 These sets come with a shutter connecting cable. (Extension cables are sold separately. Please contact our International Sales Division for more information.)
*3 No interface cable for connection with a PC is included. (Communication cables are sold separately. Please contact our International Sales Division for more information.)
*4 It is also available the production of systems not listed in the catalog.
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Shutter Controllers
Catalog
Code
W4046
◦Compact controllers that can be operated at hand.
◦It is equipped with a standard interface that allows
external TTL signal control.
◦A foot switch and cable for TTL are optionally available.
C067
◦The timer mode allows adjustment of shutter speed, or
setting and control of repetitive operations.
◦The demo software “SSH-C2B Demo Software” enables
easy PC control. (download is available from our
website)
Specifications
Part Number SSH-C1RA SSH-C2B
Type 1 axis 2 axes
Control Bulk Bulk/Timer
Interface TTL RS232C/USB/TTL
External Dimensions [mm] (W)80 × (H)40 × (D)80 *Except for protrusions (W)220 × (H)75 × (D)180 *Except for protrusions
Weight [kg] 0.3 1.8
Power Supply (Rated) DC24V *Special AC adapter DC24V *Special AC adapter
Accessories AC adapter, TTL, I/F plug, instruction manual AC adapter, instruction manual
* The appearance and specifications of the product may change without prior notice.
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A057

Application Systems
BIOS-Light for inverted microscopes
BIOS-LT-S
Catalog
Code
W2004
We provide XY stages for microscopes at low prices.
Application
Systems
Optics &
Optical
Coatings
Holders
◦Comes equipped with sample software for controlling
PCs.
◦A joystick (option) can be connected to it.
◦Can also be used as built-in center aperture type stage.
Specifications
Travel Distance [mm] X axis: 110 Y axis: 75
Resolution [μm] 0.1
Bases
Positional Repeatability [μm] ±1
Maximum Load Capacity [N]
29.4(3.0kgf)
Manual
Stages
2-axis stage controller
SHOT-702 G093
MAX Speed [mm/sec] 5
Interface
RS232C
Applicable Microscope
Olympus: IX series
Nikon: Ti,TE series
Actuators
Motoeized
Stages
Light
Sources
BIOS-Light
(Controller)
Connection cable
RS232C 9P
MDR cable
MDR14-CA-2.5
Guide
▶Pulse control in microstep system
▶Content of basic set: XY automatic stage, 2-axis stage controller,
connection cable
▶An optional joystick controller has a 4-stage speed switching
function
Index
Microscope Unit
PC
RS232C 9P
RS232C cable
Attention
▶Please inform us of the maker and part number(model) of your
existing microscope before purchase.
▶Some models of microscopes may not be supported. Please
contact the sales department.
Alignment
Interferometers
JS-300
G106
Inspection/
Observation
Various Options
Sample Software
Bio-photonics
Laser Processing
Part Number
BIOS-SH-A
BIOS-SH-ASP
BIOS-SH-B
JS-300
MDR14-CA-2.5
RS232C/STR-3
Product Name
Micro plate holder
Micro plate holder
Universal sample holder
Joystick controller
Joystick connection cable
RS232C cable
Sample Holder
operation screen for micro plate
Main
BIOS-SH-A
BIOS-SH-B
BIOS-Light (for inverted microscopes) Basic set
Part Number
BIOS-L101T-S
Equipment Configuration
Stage + SHOT-702 + Connection cable (basic set)
Microscope option set: Olympus IX series
Part Number
BIOS-L101T-S/AO
BIOS-L101T-S/AO/J
Basic set + Adapter
Basic set + Adapter + Joystick
Equipment Configuration
Microscope option set: Nikon Ti, TE2000 series
Part Number
BIOS-L101T-S/AN
BIOS-L101T-S/AN/J
Basic set + Adapter
Basic set + Adapter + Joystick
Equipment Configuration
A058
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BIOS-Light for upright microscope
BIOS-LS-S
Catalog
Code
W2031
We provide XY stages for microscopes at low prices.
◦Comes equipped with sample software for controlling
PCs.
◦A joystick (option) can be connected to it.
◦Can also be used as built-in center aperture type stage.
Specifications
Travel Distance [mm] X axis: 110 Y axis: 75
Resolution [μm] 0.1
Application
Systems
Optics &
Optical
Coatings
Holders
Positional Repeatability [μm] ±1
Maximum Load Capacity [N]
29.4(3.0kgf)
Bases
MAX Speed [mm/sec] 5
Interface
Applicable Microscope
Guide
RS232C
Olympus: BX series
Nikoc: 80i, 50i, E600
Carl Zeiss: Axioplan2
Manual
Stages
Actuators
▶Pulse control in microstep system
▶Content of basic set: XY automatic stage, 2-axis stage controller,
connection cable
▶An optional joystick controller has a 4-stage speed switching
function
Motoeized
Stages
Light
Sources
Various Options
Part Number
BIOS-SH-ASP
BIOS-SH-DF
BIOS-SH-DF4
JS-300
MDR14-CA-2.5
RS232C/STR-3
upright microscope
Product Name
Micro plate holder
Flat plate
Flat plate
Joystick controller
Joystick connection cable
RS232C cable
Attention
▶Please inform us of the maker and part number(model) of your
existing microscope before purchase.
▶Some models of microscopes may not be supported. Please
contact the sales department.
Sample Holder
BIOS-SH-APS BIOS-SH-DF BIOS-SH-DF4
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
BIOS-Light (for upright microscope) Basic set
Part Number
BIOS-L101S-S
Equipment Configuration
Stage + SHOT-702 + Connection cable (basic set)
Microscope option set: Olympus BX series
Part Number
BIOS-L101S-S/AO
BIOS-L101S-S/AO/J
Basic set + Adapter
Basic set + Adapter + Joystick
Equipment Configuration
Microscope option set: Nikon 80i, 50i
Part Number
BIOS-L101S-S/AN1
BIOS-L101S-S/AN1/J
Basic set + Adapter
Basic set + Adapter + Joystick
Equipment Configuration
Microscope option set: Nikon E600
Part Number
BIOS-L101S-S/AN2
BIOS-L101S-S/AN2/J
Basic set + Adapter
Basic set + Adapter + Joystick
Equipment Configuration
Microscope option set: Carl Zeiss Axioplan2
Part Number
BIOS-L101S-S/AZ
BIOS-L101S-S/AZ/J
Basic set + Adapter
Basic set + Adapter + Joystick
Equipment Configuration
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A059

Application Systems
Motorized XY Stage System for microscopes
BIOS
Application
Systems
Applicable to various microscopes using penetrated illumination (LED illumination) and epi-illumination.
Efficient in all sorts of sample inspections and image acquisitions.
Feedback control by built-in optical linear scale substantializes high accuracy in positioning.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Motorized XY stage system for inverted microscopes—BIOS-T series
Highly accurate motorized stage, Easily mountable on your existing microscope.
◦Applicable to various lines of inverted microscopes.
(Olympus: IX71・IX81・IX70・IX73・IX83, Nikon: TE2000・Ti, and Leica: DMI)
◦Convert your existing manual stages into precisely-positioning motorized stages.
◦Outstanding in Time-lapse fluorescence observation system.
Catalog
Code
W2005
Actuators
Motoeized
Stages
Light
Sources
▲Thin standard type
▲Microplate-compatible type
▲Microplate-compatible type
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Standard type (Compatible microscopes: Olympus IX71, IX81, IX70, IX73, IX83
Part Number
Microplate-compatible type (Compatible microscopes: Olympus IX71, IX81, IX70, IX73, IX83
Part Number
Resolution
[μm]
Resolution
[μm]
BIOS-425T 0.01
Travel
[mm]
Travel
[mm]
Nikon TE2000, Ti Leica DMI)
Stage Controller Joystick Controller Feedback function
FC-501G
Nikon TE2000, Ti)
Stage Controller Joystick Controller Feedback function
BIOS-406T 0.01
FC-501G
○
BIOS-206T 0.1
30
(±15)
FC-101G BJ-02G
○
BIOS-106T 0.1 SC-101G ×
Accessories: Middle seat (Olympus), annular ring (Nikon)
BIOS-225T 0.1 X-axis 110
FC-101G BJ-02G
○
BIOS-125T 0.1 Y-axis 75
SC-101G ×
BIOS-229T 0.1 SHOT-302GS JS-300 ○
Accessories: BIOS-SH-A, BIOS-SH-B
* Applicable to sample holders apart from standard accessories. Please contact us.
▶Regarding travel of and applicability to unlisted microscopes, please contact our International Sales Division.
○
■Option code
BIOS-□□□T
OL
NI
LI
OL : Olympus IX series
NI : Nikon Ti, TE2000 series
LI : Leica DMI series
Guide
▶Please inform us of the maker and part number (model) of your
existing microscope before purchase.
Interchangeable Sample Holder (option)
◦When using Microplate-compatible
type, universal sample holders can
be attached or detached for observation
purpose of plate or slideglass.
BIOS-SH-A
BIOS-SH-B
A060
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Motorized XY stage system for upright microscope—BIOS-S series
Highly accurate motorized stage applicable to slideglasses and schales.
◦Applicable upright microscopes: Olympus BX51・BX61 Nikon 80i・50i・E600
◦Convert your existing manual stages into precisely-positioning motorized stages.
◦Thin Type and Thin Long Travel Type are available, considered space for illumination condenser lens.
Catalog
Code
W2006
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
▲Thin standard type ▲Thin long travel type ▲Long travel type
Actuators
Thin Standard type (Compatible microscopes: Olympus BX51, BX61 Nikon 80i, 50i, E600 Carl Zeiss Axioplan2)
Part Number
Thin long travel type (Compatible microscopes: Olympus BX51, BX61 Nikon 80i, 50i, E600 Carl Zeiss Axioplan2)
Part Number
Long travel type (Compatible microscope: Olympus BX51 Nikon E600)
Part Number
Resolution
[μm]
Resolution
[μm]
Resolution
[μm]
Travel
[mm]
Travel
[mm]
Travel
[mm]
Stage Controller Joystick Controller Feedback function
BIOS-205S 0.1 30
FC-101G
○
BJ-02G
BIOS-105S 0.1 (±15)
SC-101G ×
Accessories: Adapter for microscope, exclusive spring clip
Stage Controller Joystick Controller Feedback function
BIOS-235S 0.1 X-axis 60
FC-101G
○
BJ-02G
BIOS-135S 0.1 Y-axis 30
SC-101G ×
Accessories: Adapter for microscope, exclusive spring clip
Stage Controller Joystick Controller Feedback function
BIOS-415S 0.01
FC-501G
○
BIOS-215S 0.1
60
(±30)
FC-101G BJ-02G
○
BIOS-115S 0.1 SC-101G ×
Accessories: Adapter for microscope and software for stage control
* Please be aware of that occasional condenser inteference occurs.
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
■Option code
BIOS-□□□S
OL
NIA
NIB
ZE
OL : Olympus BX series
NIA : Nikon E600
NIB : Nikon 80i, 50i
ZE : Carl Zeiss Axioplan2
Guide
▶Please inform us of the maker and part number (model) of your
existing microscope before purchase.
Sample Software for Simple Stage Control (BIOSControl)
Guide
Main
Device Setting
Preset
▶Sample programs are available for download from
our website.
BIOSControl
(SHOT-702/302GS, FC-101G/501G, SC-101G)
Micro-Manager (FC-101G/SC-101G)
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A061

Application Systems
Laser Processing Systems
Scan optical system and Focusing optical system
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
For the maskless processing, it can do direct drawing processing on the basis of the data like CAD.
It is usually classified as scan optical system and focusing optical system.
(There is also a hybrid scanning that combines both).
Scan optical system
Focusing optical system
Scanning method Galvano scan Stage scan
Scanning speed high low
Scanning area narrow wide
Focusing method fθ Lens Objective Lens
Focusing spot diameter few 10μ – few 100μ submicron – few 10μ
Death of focus deep shallow
Actuators
Motoeized
Stages
[Scan Type]
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Product Name Part Number Remarks
1 High Power Laser Shutter Unit SHPS-□□ Compatible with YAG (1064, 532, 355 and 266nm)
Beam Expander LBE-□ He-Ne (λ=632.8nm), for LD (λ=780, 830nm), YAG (λ=1064nm)
2
Laser Beam Expander BE/LBED Fitted with diopter movement
3 Variable Attenuator SVAB-□□A-08 High output power type
4 Laser Scanning system Inquiry required
5 fθ Lens fθ Available for each wavelength
[Focusing System (with Observation System)]
Product Name Part Number Remarks
1 High Power Laser Shutter Unit SHPS-□□ Compatible with YAG (1064, 532, 355 and 266nm)
Beam Expander LBE-□ He-Ne (λ=632.8nm), for LD (λ=780, 830nm), YAG (λ=1064nm)
2
Laser Beam Expander BE/LBED Fitted with diopter movement
3 Variable Attenuator SVAB-□□A-□□ High output type (compatible with each wavelength)
4 Auto Focus Unit TAF-SS-KZ TTL system
5 Objective Lens
PAL-□-NUV
LMPAL-□-NIR
Available for each wavelength
Observation Unit with Coaxial Illumination OUCI-2
6
Dichroic Case for Laser Introduction DIMC-□□R Compatible with YAG (1064, 532 and 355nm)
7 Observation Unit with Coaxial Illumination OUCI-2-□ Fitted with laser introduction port
A062
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Processing software
It is a software that can set processing pattern and area on the screen while observing the position
of processing by camera.
It integrates the set of wavelength switching and irradiation condition of multiple laser, switching
of the objective lens, and control of the stage.
It corresponds to drawing CAD data like DXF and to mass production line from prototype applications.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
・Program Operation
Stage operation by specifying
coordinates
On Off operation for the laser
irradiation
Easy processing by reading a CSV
file
・Software Joystick
Continuous movement
Step movement
Straight
Combination
A B C
Curve
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Applications
◦Removing metal thin film of 10µm or less
◦Cutting silicon wafer of about 100µm thickness
◦Cutting metal and ceramic of 100 − 500µm thickness drilling (φ100µm − )
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A063

Application Systems
Laser Processing Systems
Application
Systems
Optics &
Optical
Coatings
Shutter for high power laser
Safely interrupt the optical path by the highpower
laser mirror and beam.
Variable attenuator
Light quantity of the high-power laser can be
continuously variable by PBS and wavelength
plate
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Specifications
Part Number
SHPS-□□
Wavelengths [nm] 266, 355, 532, 1064
Clear aperture [mm] φ8
Corresponding Output about 20W
Laser Damage Threshold 5J/cm 2 (@266nm) – 28J/cm 2 (@1064nm)
On-Off Speed
about 200ms
Specifications
Part Number
SVAB-□□A-OB
Wavelengths [nm] 266, 355, 532, 1064
Clear aperture [mm] φ4
Corresponding Output 20W
Laser Damage Threshold 1.0J/cm 2 (@266nm) – 5.1J/cm 2 (@1064nm)
Transmission Range 2 – 93% (@532nm)
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
Laser beam expander unit
By lens configuration of the air gap, it is possible
to correspond to high-power laser and be strict
collimation adjustment in diopter correction
mechanism.
Auto focus unit
By built-in laser sensor, it enables high-speed
tracking even for transparent object such as
films or glasses.
Specifications
Part Number
BE/LBED series
Wavelengths [nm] 266, 355, 400 – 700, 1064
Laser Damage Threshold 1.4J/cm 2 (@266nm) – 4J/cm 2 (@1064nm)
Magnification
×2 – ×21(@400 – 700nm)
Incident Clear Aperture[mm] φ1.7
Specifications
Part Number
TAF-SS-OBL-3
Objective Lens 2× – 100×
Camera
C-mount CCD camera
(element size 2/3″or less)
Travel
3mm
2×, 5×, 10× : ±1.5mm
Trace Range (Track Range)
20× : ±500μm
50× : ±250μm
100× : ±100μm
Repeatability (Focus)
±6.0μm (5×), ±1.0μm (10×),
±0.5μm (20×, 50×, 100×)
A064
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Surface accuracy guarantee mirror
Guaranteed surface accuracy in integrated holder,
ideal for built-in locking mechanism
fθ lens
Lineup in each wavelength, scanning area and focal
length
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Objective lens
For from DUV to the near-infrared and for various
processing laser
B016
B186
Barrel unit + laser introduction block
Observation barrel of optimal coaxial epi-illumination
for the positioning of the micro-machining
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Motorized stage
Plentiful lineup from high precision type to high
rigidity long stroke.
B192
Base
High rigidity base series to support the stable
performance
A018
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
G032 –
D012 –
Galvano unit
Drawing high speed laser of high quality reducing the
jitter and wobble
* it is available to assembly for each company’s galvanometer.
Please contact to our international sales
division.
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A065

Application Systems
Power Supply Series
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
This is the power supply (supporting CW and pulse) for driving the laser diode (LD). The power supply for
driving a Peltier element and cooling unit all-in-one type required for driving LD is also part of our lineup.
■Simple Operation
Electric current limit setting and
integrated time check can be done
from a handle.
■Electric current limit settings
Maximum electric current can be
set in parameter. It prevents LD
damage deriving from malfunction.
Power supply for LD driving—SLD
■LD Terminal Short Function
Function to short between anode and cathode of LD when
power is switched OFF is equipped. By doing it,LD can be
protected from static electricity, etc.
■Goggle compatible white display
Letters can be displayed in white. Superior in legibility
even when using laser-protect goggle.
■Instantaneous power failure detection
LD can be safely protected by shutdown operation after
instantaneous power failure detection, while there is
electric current running after power has been cut off.
■Various Alarm Functions
Alarm with screen display equipped enables prompt
identification of cause and repair.
■LD operation intergrator
LD operation intergrator function equipped, which is
essential for LD lifecycle management. Zero reset
available for LD replacement.
■Full Interface
Interface equipped for setting in a system. Freely externally
operable.
Precise digital control environment-friendly highly efficient Laser Diode power supply
Catalog
Code
W2025
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
◦Developed specifically for LD driving.
◦Various functions to protect LD.
◦Various alarms such as instantaneous power failure etc..
◦Can be controlled using the front panel and by commands from a PC connected via RS232C.
◦Includes I/O (Input-Output) for interfacing to external devices and for emergency stop.
◦Automatic Current Control for stable operation.
Guide
▶We do handle orders for manufacturing products with special
specifications, which are not shown in the catalog.
Please contact our sales department.
System Configuration
PC
Possible to control by PC via
serial interface connection.
* Need RS232C interface and
cable.
SLD Series
Part Number
Max.
output voltage
[V]
Max.
output current*
[A]
Input voltage
[AC V]
Apparent
power
[VA]
SLD0350 3 50 85 − 264 500
SLD0450 4 50 85 − 264 600
SLD0635 6.5 35 85 − 264 600
SLD03A0 3 100 85 − 264 800
SLD04A0 4 100 85 − 264 1000
SLD0670 6.5 70 85 − 264 1000
SLD1045 10 45 85 − 264 1000
SLD1338 13 38 85 − 264 1000
SLD06A0 6.5 100 170 − 264 1800
SLD1078 10 78 170 − 264 1800
SLD1365 13 65 170 − 264 1800
SLD2240 22 40 170 − 264 1800
* Minimum current value is approximately 5% of maximum output current.
SLD power supply
It can control LD current by
panel operation.
Various setting also can be
done by the panel.
For 50A
Part Number
Cable Length
[m]
LD50-CA-05 0.5
LD50-CA-10 1.0
LD50-CA-20 2.0
For 100A
■Cable for LD
Part Number
Cable Length
[m]
LD100-CA-05 0.5
LD100-CA-10 1.0
LD100-CA-20 2.0
Cable for LD
Outside I/F
It can be operated by connecting
I/O signal and / or emergency stop
signal from the customer’s
systems.
LD
LD supplied by customer.
Applicable Model
SLD0350, SLD0450,
SLD0635, SLD1045,
SLD1338, SLD2240
Applicable Model
SLD03A0, SLD04A0,
SLD0670, SLD06A0,
SLD1078, SLD1365
A066
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Specifications
Control method
Output terminal block
Current ripple
High-frequency switching method for CW only
M6

Application Systems
Power Supply Series
Power supply for Peltier—STD/STDS
Catalog
Code
W2027
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Precise digital control highly efficient power supply for peltier optics drive for low electric power
and high-power lined up.
◦Measures temperatures with a thermistor or platinum resistance temperature detector, and drives the Peltier device so
that the measured temperature becomes the set value.
◦Equipped with various alarm detection systems and auto tuning function.
◦Temperature measurement accuracy is 0.01°C. Please use A/D inverter for 24bits.
◦For the STD type, both a Pt100 and thermistor can be selected using the parameters.
Guide
▶We do handle orders for manufacturing products with special
specifications, which are not shown in the catalog.
Please contact our sales department.
Specifications for Each Model
Part Number
Max.
output voltage
[V]
Max.
output current
[A]
Input voltage
[AC V]
Apparent
power
[VA]
STDS* 4 1.6 85 − 264 100
STD3609 36 9 85 − 264 600
STD4813 48 13 85 − 264 1000
* STDS: Maximum output is 3W. Temperature sensor is by thermistor only.
System Configuration
Index
Microscope Unit
Specifications
Measurement
part
Thermistor or Pt100 (3-wire system)
Applicable sensor (STDS power supply is for thermister
only.)
Temperature setting accuracy 0.01°C
PC
PC control using serial interface
* RS232C interface and cable
required.
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
AD Converter
24bit
Control method Digital PID method
Control part
−50°C − 150°C
Control range
(according to sensor)
Operation ambient temperature 0°C − 40°C
Storage ambient temperature −20°C − 60°C
Ambient humidity
20 − 90%RH (No condensation)
STD/STDS power supply
Various settings can be done by
panel operation.
Thermistor
10kΩ±1% (25°C)
* Cable is 2m long.
Cooling unit
Heatsink
Fan
Peltier (80W×2EA)
Laser Processing
External
dimensions
Interface
STD power supply
STDS power supply
(W)200 × (H)125 × (D)420mm
(Excluding projections)
(W)200 × (H)205 × (D)65mm
(Excluding projections)
RS232C READY contact output
Part Number
TMS-1
CHU-1
Product Name
Thermistor
Cooling unit
Cooling unit equipped power supply—SXD
Catalog
Code
W2028
This is a user friendly cooling unit equipped power supply for Laser Diode.
◦Laser Diode driver
◦Temperature of laser diode is kept at a certain point. (Peltier, its drive
circuit, heat sink, and fan equipped.)
◦Customized heat sink process can be done for laser diode
◦High capacity heat sink and fan adopted will cool down LD under high
temperature.
◦Customer-supplied fiber couple laser diode is to be installed in this power
supply.
Guide
▶We do handle orders for manufacturing products with special
specifications, which are not shown in the catalog.
Please contact our sales department.
Example of Performance Specifications
Part Number
SXD
LD Max. output voltage [V] 3
LD Max. outout current [A] 50
Peltier driving voltage [V] 36
Peltier driving current [A] 9
Input AC voltage [V] 85 − 264
Apparent power [VA] 800
System Configuration
LD
LD to place internally is customer-supplied.
SXD power supply
Electric current to LD can be operated
from panel. Various settings can be done.
PC
PC control using serial interface
* RS232C interface and cable
required.
Outside I/F
Controllable using I/O signals and emergency
stop signal from system customer owns.
A068
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LD + Power supply for Photodiode driving—SPD
Low profile Laser Diode power supply with temperature controller.
Catalog
Code
W2029
Application
Systems
Part Number SPD0350S SPD03A0S
LD Max. output voltage [V] 3 3
LD Max. output current [A] 50 100
Peltier driving voltage [V] 36 36
Peltier driving current [A] 9 9
Input AC voltage [V]
Single phase
85 − 264
* If you want to shorten the rise / fall time, please contact our company
separately.
◦Constant current Laser Diode driver.
◦Closed loop temperature controller with built in Peltier driver.
◦Includes all essential functions to maintain SLD and STD’s performance
in a small, low cost package.
◦Output currents of 50A and 100A.
◦Temperature resolution is 0.01°C. Supports both Pt100 and thermistor
as the temperature sensor.
◦Peltier driver maximum power of 300W.
Single phase
85 − 264
Apparent power [VA] 800 1000
Specifications of the LD driving part
Control method
High-frequency switching method for CW
only
Less than 0.1% RMS (FS)
Current ripple
(However, it is in the range of more than
maximum output current × 10%)
Current setting accuracy 0.1A
Output current error

Application Systems
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Microscope Unit
Alignment
Interferometers
Inspection/
Observation
Bio-photonics
Laser Processing
A070
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Optics & Optical Coatings
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Optics & Optical Coatings
I N D E X
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Optics & Optical Coatings
Optics & Optical Coatings Guide
Application
Systems
Optics &
Optical
Coatings
Holders
Selection of Optics
Prepare a diagram featuring your desired optical path based on your experimental principles for the optical system.
Check the required specifications of each optical component stated on the optical path and select the correct components.
As the options available are extensive, we can assist you by introducing the following two important factors when selecting
your optics. (Laser Specifications & Classification of Optical Systems)
Diagram of optical path
He-Ne laser
/2plate half mirror
Sample
Mirror
Clear aperture: >5mm
Reflectance: >90%
Incident angle: 45°
Bases
Manual
Stages
Actuators
Wavelength Range: 623.8nm
Beam diameter: 0.6mm
Power: 1mW
Linear polarization (vertical)
Clear aperture:
Rotation of 2mm linear polarization
Not necessary for NPBS
Accuracy of phase difference: Rough
Mirror
Half mirror
Clear aperture: >2mm
Branching ratio: 1: 1
PBSor NPBS
Condenser
Polarizer lens
Photodiode
PD amplifier
Motoeized
Stages
Light
Sources
Clear aperture: >2mm
Transmittance:
Extinction-ratio:
Not used for NPBS
Clear aperture: >5mm
Focal length: approx. 30mm
Plano convex or biconvex
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
■Laser Specifications
When selecting optics, determine the type of “light” to be used. As there are various types of light sources in the market, our Sigma Koki catalog
offers Laser, LED, Halogen and Metal Halide solutions. Laser typically offers various wavelengths and the accompanied optics to be used can
differ depending on the wavelengths. In addition to the wavelength of laser, there are some elements to consider when deciding the specification
of optics.
[J/cm 2 ] (User should calculate)
Check Items for Laser Example 1 Example 2 Related Spec
Laser Type He-Ne YAG
Compatible Wavelength
Wavelength [nm] 632.8nm 532nm
Calculation of Energy Density Any 78J/cm 2
Output beam diameter (1/e 2 , diameter) [mm] 0.59mm 0.7mm
Not applicable for CW of laser
damage threshold of 0.5W or
Output [W]
Not applicable for pulse of
For continuous wave (CW) laser
1mW
−
lower
100mJ/cm 2 or lower
For pulse laser
Energy [J], Pulse width [s], Repetition frequency [Hz]
−
300mJ
10ns, 20Hz
Beam Spread Angle (Full) [rad] 1.35mrad 1.3mrad Clear aperture
Transverse Mode TEM00 Single Focus spot diameter
Polarization Orientation (Vertical, horizontal, or random) Vertical Horizontal Reflectance, transmittance
If the information provided above is still uncertain, please check with the manufacturer of the Laser and they will provide you with the necessary
information and specifications.
Compare the specifications of the optics listed in our catalog against the laser and select the optics that is compatible especially in the area of laser
damage threshold and polarization orientation.
■Classification of Optical System
Confirm the type and degree of precision required for your optical system. If uncertain, you may classify by its intended usage. Illumination by itself
does not require precision but more towards functionality and purpose. Please see chart below to have a better understanding.
Class Surface Accuracy Surface Quality Product Example Usage
Illumination
System Class
About λ
About 60−40
Biconvex lens
Aspheric lens
B123
B159
Lamp illumination of microscope
Condensing beam to a detector, etc.
Simplified Optical
System Class
λ/4 or lower 40−20 or lower
Plano convex lens
Achromatic lens
Aluminum* /
Dielectric multi-layer mirror coating
B108
B172
B030, B027
Various imaging systems
Interferometers for small diameter
beam
Interferometer
Class
λ/10 or lower 20−10 or lower
Surface accuracy guaranteed mirror
Femto high power mirror
Focusing lens
B016, B030
B011, B020
B180
Interferometers for wavefront
observation, laser processing devices
Optical experiments with higher
resolution
The above classification is a rough guide. The classification may not apply depending on products or materials.
For selection of each product, refer to the selection guide. Also refer to the explanations in the selection guides or application notes such as “Beam
Expanding Method” or “How to Use Polarizers”.
If you have any question, contact our International Sales Division.
When making an inquiry, do let us know your laser specifications or intended usage, we can provide you with a quicker and more comprehensive
answer or solution.
B004
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Laser Safety
Laser light irradiating into the eyes could cause serious disability that leads to blindness. For
this reason, the Ministry of Health, Labor and Welfare issued a directive “Preventive Measures
against Disabilities Caused by Laser Light” for laser users and manufacturers. Laser users
must confirm with the safety managers of their businesses or organizations. Safety standards
or safety measures vary depending on the businesses or organizations.
JIS C 6802 specifies the classes of laser products. According to the specification, laser
products have a label of the corresponding laser class. JIS defines staged preventive measures
for users according to the classification. H005
When purchasing or using a laser, make sure to check the class of the laser, and use upon
understanding the risk.
■Laser Safety Glasses
Laser safety glasses to be used are predetermined for each laser.
If you use glasses not compatible with the wavelength of the laser to be used, you cannot get protection and it
is very dangerous.
Select the laser safety glasses appropriate for the wavelength of the laser to be used.
■Handling of Optics
Some optics split light into multiple beams. (Glan-Thompson prism, PBS, beamspliter, etc.)
When using these optics, terminate all divided beams safely.
Also, optics having a shape like a prism may split a beam in an unexpected direction.
Make sure to check the all circumferences of a prism, and safely handle stray light.
■Installation of Optical Systems
When installing an optical system, the desired height of laser beam is said to be higher than the eye level of
standing workers or lower than the eye level of seated workers.
Installing a fire-retardant beam enclosure around optical paths is also effective to prevent unnecessary laser
exposure.
■Laser Installation Environment
To prevent laser beams from reaching outside of an experiment space, covering the experiment space with a
darkroom is very effective as a safety measure. A darkroom can also be a partition of a laser controlled area to
limit entrance to only authorized people.
In addition, it can eliminate the influence of disturbance light from an optical experiment, which is effective when
performing optical adjustment with weak light.
Stray light
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Handling of Optics
Optics has a limited life span and degradation starts from the moment the package is opened. Scratches, dirt or dust will
accumulate on its surface after lengthy usage and will cause light to scatter or diffract and with the high possibility of poor
optical performance.
The durability of optics will change depending on the purpose of experiment and usage environment, but generally they can
be used for two to three years.
■Handling
Handling of optics requires good care and understanding to prevent surface scratches or dirt. Importantly, do not touch the polished surface.
Lightly hold the ground surface or its edge.
When handling optics, it is good practice to use finger sacks.
When fixing an optic in a holder, do not tighten the optic retaining screw too hard unless for special occasions such as transportation. Tightening
the screw too hard may break the optic or significantly deteriorate the performance of the optic.
Lightly tighten the screw so that the optic does not move. If the optic retaining screw might get loose due to vibration or the like, we recommend
adhering the optic to the holder, or fastening the screw with screw locking glue.
■Cleaning
Should an optical component get dusty or dirty, first check if the condition permits cleaning.
Cleaning optics with paper on Gold and Aluminium coating without protective coating is not recommended
as it will cause scratches. As for Dielectric multi-layer coating with protective coating, it is possible but we
recommend cleaning to its minimum to avoid risk of scratches.
When wiping optics, always remove them from the holder for effective cleaning.
Wiping an optic in a holder is very difficult and requires experience.
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
How to Wipe Optics
(1) Prepare several lens papers* 1 , alcohol (ethanol, methanol, etc.), finger sacks (powder-free type if available), and air blower* 2 .
(2) Put finger sacks on the fingers of both hands, and wipe off dirt from the finger sacks using paper moistened with alcohol. Then, fold a lens
paper into a strip of 3 to 4cm width.
(3) With the non-dominant hand, hold the edge of the optic as shown in the picture.
(4) Moisten the folded lens paper lightly with alcohol, and fold it so that it tucks into the faces of the optic.
(5) Hold the center of the optic with the lens paper, and rotate the optic using the fingers of the non-dominant hand.
(6) Gradually move the lens paper from the center of the optic toward the edge, and when it reaches the edge, slowly relax the fingers holding
the paper, and remove the paper from the optic.
(7) Hold the surface of the optic against the light to check cleanliness. Use the air blower to blow off fine dust on the surface of the optic.
(8) If there is still dirt or traces of wiping, change the lens paper, and wipe the optic again with the same procedure. After finished wiping
(change to) Upon finishing the wiping process, keep in a powder paper or special plastic case.
The art of wiping optics is to do it lightly with constant pressure.
*1 Lens Paper (SLP-2) B346 *2 Air Blower (DOP) B346
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B005

Optics & Optical Coatings
Optics & Optical Coatings Guide
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
■Storing Method
Optics are very stable in our general environment, but if kept in a location with high temperature and humidity for long
periods, its surface may get cloudy and mold may also develop on the optics if left unattended. When optics is not
being used, keep them in a dry container.
For storage of large optics and optical devices, use a Dry-Cabi ® * 3 . Ensure the power is on for optimum performance.
In addition, when storing an optic just purchased, we recommend storing it after taking it out from the package.
*3 Dry-Cabi ® (H-D2) B348
Handling of Silica Gel
Check the color of silica gel periodically, and when the color becomes reddish, replace with new silica gel.
Use of a transparent lunch box is convenient because you can check the color of silica gel without opening the cover.
You can reuse the reddish silica gel if you dry it in an oven.
If dust is on the surface of an optic and you irradiate the surface with a strong laser, the dust will burn and the stain caused might not be
removed from the optic surface. For this reason, we recommend the use of a cover to prevent dust from adhering on optical systems when they
are not used.
Just before using an optical system, we also recommend that you remove dust from optics using an air blower or by cleaning.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Explanation of Basic Terms
■Surface Accuracy
A value indicating the deviation between the polished surface and the ideal flat surface. It is also
called reflected wavefront distortion because it is measured using an interferometer which
measures wavefronts. Surface accuracy is expressed in units of [λ], which uses the number of
interference fringes. λ indicates the wavelength 632.8nm of a He-Ne laser used in interferometers.
In addition, there are two notations used for surface accuracy, PV and RMS.
Sample
PV stands for Peak to Valley (difference between the maximum value and the minimum value),
and RMS stands for Root Mean Square (least mean square). Empirically, the RMS value is about
1/3 of the PV value. The PV is often used for simple shapes such as a flat surface, and the
surface accuracy shown in this catalog uses the PV value. For example, the surface accuracy of
measuring surface
PV λ/2 indicates that the deviation is maximum 316.5nm from the ideal flat surface.
■Surface Quality (Scratch-Dig)
The standard of scratch on processed optics or coated optics is appeared as; long mark for scratch and deep mark for dig.
If the scratch−dig is 20−10, there are no scratches wider than 2μm, and no digs larger than 100μm.
SigmaKoki adopts the MIL-PRF-13830B standard, which consist of visual comparaison inspection of criteria sample.
■Laser Damage Threshold
When you irradiate an optic with a high energy pulse laser, it may cause damage to the coating or glass material of the optic. Laser damage
threshold is the energy density [J/cm 2 ] of laser light that will start causing damage to the optic.
Sigma Koki employs the S-on-1 test specified by the international standard ISO21254 for the laser damage threshold. By comparing the laser
damage threshold of optics with the energy density* 4 of the laser to be used, you can select the optics that can withstand the laser. Note that
laser damage threshold is not an issue for pulse laser (10ns pulse width) of 100mJ/cm 2 or lower, or CW laser of 0.5W or lower.
*4 Energy density [J/cm 2 ] = Laser energy [J] / (π × Beam radius [cm] 2 )
■P and S Polarization
When light enters a glass surface at an angle, the reflectance changes according to the polarization
orientation of the incident light. P polarization is light waves oscillating in-plane including
those of the normal vector to glass surface and incident beam, while S polarization is light waves
oscillating orthogonal to the P polarization. Polarization states other than these can be considered
combinations of P and S polarization in varied distribution ratio.
The reflectance of P and S polarization is determined by incident angle and the refractive index
of glass, but since each of them follows a different law, the reflectance of P polarization is
different from that of S polarization. B342
■Angular Deviation of Beam
When an optic is inserted in an optical path of a laser beam, the beam sometimes tilts.
The angle of the tilt from the original beam is called angular deviation of beam. Angular deviation
of beam is determined by the parallelism and refractive index, and in BK7, the parallelism of 1
minute is equivalent to the angular deviation of beam of about 0.5 minutes. B342
■Centration
When a lens rotates with reference to the outer diameter of the lens, if the lens is ideal, the
transmitted beam or focused beam will not move when the lens rotates, but if there is deviation
between the central axis of the outer diameter of the lens deviates and the optical axis of the
ideal lens, the beam moves as if drawing a circle. The angular deviation between the transmitted
beam and the rotation axis is called centration.
■Reflectance and Transmittance Wavelength Characteristics Data
The catalog shows a graph of reflectance or transmittance wavelength characteristics for most of
the optics listed.
This graph of reflectance or transmittance wavelength characteristics is measured using a spectrophotometer. * 5
The catalog shows a wide wavelength range in addition to the range guaranteed by design, but because the values out of the guaranteed range
have poor reproducibility and significantly vary among each optic, it is dangerous to trust them.
For a beamsplitter or the like, only the graph of transmittance is listed without the graph of reflectance. The reflectance is however easily
deduced by inverting the vertical axis of the graph because no absorption occurs in the case of dielectric multi-layer coating. * 6
In addition, incident angle and polarization orientation are specified for measured data. For measurement of reflectance, the incident angle is 5
degrees or 45 degrees, and for transmittance, it is 0 degree or 45 degrees.
Reflection type optics of 45 degrees incidence are listed with a graph of P and S polarization. This is because, in dielectric multi-layer coating,
the reflectance characteristics significantly changes depending on the polarization orientation. If the catalog cannot show a graph of P and S
polarization due to a space constraint, then it shows the mean value of S and P polarization.
*5 Simulation data of thin film design is used for some optics.
*6 In case of chromium coatings, 1 - Transmittance = Reflectance is not true due to absorption.
Incident
light
R1
Surface flatness
Incident
angle
R2
P polarization
Interference
fringes
Outgoing
beam
S polarization
Outer circumference central axis
Centration
Optical axis of ideal
B006
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M i r r o r s

M i r r o r s
I N D E X
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Mirrors Selection Guide
Mirrors designed for the optical laboratory are produced by metal or dielectric coating on the
polished glass surface by vacuum deposition.
Optical characteristics of reflectance with a variety of features are provided with the coating.
Please select a mirror with the correct optical properties that matches your specifications.
Performance Comparison of a typical reflectivity from mirror coatings
Application
Systems
Optics &
Optical
Coatings
100
Aluminum mirror
Holders
Gold mirror
95
Silver mirror
Bases
Reflectance [%]
90
85
80
200 400 600 800 1000 1200
Wavelength [nm]
Ultra Broadband Dielectric Mirrors
Broadband Dielectric Mirrors
(500nm)
Broadband Dielectric Mirrors
(600nm)
Dielectric multi-layer mirror for laser
(405nm)
Dielectric multi-layer mirror for laser
(500nm)
Dielectric multi-layer mirror for laser
(670nm)
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Features of the Mirrors
Type of Coat Affected products Features How to Use
Guide
Metallic
coating
Aluminum (TFA)
B030
Gold (TFG/TFGS)
B038
Silver (TFAG)
B040
Truly affordable !
Good reflectance in a wide range of
wavelength.
Mirrors are available in gold (AU) coating
and at any angle of incidence.
Light absorption coating, reflection is
slightly reduced.
It is designed for any simple optical system.
Works well with low power lasers.
Together with imaging optics that uses
white light illumination system.
Also highly compatible when used together
with infra-red optics. (Gold mirrors)
Mirrors
Beamsplitters
Polarizers
Broadband
dielectric
multi-layer
Dielectric
multi-layer
coating
Ultra Broadband
(TFMS)
B022
Broadband (TFVM)
B027
For Laser (TFM)
B024
High Power
(TFMHP)
B020
High reflectance with low loss.
Zero absorption from the coatings with
high laser strength.
It is resistant to hard scratches.
Designed and manufactured for narrow
wavelength range.
To be used at 45 degrees angle of
incidence
High reflectance with low loss.
Zero absorption from the coatings with
high laser strength.
It is resistant to hard scratches.
Designed and manufactured for narrow
wavelength range.
To be used at 45 degrees angle of
incidence
Designed for the following:
Precision optical systems especially for
low light and low loss optical systems.
Sub-watt class laser systems.
Multi-wavelength laser optical systems.
For all general and high power laser
systems (TFMHP)
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Mirrors with a dielectric multi-layer coating can have a variety of features in addition to the characteristics of reflectance.
Selection Guide
Super Mirrors
(TFSM)
B010
Mirrors for femtosecond laser
Low dispersion mirrors for femtosecond laser
(FLM/FLMHP)
B011
Negative dispersion mirrors for femtosecond laser
(GFM/GCM)
B013
It is a mirror which had low-scattering loss and high reflectivity of 99.999%.
For a femtosecond laser, it uses a mirror with the combined characteristics
of a dielectric multi-layer coating, wide range, low dispersion and high
strength for high power lasers.
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Dielectric Mirrors for high power laser
(TFMHP)
B020
With our propriety engineering process of the multi-layer coating, it is
designed to work well with high-energy laser pulse.
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B009

Optics & Optical Coatings
Catalog
Super Mirror TFHSM Code W3176
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
The Fabry-Perot type resonator cavity is often used for measuring extremely high accuracy time or
distance with use of the light. Super mirror is a ultra-high performance mirror that surface reflectance
is close to 1 (100%) as much as possible in order to increase the performance of the resonator.
◦By using an ion beam sputtering (IBS), high quality and dense coating with few defects has been coated.
◦With a special polishing technique, the low-scattering substrate of surface flatness Ra

Catalog
Low Dispersion Mirrors for Femtosecond Laser FLM/FLMHP Code W3004
This mirror has low wavelength dispersion and can be used with ultra-short pulse laser with 100
femtosecond or less.
◦We have designed a special thin film coating that optimizes wavelength dispersion, range and the strength of lasers.
◦It has the effect of suppressing the spread of the pulse width produced by a plurality of reflecting mirrors.
◦There are three types available, FLM1standard, FLM2 wide wavelength band, and high strength laser FLMHP*.
◦These mirrors are designed and produced for usage within the microscopy with femtosecond laser and optical systems
with femtosecond time-resolved spectroscopy.
Application
Systems
Optics &
Optical
Coatings
Specifications
Holders
Material BK7 (FLM) Synthetic fused silica (FLMHP)
Coating
Dielectric multi-layer coating
Bases
Incident angle 45°±3°
Surface Flatness λ/10
Parallelism 99.8 1
FLM1-25.4C05-800 720 − 900 760 − 840 φ25.4 5 >99.8 1
FLM1-30C05-800 720 − 900 760 − 840 φ30 5 >99.8 1
FLM2-12.7C05-800 700 − 940 740 − 860 φ12.7 5 >99.8 0.5
FLM2-25.4C05-800 700 − 940 740 − 860 φ25.4 5 >99.8 0.5
FLM2-30C05-800 700 − 940 740 − 860 φ30 5 >99.8 0.5
* Laser pulse width 50fs, wavelength 800nm
Low Dispersion Mirrors for High Power Femtosecond Laser
Part Number
S polarization
[nm]
Wavelength Range
P polarization
[nm]
Diameter φD
[mm]
Thickness t
[mm]
Reflectance
[%]
Laser Damage Threshold*
[J/cm 2 ]
FLMHP-12.7C05-800 745 − 855 775 − 825 φ12.7 5 >99 2
FLMHP-25.4C05-800 745 − 855 775 − 825 φ25.4 5 >99 2
FLMHP-30C05-800 745 − 855 775 − 825 φ30 5 >99 2
* Laser pulse width 65fs, wavelength 800nm
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Compatible Optic Mounts
MHG-MP12.7-NL / MHG-MP25-NL, HS25-NL / MHG-MP30-NL, HS30-NL
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B011

Optics & Optical Coatings
Low Dispersion Mirrors for Femtosecond Laser
FLM/FLMHP
Typical Reflectance Data
R: Reflectance
Application
Systems
Optics &
Optical
Coatings
FLM1
100
80
60
FLM2
100
80
60
Holders
R [%]
40
R [%]
40
Bases
20
P polarization
S polarization
Average
20
P polarization
S polarization
Average
Manual
Stages
0
650 700 750 800 850 900 950
[nm]
0
650 700 750 800 850 900 950
[nm]
Actuators
Motoeized
Stages
FLM1
100
Group Delay Data (for reference only)
FLM2
100
GDD: Group Delay Dispersion
Light
Sources
80
60
40
P polarization
S polarization
80
60
40
P polarization
S polarization
Index
GDD [fs 2 ]
20
0
−20
GDD [fs 2 ]
20
0
−20
Guide
Mirrors
Beamsplitters
Polarizers
−40
−60
−80
−100
650 700 750 800 850 900 950
[nm]
−40
−60
−80
−100
650 700 750 800 850 900 950 1000
[nm]
Lenses
Multi-Element Optics
Filters
FLMHP
100
Typical Reflectance Data
R: Reflectance
Prisms
Substrates/Windows
80
Optical Data
Maintenance
R [%]
60
40
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
20
P polarization
S polarization
Average
0
700 720 740 760 780 800 820 840 860 880 900
[nm]
B012
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Negative Dispersion Mirrors for Femtosecond Laser
GFM/GCM
Catalog
Code
W3005
This mirror has a negative dispersion and can be used for pulse compression in a femtosecond
laser system.
◦These mirrors are more compact and exhibit a smaller optical loss than the conventional prisms used for pulse compression.
◦Center wavelength is for Ti: Sapphire at 800nm.
◦Plano and concave substrates designed for cavities are available.
Outline Drawing
D
te
D
tc
(in mm)
●Tolerance
Diameter φD +0
−0.1
Thickness tc ±0.1
●Tolerance
Diameter φD +0
−0.1
Thickness tc ±0.2
Specifications
Material
BK7
Coating
Dielectric multi-layer coating
Incident angle 0° − 20°
Surface Flatness λ/10
Parallelism
99.8 0.5
GFM-25.4C05-800 700 − 900 φ25.4 5 >99.8 0.5
GFM-30C05-800 700 − 900 φ30 5 >99.8 0.5
* Laser pulse width 50fs, wavelength 800nm
Negative Dispersion Mirrors for Femtosecond Laser (Concave)
Part Number
Wavelength Range
[nm]
Diameter φD
[mm]
Edge Thickness
te
[mm]
Radius of curvature
r
[mm]
Reflectance
[%]
Laser Damage Threshold*
[J/cm 2 ]
GCM-30C07-50-800 700 − 900 φ30 7 50 >99.8 0.5
GCM-30C07-100-800 700 − 900 φ30 7 100 >99.8 0.5
GCM-30C05-500-800 700 − 900 φ30 5 500 >99.8 0.5
GCM-30C05-1000-800 700 − 900 φ30 5 1000 >99.8 0.5
* Laser pulse width 50fs, wavelength 800nm
Typical Reflectance Data
Incident angle 0°
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
0
600 650 700 750 850 900
−100
650 700 750 800 850 900 950
[nm]
[nm]
800 950 1000
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B013

Optics & Optical Coatings
Frameless Mirror Unit
Frameless Beamsplitter Unit
GMMUHP
GBSMU
Application
Systems
Optics &
Optical
Coatings
Holders
Frameless mounting is designed to minimize footprint space and allows the maximum front surface
area of the mirror to be coated.
Our high reflectivity mirrors are produced using a ceramic material.
Thermal expansion ratio is equivalent to Zerodur ® for maximum thermal stability.
◦Laser damage threshold of the mirror is equivalent to our high power dielectric laser mirrors (TFMHP).
◦λ/10 surface accuracy guarantee after coating.
◦The Beamplitter coating is equivalent to our ultra broadband dielectric half mirror (PSMH).
◦Fused Silica is used for our beamsplitters. It is to minimize transmitted wavefront error(s).
◦The patent related to this product (Patent No. 4586110) was obtained by SIGMA KOKI CO., LTD. in November 2011.
Bases
Manual
Stages
Guide
▶How to mount to the base is the same as the mirror holder MHG.
C010
▶Able to mount on Pedestal Bases (PST-**) and Post (RO-**) with
M6 thread (sold separately) D040, D043
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Specifications
■Holder
Type
GMMUHP-24.4
GMMUHP-49
GBSMU-49
Adjustable axis 3 axis 2 axis
Adjustment Range [ ° ]
Elevation ±3 ±2
Rotation ±3 ±2
Resolution [°/rotation]
Elevation 0.74 0.26
Rotation 0.74 0.26
Main material Brass Aluminum
Surface finishing Super black chrome Black anodized
Weight [kg] 0.04 0.16
■Mirror
Type Mirror Beamsplitter
Material Ceramic Synthetic fused silica
Incident angle 45°±3°
Surface accuracy after coating Reflective wavefront distortion λ/10
Surface Quality (Scratch−Dig)
20−10
Reflectance >99% Average 50±5%
Attention
▶Surface accuracy data is not provided with product. Surface accuracy
data is subjected to an additional charge.
▶Reflectance of the specification are represented by the average of the
reflectance of P polarized light and S polarized light.
▶If the product is used without setting the angle of incidence to 45°,
the reflection rate may decrease.
▶Be sure to wear laser safety goggles when checking optical path and
adjusting optical axis.
Schematic
Dielectric multi-layer coating
Incident angle 45°
Adjustment screw
Adjustment screw
lock mechanism
fixed support (rotating center)
Ceramic or Synthetic fused silica
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Mirror Unit
Part Number
Wavelength Range
[nm]
Dimension of front plate
[mm]
Coating clear aperture
[mm]
Surface accuracy
after coating
[mm]
Catalog
Code
Catalog
Code
W3001
Laser Damage Threshold*
[J/cm 2 ]
GMMUHP-24.4-355 355 24.4×24.4×7 23×23 φ20 8
GMMUHP-24.4-532 532 24.4×24.4×7 23×23 φ20 26.5
GMMUHP-24.4-1064 1064 24.4×24.4×7 23×23 φ20 28
GMMUHP-49-355 355 49×49×8.5 48×48 φ30 8
GMMUHP-49-532 532 49×49×8.5 48×48 φ30 26.5
GMMUHP-49-1064 1064 49×49×8.5 48×48 φ30 28
* Laser pulse width 10ns, repetition frequency 20Hz
Beamsplitter Unit
Part Number
Wavelength Range
[nm]
Dimension of front plate
[mm]
Coating clear aperture
[mm]
Surface accuracy
after coating
[mm]
Clear aperture of
transmitted beam
[mm]
W3406
Laser Damage Threshold*
[J/cm 2 ]
GBSMU-49-VIS 400 − 700 49×49×12 48×48 φ30 φ20 2.1
* Laser pulse width 10ns, repetition frequency 20Hz
B014
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Outline Drawing
(in mm)
GMMUHP-24.4
GMMUHP-49/GBSMU-49
Adjustment screw
Application
Systems
Adjustment screw
Lock knob
Lock knob
Part Number T M N
Optics &
Optical
Coatings
GMMUHP-49 8.5 21 30
GBSMU-49 12 29.5 33.5
Holders
24.4
24.4
49
7 10 MAX14
4-C0.3 4-C5
12.7
25.4
5
49
51.5
T
18
MAX 21
12
Bases
Manual
Stages
Actuators
25.4
12.7
13.7
18.7
2.7
2-4.4 attachment
7.2 counterbore
25
5.5
Motoeized
Stages
50
25
1.5
1.5
M
N
2-M6P1 penetrated
7.5 counterbore
Light
Sources
Index
Typical Reflectance Data of Frameless Mirror
R: Reflectance
GMMUHP-355
R [%]
100
98
96
94
92
90
300 310 320 330 340 350 360 370 380 390 400
GMMUHP-1064
R [%]
100
98
(%" 96
94
92
P polarization
S polarization
Average
[nm]
P polarization
S polarization
Average
90
900 950 1000 1050 1100 1150 1200 1250
[nm]
GMMUHP-532
R [%]
100
98
96
94
92
90
450 500 550 600
[nm]
GBSMU-VIS
T [%]
100
Surface Accuracy Data (reference data)
80
60
40
P polarization
S polarization
Average
Typical Transmittance Data of Frameless Beamsplitter
P polarization
20
S polarization
Average
0
400 500 600 700 800
[nm]
・Surface accuracy measurement method:
Measured with Zygo laser interferometer
・Surface accuracy measurement wavelength
632.8nm
・Surface accuracy guaranteed temperature
23°C±2°C
T: Transmission
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
TOKYO TEL.03-5638-6551 FAX.03-5638-6550 OSAKA TEL.06-6307-4835 FAX.06-6307-4834 KYUSHU TEL.092-481-4300 FAX.092-481-4310
B015

Optics & Optical Coatings
Surface Accuracy Guaranteed Mirror
HTFM
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
A mirror with high surface accuracy is realized by optimizing the conditions of the substrate material,
thickness and coating. A surface accuracy of λ/10 after coating is guaranteed.
◦A surface accuracy (after coating) higher than that of existing dielectric multi-layer flat mirrors (TFM) can be obtained.
◦The rigidity of the product is increased by using Synthetic fused silica as the substrate and also by having it thickened.
◦Our product line-up includes mirrors with high reflection that rates accordingly to each individual wavelength of ultra-violet,
YAG and other lasers.
Schematic
Incident angle 45°±3°
Outline Drawing
φD
Front surface: Dielectric multi-layer coating
t
Rear surface: Polished
(in mm)
●Tolerance
Diameter φD +0
−0.1
Thickness t ±0.1
Specifications
Material
Synthetic fused silica
Coating
Dielectric multi-layer coating
Incident angle 45°±3°
Surface Flatness λ/10
Parallelism 99.2 2
HTFM-25.4C08-248 248 φ25.4 8 >99.2 2
HTFM-30C08-248 248 φ30 8 >99.2 2
HTFM-50C11-248 248 φ50 11 >99.2 2
HTFM-50.8C11-248 248 φ50.8 11 >99.2 2
HTFM-12.7C08-266 266 φ12.7 8 >99.2 2
HTFM-25.4C08-266 266 φ25.4 8 >99.2 2
HTFM-30C08-266 266 φ30 8 >99.2 2
HTFM-50C11-266 266 φ50 11 >99.2 2
HTFM-50.8C11-266 266 φ50.8 11 >99.2 2
HTFM-12.7C08-308 308 φ12.7 8 >99.5 2
HTFM-25.4C08-308 308 φ25.4 8 >99.5 2
HTFM-30C08-308 308 φ30 8 >99.5 2
HTFM-50C11-308 308 φ50 11 >99.5 2
HTFM-50.8C11-308 308 φ50.8 11 >99.5 2
* Laser pulse width 10ns, repetition frequency 20Hz
Compatible Optic Mounts
MHG-MP12.7-NL / MHG-MP25-NL, HS25-NL / MHG-MP30-NL, HS30-NL / MHG-MP50-NL / MHG-MP50.8-NL
B016
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/ E-mail sales@sigma-koki.com

Catalog
Code
W3002
355 − 1064nm
Part Number
Wavelength Range
[nm]
Diameter φD
[mm]
Thickness t
[mm]
Reflectance
[%]
Laser Damage Threshold*
[J/cm 2 ]
HTFM-12.7C08-355 355 φ12.7 8 >99.5 5
HTFM-25.4C08-355 355 φ25.4 8 >99.5 5
HTFM-30C08-355 355 φ30 8 >99.5 5
HTFM-50C11-355 355 φ50 11 >99.5 5
HTFM-50.8C11-355 355 φ50.8 11 >99.5 5
HTFM-12.7C08-532 532 φ12.7 8 >99.5 7
HTFM-25.4C08-532 532 φ25.4 8 >99.5 7
HTFM-30C08-532 532 φ30 8 >99.5 7
HTFM-50C11-532 532 φ50 11 >99.5 7
HTFM-50.8C11-532 532 φ50.8 11 >99.5 7
HTFM-12.7C08-1064 1064 φ12.7 8 >99.5 20
HTFM-25.4C08-1064 1064 φ25.4 8 >99.5 20
HTFM-30C08-1064 1064 φ30 8 >99.5 20
HTFM-50C11-1064 1064 φ50 11 >99.5 20
HTFM-50.8C11-1064 1064 φ50.8 11 >99.5 20
* Laser pulse width 10ns, repetition frequency 20Hz
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Typical Reflectance Data
R: Reflectance
Light
Sources
HTFM-248
HTFM-266
Index
100
100
R [%]
80
60
40
20
0
220
250
P polarization
S polarization
Average
300 350 400
λ [nm]
●Transmission factor in visible range…80 – 90
R [%]
80
60
40
20
0
220
250
P polarization
S polarization
Average
300 350 400
λ [nm]
●Transmission factor in visible range…80 – 90
Guide
Mirrors
Beamsplitters
Polarizers
HTFM-308
R [%]
100
80
60
40
20
0
260
300
P polarization
S polarization
Average
350 400 450 500
λ [nm]
●Transmission factor in visible range…80 – 90
HTFM-355
R [%]
100
80
60
40
20
0
270
300
P polarization
S polarization
Average
350 400 450 500
λ [nm]
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
HTFM-532
R [%]
100
80
60
40
20
0
400
450
P polarization
S polarization
Average
500 550 600 650 700
λ [nm]
HTFM-1064
R [%]
100
80
60
40
20
0
850
900
P polarization
S polarization
Average
1000 1100 1200 1300
λ [nm]
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
TOKYO TEL.03-5638-6551 FAX.03-5638-6550 OSAKA TEL.06-6307-4835 FAX.06-6307-4834 KYUSHU TEL.092-481-4300 FAX.092-481-4310
B017

Optics & Optical Coatings
Holder Attached Surface Accuracy Guaranteed Mirrors
HTFM-MHG
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
By bonding the coated surface to our Kinematic Mirror Holders, a λ/10 surface accuracy is
guaranteed! This product can be used by composition with high accuracy wavefront optical system
or interferometer requirements.
◦2 types of performance mirror holders offered: high stability mirror holder (MHG-HS) or production model (MHG-MP).
Specifications
■Holder
Movable axis
Main Material
Finishing
■Mirror
HTFM-MHG-HS: 3 axes HTFM-MHG-MP: 2 axes
(HTFM-12.7C08-MHG-MP: 3axes)
Aluminum
(Brass: MHG-MP12.7 only)
Black anodized
(Only MHG-MP12.7 is Super black chrome)
Material
Synthetic fused silica
Coating
Dielectric multi-layer coating
Incident angle 45°±3°
Surface Accuracy After holder is attached λ/10
Surface Quality
(Scratch−Dig)
10−5
Clear aperture 80% of Actual Aperture
Rear Surface Polished
Guide
▶The Production model (MHG-MP) is equipped with lock mechanisms
in the adjustment screw.
▶This product can be attached to a rod (RS-**-**: separately
available) or a post stand (PST-**: separately available).
D040 , D043
▶Confirm the reflection rate wavelength characteristic with the graph
of the surface accuracy guaranteed mirror (HTFM). B017
Attention
▶The mirror surface will protrude by 2mm from the holder after
attachment.
▶Surface accuracy guarantee data is not attached. If required, a
creation fee will be charged. Please contact our Sales department for
more information.
▶Surface accuracy will not be guaranteed when the mirror is detached.
▶Any impacted shock to the holder or mirror may result in poor surface
accuracy.
▶For production model (MHG-MP), the rotation center is at the external
side of the mirror (support point of the holder)
▶When fixing the high stability model (MHG-HS) to a flat surface,
please use supplied plate for attached posts
▶The optical axis will be 10mm higher after using the supplied plates
after attachment.
Schematic
Dielectric multi-layer coating
Incident angle 45°
Adjustment screw
Lock knob
Supporting point (rotating center)
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
248 − 308nm
Part Number
Wavelength
Range
[nm]
Compatible
Optics
Diameter
φD
[mm]
Reflectance
[%]
Holder
part number
Adjustment Range
Elevation
[ ° ]
Rotation
[ ° ]
Elevation
[°/rotation]
Resolution
Rotation
[°/rotation]
HTFM-12.7C08-248-MHG-MP 248 φ12.7 >99.2 MHG-MP12.7 ±3 ±3 about 0.74 about 0.74 0.04
HTFM-25.4C08-248-MHG-MP 248 φ25.4 >99.2 MHG-MP25 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-25.4C08-248-MHG-HS 248 φ25.4 >99.2 MHG-HS25 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-30C08-248-MHG-MP 248 φ30 >99.2 MHG-MP30 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-30C08-248-MHG-HS 248 φ30 >99.2 MHG-HS30 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-50C11-248-MHG-MP 248 φ50 >99.2 MHG-MP50 ±2 ±2 about 0.26 about 0.26 0.24
HTFM-50.8C11-248-MHG-MP 248 φ50.8 >99.2 MHG-MP50.8 ±2 ±2 about 0.26 about 0.26 0.24
HTFM-12.7C08-266-MHG-MP 266 φ12.7 >99.2 MHG-MP12.7 ±3 ±3 about 0.74 about 0.74 0.04
HTFM-25.4C08-266-MHG-MP 266 φ25.4 >99.2 MHG-MP25 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-25.4C08-266-MHG-HS 266 φ25.4 >99.2 MHG-HS25 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-30C08-266-MHG-MP 266 φ30 >99.2 MHG-MP30 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-30C08-266-MHG-HS 266 φ30 >99.2 MHG-HS30 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-50C11-266-MHG-MP 266 φ50 >99.2 MHG-MP50 ±2 ±2 about 0.26 about 0.26 0.24
HTFM-50.8C11-266-MHG-MP 266 φ50.8 >99.2 MHG-MP50.8 ±2 ±2 about 0.26 about 0.26 0.24
HTFM-12.7C08-308-MHG-MP 308 φ12.7 >99.5 MHG-MP12.7 ±3 ±3 about 0.74 about 0.74 0.04
HTFM-25.4C08-308-MHG-MP 308 φ25.4 >99.5 MHG-MP25 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-25.4C08-308-MHG-HS 308 φ25.4 >99.5 MHG-HS25 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-30C08-308-MHG-MP 308 φ30 >99.5 MHG-MP30 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-30C08-308-MHG-HS 308 φ30 >99.5 MHG-HS30 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-50C11-308-MHG-MP 308 φ50 >99.5 MHG-MP50 ±2 ±2 about 0.26 about 0.26 0.24
HTFM-50.8C11-308-MHG-MP 308 φ50.8 >99.5 MHG-MP50.8 ±2 ±2 about 0.26 about 0.26 0.24
Weight
[kg]
B018
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/ E-mail sales@sigma-koki.com

Catalog
Code
W3003
355 − 1064nm
Part Number
Wavelength
Range
[nm]
Compatible
Optics
Diameter
φD
[mm]
Reflectance
[%]
Holder
part number
Adjustment Range
Elevation
[ ° ]
Rotation
[ ° ]
Elevation
[°/rotation]
Resolution
Rotation
[°/rotation]
HTFM-12.7C08-355-MHG-MP 355 φ12.7 >99.5 MHG-MP12.7 ±3 ±3 about 0.74 about 0.74 0.04
HTFM-25.4C08-355-MHG-MP 355 φ25.4 >99.5 MHG-MP25 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-25.4C08-355-MHG-HS 355 φ25.4 >99.5 MHG-HS25 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-30C08-355-MHG-MP 355 φ30 >99.5 MHG-MP30 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-30C08-355-MHG-HS 355 φ30 >99.5 MHG-HS30 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-50C11-355-MHG-MP 355 φ50 >99.5 MHG-MP50 ±2 ±2 about 0.26 about 0.26 0.24
HTFM-50.8C11-355-MHG-MP 355 φ50.8 >99.5 MHG-MP50.8 ±2 ±2 about 0.26 about 0.26 0.24
HTFM-12.7C08-532-MHG-MP 532 φ12.7 >99.5 MHG-MP12.7 ±3 ±3 about 0.74 about 0.74 0.04
HTFM-25.4C08-532-MHG-MP 532 φ25.4 >99.5 MHG-MP25 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-25.4C08-532-MHG-HS 532 φ25.4 >99.5 MHG-HS25 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-30C08-532-MHG-MP 532 φ30 >99.5 MHG-MP30 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-30C08-532-MHG-HS 532 φ30 >99.5 MHG-HS30 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-50C11-532-MHG-MP 532 φ50 >99.5 MHG-MP50 ±2 ±2 about 0.26 about 0.26 0.24
HTFM-50.8C11-532-MHG-MP 532 φ50.8 >99.5 MHG-MP50.8 ±2 ±2 about 0.26 about 0.26 0.24
HTFM-12.7C08-1064-MHG-MP 1064 φ12.7 >99.5 MHG-MP12.7 ±3 ±3 about 0.74 about 0.74 0.04
HTFM-25.4C08-1064-MHG-MP 1064 φ25.4 >99.5 MHG-MP25 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-25.4C08-1064-MHG-HS 1064 φ25.4 >99.5 MHG-HS25 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-30C08-1064-MHG-MP 1064 φ30 >99.5 MHG-MP30 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-30C08-1064-MHG-HS 1064 φ30 >99.5 MHG-HS30 ±3 ±3 about 0.39 about 0.39 0.12
HTFM-50C11-1064-MHG-MP 1064 φ50 >99.5 MHG-MP50 ±2 ±2 about 0.26 about 0.26 0.24
HTFM-50.8C11-1064-MHG-MP 1064 φ50.8 >99.5 MHG-MP50.8 ±2 ±2 about 0.26 about 0.26 0.24
Weight
[kg]
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Outline Drawing
HTFM-12.7C08-MHG-MP
Hexagon socket head cap screw M4×6…1 screw
Adjustment screw
HTFM-25.4C08-MHG-HS
HTFM-30C08-MHG-HS
2-M2.6
depth 5
PCDφC
49
24.4
24.4
25.4
49
25
50
Fine adjustment screw lock mechanism
12.7
12.7
25.4
1.5
1.5 25
50
Mirror diameter φA
Clear aperture φ10
Front surface of Mirror
Mirror diameter φA
Clear aperture φB
13.7
8.5
6
Front surface of Mirror
10
7
2
18.7
18
MAX14
2.7
φ5
2-φ4.4 thru
φ7.2 Counterbore
Mirror
diameter
φA
Clear
aperture
φB
MAX20
φ16
2 2-M6 P1 through
21 φ7.5 Counterbore
30
PCD
φC
Hexagon socket
Part Number
head cap screw M4×10…1 screw
Adjustment
φ25 −
screw
25.4C08-MHG-HS
φ25.4
φ22 φ32
30C08-MHG-HS φ30 φ27 φ35
HTFM-25.4C08-MHG-MP
HTFM-30C08-MHG-MP
Hexagon socket
head cap screw M4×10…1 screw
Adjustment
Fine adjustment screw lock mechanism
screw
2-M2.6 depth 5
PCDφC
49
49
25
50
25
50
HTFM-50C11-MHG-MP
HTFM-50.8C11-MHG-MP
Hexagon socket
head cap screw M4×10…1 screw
Adjustment
Fine adjustment screw lock mechanism screw
69
69
70
35
35
Mirror diameter φA
Clear aperture φB
8.5
Front surface of Mirror
2-M4 depth 8
PCDφB
70
Part Number
Mirror diameter φA
Clear aperture
φ47
11.5
Front surface of Mirror
18
2
21
30
2
26
33
Mirror
diameter
φA
MAX20
6
φ12
2-M6 P1 hrough
φ7.5 Counterbore
18 MAX20
φ12
6
Clear
aperture
φB
PCD
φC
25.4C08-MHG-MP
φ25 −
φ25.4
φ22 φ32
30C08-MHG-MP φ30 φ27 φ35
Part Number
Mirror
diameter
φA
(in mm)
PCD
φB
50C11-MHG-MP φ50 φ58
50.8C11-MHG-MP φ50.8 φ59
2-M6P1 through
φ7.5 Counterbore
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
TOKYO TEL.03-5638-6551 FAX.03-5638-6550 OSAKA TEL.06-6307-4835 FAX.06-6307-4834 KYUSHU TEL.092-481-4300 FAX.092-481-4310
B019

Optics & Optical Coatings
Dielectric Mirrors for High Power Laser
TFMHP
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
All dielectric designs are much more resistant to laser damage than typical mirrors and are suitable
for use with high power laser systems.
◦All Dielectric Mirrors for High Power Laser are manufactured using dielectric multi-layer coatings of alternating high and
low index layers.
◦These are specifically designed for use at 45 degrees (AOI).
◦All dielectric designs are much more resistant to laser damage than typical mirrors and are suitable for use with high power
laser systems.
◦Mirrors for YAG lasers are also available.
Schematic
Rear surface: Polished
Specifications
Material
BK7
Coating
Dielectric multi-layer coating
Incident angle 45°±3°
Surface Flatness λ/10
Parallelism 95 2
TFMHP-30C05-193 193 φ30 5 >95 2
TFMHP-50C08-193 193 φ50 8 >95 2
TFMHP-25.4C05-248 248 φ25.4 5 >98 4
TFMHP-30C05-248 248 φ30 5 >98 4
TFMHP-50C08-248 248 φ50 8 >98 4
TFMHP-25.4C05-266 266 φ25.4 5 >98 5
TFMHP-30C05-266 266 φ30 5 >98 5
TFMHP-50C08-266 266 φ50 8 >98 5
TFMHP-25.4C05-355 355 φ25.4 5 >99 8
TFMHP-30C05-355 355 φ30 5 >99 8
TFMHP-50C08-355 355 φ50 8 >99 8
TFMHP-25.4C05-532 532 φ25.4 5 >99 26.5
TFMHP-30C05-532 532 φ30 5 >99 26.5
TFMHP-50C08-532 532 φ50 8 >99 26.5
TFMHP-25.4C05-1064 1064 φ25.4 5 >99 28
TFMHP-30C05-1064 1064 φ30 5 >99 28
TFMHP-50C08-1064 1064 φ50 8 >99 28
* Angle of incidence 0°, laser pulse width 10ns, repetition frequency 20Hz
B020
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/ E-mail sales@sigma-koki.com

Catalog
Code
W3006
Typical Reflectance Data
R: Reflectance
TFMHP-193
R [%]
100
80
60
40
P polarization
S polarization
Average
TFMHP-248
R [%]
100
80
60
40
P polarization
S polarization
Average
Application
Systems
Optics &
Optical
Coatings
Holders
20
20
0
180 200 220 240 260
280 300 320 340 360 380 400
0
200 250 300 350 400 450
500
Bases
[nm]
[nm]
Manual
Stages
TFMHP-266
TFMHP-355
R [%]
100
80
60
40
20
P polarization
S polarization
Average
R [%]
100
80
60
40
20
P polarization
S polarization
Average
Actuators
Motoeized
Stages
Light
Sources
0
200 250 300 350 400 450
500
0
250 300 350 400 450 500
550
Index
[nm]
[nm]
TFMHP-532
TFMHP-1064
Guide
100
100
Mirrors
80
P polarization
S polarization
Average
80
Beamsplitters
R [%]
60
40
20
R [%]
60
40
20
P polarization
S polarization
Average
Polarizers
Lenses
Multi-Element Optics
0
400 500 600 700
[nm]
800
0
800 900 1000 1100 1200 1300
[nm]
1400
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Compatible Optic Mounts
MHG-HS25-NL, -HS30-NL / MHG-MP50-NL / MHAN-25.4S, -30S, -50S
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
TOKYO TEL.03-5638-6551 FAX.03-5638-6550 OSAKA TEL.06-6307-4835 FAX.06-6307-4834 KYUSHU TEL.092-481-4300 FAX.092-481-4310
B021

Optics & Optical Coatings
Ultra Broadband Dielectric Mirrors
TFMS
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Ultra Broadband Dielectric Mirrors are manufactured using all dielectric multi-layer coatings of
alternating high and low index layers. These are specifically designed for use at 45 degrees angle
of incidence. The mirrors are designed to achieve broad reflection like never before.
◦Visible, near infrared and other multiple wavelengths are covered with a single mirror.
◦These mirrors have many advantages over a metal mirror. With very little deterioration with age, it is durable and easy to
clean and maintain.
Specifications
Material
BK7
Coating
Dielectric multi-layer coating
Incident angle 45°±3°
Surface Flatness λ/10
Parallelism Average 97 0.5
TFMS-30C05-2/4 245 − 400 φ30 5 > Average 97 0.5
TFMS-25.4C05-2/7 245 − 700 φ25.4 5 > Average 97 0.5
TFMS-30C05-2/7 245 − 700 φ30 5 > Average 97 0.5
TFMS-25.4C05-4/11 400 − 1100 φ25.4 5 > Average 98 0.5
TFMS-30C05-4/11 400 − 1100 φ30 5 > Average 98 0.5
TFMS-50C08-4/11 400 − 1100 φ50 8 > Average 98 0.5
TFMS-25.4C05-4/20 400 − 2000 φ25.4 5 > Average 98 0.5
TFMS-30C05-4/20 400 − 2000 φ30 5 > Average 98 0.5
TFMS-50C08-4/20 400 − 2000 φ50 8 > Average 98 0.5
TFMS-25.4C05-3/20 300 − 2000 φ25.4 5 > Average 97 0.5
TFMS-30C05-3/20 300 − 2000 φ30 5 > Average 97 0.5
TFMS-50C08-3/20 300 − 2000 φ50 8 > Average 97 0.5
* Laser pulse width 10ns, wavelength 532nm, repetition frequency 20Hz
B022
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/ E-mail sales@sigma-koki.com

Catalog
Code
W3007
Typical Reflectance Data
R: Reflectance
TFMS-2/4
TFMS-2/7
TFMS-4/11
TFMS-4/20
TFMS-3/20
R [%] R [%] R [%] R [%] R [%]
100
80
60
40
20
0
100
80
60
40
20
0
100
80
60
40
20
0
100
80
60
40
20
0
100
80
60
40
P polarization
S polarization
Average
250 300 350 400
450
nm
P polarization
S polarization
Average
300 400 500 600
700
[nm]
P polarization
S polarization
Average
400 600 800 1000
[nm]
P polarization
S polarization
Average
400 800 1200 1600
2000
[nm]
P polarization
S polarization
Average
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
20
0
400 800 1200 1600
2000
[nm]
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Compatible Optic Mounts
MHG-HS25-NL, -HS30-NL / MHG-MP50-NL / MHAN-25.4S, -30S, -50S
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
TOKYO TEL.03-5638-6551 FAX.03-5638-6550 OSAKA TEL.06-6307-4835 FAX.06-6307-4834 KYUSHU TEL.092-481-4300 FAX.092-481-4310
B023

Optics & Optical Coatings
Laser Line Mirrors
TFM
Application
Systems
Optics &
Optical
Coatings
Holders
Laser Line Mirrors are total reflection mirrors, multi-layer-coated with dielectrics of different
refractive index by turns on. Three types of laser line mirrors are offered.
[Narrowband] Laser line mirrors that are focused on specific wavelengths. Incident angle is 45°.
[Middleband] Multi line mirrors with middle reflection bands. Incident angle is 45°.
[Broadband] Multi line mirrors with broad reflection bands. Incident angle is 45°.
◦Dielectric multi-layer coating does not have absorption like AL and the reflectance can be more than 99% except some
mirrors for UV wavelength.
◦These coatings are much stronger than Al+MgF2 coating against high-power lasers.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Specifications
Material
BK7 (CaF2 crystal for TFM-157 only)
Coating
Dielectric multi-layer coating
Incident angle 45°±3°
Surface Flatness
λ/10, Polished (TFM-157)
Parallelism 95.0 0.5 Polished
TFM-50C05-157 157 φ50 5 >95.0 0.5 Polished
TFM-25.4C05-193 193 φ25.4 5 >95.0 1 Polished
TFM-30C05-193 193 φ30 5 >95.0 1 Polished
TFM-50C08-193 193 φ50 8 >95.0 1 Polished
TFM-25.4C05-248 248.4 φ25.4 5 >99.0 2 Polished
TFM-30C05-248 248.4 φ30 5 >99.0 2 Polished
TFM-50C08-248 248.4 φ50 8 >99.0 2 Polished
TFM-25.4C05-266 266 φ25.4 5 >99.2 2 Polished
TFM-30C05-266 266 φ30 5 >99.2 2 Polished
TFM-50C08-266 266 φ50 8 >99.2 2 Polished
TFM-25.4C05-282 281.8 φ25.4 5 >99.3 2 Polished
TFM-30C05-282 281.8 φ30 5 >99.3 2 Polished
TFM-50C08-282 281.8 φ50 8 >99.3 2 Polished
TFM-25.4C05-308 308 φ25.4 5 >99.5 3 Polished
TFM-30C05-308 308 φ30 5 >99.5 3 Polished
TFM-50C08-308 308 φ50 8 >99.5 3 Polished
TFM-25.4C05-325/337 325 − 337 φ25.4 5 >99.5 3 Polished
TFM-30C05-325/337 325 − 337 φ30 5 >99.5 3 Polished
TFM-50C08-325/337 325 − 337 φ50 8 >99.5 3 Polished
* Laser pulse width 10ns (TFM-157: 20ns), repetition frequency 20Hz
B024
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/ E-mail sales@sigma-koki.com

Catalog
Code
W3008
Typical Reflectance Data … Laser Line Mirrors Narrowband
R: Reflectance
TFM-157
R [%]
100
80
60
40
Average
TFM-193
R [%]
100
80
60
40
Average
Application
Systems
Optics &
Optical
Coatings
20
0
140
145 150 155 160 165 170 175
[nm]
20
0
185 190 200 210 220 230
[nm]
Holders
Bases
TFM-248
100
80
P polarization
S polarization
Average
TFM-266
100
80
P polarization
S polarization
Average
Manual
Stages
R [%]
60
40
R [%]
60
40
Actuators
20
0
220
TFM-282
100
80
250
300 350 400
[nm]
Visible range transmission factor…80 – 90
P polarization
S polarization
Average
20
0
220
TFM-308
100
80
250
300 350 400
[nm]
Visible range transmission factor…80 – 90
P polarization
S polarization
Average
Motoeized
Stages
Light
Sources
Index
R [%]
60
40
R [%]
60
40
Guide
20
0
230
250
300
350 400 450 500
[nm]
Visible range transmission factor…80 – 90
20
0
260
300
350 400 450
500
[nm]
Visible range transmission factor…80 – 90
Mirrors
Beamsplitters
Polarizers
TFM-325/337
100
Lenses
80
P polarization
S polarization
Average
Multi-Element Optics
R [%]
60
40
Filters
Prisms
20
0
270
300
350 400 450
500
[nm]
Visible range transmission factor…80 – 90
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Compatible Optic Mounts
MHG-MP12.7-NL / MHG-HS25-NL, -HS30-NL / MHG-MP50-NL ,- MP50.8-NL
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
TOKYO TEL.03-5638-6551 FAX.03-5638-6550 OSAKA TEL.06-6307-4835 FAX.06-6307-4834 KYUSHU TEL.092-481-4300 FAX.092-481-4310
B025

Optics & Optical Coatings
Laser Line Mirrors
TFM
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
■Laser Line Mirrors Narrowband
352 − 1064nm
Part Number
Wavelength Range
[nm]
Diameter D
[mm]
Thickness t
[mm]
Reflectance
[%]
Laser Damage
Threshold*
[J/cm 2 ]
Rear Surface
TFM-25.4C05-352/355 352 − 355 φ25.4 5 >99.5 5 Polished
TFM-30C05-352/355 352 − 355 φ30 5 >99.5 5 Polished
TFM-50C08-352/355 352 − 355 φ50 8 >99.5 5 Polished
TFM-12.7C05-532 532 φ12.7 5 >99.5 8 Ground
TFM-25C05-532 532 φ25 5 >99.5 8 Polished
TFM-25.4C05-532 532 φ25.4 5 >99.5 8 Polished
TFM-30C05-532 532 φ30 5 >99.5 8 Polished
TFM-40C06-532 532 φ40 6 >99.5 8 Polished
TFM-50C08-532 532 φ50 8 >99.5 8 Polished
TFM-50.8C08-532 532 φ50.8 8 >99.5 8 Polished
TFM-12.7C05-1064 1064 φ12.7 5 >99.5 20 Ground
TFM-25.4C05-1064 1064 φ25.4 5 >99.5 20 Polished
TFM-30C05-1064 1064 φ30 5 >99.5 20 Polished
TFM-40C06-1064 1064 φ40 6 >99.5 20 Polished
TFM-50C08-1064 1064 φ50 8 >99.5 20 Polished
TFM-50.8C08-1064 1064 φ50.8 8 >99.5 20 Polished
* Laser pulse width 10ns, repetition frequency 20Hz
Index
Typical Reflectance Data … Laser Line Mirrors Narrowband
R: Reflectance
Guide
TFM-352/355
100
80
P polarization
S polarization
Average
TFM-532
100
80
P polarization
S polarization
Average
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
R [%] R [%]
60
40
20
0
270
TFM-1064
100
80
60
40
20
300
350 400 450
500
λ [nm]
P polarization
S polarization
Average
R [%]
60
40
20
0
400
450
500 550 600 650 700
λ [nm]
Maintenance
0
850
900
1000 1100 1200 1300
λ [nm]
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
B026
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/ E-mail sales@sigma-koki.com

0-45° Wide Incidence Dielectric Mirrors TFVM
Catalog
Code
W3009
You can use the 0-45° Wide Incidence Dielectric Mirrors for an optical system for reciprocating the
light between two mirrors or Michelson interferometer, if you want to use a mirror at an incident
angle of 45 ° or less. When used at 45 degree and 0 degree incidence angle, one mirror can be
shared to obtain high reflectivity.
◦Very high reflectivity can be obtained between from 0 degree to 45 degree angle of incidence.
◦If used at a fixed angle of incidence, it can also be used as a broadband mirror. For example, if TFVM-800 is used in a
45 degree incident, reflectance of 99% or more can be obtained in the range of 730nm to 900nm.
◦Since there is no absorption in the coating, little change over time, it can be durable for the continuous laser irradiation.
Application
Systems
Optics &
Optical
Coatings
Holders
Specifications
Material
BK7
Bases
Coating
Dielectric multi-layer coating
Incident angle 0° − 45°
Surface Flatness λ/10
Manual
Stages
Parallelism 99 0.5 Ground
TFVM-25.4C05-405 405 φ25.4 5 >99 0.5 Polished
TFVM-30C05-405 405 φ30 5 >99 0.5 Polished
TFVM-50C08-405 405 φ50 8 >99 0.5 Polished
TFVM-25.4C05-532 532 φ25.4 5 >99 8 Polished
TFVM-30C05-532 532 φ30 5 >99 8 Polished
TFVM-50C08-532 532 φ50 8 >99 8 Polished
TFVM-10C03-VIS 400 − 700 φ10 3 >99 0.5 Ground
TFVM-15C03-VIS 400 − 700 φ15 3 >99 0.5 Ground
TFVM-15C05-VIS 400 − 700 φ15 5 >99 0.5 Ground
TFVM-20C03-VIS 400 − 700 φ20 3 >99 0.5 Ground
TFVM-20C05-VIS 400 − 700 φ20 5 >99 0.5 Ground
TFVM-25C05-VIS 400 − 700 φ25 5 >99 0.5 Polished
TFVM-25.4C05-VIS 400 − 700 φ25.4 5 >99 0.5 Polished
TFVM-30C05-VIS 400 − 700 φ30 5 >99 0.5 Polished
TFVM-40C06-VIS 400 − 700 φ40 6 >99 0.5 Polished
TFVM-50C08-VIS 400 − 700 φ50 8 >99 0.5 Polished
* Laser pulse width 10ns, repetition frequency 20Hz
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
TOKYO TEL.03-5638-6551 FAX.03-5638-6550 OSAKA TEL.06-6307-4835 FAX.06-6307-4834 KYUSHU TEL.092-481-4300 FAX.092-481-4310
B027

Optics & Optical Coatings
0-45° Wide Incidence Dielectric Mirrors TFVM
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
780 − 1550nm
Part Number
Wavelength Range Diameter φD Thickness t Reflectance Laser Damage Threshold*
[nm]
[mm]
[mm]
[%]
[J/cm 2 ]
Rear Surface
TFVM-10C03-800 780 − 830 φ10 3 >99 0.5 Ground
TFVM-15C03-800 780 − 830 φ15 3 >99 0.5 Ground
TFVM-15C05-800 780 − 830 φ15 5 >99 0.5 Ground
TFVM-20C03-800 780 − 830 φ20 3 >99 0.5 Ground
TFVM-20C05-800 780 − 830 φ20 5 >99 0.5 Ground
TFVM-25C05-800 780 − 830 φ25 5 >99 0.5 Polished
TFVM-25.4C05-800 780 − 830 φ25.4 5 >99 0.5 Polished
TFVM-30C05-800 780 − 830 φ30 5 >99 0.5 Polished
TFVM-40C06-800 780 − 830 φ40 6 >99 0.5 Polished
TFVM-50C08-800 780 − 830 φ50 8 >99 0.5 Polished
TFVM-25.4C05-1064 1064 φ25.4 5 >99 20 Polished
TFVM-30C05-1064 1064 φ30 5 >99 20 Polished
TFVM-50C08-1064 1064 φ50 8 >99 20 Polished
TFVM-15C03-1300 1300 φ15 3 >99 1 Ground
TFVM-25.4C05-1300 1300 φ25.4 5 >99 1 Polished
TFVM-30C05-1300 1300 φ30 5 >99 1 Polished
TFVM-15C03-1550 1550 φ15 3 >99 1 Ground
TFVM-25.4C05-1550 1550 φ25.4 5 >99 1 Polished
TFVM-30C05-1550 1550 φ30 5 >99 1 Polished
* Laser pulse width 10ns, repetition frequency 20Hz
Index
Typical Reflectance Data
R: Reflectance
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
TFVM-405
TFVM-532
TFVM-VIS
R [%] R [%] R [%]
100
80
60
40
20
100
80
60
40
20
0
300 350 400 450 500 550 600
0
400
100
80
60
40
λ [nm]
500 600
700
800
λ [nm]
45° is average value of P polarization and S polarization
0°
45°
0°
45°
0°
45°
20
0
300
400
500 600
700 800
λ nm
B028
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/ E-mail sales@sigma-koki.com

Typical Reflectance Data
R: Reflectance
TFVM-800
TFVM-1064
TFVM-1300
R [%] R [%] R [%]
100
80
60
40
20
100
0
600
80
60
40
20
0
800
100
80
60
40
20
700 800 900 1000 1100 1200
900
[nm]
1000 1100 1200 1300 1400
[nm]
0°
45°
45° is average value of P polarization and S polarization
0°
45°
0°
45°
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
0
1000
1100
1200 1300 1400 1500 1600
[nm]
Prisms
Substrates/Windows
Optical Data
Maintenance
TFVM-1550
100
80
60
R
%
40
0°
45°
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
20
Accuracy Guarantee
0
1200
1300 1400
1500 1600 1700 1800 1900
[nm]
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Compatible Optic Mounts
MHG-MP30-NL / MHG-MP50-NL / BSHL-15-2
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
TOKYO TEL.03-5638-6551 FAX.03-5638-6550 OSAKA TEL.06-6307-4835 FAX.06-6307-4834 KYUSHU TEL.092-481-4300 FAX.092-481-4310
B029

Optics & Optical Coatings
Aluminum Mirrors
TFA/TFAN/TFAQ/TFAQN/TFAE/OPBA/OPSQA
Application
Systems
Optics &
Optical
Coatings
Holders
This is a vapour-deposited aluminium mirror plane and the substrate is polished with high accuracy.
Designed for high reflectivity at any incident angle.
◦With four types to choose from; (TFAN/TFAQN) which is coated with only aluminium, (TFA/TFAQ) which is coated with a
protective coating against accidental hard scratches, (TFAE) which is coated with a protective coating and aluminium to
increase the reflectance of ultraviolet and lastly, (OPBA/OPSQA) which provides a protective coat on the optical parallel
substrate.
◦For ultraviolet, visible and near-infrared light applications.
◦For low thermal expansion mirrors, we have (TFAQ/TFAQN) which is made of Synthetic fused silica that provides high
rigidity and high precision surface quality.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Specifications
Material
Coating
parallelism
Incident angle
Laser Damage Threshold
Surface Quality
(Scratch−Dig)
Clear aperture
BK7
Synthetic fused silica
Hard glass (Pyrex ® etc.)
TFAN/TFAQN: Al (without protection coating)
TFA/TFAQ/OPBA/OPSQA:
Al+MgF2 (surface flatness λ/20 is Al+SiO)
TFAE: Al + Dielectric multi-layer coating
TFA/TFAN/TFAQ/TFAQN/TFAE:

Catalog
Code
W3010
Circle
Al+MgF2 (partially Al+SiO) Al only Diameter φD Thickness t
Part Number
Part Number
[mm]
[mm]
Material Surface Flatness Rear Surface
TFA-10C03-4 − φ10 3 BK7 λ/4 Ground
TFA-10C03-10 TFAN-10C03-10 φ10 3 BK7 λ/10 Ground
TFA-10C05-10 TFAN-10C05-10 φ10 5 BK7 λ/10 Ground
TFA-10C05-20 TFAN-10C05-20 φ10 5 BK7 λ/20 Ground
TFAQ-10C06-20 TFAQN-10C06-20 φ10 6 Synthetic Fused Silica λ/20 Ground
TFA-12.7C05-4 − φ12.7 5 BK7 λ/4 Ground
TFA-12.7C05-10 − φ12.7 5 BK7 λ/10 Ground
TFAQ-12.7C06-20 − φ12.7 6 Synthetic Fused Silica λ/20 Ground
TFA-15C03-10 TFAN-15C03-10 φ15 3 BK7 λ/10 Ground
TFA-15C05-10 TFAN-15C05-10 φ15 5 BK7 λ/10 Ground
TFA-15C05-20 TFAN-15C05-20 φ15 5 BK7 λ/20 Ground
TFAQ-15C06-20 TFAQN-15C06-20 φ15 6 Synthetic Fused Silica λ/20 Ground
TFA-20C03-10 TFAN-20C03-10 φ20 3 BK7 λ/10 Ground
TFA-20C05-4 TFAN-20C05-4 φ20 5 BK7 λ/4 Ground
TFA-20C05-10 TFAN-20C05-10 φ20 5 BK7 λ/10 Ground
TFA-20C05-20 TFAN-20C05-20 φ20 5 BK7 λ/20 Ground
TFAQ-20C06-20 TFAQN-20C06-20 φ20 6 Synthetic Fused Silica λ/20 Ground
TFA-25C05-1 TFAN-25C05-1 φ25 5 BK7 λ Polished
TFA-25C05-4 TFAN-25C05-4 φ25 5 BK7 λ/4 Polished
TFA-25C05-10 TFAN-25C05-10 φ25 5 BK7 λ/10 Polished
TFA-25C05-20 TFAN-25C05-20 φ25 5 BK7 λ/20 Polished
TFAQ-25C06-20 TFAQN-25C06-20 φ25 6 Synthetic Fused Silica λ/20 Polished
TFA-25.4C05-4 − φ25.4 5 BK7 λ/4 Polished
TFA-25.4C05-10 TFAN-25.4C05-10 φ25.4 5 BK7 λ/10 Polished
TFAQ-25.4C06-20 − φ25.4 6 Synthetic Fused Silica λ/20 Polished
TFA-30C05-1 TFAN-30C05-1 φ30 5 BK7 λ Polished
TFA-30C05-4 TFAN-30C05-4 φ30 5 BK7 λ/4 Polished
TFA-30C05-10 TFAN-30C05-10 φ30 5 BK7 λ/10 Polished
TFA-30C05-20 TFAN-30C05-20 φ30 5 BK7 λ/20 Polished
TFAQ-30C06-20 TFAQN-30C06-20 φ30 6 Synthetic Fused Silica λ/20 Polished
TFA-40C06-1 TFAN-40C06-1 φ40 6 BK7 λ Polished
TFA-40C06-4 TFAN-40C06-4 φ40 6 BK7 λ/4 Polished
TFA-40C06-10 TFAN-40C06-10 φ40 6 BK7 λ/10 Polished
TFA-40C06-20 TFAN-40C06-20 φ40 6 BK7 λ/20 Polished
TFAQ-40C08-20 TFAQN-40C08-20 φ40 8 Synthetic Fused Silica λ/20 Polished
TFA-50C08-1 TFAN-50C08-1 φ50 8 BK7 λ Polished
TFA-50C08-4 TFAN-50C08-4 φ50 8 BK7 λ/4 Polished
TFA-50C08-10 TFAN-50C08-10 φ50 8 BK7 λ/10 Polished
TFA-50C08-20 TFAN-50C08-20 φ50 8 BK7 λ/20 Polished
TFAQ-50C10-20 TFAQN-50C10-20 φ50 10 Synthetic Fused Silica λ/20 Polished
TFA-50.8C08-10 − φ50.8 8 BK7 λ/10 Polished
TFA-60C10-1 TFAN-60C10-1 φ60 10 Hard glass λ Polished
TFA-60C10-4 TFAN-60C10-4 φ60 10 Hard glass λ/4 Polished
TFA-60C10-10 TFAN-60C10-10 φ60 10 Hard glass λ/10 Polished
TFA-60C10-20 TFAN-60C10-20 φ60 10 Hard glass λ/20 Polished
TFA-80C12-1 TFAN-80C12-1 φ80 12 Hard glass λ Polished
TFA-80C12-4 TFAN-80C12-4 φ80 12 Hard glass λ/4 Polished
TFA-80C12-10 TFAN-80C12-10 φ80 12 Hard glass λ/10 Polished
TFA-80C12-20 TFAN-80C12-20 φ80 12 Hard glass λ/20 Polished
TFA-100C15-1 TFAN-100C15-1 φ100 15 Hard glass λ Polished
TFA-100C15-4 TFAN-100C15-4 φ100 15 Hard glass λ/4 Polished
TFA-100C15-10 TFAN-100C15-10 φ100 15 Hard glass λ/10 Polished
TFA-130C18-1 TFAN-130C18-1 φ130 18 Hard glass λ Polished
TFA-130C18-4 TFAN-130C18-4 φ130 18 Hard glass λ/4 Polished
TFA-130C18-10 TFAN-130C18-10 φ130 18 Hard glass λ/10 Polished
TFA-150C20-1 TFAN-150C20-1 φ150 20 Hard glass λ Polished
TFA-150C20-4 TFAN-150C20-4 φ150 20 Hard glass λ/4 Polished
TFA-150C20-10 TFAN-150C20-10 φ150 20 Hard glass λ/10 Polished
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Compatible Optic Mounts
MHG-MP12.7-NL / MHG-HS25-NL, -HS30-NL / MHG-MP50-NL,-MP50.8-NL / MAD-30-10 + MHB-30M / BSHL-15-2 / MHF-20
MHAN-40S, -60S / MHA-80S, -100S, -130S, -150S
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
TOKYO TEL.03-5638-6551 FAX.03-5638-6550 OSAKA TEL.06-6307-4835 FAX.06-6307-4834 KYUSHU TEL.092-481-4300 FAX.092-481-4310
B031

Optics & Optical Coatings
Aluminum Mirrors
TFA/TFAN/TFAQ/TFAQN/TFAE/OPBA/OPSQA
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
UV Enhanced Aluminum Flat Mirrors
Part Number
Square
Al+MgF2 (partially Al+SiO)
Part Number
Al only
Part Number
Length A
[mm]
Thickness t
[mm]
W3403
Material Surface Flatness Rear Surface
TFA-10S03-10 TFAN-10S03-10 □10 3 BK7 λ/10 Ground
TFA-10S05-10 TFAN-10S05-10 □10 5 BK7 λ/10 Ground
TFA-10S05-20 TFAN-10S05-20 □10 5 BK7 λ/20 Ground
TFAQ-10S06-20 TFAQN-10S06-20 □10 6 Synthetic fused silica λ/20 Ground
TFA-12.7S03-4 − □12.7 3 BK7 λ/4 Ground
TFA-12.7S03-10 − □12.7 3 BK7 λ/10 Ground
TFA-15S03-4 TFAN-15S03-4 □15 3 BK7 λ/4 Ground
TFA-15S03-10 TFAN-15S03-10 □15 3 BK7 λ/10 Ground
TFA-15S05-4 TFAN-15S05-4 □15 5 BK7 λ/4 Ground
TFA-15S05-10 TFAN-15S05-10 □15 5 BK7 λ/10 Ground
TFA-15S05-20 TFAN-15S05-20 □15 5 BK7 λ/20 Ground
TFAQ-15S06-20 TFAQN-15S06-20 □15 6 Synthetic fused silica λ/20 Ground
TFA-20S03-4 TFAN-20S03-4 □20 3 BK7 λ/4 Ground
TFA-20S03-10 TFAN-20S03-10 □20 3 BK7 λ/10 Ground
TFA-20S05-4 TFAN-20S05-4 □20 5 BK7 λ/4 Ground
TFA-20S05-10 TFAN-20S05-10 □20 5 BK7 λ/10 Ground
TFA-20S05-20 TFAN-20S05-20 □20 5 BK7 λ/20 Ground
TFAQ-20S06-20 TFAQN-20S06-20 □20 6 Synthetic fused silica λ/20 Ground
TFA-25S05-1 TFAN-25S05-1 □25 5 BK7 λ Ground
TFA-25S05-4 TFAN-25S05-4 □25 5 BK7 λ/4 Ground
TFA-25S05-10 TFAN-25S05-10 □25 5 BK7 λ/10 Ground
TFA-25S05-20 TFAN-25S05-20 □25 5 BK7 λ/20 Ground
TFAQ-25S06-20 TFAQN-25S06-20 □25 6 Synthetic fused silica λ/20 Ground
TFA-30S05-1 TFAN-30S05-1 □30 5 BK7 λ Ground
TFA-30S05-4 TFAN-30S05-4 □30 5 BK7 λ/4 Ground
TFA-30S05-10 TFAN-30S05-10 □30 5 BK7 λ/10 Ground
TFA-30S05-20 TFAN-30S05-20 □30 5 BK7 λ/20 Ground
TFAQ-30S06-20 TFAQN-30S06-20 □30 6 Synthetic fused silica λ/20 Ground
TFA-40S06-1 TFAN-40S06-1 □40 6 Hard glass λ Polished
TFA-40S06-4 TFAN-40S06-4 □40 6 Hard glass λ/4 Polished
TFA-40S06-10 TFAN-40S06-10 □40 6 Hard glass λ/10 Polished
TFA-40S06-20 TFAN-40S06-20 □40 6 Hard glass λ/20 Polished
TFA-50S08-1 TFAN-50S08-1 □50 8 Hard glass λ Polished
TFA-50S08-4 TFAN-50S08-4 □50 8 Hard glass λ/4 Polished
TFA-50S08-10 TFAN-50S08-10 □50 8 Hard glass λ/10 Polished
TFA-50S08-20 TFAN-50S08-20 □50 8 Hard glass λ/20 Polished
TFA-60S10-1 TFAN-60S10-1 □60 10 Hard glass λ Polished
TFA-60S10-4 TFAN-60S10-4 □60 10 Hard glass λ/4 Polished
TFA-60S10-10 TFAN-60S10-10 □60 10 Hard glass λ/10 Polished
TFA-60S10-20 TFAN-60S10-20 □60 10 Hard glass λ/20 Polished
TFA-80S12-1 TFAN-80S12-1 □80 12 Hard glass λ Polished
TFA-80S12-4 TFAN-80S12-4 □80 12 Hard glass λ/4 Polished
TFA-80S12-10 TFAN-80S12-10 □80 12 Hard glass λ/10 Polished
TFA-80S12-20 TFAN-80S12-20 □80 12 Hard glass λ/20 Polished
TFA-100S15-1 TFAN-100S15-1 □100 15 Hard glass λ Polished
TFA-100S15-4 TFAN-100S15-4 □100 15 Hard glass λ/4 Polished
TFA-100S15-10 TFAN-100S15-10 □100 15 Hard glass λ/10 Polished
TFA-130S18-1 TFAN-130S18-1 □130 18 Hard glass λ Polished
TFA-130S18-4 TFAN-130S18-4 □130 18 Hard glass λ/4 Polished
TFA-130S18-10 TFAN-130S18-10 □130 18 Hard glass λ/10 Polished
TFA-150S20-1 TFAN-150S20-1 □150 20 Hard glass λ Polished
TFA-150S20-4 TFAN-150S20-4 □150 20 Hard glass λ/4 Polished
TFA-150S20-10 TFAN-150S20-10 □150 20 Hard glass λ/10 Polished
Compatible Optic Mounts
CHA-25, -60, -130 / LHA-150
Wavelength Range
[nm]
Reflectance
[%]
Diameter φD
[mm]
Tickness t
[mm]
Material Surface Flatness Rear Surface
TFAE-12.7C05-10 170 − 400 > average 85 φ12.7 5 BK7 λ/10 Ground
TFAE-25.4C05-10 170 − 400 > average 85 φ25.4 5 BK7 λ/10 Polished
TFAE-30C05-10 170 − 400 > average 85 φ30 5 BK7 λ/10 Polished
TFAE-50C08-10 170 − 400 > average 85 φ50 8 BK7 λ/10 Polished
TFAE-12.7C05-10-550 400 − 700 > average 85 φ12.7 5 BK7 λ/10 Polished
TFAE-25.4C05-10-550 400 − 700 > average 85 φ25.4 5 BK7 λ/10 Polished
TFAE-30C05-10-550 400 − 700 > average 85 φ30 5 BK7 λ/10 Polished
Catalog
Code
Catalog
Code
W3405
B032
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Rectangle
Al+MgF2 (partially Al+SiO)
Part Number
Al only
Part Number
Length A×B
[mm]
Thickness t
[mm]
Material Surface Flatness Rear Surface
TFA-1015R03-4 TFAN-1015R03-4 10×15 3 BK7 λ/4 Ground
TFA-1015R03-10 TFAN-1015R03-10 10×15 3 BK7 λ/10 Ground
TFA-1015R05-4 TFAN-1015R05-4 10×15 5 BK7 λ/4 Ground
TFA-1015R05-10 TFAN-1015R05-10 10×15 5 BK7 λ/10 Ground
TFA-1015R05-20 TFAN-1015R05-20 10×15 5 BK7 λ/20 Ground
TFAQ-1015R06-20 TFAQN-1015R06-20 10×15 6 Synthetic fused silica λ/20 Ground
TFA-1525R03-4 TFAN-1525R03-4 15×25 3 BK7 λ/4 Ground
TFA-1525R03-10 TFAN-1525R03-10 15×25 3 BK7 λ/10 Ground
TFA-1525R05-4 TFAN-1525R05-4 15×25 5 BK7 λ/4 Ground
TFA-1525R05-10 TFAN-1525R05-10 15×25 5 BK7 λ/10 Ground
TFA-1525R05-20 TFAN-1525R05-20 15×25 5 BK7 λ/20 Ground
TFAQ-1525R06-20 TFAQN-1525R06-20 15×25 6 Synthetic fused silica λ/20 Ground
TFA-2030R05-1 TFAN-2030R05-1 20×30 5 BK7 λ Ground
TFA-2030R05-4 TFAN-2030R05-4 20×30 5 BK7 λ/4 Ground
TFA-2030R05-10 TFAN-2030R05-10 20×30 5 BK7 λ/10 Ground
TFA-2030R05-20 TFAN-2030R05-20 20×30 5 BK7 λ/20 Ground
TFAQ-2030R06-20 TFAQN-2030R06-20 20×30 6 Synthetic fused silica λ/20 Ground
TFA-2535R05-1 TFAN-2535R05-1 25×35 5 BK7 λ Ground
TFA-2535R05-4 TFAN-2535R05-4 25×35 5 BK7 λ/4 Ground
TFA-2535R05-10 TFAN-2535R05-10 25×35 5 BK7 λ/10 Ground
TFA-2535R05-20 TFAN-2535R05-20 25×35 5 BK7 λ/20 Ground
TFAQ-2535R06-20 TFAQN-2535R06-20 25×35 6 Synthetic fused silica λ/20 Ground
TFA-3040R06-1 TFAN-3040R06-1 30×40 6 Hard glass λ Polished
TFA-3040R06-4 TFAN-3040R06-4 30×40 6 Hard glass λ/4 Polished
TFA-3040R06-10 TFAN-3040R06-10 30×40 6 Hard glass λ/10 Polished
TFA-3040R06-20 TFAN-3040R06-20 30×40 6 Hard glass λ/20 Polished
TFAQ-3040R08-20 TFAQN-3040R08-20 30×40 8 Hard glass λ/20 Polished
TFA-4050R08-1 TFAN-4050R08-1 40×50 8 Hard glass λ Polished
TFA-4050R08-4 TFAN-4050R08-4 40×50 8 Hard glass λ/4 Polished
TFA-4050R08-10 TFAN-4050R08-10 40×50 8 Hard glass λ/10 Polished
TFA-4050R08-20 TFAN-4050R08-20 40×50 8 Hard glass λ/20 Polished
TFA-5060R10-1 TFAN-5060R10-1 50×60 10 Hard glass λ Polished
TFA-5060R10-4 TFAN-5060R10-4 50×60 10 Hard glass λ/4 Polished
TFA-5060R10-10 TFAN-5060R10-10 50×60 10 Hard glass λ/10 Polished
TFA-5060R10-20 TFAN-5060R10-20 50×60 10 Hard glass λ/20 Polished
TFA-6080R12-1 TFAN-6080R12-1 60×80 12 Hard glass λ Polished
TFA-6080R12-4 TFAN-6080R12-4 60×80 12 Hard glass λ/4 Polished
TFA-6080R12-10 TFAN-6080R12-10 60×80 12 Hard glass λ/10 Polished
TFA-6080R12-20 TFAN-6080R12-20 60×80 12 Hard glass λ/20 Polished
TFA-80100R15-1 TFAN-80100R15-1 80×100 15 Hard glass λ Polished
TFA-80100R15-4 TFAN-80100R15-4 80×100 15 Hard glass λ/4 Polished
TFA-80100R15-10 TFAN-80100R15-10 80×100 15 Hard glass λ/10 Polished
Catalog
Code
W3404
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
High Parallelism
Part Number
Diameter φD
[mm]
Thickness t
[mm]
Material
Surface Flatness
OPBA-10C05-10 φ10 5 BK7 λ/10
OPBA-15C05-10 φ15 5 BK7 λ/10
OPBA-20C05-10 φ20 5 BK7 λ/10
OPBA-25C05-10 φ25 5 BK7 λ/10
OPBA-30C05-10 φ30 5 BK7 λ/10
OPBA-40C06-10 φ40 6 BK7 λ/10
OPBA-50C08-10 φ50 8 BK7 λ/10
OPBA-60C10-10 φ60 10 BK7 λ/10
OPSQA-10C05-10 φ10 5 Synthetic fused silica λ/10
OPSQA-15C05-10 φ15 5 Synthetic fused silica λ/10
OPSQA-20C05-10 φ20 5 Synthetic fused silica λ/10
OPSQA-25C05-10 φ25 5 Synthetic fused silica λ/10
OPSQA-30C05-10 φ30 5 Synthetic fused silica λ/10
Catalog
Code
W3407
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
TOKYO TEL.03-5638-6551 FAX.03-5638-6550 OSAKA TEL.06-6307-4835 FAX.06-6307-4834 KYUSHU TEL.092-481-4300 FAX.092-481-4310
B033

Optics & Optical Coatings
Large Aluminum Mirrors
TFAEFL
Catalog
Code
W3177
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
It is a mirror of aluminum coating on one side of the substrate. As a line up, there are mirrors of
large size of 200mm or more.
◦For visible and near-infrared light applications.
◦For large aperture optical system.
Specifications
Material
Coating
Clear aperture
Rear surface
Surface Quality (Scratch−Dig)
Float glass (Soda-Lime glass)
Al + Dielectric multi-layer coating
90% of Actual Aperture
Glossy surface
60−40
Manual
Stages
Guide
Actuators
▶Please contact our International Sales Division for customized
products.
▶For the holder to fix the mirror, please contact our International Sales
Division.
Motoeized
Stages
Attention
Light
Sources
Index
Schematic
Front surface:
Al + Dielectric multi-layer coating
Rear surface: Glossy surface
▶It is delivered in a state of protective film attached to the coated
surface. Before use, please use it after removal of the protective film.
▶When a laser is transmitted with multiple mirrors installed, there will
be a loss large amount of light caused by the absorption of the
aluminium coating. Please use dielectric multi-layer mirrors (TFM) for
improved performance.
Guide
Mirrors
Beamsplitters
Outline Drawing
(in mm)
Polarizers
Lenses
A
●Tolerance
Length A ±0.3
Chamfer C0.6 – C1
Multi-Element Optics
Filters
A 6±0.4
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Specifications
Part Number
Wavelength Range
[nm]
Reflectance
Length A
[mm]
Surface Flatness
TFAEFL-200S06-P 400 – 700 > average 90 200 4 – 6λ (Within φ25.4)
TFAEFL-250S06-P 400 – 700 > average 90 250 4 – 6λ (Within φ25.4)
TFAEFL-300S06-P 400 – 700 > average 90 300 4 – 6λ (Within φ25.4)
Typical Reflectance Data
R: Reflectance
400 – 700nm 200 – 1200nm
Incident angle 45° Incident angle 45°
100
100
[%]
80
60
40
[%]
80
60
40
20
20
0
400 450 500 550 600 650 700
λ [nm]
0
200
300 400 500 600 700 800 900 1000 1100 1200
λ [nm]
B034
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Reasonable Aluminum Flat Mirrors
S-TFA
Catalog
Code
W3178
For an illumination optical system and a simple experiment, it is not requested the low-scratch polishing
for a laser. Reflectance and surface flatness is the same as aluminum mirrors (TFA) for a laser.
◦The dirt on the surface of the mirror can be wiped because the scratch-resistant protection is coated on the aluminum coating.
◦Reflectance of less variation can be obtained in a wide wavelength range from visible to near-infrared.
Specifications
Material
BK7
Coating
Al + MgF2
Parallelism

Optics & Optical Coatings
Ellipsoidal mirror
TCEA
Catalog
Code
W3179
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
In general, ellipsoid has two focal points and the light passes through one focal point also passes
through the other focal point after being reflected by the elliptical surface. By using this principle,
if one light source is put on one focal point, it is possible to collect light at the other focal point.
It is used to incident a light of lamp into optical fiber or light guide.
◦High condensing performance is obtained by precision aspheric surface processing.
◦It can be used in a long-term stability because it is given a protective scratch-resistant coating over aluminum.
◦Customer can select a mirror to suit specification from among the wide variety of products which are classified in the
focal position and outer diameter.
Specifications
Material Tempax ®
Coating
Al + SiO2
Tempax ® is a registered trademark of SCHOTT AG company.
Guide
▶It is also available for product which is not listed in the catalog such
as focal length, outer diameter, hole size, and so on.
▶It is also available for parabolic TCPA mirror, to project the light from
the first focal point to infinity. B037
Light
Sources
Index
Schematic
Attention
▶The focus is not available on the second focal point when using a
light source with directivity, because the light is not reflected by the
mirror surface.
▶Brightness distribution if away from the second focal point, may
result in the distribution of ring-shaped.
Light source
Guide
Detector
Mirrors
Beamsplitters
Polarizers
Condensing position
Lenses
Multi-Element Optics
Filters
Prisms
Outline Drawing
B
(in mm)
●Tolerance
Diameter φD +0
−0.5
100
Typical Reflectance Data
R: Reflectance
Incident angle 0°
Substrates/Windows
80
Optical Data
Maintenance
φD
φC
First Focal length
A
Second Focal length
[%]
60
40
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Specifications
Part Number
(H)
Ma
Mb
Dimension
φD
[mm]
Thickness*
H
[mm]
Hole dimension
φC
[mm]
0
250 400 600 800 1000 1200 1400
Ma
[mm]
Mb
[mm]
First
Focal length
A
[mm]
Second
Focal length
B
[mm]
TCEA-64C-11/78-SH18 φ64 44 φ18 31 36 11 78
TCEA-76C-13.5/120-SH18 φ76 42 φ18 25 81.5 13.5 120
TCEA-86C-14/134-SH20 φ86 46 φ20 32 88 14 134
TCEA-105C-22/145-SH27 φ105 44 φ27 20 103 22 145
TCEA-113C-17/272-SH27 φ113 54 φ27 36 219 17 272
TCEA-124C-23/195-SH25 φ124 56.5 φ25 32.6 139.4 23 195
TCEA-128C-18/288-SH31 φ128 67 φ31 50 220 18 288
TCEA-148C-28/252-SH30 φ148 63 φ30 34.6 189.4 28 252
* The thickness “H” is design value and there is a possibility of individual variability in the actual product. It is Not guaranteed value.
20
λ [nm]
B036
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Paraboloid mirror
TCPA
Catalog
Code
W3180
TCPA is curved mirror that converts diverging light from a point of light source into parallel light.
By making the paraboloid a curved surface, it is possible to retrieve parallel light more efficiently
than spherical concave mirror. It is used as a lamp reflector of the lamp house of the microscope
as an example.
◦It is obtained high performance condensing by precision aspheric surface processing.
◦It can be used in a long-term stability because it is given a protective scratch-resistant coating over aluminum.
◦It is easy to position the light source at the focusing point because there is a hole on the axis of the paraboloid.
◦By entering the thick parallel light, it is available to collect the light on one point.
Specifications
Material Tempax ®
Coating
Al + SiO2
Tempax ® is a registered trademark of SCHOTT AG company.
Guide
▶It is also available for product which is not listed in the catalog such
as focal length, outer diameter, hole size, and so on.
▶It is also available for ellipsoidal TCEA mirror for focusing light of the
lamp at one point.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Schematic
Parabolic
mirror
Light source
Attention
▶Light does not reach to the mirror surface when high directivity
source is placed at focal point, so it is not available to get the effect
of paraboloid mirror.
▶Light near the optical axis center is not reflected by the hole in the
mirror, there is a case that intensity distribution of the parallel light
becomes ring-shaped.
▶When focusing the light emitted from a parabolic mirror by the lens ,
it is not focused at one point by the influence of light incident on the
lens directly from the lamp.
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Parallel light
Lenses
Multi-Element Optics
Outline Drawing
(in mm)
Typical Reflectance Data
R: Reflectance
Filters
H
●Tolerance
Diameter φD +0
−0.5
Hole diameter φC +0
−0.5
Focal length ±1%
100
80
Incident angle 0°
Prisms
Substrates/Windows
Optical Data
[%]
60
Maintenance
φD
φC
40
Specifications
Part Number
f
Dimension
φD
[mm]
Focal length
f
[mm]
0
250 400 600 800 1000 1200 1400
Thickness*
H
[mm]
Hole dimension
φC
[mm]
TCPA-100C-12.5-SH18 φ100 12.5 46 φ18
TCPA-105C-15-SH23 φ105 15 42 φ23
TCPA-152C-17-SH30 φ152 17 76.5 φ30
TCPA-152C-30-SH35 φ152 30 44.5 φ35
* The thickness “H” is design value and there is a possibility of individual variability in the actual product. It is Not guaranteed value.
20
λ [nm]
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
TOKYO TEL.03-5638-6551 FAX.03-5638-6550 OSAKA TEL.06-6307-4835 FAX.06-6307-4834 KYUSHU TEL.092-481-4300 FAX.092-481-4310
B037

Optics & Optical Coatings
Gold Flat Mirrors
TFG/TFGS
Gold (AU) coated reflection mirrors have high reflectance in a wide infrared range.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦Chromium (Cr) is deliberately undercoated to better reinforce the adhesion of gold to the substrate.
◦Gold mirrors with silicon substrates have higher durability than glass because gold coating adheres much stronger to
silicon and has a higher thermal conductivity. (thermal conductivity of silicon is 111 times better compared to glass)
Specifications
BK7
Material
Hard glass (Pyrex ® etc.)
Silicon crystal
Coating
Cr (chrome) + Au (Gold)
Parallelism

Catalog
Code
W3011
■Gold Flat Mirrors
Circle
Part Number
Dimension φD
[mm]
Thickness t
[mm]
(at 632.8nm)
Surface Flatness
(at 10.6µm)
Material
Rear Surface
TFG-20C05-10 φ20 5 λ/10 λ/160 BK7 Ground
TFG-25C05-10 φ25 5 λ/10 λ/160 BK7 Polished
TFG-30C05-10 φ30 5 λ/10 λ/160 BK7 Polished
TFG-40C06-10 φ40 6 λ/10 λ/160 BK7 Polished
TFG-50C08-10 φ50 8 λ/10 λ/160 BK7 Polished
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Square
Part Number
Length A
[mm]
Thickness t
[mm]
(at 632.8nm)
Surface Flatness
(at 10.6µm)
Material
Rear Surface
TFG-20S05-10 □20 5 λ/10 λ/160 BK7 Ground
TFG-25S05-10 □25 5 λ/10 λ/160 BK7 Ground
TFG-30S05-10 □30 5 λ/10 λ/160 BK7 Ground
TFG-50S08-10 □50 8 λ/10 λ/160 Hard glass Polished
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
■Gold Silicon Mirrors
Circle
Part Number
Dimension φD
[mm]
Thickness t
[mm]
(at 632.8nm)
Surface Flatness
(at 10.6µm)
Material
Rear Surface
TFGS-30C03-2 φ30 3 λ λ/16 Silicon crystal Ground
TFGS-40C04-2 φ40 4 λ λ/16 Silicon crystal Ground
TFGS-50C05-2 φ50 5 λ λ/16 Silicon crystal Ground
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Compatible Optic Mounts
MHG-HS25, -HS30 / MHG-MP50 / MHF-20 / MHAN-40M
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TOKYO TEL.03-5638-6551 FAX.03-5638-6550 OSAKA TEL.06-6307-4835 FAX.06-6307-4834 KYUSHU TEL.092-481-4300 FAX.092-481-4310
B039

Optics & Optical Coatings
Silver Mirrors
TFAG
Catalog
Code
W3182
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Silver (Ag) coated reflection mirrors have high reflectance in a wide range from visible to infrared
wavelength.
Since it is coated with a protective layer on the silver, it can be used for a long term without oxidation.
◦For the wavelength range from the visible to infrared, higher reflectance than aluminum mirror can be obtained.
◦Incident dependence is smaller than the dielectric multilayer coating, it can use for the placement of various incident angles.
◦Since it is coated by protective layer, a scratch hardly occurs even if it is rubbed with a cloth.
Specifications
Material
BK7
Coating
Ag + Dielectric multi-layer coating
Wavelength Range
450 – 2000nm
Reflectance > average 97.5%
Surface Flatness λ/10
Parallelism

Contact sheet
Contact sheet for Special Order for Mirror
Affiliation
(Organization Name)
Department
Country/Address
Name &
Designation
Drawing Number
Desired
Delivery Date
Substrates
■Estimation ■Order
Material □ BK7 □ Synthetic fused silica □ Hard Glass □ Other ( )
Quantity
Rear Surface
Dimensions
If you do not specify
a dimension tolerance
is outside the standard
tolerance.
Specifications
□ Al only □ Al + MgF2 □ Al + SiO □ Al + Dielectric coating
of Total □ Metallic Coating
Reflection Coat
□ Ag + Dielectric coating □ Cr + Au □ Pt □ Other ( )
Select metallic
coating or dielectric Dielectric multi-layer
multi-layer coating. □ coating
Wavelength Range λ = nm Incident angle = °± °
Wavelength Used λ = nm
Type
Specifications
of Light
Source Used
Other
□ Ground
□ Polished
Incident angle
□ No object
Polarization Conditions
= °
Name
TEL FAX E-mail
Output
or
Energy
φA t b
t
Laser Damage Threshold
(at λ632.8nm)
Parallelism
If you are using a substrate of standard product, please fill in the product number.
* If you specify a standard product of the substrate, it is not necessary to fill in
fields marked with .
(enter only when it is necessary)
Beam size
* Write more detailed specifications here. (Rough illustration is acceptable.)
W
Budget
a
φA
a
b
t
Date
□ To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
(Tentative name is okay)
Estimate □ Yes: by Date □ No
JP Yen
mm
mm
mm
mm
mm
J Pulse width s Repetition frequency Hz
If nothing is specified, circular polarized light or
45° direction of lineraly polarization are set.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Sigma Koki Co., Ltd.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
TOKYO TEL.03-5638-6551 FAX.03-5638-6550 OSAKA TEL.06-6307-4835 FAX.06-6307-4834 KYUSHU TEL.092-481-4300 FAX.092-481-4310
B041

Optics & Optical Coatings
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Super Mirror
Femtosecond Laser
Frameless
Accuracy Guarantee
High Power
Ultra Broadband
Dielectric Coating
Aluminum Coating
Gold Coating
Contact sheet for laser cavity mirror
□ To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Affiliation
(Organization Name)
Department
Substrates
Sigma Koki Co., Ltd.
Concave Mirror
(rear mirror)
Flat Mirror
(output mirror)
■Estimation ■Order
Material □ BK7 □ Synthetic fused silica □ Other ( )
Quantity
Specifications
of Coating
Flat Mirror Type Concave Mirror Type
Dielectric
multi-layer
coating
φA
φA
Standard
Curvature
Radius [mm]
Wavelength
Used
Reflective
Coating
tc
10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90, 100, 120,
150, 200, 250, 300, 400, 500, 600, 700, 800, 1000, 1500,
2000, 2500, 3000, 4000, 5000, 10000, 20000, 30000
Incident
λ = nm
angle
= °± °
λ = for
t
te
r
nm
Name
TEL FAX E-mail
Country/Address
Name &
Designation
Drawing Number
Desired
Delivery Date
Dimensions
If you do not specify
a dimension tolerance
is outside the standard
tolerance.
Estimate
* The back is basically a
polished surface.
* The back is basically a
polished surface.
If you are using a substrate of standard product, please fill in the
product number.
* If you specify a standard product of the substrate, it is not
necessary to fill in fields marked with .
Radius of curvature
φA
t
mm
Laser Damage Threshold
φA
te
tc
r
Date
□ Yes: by Date
(at λ632.8nm)
Parallelism
(enter only when it is necessary)
Reflectance
(Tentative name is okay)
Budget JP Yen
mm
mm
mm
mm
mm
(Caution)
In other than the above
curvature radius, tooling
costs may be required.
R =
□ No
or more
Laser cavity mirrors for the laser oscillator used
in coating technology and high-quality
high-precision polishing technology are required.
In accordance with the specifications received
from customers, we manufacture high quality
mirror cavity with a high degree of accuracy.
We will propose to use a substrate such as a
mirror that has been standardized, the method
that best meets your budget.
To confirm the specifications for the quotation,
we may contact to the customer.
B042
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Beamsplitters
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Beamsplitters
I N D E X
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Beamsplitters selection Guide
A beamsplitter is an optic that splits light into 2 directions.
The split ratio of light transmittance and reflectance is 1:1 and is called a half mirror.
The 2 forms of beamsplitters are cube and plate type.
Type Affected products Features Application
Plate
Cube
Reflected light
Good fit for large beam size applications at a reasonable price.
Advantages are: minimal back reflection, compact light-path
as compared to cube type beamsplitters and low chromatic
dispersion.
There may be a slight offset of the transmitted beam due to
refraction.
For 45 degrees incident application, the clear aperture would
be elliptical.
There may be some vignetting on angle of incidence.
Can be applied at its maximum effective area from any
incident direction, easy to be applied in optical design and
simple for optical set up adjustment
High cost and high weight for large beam size application.
Feedback light at less than 1% may happen.
The transmittance light through the cube is longer than a plate
type, the chromatic dispersion is higher.
Eliminates the problem of beam deviation.
Large beam size optical set up.
Used in large beam size optical
layouts.
Used for monitoring optical systems,
split beams into different wavelengths,
polarizations or intensities.
For a compact size optical set up.
For high accuracy experiment and
optical set up usage.
Plate Cube Incident angle 45° Eclipse of beam
of half mirror
Feedback laser or
optical feedback
Effective
Diameter
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Stray
light
Transmitted light
Parallel shift of
the beam by refraction
Stray light
Surface reflection
Beam
Diameter
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Experimentation with laser (Linear polarized light)
Lasers are used to evaluate our half mirrors and with the polarization properties of the laser, we are able to check the
change of light splitting ratios.
Multi-Element Optics
Filters
Prisms
Type Affected products Application
Non-polarizing
(NPCH)
B046
For high accuracy laser experiment with accurate light
ratios at any polarization levels.
Experimention with laser
(Linear polarized light)
The light ratios at 1:1 stay stable even
when the polarization situation changes.
No power loss.
Polarization
dependency
Small
Substrates/Windows
Optical Data
Maintenance
Hybrid
(HBCH)
B048
For multi-wavelength light splitting solutions.
Light ratio at 1:1 from any specified light
incident direction will remain similar.
Selection Guide
Half Mirror Cube
Half Mirror Plate
Laser Line Plate
(PSMH)
B055
Large beam size, multi mirror optical set up with small
power light source and supports high power laser light
splitting.
Polarization at 45 degree (AOI) or circle
polarization light with no power loss
detected.
Application Note
Beamsplitters
Harmonic Separator
Chromium Plate
(PSCH)
B058
Large beam size and observation optical system.
Polarization at 45 degree (AOI) or circle
polarization light with 36% absorption
of light power.
Beam Samplers
Others
Chromium Cube
(CSCH)
B049
For basic laser experiments and compact optical
solutions. Great entry level price.
Polarization at 45 degree (AOI) or circle
polarization light with 40% absorption
of light power.
Dielectric Cube
(CSMH)
B050
For general white light and non-polarizing light i.e. LED
light splitting solutions.
Polarization at 45 degree (AOI) or circle
polarization light with no power loss
detected.
Large
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B045

Optics & Optical Coatings
Non-polarizing Cube Half Mirrors
NPCH
Application
Systems
Optics &
Optical
Coatings
This is a half mirror that has an even 1:1 ratio of reflection and transmission in both linear polarized
light and normal light source.
◦The reflection to transmission ratio is 1:1 regardless of the polarization condition from the input beam.
◦Depending on polarization, the reflection to transmission ratio of these products does not vary.
◦The laser line corresponds to various wavelengths.
◦Narrowband multi-layer AR coatings are applied to the four surfaces of the cube.
◦Because the effective bandwidth of a non-polarizing coat is narrow, these products are designed for a single wavelength.
Holders
Specifications
Bases
Material
BK7, Synthetic fused silica
Surface flatness of substrate λ/4
Manual
Stages
Beam Deviation

Catalog
Code
W3012
Cube Type: Nonpolarizing
Part Number
632.8 − 1550nm
Wavelength Range
[nm]
A=B=C
[mm]
Material
Transmittance
[%]
NPCH-05-6328 632.8 5 BK7 50±5
NPCH-10-6328 632.8 10 BK7 50±5
NPCH-15-6328 632.8 15 BK7 50±5
NPCH-20-6328 632.8 20 BK7 50±5
NPCH-10-6700 670 10 BK7 50±5
NPCH-15-6700 670 15 BK7 50±5
NPCH-20-6700 670 20 BK7 50±5
NPCH-10-7800 780 10 BK7 50±5
NPCH-15-7800 780 15 BK7 50±5
NPCH-20-7800 780 20 BK7 50±5
NPCH-10-8300 830 10 BK7 50±5
NPCH-15-8300 830 15 BK7 50±5
NPCH-20-8300 830 20 BK7 50±5
NPCH-10-10640 1064 10 BK7 50±5
NPCH-15-10640 1064 15 BK7 50±5
NPCH-20-10640 1064 20 BK7 50±5
NPCH-10-13000 1300 10 BK7 50±5
NPCH-15-13000 1300 15 BK7 50±5
NPCH-20-13000 1300 20 BK7 50±5
NPCH-10-15500 1550 10 BK7 50±5
NPCH-15-15500 1550 15 BK7 50±5
NPCH-20-15500 1550 20 BK7 50±5
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Typical Transmittance Data
NPCH-2660 NPCH-3550 NPCH-4050
T [%]
100
80
60
40
20
0
230
P polarization
S polarization
240 250 260 270 280 290 300
[nm]
T [%]
NPCH-4880 NPCH-5145 NPCH-5320
T [%]
T [%]
T [%]
100
80
60
40
20
0
460
NPCH-6328
100
80
60
40
20
0
550
NPCH-8300
100
80
60
40
20
0
770 780 800
470 480 490
[nm]
600
[nm]
P polarization
S polarization
500 510 520
P polarization
S polarization
650 700
P polarization
S polarization
820 840 860 880 900
[nm]
T [%]
T [%]
T [%]
100
80
60
40
20
0
300
100
80
60
40
20
0
485490 500
NPCH-6700
100
80
60
40
20
0
620
NPCH-10640
100
80
60
40
20
0
950
320 340 360
[nm]
640
1000
P polarization
S polarization
380 400
P polarization
S polarization
510 520 530 540 550
[nm]
P polarization
S polarization
660 680 700 720
[nm]
P polarization
S polarization
1050 1100 1150 1200
[nm]
T [%] T [%] T [%] T [%]
100
80
60
T: Transmission
40
20
P polarization
S polarization
0
370 380 390 400 410 420 430 440 450
[nm]
100
80
60
40
20
0
450
NPCH-7800
100
80
60
40
20
0
720
740
NPCH-13000
100
80
60
40
20
0
1150
500
1200 1250
P polarization
S polarization
550 600 650
[nm]
P polarization
S polarization
760 780 800 820 840
[nm]
P polarization
S polarization
1300 1350 1400 1450
[nm]
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Half Mirror Cube
Half Mirror Plate
Application Note
Beamsplitters
Harmonic Separator
Beam Samplers
Others
NPCH-15500
T [%]
100
80
60
40
20
0
1400
1450 1500
P polarization
S polarization
1550 1600 1650 1700
[nm]
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B047

Optics & Optical Coatings
Catalog
Hybrid Cube Half Mirrors HBCH Code W3013
Application
Systems
Optics &
Optical
Coatings
Low polarizing cube half mirrors that can be used for broadband visible and infrared light.
Applicable for polarizing systems and lasers with multiple wavelength or visible light.
◦This hybrid coating is consisting of dielectric multi-layer and metallic coatings. The result is low polarizing and broadband.
◦As it is cube shaped, there will not be any lateral shift of the optical axis when a normal incident beam is applied. During
transmission and reflection of lights, the aperture remains unchanged.
◦Even when the orientation of linear polarization has been changed, beams are equally divided as reflected (R) : transmitted
(T) (ratio is 1:1)
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Schematic
Four surface with multi-layer anti-reflection coating.
Outline Drawing
C
B
Hypotenuse surface: Hybrid coating
* The hypotenuse of prism marked with ○ is coated.
A
Reflected light
Transmitted light
●Tolerance
A ±0.2
B ±0.2
C ±0.2
(in mm)
Specifications
Material
BK7
Surface flatness of substrate λ/4
Beam Deviation

Catalog
Chromium Cube Half Mirrors CSCH Code W3014
Chromium cube half mirrors consist of two right angle prisms. One of them is coated with
chromium (Cr) on the hypotenuse face. Half mirror divides input beam to reflectance and
transmittance in 1:1. A beamsplitter of R:T=1:1 is called “Half Mirror”.
◦Four surfaces of the cube are coated with multi-layer anti-reflection coatings
◦Approximately one third of the input beam is lost because of absorption of chromium. However these beamsplitters do
not depend on wavelength, polarization and incident angle of the input beam, and provide a highly neutral reflectivity.
◦For cube beamsplitters, unlike plate beamsplitters, beam deviations at transmission and ghosts rarely occur.
Schematic
Four surface with multi-layer anti-reflection coating.
Outline Drawing
C
Specifications
Part Number
Wavelength Range
A=B=C
[nm]
[mm]
CSCH-10-550 400 − 700 10
CSCH-15-550 400 − 700 15
CSCH-20-550 400 − 700 20
CSCH-25-550 400 − 700 25
CSCH-30-550 400 − 700 30
CSCH-40-550 400 − 700 40
CSCH-50-550 400 − 700 50
CSCH-10-800 750 − 850 10
CSCH-15-800 750 − 850 15
CSCH-20-800 750 − 850 20
CSCH-550
T [%]
100
80
60
40
B
Hypotenuse surface: Chromium coating
* The hypotenuse of prism marked with ○ is coated.
A
Reflected light
Transmitted light
●Tolerance
A ±0.2
B ±0.2
C ±0.1
P polarization
S polarization
Average
(in mm)
Specifications
Material
BK7
Surface flatness of substrate λ/4
Beam Deviation

Optics & Optical Coatings
Dielectric Cube Half Mirrors
CSMH
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Half Mirror Cube
Half Mirror Plate
Application Note
Beamsplitters
Harmonic Separator
Beam Samplers
Others
Dielectric cube half mirrors consist of two right angle prisms.
One of them is coated with dielectric multi-layer partial reflection coating on the hypotenuse face.
◦Half mirror divides input beam to reflectance and transmittance at a 1:1 ratio. A beamsplitter with R:T (1:1 ratio) is called
“Half Mirror”.
◦Four surfaces of the cube are coated with multi-layer anti-reflection coatings.
◦The loss of input beam is minimized as there is no absorption from dielectric coating. However the reflection to transmission
ratio of these dielectric cube half mirrors vary depending on wavelength, polarization and the incident angle of input
beam. These higher refraction harf mirrors show strong dependency.
Schematic
Four surface with multi-layer anti-reflection coating.
Outline Drawing
Specifications
Part Number
Hypotenuse surface: Dielectric multi-layer coating
* The hypotenuse of prism marked with ○ is coated.
Reflected light
Transmitted light
●Tolerance
A ±0.2
B ±0.2
C ±0.1
Wavelength Range
[nm]
(in mm)
Specifications
Material
BK7
Surface flatness of substrate λ/4
Beam Deviation

Catalog
Code
W3015
Typical Transmittance Data
T: Transmission
CSMH-405
T [%] T [%] T [%] T [%]
CSMH-550
CSMH-800
CSMH-1400
100
80
60
40
20
100
80
60
40
20
0
360 380 400 420 440
0
400
100
80
60
40
20
0
600
100
80
60
40
[nm]
P polarization
S polarization
Average
450 500 550 600 650 700
[nm]
700
P polarization
S polarization
Average
P polarization
S polarization
Average
800 900 1000
[nm]
P polarization
S polarization
Average
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
20
Selection Guide
0
1200
1300
1400 1500 1600
[nm]
Half Mirror Cube
Half Mirror Plate
Application Note
Beamsplitters
Harmonic Separator
Beam Samplers
Others
Compatible Optic Mounts
PLH-25, -40 / KKD-25PHRO, -40PHRO, -60PHRO / SHA-60RO
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B051

Optics & Optical Coatings
Ultra Broadband Dieletric Half Mirrors
PMH/PSMH
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Half-Mirror optics designed for use in Ultraviolet, Visible and Infrared wavelengths.
Used for both transmission and divergence of multi-wavelength laser and white light source.
Ultra broadband half-mirrors are used for spectrometry applications.
◦PMH series have 4 types of ultra-broadband optics with a recovery range from UV to IR.
◦PSMH series have 3 types of ultra-broadband optics with a recovery range from Visible to NIR, which are used for
optical communication applications.
◦Dielectric multi-layer coated optics are an excellent choice for beam deviation applications because of low absorption
capabilities.
◦Its low polarization characteristic can also be applied in beam deviation with a linear polarization laser or a laser light.
◦Sigma Koki produces plate form optics that are light weight and maintain low dispersion with less aberration.
◦Both wedge and plate type mirrors are made to have “low ghosting and low interference effect.
Specifications
Material
BK7, Synthetic fused silica
Surface Flatness λ/10
Coating
Front surface: Dielectric multi-layer coating
Rear surface: Multi-layer anti-reflection coating
Incident angle 45°
Divergence ratio
(reflectance : transmittance)
1 : 1
Surface Quality
(Scratch−Dig)
10−5
Clear aperture
90% of actual aperture
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Schematic
Incident angle 45°
Outline Drawing
φD
Front surface: Dielectric multi-layer coating
t
Front
Surface
Rear surface: Multi-layer anti-reflection coating
t
W
Rear
Surface
(in mm)
●Tolerance
Diameter φD +0
−0.1
Thickness t ±0.1
Guide
▶For customization, we can offer different sizes, wavelengths and
deviation ratios. B069
Please contact our International Sales Division.
▶For guaranteed higher reflectance accuracy and higher transmittance
optics, please contact us.
▶An arrow mark will be printed on the thick side of the wedge plate to
indicate the surface of the mirror.
Attention
▶When applying a laser linear polarized light, the direction of polarization
may affect the ratio of reflectance and transmittance. For a rigorous
divergence usage of 1:1 ratio, ensure the direction of polarization is
set to 45 degrees or use a circular polarizer.
▶When a laser light transmits through the optics, the light path may shift
by a few millimetres horizontally due to the refraction and the thickness
of the wedge plate.
▶The transmittance wavelength properties may be different if the
incident angle is other than 45 degrees.
▶Please check the arrow mark on the side of the wedge plate that
indicates the coated surface.
▶The phase difference of incident light cannot be preserved on
transmittance and reflectance light. Please use a wave plate to
compensate.
Selection Guide
Half Mirror Cube
Half Mirror Plate
Application Note
Beamsplitters
Harmonic Separator
Beam Samplers
Others
Ultra broadband
Part Number
Wavelength
Range
[nm]
Diameter
φD
[mm]
Thickness
t
[mm]
Material
Parallelism
W
Transmittance
(The average value of the P-Polarization and the S-Polarization)
[%]
Laser Damage
Threshold*
[J/cm 2 ]
PMH-25.4C03-10-25/7 250 − 700 φ25.4 3 Synthetic fused silica

Catalog
Code
W3016
Typical Transmittance Data
T: Transmission
PMH-25/7
100
PMH-3/10
100
Application
Systems
T [%]
80
60
40
T [%]
80
60
40
Optics &
Optical
Coatings
20
P polarization
S polarization
Average
20
P polarization
S polarization
Average
Holders
0
250 300 400 500 600 700
0
300 400 500 600 700 800 900 1000
[nm]
[nm]
Bases
PMH-6/18
100
80
PMH-4/20
100
80
Manual
Stages
T [%]
60
40
20
P polarization
20
P polarization
S polarization
S polarization
Average
Average
0
600 800 1000 1200 1400 1600 1800
0
400 600 800 1000 1200 1400 1600 1800 2000
[nm]
[nm]
T [%]
60
40
Actuators
Motoeized
Stages
Light
Sources
Broadband
Part Number
Wavelength
Range
[nm]
Diameter
φD
[mm]
Thickness
t
[mm]
Material
Parallelism
W
Transmittance
(The average value of the P-Polarization and the S-Polarization)
[%]
Laser Damage
Threshold*
[J/cm 2 ]
PSMH-25.4C03-10-550 400 − 700 φ25.4 3 BK7

Optics & Optical Coatings
Catalog
Thin Plate Beamsplitter MPSMH Code W3017
Application
Systems
Optics &
Optical
Coatings
Holders
Extremely thin beamsplitter.
It can be inserted into an optical light path without any beam shift or chromatic dispersion for any
light transmittance application.
◦2 choices of thickness, 300um and 90um.
◦Dielectric multi-layer optical coating with reflectance and transmittance ratios at 1:1
◦Dielectric multi-layer optical coating on the surface and AR coating on the rear to provide a mirror with no loss of power.
◦The plate if firmly held by a glass retainer to avoid thermal expansion.
◦Because of our fabrication method, it offers good durability and high resistance against vibration and with our traditional
and proven optical polishing process on silica quartz which is different from a pellicle.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Schematic
Incident angle 45°
Outline Drawing
φ16
Outer frame
φ17
0
−0.1
φ30
Rear surface: Multi-layer anti-reflection coating
Front surface: Dielectric multi-layer coating
Front
surface
1.5
4±0.1
φ20.8
Rear
surface
φ27
Protective window
Beamsplitters
(in mm)
Specifications
Material
Synthetic fused silica
Front surface: Dielectric multi-layer coating
Coating
Rear surface (45 degrees taper hole):
Multi-layer anti-reflection coating
Incident angle 45°
Transmittance
Average 50±5%
(The average value of the P-Polarization and the S-Polarization)
Divergence ratio
(reflectance : transmittance)
1 : 1
Surface Quality
(Scratch−Dig)
40−20
Clear aperture
φ10mm
Protective window: Synthetic fused silica
Material propreties Outer frame: Aluminum
Finishing: Matt black almite
Guide
▶For customization, we can offer different sizes, wavelengths and
deviation ratios. B069
Please contact our International Sales Division.
Attention
▶Thin beamsplitters are extremely thin and fragile. Special care must
be taken during cleaning and handling.
▶When removing dust from the surface, do not use optics tissue paper
to clean. Use a compress gas spray instead.
▶When applying a laser linear polarized light, the direction of polarization
may affect the ratio of reflectance and transmittance. For a rigorous
divergence usage of 1:1 ratio, ensure the direction of polarization is
set to 45 degrees or use a circular polarizer.
▶The transmittance wavelength properties may be different if the
incident angle is other than 45 degrees.
▶Avoid pushing the glass retainer as the mirror can bend or break.
When handling, please use the other metal frame.
▶The surface reflectance accuracy may deteriorate when used outside
recommended operating temperature.
▶The phase difference of incident light cannot be preserved on
transmittance and reflectance light. Please use a wave plate to
compensate.
Selection Guide
Half Mirror Cube
Half Mirror Plate
Application Note
Beamsplitters
Harmonic Separator
Beam Samplers
Others
Specifications
Part Number
Wavelength Range
[nm]
Optics Thickness
[mm]
Surface Accuracy after coating
MPSMH-30C0.3-1-550 400 − 700 0.3±0.03 Reflectance: λ Transmittance: λ
Reflectance: Polishing
MPSMH-30C0.09-1-550 400 − 700 0.09±0.01
Transmittance: Polishing
100
80
Typical Transmittance Data
T: Transmission
Compatible Optic Mounts
MHG-HS30-NL / BHAN-30S
T [%]
60
40
20
0
400
P polarization
S polarization
Average
500 600 700
800
λ [nm]
B054
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Catalog
Laser Line Plate Half Mirrors PSMH Code W3018
Laser line plate mirrors are part of plate beamsplitters that are optically coated with dielectric
multi-layer on the front surface of optical parallels or wedged substrates.
The rear surface is coated with multi-layer anti-reflection.
◦Half mirror divides input beam to reflectance and transmittance in 1:1. A beamsplitter of R:T=1:1 is called “Half Mirror”.
◦Any loss from the input beams on this product is minimized because dielectric coating has no absorption properties.
However, the input ratio of reflection to transmission depends on wavelength, polarization and incident of angle of input
beam.
◦Plate beamsplitters have beam deviations on transmission and ghost on rear surface reflections. Wedged substrates are
used to prevent ghost.
Application
Systems
Optics &
Optical
Coatings
Holders
Specifications
Bases
Material
BK7, Synthetic fused silica, CaF2
Surface Flatness λ/10 (PSMH-157 is Polished)
Front surface:
Coating
Dielectric multi-layer partial refection coating
Rear surface: Multi-layer anti-reflection coating
Incident angle 45°
Manual
Stages
Actuators
Divergence ratio
(reflectance : transmittance)
Surface Quality
(Scratch−Dig)
1 : 1
10−5 (PSMH-157: 40−20)
Motoeized
Stages
Clear aperture
Guide
90% of actual aperture
Light
Sources
Schematic
Incident angle 45°
Optical Parallel
Rear surface:
Dielectric multi-layer partial refection coating
Front surface: Dielectric multi-layer coating
▶Please contact our International Sales Division for customized products.
(Customized on size, wavelength or R:T, etc.) B069
▶We also have ultra-wideband, broadband and cube types.
▶For a guarantee in reflected wavefront error or transmitted wavefront
error, please contact our International Sales Division.
▶On most thickness surfaces, there is a thickness direction arrow
marked for wedged types.
Attention
▶Should these products do not function as a half mirror, please check
the polarization characteristics of the light source. Do note that LD
laser is linear in polarization.
▶The beam deviation at transmission of a wedged beamsplitter is large
compared to a one made of optical parallel.
▶The amount of beam deviation of a beamsplitter depends on the
thickness of the substrate and the wavelength or the incident angle
of the input beam.
▶Transmission curves are based on actual measurements and may be
different with manufacturing lots.
▶Surface flatness is the reflected wavefront distortion of the surface
prior to coating.
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Wedged Substrate
Outline Drawing
Front
Surface
t
Rear
Surface
(in mm)
●Tolerance
Diameter φD +0
−0.1
Thickness t ±0.1
Selection Guide
Half Mirror Cube
Half Mirror Plate
Application Note
φD
Beamsplitters
Harmonic Separator
t
W
Beam Samplers
Others
Compatible Optic Mounts
BHAN-30S, -50S / MHG-MP30-NL, MP50-NL
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B055

Optics & Optical Coatings
Laser Line Plate Half Mirrors
PSMH
Catalog
Code
W3018
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Laser Line
Part Number
Wavelength
Range
[nm]
Diameter
φD
[mm]
Thickness
t
[mm]
Material
Parallelism
W
Reflectance:R
Transmittance:T
(The average value of the
P-Polarization and the S-Polarization)
[%]
Laser Damage
Threshold*
[J/cm 2 ]
PSMH-30C03-P-157 157 φ30 3 CaF2

Typical Reflectance Data & Typical Transmittance Data R: Reflectance T: Transmission
PSMH-157
R [%]
70
60
P polarization
S polarization
50
Average
40
30
20
10
0
140 160 180 200 220 240 260 280 300
[nm]
PSMH-193
T [%]
100
90
80
70
60
50
40
30
20
10
0
170 180 190 200 210 220 230 240 250 260 270
[nm]
P polarization
S polarization
Average
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
PSMH-248/266
PSMH-308/355
Manual
Stages
100
80
100
80
P polarization
S polarization
Average
Actuators
T [%]
60
40
20
0
200
220
0
250 300 350 260 280 300 320 340 360 380
[nm]
P polarization
S polarization
Average
T [%]
60
40
20
[nm]
400
Motoeized
Stages
Light
Sources
Index
PSMH-405
100
80
PSMH-1064
100
80
Guide
T [%]
60
40
20
0
40
P polarization
S polarization
20
Average
0
360 380 400 420 440 900 950
[nm]
T [%]
60
P polarization
S polarization
Average
1000 1050 1100 1150 1200
[nm]
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Half Mirror Cube
Half Mirror Plate
Application Note
Beamsplitters
Harmonic Separator
Beam Samplers
Others
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B057

Optics & Optical Coatings
Catalog
Chromium Plate Half Mirrors PSCH Code W3019
Application
Systems
Optics &
Optical
Coatings
Holders
Chromium plate half mirrors are part of plate beamsplitters that are coated with chromium (Cr) on
the front surface of optical parallels or wedged substrates.
The rear surface is coated with multi-layer anti-reflection.
◦Half mirror divides input beam to reflectance and transmittance in 1:1. A beamsplitter of R:T=1:1 is called “Half Mirror”.
◦Approximately one third of the input beam is lost because of absorption of chromium. However these beamsplitters do
not depend on wavelength, polarization and incident angle of the input beam, and provide a highly neutral reflectivity.
◦Plate beamsplitters have beam deviations on transmission and ghost on rear surface reflections. Wedged substrates are
used to prevent ghost.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Schematic
Rear surface: Multi-layer anti-reflection coating
Specifications
Material
BK7
Surface Flatness λ/10
Coating
Front surface: Chromium
Rear surface: Multi-layer anti-reflection coating
Incident angle 45°
Transmittance
Average 30±5%
(The average value of the P-Polarization and the S-Polarization)
Divergence ratio
(reflectance : transmittance)
1 : 1
Laser Damage Threshold
0.25J/cm 2
(Laser pulse width 10ns, repetition frequency 20Hz)
Surface Quality
(Scratch−Dig)
40−20
Clear aperture
90% of actual aperture
Guide
▶Please contact our International Sales Division for customized products.
(Customized on size, wavelength or R:T, etc.) B069
▶For a guarantee in reflected wavefront error or transmitted wavefront
error, please contact our International Sales Division.
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Incident angle 45°
Outline Drawing
φD
Front surface: Chromium coating
Front
Surface
t
(in mm)
●Tolerance
≦φ50
Diameter φD +0
−0.1
Rear
Surface Thickness t ±0.1
●Tolerance
φ60≦
Diameter φD +0
−0.2
Thickness t ±0.2
Attention
▶The beam deviation at transmission of a wedged beamsplitter is large
compared to a one made of optical parallel.
▶The amount of beam deviation of a beamsplitter depends on the
thickness of the substrate and the wavelength or the incident angle
of the input beam.
▶Transmission curves are based on actual measurements and may be
different with manufacturing lots.
▶Surface flatness is the reflected wavefront distortion of the surface
prior to coating.
▶Be sure to wear laser safety goggles when checking optical path and
adjusting optical axis.
Optical Parallel
Wedged Substrate
Maintenance
t
W
Selection Guide
Half Mirror Cube
Half Mirror Plate
Application Note
Beamsplitters
Harmonic Separator
Beam Samplers
Others
Specifications
Part Number
Wavelength
Range
[nm]
Diameter
φD
[mm]
Thickness
t
[mm]
Parallelism
W
PSCH-25.4C03-10-550 400 − 700 φ25.4 3

Application Note
About light behaviour on a beamsplitter
A half mirror is designed with reflectance and transmission of light with a 1:1 ratio. If light incident direction and polarization
conditions change, it may impact the ratio.
Reflectance and transmittance properties of the incident light direction
■Chrome coating and multi-wavelength coating application.
Reflection properties change when light is projected onto the coated and
black surfaces.
Any configuration similar to Michelson interferometer may require both sides
to have incident light. In this case, light ratios may be unbalanced.
Choose the following set up if the light incident direction can be selected.
Incident light onto the coated surface of plate type beamsplitter.
Incident light onto the ○ mark surface for cube type beamsplitter.
If the Incident light is on the wrong surface, the specifications mentioned
in the catalogue cannot be realized.
Comparison reflectance and transmittance properties of the incident light direction in the chromium plate half mirror.
Incidence 100%
Reflection 30%
Transmission 30%
Transmission 30%
Absorption 57%
Incidence 100%
Front surface
reflection
30%
100%
Total reflection mirror
3.9% 9%
Chromium Plate Half Mirrors
Rear surface
reflection
13% Total reflection
mirror
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Absorption 40%
Reflection 13%
Index
The difference in reflectance due to the incident direction occurs when there is absorption in the coating.
It does not occur in the dielectric multilayer coating.
Large
Difference in reflectance due to the incident direction
value
Chromium Plate Hybrid Cube Laser Line Plate Chromium Cube ・ Dielectric Cube
PSCH HBCH PSMH CSCH CSMH etc
Small
value
Guide
Mirrors
Beamsplitters
The reflectance and the transmittance of a polarized light incident
■In case fo using Laser
Light emitted from the laser is linearly polarized light.
Because of this, even though it is used in the experiments
and the optical system which are not related
to the polarization, it is necessary to take into account
the polarization characteristics of the beam
splitter.
The transmittance and the reflectance may change in
accordance with the type of beamsplitter and its
polarization direction.
To split the light into a balanced light ratio, a nonpolarized
beam splitter (NPCH) is recommanded.
The polarization properties of the laser has no
influence to it.
0° Laser
Half Mirror
S polarization 40%
60%
90° P polarization 60%
45°
45°
45° linearly polarization
P + S polarization
quarter circular
wavelength plate polarization
40%
50%
50%
50%
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Half Mirror Cube
Half Mirror Plate
Application Note
Beamsplitters
Harmonic Separator
Beam Samplers
Others
elliptically
polarized light
elliptically
polarized light
50%
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B059

Optics & Optical Coatings
Catalog
Dielectric Cube Beamsplitters CSM Code W3020
Application
Systems
Optics &
Optical
Coatings
Cube beamsplitters with dielectric multi-layer coated to the oblique faces of a 45° right angle prism.
Divides beams at reflected light (R) : transmission light (T) ratio of 1:2 or 1:3.
◦Anti-reflection coating (AR coat) is applied to the incident and outgoing planes.
◦The dielectric multi-layer coating has virtually zero light absorption and very low light intensity loss. However, transmittance
and reflectance may change according to wavelength, polarization and incident angles. A higher reflectance will
occur from a higher dependence.
◦In contrast to plate type half mirrors, cube mirrors have no ghosting or transmission optical path deviation.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Schematic
Four surface with multi-layer anti-reflection coating.
Outline Drawing
C
B
Hypotenuse surface: Dielectric multi-layer coating
* The hypotenuse of prism marked with ○ is coated.
A
Reflected light
Transmitted light
●Tolerance
A ±0.2
B ±0.2
C ±0.1
(in mm)
Specifications
Material
BK7
Surface Flatness λ/4
Wavelength Range 400 − 700nm
Beam Deviation

Catalog
Dielectric Plate Beamsplitters PSM Code W3021
Plate-type beam splitters with a dielectric multi-layer coat on a parallel plate and a wedge substrate.
Divides beams at a reflected light (R) : transmission light (T) ratio of 1:2 or 1:3
The rear surface is coated with anti-reflection (AR).
◦The dielectric multi-layer coating has virtually zero light absorption and very low light intensity loss. However, transmittance
and reflectance may change according to wavelength, polarization and incident angles. A higher reflectance will
occur from a higher dependence. Some deviation of the transmission optical path or ghosting may occur. To prevent
ghosting, use wedge substrate type of beam splitters.
Schematic
Incident angle 45°
Rear surface: Multi-layer anti-reflection coating
Specifications
Material
BK7
Surface Flatness λ/10
Coating
Front surface: Dielectric multi-layer coating
Rear surface: Multi-layer anti-reflection coating
Wavelength Range 400 − 700nm
Incident angle 45°
Laser Damage Threshold
2.1J/cm 2
(Laser pulse width 10ns, repetition frequency 20Hz)
Surface Quality
(Scratch−Dig)
10−5
Clear aperture
90% of actual aperture
Guide
▶Please contact our International Sales Division for customized products.
(Customized on size, wavelength or R:T, etc.) B069
▶For a guarantee in reflected wavefront error or transmitted wavefront
error, please contact our International Sales Division.
▶Wedge type substrates have a thickness direction arrow that is
marked on most surfaces.
Attention
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Outline Drawing
φD
Front surface: Dielectric multi-layer coating
t
Front
urface
t
W
Rear
Surface
(in mm)
●Tolerance
Diameter φD +0
−0.1
Thickness t ±0.1
▶The transmission curve on the graph is based on actual measurements
and may vary from different production lots.
▶Surface flatness is the reflected wavefront distortion of the surface
prior to coating.
▶Compared to precision parallel plate type splitters, wedged substrate
type beam splitters can prevent ghosting caused by rear surface
reflection and significantly increase the displacement of the optical
path.
▶Dielectric multi-layer coated beam splitters sometimes do not
function effectively in specified division ratios. During such case, first
check the polarization characteristics of the light source (laser). Do
keep in mind that lasers used for the semiconductor field emit a linear
polarized light.
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Specifications
Part Number
Reflectance : Transmittance
Diameter
φD
[mm]
Thickness
t
[mm]
Parallelism
W
Typical Transmittance Data
Transmittance at 550nm
(The average value of the P-Polarization and the S-Polarization)
[%]
Transmittance at 400・700nm
(The average value of the P-Polarization and the S-Polarization)
[%]
PSM33-25.4C03-10-550 1 : 2 φ25.4 3

Optics & Optical Coatings
Variable Beamsplitter
Light path corrector
VBS
WSQNA/WBNA
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
With a variable beam splitter, the incident angle of a laser can be changed. The (R:T) ratios can also
be modified. This is commonly used for when adjusting the light quantity for the laser without a
variable adjustment of the light quantity or the laser to be stabilized, when weakening the light
quantity temporarily by adjusting the optical system, and when splitting to any two light quantity.
◦Since it is used a dielectric multilayer coating, it is excellent in durability and light resistance.
◦The beam shift caused by the tilt of the beam splitter can be removed by using with a correcting plate. (See how to use)
◦It can be used for arbitrary polarization. However, the transmittance characteristic depends on the polarization state.
Specifications
Material
BK7, Synthetic fused silica
Surface Flatness λ
Parallelism 90 93 95 95

Catalog
Code
Catalog
Code
W3022
W3023
Typical Transmittance Data
T: Transmission (S polarization)
VBS-266 / WSQNA-266
T [%]
T [%]
100
90
80
70
60
50
40
VBS-532 / WBNA-532
100
90
80
70
60
50
40
WSQNA-266
VBS-266
30
20
10
0
0 5 10 15 20 25 30 35 40 45 50 55 60
Incidence angle [ ° ]
WBNA-532
VBS-532
30
20
10
0
0 5 10 15 20 25 30 35 40 45 50 55 60
Incidence angle [ ° ]
VBS-355 / WSQNA-355
T [%]
VBS-1064 / WBNA-1064
T [%]
100
90
80
70
60
50
40
100
90
80
70
60
50
40
WSQNA-355
VBS-355
30
20
10
0
0 5 10 15 20 25 30 35 40 45 50 55 60
Incidence angle [ ° ]
WBNA-1064
VBS-1064
30
20
10
0
0 5 10 15 20 25 30 35 40 45 50 55 60
Incidence angle [ ° ]
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Sample of use
The variable beam splitter can be used individually. When modifying the incident angle, optics thickness and its refractive
properties, a shift may occur in the light path. To reduce this shift, we highly recommend a light path corrector. Please see
image below.
◦Place the variable beamsplitter onto a rotation stage to allow an angle adjustment.
◦Install the light path corrector onto a rotating stage.
◦Position the light path corrector at a similar angle with the variable beamsplitter on an opposite side.
◦If the reflected light of the variable beamsplitter is not used, make sure to place a light cut-off material or a beam
diffuser at the edge-end of the light.
◦The power of the reflected light from the light path corrector must be cut off at the edge-end of the light.
For part structure, please contact our International Sales Division.
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Douser
Beam diffuser
Selection Guide
Half Mirror Cube
Shift Beam
Correction plate
+ rotation stage
Half Mirror Plate
Application Note
θ
Beamsplitters
Incident laser beam
Variable beamsplitter
+ rotation stage
θ
Outputting
laser beam
Harmonic Separator
Beam Samplers
Others
Douser
Compatible Optic Mounts
CHA-60, -60F
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B063

Optics & Optical Coatings
Harmonic Separators
YHS
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Harmonic separators are part of dichroic mirrors used to separate specific YAG harmonic from
other harmonics.
We have prepared three different wavelength reflectance.
◦These mirrors are coated with multi-layered dielectric with different refractive index by turns using BK7 optical parallels
with λ/10 surface flatness and parallelism is 5 arc second. The other surface is coated with multi-layer anti-reflection.
◦These mirrors are used at 45°incident angle to reflect specific wavelength beam and transmits other wavelength.
◦For plate type, you can use a large laser beam diameter.
Specifications
Material
BK7
Surface Flatness λ/10
Coating
Front surface: Dielectric multi-layer coating
Rear surface: Multi-layer anti-reflection coating
Angle of Incidence 45°
Parallelism 99.5 >85 5
YHS-30C05-355 φ30 5 >99.5 >85 5
YHS-50C08-355 φ50 8 >99.5 >85 5
*Laser pulse width 10ns, repetition frequency 20Hz
For Reflected wavelength : 532nm, Transmitted wavelength : 1064nm
Part Number
Diameter φD
[mm]
Thickness t
[mm]
Reflectance at 532nm
(The average value of the P-Polarization and the S-Polarization)
[%]
Transmittance at 1064nm
(The average value of the P-Polarization and the S-Polarization)
[%]
Laser Damage Threshold*
[J/cm 2 ]
YHS-25.4C05-532 φ25.4 5 >99.5 >95 8
YHS-30C05-532 φ30 5 >99.5 >95 8
YHS-50C08-532 φ50 8 >99.5 >95 8
*Laser pulse width 10ns, repetition frequency 20Hz
For Reflected wavelength : 1064m, Transmitted wavelength : 532nm
Part Number
Diameter φD
[mm]
Thickness t
[mm]
Reflectance at 1064nm
(The average value of the P-Polarization and the S-Polarization)
[%]
Transmittance at 532nm
(The average value of the P-Polarization and the S-Polarization)
[%]
Laser Damage Threshold*
[J/cm 2 ]
YHS-25.4C05-1064 φ25.4 5 >99.5 >90 20
YHS-30C05-1064 φ30 5 >99.5 >90 20
YHS-50C08-1064 φ50 8 >99.5 >90 20
*Laser pulse width 10ns, repetition frequency 20Hz
B064
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Catalog
Code
W3024
Typical Reflectance Data
R:Reflectance
YHS-355
R [%] R [%] R [%]
100
80
60
40
20
0
300
YHS-532
100
80
60
40
20
0
400
YHS-1064
100
80
60
40
20
400
P polarization
S polarization
Average
500 600 700 800 900 1000 1100
[nm]
500 600 700 800 900 1000 1100
P polarization
S polarization
Average
[nm]
0
500 600 700 800 900 1000 1100 1200 1300
[nm]
P polarization
S polarization
Average
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Half Mirror Cube
Half Mirror Plate
Application Note
Beamsplitters
Harmonic Separator
Beam Samplers
Others
Compatible Optic Mounts
MHG-HS25-NL, HS30-NL / MHG-PM50-NL / BHAN-30S, -50S
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B065

Optics & Optical Coatings
Beam Samplers
BS4
Catalog
Code
W3025
Application
Systems
Optics &
Optical
Coatings
A beam sampler behaves like a plate beam splitter, it has the ability to reflect approximately 5.2%
of the entire beam.
◦Uncoated surfaces of optical parallels or wedged substrates are reflection surfaces. The rear surfaces are coated with
multi-layer anti-reflection.
◦These products have beam deviations at transmission and ghost by rear surface reflections due to the characteristics of
plate beam splitters.
◦To prevent ghost, wedged substrate is used with rear surface AR coating.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Schematic
Rear surface:
Visible multi-layer anti-reflection coating
Specifications
Material
BK7
Surface Flatness λ/10
Coating
Front Surface: Uncoated
Rear Surface: Visible multi-layer anti-reflection coating
Incident angle 45°
Divergence ratio
(reflectance : transmittance)
Laser Damage Threshold
Surface Quality
(Scratch−Dig)
Clear aperture
Guide
5 : 95
(The average value of the P-Polarization and the S-Polarization)
4J/cm 2
(Laser pulse width 4ns, repetition frequency 20Hz)
10−5
90% of actual aperture
▶Please contact our International Sales Division for customized products.
(Customized on size, wavelength or R:T, etc.) B069
▶For a guarantee in reflected wavefront error or transmitted wavefront
error, please contact our International Sales Division.
▶An arrow mark will be printed on the thick side of the wedge plate to
indicate the surface of the mirror.
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Angle of Incidence 45°
Outline Drawing
Front surface: Uncoated
Front
Surface
t
Rear
Surface
(in mm)
●Tolerance
Diameter φD +0
−0.1
Thickness t ±0.1
Attention
▶The reflectance of 5.2% is the value when the material is BK7 and the
input beam is unpolarized or circularly polarized.
▶The beam deviation at transmission of a wedged beam splitter is large
compared with beam splitter made of optical parallel.
▶The amount of beam deviation of a beamsplitter depends on
thickness of the substrate and the wavelength/the incident angle of
the input beam.
▶Be sure to wear laser safety goggles when checking optical path and
adjusting optical axis.
Optical Parallel
Wedged Substrate
Substrates/Windows
D
Optical Data
Maintenance
t
W
Selection Guide
Half Mirror Cube
Half Mirror Plate
Application Note
Beamsplitters
Harmonic Separator
Beam Samplers
Others
φ30・φ50
Part Number
R [%]
50
40
30
20
Wavelength Range
[nm]
P polarization
S polarization
Average
Diameter φD
[mm]
R [%]
100
80
60
40
Thickness t
[mm]
Parallelism
W
BS4-25.4C03-10-550 400 − 700 φ25.4 3

Catalog
Polka dot beam splitter PDBS Code W3173
The polka dot beam splitter is a beam splitter that has been made by the aluminum coating of
halftone dots (polka dots) on the glass substrate.
It has a low dependence on the incident angle and can be used in a wide range of wavelengths
from ultraviolet region to infrared region.
◦Reflectance to transmittance ratio has been adjusted by the area ratio of the points that have been coated.
◦Unlike the beam splitter of the dielectric type, in spite of the change in the incident angle, the reflectance and transmittance
ratio does not alter.
◦There are two types of the outer diameter like φ25.4mm and φ50.8mm and three types of reflectance to transmittance
ratio such as 7:3, 5:5 and 3:7.
Schematic
Angle of Incidence 0 – 45°
Outline Drawing
Specifications
Part Number
φD
t
Rear surface: Uncoated
Rear surface: Aluminum coating (Halftone dot)
Surface enlargement
●Tolerance
Diameter φD±0.1
Thickness t ±0.1
Reflectance : Transmittance
(in mm)
Diameter
φD
[mm]
Specifications
Material
Synthetic fused silica
Parallelism

Optics & Optical Coatings
Pellicle beam splitter
PELL
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
By using the thin film in (as) a beam splitter, it is possible to remove the shift of the transmitted
beam and the ghost image due to backside reflection. In addition, it can also be used without
changing the wavelength dispersion in ultrashort pulse laser, to separate laser beam.
◦Since it is used a thin film with a thickness of 2um or less, (Therefore) in case of the absence of the film the difference of
optical path length (between the absence of the film) will be controlled to (less than) 1um or less.
◦It does not (is never) occur that the beam will be divided into two by the back reflection and surface reflection. And the
ghost of back reflection will not occur to the image being reflected by the pellicle.
◦Because it can be used at high effective diameter of φ101.6mm, it can also be used to a large optical system of the
effective diameter.
◦It is available to provide such as;
“PELL50” the dielectric multilayer coating that will divide into the (1:1) transmittance and reflectance at a 1:1 ratio,
“PELL40” chromium film that has a small change in the dividing (branching) ratio of the transmittance and reflectance
due to the wavelength. (is small,)
“PELL33” a dielectric multilayer coating that will (to) divide (branch) into the (1:2 ratio) transmittance and reflectance at a
1:2 ratio, and “PELL10” can be used as a beam sampler.
Specifications
Material
Nitrocellulose film
Thickness of film

Catalog
Code
W3174
Typical Reflectance Data & Typical Transmittance Data T: Transmission R: Reflectance
PELL10-633
T & R [%] T & R [%]
T & R [%] T & R [%]
100
80
60
40
20
0
PELL33-633
100
80
60
40
20
0
PELL40-633
100
80
60
40
20
0
PELL50-633
100
80
60
40
20
0
400 600 800 1000 1200 1400 1600 1800 2000 2200 2400
[nm]
400 600 800 1000 1200 1400 1600 1800 2000
[nm]
400 600 800 1000 1200 1400 1600 1800 2000
[nm]
400 600 800 1000 1200 1400 1600 1800 2000
[nm]
T
R
T
R
T
R
T
R
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Half Mirror Cube
Half Mirror Plate
Application Note
Beamsplitters
Harmonic Separator
Beam Samplers
Others
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B069

Optics & Optical Coatings
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Half Mirror Cube
Half Mirror Plate
Application Note
Beamsplitters
Harmonic Separator
Beam Samplers
Others
B070
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Polarizers
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P o l a r i z e r s
I N D E X
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Polarizers Selection Guide
Human eyes have no ability to perceive the polarization of light. Also, the most of the optical detectors
do not carry sensitivity of the polarization. For this reason, filters that selectively transmit the light
with specific polarization or optics that can change the polarization state become necessary. In this
page, a guidance is provided for finding a suitable application for the variety of polarization optics.
Type of Polarizers Type of Waveplates Products Features Accuracy Application
Plastic Sheet Polarizers
(USP)
B102
Low cost, Lightweight
Inferior
Variable adjustment of laser
intensity
Application
Systems
Optics &
Optical
Coatings
Holders
Polarizing Beamsplitters
(PBS)
B079
Mica Waveplates
(WPM)
B090
Substitute use as optical retarder
Substitute use as phase sensitive
color plate (visually intensify the
retardance distribution)
Combine or separate the
polarized beam
Observation of stress (birefringence)
distribution
Bases
Manual
Stages
Actuators
Visible Sheet Polarizers
(SPF)
B099
Quartz Waveplates
(WPQ)
B087
Provide stationary linear
polarization light in visible
region
Provide exact optical retardation
for each wavelength of
laser
A simple polarization experimental
setup, Polarizing optical systems
(Variable attenuator, Polarization
interferometer, Optical isolator)
Motoeized
Stages
Light
Sources
Index
Glan Thompson Prisms
(GTPC)
B094
Provide linearly polarized light
with excellent extinction ratio in
visible region
Polarization measurements
(Extinction ratio, Optical retardation)
Guide
Fresnel Rhombs Retarders
(FRB)
B091
Provide stationary optical
retardation in a broad wavelength
range.
Superior
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
A typical applications for polarized light
Filters
Variable adjustment of laser intensity
Laser light source
Polarizer
Observation of birefringence distribution using white light
Polarizer Sample
Polarizer
White light source
Mica Waveplate
Prisms
Substrates/Windows
Optical Data
Maintenance
Polarization variable attenuator
/2 aveplate
Polarization Interferometer
Mirror
/4 aveplate
Selection Guide
Polarizing
Beamsplitters
Waveplates
Polarizers
Laser light source
PBS
/2 aveplate
PBS
Mirror
/4 aveplate
Optical isolator
Polarimetry
Glan Thompson
Polarized filter /4 aveplate Mirror
Prism Sample
Glan Thompson
Prism
Detector
Laser light source
Laser light source
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B073

Optics & Optical Coatings
Plate-type Polarizing Beamsplitters
PBS-C
Plate-type polarizing beamsplitters are one of plate that is coated with polarizing coating.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦Plate-type polarizing beamsplitters transmit p-polarization and reflect s-polarization as the monochromatic beam entering
at Brewster’s angle.
◦The losses of input beam of these products are minimized because of no absorption of dielectric coating.
◦Coating characteristic is not influenced too much by temperature change.
Specifications
Material
BK7, Synthetic fused silica
Surface flatness of substrate λ/10
Extinction ratio of transmission Ts : Tp = 1 : 200
Beam Deviation 92 >95 2
PBS-25.4C03-10-266 266 φ25.4 φ12.7 Synthetic fused silica 56.3 >92 >95 2
PBS-30C03-10-266 266 φ30 φ15.0 Synthetic fused silica 56.3 >92 >95 2
PBS-20C03-10-355 355 φ20 φ10.1 Synthetic fused silica 55.9 >94 >95 2
PBS-25.4C03-10-355 355 φ25.4 φ13.1 Synthetic fused silica 55.9 >94 >95 2
PBS-30C03-10-355 355 φ30 φ15.7 Synthetic fused silica 55.9 >94 >95 2
PBS-20C03-10-532 532 φ20 φ9.9 BK7 56.6 >95 >98 5
PBS-25.4C03-10-532 532 φ25.4 φ12.9 BK7 56.6 >95 >98 5
PBS-30C03-10-532 532 φ30 φ15.4 BK7 56.6 >95 >98 5
PBS-20C03-10-1064 1064 φ20 φ10.0 BK7 56.4 >96 >98 7
PBS-25.4C03-10-1064 1064 φ25.4 φ12.9 BK7 56.4 >96 >98 7
PBS-30C03-10-1064 1064 φ30 φ15.5 BK7 56.4 >96 >98 7
* Incident angle0°, Laser pulse width 10ns, repetition frequency 20Hz
B074
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Catalog
Code
W3026
Typical Transmittance Data
T: Transmission
PBS-C-266
T [%] T [%]
T [%] T [%]
100
90
80
70
60
50
40
30
20
10
0
PBS-C-355
100
90
PBS-C-532
230 240 250 260 270 280 290 300
[nm]
80
70
60
50
40
30
20
10
0
100
90
80
70
60
50
40
30
20
10
0
PBS-C-1064
100
90
80
70
60
50
40
30
20
10
0
p-polarization
s-polarization
300 310 320 330 340 350 360 370 380 390 400 410
[nm]
460 480 500 520 540 560 580 600
[nm]
960 980 1000 1020 1040 1060 1080 1100 1120 1140 1160 1180 1200
[nm]
p-polarization
s-polarization
p-polarization
s-polarization
p-polarization
s-polarization
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Polarizing
Beamsplitter
Waveplates
Polarizers
Compatible Optic Mounts
MHG-MP20 / MHG-MP25 / MHG-MP30
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B075

Optics & Optical Coatings
Catalog
High Power Polarizing Beamsplitters PBSHP Code W3027
Application
Systems
Optics &
Optical
Coatings
Holders
High Power Polarizing Beamsplitters have more laser durability compared to our standard
Polarizing Beamsplitters (PBS). Polarizing beamsplitters consist of two right angle prisms.
One of them is coated with dielectric multi-layer polarizing coating on the hypotenuse surface.
◦Polarizing beamsplitters split monochromatic beam entering at zero degrees into p-polarization as transmitted and
s-polarization as reflected.
◦Four surfaces of the cube are coated with narrowband multi-layer anti-reflection coatings.
◦The losses of input beam of these products are minimized because of no absorption of dielectric coating.
◦For cube beamsplitters, unlike plate beamsplitters, beam deviations of transmitted beams and ghosts rarely occur.
Bases
Specifications
Material
BK7, Synthetic fused silica
Surface flatness of substrate λ/4
Manual
Stages
Actuators
Angular deviation of transmitted beam 97%
Extinction ratio of transmission Ts : Tp = 1 : 200
Motoeized
Stages
Schematic
Surface Quality (Scratch−Dig)
Clear aperture
20−10
Circle inscribed in a square of 85% of the
dimensions
Light
Sources
Hypotenuse: Dielectric multi-layer coating
* The substrate side marked with is coated.
s-polarization
Guide
Index
p-polarization
▶Please contact our International Sales Division for customized products.
(Customized on size, wavelength etc.)
▶There is also a high extinction ratio Glan-Thompson prism (GTPB/
GTPC). B094
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Four surfaces: Multi-layer anti-reflection coating
Outline Drawing
C
B
A
●Tolerance
Length A・B±0.2
Height C±0.1
(in mm)
Attention
▶Input beam from the prism on the side indicated by ○. When the light
is incident from the side of the prism without mark, there is a possibility
that the characteristics of the transmittance and extinction ratio
changes.
▶The surface flatness is the reflected wave front distortion of the surface
before coating.
▶Be sure to wear laser safety goggles when checking optical path and
adjusting optical axis.
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Polarizing
Beamsplitter
Waveplates
Polarizers
Specifications
Part Number
Wavelength Range
[nm]
A=B=C
[mm]
Material
Reflectance of
S polarized light
[%]
Laser Damage Threshold*
[J/cm 2 ]
PBSHP-10-3550 355 10 Synthetic fused silica >97 2
PBSHP-12.7-3550 355 12.7 Synthetic fused silica >97 2
PBSHP-15-3550 355 15 Synthetic fused silica >97 2
PBSHP-20-3550 355 20 Synthetic fused silica >97 2
PBSHP-10-5320 532 10 BK7 >97 5
PBSHP-12.7-5320 532 12.7 BK7 >97 5
PBSHP-15-5320 532 15 BK7 >97 5
PBSHP-20-5320 532 20 BK7 >97 5
PBSHP-10-10640 1064 10 BK7 >97 7
PBSHP-12.7-10640 1064 12.7 BK7 >97 7
PBSHP-15-10640 1064 15 BK7 >97 7
PBSHP-20-10640 1064 20 BK7 >97 7
* Incident angle 0°, laser pulse width 10ns, repetition frequency 20Hz
Typical Transmittance Data
PBSHP-3550 PBSHP-5320 PBSHP-10640
100
100
100
T: Transmission
80
80
80
T [%]
60
40
T [%]
60
40
T [%]
60
40
20
p-polarization
s-polarization
20
p-polarization
s-polarization
20
p-polarization
s-polarization
0
320
330
Compatible Optic Mounts
0
340 350 360 370 380 460 480
λ [nm]
500 520 540 560 580 600
λ [nm]
PLH-25, -40 / KDD-25PHRO, -40PHRO / MHG12.7PAD + MHG-MP30-NL / MHG-20PAD + MHG-MP30-NL
0
950 1000 1050 1100 1150 1200
λ [nm]
B076
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Catalog
Broadband Polarizing Beamsplitters PBSW Code W3028
Broadband Polarizing Beamsplitters set up a polarizing band widely.
Polarizing beamsplitters consist of two right angle prisms.
One of them is coated with dielectric multi-layer polarizing coating on the hypotenuse surface.
◦Polarizing beamsplitters split the light entering at zero degrees into p-polarization as transmitted and s-polarization as
reflected.
◦Four surfaces of the cube are coated with multi-layer anti-reflection coatings.
◦For cube beamsplitters, unlike plate beamsplitters, beam deviations of transmitted beams and ghosts rarely occur.
Schematic
Hypotenuse: Dielectric multi-layer coating
* The substrate side marked with is coated.
s-polarization
Specifications
Material
BK7, SK2, SF15, Synthetic fused silica
Surface flatness of substrate λ/4
Angular deviation of transmitted beam 85 >90 1:100
PBSW-12.7-250 235 − 265 12.7 Synthetic fused silica >85 >90 1:100
PBSW-15-250 235 − 265 15 Synthetic fused silica >85 >90 1:100
PBSW-20-250 235 − 265 20 Synthetic fused silica >85 >90 1:100
PBSW-10-350 330 − 370 10 Synthetic fused silica >85 >95 1:100
PBSW-12.7-350 330 − 370 12.7 Synthetic fused silica >85 >95 1:100
PBSW-15-350 330 − 370 15 Synthetic fused silica >85 >95 1:100
PBSW-20-350 330 − 370 20 Synthetic fused silica >85 >95 1:100
PBSW-10-550 450 − 650 10 BK7 >85 > Average 85 1:200
PBSW-12.7-550 450 − 650 12.7 BK7 >85 > Average 85 1:200
PBSW-15-550 450 − 650 15 BK7 >85 > Average 85 1:200
PBSW-20-550 450 − 650 20 BK7 >85 > Average 85 1:200
PBSW-10-800 750 − 850 10 BK7 >92 >97 1:200
PBSW-12.7-800 750 − 850 12.7 BK7 >92 >97 1:200
PBSW-15-800 750 − 850 15 BK7 >92 >97 1:200
PBSW-20-800 750 − 850 20 BK7 >92 >97 1:200
PBSW-10-3/7 380 − 750 10 SK2 > Average 92 > Average 95 1:500*
PBSW-12.7-3/7 380 − 750 12.7 SK2 > Average 92 > Average 95 1:500*
PBSW-15-3/7 380 − 750 15 SK2 > Average 92 > Average 95 1:500*
PBSW-20-3/7 380 − 750 20 SK2 > Average 92 > Average 95 1:500*
PBSW-10-4/10 450 − 1080 10 SF15 > Average 92 > Average 95 1:500*
PBSW-12.7-4/10 450 − 1080 12.7 SF15 > Average 92 > Average 95 1:500*
PBSW-15-4/10 450 − 1080 15 SF15 > Average 92 > Average 95 1:500*
PBSW-20-4/10 450 − 1080 20 SF15 > Average 92 > Average 95 1:500*
PBSW-10-10/20 1000 − 2000 10 SF15 > Average 94 > Average 95 1:300*
PBSW-12.7-10/20 1000 − 2000 12.7 SF15 > Average 94 > Average 95 1:300*
PBSW-15-10/20 1000 − 2000 15 SF15 > Average 94 > Average 95 1:300*
PBSW-20-10/20 1000 − 2000 20 SF15 > Average 94 > Average 95 1:300*
* It is the average extinction ratio transmission in the wavelength range.
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Polarizing
Beamsplitter
Waveplates
Polarizers
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B077

Optics & Optical Coatings
Broadband Polarizing Beamsplitters
PBSW
Typical Transmittance Data
T: Transmission
Application
Systems
PBSW-250
100
PBSW-350
100
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
T [%] T [%] T [%]
80
60
40
20
0
200
PBSW-550
100
80
60
40
20
0
350
PBSW-3/7
100
80
60
40
400
220
240 260 280 300
[nm]
p-polarization
s-polarization
p-polarization
s-polarization
500 600
700 750
[nm]
p-polarization
s-polarization
T [%] T [%] T [%]
80
60
40
20
0
300
PBSW-800
100
80
60
40
20
0
650
PBSW-4/10
100
80
60
40
700
320
340 360 380 400
[nm]
p-polarization
s-polarization
p-polarization
s-polarization
750 800 850 900 850
[nm]
p-polarization
s-polarization
Beamsplitters
20
20
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Polarizing
Beamsplitter
Waveplates
Polarizers
PBSW-10/20
T [%]
0
300 400 500 600 700 800
[nm]
100
80
60
40
20
p-polarization
s-polarization
0
800 1000 1200 1400 1600 1800 2000 2200
[nm]
0
400 600 800 1000 1200
[nm]
Compatible Optic Mounts
PLH-25, -40 / KDD-25PHRO, -40PHRO / MHG12.7PAD + MHG-MP30-NL / MHG-20PAD + MHG-MP30-NL
B078
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Catalog
Polarizing Beamsplitters PBS Code W3029
Polarizing beamsplitters consist of two right angle prisms.
One of them is coated with dielectric multi-layer polarizing coating on the hypotenuse surface.
Polarizing beamsplitters split monochromatic beam entering at zero degrees into p-polarization as
transmitted and s-polarization as reflected.
◦Four surfaces of the cube are coated with narrowband multi-layer anti-reflection coatings.
◦The losses of input beam of these products are minimized because of no absorption of dielectric coating.
◦For cube beamsplitters, unlike plate beamsplitters, beam deviations of transmitted beams and ghosts rarely occur.
Schematic
Hypotenuse: Dielectric multi-layer coating
* The substrate side marked with is coated.
Four surfaces: Multi-layer anti-reflection coating
s-polarization
p-polarization
Specifications
Material
BK7
Surface flatness of substrate λ/4
Angular deviation of transmitted beam 97% (405nm: >90%)
Extinction ratio of transmission Ts : Tp = 1 : 1000
Laser Damage Threshold
0.3J/cm 2
(Laser pulse with 10ns,repetition frequency 20Hz)
Surface Quality (Scratch−Dig) 20−10
Clear aperture
Circle inscribed in a square of 85% of the
dimensions
Guide
▶Please contact our International Sales Division for customized products.
(Customized on size, wavelength etc.)
▶Plate-type of Polarizing Beamsplitters (PBS-C) is also available upon
your request. B074
▶There is also a high extinction ratio Glan-Thompson prism (GTPB/
GTPC). B094
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Outline Drawing
C
B
A
●Tolerance
Length A・B±0.2
Height C±0.1
(in mm)
Attention
▶Input beam from the prism on the side indicated by ○. When the light
is incident from the side of the prism without mark, there is a possibility
that the characteristics of the transmittance and extinction ratio changes.
▶The transmittance curves are based on actual measurements and
might be different with manufacturing lots.
▶The surface flatness is the reflected wavefront distortion of the surface
before coating.
▶Be sure to wear laser safety goggles when checking optical path and
adjusting optical axis.
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
405nm − 670nm
Part Number
Wavelength
Range
[nm]
A=B=C
[mm]
Reflectance of
S polarized light
[%]
PBS-10-4050 405 10 >97
PBS-15-4050 405 15 >97
PBS-20-4050 405 20 >97
PBS-10-4416 441.6 10 >97
PBS-15-4416 441.6 15 >97
PBS-20-4416 441.6 20 >97
PBS-10-4579 457.9 10 >97
PBS-15-4579 457.9 15 >97
PBS-20-4579 457.9 20 >97
PBS-10-4880 488 10 >98
PBS-15-4880 488 15 >98
PBS-20-4880 488 20 >98
PBS-10-5320 532 10 >98
PBS-12.7-5320 532 12.7 >98
PBS-15-5320 532 15 >98
PBS-20-5320 532 20 >98
PBS-5-6328 632.8 5 >98
PBS-10-6328 632.8 10 >98
PBS-12.7-6328 632.8 12.7 >98
PBS-15-6328 632.8 15 >98
PBS-20-6328 632.8 20 >98
PBS-5-6700 670 5 >98
PBS-10-6700 670 10 >98
PBS-12.7-6700 670 12.7 >98
PBS-15-6700 670 15 >98
PBS-20-6700 670 20 >98
780nm − 1550nm
Part Number
Wavelength
Range
[nm]
A=B=C
[mm]
Reflectancee of
S polarized light
[%]
PBS-5-7800 780 5 >98
PBS-10-7800 780 10 >98
PBS-12.7-7800 780 12.7 >98
PBS-15-7800 780 15 >98
PBS-20-7800 780 20 >98
PBS-5-8300 830 5 >98
PBS-10-8300 830 10 >98
PBS-12.7-8300 830 12.7 >98
PBS-15-8300 830 15 >98
PBS-20-8300 830 20 >98
PBS-10-10640 1064 10 >97
PBS-15-10640 1064 15 >97
PBS-20-10640 1064 20 >97
PBS-5-15500 1550 5 >97
PBS-10-15500 1550 10 >97
PBS-12.7-15500 1550 12.7 >97
PBS-15-15500 1550 15 >97
PBS-20-15500 1550 20 >97
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Polarizing
Beamsplitter
Waveplates
Polarizers
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
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B079

Optics & Optical Coatings
Polarizing Beamsplitters
PBS
Typical Transmittance Data
T: Transmission
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
PBS-4050 PBS-4416 PBS-4579
T [%] T [%]
100
80
60
40
20
0
300 350 400 450 500 550 600
[nm]
PBS-4880 PBS-5320 PBS-6328
PBS-6700 PBS-7800 PBS-8300
T [%] T [%]
100
80
60
40
20
0
300 350 400 450 500 550 600
[nm]
100
80
60
40
20
0
500 550 600 650 700 750 800 850 900 950 1000
[nm]
PBS-10640
100
80
60
40
p-polarization
s-polarization
p-polarization
s-polarization
p-polarization
s-polarization
T [%]
T [%] T [%] T [%]
100
80
60
40
20
p-polarization
s-polarization
0
300 350 400 450 500 550 600
[nm]
100
80
60
40
20
0
400 450 500 550 600 650 700
[nm]
100
80
60
40
20
0
600 700 800 900 1000 1100
[nm]
PBS-15500
100
80
60
40
p-polarization
s-polarization
p-polarization
s-polarization
T [%]
T [%] T [%]
100
80
60
40
20
0
300 350 400 450 500 550 600
[nm]
100
80
60
40
20
0
500 550 600 650 700 750 800 850 900 950 1000
[nm]
100
80
60
40
20
p-polarization
s-polarization
p-polarization
s-polarization
p-polarization
s-polarization
0
600 700 800 900 1000 1100
[nm]
Maintenance
Selection Guide
Polarizing
Beamsplitter
Waveplates
Polarizers
20
p-polarization
s-polarization
0
800 900 1000 1100 1200 1300
[nm]
20
p-polarization
s-polarization
0
1300 1400 1500 1600 1700 1800
[nm]
Compatible Optic Mounts
PLH-25, -40 / KDD-25PHRO, -40PHRO / MHG-12.7PAD + MHG-MP30-NL / MHG-20PAD + MHG-MP30-NL
B080
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Contact sheet
Contact sheet for polarization beamsplitter
To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Affiliation
(Organization Name)
Department
TEL
Country/Adress
Name &
Designation
Drawing Number
Desired
Delivery Date
Quantity
Substrates
If you do not specify
a dimension tolerance
is outside the standard
tolerance.
Type of
Coating
Standard
product
Custom-made
Wavelength Range
λ =
Incident angle
Dielectric
multi-layer Tp
AR coat
Material
c
b
FAX
a
b
c
Ts
pieces
nm
Multi-layer anti-reflection coating
(MLAR)
Other ( )
°
Surface flatness
of substrate
Angular deviation
of transmitted beam
mm
Type of
Light Source
Beam Size
Power
or
Energy
■Estimation ■Order
Date
BK7 Synthetic fused silica Other ( )
a
* There was a more detailed specification, please fill in this field.
%
Name
Budget
%
mm
mm
E-mail
If you are using a substrate of standard product,
please fill in the product number.
pulse width
Repetition frequency
(Tentative name is okay)
Estimate Yes: by Date No
JP Yen
(at λ 632.8nm)
mm
W
J
s
Hz
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Polarizing
Beamsplitter
Waveplates
Polarizers
Other
Sigma Koki Co., Ltd.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
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B081

Optics & Optical Coatings
Application Note
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
The waveplate can manipulate the polarization state without a change in light intensity.
Commonly used applications for the waveplate are described in this section.
Half waveplate (λ/2 retardation waveplate)
■Changing the polarization direction while fixing the laser.
The half waveplate is used to change direction of the linear polarization.
When the crystal axis (fast axis or slow axis) is aligned parallelyl with the polarization direction of the incident beam, the
polarization of the exit beam will maintain the same direction.
When the crystal axis of the waveplate is rotated for θ from polarization direction of the incident beam, the polarization of
the exit beam rotates for 2θ from polarization direction of the incident beam.
Using this effect, the direction of the linear polarization is arbitrarily rotated with the rotation of the half waveplate.
This method has a merit that the polarization direction is rotatable without change in light intensity.
When the polarization direction of the waveplate is rotated for 90°, the extinction ratio of linear polarization is slightly
deteriorated due to the retardation error. For this reason, insertion of a polarizer next to the waveplate is recommended for
the precise polarization measurement, which requires high extinction ratio.
If a quartz waveplate with high parallelism is used, the polarization direction can be changed without beam deflection.
0 degrees Laser
λ/2 retardation waveplate
optical axis
θ θ
Light
Sources
Index
Guide
Mirrors
Beamsplitters
■Varying the light intensity
By combining the polarization beam splitter (PBS) and half waveplate, it is possible to vary the light intensity.
The method can be used to adjust the reflectance as well as the transmittance, and also for ratio between transmission
and reflection.
This method is highly efficient, which transmittance loss is all converted into the reflectance gain.
One of the features is dynamic range of light intensity adjustment. (97% to 0.3%, depending on the quality of the PBS)
Polarizers
Lenses
Multi-Element Optics
Filters
Polarizing Variable Attenuator
Laser light source
λ/2 retardation
waveplate
Prisms
Substrates/Windows
Optical Data
Maintenance
■Examples of special optical system
A half waveplate is used when aligning P and S-polarized light which is separated by PBS into same polarization direction.
Below is an example of optical system to expose the grating by two-beam interferometry.
Interference fringes with good contrast can be obtained by aligning the polarization direction.
PBS
Selection Guide
Polarizing
Beamsplitters
Waveplates
Grating Exposure System
Laser light source
PBS
λ/2 retardation
waveplate
Mirror
Polarizers
Mirror
Sample
B082
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Quarter waveplate (λ/4 retardation waveplate)
It is used to convert linear polarization into circular polarization, but also commonly used for the polarization measurements.
■Used to prevent the back reflection
In experiments using a laser, the laser oscillation may be unstable if the back reflection from mirror or optics is returned to
the laser.
An optical isolator is used to prevent this returning light.
A typical optical isolators are composed of quarter waveplate and a polarizer.
The light passes through the quarter waveplate two times during the round-trip reflection.
Since the circular polarization does not change its rotational direction in mirror reflection, the retardation of total 180
degrees is obtained from phase difference amount of twice passed through the quarter waveplate.
With the retardation obtained, the polarization direction of the mirror reflection, which passes the quarter waveplate is
rotated by 90 degrees with respect to the incident polarization direction. This will make reflected light not able to pass
through the polarizer, and block out the back reflection.
Optical Isolator
Polarizers
λ/4 retardation
waveplate
Mirror
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Laser light source
■Used for polarization measurement (Senarmont method)
Feature of quarter waveplate is that it is possible to convert incident linear polarization into circular polarization, but also
into other state of linear polarization or various elliptical polarization.
Conversely, when elliptical axis of incident light is accurately aligned against quarter waveplate optical axis, arbitrary
elliptical polarization can be converted into linear polarization.
The azimuth γ of the incident linear polarization is defined by the ellipticity of the elliptical polarization, which corresponds
to half of the retardation Δ.
The polarization measurement using this principle is named Senarmont method.
Senarmont method is commonly used when measuring minute stress (birefringence).
Senarmont Optical System
Linearly polarized light
■Examples of special optical system
A Michelson interferometer using a PBS and quarter waveplate is introduced.
Utilizing the polarization, the unnecessary back reflection is reduced and stability of the interference fringes is enhanced.
Incident light is collected on the observation side without a loss, but in order to observe polarization, insertion of the
polarizer is demanded with 50% reduction of light intensity.
Polarization interferometer
stress
λ/4 retardation
Sample Circularly
waveplate
polarized light
Phase difference
stress
Mirror
optical
axis
γ
2γ
Linearly polarized light
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Polarizing
Beamsplitters
Waveplates
Polarizers
λ/2 retardation
waveplate
PBS
λ/4 retardation
waveplate
λ/4 retardation
waveplate
Mirror
Sensor
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B083

Optics & Optical Coatings
Broadband Quartz Waveplates
WPQW
Application
Systems
Optics &
Optical
Coatings
Air spaced type two-piece waveplates. Compatible with high-energy lasers (no optical contact
occurs). These products utilize birefringence of quartz and give phase difference of λ/4 (π/2, 90°)
or λ/2 (π, 180°) to the input beams. λ/4 retarders convert linearly polarization to circularly and
circularly polarization to linearly. λ/2 retarders convert the direction of polarization arbitrarily.
◦Air spaced type waveplates are zero-order (first-order) retardation plates (phase plates) which are assembled from pairs
of crystalline quartz plates and are mounted on aluminum frames.
Holders
Bases
Manual
Stages
Actuators
Specifications
Material
Optical grade crystalline quarts, MgF2
Material of frame Aluminum Finishing: Black anodized
Clear aperture
14×14mm
Transmitted wavefront distortion λ/4 (per one surface)
Angular deviation of beam Average 98%
Surface Quality (Scratch−Dig) 20−10
Motoeized
Stages
Guide
Light
Sources
Index
Schematic
/2
Optic axis (fast)
Aluminum frame
▶Custom-made air spaced type broadband quartz waveplates for
other wavelengths are also available. Please feel free to contact us.
▶Standard thickness of Aluminum frame is 6mm (subject to differ
without notice).
▶Optical axis is parallel to the edge of 14mm squared plate.
Attention
Guide
Mirrors
Beamsplitters
Linearly polarized light
Multi-layer anti-reflection coating
Optic axis (slow)
VIS
2
Linearly polarized light
Multi-layer anti-reflection coating
▶These products can be used for the beams which wavelengths are in
+/−1% of rated wavelengths.
▶The surface flatness is the reflected wavefront distortion of the surface
before coating.
▶Be sure to wear laser safety goggles when checking optical path and
adjusting optical axis.
Polarizers
Lenses
Multi-Element Optics
/4
Linearly polarized light
Optic axis (fast)
VIS
Aluminum frame
Circularly polarized light
Outline Drawing
fast axis
VIS
(in mm)
Filters
Prisms
Multi-layer anti-reflection coating
4
Multi-layer anti-reflection coating
14
2M
slow axis
φ30 +0
−0.2
Substrates/Windows
Optic axis (slow)
14
(6)
Optical Data
Maintenance
Selection Guide
Polarizing
Beamsplitters
Waveplates
Polarizers
Visible
Part Number
650 − 780nm
Part Number
Type
Type
Wavelength Range λ
[nm]
Wavelength Range λ
[nm]
Theoretical retardation [nm]
λ=400nm λ=500nm λ=600nm λ=700nm
Theoretical retardation [nm]
λ=650nm λ=700nm λ=750nm λ=800nm
Laser Damage Threshold*
[J/cm 2 ]
WPQW-VIS-2M λ/2 400 − 700 184.6 259.0 300.3 328.9 4
WPQW-VIS-4M λ/4 400 − 700 92.8 130.0 150.6 164.9 4
Laser Damage Threshold*
[J/cm 2 ]
WPQW-65/78-2M λ/2 650 − 780 325.3 352.7 376.9 398.8 7
WPQW-65/78-4M λ/4 650 − 780 162.2 175.9 188.0 198.9 7
700 − 1000nm
Part Number
1000 − 1600nm
Part Number
Type
Type
Wavelength Range λ
[nm]
Wavelength Range λ
[nm]
Theoretical retardation [nm]
λ=700nm λ=800nm λ=900nm λ=1000nm
Theoretical retardation [nm]
λ=1000nm λ=1200nm λ=1400nm λ=1600nm
Laser Damage Threshold*
[J/cm 2 ]
WPQW-NIR-2M λ/2 700 − 1000 344.8 402.0 450.4 494.4 7
WPQW-NIR-4M λ/4 700 − 1000 172.4 201.0 225.2 247.2 7
Laser Damage Threshold*
[J/cm 2 ]
WPQW-IR-2M λ/2 1000 − 1600 510.2 595.4 696.3 814.3 7
WPQW-IR-4M λ/4 1000 − 1600 255.1 297.7 348.1 407.1 7
* Laser pulse width 10ns, repetition frequency 20Hz
B084
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Catalog
Code
W3030
Typical Angular Field Data
WPQW-VIS-2M
Phase difference [ ° ] Phase difference [ ° ] Phase difference [ ° ] Phase difference [ ° ]
190
185
180
175
170
400 500 600 700
[nm]
WPQW-65/78-2M
190
185
180
175
170
600
650 700 750 800 850
[nm]
WPQW-NIR-2M
190
185
180
175
170
700 800 900 1000
[nm]
WPQW-IR-2M
190
185
180
175
170
1000 1200 1400 1600
[nm]
WPQW-VIS-4M
Phase difference [ ° ] Phase difference [ ° ] Phase difference [ ° ] Phase difference [ ° ]
96
94
92
90
88
86
84
400 500 600 700
[nm]
WPQW-65/78-4M
96
94
92
90
88
86
84
600
WPQW-NIR-4M
96
94
92
90
88
86
WPQW-IR-4M
650 700 750 800 850
[nm]
84
700 800 900 1000
[nm]
96
94
92
90
88
86
84
1000 1200 1400 1600
[nm]
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Polarizing
Beamsplitters
Waveplates
Polarizers
Compatible Optic Mounts
PH-30-ARS / SPH-30-ARS
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WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B085

Optics & Optical Coatings
Catalog
Air Gap Type Waveplates WPQG Code W3031
Air spaced type two-piece waveplates. Compatible with high-energy lasers (no optical contact occurs).
Application
Systems
Optics &
Optical
Coatings
◦These products utilize birefringence of quartz and give phase difference of λ/4 (π/2, 90°) or λ/2 (π, 180°) to the input beams.
λ/4 retarders convert linearly polarization to circularly and circularly polarization to linearly. λ/2 retarders convert the
direction of polarization arbitrarily.
◦Air spaced type waveplates are zero-order (first-order) retardation plates (phase plates) which are assembled from pairs
of crystalline quartz plates and are mounted on aluminum frames.
◦Custom-made air spaced type waveplates for other wavelengths (248nm, 257nm, 308nm etc.) are also available.
Holders
Specifications
Bases
Material
Optical grade crystalline quarts
Material of frame Aluminum Finishing: Black anodized
Clear aperture
15×15mm
Manual
Stages
Actuators
Surface flatness of substrate λ/10
Angular deviation of beam 98%
Motoeized
Stages
Surface Quality (Scratch−Dig)
Guide
20−10
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Schematic
/2
/4
Optic axis (fast)
Linearly polarized light
Multi-layer anti-reflection coating
Optic axis (slow)
3550
Optic axis (fast)
2
Aluminum frame
Linearly polarized light
Multi-layer anti-reflection coating
Aluminum frame
▶Please contact our International Sales Division for customized products.
(Customized on size etc.)
Attention
▶Unlike multiple-order (higher-order) waveplates that are made from a
single quartz plate, the net retardations of zero-order waveplates are
almost not affected by temperature change.
▶Optical axis is parallel to the edge of 15mm squared plate.
▶These products can be used for the beams which wavelengths are in
+/−1% of rated wavelengths.
▶The surface flatness is the reflected wavefront distortion of the surface
before coating.
▶Be sure to wear laser safety goggles when checking optical path and
adjusting optical axis.
▶Standard thickness of Aluminum frame is 8.3mm (subject to differ
without notice).
Multi-Element Optics
Linearly polarized light
3550
Circularly polarized light
Outline Drawing
(in mm)
Filters
fast axis
Prisms
Multi-layer anti-reflection coating
4
Multi-layer anti-reflection coating
3550
Substrates/Windows
Optical Data
Maintenance
Optic axis (slow)
15
2MG
15
slow axis
(8.3)
φ30 +0
−0.2
Selection Guide
Polarizing
Beamsplitters
Waveplates
Polarizers
λ/2
Part Number
Wavelength Range
[nm]
Theoretical retardation
[nm]
Retardation tolerance
Laser Damage Threshold*
[J/cm 2 ]
WPQG-2660-2M 266 133.0

Quartz Waveplates
WPQ
Quartz waveplates are zero-order retardation plates (phase plates) which are assembled from pairs
of optically contacted crystalline quartz plates and are mounted on aluminum frames.
Unlike multiple-order (higher-order) waveplates that are made from a single quartz plate, the net
retardations of zero-order waveplates are almost not affected by temperature change.
◦These products utilize birefringence of quartz and give phase difference of λ/4 (π/2, 90°) or λ/2 (π, 180°) to the input beams.
λ/4 retarders convert linearly polarization to circularly and circularly polarization to linearly. λ/2 retarders convert the
direction of polarization in 90 degrees.
◦Usually linearly polarized beams are input to the waveplates in a leaning of 45 degrees against its optic axis.
Application
Systems
Optics &
Optical
Coatings
Holders
Specifications
Material
Optical grade crystalline quarts
Bases
Material of frame Aluminum Finishing: Black anodized
Clear aperture
15×15mm
Surface flatness of substrate λ/10
Manual
Stages
Angular deviation of beam 98.5%
Laser Damage Threshold
1J/cm 2
(Laser pulse width 10ns, repetition frequency 20Hz)
Surface Quality (Scratch−Dig) 20−10
Guide
Actuators
Motoeized
Stages
Light
Sources
Schematic
/2
Optic axis (fast)
Aluminum frame
▶Please contact our International Sales Division for customized products.
(Customized on size etc.)
Attention
Index
Linearly polarized light
Multi-layer anti-reflection coating
Optic axis (slow)
/4
6328
Optic axis (fast)
2
Linearly polarized light
Multi-layer anti-reflection coating
Aluminum frame
▶These products can be used for the beams which wavelengths are in
+/−1% of rated wavelengths.
▶The surface flatness is the reflected wavefront distortion of the surface
before coating.
▶Be sure to wear laser safety goggles when checking optical path and
adjusting optical axis.
Outline Drawing
fast axis
(in mm)
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Linearly polarized light
6328
Circular polarization
6328
Filters
Multi-layer anti-reflection coating
Optic axis (slow)
4
Multi-layer anti-reflection coating
17
4M
slow axis
φ30 +0
−0.2
Prisms
Substrates/Windows
Optical Data
17
(5)
(6.3)
Maintenance
Selection Guide
Polarizing
Beamsplitters
Waveplates
Polarizers
Compatible Optic Mounts
PH-30-ARS / SPH-30-ARS
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
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B087

Optics & Optical Coatings
Catalog
Quartz Waveplates WPQ Code W3032
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
λ/2
Part Number
Wavelength Range
[nm]
Theoretical retardation
[nm]
Retardation tolerance
WPQ-2660-2M 266 133.0

Catalog
Quartz Depolarizers DEQ Code W3033
Quartz depolarizers convert linearly polarized input beams to unpolarized beams and are used in
front of and the behind of measurement equipment that must avoid polarization.
◦1N type is made of single optical quartz plate. It has a wider transmission range, but has a larger beam deviation due to
the 2 degrees wedge shape.
◦2S type consists of cemented plates of optical quartz and synthetic fused silica. It does not have beam deviation, but the
transmission range is not wide as the single type.
◦OP type consists of optical contact. It has a wider transmission range, and without beam deviation.
◦It is similar to waveplate and mounted in a frame of ø30mm diameter.
Specifications
Material
Optical Grade Crystalline Quarts
Synthetic fused silica
Material of frame Aluminum Finishing: Black anodized
Surface Quality (Scratch−Dig) 40−20
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Attention
▶Be sure to wear laser safety goggles when checking optical path and
adjusting optical axis.
Actuators
Motoeized
Stages
Light
Sources
Schematic
Optic axis
Aluminum frame
Index
45°
Linearly polarized light
DEQ
Unpolarized light
Guide
Mirrors
Beamsplitters
Uncoated (1N, 2OP)
Single-layer anti-reflection coating (2S)
2OP
Uncoated (1N, 2OP)
Single-layer anti-reflection coating (2S)
Polarizers
Lenses
Outline Drawing
(in mm)
Multi-Element Optics
DEQ-1N DEQ-2S DEQ-2OP
DEQ
DEQ
17
φ30 +0
−0.2
17
φ30 +0
−0.2
17
DEQ
φ30 +0
−0.2
Filters
Prisms
Substrates/Windows
1N
2S
2OP
Optical Data
17
(2.5)
6±0.2
17
(4.4)
(6)
17
(5)
(6.4)
Maintenance
Selection Guide
Polarizing
Beamsplitters
Waveplates
Polarizers
Specifications
Part Number
Wavelength Range
[nm]
Material
Thickness of Optics
[mm]
Laser Damage Threshold*
[J/cm 2 ]
DEQ-1N 180 − 3500 Optical Grade Crystalline Quarts 2.5 (Maximum) −
DEQ-2S 350 − 2500
Optical Grade Crystalline Quarts
Synthetic fused silica
4.4 0.3
DEQ-2OP 180 − 3500 Optical Grade Crystalline Quarts 5.0 1
* Laser pulse width 10ns, repetition frequency 20Hz
Compatible Optic Mounts
PH-30-ARS / SPH-30-ARS
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B089

Optics & Optical Coatings
Catalog
Mica Waveplates WPM Code W3034
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Mica waveplates are zero-order (first-order) retardation plates (phase plates) which are designed
at 550nm wavelength and effective at the range from 400 − 700nm. A mica sheet is sandwiched
between optical glass discs for protection and ease of use. A mica sheet is sandwiched between
optical glass discs for protection and ease of use.
◦These products utilize birefringence of mica and give phase difference of λ/4 (π/2, 90°) or λ/2 (π, 180°) to the input beams.
λ/4 plates convert linearly polarization to circularly and circularly polarization to linearly. λ/2 plates convert the direction
of polarization in 90 degrees.
◦Usually linearly polarized beams are input to the waveplates in a leaning of 45 degrees against its optical axis.
Specifications
Material
A mica sheet is sandwiched between optical
glass discs for protection and ease of use.
Wavelength Range
400 − 700nm
Transmitted wavefront distortion 2λ λ=550nm
Incident angle 0°
Design wavelength
580nm
Theoretical retardation
λ/4: 145nm
λ/2: 290nm
Surface Quality (Scratch−Dig) 40−20
Guide
▶Please contact our International Sales Division for customized products.
(Customized on size etc.)
Index
Guide
Mirrors
Beamsplitters
Polarizers
Outline Drawing
The optical axis is indicated on the
surface of the products by two dots.
φD
t
Mica Waveplate
optical glass
(Uncoated)
(in mm)
●Tolerance
Diameter φD±0.2
Thickness t ±0.2
Attention
▶Mica waveplates cannot be used for high-power laser applications
because of their relatively high absorption coefficient and occasional
inhomogeneities.
▶Be sure to wear laser safety goggles when checking optical path and
adjusting optical axis.
▶If you want to use the polarization measurement, please use the crystal
waveplate. B087
Lenses
Schematic
Multi-Element Optics
Filters
Prisms
/2
Optical glass
Linearly polarized light
Optical glass
Linearly polarized light
/4
Optical glass
Linearly polarized light
Optical glass
Circularly polarized light
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Polarizing
Beamsplitters
Waveplates
Polarizers
λ/2
Part Number
Optical axis (two dots)
Diameter φD
[mm]
Mica
Thcikness t
[mm]
WPM-10-2P φ10 2.5
WPM-20-2P φ20 2.5
WPM-25-2P φ25 2.5
WPM-30-2P φ30 2.5
WPM-40-2P φ40 3.5
WPM-50-2P φ50 3.5
λ/4
Part Number
Optical axis (two dots)
Diameter φD
[mm]
Mica
Thcikness t
[mm]
WPM-10-4P φ10 2.5
WPM-20-4P φ20 2.5
WPM-25-4P φ25 2.5
WPM-30-4P φ30 2.5
WPM-40-4P φ40 3.5
WPM-50-4P φ50 3.5
Typical Transmittance Data
T: Transmission
100
90
T [%]
80
70
60
Compatible Optic Mounts
PH-30-ARS / SPH-30-ARS
50
400 450 500 550 600 650 700
λ [nm]
B090
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Fresnel Rhomb Waveplates FRB Code W3035
The optical retardation can be given without the wavelength dependence for all visible ranges.
It can be used in optical systems that change the polarization direction of the white-light source or
spectroscopic measurement using polarization.
◦There are two types of Fresnel rhomb waveplate. A half waveplate can rotate the polarization direction and a quarter
waveplate can convert linear polarization into circular polarization.
◦As the entrance, exit and reflecting surfaces are processed at a high parallelism, the beam deflection is suppressed.
◦When the linear polarization direction of incident light is 45 degrees against the sides of square faces, the specified
optical retardation will be obtained. The light will exit as linear polarization with –45 degrees direction for the half waveplate,
and as circular polarization for the quarter waveplate.
Specifications
Material
BK7
Surface flatness of substrate λ/10
Coating
Edge faces: Anti-reflection coating
Side surfaces: Uncoated
Design wavelength
587.6nm
Incident angle 0°
Surface Quality (Scratch−Dig) 40−20
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Schematic
/2
Edge face:
Anti-reflection coating
Uncoated
Guide
▶Fresnel rhomb waveplates made of synthetic fused silica are also
available.
▶For Fresnel rhomb waveplates with different size, wavelength range,
or retardation, please contact our International Sales Division.
Motoeized
Stages
Light
Sources
Linearly polarized light
/4
Outline Drawing
/2
/4
55.23°
Edge face:
Anti-reflection coating
55.23°
Linearly polarized light
A
A
B
B
55.23°
55.23°
Uncoated
C
Uncoated
Uncoated
C
Linearly polarized light
Edge face:
Anti-reflection coating
Circularly polarized light
Edge face:
Anti-reflection coating
(in mm)
●Tolerance
A・B±0.1
C±0.2
●Tolerance
A・B±0.1
C±0.2
Fresnel Rhomb Waveplate Holders
Attention
▶The quarter waveplate has optical axis shift (refer to the optical axis
shift listed in the table below). Use the Fresnel rhomb waveplate by
mounting it horizontally or vertically and rotating the polarization
orientation of the incidence beam.
▶If finger prints or grease stain the polished surfaces of the Fresnel
rhomb waveplate, the specified optical retardation will not be obtained.
Use it carefully to prevent the side surfaces contact with anything.
(An FRH mounted in a holder is also available).
▶If the incidence angle varies, the specified optical retardation
performance will not be obtained.
▶The Fresnel rhomb waveplate is less dependant to the wavelength,
and it can be used in extended range outside the visible range.
However the effectiveness of the anti-reflection coating drops outside
the visible range and the transmittance decreases.
▶When the linear polarization direction of incident light is aligned at 0
degrees or 90 degrees against the side of square face, the polarization
direction will not change and output. (this is same for half waveplate
and quarter waveplate)
λ/2
Part Number
A×B×C
[mm]
optical axis shift
[mm]
FRB-1010-2 10×10×40.0

Optics & Optical Coatings
Application Note
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Human with naked eye can not make the differencs in between a linear polarized light and a
circularly polarized light. But polarizer optics will allow you to see the polarized light situation.
Here we introduce the fundamentals of the usage of the polarizer optics.
How to affirm the polarizing axis of a polarizer optics
The following method will show you how to find the polarizing direction when there is no marking shown on the optics
neither the direction of the polarizing axis.
Observe the reflection of a slanting ray of light from a window over a brilliant mat. Use the light polarizer to confirm the
light direction of the reflected light.
Peep the reflected light with the polarizer by turning the polarizer, the illumination go up and down. When the light is dark,
the upside and downside of the polarizer shows the polarization axis of the reflected light. We don’t need any particular
tool and location to confirm the light direction.
Actuators
Window
P polarization
Motoeized
Stages
Polarizer
Polarizing axis
S polarization
Light
Sources
Index
Floor
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
What is the normal coordinate of the polarizer
A single polarizer optic can not perform a circular polarized light. It depends on the object that the light hits. That is the
reason why the experiment sample or the experiment target depends on the direction of the normal coordinate.
1Polarizing axis
A standard experiment sets up with a laser a fixed polarizer and a linear polarizer axis.
○Polarizer optic case:
⇒ When turning the Polarizer 2 at 90 degrees, the light axis went through the Polarizer 1 disappears.
○Birefringence sample (waveplate):
⇒ Set a standard experiment with a laser, the polarizer 1 and the polarizer 2. A waveplate sample sets in between the Polarizer
1 and Polarizer 2. Turn the waveplate till the darkest position and mark the position as 0 degrees.
Maintenance
Selection Guide
Polarizing
Beamsplitters
Waveplates
Polarizers
Polarizer 1
0 degree
Polarizing axis
0 degree
Birefringence
sample
Polarizer 2
90 degrees
2Vertical direction on a table
There is no necessary of any particular setting; the optics can be at any direction. This experiment will be done at a vertical
direction.
○In case of none adjusted polarized optics:
⇒ Take the polarizer optic as a standard and set it up vertically onto holders and adjust the polarizer at 0 degree. Set other optics
according to the standard, see 1 setting.
○Requirement of adjusting the polarizer:
⇒ For optics that being sold mounted with a holder, the polarizer direction can be pre-set at 90 degrees before the shipment.
For a waveplate to be adjusted at fast direction 90 degrees, the tolerance of 2 degrees or 3 degrees of the polarizer direction
mounted with a holder may happen.
B092
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3Perpendicular to the sample axis
Experiment with a BK7 prism. Set an incident angle at 56.6 degrees to the polished surface of the prism. Incident with a lightsource
through the polarizer and turn the polarizer then observe the changing power of reflected light from the prism. When the
incident ray angle matches the angle 56.6 degrees which is called Brewster’s angle then the reflection ray disappears. The smallest
reflection angle from the prism is the P polarization; the polarizer angle is 90 degrees or 0 degrees.
Perpendicular axis of the sample platform
Prism (Uncoated)
Application
Systems
Optics &
Optical
Coatings
Holders
Polarizer
90 degrees
P polarization
Bases
Sampleplatform
Brewster angle
56.6 degrees
Manual
Stages
Actuators
4Match the polarization to the reflective object
Set the polarization axis according to the reflective object and incident direction.
The reflection ray and the laser ray produce a plane oscillation polarization axis is called P polarization, the vertical oscillation
polarization axis is called the S polarization.
Place an uncoated BK7 flat window as a test sample.
Incident ray at Brewster s angle 56.6 degrees. Place a polarizer optic in the incident ray. Turn the polarizer and observe the change
of the power of the light reflected from the flat window. There is surface reflection and back reflection of light from the flat window.
Similar to 3 setting, turn the angle to the smallest polarization angle of 90 degrees or 0 degrees.
Replace the BK7 window by another sample; similar to 1 setting and adjust the waveplate to execute the experiment.
Parallelism of the flate window
(reflective object)
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Polarizer
90 degrees
P polarization
Brewster angle
56.6 degrees
The normal axis
of the reflective
object
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Polarizing
Beamsplitters
Waveplates
Polarizers
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B093

Optics & Optical Coatings
Glan Thompson Prisms
GTPB/GTPC
Catalog
Code
W3450
Application
Systems
Optics &
Optical
Coatings
Holders
This is a special polarizer with minimal transmission loss, and a high extinction ratio below 5×10 −5
is obtained. It is used in high-precision polarization experiments.
The Calcite type that can be used in the range of the visible region to the infrared region, and α-BBO
crystal type usable in the ultraviolet region are both available.
◦Glan Thompson prism is housed in a metal frame, and no stress is applied to the inner element when frame is mounted
in the holder.
◦For Calcite type Glan Thompson prism, the acceptance angle is chosen in two levels.
◦A single-layer anti-reflection coating has been applied on the surface of the Glan Thompson prism, a high transmittance
is obtained.
Bases
Specifications
Material
α-BBO, Calcite
Manual
Stages
Beam Deviation

Catalog
Glan Laser Prisms GLPB/GLPC Code W3451
A polarizer with enhanced laser damage threshold for high power lasers and high energy laser pulses.
The transmission loss is minimal, and a high extinction ratio below 5×10 −5 is obtained.
The Calcite type that can be used in the range of the visible region to the infrared region, and α-BBO
crystal type usable in the ultraviolet region are both available.
◦The two prisms are connected with a small gap (air-gap).
And reduction in laser damage and absorption by the
adhesive are not caused by this.
◦Gran Laser prism is housed in a metal frame. The polarization
component which does not pass through the prism
exits out of the frame through port (hole) of the metal frame.
◦Since there are two ports, the prism can also be used by
replacing the input and output direction.
◦A single-layer anti-reflection coating has been applied on
the surface of the Glan Laser prism, a high transmittance
is obtained.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Schematic
Specifications
Actuators
Port
Metal frame
Linearly polarized light
Material
α-BBO, Calcite
Beam Deviation

Optics & Optical Coatings
Catalog
Glan Tayler Prisms GYPB/GYPC Code W3452
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Polarizing
Beamsplitters
Waveplates
Polarizers
A polarizer with shortest prism length.
The transmission loss is minimal, and a high extinction ratio below 5×10 −5 is obtained.
The Calcite type that can be used in the range of the visible region to the infrared region, and α-BBO
crystal type usable in the ultraviolet region are both available.
Schematic
Outline Drawing
α-BBO
Part Number
Metal frame
Unpolarized beam
D
L
Linearly polarized light
Crystal
Air spaced
Single-layer anti-reflection coating
Single-layer anti-reflection coating
A
Wavelength Range
[nm]
(in mm)
●Tolerance
Diameter φD +0
−0.2
Length L ±0.1
Extinction ratio
◦The two prisms are connected with a small gap (air-gap).
◦And reduction in laser damage and absorption by the
adhesive are not caused by this.
◦A single-layer anti-reflection coating has been applied on
the surface of the polarizing prism, a high transmittance
is obtained.
Specifications
Material
α-BBO, Calcite
Beam Deviation

Catalog
Wollaston Prisms WPPB/WPPC Code W3453
It is a prism for separating the incident beam into two linearly polarized beams with orthogonal
polarizing direction.
Used in the optical system of a phase-contrast microscope.
◦Outgoing beam is emitted with deviation. In this case, the emitted beams are in opposite directions depending on the
direction of polarization.
◦A single-layer anti-reflection coating has been applied on the surface of the Wollaston prism, a high transmittance is
obtained.
Specifications
Material
α-BBO, Calcite
Beam Deviation

Optics & Optical Coatings
Catalog
Roshon polarizing Prism RSPCQ/RSPMF Code W3451
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
It is a polarizer to separate the incident light into two linearly polarized light that crosses
perpendicular.
It corresponds to the wide range of wavelength range from ultraviolet to infrared.
◦P polarized light is emitted straight without the displacement of the optical path, and S-polarized light is emitted with a
separation angle.
◦We offer the RSPCQ-10 of crystalline quartz product and RSPMF-10 of MgF2 single crystal corresponding to the broadband
more than DUV.
Specifications
Beam Deviation

Catalog
Sheet Polarizers SPF/NSPFU/SPFN Code W3037
By the use of dichroic dye film, a good linear polarization can be obtained in a wide range.
The sheet polarizer can be used in the basic polarization experiment which does not require the
high precision, and for the light intensity adjustment.
◦Since the polarizing film is sandwiched between the protective glass plate, its is hardly get scratched, and dirt can be
wiped off.
◦Because it is mounted in the frame, the handling of the optics and mounting to the holder is easy.
◦There are three teepees in wavelength range, for Visible, UV and Near Infrared.
◦Since the anti-reflection film is applied on both sides, you can reduce stray light and back reflection to the light source.
Specifications
Dicrhoic dye film
Material
Sheet glass (Quartz glass for NSPFU)
Film laminated between optical glasses
Coating
Anti-reflection coating on both surfaces
Material of metal frame Aluminum Finishing: Black anodized
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Guide
Actuators
▶A sheet polarizer other than the size listed in catalog, or without the
frame are also available.
▶If there is a demand in transmittance, extinction ratio and wavelength
range, please contact our International Sales Division.
▶Glan Thompson prism (GTPC) with high transmittance and high
extinction ratio is also available. B094
Motoeized
Stages
Light
Sources
Schematic
Mark of polarization axis
Unpolarized beam
Outline Drawing
Mark of axis direction
φA
Polarization element sandwiched
between glass
and then glued into place
Metal frame
t
6
Linearly polarized light
+0
−0.1
φD
(in mm)
●Tolerance
Diameter φA +0
−0.1
Attention
▶Dichroic dye polarizing film has the amount of light loss due to
absorption in addition to polarization characteristics.
▶Because the product is made of a heat-sensitive film, do not use it
near high power lasers, or high temperature light source.
▶The extinction ratio varies by wavelength. The violet light may be
observed in some extinction condition.
▶The marks on the surface of the frame are perpendicular to the
polarization direction of the output linearly polarized beam.
400 − 700nm
Part Number
Wavelength
Range
[nm]
Diameter of
frame φA
[mm]
Clear aperture
φD
[mm]
Thcikness t
[mm]
SPF-30C-32 400 − 700 φ30 φ24 3
SPF-50C-32 400 − 700 φ50 φ44 3
320 − 400nm
Part Number
Wavelength
Range
[nm]
Diameter of
frame φA
[mm]
Clear aperture
φD
[mm]
Thcikness t
[mm]
NSPFU-30C 320 − 400 φ30 φ24 2.4
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
0.8
760 − 2000nm
Part Number
Typical Transmittance Data
Wavelength
Range
[nm]
SPF-32 NSPFU SPFN
Diameter of
frame φA
[mm]
Clear aperture
φD
[mm]
Thcikness t
[mm]
SPFN-30C-26 760 − 2000 φ30 φ24 3
T: Transmission
Maintenance
Selection Guide
Polarizing
Beamsplitters
Waveplates
Polarizers
T [%]
50
40
30
20
10
Single body
2 sheets parallel
Extinction ratio (log)
−1.0
−2.0
−3.0
−4.0
−5.0
Extinction RatioLog
(orthogonal / parallel)
T [%]
50
40
30
20
10
Single body
2 sheets parallel
Extinction ratio (log)
−2.0
−3.0
Extinction RatioLog
(orthogonal / parallel)
T [%]
50
40
30
20
10
Single body
2 sheets parallel
Extinction ratio (log)
0.0
−1.0
−2.0
−3.0
−4.0
Extinction RatioLog
(orthogonal / parallel)
0
−6.0
400 500 600 700
λ [nm]
0
−4.0
280 300 320 340 360 380 400
λ [nm]
0
−5.0
600 800 1000 1200 1400 1600 1800 2000
λ [nm]
Compatible Optic Mounts
PH-30-ARS / PH-50-ARS / SPH-30-ARS / SPH-50-ARS
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B099

Optics & Optical Coatings
Catalog
Wire grid polarizing filter WGPF Code W3175
Application
Systems
Optics &
Optical
Coatings
Holders
Since it is used the wire grid film processed with aluminum wire mesh of the interval of 100nm to
150nm, (Therefore), it is possible to extract the linearly polarized light from the visible light to the
infrared region. It is available in the light quantity (intensity) adjustment by using the polarization or
(and) polarization experiment.
◦In the infrared region, extinction ratio of 10 –3 degree can be obtained.
◦It has excellent heat resistance than polarizing film of the absorption type.
◦It is fixed to the frame so it is easy to handle this filter, and fixing (to fix) to the holder is easy.
◦Only linearly polarized light that is vibrated (swings) in the direction of the mark of the metal frame is transmitted.
Bases
Manual
Stages
Specifications
Material
Coating
Material of metal frame
Optical glass, Wire grid polarizing film
Uncoated
Aluminum
Finishing: Black alumite (anodized)
Actuators
Motoeized
Stages
Guide
▶Other sizes are available, please consult our sales division.
▶Glan-Thompson prism (GTPB / GTPC), which can be obtained high
transmittance and extinction ratio is also available. B094
Light
Sources
Index
Schematic
Mark of polarization axis
Uncoated
Attention
▶Most of which is not transmitted light will be reflected.
▶Please note processing of the reflected (return) light when used with
a laser. Because it is easy to be scratched, please do not wipe with a
cloth or paper on wire grid surface.
▶If the dust got to the surface of the filter, please blow off the dust with
the air blower.
Guide
Unpolarized beam
Mirrors
Linearly polarized light
Beamsplitters
Polarizers
Lenses
Wire grid surface
(Mark of polarization axis side)
Metal frame
Multi-Element Optics
Outline Drawing
(in mm)
Typical Transmittance Data
T: Transmission
Filters
Prisms
Mark of axis direction
4.5±0.1
t
●Tolerance
Diameter φA±0.1
100
80
Substrates/Windows
Optical Data
Maintenance
φA
0.5
φD
T [%]
60
40
20
Linearly polarized light parallel to the mark
Linearly polarized light perpendicular to mark
Selection Guide
Polarizing
Beamsplitters
Waveplates
Polarizers
0
400 600 800 1000 1200 1400 1600
λ [nm]
Specifications
Part Number
Wavelength Range
[nm]
Diameter of frame φA
[mm]
Clear aperture φD
[mm]
WGPF-30C 420 − 1600 φ30 φ23 1.2
Thcikness t
[mm]
Compatible Optic Mounts
PH-30-ARS / PH-50-ARS / SPH-30-ARS / SPH-50-ARS
B100
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Catalog
Polarcor Polarizers PLC Code W3038
Polarcor is a glass made polarizer; it offers a high extinction ratio in the infrared region.
It is widely used in experiments of telecommunication LD.
◦Strong against corrosion and scratches resistant; offers an excellent durability.
◦High transmittance in the infrared region, usable for high power laser.
◦Mounted in aluminum frame; easy to be placed in any mirror holder.
Schematic
Metal frame
Specifications
Material
Extinction ratio
Guide
Alkali Borosilicate Glass
1×10 −4
Angular Field ±15°
Transmitted wavefront
λ
Beam Deviation 83
PLC-10-800 740 − 860 >91
PLC-10-900 840 − 960 >94
PLC-10-1060 960 − 1160 >95
PLC-10-1310 1275 − 1345 >98
PLC-10-1550 1510 − 1590 >98
Compatible Optic Mounts
PH-30-ARS / SPH-30-ARS
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B101

Optics & Optical Coatings
Catalog
Plastic polarizer USP Code W3039
Application
Systems
Optics &
Optical
Coatings
Holders
Look for a low cost polarization solution, USP is for you.
Usage in Photo-elasticity experiments and simple polarization experiment or light intensity
adjustment in illumination application.
◦Possible to use 2 plastic polarizers for various experiments.
◦Place 2 polarizers onto the light axis by changing the polarization of each polarizer, it allows you to experience the light
intensity adjustment at a wide dynamic range.
◦The plastic polarizer is thin; convenient for confined experiments space.
◦Since this is made of plastic, there is no risk to be broken when it falls.
Bases
Manual
Stages
Specifications
Material and structure
Wavelength Range
Guide
Polarizing high-polymer film laminated between
plastic sheets
400 − 700nm
Actuators
Motoeized
Stages
Light
Sources
▶For product size that is not listed on this catalog, please ask our
International Sales Divison.
▶Because of plastic, it is easy to cut and provide the product at any
form.
▶For high extinction ratio products, we suggest our polarizer filet (SPF)
or the Glan Thompson prism (GTPC). B099, B094
▶We suggest to use our filter holder (FHS) for your polarizer.
Attention
Index
Guide
Mirrors
Beamsplitters
Schematic
Unpolarized beam
Linearly polarized light
▶The polarizer light axis direction is not indicated, please see our
application note for find out the right direction. B093
▶Do not use this plastic filter for high power laser application; it may
get burned.
▶Do not use solvents other than alcohol to wipe the polarizer.
▶Do not use paper to wipe the polarizer, you may scratch the surface
and may not be efficient for your experiment due to scattering and
diffraction problem. Please use polarizer filter (SPF) it you care about
this problem. B099
▶The extinction ratio may be changed according to the wavelength.
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Outline Drawing
φD
0.4
(in mm)
●Tolerance
Diameter φD +0
−0.4
400 − 700nm
Part Number
Diameter φD
[mm]
USP-25.4C0.4-38 φ25.4
USP-30C0.4-38
φ30
USP-50C0.4-38
φ50
Optical Data
Maintenance
Selection Guide
Polarizing
Beamsplitters
Waveplates
Polarizers
Typical Transmittance Data
T: Transmission
50
0.0
T [%]
40
30
20
10
−1.0
−2.0
−3.0
−4.0
Single body
2 sheets parallel
Extinction ratio (log)
0
−5.0
400 500 600 700
800
λ [nm]
Extinction ratio
log (orthogonal / parallel)
Compatible Optic Mounts
FHS-25 / FHS-50
B102
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Catalog
Z-polarizer Custom-made Code W3040
Z-polarizer produces light polarization in the direction of its propagation.
It enables you to obtain 3D measurement of molecules and crystal.
◦Useful for various application such as laser scanning microscopy, tip-enhanced near-field microscopy, Raman microscopy,
laser trapping, and laser processing.
◦Z-polarizer is comprised of four-segment waveplate. Since that the direction of the optical axis of each of the segmented
waveplate is different, you can generate both radial polarization and azimuth polarization.
◦In combination with condenser lens, Z-polarizer can produce a field of the light beam with a large electric field component
in the z-direction (radial polarization). It can also produce a field of the light collecting with zero electric field component
in the z-direction (azimuthal polarization).
Application
Systems
Optics &
Optical
Coatings
Holders
Specifications
Material
Synthetic fused silica,
fused quartz or quartz (below 350nm)
Diameter
φ25mm
Clear aperture
φ10mm
Incident angle 0°
Selectable wavelength range 200 − 2000nm
Center wavelength tolerance ±4% from center wavelength
Retardation
±0.05λ at center wavelength
Axis orientation accuracy ±2°
Bases
Manual
Stages
Actuators
Motoeized
Stages
Schematic
Guide
▶If you need a mount to hold the Z-polarizer, please contact our
International Sales Division.
Attention
Light
Sources
Index
▶The condenser lens are not included for the Z-polarizer.
Laser light
Outline Drawing
(in mm)
Guide
Mirrors
Linearly polarized light
ZPol
Radial polarized light
φ25 +0
−0.05
φ15
Beamsplitters
Polarizers
Lenses
Laser light
5±0.1
Multi-Element Optics
Schematic of Z-vector generation
Filters
Linearly polarized light
Radial polarized light
Prisms
Linearly polarized light
ZPol
Azimuth polarized light
Substrates/Windows
Optical Data
Maintenance
y
y
z
z
Selection Guide
Polarizing
Beamsplitters
Waveplates
Polarizers
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B103

Optics & Optical Coatings
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Polarizing
Beamsplitters
Waveplates
Polarizers
B104
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L e n s e s

L e n s e s
I N D E X
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Lenses Selection Guide
These Lenses listed here are a single lens polished to a spherical shape different to multi-element
lens for cameras or telescopes. The performance is reduced to minimum with a wide range of
applications at low cost.
Application Type of Lens Features Relevance information
Focus ・Image formation
Focused laser beam
Collimated light
Illumination
Image formation
(Microscope)
Plano Convex Lenses
Biconvex Lenses
Plano Convex Lenses
B123
B108
Biconvex Lenses, Plano Convex Lenses
Low cost. Small spot size.
Spherical aberration is small.
Compact. High numerical aperture.
Low cost.
Observation of a narrow field of view.
Beam Shaping Diffusers
Plano Convex Lenses
Beam expansion
Low cost. Low magnification.
+ Plano Concave Lenses B118
Light sheet Cylindrical Lenses B140 Low cost. Diverging beam uniaxial.
Irregular beam Plano Convex Lenses + Cylindrical Lenses
Focusing laser beam
Varying the Beam Diameter and, Aspect ratio,
Beam Divergence Aspect ratio.
High performance product
→ Achromatic Lenses
High performance product
→ Achromatic Lenses
High numerical aperture
→ Aspheric Lenses
High performance product
→ Achromatic Lenses, Camera Lenses
High performance products
→ Beam Expanders
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Collimating light
Index
Guide
Mirrors
Illumination
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Imaging (Microscope)
Filters
Prisms
Substrates/Windows
Optical Data
Beam expansion
Maintenance
Light sheet (Diffusion)
Light sheet (Collimating)
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Irregular beam
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B107

Optics & Optical Coatings
Plano Convex Lenses
SLB-P/SLSQ-P/SLSQK-P
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Simple shape lenses for laser experiment with a little reduced spherical aberration.
These are available for imaging experiment using a monochromatic light source or using as
focusing a laser beam on the detector.
◦There are three types available; BK7 for from visible range to infrared wavelength range, high-strength synthetic fused
silica which has high laser damage threshold used in less than 350nm ultraviolet light, and synthetic fused silica lens for
excimer laser corresponding to the excimer laser such as Kr * F (248nm) and Ar * F (193nm).
◦BK7 lenses are also available with three types of anti-reflection coating, visible wavelength range, in the near-infrared
range and in the infrared range.
◦From among the wide variations of products that have been subdivided in outside diameter and focal length, possible to
select according to required specifications.
Schematic
Uncoated or
anti-reflection coating
Outline Drawing
r
tc
te
Uncoated or
anti-reflection coating
●Tolerance
Diameter
Focal point
(in mm)
φ60 or less φD +0
−0.1
φ80 φD +0
−0.15
φ100 φD +0
−0.2
Focal length
(φ10≦φD) ±1%
(φD Average 98.5
Part of the above is an example of if you want to coat anti-reflective coating
on the lens of the SLB-100-500P.
Anti-reflection coating can be available to the lens of all of SLB.
T []
100
80
60
Typical Transmittance Data
T: Transmission
40
Synthetic fused silica uncoated
BK7 uncoated
20
Visible range AR
Near-infrared range AR
Infrared range AR
0
100 500 1000
1500 2000
2500
λ [nm]
B108
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Catalog
Code
W3041
BK7 φ5 − φ12.7
Uncoated
Part Number
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
SLB-05-08P M IR1 IR2 φ5 8 1.4 2.3 6.5 4.15

Optics & Optical Coatings
Catalog
Plano Convex Lenses SLB-P/SLSQ-P/SLSQK-P Code W3042
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
BK7 φ15 − φ25.4
Uncoated
Part Number
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
SLB-15-20P M IR1 IR2 φ15 20 2.0 5.2 16.6 10.38

Catalog
Code
W3043
BK7 φ30 − φ40
Uncoated
Part Number
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
SLB-30-35P M IR1 IR2 φ30 35 2.0 9.9 28.5 18.17

Optics & Optical Coatings
Catalog
Plano Convex Lenses SLB-P/SLSQ-P/SLSQK-P Code W3044
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
BK7 φ50 − φ60
Uncoated
Part Number
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
SLB-50-70P M IR1 IR2 φ50 70 3.0 13.0 61.5 36.33

Catalog
Code
W3044
BK7 φ80 − φ100
Uncoated
Part Number
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
SLB-80-100P M IR1 IR2 φ80 100 3.0 21.8 85.6 51.90

Optics & Optical Coatings
Catalog
Plano Convex Lenses SLB-P/SLSQ-P/SLSQK-P Code W3045
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Synthetic fused silica φ5 − φ20
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal length
fb
[mm]
Radius of curvature
r
[mm]
SLSQ-05-08P φ5 8 1.6 2.5 6.3 3.68

Catalog
Code
W3046
Synthetic fused silica φ25 − φ30
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal length
fb
[mm]
Radius of curvature
r
[mm]
SLSQ-25-30P φ25 30 2.0 10.0 23.2 13.80

Optics & Optical Coatings
Plano Convex Lenses
SLB-P/SLSQ-P/SLSQK-P
Catalog
Code
W3047
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Synthetic fused silica φ40 − φ50.8
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal length
fb
[mm]
Radius of curvature
r
[mm]
SLSQ-40-50P φ40 50 2.0 13.6 40.7 23.00

Catalog
Code
W3048
Synthetic fused silica φ60 − φ100
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal length
fb
[mm]
Radius of curvature
r
[mm]
SLSQ-60-80P φ60 80 3.0 18.5 67.3 36.80

Optics & Optical Coatings
Plano Concave Lenses
SLB-N/SLSQ-N/SLSQK-N
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Simple shape lenses for spreading the collimated laser beam.
These are available for expanding the beam diameter or in combination with convex, expanding the
irradiation area of illumination light.
◦There are three types available; BK7 for from visible range to infrared wavelength range, high-strength synthetic fused
silica which has high laser damage threshold used in less than 350nm ultraviolet light, and synthetic fused silica lens for
excimer laser corresponding to the excimer laser such as Kr * F (248nm) and Ar * F (193nm).
◦BK7 lenses are also available with three types of anti-reflection coating, visible wavelength range, in the near-infrared
range and in the infrared range.
◦From among the wide variations of products that have been subdivided in outside diameter and focal length, you can make
selection according to your specifications.
Specifications
Material
Design wavelength
Refractive index
Coating
Laser Damage Threshold
Clear aperture
Surface Quality (Scratch−Dig)
SLB: BK7 SLSQ: Synthetic fused silica
SLSQK: Synthetic fused silica for Excimer Laser
546.1nm
BK7: ne=1.519
Synthetic fused silica: ne=1.460
Uncoated: the end of the part number ‘N’
Anti-reflection coating:
the end of the part number ‘NM’, ‘NIR1’, ‘NIR2’
Anti-reflection coating: 4J/cm 2
Laser pulse with 10ns, repetition frequency 20Hz
90% of actual aperture (Uncoated)
85% of actual aperture (BMAR)
20−10
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Schematic
Focal point
Outline Drawing
φD
Uncoated or
anti-reflection coating
r
te
f
Principal point
fb
tc
Uncoated or
anti-reflection coating
(in mm)
●Tolerance
Diameter φD +0
−0.1
Thickness tc±0.15
Focal length ±7%
How to specify the anti-reflection coating
In case of specifying a anti-reflection coating 633nm – 1064nm to
near infrared lens of SLB-50.8-200N.
⇒ SLB-50.8-200NIR1
Type of
AR Coat
Part Number
Wavelength Range
[nm]
Transmittance
[%]
Visible range SLB-50.8-200NM 400 − 700 > Average 99
Near-infrared SLB-50.8-200NIR1 633 − 1064 > Average 98.5
Infrared SLB-50.8-200NIR2 750 − 1550 > Average 98.5
Part of the above is an example of if you want to coat anti-reflective coating
on the lens of the SLB-50.8-200N.
Anti-reflection coating can be available to the lens of all of SLB.
Guide
▶It is available other than the products which listed in the catalog such
as focal length and outer diameter size.
▶Production is also available with a specific wavelength of anti-reflective
coating on the lens of no coated.
Attention
▶In the single concave lens will not be able to converge the light and
can not be projected image. Make sure to use it in combination with
a convex lens.
▶The plano-concave lens has a chromatic aberration, the focal length
will vary depending on the wavelength. Please check the “data
wavelength characteristic of the focal length” on the WEB of the focal
length of each wavelength.
W3050
▶There is a direction to put light in a plano-concave lens. Please let
the incident parallel light from the concave side. There is a possibility
that the spherical aberration increases when in reverse, the optical
performance of the system will not be appropriate.
▶When using a high power pulsed laser, the spark may occur at the
focal point on the optical path connecting the light reflected by the
concave surface. Only if used in the pulsed laser, please make sure
to use the incident laser beam from the side of the plane.
▶Losses due to reflection of the front and rear surfaces of the lens, the
transmittance of no coated is about 90%.
▶The outer periphery of the ridge concave is chamfered. It may be
smaller than the edge thickness for the design. Please use the back
of the plane surface as the reference plane.
T []
100
80
60
Typical Transmittance Data
T: Transmission
40
Synthetic fused silica uncoated
BK7 uncoated
20
Visible range AR
Near-infrared range AR
Infrared range AR
0
100 500 1000
1500 2000
2500
λ [nm]
B118
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Catalog
Code
W3050
BK7 φ10 − φ25
Uncoated
Part Number
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
SLB-10-15N M IR1 IR2 φ10 −15 3.8 2.0 −16.3 7.79

Optics & Optical Coatings
Plano Concave Lenses
SLB-N/SLSQ-N/SLSQK-N
Catalog
Code
W3051
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
BK7 φ25.4 − φ50.8
Uncoated
Part Number
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
SLB-25.4-30N M IR1 IR2 φ25.4 −30 8.6 2.0 −31.3 15.57

Catalog
Code
W3052
Synthetic fused silica φ10 − φ25.4
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal length
fb
[mm]
Radius of curvature
r
[mm]
SLSQ-10-15N φ10 −15 4.1 2.0 −16.4 6.90

Optics & Optical Coatings
Plano Concave Lenses
SLB-N/SLSQ-N/SLSQK-N
Catalog
Code
W3053
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
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Stages
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Optical Data
Maintenance
Synthetic fused silica φ30 − φ50.8
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal length
fb
[mm]
Radius of curvature
r
[mm]
SLSQ-30-35N φ30 −35 12.3 2.0 −36.4 16.10

Biconvex Lenses
SLB-B-P/SLSQ-B-P
With its both convex surfaces the biconvex lens refracts light efficiently in a small space, more light
is focused.
The particular feature of biconvex Lens is that it enables to focus light at a short distance and also
enable it to focus dispersed. Light at an optinal condition with low loss light.
◦There are two types available; BK7 for from visible range to infrared wavelength range, high-strength synthetic fused silica
which has high laser damage threshold used in less than 350nm ultraviolet light.
◦Made of BK7 lenses are also available with three types of anti-reflection coating in the infrared wavelength, near-infrared
wavelength and visible wavelength.
◦From among the wide variations that have been subdivided in outside diameter and focal length, you can make selection
according to your specifications.
Specifications
Material SLB: BK7 SLSQ: Synthetic fused silica
Design wavelength 546.1nm
Refractive index
BK7: ne=1.519
Synthetic fused silica: ne=1.460
Uncoated: the end of the part number ‘P’
Coating
Anti-reflection coating:
the end of the part number ‘PM’, ‘PIR1’, ‘PIR2’
Laser Damage Threshold
Anti-reflection coating: 4J/cm 2
Laser pulse with 10ns, repetition frequency 20Hz
90% of actual aperture: Uncoated
Clear aperture
85% of actual aperture: with coating, φ10≦D
83% of actual aperture: with coating, D Average 98.5
Part of the above is an example of if you want to coat anti-reflective coating on the
lens of the SLB-100B-500P.
Anti-reflection coating can be available to the lens of all of SLB.
SLB-05B-06P M IR1 IR2 φ5 6.4 1.5 2.5 5.6 6.23

Optics & Optical Coatings
Biconvex Lenses
SLB-B-P/SLSQ-B-P
Catalog
Code
W3055
BK7 φ6 − φ20
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
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Mirrors
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Filters
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Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Uncoated
Part Number
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
SLB-06B-06P M IR1 IR2 φ6 6.4 1.0 2.5 5.6 6.23

Catalog
Code
W3056
BK7 φ25 − φ50
Uncoated
Part Number
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
SLB-25B-25P M IR1 IR2 φ25 26.5 2.0 8.4 23.5 25.95

Optics & Optical Coatings
Biconvex Lenses
SLB-B-P/SLSQ-B-P
Catalog
Code
W3057
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
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Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
BK7 φ50.8 − φ100
Uncoated
Part Number
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
SLB-50.8B-50P M IR1 IR2 φ50.8 52.7 3.0 16.3 47.1 51.90

Catalog
Code
W3058
Synthetic fused silica φ7 − φ25
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal length
fb
[mm]
Radius of curvature
r
[mm]
SLSQ-07B-08P φ7 8.7 2.1 3.9 7.3 7.36

Optics & Optical Coatings
Biconvex Lenses
SLB-B-P/SLSQ-B-P
Catalog
Code
W3059
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
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Filters
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Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Synthetic fused silica φ25.4 − φ50.8
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal length
fb
[mm]
Radius of curvature
r
[mm]
SLSQ-25.4B-25P φ25.4 26.7 1.8 9.4 23.3 23.00

Biconcave Lenses
SLB-B-N/SLSQ-B-N
With its two concaves surface, the biconcave lens refracts light efficiently in a small space and
spread widely the light.
Possible to use it for enlarging the illumination area.
◦There are two types available; BK7 for from visible range to infrared wavelength range, high-strength synthetic fused silica
which has high laser damage threshold used in less than 350nm ultraviolet light.
◦Made of BK7 lenses are also available with three types of anti-reflection coating in the infrared wavelength, near-infrared
wavelength and visible wavelength.
◦From among the wide variations that have been subdivided in outside diameter and focal length, you can make selection
according to your specifications.
Application
Systems
Optics &
Optical
Coatings
Holders
Specifications
Bases
Material SLB: BK7 SLSQ: Synthetic fused silica
Design wavelength
Refractive index
Coating
Laser Damage Threshold
Clear aperture
Surface Quality (Scratch−Dig)
Guide
546.1nm
BK7: ne=1.519
Synthetic fused silica: ne=1.460
Uncoated: the end of the part number ‘N’
Anti-reflection coating:
the end of the part number ‘NM’, ‘NIR1’, ‘NIR2’
Anti-reflection coating: 4J/cm 2
Laser pulse with 10ns, repetition frequency 20Hz
90% of actual aperture: Uncoated
85% of actual aperture: with coating
20−10
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Schematic
▶It is available other than the products which listed in the catalog such
as focal length and outer diameter size.
▶Production is also available with a specific wavelength of anti-reflective
coating on the lens of no coated.
Index
Attention
Guide
Focal point
Uncoated or
anti-reflection coating
Outline Drawing
tc
te
Uncoated or
anti-reflection coating
(in mm)
●Tolerance
Diameter φD +0
−0.1
Thickness tc ±0.15
Focal length ±7%
▶In the single concave lens will not be able to converge the light and
can not be projected image. Make sure to use it in combination with
a convex lens.
▶The biconvex spherical lens has a chromatic aberration, and the focal
length will vary depending on the wavelength. Please check the
“wavelength characteristic of the focal length data” on the Web for the
focal lengths of each wavelength.
W3060
▶When using a high power pulsed laser, the spark may occur at the
focal point on the optical path connecting the light reflected by the
concave surface. Please use the plano-concave lens when used with
a pulsed laser.
▶Losses due to reflection of the front and rear surfaces of the lens, the
transmittance of no coated is about 90%.
▶The outer periphery of the ridge, concave side is chamfered. There is
a possibility that it is smaller than the edge thickness for this design.
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
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Substrates/Windows
f
r
r
Optical Data
Maintenance
φD
Principal point
fb
How to specify the anti-reflection coating
In case of specifying a anti-reflection coating 633nm – 1064nm to
near infrared lens of SLB-50.8B-200N.
⇒ SLB-50.8B-200NIR1
Type of
AR Coat
Part Number
Wavelength Range
[nm]
Transmittance
[%]
Visible range SLB-50.8B-200NM 400 − 700 > Average 99
Near-infrared SLB-50.8B-200NIR1 633 − 1064 > Average 98.5
Infrared SLB-50.8B-200NIR2 750 − 1550 > Average 98.5
Part of the above is an example of if you want to coat anti-reflective coating
on the lens of the SLB-50.8B-200N.
Anti-reflection coating can be available to the lens of all of SLB.
T []
100
80
60
Typical Transmittance Data
T: Transmission
40
Synthetic fused silica uncoated
BK7 uncoated
20
Visible range AR
Near-infrared range AR
Infrared range AR
0
100 500 1000
1500 2000
2500
λ [nm]
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B129

Optics & Optical Coatings
Catalog
Biconcave Lenses SLB-B-N/SLSQ-B-N Code W3060
BK7 φ10 − φ50.8
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
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Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Uncoated
Part Number
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
SLB-10B-10N M IR1 IR2 φ10 −9.7 4.6 2.0 −10.3 10.38

Catalog
Code
W3061
Synthetic fused silica φ10 − φ50.8
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal length
fb
[mm]
Radius of curvature
r
[mm]
SLSQ-10B-10N φ10 −9.7 5.0 2.0 −10.3 9.20

Optics & Optical Coatings
φ25.4 (BK7) Lens Kit SLB-25.4-SET
Catalog
Code
W3194
Application
Systems
Optics &
Optical
Coatings
Holders
This is a perfect lens kit in all areas from teaching materials to research and development
There is special case for a single lens that is commonly used such as plano convex (9 types), and
biconvex, plano concave and biconcave (each 6 types), which are total 27 types.
Four kinds of totally 27 lenses commonly useds such as plano convex (9 types), and biconvex,
plano concave and biconcave (each 6 types), are housed in a special box.
◦Outer diameter of the lens has been unified with φ25.4mm.
◦Focal length is divided into a wide range of –200 - 1,000 mm.
◦Special case is made by ​wooden box in order for convenient storage.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Specifications
Part Number
Material
Design Wavelength
Refractive Index
Coating
Clear Aperture
Surface Quality (Scratch−Dig)
SLB-25.4-SET
BK7
546.1nm
ne=1.519
Uncoated
90% of the diameter
20−10
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Components
Shape of Lenses
Plano Convex Lenses
Biconvex Lenses
Plano Concave Lenses
Biconcave Lenses
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal length
fb
[mm]
Centration
[ ′]
SLB-25.4-30P φ25.4 30 1.7 8.3 24.5

Contact sheet
Contact sheet for Special Order for spherical lens
To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Affiliation
(Organization Name)
Department
TEL
Country/Address
Name &
Designation
Drawing Number
Desired
Delivery Date
Specification
of lens
Specifications
of Coating
Specifications
of
Light Source
Used
Incident angle
Other
Quantity
Selected from
standard product
Custom-made Focal length
Wavelength Range
Part
Number
Shape
Material
Diameter
Diameter
Center
Thickness
Design
wavelength λ =
Presence or
absence of the coating
Type of AR (If required)
Output
or
Energy
λ =
FAX
Type
Beam Size
■Estimation ■Order
Date
Plano Convex Biconvex Plano Concave Biconcave
Meniscus Other ( )
BK7 Synthetic fused silica
Synthetic fused silica for Excimer Laser (λ = )
f =
= °
tc =
mm
Non Single-layer anti-reflection coating
Broadband multi-layer anti-reflection coating
Other ( )
nm
* Write more detailed specifications here. (Rough illustration is acceptable.)
W
Estimate
Budget
E-mail
Yes: by Date
nm
(Tentative name is okay)
No
JP Yen
If you are using a spherical lens
of standard product, please fill in
the product number.
●When there is no specification of
the design wavelength, 546.1nm
and standard products.
●May want to change the center
thickness by the case of the
production.
●If you do not specify the dimension
tolerance, we will apply our
standard tolerance instead.
mm
J Pulse width s Repetition frequency Hz
Kit
Application
Systems
Optics &
Optical
Coatings
Holders
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Stages
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Sources
Index
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Mirrors
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Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Reasonable Lens
Cylindrical
Others
Sigma Koki Co., Ltd.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B133

Optics & Optical Coatings
Reasonable Plano Convex Lens
S-SLB-P/S-SLB-B-P
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
It is the product that was reduced by one rank from the surface quality of Plano Convex Lens (SLB-P).
It can be used in an optical system such as observation or lighting applications that high surface
quality is not required.
Schematic
Plano Convex
Uncoated or
anti-reflection coating
Outline Drawing
Plano Convex
Uncoated or
anti-reflection coating
D
r
tc
te
fb
f
Principal point
Focal point
Uncoated or
anti-reflection coating
Focal point
Uncoated or
anti-reflection coating
How to specify the anti-reflection coating
In case of specifying a anti-reflection coating 633nm – 1064nm to
near infrared lens of S-SLB-100-500P.
⇒ S-SLB-100-500PIR1
Type of
AR Coat
Part Number
●Tolerance
Diameter
Wavelength Range
[nm]
φ60 or less φD +0
−0.1
φ80 φD +0
−0.15
φ100 φD +0
−0.2
Focal length
(φ10≦φD) ±1%
(φD Average 99
Near-infrared S-SLB-100-500PIR1 633 − 1064 > Average 98.5
Infrared S-SLB-100-500PIR2 750 − 1550 > Average 98.5
Part of the above is an example of if you want to coat anti-reflective coating
on the lens of the S-SLB-100-500P.
Anti-reflection coating can be available to the lens of all of S-SLB.
◦It has the same specification of Plano Convex Lens
(SLB-P) except the surface quality. Unless a laser is used
for high-precision experiments, it is recommended.
◦There are two types of lens. One is a Plano convex lens
with low spherical aberration and the other is a biconvex
lens that is possible to shorten the focal length by a large
refraction.
◦In addition to uncoated products, there are three types of
anti-reflection coating for visible, near-infrared, and
infrared.
Specifications
Material
BK7
Design Wavelength 546.1nm
Refractive Index
ne=1.519
Centration

Catalog
Code
W3185
Plano Convex Lens φ6 − φ25
Part Number
Uncoated
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
S-SLB-06-08P M IR1 IR2 φ6 8 1.0 2.3 6.5 4.15
S-SLB-06-10P M IR1 IR2 φ6 10 1.0 2.0 8.7 5.19
S-SLB-07-20P M IR1 IR2 φ7 20 1.7 2.3 18.5 10.38
S-SLB-07-40P M IR1 IR2 φ7 40 1.6 1.9 38.8 20.76
S-SLB-08-10P M IR1 IR2 φ8 10 1.5 3.4 7.8 5.19
S-SLB-08-15P M IR1 IR2 φ8 15 1.5 2.6 13.3 7.79
S-SLB-08-25P M IR1 IR2 φ8 25 1.5 2.1 23.6 12.98
S-SLB-08-40P M IR1 IR2 φ8 40 1.5 1.9 38.8 20.76
S-SLB-10-15P M IR1 IR2 φ10 15 2.0 3.8 12.5 7.79
S-SLB-10-20P M IR1 IR2 φ10 20 2.0 3.3 17.8 10.38
S-SLB-10-25P M IR1 IR2 φ10 25 2.0 3.0 23.0 12.98
S-SLB-10-30P M IR1 IR2 φ10 30 2.0 2.8 28.1 15.57
S-SLB-10-40P M IR1 IR2 φ10 40 2.0 2.6 38.3 20.76
S-SLB-10-50P M IR1 IR2 φ10 50 2.0 2.5 48.4 25.95
S-SLB-10-60P M IR1 IR2 φ10 60 2.0 2.4 58.4 31.14
S-SLB-10-70P M IR1 IR2 φ10 70 2.0 2.3 68.5 36.33
S-SLB-10-100P M IR1 IR2 φ10 100 2.0 2.2 98.5 51.90
S-SLB-15-20P M IR1 IR2 φ15 20 2.0 5.2 16.6 10.38
S-SLB-15-25P M IR1 IR2 φ15 25 2.0 4.4 22.1 12.98
S-SLB-15-30P M IR1 IR2 φ15 30 2.0 3.9 27.4 15.57
S-SLB-15-40P M IR1 IR2 φ15 40 2.0 3.4 37.8 20.76
S-SLB-15-50P M IR1 IR2 φ15 50 2.0 3.1 48.0 25.95
S-SLB-15-60P M IR1 IR2 φ15 60 2.0 2.9 58.1 31.14
S-SLB-15-70P M IR1 IR2 φ15 70 2.0 2.8 68.2 36.33
S-SLB-15-80P M IR1 IR2 φ15 80 2.0 2.7 78.2 41.52
S-SLB-15-90P M IR1 IR2 φ15 90 2.0 2.6 88.3 46.71
S-SLB-15-100P M IR1 IR2 φ15 100 2.0 2.5 98.3 51.90
S-SLB-15-120P M IR1 IR2 φ15 120 2.0 2.5 118.4 62.28
S-SLB-15-150P M IR1 IR2 φ15 150 2.0 2.4 148.4 77.85
S-SLB-20-25P M IR1 IR2 φ20 25 2.0 6.7 20.6 12.98
S-SLB-20-30P M IR1 IR2 φ20 30 2.0 5.6 26.3 15.57
S-SLB-20-40P M IR1 IR2 φ20 40 2.0 4.6 37.0 20.76
S-SLB-20-50P M IR1 IR2 φ20 50 2.0 4.0 47.4 25.95
S-SLB-20-60P M IR1 IR2 φ20 60 2.0 3.6 57.6 31.14
S-SLB-20-70P M IR1 IR2 φ20 70 2.0 3.4 67.8 36.33
S-SLB-20-80P M IR1 IR2 φ20 80 2.0 3.2 77.9 41.52
S-SLB-20-90P M IR1 IR2 φ20 90 2.0 3.1 88.0 46.71
S-SLB-20-100P M IR1 IR2 φ20 100 2.0 3.0 98.0 51.90
S-SLB-20-120P M IR1 IR2 φ20 120 2.0 2.8 118.2 62.28
S-SLB-20-150P M IR1 IR2 φ20 150 2.0 2.6 148.3 77.85
S-SLB-20-170P M IR1 IR2 φ20 170 2.0 2.6 168.2 88.23
S-SLB-20-200P M IR1 IR2 φ20 200 2.0 2.5 198.4 103.80
S-SLB-25-30P M IR1 IR2 φ25 30 2.0 8.3 24.5 15.57
S-SLB-25-35P M IR1 IR2 φ25 35 2.0 7.0 30.4 18.17
S-SLB-25-40P M IR1 IR2 φ25 40 2.0 6.2 36.0 20.76
S-SLB-25-50P M IR1 IR2 φ25 50 2.0 5.2 46.6 25.95
S-SLB-25-70P M IR1 IR2 φ25 70 2.0 4.2 67.2 36.33
S-SLB-25-80P M IR1 IR2 φ25 80 2.0 3.9 77.4 41.52
S-SLB-25-90P M IR1 IR2 φ25 90 2.0 3.7 87.6 46.71
S-SLB-25-100P M IR1 IR2 φ25 100 2.0 3.5 97.7 51.90
S-SLB-25-120P M IR1 IR2 φ25 120 2.0 3.3 117.8 62.28
S-SLB-25-150P M IR1 IR2 φ25 150 2.0 3.0 148.0 77.85
S-SLB-25-200P M IR1 IR2 φ25 200 2.0 2.8 198.2 103.80
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Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Compatible Optic Mounts
LHF-10S, -15S, -20S, -25S / MLH-10, -15
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B135

Optics & Optical Coatings
Reasonable Plano Convex Lens
S-SLB-P/S-SLB-B-P
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Plano Convex
Lenses
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Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Plano Convex Lens φ30 − φ100
Part Number
Uncoated
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
S-SLB-30-35P M IR1 IR2 φ30 35 2.0 9.9 28.5 18.17
S-SLB-30-40P M IR1 IR2 φ30 40 2.0 8.4 34.5 20.76
S-SLB-30-50P M IR1 IR2 φ30 50 2.0 6.8 45.5 25.95
S-SLB-30-60P M IR1 IR2 φ30 60 2.0 5.9 56.1 31.14
S-SLB-30-70P M IR1 IR2 φ30 70 2.0 5.2 66.5 36.33
S-SLB-30-80P M IR1 IR2 φ30 80 2.0 4.8 76.8 41.52
S-SLB-30-90P M IR1 IR2 φ30 90 2.0 4.5 87.1 46.71
S-SLB-30-100P M IR1 IR2 φ30 100 2.0 4.2 97.2 51.90
S-SLB-30-120P M IR1 IR2 φ30 120 2.0 3.8 117.5 62.28
S-SLB-30-150P M IR1 IR2 φ30 150 2.0 3.5 147.7 77.85
S-SLB-30-170P M IR1 IR2 φ30 170 2.0 3.3 167.8 88.23
S-SLB-30-200P M IR1 IR2 φ30 200 2.0 3.1 198 103.80
S-SLB-30-250P M IR1 IR2 φ30 250 2.0 2.9 248.1 129.75
S-SLB-30-300P M IR1 IR2 φ30 300 2.0 2.7 298.2 155.70
S-SLB-30-350P M IR1 IR2 φ30 350 2.0 2.6 348.3 181.65
S-SLB-40-50P M IR1 IR2 φ40 50 2.0 11.4 42.5 25.95
S-SLB-40-60P M IR1 IR2 φ40 60 2.0 9.3 53.9 31.14
S-SLB-40-70P M IR1 IR2 φ40 70 2.0 8.0 64.7 36.33
S-SLB-40-80P M IR1 IR2 φ40 80 2.0 7.1 75.3 41.52
S-SLB-40-90P M IR1 IR2 φ40 90 2.0 6.5 85.7 46.71
S-SLB-40-100P M IR1 IR2 φ40 100 2.0 6.0 96 51.90
S-SLB-40-120P M IR1 IR2 φ40 120 2.0 5.3 116.5 62.28
S-SLB-40-150P M IR1 IR2 φ40 150 2.0 4.6 147 77.85
S-SLB-40-170P M IR1 IR2 φ40 170 2.0 4.3 167.2 88.23
S-SLB-40-200P M IR1 IR2 φ40 200 2.0 3.9 197.4 103.80
S-SLB-40-250P M IR1 IR2 φ40 250 2.0 3.6 247.7 129.75
S-SLB-40-1000P M IR1 IR2 φ40 1000 2.0 2.4 998.4 519.00
S-SLB-50-70P M IR1 IR2 φ50 70 3.0 13 61.5 36.33
S-SLB-50-90P M IR1 IR2 φ50 90 3.0 10.3 83.2 46.71
S-SLB-50-100P M IR1 IR2 φ50 100 3.0 9.4 93.8 51.90
S-SLB-50-120P M IR1 IR2 φ50 120 3.0 8.2 114.6 62.28
S-SLB-50-150P M IR1 IR2 φ50 150 3.0 7.1 145.3 77.85
S-SLB-50-170P M IR1 IR2 φ50 170 3.0 6.6 165.6 88.23
S-SLB-50-200P M IR1 IR2 φ50 200 3.0 6.1 196.0 103.80
S-SLB-60-70P M IR1 IR2 φ60 70 3.0 18.8 57.6 36.33
S-SLB-60-100P M IR1 IR2 φ60 100 3.0 12.5 91.7 51.90
S-SLB-60-120P M IR1 IR2 φ60 120 3.0 10.7 113.0 62.28
S-SLB-60-150P M IR1 IR2 φ60 150 3.0 9.0 144.1 77.85
S-SLB-80-150P M IR1 IR2 φ80 150 3.0 14.1 140.8 77.85
S-SLB-80-250P M IR1 IR2 φ80 250 3.0 9.3 243.9 129.75
S-SLB-100-150P M IR1 IR2 φ100 150 3.0 21.2 136.1 77.85
S-SLB-100-200P M IR1 IR2 φ100 200 3.0 15.8 189.6 103.80
S-SLB-100-250P M IR1 IR2 φ100 250 3.0 13.0 241.4 129.75
S-SLB-100-300P M IR1 IR2 φ100 300 3.0 11.2 292.6 155.70
S-SLB-100-500P M IR1 IR2 φ100 500 3.0 7.9 494.8 259.50
S-SLB-100-1000P M IR1 IR2 φ100 1000 3.0 5.4 996.4 519.00
Compatible Optic Mounts
LHF-30S, -40S, -50S, -60S, -100S
B136
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Catalog
Code
W3185
Biconvex Lens
Part Number
Uncoated
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
S-SLB-05B-08P M IR1 IR2 φ5 8.4 1.4 2.1 7.6 8.30
S-SLB-05B-20P M IR1 IR2 φ5 20.2 1.1 1.4 19.8 20.76
S-SLB-06B-06P M IR1 IR2 φ6 6.4 1.0 2.5 5.6 6.23
S-SLB-08B-08P M IR1 IR2 φ8 8.6 1.5 3.6 7.4 8.30
S-SLB-10B-10P M IR1 IR2 φ10 10.8 2.0 4.6 9.2 10.38
S-SLB-10B-15P M IR1 IR2 φ10 15.6 2.0 3.6 14.4 15.57
S-SLB-10B-20P M IR1 IR2 φ10 20.5 2.0 3.2 19.5 20.76
S-SLB-10B-40P M IR1 IR2 φ10 40.4 2.0 2.6 39.6 41.52
S-SLB-15B-15P M IR1 IR2 φ15 16 2.0 5.9 14.0 15.57
S-SLB-15B-20P M IR1 IR2 φ15 20.8 2.0 4.8 19.2 20.76
S-SLB-15B-30P M IR1 IR2 φ15 30.6 2.0 3.8 29.4 31.14
S-SLB-15B-40P M IR1 IR2 φ15 40.6 2.0 3.4 39.4 41.52
S-SLB-20B-30P M IR1 IR2 φ20 31 2.0 5.3 29.1 31.14
S-SLB-20B-40P M IR1 IR2 φ20 40.7 2.0 4.4 39.3 41.52
S-SLB-20B-50P M IR1 IR2 φ20 50.7 2.0 3.9 49.3 51.90
S-SLB-25B-35P M IR1 IR2 φ25 36.1 2.0 6.4 33.9 36.33
S-SLB-25B-50P M IR1 IR2 φ25 50.8 2.0 5.1 49.2 51.90
S-SLB-25B-60P M IR1 IR2 φ25 60.8 2.0 4.5 59.2 62.28
S-SLB-25B-70P M IR1 IR2 φ25 70.7 2.0 4.2 69.3 72.66
S-SLB-30B-30P M IR1 IR2 φ30 31.7 2.0 9.7 28.3 31.14
S-SLB-30B-40P M IR1 IR2 φ30 41.3 2.0 7.6 38.7 41.52
S-SLB-40B-40P M IR1 IR2 φ40 42.1 2.0 12.3 37.9 41.52
S-SLB-40B-50P M IR1 IR2 φ40 51.7 2.0 10.0 48.3 51.90
S-SLB-40B-60P M IR1 IR2 φ40 61.4 2.0 8.6 58.6 62.28
S-SLB-40B-100P M IR1 IR2 φ40 101 2.0 5.9 99.0 103.80
S-SLB-40B-150P M IR1 IR2 φ40 150.8 2.0 4.6 149.2 155.70
S-SLB-50B-150P M IR1 IR2 φ50 151.2 3.0 7.0 148.8 155.70
S-SLB-50B-200P M IR1 IR2 φ50 201 3.0 6.0 199.0 207.60
Application
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Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Compatible Optic Mounts
LHF-10S, -15S, -20S, -25S, -30S, -40S, -50S / MLH-10, -15
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B137

Optics & Optical Coatings
Reasonable Plano Concave Lens
S-SLB-N/S-SLB-B-N
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It is the product that was reduced by one rank from the surface quality of Plano Concave Lens (SLB-N).
It can be used in an optical system such as observation or lighting applications that high surface
quality is not required.
Schematic
Plano Concave
Focal point
Biconcave
Uncoated or
anti-reflection coating
Focal point
Uncoated or
anti-reflection coating
Uncoated or
anti-reflection coating
Uncoated or
anti-reflection coating
◦It has the same specification of Plano Concave Lens
(SLB-N) except the surface quality. Unless a laser is used
for high-precision experiments, it is recommended.
◦There are two types of lens. One is a Plano concave lens
with low spherical aberration and the other is a biconcave
lens that is possible to shorten the focal length by a large
refraction.
◦In addition to uncoated products, there are three types of
anti-reflection coating for visible, near-infrared, and
infrared.
Specifications
Material
BK7
Design Wavelength 546.1nm
Refractive Index
ne=1.519
Centration Average 98.5
Infrared S-SLB-30-200NIR2 750 − 1550 > Average 98.5
Part of the above is an example of if you want to coat anti-reflective coating
on the lens of the S-SLB-30-200N.
Anti-reflection coating can be available to the lens of all of S-SLB.
T []
100
80
60
40
D
r
f
Principal point
fb
Typical Transmittance Data
BK7 uncoated
20
Visible range AR
Near-infrared range AR
Infrared range AR
0
100 500 1000
1500 2000
2500
[nm]
r
T: Transmission
B138
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Catalog
Code
W3186
Plano Concave Lens
Part Number
Uncoated
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
S-SLB-10-15N M IR1 IR2 φ10 –15 3.8 2.0 −16.3 7.79
S-SLB-10-20N M IR1 IR2 φ10 –20 3.3 2.0 −21.3 10.38
S-SLB-10-30N M IR1 IR2 φ10 –30 2.8 2.0 −31.3 15.57
S-SLB-10-100N M IR1 IR2 φ10 –100 2.2 2.0 −101.3 51.90
S-SLB-15-25N M IR1 IR2 φ15 –25 4.4 2.0 −26.3 12.98
S-SLB-15-30N M IR1 IR2 φ15 –30 3.9 2.0 −31.3 15.57
S-SLB-20-25N M IR1 IR2 φ20 –25 6.7 2.0 −26.3 12.98
S-SLB-20-30N M IR1 IR2 φ20 –30 5.6 2.0 −31.3 15.57
S-SLB-20-40N M IR1 IR2 φ20 –40 4.6 2.0 −41.3 20.76
S-SLB-20-50N M IR1 IR2 φ20 –50 4.0 2.0 −51.3 25.95
S-SLB-20-60N M IR1 IR2 φ20 –60 3.6 2.0 −61.3 31.14
S-SLB-25-40N M IR1 IR2 φ25 –40 6.2 2.0 −41.3 20.76
S-SLB-30-60N M IR1 IR2 φ30 –60 5.9 2.0 −61.3 31.14
S-SLB-30-200N M IR1 IR2 φ30 –200 3.1 2.0 −201.3 103.80
Biconcave Lens
Part Number
Uncoated
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
Diameter
φD
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
S-SLB-10B-10N M IR1 IR2 φ10 –9.7 4.6 2.0 −10.3 10.38
S-SLB-15B-15N M IR1 IR2 φ15 –14.7 5.9 2.0 −15.3 15.57
S-SLB-20B-50N M IR1 IR2 φ20 –49.7 3.9 2.0 −50.3 51.90
S-SLB-30B-100N M IR1 IR2 φ30 –99.7 4.2 2.0 −100.3 103.80
Application
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Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Compatible Optic Mounts
LHF-10S, -15S, -20S, -25S, -30S
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B139

Optics & Optical Coatings
Cylindrical Plano-convex Lenses
CLB-P/CLSQ-P
Application
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Optical Data
Cylindrical plano-convex lens has a convex curvature in the vertical direction and has no curvature
in the horizontal direction.
It is used to make experimental and condensing a laser beam in a thin line, a wide light sheet used
in the measurement, such as fluid.
◦There are two types available; BK7 for from visible range to infrared wavelength range, high-strength synthetic fused
silica which has high laser damage threshold used in less than 350nm ultraviolet light.
◦Made of BK7 lenses are also available with three types of anti-reflection coating in the infrared wavelength, near-infrared
wavelength and visible wavelength.
◦By using a cylindrical lens in the optical system, it is available to change the shape and aspect ratio of the illumination
light beam.
Schematic
Outline Drawing
A
Uncoated or
anti-reflection coating
r
tc
te
Focal point
Uncoated or
anti-reflection coating
(in mm)
●Tolerance
Length A +0
−0.1
(B≦50) B +0
−0.1
(B=70) B +0
−0.15
(B=100) B +0
−0.2
Thickness tc ±0.2
Specifications
Material CLB: BK7 CLSQ: Synthetic fused silica
Design wavelength 546.1nm
Refractive index
BK7: ne=1.519
Synthetic fused silica: ne=1.460
Uncoated: the end of the part number ‘P’
Coating
Anti-reflection coating:
the end of the part number ‘PM’, ‘PIR1’, ‘PIR2’
Laser Damage Threshold
Anti-reflection coating: 4J/cm 2
Laser pulse with 10ns, repetition frequency 20Hz
Clear aperture
90% of square or rectangle to actual dimension
Surface Quality (Scratch−Dig) 20−10
Guide
▶It is also available other than the products which listed in the catalog
such as focal length and outer diameter size.
▶Production is also available with a specific wavelength of anti-reflective
coating on the lens of no coated.
▶To fixe the cylindrical lenses, it is available cylindrical lens holders (cf.
CHA). C044
Attention
▶The plano-convex cylindrical lens has a chromatic aberration, and the
focal length will vary depending on the wavelength. Please check the
“wavelength characteristic of the focal length data” on the Web for
the focal lengths of each wavelength.
W3062
▶There is a direction to put light in a plano-convex cylindrical lens.
Please let the incident parallel light from the convex side. There is a
possibility that the spherical aberration increases when in reverse, the
optical performance of the system will not be appropriate.
▶Losses due to reflection of the front and rear surfaces of the lens, the
transmittance of no coated is about 90%.
Maintenance
B
fb
f
Principal point
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
How to specify the anti-reflection coating
In case of specifying a anti-reflection coating 633nm – 1064nm to
near infrared lens of CLB-30100-500P.
⇒ CLB-30100-500PIR1
Type of
AR Coat
Part Number
Wavelength Range
[nm]
Transmittance
[%]
Visible range CLB-30100-500PM 400 − 700 > Average 99
Near-infrared CLB-30100-500PIR1 633 − 1064 > Average 98.5
Infrared CLB-30100-500PIR2 750 − 1550 > Average 98.5
Part of the above is an example of if you want to coat anti-reflective coating
on the lens of the CLB-30100-500P.
Anti-reflection coating can be available to the lens of all of CLB.
T []
100
80
60
Typical Transmittance Data
T: Transmission
40
Synthetic fused silica uncoated
BK7 uncoated
20
Visible range AR
Near-infrared range AR
Infrared range AR
0
100 500 1000
1500 2000
2500
λ [nm]
Compatible Optic Mounts
CHA-25, -60, -130
B140
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W3062
BK7 10×10mm − 20×30mm
Uncoated
Part Number
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
A×B
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
CLB-1010-15P M IR1 IR2 10×10 15 2.2 4.0 12.4 7.79
CLB-1010-20P M IR1 IR2 10×10 20 1.7 3.0 18.0 10.38
CLB-1010-25P M IR1 IR2 10×10 25 2.0 3.0 23.0 12.98
CLB-1010-30P M IR1 IR2 10×10 30 2.2 3.0 28.0 15.57
CLB-1010-40P M IR1 IR2 10×10 40 2.4 3.0 38.0 20.76
CLB-1020-15P M IR1 IR2 10×20 15 2.2 4.0 12.4 7.79
CLB-1020-20P M IR1 IR2 10×20 20 1.7 3.0 18.0 10.38
CLB-1020-25P M IR1 IR2 10×20 25 2.0 3.0 23.0 12.98
CLB-1020-30P M IR1 IR2 10×20 30 2.2 3.0 28.0 15.57
CLB-1020-40P M IR1 IR2 10×20 40 2.4 3.0 38.0 20.76
CLB-1070-15P M IR1 IR2 10×70 15 2.2 4.0 12.4 7.79
CLB-1070-20P M IR1 IR2 10×70 20 1.7 3.0 18.0 10.38
CLB-1070-25P M IR1 IR2 10×70 25 2.0 3.0 23.0 12.98
CLB-1070-30P M IR1 IR2 10×70 30 2.2 3.0 28.0 15.57
CLB-1070-40P M IR1 IR2 10×70 40 2.4 3.0 38.0 20.76
CLB-1515-20P M IR1 IR2 15×15 20 1.8 5.0 16.7 10.38
CLB-1515-25P M IR1 IR2 15×15 25 2.6 5.0 21.7 12.98
CLB-1515-30P M IR1 IR2 15×15 30 2.1 4.0 27.4 15.57
CLB-1515-40P M IR1 IR2 15×15 40 2.6 4.0 37.4 20.76
CLB-1525-20P M IR1 IR2 15×25 20 1.8 5.0 16.7 10.38
CLB-1525-25P M IR1 IR2 15×25 25 2.6 5.0 21.7 12.98
CLB-1525-30P M IR1 IR2 15×25 30 2.1 4.0 27.4 15.57
CLB-1525-40P M IR1 IR2 15×25 40 2.6 4.0 37.4 20.76
CLB-1570-20P M IR1 IR2 15×70 20 1.8 5.0 16.7 10.38
CLB-1570-25P M IR1 IR2 15×70 25 2.6 5.0 21.7 12.98
CLB-1570-30P M IR1 IR2 15×70 30 2.1 4.0 27.4 15.57
CLB-1570-40P M IR1 IR2 15×70 40 2.6 4.0 37.4 20.76
CLB-2020-25P M IR1 IR2 20×20 25 2.3 7.0 20.4 12.98
CLB-2020-30P M IR1 IR2 20×20 30 2.4 6.0 26.1 15.57
CLB-2020-40P M IR1 IR2 20×20 40 2.4 5.0 36.7 20.76
CLB-2020-50P M IR1 IR2 20×20 50 2.0 4.0 47.4 25.95
CLB-2020-60P M IR1 IR2 20×20 60 2.4 4.0 57.3 31.14
CLB-2020-70P M IR1 IR2 20×20 70 2.6 4.0 67.4 36.33
CLB-2020-80P M IR1 IR2 20×20 80 2.8 4.0 77.4 41.52
CLB-2020-100P M IR1 IR2 20×20 100 3.0 4.0 97.4 51.90
CLB-2020-130P M IR1 IR2 20×20 130 3.3 4.0 127.4 67.47
CLB-2020-150P M IR1 IR2 20×20 150 3.4 4.0 147.4 77.85
CLB-2020-200P M IR1 IR2 20×20 200 3.5 4.0 197.4 103.80
CLB-2020-250P M IR1 IR2 20×20 250 3.6 4.0 247.4 129.75
CLB-2020-300P M IR1 IR2 20×20 300 3.7 4.0 297.4 155.70
CLB-2020-400P M IR1 IR2 20×20 400 3.8 4.0 397.4 207.60
CLB-2020-500P M IR1 IR2 20×20 500 3.8 4.0 497.4 259.50
CLB-2020-700P M IR1 IR2 20×20 700 3.9 4.0 697.4 363.30
CLB-2020-1000P M IR1 IR2 20×20 1000 3.9 4.0 997.4 519.00
CLB-2030-25P M IR1 IR2 20×30 25 2.3 7.0 20.4 12.98
CLB-2030-30P M IR1 IR2 20×30 30 2.4 6.0 26.1 15.57
CLB-2030-40P M IR1 IR2 20×30 40 2.4 5.0 36.7 20.76
CLB-2030-50P M IR1 IR2 20×30 50 2.0 4.0 47.4 25.95
CLB-2030-60P M IR1 IR2 20×30 60 2.4 4.0 57.3 31.14
CLB-2030-70P M IR1 IR2 20×30 70 2.6 4.0 67.4 36.33
CLB-2030-80P M IR1 IR2 20×30 80 2.8 4.0 77.4 41.52
CLB-2030-100P M IR1 IR2 20×30 100 3.0 4.0 97.4 51.90
CLB-2030-130P M IR1 IR2 20×30 130 3.3 4.0 127.4 67.47
CLB-2030-150P M IR1 IR2 20×30 150 3.4 4.0 147.4 77.85
CLB-2030-200P M IR1 IR2 20×30 200 3.5 4.0 197.4 103.80
CLB-2030-250P M IR1 IR2 20×30 250 3.6 4.0 247.4 129.75
CLB-2030-300P M IR1 IR2 20×30 300 3.7 4.0 297.4 155.70
CLB-2030-400P M IR1 IR2 20×30 400 3.8 4.0 397.4 207.60
CLB-2030-500P M IR1 IR2 20×30 500 3.8 4.0 497.4 259.50
CLB-2030-700P M IR1 IR2 20×30 700 3.9 4.0 697.4 363.30
CLB-2030-1000P M IR1 IR2 20×30 1000 3.9 4.0 997.4 519.00
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Reasonable Lens
Cylindrical
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B141

Optics & Optical Coatings
Catalog
Cylindrical Plano-convex Lenses CLB-P/CLSQ-P Code W3063
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
BK7 20×40mm − 30×30mm
Uncoated
Part Number
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
A×B
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
CLB-2040-25P M IR1 IR2 20×40 25 2.3 7.0 20.4 12.98
CLB-2040-30P M IR1 IR2 20×40 30 2.4 6.0 26.1 15.57
CLB-2040-40P M IR1 IR2 20×40 40 2.4 5.0 36.7 20.76
CLB-2040-50P M IR1 IR2 20×40 50 2.0 4.0 47.4 25.95
CLB-2040-60P M IR1 IR2 20×40 60 2.4 4.0 57.3 31.14
CLB-2040-70P M IR1 IR2 20×40 70 2.6 4.0 67.4 36.33
CLB-2040-80P M IR1 IR2 20×40 80 2.8 4.0 77.4 41.52
CLB-2040-100P M IR1 IR2 20×40 100 3.0 4.0 97.4 51.90
CLB-2040-130P M IR1 IR2 20×40 130 3.3 4.0 127.4 67.47
CLB-2040-150P M IR1 IR2 20×40 150 3.4 4.0 147.4 77.85
CLB-2040-200P M IR1 IR2 20×40 200 3.5 4.0 197.4 103.80
CLB-2040-250P M IR1 IR2 20×40 250 3.6 4.0 247.4 129.75
CLB-2040-300P M IR1 IR2 20×40 300 3.7 4.0 297.4 155.70
CLB-2040-400P M IR1 IR2 20×40 400 3.8 4.0 397.4 207.60
CLB-2040-500P M IR1 IR2 20×40 500 3.8 4.0 497.4 259.50
CLB-2040-700P M IR1 IR2 20×40 700 3.9 4.0 697.4 363.30
CLB-2040-1000P M IR1 IR2 20×40 1000 3.9 4.0 997.4 519.00
CLB-2050-100P M IR1 IR2 20×50 100 3.0 4.0 97.4 51.90
CLB-2050-130P M IR1 IR2 20×50 130 3.3 4.0 127.4 67.47
CLB-2050-150P M IR1 IR2 20×50 150 3.4 4.0 147.4 77.85
CLB-2050-200P M IR1 IR2 20×50 200 3.5 4.0 197.4 103.80
CLB-2050-250P M IR1 IR2 20×50 250 3.6 4.0 247.4 129.75
CLB-2050-300P M IR1 IR2 20×50 300 3.7 4.0 297.4 155.70
CLB-2050-400P M IR1 IR2 20×50 400 3.8 4.0 397.4 207.60
CLB-2050-500P M IR1 IR2 20×50 500 3.8 4.0 497.4 259.50
CLB-2050-700P M IR1 IR2 20×50 700 3.9 4.0 697.4 363.30
CLB-2050-1000P M IR1 IR2 20×50 1000 3.9 4.0 997.4 519.00
CLB-2070-25P M IR1 IR2 20×70 25 2.3 7.0 20.4 12.98
CLB-2070-30P M IR1 IR2 20×70 30 2.4 6.0 26.1 15.57
CLB-2070-40P M IR1 IR2 20×70 40 2.4 5.0 36.7 20.76
CLB-2070-50P M IR1 IR2 20×70 50 2.0 4.0 47.4 25.95
CLB-2070-60P M IR1 IR2 20×70 60 2.4 4.0 57.3 31.14
CLB-2070-70P M IR1 IR2 20×70 70 2.6 4.0 67.4 36.33
CLB-2070-80P M IR1 IR2 20×70 80 2.8 4.0 77.4 41.52
CLB-2070-100P M IR1 IR2 20×70 100 3.0 4.0 97.4 51.90
CLB-20100-130P M IR1 IR2 20×100 130 3.3 4.0 127.4 67.47
CLB-20100-150P M IR1 IR2 20×100 150 3.4 4.0 147.4 77.85
CLB-20100-200P M IR1 IR2 20×100 200 3.5 4.0 197.4 103.80
CLB-20100-300P M IR1 IR2 20×100 300 3.7 4.0 297.4 155.70
CLB-3030-50P M IR1 IR2 30×30 50 2.2 7.0 45.4 25.95
CLB-3030-60P M IR1 IR2 30×30 60 2.1 6.0 56.0 31.14
CLB-3030-70P M IR1 IR2 30×30 70 1.8 5.0 66.7 36.33
CLB-3030-80P M IR1 IR2 30×30 80 2.2 5.0 76.7 41.52
CLB-3030-100P M IR1 IR2 30×30 100 2.8 5.0 96.7 51.90
CLB-3030-130P M IR1 IR2 30×30 130 3.3 5.0 126.7 67.47
CLB-3030-150P M IR1 IR2 30×30 150 3.5 5.0 146.7 77.85
CLB-3030-200P M IR1 IR2 30×30 200 3.9 5.0 196.7 103.80
CLB-3030-250P M IR1 IR2 30×30 250 4.0 5.0 246.7 129.75
CLB-3030-300P M IR1 IR2 30×30 300 4.3 5.0 296.7 155.70
CLB-3030-400P M IR1 IR2 30×30 400 4.5 5.0 396.7 207.60
CLB-3030-500P M IR1 IR2 30×30 500 4.6 5.0 496.7 259.50
CLB-3030-700P M IR1 IR2 30×30 700 4.7 5.0 696.7 363.30
CLB-3030-1000P M IR1 IR2 30×30 1000 4.8 5.0 996.7 519.00
B142
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W3064
BK7 30×40mm − 30×100mm
Uncoated
Part Number
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
A×B
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
CLB-3040-50P M IR1 IR2 30×40 50 2.2 7.0 45.4 25.95
CLB-3040-60P M IR1 IR2 30×40 60 2.1 6.0 56.0 31.14
CLB-3040-70P M IR1 IR2 30×40 70 1.8 5.0 66.7 36.33
CLB-3040-80P M IR1 IR2 30×40 80 2.2 5.0 76.7 41.52
CLB-3040-100P M IR1 IR2 30×40 100 2.8 5.0 96.7 51.90
CLB-3040-130P M IR1 IR2 30×40 130 3.3 5.0 126.7 67.47
CLB-3040-150P M IR1 IR2 30×40 150 3.5 5.0 146.7 77.85
CLB-3040-200P M IR1 IR2 30×40 200 3.9 5.0 196.7 103.80
CLB-3040-250P M IR1 IR2 30×40 250 4.0 5.0 246.7 129.75
CLB-3040-300P M IR1 IR2 30×40 300 4.3 5.0 296.7 155.70
CLB-3040-400P M IR1 IR2 30×40 400 4.5 5.0 396.7 207.60
CLB-3040-500P M IR1 IR2 30×40 500 4.6 5.0 496.7 259.50
CLB-3040-700P M IR1 IR2 30×40 700 4.7 5.0 696.7 363.30
CLB-3040-1000P M IR1 IR2 30×40 1000 4.8 5.0 996.7 519.00
CLB-3050-50P M IR1 IR2 30×50 50 2.2 7.0 45.4 25.95
CLB-3050-60P M IR1 IR2 30×50 60 2.1 6.0 56.0 31.14
CLB-3050-70P M IR1 IR2 30×50 70 1.8 5.0 66.7 36.33
CLB-3050-80P M IR1 IR2 30×50 80 2.2 5.0 76.7 41.52
CLB-3050-100P M IR1 IR2 30×50 100 2.8 5.0 96.7 51.90
CLB-3050-130P M IR1 IR2 30×50 130 3.3 5.0 126.7 67.47
CLB-3050-150P M IR1 IR2 30×50 150 3.5 5.0 146.7 77.85
CLB-3050-200P M IR1 IR2 30×50 200 3.9 5.0 196.7 103.80
CLB-3050-250P M IR1 IR2 30×50 250 4.0 5.0 246.7 129.75
CLB-3050-300P M IR1 IR2 30×50 300 4.3 5.0 296.7 155.70
CLB-3050-400P M IR1 IR2 30×50 400 4.5 5.0 396.7 207.60
CLB-3050-500P M IR1 IR2 30×50 500 4.6 5.0 496.7 259.50
CLB-3050-700P M IR1 IR2 30×50 700 4.7 5.0 696.7 363.30
CLB-3050-1000P M IR1 IR2 30×50 1000 4.8 5.0 996.7 519.00
CLB-3070-50P M IR1 IR2 30×70 50 2.2 7.0 45.4 25.95
CLB-3070-60P M IR1 IR2 30×70 60 2.1 6.0 56.0 31.14
CLB-3070-70P M IR1 IR2 30×70 70 1.8 5.0 66.7 36.33
CLB-3070-80P M IR1 IR2 30×70 80 2.2 5.0 76.7 41.52
CLB-3070-100P M IR1 IR2 30×70 100 2.8 5.0 96.7 51.90
CLB-30100-130P M IR1 IR2 30×100 130 3.3 5.0 126.7 67.47
CLB-30100-150P M IR1 IR2 30×100 150 3.5 5.0 146.7 77.85
CLB-30100-200P M IR1 IR2 30×100 200 3.9 5.0 196.7 103.80
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B143

Optics & Optical Coatings
Catalog
Cylindrical Plano-convex Lenses CLB-P/CLSQ-P Code W3065
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Synthetic fused silica 10×10mm − 20×30mm
Part Number
A×B
[mm]
Focal length
f
[mm]
Thickness of the edge
te
[mm]
Thickness of the center
tc
[mm]
Back focal length
fb
[mm]
Radius of curvature
r
[mm]
CLSQ-1010-15P 10×10 15 1.9 4.0 12.3 6.90
CLSQ-1010-20P 10×10 20 1.5 3.0 17.9 9.20
CLSQ-1010-25P 10×10 25 1.9 3.0 22.9 11.50
CLSQ-1010-30P 10×10 30 2.1 3.0 27.9 13.80
CLSQ-1010-40P 10×10 40 2.3 3.0 37.9 18.40
CLSQ-1020-15P 10×20 15 1.9 4.0 12.3 6.90
CLSQ-1020-20P 10×20 20 1.5 3.0 17.9 9.20
CLSQ-1020-25P 10×20 25 1.9 3.0 22.9 11.50
CLSQ-1020-30P 10×20 30 2.1 3.0 27.9 13.80
CLSQ-1020-40P 10×20 40 2.3 3.0 37.9 18.40
CLSQ-1070-15P 10×70 15 1.9 4.0 12.3 6.90
CLSQ-1070-20P 10×70 20 1.5 3.0 17.9 9.20
CLSQ-1070-25P 10×70 25 1.9 3.0 22.9 11.50
CLSQ-1070-30P 10×70 30 2.1 3.0 27.9 13.80
CLSQ-1070-40P 10×70 40 2.3 3.0 37.9 18.40
CLSQ-1515-20P 15×15 20 2.1 6.0 16.0 9.20
CLSQ-1515-25P 15×15 25 2.2 5.0 21.6 11.50
CLSQ-1515-30P 15×15 30 1.8 4.0 27.3 13.80
CLSQ-1515-40P 15×15 40 2.4 4.0 37.3 18.40
CLSQ-1525-20P 15×25 20 2.1 6.0 16.0 9.20
CLSQ-1525-25P 15×25 25 2.2 5.0 21.6 11.50
CLSQ-1525-30P 15×25 30 1.8 4.0 27.3 13.80
CLSQ-1525-40P 15×25 40 2.4 4.0 37.3 18.40
CLSQ-1570-20P 15×70 20 2.1 6.0 16.0 9.20
CLSQ-1570-25P 15×70 25 2.2 5.0 21.6 11.50
CLSQ-1570-30P 15×70 30 1.8 4.0 27.3 13.80
CLSQ-1570-40P 15×70 40 2.4 4.0 37.3 18.40
CLSQ-2020-25P 20×20 25 1.2 7.0 20.2 11.50
CLSQ-2020-30P 20×20 30 1.7 6.0 25.9 13.80
CLSQ-2020-40P 20×20 40 2.0 5.0 36.6 18.40
CLSQ-2020-50P 20×20 50 1.7 4.0 47.3 23.00
CLSQ-2020-60P 20×20 60 2.1 4.0 57.3 27.60
CLSQ-2020-70P 20×20 70 2.4 4.0 67.3 32.20
CLSQ-2020-80P 20×20 80 2.6 4.0 77.3 36.80
CLSQ-2020-100P 20×20 100 2.9 4.0 97.3 46.00
CLSQ-2020-130P 20×20 130 3.2 4.0 127.3 59.80
CLSQ-2020-150P 20×20 150 3.3 4.0 147.3 69.00
CLSQ-2020-200P 20×20 200 3.5 4.0 197.3 92.00
CLSQ-2020-250P 20×20 250 3.6 4.0 247.3 115.00
CLSQ-2020-300P 20×20 300 3.6 4.0 297.3 138.00
CLSQ-2020-400P 20×20 400 3.7 4.0 397.3 184.00
CLSQ-2020-500P 20×20 500 3.7 4.0 497.3 230.00
CLSQ-2020-700P 20×20 700 3.8 4.0 697.3 322.00
CLSQ-2020-1000P 20×20 1000 3.8 4.0 997.3 460.00
CLSQ-2030-25P 20×30 25 1.2 7.0 20.2 11.50
CLSQ-2030-30P 20×30 30 1.7 6.0 25.9 13.80
CLSQ-2030-40P 20×30 40 2.0 5.0 36.6 18.40
CLSQ-2030-50P 20×30 50 1.7 4.0 47.3 23.00
CLSQ-2030-60P 20×30 60 2.1 4.0 57.3 27.60
CLSQ-2030-70P 20×30 70 2.4 4.0 67.3 32.20
CLSQ-2030-80P 20×30 80 2.6 4.0 77.3 36.80
CLSQ-2030-100P 20×30 100 2.9 4.0 97.3 46.00
CLSQ-2030-130P 20×30 130 3.2 4.0 127.3 59.80
CLSQ-2030-150P 20×30 150 3.3 4.0 147.3 69.00
CLSQ-2030-200P 20×30 200 3.5 4.0 197.3 92.00
CLSQ-2030-250P 20×30 250 3.6 4.0 247.3 115.00
CLSQ-2030-300P 20×30 300 3.6 4.0 297.3 138.00
CLSQ-2030-400P 20×30 400 3.7 4.0 397.3 184.00
CLSQ-2030-500P 20×30 500 3.7 4.0 497.3 230.00
CLSQ-2030-700P 20×30 700 3.8 4.0 697.3 322.00
CLSQ-2030-1000P 20×30 1000 3.8 4.0 997.3 460.00
B144
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W3066
Synthetic fused silica 20×40mm − 30×30mm
Part Number
A×B
[mm]
Focal length
f
[mm]
Thickness of the edge
te
[mm]
Thickness of the center
tc
[mm]
Back focal length
fb
[mm]
Radius of curvature
r
[mm]
CLSQ-2040-25P 20×40 25 1.2 7.0 20.2 11.50
CLSQ-2040-30P 20×40 30 1.7 6.0 25.9 13.80
CLSQ-2040-40P 20×40 40 2.0 5.0 36.6 18.40
CLSQ-2040-50P 20×40 50 1.7 4.0 47.3 23.00
CLSQ-2040-60P 20×40 60 2.1 4.0 57.3 27.60
CLSQ-2040-70P 20×40 70 2.4 4.0 67.3 32.20
CLSQ-2040-80P 20×40 80 2.6 4.0 77.3 36.80
CLSQ-2040-100P 20×40 100 2.9 4.0 97.3 46.00
CLSQ-2040-130P 20×40 130 3.2 4.0 127.3 59.80
CLSQ-2040-150P 20×40 150 3.3 4.0 147.3 69.00
CLSQ-2040-200P 20×40 200 3.5 4.0 197.3 92.00
CLSQ-2040-250P 20×40 250 3.6 4.0 247.3 115.00
CLSQ-2040-300P 20×40 300 3.6 4.0 297.3 138.00
CLSQ-2040-400P 20×40 400 3.7 4.0 397.3 184.00
CLSQ-2040-500P 20×40 500 3.7 4.0 497.3 230.00
CLSQ-2040-700P 20×40 700 3.8 4.0 697.3 322.00
CLSQ-2040-1000P 20×40 1000 3.8 4.0 997.3 460.00
CLSQ-2050-100P 20×50 100 2.9 4.0 97.3 46.00
CLSQ-2050-130P 20×50 130 3.2 4.0 127.3 59.80
CLSQ-2050-150P 20×50 150 3.3 4.0 147.3 69.00
CLSQ-2050-200P 20×50 200 3.5 4.0 197.3 92.00
CLSQ-2050-250P 20×50 250 3.6 4.0 247.3 115.00
CLSQ-2050-300P 20×50 300 3.6 4.0 297.3 138.00
CLSQ-2050-400P 20×50 400 3.7 4.0 397.3 184.00
CLSQ-2050-500P 20×50 500 3.7 4.0 497.3 230.00
CLSQ-2050-700P 20×50 700 3.8 4.0 697.3 322.00
CLSQ-2050-1000P 20×50 1000 3.8 4.0 997.3 460.00
CLSQ-2070-25P 20×70 25 1.2 7.0 20.2 11.50
CLSQ-2070-30P 20×70 30 1.7 6.0 25.9 13.80
CLSQ-2070-40P 20×70 40 2.0 5.0 36.6 18.40
CLSQ-2070-50P 20×70 50 1.7 4.0 47.3 23.00
CLSQ-2070-60P 20×70 60 2.1 4.0 57.3 27.60
CLSQ-2070-70P 20×70 70 2.4 4.0 67.3 32.20
CLSQ-2070-80P 20×70 80 2.6 4.0 77.3 36.80
CLSQ-2070-100P 20×70 100 2.9 4.0 97.3 46.00
CLSQ-20100-130P 20×100 130 3.2 4.0 127.3 59.80
CLSQ-20100-150P 20×100 150 3.3 4.0 147.3 69.00
CLSQ-20100-200P 20×100 200 3.5 4.0 197.3 92.00
CLSQ-20100-250P 20×100 250 3.6 4.0 247.3 115.00
CLSQ-20100-300P 20×100 300 3.6 4.0 297.3 138.00
CLSQ-20100-400P 20×100 400 3.7 4.0 397.3 184.00
CLSQ-20100-500P 20×100 500 3.7 4.0 497.3 230.00
CLSQ-20100-700P 20×100 700 3.8 4.0 697.3 322.00
CLSQ-20100-1000P 20×100 1000 3.8 4.0 997.3 460.00
CLSQ-3030-50P 30×30 50 1.4 7.0 45.2 23.00
CLSQ-3030-60P 30×30 60 1.6 6.0 55.9 27.60
CLSQ-3030-70P 30×30 70 2.3 6.0 65.9 32.20
CLSQ-3030-80P 30×30 80 1.8 5.0 79.6 36.80
CLSQ-3030-100P 30×30 100 2.5 5.0 96.6 46.00
CLSQ-3030-130P 30×30 130 3.1 5.0 126.6 59.80
CLSQ-3030-150P 30×30 150 3.3 5.0 146.6 69.00
CLSQ-3030-200P 30×30 200 3.8 5.0 196.6 92.00
CLSQ-3030-250P 30×30 250 4.0 5.0 246.6 115.00
CLSQ-3030-300P 30×30 300 4.2 5.0 296.6 138.00
CLSQ-3030-400P 30×30 400 4.4 5.0 396.6 184.00
CLSQ-3030-500P 30×30 500 4.4 5.0 496.6 230.00
CLSQ-3030-700P 30×30 700 4.7 5.0 696.6 322.00
CLSQ-3030-1000P 30×30 1000 4.8 5.0 996.6 460.00
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Reasonable Lens
Cylindrical
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B145

Optics & Optical Coatings
Catalog
Cylindrical Plano-convex Lenses CLB-P/CLSQ-P Code W3067
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Synthetic fused silica 30×40mm − 30×100mm
Part Number
A×B
[mm]
Focal length
f
[mm]
Thickness of the edge
te
[mm]
Thickness of the center
tc
[mm]
Back focal length
fb
[mm]
Radius of curvature
r
[mm]
CLSQ-3040-50P 30×40 50 1.4 7.0 45.2 23.00
CLSQ-3040-60P 30×40 60 1.6 6.0 55.9 27.60
CLSQ-3040-70P 30×40 70 2.3 6.0 65.9 32.20
CLSQ-3040-80P 30×40 80 1.8 5.0 79.6 36.80
CLSQ-3040-100P 30×40 100 2.5 5.0 96.6 46.00
CLSQ-3040-130P 30×40 130 3.1 5.0 126.6 59.80
CLSQ-3040-150P 30×40 150 3.3 5.0 146.6 69.00
CLSQ-3040-200P 30×40 200 3.8 5.0 196.6 92.00
CLSQ-3040-250P 30×40 250 4.0 5.0 246.6 115.00
CLSQ-3040-300P 30×40 300 4.2 5.0 296.6 138.00
CLSQ-3040-400P 30×40 400 4.4 5.0 396.6 184.00
CLSQ-3040-500P 30×40 500 4.4 5.0 496.6 230.00
CLSQ-3040-700P 30×40 700 4.7 5.0 696.6 322.00
CLSQ-3040-1000P 30×40 1000 4.8 5.0 996.6 460.00
CLSQ-3050-50P 30×50 50 1.4 7.0 45.2 23.00
CLSQ-3050-60P 30×50 60 1.6 6.0 55.9 27.60
CLSQ-3050-70P 30×50 70 2.3 6.0 65.9 32.20
CLSQ-3050-80P 30×50 80 1.8 5.0 79.6 36.80
CLSQ-3050-100P 30×50 100 2.5 5.0 96.6 46.00
CLSQ-3050-130P 30×50 130 3.1 5.0 126.6 59.80
CLSQ-3050-150P 30×50 150 3.3 5.0 146.6 69.00
CLSQ-3050-200P 30×50 200 3.8 5.0 196.6 92.00
CLSQ-3050-250P 30×50 250 4.0 5.0 246.6 115.00
CLSQ-3050-300P 30×50 300 4.2 5.0 296.6 138.00
CLSQ-3050-400P 30×50 400 4.4 5.0 396.6 184.00
CLSQ-3050-500P 30×50 500 4.4 5.0 496.6 230.00
CLSQ-3050-700P 30×50 700 4.7 5.0 696.6 322.00
CLSQ-3050-1000P 30×50 1000 4.8 5.0 996.6 460.00
CLSQ-30100-130P 30×100 130 3.1 5.0 126.6 59.80
CLSQ-30100-150P 30×100 150 3.3 5.0 146.6 69.00
CLSQ-30100-200P 30×100 200 3.8 5.0 196.6 92.00
CLSQ-30100-250P 30×100 250 4.0 5.0 246.6 115.00
CLSQ-30100-300P 30×100 300 4.2 5.0 296.6 138.00
CLSQ-30100-400P 30×100 400 4.4 5.0 396.6 184.00
CLSQ-30100-500P 30×100 500 4.4 5.0 496.6 230.00
CLSQ-30100-700P 30×100 700 4.7 5.0 696.6 322.00
CLSQ-30100-1000P 30×100 1000 4.8 5.0 996.6 460.00
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
B146
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Cylindrical Plano-concave Lenses
CLB-N/CLSQ-N
Cylindrical plano-concave lens has a concave curvature in the vertical direction and has no curvature
in the horizontal direction.
Used in such applications in combination with a plano-convex cylindrical, elliptical shaped beam to
a circular beam of semiconductor laser.
◦There are two types available; BK7 for from visible range to infrared wavelength range, high-strength synthetic fused
silica which has high laser damage threshold used in less than 350nm ultraviolet light.
◦Made of BK7 lenses are also available with three types of anti-reflection coating in the infrared wavelength, near-infrared
wavelength and visible wavelength.
◦By using a cylindrical lens in the optical system, it is available to change the shape and aspect ratio of the illumination
light beam.
Schematic
Focal point
Uncoated or
anti-reflection coating
Outline Drawing
te
Uncoated or
anti-reflection coating
tc
(in mm)
●Tolerance
Length A +0
−0.1 B +0
−0.1
Thickness tc ±0.2
Specifications
Material CLB: BK7 CLSQ: Synthetic fused silica
Design wavelength 546.1nm
Refractive index
BK: ne=1.519
Synthetic fused silica: ne=1.460
Uncoated: the end of the part number ‘N’
Coating
Anti-reflection coating:
the end of the part number ‘NM’, ‘NIR1’, ‘NIR2’
Laser Damage Threshold
Anti-reflection coating: 4J/cm 2
Laser pulse with 10ns, repetition frequency 20Hz
Clear aperture
90% of square or rectangle to actual dimension
Surface Quality (Scratch−Dig) 20−10
Guide
▶It is also available other than the products which listed in the catalog
such as focal length and outer diameter size.
▶Production is also available with a specific wavelength of anti-reflective
coating on the lens of no coated.
▶To fixe the cylindrical lenses, it is available cylindrical lens holders (cf.
CHA). C044
Attention
▶The cylindrical plano-concave lens has chromatic aberration, the
focal length will vary depending on the wavelength. Please check the
“wavelength characteristic of the focal length data” on the Web for
the focal lengths of each wavelength.
W3068
▶There is a direction to put light in a plano-concave cylindrical lens.
Please let the incident parallel light from the concave side. There is a
possibility that the spherical aberration increases when in reverse, the
optical performance of the system will not be appropriate.
▶Losses due to reflection of the front and rear surfaces of the lens, the
transmittance of no coated is about 90%.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
A
B
r
f
Principal point
fb
Substrates/Windows
Optical Data
Maintenance
How to specify the anti-reflection coating
In case of specifying a anti-reflection coating 633nm – 1064nm to
near infrared lens of CLB-3050-200N.
⇒ CLB-3050-200NIR1
Type of
AR Coat
Part Number
Wavelength Range
[nm]
Transmittance
[%]
Visible range CLB-3050-200NM 400 − 700 > Average 99
Near-infrared CLB-3050-200NIR1 633 − 1064 > Average 98.5
Infrared CLB-3050-200NIR2 750 − 1550 > Average 98.5
Part of the above is an example of if you want to coat anti-reflective coating
on the lens of the CLB-3050-200N.
Anti-reflection coating can be available to the lens of all of CLB.
T []
100
80
60
Typical Transmittance Data
T: Transmission
40
Synthetic fused silica uncoated
BK7 uncoated
20
Visible range AR
Near-infrared range AR
Infrared range AR
0
100 500 1000
1500 2000
2500
λ [nm]
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Compatible Optic Mounts
CHA-25, -60
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B147

Optics & Optical Coatings
Catalog
Cylindrical Plano-concave Lenses CLB-N/CLSQ-N Code W3068
BK7 10×10mm − 30×50mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Uncoated
Part Number
How to specify the anti-reflection coating
Visibe
400 − 700nm
Near-infrared
633 − 1064nm
Infrared
750 − 1550nm
A×B
[mm]
Focal length
f
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Back focal
length
fb
[mm]
Radius of
curvature
r
[mm]
CLB-1010-15N M IR1 IR2 10×10 −15 4.0 2.2 −16.4 7.79
CLB-1010-20N M IR1 IR2 10×10 −20 3.0 1.7 −21.1 10.38
CLB-1010-25N M IR1 IR2 10×10 −25 3.0 2.0 −26.3 12.98
CLB-1010-30N M IR1 IR2 10×10 −30 3.0 2.2 −31.4 15.57
CLB-1010-40N M IR1 IR2 10×10 −40 3.0 2.4 −41.6 20.76
CLB-1020-15N M IR1 IR2 10×20 −15 4.0 2.2 −16.4 7.79
CLB-1020-20N M IR1 IR2 10×20 −20 3.0 1.7 −21.1 10.38
CLB-1020-25N M IR1 IR2 10×20 −25 3.0 2.0 −26.3 12.98
CLB-1020-30N M IR1 IR2 10×20 −30 3.0 2.2 −31.4 15.57
CLB-1020-40N M IR1 IR2 10×20 −40 3.0 2.4 −41.6 20.76
CLB-1515-20N M IR1 IR2 15×15 −20 5.0 1.8 −21.2 10.38
CLB-1515-25N M IR1 IR2 15×15 −25 5.0 2.6 −26.7 12.98
CLB-1515-30N M IR1 IR2 15×15 −30 4.0 2.1 −31.4 15.57
CLB-1515-40N M IR1 IR2 15×15 −40 4.0 2.6 −41.7 20.76
CLB-1525-20N M IR1 IR2 15×25 −20 5.0 1.8 −21.2 10.38
CLB-1525-25N M IR1 IR2 15×25 −25 5.0 2.6 −26.7 12.98
CLB-1525-30N M IR1 IR2 15×25 −30 4.0 2.1 −31.4 15.57
CLB-1525-40N M IR1 IR2 15×25 −40 4.0 2.6 −41.7 20.76
CLB-2020-25N M IR1 IR2 20×20 −25 7.0 2.3 −26.5 12.98
CLB-2020-30N M IR1 IR2 20×20 −30 6.0 2.4 −31.6 15.57
CLB-2020-40N M IR1 IR2 20×20 −40 5.0 2.4 −41.6 20.76
CLB-2020-50N M IR1 IR2 20×20 −50 4.0 2.0 −51.3 25.95
CLB-2020-60N M IR1 IR2 20×20 −60 4.0 2.4 −61.5 31.14
CLB-2020-70N M IR1 IR2 20×20 −70 4.0 2.6 −71.7 36.33
CLB-2020-80N M IR1 IR2 20×20 −80 4.0 2.8 −81.8 41.52
CLB-2020-100N M IR1 IR2 20×20 −100 4.0 3.0 −102.0 51.90
CLB-2020-130N M IR1 IR2 20×20 −130 4.0 3.3 −132.1 67.47
CLB-2020-150N M IR1 IR2 20×20 −150 4.0 3.4 −152.2 77.85
CLB-2020-200N M IR1 IR2 20×20 −200 4.0 3.5 −202.3 103.80
CLB-2020-250N M IR1 IR2 20×20 −250 4.0 3.6 −252.4 129.75
CLB-2020-300N M IR1 IR2 20×20 −300 4.0 3.7 −302.4 155.70
CLB-2030-100N M IR1 IR2 20×30 −100 4.0 3.0 −102.0 51.90
CLB-2030-130N M IR1 IR2 20×30 −130 4.0 3.3 −132.1 67.47
CLB-2030-150N M IR1 IR2 20×30 −150 4.0 3.4 −152.2 77.85
CLB-2030-200N M IR1 IR2 20×30 −200 4.0 3.5 −202.3 103.80
CLB-2030-250N M IR1 IR2 20×30 −250 4.0 3.6 −252.4 129.75
CLB-2030-300N M IR1 IR2 20×30 −300 4.0 3.7 −302.4 155.70
CLB-2040-25N M IR1 IR2 20×40 −25 7.0 2.3 −26.5 12.98
CLB-2040-30N M IR1 IR2 20×40 −30 6.0 2.4 −31.6 15.57
CLB-2040-40N M IR1 IR2 20×40 −40 5.0 2.4 −41.6 20.76
CLB-2040-50N M IR1 IR2 20×40 −50 4.0 2.0 −51.3 25.95
CLB-2040-60N M IR1 IR2 20×40 −60 4.0 2.4 −61.5 31.14
CLB-2040-70N M IR1 IR2 20×40 −70 4.0 2.6 −71.7 36.33
CLB-2040-80N M IR1 IR2 20×40 −80 4.0 2.8 −81.8 41.52
CLB-2050-100N M IR1 IR2 20×50 −100 4.0 3.0 −102.0 51.90
CLB-2050-130N M IR1 IR2 20×50 −130 4.0 3.3 −132.1 67.47
CLB-2050-150N M IR1 IR2 20×50 −150 4.0 3.4 −152.2 77.85
CLB-2050-200N M IR1 IR2 20×50 −200 4.0 3.5 −202.3 103.80
CLB-2050-250N M IR1 IR2 20×50 −250 4.0 3.6 −252.4 129.75
CLB-2050-300N M IR1 IR2 20×50 −300 4.0 3.7 −302.4 155.70
CLB-3030-50N M IR1 IR2 30×30 −50 7.0 2.2 −51.5 25.95
CLB-3030-60N M IR1 IR2 30×30 −60 6.0 2.1 −61.4 31.14
CLB-3030-70N M IR1 IR2 30×30 −70 5.0 1.8 −71.2 36.33
CLB-3030-80N M IR1 IR2 30×30 −80 5.0 2.2 −81.4 41.52
CLB-3030-100N M IR1 IR2 30×30 −100 5.0 2.8 −101.8 51.90
CLB-3030-130N M IR1 IR2 30×30 −130 5.0 3.3 −132.2 67.47
CLB-3030-150N M IR1 IR2 30×30 −150 5.0 3.5 −152.3 77.85
CLB-3030-200N M IR1 IR2 30×30 −200 5.0 3.9 −202.6 103.80
CLB-3030-250N M IR1 IR2 30×30 −250 5.0 4.1 −252.7 129.75
CLB-3030-300N M IR1 IR2 30×30 −300 5.0 4.3 −302.8 155.70
CLB-3040-50N M IR1 IR2 30×40 −50 7.0 2.2 −51.5 25.95
CLB-3040-60N M IR1 IR2 30×40 −60 6.0 2.1 −61.4 31.14
CLB-3040-70N M IR1 IR2 30×40 −70 5.0 1.8 −71.2 36.33
CLB-3040-80N M IR1 IR2 30×40 −80 5.0 2.2 −81.4 41.52
CLB-3050-100N M IR1 IR2 30×50 −100 5.0 2.8 −101.8 51.90
CLB-3050-130N M IR1 IR2 30×50 −130 5.0 3.3 −132.2 67.47
CLB-3050-150N M IR1 IR2 30×50 −150 5.0 3.5 −152.3 77.85
CLB-3050-200N M IR1 IR2 30×50 −200 5.0 3.9 −202.6 103.80
CLB-3050-250N M IR1 IR2 30×50 −250 5.0 4.1 −252.7 129.75
CLB-3050-300N M IR1 IR2 30×50 −300 5.0 4.3 −302.8 155.70
B148
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Catalog
Code
W3069
Synthetic fused silica 10×10mm − 30×50mm
Part Number
A×B
[mm]
Focal length
f
[mm]
Thickness of the edge
te
[mm]
Thickness of the center
tc
[mm]
Back focal length
fb
[mm]
Radius of curvature
r
[mm]
CLSQ-1010-15N 10×10 −15 4.0 1.9 −16.3 6.90
CLSQ-1010-20N 10×10 −20 3.0 1.5 −21.0 9.20
CLSQ-1010-25N 10×10 −25 3.0 1.9 −26.3 11.50
CLSQ-1010-30N 10×10 −30 3.0 2.1 −31.4 13.80
CLSQ-1010-40N 10×10 −40 3.0 2.3 −41.6 18.40
CLSQ-1020-15N 10×20 −15 4.0 1.9 −16.3 6.90
CLSQ-1020-20N 10×20 −20 3.0 1.5 −21.0 9.20
CLSQ-1020-25N 10×20 −25 3.0 1.9 −26.3 11.50
CLSQ-1020-30N 10×20 −30 3.0 2.1 −31.4 13.80
CLSQ-1020-40N 10×20 −40 3.0 2.3 −41.6 18.40
CLSQ-1515-20N 15×15 −20 6.0 2.1 −21.5 9.20
CLSQ-1515-25N 15×15 −25 5.0 2.2 −26.5 11.50
CLSQ-1515-30N 15×15 −30 4.0 1.8 −31.2 13.80
CLSQ-1515-40N 15×15 −40 4.0 2.4 −41.6 18.40
CLSQ-1525-20N 15×25 −20 6.0 2.1 −21.5 9.20
CLSQ-1525-25N 15×25 −25 5.0 2.2 −26.5 11.50
CLSQ-1525-30N 15×25 −30 4.0 1.8 −31.2 13.80
CLSQ-1525-40N 15×25 −40 4.0 2.4 −41.6 18.40
CLSQ-2020-25N 20×20 −25 7.0 1.2 −25.8 11.50
CLSQ-2020-30N 20×20 −30 6.0 1.7 −31.2 13.80
CLSQ-2020-40N 20×20 −40 5.0 2.0 −41.4 18.40
CLSQ-2020-50N 20×20 −50 4.0 1.7 −51.2 23.00
CLSQ-2020-60N 20×20 −60 4.0 2.1 −61.5 27.60
CLSQ-2020-70N 20×20 −70 4.0 2.4 −71.6 32.20
CLSQ-2020-80N 20×20 −80 4.0 2.6 −81.8 36.80
CLSQ-2020-100N 20×20 −100 4.0 2.9 −102.0 46.00
CLSQ-2020-130N 20×20 −130 4.0 3.2 −132.2 59.80
CLSQ-2020-150N 20×20 −150 4.0 3.3 −152.2 69.00
CLSQ-2020-200N 20×20 −200 4.0 3.5 −202.4 92.00
CLSQ-2020-250N 20×20 −250 4.0 3.6 −252.4 115.00
CLSQ-2020-300N 20×20 −300 4.0 3.6 −302.5 138.00
CLSQ-2040-25N 20×40 −25 7.0 1.2 −25.8 11.50
CLSQ-2040-30N 20×40 −30 6.0 1.7 −31.2 13.80
CLSQ-2040-40N 20×40 −40 5.0 2.0 −41.4 18.40
CLSQ-2040-50N 20×40 −50 4.0 1.7 −51.2 23.00
CLSQ-2040-60N 20×40 −60 4.0 2.1 −61.5 27.60
CLSQ-2040-70N 20×40 −70 4.0 2.4 −71.6 32.20
CLSQ-2040-80N 20×40 −80 4.0 2.6 −81.8 36.80
CLSQ-2050-100N 20×50 −100 4.0 2.9 −102.0 46.00
CLSQ-2050-130N 20×50 −130 4.0 3.2 −132.2 59.80
CLSQ-2050-150N 20×50 −150 4.0 3.3 −152.2 69.00
CLSQ-2050-200N 20×50 −200 4.0 3.5 −202.4 92.00
CLSQ-2050-250N 20×50 −250 4.0 3.6 −252.4 115.00
CLSQ-2050-300N 20×50 −300 4.0 3.6 −302.5 138.00
CLSQ-3030-50N 30×30 −50 7.0 1.4 −51.0 23.00
CLSQ-3030-60N 30×30 −60 6.0 1.6 −61.1 27.60
CLSQ-3030-70N 30×30 −70 6.0 2.3 −71.6 32.20
CLSQ-3030-80N 30×30 −80 5.0 1.8 −81.2 36.80
CLSQ-3030-100N 30×30 −100 5.0 2.5 −101.7 46.00
CLSQ-3030-130N 30×30 −130 5.0 3.1 −132.1 59.80
CLSQ-3030-150N 30×30 −150 5.0 3.3 −152.3 69.00
CLSQ-3030-200N 30×30 −200 5.0 3.8 −202.6 92.00
CLSQ-3030-250N 30×30 −250 5.0 4.0 −252.8 115.00
CLSQ-3030-300N 30×30 −300 5.0 4.2 −302.9 138.00
CLSQ-3040-50N 30×40 −50 7.0 1.4 −51.0 23.00
CLSQ-3040-60N 30×40 −60 6.0 1.6 −61.1 27.60
CLSQ-3040-70N 30×40 −70 6.0 2.3 −71.6 32.20
CLSQ-3040-80N 30×40 −80 5.0 1.8 −81.2 36.80
CLSQ-3050-100N 30×50 −100 5.0 2.5 −101.7 46.00
CLSQ-3050-130N 30×50 −130 5.0 3.1 −132.1 59.80
CLSQ-3050-150N 30×50 −150 5.0 3.3 −152.3 69.00
CLSQ-3050-200N 30×50 −200 5.0 3.8 −202.6 92.00
CLSQ-3050-250N 30×50 −250 5.0 4.0 −252.8 115.00
CLSQ-3050-300N 30×50 −300 5.0 4.2 −302.9 138.00
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Reasonable Lens
Cylindrical
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B149

Optics & Optical Coatings
Contact sheet
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Contact sheet for Special Order for spherical lens
To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Affiliation
(Organization Name)
Department
TEL
Country/Address
Name &
Designation
Drawing Number
Desired
Delivery Date
Specification
of lens
Specifications
of Coating
Other
Quantity
Selected from
standard product
Custom-made
Part
Number
Type
Material
Focal length
Design
wavelength
Diameter
With or without
coating
Wavelength Used
FAX
Plano-convex
Plano-concave
nm Type of AR (If required)
■Estimation ■Order
Date
BK7 Synthetic fused silica
Synthetic fused silica for Excimer Laser (λ= )
Other ( )
f =
λ =
λ =
mm
nm
a
b
tc
If you are using a spherical lens
of standard product, please fill
in the product number.
mm
mm
mm
Non Single-layer anti-reflection coating
Broadband multi-layer anti-reflection coating
Other ( )
* Write more detailed specifications here. (Rough illustration is acceptable.)
b
a
Estimate
Budget
tc
E-mail
Yes: by Date
b
a
tc
(Tentative name is okay)
No
JP Yen
●When there is no specification of
the design wavelength, 546.1nm
and standard products.
●May want to change the center
thickness by the case of the
production.
●If you do not specify the dimension
tolerance, we will apply our
standard tolerance instead.
Sigma Koki Co., Ltd.
B150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Rod Lenses
RODB
Catalog
Code
W3070
Cylindrical lens with its circumference surface polished.
Applicable for laser focusing into a line, changing beam shape into sheet-shape, or irradiating at a
distance with elongated line.
◦Focal length shortened by reducing the rod lense diameter compared to cylindrical lenses.
◦Distortion-free, flex free, straight line gain during projection is made from a distance. This is achieved by precise process
and polishing.
◦Suitable for collecting large sums of light by installing it in front of a line sensor.
Specifications
Material
Design wavelength
Polish
Coating
Surface Quality (Scratch−Dig)
Guide
BK7
546.1nm
Rod circumference surface polished
Uncoated
40−20
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
▶Please contact our International Sales Division for rod lens with AR
coating requirements.
▶Please contact our International Sales Division for customized products.
(customized on outer diameter, length, etc.)
▶Please use MLH-10 (Small Lens Claw) or MLH-SF (Selfoc ® Lens Claws)
to hold cylindrical lens. C042, C043
Motoeized
Stages
Light
Sources
Schematic
Uncoated
Uncoated
Focal point
Attention
▶Both ends are not polished. Introduce beam from circumference
surface.
▶Notable spherical aberration may occur due to the small curvature of
rod lenses. Please use cylindrical lenses for precise optical system.
B138
▶When diverging laser beam through rod lenses, operators’ eyes may
be exposed to diverged beam. Make sure to check the power of laser
and to apply safety goggles before using rod lenses.
▶Both rod lenses are not chamfered. Careful handling is required.
Index
Guide
Mirrors
Beamsplitters
Outline Drawing
L
Specifications
Part Number
φD
f
fb
Diameter φD
[mm]
(in mm)
●Tolerance
Diameter φD +0
−0.1
Length L ±0.1
Length L
[mm]
BK7(Uncoated) Typical Transmittance Data
T: Transmission
Focal length
f
[mm]
Back focal length
fb
[mm]
RODB-03L06 φ3 6 2.2 0.7
RODB-03L08 φ3 8 2.2 0.7
RODB-03L10 φ3 10 2.2 0.7
RODB-04L06 φ4 6 2.9 0.9
RODB-04L08 φ4 8 2.9 0.9
RODB-04L10 φ4 10 2.9 0.9
RODB-05L06 φ5 6 3.7 1.2
RODB-05L08 φ5 8 3.7 1.2
RODB-05L10 φ5 10 3.7 1.2
T []
100
90
80
70
60
50
40
30
20
10
0
200 700
1200 1700
2200
λ [nm]
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Compatible Optic Mounts
MLH-10 / MLH-SF + MLH-10ADP-2 + FOP-1
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B151

Optics & Optical Coatings
Fly-Eye Lens
FEL
Catalog
Code
W3183
Application
Systems
Optics &
Optical
Coatings
Fly-Eye Lens is used when making illumination light of homogeneous brightness for projector and
semiconductor manufacturing equipment. If used in fly-eye lenses of 2 pieces in pair, even strong
diffusing light such as a lamp, it can be a light of rectangular intensity distribution.
◦Two types are available for focal length of 42.07mm at the partition of 7×9 and 38.24mm at the partition of 10×13.
◦With an anti-reflection coating, the incident light can be almost used the illumination light without loss of light
◦By use of the press molding technology of glass lens, it was achieved for both high performance and low cost.
Holders
Bases
Manual
Stages
Actuators
Specifications
Material
B270 ® or equivalent
Coating
Anti-reflection coating
(dielectric multilayer coating)
Design Wavelength
400 – 700nm
Incident Angle
0° (Coating specification)
Focal Length Tolerance ±3%
Optical Axis Center Position Tolerance ±1.5mm
* B270® is a registered trademark of SCHOTT AG.
Motoeized
Stages
Light
Sources
Schematic
Guide
▶We can also produce for the lens array suitable for the requested
number of divisions, the focal length, the size and using wavelength.
▶We can also produce the optical system using fly lens array.
Attention
Index
Guide
Mirrors
Beamsplitters
Parallel light (gauss distribution)
Fly-Eye Lens
imaging lens
Illumination light source
(Rectanglestrength distribution)
▶Imaging lens is not included in the specification. In addition, fly-eye
lens array is sold one by one.
▶When used in a laser with high coherence, noise may be generated in
the intensity distribution due to the diffraction by the border line of
the lens.
Polarizers
Outline Drawing
(in mm)
Lenses
FEL-5860R03-42.07PM
FEL-46S03-38.24PM
Multi-Element Optics
4-R3
4-R4
4-R1
4-R2
Filters
Prisms
Substrates/Windows
flat surface
5.4±0.1
48.6
58±0.2
flat surface
3.0±0.1
39.05±0.2
46.06±0.15
Optical Data
Maintenance
2.5±0.15
3±0.2
7.0±0.1
49
60±0.2
2.5±0.15
3±0.2
4.0±0.1
40.05±0.2
46.06±0.15
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Specifications
Part Number
Focal length
[mm]
Curve of radius
[mm]
FEL-5860R03-42.07PM 42.07 20.0
FEL-46S03-38.24PM 38.24 22.0
B152
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Fresnel Lens
FRL
Catalog
Code
W3184
The lens of short focal length, which is thicker, has been made to a step structure and to a thin
plate shape with the characteristics of the lens.
It can be used as a substitute for the lens for a loupe and LED light.
◦Since it is processed directly on the acrylic plate of 2mm thickness, it is difficult to be deformed and the performance is
stable.
◦There are four types of the focal length from 5mm to 20mm.
◦Compared with the lens of the same focal length, it is lighter and lens will not protrude from the edge of holder.
Schematic
Virtual lens shape
Outline Drawing
Parallel beam
Fresnel Lens
Emitted light beam
(in mm)
Specifications
Material
Acrylic CLAREX
Refractive Index
n=1.49
Focal Length Tolerance ±10% of focal length (in a clear aperture)
* CLAREX is a registered trademark of Nitto Jushi Kogyo Co., Ltd..
Guide
▶It is also available for products with different focal length and size
that are not listed in the catalog. Please contact our international
sales division.
Attention
▶There is a direction to the Fresnel lens. Surface that is processed is
equivalent to convex.
▶When used in laser, since diffracted light is generated in the step
structure, some of the light will also leaked around the focused spot .
▶Characteristics as the lens is obtained in the range of φ50mm, but it
is not guaranteed the accuracy of the focal length out of the scope of
the clear aperture.
▶When rubbing strongly the processed surface of the fresnel lens,
performance may be degraded. Please do not touch directly the
surface.
▶When exposed to high temperature of 80°C or more, it is deformed
and performance can be severely degraded.
▶Please do not use organic solvents such as acetone and chloroform.
It is dissolved and the step structure will be broken.
▶At the time of delivery, it is delivered that protection sheet is affixed
to the surface. Please use it in stripped the protective sheet when
using.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
50 +0
−0.2
Filters
Prisms
50 +0
−0.2
2±0.2
Substrates/Windows
Optical Data
Maintenance
Specifications
Part Number
Focal length
[mm]
Prism pitch
[mm]
Clear Aperture
[mm]
FRL-50S-05P 5 0.05 φ10
FRL-50S-10P 10 0.05 φ20
FRL-50S-15P 15 0.05 φ30
FRL-50S-20P 20 0.08 φ40
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
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WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B153

Optics & Optical Coatings
Micro Spheres
MS
Application
Systems
Optics &
Optical
Coatings
Micro Spheres are mostly used for coupling optical fibers to laser diodes and other fibers or
detectors.
◦Since these ball lenses are much smaller than normal lenses and all the surfaces are polished, they must be handled carefully,
but they contribute to reduction of size and weight of devices.
◦Both AR coated and uncoated are available. Single layer MgF2 is chosen from 3 variations of bandwidths 400 − 700nm,
700 − 900nm and 1300 − 1550nm.
◦Design wavelength for the focal lengths is 587.6nm (yellow helium line [d])
Holders
Bases
Manual
Stages
Specifications
Material
Coating
Clear aperture
Surface Quality (Scratch−Dig)
LaSF9
Uncoated: MS-P
Anti-reflection coating: MS-P1, -P2, -P3
80% of actual aperture
40−20
Actuators
Motoeized
Stages
Guide
▶Please contact our International Sales Division for micro lenses with
AR coatings.
▶Please contact our International Sales Division for customized products.
(customized on outer diameter,etc.)
Light
Sources
Index
Guide
Schematic
Uncoated or
MgF2 single-layer
anti-reflection coating
Focal point
Attention
▶Small ball lenses with anti-reflective coating is marked at its optical
axis so that so that you can see the direction of coating. After
installation of a small spherical lens, clean the ball lens by wiping with
alcohol and check marks on the optical axis.
▶Small ball lens have a short focal length, so it is possible to focus the
beam at a very large angle. However, since spherical aberration is
large, the focused spot size will not be too small.
Mirrors
Checking optical axis mark
Beamsplitters
Polarizers
Uncoated part
Uncoated or
MgF2 single-layer
anti-reflection coating
Lenses
Outline Drawing
(in mm)
Multi-Element Optics
Uncoated
With coating
Uncoated part
●Tolerance
Diameter φD±0.001
Filters
Checking optical axis mark
Prisms
D
D
Substrates/Windows
Optical Data
f
fb
f
fb
Maintenance
Principal point
Principal point
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
T []
100
90
80
70
60
50
40
30
20
10
LaSF9 (Uncoated) Typical Transmittance Data
T: Transmission
0
300 800
1300 1800
2300
[nm]
B154
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W3071
Uncoated
Part Number
Wavelength Range
[nm]
Diameter φD
[mm]
f (588nm)
[mm]
fb (588nm)
[mm]
MS-00-0.54P 400 − 2000 φ1 0.54 0.04
MS-02-1.1P 400 − 2000 φ2 1.09 0.09
MS-03-1.7P 400 − 2000 φ3 1.63 0.13
MS-05-2.8P 400 − 2000 φ5 2.72 0.22
MS-08-4.35P 400 − 2000 φ8 4.35 0.35
Application
Systems
Optics &
Optical
Coatings
Holders
632.8nm with AR coating
Part Number
Wavelength Range
[nm]
Diameter φD
[mm]
f (633nm)
[mm]
fb (633nm)
[mm]
MS-01-0.54P1 400 − 700 φ1 0.55 0.05
MS-02-1.1P1 400 − 700 φ2 1.09 0.09
MS-03-1.7P1 400 − 700 φ3 1.64 0.14
MS-05-2.8P1 400 − 700 φ5 2.73 0.23
MS-08-4.35P1 400 − 700 φ8 4.37 0.37
830nm with AR coating
Part Number
Wavelength Range
[nm]
Diameter φD
[mm]
f (830nm)
[mm]
fb (830nm)
[mm]
MS-01-0.54P2 700 − 900 φ1 0.55 0.05
MS-02-1.1P2 700 − 900 φ2 1.10 0.10
MS-03-1.7P2 700 − 900 φ3 1.65 0.15
MS-05-2.8P2 700 − 900 φ5 2.75 0.25
MS-08-4.35P2 700 − 900 φ8 4.41 0.41
1300nm with AR coating
Part Number
Wavelength Range
[nm]
Diameter φD
[mm]
f (1300nm)
[mm]
fb (1300nm)
[mm]
MS-01-0.54P3 1300 − 1550 φ1 0.56 0.06
MS-02-1.1P3 1300 − 1550 φ2 1.11 0.11
MS-03-1.7P3 1300 − 1550 φ3 1.67 0.17
MS-05-2.8P3 1300 − 1550 φ5 2.78 0.28
MS-08-4.35P3 1300 − 1550 φ8 4.45 0.45
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Table of Focal Length Sifts According to Wavelength
Wavelength
Range
[nm]
LaSF9
Refractive
index
Focal length
f
[mm]
Diameter φD [mm]
φ1 φ2 φ3 φ5 φ8
Back focal
length
fb
[mm]
Focal length
f
[mm]
Back focal
length
fb
[mm]
Focal length
f
[mm]
Back focal
length
fb
[mm]
Focal length
f
[mm]
Back focal
length
fb
[mm]
Focal length
f
[mm]
404.7 1.8984 0.53 0.03 1.06 0.06 1.58 0.08 2.64 0.14 4.23 0.23
435.8 1.8847 0.53 0.03 1.07 0.07 1.60 0.10 2.66 0.16 4.26 0.26
480 1.8706 0.54 0.04 1.07 0.07 1.61 0.11 2.69 0.19 4.30 0.30
546.1 1.8565 0.54 0.04 1.08 0.08 1.63 0.13 2.71 0.21 4.34 0.34
587.6 1.8503 0.54 0.04 1.09 0.09 1.63 0.13 2.72 0.22 4.35 0.35
632.8 1.8449 0.55 0.05 1.09 0.09 1.64 0.14 2.73 0.23 4.37 0.37
706.5 1.8383 0.55 0.05 1.10 0.10 1.64 0.14 2.74 0.24 4.39 0.39
830 1.8310 0.55 0.05 1.10 0.10 1.65 0.15 2.75 0.25 4.41 0.41
852.1 1.8300 0.55 0.05 1.10 0.10 1.65 0.15 2.76 0.26 4.41 0.41
1060 1.8229 0.55 0.05 1.11 0.11 1.66 0.16 2.77 0.27 4.43 0.43
1300 1.8176 0.56 0.06 1.11 0.11 1.67 0.17 2.78 0.28 4.45 0.45
1529.6 1.8136 0.56 0.06 1.11 0.11 1.67 0.17 2.79 0.29 4.46 0.46
Back focal
length
fb
[mm]
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B155

Optics & Optical Coatings
Micro Lenses
SLM
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Micro lenses are spherical plano convex/biconvex lenses with diameters smaller than 4mm. These small lenses are designed
to improve when assembling into present equipment and instruments that demands lighter and smaller footprint optics.
◦There are types of lens as Plano convex and Plano concave with small spherical aberration, and as biconvex and biconcave
lens with short focal length and large divergence angle.
◦Since the edge (side) is cut, it can be relatively ease for grip and fixture of the lens.
Specifications
Material
LaSF9, SK2, BK7
Design wavelength
587.6nm
Coating
Uncoated
Centration

Catalog
Code
W3072
Plano Convex
Part Number
Biconvex
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Back focal length
fb
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Material
SLM-03B-03P φ3 3 2.4 1.1 1.8 SK2 3.26
SLM-03B-04P φ3 4 3.4 1.2 1.8 BK7 3.80
SLM-03B-06P φ3 6 5.5 1.1 1.5 BK7 5.93
SLM-04B-04P φ4 4 3.2 1.2 2.2 SK2 4.40
SLM-04B-06P φ4 6 5.4 1.2 1.9 BK7 5.86
SLM-04B-08P φ4 8 7.4 1.2 1.7 BK7 7.97
Plano Concave
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Back focal length
fb
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Material
Radius of
curvature
r
[mm]
Radius of
curvature
r
[mm]
SLM-02-04N φ2 −4 −4.40 0.95 0.8 LaSF9 −3.40
SLM-03-06N φ3 −6 −6.39 1.03 0.8 LaSF9 −5.10
SLM-04-08N φ4 −8 −8.37 1.10 0.8 LaSF9 −6.80
Biconcave
Part Number
Diameter
φD
[mm]
Diameter
φD
[mm]
Focal length
f
[mm]
Focal length
f
[mm]
Back focal length
fb
[mm]
Back focal length
fb
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Thickness of
the center
tc
[mm]
Material
SLM-1.5-01P φ1.5 1 0.56 0.35 0.8 LaSF9 0.85
SLM-1.5-1.5P φ1.5 1.5 0.44 1.65 1.9 LaSF9 1.25
SLM-02-1.5P φ2 1.5 0.5 1.4 1.9 LaSF9 1.28
SLM-02-02P φ2 2 1.2 1.2 1.5 LaSF9 1.70
SLM-02-2.5P φ2 2.5 1.6 1.3 1.6 LaSF9 2.13
SLM-02-03P φ2 3 2.2 1.0 1.3 LaSF9 2.55
SLM-03-2.5P φ3 2.5 1.4 1.5 2.1 LaSF9 2.13
SLM-03-03P φ3 3 1.9 1.5 2.0 LaSF9 2.55
SLM-03-04P φ3 4 3.3 1.0 1.3 LaSF9 3.40
SLM-03-06P φ3 6 5.1 1.1 1.4 SK2 3.64
SLM-04-04P φ4 4 2.5 1.5 2.5 SK2 2.43
SLM-04-06P φ4 6 5.0 0.7 1.3 SK2 3.64
SLM-04-08P φ4 8 7.1 1.1 1.5 SK2 4.86
SLM-04-10P φ4 10 9.1 1.2 1.5 SK2 6.07
Material
Radius of
curvature
r
[mm]
Radius of
curvature
r
[mm]
SLM-02B-02N φ2 −2 −2.13 0.99 0.7 LaSF9 −3.50
SLM-04B-04N φ4 −4 −4.16 1.39 0.8 LaSF9 −6.94
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Reasonable Lens
Cylindrical
Others
Compatible Optic Mounts
MLH-10, -15
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
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B157

Optics & Optical Coatings
Aspheric Plano Convex Lens
AGL-15/AGL-20
Catalog
Code
W3187
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
It is a short focus lens with small spherical aberration by achieving the convex surface of the plano
convex lens to an aspheric shape. It is used when squeezing small illumination light or condensing
efficiently the light emanating from a single point.
◦It can be used in a wide range from the visible to infrared of 1.5μm wavelength.
◦There are two types of AGL-31.7P with a reduced spherical aberration by the plano convex lens of BK7 and AGL-12P
with high NA using (FDS-90) high refractive index glass (FDS90).
◦An aspheric shape can be produced by using a special polishing apparatus. Shrinkage, cracking and chipping do not
occur when usually appearing in the pressed product..
Specifications
Material
BK7, FDS90
Design Wavelength
587nm
Coating
Uncoated
Shape
Aspheric Plano Convex
Polished Both Surfaces
Centration

Aspheric Condenser Lenses
AGL
Catalog
Code
W3073
Aspheric condenser lens is a single lens for collection and condensing, which the radius of curvature
of one side is changed according to the height from the optical axis to minimize spherical aberration.
The other side is plano or convex.
◦These lenses can condense light at a short focal length that cannot be achieved with spherical lenses.
◦Since these lenses are molded polished from B270-Superwhite, the complex shapes that cannot be polished can be easily
manufactured.
◦These lenses are designed for the use at infinite conjugate ratios and focal lengths are designed at 587.6nm (yellow helium
line [d]).
Application
Systems
Optics &
Optical
Coatings
Holders
Specifications
Material
B270 ® (nd=1.523)
Form
Front surface: Aspherical
Rear surface: Plano or Convex
Coating
Uncoated
Maximum operating temperature 170°C
Surface Quality (Scratch−Dig) 80−50
Bases
Manual
Stages
Actuators
Guide
Schematic
Front surface: Uncoated
Rear surface: Uncoated
Focal point
Shape: Plano or convex
▶Please contact our International Sales Division for Aspheric Condenser
Lenses with anti-reflection coating.
▶B270 ® is a registered trademark of SCHOTT AG Inc.
Attention
▶When the parallel light is incident from the rear (side of plane or large
spherical curvature), spherical aberration will not condense into a
large point.
▶Aspheric condenser lens is used for illumination light source. It is not
aberration-free for laser focusing.
▶Since the anti-reflection coating is not applied with the lens, the transmittance
is about 90% due to the loss reflection of the front and rear
surfaces of the lens.
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Outline Drawing
(in mm)
Typical Transmittance Data
T: Transmission
Beamsplitters
D
tc
te
Principal point
f
fb
●Tolerance
Diameter φD±0.5
Thickness tc±0.5
Focal length ±7%
T []
100
90
80
70
60
50
40
30
20
10
0
200 700 1200 1700 2200 2700
[nm]
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Specifications
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Back focal length
fb
[mm]
NA*
(D/2×0.8/f)
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Rear surface
AGL-12-8.5P φ12 08.5 5.8 0.56 1.6 5.5 Convex
AGL-12-10.5P φ12 10.5 8.2 0.46 1.1 3.5 Plano
AGL-18-12P φ18 12 6.9 0.60 3.3 8.8 Convex
AGL-19-17P φ19 17 12.4 0.45 1.8 7.0 Plano
AGL-25-20P φ25 20 15.1 0.50 1.2 7.5 Plano
AGL-30-23.5P φ30 23.5 14.3 0.51 3.8 14.0 Plano
AGL-38-34.5P φ38 34.5 26.6 0.44 1.5 12.0 Plano
AGL-50-39P φ50 39 25.5 0.51 2.8 20.5 Plano
* NA is calculated using 80% of the outer diameter of the lens.
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Compatible Optic Mounts
LHF-20S, -25S, -30S, -50S / LHA-25, 60 / SLH-25, -50 / MLH-15
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B159

Optics & Optical Coatings
Aspheric Micro Lens
AGL2
Catalog
Code
W3188
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
This a precision aspherical lens that can condense the light into the range of diffraction limit when
plane wave is incident. This is used when condensing the light of semiconductor laser into the
parallel light and the parallel light into fiber.
◦Aspherical micro lens is formed by pressing the glass in a precision mold. Since this is non-abrasive forming, flange
surface (FD) as a reference surface is provided on the lens.
◦It is designed that spherical aberration is minimized by consideration of a window of semiconductor laser (t=0.25mm).
◦Since outer diameter is small, it is possible to manufacture a compact optical system.
Specifications
Material
Corning C0550 (Low melting point glass)
Design Wavelength
780nm
Surface Accuracy
λ/2 (λ=780nm)
Coating
Uncoated (Both surfaces)
LD Window Thickness : 0.25mm Refractive Index : 1.512
Surface Quality (Scratch−Dig) 40−20
Guide
▶Please contact our International Sales Division when specifying
anti-reflecting coating.
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Schematic
Aspheric Uncoated
Aspheric Uncoated
LD Window
Semiconductor Laser
Collimated Beam
LD Light Emitting Section
Attention
▶If using wavelength is significantly different from the design wavelength,
large wave front aberration occurs.
▶Spherical aberration occurs when used without putting the LD
window, collimated beam is not a plane wave.
▶If the lens direction is used reversely, he lens, it will not be able to be
condensed into collimated beam or one point.
▶If there is slope when installing the lens, astigmatism and coma
aberration can occur.
▶Please use the flange (reference plane) and use it after adjustment to
be accurately perpendicular to the optical axis.
Lenses
Outline Drawing
(in mm)
Multi-Element Optics
Filters
Prisms
φD
FD
●Tolerance
Diameter φD±0.2
Thickness t ±0.2
Concentricity
(Diameter : light axis) ±0.1
Focal length ±2%
Substrates/Windows
Optical Data
Maintenance
WD
0.25
te
tc
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Specifications
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
NA
Clear aperture
φA
[mm]
WD
[mm]
Thickness of the center
te
[mm]
Thickness of the edge
tc
[mm]
Flange width
FD
[mm]
AGL2-03-02P φ3.0 2.00 0.50 φ2.0 1.1 2.0 1.4 0.30
AGL2-4.7-6.16P φ4.7 6.16 0.30 φ3.7 4.4 3.5 2.9 0.30
AGL2-6.33-4.51P φ6.3 4.51 0.55 φ5.0 2.9 2.9 1.6 0.55
AGL2-6.5-18.4P φ6.5 18.40 0.15 φ5.5 17.1 2.2 1.8 0.35
AGL2-7.2-6.24P φ7.2 6.24 0.40 φ5.0 3.5 5.4 4.2 0.65
AGL2-7.2-11.11P φ7.2 11.11 0.25 φ5.5 8.0 5.0 4.2 0.40
B160
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FAC Collimated Lens
Custom-made
Catalog
Code
W3408
FAC collimated lens is an aspheric cylindrical lens designed for collimating the bar-type laser
incident and to avoid light divergence. Because of the aspheric form of the lens, it offers a low
spherical aberration.
◦Because of its short back focus feature, it can be used with the light emitting section attach to the lens to perform the best
focusing effects.
◦Can also be used as a light capturing lens for line CCD sensor or as a laser line generator.
◦Both sides have AR coating which limits the lost in illumination and have high focusing efficiency.
Schematic
Flat surface:
Anti-reflection coating
Focusing point
Aspheric surface:
Anti-reflection coating
Specifications
Material
High refractive index Barium-Lanthanum glass
Design wavelength 808nm
Refractive index 1.812 (Wavelength Range 808nm)
NA >0.8
Clear aperture The aperture of the flat-side is 90%
Coating
Anti-reflection coating
Guide
▶The pricing varies depending on the quantity of the order, please
contact our International Sales Division.
▶We accept low quantity order.
Attention
▶The perfect collimated light can be obtained only with the type of high
power Laser Diode Array light (TEM∞).
▶The back-focus (bf) is extremely short, the CAN type LD or LD with
cover glass may face bad focusing problem.
▶There is no focus effect on the long side of the lens; therefore,
divergence problem may remain.
▶The imaging points of the emitted light from the cylindrical lens are
different from the vertical and the horizontal side.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Outline Drawing
te
tc
(in mm)
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
A
R
Filters
B
fb
f
Prisms
Substrates/Windows
Data of bar-type focusing lens
Optical Data
Maintenance
This is to show the high uniformity of the lens from the right to left. A high
manufacturing capability is approved. All lenses are inspected in our
production line, guaranteeing a high level of customer satisfaction.
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Specifications
A×B
[mm]
Focal length
f
[mm]
Thickness of the edge
te
[mm]
Thickness of the center
tc
[mm]
Back focal length
fb
[mm]
1.5×12 0.9 0.93 1.41 0.15
1.0×12 0.6 0.62 0.94 0.10
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B161

Optics & Optical Coatings
Calsium Fluoride Plano Convex Lens
SLCFU
Catalog
Code
W3189
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Calcium fluoride (CaF2) is a crystal which has the excellent transmission characteristics in the wide
wavelength range from ultraviolet (200nm) to near-infrared (8μm).
It is a plano convex lens of using this CaF2.
◦Impurities and crystal defects were reduced, and transmission characteristics in the ultraviolet region was increased.
CaF2 is used for the range from the ultraviolet to the infrared.
◦Compared with other crystals, CaF2 has high durable to moisture, and it can be treated as same as the general optical element.
◦Since CaF2 is isotropic crystal, birefringence (polarization characteristics) does not occur.
Schematic
Uncoated
Uncoated
Focal point
Specifications
Material
CaF2 for Optical Crystal
Design Wavelength 5μm
Coating
Uncoated
Surface Reflectance 3% (per side)
Shape
Spherical Plano Convex, Polished Both Surfaces
Centration

Sapphire Plano Convex Lens
SLSH
Catalog
Code
W3190
Sapphire crystal is a transparent crystal without absorption from the visible to infrared wavelength
of 5μm. In addition, there are features such a high hardness and a rare scratch. It is a single lens
which was made with the crystal.
◦Sapphire crystal is very stable scientifically, so it is used in the optical equipment used in the field.
◦Since there is no absorption (1.4μm, 2.2μm, 2.7μm) by water (OH radical) , it can be used on a lens for the analyzer for
near-infrared.
Application
Systems
Optics &
Optical
Coatings
Schematic
Specifications
Material
Optical sapphire crystal (uniaxial crystal)
Design Wavelength
546.1nm
Coating
Uncoated
Shape
Spherical Plano Convex
Polished Both Surfaces
Centration

Optics & Optical Coatings
Single Lenses for CO2 Lasers
SLZS
Catalog
Code
W3074
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Spherical single lenses are made of zinc selenide. In contrast to other optical materials for infrared
wavelengths such as Ge (germanium) or Si (silicon), ZnSe lenses transmit some visible light,
facilitating optical axis adjustment (alignment) of infrared laser systems and permitting use of
cheaper He-Ne lasers. Lenses intended for use with CO2 lasers have AR coatings.
◦High powered lasers often emit laser light in the infrared region. Such systems require careful handling, since infrared
laser light is invisible. Because of this laser light, preliminary alignment of optical parts in many cases are essential.
While zinc selenide transmit some light in the visible spectrum, it allows easier alignment of other optical components.
Schematic
Plano Convex
Anti-reflection coating
Plano Concave
Focal point
Anti-reflection coating
Focal point
Specifications
Material
ZnSe crystal
Design wavelength
10.6μm
Coating
AR coating (both surfaces)
Transmittance
99% or more
Centration

Meniscus Lens for CO2 Laser
SLZS2
Catalog
Code
W3191
It is a condensing lens used zinc selenide (ZnSe) for CO2 laser (10.6μm).
It is processed into a meniscus shape having optimized spherical aberration.
◦With anti-reflection coating, a loss due to surface reflection can be suppressed, and the laser light with high efficiency
can be condensed.
◦ZnSe crystal has little hygroscopic, it can be handled in the same way as a normal optical element.
◦Since ZnSe crystal is a isotropic crystal, it does not occur birefringence (polarization characteristics).
Specifications
Material
ZnSe
Design Wavelength 10.6μm
Refractive Index 2.403
Centration

Optics & Optical Coatings
Silicon Plano Convex Lens
SLSI
Catalog
Code
W3192
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
The single crystal of silicon used in semiconductor has low absorption in the infrared wavelength
of 1.2 - 6μm and it can be used as an optical element of infrared light.
It is a spherical plano convex lens that was made with the silicon single crystal.
It is used as a lens for receiving infrared and infrared sensors.
◦It looks that a light does not transmit because of a metallic luster, but it is transmitted through the wide infrared range of
1.2 - 6μm.
◦The wavelength of 1.2μm or less does not transmit, so it can also get the effect of infrared transmission filter.
◦Since there is the refractive index of 3 or more, the curvature has slowed from the lens of glass.
Specifications
Material
Silicon (SI)
Design Wavelength
5μm
Coating
Uncoated
Surface Reflectance
30% (per side)
Shape
Spherical Plano Convex
Polished Both Surfaces
Centration

Germanium Single Lens
SLGE
Catalog
Code
W3193
The single crystal of germanium used in the semiconductor is less absorption in the infrared
wavelength of 2 - 20μm and it can be used as an optical element of the infrared light.
It is a single lens which was made with the germanium crystal.
It is used as a lens of a camera to observe the infrared, such as thermography.
◦It looks that a light does not transmit because of a metallic luster, but it is transmitted through the wide infrared range of
2 - 20μm.
◦A Light of the wavelength of 1.5μm or less does not transmit, so it can also get the effect of infrared transmission filter.
◦Since there is the refractive index of 4 or more, the curvature is slower than the lens of glass.
Specifications
Material
Germanium (Ge)
Design Wavelength
10.6μm
Coating
Uncoated
Surface Reflectance
36% (per side)
Shape
Spherical Plano Convex
Polished Both Surfaces
Centration

Optics & Optical Coatings
Contact sheet
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Contact sheet for Special Order for Lenses
To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Affiliation
(Organization Name)
Department
TEL
Country/Address
Name &
Designation
Drawing Number
Desired
Delivery Date
Specifications
of Lens
Specifications
of Coating
Quantity
Shape
Metal
coating
Dielectric
coating
Anti-reflection
coating
Polarization
conditions
FAX
■Estimation ■Order
Ball Lens
Hemispherical Lens
Aspherical Lens
Cylindrical Lens
Lens for CO2 Lasers
Rod Lens
Other ( )
Al only AI+MgF2 Cr+Au Other ( )
Wavelength
Range λ= nm
Wavelength
Range λ= nm
Estimate
Budget
E-mail
Unpolarized P polarization S polarization
* Write more detailed specifications here. (Rough illustration is acceptable.)
Date
Yes: by Date
Incident
angle = ° Reflection
Incident
angle = °
(Tentative name is okay)
No
JP Yen
rate
Single-layer AR coating
Multi-layer AR coating
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Plano Convex
Lenses
Plano Concave
Lenses
Biconvex Lenses
Biconcave Lenses
Kit
Reasonable Lens
Cylindrical
Others
Other
Sigma Koki Co., Ltd.
B168
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Multi-Element Optics
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M E - O p t i c s
I N D E X
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ME-Optics Selection Guide
The lens or a combination of these lenses found in this section will have limited applications compared
with single spherical lens but very high performance can be achieved in a dedicated application.
Beam Focusing
Type Features Applications
Application
Systems
Optics &
Optical
Coatings
Achromatic Lens
Chromatic and spherical aberration is minimized.
Large line-up of focal length and aperture.
Focus ability in low power lasers.
Imaging system for infinity object
Holders
Bases
Focusing Lens
High laser damage threshold
Spot size is minimized and near to the diffraction limit.
Lens for various laser fabrication such as laser marking,
cutting and welding.
Manual
Stages
Objective Lens
Highly corrected lens with high magnification
Large numerical aperture produces minimum spot size.
Fully usable throughout the visible wavelength spectrum.
Microscopic imaging for the visible, ultra-violet and near
infrared wavelength spectrum.
Focusing a laser beam into a minimal spot.
Micro-fabrication for lasers.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Beam Expanding
Type Features Applications
Mirrors
Beamsplitters
Polarizers
Beam Expander
Optimized design for minimum spherical aberration
Integrated design with reduced size
Magnifying the laser aperture
(for interferometer and projection)
Reducing the focal spot size
(by enlarging the incident laser beam diameter)
Lenses
Multi-Element Optics
Spatial filter (objective lens) +
Achromatic lens
Large choice of expansion ratios.
Provides a high purified beam profile.
When using a very large collimated beam.
When changing the beam aperture
(with switching the achromatic lenses)
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Achromats
Beam expander
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Spatial filter
Achromatic lens
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B171

Optics & Optical Coatings
Achromatic Doublets
DLB
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Achromatic doublets are cemented achromats made of two different lenses. (Low dispersion
positive from crown glass and high dispersion negative from flint glass). The difference of
dispersion and shape of both lenses are designed to minimize the chromatic aberrations in blue
(486.1nm), green (546.1nm) and red (656.3nm). Therefore, these lenses are able to support the
entire visible wavelength spectrum.
◦Dispersion and shape differences are both effective to decrease spherical aberration. The spherical aberration of achromatic
doublets is better than singlets and minimized at infinite conjugate ratios.
◦Every product is coated on both surfaces with a broadband multi-layer anti-reflection coating for the visible wavelength
(400 − 700nm).
◦When a parallel beam is converged and to minimize the spherical aberration, please set the positive part to the side of
the incident parallel beam and put the negative part to the side of the focal point.
◦ To change the reflective index of a glass according to a wavelength is called “dispersion of the glass” Having a difference
in focal length of a lens at each wave length is Chromatic aberration and this is due to dispersion. This can be corrected
by combining glasses with low and high dispersions. Spherical aberration is when a ray enters a lens farther from its
optical axis and has a shorter focus than a paraxial focus.
Actuators
Motoeized
Stages
Light
Sources
Index
Specifications
Material
Design wavelength
Coating
Cement
Laser Damage Threshold
Surface Quality (Scratch−Dig)
Clear aperture
BK7, SF2
Blue: 486.1nm, Green: 546.1nm, Red: 656.3nm
Broadband multi-layer anti-reflection coating for the Visible
Ultraviolet Hardened Adhesive
0.3J/cm 2
(Laser pulse width 10ns, repetition frequency 20Hz)
40−20
90% of actual aperture
Guide
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Achromats
Schematic
Multi-layer anti-reflection coatig
Outline Drawing
φD
tc
te
Material: BK7
Material: SF2
Focal point
Multi-layer anti-reflection coatig
(in mm)
●Tolerance
Diameter ≦φ60 φD +0
−0.1
φ80 φD +0
−0.15
φ100 φD +0
−0.2
Thickness tc ±0.2
Focal length ±1%
(546.1nm)
▶Please contact our International Sales Division for customized
achromatic doublets. (Customized on size etc.)
▶Please refer to our web site for the lens design data.
W3075
▶Also available is an air spaced type of focusing lens (NYTL/NYDL).
Designed for laser processing. B181
Attention
▶When a parallel beam is converged and to minimize the spherical
aberration, please set the positive part to the side of the incident
parallel beam and put the negative part to the side of the focal point.
▶To change the reflective index of a glass according to a wavelength is
called “dispersion of the glass” Having a difference in focal length of
a lens at each wave length is Chromatic aberration and this is due to
dispersion. This can be corrected by combining glasses with low
and high dispersions.
▶ Spherical aberration is when a ray enters a lens farther from its optical
axis and has a shorter focus than a paraxial focus.
▶Be sure to wear laser safety goggles when checking optical path and
adjusting optical axis.
Incident direction
Arrow
Output direction
Focusing Lenses
fb
fθ Lenses
Objectives
Principal point
f
Expanders
Others
B172
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Catalog
Code
W3075
φ10 − φ25
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Center Thickness
tc
[mm]
Edge Thickness
te
[mm]
Back focal length
fb
[mm]
DLB-10-20PM φ10 20.0 6.7 5.1 16.6

Optics & Optical Coatings
Catalog
Achromatic Doublets DLB Code W3076
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
φ25.4 − φ40
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Center Thickness
tc
[mm]
Edge Thickness
te
[mm]
Back focal length
fb
[mm]
DLB-25.4-40PM φ25.4 50.1 10.9 7.0 44.9

Catalog
Code
W3077
φ50 − φ100
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Center Thickness
tc
[mm]
Edge Thickness
te
[mm]
Back focal length
fb
[mm]
DLB-50-80PM φ50 81.0 22.9 13.4 69.1

Optics & Optical Coatings
Catalog
Near infrared achromatic lens DL-PNIR Code W3195
Application
Systems
Optics &
Optical
Coatings
Holders
By setting the single lens bonding two lenses with wavelength dispersion of the refractive index is
different, it can be smaller spherical aberration and chromatic aberration than the spherical single lens.
It can be used as a focusing lens for YAG laser (1064nm) or LD of the near-infrared.
◦Optimization by lens design, focal length in the near infrared region hardly changes. Focal length of 700mm, 880mm,
1100mm matches, it has been optimized that aberration is minimized.
◦It is suitable as a collimating lens of the laser not only because chromatic aberration but also spherical aberration is
collected.
◦It is not only aberration of the axial object point but is also corrected for astigmatism and comatic aberration of the axis.
Bases
Specifications
Material
N-LAK22, SF6
Manual
Stages
Design wavelength
Coating
Cement
700nm, 880nm, 1100nm
Multi-layer anti-reflection coating (700 – 1550nm)
Ultraviolet Hardened Adhesive
Actuators
Laser Damage Threshold 0.3J/cm 2
Surface Quality (Scratch−Dig) 40–20
Clear aperture
90% of actual aperture
Motoeized
Stages
Guide
Light
Sources
Index
Schematic
▶The production of catalog products other than such as outside
diameter or size are available.
▶The design and manufacture of achromatic lens of the wavelength
band of the requested is available.
▶Air gap type condenser lens for the laser processing (NYTL / NYDL)
are also available. B181
Material: N-LAK22
Material: SF6
Attention
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
NIR anti-reflection coating
Outline Drawing
tc
te
NIR anti-reflection coating
Focal point
(in mm)
●Tolerance
Diameter φD +0
−0.1
Thickness tc±0.2
Focal length ±2%
▶Please use achromatic lens when focusing to focus an image at
infinity or when making parallel light from the one point of light source.
It does not provide sufficient optical performance when used in such
as short-range distance imaging.
▶There is a direction to the incident light parallel to the achromatic
lens. A surface with a small radius of curvature is allowed to be
incident parallel light from a rear surface (the surface on the arrow is
pointing to). When it is incident parallel light from the opposite side,
spherical aberration and chromatic aberration will occur and the
focused spot size will increase.
▶When used in the visible region, spherical aberration and chromatic
aberration increases. In addition, the transmittance decreases.
Arrow
Substrates/Windows
φD
Incident direction
Output direction
Optical Data
Maintenance
Principal point
fb
f
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Specifications
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Center Thickness
tc
[mm]
Edge Thickness
te
[mm]
Back focal length
fb
[mm]
DL-15-20PNIR φ15 19.9 9.5 6.6 14.7

Catalog
Negative achromatic lens DL-NM Code W3196
It is achromatic lens having a negative focal length.
By setting the concave one bonding two lenses wavelength dispersion of the refractive index is
different, can be smaller than the spherical single lens and spherical aberration and chromatic
aberration.
◦It is optimized focal length shift is small in the visible light range, the aberration is minimized.
◦It can be the beam expander of Galileo type in combination with achromatic lens with a focal length of the positive.
◦It is also corrected for astigmatism and comatic aberration off-axis as well as aberration of axial object point.
Specifications
Material
N-BAF10, N-SF10
Design wavelength 486.1nm, 546.1nm, 656.3nm
Coating
Antireflection coating
Cement
Ultraviolet Hardened Adhesive
Laser Damage Threshold 0.3J/cm 2
Surface Quality (Scratch−Dig) 40–20
Clear aperture
90% of actual aperture
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Schematic
Focal point
Material: N-BAF10
Material: N-SF10
Guide
▶It is available other than the products which listed in the catalog such
as focal length and other diameter size.
Attention
▶There is a direction to the incident parallel light to the achromatic
lens. A surface with a small radius of curvature is allowed to be
incident parallel light from a rear surface (the surface on the arrow is
pointing to). When it is incident parallel light from the opposite side,
spherical aberration and chromatic aberration will occur and the
focused spot size will increase.
▶When used in the visible region, spherical aberration and chromatic
aberration increases. In addition, the transmittance decreases.
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Antireflection coating
Antireflection coating
Arrow
Polarizers
Outline Drawing
te
tc
(in mm)
●Tolerance
Diameter φD +0
−0.1
Thickness tc±0.2
Focal length ±2%
Incident direction
Output direction
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
φD
f
Principal point
fb
Maintenance
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Specifications
Part Number
Diameter
φD
[mm]
Focal length
f
[mm]
Center Thickness
tc
[mm]
Edge Thickness
te
[mm]
Back focal length
fb
[mm]
DL-25-50NM φ25 −49.94 6.7 9.3 −53.1

Optics & Optical Coatings
Catalog
Reasonable achromatic lens S-DLB Code W3197
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
It is a product with lower quality than DLB series with low surface spherical achromatic lens.
Allowed to use optical system, which is not required high surface quality imaging lens such as the
microscope lens or telescope lens.
Schematic
Antireflection coating
Material: BK7
Outline Drawing
φD
tc
te
Material: SF2
Antireflection coating
Focal point
(in mm)
●Tolerance
Diameter

Catalog
Achromatic cylindrical lens CDL Code W3198
A single lens made by bonding two cylindrical surface lenses that wavelength dispersion of the
refractive index is different, it is possible to create fine lines close to the theoretical limit.
It is recommended if the blurring of lines and color bleeding is concerned about cylindrical plano-convex
lens (CLB-P).
◦It is designed so that difference of focusing point is reduced as much as possible in the visible light range.
◦Optical adjustment is easy to do as direction of the condenser line will be parallel to the side of the diameter (B).
◦It can be used as a substitute for such as a slit spectrograph.
Schematic
Antireflection coating
Outline Drawing
tc
te
Focal point
Antireflection coating
(in mm)
Specifications
Material
Design wavelength
Coating
Cement
Laser Damage Threshold
Surface Quality (Scratch−Dig)
Clear aperture
Guide
▶It is also available to provide other than products in the catalog such
as focal length and diameter.
▶Cylindrical lens holder (CHA) is available for fixing the achromatic
cylinder lens. C044
Attention
N-SF5, BK7
Blue: 486.1nm, Green: 546.1nm, Red: 56.3nm
Antireflection coating
Ultraviolet cure adhesive
0.3J/cm 2
(Laser pulse width 10ns, repetition frequency 20Hz)
60−40
Circle that internally connected to 90% of the
side length
▶There is a direction of the incident parallel light with achromatic
cylinder lens. The radius of curvature is allowed to be incident
parallel light from the side of (the surface indicated by arrows) small
curvature surface. If it is incident parallel light from the opposite side,
condensing line will be thick.
▶In the generatrix direction (B direction), there is no characteristic to
reduce the effect of achromatic, reducing aberration, and for
collecting light.
▶If it is incident line beam source into achromatic cylindrical lens,
parallel light does not come out. It will diverge in the direction of the
generatrix (B direction).
▶In order to focus the fine beam line, it is necessary to enter the lens
a parallel beam of high quality.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
A
Incident direction
Arrow
Filters
Prisms
B
Principal point
fb
f
●Tolerance
Length A +0
−0.2 B +0
−0.2
Thickness tc±0.2
Focal length ±3%
(546.1nm)
Output direction
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Specifications
Part Number
A×B
[mm]
Focal length
f
[mm]
Center Thickness
tc
[mm]
Edge Thickness
te
[mm]
Back focal length
fb
[mm]
CDL-1515-25PM 15×15 25.0 9.0 5.7 18.2
CDL-1515-50PM 15×15 50.0 6.0 4.6 46.4
CDL-1515-100PM 15×15 100.0 5.0 4.3 97.1
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B179

Optics & Optical Coatings
Visible Spectrum Achromats
ATL/NADL
Catalog
Code
W3078
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Visible spectrum achromats are air spaced achromatic triplets or doublets for lasers in the visible
spectrum or white light application. The elements are made of crown glass of low dispersion and
flint glass of high dispersion.
◦These lenses have optimized the aberrations of achromatic, spherical and coma for the 3 wavelengths; blue (486.1nm),
green (546.1nm) and red (656.3nm) have broadband multi-layer anti-reflection coating for 400 − 700nm.
◦Air spaced design allows high power laser applications which includes YAG second harmonic wavelength (532nm).
◦The triplets with F-numbers ≧2 and doublets with F-numbers ≧3 are designed to have each spot size equal to the
diffraction limited spot size and very ideal for a Gaussian input beam.
Specifications
Material
Crown Glass − (Air spaced) − Flint Glass
Material of frame Aluminum Finishing: Black anodized
Design wavelength 486nm, 532nm, 656nm
Coating
Broadband multil-ayer anti-reflection coating
Acceptance angle ±1°
Laser Damage Threshold
1J/cm 2
(Laser pulse width 10ns, repetition frequency 20Hz)
Motoeized
Stages
Light
Sources
Index
Schematic
Lens mounting thread
Guide
▶Please contact our International Sales Division for customized
achromats. (Customized on size etc.)
▶Protective lens case with rods for mirror holders is available as an
option. Please contact us for further information.
▶Please check the “wavelength characteristic of the focal length data”
on the Web for the focal lengths of each wavelength.
W3078
Protective window mounting thread
Attention
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Outline Drawing
Housing
(in mm)
▶Since the focal length and working distance of the lens is calculated
at 532nm, it will change at other wavelengths due to the refractive
index of the material shift.
▶The F number of a lens is calculated by f (effective focal length) / De
(effective clear aperture). The value represents “Brightness of the
lens”. The lower the value, the brighter the lens is.
▶Be sure to wear laser safety goggles when checking optical path and
adjusting optical axis.
Multi-Element Optics
Filters
Prisms
Substrates/Windows
M34 P=0.75
Clear aperture φ27
marking
M34 P0.75
φ36±0.15
●Tolerance
Length L±0.2
Focal length ±2%
Optical Data
Maintenance
4 4
L
WD
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Specifications
Part Number
Focal length
f
[mm]
Length
L
[mm]
Numerical aperture
(NA)
Working distance
(WD)
[mm]
ATL-30-40PY2 40.2 22 0.34 30.1
ATL-30-50PY2 49.4 22 0.27 39.0
ATL-30-60PY2 58.9 22 0.23 49.0
NADL-30-80PY2 80.1 13 0.17 71.6
NADL-30-100PY2 99.8 13 0.14 91.7
NADL-30-150PY2 150.0 12 0.09 141.9
NADL-30-200PY2 199.8 12 0.07 192.7
Compatible Optic Mounts
LHF-M34-30
B180
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

YAG Laser Focusing Lenses
NYTL/NYDL
Catalog
Code
W3079
YAG laser focusing lenses are air spaced triplets or doublets for YAG fundamentals.
The elements are made of crown glass of lower dispersion and flint glass of higher dispersion.
These lenses are optimized for spherical aberration and coma. With its spot size designed to be
smaller than or equal to the diffraction limited spot size for beams in 1064nm.
◦These lenses are chromatically corrected so that any HeNe guided beam or visible video monitor beam will remain
focused in the same position as the YAG beam. All elements are coated with a laser-resistant narrowband multi-layer
anti-reflection for YAG: 1064nm and HeNe: 633nm.
◦We offer optical protective windows to prevent damage to the lens by absorbing high levels of energy from inadvertent
back reflection of the incident beam. These protective windows can be easily installed to the focusing side of the lens.
Application
Systems
Optics &
Optical
Coatings
Holders
Specifications
Material
Crown Glass − (Air spaced) − Flint Glass
Material of frame Aluminum Finishing: Black anodized
Design wavelength 1064nm, 632.8nm
Coating
Narrow band multi-layer anti-reflection coatig
for 1064nm and 633nm
Acceptance angle ±1°
Laser Damage Threshold
1J/cm 2
(Laser pulse width 10ns, repetition frequency 20Hz)
Guide
▶Please contact our International Sales Division for customized products.
(Customized on size etc.)
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Schematic
Attention
Index
Lens mounting thread
Protective window mounting thread
▶Since the focal length and working distance of the lens is calculated
at 1064nm, it will change at other wavelengths due to the refractive
index of the material shift.
▶The F number of a lens is calculated by f (effective focal length) / De
(effective clear aperture). The value represents “Brightness of the
lens”. The lower the value, the brighter the lens is.
▶Be sure to wear laser safety goggles when checking optical path and
adjusting optical axis.
Guide
Mirrors
Beamsplitters
Housing
Polarizers
Outline Drawing
NYTL
Ma
Clear aperture φDe
marking
Mb φDc
(in mm)
●Tolerance
Diameter Dc ±0.15
Length L ±0.2
Focal length ±2%
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
4 A
L
WD
Optical Data
NYDL
Ma
Clear aperture φDe
Mb φDc
Maintenance
Selection Guide
marking
4 A
L
WD
Achromats
Focusing Lenses
Specifications
Part Number
Maximum lens
diameter
φD
[mm]
Focal
length
f
[mm]
Diameter
φDc
[mm]
Clear
aperture
φDe
[mm]
Length
L
[mm]
Lens mounting
thread
Ma
Protective
window thread
Mb
Thread
length
A
[mm]
Numerical
aperture
(NA)
Working
distance
(WD)
[mm]
NYTL-25-20PY1 φ25 20.0 φ32 φ20 22 M29 P0.75 M22 P0.75 6.0 0.50 9.0
NYTL-30-30PY1 φ30 30.0 φ36 φ27 22 M34 P0.75 M28 P0.75 6.5 0.45 19.1
NYTL-30-40PY1 φ30 40.0 φ36 φ26.5 19 M34 P0.75 M28 P0.75 4.0 0.33 30.9
NYTL-30-50PY1 φ30 50.0 φ36 φ25.5 19 M34 P0.75 M28 P0.75 3.5 0.25 41.4
NYDL-30-60PY1 φ30 59.9 φ36 φ27 17 M34 P0.75 M34 P0.75 4.0 0.23 41.1
NYDL-30-80PY1 φ30 79.9 φ36 φ27 15 M34 P0.75 M34 P0.75 4.0 0.17 67.6
NYDL-30-100PY1 φ30 100.1 φ36 φ27 14 M34 P0.75 M34 P0.75 4.0 0.14 88.4
NYDL-30-150PY1 φ30 149.3 φ36 φ27 12 M34 P0.75 M34 P0.75 4.0 0.09 140.0
fθ Lenses
Objectives
Expanders
Others
Compatible Optic Mounts
LHF-M29-25, LHF-M34-30
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
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B181

Optics & Optical Coatings
Focusing Lenses for Fiber Laser
HFTLSQ/HFDLSQ
Catalog
Code
W3080
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
High performance multi-element lens. Suitable for focusing and collimating solid state lasers like
Yb fiber laser, YAG laser and YVO4 laser.
◦Engineered and designed to reduce the effects of thermal expansion.
◦Corrected for spherical aberration and coma at 1064nm. Diffraction limited for F number ≧2 (NA≧0.25)
◦AR coating optimized from 1040 − 1150nm with transmission at 633nm for pointed lasers
Schematic
Lens mounting thread
Outline Drawing
HFTLSQ-15/HFTLSQ-20/HFTLSQ-30/HFDLSQ-30
Dc Ma
Clear aperture De
marking
4 4
L
WD
HFTLSQ-50/HFDLSQ-50
Dc Ma
Clear aperture De
(4)
Specifications
Part Number
L
marking
Protective window mounting thread
(None type 50)
Housing
Mb
WD
Focal length
f
[mm]
Diameter
φDc
[mm]
(in mm)
●Tolerance
Diameter Dc ±0.15
Length L ±0.2
Focal length ±2%
Clear
aperture
φDe
[mm]
Length
L
[mm]
Specifications
Material
Synthetic fused silica
Material of frame Aluminum Finishing: Black anodized
Design wavelength 1064nm
Coating
Broadband multil-ayer anti-reflection coating
>98.5% (1060 − 1080nm)
Transmittance
>97% (1040 − 1150nm)
>53% (600 − 700nm)
Laser Damage Threshold
7J/cm 2
(Laser pulse width 10ns, repetition frequency 20Hz)
▶Please contact our International Sales Division for customized products.
(Customized on size etc.)
▶Please check the “wavelength characteristic of the focal length data”
on the Web for the focal lengths of each wavelength.
W3080
▶Be sure to wear laser safety goggles when checking optical path and
adjusting optical axis.
▶Protective window as an option is not Anti-reflection coated.
▶Incident a beam from the side with the screw.
Lens mounting
thread
Ma
Protective
window thread
Mb
Numerical
aperture
(NA)
Working
distance
(WD)
[mm]
Acceptance
angle
[ ° ]
HFTLSQ-15-20PF1 20.0 φ24 φ12 16 M22 P0.75 M22 P0.75 0.30 13.7 ±1.8
HFTLSQ-20-30PF1 30.3 φ30 φ17 21 M28 P0.75 M28 P0.75 0.28 22.0 ±1.2
HFTLSQ-30-40PF1 40.0 φ36 φ27 31 M34 P0.75 M28 P0.75 0.34 24.9 ±1
HFTLSQ-30-50PF1 50.0 φ36 φ27 28 M34 P0.75 M28 P0.75 0.27 35.4 ±1
HFTLSQ-30-60PF1 60.1 φ36 φ27 23 M34 P0.75 M34 P0.75 0.22 51.4 ±1
HFTLSQ-30-80PF1 80.0 φ36 φ27 23 M34 P0.75 M34 P0.75 0.17 71.7 ±1
HFTLSQ-30-100PF1 100.0 φ36 φ27 23 M34 P0.75 M34 P0.75 0.14 92.7 ±1
HFDLSQ-30-150PF1 150.0 φ36 φ27 18 M34 P0.75 M34 P0.75 0.09 131.0 ±1
HFTLSQ-50-100PF1 99.9 φ54 φ47 35 M50.9 P0.75 − 0.24 84.2 ±1
HFDLSQ-50-200PF1 199.6 φ54 φ47 23 M50.9 P0.75 − 0.12 185.7 ±1
HFDLSQ-50-300PF1 300.0 φ54 φ47 23 M50.9 P0.75 − 0.08 286.2 ±1
Guide
Attention
Drawing of adapter for HFTLSQ-15-20PF1
M29 P0.75
M22 P0.75
6
2
25
32
Drawing of adapter for HFTLSQ-20-30PF1
M34 P0.75
M28 P0.75
6
2
31
37
B182
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Protective Windows / Protective Window Holders
Focusing Lens Holders
PG / PGH
LHF
Catalog
Code
W3081
PG / PGH
◦Protective windows can be attached to the focusing
lens to prevent shatter from laser fabrication.
The protective window comes in 3 different sizes.
Protective Window Holders (PGH)
Visible Spectrum Achromats
YAG Laser Focusing Lenses
Focusing Lenses for Fiber Laser
Excimer Laser Focusing Lenses (some models)
Protective Windows (Package of ten pieces)
φD
Guide & Attention
▶Since protective windows are uncoated and due to surface
reflections, the transmittance will be limited to 90%.
▶Anti-reflection coating for specific wavelength is available.
▶Replace protective window if it is polluted or poor transmittance
performance.
Protective Window Holders (Retainer only)
M φB φC
Material: Aluminum
Finish: Black anodized
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
1±0.3
Both sides: Uncoated
Part Number
φD
[mm]
Protective window retainer
PG-21 φ21 PGH-24
PG-27 φ27 PGH-30
PG-33 φ33 PGH-36
Part Number
M
[mm]
0.5
4.5
φB
[mm]
φC
[mm]
Protective window diameter
[mm]
PGH-24 M22 P0.75 φ18 φ24 φ21
PGH-30 M28 P0.75 φ23 φ30 φ27
PGH-36 M34 P0.75 φ29 φ36 φ33
Actuators
Motoeized
Stages
Light
Sources
LHF
Please select a fixed lens holder and a protective window
that matches the profile of the focusing lens. (use the matrix
table on the right)
◦There are two types of fixed holder for the focusing lens.
B045
Thread Mount Type (LHF-M)
Visible Spectrum Achromats
YAG Laser Focusing Lenses
Focusing Lenses for Fiber Laser (M34 or smaller)
Excimer Laser Focusing Lenses (some models)
Lens Tube Type (LHF-UDL)
Ultraviolet Achromats
Thread Mount Type (LHF-M)
Lens Tube Type (LHF-UDL)
Focusing Lens Holders
Focusing Lens
Screw ring Focusing Lens
Protective Window Holders
Protective Windows
Focusing Lens Holders
List of adaptive lens holder and protective window
Part Number
Protective Protective
window window retainer
Compatible Optic Mounts
Visible Spectrum Achromats
ATL-30-40PY2
ATL-30-50PY2
ATL-30-60PY2
NADL-30-80PY2
NADL-30-100PY2
NADL-30-150PY2
NADL-30-200PY2
PG-33 PGH-36 LHF-M34-30
YAG Laser Focusing Lenses
NYTL-25-20PY1 PG-21 PGH-24 LHF-M29-25
NYTL-30-30PY1
NYTL-30-40PY1
NYTL-30-50PY1
NYDL-30-60PY1
NYDL-30-80PY1
NYDL-30-100PY1
NYDL-30-150PY1
PG-27
PG-33
PGH-30
PGH-36
LHF-M34-30
Focusing Lenses for Fiber Laser
HFTLSQ-15-20PF1 PG-21 PGH-24 exclusive adapter + LHF-M29-25
HFTLSQ-20-30PF1
exclusive adapter + LHF-M34-30
HFTLSQ-30-40PF1
HFTLSQ-30-50PF1
PG-27 PGH-30
HFTLSQ-30-60PF1
LHF-M34-30
HFTLSQ-30-80PF1
PG-33 PGH-36
HFTLSQ-30-100PF1
HFDLSQ-30-150PF1
HFTLSQ-50-100PF1
HFDLSQ-50-200PF1
LHF-M50.9-50
HFDLSQ-50-300PF1
Excimer Laser Focusing Lenses
ETL-30-40P
ETL-30-50P
ETL-30-60P
ETL-30-80P
NEDL-30-100P
NEDL-30-150P
NEDL-30-200P
EDL-50-100P
EDL-50-150P
EDL-50-200P
EDL-50-250P
EDL-50-300P
PG-33 PGH-36 LHF-M34-30
LHF-M50.9-50
Ultraviolet Achromats
UDL-30-50P
UDL-30-80P
UDL-30-100P
LHF-UDL-30
NUDL-30-150P
NUDL-30-200P
UDL-40-80P
NUDL-40-100P
NUDL-40-150P
LHF-UDL-40
NUDL-40-200P
NUDL-40-250P
UDL-50-100P
NUDL-50-150P
NUDL-50-200P
LHF-UDL-50
NUDL-50-250P
NUDL-50-300P
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B183

Optics & Optical Coatings
Excimer Laser Focusing Lenses
ETL/EDL/NEDL
Catalog
Code
W3082
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
These lenses are manufactured with a synthetic fused silica material and it has a high transmittance
value in the ultra-violet wavelength of 180 − 400nm. They have excellent performance and ideal for
focusing and imaging applications. There is no adhesive or heat absorption material used to
produce these lenses, they show high resistance to the ultraviolet light.
◦They are made of 2 or 3 spherical lenses and they offer correction on spherical and comatic aberration.
◦Standard focal lengths for Excimer laser with 248nm, 266nm and 355nm.
◦NA 0.1 or below (ETL model NA 0.25) can be focused to the diffraction limit.
Specifications
Material
Synthetic fused silica for Excimer Laser
Design wavelength 248nm
Coating
Uncoated
Acceptance angle ±1°
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Schematic
Lens mounting thread
Outline Drawing
ETL-30/NEDL-30
EDL-50
M34 P0.75
54±0.1
M50.9 P0.75
Clear aperture 47
Protective window mounting thread
(None type 50)
Housing
(in mm)
Clear aperture 27
M34 P0.75
36±0.15
marking
4 4
L WD
●Tolerance
Length L±0.2
Focal length ±2%
Guide
▶Products that are not mentioned in this catalog such as high pulse
laser use or different wavelength are available on request, please
contact our International Sales Division.
▶Protection window is sold separately. B183
▶For detail on focal length of each wavelength, please see our web
site.
W3082
Attention
▶These focusing lenses are made for use to image an object located in
an infinitive distance or using a point of source as a parallel light.
Near distance of an image will not produce any good optical result.
▶The correct direction to input a parallel light is on the top side mark.
If the direction is wrong, the spherical aberration will be big and the
image unfocused.
▶If the wavelength is applied in-correctly, the spherical aberration and
transmission will be bad.
▶Usage with high power laser or near high temperature light source,
the high heat build-up in the lens may alter the focal length. To avoid
this, heat prevention is required.
▶To reduce the focus spot size, ensure that the input beam diameter
(1/e 2 ) is reduced to half of the effective diameter of the focus lens.
▶These focusing lenses are not chromatic lenses; they are not optically
corrected.
▶The lenses have 4% of reflectivity; therefore about over 20% of loss
is expected in transmission.
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Specifications
Part Number
4
L
marking
WD
Focal length
f
[mm]
Length
L
[mm]
Numerical aperture
(NA)
Working distance
(WD)
[mm]
ETL-30-40P 39.6 22 0.34 31.1
ETL-30-50P 49.8 22 0.27 41.6
ETL-30-60P 59.7 22 0.23 52.4
ETL-30-80P 79.8 22 0.17 73.2
NEDL-30-100P 99.9 12 0.14 94.6
NEDL-30-150P 149.3 12 0.09 144.6
NEDL-30-200P 199.3 12 0.07 194.7
EDL-50-100P 100.4 20 0.24 87.1
EDL-50-150P 149.6 20 0.16 137.9
EDL-50-200P 199.1 20 0.12 187.9
EDL-50-250P 249.0 20 0.09 238.0
EDL-50-300P 298.6 20 0.08 288.0
B184
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Ultra-violet Achromats
UDL/NUDL
Catalog
Code
W3083
These lenses have different refractive index and produces a high degree of correction across a
bandwidth of 200 − 400nm.
Can be used as a laser focusing lens for broadband ultra-violet sources.
◦NA 0.1 or below (ETL model NA 0.25) can be focused to the diffraction limit.
◦ No adhesive or heat absorption materials are used to produce these lenses and they show high resistance to ultra-violet
light.
◦These are not achromatic corrective but offers correction on spherical and comatic aberration.
Specifications
Material
Synthetic fused silica for Excimer Laser − Calcium fluoride (CaF2)
Design wavelength 200nm, 308nm, 400nm
Coating
Uncoated
Acceptance angle ±1°
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Guide
▶Products not found on our catalogue like high pulse lasers or usage
on different wavelengths is available upon request. Please contact
our International Sales Division.
▶We have the capability to produce large amounts of these lenses in
custom specifications
▶For details on focal length of each wavelength, please see details on
our web site.
W3082
Actuators
Motoeized
Stages
Light
Sources
Schematic
Outline Drawing
φDc
Clear aperture φDe
marking
Housing
(in mm)
●Tolerance
Diameter φDc ±0.15
Length L ±0.2
Focal length ±2%
Attention
▶These focusing lenses are made for use to image an object located in
an infinitive distance or using a point of source as a parallel light.
Near distance of an image will not produce any good optical result.
▶The correct direction to input a parallel light is on the top side mark.
If the direction is wrong, the spherical aberration will be big and the
image unfocused.
▶If the wavelength is applied in-correctly, the spherical aberration and
transmission will be bad.
▶Usage with high power laser or near high temperature light source,
the high heat build-up in the lens may alter the focal length. To avoid
this, heat prevention is required.
▶To reduce the focus spot size, ensure that the input beam diameter
(1/e 2 ) is reduced to half of the effective diameter of the focus lens.
▶These focusing lenses are not chromatic lenses; they are not optically
corrected.
▶The lenses have 3% to 4% of reflectivity; therefore about over 13%
of loss is expected in transmission.
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
L
WD
Substrates/Windows
Optical Data
Maintenance
Specifications
Part Number
Focal length
f
[mm]
Diameter
φDc
[mm]
Clear aperture
φDe
[mm]
Length
L
[mm]
Numerical aperture
(NA)
Working distance
(WD)
[mm]
UDL-30-50P 50.4 φ34 φ27 17 0.27 39.3
UDL-30-80P 80.0 φ34 φ27 14 0.17 72.4
UDL-30-100P 100.1 φ34 φ27 13 0.14 92.5
NUDL-30-150P 151.5 φ34 φ27 16 0.09 137.1
NUDL-30-200P 200.3 φ34 φ27 16 0.07 185.2
UDL-40-80P 80.3 φ44 φ37 17 0.23 70.2
NUDL-40-100P 100.0 φ44 φ37 18 0.19 87.7
NUDL-40-150P 149.0 φ44 φ37 18 0.12 134.4
NUDL-40-200P 201.2 φ44 φ37 18 0.09 185.5
NUDL-40-250P 249.7 φ44 φ37 19 0.07 230.7
UDL-50-100P 100.8 φ54 φ47 20 0.24 89.1
NUDL-50-150P 149.7 φ54 φ47 21 0.16 136.3
NUDL-50-200P 200.0 φ54 φ47 22 0.12 179.9
NUDL-50-250P 252.4 φ54 φ47 21 0.09 233.0
NUDL-50-300P 300.9 φ54 φ47 22 0.08 278.8
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
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B185

Optics & Optical Coatings
fθ Lenses
fθ
It is used for laser marking, bar code reader, laser micromachining and so on.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
◦It converts a rotational movement of a galvanometer mirror into a linear motion on the focal plane by using distortion
effects.
◦Telecentric type is also available that can be irradiated vertically to the focusing plane.
◦Also available for fundamental YAG laser (1064nm), harmonic lasers (266nm, 355nm, 532nm) and CO2 lasers (9.3 − 10.6µm).
Guide
▶We accept orders to suit customized requirements.
▶ Also available to fabricate the laser scanning system which combines
the galvanometer mirror and fθ lens unit.
Attention
▶We do not recommend the use of the fθ lens to the imaging system
because it is designed for the optical system of the scanning type.
▶Please place in accordance with the position of the incident pupil of
the fθ lens beam into the scanning system (galvanometer mirror). If
the incident pupil is not in position of the beam scanning system, the
optimum focusing spot cannot be achieved because the aberration
will increase.
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
fθ Lenses dimension table
Part Number
A
(mm)
B
(mm)
C
(mm)
D
(mm)
E
(mm)
fθ-100-266T 60 57.8 43 5 6 6 φ97 φ82g6 M80 P1 φ69 74.8
fθ-150-266T 80 73.3 65 3 6 6 φ122 φ102g6 M100 P1 φ89 88.3
fθ-500-325 50 43.4 34 − 10 6 φ117 φ82g6 M80 P1 − 59.4
fθ-1000-325 50 50.3 36 − 8 6 φ127 φ82g6 M80 P1 − 64.3
fθ-100-355T 60 56.3 42 6 6 6 φ97 φ82g6 M80 P1 φ69 74.3
fθ-100-355THG 80 109.6 59 9 6 6 φ112 φ102g6 M100 P1 φ84 130.6
fθ-150-355T 80 72.3 64 4 6 6 φ122 φ102g6 M100 P1 φ89 88.3
fθ-1000-442 50 50 36 − 8 6 φ127 φ82g6 M80 P1 − 64
fθ-100-532T 60 51.5 50 − 6 4 φ92 φ82g6 M80 P1 − 61.5
fθ-300-1064 39 35.9 27.3 3.7 8 − φ91 − M80 P1 φ76 47.6
fθ-100-1064T 60 49.5 47.5 − 6.5 6 φ92 φ82g6 M80 P1 − 62
fθ-100-9300T 80 45 48 20 6 6 φ122 φ102g6 M100 P1 φ90 77
F
(mm)
φG
(mm)
φH
(mm)
I
φJ
(mm)
K
(mm)
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
fθ Lenses
Part Number
Design
wavelength
[nm]
Focal length
f
[mm]
Entrance pupil
diameter
[mm]
Scanning angle
[ ° ]
Scanning Range
[mm]
Telecentric
Working distance
(WD)
[mm]
Transmittance
[%]
fθ-100-266T 266 100.4 φ12 ±15 φ52 ○ 135.9 93
fθ-150-266T 266 149.9 φ12 ±15 φ78 ○ 205.2 93
fθ-500-325 325 501.8 φ20 ±22 φ385 − 605.4 94
fθ-1000-325 325 1002.0 φ14 ±25 φ870 − 1169.4 94
fθ-100-355T 355 99.85 φ12 ±15 φ52 ○ 136.1 93
fθ-100-355THG 355 100.1 φ14 ±15 φ52 ○ 60.94 90
fθ-150-355T 355 150.2 φ12 ±15 φ78 ○ 207.2 93
fθ-1000-442 442 1000.0 φ14 ±25 φ870 − 1169.7 95
fθ-100-532T 532 100.3 φ12 ±15 φ52 ○ 121.1 90
fθ-300-1064 1064 299.8 φ16 ±23 φ240 − 361.4 95
fθ-100-1064T 1064 100.3 φ12 ±15 φ52 ○ 123.1 95
fθ-100-9300T
9300
(10600)
100.1
(99.68)
φ24 ±23 φ80 ○
73.3
(72.52)
please contact
B186
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Catalog
Code
W3084
Schematic
Galvano mirror
Entrance
pupil
Incident angle θ
fθ Lens
Output
angle tan −1 θ
x
Focal plane
By using the f theta lens, it is possible to be moved a laser light spot in
constant speed linear motion on the focal plane by scanning the mirrors
such as galvanometer scanner mirrors.
The f theta lens enables this by the effect of distortion.
Mathmatically it is expressed as following;
focal length = “f”, ideal image height = “y”, the angle of scanned = “θ”
therefore, y = fθ.
In the normal single lens, the ideal image height “y” is represented by
“y = f tanθ”.
Characteristics of both are the same in a small angle range. However,
the difference is greater angle increases.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Outline Drawing
fθ Lenses
D E F
(in mm)
fθ Lenses for YAG (fθ-L/fθ-B/fθ-270-1064)
Screw
Diamond knurling
J
Pupil
Manual
Stages
Actuators
φG φH I φJ
Pupil
φF φG φH φI
φK
Motoeized
Stages
C
A
K
B
WD
C D E B WD
A
Light
Sources
Index
Guide
fθ Lenses for YAG dimension table
Part Number
A
(mm)
B
(mm)
C
(mm)
D
(mm)
E
(mm)
fθ-100-532L 53.3 17.8 22.5 22.8 8 φ89 φ80 φ72 φ60 48.6 φ83 M85 P1
fθ-100-1064L 53.3 17 20 25.3 8 φ87 φ80 φ69 φ57 50.3 φ83 M85 P1
fθ-150-1064B 63 19.8 26.8 28 8.2 φ87 φ80 φ74.5 φ64 56 φ86 M85 P1
fθ-220-1064L 59.8 21.1 32.1 19.7 8 φ97 φ80 − φ68 48.8 φ97 M85 P1
fθ-270-1064 59.7 33.5 26.0 24.7 9 φ106 φ74 − φ64 67.2 φ106 M85 P1
φF
(mm)
φG
(mm)
φH
(mm)
φI
(mm)
J
(mm)
φK
(mm)
Screw
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
fθ Lenses for YAG
Part Number
Design
wavelength
[nm]
Focal length
f
[mm]
Entrance pupil
diameter
[mm]
Scanning angle
[°]
Scanning Range
[mm]
Telecentric
Working distance
(WD)
[mm]
Transmittance
[%]
fθ-100-532L 532 100.2 φ12 ±22.9 φ80 − 114.7 >95
fθ-100-1064L 1064 99.93 φ12 ±22.9 φ80 − 109.6 >95
fθ-150-1064B 1064 152.1 φ15 ±24.0 φ127.4 − 168.6 >95
fθ-220-1064L 1064 220.0 φ12 ±24.0 φ184 − 254.2 >95
fθ-270-1064 1064 273.0 φ15 ±24.13 φ230 − 318.9 >95
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
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B187

Optics & Optical Coatings
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
B188
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3-Wavelengths Objective Lens
NPAL-YSTF
Catalog
Code
W3199
This objective lens can be used for laser machining using pulsed laser of SHG (532nm), THG (355nm), and
FHG (266nm) of YAG laser. It can be obtained a high transmittance at three harmonic wavelengths of YAG.
◦With its long working distance and corrected field curvature, its natural observation image is obtained to the periphery of
viewing the field.
◦It is the long working infinity correction function that is used to introduce a laser system and coaxial observation.
◦It allows observation of the sample with visible light (400 – 500nm).
Guide
▶Available fixing the objective lens holder (LHO-26). C046
▶When the objective lens is fixed to 2(two) axis holder, please consult
our International Sales Division.
▶As the laser processing system, it is available coaxial illumination with
laser observation unit “OUCI-2” and dichroic mirror block, “DIMC” for
the laser introducing . A018, A019
Attention
▶When an objective lens is used in laser processing, use the diameter
of the incident beam to extend to a size of half the pupil diameter (1/e 2 ).
A small light spot cannot be achieved when the incident beam is too
narrow. Please note if there is a laser energy density increase, there
will be a high possibility of damage to the objective lens.
▶The surface of an objective lens can be contaminated by splashes
during processing. To avoid this, please have sufficient working
distance (WD) and insert a thin protective glass on the objective.
▶Magnification is the value when using the imaging lens f=200mm.
When used in a microscope lens barrel from other manufacturers
may have different magnifications. The actual magnification should
be calculated from the ratio of the focal length of the objective lens
and the focal length of the imaging lens to verify the focal length of
the imaging lens barrel to be used.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Outline Drawing
(in mm)
Guide
NPAL-10-UV-YSTF
13.5 (Working Distance)
NPAL-20-UV-YSTF
10 (Working Distance)
Mirrors
Beamsplitters
29.6
M26 P0.706
28.2
29.6
M26 P0.706
28.2
Polarizers
Lenses
81.5
85
Multi-Element Optics
5
95 (Parfocal Length)
5
95 (Parfocal Length)
Filters
NPAL-50-UV-YSTF
10 (Working Distance)
Prisms
Substrates/Windows
29.6
M26 P0.706
85
28.2
Typical Transmittance Data
T: Transmission
Optical Data
Maintenance
5
95 (Parfocal Length)
100
Selection Guide
80
Achromats
T [%]
60
Focusing Lenses
fθ Lenses
40
Objectives
20
NPAL-10UV-YSTF
NPAL-20UV-YSTF
NPAL-50UV-YSTF
0
250 300 400 500 600 700
[nm]
Expanders
Others
Specifications
Part Number
Magnification
Numerical
aperture
(NA)
Working
distance
(WD)
[mm]
Focal length
f
[mm]
Resolution
(λ=550nm)
[µm]
Focal depth
(λ=550nm)
[µm]
Pupil Imaging device field of view
diameter (1/2-inch)
[mm]
[mm]
NPAL-10-UV-YSTF 10 0.2 13.5 20 1.4 ±6.9 φ8.0 0.48×0.64 0.30
NPAL-20-UV-YSTF 20 0.36 10.0 10 0.8 ±2.1 φ7.2 0.24×0.32 0.32
NPAL-50-UV-YSTF 50 0.42 10.0 4 0.7 ±1.6 φ3.4 0.10×0.13 0.32
Weight
[kg]
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B189

Optics & Optical Coatings
Ultra-violet Objective Lenses
NPAL
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
This objective lens can be used for laser machining using pulsed laser of THG (355nm), YAG laser
or FHG (266nm) YAG.
Chromatic aberration is suppressed in both the visible and UV laser wavelength, achieving a high
transmittance.
◦With its long working distance and field curvature corrected, its natural observation image is obtained to the periphery of
the visual field.
◦It is the long working infinity correction function that is used to introduce a laser system and coaxial observation.
◦ It is also used for the observation of near ultra-violet light.
Guide
▶Available fixed objective lens holder (LHO-20.32, LHO-26)
C046
▶When the objective lens is fixed to a 2 axis holder, please consult our
International Sales Division.
▶As the laser processing system, it is available coaxial illumination with
laser observation unit “OUCI-2” and dichroic mirror block “DIMC” for
the laser introducing. A018, A019
Attention
▶When an objective lens is used in laser processing, use the diameter of
the incident beam to extend to a size of half the pupil diameter (1/e 2 ).
A small light spot cannot be achieved when the incident beam is too
narrow. Please note if there is a laser energy density increase, there
will be a high possibility of damage to the objective lens.
▶The surface of an objective lens can be contaminated by splashes
during processing. To avoid this, please have sufficient working
distance (WD) and insert a thin protective glass on the objective.
▶Magnification is the value when using the imaging lens f=200mm.
When used in a microscope lens barrel from other manufacturers may
have different magnifications. The actual magnification should be
calculated from the ratio of the focal length of the objective lens and
the focal length of the imaging lens to verify the focal length of the
imaging lens barrel to be used.
Beamsplitters
Polarizers
Lenses
Outline Drawing
(in mm)
Multi-Element Optics
NPAL-10-UV-YSF/NPAL-10-NUV-YST
NPAL-20-UV-YSF/NPAL-20-NUV-YST
Filters
13.5 (Working Distance)
10 (Working Distance)
Prisms
Substrates/Windows
φ29.6
M26 P0.706
φ28.2
φ29.6
M26 P0.706
φ28.2
Optical Data
Maintenance
5
81.5
95 (Parfocal Length)
5
85
95 (Parfocal Length)
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
NPAL-50-UV-YSF/NPAL-50-NUV-YST
10 (Working Distance)
Objectives
Expanders
Others
φ29.6
M26 P0.706
φ28.2
85
5
95 (Parfocal Length)
Compatible Optic Mounts
LHO-26
B190
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Catalog
Code
W3089
266nm
Part Number
Magnification
Numerical
aperture
(NA)
Working
distance
(WD)
[mm]
Focal length
f
[mm]
Resolution
(λ=550nm)
[µm]
Focal depth
(λ=550nm)
[µm]
Pupil
diameter
[mm]
Imaging device field of view
(1/2-inch)
[mm]
NPAL-10-UV-YSF 10 0.2 13.5 20 1.4 ±6.9 φ8.0 0.48×0.64 0.30
NPAL-20-UV-YSF 20 0.36 10 10 0.8 ±2.1 φ7.2 0.24×0.32 0.32
NPAL-50-UV-YSF 50 0.42 10 4 0.7 ±1.6 φ3.4 0.10×0.13 0.32
Weight
[kg]
Application
Systems
Optics &
Optical
Coatings
Holders
Typical Transmittance Data
T: Transmission
NPAL-UV-YSF
100
90
80
Bases
Manual
Stages
T [%]
70
60
50
40
30
20
NPAL-10UV-YSF
NPAL-20UV-YSF
NPAL-50UV-YSF
Actuators
Motoeized
Stages
10
0
250 350 450 550 650
λ [nm]
Light
Sources
Index
355nm
Part Number
Magnification
Numerical
aperture
(NA)
Working
distance
(WD)
[mm]
Focal length
f
[mm]
Resolution
(λ=550nm)
[µm]
Focal depth
(λ=550nm)
[µm]
Pupil
diameter
[mm]
Imaging device field of view
(1/2-inch)
[mm]
NPAL-10-NUV-YST 10 0.2 13.5 20 1.4 ±6.9 φ8.0 0.48×0.64 0.30
NPAL-20-NUV-YST 20 0.36 10 10 0.8 ±2.1 φ7.2 0.24×0.32 0.32
NPAL-50-NUV-YST 50 0.42 10 4 0.7 ±1.6 φ3.4 0.10×0.13 0.32
Weight
[kg]
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Typical Transmittance Data
NPAL-NUV-YST
100
90
80
70
T: Transmission
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
T [%]
60
50
40
30
20
10
NPAL-10NUV-YST
NPAL-20NUV-YST
NPAL-50NUV-YST
Maintenance
Selection Guide
Achromats
0
300 400 500 600 700 800
λ [nm]
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
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B191

Optics & Optical Coatings
Near Ultra-violet (NUV) Objective Lenses
PAL
Catalog
Code
W3087
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
This objective lens can be used for laser machining using pulsed laser of THG (355nm) YAG laser
Chromatic aberration is suppressed in both the visible and UV laser wavelength, achieving a high
transmittance.
◦With its long working distance and field curvature corrected, its natural observation image is obtained to the periphery of
the visual field.
◦It is the long working infinity correction function that is used to introduce a laser system and coaxial observation.
◦It is also used for the observation of near ultra-violet light.
◦This objective lens can be used with a pulse laser of visible light (532nm).
Guide
▶Available for fixed objective lens holder (LHO-20.32, LHO-26).
C046
▶When the objective lens is fixed to a 2 axis holder, please consult our
International Sales Division.
▶For laser processing, it is available in dichroic block (DIMC) and for
laser unit with coaxial illumination and observation (OUCI-2).
A018, A019
▶If the objective lens corresponding to the cover glass thickness is thin
is required, please contact our international sales division.
Attention
▶When an objective lens is used in laser processing, use the diameter
of the incident beam to extend to a size of half the pupil diameter (1/e 2 ).
A small light spot cannot be achieved when the incident beam is too
narrow. Please note if there is a laser energy density increase, there
will be a high possibility of damage to the objective lens.
▶The surface of an objective lens can be contaminated by splashes
during processing. To avoid this, please have sufficient working
distance (WD) and insert a thin protective glass on the objective.
▶Magnification is the value when using the imaging lens f=200mm.
When used in a microscope lens barrel from other manufacturers
may have different magnifications. The actual magnification should
be calculated from the ratio of the focal length of the objective lens
and the focal length of the imaging lens to verify the focal length of
the imaging lens barrel to be used.
Polarizers
Outline Drawing
(in mm)
Lenses
Multi-Element Optics
Filters
Prisms
PAL-20-NUV
M26
P0.706
φ34
17.1 (Working distance)
φ32
PAL-50-NUV
M26
P0.706
φ36
3.5 (Working distance)
φ32.2
Substrates/Windows
Optical Data
Maintenance
77.9
5 95 (Par focal Length)
91.6
5 95 (Par focal Length)
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Specifications
Part Number Magnification NA
Working
distance
(WD)
[mm]
Focal
length
f
[mm]
Resolution
(λ=550nm)
[µm]
Focal depth
[µm]
Pupil
diameter
[mm]
Imaging device
field of view
(1/2-inch)
[mm]
Laser Damage
Threshold*
[J/cm 2 ]
PAL-20-NUV 20 0.40 17.1 10 0.7 ±1.7 φ8.0 0.24×0.32 0.05 (355nm) 0.30
PAL-50-NUV 50 0.70 3.5 4 0.4 ±0.6 φ5.6 0.10×0.13 0.05 (355nm) 0.34
* Laser pulse width 10ns, repetition frequency 20Hz
Typical Transmittance Data
Weight
[kg]
T: Transmission
T [%]
100
90
80
70
60
50
40
PAL-20-NUV
PAL-50-NUV
30
20
10
0
300 400 500 600 700 800
λ [nm]
B192
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Infrared (NIR) Objective Lenses
LMPAL
Catalog
Code
W3087
This is a high NA infinity correction objective lens for laser processing (femtosecond laser and
fundamental of YAG laser). You can also observe the laser beam coaxially with a laser processed
surface that is designed to reduce the aberration of the visible wavelength.
◦With its long working distance and field curvature corrected, its natural observation image is obtained to the periphery of
the visual field.
◦It is the long working infinity correction function that is used to introduce a laser system and coaxial observation.
◦Near-infrared objective lens (LMPAL-20-NIR/LMPAL-50-NIR) is made on the assumption that processing of the LCD
panel, and delivers the highest performance in a state that has been transmitting the glass substrate thickness is 0.7mm.
◦It is also used for the observation of infrared light.
◦LMPAL-20-NIR-Y and LMPAL-50-NIR-Y-HR is including protective glass unit. It will help to protect the objective lens
from spattering and scattered by laser processing. It is possible to replace the protective glass unit.
◦These variety of objective lens can be used in the pulse laser of visible light such as 532nm. The damage threshold of
each lens is 0.1J/cm 2 at 532nm (reference). (Laser pulse width 10nSec, repetition frequency 20Hz)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
How to replace the protective glass unit of LMPAL-20-NIR-Y/LMPAL-50-NIR-Y-HR
Male thread for Protective glass Cover
Protective glass Cover unit
Outline Drawing
Guide
▶Available for fixed objective lens holder (LHO-20.32, LHO-26). C046
▶When the objective lens is fixed to a 2 axis holder, please consult our
International Sales Division.
▶For laser processing, it is available in dichroic block (DIMC) and for laser unit
with coaxial illumination and observation (OUCI-2). A018, A019
▶If the objective lens corresponding to the cover glass thin is required, please
contact our international sales division.
Attention
▶When an objective lens is used in laser processing, use the diameter of the
incident beam to extend to a size of half the pupil diameter (1/e 2 ). A small
light spot cannot be achieved when the incident beam is too narrow. Please
note if there is a laser energy density increase, there will be a high possibility
of damage to the objective lens.
▶The surface of an objective lens can be contaminated by splashes during
processing. To avoid this, please have sufficient working distance (WD) and
insert a thin protective glass on the objective.
▶If the incident laser beam femtosecond is below 100fs, there is a possibility
that the pulse width will spread.
▶Magnification is the value when using the imaging lens f=200mm. When
used in a microscope lens barrel from other manufacturers may have
different magnifications. The actual magnification should be calculated from
the ratio of the focal length of the objective lens and the focal length of the
imaging lens to verify the focal length of the imaging lens barrel to be used.
▶LMPAL-20-NIR-Y/LMPAL-50-NIR-Y-HR is designed in consideration of the
thickness of including protective glass. If using removed the protective
glass, it does not meet the performance specifications.
(in mm)
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
M26
P0.706
LMPAL-20-NIR
17.4 (Working distance)
0.7 (Glass Thickness)
LMPAL-20-NIR-Y
M
P
1.8 (Glass Thickness)
20 (Working distance)
LMPAL-50-NIR
M26
P0.706
4 (Working distance)
0.7 (Glass Thickness)
LMPAL-50-NIR-Y-HR
M
P
10 (Working distance)
1.8 (Glass Thickness)
Filters
Prisms
38
77.6
5 95 (Par focal Length)
36.5
Glass
plate
68.5 6.7
(Par focal Length)
Protective
glass
38
91
5 95 (Par focal Length)
36.5
Glass
plate
79.3 5.7
(Par focal Length)
Protective
glass
Substrates/Windows
Optical Data
Maintenance
Specifications
Part Number Magnification NA
LMPAL-NIR
T [%]
Working
distance
(WD)
[mm]
Focal
length
f
[mm]
100
90
80
70
60
50
LMPAL-20-NIR
40
LMPAL-50-NIR
30
20
10
0
400 500 600 700 800 900 1000 1100
[nm]
Resolution
(λ=550nm)
[µm]
Typical Transmittance Data
LMPAL-NIR-Y
T [%]
Focal depth
[µm]
Pupil
diameter
[mm]
Imaging device
field of view
(1/2-inch)
[mm]
Laser Damage
Threshold*
[J/cm 2 ]
LMPAL-20-NIR 20 0.45 17.2 (at Air) 10 0.6 ±1.4 φ9.0 0.24×0.32 0.1 (780nm) 0.34
LMPAL-20-NIR-Y 20 0.45 20 10 0.6 ±1.4 φ9.0 0.24×0.32 0.2 (1064nm) 0.44
LMPAL-50-NIR 50 0.80 3.8 (at Air) 4 0.3 ±0.4 φ6.4 0.10×0.13 0.1 (780nm) 0.44
LMPAL-50-NIR-Y-HR 50 0.67 10 4 0.4 ±0.6 φ5.4 0.10×0.13 0.2 (1064nm) 0.48
* Laser pulse width 10ns, repetition frequency 20Hz
Weight
[kg]
T: Transmission
100
90
80
70
60
50
LMPAL-20-NIR-Y
40
LMPAL-50-NIR-Y-HR
30
20
10
0
400 500 600 700 800 900 1000 1100
[nm]
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B193

Optics & Optical Coatings
Long Working Distance Objective Lenses
EPL/EPLE
Catalog
Code
W3086
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
With its long working infinity correction function, this objective lens can be used for a laser system
and coaxial observation.
To focus visible laser or microscopic observation of objects from a distance.
◦Chromatic aberration is corrected in the visible range (400 − 700nm).
◦Two types of parfocal distance are available, 45mm and 90mm.
◦This parfocal 95mm lens has a long working distance and a corrected field curvature. Its natural observation image is
obtained to the periphery of the visual field.
◦ It is possible to improve the response speed in the driving mechanism of the 45mm parfocal objective lens (SFS-OBL/
SFAI-OBL); with a lightweight auto focusing solution.
Guide
▶Available for fixed objective lens holder (LHO-20.32) C046
▶When the objective lens is fixed to a 2 axis holder, please consult our
International Sales Division.
▶For laser processing, it is available in dichoric block (DIMC) and for
laser unit with coaxial illumination and observation (OUCI-2).
A018, A019
Attention
▶When an objective lens is used in laser processing, use the diameter of the
incident beam to extend to a size of half the pupil diameter (1/e 2 ). A small
light spot cannot be achieved when the incident beam is too narrow.
Please note if there is a laser energy density increase, there will be a high
possibility of damage to the objective lens.
▶The surface of an objective lens can be contaminated by splashes during
processing. To avoid this, please have sufficient working distance (WD)
and insert a thin protective glass on the objective.
▶Magnification is the value when using the imaging lens f=200mm. When
used in a microscope lens barrel from other manufacturers may have different
magnifications. The actual magnification should be calculated from the
ratio of the focal length of the objective lens and the focal length of the
imaging lens to verify the focal length of the imaging lens barrel to be used.
Guide
Mirrors
Beamsplitters
Outline Drawing
EPL-5
M20.32
P0.706
11.6 (Working Distance)
EPL-10
M20.32
P0.706
6.4 (Working Distance)
(in mm)
Polarizers
φ26
φ25
φ26
φ25
Lenses
Multi-Element Optics
33.4
4.5 45 (Parfocal Length)
38.6
4.5 45 (Parfocal Length)
Filters
Prisms
Substrates/Windows
Optical Data
EPLE-20
M20.32
P0.706
φ26
11.1 (Working Distance)
33.9
4.5 45 (Parfocal Length)
φ25
EPLE-50
M20.32
P0.706
φ26
8.2 (Working Distance)
36.8
4.5 45 (Parfocal Length)
φ25
EPLE-100
M20.32
P0.706
φ26
2 (Working Distance)
43
4.5 45 (Parfocal Length)
φ25
Maintenance
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Specifications
Part Number
Magnification
Numerical
aperture
(NA)
Working
distance
(WD)
[mm]
Focal length
f
[mm]
Resolution
[µm]
Typical Transmittance Data
Focal depth
[µm]
Pupil diameter
[mm]
Imaging device field of view
(1/2-inch)
[mm]
EPL-5 5 0.13 11.6 40 2.0 ±16.3 φ10.4 0.96×1.28 0.09
EPL-10 10 0.3 6.4 20 0.9 ±3.1 φ12.0 0.48×0.64 0.09
EPLE-20 20 0.4 11.1 10 0.7 ±1.7 φ8.0 0.24×0.32 0.09
EPLE-50 50 0.55 8.2 4 0.5 ±0.9 φ4.4 0.10×0.13 0.10
EPLE-100 100 0.8 2.0 2 0.3 ±0.4 φ3.2 0.05×0.06 0.11
EPL
EPLE
Weight
[kg]
T: Transmission
T [%]
100
90
80
70
60
EPL-5
EPL-10
50
40
30
20
10
0
400 450 500 550 600 650 700
λ [nm]
T [%]
100
90
80
70
60
50
40
EPLE-20
EPLE-50
EPLE-100
30
20
10
0
400 450 500 550 600 650 700
λ [nm]
B194
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Catalog
Long Working Distance Objective Lenses SPAL/SPAHL Code W3086
It is the long working distance objective lens infinity correction function and par focal length
95mm, which can be used for a laser system and coaxial observation. To focus visible laser or
microscopic observation of objects from a distance.
◦Chromatic aberration is corrected in the visible range (400 − 700nm).
◦SPAL/SPAHL has a long working distance and a corrected field curvature. Its natural observation image is obtained to
the periphery of the visual field.
Guide
▶Available for fixed objective lens holder ( LHO-26). C046
▶When the objective lens is fixed to a 2 axis holder, please consult our
International Sales Division.
▶For laser processing, it is available in dichroic block (DIMC) and for
laser unit with coaxial illumination and observation (OUCI-2).
A018, A019
Attention
▶When an objective lens is used in laser processing, use the diameter of the
incident beam to extend to a size of half the pupil diameter (1/e 2 ). A small
light spot cannot be achieved when the incident beam is too narrow.
Please note if there is a laser energy density increase, there will be a high
possibility of damage to the objective lens.
▶The surface of an objective lens can be contaminated by splashes during
processing. To avoid this, please have sufficient working distance (WD)
and insert a thin protective glass on the objective.
▶Magnification is the value when using the imaging lens f=200mm. When
used in a microscope lens barrel from other manufacturers may have different
magnifications. The actual magnification should be calculated from the
ratio of the focal length of the objective lens and the focal length of the
imaging lens to verify the focal length of the imaging lens barrel to be used.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Outline Drawing
(in mm)
SPAL-2
M26
P0.706
34.4 (Working distance)
SPAHL-5
M26
P0.706
45 (Working distance)
Guide
φ34
φ32.2
φ34
φ32.2
Mirrors
Beamsplitters
SPAL-10
M26
P0.706
5
34 (Working distance)
22.8
60.6
95 (Par focal Length)
SPAHL-20
M26
P0.706
31 (Working distance)
5
22
50
95 (Par focal Length)
SPAHL-50
M26
P0.706
20.5 (Working distance)
Polarizers
Lenses
Multi-Element Optics
Filters
φ34
φ32.2
φ34
φ32.2
φ34
φ32.2
Prisms
5
26
61
95 (Par focal Length)
5
26
64
95 (Par focal Length)
5
26
74.5
95 (Par focal Length)
Substrates/Windows
Optical Data
Specifications
Part Number
Magnification
Numerical
aperture
(NA)
Working
distance
(WD)
[mm]
Focal length
f
[mm]
Resolution
[µm]
Focal depth
[µm]
Pupil diameter
[mm]
Imaging device field of view
(1/2-inch)
[mm]
SPAL-2 2 0.055 34.4 100 5 ±91.0 φ11.0 2.4×3.2 0.22
SPAHL-5 5 0.13 45.0 40 2 ±16.3 φ10.4 0.96×1.28 0.17
SPAL-10 10 0.28 34.0 20 1 ±3.5 φ11.2 0.48×0.64 0.19
SPAHL-20 20 0.29 31.0 10 0.9 ±3.3 φ5.8 0.24×0.32 0.22
SPAHL-50 50 0.42 20.5 4 0.7 ±1.6 φ3.4 0.10×0.13 0.25
SPAL/SPAHL
Typical Transmittance Data
Weight
[kg]
T: Transmission
Maintenance
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
T [%]
100
90
80
70
60
50
40
30
20
10
SPAL-2
SPAHL-5
SPAL-10
SPAHL-20
SPAHL-50
0
400 450 500 550 600 650 700
λ [nm]
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B195

Optics & Optical Coatings
Microscope Objectives
OBL
Catalog
Code
W3085
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
These objectives are educational microscope objectives; they have the JIS standard. (Japanese
Industry Standard) Short focal length; high NA; fit for beam divergent use.
◦Full color correction throughout the visible wavelength.
◦The OBL-40 and OBL-60 have a built-in spring in the tip of the objective lens.
◦These objective lenses are finite.
◦To mount it to a microscope, a finite 160mm adaptor is required.
◦The distance from the attachment face of the objective lens to the image is 150mm.
Guide
▶Use a special filter (SFB) to correct the wave front distortion.
C058
▶Objective holder (LHO) is available for these objective lenses.
C046
▶Cross holder (TAT) is now available. C060
Attention
▶Do not use it with high power laser.
▶The objectives lenses are finite and do not use them with infinite lens
barrel or images will bad effects.
▶To use only in visible wavelengths range.
Light
Sources
Index
Outline Drawing
(in mm)
Guide
φ23.8
M20.32
P0.706
φC
Mirrors
Beamsplitters
φ11
φB
Polarizers
Lenses
150
4.5 D
(Working Distance)
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Specifications
Part Number
Magnification
Length
D
[mm]
Barrel diameter
φB
[mm]
Pupil diameter
φC
[mm]
Focal length
f
[mm]
NA
Working distance
(WD)
[mm]
OBL-10 10 30.5 φ16.7 φ8.3 16.6 0.25 5.5 0.05
OBL-20 20 35.2 φ16.7 φ7.1 9.0 0.40 1.7 0.05
OBL-40 40 36.4 φ19.7 φ5.8 4.5 0.65 0.6 0.06
OBL-60 60 36.7 φ19.7 φ4.9 2.91 0.85 0.3 0.07
Weight
[kg]
Compatible Optic Mounts
LHO-20.32, -20.32A / TAT-18OA + TAT16RO
B196
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Reflective Microscope Objectives Lenses
OBLR
Catalog
Code
W3090
These reflective Microscope objective lenses offer an optimized chromatic aberration over a
bandwidth of 350nm to 7um. They are mainly used in microscope-spectrometry and failure analysis
in the semiconductor industry.
◦Adjustable for use with various type of microscope tube with focal length range from 80mm to infinite
◦The reflection mirror is strengthened with aluminium coating and MgF2 protective layer.
◦The M20.32 mounting thread conforms to JIS standard and is compatible with all major microscope tubes.
◦The focus point and image size of visible, UV and IR wavelengths shows no difference and the precise matching of the
images is possible.
Application
Systems
Optics &
Optical
Coatings
Holders
Guide
▶There is no protective layer in aluminium coating for the vacuum
ultra-violet spectrum and gold layer coating for near infrared is
available as an option.
▶An adapter for the objective lens turret is available (OBRLR-AMT).
Check with our International Sales Division or your microscope
manufacturer for compatibility and the use of reflective microscope
objective lenses.
▶Specific holder for microscope objective lenses (LHO-20.32) is
available. C046
Bases
Manual
Stages
Actuators
Attention
Motoeized
Stages
▶These objectives are not to be used for laser processing due to light
axis shielding of the reflective mirror.
▶ There are microscopes that cannot be used with a turret.
▶ The cover glass is not mobile. Use the adjustable correction collar to
adjust the focal length and the cover glass thickness.
▶The center reflective mirror shields the center of the light axis. For
direct light experiments, a low intense light in the center is expected.
▶The light intensity loss if expected to be around 45%. (The center
mirror shielding 36% and the aluminum reflectivity 90%)
Light
Sources
Index
Outline Drawing
OBLR-10A
Mechanical barrel length
(reference)
Cover glass thickness
(reference)
OBLR-20A
Mechanical barrel length
(reference)
(in mm)
Cover glass thickness
(reference)
Objective Lens Adapter
14.5
10
Guide
Mirrors
Beamsplitters
φ48
M20.32
P0.706
φ48
M20.32
P0.706
φ26
M20.32
P0.706
M20.32
P0.706
Polarizers
Lenses
Multi-Element Optics
16 (Working Distance)
4.5 75
7 (Working Distance)
4.5 60
Part Number
OBLR-AMT
Filters
Prisms
OBLR-30A
Mechanical barrel length
(reference)
Cover glass thickness
(reference)
OBLR-40A
Mechanical barrel length
(reference)
Cover glass thickness
(reference)
Substrates/Windows
Optical Data
Maintenance
φ48
M20.32
P0.706
φ48
M20.32
P0.706
Selection Guide
Achromats
4.5
5 (Working Distance)
60
3.5 (Working Distance)
4.5 60
Focusing Lenses
fθ Lenses
Objectives
Specifications
Part Number
Magnification Wavelength Range
Focal length
f
[mm]
Numerical
aperture
(NA)
Field of view
[mm]
Working distance
(WD)
[mm]
Mechanical tube length
[mm]
Shielding ratio
[%]
OBLR-10A 10 350nm − 7µm 19.9 0.2 φ1.0 16 80 − ∞ (Variable) about 36
OBLR-20A 20 350nm − 7µm 10.0 0.35 φ0.5 7 80 − ∞ (Variable) about 36
OBLR-30A 30 350nm − 7µm 6.7 0.41 φ0.34 5 80 − ∞ (Variable) about 36
OBLR-40A 40 350nm − 7µm 5.0 0.49 φ0.25 3.5 80 − ∞ (Variable) about 36
Expanders
Others
Compatible Optic Mounts
LHO-20.32
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B197

Optics & Optical Coatings
Catalog
High Power Laser Beam Expander BEHP Code W3200
Application
Systems
Optics &
Optical
Coatings
Holders
It is a laser beam expander corresponding to the high-power laser.
Fine adjustment of the collimator is available with diopter correction function.
By the lens design that takes into account the wavefront aberration, it can be used in an optical
system with high precision, such as a laser interferometer and laser processing.
◦The optical system of the beam expander is the air gap configuration that does not use an adhesive bonding of lens.
◦By turning the diopter ring that is attached to the center of the beam expander, you can make variable beams such as
the focused beam, collimated beam, and the divergent beam. It is used when you want to vary the position of the beam
waist and if strict collimation adjustment is necessary.
Bases
Manual
Stages
Actuators
Specifications
Lens Material
Configuration of lens
Angle of view
Coating
A range of the length of
lens barrel
Synthetic fused silica
2 group 4plates Galilean
2° (full-width)
Antireflection coating (Design wavelength: 633nm)
±5mm
Motoeized
Stages
Light
Sources
Guide
▶We provide the holder for laser beam expander (BE-M34H) for the
fine adjustment with tilt angle and to secure the beam expander.
C054
▶It is also available to provide beam expander of wavelength other than
products in the catalog and achromatic in two wavelengths or more.
Index
Outline Drawing
(in mm)
Attention
Guide
Mirrors
Beamsplitters
φ57
M34 P1
Clamp
Diopter ring
(45)
φ60
▶It is not possible to create a collimated light obtained by reducing the
beam diameter using in the opposite direction a beam expander.
In this case, please use the appropriate optical system by determining
the position of the beam waist and divergence angle of the laser
beam.
Polarizers
Lenses
5 (95)
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Specifications
Part Number
Design wavelength
[nm]
Beam magnification
Output
Clear aperture
[mm]
Laser Damage Threshold*
[J/cm 2 ]
BEHP-3-266 266 3 φ10 2
BEHP-5-266 266 5 φ6 2
BEHP-10-266 266 10 φ3 2
BEHP-3-355 355 3 φ10 4
BEHP-5-355 355 5 φ6 4
BEHP-10-355 355 10 φ3 4
BEHP-3-532 532 3 φ10 5
BEHP-5-532 532 5 φ6 5
BEHP-10-532 532 10 φ3 5
BEHP-3-1064 1064 3 φ10 7
BEHP-5-1064 1064 5 φ6 7
BEHP-10-1064 1064 10 φ3 7
* Laser pulse width 10ns, repetition frequency 20Hz
B198
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Catalog
High-power zoom type laser beam expander BEZHP Code W3201
It is capable of 1× to 3× times changing high-power zoom Laser beam expander.
Fine adjustment of the collimator is available with diopter correction function.
It can be used in an optical system with high precision, such as a laser interferometer and processing
by the lens design that takes into account the wavefront aberration.
◦The optical system of the beam expander is the air gap configuration that does not use an adhesive bonding of lens.
This allows also to be used in high-power laser. By the Galileo type lens configuration, it made reduce the number of
aberration correction lens, and enables shorter overall length of the beam expander.
◦By turning the diopter ring that is attached to the center of the beam expander, you can make variable beams such as
the focused beam, collimated beam, and the divergent beam. It is used when you want to vary the position of the beam
waist and if strict collimation adjustment is necessary.
Guide
▶We provide the holder for laser beam expander (BE-M22H) for the
fine adjustment with tilt angle and to secure the beam expander.
C054
▶It is also available to provide beam expander of the wavelength other
than products in the catalog.
Attention
▶It is not possible to create a collimated light obtained by reducing the
beam diameter using in the opposite direction a beam expander.
In this case, please use the appropriate optical system by determining
the position of the beam waist and divergence angle of the laser
beam.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Outline Drawing
(in mm)
Clamp (Zoom)
Zoom ring
Clamp (Diopter)
Diopter ring
Guide
Mirrors
φ38
M22 P0.75
φ25
φ40
Beamsplitters
Polarizers
5
90 − 95
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Specifications
Part Number
Variable
magnification
Design
wavelength
[nm]
Output
Clear aperture
[mm]
Laser Damage
Threshold*
[J/cm 2 ]
BEZHP-1/3-532 1 – 3 532 φ5 7.0 Antireflection coating Synthetic fused silica 0.3
* Laser pulse width 10ns, repetition frequency 20Hz
Coating
Material
Weight
[kg]
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B199

Optics & Optical Coatings
Laser Beam Expanders With diopter correction function
BE/LBED
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
This is an optical system for expanding a small collimated laser beam to a larger one.
Fine adjustment of the collimator is available using the diopter correction function.
You can use a high precision optical system like an interferometer or laser processing with lens
designed for wave from aberration.
◦The beam expander optical system is built on air-space and the lenses are not bonded. It can be used for high powered
laser applications.
◦With the Galilean type lens configuration, it reduces the number of aberration corrections and shortens the length of the
beam expander.
◦By turning the dioptre ring on the beam expander, you can have a varied collimated beam with beam divergence on the
focused beam. A beam waist or an accurate adjustment of the collimation is required.
◦There is a wide variety with different magnification and wavelength to choose from.
◦With the different types of BE-V and LBED visible lasers, it can be attached to ant He-Ne (05-LHP) lasers with an adapter
(included).
Guide
▶Beam expander holders are now available (LBED-H, LBED-YH) and it
comes with tilt and fine adjustments. C054
▶Holders can be used to fix beam expanders (BE-M34H, BE-M22H).
C054
▶We can also fabricate achromatic beam expanders with multiple wave
lengths other than those found in our catalogue. Call our International
Sales Division for more information.
▶Fabrication of beam expander is also available for high-energy pulsed
laser. B198
Attention
▶By using in the opposite direction, it will not create a reduced in
diameter collimated beam. Please use the appropriate optical system
by determining the position of the beam waist and the divergence
angle of the laser beam.
Outline Drawing (in mm) Accessories for visible light (BE-V/LBED)
Clamp
Diopter ring
Connection adapters for He-Ne laser
4-40UNCL=3/8…4 screws
Lenses
M22 P0.75
10
Multi-Element Optics
φB
C
φD
φE
φ44
Filters
5 A
Prisms
4-φ3.5
φ3.5 counterbore depth 5
PCD φ36
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
■For adjustment of the laser beam expander
If the incident beam is inclined to the optical axis of the laser beam
expander, a larger collimated light is emitted from the direction of the
incident beam is inclined.
Therefore, it is necessary to precisely align the optical axis of the beam
expander for the incident beam.
We recommend the laser beam expander holder (LBED-H, LBE-H) to
adjust the tilt of the beam expander. C054, C055
θ
If the center of the incident beam is translated from the optical axis of
the laser beam expander, the emission is emitted with enlarged and
magnified amounts of deviation of the incident beam. For this reason, if
you need the expanded beam with no chipping or deformation, the
incident beam must be strictly in accordance with the center of the optical
axis.
For adjustment to the center of the optical axis of the beam expander,
please see the page of the laser beam expander adapter (LBE-ADP).
C056
Y
YB
Incident angle: θ
Magnification: B
Deviation angle of beam: = θ − θ/B
θ/B
Compatible Optic Mounts
BE-M34H, M22H, LBE-ADP
Compatible Optic Mounts
LBED-3H, 5H, 10H / LBED-2YH, 3YH, 4YH
B200
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Catalog
Code
W3091
Specifications
Part Number
Design
wavelength
[nm]
Expansion
ratio
Input aperture
(MAX)
[mm]
Barrel length
A
[mm]
φB
[mm]
Mounting thread
C
φD
[mm]
Diameter
φE
[mm]
Primary material: Aluminum
Finish: Black Anodized
Laser Damage
Threshold*
[J/cm 2 ]
BE-2-266 266 2.0 φ15.5 72.0±4 φ57 M34 P1 φ48 φ60 1.4 0.3
BE-3-266 266 3.0 φ10.5 79.5±4 φ57 M34 P1 φ48 φ60 1.4 0.3
BE-4-266 266 4.0 φ9.0 90.5±4 φ57 M34 P1 φ48 φ60 1.4 0.3
BE-5-266 266 5.0 φ7.0 119.5±4 φ57 M34 P1 φ48 φ60 1.4 0.4
BE-7.5-266 266 7.5 φ4.5 129.0±4 φ57 M34 P1 φ48 φ60 1.4 0.4
BE-10-266 266 10.0 φ3.5 173.0±4 φ57 M34 P1 φ48 φ60 1.4 0.4
BE-2-355 355 2.0 φ15.5 75.0±4 φ57 M34 P1 φ48 φ60 2 0.3
BE-3-355 355 3.0 φ10.5 83.0±4 φ57 M34 P1 φ48 φ60 2 0.3
BE-4-355 355 4.0 φ9.0 94.5±4 φ57 M34 P1 φ48 φ60 2 0.3
BE-5-355 355 5.0 φ7.0 125.0±4 φ57 M34 P1 φ48 φ60 2 0.4
BE-7.5-355 355 7.5 φ4.5 134.5±4 φ57 M34 P1 φ48 φ60 2 0.4
BE-10-355 355 10.0 φ3.5 181.0±4 φ57 M34 P1 φ48 φ60 2 0.5
BE-2-V 400 − 700 2.0 φ6.0 42.0 +3
−2 φ36 M22 P0.75 φ26 φ40 4 0.12
LBED-3 400 − 700 3.0 φ5.4 42.0 +3
−2 φ36 M22 P0.75 φ26 φ40 4 0.12
BE-4.1-V 400 − 700 4.1 φ4.1 62.0±3 φ36 M22 P0.75 φ26 φ40 4 0.13
LBED-5 400 − 700 5.0 φ3.2 50.5±3 φ36 M22 P0.75 φ26 φ40 4 0.12
BE-6-V 400 − 700 6.0 φ4.3 102.0±3 φ36 M22 P0.75 φ36 φ40 4 0.17
BE-7.6-V 400 − 700 7.6 φ3.4 80.0±3 φ36 M22 P0.75 φ36 φ40 4 0.15
BE-8.4-V 400 − 700 8.4 φ3.1 89.5±3 φ36 M22 P0.75 φ36 φ40 4 0.16
LBED-10 440 − 700 10.0 φ2.6 109.5±3 φ36 M22 P0.75 φ36 φ40 4 0.18
BE-12.6-V 450 − 700 12.6 φ2.1 138.0±3 φ36 M22 P0.75 φ36 φ40 4 0.2
BE-14.3-V 460 − 700 14.3 φ1.8 158.5±3 φ36 M22 P0.75 φ36 φ40 4 0.2
BE-16.8-V 480 − 700 16.8 φ2.1 190.0±3 φ36 M22 P0.75 φ46 φ40 4 0.3
BE-18.5-V 500 − 700 18.5 φ1.9 211.0±3 φ36 M22 P0.75 φ46 φ40 4 0.3
BE-21-V 510 − 700 21.0 φ1.7 241.0±3 φ36 M22 P0.75 φ46 φ40 4 0.3
BE-1.5-LD 780 − 830 1.5 φ16.1 51.0 +4
−2 φ57 M34 P1 φ48 φ60 4 0.3
BE-2-LD 780 − 830 2.0 φ15.3 53.0±4 φ57 M34 P1 φ48 φ60 4 0.3
BE-3-LD 780 − 830 3.0 φ10.1 64.0±4 φ57 M34 P1 φ48 φ60 4 0.3
BE-4-LD 780 − 830 4.0 φ8.9 95.5±4 φ57 M34 P1 φ48 φ60 4 0.3
BE-5-LD 780 − 830 5.0 φ7.2 125.5±4 φ57 M34 P1 φ48 φ60 4 0.4
BE-7.5-LD 780 − 830 7.5 φ4.7 135.5±4 φ57 M34 P1 φ48 φ60 4 0.4
BE-10-LD 780 − 830 10.0 φ3.6 186.5±4 φ57 M34 P1 φ48 φ60 4 0.5
BE-1.5-1064 1064 1.5 φ16.0 52.0 +4
−3 φ57 M34 P1 φ48 φ60 4 0.3
LBED-2Y 1064 2.0 φ15.1 49.0 +4
−0 φ57 M34 P1 φ48 φ60 4 0.3
LBED-3Y 1064 3.0 φ10.2 64.5±4 φ57 M34 P1 φ48 φ60 4 0.3
LBED-4Y 1064 4.0 φ8.6 93.5±4 φ57 M34 P1 φ48 φ60 4 0.3
BE-5.3-1064 1064 5.3 φ6.8 127.5±4 φ57 M34 P1 φ48 φ60 4 0.4
BE-7-1064 1064 7.0 φ5.1 179.5±4 φ57 M34 P1 φ48 φ60 4 0.5
BE-10-1064 1064 10.0 φ3.6 188.5±4 φ57 M34 P1 φ48 φ60 4 0.5
* Laser pulse width 10ns, repetition frequency 20Hz
Weight
[kg]
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Lens configuration
Beam expander is divided into two main types depending on the configuration of the lens.
Galilean type
Combination of convex and concave type
Features. ◦Can shorten the overall length of the beam expander.
◦High performance with small number of lenses.
◦Usable with high powered lasers.
Keplerian type
Uses two convex lenses.
Features. ◦You can insert a pin hole in the expander.
◦You can obtain a clean Gaussian beam emitted by the
effect of the pinhole spatial filter.
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Concave lens
Convex lens
Concave lens
Pin hole
Convex lens
Others
Note: Do not use with high energy lasers
It can cause a spark in the focal point of the laser causing
the transmitted wave front to collapse.
Diopter and diopter correction function
By using the diopter correction function, it is available to adjust the divergent light beam to the parallel beam.
If it is necessary to use exact optical laser system, recommended to use the beam expander with diopter correction function.
And if the parallel light beam incident into the beam expander, the light would be emitted in expanded beam.
However, since most laser is slightly divergent, the beam will not be emitted by parallel beam.
In addition, parallel light emitted from the beam expander will be shifted in various factors. Such as LD (laser diode) which has a possibility that
wavelength will change, and by the changes of the temperature.
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B201

Optics & Optical Coatings
Laser Beam Expanders
LBE
Catalog
Code
W3092
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Beam expanders are useful laser accessories when the beam diameter must be increased.
However, their main function is in decreasing the divergence of the laser beams which are to be
projected over long distances. These precision beam expanders have been designed for use with
HeNe lasers but they are also useful for any laser working in the visible part of the spectrum (400
− 700nm).
◦Laser beam expanders are made of lenses attached together without using glue (air-gap). Designed to use with high
powered lasers.
◦These beam expanders are light weight and short bodied and because they are Galileo type design, it is simple with little
aberration and correction.
◦The visible type can be mounted directly with any HeNe laser.
Guide
▶For wavelength or magnification which is not shown on this catalog,
please ask our International Sales Division.
▶Beam expander holder with tilt and fine adjustments is available
(LBE-H). C055
Attention
▶Make sure that the beam expander is well aligned with the laser light
axis. If the beam expander is inclining, the output light will also be
inclined.
▶It is not possible to obtain a decreased beam diameter by using the
beam expander on the opposite side. Use it properly to obtain an
adequate optical solution.
▶The light may not be collimated when it become divergent or
convergent.
Outline Drawing
(in mm)
Guide
Mirrors
4-40UNC, L=3/8…4
4-φ3.5 clearance holes
on φ36 spacing
Beamsplitters
Polarizers
φ43
φ35
Lenses
Multi-Element Optics
Rubber O-ring
for light sealing
6
B
A
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Typical Laser for He-Ne (400 − 700nm)
Part Number
Expansion ratio
Barrel length
A
[mm]
B
[mm]
Input aperture
[mm]
Laser Damage
Threshold*
[J/cm 2 ]
LBE-3 3 62.9 56.9 φ3.8 4 0.12
LBE-5 5 61.9 55.9 φ2.7 4 0.12
LBE-10 10 127.9 121.9 φ1.7 4 0.18
* Laser pulse width 10ns, repetition frequency 20Hz
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Typical Laser for LD (780 − 830nm)
Part Number
Typical Laser for YAG (1064nm)
Part Number
Expansion ratio
Expansion ratio
Barrel length
A
[mm]
Barrel length
A
[mm]
B
[mm]
Input aperture
[mm]
Laser Damage
Threshold*
[J/cm 2 ]
LBE-3Y 3 63.73 57.8 φ3.8 4 0.12
LBE-5Y 5 62.7 57.8 φ2.7 4 0.12
LBE-10Y 10 128.9 123.8 φ1.7 4 0.18
* Laser pulse width 10ns, repetition frequency 20Hz
B
[mm]
Input aperture
[mm]
Laser Damage
Threshold*
[J/cm 2 ]
LBE-3L 3 63.3 57.3 φ3.8 4 0.12
LBE-5L 5 62.3 56.3 φ2.7 4 0.12
LBE-10L 10 127.9 122.8 φ1.7 4 0.18
* Laser pulse width 10ns, repetition frequency 20Hz
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
Compatible Optic Mounts
LBE-3H, -5H, -10H / LBE-3LH, 5LH, -10LH / LBE-3YH, -5YH, -10YH
B202
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Contact sheet
Contact sheet for Laser Beam Expanders
To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Affiliation
(Organization Name)
Department
TEL
Country/Address
Name &
Designation
Drawing Number
Desired
Delivery Date
FAX
Name
Estimate
Budget
E-mail
Yes: by Date
■Estimation ■Order
Date
Outline and Dimensions
* Please enter your rough shape and dimensions.
(Tentative name is okay)
No
JP Yen
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Intention
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Quantity
Wavelenght Used
Divergence
angle of beam
λ=
F =
nm
mrad
Other
* Write more detailed specifications here. (Rough illustration is acceptable.)
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Beam incident
diameter
mm
Achromats
Focusing Lenses
fθ Lenses
Magnification
of afocal
Transmitted
wavefront
λ/
Objectives
Expanders
Others
Type of lens
Galilean type
Keplerian type
Sigma Koki Co., Ltd.
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B203

Optics & Optical Coatings
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
B204
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Catalog
Focus Tunable lens EL-10-30 Code W3202
It is the lens that is tunable from 45mm to 120mm focal length by an electrical control.
It enables to change the shape of the lens by which is sealed with an elastic polymer film is filled
with an optical fluid, and pressure is applied by an electromagnetic actuator.
It can be varied at high speed curvature of the lens. Zoom optical system, auto focus, lighting
system and so on are able to build a system more compact optical systems.
◦By flexibility and taking advantage of the optical film having a high transmittance, both the variable function of the curvature
of the lens and the characteristics of the optical lens had achieved.
◦We offer two types of near-infrared and visible type.
Application
Systems
Optics &
Optical
Coatings
Holders
Specifications
Clear aperture
φ10mm
focal length
45 – 120mm
Coating
Multi-layer anti-reflection coating
Refractive index [nd] 1.3
Abbe number [vd] 100
Laser damage
threshold
25kW/cm 2 @1064nm
Control voltage
0 – 5V
Response time
10ms (10 – 90% step)
Power consumption 0 – 2W
Life cycle
over 10 million times
Polarization property Save the polarization state of the incident
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Outline Drawing
(in mm)
Guide
Index
9.8±0.15
φ10±0.01
▶It is also available to provide other than products in the catalog such
as focal length or aperture size. Please contact our sales division.
Cable
30 +0
−0.01
Attention
▶The focal length and the applied current is not proportional, therefore it is
necessary to make the calibration of the lens control of the open loop.
Guide
Mirrors
Beamsplitters
Specifications
Part Number
EL-10-30-VIS-LD
EL-10-30-NIR-LD
Wavelength
Visible
Near-infrared
The focal length of the lens with respect to the actuator current
Back focus [mm]
170
160
150
140
130
120
110
100
90
80
70
60
50
40
30
20
10
0
0 25 50 75 100 125 150 175 200 225 250 255 300
power [mA]
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
100
90
Typical Transmittance Data
T: Transmission
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
80
Objectives
70
Expanders
60
Others
T [%]
50
40
30
20
10
EL-10-30-VIS-LD
EL-10-30-NIR-LD
0
300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000
λ [nm]
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B205

Optics & Optical Coatings
Catalog
fθ Lenses for CO2 Lasers fθ-10600 Code W3203
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
It is the f theta lens for CO2 laser made by a single lens of zinc selenide (ZnSe).
These are used as in the laser marking system.
◦It is a compact and lightweight because it is composed of a single lens.
◦The design and use are processed to an optimum shape of various aberrations becomes smaller.
◦There are wide variety of the lineup that scan area is 50mm to 300mm.
Specifications
Material
Zinc selenide (ZnSe)
Design wavelength
10.6µm
Entrance pupil diameter φ14mm
Scanning angle 25°
Distance to lens from pupil 25mm
Coating
Dielectric multi-layer coating
Actuators
Motoeized
Stages
Guide
▶It is also provided the f theta lens other than for CO2 laser which
wavelength is 10.6µm. B186
Attention
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Outline Drawing
24
20
14
1
2
M85 P1
82
58
90
(in mm)
Pupil
Focal plane
▶Hydrogen selenium is harmful when it comes to contact with strong
acids! Do not immerse the lens in hydrochloric or sulphuric acid.
▶When light is condensed on the surface of ZnSe, the high power
laser beam may produce toxic gases due to the thermal decomposition.
In addition, a large amount of gas and powder occurs when
the ZnSe lens is damaged by the laser thermal runaway. In case of
the ZnSe lens is damaged by any chance, DO NOT handle the lens
with your bare hands. Collect the debris and be careful not to
inhale the powder and steam generated.
▶It is not recommended to use the f theta lens for the optical imaging
system because it is designed for the scanning system.
▶Please be placed in accordance with the position of the entrance
pupil of the fθ lens beam scanning system (galvanometer mirror).
If the incident pupil is not in position of the beam scanning system,
the optimum focusing spot cannot be achieved because the aberration
will increase.
Lenses
Schematic
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Galvano mirror
Entrance
pupil
Incident angle
f Lens
Output
angle tan −1
x
Focal plane
By using the f theta lens, it is possible to be moved a laser light spot in
constant speed linear motion on the focal plane by scanning the mirrors
such as galvanometer scanner mirrors.
The f theta lens enables this by the effect of distortion.
Mathmatically it is expressed as following;
focal length = “f”, ideal image height = “y”, the angle of scanned = “”
therefore, y = f.
In the normal single lens, the ideal image height “y” is represented by
“y = f tan”.
Characteristics of both are the same in a small angle range. However,
the difference is greater angle increases.
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
Specifications
Part Number
Focal length
f
[mm]
Scanning
Range
[mm]
fθ-75-10600 75 50×50
fθ-100-10600 100 70×70
fθ-150-10600 150 110×110
fθ-200-10600 200 140×140
fθ-250-10600 250 175×175
fθ-300-10600 300 210×210
fθ-340-10600 340 250×250
fθ-400-10600 400 300×300
Important:Treatment of ZnSe optics
ZnSe(Zinc selenide)is Poisonous and Deleterious Substances
classified as legal, Depending on the specifications, the
certificate of delivery may be required acquisition of Poisonous
and Deleterious Substances. In addition, ZnSe Optics
disposal after use is prohibited in general.
Lenses that are no longer needed, please return it to us.
However, it is only in our products. The above is a case in Japan
and please ask mearly sales contact the case outside Japan.
B206
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Catalog
Laser Beam Expanders for CO2 Lasers BE-10600 Code W3204
This is a beam expander for CO2 Laser (wavelength : 10.6µm) made of zinc selenide (ZnSe) lens.
It will be used in laser marking system and so on.
◦Diopter correction function is provided, customer can fine-tune the collimated beam.
◦Because it is a beam expander type of the Galilean, it is compact and good aberration characteristics.
◦Since the lens of zinc selenide is with an anti-reflection coating, loss of light intensity is kept low.
Specifications
Material
Zinc selenide (ZnSe)
Design wavelength 10.6µm
Coating
Dielectric multi-layer coating
Transmittance >98.5%
Guide
▶It is also available beam expander other than for wavelength of CO2
laser (10.6µm). B200
▶Holders can be used to fix beam expanders (BE-M22H).
C054
Attention
▶It is not possible to obtain a decreased beam diameter by using the
beam expander on the opposite side. Use it properly to obtain an
adequate optical solution.
▶Make sure that the beam expander is well aligned with the laser light
axis. If the beam expander is inclining, the output light will also be
inclined.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Outline Drawing
(in mm)
Guide
Mirrors
Beamsplitters
φ
φ
Polarizers
Lenses
Multi-Element Optics
Part Number
φA
[mm]
φB
[mm]
C
[mm]
D
[mm]
BE-10600-3 φ25 φ25 50 65
BE-10600-4 φ25 φ25 55 75
BE-10600-5 φ30 φ30 58 78
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Achromats
Specifications
Part Number
Expansion
ratio
Input aperture
(MAX)
[mm]
Output
Clear aperture
[mm]
BE-10600-3 3 φ5 φ15 φ25
BE-10600-4 4 φ5 φ16 φ25
BE-10600-5 5 φ6 φ20 φ30
Diameter
[mm]
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
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B207

Optics & Optical Coatings
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Achromats
Focusing Lenses
fθ Lenses
Objectives
Expanders
Others
B208
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

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Filters

F i l t e r s
I N D E X
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Filters Selection Guide
There is a large choice of filters, their characteristics are thoroughly differentiated.
To choose the right filter characteristic may help you to increase your experimentation efficiency.
The filter structure can be simple to be replaced, prepare many filters for replacement to obtain the
best optical experimentation condition.
Application Sample of use Products Features
Brightness
adjustment
Choice
of wavelength
(color)
Attenuate the
scattered light
Prevention of saturation of
sensor
Contrast tuning of interference
fringes
A proper brightness adjustment
Laser security measure
Fluorescence observation
Select a single color light
Infrared and Ultraviolet
observation
Uniformize the light
Illumination for Observation
Screen
Selective wavelength filter
Long-pass filter
Absorption ND filter
B213
Reflectance ND filter
B219
Variable ND filter
B224
Color glass filter
B230 − B237
Dichroic filter
B239 − B248
Bandpass filter
B250 − B257
Beam shaping diffuser
B227
Diffuser plate
B228
Opal diffuser
B229
Short-pass filter
Low cost
High power laser,
wide wavelength
Continuously variable
Low cost, low ripple and
high light cut-off
High transmittance
High steep of reflectance
and transmittance switching
Small bandwidth wavelength
selection
Low lost
One direction emission
Low cost
The selection of proportion
of Transmition and Diffusion
Diffusion in broadband
wavelength
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
300
350
400
450
500
Wavelength
[nm]
274
306
327
347
359
367
370
380
390
410
415
416
418
420
440
446
455
460
463
466
476
480
490
491
500
500
501
505
511
515
515
518
520
520
522
526
530
535
540
542
Part Number
LOPF-25C-267
LOPF-25C-300
RSF-25C-325RU
LOPF-25C-341
RSF-25C-355RU
RSF-25C-364RU
SCF-50S-37L
SCF-50S-38L
SCF-50S-39L
SDM410S
LOPF-25C-409
YIF-BA420IFS
LOPF-25C-405
SCF-50S-42L
SCF-50S-44Y
RSF-25C-442RU
SDM455S
YIF-BA460IFS
RSF-25C-458RU
LOPF-25C-458
RSF-25C-473RU
SCF-50S-48Y
SDM490S
RSF-25C-488RU
SCF-50S-50Y
LOPF-25C-488
LOPF-25C-496
SDM505S
YIF-BA510IFS
SDM515S
LOPF-25C-500
RSF-25C-514RU
SCF-50S-52Y
DIF-50S-YEL
LOPF-25C-515
LOPF-25C-514
LOPF-25C-519
RSF-25C-532RU
SCF-50S-54O
LOPF-25C-532
B246
B246
B247
B246
B247
B247
B230
B230
B230
B249
B246
B253
B246
B230
B230
B247
B249
B253
B247
B246
B247
B230
B249
B247
B230
B246
B246
B249
B253
B249
B246
B247
B230
B240
B246
B246
B246
B247
B230
B246
550
600
650
700
750
800
850
1000
Wavelength
[nm]
560
567
570
572
573
574
580
590
595
600
601
602
610
620
637
640
654
655
660
671
700
720
723
754
760
788
791
800
805
812
812
830
838
840
850
985
986
1057
1071
Part Number
SCF-50S-56O
RSF-25C-561RU
SDM570S
LOPF-25C-561
YIF-BA575IFS
RSF-25C-568RU
SCF-50S-58O
DIM-50S-RED(Reflection
SDM595S
SCF-50S-60R
LOPF-25C-593
YIF-BA600IFS
DIF-50S-RED
SCF-50S-62R
RSF-25C-633RU
SCF-50S-64R
RSF-25C-647RU
LOPF-25C-635
SCF-50S-66R
RSF-25C-664RU
SCF-50S-70R
SCF-50S-72R
LOPF-25C-715
LOPF-25C-736
ITF-50S-76IR
RSF-25C-780RU
RSF-25C-785RU
ITF-50S-80IR
LOPF-25C-785
LOPF-25C-800
RSF-25C-808RU
ITF-50S-83IR
RSF-25C-830RU
LOPF-25C-834
ITF-50S-85IR
ITF-50S-100RM
RSF-25C-980RU
LOPF-25C-1020
RSF-25C-1064RU
B230
B247
B249
B246
B253
B247
B230
B241
B249
B230
B246
B253
B240
B230
B247
B230
B247
B246
B230
B247
B230
B230
B246
B246
B231
B247
B247
B231
B246
B246
B247
B231
B247
B246
B231
B231
B247
B246
B247
1300
1326 RSF-25C-1319RU B247
450
500
550
600
650
700
750
Nocth type
350
400
500
600
1000
Wavelength
[nm]
Part Number
430 SHPF-25C-440
483
488
490
495
522
590
599
638
646
654
681
698
700
701
727
743
747
760
761
765
777
835
875
912
936
Wavelength
[nm]
355
532
550
633
SHPF-25C-492 B245
SHPF-25C-518 B245
DIM-50S-BLE(Reflection B241
DIF-50S-BLE B240
SHPF-25C-533
DIF-50S-CYA
SHPF-25C-612
SHPF-25C-650
SHPF-25C-655
SHPF-25C-680
SHPF-25C-694
SHPF-25C-720
CLDF-50S
HAF-50S-15H
SHPF-25C-750
HAF-50S-30H
SHPF-25C-770
CLDM-50S(Reflection
SHPF-25C-775
SHPF-25C-790
HAF-50S-50H
SHPF-25C-842
SHPF-25C-890
SHPF-25C-950
SHPF-25C-945
Part Number
NF-25C05-27-355
NF-25C05-40-532
DIF-50S-MAG
NF-25C05-47-633
B245
B245
B240
B245
B245
B245
B245
B245
B245
B242
B235
B245
B235
B245
B243
B245
B245
B235
B245
B245
B245
B245
B258
B258
B240
B258
1064 NF-25C05-80-1064 B258
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B211

B212
Optics & Optical Coatings
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Filters Selection Guide
VPF-25C-10-12-21400
VPF-25C-10-15-22800
VPF-25C-10-15-23200
VPF-25C-10-15-23900
VPF-25C-10-12-25370
VPF-25C-10-12-26500
VPF-25C-10-12-28000
VPF-25C-10-15-28900
VPF-25C-10-15-29670
VPF-25C-10-15-30710
VPF-25C-10-15-31300
UTVAF-50S-33U
VPFHT-3250
UTVAF-50S-34U
VPF-25C-10-25-32600
VPF-25C-10-25-33400
VPF-25C-03-20-33710
VPF-25C-10-25-33710
VPF-25C-10-25-35000
VPF-25C-40-25-35000
UTVAF-50S-36U
VPF-25C-10-25-35500
VPFHT-3550
VPFHT-3638
VPF-25C-10-25-36500
YIF-BP360-370S
BLF-50S-370B
YIF-BP340-390S
VPFHT-3720
BLF-50S-390B
VPF-25C-10-40-40000
VPF-25C-40-40-40000
VPF-50S-10-45-40000
YIF-BP400-410S
VPF-25C-10-40-40470
BLF-50S-410B
VPF-50S-10-45-41000
YIF-BP400-440S
VPF-50S-10-45-42000
VPF-50S-10-45-43000
VPF-25C-10-40-43580
BLF-50S-440B
VPF-50S-10-45-44000
VPF-25C-01-30-44160
VPF-25C-03-35-44160
VPF-25C-10-45-44160
VPFHT-4416
YIF-BA420-460S
VPF-25C-10-45-45000
VPF-25C-40-50-45000
VPF-50S-10-50-45000
VPF-25C-10-45-45550
VPF-25C-01-30-45790
VPF-25C-03-35-45790
VPF-25C-10-45-45790
VPFHT-4579
BLF-50S-460B
VPF-50S-10-50-46000
VPF-50S-10-50-47000
YIF-BP460-480S
YIF-BP460-495S
VPF-50S-10-50-48000
YIF-BP470-495S
VPF-25C-10-45-48610
YIF-BA460-510S
VPF-25C-01-40-48800
VPF-25C-03-45-48800
VPF-25C-10-50-48800
VPFHT-4880
VPF-50S-10-50-49000
VPFHT-4910
YIF-BP490-500S
B254
B254
B254
B254
B254
B254
B254
B254
B254
B254
B254
B232
B250
B232
B254
B254
B254
B254
B254
B254
B232
B254
B250
B250
B254
B253
B234
B253
B250
B234
B254
B254
B257
B253
B254
B234
B257
B253
B257
B257
B254
B234
B257
B254
B254
B254
B250
B253
B254
B254
B257
B254
B254
B254
B254
B250
B234
B257
B257
B253
B253
B257
B253
B254
B253
B254
B254
B254
B250
B257
B250
B253
214
228
232
239
254
265
280
289
297
307
313
317
325
326
334
337
350
355
364
365
370
372
390
400
405
410
420
430
436
440
442
445
450
456
458
460
470
471
477
480
484
486
487
488
490
491
495
VPF-25C-10-50-70000
VPF-25C-40-50-70000
VPF-50S-12-65-70000
VPF-50S-12-65-71000
VPF-50S-12-65-72000
VPF-50S-12-65-73000
VPF-50S-12-65-74000
VPF-25C-10-45-75000
VPF-25C-40-40-75000
VPF-50S-12-65-75000
VPF-50S-12-65-76000
VPF-25C-10-45-76650
VPF-50S-12-65-77000
VPF-25C-10-45-78000
VPF-50S-12-65-78000
VPFHT-7800
VPFHT-7850
VPF-50S-12-65-79000
ITF-50S-83RT
VPF-25C-10-45-79470
VPF-25C-10-45-80000
VPF-25C-40-45-80000
VPF-50S-12-65-80000
VPFHT-8080
VPF-25C-10-45-81000
VPF-50S-12-65-81000
VPF-50S-12-65-82000
VPF-25C-10-45-83000
VPF-50S-12-65-83000
VPFHT-8300
VPF-50S-12-65-84000
VPF-50S-12-65-85000
VPFHT-8520
VPF-50S-12-65-86000
VPF-50S-12-65-87000
VPF-50S-12-65-88000
VPF-50S-12-65-89000
VPF-50S-12-65-90000
VPF-25C-10-45-90500
VPFHT-9760
VPFHT-9800
VPF-25C-10-40-10140
VPFHT-10471
VPF-25C-01-30-10640
VPF-25C-03-35-10640
VPF-25C-10-40-10640
VPFHT-10640
VPF-25C-10-35-13000
VPF-25C-10-30-15000
VPF-25C-10-30-15500
B254
B254
B257
B257
B257
B257
B257
B254
B254
B257
B257
B254
B257
B254
B257
B250
B250
B257
B231
B254
B254
B254
B257
B250
B254
B257
B257
B254
B257
B250
B257
B257
B250
B257
B257
B257
B257
B257
B254
B250
B250
B254
B250
B254
B254
B254
B251
B254
B254
B254
700
710
720
730
740
750
760
766
770
780
785
790
795
800
808
810
820
830
840
850
852
860
870
880
890
900
905
976
980
1014
1047
1064
1300
1500
1550
Band-pass type
Wavelength
[nm]
Part Number
Part Number
200
250
300
350
400
450
VPF-25C-10-50-50000
VPF-25C-40-50-50000
VPF-50S-10-55-50000
VPF-25C-10-50-50850
VPF-50S-10-55-51000
VPF-25C-01-40-51450
VPF-25C-03-45-51450
VPF-25C-10-50-51450
VPFHT-5145
YIF-BA495-540S
VPF-50S-10-55-52000
GRF-50S-530G
YIF-BA510-550S
VPF-50S-10-55-53000
VPF-25C-01-40-53200
VPF-25C-03-45-53200
VPF-25C-10-50-53200
VPFHT-5320
GRF-50S-533G
VPF-25C-10-50-53500
YIF-BA515-560S
VPF-50S-10-55-54000
DIM-50S-GRE(Reflection)
DIF-50S-GRE
GRF-50S-545G
YIF-BP530-550S
VPFHT-5435
YIF-BP540-550S
VPF-25C-10-50-54610
GRF-50S-550G
VPF-25C-10-50-55000
VPF-25C-40-50-55000
VPF-50S-10-60-55000
VPF-50S-10-60-56000
VPFHT-5614
YIF-BP540-585S
VPFHT-5682
VPF-50S-10-60-57000
YIF-BP565-585S
VPF-25C-10-50-57700
VPF-50S-10-60-58000
VPF-25C-10-50-58930
VPF-50S-10-60-59000
YIF-BA575-625S
VPF-25C-10-50-60000
VPF-25C-40-50-60000
VPF-50S-12-60-60000
VPF-50S-12-60-61000
VPF-50S-12-60-62000
VPF-50S-12-60-63000
VPF-25C-01-40-63280
VPF-25C-03-45-63280
VPF-25C-10-50-63280
VPFHT-6328
VPF-25C-10-50-63620
VPF-50S-12-60-64000
YIF-BA600-690S
VPF-25C-03-45-64710
VPF-25C-10-50-64710
VPFHT-6471
VPF-25C-10-50-65000
VPF-25C-40-50-65000
VPF-50S-12-60-65000
VPF-25C-10-50-65630
VPF-50S-12-60-66000
VPF-25C-10-50-67000
VPF-50S-12-60-67000
VPFHT-6710
VPF-50S-12-60-68000
VPF-50S-12-60-69000
VPF-25C-10-50-69430
B254
B254
B257
B254
B257
B254
B254
B254
B250
B253
B257
B234
B253
B257
B254
B254
B254
B250
B234
B254
B253
B257
B241
B240
B234
B253
B250
B253
B254
B234
B254
B254
B257
B257
B250
B253
B250
B257
B253
B254
B257
B254
B257
B253
B254
B254
B257
B257
B257
B257
B254
B254
B254
B250
B254
B257
B253
B254
B254
B250
B254
B254
B257
B254
B257
B254
B257
B250
B257
B257
B254
500
509
510
515
517
520
526
530
532
533
535
537
540
541
543
544
546
548
550
560
561
562
568
570
576
577
580
589
590
599
600
610
620
630
633
636
640
644
647
650
656
660
670
671
680
690
694
Wavelength
[nm]
Part Number
500
550
600
650
700
750
800
850
900
1000
1050
1100
Wavelength
[nm]
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Absorptive Neutral Density Filter (Mounted and unmounted)
AND/ANDY/MAN/MANY
ND filter is a filter that reduces intensity of the visible light or 1064nm YAG laser.
As this is an absorptive type of filter, it reduces stray light on reflection, and does not have much
difference on transmission characteristic by reduced intensity of the light.
◦The transmittance can be fine tuned and it offers the possibility of light intensity adjustment. Moreover, with a multi-filter
set up, ultra fine light intensity tuning can be realized.
◦The mounted filter (model MAN/MANY) with outer frame can be easily applied with the filter holder (model FH). A diameter
of 30mm outer frame does not fit for any filter holder. Please see the lens holder (model LHF-30S) for your reference.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Specifications
Material
Optical Glass
(including a substance of optical absorption)
Wavelength Range
Visible (AND/MAN): 400 − 700nm
YAG Laser (ANDY/MANY): 1064nm
Mount (MAN/MANY only) Material: Aluminum Finishing: Black anodized
Guide
▶Absorptive ND filter placed near to a light-source can be broken by
the sudden high temperature effect. The filter needed to be treated
with thermal reinforcement for heat resistance.
▶Different size, wavelength and deviation radio which are not listed
in this catalog are available as custom product upon the request.
Attention
▶Can not be used with high power laser, the filter can be broken. In
that case, please try our Reflective type of ND filter (model FND).
▶To obtain a better transmittance characteristic as our priority, the
thickness of the filter can be changed in accordance. For this
reason the thickness of each filter is different. For filter with
thickness below 5mm, we recommend to use the mounted filter.
(model MAN/MANY).
▶The filter transmittance characteristic of each production lot is
different. The outside wavelength properties of the adaptation
wavelength may greatly vary in particular according to production
lot. Please refer to reflective filter (model FND) if the use of
wavelength is wider than a specified wavelength.
▶ND filter does not have anti-reflection coating, the reflection of
about 4% occurs.
▶* These prices are valid exclusively for Japan only. For your country
prices, please contact your local distributor or our International
Sales Division for further information.
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Schematic
Filters
AND/ANDY
Optical Glass
(including a substance of optical absorption)
MAN/MANY
Optical Glass
(including a substance of optical absorption)
Frame
Prisms
Substrates/Windows
Optical Data
Maintenance
Front surface: Uncoated
Rear surface: Uncoated
Front surface: Uncoated
Rear surface: Uncoated
Selection Guide
Outline Drawing
AND/ANDY
●Circle
φD
A
●Square
●Tolerance
(Circle) Diameter φD +0
−0.1
(Square) Length A +0
−0.1 (A≦40)
A +0
−0.2 (A=50)
MAN/MANY
φD A
(in mm)
●Tolerance
Mount outer
diameter φD±0.1
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
t
A t 5±0.2
Strengthened glass
Glass can be broken under sudden heat effection. Sudden difference of temperature occurs inside of the glass, it is called thermal expansion and
the tensile stress of the inside of the glass occurs. The glass will be broken when the stress is beyond machine strength. However, stress is offset,
and glass becomes hard to be broken when there is a compression power in the inside of the glass even if tensile stress is caused by heat to glass.
Using this principle, heat strengthened glass was made out of compression stress forcibly in inside glass at the beginning of the process.
In the polishing process, a strengthened glass must be brought to a familiar softening temperature before to the forcibly cooling process. The inner
of the glass is higher in density than the outside of the glass.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B213

Optics & Optical Coatings
Catalog
Absorptive Neutral Density Filter (Mounted and unmounted) AND/ANDY/MAN/MANY Code W3093
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Visible ・Circle (φ10 − φ25)
Part Number
Diameter
φD
[mm]
Visible Transmittance
[%]
AND-10C-001 φ10 0.1±0.07
AND-10C-01 φ10 1±0.5
AND-10C-05 φ10 5±1
AND-10C-10 φ10 10±2
AND-10C-13 φ10 12.5±2
AND-10C-20 φ10 20±2
AND-10C-25 φ10 25±2.5
AND-10C-30 φ10 30±3
AND-10C-40 φ10 40±4
AND-10C-50 φ10 50±5
AND-10C-70 φ10 70±5
AND-15C-001 φ15 0.1±0.07
AND-15C-01 φ15 1±0.5
AND-15C-05 φ15 5±1
AND-15C-10 φ15 10±2
AND-15C-13 15 12.5±2
AND-15C-20 φ15 20±2
AND-15C-25 φ15 25±2.5
AND-15C-30 φ15 30±3
AND-15C-40 φ15 40±4
AND-15C-50 φ15 50±5
AND-15C-70 φ15 70±5
AND-20C-001 φ20 0.1±0.07
AND-20C-01 φ20 1±0.5
AND-20C-05 φ20 5±1
AND-20C-10 φ20 10±2
AND-20C-13 φ20 12.5±2
AND-20C-20 φ20 20±2
AND-20C-25 φ20 25±2.5
AND-20C-30 φ20 30±3
AND-20C-40 φ20 40±4
AND-20C-50 φ20 50±5
AND-20C-70 φ20 70±5
AND-25C-001 φ25 0.1±0.07
AND-25C-01 φ25 1±0.5
AND-25C-05 φ25 5±1
AND-25C-10 φ25 10±2
AND-25C-13 φ25 12.5±2
AND-25C-20 φ25 20±2
AND-25C-25 φ25 25±2.5
AND-25C-30 φ25 30±3
AND-25C-40 φ25 40±4
AND-25C-50 φ25 50±5
AND-25C-70 φ25 70±5
Visible ・Circle (φ30 − φ50)
Part Number
Diameter
φD
[mm]
Visible Transmittance
[%]
AND-30C-001 φ30 0.1±0.07
AND-30C-01 φ30 1±0.5
AND-30C-05 φ30 5±1
AND-30C-10 φ30 10±2
AND-30C-13 φ30 12.5±2
AND-30C-20 φ30 20±2
AND-30C-25 φ30 25±2.5
AND-30C-30 φ30 30±3
AND-30C-40 φ30 40±4
AND-30C-50 φ30 50±5
AND-30C-70 φ30 70±5
AND-40C-001 φ40 0.1±0.07
AND-40C-01 φ40 1±0.5
AND-40C-05 φ40 5±1
AND-40C-10 φ40 10±2
AND-40C-13 φ40 12.5±2
AND-40C-20 φ40 20±2
AND-40C-25 φ40 25±2.5
AND-40C-30 φ40 30±3
AND-40C-40 φ40 40±4
AND-40C-50 φ40 50±5
AND-40C-70 φ40 70±5
AND-50C-001 φ50 0.1±0.07
AND-50C-01 φ50 1±0.5
AND-50C-05 φ50 5±1
AND-50C-10 φ50 10±2
AND-50C-13 φ50 12.5±2
AND-50C-20 φ50 20±2
AND-50C-25 φ50 25±2.5
AND-50C-30 φ50 30±3
AND-50C-40 φ50 40±4
AND-50C-50 φ50 50±5
AND-50C-70 φ50 70±5
Compatible Optic Mounts
FH-25, -50 / FHS-25, -50 / NDWH-15SRO / FH-10
B214
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Typical Transmittance Data
T: Transmission
AND-001
T [%]
10
8
6
4
AND-001
AND-0110203050
T [%]
80
60
40
AND-50
AND-30
AND-20
AND-10
AND-01
Application
Systems
Optics &
Optical
Coatings
2
0
200
AND-0513254070
80
400
600 800
1000 1200
[nm]
20
0
350
400
450 500 550 600 650 700
[nm]
Holders
Bases
T [%]
60
40
AND-25
AND-13
AND-05
AND-70
AND-40
Manual
Stages
20
Actuators
0
350
400
450 500 550 600 650 700
[nm]
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Typical Transmittance Data (300 − 2000nm)
T: Transmission
Beamsplitters
AND-0110203050
AND-0513254070
Polarizers
T [%]
80
60
40
AND-50
AND-30
AND-20
AND-10
AND-01
T [%]
100
80
60
40
AND-70
AND-40
AND-25
AND-13
AND-05
Lenses
Multi-Element Optics
Filters
20
20
Prisms
0
300
500
1000 1500 2000
[nm]
0
300
500
1000 1500 2000
[nm]
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B215

Optics & Optical Coatings
Absorptive Neutral Density Filter (Mounted and unmounted)
AND/ANDY/MAN/MANY
Catalog
Code
W3094
Visible ・Mount type
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Part Number
Frame outer diameter
φD
[mm]
Clear aperture
φA
[mm]
Visible Transmittance
[%]
MAN-25-0.1 φ25 φ17 0.1±0.07
MAN-25-1 φ25 φ17 1±0.5
MAN-25-5 φ25 φ17 5±1
MAN-25-10 φ25 φ17 10±2
MAN-25-13 φ25 φ17 12.5±2
MAN-25-20 φ25 φ17 20±2
MAN-25-25 φ25 φ17 25±2.5
MAN-25-30 φ25 φ17 30±3
MAN-25-40 φ25 φ17 40±4
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
MAN-25-50 φ25 φ17 50±5
MAN-25-70 φ25 φ17 70±5
MAN-30-0.1 φ30 φ22 0.1±0.07
MAN-30-1 φ30 φ22 1±0.5
MAN-30-5 φ30 φ22 5±1
MAN-30-10 φ30 φ22 10±2
MAN-30-13 φ30 φ22 12.5±2
MAN-30-20 φ30 φ22 20±2
MAN-30-25 φ30 φ22 25±2.5
MAN-30-30 φ30 φ22 30±3
MAN-30-40 φ30 φ22 40±4
MAN-30-50 φ30 φ22 50±5
MAN-30-70 φ30 φ22 70±5
MAN-52-0.1 φ52 φ47 0.1±0.07
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
MAN-52-1 φ52 φ47 1±0.5
MAN-52-5 φ52 φ47 5±1
MAN-52-10 φ52 φ47 10±2
MAN-52-13 φ52 φ47 12.5±2
MAN-52-20 φ52 φ47 20±2
MAN-52-25 φ52 φ47 25±2.5
MAN-52-30 φ52 φ47 30±3
MAN-52-40 φ52 φ47 40±4
MAN-52-50 φ52 φ47 50±5
MAN-52-70 φ52 φ47 70±5
Please refer to the chart for transmittance Data (AND).
Substrates/Windows
Optical Data
Transmittance Chart
(Unit: %)
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Part Number
Visible
550nm
LD
780nm
The transmittance values are appromiate values.
LD
830nm
YAG
1064nm
LD
1300nm
LD
1550nm
AND-01 1 6 6 5 8 17
AND-05 5 16 17 14 20 32
AND-10 10 12 10 5 7 19
AND-13 13 14 11 6 8 20
AND-20 20 18 15 8 11 25
AND-25 25 23 20 12 16 30
AND-30 30 27 23 14 17 33
AND-40 40 40 35 24 29 43
AND-50 50 45 40 30 35 49
AND-70 70 64 60 49 53 64
Compatible Optic Mounts
FH-25, -50 / LHF-30S
B216
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W3095
Square (□10 − □25)
Part Number
Length
A
[mm]
Visible Transmittance
[%]
AND-10S-001 10×10 0.1±0.07
AND-10S-01 10×10 1±0.5
AND-10S-05 10×10 5±1
AND-10S-10 10×10 10±2
AND-10S-13 10×10 12.5±2
AND-10S-20 10×10 20±2
AND-10S-25 10×10 25±2.5
AND-10S-30 10×10 30±3
AND-10S-40 10×10 40±4
AND-10S-50 10×10 50±5
AND-10S-70 10×10 70±5
AND-15S-001 15×15 0.1±0.07
AND-15S-01 15×15 1±0.5
AND-15S-05 15×15 5±1
AND-15S-10 15×15 10±2
AND-15S-13 15×15 12.5±2
AND-15S-20 15×15 20±2
AND-15S-25 15×15 25±2.5
AND-15S-30 15×15 30±3
AND-15S-40 15×15 40±4
AND-15S-50 15×15 50±5
AND-15S-70 15×15 70±5
AND-20S-001 20×20 0.1±0.07
AND-20S-01 20×20 1±0.5
AND-20S-05 20×20 5±1
AND-20S-10 20×20 10±2
AND-20S-13 20×20 12.5±2
AND-20S-20 20×20 20±2
AND-20S-25 20×20 25±2.5
AND-20S-30 20×20 30±3
AND-20S-40 20×20 40±4
AND-20S-50 20×20 50±5
AND-20S-70 20×20 70±5
AND-25S-001 25×25 0.1±0.07
AND-25S-01 25×25 1±0.5
AND-25S-05 25×25 5±1
AND-25S-10 25×25 10±2
AND-25S-13 25×25 12.5±2
AND-25S-20 25×25 20±2
AND-25S-25 25×25 25±2.5
AND-25S-30 25×25 30±3
AND-25S-40 25×25 40±4
AND-25S-50 25×25 50±5
AND-25S-70 25×25 70±5
Square (□30 − □50)
Part Number
Length
A
[mm]
Visible Transmittance
[%]
AND-30S-001 30×30 0.1±0.07
AND-30S-01 30×30 1±0.5
AND-30S-05 30×30 5±1
AND-30S-10 30×30 10±2
AND-30S-13 30×30 12.5±2
AND-30S-20 30×30 20±2
AND-30S-25 30×30 25±2.5
AND-30S-30 30×30 30±3
AND-30S-40 30×30 40±4
AND-30S-50 30×30 50±5
AND-30S-70 30×30 70±5
AND-40S-001 40×40 0.1±0.07
AND-40S-01 40×40 1±0.5
AND-40S-05 40×40 5±1
AND-40S-10 40×40 10±2
AND-40S-13 40×40 12.5±2
AND-40S-20 40×40 20±2
AND-40S-25 40×40 25±2.5
AND-40S-30 40×40 30±3
AND-40S-40 40×40 40±4
AND-40S-50 40×40 50±5
AND-40S-70 40×40 70±5
AND-50S-001 50×50 0.1±0.07
AND-50S-01 50×50 1±0.5
AND-50S-05 50×50 5±1
AND-50S-10 50×50 10±2
AND-50S-13 50×50 12.5±2
AND-50S-20 50×50 20±2
AND-50S-25 50×50 25±2.5
AND-50S-30 50×50 30±3
AND-50S-40 50×50 40±4
AND-50S-50 50×50 50±5
AND-50S-70 50×50 70±5
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B217

Optics & Optical Coatings
Absorptive Neutral Density Filter (Mounted and unmounted)
AND/ANDY/MAN/MANY
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
YAG Laser ・Circle (φ10 − φ30 and φ50)
Part Number
Diameter
φD
[mm]
Transmittance
(1064nm)
[%]
ANDY-10C-05 φ10 5
ANDY-10C-10 φ10 10
ANDY-10C-15 φ10 15
ANDY-10C-20 φ10 20
ANDY-10C-25 φ10 25
ANDY-10C-30 φ10 30
ANDY-10C-50 φ10 50
ANDY-15C-05 φ15 5
ANDY-15C-10 φ15 10
ANDY-15C-15 φ15 15
ANDY-15C-20 φ15 20
ANDY-15C-25 φ15 25
ANDY-15C-30 φ15 30
ANDY-15C-50 φ15 50
ANDY-20C-05 φ20 5
ANDY-20C-10 φ20 10
ANDY-20C-15 φ20 15
ANDY-20C-20 φ20 20
ANDY-20C-25 φ20 25
ANDY-20C-30 φ20 30
ANDY-20C-50 φ20 50
ANDY-25C-05 φ25 5
ANDY-25C-10 φ25 10
ANDY-25C-15 φ25 15
ANDY-25C-20 φ25 20
ANDY-25C-25 φ25 25
ANDY-25C-30 φ25 30
ANDY-25C-50 φ25 50
ANDY-30C-05 φ30 5
ANDY-30C-10 φ30 10
ANDY-30C-15 φ30 15
ANDY-30C-20 φ30 20
ANDY-30C-25 φ30 25
ANDY-30C-30 φ30 30
ANDY-30C-50 φ30 50
ANDY-50C-05 φ50 5
ANDY-50C-10 φ50 10
ANDY-50C-15 φ50 15
ANDY-50C-20 φ50 20
ANDY-50C-25 φ50 25
ANDY-50C-30 φ50 30
ANDY-50C-50 φ50 50
ANDY-05・10・15
T [%]
100
80
60
40
Catalog
Code
W3096
YAG Laser ・Mount type
Part Number
Typical Transmittance Data
ANDY-05
ANDY-10
ANDY-15
YAG Laser ・Square
Part Number
Frame outer
diameter
φD
[mm]
Clear aperture
φA
[mm]
Transmittance
(1064nm)
[%]
MANY-25-5 φ25 φ17 5
MANY-25-10 φ25 φ17 10
MANY-25-15 φ25 φ17 15
MANY-25-20 φ25 φ17 20
MANY-25-25 φ25 φ17 25
MANY-25-30 φ25 φ17 30
MANY-25-50 φ25 φ17 50
MANY-30-5 φ30 φ22 5
MANY-30-10 φ30 φ22 10
MANY-30-15 φ30 φ22 15
MANY-30-20 φ30 φ22 20
MANY-30-25 φ30 φ22 25
MANY-30-30 φ30 φ22 30
MANY-30-50 φ30 φ22 50
MANY-52-5 φ52 φ47 5
MANY-52-10 φ52 φ47 10
MANY-52-15 φ52 φ47 15
MANY-52-20 φ52 φ47 20
MANY-52-25 φ52 φ47 25
MANY-52-30 φ52 φ47 30
MANY-52-50 φ52 φ47 50
Please refer to the chart for transmittance Data (ANDY).
ANDY-20・25・30・50
T [%]
100
80
60
40
Length
A
[mm]
Catalog
Code
Transmittance
(1064nm)
[%]
ANDY-50S-05 50×50 5
ANDY-50S-10 50×50 10
ANDY-50S-15 50×50 15
ANDY-50S-20 50×50 20
ANDY-50S-25 50×50 25
ANDY-50S-30 50×50 30
ANDY-50S-50 50×50 50
Catalog
Code
W3097
W3096
T: Transmission
ANDY-20
ANDY-25
ANDY-30
ANDY-50
20
20
0
950
1000
1050 1100 1150
λ [nm]
0
950
1000
1050 1100 1150
λ [nm]
B218
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Reflective Neutral Density Filter (Mounted and unmounted)
FND/MFND/FNDU/MFNDU
The reflective ND filter is used in high power and broadband wavelength light density reducing.
The untransmitted light would not be absorbed, there is no possibility of glass damaging by the heat.
◦The metal coating reflection provides an extremly smooth transmittance wavelength characteristic from the UV to the IR
wavelength.
◦We are using synthetic fused silica substrates for high transmittance at UV range for the UV ND filter. We can obtain
almost the similar transmittance at the Near UV and the visible range.
◦The substrate thickness at 2mm +/−0.1mm with no difference with the transmittance.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Specifications
Visible (FND)
UV (FNDU)
Material BK7 Synthetic fused silica
Coating
Chrome coating (Cr) but FND-92, FNDU-92,
MFND-92, MFNDU-92 is uncoated
Wavelength Range 400 − 700nm 200 − 400nm
Parallelism

Optics & Optical Coatings
Catalog
Reflective Neutral Density Filter (Mounted and unmounted) FND/MFND/FNDU/MFNDU Code W3098
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Visible
Part Number
Diameter
φD
[mm]
Transmittance
(550nm)
[%]
FND-15C02-0.1 φ15 0.1
FND-15C02-1 φ15 1
FND-15C02-5 φ15 5
FND-15C02-10 φ15 10
FND-15C02-20 φ15 20
FND-15C02-30 φ15 30
FND-15C02-40 φ15 40
FND-15C02-50 φ15 50
FND-15C02-60 φ15 60
FND-15C02-70 φ15 70
FND-15C02-80 φ15 80
FND-15C02-92 φ15 92
FND-20C02-0.1 φ20 0.1
FND-20C02-1 φ20 1
FND-20C02-5 φ20 5
FND-20C02-10 φ20 10
FND-20C02-20 φ20 20
FND-20C02-30 φ20 30
FND-20C02-40 φ20 40
FND-20C02-50 φ20 50
FND-20C02-60 φ20 60
FND-20C02-70 φ20 70
FND-20C02-80 φ20 80
FND-20C02-92 φ20 92
FND-25C02-0.1 φ25 0.1
FND-25C02-1 φ25 1
FND-25C02-5 φ25 5
FND-25C02-10 φ25 10
FND-25C02-20 φ25 20
FND-25C02-30 φ25 30
FND-25C02-40 φ25 40
FND-25C02-50 φ25 50
FND-25C02-60 φ25 60
FND-25C02-70 φ25 70
FND-25C02-80 φ25 80
FND-25C02-92 φ25 92
FND-30C02-0.1 φ30 0.1
FND-30C02-1 φ30 1
FND-30C02-5 φ30 5
FND-30C02-10 φ30 10
FND-30C02-20 φ30 20
FND-30C02-30 φ30 30
FND-30C02-40 φ30 40
FND-30C02-50 φ30 50
FND-30C02-60 φ30 60
FND-30C02-70 φ30 70
FND-30C02-80 φ30 80
FND-30C02-92 φ30 92
FND-50C02-0.1 φ50 0.1
FND-50C02-1 φ50 1
FND-50C02-5 φ50 5
FND-50C02-10 φ50 10
FND-50C02-20 φ50 20
FND-50C02-30 φ50 30
FND-50C02-40 φ50 40
FND-50C02-50 φ50 50
FND-50C02-60 φ50 60
FND-50C02-70 φ50 70
FND-50C02-80 φ50 80
FND-50C02-92 φ50 92
Visible ・Mounted
Part Number
Frame outer diameter
φD
[mm]
Clear aperture
φA
[mm]
Transmittance
(550nm)
[%]
MFND-25-0.1 φ25 φ17 0.1
MFND-25-1 φ25 φ17 1
MFND-25-5 φ25 φ17 5
MFND-25-10 φ25 φ17 10
MFND-25-20 φ25 φ17 20
MFND-25-30 φ25 φ17 30
MFND-25-40 φ25 φ17 40
MFND-25-50 φ25 φ17 50
MFND-25-60 φ25 φ17 60
MFND-25-70 φ25 φ17 70
MFND-25-80 φ25 φ17 80
MFND-25-92 φ25 φ17 92
MFND-30-0.1 φ30 φ22 0.1
MFND-30-1 φ30 φ22 1
MFND-30-5 φ30 φ22 5
MFND-30-10 φ30 φ22 10
MFND-30-20 φ30 φ22 20
MFND-30-30 φ30 φ22 30
MFND-30-40 φ30 φ22 40
MFND-30-50 φ30 φ22 50
MFND-30-60 φ30 φ22 60
MFND-30-70 φ30 φ22 70
MFND-30-80 φ30 φ22 80
MFND-30-92 φ30 φ22 92
MFND-52-0.1 φ52 φ47 0.1
MFND-52-1 φ52 φ47 1
MFND-52-5 φ52 φ47 5
MFND-52-10 φ52 φ47 10
MFND-52-20 φ52 φ47 20
MFND-52-30 φ52 φ47 30
MFND-52-40 φ52 φ47 40
MFND-52-50 φ52 φ47 50
MFND-52-60 φ52 φ47 60
MFND-52-70 φ52 φ47 70
MFND-52-80 φ52 φ47 80
MFND-52-92 φ52 φ47 92
B220
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Typical Transmittance Data
T: Transmission
FND-0.11
T [%]
20
16
12
8
FND-1
FND-0.1
FND-510
T [%]
20
16
12
8
FND-10
FND-5
Application
Systems
Optics &
Optical
Coatings
4
4
Holders
0
350
400
500 600 700
800
[nm]
0
350
400
500 600 700
800
nm
Bases
FND-2030
50
40
FND-30
FND-20
FND-4050
100
80
FND-50
FND-40
Manual
Stages
Actuators
T [%]
30
20
T [%]
60
40
Motoeized
Stages
10
0
350 400 500 600 700 800
[nm]
20
0
350
400
500 600 700
800
[nm]
Light
Sources
Index
FND-6070
100
80
FND-70
FND-60
FND-8092
100
80
Guide
Mirrors
T [%]
60
40
T [%]
60
40
Beamsplitters
Polarizers
20
0
350 400 500 600 700 800
[nm]
20
0
350
400
500 600 700
800
[nm]
FND-92
FND-80
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
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B221

Optics & Optical Coatings
Reflective Neutral Density Filter (Mounted and unmounted)
FND/MFND/FNDU/MFNDU
Catalog
Code
W3099
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Ultraviolet
Part Number
Diameter
φD
[mm]
Transmittance
(300nm)
[%]
FNDU-20C02-0.1 φ20 0.1
FNDU-20C02-1 φ20 1
FNDU-20C02-5 φ20 5
FNDU-20C02-10 φ20 10
FNDU-20C02-20 φ20 20
FNDU-20C02-30 φ20 30
FNDU-20C02-40 φ20 40
FNDU-20C02-50 φ20 50
FNDU-20C02-60 φ20 60
FNDU-20C02-70 φ20 70
FNDU-20C02-80 φ20 80
FNDU-20C02-92 φ20 92
FNDU-25C02-0.1 φ25 0.1
FNDU-25C02-1 φ25 1
FNDU-25C02-5 φ25 5
FNDU-25C02-10 φ25 10
FNDU-25C02-20 φ25 20
FNDU-25C02-30 φ25 30
FNDU-25C02-40 φ25 40
FNDU-25C02-50 φ25 50
FNDU-25C02-60 φ25 60
FNDU-25C02-70 φ25 70
FNDU-25C02-80 φ25 80
FNDU-25C02-92 φ25 92
FNDU-30C02-0.1 φ30 0.1
FNDU-30C02-1 φ30 1
FNDU-30C02-5 φ30 5
FNDU-30C02-10 φ30 10
FNDU-30C02-20 φ30 20
FNDU-30C02-30 φ30 30
FNDU-30C02-40 φ30 40
FNDU-30C02-50 φ30 50
FNDU-30C02-60 φ30 60
FNDU-30C02-70 φ30 70
FNDU-30C02-80 φ30 80
FNDU-30C02-92 φ30 92
FNDU-50C02-0.1 φ50 0.1
FNDU-50C02-1 φ50 1
FNDU-50C02-5 φ50 5
FNDU-50C02-10 φ50 10
FNDU-50C02-20 φ50 20
FNDU-50C02-30 φ50 30
FNDU-50C02-40 φ50 40
FNDU-50C02-50 φ50 50
FNDU-50C02-60 φ50 60
FNDU-50C02-70 φ50 70
FNDU-50C02-80 φ50 80
FNDU-50C02-92 φ50 92
Ultraviolet ・Mounted
Part Number
Frame outer diameter
φD
[mm]
Clear aperture
φA
[mm]
Transmittance
(300nm)
[%]
MFNDU-25-0.1 φ25 φ17 0.1
MFNDU-25-1 φ25 φ17 1
MFNDU-25-5 φ25 φ17 5
MFNDU-25-10 φ25 φ17 10
MFNDU-25-20 φ25 φ17 20
MFNDU-25-30 φ25 φ17 30
MFNDU-25-40 φ25 φ17 40
MFNDU-25-50 φ25 φ17 50
MFNDU-25-60 φ25 φ17 60
MFNDU-25-70 φ25 φ17 70
MFNDU-25-80 φ25 φ17 80
MFNDU-25-92 φ25 φ17 92
MFNDU-30-0.1 φ30 φ22 0.1
MFNDU-30-1 φ30 φ22 1
MFNDU-30-5 φ30 φ22 5
MFNDU-30-10 φ30 φ22 10
MFNDU-30-20 φ30 φ22 20
MFNDU-30-30 φ30 φ22 30
MFNDU-30-40 φ30 φ22 40
MFNDU-30-50 φ30 φ22 50
MFNDU-30-60 φ30 φ22 60
MFNDU-30-70 φ30 φ22 70
MFNDU-30-80 φ30 φ22 80
MFNDU-30-92 φ30 φ22 92
MFNDU-52-0.1 φ52 φ47 0.1
MFNDU-52-1 φ52 φ47 1
MFNDU-52-5 φ52 φ47 5
MFNDU-52-10 φ52 φ47 10
MFNDU-52-20 φ52 φ47 20
MFNDU-52-30 φ52 φ47 30
MFNDU-52-40 φ52 φ47 40
MFNDU-52-50 φ52 φ47 50
MFNDU-52-60 φ52 φ47 60
MFNDU-52-70 φ52 φ47 70
MFNDU-52-80 φ52 φ47 80
MFNDU-52-92 φ52 φ47 92
B222
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Typical Transmittance Data
T: Transmission
FNDU-0.11
T [%]
20
16
12
8
FNDU-1
FNDU-0.1
FNDU-510
T [%]
20
16
12
8
FNDU-10
FNDU-5
Application
Systems
Optics &
Optical
Coatings
4
4
Holders
0
200
250
300 350 400 450 500
[nm]
0
200
250
300 350 400 450 500
[nm]
Bases
Manual
Stages
FNDU-2030
FNDU-4050
50
40
FNDU-30
FNDU-20
100
80
FNDU-50
FNDU-40
Actuators
T [%]
30
20
T [%]
60
40
Motoeized
Stages
10
0
200
250
300 350 400 450 500
[nm]
20
0
200
250
300 350 400 450 500
[nm]
Light
Sources
Index
FNDU-6070
T [%]
100
80
60
40
FNDU-70
FNDU-60
FNDU-8092
T [%]
100
80
60
40
FNDU-92
FNDU-80
Guide
Mirrors
Beamsplitters
Polarizers
20
20
Lenses
0
200
250
300 350 400 450 500
[nm]
0
200
250
300 350 400 450 500
[nm]
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
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B223

Optics & Optical Coatings
Reflective type of ND filter
Rotating variable reflective ND filter holder
VND
NDHN
Application
Systems
Optics &
Optical
Coatings
Holders
VND
The VND is a reflective ND filter. The reflectivity or the transmittance varies by rotation.
They are used mainly for light intensity adjustment in vision or illumination experiments.
◦Possible to adjust the intensity by rotation continuously or select light intensity position.
◦The transmittance light can be adjusted logarithmically, it makes dynamic light intensity adjustment possible.
◦Thin and space saving, it is easy to be placed in a narrow optical test set up.
◦The VND-U model is adaptable for use at Ultraviolet bandwidth, it is made of fused silica.
Catalog
Code
W3100
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Specifications
Circle
Material VND: BK7 VND-U: Synthetic fused silica
Coating
Cr (Chrome)
Transmittance − 92%
Surface flatness of substrate λ (Measurement area: φ30mm)
Parallelism

Circle
Rectangle
Part Number
Wavelength
Range
[nm]
φD1
[mm]
φD2
[mm]
VND-50 400 − 2000 φ50 φ15 2
VND-100 400 − 2000 φ100 φ20 3
VND-50U 200 − 2000 φ50 φ15 2
t
[mm]
Part Number
VND-13
Application
Systems
Optics &
Optical
Coatings
VND-100U 200 − 2000 φ100 φ20 3
Holders
Optical Density (Reference data)
OD: Optical density
Circle
Rectangle
Bases
3.5
2.0
OD
3.0
2.5
2.0
1.5
1.0
OD
1.5
1.0
0.5
Manual
Stages
Actuators
0.5
0 0 30 60 90 120 150 180 210 240 270 300 330 360
Angle: [ ° ]
0.0
12.7
19.1 25.4 38.1 50.8 63.5 69.9 76.2
Position [mm]
Motoeized
Stages
Light
Sources
Index
NDHN
Round shape variable reflective ND filter mounted with its holder.
Since the weak part of the glass is protected by the metal, it can be used safely.
◦The adjusted position can be fixed with a clamp
◦The filter can be turned in 360 degres without break
◦NDHN-U is used with VND-U, the Ultraviolet ND filter.
Attention
Catalog
Code
W3101
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
▶For ND filter change, please contact our International Sales Divison.
Filters
Prisms
Specifications
Part Number
ND filter parts number
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
NDHN-50 VND-50 0.09
Substrates/Windows
Optical Data
Maintenance
NDHN-100 VND-100 0.2
NDHN-U50 VND-50U 0.09
NDHN-U100 VND-100U 0.2
Selection Guide
ND Filters
Diffusers
Outline Drawing
(in mm)
Colored Glass
Filters
Dielectric Filters
NDHN-50/U50
M6 P1
NDHN-100/U100
M6 P1
Etalon
94
48
46
42
M4 depth 5
Clamp
M4 depth 5
M6 P1 depth 5
M6 P1 depth 5
56
Clamp
20
15
9
19
60
106
40
20
11
60 23
18
12
12
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B225

Optics & Optical Coatings
Reflective Stepping type Variable ND Filter
SND
Catalog
Code
W3102
Application
Systems
Optics &
Optical
Coatings
Adjusting the transmitting light at an equal intervals of optical density.
Fit for densitometer and colorimeter calibration use.
◦Possible to select 11 steps of optical density intervals on one single plate. It allows to estimate roughly the optical
density value that can not be recognized by human eyes.
◦With the chromic thin coating, it is applied to laser spot power adjustment.
◦With the chromic thin coating, the optical density can not be changed even if the wavelength is changed in the visible
light range.
Holders
Bases
Manual
Stages
Actuators
Specifications
Part Number
Material
Surface flatness of substrate
Coating
Wavelength Range
Transmittance
Surface Quality (Scratch−Dig)
SND-12
Soda Lime Glass
Both side: glossy surface (no polishing)
Cr (Chrome)
400 − 700nm
10 − 91.2% (Divided by 11 step)
80−50
Motoeized
Stages
Light
Sources
Index
Schematic
Front surface: Chrome coating
Attention
▶The uniformity of the transmitted light is limit at 4.6mm×2.5mm,
Please use for the beam size of φ3mm or below.
▶The transmittance changes with a logarithm for quantity of
movement. It is not a proportional movement.
▶Can not be applied with high energy pulsed laser.
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Outline Drawing
Rear surface: Uncoated
(in mm)
Prisms
Substrates/Windows
Optical Data
Maintenance
25.4±0.2
4.62 1.6±0.2
50.8±0.2
Transmittance: Divided by 11 strp
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
1.0
0.8
Optical Density (Reference data)
OD: Optical density
OD
0.6
0.4
0.2
0.04
4.6 22.9 50.8
Position [mm]
Position and relation of transmittance
Position [mm] 2.31 6.93 11.55 16.17 20.79 25.41 30.03 34.65 39.27 43.89 48.51
Optical density (OD) 0.04 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1
Transmittance [%] 91.2 79.4 63.1 50.1 39.8 31.6 25.1 20.0 15.8 12.6 10.0
Compatible Optic Mounts
CHA-60 / FHS-50
B226
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Beam Shaping Diffuser
MDFPC
Catalog
Code
W3103
This is a high transmittance diffuser comparing to the other product, we can obtain a wide diffusion
light at a single direction.
It is used for sheet light and laser marking system for fluid observation.
◦The beam shaping diffuser is made with many small lenses in random shape on its surface. The emitted light thru the
small lenses form the beam into an ellipse shape. It cannot cause a big light quantity loss by dispersion or a reflection in
the irrelevant direction.
◦There is no necessary to adjust the optical axis like a lens, the light incident can be projected onto anywhere of the beam
shaping diffuser surface, the ellipse beam shape can be obtained.
◦When rotate the optics, the ellipse shape will rotate too.
Application
Systems
Optics &
Optical
Coatings
Holders
Specifications
Bases
Material
Polycarbonate
Optics diameter About 0.25mm
Wavelength Range 400 − 1100nm
Transmittance 85 − 90% (But it depend on the diffusion angle)
Angle tolerance
±15% (Launch angle >10°)
±1.5° (Launch angle ≦10°)
Refractive index 1.586
Manual
Stages
Actuators
Guide
Motoeized
Stages
Schematic
Frame
▶We accept to produce a product without frame and in different
size.
▶We can produce the emitted light in circular distribution form.
Attention
▶Can be used for laser light but the diffused light can not be returned
to one focused spot light.
▶Clean the optics with approriate lens cleaning alcohol or distilled
water only.
▶The surface of the optics is extremely delicate, please avoid any
impulsion contact with hard material or rub the surface.
▶The optics can be deformed or melt, please avoid using it with high
power laser or high energy pulsed laser.
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Outline Drawing
D
A
MDFPC-60/10D
Relative intensity
Major axis
5±0.2
Relative intensity
Minor axis
(in mm)
●Tolerance
Mount outer diameter D±0.1
–60 –50 –40 –30 –20 –10 0 10 20 30 40 50 60 –60 –50 –40 –30 –20 –10 0 10 20 30 40 50 60
Angle [ ° ] Angle [ ° ]
Part Number
Diffusion Angle Characteristics (Reference data)
Mount outer
diameter
φD
[mm]
Clear aperture
φA
[mm]
Elliptic diffusion angle
(diameter × minor axis)
[ ° ]
MDFPC-30-60/10D φ30 φ22 60×10
MDFPC-30-60/1D φ30 φ22 60×1
MDFPC-30-40/0.2D φ30 φ22 40×0.2
MDFPC-30-30/5D φ30 φ22 30×5
MDFPC-52-60/10D φ52 φ47 60×10
MDFPC-52-60/1D φ52 φ47 60×1
MDFPC-52-40/0.2D φ52 φ47 40×0.2
MDFPC-52-30/5D φ52 φ47 30×5
MDFPC-60/1D
Relative intensity
Major axis
Relative intensity
Minor axis
–60 –50 –40 –30 –20 –10 0 10 20 30 40 50 60 –60 –50 –40 –30 –20 –10 0 10 20 30 40 50 60
Angle [ ° ] Angle [ ° ]
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
MDFPC-40/0.2D
MDFPC-30/5D
Major axis
Minor axis
Major axis
Minor axis
Relative intensity
Relative intensity
Relative intensity
Relative intensity
–50 –40 –30 –20 –10 0 10 20 30 40 50 –50 –40 –30 –20 –10 0 10 20 30 40 50
Angle [ ° ] Angle [ ° ]
–50 –40 –30 –20 –10 0 10 20 30 40 50 –50 –40 –30 –20 –10 0 10 20 30 40 50
Angle [ ° ] Angle [ ° ]
Compatible Optic Mounts
FH-50 / LHF-30 / LHA-60
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B227

Optics & Optical Coatings
Ground Glass Diffusers
DFB1/DFSQ1
Catalog
Code
W3104
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Ground glass diffuser has a large area diffusion of an incident light. It is widely used in prevention
from imaging of lamp filament or to diffuse in a large area of projected light or used it as a screen.
◦The ground glass diffuser with sand abrasive surface at sand number range from #240 to #1500. More the number is big
more the sand particle size is fine.
◦BK7 for visible and NIR, for Ultraviolet we recommand Synthetic fused sillica substrates.
Specifications
Material DFB1: BK7 DFSQ1: Synthetic fused silica
Surface Front surface Sand abrasive surface at various sand number range
condition Rear surface Polished (Surface flatness: about 4λ)
Wavelength Range
DFB1: 400 − 2000nm
BFSQ1: 200 − 2000nm
Clear aperture
90% of Actual Aperture
Guide
▶Ground glass on both surfaces or specific custom-made size
substrates, please contact our International Sales Division.
Motoeized
Stages
Light
Sources
Index
Schematic
Rear surface: Polished
Attention
▶The characteristic graph shown below is just a reference of a
measurement conditions. This is not a measured result of our
products.
▶Use the sand abrasive surface for screen application. The backside may
have 4% reflectivity and it may cause a ghost imaging phenomena.
Outline Drawing
(in mm)
Guide
Mirrors
φD
●Tolerance
Diameter φD +0
−0.1
Beamsplitters
Front surface: Ground
2±0.2
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
BK7
Part Number
Diameter
φD
[mm]
Sand blasted surface
(sand number range)
DFB1-30C02-240 φ30 #240
DFB1-30C02-400 φ30 #400
DFB1-30C02-600 φ30 #600
DFB1-30C02-800 φ30 #800
DFB1-30C02-1000 φ30 #1000
DFB1-30C02-1500 φ30 #1500
DFB1-50C02-240 φ50 #240
DFB1-50C02-400 φ50 #400
DFB1-50C02-600 φ50 #600
DFB1-50C02-800 φ50 #800
DFB1-50C02-1000 φ50 #1000
DFB1-50C02-1500 φ50 #1500
DFB1
Synthetic fused silica
Part Number
Diameter
φD
[mm]
Sand blasted surface
(sand number range)
DFSQ1-30C02-240 φ30 #240
DFSQ1-30C02-400 φ30 #400
DFSQ1-30C02-600 φ30 #600
DFSQ1-30C02-800 φ30 #800
DFSQ1-30C02-1000 φ30 #1000
DFSQ1-30C02-1500 φ30 #1500
DFSQ1-50C02-240 φ50 #240
DFSQ1-50C02-400 φ50 #400
DFSQ1-50C02-600 φ50 #600
DFSQ1-50C02-800 φ50 #800
DFSQ1-50C02-1000 φ50 #1000
DFSQ1-50C02-1500 φ50 #1500
■Diffuser characteristics
The characteristic of the diffuser depends on the sandblast grit range.
The sand number range at #240 & #400 with large surface roughness the light incident is strongly diffused and the transmitted light is projected onto larger area.
The sand number range at #1000 & #1500 with small surface roughness the diffused light is weak and the transmitted beam diffuse gradually the
surrounding of the beam.
The diffusion of the light is different in accordance with the wavelength, the long wavelength light has lower diffusion capability.
Please see the graph here below for your reference:
80
t=2
DFSQ1
80
t=2
Transmission [%]
60
40
20
DFB1-1500
DFB1-600
DFB1-240
Transmission [%]
60
40
20
DFSQ1-1500
DFSQ1-600
DFSQ1-240
0
200 400 600 800 1000 1200 1400 1600 1800 2000 2200 2400
λ [nm]
0
200 400 600 800 1000 1200 1400 1600 1800 2000 2200 2400
λ [nm]
B228
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Opal Diffusion Glass
DFO
Catalog
Code
W3105
Scattered light into the layer of a milky white opal glass and strongly diffuse evenly.
It is widely used in indirect lighting of the observation system or to uniformize brightness
distribution of the light source.
◦The diffusion area is larger than ground glass diffuser.
◦Tough, stable and hard to get scratched
◦Opal diffusion glass has an extremely flat surface.
Specifications
Material
Surface condition
Wavelength Range
Clear aperture
Guide
Opal Glass (Milky white) and transparent glass
Both side: glassy surface (no polishing)
400 − 2000nm
Circle of 90% of the diameter or Circle inscribed in
a square of 90% of the dimensions
▶We can provide custom-made specification which is not mentioned
on our catalog, please contact our International Sales Division.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Schematic
Rear surface: Transparent glass
glassy surface
Attention
▶The light diffuse into every directions, the transmitted light density
loss is huge.
▶For screen application, the distribution of imaging is on the depth
direction, a sharp contour will not be obtained.
Outline Drawing
(in mm)
Motoeized
Stages
Light
Sources
Index
φD
A
Guide
Mirrors
Front surface: Opal Glass (Milky white)
glassy surface
Circle
Part Number
Diameter
φD
[mm]
Thickness
t
[mm]
DFO-30C03-1 φ30 3.0
DFO-50C03-1 φ50 3.0
Square
t ±0.3
●Tolerance
Diameter φD +0
−0.1 Length A +0
−0.1
Length
A
[mm]
A t ±0.3
Thickness
t
[mm]
DFO-30S03-1 □30 3.0
DFO-50S03-1 □50 3.0
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
■The diffuser characteristics
Scratched light into the layer of a milky white opal glass and strongly diffuse evenly.
It is widely used in indirect lighting or to uniformize diffusion of lighting.
The transmitted beam will be diffused and lost it beam principle, the light is diffused
into different level in the glass
The opal diffusion glass is different from the the ground glass diffuser by its high
transmittance at IR zone.
Here enclosed a chart of the refractive of the opal diffusion glass and its base
material.
It shows the transmittance is high on the IR range.
Transmission [%]
16
14
12
10
8
6
4
2
0
200 400 600 800 1000 1200 1400 1600 1800 2000 2200 2500
λ [nm]
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Compatible Optic Mounts
LHA-60 / FHS-50 / CHA-60
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
B229

Optics & Optical Coatings
Short Wave Cutoff Filters
SCF
Catalog
Code
W3106
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Longpass filter that cuts the short wavelength and let the long wavelength transmit.
It is mainly used for cutting the unused wavelength like the UV light when doing inspection and
measurement experiements.
◦The cut wavelength range is well absorbed without leaking of transmitted light.
◦Can select the transmitted light with an accuracy notch as accurate as 10nm to 20nm.
◦The transmitted wavelength range has no low absorption and no ripple, even at 2000nm without absorption, transmittance
can be obtained.
Guide
▶For Dichroic filter with smaller wavelength slope we recommend the
(model SDM) in our catalog. B248
▶We can provide custom-made specification which is not mentioned
on our catalog, please contact our International Sales Division.
Attention
▶The absorption wavelength range can not be used with high power
laser and high energy pulsed laser.
▶There is no coating on both surfaces of the filter, the trancemission
loss of about 10% occurs.
▶The model shown with a ★ has been discontinued, serving until the
end of our inventory.
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Schematic
Outline Drawing
Uncoated
Glass
(containing a substance of optical absorption)
50 +0
−0.2
50 +0
−0.2 2.5±0.1
Uncoated
(in mm)
370 − 720nm
Part Number
Transmittance limit
wavelength
λT
[nm]
Wavelength
slope width
Δλ
[nm]
Color tone
SCF-50S-37L 370±5

IR Transmitting Filters
ITF
Catalog
Code
W3107
A filter that transmits IR wavelength and absorbs the UV and Visible range.
It is widely used in IR light selection from white light source and infrared alarm system or night
vision system.
◦Transmission limit wavelength selectable at a range from 760nm to 985nm.
◦It is used as IR sensing camera by adding an IR transmitting filter to semiconductor image sensor.
◦The visible and the UV range can be shut and the sensibility of IR observation get higher by adding it to image sensor.
Guide
▶For a reflective type of filter, “cold mirror” we recommend (model
CLDM) in our catalog. B243
▶We can provide custom-made specification which is not mentioned
on our catalog, please contact our International Sales Division.
Attention
▶The absorption wavelength renge can not be used with high power
laser and high energy pulsed laser.
▶There is no coating on both surfaces of the filter, the trancemission
loss of about 10% occurs.
▶The model shown with a ★ has been discontinued, serving until the
end of our inventory.
Schematic Outline Drawing (in mm)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Uncoated
Uncoated
Index
50 +0
−0.2
Glass
(containing a substance of optical absorption)
760 − 985nm
Part Number
Transmittance limit
wavelength
λT
[nm]
Wavelength slope
width
Δλ
[nm]
Color tone
ITF-50S-76IR 760±10

Optics & Optical Coatings
UV Transmitting Filters
UTVAF
Catalog
Code
W3108
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
A filter that transmits a specific wavelength at the UV range and cuts the visible range.
It is used to select UV wavelength from white light source or select a specific wavelength from
multi-wavelength.
◦It is widely used in fluorescence imaging or select only a UV exposure from a visible light.
◦UTVAF-36U is used for selecting the i line (365nm) of a mercury lamp.
◦Use the filter in a short wavelength detector and cut off the visible light of high brightness, and can increase the sensibility
of the UV light.
Guide
▶We are also providing bandpass filter at narrow wavelength (model
VPF). B254
▶We are also providing high transmittance filter for interference
application (model YIF). B252
▶We can provide custom-made specification which is not mentioned
on our catalog, please contact our International Sales Division.
Attention
▶The absorption wavelength range can not be used with high power
laser and high energy pulsed laser.
▶There is no coating on both surfaces of the filter, the trancemission
loss of about 10% occurs.
Schematic Outline Drawing (in mm)
Uncoated
Uncoated
50 +0
−0.2
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Glass
(containing a substance of optical absorption)
Specifications
Part Number
Central
wavelength
[nm]
Central
transmittance rate
[%]
Short-pass
wavelength
[nm]
Short-pass
wavelength
transmittance rate
[%]
Longest
wavelength
[nm]
50 +0
−0.2 2.5±0.1
Longest wavelength
transmittance rate
[%]
Average Transmittance
(absorption limit long wavelength − 700nm)
[%]
UTVAF-50S-33U 317 >85 233

Blue and Green Filters
BLF/GRF
Catalog
Code
W3109
A filter that transmits a specific wavelength at from blue to green wavelength and cuts other
wavelength of the visible range.
It is used to select blue or green wavelength from white light source or select a specific wavelength
from multi-wavelength.
◦A selection of various central wavelength and spectral width at the range from 370nm to 550nm.
◦To select the emission line of a specific wavelength from various emission lamp.
◦By insertion of the filter into microscope or CCD camera can have better contrast in a vision experiments.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Schematic
●Blue Filter
Uncoated
Uncoated
●Green Filter
Uncoated
Uncoated
Guide
▶We are also providing bandpass filter at narrow wavelength (model
VPF). B254
▶We are also providing high transmittance filter for interference
application (model YIF). B252
▶We can provide custom-made specification which is not mentioned
on our catalog, please contact our International Sales Division.
Index
Guide
Glass
(containing a substance
of optical absorption)
Outline Drawing
Glass
(containing a substance
of optical absorption)
50 +0
−0.2
(in mm)
Attention
▶The absorption wavelength range can not be used with high power
laser and high energy pulsed laser.
▶There is no coating on both surfaces of the filter, the trancemission
loss of about 10% occurs.
▶Due to the specifications of the glass material of the green filter,
you can not obtain a high and sharp transmittance, we recommend
to use the high transmittance interference filter (model YIF).
B252
▶The model shown with a ★ has been discontinued, serving until the
end of our inventory.
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Blue Filter
Part Number
Central
wavelength
[nm]
Central
transmittance rate
[%]
Short-pass
wavelength
[nm]
Short-pass
wavelength
transmittance rate
[%]
Longest
wavelength
[nm]
Longest wavelength
transmittance rate
[%]
Average Transmittance
(absorption limit long wavelength − 700nm)
[%]
★BLF-50S-370B 370 >82 289

Optics & Optical Coatings
Blue and Green Filters
BLF/GRF
Typical Transmittance Data
T: Transmission
Application
Systems
Optics &
Optical
Coatings
BLF-370B
T [%]
100
80
60
40
BLF-390B410B
T [%]
100
80
60
40
BLF-410B
BLF-390B
Holders
20
20
Bases
0
250 500 1000 1500
2000
[nm]
0
250 500 1000 1500
2000
[nm]
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
BLF-440B
T [%]
100
80
60
40
20
0
250 500
1000 1500 2000
[nm]
BLF-460B
T [%]
100
80
60
40
20
0
250 500 1000 1500
2000
[nm]
Index
GRF-530G545G
GRF-533G550G
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
T [%]
100
80
60
40
20
0
400
500
GRF-545G
GRF-530G
1000 1500 2000
[nm]
T [%]
100
80
60
40
20
0
400 500 1000 1500
2000
[nm]
GRF-550G
GRF-533G
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
B234
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Heat Absorbing Filters
HAF
Catalog
Code
W3110
This is widely used in absorbing heat from halogen light and xenon light for experiments that need
to avoid UV or heat from those lightings.
◦Keep away the heat that liberate from the NIR and IR range and cut off the brightness of the NIR and IR light.
◦It is also employed to cut-off spot light that liberate heat in microscope illumination.
◦Light transmitted throught the filter and does not darken the high transmitted visible light.
Guide
▶The filter can be broken if it is placed too close to a high brightness
lamp with its sudden heat affection. We recommend to strengthening
the glass before this operation. ( B213 for glass
strengthening process)
▶We can provide custom-made specification which is not mentioned
on our catalog, please contact our International Sales Division.
Attention
▶The absorption wavelength range can not be used with high power
laser and high energy pulsed laser.
▶There is no coating on both surfaces of the filter, the trancemission
loss of about 10% occurs.
▶* These prices are valid exclusively for Japan only. For your country
prices, please contact your local distributor or our International
Sales Division for further information.
Schematic Outline Drawing (in mm)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Uncoated
Uncoated
Index
50 +0
−0.2
Glass
(containing a substance of optical absorption)
50 +0
−0.2 3±0.1
Guide
Mirrors
Beamsplitters
Specifications
Part Number
Average
transmittance rate
(visible range)
[%]
Transmittance range
wavelength
[nm]
Transmisible range
wavelength
[nm]
Longest
wavelength
[nm]
Longest wavelength
transmittance rate
[%]
Average Transmittance
(absorption limit long wavelength − 2000nm)
[%]
HAF-50S-15H >75 573 701±10 867

Optics & Optical Coatings
Color Temperature Conversion Filter
LA/LB
Catalog
Code
W3111
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Use the LB filter for reducing the reddish light of the Tungsten lamp and use the LA filter for
reducing the bluish of the LED lamp.
It keeps the light at a natural color without adjusting the illumination for microscope observation.
◦Fit perfectly for image processing with CCD camera without white balance.
◦For chromaticity measurement application to enable the color temperature changing.
Guide
▶We can produce any kind of size, please contact our International
Sales division.
▶We can provide custom-made specification which is not mentioned
on our catalog, please contact our International Sales Division.
Attention
▶To keep the transmittance as our priority, the filter thickness of each
filter varies in accordance with the transmittance specifications.
▶There is no coating on both surfaces of the filter, the trancemission
loss of about 10% occurs.
▶The filter can be broken if it is placed too close to a high brightness
lamp with its sudden heat effect.
Light
Sources
Schematic Outline Drawing (in mm)
Index
Uncoated
Uncoated
50 +0
−0.2
Guide
Mirrors
Beamsplitters
Glass
(containing a substance of optical absorption)
50 +0
−0.2 2.5±0.1
Polarizers
Lenses
Multi-Element Optics
Filters
Specifications
Part Number
Thickness
t
[mm]
Chromacity X
(standard lighting A)
Chromacity Y
(standard lighting A)
LA-50S-20 Please contact 0.467 0.408
LB-50S-120 Please contact 0.370 0.378
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
LA-50S-20
100
Typical Transmittance Data
LB-50S-120
100
T: Transmission
80
80
T [%]
60
40
T [%]
60
40
20
20
0
200
400
600 750 1000 3000 5000
λ [nm]
0
200
400
600 750 1000 3000 5000
λ [nm]
Compatible Optic Mounts
FHS-50 / FH-50
B236
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Color Correction Filter
CCF/ECM
Catalog
Code
W3112
The filter that can simulate the sensing of a human eye which is similar to the silicon pixel detector
sensor with a wavelength located at a peak at the NIR range. It is also widely used to stick the
filter onto a CCD sensor.
◦Use the filter to correct the unnatural color taken with an IR camera.
◦The CCF-5000 has water resistance for use in natural environment or outside, the surface of the filter is tough and hard
to burn.
◦The CCF-500 and CCF-5000 has the same characteristic until 900nm, above 900nm the transmittance is different.
◦The color of the ECM-500 is darker than the CCF-500 and CCF-5000, fits to use to cut off the NIR light.
Guide
▶We can produce any kind of size, please contact our International
Sales Division.
Attention
▶The absorption wavelength range can not be used with high power
laser and high energy pulsed laser.
▶There is no coating on both surfaces of the filter, the trancemission
loss of about 10% occurs.
▶The ECM-500 and the CCF-500 less water resistance for a outside
environment use, it gets burn or smoky easier than the CCF-5000
with time.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Schematic Outline Drawing (in mm)
Index
Uncoated
Uncoated
50 +0
−0.2
Guide
Mirrors
50 +0
−0.2 1±0.1
Beamsplitters
Glass
(containing a substance of optical absorption)
Specifications
Part Number
Average
transmittance rate
400 − 600nm
[%]
Transmittance
600nm
[%]
Transmisible range
wavelength
[nm]
Longest
wavelength
[nm]
Longest wavelength
transmittance rate
[%]
Average Transmittance
(absorption limit long wavelength − 1200nm)
[%]
CCF-50S-500C 84.2 About 60 654 829

Optics & Optical Coatings
Contact sheet
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Contact sheet for Custom-made Color Filter
□ To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Affiliation
(Organization Name)
Department
Type
Filter Number
Outside
dimension
SCF, ITF, UTVAF, CCF, HAF, BLF, GRF
φA
Name
TEL FAX E-mail
Country/Address
Name &
Designation
Drawing Number
Desired
Delivery Date
a
φA
a
■Estimation ■Order
Date
Pieces
Heat
strengthening
(Tentative name is okay)
Estimate □ Yes: by Date □ No
Budget
JP Yen
Yes
No
mm
mm
Guide
Mirrors
Beamsplitters
* Write more detailed specifications here. (Rough illustration is acceptable.)
b
b
mm
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Others
Sigma Koki Co., Ltd.
B238
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Visible range dichroic filters
DIF
Catalog
Code
W3113
The dielectric multi-layer coating offers a high optical performance result.
Provide a wide range of human sense of color quality green, blue, red, yellow, magenta, and cyan.
◦The switching of reflecting from transmitting is steep; it fits to use as a wavelength separation filter.
◦Easy to be used as a variable wavelength filter by changing the angle of incident.
◦Enable to choose from a range of the six fundamental colors, fit perfectly for color vision experiments.
Specifications
Material
B270 ® (SuperWhite Glass) or BK7
Incident angle 0°
Wavelength Range
400 − 700nm
Surface Quality (Scratch−Dig) 60−40
Clear aperture
90% of external dimension of the square
inscription circle
Guide
▶B270 ® is a registered trademark of SCHOTT AG Inc.
▶Different size, wavelength and deviation ratio are not mentioned in
this catalog are available as custom products upon the request.
▶For specific mirror holder, please contact our International Sales
Division.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Schematic
Front surface:
Dielectric multi-layer coating
Rear surface: Polished
Attention
▶Do not use it with high power laser and high energy pulsed laser.
We can provide dichroic filters for pulse laser, please contact our
International Sales Division.
▶If the reflecting light of the filter is used, the transmittance and the
reflectance value may change in accordance to the angle of incident.
▶The color may appears different than expected at 45 degrees of AOI,
therefore to obtain the sharp color, please use it at 0 degrees.
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Outline Drawing
(in mm)
Polarizers
Lenses
50±0.3
Multi-Element Optics
Filters
50±0.3 1±0.1
Prisms
Substrates/Windows
Specifications
Part Number
Transmittance range
wavelength
(normal incident)
[nm]
Transmittance range
transmission rate
(normal incident)
[%]
Cutoff range wavelength
(normal incident)
[nm]
Cutoff range transmission rate
(normal incident)
[%]
Half maximum Wavelength
[nm]
DIF-50S-BLE 400 − 470 >85 530 − 700 85
400 − 460
630 − 700
85 400 − 565 85 410 − 475 80
>85
520 − 565 85 640 − 700

Optics & Optical Coatings
Visible range dichroic filters
DIF
Typical Transmittance Data
T: Transmission
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
DIF-BLE
T [%]
100
80
60
40
20
0°
45°
0
400 500 600 700 800 900 1000 1100
[nm]
DIF-YEL
T [%]
100
80
60
40
20
0°
45°
0
400 500 600 700 800 900 1000 1100
[nm]
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
DIF-GRE
T [%]
100
80
60
40
20
0°
45°
0
400 500 600 700 800 900 1000 1100
[nm]
DIF-MAG
T [%]
100
80
60
40
20
0°
45°
0
400 500 600 700 800 900 1000 1100
[nm]
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
DIF-RED
T [%]
100
80
60
40
20
0°
45°
0
400 500 600 700 800 900 1000 1100
[nm]
DIF-CYA
T [%]
100
80
60
40
20
0°
45°
0
400 500 600 700 800 900 1000 1100
[nm]
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
B240
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Visible range dichroic filters
DIM
Catalog
Code
W3114
Mirrors of 3 fundamentals color RGB for use in color separation. No absorption effects because of
the dielectric optical coating, the transmitting and reflecting are applicable.
For light transmitting, choose 2 colors out of the RGB dichroic mirror for color separation.
(For example: DIM RED + DIM GRE = Reflect red, reflect green, and transmit blue)
◦The switching of reflecting from transmitting is steep; it fits to use as a wavelength separation filter.
◦Easy to be used as a variable wavelength filter by changing the angle of incident.
◦Use the 3 fundamentals color RGB together, a white color can be obtained.
Specifications
Material
B270 ® (SuperWhite Glass) or BK7
Incident angle 45°
Wavelength Range
400 − 700nm
Surface Quality (Scratch−Dig) 60−40
Clear aperture
90% of external dimension of the square
inscription circle
Guide
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Schematic
Front surface:
Dielectric multi-layer coating
Rear surface: Polished
▶B270 ® is a registered trademark of SCHOTT AG Inc.
▶Different size, wavelength and deviation ratio are not mentioned in
this catalog are available as custom products upon the request.
▶For specific filter holder, please contact our International Sales
Division.
Attention
▶Do not use it with high power laser and high energy pulsed laser.
We can provide dichroic filters for pulse laser, please contact our
International Sales Division.
▶Use the RGB color from 0 to 45 degrees to obtain the correct color
separation.
Outline Drawing
(in mm)
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
50±0.3
Polarizers
Lenses
50±0.3 1±0.1
Multi-Element Optics
Specifications
Part Number
Transmittance range
wavelength
(45 degrees incident)
[nm]
Transmittance range
transmission rate
(45 degrees incident)
[%]
Cutoff range
wavelength
(45 degrees incident)
[nm]
Cutoff range
transmission rate
(45 degrees incident)
[%]
Half maximum
Wavelength
[nm]
DIM-50S-BLE 535 − 700 >85 400 − 450 80
>80
510 − 550 85 640 − 700

Optics & Optical Coatings
Cold Filters
CLDF
Catalog
Code
W3115
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
The principle of the cold filter is similar to the glass that is used to on the halogen lamp to protect
the heat. It enables the visible range to transmit and cut off the IR range (heat).
◦The feature of the dielectric optical coating filter is to have a rapid decay on transmittance from the visible range to IR range,
in addition to this; the heat absorption filter is efficient for transmitting at the visible range and cutting off the IR range.
◦It is frequently used as a IR cut filter on a CCD sensor.
◦It is also used as a filter to cut off the heat from the illumination of a biological microscope to avoid heating up the specimen.
Specifications
Material
Heat-absorbing glass
Incident angle 0°
Wavelength Range
400 − 2000nm (Cut off more than 900nm)
Surface Quality (Scratch−Dig) 60−40
Clear aperture
90% of external dimension of the square
inscription circle
Guide
▶Different size, wavelength and deviation ratio are not mentioned in
this catalog are available as custom products upon the request.
▶For specific filter holder, please contact our International Sales
Division.
Light
Sources
Index
Guide
Schematic
Front surface:
Dielectric multi-layer coating
Rear surface: Uncoated
Attention
▶The transmittance graph drops on the long side of the visible range
when the incident angle is slightly slanting.
▶When placing the filter too close to a light source, the heat absorption
may damage the filter with a rapid change of the temperature.
▶The backside of the cold filter is not coated with AR. The absorption
filter may have a backside reflectance value of 4%, a total of 20%
of loss can be occurred.
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Outline Drawing
(in mm)
Filters
50±0.3
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Specifications
Part Number
50±0.3 2±0.1
Transmittance range
wavelength
(normal incident)
[nm]
Transmittance range
transmission rate
(normal incident)
[%]
Cutoff range
wavelength
(normal incident)
[nm]
100
80
Cutoff range
transmission rate
(normal incident)
[%]
Typical Transmittance Data
Half maximum
Wavelength
[nm]
CLDF-50S 400 − 600 >80 800 − 2000

Cold Mirrors
CLDM
Catalog
Code
W3116
The principle of the cold mirror is reflecting the visible range light and transmitting the UV range light.
It separates the visible and the UV (heat) of the sunlight.
◦No absorption with dielectric multi-layer coating using high transmittance glass material, it can be resistant of rapid
change in high temperature.
◦It is possible to pick out the IR light only.
◦Can be used as a NIR filter by changing the angle of Incident.
Specifications
Material
B270 ® (SuperWhite Glass) or BK7
Incident angle 45°
Wavelength Range
400 − 2000nm
Surface Quality (Scratch−Dig) 80−50, 60−40 (CLDM-50S)
Clear aperture
90% of external dimension of the square
inscription circle
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Schematic
Front surface:
Dielectric multi-layer coating
Rear surface: Uncoated
Guide
▶B270 ® is a registered trademark of SCHOTT AG Inc.
▶Different size, wavelength and deviation ratio are not mentioned in
this catalog are available as custom products upon the request.
▶For specific filter holder, please contact our International Sales
Division.
Attention
▶Do not use it with high power laser and high energy pulsed laser.
We can provide high power mirror for pulse laser, please contact
our International Sales Division. B020
▶The backside of the cold mirror is not coated with AR, please use
the dielectric coating side for visible light incident. The backside
may have 10% loss of energy and the ghost image may occur.
▶The visible light is reflected, the UV (heat) is transmitted, avoid
blocking the transmitted light by a reflective element which may
hold the heat.
▶The reflecting light may be mixed with infrared if the incident angle
is other than 45 degrees.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Outline Drawing
●Square
●Circle
(in mm)
100
80
Typical Transmittance Data
T: Transmission
Polarizers
Lenses
Multi-Element Optics
A
φD
T [%]
60
40
Filters
Prisms
A
t
t
20
0°
45°
0
400 600 800 1000 1200 1400 1500
λ [nm]
Substrates/Windows
Optical Data
Maintenance
Square
Part Number
Lerght
A
[mm]
Thickness
t
[mm]
Transmittance range
wavelength
(45 degrees incident)
[nm]
Transmittance range
transmission rate
(45 degrees incident)
[%]
Cutoff range
wavelength
(45 degrees incident)
[nm]
Cutoff range
transmission rate
(45 degrees incident)
[%]
Half maximum
Wavelength
[nm]
CLDM-25.4S3.3 24.5±0.5 3.3±0.3 800 − 2000 >75 420 − 700 >95 760±10
CLDM-50.8S3.3 50.8±0.5 3.3±0.3 800 − 2000 >75 420 − 700 >95 760±10
CLDM-50S 50.0±0.3 1.0±0.1 800 − 2000 >80 400 − 700 >90 760±10
Circle
Part Number
Diamefer
φD
[mm]
Thickness
t
[mm]
Transmittance range
wavelength
(45 degrees incident)
[nm]
Transmittance range
transmission rate
(45 degrees incident)
[%]
Cutoff range
wavelength
(45 degrees incident)
[nm]
Cutoff range
transmission rate
(45 degrees incident)
[%]
Half maximum
Wavelength
[nm]
CLDM-25.4S3.3 φ25.4±0.5 3.3±0.3 800 − 2000 >75 420 − 700 >95 760±10
CLDM-50.8S3.3 φ50.8±0.5 3.3±0.3 800 − 2000 >75 420 − 700 >95 760±10
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Compatible Optic Mounts
FHS-50 / CHA-60
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B243

Optics & Optical Coatings
Catalog
Ultra-Violet Hot Mirrors HOTM Code W3205
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
It is a dichroic mirror HeatBuster ® to transmit only visible light and to reflect ultraviolet and infrared.
It is used aim for the such as taking output the only visible light from tungsten halogen lamps and
the black body radiation of high temperature furnace.
◦It is a excellent optics for environmental resistance that can be used in high temperature and high humidity.
◦Super HeatBuster ® is a registered trademark of Deposition Sciences, of Inc. (DSI).
Specifications
Material
Boroflot ® Glass
Surface accuracy before Coating 3λ per φ25.4mm
Incident angle 0° − 15°
Coating
Dielectric multi-layer coating
Max temperature 700°C
Surface Quality (Scratch−Dig) 80−50
Guide
▶Boroflot ® is a registered trademark of SCHOTT AG Inc.
Motoeized
Stages
Light
Sources
Index
Schematic
Front surface:
Dielectric multi-layer coating
Rear surface: Uncoated
Attention
▶Tilting the incident angle to 15 degrees or more, wavelength
characteristic of transmittance and reflectance changes, and
characteristics of the specifications will not be obtained.
▶The backside of the filter is not coated with AR. For this reason, it
may occur a ghost image caused by the reflection of the surface
and back surface.
Outline Drawing
(in mm)
IRUV + Visible Light
●Circle
●Square
Guide
Visible Light
Mirrors
IRUV Light
φD
A
Beamsplitters
Polarizers
t
A
t
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Circle
Part Number
Diameter
φD
[mm]
Thickness
t
[mm]
HOTM-25.4C3.3 φ25.4 3.3
HOTM-50.8C3.3 φ50.8 3.3
Square
Part Number
●Tolerance
Diameter φD±0.5
Length A±0.5
Thickness t ±0.3
Length
A
[mm]
Thickness
t
[mm]
HOTM-25.4S3.3 25.4 3.3
HOTM-50.8S3.3 50.8 3.3
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Typical Transmittance Data
T: Transmission
100
80
T [%]
60
40
20
0
200
300 400 500 600 700 800 900 1000 1100 1200
λ [nm]
B244
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Catalog
Short Pass Filters SHPF Code W3206
Divide sharply the color of wavelength by transmitting the short wavelength and cutting off the
long wavelength. Fit for Bio-imaging and flow cytometry application.
◦In the range of blocking wavelength, it has an excellent light-blocking properties as OD5, and in the transmission range it is
a filter with a transmittance of more than 90%.
◦This filter has a transmittance of more than 90% in the transmission band. Because of the dielectric multilayer coating,
there is almost no absorption of light by the coating.
Specifications
Coating
Dielectric multi-layer coating
Incident angle 0°
Surface Quality (Scratch−Dig) 60−40
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Schematic
Guide
▶Please contact our International Sales Division for customized
products. (customized on outer diameter, wavelength characteristic,
etc.)
▶Please contact our international sales division if you require a
wavelength characteristics of broadband data or more detailed
data.
Attention
▶If the light incident angle is other than 0 degrees, the transmittance
characteristics may be changed. In the normal situation, when the
incident angle changes, the wavelength may shift to the longwavelength
side.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Material Several optics with
dielectric multi-layers coating
Frame
Outline Drawing
(in mm)
Index
φ
− φ
●Tolerance
Thickness t ±0.1
Chamfer Ridge line Average 93 430 440 − 1010 6 5.0
SHPF-25C-492 400 − 480 > Average 90 483 492 − 1120 6 5.0
SHPF-25C-518 445 − 485 > Average 90 488 518 − 750 5 3.5
SHPF-25C-533 380 − 520 > Average 90 522 533 − 760 6 3.5
SHPF-25C-612 509 − 591 > Average 90 599 612 − 730 4 5.0
SHPF-25C-650 360 − 634 > Average 85 638 650 − 1120 5 3.5
SHPF-25C-655 531 − 642 > Average 93 646 655 − 800 6 3.5
SHPF-25C-680 350 − 650 > Average 90 654 680 − 1080 6 3.5
SHPF-25C-694 481 − 676 > Average 93 681 694 − 955 5 3.5
SHPF-25C-720 350 − 690 > Average 90 698 720 − 1100 6 3.5
SHPF-25C-750 380 − 720 > Average 90 727 750 − 1100 6 3.5
SHPF-25C-770 380 − 740 > Average 90 747 770 − 1400 6 3.5
SHPF-25C-775 481 − 756 > Average 93 761 775 − 1120 6 3.5
SHPF-25C-790 380 − 760 > Average 90 765 790 − 1400 6 3.5
SHPF-25C-842 485 − 831 > Average 95 835 842 − 1050 6 3.5
SHPF-25C-890 380 − 860 > Average 90 875 890 − 1400 5 3.5
SHPF-25C-945 600 − 935 > Average 93 936 945 − 1120 6 3.5
SHPF-25C-950 430 − 908 > Average 90 912 950 − 1100 6 3.5
Thickness
t
[mm]
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Typical Transmittance Data
T: Transmission
SHPF-440 – 720 SHPF-750 – 950
T [%]
100
80
60
40
20
0
400 450 500 550 600 650 700 750
λ [nm]
SHPF-25C-440
SHPF-25C-492
SHPF-25C-518
SHPF-25C-533
SHPF-25C-612
SHPF-25C-650
SHPF-25C-655
SHPF-25C-680
SHPF-25C-694
SHPF-25C-720
T [%]
100
80
60
40
20
0
700 750 800 850 900 950 1000
λ [nm]
SHPF-25C-750
SHPF-25C-770
SHPF-25C-775
SHPF-25C-790
SHPF-25C-842
SHPF-25C-890
SHPF-25C-945
SHPF-25C-950
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B245

Optics & Optical Coatings
Catalog
Long Pass filters LOPF Code W3207
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Divide sharply the color of wavelength by transmitting the long wavelength and cutting off the
short wavelength. Fit for Bio-imaging and flow cytometry application.
◦In the range of blocking wavelength, it has a excellent light-blocking properties as OD5, and in the transmission range it is a
filter with a transmittance of more than 90%.
◦Because it is a dielectric multilayer coating, there is almost no absorption of light by the coating.
Specifications
Coating
Dielectric multi-layer coating
Incident angle 0°
Surface Quality (Scratch−Dig) 60−40
Guide
▶Please contact our International Sales Division for customized
products. (customized on outer diameter, wavelength characteristic,
etc.)
▶Please contact our international sales division if you require a
wavelength characteristics of broadband data or more detailed
data.
Motoeized
Stages
Light
Sources
Index
Schematic
Material Several optics with
dielectric multi-layers coating
Frame
Attention
▶If the light incident angle is other than 0 degrees, the transmittance
characteristics may be changed. In the normal situation, when the
incident angle changes, the wavelength may shift to the longwavelength
side.
Outline Drawing
(in mm)
●Tolerance
Thickness t ±0.1
Chamfer Ridge line Average 85 274 225 − 267 5 3.5
LOPF-25C-300 308 − 420 > Average 85 306 200 − 300 5 5.0
LOPF-25C-341 350 − 500 > Average 90 347 200 − 341 5 3.5
LOPF-25C-405 421.5 − 900 > Average 93 418 270 − 405 5 3.5
LOPF-25C-409 417 − 1100 > Average 93 415 270 − 409 5 3.5
LOPF-25C-458 470.7 − 900 > Average 93 466 270 − 458 5 3.5
LOPF-25C-488 504.7 − 900 > Average 93 500 270 − 488 5 3.5
LOPF-25C-496 503 − 1100 > Average 93 501 270 − 496 5 3.5
LOPF-25C-500 519 − 700 > Average 90 515 270 − 500 5 3.5
LOPF-25C-514 529.4 − 900 > Average 93 526 270 − 514 5 3.5
LOPF-25C-515 525 − 800 > Average 90 522 340 − 515 6 3.5
LOPF-25C-519 534 − 653 > Average 92 530 300 − 519 6 3.5
LOPF-25C-532 546.9 − 900 > Average 93 542 280 − 532 5 3.5
LOPF-25C-561 577.1 − 900 > Average 93 572 300 − 561 6 3.5
LOPF-25C-593 604 − 1100 > Average 93 601 270 − 593 5 3.5
LOPF-25C-635 660 − 1200 > Average 93 655 300 − 635 6 3.5
LOPF-25C-715 725 − 1200 > Average 93 723 290 − 715 5 3.5
LOPF-25C-736 761 − 850 > Average 90 754 300 − 736 4 3.5
LOPF-25C-785 812.1 − 1200 > Average 93 805 270 − 785 5 3.5
LOPF-25C-800 815 − 915 > Average 90 812 635 − 800 6 3.5
LOPF-25C-834 842 − 935 > Average 97 840 790 − 834 5 3.5
LOPF-25C-1020 1064 − 1087 > Average 93 1057 400 − 1020 5 3.5
t
Thickness
t
[mm]
Typical Transmittance Data
T: Transmission
LOPF-267 – 561
SHPF-405 – 532 (Enlargement)
SHPF-593 – 1020
T [%]
100
80
60
40
20
0
200 250 300 350 400 450 500 550 600
λ [nm]
LOPF-25C-267
LOPF-25C-300
LOPF-25C-341
LOPF-25C-405
LOPF-25C-409
LOPF-25C-458
LOPF-25C-488
LOPF-25C-496
LOPF-25C-500
LOPF-25C-514
LOPF-25C-515
LOPF-25C-519
LOPF-25C-532
LOPF-25C-561
T [%]
100
80
60
40
20
0
400 450 500 550 600
λ [nm]
LOPF-25C-405
LOPF-25C-409
LOPF-25C-458
LOPF-25C-488
LOPF-25C-496
LOPF-25C-500
LOPF-25C-514
LOPF-25C-515
LOPF-25C-519
LOPF-25C-532
T [%]
100
80
60
40
20
0
200 250 300 350 400 450 500 550 600
λ [nm]
LOPF-25C-593
LOPF-25C-635
LOPF-25C-715
LOPF-25C-736
LOPF-25C-785
LOPF-25C-800
LOPF-25C-834
LOPF-25C-1020
B246
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Catalog
Raman Long Pass Edge Filters RSF Code W3208
It is available to cut the excitation laser beam and extracted with high transmittance Raman shifted
light on the longer wavelength side with a sharp rise.
It can be used to detect weak light of the Raman scattering.
◦The wavelength of the laser, it has a excellent light-blocking properties as OD6, and in the transmission range it is a filter
with a transmittance of more than 90%.
◦Because it is a dielectric multilayer coating, there is almost no absorption of light by the coating.
Specifications
Coating
Dielectric multi-layer coating
Incident angle 0°
Surface Quality (Scratch−Dig) 60−40
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Guide
▶Please contact our International Sales Division for customized
products. (customized on outer diameter, wavelength characteristic,
etc.)
▶Please contact our international sales division if you require a
wavelength characteristics of broadband data or more detailed
data.
Manual
Stages
Actuators
Motoeized
Stages
Attention
Schematic
Material Several optics with
dielectric multi-layers coating
Frame
▶If the light incident angle is other than 0 degrees, the transmittance
characteristics may be changed. In the normal situation, when the
incident angle changes, the wavelength may shift to the longwavelength
side.
Light
Sources
Index
Typical Transmittance & Optical Density Data
OD: Optical Density T: Transmission
100
10
Guide
80
Optical Density
Transmittance
8
Mirrors
Outline Drawing
(in mm)
●Tolerance
Chamfer Ridge line
80 325 6
RSF-25C-355RU 359.6 − 800.8 >90 355 6
RSF-25C-364RU 368.5 − 820.6 >90 363.8 6
RSF-25C-442RU 447.3 − 996.1 >90 441.6 6
RSF-25C-458RU 463.9 − 668.4 >90 457.9 6
RSF-25C-473RU 479.1 − 683.9 >90 473 6
RSF-25C-488RU 494.3 − 1100.8 >90 488 6
RSF-25C-514RU 521.2 − 1160.5 >90 514.5 6
RSF-25C-532RU 538.9 − 1200.0 >90 532 6
RSF-25C-561RU 568.7 − 1266.3 >90 561.4 6
RSF-25C-568RU 575.6 − 1281.7 >90 568.2 6
RSF-25C-633RU 641.0 − 1427.4 >90 632.8 6
RSF-25C-647RU 655.5 − 1459.6 >90 647.1 6
RSF-25C-664RU 672.6 − 1497.7 >90 664 6
RSF-25C-780RU 790.1 − 1008.0 >90 780 6
RSF-25C-785RU 795.2 − 1770.7 >90 785 6
RSF-25C-808RU 818.5 − 1822.6 >90 808 6
RSF-25C-830RU 840.8 − 1872.2 >90 830 6
RSF-25C-980RU 992.7 − 2000.0 >90 980 6
RSF-25C-1064RU 1077.8 − 2000.0 >90 1064 6
RSF-25C-1319RU 1336.1 − 2000.0 >90 1319 6
0
520
525 530 535 540 545 550
λ [nm]
0
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
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B247

Optics & Optical Coatings
Sharp cut dichroic mirror
SDM
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Divide sharply the color of wavelength by reflecting the short wavelength and transmitting the long
wavelength. Fit for Bio-imaging and flow cytometry application.
◦The short wavelength has high reflectance, fit perfectly for use in excitation light and fluorescence imaging.
◦The feature of the structure of this mirror is to maintain the distance of the curbs of the P polarization and the S polarization
to be close to each other. It narrows the gap of the reflective range and the transmission range to provide a steep rise.
◦There is limited absorption due to the dielectric coating.
Specifications
Material
Synthetic fused silica
Incident angle 45°
Surface accuracy before coating 5λ (Optical flat)
Parallelism 20″
Polarization condition of incident beam
Unpolarized beam (or linear polarization
of 45° azimuth circular polarization)
Surface Quality (Scratch−Dig) 40−20
Actuators
Guide
Motoeized
Stages
Light
Sources
Index
Schematic
Notch C2
▶Use the SDM mirror with interference filter as a pair for Bio-imaging
application.
▶For specific mirror holder, please contact our International Sales
Division.
▶Different size, wavelength and deviation ratio are not mentioned in
this catalog are available as custom products upon the request.
▶For aluminum mirror, dielectric mirror, TIRF Mirror (Total Internal
Reflectance Fluorescence), please contact our International Sales
Division.
Incident angle 45°
Attention
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Front surface:
Dielectric multi-layer coating
Outline Drawing
Rear surface:
Anti-reflection coating
or Dielectric multi-layer coating
Clear aperture (Within the ellipse)
C2
(in mm)
▶The transmittance characteristic of the mirror is a combining of the
coating value of both sides of the mirror.
▶Using the mirror other than 45 degrees of AOI, the transmittance
and the reflectance characteristics may be different than as
mentioned.
▶The right reflecting surface appears when you see the notch on the
upper right side of the mirror.
Sample of use with multi-wavelength of visible laser
This is a flow cytometry set up with a piling up of different laser beams.
Filters
Prisms
33
38 −0.3
−0.1
543nm or 561nm
He-Ne Laser
He-Ne Laser or DPSS
488nm
Ar Laser
Blue-violet LD
405nm
Substrates/Windows
632.8nm
Optical Data
Maintenance
23
26 −0.1
−0.3
1±0.1
SDM595S
SDM505S
or SDM515S
SDM455S
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Specifications
Part Number
Transmission spectral
Transmittance limit
wavelength
[nm]
SDM410S 410
Reflectance range
wavelength
[nm]
340 − 360
360 − 395
Reflectance range
reflection rate
[%]
>90
>99
SDM455S 455 390 − 443 >99
SDM490S 490 450 − 482 >99
Transmittance range
wavelength
[nm]
419 − 660
430 − 520
465 − 560
560 − 700
499 − 630
630 − 655
Transmittance range
transmission rate
[%]
>80
>87
> Average 92
> Average 88
> Average 90
>75
SDM505S 505 455 − 497 >99
514 − 550
550 − 700
>85
>60
SDM515S 515 462 − 504 >99
522 − 660
660 − 700
> Average 90
>75
SDM570S 570 520 − 558 >99
579 − 620
620 − 700
>85
>60
SDM595S 595 520 − 585 >99
605 − 700
700 − 880
> Average 92
>75
Compatible Optic Mounts
CHA-60
B248
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Catalog
Code
W3117
Typical Transmittance Data
T: Transmission
SDM410S
T [%]
100
90
80
70
60
50
40
30
20
10
0
300 400 500 600 700 800 900 1000 1100 1200
[nm]
SDM455S
T [%]
100
90
80
70
60
50
40
30
20
10
0
300 400 500 600 700 800 900 1000 1100 1200
[nm]
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
SDM490S
T [%]
SDM515S
SDM595S
T [%]
100
90
80
70
60
50
40
30
20
10
0
300 400 500 600 700 800 900 1000 1100 1200
[nm]
100
90
80
70
60
50
40
30
20
10
0
300 400 500 600 700 800 900 1000 1100 1200
[nm]
100
90
80
70
60
50
40
30
20
10
0
300 400 500 600 700 800 900 1000 1100 1200
[nm]
SDM505S
T [%]
SDM570S
T [%]
100
90
80
70
60
50
40
30
20
10
0
300 400 500 600 700 800 900 1000 1100 1200
100
90
80
70
60
50
40
30
20
10
100
90
80
70
60
50
40
30
20
10
[nm]
0
300 400 500 600 700 800 900 1000 1100 1200
[nm]
Sharp cutting characteristics value (Reference data)
T: Transmission
The polarization of the SDM mirror was realized with a special coating
design to obtain a sharper rise graph than usual. It shows advantage for
use in extracting the excitation light for fluorescence imaging application.
SDM490S
Standard
0
450 460 470 480 490 500 510 520 530
[nm]
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
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B249

Optics & Optical Coatings
Catalog
Laser Line Filter VPFHT Code W3209
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
This filter can extract light in a specific wavelength range. Very high transmittance can be obtained
in the transmission range. Upon leaving a little from the transmission wavelength range, transmission
decrease steep and light is not transmitted almost in the vicinity of the transmission range.
◦Since it is used a dielectric multilayer coating, absorption is small and transmittance is high. It enables to separate the
wavelength specified light efficiently.
◦The filters are metallically framed which make it easy to be mounted onto a holder.
◦Large choice of spectrum, range from UV 325nm to IR 1064nm.
Specifications
Coating
Dielectric multi-layer coating
Incident angle 0°
T≧90%
Maximum transmittance rate T≧80% (VPFHT-3250, -3550)
T≧85% (VPFHT-3638, -3720)
Clear aperture
φ8.5mm (φD=φ12.5mm)
φ22mm (φD=φ25mm)
Surface Quality (Scratch−Dig) 60−40
Actuators
Guide
Motoeized
Stages
Light
Sources
Index
Guide
Schematic
Material Several optics with
dielectric multi-layers coating
Frame
▶Please contact our International Sales Division for customized
products. (customized on outer diameter, wavelength characteristic,
etc.)
▶It is also provided interference filter VPF that cutting range is
broad. B254
Attention
▶Characteristics of the interference filter is depending on the
incident angle. If it is tilted from the optical axis, then the center
transmitting wavelength is shifted toward the short wavelength,
and transmittance also decreases. Please make sure to incident
at 0 degrees collimated light or close to collimated (parallel) light
to the optical axis. Angle dependence will increase as half-width
range of transmittance becomes narrow.
Mirrors
Typical Transmittance Data
T: Transmission
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Outline Drawing
φD φA
3.5±0.1
(in mm)
●Tolerance
Diameter φD +0
−0.1
Chamfer Ridge line

Interference filters
YIF
YIF is a filter that can extract a selected light from the wavelength range. Its feature is enabling to
pick out a high transmittance wavelength at the same time cutting off a wavelength.
◦The filters are made by Ion Beam assisted dielectric coating process which can assure an extremely high environment
resistance and high stability.
◦Using high absorption glass material and heat absorption optics coating, it assures a low deterioration with any types of
light-source.
◦The filters were designed as the BP type light blocking characteristics of high OD7 at the long wavelength side than the
pass band and the BA type light blocking characteristics of high OD7 at the short wavelength side of than the transmission
bandwidth.
◦The filters can be used to cut the non-irradiated light wavelength excitation in fluorescence observation and cut the non
fluorescence wavelength excitation light in sample observation.
◦In addition to the BP type filter and the BA type filter, there are broadband type and narrowband type can be chose
according to your application.
Specifications
Material
B270 ® (SuperWhite Glass) or
Synthetic fused silica
Incident angle 0°
Surface Quality (Scratch−Dig) 40−20
Guide
▶B270 ® is registered tradmark of Schott AG.
▶For specific filter holder, please contact our International Sales
Division.
▶Different size and wavelength which are not mentioned in this
catalog are available as custom products upon the request.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Attention
Schematic
Material
Several optics with
dielectric multi-layers coating
Frame
▶The filter transmittance wavelength characteristics are on the surface
and the backside of the filter. It happens to have multi-filter with
different coating characteristics pilling together and mounted into a
optics frame.
▶If the light incident angle is other than 0 degrees, the transmittance
characteristics may be changed. In the normal situation, when the
incident angle changes, the wavelength may shift to the longwavelength
side.
▶An arrow indicating the light incident direction of the BP filter and
the BA filter is different.
▶The filters are made for use in high temperature environment but
for a usage of high power exposure UV lamp, the stability and the
efficiency of the filters are not guaranteed.
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Sample of use of the Bio-imaging
Filters
Outline Drawing
●BP type
φ25 +0
−0.3
φ22
(in mm)
Irradiation with excitation light onto a bound biological fluorescent
reagent. A weak fluorescence light appears and the reaction of the
biological specimen is visible.
■Fluorescence microscope observation optical path diagram
Fluorescence filter
(Band pass Filter with
Excitation filter
fluorescence transmission only.)
(Band Pass filter with excitation
light transmission only.)
Prisms
Substrates/Windows
Optical Data
Maintenance
●BA type
Direction of light
incident axis
φ25 +0
−0.3
Direction of light
incident axis
Outer frame
(Black)
φ22
5.5±0.5
Inner frame
(Black)
Direction of
light incident axis
3.5±0.5
Dichroic mirror
(A mirror that reflect the
excitation light andtransmits
the fluorescence light.)
Fluorescence
Objectives
Sample
■Fluorescent observation image
Light Source
Illumination system
Excitation light
* The power of the fluorescence
light is 10 –6 weaker than the
excitation light.
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Compatible Optic Mounts
LHF-25.4 / LHA-25
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
B251

Optics & Optical Coatings
Catalog
Code
W3118
BP broadband type
Application
Systems
Part Number
Transmission spectral
Short-wavelength cutoff
range wavelength
[nm]
Short-wavelength cutoff
range transmittance
[%]
Transmittance range
wavelength
[nm]
Transmittance range
transmission rate
[%]
Long-wavelength cutoff
range wavelength
[nm]
Long-wavelength cutoff
range transmittance
[%]
Optics &
Optical
Coatings
YIF-BP340-390S 300 Average 80
>80
> Average 85
414 − 800 >OD7
460 − 800
800 − 960
>OD7
>OD6
Holders
YIF-BP460-495S 300 − 442 80
> Average 85
514 − 800
800 − 960
>OD7
>OD6
Bases
YIF-BP540-585S 300 − 522 80
> Average 85
600 − 800
800 − 960
>OD7
>OD6
Manual
Stages
BP narrowband type
Actuators
Part Number
Transmission spectral
Short-wavelength cutoff
range wavelength
[nm]
Short-wavelength cutoff
range transmittance
[%]
Transmittance range
wavelength
[nm]
Transmittance range
transmission rate
[%]
Long-wavelength cutoff
range wavelength
[nm]
Long-wavelength cutoff
range transmittance
[%]
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
YIF-BP360-370S 300 − 340 78 414 − 800 >OD7
YIF-BP400-410S 300 − 383 80
> Average 85
>80
> Average 85
>80
> Average 85
YIF-BP540-550S 300 − 522 80
YIF-BP565-585S 300 − 545 80
> Average 85
435 − 800
800 − 960
493 − 800
800 − 960
514 − 800
800 − 960
516 − 800
800 − 960
582 − 800
800 − 960
582 − 800
800 − 960
600 − 800
800 − 960
>OD7
>OD6
>OD7
>OD6
>OD7
>OD6
>OD7
>OD6
>OD7
>OD6
>OD7
>OD6
>OD7
>OD6
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
BA broadband type
Part Number
YIF-BA420IFS
Transmission spectral
Short-wavelength cutoff
range wavelength
[nm]
340 − 380
380 − 390
Short-wavelength cutoff
range transmittance
[%]
>OD7
>OD6
Transmittance range
wavelength
[nm]
430 − 520
YIF-BA460IFS 400 − 440 >OD7 470 − 650
YIF-BA510IFS 420 − 488 >OD7 517 − 700
Transmittance range
transmission rate
[%]
>90
> Average 95
>90
> Average 95
>90
> Average 95
Long-wavelength cutoff
range wavelength
[nm]
−
−
−
Long-wavelength cutoff
range transmittance
[%]
−
−
−
Maintenance
YIF-BA575IFS 546 − 550 >OD7 580 − 700
>90
> Average 95
−
−
Selection Guide
YIF-BA600IFS 535 − 582 >OD7 607 − 700
>90
> Average 95
−
−
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
BA narrowband type
Part Number
Transmission spectral
Short-wavelength cutoff
range wavelength
[nm]
Short-wavelength cutoff
range transmittance
[%]
Transmittance range
wavelength
[nm]
Transmittance range
transmission rate
[%]
Long-wavelength cutoff
range wavelength
[nm]
Long-wavelength cutoff
range transmittance
[%]
Etalon
YIF-BA420-460S
340 − 380
380 − 390
>OD7
>OD6
430 − 460
>88
> Average 93
495 − 620 OD7 470 − 503
>90
> Average 95
529 − 650 OD7 499 − 535
>90
> Average 95
565 − 680 OD7 517 − 542
>90
> Average 95
569 − 705 OD7 522 − 552
>90
> Average 95
577 − 700 OD7 580 − 618
>90
> Average 95
640 − 780 OD7 607 − 680
>90
> Average 95
703 − 880

Interference filters
YIF
Typical Transmittance Data
T: Transmission
BP type
Broadband type (300 1200nm)
T [%]
100
90
80
70
60
50
40
30
20
10
0
300 400 500 600 700 800 900 1000 1100 1200
[]
Narrowband type (300 1200nm)
T [%]
YIF-BP340-390S
YIF-BP400-440S
YIF-BP460-495S
YIF-BP540-585S
100
90
80
YIF-BP360-370S
70
YIF-BP400-410S
YIF-BP460-480S
60
YIF-BP470-495S
50
YIF-BP490-500S
YIF-BP530-550S
40
YIF-BP540-550S
30
YIF-BP565-585S
20
10
0
300 400 500 600 700 800 900 1000 1100 1200
[]
Enlagement of Narrowband type (350 600nm)
T [%]
100
90
80
70
60
50
40
30
20
10
0
350 400 450 500 550 600
[]
YIF-BP360-370S
YIF-BP400-410S
YIF-BP460-480S
YIF-BP470-495S
YIF-BP490-500S
YIF-BP530-550S
YIF-BP540-550S
YIF-BP565-585S
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
BA type
Broadband type 1 (300 1200nm)
T [%]
100
90
80
70
60
50
40
30
20
YIF-BA420IFS
10
YIF-BA460IFS
0
300 400 500 600 700 800 900 1000 1100 1200
[]
Narrowband type 1 (300 1200nm)
T [%]
100
90
80
70
60
50
40
30
20
YIF-BA420-460S
10
YIF-BA460-510S
0
300 400 500 600 700 800 900 1000 1100 1200
[]
Broadband type 2 (300 1200nm)
T [%]
100
90
80
70
60
50
40
30
20
YIF-BA510IFS
10
YIF-BA575IFS
YIF-BA600IFS
0
300 400 500 600 700 800 900 1000 1100 1200
[]
Narrowband type 2 (300 1200nm)
T [%]
100
90
80
70
60
50
40
30
20
YIF-BA495-540S
10
YIF-BA510-550S
0
300 400 500 600 700 800 900 1000 1100 1200
[]
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Narrowband type 3 (300 1200nm)
T [%]
100
90
80
70
60
50
40
30
20
YIF-BA515-560S
YIF-BA575-625S
10
YIF-BA600-690S
0
300 400 500 600 700 800 900 1000 1100 1200
[]
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B253

Optics & Optical Coatings
Bandpass Interference filters
VPF
Application
Systems
Optics &
Optical
Coatings
VPF can transmit a specified wavelength range at a spectrum width (half-width) as precise as 1nm
to 40nm. It is used to select spectral line from light-sources range from discharge lamp to different
lasers wavelength.
◦The filters are made of dielectric coating and metallic coating which assure a steep rise and a sharp cut-off spectrum.
◦The filters are metallically framed which make it easy to be mounted onto a holder.
◦Large choice of spectrum, range from UV 214nm to IR 1550nm.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Specifications
Blocking range

Catalog
Code
W3119
214.0nm − 647.1nm
Part Number
Central wavelength
[nm]
Laser or Emission line
spectrum
Half
bandwidth
[nm]
Maximum
transmittance
[%]
Thickness t
[mm]
VPF-25C-10-12-21400 214.0 +3.0
−0.0 Zn 10.0±2.0 >12 15 15 15 12 12 12 15 15 15 15 25 25 20 25 25 25 25 25 40 40 40 40 30 35 45 45 50 45 30 35 45 45 40 45 50 50 50 50 40 45 50 40 45 50 50 50 50 50 50 50 50 50 40 45 50 50 45 50

Optics & Optical Coatings
Bandpass Interference filters
VPF
Catalog
Code
W3120
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
650.0nm − 1550.0nm
Part Number
Central wavelength
[nm]
Laser or Emission line
spectrum
Half
bandwidth
[nm]
Maximum
transmittance
[%]
Thickness t
[mm]
VPF-25C-10-50-65000 650.0 +3.0
−0.0 − 10.0±2.0 >50 50 50 50 50 50 50 45 40 45 45 45 45 45 45 45 45 40 30 35 40 35 30 30

Bandpass Interference filters
VPF
Catalog
Code
W3121
VPF band pass filter with effective diameter at 45mm square or larger.
Fit for experimentation that needs large collimated light incident on sample or on a large diverges
light where requires a larger size band pass filter.
◦The filters are made of dielectric coating and metallic coating which assure a steep rise and a sharp cut-off spectrum.
◦A selection of filter from the spectrum half bandwidth from 10nm to 12nm, the center spectrum from 400nm to 900nm
with 10nm increments.
◦The whole lateral side of the filter is painted in black for avoiding scattered light effects.
Specifications
Material
Optical Glass
Clear aperture ≧45×45mm
Blocking range 0.01% (1 − 1200nm)
Incident angle 0°
Coating
Dielectric multi-layer coating
Guide
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Schematic
Front surface:
Dielectric multi-layer coating
Rear surface:
Dielectric multi-layer coating
▶For filter size of diameter 25mm, please see VPF-25C at page B254
or see the high transmittance filter interference filter at page B251.
▶For customized size or form which is not mentioned in this catalog
or for any specific holder for this filter, please contact our International
Sales Division.
Attention
Motoeized
Stages
Light
Sources
Outline Drawing
Literal side painted in black in all surfaces
50±0.5
(in mm)
▶Heatproof temperature at 80°C (Celsius) as maximum, please avoid
using it to high temperature light-source.
▶The filters are heat absorptive, therefore they are not fit to use with
high power laser and high energy pulsed laser.
▶The filters characteristic depends on the angle of incident. The
angle of the light axis is tilted, the center wavelength is shifted to
short-wavelength side and the transmittance may decrease too.
More the selected spectrum width is precise more the inclination
tolerance is small. Make sure that the incident angle is set at 0
degrees for an efficient experiment.
▶The filters usage temperature of environment is set at 23°C (Celsius),
more the temperature is high more the center wavelength switch to
the long-wavelength side.
▶Therefore a high precision set up is required for obtaining an
efficient experiment each filter thickness is different.
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
50±0.5 t45
VPF-50S-10-45-41000 410±2 10±2 >45
VPF-50S-10-45-42000 420±2 10±2 >45
VPF-50S-10-45-43000 430±2 10±2 >45
VPF-50S-10-45-44000 440±2 10±2 >45
VPF-50S-10-50-45000 450±2 10±2 >50
VPF-50S-10-50-46000 460±2 10±2 >50
VPF-50S-10-50-47000 470±2 10±2 >50
VPF-50S-10-50-48000 480±2 10±2 >50
VPF-50S-10-50-49000 490±2 10±2 >50
VPF-50S-10-55-50000 500±2 10±2 >55
VPF-50S-10-55-51000 510±2 10±2 >55
VPF-50S-10-55-52000 520±2 10±2 >55
VPF-50S-10-55-53000 530±2 10±2 >55
VPF-50S-10-55-54000 540±2 10±2 >55
VPF-50S-10-60-55000 550±2 10±2 >60
VPF-50S-10-60-56000 560±2 10±2 >60
VPF-50S-10-60-57000 570±2 10±2 >60
VPF-50S-10-60-58000 580±2 10±2 >60
VPF-50S-10-60-59000 590±2 10±2 >60
VPF-50S-12-60-60000 600±2 12±2 >60
VPF-50S-12-60-61000 610±2 12±2 >60
VPF-50S-12-60-62000 620±2 12±2 >60
VPF-50S-12-60-63000 630±2 12±2 >60
VPF-50S-12-60-64000 640±2 12±2 >60
VPF-50S-12-60-65000 650±2 12±2 >60
Compatible Optic Mounts
CHA-60
660nm − 900nm
Part Number
Central
wavelength
[nm]
Half
bandwidth
[nm]
Maximum
transmittance
[%]
VPF-50S-12-60-66000 660±2 12±2 >60
VPF-50S-12-60-67000 670±2 12±2 >60
VPF-50S-12-60-68000 680±2 12±2 >60
VPF-50S-12-60-69000 690±2 12±2 >60
VPF-50S-12-65-70000 700±2 12±3 >65
VPF-50S-12-65-71000 710±3 12±3 >65
VPF-50S-12-65-72000 720±3 12±3 >65
VPF-50S-12-65-73000 730±3 12±3 >65
VPF-50S-12-65-74000 740±3 12±3 >65
VPF-50S-12-65-75000 750±3 12±3 >65
VPF-50S-12-65-76000 760±3 12±3 >65
VPF-50S-12-65-77000 770±3 12±3 >65
VPF-50S-12-65-78000 780±3 12±3 >65
VPF-50S-12-65-79000 790±3 12±3 >65
VPF-50S-12-65-80000 800±3 12±3 >65
VPF-50S-12-65-81000 810±3 12±3 >65
VPF-50S-12-65-82000 820±3 12±3 >65
VPF-50S-12-65-83000 830±3 12±3 >65
VPF-50S-12-65-84000 840±3 12±3 >65
VPF-50S-12-65-85000 850±3 12±3 >65
VPF-50S-12-65-86000 860±3 12±3 >65
VPF-50S-12-65-87000 870±3 12±3 >65
VPF-50S-12-65-88000 880±3 12±3 >65
VPF-50S-12-65-89000 890±3 12±3 >65
VPF-50S-12-65-90000 900±3 12±3 >65
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
B257

Optics & Optical Coatings
Catalog
Notch Filter NF Code W3210
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Notch filter is a filter that cuts only a specific wavelength. It is not the same as the interference filter
which transmits only a specific wavelength. By adopting a dielectric multilayer coating, very high
stability and environmental resistance has been obtained.
◦Four types is available for 355nm, 532nm, 633nm and 1064nm.
◦Because it is a dielectric multilayer coating, there is almost no absorption of light by the coating.
◦By using in combination with other filters, it can also be used as filter sets for Bio-Imaging.
Specifications
Material
Synthetic fused silica, BK7
Coating
Dielectric multi-layer coating
Incident angle 0°
Surface Quality (Scratch−Dig) 60−40
Clear aperture
90% of Actual Aperture
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Schematic
Front surface:
Dielectric multi-layer coating
Guide
▶Please contact our International Sales Division for customized
products. (customized on outer diameter, wavelength characteristic,
etc.)
Attention
▶If the light incident angle is other than 0 degrees, the transmittance
characteristics may be changed. In the normal situation, when the
incident angle changes, the wavelength may shift to the longwavelength
side.
▶Notch filter has a durable structure to the high temperature, but if it
is put in the vicinity of the lamp that emits a powerful heat ray (e.g.
mercury lamp), it will not be guaranteed for the performance of the
filter and safety.
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Outline Drawing
φ25 +0
−0.1
Rear surface:
Dielectric multi-layer coating
(in mm)
●Tolerance
Chamfer Ridge line 4 27±2.7 320 − 335 375 − 500 Average 90 Synthetic fused silica
NF-25C05-40-532 532 >4 40±4.0 400 − 502 562 − 700 Average 90 BK7
NF-25C05-47-633 633 >4 47±4.7 475 − 597 669 − 850 Average 90 BK7
NF-25C05-80-1064 1064 >4 80±8.0 800 − 1004 1124 − 1400 Average 90 BK7
Material
B258
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Typical Transmittance & Optical Density Data
OD: Optical Density T: Transmission
NF-25C05-27-355
100
0
Application
Systems
T [%]
80
60
40
20
Half bandwidth
Transmission
Optical Density
1
2
3
4
OD
Optics &
Optical
Coatings
Holders
0
320 340 360 380 400 420 440 460
[nm]
5
Bases
NF-25C05-40-532
100
80
0
2
Manual
Stages
Actuators
T [%]
60
40
Half bandwidth
4
6
OD
Motoeized
Stages
20
8
0
10
400 450 500 550 600 650 700
[nm]
Light
Sources
Index
NF-25C05-47-633
100
80
0
2
Guide
T [%]
60
40
Half bandwidth
4
6
OD
Mirrors
Beamsplitters
20
0
10
500 550 600 650 700 750 800 850
[nm]
Transmission
Optical Density
8
Polarizers
Lenses
Multi-Element Optics
NF-25C05-80-1064
100
0
Filters
Prisms
80
1
Substrates/Windows
T [%]
60
40
Half bandwidth
2
3
OD
Optical Data
Maintenance
20
Transmission
Optical Density
4
0
5
800 850 900 950 1000 1050 1100 1150 1200 1250 1300 1350 1400
[nm]
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
B259

Optics & Optical Coatings
Catalog
Polymer Notch Filter Custom-made Code W3211
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
It is a polymer made ​notch filter that can be used for fluorescence microscopy, such as Raman
spectroscopy. It blocks sharply so as not to transmit only a specific wavelength. Achieved that
wavelength in the vicinity is a high transmittance. It is developed a notch filter of new ideas that is
not using expensive materials and glasses, achieved comparable half-width and OD with the
coated optics. It is a product in which novel new usage is possible. For technical matters related
to this product, Hamamatsu Photonics Co., Ltd. has applied a patent application.
◦Since the substrate is not necessary, it realized 0.3mm thickness. And it realize space saving by combining with other
elements.
◦Because it is a transparent synthetic polymer material which is chemically stable, it can be equivalent to the treatment of the
optical element product.
◦It can be used for Raman spectroscopy, and the excitation light cut of the fluorescence microscope.
◦It is also available a filter with frame for easy handling.
Specifications
Material
Macromolecule
(Block copolymers of Poliestireno-Acrylic resin)
Coating
Uncoated
Incident angle 0°
Ripple
≦2.5%
Guide
▶If irregular shape or a large size is required, please consult our
International Sales Division.
▶For the custom wavelength filter which is not listed in catalog,
please contact our International Sales Division.
Attention
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Schematic
Front surface: Uncoated
Laser wavelength
Rear surface: Uncoated
Blocking
Film (Macromolecule)
▶Because it is a flammable material, it can not be used for highpower
laser.
▶If it is used with tilted the filter, it will not be able to cut off the light
of wavelength cut. If the incident angle increases, the cut wavelength
is shifted to the short wavelength side.
▶As filter is thin, it may surface distribution will occur or cutting off
wavelength is changed if it is used in a state of being distorted and
bent.
▶Because material is so soft it is easy to be scratched if rubbed with
a cloth or paper, use an air duster to blow off the dust or dirt.
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Outline Drawing
●Film type
●Mount type
(in mm)
Specifications (Reference data)
Blocking
wavelength
[nm]
Optical
Density
OD
Half
bandwidth
[nm]
Long wavelength
Ranges
transmission
rate
[%]
transmission
rate at 400nm
[%]
Short wavelength
Ranges
[%]
Maintenance
φ20±0.2
φ25±0.1 φ17
488 >4 Average 82 > about 50 Ave about 60
532 >4 Average 82 > about 40 Ave about 60
633 >4 Average 82 > about 30 Ave about 60
Selection Guide
about 0.3
5±0.2
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
■Blocking wavelength 488nm
0
Typical Transmittance & Optical Density Data
■Blocking wavelength 532nm
0
OD: Optical Density T: Transmission
■Blocking wavelength 633nm
0
Etalon
1
2
1
2
1
2
OD
3
4
OD
3
4
OD
3
4
5
5
5
6
6
6
7
400
7
500 600 700 800 400
7
500 600 700 800 400
500 600 700 800
λ [nm]
λ [nm]
λ [nm]
100
100
100
80
80
80
T[%]
60
40
T[%]
60
40
T[%]
60
40
20
20
20
0
400
500 600 700 800
λ [nm]
0
400
0
500 600 700 800 400
λ [nm]
500 600 700 800
λ [nm]
B260
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Contact Sheet
Catalog
Code
W3218
Filter Case
Please contact to our sales division when convenient filter case is
required for storage of filter products in the catalog.
Application
Systems
Optics &
Optical
Coatings
Contact sheet for Custom-made Color Filter
Affiliation
(Organization Name)
Department
Specifications
Part Number
Name
TEL FAX E-mail
Compatible
Optics Size
□ To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Maximum
number of
filters
■Estimation ■Order
Date
Country/Address
Name &
Designation
Drawing Number
Estimate □ Yes: by Date □ No
Desired
Delivery Date
Budget
JP Yen
Mount □ Yes □ No Pieces
Central
wavelength
nm
Half
bandwidth
nm
Transmittance Range
nm Optical Density
Size
[mm]
Case-25C-20-SET φ25mm 20 pieces (W)240 × (D)100 × (H)67
Case-50C-15-SET □50mm 15 pieces (W)240 × (D)100 × (H)67
(Tentative name is okay)
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Outside
dimension
φA
φA ≦ φ50mm
b
a
a ≦ 50mm
b ≦ 50mm
φA
a
b
mm
mm
mm
Prisms
Substrates/Windows
Optical Data
Maintenance
* Write more detailed specifications here. (Rough illustration is acceptable.)
Selection Guide
ND Filters
Diffusers
Colored Glass
Filters
Dielectric Filters
Etalon
Others
Sigma Koki Co., Ltd.
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B261

Optics & Optical Coatings
Etalon
Custom-made
Catalog
Code
W3122
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Etalon is made of two parallel high reflecting mirrors and used as a narrow band filter.
Widely used in astronomical observation and interferometer measurement.
◦The etalons are customized according to your application; we are proposing 4 basic choices. Please see the illustrations.
◦Please fill your requirement details onto the following inquiry form; our sales division personnel will contact you for a
quotation.
Specifications
Material
Synthetic fused silica
Surface flatness of substrate

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P r i s m s

P r i s m s
I N D E X
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Prisms Selection Guide
By processing the various forms of glass, the prism produces a special effect due to refraction.
Since there is no angular offset that after manufacture, it is also used as a reference angle for
accurate angle.
Application Products Sample of use
Reflecting light
Right Angle Prisms
(RPB / RPSQ)
B266
Substitute of the mirror,
Reflector of the compact
optical system.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Replacing
the light
Corner Cube Prisms
(CCB)
B272
Hollow Retro-reflectors
(RCCB)
B273
Interferometer, Reflector, such
as distance measurement
Manual
Stages
Actuators
Dispersion
wavelength
Equilateral Dispersing Prisms
(DPB/DPSQ/DPTIH11)
B274
Spectroscopic measurement,
Dispersion compensation
Motoeized
Stages
Light
Sources
Special effects
Dove Prisms (DOP)
B276
Penta Prisms (PPB)
B277
Pellin–Broca prism (PBPQ)
B278
Rotate or flip the image
Index
Guide
Mirrors
Beamsplitters
About Refraction and Critical angle
When the light is incident oblique angle on the glass, causing the refracted at the interface of the glass and air, the traveling
direction of the light will change.
At this time, emission angle toward the side of the glass is smaller than the incident angle of the air.
If the refractive index of the glass can be seen, this relationship can be determined from Snell’s law.
Then, even if the incident light is emitted at the same angle as the angle θb shown below the boundary surface of the glass,
through the same path at all, it will be emitted to the air incident angle θa.
However, if it will be incident at a large angle with the boundary surface from the side of the glass, then emitted to the air-side
angle will exceed 90 degrees. It is called “critical” the emission angle of the air side when 90 degrees. It is called to be this
angle “critical angle”.
When the incident light from the glass boundary at an angle larger the critical angle θr, the light will not come out to the air
causing total reflection.
Conditions for refraction
Air
Refractive index n=1
Incident angle
Glass
Refractive index n
θa
Outgoing angle
θb
Reflecting light
Conditions for Critical
Air
Refractive index n=1
Glass
Refractive index n
Critical
angle
θr
Totalreflection
range
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
45 Degrees Angle
Retro-reflectoes
Equilateral
Dispersing Prisms
Others
Snell’s law
Conditions for Critical angle
sin θa = n sin θb
sin 90° = n sin θr
Refractive index nd
Critical angle θr
BK7
1.517
41.2°
Synthetic fused silica
1.458
43.3°
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B265

Optics & Optical Coatings
Coated Right Angle Prisms RPB1 − 5
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Right-angle prism can be used as a substitute for the mirror.
Independent even without a special holder, and since the choice of a variety of installation methods,
it is useful if you want to reduce the size of the device. In addition, with very high accuracy and
precision angle of the prism surface, it can also be used directly bonded to machined parts.
◦RPB1 to 3 are used as a substitute for the mirror reflection of the slope.
RPB1 is coated with anti-reflection coating with two surfaces which the light is incident and emitted by using the critical
angle prism reflection of the slope and the surface.
RPB2 are coated with reflective coating (Al+MgF2) on the surface of slope.
RPB3 are the product which does not pass through the light reflected by the inclined surface of the interior of the prism,
and there are three types.
◦RPB4 can be used when you want to use the reflection of the two surfaces sandwiching the apex angle (right angle).
RPB4 can be used as to when observe two opposite directions at the same time, or as a prototype orthogonal basis and
so on.
◦RPB5 are used in applications where light back at the same angle as the incident light with respect to the horizontal
direction. And double pass interferometer is used in (such as self-correlator) auto correlator.
Actuators
Motoeized
Stages
Light
Sources
Index
Specifications
Material
BK7 (Refractive index nd=1.517)
Surface flatness of substrate λ/4
Angle accuracy ±1′(90° or 45°)
Coating
Broadband multi-layer AR coating for Visible
Protected Aluminum (Al+MgF2)
Wavelength Range
400 − 700nm
Surface Quality (Scratch−Dig) 40−20
Clear aperture
90% of Circle or Ellipse to Actual
dimension for entrance and exit surface
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
45 Degrees Angle
Retro-reflectoes
Equilateral
Dispersing Prisms
Others
Outline Drawing
B +0
−0.1
A
+0
−0.15
45°
90°
A +0
−0.15
Chamfer Ridge line

Catalog
Code
W3123
Schematic
45° with a coat
RPB1
Uncoated
(total reflection if more than
critical angle)
Multi-layer anti-reflection
coatings
Ground
Part Number
A = B
Laser Damage Threshold*
[mm]
[J/cm 2 ]
RPB1-05-550 5 4
RPB1-07-550 7 4
RPB1-10-550 10 4
RPB1-12.7-550 12.7 4
RPB1-15-550 15 4
RPB1-20-550 20 4
Application
Systems
Optics &
Optical
Coatings
Holders
Multi-layer anti-reflection
coatings
RPB1-25-550 25 4
RPB1-25.4-550 25.4 4
RPB1-30-550 30 4
Bases
RPB2
AL+MgF2 coated
Ground
RPB2-05-550 5 0.25
RPB2-07-550 7 0.25
RPB2-10-550 10 0.25
Manual
Stages
Multi-layer anti-reflection
coatings
RPB2-12.7-550 12.7 0.25
RPB2-15-550 15 0.25
Actuators
Multi-layer anti-reflection
coatings
RPB2-20-550 20 0.25
RPB2-25-550 25 0.25
RPB2-25.4-550 25.4 0.25
Motoeized
Stages
RPB3
Ground
Uncoated
Uncoated
AL+MgF2 coated
RPB2-30-550 30 0.25
RPB3-05-550 5 0.25
RPB3-07-550 7 0.25
RPB3-10-550 10 0.25
RPB3-12.7-550 12.7 0.25
Light
Sources
Index
RPB3-15-550 15 0.25
RPB3-20-550 20 0.25
RPB3-25-550 25 0.25
Guide
RPB3-25.4-550 25.4 0.25
RPB3-30-550 30 0.25
Mirrors
RPB4
Ground
Uncoated
AL+MgF2 coated
AL+MgF2 coated
RPB4-05-550 5 0.25
RPB4-07-550 7 0.25
RPB4-10-550 10 0.25
RPB4-12.7-550 12.7 0.25
RPB4-15-550 15 0.25
RPB4-20-550 20 0.25
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
RPB4-25-550 25 0.25
Filters
RPB4-25.4-550 25.4 0.25
RPB4-30-550 30 0.25
Prisms
RPB5
Ground
Uncoated
(total reflection if more than
critical angle)
Uncoated
(total reflection if more than
critical angle)
Multi-layer anti-reflection
coatings
RPB5-05-550 5 4
RPB5-07-550 7 4
RPB5-10-550 10 4
RPB5-12.7-550 12.7 4
RPB5-15-550 15 4
Substrates/Windows
Optical Data
Maintenance
RPB5-20-550 20 4
RPB5-25-550 25 4
Selection Guide
RPB5-25.4-550 25.4 4
RPB5-30-550 30 4
* Laser pulse width 10ns, repetition frequency 20Hz
45 Degrees Angle
Retro-reflectoes
Equilateral
Dispersing Prisms
Others
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B267

Optics & Optical Coatings
Right Angle Prisms
RPB/RPSQ
Catalog
Code
W3124
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
45 Degrees Angle
Retro-reflectoes
Equilateral
Dispersing Prisms
Others
It is a prism which is not coated and can be used in various applications, such as total internal reflection
critical angle and wavelength dispersion. In addition, because it is possible to various coating on prism,
it is possible to produce a prism optical element of which the wavelength customer use.
◦In terms of angle tolerance and surface accuracy, there are three types for standard, simple and high-precision. And,
there are two types of materials such BK7, and synthetic fused silica for using in UV region.
◦With very high accuracy and precision angle of the prism surface, it can also be used directly bonded to machined parts.
◦Independent even without a special holder, and since the choice of a variety of installation methods, it is useful as a
substitute for the small mirror.
Schematic
Uncoated
(total reflection if more than critical angle)
Outline Drawing
B +0
−0.1
A
+0
−0.15
45°
BK7 / Standard
90°
Uncoated
A +0
−0.15
Ground
Uncoated
(in mm)
Chamfer Ridge line
Not chamfered (A≦4)

BK7 / Simple
Part Number
A = B
[mm]
Surface flatness
of substrate
Angle accuracy
90° 45°
Surface Quality
(Scratch−Dig)
RPB-01-2L 1 λ/2 ±3′ ±3′ 20−10
RPB-02-2L 2 λ/2 ±3′ ±3′ 20−10
RPB-03-2L 3 λ/2 ±3′ ±3′ 20−10
RPB-04-2L 4 λ/2 ±3′ ±3′ 20−10
RPB-05-2L 5 λ/2 ±3′ ±3′ 20−10
RPB-07-2L 7 λ/2 ±3′ ±3′ 20−10
RPB-10-2L 10 λ/2 ±3′ ±3′ 20−10
RPB-15-2L 15 λ/2 ±3′ ±3′ 20−10
RPB-20-2L 20 λ/2 ±3′ ±3′ 20−10
RPB-25-2L 25 λ/2 ±3′ ±3′ 20−10
RPB-30-2L 30 λ/2 ±3′ ±3′ 20−10
RPB-40-2L 40 λ/2 ±3′ ±3′ 20−10
RPB-50-2L 50 λ/2 ±3′ ±3′ 20−10
BK7 / High-precision
Part Number
A = B
[mm]
Surface flatness
of substrate
Angle accuracy
90° 45°
Surface Quality
(Scratch−Dig)
RPB-05-10H 5 λ/10 ±5″ ±30″ 10−5
RPB-07-10H 7 λ/10 ±5″ ±30″ 10−5
RPB-10-10H 10 λ/10 ±5″ ±30″ 10−5
RPB-15-10H 15 λ/10 ±5″ ±30″ 10−5
RPB-20-10H 20 λ/10 ±5″ ±30″ 10−5
RPB-25-10H 25 λ/10 ±5″ ±30″ 10−5
RPB-30-10H 30 λ/10 ±5″ ±30″ 10−5
RPB-40-10H 40 λ/10 ±5″ ±30″ 10−5
RPB-50-10H 50 λ/10 ±5″ ±30″ 10−5
Synthetic fused silica / Standard
Part Number
A = B
[mm]
Surface flatness
of substrate
Angle accuracy
90° 45°
Surface Quality
(Scratch−Dig)
RPSQ-05-4M 5 λ/4 ±1′ ±1′ 10−5
RPSQ-07-4M 7 λ/4 ±1′ ±1′ 10−5
RPSQ-10-4M 10 λ/4 ±1′ ±1′ 10−5
RPSQ-12.7-4M 12.7 λ/4 ±1′ ±1′ 10−5
RPSQ-15-4M 15 λ/4 ±1′ ±1′ 10−5
RPSQ-20-4M 20 λ/4 ±1′ ±1′ 10−5
RPSQ-25-4M 25 λ/4 ±1′ ±1′ 10−5
RPSQ-25.4-4M 25.4 λ/4 ±1′ ±1′ 10−5
RPSQ-30-4M 30 λ/4 ±1′ ±1′ 10−5
Synthetic fused silica / Simple
Part Number
A = B
[mm]
Surface flatness
of substrate
Angle accuracy
90° 45°
Surface Quality
(Scratch−Dig)
RPSQ-05-2L 5 λ/2 ±3′ ±3′ 20−10
RPSQ-07-2L 7 λ/2 ±3′ ±3′ 20−10
RPSQ-10-2L 10 λ/2 ±3′ ±3′ 20−10
RPSQ-15-2L 15 λ/2 ±3′ ±3′ 20−10
RPSQ-20-2L 20 λ/2 ±3′ ±3′ 20−10
RPSQ-25-2L 25 λ/2 ±3′ ±3′ 20−10
RPSQ-30-2L 30 λ/2 ±3′ ±3′ 20−10
RPSQ-40-2L 40 λ/2 ±3′ ±3′ 20−10
RPSQ-50-2L 50 λ/2 ±3′ ±3′ 20−10
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
45 Degrees Angle
Retro-reflectoes
Equilateral
Dispersing Prisms
Others
Synthetic fused silica / High-precision
Part Number
A = B
[mm]
Surface flatness
of substrate
Angle accuracy
90° 45°
Surface Quality
(Scratch−Dig)
RPSQ-05-10H 5 λ/10 ±5″ ±30″ 10−5
RPSQ-07-10H 7 λ/10 ±5″ ±30″ 10−5
RPSQ-10-10H 10 λ/10 ±5″ ±30″ 10−5
RPSQ-15-10H 15 λ/10 ±5″ ±30″ 10−5
RPSQ-20-10H 20 λ/10 ±5″ ±30″ 10−5
RPSQ-25-10H 25 λ/10 ±5″ ±30″ 10−5
RPSQ-30-10H 30 λ/10 ±5″ ±30″ 10−5
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B269

Optics & Optical Coatings
Knife Edge Right Angle Prisms
KRPB
Catalog
Code
W3125
It is a prism which was sharply polished the right angle ridge line between the two bottom surfaces.
Application
Systems
Optics &
Optical
Coatings
Holders
◦With a No coat type (KRPB), when using light in the range of 0±5.7 degrees angle of incidence to the slope surface, the
total reflection critical angle is obtained.
Specifications
Material
Ridge Processing
Clear aperture
BK7 (Refractive Index nd=1.517)
Right-angle ridge: Knike edge (Not chamfered)
Other ridge: Chamfered
90% of Circle or Ellipse to Actual dimension for
entrance and exit surface
Bases
Guide
Manual
Stages
▶It is available other than the products which listed in the catalog.
Attention
Actuators
Motoeized
Stages
Light
Sources
Index
Schematic
Ground
Knife edge
Uncoated
(total reflection if more than critical angle)
Al+MgF2 coated
Uncoated
(total reflection if more than critical angle)
Al+MgF2 coated
Uncoated
▶Knife-edge ridge right angle is very easy missing. So please carefully
handled so as not to come into contact with others.
▶Part of the knife edge will not be able to wipe the lens, such as paper.
Use an air blower for the small dusts.
▶A dimension measured is slightly shorter than the catalog size
because it contains chamfer dimension. Dimensional tolerances are
defined by the sides of the triangle with the slope and two bottom
surface.
▶KRPB (with a no coat), the reflectance of the reflection above the
critical angle is nearly 100%, there is a loss of about 8% in the
reflection of the input and the exit surface of the prism.
▶Sometimes when dirt or fingerprints on the surface with no coating,
total reflection will not happen any more than the critical angle. Do
not contact anything on the no coated surface.
Guide
Mirrors
Outline Drawing
(in mm)
Specifications
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
B +0
−0.1
A
+0
−0.15
45°
90°
A +0
−0.15
Chamfered, the entire circumference
of the ridge crest except right angles

Knife Edge Right Angle Prisms (with a Coat)
KRPB4
Catalog
Code
W3125
It is a prism which was sharply polished the right angle ridge line across the bottom of the two sides.
It is a prism which was sharply polished the right angle ridge line between the two bottom surfaces.
◦With a coat type (KRPB4), it can be used such as divergent light or light incident angle wider than ±5.7 degrees, the
observation system is suitable for a wide field of view.
Specifications
Material
Ridge Processing
Coating
Laser Damage Threshold
Clear aperture
Guide
BK7 (Refractive Index nd=1.517)
Right-angle ridge: Knike edge (Not chamfered)
Other ridge: Chamfered
2-surface that make up the right angle: Al+MgF2
(Protected Aluminum), Obliquity: Uncoating
0.25J/cm 2
(Laser pulse with 10ns, repetition frequency 20Hz)
90% of Circle or Ellipse to Actual dimension for
entrance and exit surface
▶It is available other than the products which listed in the catalog.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Schematic
Ground (Upper and lower surfaces
Uncoated
Al+MgF2 coated
Al+MgF2 coated
Knife edge
Attention
▶Knife-edge ridge right angle is very easy missing. So please carefully
handled so as not to come into contact with others.
▶Part of the knife edge will not be able to wipe the lens, such as paper. Use
an air blower for the small dusts.
▶A dimension measured is slightly shorter than the catalog size because it
contains chamfer dimension. Dimensional tolerances are defined by the
sides of the triangle with the slope and two bottom surface.
▶KRPB4 is reflected in a wide angle than the degree of ±5.7 by Al coat, however,
its reflectivity (about 12% surface 1) is lower than 23% or more KRPB.
Motoeized
Stages
Light
Sources
Index
Guide
Outline Drawing
A
+0
−0.15
45°
90°
A +0
−0.15
(in mm)
Specifications
Part Number
A = B
[mm]
Surface flatness
of substrate
Angle accuracy Surface Quality
(Scratch−Dig)
90° 45°
KRPB4-10-550 10 λ/4 ±1′ ±1′ 40−20
KRPB4-15-550 15 λ/4 ±1′ ±1′ 40−20
Mirrors
Beamsplitters
Polarizers
Lenses
B +0
−0.1
Chamfered, the entire circumference
of the ridge crest except right angles

Optics & Optical Coatings
Corner Cube Prisms
CCB
Catalog
Code
W3126
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
The corner cube can reflect the incident light back its original source. It is used in length measurement system
as its reflector. It has been designed for measuring the distance between the moon and the earth, when Apollo
spaceship reached the moon, corner cube was set on the surface of the moon for scientific research use.
◦The corner cube is fabricated under high precision process; it can assure the reflection of high accuracy light.
◦In measurement process, even the corner cube light is slightly inclined; the reflective light inclination stays unchanged and
reflects back to the measurement system.
◦To assure a low light power lost, we are also offering AR optical coating CCB-M.
Specifications
Material
BK7
Accuracy on the side of the aperture λ/4
Angular deviation of beam

Hollow Retro-reflectors
RCCB
Catalog
Code
W3128
The hollow retro-reflector is similar to the corner cube; it reflects the incident light back to its
original source. This is made of a high precision assembly of 3 flat mirrors; insensitive of chromatic
dispersion of the refractive index of glass and the absorptive of glass.
◦The hollow is fabricated under high precision process; it can assure the reflection of high accuracy light.
◦Can be used at broad wavelength range from UV to IR.
◦Since there is no glass chromatic dispersion, the position of the back incident beam does not change in certain wavelength.
◦With a small polarization effects, it is recommended to use in multiple interferometer optical path.
Schematic
Aluminum Mirror
Mount
Specifications
Material
BK7
Material of frame Aluminum Finishing: Black anodized
Coating
Aluminum (No Protected Coating)
Laser Damage Threshold
0.25J/cm 2
(Laser pulse with 10ns, repetition frequency 20Hz)
Surface Quality
(Scratch−Dig)
40−20
Guide
▶We have specific holders designed for this hollow retro-reflector,
please ask our International Sales Division.
▶For high reflective type, we are proposing the corner cube CCB.
B272
Attention
▶The corner cube reflects light back to its source at high precision.
If the incident light position is slide from the incident center; the
reflected light will also be slide at the similar distance.
▶Reflection on aluminum mirror may have some polarization effects.
▶Avoid using optical cleaning tissue for the surface cleaning; there is
no protection layer on the top of the aluminum coating. Please use
air-blow type of cleaner.
▶The aluminum reflectance index is about 85% to 90%. The hollow
reflect on 3 surfaces, therefore the back incident light reflectance
performance is at 61% tp 73%.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Outline Drawing
E
●Tolerance
±0.2
(in mm)
Typical Transmittance Data R: Reflectance
Reflectance Data for Aluminum (surface reflection)
100
Polarizers
Lenses
Multi-Element Optics
A B
80
Filters
Part Number
φA
[mm]
D
C
φB
[mm]
C
[mm]
D
[mm]
RCCB-10 φ13 φ10 18 13 M10.85 P0.75
RCCB-20 φ25 φ20 25 20 M20.85 P0.75
RCCB-30 φ35 φ30 35 30 M30.85 P0.75
E
R [%]
60
40
20
0
200 400 600 800 1000 1200
[]
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
45 Degrees Angle
Retro-reflectoes
Equilateral
Dispersing Prisms
Others
Specifications
Part Number
Clear aperture
[mm]
Angular deviation of beam
[ ″]
Wavefront aberration
RCCB-10-10 φ8

Optics & Optical Coatings
Equilateral Dispersing Prisms
DPB/DPSQ/DPTIH11
Application
Systems
Optics &
Optical
Coatings
Holders
Equilateral dispersing prisms disperse a light into its different colors and are used for spectrum
analyzing experiments and instruments. Each colors in the light incident at an oblique angle to the
first face is bent in different angle by the difference of refractive index of the glass according to
wavelength and emerges as a spectrum from the opposite face.
◦The roof angle of 60 degrees causes the best combination of wide dispersion and low reflection losses. A glass with large
dispersive power or small Abbe’s number leads to large angular dispersion.
◦We offer both BK7 and fused silica for a selection of wavelength range from UV to near IR. We recommend a prism of BK7
if the light is not UV, because the angular dispersion of BK7 is larger than that of fused silica.
◦In case of DPTIH1, it has a large wavelength dispersion of the refractive index and can observe the spectrum efficiently.
Bases
Manual
Stages
Actuators
Specifications
Part Number DPB DPSQ DPTIH11
Material
BK7
Synthetic
fused silica
S-TIH11
equivalent
Refractive index nd 1.517 1.458 1.785
Minimum deviation 49.3° 46.8° 66.4°
Abbe number νd* 64.1 67.8 25.7°
Angle 60°±3′
Motoeized
Stages
Light
Sources
Index
Schematic
Surface flatness of substrate λ/10 λ/4
Surface Quality (Scratch−Dig) 20−10 40−20
Clear aperture
Circle or ellipse inscribed in a rectangular of
90% of the dimensions A and B
* Abbe number
nd − 1 nd: Refractivity of 587.6nm wavelenght
νd = nF: Refractivity of 486.1nm wavelenght
nF − nc nC: Refractivity of 656.3nm wavelenght
Guide
Guide
Mirrors
Uncoated
Uncoated
Ground
▶Fixed to the prism, Prism Holder (PLH) are available.
▶Other sizes are available upon production of the catalog.
Attention
C048
Beamsplitters
Polarizers
Lenses
Ground
Uncoated
▶Every edge of these prisms is chamfered (beveled) for chipping
prevention. The dimensions of these prisms are values not including
chamfer.
▶Be sure to wear laser safety goggles when checking optical path
and adjusting optical axis.
Multi-Element Optics
Filters
Outline Drawing
(in mm)
Prisms
Substrates/Windows
60°
A±0.2
Optical Data
B +0
−0.15
Maintenance
A±0.2
A±0.2
Chamfer Ridge line

Catalog
Code
W3129
BK7
Part Number
A = B
[mm]
DPB-20-10H 20
DPB-25-10H 25
DPB-30-10H 30
Synthetic fused silica
Part Number
A = B
[mm]
DPSQ-20-10H 20
DPSQ-25-10H 25
DPSQ-30-10H 30
Application
Systems
Optics &
Optical
Coatings
S-TIH11
Part Number
A = B
[mm]
DPTIH11-20-4H 20
DPTIH11-25-4H 25
DPTIH11-30-4H 30
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
45 Degrees Angle
Glass refractive index measurement method of minimum deviation
The refractive index of optical glass is accurately measured by the angle
measuring device called a goniometer.
Accurately measuring the refractive index for each wavelength with the
known wavelength of the emission spectrum of the lamp is emitted.
Wavelength dispersion of the refractive index is determined by the results
of this measurement.
Stage
Apex angle
Retro-reflectoes
Equilateral
Dispersing Prisms
Others
Emisson Lamp
Collimator
Minimum
deviation
Goniometor
Telescope
Compatible Optic Mounts
PLH / KKD / SHA
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B275

Optics & Optical Coatings
Dove Prisms
DOP
Catalog
Code
W3130
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
45 Degrees Angle
Retro-reflectoes
Equilateral
Dispersing Prisms
Others
Observe an image through the dove prism; you will see the image in inversion. Moreover, when you
turn the prism the image will be turning around 2 times. The dove prism is widely used in where
images inversion adjustment is needed.
◦This is made with high fabrication process; there is no light incident axis deviation.
◦The bore (A × B) of the length (D) has been designed and manufactured with high precision with no crack occur.
Schematic
Uncoated or Broadband multi-layer AR coating
Outline Drawing
Specifications
Part Number
Ground
D±0.2 45°
Ground
Uncoated
(total reflection if more than critical angle)
A±0.1
B±0.1
Uncoated or Broadband multi-layer AR coating
Ground
(in mm)
Chamfer Ridge line

Penta Prisms
Brewster dispersing littrow type prism
PPB
Custom-made
PPB
By reflecting twice in the mirror, it converts the image of the same object and erect a reflection image of mirror symmetry.
To avoid the image mirror symmetry, digitized before the camera, the light rays are bent at a right angle from the object
using a penta prism. It is also used as the basis of the device perpendicular by the laser positioning marking.
◦The incident angle of the prism is changed, then always emitted at 90 degrees for the incident light.
◦You can compact the whole better to use the internal reflection prism than using two mirrors of the angle deviation is not
generated.
Specifications
Catalog
Code
W3132
Material
BK7
Surface flatness of substrate λ/4
Angle tolerance ±3′
Surface Quality (Scratch−Dig) 40−20
Coating
Aluminum coating + Black Paint
MgF2 Single-layer anti-reflection coating
Clear aperture
Circle inscribed in a square of 90% of the
dimensions A
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Schematic
Observed image by penta prism
Observed image
Ground
Ground
Aluminum coating + Black Paint
MgF2 Single-layer anti-reflection coating
Aluminum coating + Black Paint
MgF2 Single-layer anti-reflection coating
Ground
Observed image by right-angle prism (mirror symmetry)
Observed image
Attention
▶There is a possibility to take the black ink will melt if wiped with a
solvent.
▶There is a loss with Aluminum coating of about 12% in the singleside,
and 23% in both side reflectance internal reflection of prism.
Input and output efficiency will be about 77%.
Outline Drawing
67.5
Specifications
Part Number
C±0.2
C±0.2
A±0.2
A±0.2
A±0.2
A
[mm]
(in mm)
Chamfer Ridge line
C0.2 − C0.3
(No chamfer obtuse angle)
C
[mm]
PPB-10-4 10 10.8
PPB-15-4 15 16.0
PPB-20-4 20 23.0
PPB-25-4 25 27.1
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Custom-made
This is the incident angle of the prism apex angle of the prism was adjusted so that the dispersion was Brewster angle p-polarized
light reflection angle is zero. It can be used as the wavelength selection prism used in the tunable laser resonator.
◦If linearly polarized light (polarized light P), is suppressed by the reflection loss for both the incident surface and the exit
surface, the incident beam has a high transmission efficiency can be obtained.
◦Brewster angle are computed from the refractive index with wavelength and use of glass material, it must be always
specified wavelength and using glass materials.
◦Brewster prism dispersion is coated littrow type to total reflection and transmission type.
◦When ordering, please use the Contact sheet in the catalog for the custom prism.
Schematic
Catalog
Code
W3133
Substrates/Windows
Optical Data
Maintenance
Selection Guide
45 Degrees Angle
Retro-reflectoes
Equilateral
Dispersing Prisms
Others
Transparent type
Uncoated
Apex angle 180° − 2 tan −1 n
Littrow type
Uncoated
Apex angle (180° − 2 tan −1 n)/2
Uncoated
Brewster angle
tan −1 n
Brewster angle
tan −1 n
Total reflection coating
P polarization
P polarization
P polarization
Compatible Optic Mounts
PLH / KKD / SHA
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B277

Optics & Optical Coatings
Pellin Broca prism
PBPQ
Catalog
Code
W3410
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
45 Degrees Angle
Retro-reflectoes
Equilateral
Dispersing Prisms
Others
Pellin Broca prism is a one of the dispersing Brewster prism and is characterized to emit in the direction of
perpendicular to the incident. When the incident at Brewster angle a YAG laser, it is possible to separate the
second harmonic generation beam (532nm) and the fundamental harmonic generation beam (1064nm).
◦Since it is using the Brewster angle and the critical angle, reflection losses will not occur, and a high transmittance can be
obtained.
◦Because there is no coating on the surface with Pellin Broca prism, it will also be used in high energy pulsed laser.
◦This is used to fit the (Brewster angle) angle of light intensity of the beam of light (invisible) of the YAG fundamental harmonic
generation and second harmonic generation beam reflected by the prism incident surface is minimized.
◦Make sure to use to be converted so as to be parallel to the bottom surface of the prism is the polarization direction of the
laser beam.
◦It can also be used for multi-wavelength oscillation laser spectroscopy of Argon laser.
Outline Drawing
Schematic
Uncoated
(total reflection if more than critical angle)
P polarization
θ1
B±0.2
Brewster
angle
θ2
A±0.2
(in mm)
Chamfer Ridge line
about C0.3
(No chamfer obtuse angle)
Uncoated
C
+0
−0.1
Uncoated
Brewster angle
P polarization
Brewster wavelength 1064nm 532nm
Incident angle (Brewster angle) [ ° ] 55.39 55.61
1064nm 54.93 54.71
532nm 56.30 56.08
Output angle [ ° ]
355nm 58.09 57.86
266nm 61.01 60.76
Specifications
Material
Synthetic fused silica
Design wavelength
706nm (intermediate of 532nm and 1063nm)
Angle accuracy

Light Pipe
LPB/LPSQ
Catalog
Code
W3212
It is an optical element for the illumination of uniform brightness distribution from a light having a
non-uniform brightness distribution. It is used for the illumination optical system for image
processing, and for converting the Gaussian profile to a top-hat profile.
◦It uses a hexagonal prism type with highly uniform efficiency than rectangular prism.
◦There is a line up of the compact type of 30mm and higher homogeneity of 75mm.
◦There are two materials such as BK7 for the visible to near-infrared region and synthetic fused silica for ultraviolet light.
◦Distance of opposite sides are available in two types of 5mm and 10mm.
Specifications
Material
BK7, Synthetic fused silica
Angle accuracy 120°±5′
Parallelism 5′
Coating
Uncoated (Including the sides)
Recommended incident numerical aperture (NA) >0.5
Surface Quality (Scratch−Dig)
60−40
Guide
▶Dedicated adapter (LPH-ADP) is available to attach the light pipe
to the lens holder and the mirror holder.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Schematic
Incident Light (Collection Light)
Total Internal Reflection
Attention
▶Since it is totally reflected at the side, reflectance may extremely
get worse if fingerprints and dirt are at the side. And it may cause
an unevenness in the brightness distribution of the emitted light.
▶It can not be used in collimated light. Please use by being incident
a large light of collection angle (divergence angle)
▶Anti-reflection coating is not attached on both end faces. For this
reason, by the reflection (4%) of both end faces, transmittance loss
of 7-8% occurs.
Light
Sources
Index
Guide
Outline Drawing
(in mm)
Mirrors
Emitted Light
(Uniform Distribution,
Scattered light)
A
120°±5′
L
Beamsplitters
Polarizers
Lenses
●Tolerance
Opposite side distance A±0.1
Rod length
L±0.3
Multi-Element Optics
Filters
Specifications
Part Number
Material
◦It can fix the light pipe without
contacting the polished surface
of the light pipe.
◦Because of the resin attached,
scratches can not occur to the
light pipe.
Opposite side distance
A
[mm]
Rod length
L
[mm]
Outline Drawing
surface flatness
of polished surface
LPB-05L30 BK7 5 30 λ
LPB-10L75 BK7 10 75 3λ
LPSQ-05L30 Synthetic fused silica 5 30 λ
LPSQ-10L75 Synthetic fused silica 10 75 3λ
Light pipe adapter|LPH-ADP
This is the adapter for fixing the light pipe (LPB / LPSQ) and attaching to the mirror holder and lens holder.
φB
Catalog
Code
8 6 Light pipe retaining screw
W3217
φA
(in mm)
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
45 Degrees Angle
Retro-reflectoes
Equilateral
Dispersing Prisms
Others
C
Specifications
Part Number
LPH-ADP-05
LPH-ADP-10
Compatible optics
LPB-05L30, LPSQ-05L30
LPB-10L75, LPSQ-10L75
Part Number
22
φA
[mm]
M4P=0.7 depth
φB
[mm]
C
[mm]
LPH-ADP-05 φ20 φ16 9
LPH-ADP-10 φ30 φ20 14
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B279

Optics & Optical Coatings
Parabolic lens of internal reflection type
CPC
Catalog
Code
W3213
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Parabolic lens of internal reflection type is an optical element that, with incident lights from
various directions reflected at the streamlined side surface, can collect the lights on the emitting
end surface. It is used as a collector of solar cells.
◦If it is the parallel light of 25° or less as an incident angle, it is possible to collect efficiently the light at the emitting end
surface even though the incident from any directions occurs.
◦Since it is used the internal reflection of the glass, the configuration can be simplified compared with the lens system.
◦By using the press molding technique of the glass lens, it achieved both high performance and low cost.
Specifications
Material
B270 ® equivalent
Coating
Uncoated
Allowable acceptance angle 25°
Surface Quality (Scratch−Dig)
Both end surfaces: 80-50
Side surface (non-spherical): 160-50
* B270® is a registered trademark of SCHOTT AG.
Guide
▶It is available for the production of anti-reflection coating on both
end surfaces on demand.
▶Other sizes are available excepting catalog products.
Light
Sources
Index
Guide
Schematic
Input Light Area
25°
Attention
▶Since it is totally reflected at the side (non-spherical), reflectance
may extremely get worse if fingerprints and dirt are at the side.
▶The reflectance of the side is 99% or more, but since anti-reflection
coating is not applied in the incident surface and emitting surface,
the reflection loss of about 4% occurs.
▶Light emitted from the end surface diverges largely and randomly
without condensing to one point. Therefore, it can not be used for
the application of the focused beam and collimated beam.
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Polished surface
(Plano)
Polished surface
(Plano)
Glossy surface
(Aspheric)
Outline Drawing
φ14.24±0.2
29.02±0.2
φ4.34±0.1
(in mm)
Filters
Device
Prisms
Formula for Aspheric
Substrates/Windows
Optical Data
Specifications
Part Number
CPC-14.24C29.02-P
Cx 2
Z(x)1 a 2 x 2 a 4 x 4 a 6 x 6 a 8 x 8 a 10 x 10 a 12 x 12
√ 1−1KC2 x 2
Maintenance
Coefficient
Numerical value
C −0.00661615
K 21.98945555
Selection Guide
45 Degrees Angle
a 2
a 4
a 6
6.634803136×10 −4
−3.044342187×10 −6
6.004115152×10 −9
Retro-reflectoes
Equilateral
Dispersing Prisms
Others
a 8
a 10
a 12
−1.208582175×10 −11
1.189971496×10 −14
−5.290757204×10 −18
B280
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Prism Sheet
PRS
Catalog
Code
W3214
As an optical device for the LCD TV and the display of the mobile terminal, it is used when changing
the incident direction or diffusing a light source that there is directional.
◦Since the prism is processed directly to an acrylic plate of 2mm thickness, the performance is stable and not easily
deformed.
◦There are two types of 0.03mm and 0.05mm pitch of the prism line.
◦It can also be used as a Fresnel prism (prism plane).
Application
Systems
Optics &
Optical
Coatings
Specifications
Material
CLAREX
Holders
Refractive Index 1.49
Tip Angle 45°
Bases
* CLAREX is a registered trademark of Nitto Jushi Kogyo Co., Ltd.
Guide
Manual
Stages
▶It is available for the prism sheet other than 45 °.
▶It is also available for the production of prism sheet size on demand.
▶The prism surface looks jagged when observing the reflected light.
(Reflection that looks pretty is a real surface)
Attention
Actuators
Motoeized
Stages
Schematic
Scattering Light Vertical output Light
45°
▶There is a directional nature in the prism sheet. If it is desired
to diffuse the light in two dimensions, please use crossed two
prism sheets.
▶There is a wavelength dispersion in the prism sheet. When using
a small width light source such as a fluorescent lamp. A chromatic
dispersion (Rainbow) occurs.
▶When strongly rubbing the processed surface of the prism, the
performance may be degraded. Please do not directly touch
the processed surface.
▶It can be deformed when exposed to high temperature of 80
degrees or more and the performance can be severely affected.
▶Do not use organic solvents such as acetone and chloroform.
Prism structure will be broken by dissolving.
▶It is delivered that protection sheet is affixed to the surface,
please use peel it off.
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Light with high directivity
Oblique incidence Light
Multi-Element Optics
Filters
Outline Drawing
(in mm)
Specifications
Prisms
Part Number
Prism pitch
[mm]
Substrates/Windows
100 +0
−0.2
PRS-100S02-0.05 0.05
PRS-100S02-0.03 0.03
Optical Data
Maintenance
Selection Guide
100 +0
−0.2 2±0.2
45 Degrees Angle
Retro-reflectoes
Equilateral
Dispersing Prisms
Others
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B281

Optics & Optical Coatings
Contact sheet
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
It is also available for custom fabrication of a prism of which size is different in the catalog.
Simply fill in the inquiry sheet specifications, and please send us a fax or by e-mail.
We will contact you by return and confirm the specification.
Contact sheet for Special Order for Prism
To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Affiliation
(Organization Name)
Department
Specifications
of Prism
Specifications
of Coating
Specifications
of Light Source
Used
Quantity
Selected from
standard
product
Custom
made
Products
Number
Name of
the prism
Presence or
absence of coating
Wavelength
Range
Output
or
Energy
Inicident angle
Material
Surface flatness
of substrate
λ=
■Estimation ■Order
Date
BK7 Synthetic fused silica Other ( )
No coating Single-layer AR coating Multi-layer AR coating Al only
Al+MgF 2 Dielectric coating Other ( )
W
Name
TEL FAX E-mail
Country/Adress
Name &
Designation
Drawing Number
Desired
Delivery Date
Budget
Angle accuracy Standard (±3) Other ( )
nm
θ= °
Type
Beam size
* Write more detailed specifications here. (Rough illustration is acceptable.)
(Tentative name is okay)
Estimate Yes: by Date No
JP Yen
If you are using a prism of
standard product, please
fill in the product number.
mm
J Pulse width s Repetition frequency Hz
Selection Guide
45 Degrees Angle
Retro-reflectoes
Equilateral
Dispersing Prisms
Others
Shape, other
Sigma Koki Co., Ltd.
In addition to the catalog product, it can also be produced the special specifications such as the following.
[Examples of custom prism]
■ Rhomboid Prisms ■ 45 degree right angle ■ Amici prism ■ Deflection angle prism ■ 3D degrees total internal
roof prism
reflection prism
θ
n−1θ
30°
■ 45 degrees deflection
angle prism
■ Prism coupler ■ Schmidt prism ■ Penta Dach prism
Dach
45°
Dach
45°
B282
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Substrates & Windows
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Substrates & Windows
I N D E X
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Substrates & Windows Selection Guide
Substrates
Uncoated optical glasses (substrates) used for mirrors or beamsplitters.
If you want to construct mirrors or beamsplitters with custom specification, you will be able to
apply custom coating to the standard substrates.
Applications
Substrate to adapt
Application
Systems
Optics &
Optical
Coatings
Mirrors
Optical Flats (OFB/OFSQ/Others)
Optical Parallels (OPB/OPSQ/OPSQK)
B287
B292
Holders
Bases
Half mirrors
Beamsplitters
Optical Parallels (OPB/OPSQ/OPSQK)
Wedged Substrates (WSB/WSSQ/WSSQK)
B292
B300
Manual
Stages
Windows
Optical Parallels (OPB/OPSQ/OPSQK)
Wedged Substrates (WSB/WSSQ/WSSQK)
B292
B300
Actuators
Concave mirrors
(Laser cavity mirrors)
Concave Mirror Substrates (TCBS/LCBS)
B304, B308
Motoeized
Stages
Light
Sources
Test plates
Interferometer reference mirrors
Optical Flats (HMPQP/HMPZP)
Master Optics
B312
B314
Index
High power laser mirrors
X-ray mirrors
Low scattering substrate (OPSQSP/WSSQSP)
B286
Guide
Mirrors
Beamsplitters
Windows
Windows for the optical instrument to be used when light is passed through the opposite side of
the partition or inside of the vacuum chamber.
Materials used to window changes depending on the wavelength used. Since there are advantages
and disadvantages depending on the material, please check the properties.
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
ZnSe OPZS
Germanium OPGE
B321
B324
Substrates/Windows
Optical Data
Maintenance
Silicon OPSI
Sapphire OPSH
Water Free Fused Silica OPNQ
CaF2 OPCF
Synthetic Fused Silica OPSQ
B323
B319
B318
B320
B292, B317
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
BK7 OPB
B292, B316
100 200 300 500 700 1 2 5 10 20 30
[nm]
[µm]
Wavelength
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B285

Optics & Optical Coatings
Low scattering substrate
OPSQSP/OPCFSP/OPMFSP/
WSSQSP/WSCFSP/WSMFSP
Catalog
Code
W3140
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
We can provide special optics polishing service for optics or wedge substrate; achieving surface roughness at

Optical Flats
OFB/OFBP/OFSQ/OFPXP/OFSQP
One side is polished to a high accuracy, it is a planar substrate with a reduced level laser mirror
scratched up.
Is used as a substrate to be coated with an optical thin film, such as custom-made mirror.
◦From among the wide variety that has been subdivided shapes and sizes, thickness and surface accuracy available for
selection according to your specifications.
Specifications
Material
BK7, Synthetic fused silica, Pyrex ® or Equivalent (PX)
Parallelism

Optics & Optical Coatings
Optical Flats
OFB/OFBP/OFSQ/OFPXP/OFSQP
Catalog
Code
W3134
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
Circle
Part Number
Diameter
φD
[mm]
Thckness
t
[mm]
Material
Surface
flatness
Surface
Quality
(Scratch−Dig)
Rear
Surface
OFB-10C03-10 φ10 3 BK7 λ/10 10−5 Ground
OFB-10C05-10 φ10 5 BK7 λ/10 10−5 Ground
OFB-10C05-20 φ10 5 BK7 λ/20 10−5 Ground
OFSQ-10C06-20 φ10 6 Synthetic fused silica λ/20 20−10 Ground
OFB-12.7C05-10 φ12.7 5 BK7 λ/10 10−5 Ground
OFB-15C03-10 φ15 3 BK7 λ/10 10−5 Ground
OFB-15C05-10 φ15 5 BK7 λ/10 10−5 Ground
OFB-15C05-20 φ15 5 BK7 λ/20 10−5 Ground
OFSQ-15C06-20 φ15 6 Synthetic fused silica λ/20 20−10 Ground
OFB-20C03-10 φ20 3 BK7 λ/10 10−5 Ground
OFB-20C05-4 φ20 5 BK7 λ/4 10−5 Ground
OFB-20C05-10 φ20 5 BK7 λ/10 10−5 Ground
OFB-20C05-20 φ20 5 BK7 λ/20 10−5 Ground
OFSQ-20C06-20 φ20 6 Synthetic fused silica λ/20 20−10 Ground
OFBP-25C05-1 φ25 5 BK7 λ 10−5 Polished
OFBP-25C05-4 φ25 5 BK7 λ/4 10−5 Polished
OFBP-25C05-10 φ25 5 BK7 λ/10 10−5 Polished
OFBP-25C05-20 φ25 5 BK7 λ/20 10−5 Polished
OFSQP-25C06-20 φ25 6 Synthetic fused silica λ/20 20−10 Polished
OFBP-25.4C05-10 φ25.4 5 BK7 λ/10 10−5 Polished
OFBP-30C05-1 φ30 5 BK7 λ 10−5 Polished
OFBP-30C05-4 φ30 5 BK7 λ/4 10−5 Polished
OFBP-30C05-10 φ30 5 BK7 λ/10 10−5 Polished
OFBP-30C05-20 φ30 5 BK7 λ/20 10−5 Polished
OFSQP-30C06-20 φ30 6 Synthetic fused silica λ/20 20−10 Polished
OFBP-40C06-1 φ40 6 BK7 λ 10−5 Polished
OFBP-40C06-4 φ40 6 BK7 λ/4 10−5 Polished
OFBP-40C06-10 φ40 6 BK7 λ/10 10−5 Polished
OFBP-40C06-20 φ40 6 BK7 λ/20 10−5 Polished
OFSQP-40C08-20 φ40 8 Synthetic fused silica λ/20 20−10 Polished
OFBP-50C08-1 φ50 8 BK7 λ 10−5 Polished
OFBP-50C08-4 φ50 8 BK7 λ/4 10−5 Polished
OFBP-50C08-10 φ50 8 BK7 λ/10 10−5 Polished
OFBP-50C08-20 φ50 8 BK7 λ/20 10−5 Polished
OFSQP-50C10-20 φ50 10 Synthetic fused silica λ/20 20−10 Polished
OFBP-50.8C08-10 φ50.8 8 BK7 λ/10 10−5 Polished
OFPXP-60C10-1 φ60 10 PX λ 10−5 Polished
OFPXP-60C10-4 φ60 10 PX λ/4 10−5 Polished
OFPXP-60C10-10 φ60 10 PX λ/10 10−5 Polished
OFPXP-60C10-20 φ60 10 PX λ/20 10−5 Polished
OFPXP-80C12-1 φ80 12 PX λ 10−5 Polished
OFPXP-80C12-4 φ80 12 PX λ/4 10−5 Polished
OFPXP-80C12-10 φ80 12 PX λ/10 10−5 Polished
OFPXP-80C12-20 φ80 12 PX λ/20 10−5 Polished
OFPXP-100C15-1 φ100 15 PX λ 10−5 Polished
OFPXP-100C15-4 φ100 15 PX λ/4 10−5 Polished
OFPXP-100C15-10 φ100 15 PX λ/10 10−5 Polished
OFPXP-130C18-1 φ130 18 PX λ 10−5 Polished
OFPXP-130C18-4 φ130 18 PX λ/4 10−5 Polished
OFPXP-130C18-10 φ130 18 PX λ/10 10−5 Polished
OFPXP-150C20-1 φ150 20 PX λ 10−5 Polished
OFPXP-150C20-4 φ150 20 PX λ/4 10−5 Polished
OFPXP-150C20-10 φ150 20 PX λ/10 10−5 Polished
Square
Part Number
Lengh
A
[mm]
Thckness
t
[mm]
Material
Surface
flatness
Surface
Quality
(Scratch−Dig)
Rear
Surface
OFB-10S03-10 □10 3 BK7 λ/10 10−5 Ground
OFB-10S05-10 □10 5 BK7 λ/10 10−5 Ground
OFB-10S05-20 □10 5 BK7 λ/20 10−5 Ground
OFSQ-10S06-20 □10 6 Synthetic fused silica λ/20 20−10 Ground
OFB-15S03-4 □15 3 BK7 λ/4 10−5 Ground
OFB-15S03-10 □15 3 BK7 λ/10 10−5 Ground
OFB-15S05-4 □15 5 BK7 λ/4 10−5 Ground
OFB-15S05-10 □15 5 BK7 λ/10 10−5 Ground
OFB-15S05-20 □15 5 BK7 λ/20 10−5 Ground
OFSQ-15S06-20 □15 6 Synthetic fused silica λ/20 20−10 Ground
OFB-20S03-4 □20 3 BK7 λ/4 10−5 Ground
OFB-20S03-10 □20 3 BK7 λ/10 10−5 Ground
OFB-20S05-4 □20 5 BK7 λ/4 10−5 Ground
OFB-20S05-10 □20 5 BK7 λ/10 10−5 Ground
OFB-20S05-20 □20 5 BK7 λ/20 10−5 Ground
OFSQ-20S06-20 □20 6 Synthetic fused silica λ/20 20−10 Ground
OFB-25S05-1 □25 5 BK7 λ 10−5 Ground
OFB-25S05-4 □25 5 BK7 λ/4 10−5 Ground
OFB-25S05-10 □25 5 BK7 λ/10 10−5 Ground
OFB-25S05-20 □25 5 BK7 λ/20 10−5 Ground
OFSQ-25S06-20 □25 6 Synthetic fused silica λ/20 20−10 Ground
OFB-30S05-1 □30 5 BK7 λ 10−5 Ground
OFB-30S05-4 □30 5 BK7 λ/4 10−5 Ground
OFB-30S05-10 □30 5 BK7 λ/10 10−5 Ground
OFB-30S05-20 □30 5 BK7 λ/20 10−5 Ground
OFSQ-30S06-20 □30 6 Synthetic fused silica λ/20 20−10 Ground
OFPXP-40S06-1 □40 6 PX λ 10−5 Polished
OFPXP-40S06-4 □40 6 PX λ/4 10−5 Polished
OFPXP-40S06-10 □40 6 PX λ/10 10−5 Polished
OFPXP-40S06-20 □40 6 PX λ/20 10−5 Polished
OFPXP-50S08-1 □50 8 PX λ 10−5 Polished
OFPXP-50S08-4 □50 8 PX λ/4 10−5 Polished
OFPXP-50S08-10 □50 8 PX λ/10 10−5 Polished
OFPXP-50S08-20 □50 8 PX λ/20 10−5 Polished
OFPXP-60S10-1 □60 10 PX λ 10−5 Polished
OFPXP-60S10-4 □60 10 PX λ/4 10−5 Polished
OFPXP-60S10-10 □60 10 PX λ/10 10−5 Polished
OFPXP-60S10-20 □60 10 PX λ/20 10−5 Polished
OFPXP-80S12-1 □80 12 PX λ 10−5 Polished
OFPXP-80S12-4 □80 12 PX λ/4 10−5 Polished
OFPXP-80S12-10 □80 12 PX λ/10 10−5 Polished
OFPXP-80S12-20 □80 12 PX λ/20 10−5 Polished
OFPXP-100S15-1 □100 15 PX λ 10−5 Polished
OFPXP-100S15-4 □100 15 PX λ/4 10−5 Polished
OFPXP-100S15-10 □100 15 PX λ/10 10−5 Polished
OFPXP-130S18-1 □130 18 PX λ 10−5 Polished
OFPXP-130S18-4 □130 18 PX λ/4 10−5 Polished
OFPXP-130S18-10 □130 18 PX λ/10 10−5 Polished
OFPXP-150S20-1 □150 20 PX λ 10−5 Polished
OFPXP-150S20-4 □150 20 PX λ/4 10−5 Polished
OFPXP-150S20-10 □150 20 PX λ/10 10−5 Polished
Compatible Optic Mounts
MHG-MP50-NL, MP50.8-NL / MHG-60MAD + MHG-MP80-NL / MHG-MP80-NL, -MP100-NL / MHA-130S / MHA-150S
B288
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Catalog
Code
W3134
Rectangle
Part Number
A×B
[mm]
Thckness
t
[mm]
Material
Surface
flatness
Surface
Quality
(Scratch−Dig)
Rear
Surface
OFB-1015R03-4 10×15 3 BK7 λ/4 10−5 Ground
OFB-1015R03-10 10×15 3 BK7 λ/10 10−5 Ground
OFB-1015R05-4 10×15 5 BK7 λ/4 10−5 Ground
OFB-1015R05-10 10×15 5 BK7 λ/10 10−5 Ground
OFB-1015R05-20 10×15 5 BK7 λ/20 10−5 Ground
OFSQ-1015R06-20 10×15 6 Synthetic fused silica λ/20 20−10 Ground
OFB-1525R03-4 15×25 3 BK7 λ/4 10−5 Ground
OFB-1525R03-10 15×25 3 BK7 λ/10 10−5 Ground
OFB-1525R05-4 15×25 5 BK7 λ/4 10−5 Ground
OFB-1525R05-10 15×25 5 BK7 λ/10 10−5 Ground
OFB-1525R05-20 15×25 5 BK7 λ/20 10−5 Ground
OFSQ-1525R06-20 15×25 6 Synthetic fused silica λ/20 20−10 Ground
OFB-2030R05-1 20×30 5 BK7 λ 10−5 Ground
OFB-2030R05-4 20×30 5 BK7 λ/4 10−5 Ground
OFB-2030R05-10 20×30 5 BK7 λ/10 10−5 Ground
OFB-2030R05-20 20×30 5 BK7 λ/20 10−5 Ground
OFSQ-2030R06-20 20×30 6 Synthetic fused silica λ/20 20−10 Ground
OFB-2535R05-1 25×35 5 BK7 λ 10−5 Ground
OFB-2535R05-4 25×35 5 BK7 λ/4 10−5 Ground
OFB-2535R05-10 25×35 5 BK7 λ/10 10−5 Ground
OFB-2535R05-20 25×35 5 BK7 λ/20 10−5 Ground
OFSQ-2535R06-20 25×35 6 Synthetic fused silica λ/20 20−10 Ground
OFPXP-3040R06-1 30×40 6 PX λ 10−5 Polished
OFPXP-3040R06-4 30×40 6 PX λ/4 10−5 Polished
OFPXP-3040R06-10 30×40 6 PX λ/10 10−5 Polished
OFPXP-3040R06-20 30×40 6 PX λ/20 10−5 Polished
OFSQP-3040R08-20 30×40 8 Synthetic fused silica λ/20 20−10 Polished
OFPXP-4050R08-1 40×50 8 PX λ 10−5 Polished
OFPXP-4050R08-4 40×50 8 PX λ/4 10−5 Polished
OFPXP-4050R08-10 40×50 8 PX λ/10 10−5 Polished
OFPXP-4050R08-20 40×50 8 PX λ/20 10−5 Polished
OFPXP-5060R10-1 50×60 10 PX λ 10−5 Polished
OFPXP-5060R10-4 50×60 10 PX λ/4 10−5 Polished
OFPXP-5060R10-10 50×60 10 PX λ/10 10−5 Polished
OFPXP-5060R10-20 50×60 10 PX λ/20 10−5 Polished
OFPXP-6080R12-1 60×80 12 PX λ 10−5 Polished
OFPXP-6080R12-4 60×80 12 PX λ/4 10−5 Polished
OFPXP-6080R12-10 60×80 12 PX λ/10 10−5 Polished
OFPXP-6080R12-20 60×80 12 PX λ/20 10−5 Polished
OFPXP-80100R15-1 80×100 15 PX λ 10−5 Polished
OFPXP-80100R15-4 80×100 15 PX λ/4 10−5 Polished
OFPXP-80100R15-10 80×100 15 PX λ/10 10−5 Polished
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
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B289

Optics & Optical Coatings
Catalog
Reasonable Optical Flat S-OFB/S-OFBP/S-OPB/S-WSB Code W3215
Application
Systems
Optics &
Optical
Coatings
For the illumination optical system and a simple experiment, it is the glass substrate of which high surface quality used for the
optical element is not required. Surface accuracy and parallelism (tolerance of wedged) is the same as optical flats for a laser.
◦It is also available the manufacturing with a coating as requested to
the plane substrate.
◦In addition to the circle, square type, rectangular type of planar
substrate, it is also available a wedge substrate and the parallel planar
substrate which has high surface accuracy of both sides.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
T [%]
100
80
60
40
Schematic
Typical Transmittance Data T: Transmission
20
0
150 200 250 300 350 400 1.5 2.0 2.5 3.0 3.5 4.0
[µm]
[µm]
Specifications
Material
BK7
Surface flatness λ/10
Clear aperture
90% of actual aperture, or a circle or ellipse
inscribed in the rectangle of 90% Dimensions
Surface Quality (Scratch−Dig) 60−40
Guide
▶A planar substrate OFB and OFBP are also available which is the
laser light scattering is less. B287
Attention
▶Planar substrate is not coated on both sides. There is a 3.5 to 4%
reflection of the surface of the glass.
▶When used in the transmission (back surface is polished) the planar
substrate, there is a possibility that the transmitted beam is slightly
inclined. If you want to use in transmission, please use the parallel
planar substrate (S-OFB).
▶Data of guarantee accuracy on surface is not attached with the
product. If you need a written guarantee accuracy of the flatness
data, then it will cost of data creation asked separately. Please
contact our International Sales Division.
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
S-OFB/S-OFBP S-OPB S-WSB
Front surface:
Precision polished
Outline Drawing
Rear Surface:
Polished or Ground
Front surface:
Precision polished
Rear surface:
Precision polished
Front surface:
Precision polished
Circle t
Square Rectangle
Rear surface:
Precision polished
(in mm)
Prisms
Substrates/Windows
D
Front
Surface
Rear
Surface
A
A
Optical Data
Maintenance
t
W
●Tolerance
Diameter φD +0
−0.1
Thickness t ±0.1
●Tolerance
Length A +0
−0.1
A t Thickness t ±0.1
B t
●Tolerance
Length A +0
−0.1 B +0
−0.1
Thickness t ±0.1
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
Circle
Part Number
Diameter φD
[mm]
Thickness t
[mm]
Parallelism Rear Surface
S-OFB-10C03-10 φ10 3

Float glass
OPFL
Catalog
Code
W3216
Float glass is a glass substrate made by the float process used in the production of window glass.
It does not require polishing process or molding process. Therefore, it is possible to manufacture
large quantities from a large plate and the cost is inexpensive.
◦It is also available to manufacture in large lots with as requested coating.
◦Because the corner is not chamfered, there will be some cases that small chipping occur.
Specifications
Material
Surface flatness
Clear aperture
Surface Quality (Scratch−Dig)
Float glass (blue sheet)
4 – 6λ
90% of actual aperture
60−40
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Schematic
Front surface: glossy finish
Uncoated
Rear surface: glossy finish
Uncoated
Light
Sources
Index
Guide
Mirrors
Outline Drawing
φ
(in mm)
●Tolerance
Diameter φD +0
−0.1
Chamfer
Ridge Line Nothing
Specifications
Part Number
Diameter
φD
[mm]
Thickness
t
[mm]
OPFL-15C01-P φ15 1±0.3
OPFL-15C02-P φ15 2±0.4
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
OPFL-15C03-P φ15 3±0.4
OPFL-25.4C01-P φ15 1±0.3
OPFL-25.4C02-P φ15 2±0.4
Filters
Prisms
OPFL-25.4C03-P φ15 3±0.4
OPFL-30C01-P φ15 1±0.3
OPFL-30C02-P φ15 2±0.4
Substrates/Windows
Optical Data
OPFL-30C03-P φ15 3±0.4
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
70
Typical Transmittance Data
T: Transmission
Master Optics
Windows
60
40
T [%]
30
10
0
500
1000
1500 2000 2500 3000
λ [nm]
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
B291

Optics & Optical Coatings
Optical Parallels
OPB/OPSQ/OPSQK
Application
Systems
Optics &
Optical
Coatings
Holders
This is a product of the substrate was polished on both sides of the glass substrate in parallel.
You can use as a substrate coated with an optical thin film coating, such as custom-made windows
and beam splitters.
◦There are available for BK7 type for visible range and infrared wavelength range, type of synthetic fused silica to high
ultraviolet transmission, and a type of synthetic fused silica for excimer laser that can be used to Kr * F excimer laser
(248nm).
◦A high accuracy of substrate parallel, the angle of the transmitted beam does not change when you insert a plane parallel
to the substrate perpendicular to the optical path of the laser.
◦The high surface precision substrates can also be used as an instead of Newton test plate.
Bases
Manual
Stages
Actuators
Specifications
Material
Clear aperture
Surface Quality
(Scratch−Dig)
BK7, Synthetic fused silica,
Synthetic fused silica for excimer laser
90% of actual aperture, or a circle or ellipse inscribed in
the rectangle of 90% Dimensions
BK7: 10−5
Synthetic fused silica,
Synthetic fused silica for Excimer Laser: 20−10
Motoeized
Stages
Light
Sources
Guide
▶It is also available a wedge substrate (WSB/WSSQ/WSSQK) which
can prevent the influence of back reflection. B300
Attention
Index
Guide
Schematic
Front surface: Precision polished
Rear surface: Precision polished
▶Parallel planar substrate has a loss of 10% by the reflection of the
front and back surfaces.
▶A data sheet for accuracy guarantee of the surface flatness is not
attached with the product. If you need a guarantee sheet of the
flatness data, then it costs for data creation. Please contact our
International Sales Division.
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Outline Drawing
●Circle
φD
t
●Tolerance
φD≦φ50.8
Diameter φD +0
−0.1
Thickness t ±0.1
φD≧φ60
Diameter φD +0
−0.2
Thickness t ±0.2
(in mm) Typical Transmittance Data T: Transmission
T [%]
100
80
60
40
20
BK7
Synthetic fused sillica
0
150 200 250 300 350 400 1.5 2.0 2.5 3.0 3.5 4.0
λ [nm]
λ [µm]
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
●Square
A
●Tolerance
A≦50
Length A +0
−0.1
Thickness t ±0.1
A≧60
Length A +0
−0.2
Thickness t ±0.2
Surface Accuracy Data (reference data)
Wedged Substrates
Concave Mirror
Substrates
Master Optics
A
t
Windows
・Surface accuracy measurement method:
Measured with Zygo laser interferometer
・Surface accuracy measurement wavelength
632.8nm
・Surface accuracy guaranteed temperature
23°C±2°C
B292
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Catalog
Code
W3135
BK7/Circle φ10 − φ20
Part Number
Diameter
φD
[mm]
Thckness
t
[mm]
Surface
flatness
Parallelism
OPB-10C01-10-5 φ10 1 λ/10

Optics & Optical Coatings
Optical Parallels
OPB/OPSQ/OPSQK
Catalog
Code
W3135
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
BK7/Circle φ50 − φ80
Part Number
Diameter
φD
[mm]
Thckness
t
[mm]
Surface
flatness
Parallelism
OPB-50C01-1-5 φ50 1 λ

Catalog
Code
W3136
BK7/Square □10 − □20
Part Number
Lengh
A
[mm]
Thckness
t
[mm]
Surface
flatness
Parallelism
OPB-10S01-10-5 □10 1 λ/10

Optics & Optical Coatings
Optical Parallels
OPB/OPSQ/OPSQK
Catalog
Code
W3137
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
Synthetic fused silica/Circle φ10 − φ20
Part Number
Diameter
φD
[mm]
Thckness
t
[mm]
Surface
flatness
Parallelism
OPSQ-10C01-10-5 φ10 1 λ/10

Catalog
Code
W3137
Synthetic fused silica/Circle φ50 − φ80
Part Number
Diameter
φD
[mm]
Thckness
t
[mm]
Surface
flatness
Parallelism
OPSQ-50C01-1-5 φ50 1 λ

Optics & Optical Coatings
Optical Parallels
OPB/OPSQ/OPSQK
Catalog
Code
W3138
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
Synthetic fused silica/Square □10 − □20
Part Number
Lengh
A
[mm]
Thckness
t
[mm]
Surface
flatness
Parallelism
OPSQ-10S01-10-5 □10 1 λ/10

Optical flats with hole
Custom-made
Catalog
Code
W3139
We provide customs made hole on optic or window according to your requirement.
We can make through-hole, counterbore hole, taper hole, inclined hole, blind hole or any type of
holes.
◦Ultrasonic machining system is used to avoid glass damaging.
◦We can do polishing on machined hole with no crack on the inner edge of the hole.
◦We can provide customs made any hole size which is not mentioned in the following list. The tooling (jig) fee may be an
additional cost. Please contact our International Sales Division.
Specifications
Possible to
specify type
of hole
Processing
tolerance
Through-hole
d (mm)
Blind hole
d (mm)
Hole size
(mm)
Hole position
(mm)
1.0, 1.5, 2.0, 2.5, 3.0, 4.0, 5.0, 6.0, 7.0, 8.0, 9.0
10, 12, 13, 15, 17, 18, 20, 22, 25, 28, 30
3.0, 5.0, 7.0, 10, 15, 20
D +0.15
−0
X±0.2
Processing price
Machining Type
Vertical hole
Counterbore hole
45° taper hole
Incline hole
Vertical blind hole
Hole size d
[mm]
≦φ2.5
φ3 − φ10
φ12 − φ30
≦φ2.5
φ3 − φ10
φ12 − φ30
≦φ2.5
φ3 − φ10
φ12 − φ30
≦φ2.5
φ3 − φ10
φ12 − φ30
≦φ7
φ10 − φ20
Specifying system
(Specify the diameter)
-SH□□
-SZH□□
-TH□□-45
-KH□□-45
-SMH□□
[Example of specification]
Part number of Optical Flats (φ30 t5): OPB-30C05-4-5
When need to make a dia 10mm vertical hole on the substrate.
⇒ OPB-30C05-4-5-SH10
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Outline Drawing
Vertical hole type (-SH□□)
(in mm)
Beamsplitters
Polarizers
Lenses
p
Multi-Element Optics
Hole size
Chamfering size
Hole position
d
c (0 if no specifications)
Center or specify the position (XY)
Filters
Prisms
Substrates/Windows
Counterbore hole type (-SZH□□)
45° taper hole type (-TH□□-45)
Optical Data
d1
d2
d
θ
Maintenance
Hole size
Hole depth
Counterbore hole size
Counterbore hole depth
Chamfering size
Hole position
Incline hole type (-KH□□-45)
h1
h2
d1
h1
d2
h2
c (0 if no specifications)
Center or specify the position (XY)
θ
h
Hole size
d
Hole depth h (h> specify as 0.15)
Taper angle
θ = 45° (45° unless specify)
Chamfering size No chamfer
Hole position
Center or specify the position (XY)
Vertical blind hole type (-SMH□□)
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
d
d
h
Hole size
Incline angle
Chamfering size
Hole position
d (Hole form)
θ = 45° (45° unless specify)
No chamfer
Center or specify the position (XY)
Hole size
Hole depth
Chamfering size
Hole position
d
h
c (0 if no specifications)
Center or specify the position (XY)
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
B299

Optics & Optical Coatings
Wedged Substrates
WSB/WSSQ/WSSQK
Application
Systems
Optics &
Optical
Coatings
Holders
Wedged substrates can separate the beam reflected by the front and back surface of the substrates
by the slight wedge.
It can be used as a reference test plate for interferometers and beam samplers.
◦It can also be used as a prism to refract at a small angle. Beam deflection angle δ can be calculated refractive index n,
from the wedge angle α.
δ = sin −1 (n sinα)− α ≒ (n − 1)α
◦In BK7, 0.52 times the angle of the wedge, and in synthetic fused silica, 0.46 times the angle of the wedge. (Visible range,
normal incidence)
Bases
Manual
Stages
Actuators
Motoeized
Stages
Specifications
Material
Clear aperture
Guide
BK7, Synthetic fused silica,
Synthetic fused silica for excimer laser (248nm)
90% of real diameter
▶Wedged substrates has a marking of arrows for the direction of front
surface at the thickest thickness point.
▶It is also available beam sampler (BS4) coated with anti-reflection
coating on the back. B066
Light
Sources
Index
Schematic
Front surface: Precision polished
Rear surface: Precision polished
Attention
▶Wedged substrates are not coated on both sides. There is a 3.5 to
4% reflection of the surface of the glass.
▶If the wedged substrate is inserted in the optical path of the laser
beam, the transmitted beam is inclined slightly causing the
refraction.
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Outline Drawing
φD
Front
surface
t
Rear
surface
●Tolerance
φD≦φ50
(in mm)
Diameter φD +0
−0.1
Thickness t ±0.1
φD≧φ60
Diameter φD +0
−0.2
Thickness t ±0.2
Maintenance
W
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
T []
100
80
60
40
Typical Transmittance Data
T: Transmission
20
BK7
Synthetic fused sillica
0
150 200 250 300 350 400 1.5 2.0 2.5 3.0 3.5 4.0
λ [nm]
λ [µm]
Surface Accuracy Data (reference data)
Compatible Optic Mounts
・Surface accuracy measurement method:
Measured with Zygo laser interferometer
・Surface accuracy measurement wavelength
632.8nm
・Surface accuracy guaranteed temperature
23°C±2°C
MLH-10, -15 / BSHL-15-2, -20-2 / MHG-MP25-NL, -MP30-NL / MHAN-40S / MHG-MP50-NL / MHAN-60 / MHA-80, -100
B300
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Wedged Substrates WSB/WSSQ/WSSQK Code W3141
BK7
Part Number
Diameter φD
[mm]
Thckness t
[mm]
Surface flatness
Wedge angle
W
Surface Quality
(Scratch−Dig)
WSB-10C05-10-1 φ10 5 λ/10 1°±5′ 10−5
WSB-10C05-20-1 φ10 5 λ/20 1°±5′ 10−5
WSB-15C05-10-1 φ15 5 λ/10 1°±5′ 10−5
WSB-15C05-20-1 φ15 5 λ/20 1°±5′ 10−5
WSB-20C05-10-1 φ20 5 λ/10 1°±5′ 10−5
WSB-20C05-20-1 φ20 5 λ/20 1°±5′ 10−5
WSB-25C05-10-1 φ25 5 λ/10 1°±5′ 10−5
WSB-25C05-20-1 φ25 5 λ/20 1°±5′ 10−5
WSB-30C05-10-0.5 φ30 5 λ/10 0.5°±5′ 10−5
WSB-30C05-20-0.5 φ30 5 λ/20 0.5°±5′ 10−5
WSB-30C05-10-1 φ30 5 λ/10 1°±5′ 10−5
WSB-30C05-20-1 φ30 5 λ/20 1°±5′ 10−5
WSB-30C05-10-2 φ30 5 λ/10 2°±5′ 10−5
WSB-30C05-20-2 φ30 5 λ/20 2°±5′ 10−5
WSB-30C07-10-3 φ30 7 λ/10 3°±5′ 10−5
WSB-30C07-20-3 φ30 7 λ/20 3°±5′ 10−5
WSB-40C06-10-1 φ40 6 λ/10 1°±5′ 10−5
WSB-40C06-20-1 φ40 6 λ/20 1°±5′ 10−5
WSB-50C08-10-0.5 φ50 8 λ/10 0.5°±5′ 10−5
WSB-50C08-20-0.5 φ50 8 λ/20 0.5°±5′ 10−5
WSB-50C08-10-1 φ50 8 λ/10 1°±5′ 10−5
WSB-50C08-20-1 φ50 8 λ/20 1°±5′ 10−5
WSB-50C08-10-2 φ50 8 λ/10 2°±5′ 10−5
WSB-50C08-20-2 φ50 8 λ/20 2°±5′ 10−5
WSB-50C10-10-3 φ50 10 λ/10 3°±5′ 10−5
WSB-50C10-20-3 φ50 10 λ/20 3°±5′ 10−5
WSB-60C10-10-1 φ60 10 λ/10 1°±5′ 10−5
WSB-60C10-20-1 φ60 10 λ/20 1°±5′ 10−5
WSB-80C12-10-1 φ80 12 λ/10 1°±5′ 10−5
WSB-80C12-20-1 φ80 12 λ/20 1°±5′ 10−5
WSB-100C15-10-1 φ100 15 λ/10 1°±5′ 10−5
WSB-100C15-20-1 φ100 15 λ/20 1°±5′ 10−5
Synthetic fused silica
Part Number
Diameter φD
[mm]
Thckness t
[mm]
Surface flatness
Wedge angle
W
Surface Quality
(Scratch−Dig)
WSSQ-10C05-10-1 φ10 5 λ/10 1°±5′ 20−10
WSSQ-10C05-20-1 φ10 5 λ/20 1°±5′ 20−10
WSSQ-15C05-10-1 φ15 5 λ/10 1°±5′ 20−10
WSSQ-15C05-20-1 φ15 5 λ/20 1°±5′ 20−10
WSSQ-20C05-10-1 φ20 5 λ/10 1°±5′ 20−10
WSSQ-20C05-20-1 φ20 5 λ/20 1°±5′ 20−10
WSSQ-25C05-10-1 φ25 5 λ/10 1°±5′ 20−10
WSSQ-25C05-20-1 φ25 5 λ/20 1°±5′ 20−10
WSSQ-30C05-10-0.5 φ30 5 λ/10 0.5°±5′ 20−10
WSSQ-30C05-20-0.5 φ30 5 λ/20 0.5°±5′ 20−10
WSSQ-30C05-10-1 φ30 5 λ/10 1°±5′ 20−10
WSSQ-30C05-20-1 φ30 5 λ/20 1°±5′ 20−10
WSSQ-30C05-10-2 φ30 5 λ/10 2°±5′ 20−10
WSSQ-30C05-20-2 φ30 5 λ/20 2°±5′ 20−10
WSSQ-30C07-10-3 φ30 7 λ/10 3°±5′ 20−10
WSSQ-30C07-20-3 φ30 7 λ/20 3°±5′ 20−10
WSSQ-40C06-10-1 φ40 6 λ/10 1°±5′ 20−10
WSSQ-40C06-20-1 φ40 6 λ/20 1°±5′ 20−10
WSSQ-50C08-10-0.5 φ50 8 λ/10 0.5°±5′ 20−10
WSSQ-50C08-20-0.5 φ50 8 λ/20 0.5°±5′ 20−10
WSSQ-50C08-10-1 φ50 8 λ/10 1°±5′ 20−10
WSSQ-50C08-20-1 φ50 8 λ/20 1°±5′ 20−10
WSSQ-50C08-10-2 φ50 8 λ/10 2°±5′ 20−10
WSSQ-50C08-20-2 φ50 8 λ/20 2°±5′ 20−10
WSSQ-50C10-10-3 φ50 10 λ/10 3°±5′ 20−10
WSSQ-50C10-20-3 φ50 10 λ/20 3°±5′ 20−10
WSSQ-60C10-10-1 φ60 10 λ/10 1°±5′ 20−10
WSSQ-60C10-20-1 φ60 10 λ/20 1°±5′ 20−10
WSSQ-80C12-10-1 φ80 12 λ/10 1°±5′ 20−10
WSSQ-80C12-20-1 φ80 12 λ/20 1°±5′ 20−10
WSSQ-100C15-10-1 φ100 15 λ/10 1°±5′ 20−10
WSSQ-100C15-20-1 φ100 15 λ/20 1°±5′ 20−10
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
Synthetic fused silica for excimer laser
Part Number
Diameter φD
[mm]
Thckness t
[mm]
Surface flatness
Wedge angle
W
Surface Quality
(Scratch−Dig)
WSSQK-30C05-10-1 φ30 5 λ/10 1°±5′ 20−10
WSSQK-50C08-10-1 φ50 8 λ/10 1°±5′ 20−10
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
B301

Optics & Optical Coatings
Contact sheet
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Contact sheet for Custom Optical Parallels and Optical Flats ■Estimation ■Order
Date
□ To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Affiliation
(Organization Name)
Department
TEL
Country/Address
Name &
Designation
Drawing Number
Estimate □ Yes: by Date
Desired
Delivery Date
Budget
Material □ BK7 □ Synthetic fused sillica □ Other ( ) Quantity
Dimensions
If you do not specify
a dimension tolerance
is outside the
standard tolerance
Surface flatness
□ λ/10 □ λ/4 □ λ □ Other ( ) * λ is 632.8nm.
Parallelism □ less than 3′ □ less than 5′ □ Other ( )
Specifications
of Coating
Select metallic
coating or dielectric
multi-layer coating.
Specifications
of Light Source
Used
Hole
□ Metallic coating
□ Drill a hole
□ Al only □ AI+MgF2 □ AI+SiO □ Cr+Au □ Pt □ Other ( )
Dielectric
□ multi-layer coating Reflectance R=
or more
Wavelength
Range λ= nm Type
Output
or
W
Beam size
mm
Energy
J Pulse width s Repetition frequency Hz
Inicident angle
θ=
FAX
□ None
Name
φA t b
t
Polarization
conditions
* Write more detailed specifications here. (Rough illustration is acceptable.)
a
E-mail
φ
a
b
t
(Tentative name is okay)
□ No
JP Yen
mm
mm
mm
mm
If there is no specification in advance,
we will process a circular polarization
or an unpolarized light.
* For special specifications on hole processing, please see
previous page of this catalog and indicate here below.
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
Other
Sigma Koki Co., Ltd.
B302
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Contact sheet
Contact sheet for Custom Wedged Substrates
To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Affiliation
(Organization Name)
Department
TEL
Country/Address
Name &
Designation
Drawing Number
Estimate Yes: by Date
Desired
Delivery Date
Budget
Material BK7 Synthetic fused sillica Other ( )
Dimensions
If you do not specify
a dimension tolerance
is outside the
standard tolerance
Surface flatness
Coating
A
Quantity
/10 /4 Other ( )
Coating None Type Metal Dielectric multi-layer Other ( )
Specifications
t
FAX
* Please fill out the tolerance of the wedge angle.
* Write more detailed specifications here. (Rough illustration is acceptable.)
b
Name
a
t
E-mail
A
a
b
t
■Estimation ■Order
Date
Wedge angle () = ±
(Tentative name is okay)
No
JP Yen
mm
mm
mm
mm
* is 632.8nm.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Other
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
Sigma Koki Co., Ltd.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
B303

Optics & Optical Coatings
Concave Mirror Substrates/Aluminum Concave Mirror Substrates
TCBS/TCA/TCAN
Application
Systems
Optics &
Optical
Coatings
Coatings on all concave mirror models are available. Pre-coated aluminum concave mirrors are available. These substrates
are mainly used as the main mirror of reflecting telescope or as reflection mirror of collimator optical system of light-source.
◦Large choice of variation from outer size to radius of
curvature from our catalog.
◦Providing high specifications than Plano-convex lens
product.
Holders
Bases
Manual
Stages
Actuators
Schematic
Rear surface: Ground
Specifications
Material
BK7
Spherical accuracy λ/2
Radius Tolerance ±2%
Substrates: Uncoated
Coating
Mirrors with Protective layer: Al+MgF2
Mirrors without Protective layer: Al
Clear aperture 85% of actual aperture
Surface Quality
(Scratch−Dig)
Rear Surface
Substrates: 20−10
With coating: 40−20
Ground
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Front surface: Precision polished
(concave)
Outline Drawing
r
te
φD
●Tolerance
Diameter φD +0
−0.1
Thickness tc ±0.2
(in mm)
●Relationship between focal length “f”
and the radius of curvature “r” of the
concave mirror
r = 2f
Guide
▶High power laser use concave substrates (LCBS) are also available
for Laser resonator application. B308
Attention
▶The back side of the substrate is made of ground surface; it is not
usable for transmission. For transmission we recommend planoconcave
lenses (SLB-N). B118
▶For cold-mirror or partial reflection application, please contact our
International Sales Division for a concave mirror on the back side
polished.
▶Spark may occur near to focused point with high energy pulse laser
incident, the wavefront may be disturbed.
▶The outer edge of the concave surface is chamfered, the thickness
of the edge varies therefore use the back side of the substrate as
datum.
Polarizers
f
tc
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
φ10
Substrates
Part Number
Diameter
φD
[mm]
Thickness of the edge
te
[mm]
Thickness of the center
tc
[mm]
Radius of curvature
r
[mm]
Focal length
f
[mm]
Mirror coating
With Protective layer
Part Number
Without Protective layer
Part Number
TCBS-10C05-10 φ10 5 3.7 10 5 TCA-10C05-10 TCAN-10C05-10
TCBS-10C05-15 φ10 5 4.1 15 7.5 TCA-10C05-15 TCAN-10C05-15
TCBS-10C05-20 φ10 5 4.4 20 10 TCA-10C05-20 TCAN-10C05-20
TCBS-10C05-25 φ10 5 4.5 25 12.5 TCA-10C05-25 TCAN-10C05-25
TCBS-10C05-30 φ10 5 4.6 30 15 TCA-10C05-30 TCAN-10C05-30
TCBS-10C05-40 φ10 5 4.7 40 20 TCA-10C05-40 TCAN-10C05-40
TCBS-10C05-50 φ10 5 4.7 50 25 TCA-10C05-50 TCAN-10C05-50
TCBS-10C05-60 φ10 5 4.8 60 30 TCA-10C05-60 TCAN-10C05-60
TCBS-10C05-70 φ10 5 4.8 70 35 TCA-10C05-70 TCAN-10C05-70
TCBS-10C05-80 φ10 5 4.8 80 40 TCA-10C05-80 TCAN-10C05-80
TCBS-10C05-90 φ10 5 4.9 90 45 TCA-10C05-90 TCAN-10C05-90
TCBS-10C05-100 φ10 5 4.9 100 50 TCA-10C05-100 TCAN-10C05-100
TCBS-10C05-120 φ10 5 4.9 120 60 TCA-10C05-120 TCAN-10C05-120
TCBS-10C05-150 φ10 5 4.9 150 75 TCA-10C05-150 TCAN-10C05-150
TCBS-10C05-200 φ10 5 4.9 200 100 TCA-10C05-200 TCAN-10C05-200
TCBS-10C05-250 φ10 5 4.9 250 125 TCA-10C05-250 TCAN-10C05-250
TCBS-10C05-300 φ10 5 5.0 300 150 TCA-10C05-300 TCAN-10C05-300
TCBS-10C05-400 φ10 5 5.0 400 200 TCA-10C05-400 TCAN-10C05-400
TCBS-10C05-500 φ10 5 5.0 500 250 TCA-10C05-500 TCAN-10C05-500
TCBS-10C05-600 φ10 5 5.0 600 300 TCA-10C05-600 TCAN-10C05-600
TCBS-10C05-700 φ10 5 5.0 700 350 TCA-10C05-700 TCAN-10C05-700
TCBS-10C05-800 φ10 5 5.0 800 400 TCA-10C05-800 TCAN-10C05-800
TCBS-10C05-1000 φ10 5 5.0 1000 500 TCA-10C05-1000 TCAN-10C05-1000
TCBS-10C05-1500 φ10 5 5.0 1500 750 TCA-10C05-1500 TCAN-10C05-1500
TCBS-10C05-2000 φ10 5 5.0 2000 1000 TCA-10C05-2000 TCAN-10C05-2000
TCBS-10C05-2500 φ10 5 5.0 2500 1250 TCA-10C05-2500 TCAN-10C05-2500
TCBS-10C05-3000 φ10 5 5.0 3000 1500 TCA-10C05-3000 TCAN-10C05-3000
TCBS-10C05-4000 φ10 5 5.0 4000 2000 TCA-10C05-4000 TCAN-10C05-4000
TCBS-10C05-5000 φ10 5 5.0 5000 2500 TCA-10C05-5000 TCAN-10C05-5000
TCBS-10C05-10000 φ10 5 5.0 10000 5000 TCA-10C05-10000 TCAN-10C05-10000
Compatible Optic Mounts
LHCM-10, -15 / LHCM-20 / ALHN-25-3RO, -30-3RO / LHCM-40 / ALHN-50-3RO
B304
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W3142
φ15 − φ20
Substrates
Part Number
Diameter
φD
[mm]
Thickness of the edge
te
[mm]
Thickness of the center
tc
[mm]
Radius of curvature
r
[mm]
Focal length
f
[mm]
Mirror coating
With Protective layer
Part Number
Without Protective layer
Part Number
TCBS-15C07-10 φ15 7 3.6 10 5 TCA-15C07-10 TCAN-15C07-10
TCBS-15C07-15 φ15 7 5.0 15 7.5 TCA-15C07-15 TCAN-15C07-15
TCBS-15C05-20 φ15 5 3.5 20 10 TCA-15C05-20 TCAN-15C05-20
TCBS-15C05-25 φ15 5 3.8 25 12.5 TCA-15C05-25 TCAN-15C05-25
TCBS-15C05-30 φ15 5 4.0 30 15 TCA-15C05-30 TCAN-15C05-30
TCBS-15C05-40 φ15 5 4.3 40 20 TCA-15C05-40 TCAN-15C05-40
TCBS-15C05-50 φ15 5 4.4 50 25 TCA-15C05-50 TCAN-15C05-50
TCBS-15C05-60 φ15 5 4.5 60 30 TCA-15C05-60 TCAN-15C05-60
TCBS-15C05-70 φ15 5 4.6 70 35 TCA-15C05-70 TCAN-15C05-70
TCBS-15C05-80 φ15 5 4.6 80 40 TCA-15C05-80 TCAN-15C05-80
TCBS-15C05-90 φ15 5 4.7 90 45 TCA-15C05-90 TCAN-15C05-90
TCBS-15C05-100 φ15 5 4.7 100 50 TCA-15C05-100 TCAN-15C05-100
TCBS-15C05-120 φ15 5 4.8 120 60 TCA-15C05-120 TCAN-15C05-120
TCBS-15C05-150 φ15 5 4.8 150 75 TCA-15C05-150 TCAN-15C05-150
TCBS-15C05-200 φ15 5 4.9 200 100 TCA-15C05-200 TCAN-15C05-200
TCBS-15C05-250 φ15 5 4.9 250 125 TCA-15C05-250 TCAN-15C05-250
TCBS-15C05-300 φ15 5 4.9 300 150 TCA-15C05-300 TCAN-15C05-300
TCBS-15C05-400 φ15 5 4.9 400 200 TCA-15C05-400 TCAN-15C05-400
TCBS-15C05-500 φ15 5 4.9 500 250 TCA-15C05-500 TCAN-15C05-500
TCBS-15C05-600 φ15 5 5.0 600 300 TCA-15C05-600 TCAN-15C05-600
TCBS-15C05-700 φ15 5 5.0 700 350 TCA-15C05-700 TCAN-15C05-700
TCBS-15C05-800 φ15 5 5.0 800 400 TCA-15C05-800 TCAN-15C05-800
TCBS-15C05-1000 φ15 5 5.0 1000 500 TCA-15C05-1000 TCAN-15C05-1000
TCBS-15C05-1500 φ15 5 5.0 1500 750 TCA-15C05-1500 TCAN-15C05-1500
TCBS-15C05-2000 φ15 5 5.0 2000 1000 TCA-15C05-2000 TCAN-15C05-2000
TCBS-15C05-2500 φ15 5 5.0 2500 1250 TCA-15C05-2500 TCAN-15C05-2500
TCBS-15C05-3000 φ15 5 5.0 3000 1500 TCA-15C05-3000 TCAN-15C05-3000
TCBS-15C05-4000 φ15 5 5.0 4000 2000 TCA-15C05-4000 TCAN-15C05-4000
TCBS-15C05-5000 φ15 5 5.0 5000 2500 TCA-15C05-5000 TCAN-15C05-5000
TCBS-15C05-10000 φ15 5 5.0 10000 5000 TCA-15C05-10000 TCAN-15C05-10000
TCBS-15C05-30000 φ15 5 5.0 30000 15000 TCA-15C05-30000 TCAN-15C05-30000
TCBS-20C08-15 φ20 8 4.2 15 7.5 TCA-20C08-15 TCAN-20C08-15
TCBS-20C08-20 φ20 8 5.3 20 10 TCA-20C08-20 TCAN-20C08-20
TCBS-20C08-25 φ20 8 5.9 25 12.5 TCA-20C08-25 TCAN-20C08-25
TCBS-20C05-30 φ20 5 3.3 30 15 TCA-20C05-30 TCAN-20C05-30
TCBS-20C05-40 φ20 5 3.7 40 20 TCA-20C05-40 TCAN-20C05-40
TCBS-20C05-50 φ20 5 4.0 50 25 TCA-20C05-50 TCAN-20C05-50
TCBS-20C05-60 φ20 5 4.2 60 30 TCA-20C05-60 TCAN-20C05-60
TCBS-20C05-70 φ20 5 4.3 70 35 TCA-20C05-70 TCAN-20C05-70
TCBS-20C05-80 φ20 5 4.4 80 40 TCA-20C05-80 TCAN-20C05-80
TCBS-20C05-90 φ20 5 4.4 90 45 TCA-20C05-90 TCAN-20C05-90
TCBS-20C05-100 φ20 5 4.5 100 50 TCA-20C05-100 TCAN-20C05-100
TCBS-20C05-120 φ20 5 4.6 120 60 TCA-20C05-120 TCAN-20C05-120
TCBS-20C05-150 φ20 5 4.7 150 75 TCA-20C05-150 TCAN-20C05-150
TCBS-20C05-200 φ20 5 4.7 200 100 TCA-20C05-200 TCAN-20C05-200
TCBS-20C05-250 φ20 5 4.8 250 125 TCA-20C05-250 TCAN-20C05-250
TCBS-20C05-300 φ20 5 4.8 300 150 TCA-20C05-300 TCAN-20C05-300
TCBS-20C05-400 φ20 5 4.9 400 200 TCA-20C05-400 TCAN-20C05-400
TCBS-20C05-500 φ20 5 4.9 500 250 TCA-20C05-500 TCAN-20C05-500
TCBS-20C05-600 φ20 5 4.9 600 300 TCA-20C05-600 TCAN-20C05-600
TCBS-20C05-700 φ20 5 4.9 700 350 TCA-20C05-700 TCAN-20C05-700
TCBS-20C05-800 φ20 5 4.9 800 400 TCA-20C05-800 TCAN-20C05-800
TCBS-20C05-1000 φ20 5 5.0 1000 500 TCA-20C05-1000 TCAN-20C05-1000
TCBS-20C05-1500 φ20 5 5.0 1500 750 TCA-20C05-1500 TCAN-20C05-1500
TCBS-20C05-2000 φ20 5 5.0 2000 1000 TCA-20C05-2000 TCAN-20C05-2000
TCBS-20C05-2500 φ20 5 5.0 2500 1250 TCA-20C05-2500 TCAN-20C05-2500
TCBS-20C05-3000 φ20 5 5.0 3000 1500 TCA-20C05-3000 TCAN-20C05-3000
TCBS-20C05-4000 φ20 5 5.0 4000 2000 TCA-20C05-4000 TCAN-20C05-4000
TCBS-20C05-5000 φ20 5 5.0 5000 2500 TCA-20C05-5000 TCAN-20C05-5000
TCBS-20C05-10000 φ20 5 5.0 10000 5000 TCA-20C05-10000 TCAN-20C05-10000
TCBS-20C05-30000 φ20 5 5.0 30000 15000 TCA-20C05-30000 TCAN-20C05-30000
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
B305

Optics & Optical Coatings
Concave Mirror Substrates/Aluminum Concave Mirror Substrates
TCBS/TCA/TCAN
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
φ25 − φ30
Substrates
Part Number
Diameter
φD
[mm]
Thickness of the edge
te
[mm]
Thickness of the center
tc
[mm]
Radius of curvature
r
[mm]
Focal length
f
[mm]
Mirror coating
With Protective layer
Part Number
Without Protective layer
Part Number
TCBS-25C10-15 φ25 10 3.3 15 7.5 TCA-25C10-15 TCAN-25C10-15
TCBS-25C07-20 φ25 7 2.6 20 10 TCA-25C07-20 TCAN-25C07-20
TCBS-25C07-25 φ25 7 3.7 25 12.5 TCA-25C07-25 TCAN-25C07-25
TCBS-25C07-30 φ25 7 4.3 30 15 TCA-25C07-30 TCAN-25C07-30
TCBS-25C07-40 φ25 7 5.0 40 20 TCA-25C07-40 TCAN-25C07-40
TCBS-25C07-50 φ25 7 5.4 50 25 TCA-25C07-50 TCAN-25C07-50
TCBS-25C05-60 φ25 5 3.7 60 30 TCA-25C05-60 TCAN-25C05-60
TCBS-25C05-70 φ25 5 3.9 70 35 TCA-25C05-70 TCAN-25C05-70
TCBS-25C05-80 φ25 5 4.0 80 40 TCA-25C05-80 TCAN-25C05-80
TCBS-25C05-90 φ25 5 4.1 90 45 TCA-25C05-90 TCAN-25C05-90
TCBS-25C05-100 φ25 5 4.2 100 50 TCA-25C05-100 TCAN-25C05-100
TCBS-25C05-120 φ25 5 4.3 120 60 TCA-25C05-120 TCAN-25C05-120
TCBS-25C05-150 φ25 5 4.5 150 75 TCA-25C05-150 TCAN-25C05-150
TCBS-25C05-200 φ25 5 4.6 200 100 TCA-25C05-200 TCAN-25C05-200
TCBS-25C05-250 φ25 5 4.6 250 125 TCA-25C05-250 TCAN-25C05-250
TCBS-25C05-300 φ25 5 4.7 300 150 TCA-25C05-300 TCAN-25C05-300
TCBS-25C05-400 φ25 5 4.7 400 200 TCA-25C05-400 TCAN-25C05-400
TCBS-25C05-500 φ25 5 4.8 500 250 TCA-25C05-500 TCAN-25C05-500
TCBS-25C05-600 φ25 5 4.8 600 300 TCA-25C05-600 TCAN-25C05-600
TCBS-25C05-700 φ25 5 4.9 700 350 TCA-25C05-700 TCAN-25C05-700
TCBS-25C05-800 φ25 5 4.9 800 400 TCA-25C05-800 TCAN-25C05-800
TCBS-25C05-1000 φ25 5 4.9 1000 500 TCA-25C05-1000 TCAN-25C05-1000
TCBS-25C05-1500 φ25 5 4.9 1500 750 TCA-25C05-1500 TCAN-25C05-1500
TCBS-25C05-2000 φ25 5 4.9 2000 1000 TCA-25C05-2000 TCAN-25C05-2000
TCBS-25C05-2500 φ25 5 5.0 2500 1250 TCA-25C05-2500 TCAN-25C05-2500
TCBS-25C05-3000 φ25 5 5.0 3000 1500 TCA-25C05-3000 TCAN-25C05-3000
TCBS-25C05-4000 φ25 5 5.0 4000 2000 TCA-25C05-4000 TCAN-25C05-4000
TCBS-25C05-5000 φ25 5 5.0 5000 2500 TCA-25C05-5000 TCAN-25C05-5000
TCBS-25C05-10000 φ25 5 5.0 10000 5000 TCA-25C05-10000 TCAN-25C05-10000
TCBS-25C05-30000 φ25 5 5.0 30000 15000 TCA-25C05-30000 TCAN-25C05-30000
TCBS-25.4C07-50 φ25.4 7 5.4 50 25 TCA-25.4C07-50 TCAN-25.4C07-50
TCBS-25.4C05-100 φ25.4 5 4.2 100 50 TCA-25.4C05-100 TCAN-25.4C05-100
TCBS-25.4C05-250 φ25.4 5 4.7 250 125 TCA-25.4C05-250 TCAN-25.4C05-250
TCBS-25.4C05-500 φ25.4 5 4.8 500 250 TCA-25.4C05-500 TCAN-25.4C05-500
TCBS-25.4C05-1000 φ25.4 5 4.9 1000 500 TCA-25.4C05-1000 TCAN-25.4C05-1000
TCBS-30C10-20 φ30 10 3.2 20 10 TCA-30C10-20 TCAN-30C10-20
TCBS-30C10-25 φ30 10 5.0 25 12.5 TCA-30C10-25 TCAN-30C10-25
TCBS-30C07-30 φ30 7 3.0 30 15 TCA-30C07-30 TCAN-30C07-30
TCBS-30C07-40 φ30 7 4.1 40 20 TCA-30C07-40 TCAN-30C07-40
TCBS-30C07-50 φ30 7 4.7 50 25 TCA-30C07-50 TCAN-30C07-50
TCBS-30C07-60 φ30 7 5.1 60 30 TCA-30C07-60 TCAN-30C07-60
TCBS-30C07-70 φ30 7 5.4 70 35 TCA-30C07-70 TCAN-30C07-70
TCBS-30C07-80 φ30 7 5.6 80 40 TCA-30C07-80 TCAN-30C07-80
TCBS-30C07-90 φ30 7 5.7 90 45 TCA-30C07-90 TCAN-30C07-90
TCBS-30C07-100 φ30 7 5.9 100 50 TCA-30C07-100 TCAN-30C07-100
TCBS-30C05-120 φ30 5 4.1 120 60 TCA-30C05-120 TCAN-30C05-120
TCBS-30C05-150 φ30 5 4.2 150 75 TCA-30C05-150 TCAN-30C05-150
TCBS-30C05-200 φ30 5 4.4 200 100 TCA-30C05-200 TCAN-30C05-200
TCBS-30C05-250 φ30 5 4.5 250 125 TCA-30C05-250 TCAN-30C05-250
TCBS-30C05-300 φ30 5 4.6 300 150 TCA-30C05-300 TCAN-30C05-300
TCBS-30C05-400 φ30 5 4.7 400 200 TCA-30C05-400 TCAN-30C05-400
TCBS-30C05-500 φ30 5 4.8 500 250 TCA-30C05-500 TCAN-30C05-500
TCBS-30C05-600 φ30 5 4.8 600 300 TCA-30C05-600 TCAN-30C05-600
TCBS-30C05-700 φ30 5 4.8 700 350 TCA-30C05-700 TCAN-30C05-700
TCBS-30C05-800 φ30 5 4.9 800 400 TCA-30C05-800 TCAN-30C05-800
TCBS-30C05-1000 φ30 5 4.9 1000 500 TCA-30C05-1000 TCAN-30C05-1000
TCBS-30C05-1500 φ30 5 4.9 1500 750 TCA-30C05-1500 TCAN-30C05-1500
TCBS-30C05-2000 φ30 5 4.9 2000 1000 TCA-30C05-2000 TCAN-30C05-2000
TCBS-30C05-2500 φ30 5 5.0 2500 1250 TCA-30C05-2500 TCAN-30C05-2500
TCBS-30C05-3000 φ30 5 5.0 3000 1500 TCA-30C05-3000 TCAN-30C05-3000
TCBS-30C05-3500 φ30 5 5.0 3500 1750 TCA-30C05-3500 TCAN-30C05-3500
TCBS-30C05-4000 φ30 5 5.0 4000 2000 TCA-30C05-4000 TCAN-30C05-4000
TCBS-30C05-5000 φ30 5 5.0 5000 2500 TCA-30C05-5000 TCAN-30C05-5000
TCBS-30C05-10000 φ30 5 5.0 10000 5000 TCA-30C05-10000 TCAN-30C05-10000
TCBS-30C05-30000 φ30 5 5.0 30000 15000 TCA-30C05-30000 TCAN-30C05-30000
B306
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W3142
φ40 − φ50
Substrates
Part Number
Diameter
φD
[mm]
Thickness of the edge
te
[mm]
Thickness of the center
tc
[mm]
Radius of curvature
r
[mm]
Focal length
f
[mm]
Mirror coating
With Protective layer
Part Number
Without Protective layer
Part Number
TCBS-40C13-25 φ40 13 3.0 25 12.5 TCA-40C13-25 TCAN-40C13-25
TCBS-40C13-30 φ40 13 5.4 30 15 TCA-40C13-30 TCAN-40C13-30
TCBS-40C13-40 φ40 13 7.6 40 20 TCA-40C13-40 TCAN-40C13-40
TCBS-40C13-50 φ40 13 8.8 50 25 TCA-40C13-50 TCAN-40C13-50
TCBS-40C10-60 φ40 10 6.6 60 30 TCA-40C10-60 TCAN-40C10-60
TCBS-40C10-70 φ40 10 7.1 70 35 TCA-40C10-70 TCAN-40C10-70
TCBS-40C08-80 φ40 8 5.5 80 40 TCA-40C08-80 TCAN-40C08-80
TCBS-40C08-90 φ40 8 5.7 90 45 TCA-40C08-90 TCAN-40C08-90
TCBS-40C08-100 φ40 8 6.0 100 50 TCA-40C08-100 TCAN-40C08-100
TCBS-40C07-150 φ40 7 5.7 150 75 TCA-40C07-150 TCAN-40C07-150
TCBS-40C07-200 φ40 7 6.0 200 100 TCA-40C07-200 TCAN-40C07-200
TCBS-40C07-250 φ40 7 6.2 250 125 TCA-40C07-250 TCAN-40C07-250
TCBS-40C06-300 φ40 6 5.3 300 150 TCA-40C06-300 TCAN-40C06-300
TCBS-40C06-400 φ40 6 5.5 400 200 TCA-40C06-400 TCAN-40C06-400
TCBS-40C06-500 φ40 6 5.6 500 250 TCA-40C06-500 TCAN-40C06-500
TCBS-40C06-1000 φ40 6 5.8 1000 500 TCA-40C06-1000 TCAN-40C06-1000
TCBS-40C06-1500 φ40 6 5.9 1500 750 TCA-40C06-1500 TCAN-40C06-1500
TCBS-50C16-40 φ50 16 7.2 40 20 TCA-50C16-40 TCAN-50C16-40
TCBS-50C13-50 φ50 13 6.3 50 25 TCA-50C13-50 TCAN-50C13-50
TCBS-50C10-60 φ50 10 4.5 60 30 TCA-50C10-60 TCAN-50C10-60
TCBS-50C10-70 φ50 10 5.4 70 35 TCA-50C10-70 TCAN-50C10-70
TCBS-50C10-80 φ50 10 6.0 80 40 TCA-50C10-80 TCAN-50C10-80
TCBS-50C10-90 φ50 10 6.5 90 45 TCA-50C10-90 TCAN-50C10-90
TCBS-50C10-100 φ50 10 6.8 100 50 TCA-50C10-100 TCAN-50C10-100
TCBS-50C08-120 φ50 8 5.4 120 60 TCA-50C08-120 TCAN-50C08-120
TCBS-50C08-150 φ50 8 5.9 150 75 TCA-50C08-150 TCAN-50C08-150
TCBS-50C08-200 φ50 8 6.4 200 100 TCA-50C08-200 TCAN-50C08-200
TCBS-50C08-250 φ50 8 6.7 250 125 TCA-50C08-250 TCAN-50C08-250
TCBS-50C08-300 φ50 8 7.0 300 150 TCA-50C08-300 TCAN-50C08-300
TCBS-50C08-400 φ50 8 7.2 400 200 TCA-50C08-400 TCAN-50C08-400
TCBS-50C08-500 φ50 8 7.4 500 250 TCA-50C08-500 TCAN-50C08-500
TCBS-50C08-600 φ50 8 7.5 600 300 TCA-50C08-600 TCAN-50C08-600
TCBS-50C08-700 φ50 8 7.6 700 350 TCA-50C08-700 TCAN-50C08-700
TCBS-50C08-800 φ50 8 7.6 800 400 TCA-50C08-800 TCAN-50C08-800
TCBS-50C08-1000 φ50 8 7.7 1000 500 TCA-50C08-1000 TCAN-50C08-1000
TCBS-50C08-1500 φ50 8 7.8 1500 750 TCA-50C08-1500 TCAN-50C08-1500
TCBS-50C08-2000 φ50 8 7.8 2000 1000 TCA-50C08-2000 TCAN-50C08-2000
TCBS-50C08-2500 φ50 8 7.9 2500 1250 TCA-50C08-2500 TCAN-50C08-2500
TCBS-50C08-3000 φ50 8 7.9 3000 1500 TCA-50C08-3000 TCAN-50C08-3000
TCBS-50C08-3500 φ50 8 7.9 3500 1750 TCA-50C08-3500 TCAN-50C08-3500
TCBS-50C08-4000 φ50 8 7.9 4000 2000 TCA-50C08-4000 TCAN-50C08-4000
TCBS-50C08-5000 φ50 8 7.9 5000 2500 TCA-50C08-5000 TCAN-50C08-5000
TCBS-50C08-10000 φ50 8 8.0 10000 5000 TCA-50C08-10000 TCAN-50C08-10000
TCBS-50C08-30000 φ50 8 8.0 30000 15000 TCA-50C08-30000 TCAN-50C08-30000
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
B307

Optics & Optical Coatings
Concave mirror substrate for laser
LCBS
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
It is concave substrate which is used as the substrate of the mirror for the laser resonator.
It is processed with high surface flatness for the front and back plane of the concave mirror.
A production is also available with a dielectric multi-layer film with high laser damage threshold.
◦From among the wide variations that have been subdivided
in a diameter and focal length, you can select
according to the specifications.
◦Because it is also polished the back side, it is possible
to use for input of excitation laser or extraction of
sample beam.
◦It is also be able to use as a test plate of Newton for
convex lens surface because of the high accuracy and
precision of the radius of curvature.
Manual
Stages
Schematic
Specifications
Actuators
Rear surface: precision polished
Material
BK7
Surface accuracy Front (concave) λ/4 Rear (flat) λ/4
Motoeized
Stages
Radius Tolerance ±1%
Coating
Uncoated
Clear aperture
90% of actual diameter
Light
Sources
Surface Quality (Scratch−Dig)
20−10
Index
Front surface: precision polished
(concave)
Outline Drawing
(in mm)
Guide
▶It is also available of the concave reflector mirror substrate (TCA) of
the light source or lamp reflector telescope. B304
Guide
Mirrors
Beamsplitters
Polarizers
r
te
φD
●Tolerance
Diameter φD +0
−0.1
Thickness tc ±0.2
●Relationship between focal length “f”
and the radius of curvature “r” of the
concave mirror
r = 2f
Attention
▶The outer periphery of the ridge concave is chamfered, and thickness
of edge (te) may cause variations. For this reason, please use the
back side as the reference plane.
Lenses
f
tc
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
φ10
Part Number
Diameter
φD
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Radius of
curvature
r
[mm]
Focal
length
f
[mm]
LCBS-10C05-10 φ10 5 3.7 10 5
LCBS-10C05-15 φ10 5 4.1 15 7.5
LCBS-10C05-20 φ10 5 4.4 20 10
LCBS-10C05-25 φ10 5 4.5 25 12.5
LCBS-10C05-30 φ10 5 4.6 30 15
LCBS-10C05-40 φ10 5 4.7 40 20
LCBS-10C05-50 φ10 5 4.7 50 25
LCBS-10C05-60 φ10 5 4.8 60 30
LCBS-10C05-70 φ10 5 4.8 70 35
LCBS-10C05-80 φ10 5 4.8 80 40
LCBS-10C05-90 φ10 5 4.9 90 45
LCBS-10C05-100 φ10 5 4.9 100 50
LCBS-10C05-120 φ10 5 4.9 120 60
LCBS-10C05-150 φ10 5 4.9 150 75
LCBS-10C05-200 φ10 5 4.9 200 100
LCBS-10C05-250 φ10 5 4.9 250 125
LCBS-10C05-300 φ10 5 5.0 300 150
LCBS-10C05-400 φ10 5 5.0 400 200
LCBS-10C05-500 φ10 5 5.0 500 250
LCBS-10C05-600 φ10 5 5.0 600 300
LCBS-10C05-700 φ10 5 5.0 700 350
LCBS-10C05-800 φ10 5 5.0 800 400
LCBS-10C05-1000 φ10 5 5.0 1000 500
LCBS-10C05-1500 φ10 5 5.0 1500 750
LCBS-10C05-2000 φ10 5 5.0 2000 1000
LCBS-10C05-2500 φ10 5 5.0 2500 1250
LCBS-10C05-3000 φ10 5 5.0 3000 1500
LCBS-10C05-4000 φ10 5 5.0 4000 2000
LCBS-10C05-5000 φ10 5 5.0 5000 2500
LCBS-10C05-10000 φ10 5 5.0 10000 5000
LCBS-10C05-30000 φ10 5 5.0 30000 15000
φ15
Part Number
Diameter
φD
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Radius of
curvature
r
[mm]
Focal
length
f
[mm]
LCBS-15C07-10 φ15 7 3.6 10 5
LCBS-15C07-15 φ15 7 5.0 15 7.5
LCBS-15C05-20 φ15 5 3.5 20 10
LCBS-15C05-25 φ15 5 3.8 25 12.5
LCBS-15C05-30 φ15 5 4.0 30 15
LCBS-15C05-40 φ15 5 4.3 40 20
LCBS-15C05-50 φ15 5 4.4 50 25
LCBS-15C05-60 φ15 5 4.5 60 30
LCBS-15C05-70 φ15 5 4.6 70 35
LCBS-15C05-80 φ15 5 4.6 80 40
LCBS-15C05-90 φ15 5 4.7 90 45
LCBS-15C05-100 φ15 5 4.7 100 50
LCBS-15C05-120 φ15 5 4.8 120 60
LCBS-15C05-150 φ15 5 4.8 150 75
LCBS-15C05-200 φ15 5 4.9 200 100
LCBS-15C05-250 φ15 5 4.9 250 125
LCBS-15C05-300 φ15 5 4.9 300 150
LCBS-15C05-400 φ15 5 4.9 400 200
LCBS-15C05-500 φ15 5 4.9 500 250
LCBS-15C05-600 φ15 5 5.0 600 300
LCBS-15C05-700 φ15 5 5.0 700 350
LCBS-15C05-800 φ15 5 5.0 800 400
LCBS-15C05-1000 φ15 5 5.0 1000 500
LCBS-15C05-1500 φ15 5 5.0 1500 750
LCBS-15C05-2000 φ15 5 5.0 2000 1000
LCBS-15C05-2500 φ15 5 5.0 2500 1250
LCBS-15C05-3000 φ15 5 5.0 3000 1500
LCBS-15C05-4000 φ15 5 5.0 4000 2000
LCBS-15C05-5000 φ15 5 5.0 5000 2500
LCBS-15C05-10000 φ15 5 5.0 10000 5000
LCBS-15C05-30000 φ15 5 5.0 30000 15000
B308
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W3143
φ20 − φ25
Part Number
Diameter
φD
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Radius of
curvature
r
[mm]
Focal
length
f
[mm]
LCBS-20C08-15 φ20 8 4.2 15 7.5
LCBS-20C08-20 φ20 8 5.3 20 10
LCBS-20C08-25 φ20 8 5.9 25 12.5
LCBS-20C05-30 φ20 5 3.3 30 15
LCBS-20C05-40 φ20 5 3.7 40 20
LCBS-20C05-50 φ20 5 4.0 50 25
LCBS-20C05-60 φ20 5 4.2 60 30
LCBS-20C05-70 φ20 5 4.3 70 35
LCBS-20C05-80 φ20 5 4.4 80 40
LCBS-20C05-90 φ20 5 4.4 90 45
LCBS-20C05-100 φ20 5 4.5 100 50
LCBS-20C05-120 φ20 5 4.6 120 60
LCBS-20C05-150 φ20 5 4.7 150 75
LCBS-20C05-200 φ20 5 4.7 200 100
LCBS-20C05-250 φ20 5 4.8 250 125
LCBS-20C05-300 φ20 5 4.8 300 150
LCBS-20C05-400 φ20 5 4.9 400 200
LCBS-20C05-500 φ20 5 4.9 500 250
LCBS-20C05-600 φ20 5 4.9 600 300
LCBS-20C05-700 φ20 5 4.9 700 350
LCBS-20C05-800 φ20 5 4.9 800 400
LCBS-20C05-1000 φ20 5 5.0 1000 500
LCBS-20C05-1500 φ20 5 5.0 1500 750
LCBS-20C05-2000 φ20 5 5.0 2000 1000
LCBS-20C05-2500 φ20 5 5.0 2500 1250
LCBS-20C05-3000 φ20 5 5.0 3000 1500
LCBS-20C05-4000 φ20 5 5.0 4000 2000
LCBS-20C05-5000 φ20 5 5.0 5000 2500
LCBS-20C05-10000 φ20 5 5.0 10000 5000
LCBS-20C05-30000 φ20 5 5.0 30000 15000
LCBS-25C10-15 φ25 10 3.3 15 7.5
LCBS-25C07-20 φ25 7 2.6 20 10
LCBS-25C07-25 φ25 7 3.7 25 12.5
LCBS-25C07-30 φ25 7 4.3 30 15
LCBS-25C07-40 φ25 7 5.0 40 20
LCBS-25C07-50 φ25 7 5.4 50 25
LCBS-25C05-60 φ25 5 3.7 60 30
LCBS-25C05-70 φ25 5 3.9 70 35
LCBS-25C05-80 φ25 5 4.0 80 40
LCBS-25C05-90 φ25 5 4.1 90 45
LCBS-25C05-100 φ25 5 4.2 100 50
LCBS-25C05-120 φ25 5 4.3 120 60
LCBS-25C05-150 φ25 5 4.5 150 75
LCBS-25C05-200 φ25 5 4.6 200 100
LCBS-25C05-250 φ25 5 4.7 250 125
LCBS-25C05-300 φ25 5 4.7 300 150
LCBS-25C05-400 φ25 5 4.8 400 200
LCBS-25C05-500 φ25 5 4.8 500 250
LCBS-25C05-600 φ25 5 4.9 600 300
LCBS-25C05-700 φ25 5 4.9 700 350
LCBS-25C05-800 φ25 5 4.9 800 400
LCBS-25C05-1000 φ25 5 4.9 1000 500
LCBS-25C05-1500 φ25 5 4.9 1500 750
LCBS-25C05-2000 φ25 5 5.0 2000 1000
LCBS-25C05-2500 φ25 5 5.0 2500 1250
LCBS-25C05-3000 φ25 5 5.0 3000 1500
LCBS-25C05-4000 φ25 5 5.0 4000 2000
LCBS-25C05-5000 φ25 5 5.0 5000 2500
LCBS-25C05-10000 φ25 5 5.0 10000 5000
LCBS-25C05-30000 φ25 5 5.0 30000 15000
φ30
Part Number
Diameter
φD
[mm]
Thickness of
the edge
te
[mm]
Thickness of
the center
tc
[mm]
Radius of
curvature
r
[mm]
Focal
length
f
[mm]
LCBS-30C10-20 φ30 10 3.2 20 10
LCBS-30C10-25 φ30 10 5.0 25 12.5
LCBS-30C07-30 φ30 7 3.0 30 15
LCBS-30C07-40 φ30 7 4.1 40 20
LCBS-30C07-50 φ30 7 4.7 50 25
LCBS-30C07-60 φ30 7 5.1 60 30
LCBS-30C07-70 φ30 7 5.4 70 35
LCBS-30C07-80 φ30 7 5.6 80 40
LCBS-30C07-90 φ30 7 5.7 90 45
LCBS-30C07-100 φ30 7 5.9 100 50
LCBS-30C05-120 φ30 5 4.1 120 60
LCBS-30C05-150 φ30 5 4.2 150 75
LCBS-30C05-200 φ30 5 4.4 200 100
LCBS-30C05-250 φ30 5 4.5 250 125
LCBS-30C05-300 φ30 5 4.6 300 150
LCBS-30C05-400 φ30 5 4.7 400 200
LCBS-30C05-500 φ30 5 4.8 500 250
LCBS-30C05-600 φ30 5 4.8 600 300
LCBS-30C05-700 φ30 5 4.8 700 350
LCBS-30C05-800 φ30 5 4.9 800 400
LCBS-30C05-1000 φ30 5 4.9 1000 500
LCBS-30C05-1500 φ30 5 4.9 1500 750
LCBS-30C05-2000 φ30 5 4.9 2000 1000
LCBS-30C05-2500 φ30 5 5.0 2500 1250
LCBS-30C05-3000 φ30 5 5.0 3000 1500
LCBS-30C05-3500 φ30 5 5.0 3500 1750
LCBS-30C05-4000 φ30 5 5.0 4000 2000
LCBS-30C05-5000 φ30 5 5.0 5000 2500
LCBS-30C05-10000 φ30 5 5.0 10000 5000
LCBS-30C05-30000 φ30 5 5.0 30000 15000
Compatible Optic Mounts
MHG-HS25-NL, -HS30-NL / LHCM-10, -15 /
ALHN-25-5RO, -30-5RO
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
B309

Optics & Optical Coatings
Custom curved mirror
Custom-made
Catalog
Code
W3144
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
With the substrate that are listed in the catalog, we offer the production of mirror curvature and
size that is not listed in the catalog and the coating of your request.
Please use the “Contact Us form for custom mirror” format on the next page.
◦For the specifications of the coating, please refer to the
chapter of the mirror coating properties in the catalog.
◦Regardless of a lot or small quantity, we offer the
production of custom-made curved mirror.
◦We list below the typical radius of curvature of the
curved mirror.If you specify a radius of curvature not on
this list, it may cost for jigs and tools other than the
processing cost. For more information, please consult
our International Sales Divison.
Manual
Stages
Actuators
Motoeized
Stages
Schematic
Light
Sources
●Concave mirror
Specified wavelength to use
Rear surface
(Ground or Polished)
●Convex mirror
Rear surface
(Ground or Polished)
Index
Specified wavelength to use
Guide
Mirrors
Beamsplitters
Front surface: Polished concave surface
(Specified radius of curvature and specified coating)
Shape (specified material)
(Circle or Square)
Front surface: Polished convex surface
(Specified radius of curvature and specified coating)
Shape (specified material)
(Circle or Square)
Polarizers
Lenses
Multi-Element Optics
Filters
●Cylindrical concave mirror
●Cylindrical convex mirror
Prisms
Substrates/Windows
Optical Data
Specified wavelength to use
Rear surface
(Ground or Polished)
Specified
wavelength to use
Rear surface
(Ground or Polished)
Maintenance
Selection Guide
Low Scattering
Front surface: Polished concave surface
(Specified radius of curvature and specified coating)
Shape (specified material)
(Circle or Square or Rectangle)
Front surface: Polished convex surface
(Specified radius of curvature and specified coating)
Shape (specified material)
(Circle or Square or Rectangle)
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
List of spherical radius curvature
(in mm)
List of cylindrical radius curvature
10 100 1000 10000
6.90 10.38 32.20 103.80 460.0
15 120 1500 20000
7.79 11.50 36.33 115.00 519.0
20 150 2000 30000
9.20 12.98 36.80 129.80
25 200 2500
13.80 41.52 138.00
30 250 3000
15.57 46.00 155.70
40 300 4000
18.40 51.90 184.00
50 400 5000
20.76 59.80 207.60
60 500
23.00 67.47 230.00
70 600
25.95 69.00 259.50
80 700
27.60 77.85 322.00
90 800
31.14 92.00 363.30
* If you specify a radius of curvature not on this list, it may take some other processing cost of margin for jig. For more information, please consult our International
Sales Divison.
(in mm)
B310
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Contact sheet
Contact sheet for Special Order for Custom curved mirror ■Estimation ■Order
Date
To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Affiliation
(Organization Name)
Department
TEL
Country/Address
Name &
Designation
Drawing Number
Desired
Delivery Date
Substrate
Material
Type
Dimensions
If you do not specify
a dimension tolerance
is outside the
standard tolerance
Specifications
of Coating
Select metallic
coating or dielectric
multi-layer coating.
Specifications
of Light Source
Used
BK7 Synthetic fused sillica Pyrex® Other ( )
spherical cylindrical concave convex Rear surface Polished Ground None
A te te
b
a
FAX
tc
tc
te
Radius of
curvature
Polarization
Inicident angle =
° conditions
* Write more detailed specifications here. (Rough illustration is acceptable.)
r
Radius of
curvature
r
Name
Estimate
Budget
Radius of
curvature
te
r
Radius of
curvature
r
tc
tc
E-mail
Yes: by Date
A
te
r
a
b
Standard radius
of curvature
Quantity
(Tentative name is okay)
No
JP Yen
If you are using a substrate of standard product, please fill in the product number.
* If you specify a standard product of the substrate, it is not necessary to fill in
fields marked with .
mm
mm
mm
mm
mm
10, 15, 20, 25, 30, 40, 50, 60, 70,
80, 90, 100, 120, 150, 200, 250,
300, 400, 500, 600, 700, 800,
1000, 1500, 2000, 2500, 3000,
4000, 5000, 10000, 20000,
30000
For cylindrical lens, please refer to
the W3144
When fabricating a lens other than the
above curvature radius, it may be
necessary tooling costs.
Metallic coating Al only AI+MgF2 AI+SiO Cr+Au Pt Other ( )
Dielectric
multi-layer coating Reflectance R =
Wavelength
Range = nm Type
Output
W
Beam size
mm
or
Energy
J Pulse width s Repetition frequency Hz
If there is no specification in advance,
we will process a circular polarization
or a random polarization.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
Other
Sigma Koki Co., Ltd.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
B311

Optics & Optical Coatings
Catalog
Optical Flats HMPQP/HMPZP Code W3145
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
It is the substrate polished to high precision which material change of the shape is very small due to
the temperature. It is available to use as test plates of the interferometer and the Newton test plate.
◦Inspection data of interferometric surface accuracy is attached to the optical flats.
◦You can select the required optical flat from the variations that have been subdivided in various sizes and surface accuracy.
◦In the high-precision and large size optical flats, a material having a low thermal expansion than synthetic fused silica is
used.
◦Arrow on the side of the surface have shown is the polished surface of high surface accuracy.
◦Optical flat is delivered into the case for storage.
Specifications
Synthetic fused silica
Material
low-expansion glass
(ZERODUR ® or CLEARCERAM ® -Z)
Parallelism

Standard type
Part Number
Diameter φD
[mm]
Thckness t
[mm]
Material
Surface flatness
PV
HMPQP-30C10-6 φ30 10 Synthetic fused silica λ/6
HMPQP-30C10-12 φ30 10 Synthetic fused silica λ/12
HMPQP-30C10-20 φ30 10 Synthetic fused silica λ/20
HMPQP-40C10-6 φ40 10 Synthetic fused silica λ/6
HMPQP-40C10-12 φ40 10 Synthetic fused silica λ/12
HMPQP-40C10-20 φ40 10 Synthetic fused silica λ/20
HMPQP-50C10-6 φ50 10 Synthetic fused silica λ/6
HMPQP-50C10-12 φ50 10 Synthetic fused silica λ/12
HMPQP-50C10-20 φ50 10 Synthetic fused silica λ/20
HMPQP-60C12-6 φ60 12 Synthetic fused silica λ/6
HMPQP-60C12-12 φ60 12 Synthetic fused silica λ/12
HMPQP-60C12-20 φ60 12 Synthetic fused silica λ/20
HMPQP-80C15-6 φ80 15 Synthetic fused silica λ/6
HMPQP-80C15-12 φ80 15 Synthetic fused silica λ/12
HMPQP-80C15-20 φ80 15 Synthetic fused silica λ/20
HMPQP-100C20-6 φ100 20 Synthetic fused silica λ/6
HMPQP-100C20-12 φ100 20 Synthetic fused silica λ/12
HMPQP-100C20-20 φ100 20 Synthetic fused silica λ/20
HMPZP-100C17-6 φ100 17 low-expansion glass λ/6
HMPZP-100C17-12 φ100 17 low-expansion glass λ/12
HMPZP-100C17-20 φ100 17 low-expansion glass λ/20
HMPQP-130C25-6 φ130 25 Synthetic fused silica λ/6
HMPQP-130C25-12 φ130 25 Synthetic fused silica λ/12
HMPQP-130C25-20 φ130 25 Synthetic fused silica λ/20
HMPZP-130C20-6 φ130 20 low-expansion glass λ/6
HMPZP-130C20-12 φ130 20 low-expansion glass λ/12
HMPZP-130C20-20 φ130 20 low-expansion glass λ/20
HMPQP-150C30-6 φ150 30 Synthetic fused silica λ/6
HMPQP-150C30-12 φ150 30 Synthetic fused silica λ/12
HMPQP-150C30-20 φ150 30 Synthetic fused silica λ/20
HMPZP-150C25-6 φ150 25 low-expansion glass λ/6
HMPZP-150C25-12 φ150 25 low-expansion glass λ/12
HMPZP-150C25-20 φ150 25 low-expansion glass λ/20
Higt precision type
Part Number
Diameter φD
[mm]
Thckness t
[mm]
Material
Surface flatness
PV
HMPQP-30C10-40 φ30 10 Synthetic fused silica λ/40
HMPQP-40C10-40 φ40 10 Synthetic fused silica λ/40
HMPQP-50C10-40 φ50 10 Synthetic fused silica λ/40
HMPQP-60C12-40 φ60 12 Synthetic fused silica λ/40
HMPQP-80C15-40 φ80 15 Synthetic fused silica λ/40
HMPQP-100C20-40 φ100 20 Synthetic fused silica λ/40
HMPQP-130C25-40 φ130 25 Synthetic fused silica λ/40
HMPQP-150C30-40 φ150 30 Synthetic fused silica λ/40
HMPZP-150C25-40 φ150 25 low-expansion glass λ/40
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
B313

Optics & Optical Coatings
Master Optics
Custom-made
Catalog
Code
W3146
Application
Systems
Optics &
Optical
Coatings
Holders
We will offer to make ​a shape and size according to the request of planar substrate with a reflected
wavefront and transmitted wavefront with high precision.
Production of large-diameter optical grade polishing φ300mm maximum is available.
It is also available to special processing, such as drilling hole or rectangular shape.
◦A data of transmitted wavefront measurement or reflected wavefront by the interferometer is attached.
◦According to the required accuracy and environment of use, it can be selected from the glass of various low-expansion
substrate material.
◦It is also available to coat the master optics. However, depending on the type of coating it may not be able to guarantee
the surface flatness.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Specifications
Maximum Diameter
Proper thickness
Clear aperture
Material
Surface flatness
Guide
▶It is also available optical flat (HMPQP / HMPZP) that has been
standardized by the reflecting surface flatness. B312
▶It is also available planar substrate (OFPXP) with surface accuracy
of λ/10 and less φ150mm. B288
Attention
φ300mm
50 − 38mm
(Approximately 1/6 to 1/8 of diameter)
90% of actual aperture
Various synthetic fused silica or low-expansion glass.
λ/10
(It may vary depending on the thickness and outer diameter.)
▶If coated after the polishing, it may not be guaranteed surface
flatness.
▶Due to the difficulty in procurement of the materials and processing
conditions, there is a possibilities of longer production periods.
Please check with International Sales Division.
▶If the holder is fixed to the master optics, and tightening too strongly
the screws, or the use of curable adhesive may cause to reduce a
surface flatness of the master optics.
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
Surface flatness data (reference data)
Fringe image
・Surface accuracy measurement method:
Measured with Zygo laser interferometer
・Surface accuracy measurement wavelength
632.8nm
・Surface accuracy guaranteed temperature
23°C±2°C
Analysis of three-dimensional data
B314
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Contact sheet
Contact sheet for Special Order for Master Optics
To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Affiliation
(Organization Name)
Department
TEL
Country/Address
Name &
Designation
Drawing Number
Desired
Delivery Date
Dimensions
If you do not specify
a dimension tolerance
is outside the
standard tolerance
FAX
Name
Estimate
Budget
A t b
t
a
E-mail
Yes: by Date
A
a
b
t
■Estimation ■Order
Date
(Tentative name is okay)
No
JP Yen
mm
mm
mm
mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Application
Surface
Flatness
Parallelism
Wedge angle
Hole
Specifications
of Coating
Optical flat for Newton ring
Window
Optical Parallels
Optical flats with hole
Other (
Master Optical flat
Optical Flats
Wedged Substrates
)
Material
* If you check Yes (with),
please indicate your
required details on the
right column.
Attached
data
Synthetic fused sillica BK7
Pyrex ® Low-expansion glass
CLEARCERAM ® -Z ULE
ZERODUR ®
Other ( )
Reflected
Transmitted
wavefront distortion: / wavefront distortion: / Quantity
Wedge Parallel
With hole Flat
Type of
coat
Metal coat (Al, Cr, Au)
Single-layer anti-reflection coating
Multi-layer anti-reflection coating
Rear surface Ground Polished None
Center
wavelength
Wavelength
Range
* Write more detailed specifications here. (Rough illustration is acceptable.)
* Substrate other than the
optical flat, you can skip
this column
Photography of interference fringe
Data analysis of the interference fringes
(PV, RMS, 3D chart
nm
Surface Single side Both sides Incident angle
°
Type
Wavelength
Range
nm Beam size
mm
Output
or
W
Energy
J Pulse width s Repetition frequency Hz
nm
nm
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
Other
Sigma Koki Co., Ltd.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
B315

Optics & Optical Coatings
Optical Windows with anti-reflection coating
WBMA
Catalog
Code
W3147
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
It is a high-quality window used when light is passed through the opposite side of the partition or
in the vacuum chamber. Since increasing the transmittance in the anti-reflection coating, you can
use as a window for laser irradiation windows and the observation of the sample.
◦By anti-reflection coating with a dielectric multi-layer, it is reduced to less than 1% to 4% reflection of glass surface.
◦Since we are using the high quality material, the image will not be distorted by the transmission of the glass, and the
laser beam is not diffused.
◦When you insert an window perpendicular to the optical path of the laser, the angle of the transmitted beam will not be
changed.
Specifications
Material
BK7
Surface flatness of substrate λ/10
Parallelism Average 99
Near-infrared WBMA-30C20-10-IR1 633 − 1064 > Average 98.5
Infrared WBMA-30C20-10-IR2 750 − 1550 > Average 98.5
Part of the above is an example of if you want to coat anti-reflective coating
on the lens of the WBMA-30C02-10-550.
Anti-reflection coating can be available to the lens of all of WBMA.
T [%]
Infrared
750 − 1550nm
100
95
90
85
80
75
70
65
60
55
50
300
500
Visible range AR
Near-infrared range AR
Infrared range AR
700 900 1100 1300 1500 1700
λ [nm]
Diameter φD
[mm]
WBMA-15C02-10-550 -IR1 -IR2 φ15 2
WBMA-15C03-10-550 -IR1 -IR2 φ15 3
WBMA-20C02-10-550 -IR1 -IR2 φ20 2
WBMA-20C03-10-550 -IR1 -IR2 φ20 3
WBMA-25.4C03-10-550 -IR1 -IR2 φ25.4 3
WBMA-25C02-10-550 -IR1 -IR2 φ25 2
WBMA-25C03-10-550 -IR1 -IR2 φ25 3
WBMA-30C02-10-550 -IR1 -IR2 φ30 2
WBMA-30C03-10-550 -IR1 -IR2 φ30 3
WBMA-40C04-10-550 -IR1 -IR2 φ40 4
WBMA-50C05-10-550 -IR1 -IR2 φ50 5
Thckness t
[mm]
Compatible Optic Mounts
LHF-15S, -20S, -25.4S, -25S, -30S, -40S, -50S
B316
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

AR Coated Windows for High Power Laser
WSQNAHP
Catalog
Code
W3148
It is a high-quality window used when light is passed through the opposite side of the partition in
the sealed container. Because it increases the transmittance according to the wavelength of the
YAG laser, you can use as the laser windows.
◦When you insert an window perpendicular to the optical path of the laser, the angle of the transmitted beam is not changed.
◦Since the high laser threshold coating is applied on the low scattering substrate, it can be used for the high-energy
pulsed laser.
Specifications
Material
Synthetic fused silica
Surface flatness of substrate λ/10
Coating
Multi-layer anti-reflection coating
Transmittance >99%
Incident angle 0°
Surface Quality (Scratch−Dig) 10−5
Clear aperture
90% of actual aperture
Guide
▶We offer also AR coating according to your wavelength selection.
▶Product sizes and wedges which are not mentioned on this catalog,
please ask our International Sales Division.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Schematic
●Parallel plate
Front surface:
Dielectric multi-layer AR coating
Rear surface:
Dielectric multi-layer AR coating
Attention
▶When wedge type windows are inserted into the optical path of the
laser beam, the beam tilt of about 0.5° is expected.
▶When used at a wavelength other than the designed wavelength,
the loss of transmitted light will be higher.
▶When used in a large incident angle, the transmittance may decay.
We can also offer AR coating with highest transmission at specific
angle of incidence.
▶When used in high-energy laser with thin diameter, there is a
possibility that damage occurs. Before using, make sure that the
laser beam does not exceed the laser damage threshold.
▶Wedged substrates has a marking of an arrow toward the direction
of front surface at the thickest point.
Light
Sources
Index
Guide
Mirrors
Beamsplitters
●Wedge
Rear surface:
Dielectric multi-layer AR coating
Outline Drawing
Front
surface
t
Rear
surface
(in mm)
●Tolerance
Diameter φD +0
−0.1
Thickness t ±0.1
Polarizers
Lenses
Multi-Element Optics
φD
Filters
Front surface:
Dielectric multi-layer AR coating
Specifications
Part Number
Wavelength Range
[nm]
Diameter φD
[mm]
Thckness t
[mm]
Parallelism
Wedge angle
Laser Damage Threshold*
[J/cm 2 ]
WSQNAHP-25.4C03-10-266 266 φ25.4 3

Optics & Optical Coatings
Water Free Synthetic Fused Silica Windows for Infrared Laser
OPNQ
Catalog
Code
W3149
Application
Systems
Optics &
Optical
Coatings
A standard Fused silica window has hydroxyl absorption (OH radical group) at wavelength 1.4µm,
2.2µm, 2.7µm. Anhydrous synthetic quartz is a special production method that does not absorb to
the water molecules in the molecular glass; therefore there is no hydroxyl absorption at the IR region.
◦Except the physical characteristics and optical properties of none hydroxyl absorption at IR region, there is not different
from conventional synthetic quartz.
◦Physically robust and high stability, recommend to use in vacuum and high pressure environment.
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Index
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Schematic
Front surface: Polished
Uncoated
Specifications
Material
Water Free Synthetic Fused Silica
Parallelism

Sapphire Windows for Infrared Laser
OPSH
Catalog
Code
W3150
These Sapphire windows contains no impurities, provide high transmittance without any absorption
covering the visible and the infra-red regions of the spectrum. Recommended to use these sapphire
windows where the most durable surface is required such as cover windows.
◦Also have excellent heat resistance and weather resistance. It can also be used for outdoor application or as a protective
glass for optical system.
◦High transmittance from visible regions to Infra-red regions spectrum, widely used as windows for detector system.
Specifications
Material
Optical Sapphire Crystal (Uniaxial crystal)
Crystal axis direction
Not define the direction of the crystal axis
Parallelism

Optics & Optical Coatings
CaF2 windows for Ultraviolet and Infrared Laser
OPCFU/OPCF
Catalog
Code
W3151
Application
Systems
Optics &
Optical
Coatings
Holders
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Stages
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The CaF2 (Calcium Fluoride) crystal windows offer superior transmission in broad wavelength from
vacuum ultraviolet (130nm) to Infra-red (8µm).
◦These CaF2 windows contain low impurities assure a high transmission at UV regions.
◦High durability at high humidity environment compare to other glass materials.
◦CaF2 is an isotropic type of optics, there is no birefringence.
Specifications
Material
Calcium Fluoride
Parallelism

ZnSe Windows for Infrared Laser
OPZS/WZSA
Catalog
Code
W3152
Windows made of zinc selenium (ZnSe), the most commonly used optical material that allows
transmission of infrared light. Nonhygroscopic and extremely stable under normal conditions, in
contrast to other salt-based infrared materials.
◦It is available which uncoated type (OPZS) for uniform transmittance in wide range infrared wavelength and AR coated
type (WZSA) for high transmittance for wavelength of CO2 laser.
◦It is possible to transmit light with a wavelength around 600nm, so it can be used also to visible laser as a guide light
along superimposed on infrared laser.enabling use of more convenient and inexpensive He-Ne lasers.
◦Because ZnSe crystal havs amost no hygroscopic , it can be handled in the same way as the general optical element.
◦Because ZnSe crystal is crystal isotropic, it does not occur birefringence or polarization characteristics.
Application
Systems
Optics &
Optical
Coatings
Holders
Specifications
Material
Coating
Incident angle
Surface Quality (Scratch−Dig)
Clear aperture
Guide
Zinc Selenide Crystal
OPZS: Uncoated
WZSA: Anti-reflection coating
(at Wavelength 10.6µm)
0° (WZSA only)
40−20
90% of actual aperture
▶We are also offering ZnSe lens (SLZS) for use in CO2 Laser.
B164
▶Product sizes and wedges which are not mentioned on this catalog,
please ask our International Sales Division.
Bases
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Schematic
Front surface: Polished
Uncoated or multi-layer anti-reflection coating
Rear surface: Polished
Uncoated or multi-layer anti-reflection coating
Attention
▶Toxic hydrogen selenide is generated by contact with strong acids.
It is immersed in a solution such as sulfuric acid or hydrochloric
acid. Please do not use liquid solution to be in contact with ZnSe.
▶Focusing with a high power laser onto the ZnSe lens, toxic gases
may occur by heat decomposition. When ZnSe is damaged with
over heating of Laser a large amount of gas and powder may occur.
It case of breaking ZnSe, please avoid touching the substrates with
bare hand and avoid breathing on powder and the gas.
▶The surface and the back side of non-coated type has 17% of
reflectivity on each surface. The total of power loss at transmittance
is estimated at 30%.
▶The WZSQ type must be used at incident angle at 0 degree for a
best transmittance.
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Schematic
(in mm)
Multi-Element Optics
D
●Tolerance
Diameter φD +0
−0.1
Thickness t ±0.1
Filters
Prisms
Substrates/Windows
t
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
About the handling policy of ZnSe optics
Legally, ZnSe has been considered as a toxic optic substance, the
non-coated product (OPZS) must be delivered with a certificate
of Acquisition of Poisonous and Deleterious Substances.
In addition, it is not allowed to waste the unused ZnSe optics
as a general optics. Optics that are no longer needed, please
return to us. (We accept only product sold by us)
The above is a case in Japan and please ask nearly sales contact
about the case outside Japan.
T []
100
80
60
40
20
Typical Transmittance Data
T: Transmission
ZnSe
ZnSe+AR
Master Optics
Windows
0
0 5 10 15 20 25
[µm]
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B321

Optics & Optical Coatings
ZnSe Windows for Infrared Laser
OPZS/WZSA
Application
Systems
Optics &
Optical
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Manual
Stages
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Motoeized
Stages
Uncoated
Part Number
Diameter
φD
[mm]
Thckness
t
[mm]
Parallelism
Transmission
(Wavelength10.6μm)
[%]
OPZS-30C03-10-3 φ30 3

Silicon Windows for Infrared Laser
OPSI
Catalog
Code
W3153
The silicon as a mono crystal primarily used in semi-conductor is non-absorptive at spectrum
1.2µm to 6µm IR regions. It is used here as an optical component for IR region application.
◦These silicon windows does not transmit at 1µm region or under, therefore its main application is at IR regions.
◦It is used for various experiments with these silicon windows.
◦Because of its high thermal conductivity, it fits for use as high power laser mirror.
Specifications
Material
Silicon Single Crystal
Parallelism

Optics & Optical Coatings
Germanium Windows for Infrared Laser
OPGE
Catalog
Code
W3154
Application
Systems
Optics &
Optical
Coatings
Holders
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The Germanium as a mono crystal primarily used in semi-conductor is non-absorptive at spectrum
2µm to 20µm IR regions. It is used here as an optical component for IR region application.
◦These silicon windows does not transmit at 1.5µm region or under, therefore its main application is at IR regions.
◦It is used for various experiments with these Germanium windows.
Specifications
Material
Germanium Single Crystal
Parallelism

Brewster Windows
Custom-made
Catalog
Code
W3155
This window plate which transmits substantially 100% linearly polarized laser beam with a nonreflective
effect of the P-polarized light at Brewster angle.
Brewster window can be used as a window of the laser instruments.
◦When installed Brewster angle against the incident beam, the circular effective diameter can be obtained.
◦Since both sides are not coated, it can be used with the high-energy pulse laser.
◦Please specify the materials (synthetic fused silica or BK7), transmitted beam diameter, thickness, and the wavelength to
be used (or Brewster angle).
Attention
▶If the incident polarization state is other than P-polarized light, the
transmission losses occur due to reflection at the front and back.
▶If contamination existon the entrance surface or the exit surface,
then the surface reflection may occur even for the incident P
polarized light.
▶If the incident angle deviates slightly from the Brewster angle,
surface reflection occurs.
Application
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Schematic Outline Drawing (in mm)
Light
Sources
Brewster angle
Uncoated
Index
P polarization
θB
φD
θB
Guide
Uncoated
t
Mirrors
Beamsplitters
Brewster angle with respect to the wavelength of the refractive index of BK7 and synthetic fused silica
BK7
Synthetic fused silica
Wavelength
[nm]
Brewster angle θB
Brewster angle θB
Refractive Index
Refractive Index
[ ° ]
[ ° ]
266 − − 1.499 56.3
355 1.539 57.0 1.476 55.9
488 1.522 56.7 1.463 55.6
532 1.519 56.6 1.461 55.6
632.8 1.515 56.6 1.457 55.5
1064 1.507 56.4 1.449 55.4
1550 1.501 56.3 1.444 55.3
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
■About Brewster angle
Master Optics
Surface reflection of the glass varies with the angle of incidence.
In addition, there is a difference in reflectance also by the light
oscillation direction (azimuthally polarization).
Surface reflection is 0 when (the vibration direction of incident
light and the plane containing the normal to the reflecting
surface) P-polarized light is incident at an angle θB Brewster,
the incident light is transmitted in all of the glass. This Brewster
angle can be calculated by the following equation by the
refractive index of the glass.
Brewster condition tanθB = n
On the other hand, S polarized (vibration direction parallel to
the reflecting surface), reflectance increases as the incident
angle increases, the reflection becomes never 0.
●Brewster angle
refractive
index of air 1
θB
refractive
index of gas n
S polarization
P polarization
●Change in reflectance for incident angle
100
R []
80
60
40
20
P polarization
S polarization
0 0 15 20 25 30 35 40
Incident angle [ ° ]
Windows
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B325

Optics & Optical Coatings
Contact sheet
Application
Systems
Optics &
Optical
Coatings
Holders
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Contact sheet for Special Order for Windows
To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Affiliation
(Organization Name)
Department
TEL
Country/Address
Name &
Designation
Drawing Number
Desired
Delivery Date
Quantity
FAX
Name
Estimate
Budget
E-mail
Yes: by Date
■Estimation ■Order
Date
(Tentative name is okay)
No
JP Yen
Light
Sources
Index
Standard
product
If you are using a substrate of standard product,
please fill in the product number.
Material BK7 Synthetic fused sillica Other ( )
Substrates
A t b
t
A
mm
Guide
Mirrors
Beamsplitters
Polarizers
If you do not specify
a dimension tolerance
is outside the standard
tolerance.
Custom
a
a
b
t
mm
mm
mm
Lenses
Surface flatness
( = 632.8nm)
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Anti-reflection
coating
Parallelism
Wavelength
Range
Wedge
None Single-layer anti-reflection coating (SLAR)
Multi-layer anti-reflection coating (MLAR) Other ( )
= nm Incident angle 0° Other ( )
* Write more detailed specifications here. (Rough illustration is acceptable.)
Selection Guide
Low Scattering
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror
Substrates
Master Optics
Windows
Other
Sigma Koki Co., Ltd.
B326
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Technical Referenceaintenance
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Technical Reference & Maintenance
I N D E X
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Glass Materials
Glass materials used for optical systems are divided into three major types. Optical glass that
transmits light such as prisms and half mirrors, substrate glass used for mirrors, and glass for a lens
that is subdivided by refractive index and wavelength dispersion.
Optical Glass Materials
Typical optical glass materials are BK7 and synthetic fused silica. These materials have excellent internal quality, are chemically
stable, and relatively easy to procure.
BK7
Optical glass material that is collectively called BK7, and has been used
for lenses and prisms through the ages.
The model number differs among manufacturers such as BSC7 or BSL7,
but since the composition ratio, optical property, physical property and
chemical property are almost the same, “BK7” is used as a generic name.
This material has high permeability in the visible range and very low
amounts of bubbles and inclusions, and striate and uneven refractive
index that are problems in optical systems are reduced to the level where
they practically do not have any influence.
In addition to the use in lenses and prisms, it is used in most optics such
as substrates of mirrors and beamsplitters or substrates of various
deposited filters.
Synthetic Fused Silica
Optical glass made of pure SiO2 without inclusion of any other components.
The properties of this material include higher transmittance in the ultraviolet
region and infrared region than BK7, and low thermal expansion.
Its refractive index is slightly smaller than BK7, but it provides internal quality
equivalent to BK7, and is used in various optics as in the case of BK7.
Especially, this is often the material of choice for use with wavelengths
other than the visible range.
Its low thermal expansion also makes it useful for substrates of highprecision
mirrors or plane standards.
Synthetic Fused Silica for Excimer Laser
When you irradiate glass with ultraviolet light, the glass sometimes
fluoresces.
Also, prolonged exposure to ultraviolet light causes a phenomenon called
solarization, in which coloration to reddish brown occurs inside the glass.
Synthetic fused silica is glass resistant to fluorescence and solarization, but
these phenomena sometimes occur when the wavelength of ultraviolet
light is short. The causes are impurities inside the glass or molecular level
flaws, and these causes can be reduced by improving purity of materials
or devising a manufacturing method.
Synthetic fused silica manufactured in such a special manufacturing
method is used for excimer lasers Ar*F (193nm) and Kr*F (248nm).
(Contact our International Sales Division when using with an Ar*F excimer
laser.)
Water Free Synthetic Fused Silica
Synthetic fused silica exhibits characteristic absorption at the infrared
wavelengths of 1.38μm, 2.22μm and 2.7μm.
This absorption is due to water (OH radical) attached to SiO2 molecules.
Water free synthetic fused silica is manufactured in a special environment
to prevent water from bonding with SiO2, thus it can provide high transmittance
up to 3.0μm infrared.
On the other hand, its transmittance in the ultraviolet region is not very
high because impurities are added to dewater it forcibly.
Comparison Chart of Refractive Index and Transmittance between Synthetic Fused Silica and BK7 (Reference Data)
Wavelength
[nm]
Synthetic Fused Silica
Refractive
Index n
Transmittance
T
[%]
Refractive
Index n
BK7
Transmittance
T
[%]
Note
Wavelength
[nm]
Synthetic Fused Silica
Refractive
Index n
Transmittance
T
[%]
Refractive
Index n
BK7
Transmittance
T
[%]
Substrate thickness: 10mm
165 830 1.452 94 1.510 92 Near Infrared LD
166 0 852.1 1.452 94 1.510 92 Cs s
167 20 904 1.452 94 1.509 92 Near Infrared LD
168 35 1014 1.450 94 1.508 92 Hg t
169 46 1064 1.449 94 1.507 92 YAG laser
170 50 1100 1.449 94 1.507 92
173 75 1200 1.448 93 1.505 92
175 80 1320 1.447 92 1.504 92 LD for communication
180 84 1400 1.446 87 1.503 91
185.4 85 1500 1.445 93 1.501 91
190 86 1550 1.444 93 1.500 91 LD for communication
193.5 1.561 87 Ar*F laser 1600 1.443 94 1.500 91
200 1.548 88 1700 1.442 94 1.499 91
210 1.540 90 1800 1.441 94 1.497 88
220 1.534 91 1900 1.440 94 1.497 85
230 1.523 91 2000 1.438 94 1.495 83
240 1.515 92 2100 1.437 92 1.493 81
248.4 1.510 92 Kr*F laser 2200 1.435 67 1.492 73
266 1.499 92 0 YAG4ω laser 2220 1.434 56 1.492 71
281.8 1.492 92 2 Xe*Br laser 2250 1.434 64 1.491 70
308 1.485 92 51 Xe*Cl laser 2300 1.433 80 1.490 72
325 1.483 92 1.545 79 He-Cd laser 2400 1.431 87 1.487 65
337.1 1.480 93 1.541 86 N2 Laser 2500 1.430 73 1.485 59
355 1.476 93 1.539 90 YAG3ω laser 2600 1.428 58 1.484 55
365 1.475 93 1.536 91 Hg i 2650 1.427 20 1.483 40
404.7 1.470 93 1.530 92 Hg h 2700 1.426 0 1.483 30
435.8 1.467 93 1.527 92 Hg g 2720 1.426 0 1.482 23
441.6 1.466 93 1.526 92 He-Cd laser 2750 1.425 0 1.481 19
457.9 1.465 93 1.525 92 Ar laser 2800 1.424 0 9
480 1.464 93 1.523 92 Cd F′ 2900 1.422 40 0
486.1 1.463 93 1.522 92 H F 3000 1.419 65
488 1.463 93 1.522 92 Ar laser 3100 1.417 75
514.5 1.461 93 1.520 92 Ar laser 3200 1.414 78
532 1.461 93 1.519 92 YAG2ω laser 3300 1.412 81
546.1 1.460 93 1.519 92 Hg e 3400 1.409 80
587.6 1.458 93 1.517 92 He d 3500 1.407 70
589.3 1.458 93 1.517 92 Na D 3600 61
632.8 1.457 94 1.515 92 He-Ne laser 3700 50
643.9 1.457 94 1.515 92 Cd C′ 3800 25
650 1.457 94 1.514 92 Red LD 3900 21
BK7 Synthetic Fused Silica
656.3 1.456 94 1.514 92 H C 4000 23 Abbe Number d 64.1 67.8
670 1.456 94 1.514 92 Red LD 4100 15 Density [g/cm 3 ] 2.52 2.20
694.3 1.456 94 1.513 92 RUBY laser 4200 4
Coefficient of Thermal Expansion [×10 −6 /°C] 7.2 0.47
780 1.454 94 1.512 92 Near Infrared LD 4300 0
Thermal Conductivity [Wm −1 K −1 ] 1.13 1.38
* Transmittance includes loss of the light volume by reflection on the front and back surfaces.
Note
Application
Systems
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Mirrors
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Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
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B329

Optics & Optical Coatings
Glass Materials
Application
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Index
Substrate Glass Materials
Usually a mirror uses a substrate made of BK7 or synthetic fused silica glass, polished to high precision. In cases where
high surface flatness is not required or a thin substrate is used, however, a mirror is fabricated from glass called Pyrex ® ,
which is used as a material of sheet glass, white glass or blue glass.
Some sheet glass achieves high flatness without polishing, and sometimes mirrors are fabricated by depositing coatings
directly on this type of sheet glass.
Hard Glass (Pyrex ® )
The generic name of glass used for dishes or heat-resistant containers,
and Pyrex ® is a typical product.
This material is resistant to scratches because it is chemically very
stable, which makes it useful as glass substrates of mirrors.
Pyrex ® is a registered trademark of Corning Incorporated.
Wavelength
[nm]
Refractive Index
350 1.480
400 1.478
500 1.474
600 1.472
Density [g/cm 3 ] 2.23
Coefficient of Thermal Expansion [×10 −6 /°C]
3.25 (20 − 300°C)
Thermal Conductivity [Wm −1 K −1 ] 1.1
Transmission Range [μm] 0.38 − 2.3
B270 ® -Superwhite
This material is sheet glass generally called white sheet glass.
Since its optical properties are similar to BK7, it is sometimes used
as an alternative to a BK7 glass substrate. However, the usage is
limited because its internal quality is not guaranteed.
B270 ® is a registered trademark of SCHOTT AG.
Wavelength
[nm]
Refractive Index
546 1.525
588 1.523
Density [g/cm 3 ] 2.55
Coefficient of Thermal Expansion [×10 −6 /°C]
9.4 (20 − 300°C)
Thermal Conductivity [Wm −1 K −1 ] About 1
Transmission Range [μm] 0.35 − 2.5
Blue Sheet
This material is called soda-lime glass or blue sheet glass, relatively
inexpensive and used for windowpanes.
Alkali components added for melting it at low temperature cause a
slightly greenish color. This material is rarely used for optics unless
for special cases.
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Glass for Lens
Different glasses that vary in refractive index and wavelength dispersion (the Abbe number) are used for camera lenses and
lenses for various lens devices.
A lens system created with only one type of glass will have greater chromatic aberration, and cannot provide high-performance
properties.
When different glass is used for each lens, however, it is possible to create a functional and high-performance lens system.
This catalog lists only some of the glass for lenses because one type of glass is sufficient to achieve a purpose in case of a
simple lens system for experiments such as for focusing or collimating laser light.
This catalog uses general names of glass materials, but eco materials that do not contain lead or hazardous substances are
used for products to which RoHS applies.
Prisms
Substrates/Windows
Optical Data
Maintenance
Wavelength
Refractive Index
[nm]
SK2 SF15 LaSF9
334.1 1.643 − −
365.1 1.634 − −
404.7 1.626 1.742 1.898
488.0 1.615 1.715 1.869
546.1 1.610 1.704 1.857
587.6 1.607 1.699 1.850
632.8 1.605 1.694 1.845
706.5 1.602 1.689 1.838
852.1 1.598 1.681 1.830
1064.0 1.595 1.675 1.823
1529.6 1.589 1.666 1.814
1970.1 1.584 1.659 1.807
2325.4 1.579 1.653 1.801
Abbe Number d 56.8 30.1 32.3
Density [g/cm 3 ] 3.53 2.96 4.36
Coefficient of Thermal Expansion* [×10 −6 /°C] 6.5 7.5 7.7
Thermal Conductivity [Wm −1 K −1 ] 0.802 1.049 0.874
Transmission Range [μm] 0.36 − 2.2 0.42 − 2.4 0.46 − 2.2
* When between −30°C and 70°C
Crown Glasses and Flint Glasses
An achromatic lens reduces chromatic aberration by combining glass
that has low wavelength dispersion of refractive index with glass that
has high wavelength dispersion.
Glasses that have low wavelength dispersion (an Abbe number of 55 or
over) are called crown glasses, and glasses that have high wavelength
dispersion (an Abbe number of 50 or more) are called flint glasses.
The glasses for lens are mainly divided into these two categories.
Both crown glasses and flint glasses are subdivided by the properties
of refractive index and wavelength dispersion, and named in a way
using XX crown or XX flint such as crown glass K, borosilicate crown
glass BK, flint glass F or dense flint glass SF. BK7 seems to be so
named because it was developed as the 7th borosilicate crown glass.
Nowadays, these glasses are usually called by the abbreviated
former model numbers used by SCHOTT, and complicated glass
names are rarely used.
Incidentally, the glass was named crown because its viscosity is so
high that when it is melted and a glass drop falls onto the liquid
surface, the surface spreads in a crown shape. It was originally a
jargon of glassworks artisans.
Regarding flint, it came from flint used as a raw material.
Glass Filters
Glass fabricated by adding absorbing substances such as metal ions to glass so that it will absorb a certain wavelength
range.
Due to the fact that different glass materials are used for different transmission wavelengths, the optical, chemical and
mechanical properties sometimes significantly differ. It is dangerous to consider that glasses with similar transmission
wavelength characteristics have similar properties such as refractive index. Consult our International Sales Division for
properties of glass filters.
B330
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Low Expansion Glass Materials
If a mirror with high surface accuracy is used in an environment subjected to drastic temperature fluctuation, the surface
flatness of the mirror sometimes gets distorted.
The cause is the temperature distribution in the glass substrate of the mirror, because expansion varies among high temperature
parts and low temperature parts. For this reason, substrates used for mirrors that require high precision are made
of low expansion materials.
In general, silica glass is often used (coefficient of thermal expansion 5.5×10 −7 /°C), but if higher precision is required, materials
called low expansion glass or zero expansion glass are used.
Application
Systems
Optics &
Optical
Coatings
Holders
Zerodur ®
This material is a glass ceramic containing a crystalline component that has a negative coefficient
of expansion mixed in a low expansion vitreous component, and its coefficient of expansion is
minimized to ±1×10 −7 /°C in the temperature range between 0°C and 50°C.
Scattering by the crystals clouds the inside of the glass, and attenuation of light occurs inside the
glass.
Since this material is relatively easy to process and polish, it is often used for large mirrors.
Zerodur ® is a registered trademark of SCHOTT AG.
Wavelength
[nm]
Refractive Index
486.1 1.5491
587.6 1.5424
656.3 1.5394
Transmitted Wavelength Range 0.4 − 2.5μm
Surface Reflectance
4.6% (587.6nm)
Density 2.53g/cm 3
Bases
Manual
Stages
Actuators
Coefficient of thermal expansion [10 6 /K]
0.8
0.4
0.2
0.0
−0.2
−0.4
−0.6
−0.8
Thermal Expansion Ratio
0°C
100°C
0 100 200 300 400 500 600 700 800 900
Temperature [K]
T [%]
100
90
80
70
60
50
40
30
20
10
5mm
25mm
0
0.2 0.3 0.4 0.6 0.8 1 2 3 4 5
[µm]
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
This material is a zero-expansion glass ceramic fabricated by crystallizing crystal grains that have
a negative coefficient of expansion inside glass.
Its coefficient of expansion is minimized to ±1×10 −7 /°C in the temperature range between 0°C and
50°C.
The inside of the glass is transparent and transmits light. Its superior thermal, mechanical and
chemical properties make it useful for laser mirrors or standard block gauges.
CLEARCERAM ® is a registered trademark of OHARA INC.
∆L/L (×10 –7 )
Thermal Expansion Ratio (temperature range: –60 – +160°C)
60
40
20
0
–20
–40
–60
–80
–100
–120
–140
–160
–180
–60 –40 –20 0 20 40 60 80 100 120 140 160
CLEARCERAM ® -Z
Refractive Index
1.546 (587.6nm)
Transmitted Wavelength Range 0.4 − 2.5μm
Surface Reflectance
4.6% (587.6nm)
Density 2.55g/cm 3
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Optics & Optical Coatings
Optical Crystals
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Some crystals exhibit excellent optical properties that glass materials cannot achieve.
On the other hand, crystals also have properties not desirable for optics such as deliquescent or
birefringence properties.
Optics utilize useful crystals after comprehensive evaluation of these properties.
Optical Window Materials
Crystal Name Calcium Fluoride Sapphire Zinc Selenide Silicon Germanium Barium Fluoride Lithium Fluoride Magnesium Fluoride
Composition Formula CaF2 Al2O3 ZnSe Si Ge BaF2 LiF MgF2
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Transmitted Wavelength [μm] 0.13 − 8 0.23 − 5 0.6 − 20 1.2 − 8 2 − 20 0.18 − 12 0.12 − 8 0.12 − 7
Surface Reflectance [%] 3.1 (1μm) 7.6 (0.9μm) 17 (3μm) 30 (3μm) 36 (5μm) 3.6(1μm) 2.7 (1μm) 2.5 (0.9μm)
Density [g/cm 3 ] 3.18 3.99 5.27 2.33 5.33 4.89 2.64 3.17
Thermal Conductivity [Wm −1 K −1 ]
Coefficient of Thermal Expansion
[×10 −6 /°C]
Solubility [g/100g of water]
9.72
(36°C)
24
(20 − 60°C)
1.51×10 −3
(20°C)
42
(25°C)
6.9/7.6*
18.0
(23°C)
7.1
(0°C)
129.5
(40°C)
4.2
(25°C)
58.7
(20°C)
5.5
(25°C)
− − − −
Comparison Chart of Refractive Index of Crystal Materials (Reference Data)
11.7 4 0.3
18 37
0.17
(23°C)
0.27
(20°C)
12.8
(parallel to the c-axis)
7.6×10 −3
(18°C)
Crystal Classification Isotropic Uniaxial Isotropic Isotropic Isotropic Isotropic Isotropic Uniaxial
* C-axis vertical/C-axis parallel, 200°C
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Wavelength
[nm]
120.0 2.0500
130.0 1.8300
140.0 1.7400
150.0 1.6600
160.0 1.5800
170.0 1.5340
180.0 1.5180
Refractive Index
CaF2 Al2O3 ZnSe Si Ge
193.5 1.5015 Ar*F laser
200.0 1.4955
210.0 1.4880 1.8340
220.0 1.4811 1.8340
230.0 1.4760 1.8340
240.0 1.4712 1.8340
248.4 1.4670 1.8340 Kr*F laser
266.0 1.4620 1.8340 YAG4ω laser
281.8 1.4580 1.8235 Xe*Br laser
308.0 1.4525 1.8115 Xe*Cl laser
325.0 1.4495 1.8040 He-Cd laser
337.1 1.4484 1.8010 N2 Laser
355.0 1.4460 1.7960 YAG3ω laser
365.0 1.4450 1.7940 Hg i
404.7 1.4415 1.7860 Hg h
435.8 1.4395 1.7813 Hg g
441.6 1.4392 1.7808 He-Cd laser
457.9 1.4383 1.7787 Ar laser
Note
480.0 1.4373 1.7764 Cd F′
486.1 1.4370 1.7757 H F
488.0 1.4369 1.7755 Ar laser
514.5 1.4360 1.7730 Ar laser
532.0 1.4354 1.7718 YAG2ω laser
546.1 1.4350 1.7710 2.6680 Hg e
587.6 1.4339 1.7685 2.6260 He d
589.3 1.4338 1.7684 2.6250 Na D
632.8 1.4329 1.7660 2.5940 He-Ne laser
643.9 1.4327 1.7655 2.5870 Cd C′
650.0 1.4326 1.7653 2.5840 Red LD
656.3 1.4325 1.7650 2.5795 H C
670.0 1.4322 1.7646 2.5720 Red LD
694.3 1.4319 1.7636 2.5600 RUBY laser
780.0 1.4307 1.7603 2.5295 Near Infrared LD
830.0 1.4302 1.7590 2.5170 Near Infrared LD
852.1 1.4300 1.7585 2.5120 Cs s
904.0 1.4296 1.7576 2.5023 Near Infrared LD
Wavelength
[nm]
Refractive Index
CaF2 Al2O3 ZnSe Si Ge
1014 1.4288 1.7555 2.4892 Hg t
1064 1.4285 1.7545 2.4825 3.5510 4.4100 YAG laser
1100 1.4283 1.7537 2.4792 3.5400 4.4000
1200 1.4277 1.7520 2.4715 3.5193 4.3500
Note
1320 1.4270 1.7500 2.4643 3.5030 4.3050 LD for communication
1400 1.4267 1.7485 2.4609 3.4940 4.2780
1500 1.4262 1.7470 2.4573 3.4830 4.2450
1550 1.4260 1.7460 2.4558 3.4770 4.2300 LD for communication
1600 1.4258 1.7450 2.4544 3.4730 4.2200
1800 1.4248 1.7418 2.4496 3.4615 4.1630
2000 1.4239 1.7380 2.4463 3.4540 4.1200
2200 1.4228 1.7330 2.4440 3.4490 4.0950
2400 1.4217 1.7280 2.4420 3.4445 4.0730
2600 1.4205 1.7220 2.4400 3.4405 4.0600
2800 1.4192 1.7165 2.4387 3.4370 4.0511
3000 1.4179 1.7105 2.4376 3.4350 4.0443
3400 1.4148 1.6990 2.4355 3.4325 4.0344
3600 1.4132 1.6910 2.4345 3.4313 4.0307
3800 1.4115 1.6840 2.4337 3.4305 4.0276
4000 1.4096 1.6740 2.4331 3.4295 4.0250
4500 1.4047 1.6495 2.4313 3.4280 4.0200
5000 1.3990 1.6240 2.4295 3.4261 4.0162
5500 1.3930 2.4277 3.4250 4.0135
6000 1.3856 2.4258 3.4242 4.0115
6500 1.3775 2.4239 3.4235 4.0100
7000 1.3693 2.4218 3.4231 4.0086
7500 1.3600 2.4196 3.4227 4.0075
8000 1.3498 2.4173 3.4224 4.0067
8500 1.3385 2.4148 3.4221 4.0060
9000 1.3268 2.4122 3.4219 4.0054
9400 1.3164 2.4100 3.4218 4.0049 CO2 laser
10000 2.4065 3.4215 4.0038
10600 2.4026 4.0035 CO2 laser
12000 2.3929 4.0029
13000 2.3849 4.0022
14000 2.3761 4.0018
15000 2.3663 4.0013
16000 2.3555 4.0009
17000 2.3435 4.0004
18000 2.3303 4.0000
19000 3.9996
20000 3.9992
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Calcium Fluoride
The natural mineral is called fluorite and although it is rare, some fluoresce
when irradiated with ultraviolet light. Artificial calcium fluoride is
used for high-grade camera lenses or beamsplitters of spectroscopes.
It has optical properties such as high transmittance in a wide range
from vacuum ultraviolet to infrared, and small dispersion of refractive
index and different dispersion curve (abnormal partial dispersion)
compared to average optical glass, making it very advantageous when
designing achromatic lenses. Its isotropic crystal structure does not
cause birefringence.
It is more generally used than lithium fluoride or magnesium fluoride
due to its relative chemical stability and low deliquescence.
Zinc Selenide
It is an amber color crystal, capable of transmitting up to long-wavelength
infrared of 20μm. However, it does not transmit blue and green
in the visible range.
Zinc selenide is often used as a lens material of CO2 lasers. Red
laser light is sometimes used as the guide light of a CO2 laser, and
zinc selenide can transmit this guide light together with the CO2 laser
light. It is legally classified as a poisonous and deleterious substance,
and some products require a document of transfer of
poisonous and deleterious substances. In addition, disposal of used
zinc selenide products as general waste is prohibited. Zinc selenide
products no longer used must be returned to the place of purchase.
It is insoluble in water, but reacts with acids to form toxic hydrogen
selenide. Transmission loss by surface reflectance is high due to its
high refractive index, but it can achieve 99% or higher transmittance
with the addition of anti-reflection coating.
Germanium
CaF2
ZnSe
Ge
This material has metallic luster and although it does not transmit
light, it transmits a wide infrared range from 2 to 20μm. It is used as
a material of thermography camera lenses.
Since it has a high refractive index of 4, its transmittance goes down
to lower than 50% due to transmission loss by surface reflectance if
used without an anti-reflection coating.
Sapphire is a hard mineral second to diamond, and is a crystal difficult
to scratch. It has long been popular for use in watches as crystals,
shafts of gears or bearings. Sometimes called sapphire glass, but its
structure is not vitreous but crystalline.
Sapphire is chemically very stable making it useful as an alternative
to glass. Artificial sapphire is transparent and colorless, and has a
wide transmission range from ultraviolet to infrared. Since sapphire
is a single crystal, birefringence occurs depending on the orientation
of the crystal. While it has good insulation properties, its thermal
conductivity is relatively high.
It is used as titanium-sapphire (Ti: sapphire) for an excitable medium
of ultrashort pulse lasers or substrates that grow purple LED.
It is single crystal silicon used in semiconductors, has metallic luster
and although it does not transmit light, it transmits infrared light from
wavelengths of 2 to 6μm. It can also be used as a filter for infrared
detectors.
Its excellent thermal conductivity also makes it useful as substrates
of gold coating mirrors used for high-output CO2 lasers.
Attention
Sapphire
Silicon
Al2O3
▶Infrared-transparent materials need to consider the influence of the
radiation spectrum due to temperature in addition to transmission
and reflection.
▶When observing infrared of wavelength 10μm or higher, or using in
an environment where an optical system is 30°C or higher, all
substances emit infrared radiant light making it impossible to
observe the infrared spectrum of an analyte.
Si
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Birefringence Materials
There are isotropic and anisotropic crystals, and birefringence is found in anisotropic crystals.
Especially single crystals among anisotropic crystals are utilized as polarization optics such as waveplates or polarizers.
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Quartz Crystal
SiO2
This material is a single crystal quartz without impurities (trigonal) and
exhibits small birefringence.
Artificial crystals are mass produced as materials for low pass filters
of crystal oscillators or CCD imaging devices.
Production of waveplates utilizes small refractive index difference
between ordinary beam (ne) and extraordinary beam (no).
Wavelength
Refractive Index
[nm]
Ordinary Beam Extraordinary Beam
404.7 1.5572 1.5667
546.1 1.5462 1.5553
589.3 1.5443 1.5534
656.3 1.5419 1.5509
Transmitted Wavelength Range [μm] 0.2 − 2
Density [g/cm 3 ] 2.65
Thermal Conductivity [Wm −1 K −1 ] (70°C) 9.3/5.4
Coefficient of Thermal Expansion [×10 −6 /°C] (20°C) 6.8/12.2
Excerpt from Chronological Scientific Tables
Calcite
CaCO3
Calcite is transparent and colorless, and abundant in nature.
It is a single crystal (trigonal) and exhibits large birefringence.
Its refractive index difference between ordinary beam (ne) and
extraordinary beam (no) is utilized in Glan-Thompson polarizers with
high extinction ratio performance.
Calcite is a soft crystal and easily scratched.
* Since it is a natural mineral, the transmittance property differs by
individual crystal.
Wavelength
Refractive Index
[nm]
Ordinary Beam Extraordinary Beam
404.7 1.6813 1.4969
546.1 1.6616 1.4879
589.3 1.6584 1.4864
656.3 1.6544 1.4846
Transmitted Wavelength Range [μm] 0.35 − 2.3*
Density [g/cm 3 ] 2.71
Thermal Conductivity [Wm −1 K −1 ] (0°C) 5.39/4.51
Coefficient of Thermal Expansion [×10 −6 /°C] (0 − 80°C) 26.3/5.44
Excerpt from Chronological Scientific Tables
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B333

Optics & Optical Coatings
Optical Coatings
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Optical experiments use various optics with coatings.
In many cases, a coating is deposited on a polished glass surface, and this coating provides most
of the properties of light required for optical experiments such as reflectance, wavelength characteristic,
and polarization property. For this reason, mirrors and the like are used by directly irradiating
their coating side with light to make full use of their performances.
Coatings are mainly divided into two types, metal deposition coating and transparent film (dielectric
coating) deposition coating.
Both of them are used as mirrors for optical experiments, but their usage, properties and various
other points are different due to their completely different reflection mechanisms.
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Metal Coating
You can obtain mirrors of high reflectance by coating polished
glass substrates with metals such as aluminum (Al) and gold (Au).
In addition, metals such as silver (Ag), platinum (Pt) and Chrome
(Cr) are sometimes used for mirrors.
Metal coatings reflect a very wide wavelength range, and have
small dependency on incident angle.
Since metals absorb light that was not reflected, if you make the
metal coating a little thicker, light does not transmit through to the
glass substrate side.
Metal coating
Glass substrate
Protective
coating
Metal coating
Glass substrate
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Metal film coated
Metal film coated with a protective film
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Aluminum Coating
Aluminum offers high reflectance throughout ultraviolet to infrared, but
is prone to oxidation and cannot provide stable performance especially
in the ultraviolet region. It is also easily scratched, which disenables
wiping of dirt on the surface.
That is why mirrors fabricated with aluminum have a protective
coating to protect the metal coating from oxidation or scratches.
Protective coatings have the effect of maintaining reflectance in a
certain wavelength range, but may lower reflectance in other wavelength
ranges.
On the contrary, some special protective coatings increase the
reflectance only in a certain wavelength range.
Chrome Coating
Chrome and other alloys (inconel) are used as partial reflection
coatings.
Chrome has lower reflectance compared to aluminum or gold, and
absorbs light strongly, making it unsuitable for mirrors, but its small
fluctuation in reflectance and absorptance in a wide wavelength
range makes it useful as reflective ND filters or beamsplitters.
Gold Coating
It exhibits the wavelength characteristic of yellow in the visible range
(absorbs blue), but in infrared, it offers high reflectance in a very wide
range.
Since gold alone cannot adhere firmly to glass and easily comes off,
a chrome coating is generally used as a base coating.
A gold coating is soft and easily scratched. A gold coating with
protective coating is used for a specific wavelength range, but a gold
coating without protective coating is often used for use with the
entire infrared range.
You must not wipe a gold coating with paper or cloth. If it once gets
scratches, then it cannot be restored.
Optical Data
Maintenance
Comparison of Reflectance of Metal Coatings (Reference Data)
Wavelength
Reflectance (45 degrees incidence) [%]
Wavelength Reflectance (45 degrees incidence) [%] Wavelength Reflectance [%]
[nm] Al+MgF2 Al+SiO UV Enhanced Al Al Au [nm] Al+SiO Al Au [nm] Au
200 54 − 91 75 24 1250 91 95 98 3000 99
250 76 43 93 89 28 1300 92 96 98 4000 99
300 89 87 90 90 31 1350 92 96 98 5000 99
350 84 87 87 91 34 1400 93 96 99 10000 99
400 88 82 85 91 37 1450 93 96 99
450 90 87 85 91 41 1500 94 96 99
500 92 90 85 90 52 1550 94 96 99
550 91 91 85 90 81 1600 94 96 99
600 91 91 85 90 91 1650 94 96 99
650 89 90 85 89 95 1700 95 96 99
700 88 88 83 88 96 1750 95 96 99
750 84 85 82 87 97 1800 95 96 99
800 81 83 81 86 97 1850 95 96 99
850 82 82 81 86 97 1900 95 96 99
900 86 84 84 89 98 1950 95 97 99
950 88 86 88 91 98 2000 95 97 99
1000 90 87 89 93 98 2100 96 97 99
1050 91 89 90 94 98 2200 96 96 99
1100 92 89 91 94 98 2300 96 97 99
1150 93 90 91 95 98 2400 97 96 99
1200 93 91 92 95 98 2500 97 97 99
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Dielectric Coating
Dielectric materials are transparent and colorless, having no large reflection or absorption like metals.
On the other hand, however, proper selection of materials and coating thickness can cause interference of light at the interface
between a glass substrate, coating and air, creating special transmittance and reflectance wavelength characteristics.
Single-layer Anti-reflection Coating
When light enters a glass substrate, about 4% of reflection occurs and
results in transmittance loss. However, you can change the reflectance of
the glass substrate by coating the glass substrate with a dielectric material
that has a lower refractive index than glass.
When the thickness of dielectric coating is adjusted so that the optical path
length (refractive index n × coating thickness d) is λ/4, the reflectance is
minimized because reflections at the interface between the glass substrate
and the dielectric coating, and between the dielectric coating and air cancel
each other.
Note that it is impossible to achieve a reflectance of complete zero because
the refractive index is limited by coating materials. Since the refractive index
of glass substrate also has influence, the coating cannot provide an
anti-reflection effect to all glass substrates.
Air
Incident light
Reflected light
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Reflectance Wavelength Characteristic of Single-layer Anti-reflection Coating (SLAR)
Dielectric multi-layer coating
(low refractive index)
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S polarization (45°)
Glass substrate
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path length
nd
Light
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R [%]
Avarage (P+S)/2
Transmitted light
Index
Image of single-layer die electric Anti-reflection coating structure
0°
P polarization (45°)
Guide
λ [nm]
Mirrors
16
14
12
10
Multi-layer Anti-reflection Coating
Due to the small selection of coating materials for single-layer coating,
reflection of a glass substrate remains to a certain extent. To deal with the
limited coating materials, you can layer coatings to gain optimal anti-reflection
effect.
In addition, it is possible to fabricate narrowband multi-layer anti-reflection
coating (NMAR) that reduces reflectance in a specific wavelength, or multilayer
(broadband) anti-reflection coating (MLAR) that reduces reflectance in
a broad wavelength range.
Reflectance Wavelength Characteristic of Narrowband Multi-layer Anti-reflection Coating (NMAR)
=1.064nm AR corting incidence: 0°
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R [] R []
8
6
4
2
0
800 900 1000 1100 1200 1300 1400
[nm]
Reflectance Wavelength Characteristic of Broadband Multi-layer Anti-reflection Coating (BMAR)
5.0
4.5
4.0
3.5
3.0
2.5
2.0
1.5
1.0
0.5
0.0
incidence: 0°
450 500 550 600 650 700
[nm]
Dielectric multi-layer coating
(3 coating)
L
M
L
Glass
substrate
Transmitted light
L: Low refractive index
M: Intermediate refractive index
Optical
path length
nd
Image of multi-layer die electric Anti-reflection coating structure
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B335

Optics & Optical Coatings
Optical Coatings
Multi-layer Reflection Coating
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You can fabricate a reflection coating with very high reflectance by
layering a dielectric coating of high refractive index and that of low
refractive index alternately on top of a glass substrate.
Small reflection occurs at the interface between high refractive index
and low refractive index.
The thickness of dielectric coating of all layers is adjusted to the
optical path length of λ/4 (refractive index n × thickness of coating d),
thus the light reflected by each layer has a matched phase causing
the combined amplitude to increase. On the contrary, the multiple
reflected lights that proceed in the direction of transmission cancel
each other to zero.
If there is a sufficient number of layers of dielectric coating, incident
light is attenuated and practically not transmitted.
Attenuated light all shifts to reflected light. Since dielectric coatings
do not absorb light, 100% of incident light becomes reflected light
without any loss.
Reflectance Wavelength Characteristic of Dielectric Multi-layer Coating (DML)
R [%]
100
80
60
40
20
P polarization
S polarization
Average
Dielectric multilayer coating
(multilayer coating)
L
H
L
H
L
H
L
H
L
H
Incident light
Reflected light
Optical
path length
nd
Index
Guide
Mirrors
Beamsplitters
0
400
450
500 550 600 650 700
[nm]
You can add a special effect to a multi-layer coating by changing its
coating structure.
For example, you can design a coating according to various requirements
such as broaden the wavelength band or on the contrary,
narrow the transmission band extremely, prevent passage of different
wavelength ranges or set the reflectance to an arbitrary value.
Glass
substrate
L: Low refractive index
H: High refractive index
Image of multi-layer die electric high Anti-Reflection coating structure
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Special Coatings
Dielectric multi-layer coatings can offer various wavelength characteristics, and are used for various optical devices.
Meanwhile, leading edge research requires higher performance, and a dielectric multi-layer coating sometimes takes a very
special structure consisting of 100 layers or more.
Ultra Broadband Mirror
A dielectric multi-layer coating having a few dozen layers is sufficient
to reflect the visible range, but if you need to handle a wavelength
range including from ultraviolet to infrared range, then you need to
combine three or more multi-layer coatings for the ultraviolet range,
visible range, and infrared range.
Consequently, the number of coating layers increases extremely, and
its fabrication requires very high technology.
Coating for High Power Laser
If you irradiate a dielectric multi-layer coating with high power pulse
laser, the laser power on the interface of the coating becomes
extremely large so that it breaks the coating.
To prevent this, the coating structure and materials have been reviewed
and special multi-layer coatings have been developed to avoid laser
damage.
Low Dispersion Coating for Femtosecond Laser
When you irradiate a broadband dielectric multi-layer coating with a
femtosecond laser, wavelength dispersion occurs because the
transmission path within the coating differs depending on the
wavelength.
A low dispersion coating for femtosecond laser is designed so that
the path length within the coating will not change depending on the
wavelength to minimize the wavelength dispersion. In addition to that,
its coating structure can withstand high power.
Hybrid Coating
By inserting a metal coating inside a dielectric multi-layer coating,
you can create an optic with properties that have been impossible to
achieve before. This type of coating is called hybrid coating because
it is a combination of dielectric multi-layer coating and metal coating.
In practice, it is used for broadband non-polarizing beamsplitters and
bandpass filters. Unfortunately, this coating causes a little intensity
loss due to absorption by metal.
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Properties of Multi-layer Coating
While multi-layer coatings can achieve any reflectance and transmittance wavelength characteristics, they have various limitations.
When you change the incident angle of light against a multi-layer
coating, the wavelength characteristics of transmittance and reflectance
change.
If the incident angle of light is oblique against the thickness of each
layer of a multi-layer coating, then the optical path length the light
goes through within the coating becomes long. This is the reason
why the transmittance and reflectance wavelength characteristics are
of the longest wavelength at the incident angle of zero degree
(perpendicular), and shifts to those of shorter wavelength.
This phenomenon is called a blueshift.
Incident Angle Dependence
R [%]
45° incidence angle
0° incidence angle
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Temperature Dependence
The thickness of dielectric coating or the refractive index of coating
material change due to temperature, which also causes changes in
the transmittance and reflectance wavelength characteristics of the
multi-layer coating. Since this temperature dependency differs
according to the manufacturing method and materials of coating,
consideration needs to be given in the design stage of coating.
Consult us about the use environment and temperature fluctuation
range in advance.
λ [nm]
Weatherability
Dielectric multi-layer coating may change with time depending on the
use environment.
Although it differs depending on the manufacturing method and coating
composition, a coating might swell and its wavelength characteristic
may change a little when the coating is placed in a high temperature
high humidity environment for a long time.
Special care is required for products of which transmittance and
reflectance versus wavelength change significantly such as dichroic
mirrors or band-pass filters.
Maintain laboratories and inside devices where optics are used at
ordinary temperature and low humidity, and when optics are not in use,
keep them in a dry storage such as Dry-Cabi ® .
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Polarization Properties
Optics have polarization properties when used other than at the incident angle of zero degree
(perpendicular incidence).
There are two types of polarization properties, one is the property that transmittance and reflectance
change between P polarization and S polarization, and the other is that phase difference changes
between P polarization and S polarization.
The property of phase difference is difficult to control, and the coating products listed in this
catalog do not guarantee the property. For example, if a linear polarized beam enters a coating
product at a 45 degrees angle, the polarization of the output beam will not be a linear polarized
beam at 45 degrees, but will become an elliptic polarized beam. However, the intensity of the
output light becomes the average value of the P polarized component and the S polarized
component, thus it will not affect the property of transmittance and reflectance when considering
P polarization and S polarization separately.
If irradiating a glass substrate without coating with light at 45 degrees incidence, the reflectance
of P polarization differs from that of S polarization.
Similarly the reflectance of P polarization and that of S polarization change at the interface
between each layer of coating, and in a multi-layer coating, fluctuation occurs in the wavelength
characteristic in addition to significant fluctuation in the transmittance and reflectance between
P polarization and S polarization.
For this reason, this catalog shows a P polarization and S polarization graph for transmittance
and reflectance wavelength characteristics.
Coated optics have polarization properties even if a graph of P polarization and S polarization is
not shown, and a graph of the average of P polarization and S polarization is listed for them.
Since most light sources other than laser light are unpolarized light, a graph of the average value
of the P polarization and S polarization is sufficient, but in case of laser light which is a linear
polarized beam, whether it takes the value of P polarization, S polarization or a value between
them changes depending on the polarization direction.
Especially for coated optics that characteristically have the transmission band and reflection band
switch in a narrow wavelength range such as a dichroic mirror, the wavelength where transmission
switches to reflection differs depending on whether to use S polarization or P polarization.
Incident
light
Incident angle
P polarization
Output
light
S polarization
The definition of S polarization and P polarization
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Reflectance Wavelength Characteristic of Dielectric Multi-layer Mirror
S polarization
Avarage (P+S)/2
Reflectance Wavelength Characteristic of Dichroic Mirror
100
80
60
R [%]
P polarization
R [%]
40
20
0
650
700
P polarization
S polarization
Average
750 800
[nm]
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B337

Optics & Optical Coatings
Optical Coatings
Application
Systems
Optics &
Optical
Coatings
Laser damage threshold
The optics used in laser oscillator or in laser processing system must have a high resistance to high power laser source
incident over time without damaging the coated surface. The resistance is determined by a numerical information called
Laser damage threshold. This term is frequently applied in optics selection for use in high power laser processing system
and optical system design.
The laser damage threshold evaluation method is regulated by the S-on-1 test method according to the international ISO
21254 standard.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
S-on-1 test
Using a pulse laser with variable power in a system for irradiating a target substrate surface with
appropriate density.
Place the target onto a XY translation stage for enabling the irradiation position to change after the
end of each irradiation cycle. Oscillate repeatedly the laser onto the target substrate S times on a
same position. Repeating 10 times the same irradiation with the same power onto the next position.
Change the laser power for the next repeatedly 10 times irradiation operation, then repeat the
operation within the limitation of the laser power.
Inspect the tested target with a 150× magnification microscope evaluate the presence of damaging
spot.
Plot the damage occurrence ratio vs the power density data onto a graph. The result is the power
density and the occurrence ratio curb to the maximum occurrence level. (The occurrence ratio is 0%
and 0% up to maximum level). This number is the laser damage threshold.
* Sigma Koki’s method is 1 irradiation=200 pulses, it is egal 200 on 1 test method.
The relation in between
the irradiation cylcle time and the power density
10 20
[J/cm 2 ]
30 40 50 60
Sample
70 80
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Important point about Laser damage threshold
◦The result may change depending on the wavelenght, the pulse width and the repetition
frequency of the laser used for the test. The set up test condition must be consistent.
◦Pulse laser exist in single mode laser (TEM00) and multi-mode laser. The TEM00 laser
was used for the laser damage threshold test. The multi-mode laser has a particularity
of having high local density energy, which is also called spike shape. It happens that
even by applying a low laser damage threshold multi-mode laser with spike shape, the
optics can be damaged. If a multi-mode laser with a frequent optics damage problem
occurs, the multi-mode laser optics adjustment may be a problem. In this case, please
check the mode pattern of the laser or contact the laser maker.
◦The optics can be damaged easily even with a low power laser if the optics surface is
dirty with dust or oil mark. Make sure that the optics are clean with no dust before
applying to high power laser.
◦The laser damage threshold value must be evalued under the similar test condition for a
correct comparaison. Every makers may test their optics with different test condition, it is not possible to judge the optics’s superiority by refering
to the laser damage threshold value mentioned in the catalog. Sigma Koki provides to its customer a safety range of usage with strict test conditon.
But even using a below range laser damage threshold, the deterioration change with time is inevitable.
Custom coating
0 20 40 60
Power density [J/cm 2 ]
We support all types specifications of custom optics design and coating design which may not be found in our catalog.
We are open to all kind of inquiries, ranging from project development to mass production optics.
Again, we accept to do customized coating on our standard no-coated optics, as well as a completed customized optics,
also on supplied optics. Please do not hesistate to contact our Intenational sales division for all your inquiries.
Please fill out the inquiry form with your specifications required for us to support you smoothly. B041
For custom coating we may require a longer lead time, please contact our International Sales Division for details.
Occurence ratio [%]
100
80
60
40
20
0
The occurence ratio of the laser damage by power density
Laser damage
threshold
80 100
Sample of custom coating T: Transmission R: Reflectance
Ultra broadband multilayer AR coating
Multi-wavelenght AR coating
R [] T []
Uncoated
Coated
λ [nm]
Ultra broadband half-mirror
S polarization
Avarage (P+S)/2
P polarization
R [] T []
λ [nm]
Notch filter
λ [nm]
λ [nm]
B338
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Catalog
Thin film design software (Essential Macleod) EMS Code W3411
This is a software that enable to design thin film coatings by only inputting the transmittance
values and the reflectance values of your wish. It can also handle optical characteristics simulation
when coating experiment value changes. The Essential Macleod is a processional optical coatings
design software but it also fits beginner user because of its intuitive operation.
◦The Essential Macleod is a Windows ® -based optical thin film design software developed by Angus Macleod, who is
renowned for monographs on optical thin films such as Thin-film optical filters.
◦The software contains a range of functions needed for sophisticated coating design, including simulations of optical thin
film characteristics, automatic calculations, and building of coating material databases.
Attention
▶May be incompatible with other windows programs. Installation on
a dedicated PC is recommended.
▶The price is subject to change depending on exchange rate fluctuations,
the addition of features or other factors. Contact us for more
information.
Specifications
Part Number
EMS-1
Thin Film Center Inc.
2745 East Via Rotonda, Tucson, AZ 85716-5227
TEL: +1-520-322-6171 FAX: +1-520-325-8721
* The logo of Thin Film Center Inc. and Essential Macleod are registered trademarks of Thin Film
Center Inc.
* Windows ® is a registered trademark of Microsoft Corporation in the United States and other
countries.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Simulations of Optical Thin Film Characteristics
Optimization by Automatic Calculation
Index
◦Simulation of transmittance and reflectance of a thin film
◦Simulation of phase change in transmitting light and reflecting light
◦Simulation of influence of error in film thickness
◦Simulation of group velocity dispersion, etc.
Database of Coating Materials
◦Transmittance and reflectance
◦Phase change in S and P polarization
◦Phase change in transmitting light and reflecting light
Other Functions
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
◦Database of optical constants (n, k) of major coating materials
◦Database management based on multiple information items
◦Calculation of optical constants from measured values of spectral
characteristics
◦Creation of variance data of coating materials
◦Calculation of group velocity dispersion
◦Analysis of thin film electric field distribution
◦Calculation of transmittance of thin film combined with glass
substrate
Hardware Requirements Support Optional
◦IBM-PC and its compatible devices
◦MS-Windows ® operating system
◦20MB or more of free space on hard disk
◦Free support and upgrades for one year
after purchase. After one year, free
support and upgrades are available with a
membership contract.
◦Additional license
(Allows the software to run on one additional
PC.)
◦Membership contract
(Offers free support for another year when
one year passed after purchase.)
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B339

Optics & Optical Coatings
Optical Design
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Lens system that is used in optical products of Sigma Koki is originally designed.
Utilizing this design capability, to meet the needs of our customers, Sigma Koki provide lens design
service. We will meet with a wide range of customer needs from design of a single lens to the optical
system to be used in the satellite. Not limited to the lens design, we are operating an integrated inhouse
production systems covering broad range of fabrication processes such as lens polishing,
coating, housing, optical adjustment, electronic circuits, drive mechanism, and software.
◦We will offer a flexible service of custom lens design, from prototypes to a single test unit, and the mass-production item.
◦However, assuming that customer will be ordering for manufacture of optical lens or equipment, we will refuse the request
of the lens design only.
◦To request a custom lens design, please use the “Contact sheet for Lens Design”. B202
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Typical product with custom lens design
Achromatic Lenses
It is a cemented doublet lens to be used as
the telescope and the laser collimator.
Optimal lens is designed from the parameters
such as wavelength, focal length and clear
aperture.
We can also design the achromat for
dual-band wavelength or the range other
than the visible.
Objective Lenses
By eliminating the use of adhesive, and also
preventing laser intensity to be high on lens
surface, the objective lens can be used for
normal microscope, but also designed to be
used for high power laser processing.
Since observation of laser processing image
is required, The objective lens is generally
designed achromatic for both laser wavelength
and visible. It is also an important
factor to take a long working distance as
much as possible. In addition, a special
design is needed for the objective lens used
for laser processing through a thin glass
substrate or multiple wavelengths.
Laser Beam Expanders
An optical component that expand the narrow
laser beam to a large diameter collimated
beam.
The design of the beam expander, which is
commonly used in the experiment are
standardized. For a collimated beam of multiwavelength
laser or specially large diameter,
the custom lens design is needed.
Focusing Lenses
In a focusing lens for laser processing, performance
close to the theoretical limit is required.
To meet this requirement, doublet or triplet
lens should be designed to eliminate the
spherical aberration.
Optimal lens design is achieved from the
parameters like laser wavelength, focal length
and spot size. We custom-design various
focusing lenses in the ultra-violet region that
requires a special glass, and achromatic
design optimized to both invisible laser and
guiding light.
fθ Lenses
A specially designed lens to be used for
galvanometer scanners, and the laser
patterning.
Has the effect of suppressing the distortion
of the drawing pattern, or change of the line
width between rim and center of the
scanning range.
The design of the fθ lens changes by specifications
of the galvanometer mirror, the scanning
range, and the shape of the workpiece
(the presence of irregularities or steps).
Others
We have been designing various optical system like an illumination
system, high precision camera lens for the imaging sensor, and zoom
microscopes.
Optical simulation and evaluation MTF simulation Field curvature and distortion
Black: Diffraction theory limit
Green: Image height 16mm
Orange: Image height 32mm
SPATIAL FREQUENCY [PL/m]
Blue: Image height 0mm
Red: Image height 27mm
Pink: Image height 36mm
Field Curvation:

Traceability
All products produced by Sigma Koki are inspected with valid metrology instruments that have
supporting traceability. Instruments and supporting equipment in our metrology department are
calibrated by their respective manufacturers or certified laboratories. Our maintenance program
ensures that the level of accuracy is always at optimum levels. It is possible to request for a
Calibration Inspection Certificate for the metrology instrument used against any of our products
inspected. (Please note that that will be a small fee for this request)
Nspecting Machine Manufacture Inspecting Item
Interferometer ZYGO CORPORATION
Reflecting Wavefront Accuracy,
Transmitting Wavefront Accuracy (Up to φ150mm)
Auto-collimator NIKON CORP. Parallelism (within 30arcmin)
Spectrophotometer HITACHI LTD Transmittance
Traceability System of Interferometer
NIST (National Institude of Standards and Technology)
ZYGO CORPORATION
Canon Marketing Japan Inc.
Traceability System of Auto-collimator
NIKON CORPORATION
Calibration Number
821/253170-94
Calibration of reference plate
by Zygo Corporation
Calibration of interfercomer
by Canon Marketing Japan Inc.
Traceability of Interferometer at Sigma Koki
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Calibration of reference flat, “standard
mirror and auto-collimator by Nikon
Corporation”
Filters
Prisms
Substrates/Windows
Traceability of Auto-Collimator at Sigma Koki
Optical Data
Maintenance
Traceability System of Spectrophotometer
Japan Quality Assurance Organization (JQA)
Calibration of optical filter is done by
spectrophotometer that callibrated
with a linearity calibrator (technology
transterred from National Institute of
Industrial Science and Technorogy)
and discharge lamp (authorized as
international standard wavelength).
HITACHI INSTRUMENT SERVICE CO.,LTD.
Calibration of spectrophotometer is done
with standard optical filter calibrated by JQA.
Traceability of Spectrophotometer at Sigma Koki
(Our guarantee is in the range of 400nm − 700nm.)
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B341

Optics & Optical Coatings
Optical Formula
Snell’s law
Critical angle R = 2
Application
Systems
n1 sin 1 = n2 sin 2 1 = 90°n1 = 1
Optics &
Optical
Coatings
n1
1
sin R =
1
n2
n1
1
Holders
n2
2
Conditions for total
internal reflection
n2
R R
R 2
Bases
Manual
Stages
Reflectance (Normal incidence)
R0
Actuators
1 = 2 = 0 n1 = 1
R0
Motoeized
Stages
R0 =
n2 − 1
n2 1
2
n1
Light
Sources
n2
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Reflectance (P polarization) RP Reflectance (S polarization) RS
RP =
tan 2 (1 − 2)
tan 2 (1 + 2)
Incident light
P polarization
Surface
normale
RP
Outgoing light
RS =
sin 2 (1 − 2)
sin 2 (1 + 2)
Incident light
Surface
normale
RS
Outgoing light
S polarization
Multi-Element Optics
Filters
1
1
Prisms
2
2
Substrates/Windows
Optical Data
Maintenance
Brewster angle B = 1
RP = 0
tan B = n2
Translation of beam for Optical Parallel D Deviation angle of beam by wedge plate
D = t cos 1 (tan 1 − tan 2)
1
2 = sin −1
n2
sin 1
1
n2
D
sin () = n1 sin
0
(n1 − 1)
n2
2
t
Optical Density
OD
OD = log
1
2
= −log (T)
Transmittance: T
Intensity of incident light: 1
Intensity of outgoing light: 2
B342
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Lens formula
Focal length of Lens combinations
1 =
f
1 +
L1
1
L2
Focal lengthf
Magnification of the image
f
B = Y2 =
Y1
f
L2
L1
fS =
f1f2
f1 + f2 − d
Rear principal point
fS
Application
Systems
Optics &
Optical
Coatings
Y1
Holders
Y2
f1
f2
Bases
L1
L2
d
Manual
Stages
Focal length of a lens
Rear principal point
R1
tC
f
fb
1
f
= (n − 1)
Focal length of thick lens
Condition of biconvex lens R1 0 R2 0
1
R1
−
1
R2
+
tC (n − 1)
R1R2n
Actuators
Motoeized
Stages
Light
Sources
f
R2
fb = f 1 −
tC (n − 1)
nR1
Index
Front principal point
Focal length of biconvex lens
Focal length of glass sphere
Focal length of plano convex lens
Guide
Condition of symmetric convex lens R1 = −R2 = R
Condition of glass sphere 2R = tC
Condition of plano convex lens R1 0 R2 = ∞
Mirrors
nR
f =
2
(n − 1)2nR − tC (n − 1)
tC (n − 1)
fb = f1 −
nR
f =
fb = f − R
nR
2 (n − 1)
f =
fb = f −
R1
n − 1
tC
n
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Magnification of Beam Expander
B
Filters
Galilean type
fP
B = =
fN
C2
C1
Keplerian type
f2
B = =
f1
C2
C1
Prisms
Substrates/Windows
Optical Data
C1
C2
C1
C2
Maintenance
fN
fP
f1
f2
Focal length of Concave Mirrors
Formula of concentrated beam
f =
1
2
R
NA = sin = C 2f
FNO =
f
C
C
0
f
R
f
Beam waist 1
e 2
Resolution of light microscope
0 =
πNA
= 0.61
NA
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B343

Optics & Optical Coatings
Outer Dimension Tolerance and Standard Chamfer (Company Standard)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Optical Flats
Optical Parallels
Wedged Substrates
Concave Mirror and Substrates
(Applies to Other Standard Coated Optics Also)
Outer Dimension Tolerance
Round Shaped Dimension Tolerance Thickness Tolerance
φ≦50 0 to −0.1
±0.1
(Concave mirror and its substrate is +/−0.2)
φ51 to 150 0 to −0.2 ±0.2
φ151 to 200 0 to −0.3 ±0.3
φ201 to 300 0 to −0.5 ±0.5
* Tolerance of center thickness for standard Concave mirror and its substrate is +/−0.2
Square or Rectangular Shaped Dimension Tolerance Thickness Tolerance
≦50 0 to −0.1
±0.1
(Concave mirror and its substrate is +/−0.2)
51 to 150 0 to −0.2 ±0.2
151 to 200 0 to −0.3 ±0.3
201 to 300 0 to −0.5 ±0.5
* Outside tolerance of 50×60 size is 0 to −0.2
(mm)
Actuators
Standard Chamfer
(mm)
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Thickness Dimension Standard Chamfer
1.0 to 3.0 Specify ≦0.3×45°
≦40
≦0.3×45°
41 to 70 ≦0.4×45°
3.1 to 5.0
71 to 100 ≦0.5×45°
101 to 150 0.2 to 0.6×45°
151 to 200 0.3 to 0.7×45°
201 to 300 0.4 to 0.8×45°
≦40
≦0.3×45°
41 to 70 ≦0.4×45°
≦5.1 to
71 to 100 ≦0.5×45°
101 to 150 0.3 to 0.7×45°
151 to 200 0.4 to 0.8×45°
201 to 300 0.5 to 1×45°
Caution1: Chamfer of concave mirror is identical to Spherical Lens.
Caution2: Chamfer finish is for protection to suffer from chipping, and the amount of chamfer may vary.
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Spherical Lens
Cylindrical Lens
Outer Dimension Tolerance
(mm)
Size Dimension Tolerance
≦60 0 to −0.1
61 to 80 0 to −0.15
Standard Chamfer
(mm)
Diameter Standard Chamfer
≦50
≦0.3×45°
51 to 100 ≦0.4×45°
Maintenance
81 to 100 0 to −0.2
101 to 200 0 to −0.25
Convex-side
101 to 150 ≦0.5×45°
151 to 200 0.3 to 0.6×45°
201 to 300 0 to −0.3
201 to 300 0.4 to 0.7×45°
≦50
≦0.3×45°
Concave-side,
Flat-side
51 to 100 ≦0.5×45°
101 to 150 0.3 to 0.6×45°
151 to 200 0.4 to 0.8×45°
201 to 300 0.6 to 1×45°
* Some standard parts has other tolerance than above data.
Prism
About Outer Dimension Tolerance
Prisms have sharp edges because of its function and therefore usually needs protective bevels.
Outer dimensions of prisms are noted by length without bevels.
B344
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Optical Tool Kits / Optical Cleaning Kit
Optical Cleaning Kit (Handy type)
OTK / OCK
OCK-S
OTK
Catalog
Code
W3412
A set of tools intended for use only with Sigma Koki
optical hardware and stages.
◦Includes wrenches for screws and Screw-ring spanners for clamping
rods, lens, and mirror holders used with Sigma Koki products.
◦A convenient set for any laboratory.
Cmponent list
Application
Systems
Optics &
Optical
Coatings
Holders
Hex wrenches for M3 cap screw
Contents Quantity
2 pieces
Bases
Hex wrenches for M4 cap screw
Hex wrenches for M6 cap screw
Hex wreches for set screw
2 pieces
2 pieces
2 pieces
Manual
Stages
Specifications
Part Number
OTK
Clamping rod (φ2, φ3, φ4)
Screw-ring Spanners(10 – 50mm, 10 – 150mm)
Tweezers
Hook spanner for micrometer heads
2 pieces each, a total of 6 pieces
2 pieces each, a total of 6 pieces
1 pieces
1 pieces
Actuators
Motoeized
Stages
OCK
Catalog
Code
W3156
Optical Cleaning Kit for cleaning optical components
such as lenses, mirrors and prisms.
Light
Sources
Index
◦For cleaning lenses, mirrors and prism and to maintain optical
performance.
◦Includes Sigma Koki’s proprietary lens cleaner, lens paper (SLP-1 &
SLP-2), wiping cloth, Dust-Off Plus, cotton swabs and Blower.
◦Ideal use for any laboratory
Guide
Mirrors
Beamsplitters
Attention
▶*Japanese Domestic Sales Only
▶Please note that the nozzle for Microduster is not
compatible with Dust Off Plus.
Specifications
Part Number
OCK-S
OCK
Cmponent list
Product Name Part Number Quantity
Air Duster DOP-300SN 1 piece
Lens Cleaner SLC-300 1 piece (300cc)
Lens Paper SLP-1 50 pieces
Lens Paper SLP-2 100 pieces
Wiping Cloth SWC-150 5 pieces (150×150mm)
Cotton Swabs − 50 pieces
Blower − 1 piece
Catalog
Code
W3157
Handy Optical Cleaning Kit for off-site maintenance
cleaning of optical components such as lenses, mirrors
and prisms.
◦For easy maintenance and cleaning of lenses, mirrors and prisms.
◦Handy optical cleaning kit (OCK)
◦Convenient and portable (packed in a hard case).
◦Air duster is not included.
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Cleaning Tools
Cabinets
Attention
▶*Japanese Domestic Sales Only
Specifications
Part Number
OCK-S
Cmponent list
Product Name Part Number Quantity
Blower − 1 piece
Lens Cleaner SLC-30 1 piece (30cc)
Lens Paper SLP-1 100 pieces (80×150mm)
Wiping Cloth SWC-150 2 pieces (150×150mm)
Cotton Swabs − 30 pieces
Portable Hard Case − 1 piece
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B345

Optics & Optical Coatings
Dust-Off Plus
Lens Cleaner / Lens Paper
DOP
SLC / SLP
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
DOP
Dust-Off Plus for dust removal from optical components using compressed gas.
Ingredients label
Product Name
SLC
Dust Off Plus
Ingredient 1.1-Difluoroethane…100% (HFC 152a)
CAS Number 75-37-6
Degree of Risk 2.1
UN Number 1030
◦Dust-Off Plus is designed to remove dust from optics such as lenses,
mirrors, and prisms using compressed gas.
◦Removes dust from irregular surfaces without abrasion or damage by
gas flow.
◦Remove dust with Dust-Off Plus before using lens cleaner, wiping cloth,
or the like.
◦You can adjust the direction of the nozzle. Suitable for cleaning recessed
or otherwise difficult-to-access optics
◦Capacity of 500 one second sprays.
◦The container (can) can be refilled. Connect the nozzle before use.
Attention
▶Dust-Off Plus may spray liquid at first use. Spray once in another direction to confirm
that no liquid is ejected before use on optical surfaces.
▶Do not store in locations with temperatures of 40°C or above for extended periods. Do
not incinerate.
▶“Microduster (TX series)” is no longer available. Use the “Dust Off Plus (DOP series).”
Please note that the nozzle for Microduster is not compatible with Dust Off Plus.
Specifications
Part Number
DOP-300S
DOP-300D
DOP-300SN
DOP-300N
Contents
Catalog
Code
Replacement container (can) 1 piece
Replacement container (can) 1 dozen
Replacement container (can) with nozzle
Nozzle only
Catalog
Code
W3158
W3159
Our special formulated optics cleaner is designed to remove
stubborn stains, fingerprints and foreign particles while
being gentle to optics.
◦Removes stains, fingerprints, and foreign particles without damaging
optics such as lenses, mirrors, or prisms.
◦Use Dust-Off Plus to clean soft surfaces such as single-layer metallic
film (aluminum, gold, etc.), special coatings, crystal surfaces (Glan
Thompson Prism) and other sensitive optical components.
◦Use the lens cleaner with the lens paper (optional).
Optical Data
Maintenance
Cleaning Tools
Cabinets
Specifications
Part Number
Capacity
[cc]
Hydrocarbon
Solvent
[%]
Antistatic
agents
[%]
SLC-300 300 95 5
Attention
▶*Japanese Domestic Sales Only
▶Use Dust Off Plus to clean soft surfaces such as single-layer metallic film (aluminum,
gold, etc.), special coatings, crystal surfaces (Glan Thompson Prism), and other
equipment.
▶Do not use lens paper or wiping cloth to clean soft surfaces such as single-layer
metallic film (aluminum, gold, etc.), special coatings, crystals (Glan Thompson Prism),
and other equipment.
SLP
Catalog
Code
W3160
Papers for cleaning optics such as lenses, prisms, or mirrors.
◦Use the SLP-1 paper for relatively resistant materials such as BK7 and
quartz materials and the SLP-2 paper for hard-coated and soft products.
◦Each pack contains 100 sheets.
Specifications
Part Number
Size
[mm]
SLP-1 80×300
SLP-2 100×200
B346
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Wiping Cloth
SWC
SWC
W3161
Cloth for wiping dust off optics such as lenses, prisms, or mirrors. 0.1-denier ultrafine filaments
grab and hold dust particles.
Catalog
Code
◦Use the cloth without lens cleaner.
◦Due to the strong ultrafine fiber used, the cloth is
dust-free (doesn’t generate dust).
◦Absorbs liquid by capillary action (High liquid absorption).
◦Conforms to irregular surfaces and sweeps up dust
(High wiping efficiency).
◦Superior chemical resistance; resistant to organic
solvents (High chemical resistance).
◦Reusable after washing.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Specifications
Part Number
Size
[mm]
Sheets per package
SWC-150 150×150 20
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Cleaning Tools
Cabinets
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B347

Optics & Optical Coatings
Catalog
Dry Cabinet (Electronic Drying Case) H-D-M2 Code W3162
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Damp-proof storage cabinets, suitable for storing optics such as lenses, mirrors, and prisms, and
other optical hardware at a certain humidity
H-155WD-M2
◦Humidity can be controlled with humidity adjuster. (+/−5 − 7%RH)
◦Humidity inside and outside of the Dry Cabinet can be checked with digital
dual hygrometer.
◦Photo catalysis is applied to shelf-sheet, which reacts to in-room visible
light, also decomposes and removes bacteria, virus and smell.
◦Electrical outlet equipped on rear side top right corner (general-use power
supply: up to 100V 500W)
◦Our standard Dry Cabinets are intended to use in 100V. Please contact us
when you use outside of Japan.
◦Load capacity per shelf plate is 490N (50kgf).
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Beamsplitters
Polarizers
H-60D-M2 H-80D-M2 H-110D-M2 H-180D-M2
With humidity adjuster & control circuit IC timer
Inside cabinet Outside cabinet
Dried Air
Exhaust
Humidity
control knob
Heating body
shape-memory
alloy coil
Inside
humidity
Intake
High performance
special desiccant
Bias
spring
Fresh air
Special desiccant (exchangefree)
in the unit absorbs
humidity inside the cabinet
and with combination of the
IC timer, heating body and
shape-memory alloy. It will
automatically exhaust the
humidity as vapour outside.
This cycle is repeated and
the inside humidity is lowered
and controlled.
Specifications
Material of Cabinet Steel plate (0.8t) Melamine baking coating
Door Material PVC framed transparent tempered safety glass
Door-Shutting Method Magnet (with rubber)
Humidity Range 30 − 50%RH
Humidity Control Dial type automatic dry unit (accuracy +/−5 − 7%RH)
Hygrometer
Range: 20 − 90%RH, Accuracy: 5%RH
Power Supply 100V (50/60Hz)
Accessories
Two keys
Attention
▶Read the Instruction Manual carefully before use.
▶It is not possible to moisten, heat, or cool the interior of the dry
cabinet.
▶Place on a level surface protected from direct sunlight.
▶Place in a dry location protected from sources that may cause temperature
fluctuations (e.g., air conditioner) and moisture.
▶The cabinet gradually reduces humidity by repeating dehumidification
and regeneration automatically. It does not dehumidify rapidly.
▶Storage of paper or corrugated paperboard may result in increased
humidity.
▶Never store inflammable chemicals.
▶The dry cabinet prevents mold generation and proliferation. It will
not remove mold once it has grown.
Lenses
Multi-Element Optics
Filters
Prisms
Substrates/Windows
Optical Data
Maintenance
Specifications
Part Number
External Dimension
(W×D×H)
[mm]
Internal Dimension
(W×D×H)
[mm]
Effective Capacity
[l]
Attachment Shelf Board
(With cushion sheet)
Power
Consumption
H-60D-M2 400×384×520 398×320×440 56 2 0.3 − 1.82W/H Max60.6W 10
H-80D-M2 400×384×674 398×320×594 76 3 0.3 − 1.82W/H Max60.6W 12
H-110D-M2 400×384×918 398×320×838 107 4 0.3 − 1.82W/H Max60.6W 16
H-180D-M2 400×381×1,315 398×320×1,235 157 6 0.3 − 3.6W/H Max120W 25
H-155WD-M2 805×381×725 803×320×592 152 3 0.3 − 3.6W/H Max120W 25
Weight
[kg]
Cleaning Tools
Cabinets
B348
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Holders

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H o l d e r s
I N D E X
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Holders
Holders Guide
Application
Systems
Optics &
Optical
Coatings
Holders
There are many parameters must to be taken into consideration for a right choice of optics holders.
Make sure that the required adjustments and the dimensions are adequate to the function of the
optical system set up that you are going to realize.
Here below we are showing some set up examples which will provide you an idea for your selection.
First prepare an optical path diagram based on experimental principles to make the optical experiment system.
However, the optics and devices are drawn on most optical path diagrams, but holders and adjustment axes are not.
Thus, create a block diagram like the following from the optical path diagram and experimental conditions.
Bases
Manual
Stages
Optical Path Diagram
He-Ne laser
Sample
Half mirror
/2 board
Mirror
Polarization
plate
Photodiode
Actuators
Motoeized
Stages
Mirror
Half
mirror
Focusing
lens
PD amp
Light
Sources
Index
Guide
Mirrors
Lenses
Prisms
Polarizers
Block Diagram
He-Ne laser
05-LHP-111
Laser holder
LAH-1
Post holder
BRS-20-60
Post holder
Five BRS-120-60
Magnet base
Nine MB-L65C-M4
Half wavelength plate
WPQ-6328-2M
Polarizer holder
PH-30
Half mirror
NPCH-20-6328
Prism holder
KKD-40PHRO
Mirror
TFA-30C05-20
Mirror holder
MHG-MP30-NL
Post holder
Two BRS-120-80
Your sample
Mirror
TFA-30C05-20
Mirror holder
MHG-MP30-NL
Half mirror
NPCH-20-6328
Prism holder
KKD-40PHRO
Polarization plate
SPF-30C-32
Polarizer holder
PH-30
Lens
SLB-30-70PM
Lens holder
LHCN-30
Post
RO-20-40
Post holder
BRS-120-80
Dovetail stage
TAR-20-30
Spacer
SP-109
Your photodiode
Lasers
Beam Shaping
Diffusers
Your vibration isolator (magnetic)
Filters
Shutter
Others
Fiber
Optics need to be placed in appropriate positions one by one, versus the laser beam, in order to set up an optical system.
Also, because the holders and adjustment axes utilized will vary depending on the type of optics and their application
method, this information should be reflected in the block diagram.
In particular by looking over the entire optical system, the final parts structure is decided by confirming whether the optical
axis heights are arranged, whether the placed holders are interfering, and whether the required adjustment mechanisms
have been provided in order to satisfy the performance of the optical system.
Optical Axis Height
A general optical experiment system is deployed in a horizontal plane on a secure baseplate. Most lasers set up on a
baseplate emit beams in the horizontal direction. Optics are placed with the laser beam as the standard.
Ideally, the optics used in an optical system are all the same height as the laser beam. However, because the optical axis
height of holders will often differ when types of optics vary, select post holders and spacers of proper length so that optics
have the same height.
If the optical axis height of components such as laser light sources or measurement samples cannot be changed, then set
the optical axis height of other optics with that height as a standard. Also when there is nothing to restrict optical axis
height, set the optical axis of other optics with a holder not lower than the lowest optical axis height as the standard.
[Attention] If optical axis height has not been decided prior to purchasing holders and baseplates, repurchase of holders
and additional parts might be required.
C004
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Alignment
Light cannot be touched, nor can its flight trajectory be seen directly. Although the laser beam is striking the optics, where
it is doing so, and at what angle cannot be seen directly.
For this reason, the positional relationship between laser beam and optics is judged by observing the light of the laser beam
reflected by the optics and the light transmitted through the optics. This method of optical adjustment is called “alignment”.
Here, we present a few alignment methods used when assembling optical systems.
●Laser beam adjustment
Make a mark beforehand at the location where the laser beam will pass through on the baseplate. It is convenient to
pass the laser beam along the position of the holes in cases where an optical breadboard with mounting holes opening
in matrix shape is used.
Position the laser light source to emit the laser beam, and confirm the position of the laser beam with a ruler standing on
the baseplate. Stand the ruler on the mark right next to the laser light source, and adjust the beam height by shifting the
laser up or down, left or right.
Next, stand the ruler on the farthest mark, and while moving the angle of the laser, adjust it so that the height of the
beam irradiating the ruler is the same height as that of the nearest mark. A laser beam at a certain height and parallel to
the marks will be obtained by repeating the parallel adjustment and angle adjustment of the laser several times.
After adjustment, secure the laser light source so that the beam will not move.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Laser light source
Mark of beam position
Ruler
Motoeized
Stages
Light
Sources
Ruler
Index
●Passing light through the center of the optic
When a laser beam irradiates the surface of an optic, faint scattered light can be seen. Adjust the position of the optic
so that the scattered light passes through the center of the optic.
Sometimes scattered light cannot be seen if the laser beam is dim and the surface of the optic is very clean. In such
cases, check the position of the laser and align it with the center of the optic using the corner of a piece of paper to
scatter light.
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
●Placing optics perpendicular to the beam
When flat optics are irradiated with a laser beam, the beam reflected with the optic returns to the light source. Confirm
the position of the reflected beam at this time. Depending on the optical system, reflected beams sometimes come from
multiple optics. In such cases, remove reflected beams from other than the target optic with a flare plate in order to
leave only the reflected beam of the optic being adjusted.
Adjust the angle of the optic so that the reflected beam will return close to the laser beam window. When multiple
reflected beams are returned from the optic, match the angle of the optic so that the middle of each reflected beam will
be in the laser beam window.
[Attention] If the reflected beam completely returns to the laser beam window, then the oscillations of the laser may
become unstable.
Adjust reflected beams so that the beam spots can be seen entirely beside the beam window.
Others
Fiber
Optics
Before adjustment
Laser light source
After adjustment
Flare plates
Beam window of
laser light source
Feedback
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C005

Holders
Holders Guide
Application
Systems
Optics &
Optical
Coatings
Holders
●Placing optics at 45 degrees incidence
On the baseplates where the optical system is set up, place marks at locations on the mirror position and at a right angle
to where the reflected beam will pass.
Set up a holder so that the center of the reflective surface of the mirror is on the extended line connecting the location
where the reflected beam passes and the position of the mirror.
Move the mirror holder parallel to the extended line, and fix it at a position where the laser beam irradiates the center of
the reflective surface of the mirror.
Finally, adjust the mirror holder in rotation and tilt so that the laser beam passes at the same height above the mark of
the reflected beam and parallel to the optical breadboard.
Bases
Manual
Stages
Actuators
Laser light source
Marks of beam position added
Mirror
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Lenses
Prisms
Polarizers
●Adjustment of lens optical axis
If the irradiation point of the laser beam is deviating from the center of the lens, the beam transmitted through the lens
proceeds with a tilt against the optical axis. Therefore the lens needs YZ adjustment to set the center of the lens in the
laser beam.
Also, some lenses require an X-axis adjustment mechanism to set the point where the laser beam concentrates on the
designated point. Adjustment mechanisms such as dovetail stages that allow large and quick travel are suitable for this
X-axis adjustment mechanism because it does not require fine tuning.
([Attention] Lenses with short focal length such as objective lens require a precise fine-tuning mechanism for the X-axis.)
In a general optical system, adjustment does not require tilting of lenses. The direction of beam that passes the axis
does not change even when a lens is tilted. However, aberration caused by tilt of a lens can be a problem in a precise
optical system such as interferometers or laser processing. In such cases, tilt of the lens needs to be adjusted while
observing the intensity distribution of wavefront and focus spot to find out the conditions to gain the best characteristics.
Y
Z
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
X
●Transmitted light path of beamsplitter
A transmitted light path does not deviate when an incident laser beam is perpendicular to the surface of a plane parallel
optic. If the optic is tilted, however, the output light path is shifted parallel to the incident light path. The amount of this
shift varies depending on the refractive index and thickness of the optic as well as the incidence angle. C286
When a tilted beamsplitter is inserted in a light path after optical adjustment, arranged laser beam, optics and holder
center might be displaced. For this reason, if a tilted beamsplitter will be inserted later, place optics considering the shift
in beam from the beginning.
For example, use a baseplate that can be fixed at any position for optics to be placed behind the beamsplitter in order to
fix the optics without constraints of mounting hole positions of the optical breadboard.
Beamsplitter
Cube
Optical path shift
C006
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How to convert Stand or Post of Holder
Most of the holders listed in the catalog have a M6 male thread post mounted.
When removing this post and replacing it with a male thread post of different specification, the female thread of the holder
for post mounting needs to be changed according to the post specification.
To change the female thread for post mounting to an inch-based female thread (8-32UNC) or M4 female thread, it can be
specified by adding an option code as the suffix of the holder part number.
Option code
Application
Systems
Optics &
Optical
Coatings
Holders
(None)
Bases
Part number
N
EE
UU
Option code Post Female thread size
Manual
Stages
(None) Included -
N None M6
Actuators
EE None M4
UU None 8-32UNC
Motoeized
Stages
◎Specify the necessary female thread by adding the option code as the suffix of the catalog part number.
Light
Sources
Example of connection of various holder options
When the option code is added to the holder part number, the holder does not come with a post.
To use the holder with an inch-based or M4 thread post or baseplate, please select an EE specification or UU specification
post holder or pedestal base.
Index
Guide
ALH-25.4-3RO
ALH-25.4-3ROEE
ALH-25.4-3ROUU
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
M4 female thread
8-32UNC female thread
Fiber
Standard Type
M4 male thread
8-32UNC male thread
ALH-25.4-3RON
EE Type Post
RO-12.7-**EE
EE Type Pedestal Post
PST-**EE
UU Type Post
RO-12.7-**UU
UU Type Pedestal Post
PST-**UU
M6 female thread
No Post Type
M4 thread Type
8-32UNC thread Type
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WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
C007

Holders
Mirror Holders Application Note
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Lenses
We often hear that it is difficult to choose mirror holders because of the large selection of them.
So we sorted the functions of various mirror holders into six categories.
You can easily select the ones that suit for your purpose once you understand the six functions.
Classification of Mirror Holder Functions
Part Number
Mounting Center
Rotational
Mechanism
Fine Adjustment
Center
Optics Fixation Control Direction Control
MHG Offset None Offset
Lateral side set
screw
Back
Screw
MMHN Offset None Offset Mirror case Back Screw
MHAN/MHA Mirror center Mirror center Mirror center Retaining ring Front/Back Screw/Micro
BHAN Mirror center Mirror center Mirror center Retaining ring Front/Back Screw/Micro
BSHL Offset None Mirror center Retaining ring Vertical Screw
(1) Center of Mounting
Some mirror holders are fitted with posts, and the others are not.
The models fitted with posts (such as MHAN) are designed so that the center of the reflective surface of a mirror comes
to the center of the post (except MMHN-25RM6 and MMH-50M6). Therefore, once the mirror holders are installed with
the center of the post holder aligned to the optical axis, the position of laser beam irradiated on mirrors will not change
even when the mounting direction of the mirror holders changes, which allows easy installation of the mirror holders.
When mirror holders not fitted with posts are mounted on posts, the center of a post may not be aligned with the center
of a mirror. In such cases where the center of mounting has offset, attention is required to the positional relationship
between the laser beam and the mirror holder. (Refer to the following figure on the right.)
To install a mirror holder that has offset at the center of mounting, first roughly adjust the angle of the mirror before
fixing the holder.
Find the position where the laser beam irradiates at the center of the mirror with the specified incidence angle, and then
fix the mirror holder at that position. At this time, the mounting screws of the baseplate and the like used for fixing the
holder may not fit the hole positions on the optical breadboard or breadboard. For this reason, use a baseplate designed
to fix the mirror holder at the offset position, or a baseplate that provides flexibility in installation position (such as a
magnet baseplate). Especially, use of an optical bench requires attention because the center of the mirror needs to be
at the center of the bench.
Special plates for mounting posts (MHG-BPRO) are available for the MHG holders to match the center of the post to
the center of the reflective surface of the mirror.
Prisms
Polarizers
Lasers
Image of MHAN Holder Installation
Image of MHG Holder Installation
Beam Shaping
Diffusers
Filters
Shutter
28.28mm
Others
Fiber
(2) Rotational Mechanism
With their two-axis gimbal structure, the MHAN
and BHAN holders can face the reflective surface
of the mirror in any direction. Since the rotation
center of the gimbal mechanism matches the
center of the reflective surface of the mirror, once
the laser beam is irradiated at the center of the
mirror, the beam stays at the center of the mirror
even when the direction of the mirror is changed.
The beam can be reflected without changing the
incidence beam position or holder installation
position. There are no constraints on the range of
mirror rotation, thus the reflected beam can be
directed in vertical or diagonal directions in
addition to horizontal angles.
Depending on the beam diameter or incidence
angle, however, part of the beam may be shaded
by the mirror holder frame, which shapes the
reflected beam different from the incident beam.
Image of Gimbal Type Mirror Holder
Schematic of Beam Loss due to Mirror Frame
Incidence angle
a
Output angle
a
C008
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(3) Fine Adjustment Center
Mirror holders are fitted with fine adjustment mechanisms
enabling sensitive angle adjustments.
There are two types of fine adjustment mechanisms, the gimbal
type enables adjustment of the rotational center of the reflective
surface of the mirror, and the kinematic type for a rotational center
outside the reflective surface of the mirror.
No differences occur in general usage, but in usages where
infinitesimal optical path length variation is an issue such as
interferometers or laser resonators, some differences may occur.
Optical path length variations caused by angle adjustment are
shown in the table to the right for representative kinematic mirror
holders.
The gimbal type has the advantage of small optical path length
variations.
In contrast, the kinematic type causes some optical path length
variations, but structure is simple, the number of parts is small,
and temperature characteristic and variation over time are stable.
In laser resonators requiring high precision, the stable kinematic
type is utilized in spite of the sense of shortcoming that adjustment
of optical path length becomes cumbersome.
Variation in optical path length by angle adjustment
of kinematic mirror holder
Part Number
Kinematic Type Fine Adjustment Mechanism
Mirror reflective
surface
Incidence
angle θ
Adjustment
Range
[ ° ]
Max Optical
Path Length
Deviation
(Incidence angle 0 degree)
[mm]
Optical path
length variation
Optical Path Length
Variation
when Turned by 0.5°
(mm)
Incidence
Angle 0°
Incidence
Angle 45°
MHG-12.7 ±3 0.5 0.17 0.12
MHG-30 ±3 1.0 0.33 0.24
MHG-50 ±2 1.0 0.51 0.36
MHG-80 ±2 1.5 0.77 0.55
MHG-100 ±2 2.1 1.03 0.73
Gimbal Type Fine Adjustment Mechanism
Mirror reflective
surface
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
(4) Mounting Method of Optics
In a precision optics experiment such as interferometers or laser concentration, mirrors with high surface accuracy are
used. Deviation in shape might not be perceived due to the thickness and hardness of the mirror material. Actually,
however, merely slight pressure with a finger will cause minute deviations in the shape of the mirror. The deviation
cannot be observed visually, however in precise experiments with light, a size which cannot be disregarded is sometimes
observed. Therefore, when fixing mirrors to mirror holders, it is necessary to choose an appropriate mounting method.
●Retaining Ring Mount
The mirror is held with Delrin rings and aluminum retaining
Image of Retaining Ring Fixation
rings. Because the mirror will be pressed on the face side of
Delrin ring
the mirror frame, the position of the reflective surface of the
Retaining Ring
mirror does not change even if the thickness of the mirror
changes. There is little risk of optics falling out of their holders
due to vibration or impact during shipping, and they can be
used safely. When a precise optical system is used, retaining
rings must be tightened so that there is no stress on mirrors,
and difficulty in the degree of tightening is a shortcoming.
●Lateral Side Screw Mount
Image of Lateral Side Screw Fixation
The mirror is held on the lateral side with two points on the
holder frame and with one resin screw point. Change in the
thickness of mirror changes the position of the reflective
surface because the end surface of the mirror frame supports
the back surface of the mirror. Moreover, since the mirror is
Set bolt
supported by the lateral side, it may be mounted tilted relative
to the mirror frame.
Stress exerted on mirrors can be controlled using the torque of
the screw that presses down against the lateral side of the
mirror, and the torque can also be changed after the holder is
installed. Attention is required when used in locations subjected
to impact or vibration because of the risk that the mirror
can fall out.
Fulcrum
Light
Sources
Guide
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Index
Mirrors
(5) Control Directions
In a complex optical system or an optical system configured in a narrow space, it is sometimes difficult to operate holders,
or adjustment mechanisms of the holders may interfere with each other. In such cases, holders with different control
directions for fine-tuning mechanisms are convenient. Vertical control and lateral control are available when needed.
It may complicate mechanisms for some holders and destabilize them.
(6) Types of Adjustment Mechanisms
There are two types of adjustment mechanisms for fine-tuning holders, one is the graduated micrometer type, and the
other is the fine-pitched precision screw type (pitch size is 0.25mm). The micrometer type provides a long knob, which
is easy to hold* and appropriate for frequent operations.
The precision screw type provides as fine adjustment as the micrometer, while making the adjuster short so that a
compact optical system is possible.
* Sensitivity will vary among different individuals.
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C009

Holders
Mirror Holders Selection Guide
Application
Systems
Optics &
Optical
Coatings
Emphasis on workability
MHAN series
BHAN series
MHG series
Emphasis on stability
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
High performance adjustable mechanisms that
enable simple alignment without awareness of
motion of holders
○When used at 45 degrees incidence
(MHAN is convenient for beginners.)
○When placed on an optical bench
○When changing direction of the reflected beam
Achieved high stability with its simple structure
from where adjustable mechanisms other than
fine tuning mechanisms are left out
○When the optical system is configured on a low
optical axis
○When desiring to avoid impact of vibration and
temperature fluctuation
○When stability of the optical system is required
Laser resonators, interferometers
Index
Interferometer configured with MHG mirror holder
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
○When configuring a three-dimensional optical
system
Filters
Shutter
Others
Fiber
Downsizing
The MHG and MHAN mirror holders require a large space
of about two circumferences for the size of the optics
(mirrors) for adjustment mechanism and operation space.
If operability and resolution are not an issue, the space of
the optical system can be reduced by using the MMHN
and BSHL mirror holders.
In particular, because the operation direction of the BSHL
series is vertical (or lateral), space for adjusting holders
becomes unnecessary, enabling proximity to the holders.
BSHL Series
MMHN Series MHG Series MHAN Series
40mm
MHG Series
56mm
Reduced space
100mm
100mm
83mm
C010
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Mirror holder that can be used by the beamsplitter
Some mirror holders can be used only for mirrors, while other mirror holders can hold a beamsplitter and handle transmitted
light.
Furthermore, among the holders which can handle transmitted light, some holders like the BHAN series can handle beams from
both left and right directions, while other holders like the MHG and MHI series can handle transmitted beam from only one side.
When using a holder with transmitted light, please check the transmitted beam diameter at 45 degrees incidence listed in
the specification table of each product.
Not Suitable for Use with Transmitted Beam Used for Transmitted Beam from Only One Direction Used for Transmitted Beam from Two Directions
LMHB, LMMH, MMHN, MHD MHG-NL, MHI, MHGT, MHE BSHL, BSHL, HMAN, BHAN
Transmitted Beam borderline
Transmitted Beam borderline
Transmitted
Beam
Transmitted Beam borderline
Center Line of
Transmitted Beam
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Center Line of
Reflective surface
Transmitted
Beam
Motoeized
Stages
Light
Sources
Transmitted Beam borderline
Center Line of
Transmitted Beam
Transmitted Beam borderline
Transmitted Beam borderline
Index
This type of holder cannot be used with transmitted
beam at 45 degrees incidence even when the
holder has a center aperture.
However, some can be used for transmitted beam
at 0 degrees incidence.
This type of holder is used when adding to an
observation system with coaxial illumination or
using in a Mach-Zehnder interferometer.
The direction of transmitted light can be changed
by adjusting the installation direction of the holder.
This type of holder can be used in a Michelson
interferometer.The transmitted beam diameter
varies depending on the holder.
Guide
Mirrors
Post type and Mounting type
There are two types of mirror holders; the post type which comes with a post, and the mounting type which is mounted
directly on a base plate.
When selecting the post type, it is easy to adjust the optical axis height of the mirror holder using a post holder.
The mounting type is used for making a compact optical system, or incorporated into a device.
It is necessary to check the optical axis height of each mirror holder, and design a base plate beforehand so that the optical
axis heights of the holders are the same.
Some mounting type mirror holders can be mounted directly on a post, or converted to the post type using an adapter plate.
Post Type
MHAN, LMMH-R, BHAN, MMHN-RO, MHE
Mounting Type
To be mounted Post using Adapter plate
LMHB, BSHL
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Mounting Type
To be mounted directly to Post
MHI, MHGT, MHG-NL, MMHN-BN
MMHN-L, MMHN-R, (MHB-S), (MHF)
Mounting Type
Not be mounted Post
MHD, (LMMH-B)
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C011

Holders
Kinematic Center Mirror Mount
MHI
Catalog
Code
W4102
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
The mirror reflective surface of these kinematic mirror holders is not offset from the axis of the
post even when the mirror thickness changes.
◦Because the center axis of the post matches the reflective surface of an optic when the holder mounts on a post, even
when the optic is tilted 45 degrees on an optical bench, the center of the mirror will stay at the optical axis.
◦These holders can be used as beamsplitter holders because a transmitted beam can be extracted in one direction.
◦The mirror frame is incorporated into the support portion of the holders to make these holders thin.
◦These holders can offer more space for adjustment work compared to the kinematic mirror holders (MHG).
◦For installation of these holders, please use an M4 low head screw to secure them from the top and an M6 thread post
from the bottom. (MHI-12.7 can be mounted with an M3 low head screw from the top and M4 thread post from the
bottom.)
◦The direction of the mirror holders can be fixed at designed positions by setting pins on a baseplate and using the
positioning holes (φ3H7) of these mirror holders (the positioning hole size of MHI‐12.7 is φ2H7).
Guide
▶Vertical control gimbal mirror and beamsplitter holders (BSHL) of which
rotation center of fine adjustment matches the mirror center are also
available. C022
Attention
▶MHI-12.7 limits the tilt and rotation to be ±1° and ±2° respectively,
even when a low and small head hexagon socket head cap screw
is used.
▶When securing a mirror with a low head hexagon socket head cap
screw, a hex wrench may interfere with the mirror. Please retract
the mirror by turning the rotation and tilt adjustment screws before
tightening the low head hexagon socket head cap screw.
▶When securing a mirror on a baseplate with a M4 low head
hexagon socket head cap screw, there will be ±1mm clearance.
Guide
Mirrors
Outline Drawing
Lenses
MHI-12.7
low head hexagon socket head cap screw M3×6…1 screw
MHI-25.4/30
low head hexagon socket head cap screw M4×8…1 screw
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
φ6
23
15
4
Mirror retaining screw
Mirror surface
2-φ3.2
(Fixed from upper side)
2-M4
(Fixed from lower side)
2-φ2H7
depth 4
12.7
25.4
Clear aperture φ10.7
12.7
25.4
φ12
35
22
6
Mirror retaining screw
Mirror surface
2-φ4.9
(Fixed from upper side)
2-M6 P1
(Fixed from lower side)
B
2-φ3H7
depth 4
D
C
Clear aperture φA
D
C
Cross-section view of MHI-30
Support part
mirror frame
φ15
Part Number
B
(mm)
C
(mm)
D
(mm)
MHI-25.4 18 50 25
MHI-30 20 55 27.5
Baemsplitter
3
Specifications
Part Number
Options
specified* 1
Compatible Optics
Diameter
[mm]
Compatible Optics
Thickness
[mm]
Clear
aperture
φA
[mm]
Reflected Beam
Clear Aperture
(45°incidence)
[mm]
Transmitted Beam
Clear Aperture
(45°incidence)* 2
[mm]
Adjustment Range
Tilt
[ ° ]
Rotation
[ ° ]
Tilt
[°/rotation]
Primary material: Aluminum
Finish: Black Anodized
Resolution
Rotation
[°/rotation]
MHI-12.7 − φ12.7 2 – 9 φ10.7 φ6.8 φ5 ±3 ±3 about 0.74 about 0.74 0.05
MHI-25.4 UU φ25, φ25.4 3 – 10 φ23 φ15.5 φ13 ±1.5 ±1.5 about 0.4 about 0.4 0.12
MHI-30 UU φ30 3 – 10 φ27 φ18.3 φ15 ±1.5 ±1.5 about 0.35 about 0.35 0.13
*1 For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
*2 When light is transmitted through a BK7 plane parallel substrate of 3mm thickness.
Weight
[kg]
C012
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Kinematic Mirror Mount
MHGT
Catalog
Code
W4111
Improvement of the conventional design of kinematic mirror holders (MHG) brought a further
reduced price. These holders are suitable for experiments which use a large number of simple
mirror holders or for incorporation of mirror holders into production devices.
◦These thinned holders can offer larger space for adjustment work compared to MHG.
◦These holders hold a mirror at three points from the side in order to adjust the stress occurring when holding the mirror.
◦Retaining rings do not cause constraints on the clear aperture so that a large clear aperture can be obtained with reflected
light or transmitted light.
Guide
▶MHG-NL mirror holders which have a locking mechanism for
adjustment screws are also available. C014
▶Can be mounted on the post holders (PST: Sold separately) or the M6
thread post (RO: Sold separately).
Attention
▶The installation center of the post is offset from the mirror reflective
surface. These holders cannot be used for installation on an optical
bench at 45 degrees incidence. Please use the mirror holders
without offset (MHI). C012
▶The rotation center of fine adjustment does not match the mirror
reflective surface. For fine measurement, Please use gimbal mirror
holders (MHAN) of which rotation center of fine adjustment matches
the mirror reflective surface. C026
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Outline Drawing
Index
MHGT-12.7
hexagon socket head cap screw M4×6…1 screw
MHGT-25.4/30
hexagon socket head cap screw M4×10…1 screw
Guide
Mirrors
Mirror retaining
screw
25.4
12.7
12.7
25.4
φ12.7 (Mirror Diameter)
φ10 (Clear aperture)
Mirror thickness
11.5
16.5
9 MAX6
1
2-φ4.4
φ7.2 counterbore
Compare the size of the MHG-NL and MHGT
6
φ8
2.7
Mirror retaining
screw
50
25
Part Number
25
50
φA (Mirror Diameter)
φB (Clear aperture)
Mirror thickness
φA
(mm)
7.5
14.5
20
10
φB
(mm)
MHGT-25.4 φ25, φ25.4 φ22
MAX12
6 φ12
2-M6 P1 mounting hole
φ7.5 counterbore
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
MHGT-30 φ30 φ27
43
MHG-MP30-NL
0 3
MHGT-30
4
30
34
MHG-MP12.7-NL
MHGT-12.7
Specifications
Part Number
Options
specified*
Compatible Optics
Diameter φA
[mm]
Compatible Optics
Thickness
[mm]
Clear aperture
Number of
φB
Adjustment Axes
[mm]
Adjustment Range
Tilt
[ ° ]
Rotation
[ ° ]
Tilt
[°/rotation]
Primary material: Aluminum
Finish: Black Anodized
Resolution
Rotation
[°/rotation]
MHGT-12.7 − φ12.7 3 – 5 φ10 2 ±3 ±3 0.74 0.74 0.013
MHGT-25.4 UU φ25, φ25.4 3 – 5 φ22 2 ±3 ±3 0.39 0.39 0.067
MHGT-30 UU φ30 3 – 5 φ27 2 ±3 ±3 0.39 0.39 0.067
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Weight
[kg]
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C013

Holders
NOMI LOCK Model Kinematic Mirror Holder
MHG-MP-NL/MHG-HS-NL
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Lenses
Prisms
Polarizers
High stability Kinematic Mirror Holder with SIGMA KOKI’s unique locking mechanism (NOMI LOCK).
NOMI LOCK is a new type of locking mechanism that enables adjustment of the torque of adjustment
screws.
It is best suited for usage in interferometers or laser processing devices where beam displacement
after adjustment is a problem.
NOMI LOCK is a registered trademark of SIGMA KOKI CO., Ltd. (Trademark Registration: 5313722)
◦With their simple structure, excellent rigidity and stability, kinematic mirror holders are used in interferometers and laser
resonators.
◦There are two types of mirror holders, a high stability model (MHG-HS) and a production model (MHG-MP).
◦The high stability model (MHG-HS) is fitted with large knobs, and allows adjustment of the point of support in addition to
the two points of action as well as displacement of mirrors in the vertical direction.
◦When NOMI LOCK is used in interferometers, the displacement in the optical axis will be within a single fringe. (There
are individual differences in the operation of the lock.)
◦Mirrors are fixed at three points on the lateral side so that the stress caused by fixing mirrors can be adjusted.
◦Provide large clear aperture of reflected light or transmitted light since retaining rings and the like do not impose any
constraints on clear aperture.
NOMI LOCK Adjustment Method
Guide
▶This product can be mounted on pedestal stands (PS: optional) or
posts with an M6 external thread (RO: optional).
▶Production model (MHG-MP) can be fixed directly on plates or stages
with M4 screws.
▶Production model (MHG-MP) comes with a special wrench for NOMI
LOCK.
Attention
▶The rotation center of the production model (MHG-MP) is outside the
mirror (fulcrum of holder).
▶To mount the high stability model (MHG-HS) on a flat surface, use the
plates for mounting posts (MHG-**BPRO). C016
▶When the plates for mounting posts (MHG-**BPRO) are used, the
optical axis will move 10mm upward.
▶The back surface of the mirror is the reference surface when the mirror
is mounted in the holder. Due to this condition, the location of the front
surface will vary with the thickness of the mirror.
Lasers
Beam Shaping
Diffusers
Control Method
Lock knob Adjustment screw
Interference Fringe Image
(Image)
Filters
Shutter
Others
Fiber
(1) Free
(2) Half lock
Loosen the locking knob and the adjustment screw can be moved easily.
Tighten the locking knob about 30 degrees to make fine adjustments with
some resistance in the adjustment screw. (When changing from free to
half-lock, the interference fringe moves greatly.)
(3) Lock
Tighten the locking knob to the end and the adjustment knob becomes
tight and will not move. When changing from half-lock to lock, the
interference fringe only changes by about 1 fringe.
Specifications
Part Number
Options
specified*
Compatible
Optics
Diameter
[mm]
Compatible
Optics
Thickness
[mm]
Number of
Adjustment
Axes
[mm]
Primary material: Aluminum (Brass only for MHG-MP12.7-NL)
Finish: Black Anodized (Super Black Chrome only for MHG-MP12.7-NL)
Adjustment Range
Tilt
[ ° ]
Rotation
[ ° ]
Resolution
Rotation
[°/rotation]
Resolution
Tilt
[°/rotation]
MHG-MP12.7-NL − φ12.7 3 − 5 3 ±3 ±3 about 0.74 about 0.74 0.04
MHG-MP20-NL UU φ20 3 − 5 2 ±3 ±3 about 0.39 about 0.39 0.12
MHG-HS20-NL UU φ20 3 − 5 3 ±3 ±3 about 0.39 about 0.39 0.12
MHG-MP25-NL UU φ25, φ25.4 3 − 5 2 ±3 ±3 about 0.39 about 0.39 0.12
MHG-HS25-NL UU φ25, φ25.4 3 − 5 3 ±3 ±3 about 0.39 about 0.39 0.12
MHG-MP30-NL UU φ30 3 − 5 2 ±3 ±3 about 0.39 about 0.39 0.12
MHG-HS30-NL UU φ30 3 − 5 3 ±3 ±3 about 0.39 about 0.39 0.12
MHG-MP50-NL UU φ50 5 − 8 2 ±2 ±2 about 0.26 about 0.26 0.24
MHG-MP50.8-NL UU φ50.8 5 − 8 2 ±2 ±2 about 0.26 about 0.26 0.24
MHG-MP80-NL UU φ80 7 − 12 2 ±2 ±2 about 0.18 about 0.18 0.38
MHG-MP100-NL UU φ100, φ101.6 10 − 15 2 ±2 ±2 about 0.13 about 0.18 0.56
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Weight
[kg]
C014
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Catalog
Code
W4001
Outline Drawing
MHG-MP12.7-NL
Mirror retaining screw
Hexagonal socket head cap screw M4×8…1 screw
39
39
20
40
20
40
Part Number
Mirror Diameter
(mm)
MHG-MP12.7-NL φ12.7
Mirror diameter 12.7
Clear aperture 10
Mirror thickness 5
1
7
10
12.7
18.7
MAX14
6
4
2-4.4
7.2 counterbore
MHG-MP20-NL/25-NL/30-NL
Hexagonal socket head cap screw M4×10…1 screw
Spanner for lock knob…1 screw
Mirror retaining screw
49
49
25
50
2-M2.6 depth 5
PCD35
25
50
Part Number
Mirror diameter A
Clear aperture B
Mirror thickness 5
1
Mirror
Diameter
φA (mm)
8.5 18 MAX20
20
30
Clear
Aperture
φB (mm)
MHG-MP20-NL φ20 φ17
MHG-MP25-NL φ25, φ25.4 φ22
MHG-MP30-NL φ30 φ27
12
5.5
2-M6 P1 through hole
7.5 counterbore
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
MHG-HS20-NL/25-NL/30-NL
Hexagonal socket head cap screw M4×10…1 screw
MHG-MP50-NL/50.8-NL
Hexagonal socket head cap screw M4×10…1 screw
Spanner for lock knob…1 screw
Light
Sources
Index
Mirror retaining screw
MHG-MP80-NL
Hexagonal socket head cap screw M4×10…1 screw
Spanner for lock knob…1 screw
Mirror retaining screw 2-M5 depth 10
98
PCD90
98
49
49
25
50
100
50
2-M2.6 depth 5
PCD35
25
1.5
51.5
1.5
50
100
Part Number
Mirror diameter A
Clear aperture B
Mirror thickness 5
1
Part Number
MHG-MP80-NL
Mirror diameter 80
Clear aperture 77
Mirror thickness 12
1
20
30
16.5 20 MAX25
30
41
Mirror
Diameter
φA (mm)
8.5 18 MAX18
16
5.5
5.5 16
Clear
Aperture
φB (mm)
MHG-HS20-NL φ20 φ17
MHG-HS25-NL φ25, φ25.4 φ22
MHG-HS30-NL φ30 φ27
2-M6 P1 through hole
7.5 counterbore
Mirror Diameter
(mm)
φ80
2-M6 P1 through hole
7.5 counterbore
Mirror retaining screw
128
69
MHG-MP100-NL
Hexagonal socket head cap screw M4×12…3 screws
Spanner for lock knob…1 screw
Mirror retaining screw
69
70
25 25
128
130
35
8
65
35
2×M4 depth 8
PCDB
70
8
2-M5 depth 10
PCD 111
65
130
Part Number
Mirror diameter A
Clear aperture 47
Mirror thickness 8
1
Part Number
Mirror diameter 100
Clear aperture 97
Mirror thickness 15
1
Mirror
Diameter
φA (mm)
11.5 18 MAX20
25
33
18.5 20 MAX26
30
43
PCD
φB (mm)
MHG-MP50-NL φ50 φ58
MHG-MP50.8-NL φ50.8 φ59
6 6
12
2-M6 P1 through hole
7.5 counterbore
Mirror Diameter
(mm)
MHG-MP100-NL φ100, φ101.6
2×2-4.5
7.5 counterbore
2-M6 P1 through hole
7.5 counterbore
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
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C015

Holders
Options for Kinematic Mirror Holders
MHG-BPRO/MHG-KAD
Application
Systems
Optics &
Optical
Coatings
Holders
Post Adapter Plates—MHG-BPRO
Plates for correcting the offset between the center of mirror reflective surface and the holder
mounting position.
◦When post adapter plates are used, the optical axis will move 10mm upward. (12.3mm only for MHG-12 and 7BPRO.)
◦Post adapter plates can be fixed not only on posts but also on stages or baseplates using M4 screws.
◦The adapters are designed for use with a mirror of 5mm thickness. Offset remains if a mirror of thickness other than
5mm is used.
Catalog
Code
W4002
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Outline Drawing
MHG-12.7BPRO
Hexagonal socket head cap screw M4×12…1 screw
Flat washer
12.7
φ8.5 counterbore
5
Example of Use
MHG
Post
MHG-BPRO
MHG-30BPRO
Hexagonal socket head cap screw M4×10…1 screw
Flat washer
φ8.5 counterbore
20
11
Specifications
Part Number
Primary material: Aluminum
Finish: Black Anodized
Weight
Compatible Holders
[kg]
MHG-12.7BPRO MHG-MP12.7 0.02
MHG-30BPRO
MHG-MP20/-HS20
MHG-MP25/-HS25
0.025
MHG-MP30/-HS30
MHG-50BPRO MHG-MP50/-MP50.8 0.025
MHG-100BPRO MHG-100 0.075
MHG-50BPRO
Hexagonal socket head cap screw M4×10…1 screw
Flat washer
φ8.5 counterbore
25
9
MHG-100BPRO
Hexagonal socket head cap screw M4×10…1 screw
Flat washer
φ8.5 counterbore
30
14
Guide
Mirrors
Lenses
7.3
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
45° Optics Adapters—MHG-KAD
Used when directing the beam vertically up (or down) using kinematic mirror holders (MHG) installed
on optical benches.
W4003
◦Since the reflective surface of kinematic mirror holders is tilted 45 degrees when 45° optics adapters are mounted, the
travel of the mirror surface does not agree with the adjustment range or resolution in the specifications of mirror holders.
◦Mirrors are mounted at three points on the side.
◦Since adapters are fitted in the mirror frame of the mirror holder, the direction of the tilted surface of the mirror can be
changed by rotating on the central axis of the adapter cylinder.
Catalog
Code
Outline Drawing
MHG-KAD
Mirror thickness 3 – 5 depth 6
(49.7)
C
D
Mirror retaining screw
Mirror diameter
45°
φ40
φB −0.01
−0.1
22
22
22
60
25
28.7
12.3
5
42
2
5
45
2
5
59
22
2
25
M6 P1 through hole
M4 through hole
M6 P1 through hole
10
12
M4 through hole
M6 P1 through hole
10
12
M4 through hole M6 P1 through hole
10
12
3-M4 through hole
Example of Use
φA
Specifications
Part Number
Compatible Holders
Compatible
Optics
Diameter φA
[mm]
Primary material: Aluminum
Finish: Black Anodized
Compatible
Optics
Thickness
[mm]
Weight
[kg]
MHG-25.4KAD MHG-MP25.4/-HS25.4 φ25.4 3 − 5 0.07
MHG-30KAD MHG-MP30/-HS30 φ30 3 − 5 0.07
25
(42)
φ10
Part Number
φB
(mm)
C
(mm)
D
(mm)
MHG-25.4KAD 25.4 13.5 9
MHG-30KAD 30 15.5 7
C016
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Options for Kinematic Mirror Holders
MHG-MAD/MHG-PAD
Adapter Mounts—MHG-MAD
Adapters for mounting smaller diameter mirrors.
◦Adapters are designed so that the end faces of mirror frames are aligned with the end
faces of adapters when adapters are attached to kinematic mirror holders (MHG).
However, the reflective surface of a mirror is positioned 1mm inside the end face of
adapter.
◦Mirrors are fixed at three points on the lateral side.
◦Before mounting adapters to mirror holders, fix mirrors to the adapters. If the adapters
are mounted on the mirror holders first, mirrors cannot be fixed.
◦Change in the thickness of mirror also changes the position of the reflective surface
because the mirror frame end is on the back surface of the mirror.
Catalog
Code
W4004
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Example of Use
Specifications
Part Number
Compatible Holders
Compatible Optics
Diameter
[mm]
Compatible Optics
Thickness
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
MHG-40MAD MHG-MP50 φ40 4 – 6 0.015
MHG-60MAD MHG-80 φ60 6 – 10 0.06
MHG-25.4SMAD MHG-MP25/-HS25 □25, □25.4 3 – 5 0.018
Manual
Stages
Actuators
Motoeized
Stages
Outline Drawing
MHG-40MAD MHG-60MAD MHG-25.4SMAD
13 Mirror retaining screw
9
Mirror retaining screw
φ50
Clear aperture φ37
Mirror diameter φ40
φ80
Clear aperture φ57
Mirror diameter φ60
Mirror thickness 6
7
Mirror thickness 10
11
2
Mirror retaining screw
35
24.5
14.5
8
25.4
φ25.4
5
Light
Sources
Index
Guide
Mirrors
Lenses
Prisms
Prism Adapters—MHG-PAD
◦Rotation (θ or yaw) and tilt (α or pitch) of prisms and cube optics can be
fine adjusted, but roll tilt (β) cannot be adjusted. To adjust yaw tilt (β), fit
the prism adapters in kinematic mirror holders after adjusting the direction,
and fix them.
◦The mounting part of the prism adapters has a transmission hole so that
cube optics can be used in four directions.
◦There is an offset of 40mm from the baseplate mounting hole of the
kinematic mirror holder to the center of cube. Use this product considering
misalignment of cube optic position that might occur depending on
the fixed position of holders or adjustment of cube optics.
◦By changing the top and bottom direction of the prism support of
prism adapter, cube optics with two different dimensions can be
accommodated.
Outline Drawing
W4007
Adapters for holding cube optics such as beamsplitters or prisms. Provide extended stability by fixing
adjustment screws with NOMI LOCK.
Example of Use
MHG-12.7PAD
(54.85)
φ45
Prism retainer
□10
Prism
Catalog
Code
25
□12.7
Prism
20 24.8
Prism strut
31
31.3
φ30
Strut
fixing screw
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
MHG-20PAD
φ10
Prism retainer
25
(58.5)
φ45
□15
Prism
φ30
Specifications
Part Number
Compatible Holders
Compatible Optics Diameter
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
MHG-12.7PAD MHG-MP30/-HS30 □10・□12.7 0.06
MHG-20PAD MHG-MP30/-HS30 □15・□20 0.055
□20
Prism
20
31
Prism strut
28.5
35
Strut
fixing screw
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C017

Holders
Options for Kinematic Mirror Holders
FMB / MHG-20LDU
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Optical Path Switching Mounts—FMB
Mounts for removing and inserting mirror holders from optical paths in order to switch optical
paths in a optical system.
Catalog
Code
W4006
◦To place the mirror center at the mounting center with 45 degrees
incidence, use a combination of 3mm thickness mirror
(TFA-20C03-10) and MHG-MP20-NL.
◦High repeatability of removal and insertion is achieved when
used with mirror holders fitted with NOMI LOCK.
◦To mount a high precision mirror holder (MHG-HS**-NL), use an
accessory spacer for adjusting height in order to avoid interference
with adjustment screws.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Outline Drawing
FMB-25
5-M2 depth 4
M4 through hole
Hexagonal socket head cap screw M4×12…1 screw
10 2
2-φ2.4 mounting hole
φ4 counterbore
FMB-40
Hexagonal socket head cap screw M4×12…1 screw
Countersunk head screw M4×8…2 screws
15.5 40
12.5 12.5
8-M4 depth 6
Index
Guide
90°
10
10
14 6
47.5
4-φ2.2
φ4 counterbore PCDφ20
2
25
20
35.6
40
12.5 12.5
50
[Accessories]
Height adjustment spacer
40
25
Mirrors
Lenses
Prisms
9
M6 P1 through hole
φ7.5 counterbore
20
20
5
9
2-φ4.5 mounting hole M6 through hole
φ7.5 counterbore φ7.5 counterbore
18
φ4.5 2-φ4.5
φ9 countersinking
3
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Specifications
Part Number
Options
specified*
Repeatability
[ ″]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
FMB-25 UU 5 (25μrad) 0.04
FMB-40 − 5 (25μrad) 0.1
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of
Holders”. C007
Example of Use
Laser Mounts—MHG-20LDU
Adapter for mounting laser diodes (LDU33) with kinematic mirror holders.
Catalog
Code
W4005
◦Split clamp structure of the laser mounts fix laser diodes securely.
Caution: excessive clamping might damage laser diodes.
◦Mounts can be used as fixed LD holders when a post is attached to the bottom of the
mounts.
◦Laser diodes (LDU33) are optional. Refer to the chapter of light sources for details of
the specifications. H006
Outline Drawing
MHG-20LDU
6.5 8
Specifications
Part Number
Compatible
Holders
Compatible
Laser
Primary material: Aluminum
Finish: Black Anodized
Compatible
Diameter
[mm]
Weight
[kg]
φ30
φ37
φ20
18
MHG-20LDU MHG-HS30/-MP30 LDU33 series φ20 0.02
M6 P1 depth 6
C018
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Catalog
Vertical Control Small Mirror Holders LMMH-R Code W4501
Compact mirror holders with vertical control.
Because these mirror holders can be positioned in a small space and controlled from the top, they can
make optical systems compact without extending in side directions.
◦These holders hold a mirror with resin screws from the side in order to adjust the stress occurring when holding the mirror.
◦These holders can be positioned close to each other without worsening operability because the control for adjustment is
located on the top.
Guide
▶Vertical control gimbal mirror and beamsplitter holders (BSHL) of
which rotation center of fine adjustment matches the center of the
mirror reflective surface are also available. C022
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Attention
▶Change in the thickness of the mirror also changes the position of the
reflective surface because the mirror frame end is on the back
surface of the mirror.
▶The mirror reflective surface is offset 12mm from the axis center of
the post (installation center).
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Outline Drawing
LMMH-R
(5−9)
M4 P0.7
20
Adjustment screw
Mirror retaining screw
15
Guide
Mirrors
Lenses
Prisms
Polarizers
20 27.5
11
φA
5
Lasers
Beam Shaping
Diffusers
Filters
Shutter
φ6
12
Others
Fiber
Specifications
Part Number
Options
specified*
Compatible Optics
Diameter φA
[mm]
Compatible Optics
Thickness
[mm]
Adjustment Range
Tilt
[ ° ]
Rotation
[ ° ]
Tilt
[°/rotation]
Resolution
Primary material: Aluminum
Finish: Black Anodized
Rotation
[°/rotation]
LMMH-10R N φ10 5 ±2.5 ±2.5 about 1.08 about 1.1 0.03
LMMH-12.7R N φ12.7 5 ±2.5 ±2.5 about 1.08 about 1.1 0.03
LMMH-15R N φ15 5 ±2.5 ±2.5 about 1.08 about 1.1 0.03
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Weight
[kg]
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C019

Holders
Small Kinematic Mirror Holders
MMHN
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Compact mirror holders with minimum necessary functions.
Compatible with various sizes of mirrors by attaching the mirror to the holder using adhesive.
These holders are intended for applications including installation in devices which do not require
removal of mirrors, and for holding mirrors at a position displaced from the center of the holder.
◦With the mirror case adapters (MKAD), standard mirrors can be easily mounted and removed.
◦In order to avoid interference with other holders, there are two choices for the baseplate mounting hole position; MMHN-
25L type has the mounting holes on the mirror side, and MMHN-25R type has it on the adjustment screw side.
◦To align the reflective surface of the mirror to the post axis use holders MMHN-25LRO.
Guide
▶25mm square aluminum flat mirrors (TFA-25S05-10) are available.
B032
Attention
▶These holders do not have a function to hold mirrors. To hold a
mirror, please use adhesive or a mirror case adapter (MKAD).
▶Since these are kinematic mirror holders, the rotation center of the
fine-adjustment mechanism is not on the reflective surface of mirror.
Gimbal mirror holders (MHAN) that have the rotation center of fine
adjustment on the reflective surface of mirror are also available.
C026
Index
Guide
Outline Drawing
Mirrors
Lenses
MMHN-25L
MMHN-25R
7
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
[Accessory Screw]
14.5
Adapter fixing screw
25
7
4-M2
PCDφ20
5.5
φ7
Mirror case adapters
(MKAD) Optional
14.5
MAX11.5
30
42.5
[Accessory Screw]
23
Adapter fixing screw 4-M2
PCDφ20
42.5
30
25
φ7
14.5
MAX11.5
Filters
Shutter
M6×12
25
M6×12
25
13.5
6
27
Others
Fiber
MMHN-25LRO
MMHN-25RRO
6
M6 P1 depth 5
23
Adapter fixing screw
25
4-M2
PCDφ20
14.5
MAX11.5
6
42.5
30
25
φ7
27
M6 P1
60
28.5
φ12
MMHN-25BN
Adapter fixing screw
25
4-M2
PCDφ20
14.5
MAX11.5
25
φ7
15
27.5
6
9.5 6
27
M6 P1 depth 5
Mirror case adapters
(MKAD) Optional
Adapter fixing screw
25
4-M2
PCDφ20
14.5
MAX11.5
6
30
42.5
25
φ7
M6 P1
27
60
φ12
M4 depth 5
C020
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Catalog
Code
W4009
Specifications
Part Number
Options
specified*
Compatible Optics
Diameter
[mm]
Tilt
[ ° ]
Adjustment Range
Rotation
[ ° ]
Tilt
[°/rotation]
Resolution
Rotation
[°/rotation]
Primary material: Aluminum
Finish: Black Anodized
MMHN-25L
−
±5 ±5 about 0.9 about 0.9 0.04
MMHN-25R − ±5 ±5 about 0.9 about 0.9 0.04
MMHN-25LRO EE/UU
□25 or less
φ25 or less
±5 ±5 about 0.9 about 0.9 0.09
MMHN-25RRO EE/UU ±5 ±5 about 0.9 about 0.9 0.09
MMHN-25BN − ±5 ±5 about 0.9 about 0.9 0.03
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Weight
[kg]
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Mirror Case Adapters|MKAD
Adapters for holding mirrors in compact mirror holders (MMHN-25) without adhesive.
◦This product can securely fix a mirror by fitting the mirror in its split frame with the mirror surface facing the front.
◦To remove the mirror, push the mirror out from the frame by inserting an M4 resin set bolt point from the back.
Filters
Shutter
Others
Fiber
Outline Drawing
MKAD
Round mirror
6.5 (Mirror thickness 5mm)
φD
φE
φ7
B 6
A
Resin tip set bolt
Specifications
Part Number
Compatible Optics
Diameter
[mm]
A
[mm]
B
[mm]
Min Mirror
Thickness
[mm]
MKAD-12.7 φ12.7 10.5 4.5 3 φ13.4 φ12.7 +0.15
+0.1 0.002
MKAD-19.05 φ19.1 12 6 4.5 φ19.9 φ19.1 +0.15
+0.1 0.003
MKAD-25.4 φ25.4 11.5 5.5 4 φ26.1 φ25.4 +0.15
+0.1 0.005
MKAD-30 φ30 11.5 5.5 4 φ30.8 φ30 +0.15
+0.1 0.006
φD
[mm]
Primary material: Aluminum
Finish: Black Anodized
φE
[mm]
Weight
[kg]
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C021

Holders
Vertical Control Gimbal Beamsplitter Holders
BSHL-2/BSHL-TF
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
The space required for holder adjustment was eliminated from around the holder by making the
control direction of adjustment screws vertical.
Holders can be installed close to each other, which significantly downsizes optical systems.
Using vertical control for all mirror holders improves workability of optical adjustment in optical
systems configured with various directions of beamsplitters and mirrors.
Compact footprint for use in systems where space is at a premium.
◦There are two types, one is fitted with knobs on top
(BSHL-2), and the other is without knobs and not
adjusted after installation (BSHL-TF).
◦When a beamsplitter is used, this product provides
large clear aperture of transmitted beam even if placed
at 45 degrees incidence.
◦Its Gimbal mechanism maintains the center position of
mirror even when fine adjusted.
◦Adjustment screws can be fixed after adjustment with
the set screws on the back surface.
◦Mounting holes (M4 - two places) are also provided on
both sides of the holders so that they can be used as
horizontal control holders.
Motoeized
Stages
Light
Sources
Index
Guide
▶Various types of plates are available for fixing with M6 screws.
C023
▶Can be mounted on post stands (PST-**) using the lateral side M4
tap holes of holders.
▶We accept production of plates for mounting on various types of
baseplates.
Attention
▶The locking clamps prevent the adjustment screws from turning.
Under high accelerations, the mirror itself may still move. If you
need mounts for high acceleration environments, pleas contact us.
▶Optional adapter plates are available to mount these holders on a
post or pillar. C023
▶To adjust the BSHL-TF mounts, a standard hex wrench is required.
A ball end wrench set (SKB-JBX6) is available. D063
Outline Drawing
Guide
Mirrors
Lenses
Prisms
Polarizers
BSHL-12.7-2
BSHL-15-2
6.5
49.5 (7.6)
φA +0.3
+0.2
φB
40
20
Rotational adjustment
Clamp screw for rotation
14
2×2-M2 depth 2
2×M4 depth 4
20
Tilt adjustment
Clamp screw for tilt
BSHL-12.7-TF
BSHL-15-TF
Tilt adjustment
6.5
49.5
φA +0.3
+0.2
Rotational adjustment
φB
Clamp screw for rotation
40
14
2×2-M2 depth 2
2×M4 depth 4
20
20
Clamp screw for tilt
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
BSHL-20-2
BSHL-25.4-2
BSHL-30-2
D F
(7.6)
7
6.5
20
φA +0.3
+0.2
2-M2 depth 3
2-M3 depth 5
6.5
Rotational adjustment
φB Clamp screw for rotation
E 15.5
20
2×2-M3 depth 5
2×M4 depth 4
C
Part Number φA (mm) φB (mm)
BSHL-12.7-2 φ12.7 φ10.7
BSHL-15-2 φ15 φ13
20
D
Tilt adjustment
Clamp screw for tilt
BSHL-20-TF
BSHL-25.4-TF
BSHL-30-TF
6.5
Tilt adjustment
D F
7
20
φA +0.3
+0.2
2-M2 depth 3
2-M3 depth 5
6.5
Rotational adjustment
φB
Clamp screw for rotation
E 15.5
20
2×2-M3 depth 5
2×M4 depth 4
C
20
Part Number φA (mm) φB (mm)
BSHL-12.7-TF φ12.7 φ10.7
BSHL-15-TF φ15 φ13
D
Clamp screw for tilt
With Knobs Part Number Without Knobs Part Number φA (mm) φB (mm) C (mm) D (mm) E (mm) F (mm)
BSHL-20-2 BSHL-20-TF φ20 φ18 25.2 7 50.4 64
BSHL-25.4-2 BSHL-25.4-TF φ25.4 φ23.4 25.2 7 50.4 64
BSHL-30-2 BSHL-30-TF φ30 φ28 27.5 7 57 69
Specifications
With Knobs
Part Number
Without Knobs
Part Number
Compatible Optics
Diameter
[mm]
Thickness
[mm]
45° Incidence
Reflected Beam
Diameter
[mm]
45° Incidence
Central Transmission
Beam Diameter
[mm]
Primary material: Aluminum
Finish: Black Anodized
Fine Adjustment Range Fine Adjustment Resolution
Weight
Tilt Rotation Tilt Rotation [kg]
[ ° ] [ ° ] [°/rotation] [°/rotation]
BSHL-12.7-2 BSHL-12.7-TF φ12.7 1 − 3 φ6.8 φ2.51 ±1.5 ±1.2 0.6 0.6 0.06
BSHL-15-2 BSHL-15-TF φ15 1 − 3 φ8.4 φ4.13 ±1.5 ±1.2 0.6 0.6 0.06
BSHL-20-2 BSHL-20-TF φ20 3 − 5 φ12 φ7.67 ±1.2 ±1.2 0.35 0.45 0.11
BSHL-25.4-2 BSHL-25.4-TF φ25, φ25.4 3 − 5 φ15.8 φ11.49 ±1.2 ±1.2 0.35 0.45 0.11
BSHL-30-2 BSHL-30-TF φ30 3 − 5 φ19 φ14.74 ±1.2 ±1.2 0.34 0.4 0.13
BSHL-50-2 BSHL-50-TF φ50 5 − 8 φ31 φ27.39 ±1.5 ±1.5 0.23 0.27 0.48
BSHL-50.8-2 BSHL-50.8-TF φ50.8 5 − 8 φ31 φ28.10 ±1.5 ±1.5 0.23 0.27 0.48
C022
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Catalog
Code
W4012
Outline Drawing
BSHL-50-2/BSHL-50.8-2
11.5
(7.5)
A 0.3
0.2
B
93
Rotational adjustment
Clamp screw for rotation
23.5
Tilt adjustment
Clamp screw for tilt
BSHL-50-TF/BSHL-50.8-TF
Tilt adjustment
11.5
A 0.3
0.2
B
93
Rotational adjustment
Clamp screw for rotation
23.5
Clamp screw for tilt
Application
Systems
Optics &
Optical
Coatings
Holders
2×2-M3
depth 6
2×M6
depth 6
2×2-M3
depth 6
2×M6
depth 6
Bases
106
46.5
30
106
46.5
30
Manual
Stages
11.5
30
2-M3 depth 6
11.5
Part Number φA (mm) φB (mm)
BSHL-50-2 φ50 φ47
BSHL-50.8-2 φ50.8 φ48
11.5
30
2-M3 depth 6
11.5
Part Number φA (mm) φB (mm)
BSHL-50-TF φ50 φ47
BSHL-50.7-TF φ50.8 φ48
Actuators
Motoeized
Stages
Options for Vertical Control Gimbal Beamsplitter Holders|BSHL-BP
Base plates used for fixing the BSHL mirror holders on optical breadboards or optical baseplates.
These base plates can install the BSHL at 0 degrees and 45 degrees incidence positions.
◦BSHL-BPRO are adapter plates for mounting posts (RO-12/20) on the bottom of the BSHL.
◦BSHL-12.7BP can mount BSHL-12.7/15 holders on M2-10mm matrix base plates at 0 degrees and 45 degrees incidence
positions.
◦When securing with an M4 thread, please use the M6-M4 conversion adapter (AD-M6-M4). D063
Light
Sources
Index
Guide
Mirrors
BSHL-12.7BPRO
10
Outline Drawing
hexagon socket head cap screw
M2×4…2 screws
26
20
5
2-2.4
M4
4 counterbore 2
BSHL-25.4BP-0/-0UU
hexagon socket head cap screw M3×6…2 screws,
M6×10…2 screws (0)
hexagon socket head cap screw M3×6…2 screws,
1/4-20UNC×3/8…2 screws (0UU)
64
50.4
(50/50.8 Mounting combined use)
BSHL-20BPRO
14
hexagon socket head cap screw
M3×6…2 screws
29
20 6
M6
BSHL-25.4BP-45/-45UU
hexagon socket head cap screw M3×6…2 screws,
M6×10…2 screws (45)
hexagon socket head cap screw M3×6…2 screws,
1/4-20UNC×3/8…2 screws (45UU)
23
65
19
2-3.5
6 counterbore
2
BSHL-50BPRO
20
2-3.5
6 counterbore depth 3.5
hexagon socket head cap screw
M3×8…2 screws
38
30 6
2-3.5
M6 6 counterbore 2.5
BSHL-50.8BP-0/-0UU
hexagon socket head cap screw M3×6…2 screws,
M6×10…6 screws (0)
hexagon socket head cap screw M3×6…2 screws,
1/4-20UNC×3/8…6 screws (0UU)
70
25.2 25.2
(50/50.8 Mounting combined use)
BSHL-12.7BP
4-C0.5
35
28.28
10 10
25
10 10
BSHL-50.8BP-45/-45UU
hexagon socket head cap screw
M2×5…6 screws
6-2.4
4 counterbore depth 3
BSHL Holder
2-2.4 through hole
4 counterbore depth 3
holder mounting hole
M4 tap
hexagon socket head cap screw M3×6…2 screws,
M6×10…2 screws (45)
hexagon socket head cap screw M3×6…2 screws,
1/4-20UNC×3/8…2 screws (45UU)
70
50.4
2-7 (50/50.8 Mounting combined use)
5
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
2-7
BSHL Holder
6 20
30
2-3.5
6 counterbore depth 3.5
BSHL Holder
7.3 50.4
(50/50.8 Mounting combined use)
6 4 23
50
2-7
2-7
BSHL Holder
30
25.2 25.2
70
2-3.5
6 counterbore depth 3.5
6
50.4
2-3.5
6 counterbore depth 3.5
BSHL Holder
60
45°
6
70
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
Type
Compatible Holders
METRIC
INCH
[kg]
BSHL-12.7BPRO − M4-Rod BSHL-12.7, BSHL-15 0.01
BSHL-20BPRO − M6-Rod BSHL-20, BSHL-25.4, BSHL-30 0.01
BSHL-50BPRO − M6-Rod BSHL-50, BSHL-50.8 0.02
BSHL-12.7BP − Combined use 0° and 45° Incidence BSHL-12.7, BSHL-15 0.01
BSHL-25.4BP-0 BSHL-25.4BP-0UU 0° Incidence BSHL-20, BSHL-25.4, BSHL-30 0.03
BSHL-25.4BP-45 BSHL-25.4BP-45UU 45° Incidence BSHL-20, BSHL-25.4, BSHL-30 0.03
BSHL-50.8BP-0 BSHL-50.8BP-0UU 0° Incidence BSHL-50, BSHL-50.8 0.08
BSHL-50.8BP-45 BSHL-50.8BP-45UU 45° Incidence BSHL-50, BSHL-50.8 0.06
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C023

Holders
Topmike Vertical Control Mirror Holders
LMHB
Catalog
Code
W4503
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
These kinematic type mirror holders enable control of mirrors from the top or side of optical
systems when optics or devices are positioned very close to the front and back of a mirror, or
when it is difficult to make adjustment by inserting the hand in an optical path.
Control directions can be changed among top, left or right by installing these mirror holders
using dedicated plates.
◦Change in control direction from vertical to horizontal by changing the installation direction of the LMHB does not change
the optical axis height from the bottom surface of the dedicated plate.
◦By replacing the dedicated plates, the LMHB can offer various installation options. Also, the installation direction of the
LMHB can be changed on all the dedicated plates.
Guide
▶Compact type vertical control gimbal mirror and beamsplitter holders
(BSHL) of which rotation center of fine adjustment matches the center
of the mirror reflective surface are also available. C022
Attention
▶Without the dedicated plates (LMHBP), the LMHB cannot be
installed directly on a base plate.
▶When a beamsplitter is used at 45 degrees incidence, beams are
partially blocked by the mirror frame and the clear aperture of the
transmitted light becomes smaller. Please use MHG or MHAN for
45 degrees incidence. C014, C026
Index
Outline Drawing
Guide
Mirrors
LMHB
Tilt adjustment
A
B
Rotational adjustment
Lenses
Prisms
(2632)
φH (Clear aperture)
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
3-M3 depth 5 3-M3 depth 5
6 (11)
4 (9)
Mounting plate
16
16
11
4
D E
20 6
60 +0.03
+0
Reflective surface
C
16
60 +0.03
0
16
C
60 +0.03
+0
4
11
F
3-M3 depth 5
G
4
11
16
16
90°
φH
φI +0.3
+0.2
Mirror case detail drawing
Part Number
A
(mm)
B
(mm)
C
(mm)
D
(mm)
LMHB-25.4M 72 50 34 40 55 34 64 φ22 φ25.4
LMHB-30M 72 50 24 40 55 34 64 φ27 φ30
LMHB-50M 102 80 49 55 69 49 94 φ47 φ50
LMHB-50.8M 102 80 49 55 69 49 94 φ47 φ50.8
E
(mm)
F
(mm)
G
(mm)
φH
(mm)
φI
(mm)
Specifications
Part Number
Diameter
[mm]
Compatible Optics Adjustment Range Resolution
Thickness
[mm]
Tilt
[ ° ]
Rotation
[ ° ]
Tilt
[°/rotation]
Primary material: Aluminum
Finish: Black Anodized
Rotation
[°/rotation]
LMHB-25.4M φ25.4 3 – 9 ±2.8 ±2.8 about 0.006 about 0.006 0.44
LMHB-30M φ30 3 – 9 ±2.8 ±2.8 about 0.006 about 0.006 0.44
LMHB-50M φ50 2 – 16 ±1.8 ±1.8 about 0.004 about 0.004 0.75
LMHB-50.8M φ50.8 2 – 16 ±1.8 ±1.8 about 0.004 about 0.004 0.75
Weight
[kg]
C024
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Plates for Topmike Vertical Control Mirror Holders|LMHBP
These conversion plates are dedicated for use in mounting of vertical control mirror holders (LMHB)
on an optical breadboard, optical baseplates, or post.
Outline Drawing
Application
Systems
Optics &
Optical
Coatings
Holders
LMHBP-0
Pan head screw M3×6…3screws,
Hexagon socket head cap screw M4×10…3 screws
3-3.5 mounting hole
6 counterbore
16
16
6
2
LMHBP-45
Pan head screw M3×6…3screws,
Hexagon socket head cap screw M4×10…2 screws
60
55
6
30
2
11 10
LMHBP-M6
Pan head screw M3×6…3 screws
3-3.5 mounting hole
6 counterbore
60
16 16
6
2
Bases
Manual
Stages
10 11
50
60
2-5
60
16 16
30
55
60
24 11
14
40
Actuators
50
60
3-5
5
5
3-3.5 mounting hole
6 counterbore
M6 P1
Motoeized
Stages
LMHBP-0EE/0UU
Pan head screw M3×6…3 screws, Hexagon socket head cap screw M6×12…3 screws (EE)
Pan head screw M3×6…3 screws, Hexagon socket head cap screw 1/4-20UNC×1/2…3 screws (UU)
LMHBP-45EE/45UU
Pan head screw M3×6…3 screws, Hexagon socket head cap screw M6×12…2 screws (EE)
Pan head screw M3×6…3 screws, Hexagon socket head cap screw 1/4-20UNC×1/2…2 screws (UU)
Light
Sources
3-3.5
60
6 counterbore depth 4 16 16
2.5
6
11 10
65
25.2 25.2
2-7.5
Index
65
50.4
10 11
20.5
5.75
5.75
16
16
25.2
25.2
65
Guide
50.4
65
3-7.5
65
60 0
−0.1
2.5
3-3.5
6 counterbore depth 4
6
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
3-5
6
2-5
6
6
Filters
25 25
30
60
25
LMHBP-0
(ncidence 0°)
25
60
25
60
25
LMHBP-45
(ncidence 45°)
25 25
60
14
40
LMHBP-M6
(post mounting)
60
Shutter
Others
Fiber
Specifications
METRIC
Part Number
INCH
Type
Primary material: Aluminum
Finish: Black Anodized
LMHBP-0 − 0°Incidence, M4 Screw 0.06
LMHBP-0EE LMHBP-0UU 0°Incidence, M6 or Inch Screw 0.06
LMHBP-45 − 45°Incidence, M4 Screw 0.05
LMHBP-45EE LMHBP-45UU 45°Incidence, M6 or Inch Screw 0.05
LMHBP-M6 − Post of M6 threaded 0.04
Weight
[kg]
Method to Change the Control Direction
To change the control direction for adjusting a mirror to left or right, please
change the direction of the LMHB and mount it on a plate.
Change in the control direction does not change the optical axis height (D).
Please remove the blindfold boards attached on the sides of the holder,
and mount the plate on one side of the holder.
Blind plate
Blind plate
Blind plate
Blind plate
D
D
Plate
Plate
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C025

Holders
Gimballed Beamsplitter Mounts
MHAN-S/MHA/MHAN-DM
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Lenses
The gimbal structure allows the mirror angle to be changed freely at the rotational center of the
mirror reflective surface.
Appropriate when dealing with laser beams or changing reflected beam direction.
◦Fine tuning of the angle of reflected beams can be performed in all directions by means of the gimbal structure and fine
adjustment mechanism with coarse/fine switching clamp.
◦With the retaining ring the reflective surface will always be in the rotational center because the reflective surface of the
mirror will be pressed on the face side of the mirror frame, and the position of the reflective surface will not change even
if mirror thickness changes.
◦Space saving and precise angle adjustment are achieved by using 0.25mm pitch adjustment screws with holders for
mirror diameters less than φ60mm.
Guide
▶The RO-20-60 post (diameter φ20mm, length 60mm) is included but
it can be replaced with other sizes. However, removal and assembly
of posts require tools such as a vise and pliers. If the length of post
is specified at the time of purchase, this product will be with the
specified post. Post replacement is gratis, however please contact
our International Sales Division as there may be a price adjustment
due to differences in length.
▶Use the kinematic mirror holder (MHG-NL) for enhanced stability on
low optical axes. C014
▶NHAN-M mounts with graduated micrometers instead of adjustment
screws are also available.
W4508
Attention
▶When the beamsplitter is used at 45 degrees incidence, the beam is
partially blocked by the mirror frame and the transmitted clear
aperture becomes smaller. When mounting a beamsplitter, we
recommend the (BHAN) gimbal beamsplitter holder to obtain a larger
transmitted clear aperture. C028
▶After adjustment of the optical system confirm that the coarse/fine
switching clamps for the mirror holder are tightened to prevent
accidental movement.
▶When mounted to a post holder, always adjust the mirror holder after
securing the post so that the post does not move. When a post is
held with an intermediate ring on the post holder, make sure to
tighten the post holder.
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Mirror Mounting Methods
When mounting a mirror in a mirror holder, use gloves or finger cots so that finger prints do not get on the
mirror.
When securing a mirror to the gimbal mirror holder, place the reflective surface downward so that the
mirror will be tight against the bottom (face side) of the mirror frame. Place a Delrin ring on the mirror from
the top, so that it does not scratch the mirror. Secure the retaining ring into the mirror frame using a
spanner wrench or similar tool.
etainin rin
Guide:
First, tighten the retaining ring until it just contacts the mirror.
Second, firmly tighten the retaining ring once, until mirror frame and mirror, Delrin ring, and retaining ring
irror
are all in tight contact.
irror frame
Third, loosen the retaining ring until the mirror can move.
Finally, slowly tighten the retaining ring, stopping at the position where the retaining ring is held lightly.
So as not to put stress on the mirror.
When shipping or when used in locations with a lot of vibration, it is possible that the retaining ring will
come loose, and the mirror will fall off. In this case, either firmly tighten the retaining ring so that it does not
come loose, or secure the retaining ring with thread locking adhesive.
etainin rin spanner
Delrin rin
eectie srface sie
How to Use the Coarse / Fine Switching Clamp and Fine Adjustment Screws
Switching clamp (tilt)
Switching clamp (tilt)
Switching clamp
(rotation)
Fine adjustment
screw (tilt)
Fine adjustment
screw (rotation)
Switching clamp
(rotation)
Tilt (pitch) coarse
movement control
Rotation (Yaw) coarse
movement control
Tilt fine
movement control
Rotational fine
movement control
C026
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Catalog
Code
W4010
Outline Drawing
MHAN-S
M6 P1
MHA
MHA-80S: M6 P1
Other: M10 P1
Application
Systems
Optics &
Optical
Coatings
F
G
Tilt coarse/fine movement
switching clamp
C
F
G
Tilt coarse/fine movement
switching clamp
C
Holders
B
60
A
φ16
φE +0.2
+0.3
Tilt fine movement screw
Rotational coarse/fine movement
switching clamp
MAX H
Rotational fine movement screw
Clear aperture φD
I
B
A
φ26
φE +0.4
+0.3
Clear aperture φD
Bases
Manual
Stages
Part Number
A
(mm)
φ20
B
(mm)
C
(mm)
φD
(mm)
φE
(mm)
G
(mm)
F+G
(mm)
MAX H
(mm)
I
(mm)
MHAN-20S 40 56 10 φ17 φ20 30 54 26.5 20.5
MHAN-25.4S 45 66 10 φ22 φ25.4 35 64 27 20.5
MHAN-30S 45 66 10 φ27 φ30 35 64 27 20.5
MHAN-40S 52.5 79.5 12 φ37 φ40 41 76 27.5 20.5
MHAN-50S 60 92 15 φ46 φ50 46 86 29 20.5
MHAN-50.8S 60 92 15 φ47 φ50.8 46 86 29 20.5
MHAN-60S 65 102 15 φ56 φ60 51 96 28.5 20.5
60
Part Number
A
(mm)
φ20
B
(mm)
Rotational coarse/fine movement
switching clamp
C
(mm)
Tilt fine movement
Rotational fine movement
φD
(mm)
φE
(mm)
G
(mm)
MAX H
F+G
(mm)
MAX H
(mm)
I
I
(mm)
MHA-80S 89 137 20 φ75 φ80 72 133 48 42.5
MHA-100S 115 177 20 φ95 φ100 101 184 48 45
MHA-130S 128 205 23 φ124 φ130 116 214 48 45
MHA-150S 140 227 26 φ144 φ150 126 234 48 45
Actuators
Motoeized
Stages
Light
Sources
Index
MHAN-30DM
M6 P1
MHAN-50DM
M6 P1
Guide
Mirrors
60 66
45
Rotational fine
movement
29 35
φ20
Tilt coarse/fine movement
switching clamp
φ18
Tilt fine movement
Rotational coarse/fine movement
switching clamp
φ30 +0.3
+0.2
MAX48
10
Clear aperture φ27
25.5
60 92
60
Rotational fine
movement
40 46
Tilt coarse/fine movement
switching clamp
Tilt fine movement
Rotational coarse/fine movement
switching clamp
φ50 +0.2
+0.3
MAX49
15
Clear aperture φ46
25.5
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
φ20
Others
Screw Type
Part Number
Options
specified*
Compatible Optics
Diameter
[mm]
Thickness
[mm]
Reflected Beam
Clear Aperture
(45° incidence)
[mm]
Fine Adjustment Range
Tilt
[ ° ]
Rotation
[ ° ]
Fine Adjustment Resolution
Tilt
[°/rotation]
Primary material: Aluminum
Finish: Black Anodized
Rotation
[°/rotation]
MHAN-20S N/UU φ20 2 − 6 φ9.2 ±4 ±4 about 0.54 about 0.68 0.3
MHAN-25.4S N/UU φ25, φ25.4 2 − 6 φ12.7 ±4 ±4 about 0.54 about 0.68 0.4
MHAN-30S N/UU φ30 2 − 6 φ16.3 ±4 ±4 about 0.54 about 0.68 0.4
MHAN-40S N/UU φ40 2 − 8 φ23.3 ±4 ±4 about 0.45 about 0.55 0.6
MHAN-50S N/UU φ50 3 − 11 φ30.4 ±4 ±4 about 0.35 about 0.48 0.7
MHAN-50.8S N/UU φ50.8 3 − 11 φ30.4 ±4 ±4 about 0.35 about 0.48 0.7
MHAN-60S N/UU φ60 3 − 11 φ37.5 ±3 ±4 about 0.31 about 0.41 0.9
MHA-80S N/UU φ80 4 − 15 φ50.9 ±3.5 ±5 about 0.49 about 0.72 1.6
MHA-100S N/UU φ100 4 − 14.5 φ65.1 ±3.4 ±5 about 0.35 about 0.52 1.9
MHA-130S N/UU φ130 7 − 17 φ86.3 ±2.9 ±4 about 0.30 about 0.42 2.3
MHA-150S N/UU φ150 4 − 20 φ100.4 ±2.5 ±4 about 0.26 about 0.38 2.5
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Weight
[kg]
Fiber
Precision Type
Primary material: Aluminum
Finish: Black Anodized
Part Number
Options
specified*
Compatible Optics Fine Adjustment Range Fine Adjustment Resolution Ultra Fine Adjustment Resolution Ultra Fine Adjustment Indicator Conversion Weight
Diameter Thickness Tilt Rotation Tilt Rotation Tilt Rotation Tilt Rotation [kg]
[mm] [mm] [ ° ] [ ° ] [°/rotation] [°/rotation] [°/rotation] [°/rotation] [°/DIV] [°/DIV]
MHAN-30DM N/UU φ30 2 − 6 ±4 ±4 about 1.08 about 1.35 about 0.11 about 0.14 about 0.002 about 0.002 0.47
MHAN-50DM N/UU φ50 3 − 11 ±3 ±4 about 0.71 about 0.95 about 0.07 about 0.10 about 0.001 about 0.002 0.58
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
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C027

Holders
Gimbal Beamsplitter Holders
BHAN-S/BHAN-DM
Catalog
Code
W4011
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Gimbal mirror holders with narrow mirror frame for increased aperture at 45 degrees incidence.
Provide a transmitted beam diameter virtually the same as the reflected beam diameter.
Appropriate for beam branching optical systems or Michelson interferometer.
◦Basic functions other than the mirror frame are the same as those of MHAN.
Outline Drawing
Guide
▶The RO-20-60 post (diameter φ20mm, length 60mm) is connected,
but it can be interchanged with other sizes. If the length of post is
specified at the time of purchase, this product will be delivered after
replacing posts. However, removal and assembly of posts require
tools such as a vise and pliers. Post replacement is gratis, but consult
our International Sales Division because there may be extra charges
due to differences in length.
Attention
▶Delrin rings are not included in the mirror frames of BHAN-S and
BHAN-DM. Consult our International Sales Division when optics have
backlash after tightening retaining rings, or you want to protect optics
from scratches.
▶BHAN uses a special type of retaining rings. If you have lost the
retaining rings, consult our International Sales Division.
▶If wedge beamsplitters are used with this product, a gap between an
optic and holder frame may occur, resulting in backlash. To securely
fix optics, use of kinematic mirror holders (MHG-NL), which fix optics
at three points on the lateral side, is recommended. C014
BHAN-30S M6 P1 BHAN-50S M6 P1 BHAN-30DM M6 P1 BHAN-50DM M6 P1
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
66
45
60
C
29
20
35
E
B
A
16
30 +0.2
+0.3
MAX27
Mirror surface
6
Clear aperture 28
20.5
92
60
60
C
40 46
20
A: Tilt coarse/fine movement switching clamp
B: Rotational coarse/fine movement switching clamp
Screw Type
Part Number
Compatible Optics
Options
Diameter
specified*
[mm]
B
E
A
16
50 +0.2
+0.3
MAX29
Mirror surface
6
Clear aperture 48
20.5
60 66
45
D
Mirror surface
29 35 A
6
20
B
18
F
30 +0.2
+0.3
MAX48
C: Rotational fine movement screw
D: Rotational fine movement Differential micrometer head
Compatible Optics
Thickness
[mm]
Fine Adjustment Range
Tilt
[ ° ]
Fine Adjustment Range
Rotation
[ ° ]
Clear aperture 28
25.5
60 92
60
D
Mirror surface
40 46 A
6
18
50 +0.2
+0.3
MAX49
20
E: Tilt fine movement screw
F: Tilt fine movement Differential micrometer head
Fine Adjustment Resolution
Tilt
[°/rotation]
B
F
Fine Adjustment Resolution
Rotation
[°/rotation]
BHAN-30S UU φ30 3 − 5 ±4 ±4 about 0.54 about 0.68 0.4
BHAN-50S UU φ50 5 − 8 ±4 ±4 about 0.31 about 0.48 0.5
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Clear aperture 48
25.5
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
Precision Type
Primary material: Aluminum
Finish: Black Anodized
Part Number
Options
specified*
Compatible Optics Fine Adjustment Range Fine Adjustment Resolution Ultra Fine Adjustment Resolution Ultra Fine Adjustment Indicator Conversion Weight
Diameter Thickness Tilt Rotation Tilt Rotation Tilt Rotation Tilt Rotation [kg]
[mm] [mm] [ ° ] [ ° ] [°/rotation] [°/rotation] [°/rotation] [°/rotation] [°/DIV] [°/DIV]
BHAN-30DM UU φ30 3 − 5 ±4 ±4 about 1.08 about 1.35 about 0.11 about 0.14 about 0.002 about 0.002 0.45
BHAN-50DM UU φ50 5 − 8 ±3 ±4 about 0.71 about 0.95 about 0.07 about 0.10 about 0.001 about 0.002 0.55
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Reflection and Transmission Clear Aperture at 45° Incidence
Clear Aperture of Beamsplitter Holder
MHAN-30
Tilt Clear Aperture
Transmitted/
reflected light
Reflected light
BHAN-30
Tilt Clear Aperture
Transmitted/
reflected light
Reflected light
Part Number
Beamsplitter
Thickness
[mm]
Transmitted/Reflected
Beam Clear Aperture
45° incidence
[mm]
0° incidence
[mm]
BHAN-30S 3 15.4 28
MHAN-30S 3 9.9 27
BHAN-50S 5 31.1 48
MHAN-50S 5 18.3 47
MHAN-20S 2 2.2 17
MHAN-25.4S 3 6.7 22
MHAN-40S 4 14.7 37
MHAN-60S 6 26.1 57
MHA-80S 8 34.5 76
MHA-100S 10 50.0 96
MHA-130S 13 69.3 126
MHA-150S 15 80.2 146
C028
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Micrometer Indicator Conversion
MHE/MHE-DM
Catalog
Code
W4506
The cantilever support for the gimbal rotation mechanism of these mirror holders allows
installation of two mirror holders close to each other.
To align the controls in the same direction, please use the R-type and L-type as a pair.
◦The cantilever support for the gimbal rotation mechanism of these mirror holders allows installation of two mirror holders
close to each other.
◦To align the controls in the same direction, please use the R-type and L-type as a pair.
Attention
▶When a beamsplitter or the like is positioned at 45 degrees incident
angle, a micrometer head or screw may block beams.To obtain a
large clear aperture of transmitted light and reflected light, please use
gimbal beamsplitter holders (BHAN). C028
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Outline Drawing
MHE-25.4/30MR M6 P1 MHE-25.4/30ML M6 P1
Reflective surface
Tilt clamp screw
Rotation clamp screw
17
φ20
(4147)
47.5
20
37.5
MHE-25.4/30DMR M6 P1 MHE-25.4/30DML M6 P1
Reflective surface
Tilt clamp screw
Rotation clamp screw
17
Tilt coarse/fine movement
switching screw
Tilt fine movement
micrometer
φ16
27.5
12.5
Rotation coarse/fine
movement switching screw
Rotation fine movement micrometer
Tilt coarse/fine movement
switching screw
Tilt fine movement
micrometer
φ18
27.5
12.5
(4954)
Rotation coarse/fine
movement switching screw
Rotation fine movement micrometer
φ40
20
47.5 20
φ40
20
37.5
φA
φA
47.5
M6 P1
depth 5
47.5
M6 P1
depth 5
67.5
60
67.5
60
67.5
60
47.5
60 67.5
47.5
M6 P1
depth 5
M6 P1
depth 5
20
φA
47.5
37.5
20
20 47.5
φA
φ40
φ40
20
37.5
Tilt coarse/fine movement
switching screw
Tilt fine movement
micrometer
12.5
27.5
φ16
Rotation coarse/fine
movement switching screw
Rotation fine movement micrometer
Tilt coarse/fine movement
switching screw
Tilt fine movement
micrometer
12.5
27.5
φ18
4147 17
4954
Rotation coarse/fine
movement switching screw
Rotation fine movement micrometer
φ20
Reflective surface
Tilt clamp screw
Rotation clamp screw
Reflective surface
Tilt clamp screw
Rotation clamp screw
17
Light
Sources
Guide
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Index
Mirrors
φ20
φ20
Standard Type
Primary material: Aluminum
Finish: Black Anodized
Part Number
Options
specified*
Compatible Optics Fine Adjustment Range Fine Adjustment Resolution Micrometer Indicator Conversion Weight
Diameter Thickness Tilt Rotation Tilt Rotation Tilt Rotation [kg]
[mm] [mm]
[ ° ]
[ ° ] [°/rotation] [°/rotation] [°/DIV] [°/DIV]
MHE-25.4ML EE/UU φ25.4 1 – 10 ±8 ±5.5 about 0.7 about 0.7 about 0.014 about 0.014 0.43
MHE-25.4MR EE/UU φ25.4 1 – 10 ±8 ±5.5 about 0.7 about 0.7 about 0.014 about 0.014 0.43
MHE-30ML EE/UU φ30 1 – 10 ±8 ±5.5 about 0.7 about 0.7 about 0.014 about 0.014 0.43
MHE-30MR EE/UU φ30 1 – 10 ±8 ±5.5 about 0.7 about 0.7 about 0.014 about 0.014 0.43
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Precision Type
Primary material: Aluminum
Finish: Black Anodized
Part Number
Options
specified*
Compatible Optics Fine Adjustment Range Fine Adjustment Resolution Ultra Fine Adjustment Resolution Ultra Fine Adjustment Indicator Conversion Weight
Diameter Thickness Tilt Rotation Tilt Rotation Tilt Rotation Tilt Rotation [kg]
[mm] [mm] [ ° ] [ ° ] [°/rotation] [°/rotation] [°/rotation] [°/rotation] [°/DIV] [°/DIV]
MHE-25.4DML EE/UU φ25.4 1 – 10 ±8 ±5.5 about 1.4 about 1.4 about 0.14 about 0.14 about 0.003 about 0.003 0.49
MHE-25.4DMR EE/UU φ25.4 1 – 10 ±8 ±5.5 about 1.4 about 1.4 about 0.14 about 0.14 about 0.003 about 0.003 0.49
MHE-30DML EE/UU φ30 1 – 10 ±8 ±5.5 about 1.4 about 1.4 about 0.14 about 0.14 about 0.003 about 0.003 0.49
MHE-30DMR EE/UU φ30 1 – 10 ±8 ±5.5 about 1.4 about 1.4 about 0.14 about 0.14 about 0.003 about 0.003 0.49
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
C029

Holders
Larger Precision Gimbal Mirror Holders
MHD
Catalog
Code
W4507
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Gimbal mirror holders intended for use with mirrors with diameter of φ100mm or larger.
These mirror holders can minimize optical path length difference, a problem in large mirrors,
caused by mirror tilt adjustment.
◦The mirror retainers consist of a set bolt and a nut so that they can be fixed at appropriate positions using the nuts.
Please fix the mirror retainers at positions where stress is not exerted on the mirror.
◦Differential micrometer heads with a large knob are used for fine angle adjustment.
Guide
▶We can provide mirror holders of your specified size. Please contact
our International Sales Division for more information.
Attention
▶To replace the mirror, please remove the mirror retaining bracket
using a wrench before inserting a mirror.
▶Pressing an optic hard with the mirror retainer may distort the mirror
and worsen the surface accuracy.
Motoeized
Stages
Light
Sources
Index
Outline Drawing
Guide
Mirrors
Lenses
Prisms
Polarizers
MHD
MHD-100Hexagon socket head cap screw M6×10…3 screws
MHD-150/200Hexagon socket head cap screw M6×12…3 screws
MHD-254Hexagon socket head cap screw M6×14…3 screws
MHD-300Hexagon socket head cap screw M6×18…3 screws
MHD-101.6/152.4/203.2
Hexagon socket head cap screw 1/4-20UNC×1/2…3 screws
MHD-254UU
Hexagon socket head cap screw 1/4-20UNC×1/2…3 screws
Common Accessories
Washer for M6…3 Pieces
Special tool, long hexagon wrench…1 Piece
D
C
E
D
MAX I
F
G
H
MAX N
Optics
φA
M
φB
Mirror case
detail drawing
Lasers
3-φ7
Beam Shaping
Diffusers
L
Filters
Shutter
Others
Fiber
Part Number
φA
(mm)
B
(mm)
J
C
(mm)
D
(mm)
K
E
(mm)
F
(mm)
G
(mm)
H
(mm)
I
(mm)
J
(mm)
K
(mm)
L
(mm)
M
(mm)
MHD-100 φ100 +0.7
+0.4 92 180 8 90 25 60 175 65 150 14 31 20 30
MHD-101.6 φ101.6 +0.7
+0.4 92 180 8 90 25 60 175 65 150 14 31 20 30
MHD-150 φ150 +0.7
+0.4 138 240 8 120 25 65 234 70 190 15 34 30 30
MHD-152.4 φ152.4 +0.7
+0.4 138 240 8 120 25 65 234 70 190 15 34 30 30
MHD-200 φ200 +0.8
+0.4 188 295 10 150 30 84 293 70 250 17 50 35 25
MHD-203.2 φ203.2 +0.8
+0.4 188 295 10 150 30 84 293 70 250 17 50 35 25
MHD-254 φ254 +0.8
+0.4 242 347 10 180 33 90 350 70 300 18 50 45 25
MHD-300 φ300 +1
+0.6 288 405 10 211 33 90 407 70 350 18 50 45 25
N
(mm)
Specifications
Part Number
Options
specified*
Compatible Optics Adjustment Range Coarse Adjustment Resolution Coarse Adjustment Resolution
Diameter
[mm]
Thickness
[mm]
Tilt
[ ° ]
Rotation
[ ° ]
Tilt
[°/rotation]
Rotation
[°/rotation]
Primary material: Aluminum
Finish: Black (main unit) Black Anodized (Holder)
Tilt
[°/DIV]
Rotation
[°/DIV]
MHD-100 − φ100 5 – 28 ±5.7 ±5.7 about 0.57 about 0.57 about 0.0008 about 0.0008 2.1
MHD-101.6 − φ101.6 5 – 28 ±5.7 ±5.7 about 0.57 about 0.57 about 0.0008 about 0.0008 2.1
MHD-150 − φ150 5 – 38 ±4.3 ±4.3 about 0.43 about 0.43 about 0.0006 about 0.0006 3.3
MHD-152.4 − φ152.4 5 – 38 ±4.3 ±4.3 about 0.43 about 0.43 about 0.0006 about 0.0006 3.3
MHD-200 − φ200 20 – 44 ±3.4 ±3.4 about 0.34 about 0.34 about 0.0005 about 0.0005 4.9
MHD-203.2 − φ203.2 20 – 44 ±3.4 ±3.4 about 0.34 about 0.34 about 0.0005 about 0.0005 4.9
MHD-254 UU φ254 40 – 54 ±2.8 ±2.8 about 0.28 about 0.28 about 0.0004 about 0.0004 6.2
MHD-300 − φ300 40 – 54 ±2.3 ±2.3 about 0.23 about 0.23 about 0.0003 about 0.0003 11
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Weight
[kg]
C030
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Plates for Larger Precision Gimbal Mirror Holders|MHD-P
Base plates used for fixing larger precision gimbal mirror holders (MHD) on optical breadboards or
optical baseplates.
◦These base plates can fix the holders on either metric- or inch-based optical breadboards or optical baseplates.
Application
Systems
Optics &
Optical
Coatings
Specifications
METRIC
Part Number
INCH
Compatible Holders
MHD-100PEE MHD-100PUU MHD-100, MHD-101.6
MHD-150PEE MHD-150PUU MHD-150, MHD-152.4
MHD-200PEE MHD-200PUU MHD-200, MHD-203.2
MHD-254PEE MHD-254PUU MHD-254
Primary material: Aluminum
Finish: Black Anodized
Outline Drawing
MHD-100P/150P/200P/254P
Hexagon socket head cap screw M6×18…3 screws (EE)
Hexagon socket head cap screw 1/4-20UNC×3/4…3 screws (UU)
Part Number
7
3-H through hole
A
(mm)
C
B
(mm)
C
(mm)
A
B
C
G
C
3-H
through hole
D
(mm)
E
(mm)
10
F
(mm)
F
E
D
G
(mm)
MHD-100PEE 180 100 25 90 75 31 150 M6 P1
MHD-150PEE 240 150 25 120 100 34 190 M6 P1
MHD-200PEE 295 200 25 120 100 50 250 M6 P1
MHD-254PEE 348 250 25 140 125 50 300 M6 P1
MHD-100PUU 180 101.6 25.4 90 76.2 31 150 1/4-20UNC
MHD-150PUU 240 152.4 25.4 90 76.2 34 190 1/4-20UNC
MHD-200PUU 295 203.2 25.4 120 101.6 50 250 1/4-20UNC
MHD-254PUU 348 254 25.4 140 127 50 300 1/4-20UNC
H
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
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C031

Holders
Beam Steering Holders
Precision Beam Steering Assembly
BSR
BSRU
Application
Systems
Optics &
Optical
Coatings
Holders
BSR
W4013
Beam steering mounts are designed to make it easy to change the height and direction of a laser
beam.
◦Length of the optional post (PO-20-***) can be selected, allowing extension of the adjustment range.
◦Use the optional mirror (φ25mm or less, thickness 5mm) by bonding it to the holder.
◦In addition to the optical axis height of the mirror, the position of the mirror (on a circumference of a 50mm radius from
the post) and mirror orientation can be coarse adjusted, and securely fixed with clamps.
◦Adjustment screws are provided on the output side of the mirror to fine tune the direction of the output beam.
Catalog
Code
Bases
Beam steering holder
Guide
Manual
Stages
Actuators
Motoeized
Stages
Incident optical
axis height
Laser light
source
Output optical
axis height
▶The photograph shows a typical configuration combining baseplate
(BSP-40100), post (PO-20-200) and two mirrors (TFA-30C05-10).
▶Adjustable mirror mounts in both locations are also available.
Attention
▶Depending on the direction reflected with the two mirrors, the
polarization direction of the laser may change 90°. (See the illustration)
▶Top and bottom holders require 127mm allowance. Select length of
posts to match the required optical axis height.
Light
Sources
Index
Outline Drawing
BSR-25
6.5
83.5
50
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
44.5
24
20
25
5
5
25
25
57.5 15
61
15 22
26
Specifications
Part Number
BSR-25
Compatible Optics
Diameter
[mm]
□25 or less
φ25 or less
Compatible Optics
Thickness
[mm]
* Weight does not include the weight of posts and baseplates.
Primary material: Aluminum
Finish: Black Anodized
Weight*
[kg]
3 − 5 0.4
Filters
Shutter
Others
Fiber
BSRU
W4014
◦The φ38.1mm strut fitted with a vibration isolation function, and two top and bottom holders are a product set.
◦High stability is obtained from the damping properties of the strut and the rigidity of the holders.
◦Use the optional mirror (φ30mm, thickness 5mm) by bonding it to the holder.
◦In addition to the optical axis height of the mirror, the position of the mirror (on a circumference of a 75mm radius from
the post) and mirror orientation can be coarse adjusted, and securely fixed with clamps.
◦Adjustment screws are provided on the output side of the mirror, and angle adjustment of the output beam can be performed.
Catalog
Code
Attention
▶To use damping properties, set up the strut directly on
the laboratory table or a vibration isolator.
Outline Drawing
BSRU-177/355
Hexagon socket head cap screw M6×15…4 screws
75
5
30
Specifications
Part Number
Compatible Optics
Diameter
[mm]
Strut material: Stainless steel, Finish: None
Control part primary material: Aluminum, Finish: Black Anodized
Compatible Optics
Thickness
[mm]
A
[mm]
φB
[mm]
Weight
[kg]
BSRU-177 φ30 5 177.8 φ33 − φ40 3
BSRU-355 φ30 5 355.6 φ33 − φ220 4.6
A
6
13
38.1
B
50 4-7 mounting holes 50
88 11 counterbore
C032
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Introducing Other Mirror Holders
You will find more detail in the WEB Related Products and mirror holder that was not available in
the catalog.
Horizontal Prism Adapter—MHG-HPA
Catalog
Code W4008
Base Plates for Kinematic Mirror Holders—HMG-BP
Catalog
Code W4108
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Kinematic Mirror Holder—MHB-S
Catalog
Code W4504
One-touch Kinematic Mirror Holder—MHF
Catalog
Code W4502
Light
Sources
Index
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Adaptor Mounts—MAD-30/MAD-50
Catalog
Code W4109
Filters
Shutter
Others
Fiber
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C033

Holders
Lens Holders Selection Guide
Lens holders are available for a wide variety of lens sizes and shapes.
Application
Systems
Optics &
Optical
Coatings
Holders
Lenses
Fixed Type
Movable Type
Bases
LHF-S ALHN
Manual
Stages
Actuators
Cylindrical lenses
Motoeized
Stages
CHA
Light
Sources
Index
Objective lenses
LHO
Two-axis
pinholes/objective holders TAT
+ Adapters TAT-180A
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Focusing lenses
Small diameter lenses
LHF-M
LHF-UDL
MLH/MLH-SF
Fiber Optics Holders FOP
+ MLH-10ADP-2 + MLH-SF
Lens holders that can hold a range of different size lenses are also available.
SLH
LHA
C034
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Catalog
Fixed Lens Holders LHF/LHF-S Code W4015
Fixed type holders without a lens centering adjustment mechanism.
These holders can hold thin lenses as well as thick lenses such as achromatic lenses.
◦The thin frame type which has a smaller diameter, and
the large lens type which is intended for use with a large
lens with diameter of φ80mm or larger are available.
◦The thin frame type can set the optical axis height from
the baseplate to round numbers such as 55mm or
60mm by replacing the post with a post stand (PST-**).
◦The thin frame type can set the height in inches when it
is turned upside down. Inch-based post stands are
also available. D040
◦The resin retaining rings (made of Delrin) used in the thin
frame type can securely hold lenses without scratching
them. (Delrin rings are not attached.)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Guide
▶Post length can be changed. (Please specify the post length when you
place an order, then we will deliver the product after replacing the post
with one with your specified length. Post replacement is free of charge,
but please consult our International Sales Division because there may
be extra charges due to differences in length.)
Outline Drawing
Attention
▶Friction between the resin retaining ring used in the thin frame type
and the main body may cause resin powder. For use in clean
rooms or high-power lasers, please replace with aluminum
retaining rings (NR-**).
Actuators
Motoeized
Stages
Light
Sources
LHF-10S/12.7S/15S/20S LHF-25S/25.4S/30S/30AS/40S/40AS/50S/50AS/50.8S/60AS LHF-80/80A/100/100A/130/150
φB
2
M6 P1
E
F
C
φA +0.3
+0.2
60 H
D
1/4-20UNC
φG
resin retaining ring
φB
M6 P1
2
E
F
C
φA +0.3
+0.2
60 H
D
I
1/4-20UNC
φG
resin retaining ring
φB
M6 P1
F
2
D
G
φA +0.4
+0.3
φE
aluminum retaining ring
C
60
H
Index
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
φ12
φ12
φH
Filters
Thin Frame
Part Number
Options
specified*
Compatible Optics
Diameter φA
[mm]
Thickness t
[mm]
Clear Aperture
φB
[mm]
C
Height optical axis
D
[mm]
LHF-10S N φ10 2 – 7 φ7 M10.85 P0.75 15 4 12 φ17 34.05 − 0.06
LHF-12.7S N φ12.7 2 – 7 φ10 M13.55 P0.75 15 4 12 φ17 34.05 − 0.06
LHF-15S N φ15 2 – 10 φ12 M15.85 P0.75 20 5 15 φ20 39.05 − 0.07
LHF-20S N φ20 2 – 13 φ17 M20.85 P0.75 20 7 18 φ27 39.05 − 0.08
LHF-25S N φ25 2 – 11 φ22 M25.85 P0.75 25 6 16 φ32 50 25.4 0.09
LHF-25.4S N φ25.4 2 – 7 φ22 M26.25 P0.75 25 4 12 φ32 50 25.4 0.08
LHF-30S N φ30 2 – 7 φ26 M30.85 P0.75 25 4 12 φ36 50 25.4 0.09
LHF-30AS N φ30 3 – 12 φ26 M30.85 P0.75 25 7 18 φ36 50 25.4 0.11
LHF-40S N φ40 2 – 13 φ37 M40.85 P0.75 30 7 18 φ46 66 38.1 0.11
LHF-40AS N φ40 3 – 15 φ37 M40.85 P0.75 30 8 20 φ46 66 38.1 0.12
LHF-50S N φ50 3 – 13 φ46 M50.85 P0.75 35 7 18 φ57 71 38.1 0.11
LHF-50AS N φ50 3 – 19 φ46 M50.85 P0.75 35 10 24 φ57 71 38.1 0.13
LHF-50.8S N φ50.8 2 – 13 φ47 M51.65 P0.75 35 7 18 φ58 71 38.1 0.11
LHF-60AS N φ60 3 – 16 φ56 M60.85 P0.75 40 13.5 27 φ67 76 38.1 0.13
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
E
[mm]
F
[mm]
φG
[mm]
Primary material: Aluminum
Finish: Black Anodized
H
[mm]
I
[mm]
Weight
[kg]
Shutter
Others
Fiber
Large Lens
Part Number
Options
specified*
Compatible Optics
Diameter φA
[mm]
Thickness t
[mm]
Clear Aperture
φB
[mm]
G
Height optical axis
C
[mm]
LHF-80 EE/UU φ80 3 – 15 φ73 M81.1 P1 50 8.5 21 φ102 101 0.31
LHF-80A − φ80 4 – 23 φ73 M81.1 P1 50 12.5 29 φ102 101 0.37
LHF-100 EE/UU φ100 4 – 18 φ93 M101.1 P1 60 11 26 φ122 121 0.39
LHF-100A − φ100 4 – 22 φ93 M101.1 P1 60 13 30 φ122 121 0.42
LHF-130 − φ130 4 – 18 φ122 M131.1 P1 75 11 26 φ152 151 0.45
LHF-150 − φ150 5 – 20 φ142 M151.1 P1 85 12 28 φ171 170 0.62
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
D
[mm]
F
[mm]
Primary material: Aluminum
Finish: Black Anodized
φE
[mm]
H
[mm]
Weight
[kg]
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C035

Holders
Three-axis/Five-axis Lens Holders (Post Type)
ALHN-3RO/ALHN-5RO
Catalog
Code
W4016
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Multi-axis lens holders are a convenient way to align a lens to the optical axis. Typical uses include
adjusting the collimating lens in laser applications.
◦Five-axis adjustment type (ALHN-5RO) that has lens tilt adjustment function required for adjustments such as interferometer
wave front and intensity distribution of focus spots is also available.
◦Lens focus adjustment is possible by rotating the lens tube with the lever, and moving the position of the lens forward or
backward.
◦The centering mechanism is fitted with a nut clamp, and the focus adjustment is fitted with a screw clamp.
◦In addition to single lenses, thick lenses or combined lens tubes up to thickness 28mm can be fixed.
Guide
▶Baseplate type that can be mounted on optical breadboard with M6 tap open or breadboard is also
available.
▶Centering lens holders (LHCM) without focus adjustment function are also available. C038
▶Centering lens holders (LHCM) for lenses φ20mm or less are also available.
▶Post length can be changed. If the length of post is specified at the time of purchase, this product
will be delivered after replacing posts.
Post replacement is gratis, but contact our International Sales Division because there may be extra
charges due to differences in length.
Attention
▶Two spacers are included with these mounts to allow positioning of the lens within the lens tube.
▶When the focal length of lens is long, adjustment does not work effectively because the focus adjustment
range is too narrow. In such a case, please use the dovetail stages or optical benches.
▶There is no clamp on the tilt adjustment mechanism of the lens.
Index
Outline Drawing
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
ALHN-3RO
B MAX22
60
C
φE
M6 P1
Vertical direction adjustment screw
Adjustment screw clamp
A MAX22
Part Number
A
(mm)
φF +0.2
+0.3
Horizontal adjustment screw
Adjustment screw clamp
B
(mm)
Focus adjustment lever
Focus clamp (Phillips screwdriver)
34.5
28
C
(mm)
φG
[Accessory Spacer]
10
15
φF
φG
φE
(mm)
φF
φG
φF
(mm)
φG
(mm)
ALHN-25-3RO 68 70.5 34.5 φ12 φ25 φ22
ALHN-25.4-3RO 68 70.5 34.5 φ12 φ25.4 φ22
ALHN-30-3RO 68 70.5 34.5 φ12 φ30 φ27
ALHN-50-3RO 88 91 45 φ20 φ50 φ46
ALHN-50.8-3RO 88 91 45 φ20 φ50.8 φ46
ALHN-5RO
MAX22
B
60
C
Rotation direction
adjustment screw
φE
D
M6 P1
Vertical direction adjustment screw
Adjustment screw clamp
5.5 A MAX22 (11) 34.5
Part Number
A
(mm)
φF +0.2
+0.3
Horizontal adjustment screw
Adjustment screw clamp
Tilt direction adjustment screw
B
(mm)
C
(mm)
Focus adjustment lever
Focus clamp (Phillips screwdriver)
28
D
(mm)
φG
[Accessory Spacer]
10
15
φF
φG
φE
(mm)
φF
(mm)
φF
φG
φG
(mm)
ALHN-25-5RO 68 90 54 74 φ12 φ25 φ22
ALHN-25.4-5RO 68 90 54 74 φ12 φ25.4 φ22
ALHN-30-5RO 68 90 54 74 φ12 φ30 φ27
ALHN-50-5RO 88 112.7 66.7 94 φ20 φ50 φ46
ALHN-50.8-5RO 88 112.7 66.7 94 φ20 φ50.8 φ46
Three-axis Post Type
Part Number
Five-axis Post Type
Part Number
Options
specified*
Options
specified*
Compatible Optics
Diameter
[mm]
Compatible Optics
Thickness
[mm]
Centering Adjustment
Range
[mm]
Centering Adjustment
Resolution
[mm/rotation]
Primary material: Aluminum
Finish: Black Anodized
Focus
Adjustment Range
[mm]
ALHN-25-3RO N/EE/UU φ25 0 – 28 φ6 0.25 ±3 0.31
ALHN-25.4-3RO N/EE/UU φ25.4 0 – 28 φ6 0.25 ±3 0.31
ALHN-30-3RO N/EE/UU φ30 0 – 28 φ6 0.25 ±3 0.31
ALHN-50-3RO N/EE/UU φ50 0 – 28 φ6 0.25 ±3 0.5
ALHN-50.8-3RO N/EE/UU φ50.8 0 – 28 φ6 0.25 ±3 0.5
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Compatible Optics Centering Adjustment Tilt Range Tilt Resolution Focus
Diameter
[mm]
Thickness
[mm]
Range
[mm]
Resolution
[mm/rotation]
Tilt
[ ° ]
Rotation
[ ° ]
Tilt
[°/rotation]
Rotation
[°/rotation]
Adjustment Range
[mm]
ALHN-25-5RO N/EE/UU φ25 0 – 28 φ6 0.25 ±4 ±4 about 0.5 about 0.5 ±3 0.46
ALHN-25.4-5RO N/EE/UU φ25.4 0 – 28 φ6 0.25 ±4 ±4 about 0.5 about 0.5 ±3 0.46
ALHN-30-5RO N/EE/UU φ30 0 – 28 φ6 0.25 ±4 ±4 about 0.5 about 0.5 ±3 0.46
ALHN-50-5RO N/EE/UU φ50 0 – 28 φ6 0.25 ±3 ±3 about 0.36 about 0.36 ±3 0.72
ALHN-50.8-5RO N/EE/UU φ50.8 0 – 28 φ6 0.25 ±3 ±3 about 0.36 about 0.36 ±3 0.72
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Weight
[kg]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
C036
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

I
I
Catalog
Three-axis/Five-axis Lens Holders (Plate Type) ALHN-3/ALHN-5 Code W4511
Multi-axis lens holders are a convenient way to align a lens to the optical axis. These plate-type
holders are strong against vibration and can be used for a stable low optical axis.
◦Five-axis adjustment type (ALHN-5) that has lens tilt adjustment function required for adjustments such as interferometer
wave front and intensity distribution of focus spots is also available.
◦Lens focus adjustment is possible by rotating the lens tube with the lever, and moving the position of the lens forward or
backward.
◦The centering mechanism is fitted with a nut clamp, and the focus adjustment is fitted with a screw clamp.
◦In addition to single lenses, thick lenses or combined lens tubes up to thickness 28mm can be fixed.
Guide
▶Centering lens holders (LHCM) without focus adjustment function are also available. C038
▶Centering lens holders (LHCM) for lenses φ20mm or less are also available.
▶Please contact our International Sales Division if you desire to specify the optical axis height.
Attention
▶Two spacers are included with these mounts to allow positioning of the lens within the lens tube.
▶When the focal length of lens is long, adjustment does not work effectively because the focus adjustment
range is too narrow. In such a case, please use the slotted holes of the mounting plate.
▶There is no clamp on the tilt adjustment mechanism of the lens.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Outline Drawing
ALHN-3
MAX22
Hexagonal socket head cap screw M6×10…3 screws
A MAX22
28
ALHN-5
MAX22
Hexagonal socket head cap screw M6×10…3 screws
5.5 A MAX22
28
Light
Sources
Index
Guide
B
3-7 11 counterbore
Mirrors
C
7.9
9.5
Lenses
D
D
Prisms
[Accessory Spacer]
25
J
[Accessory Spacer]
Polarizers
F
G
10
F
G
15
4
F +0.3
+0.2
G
B
F +0.3
+0.2
C
9.5
H
D
H
25
J
50.4
7
F
G
10
F
G
15
50.4
4
G
7
Lasers
Beam Shaping
Diffusers
Part Number
A
(mm)
B
(mm)
C
(mm)
D
(mm)
φF
(mm)
φG
(mm)
H
(mm)
I
(mm)
J
(mm)
ALHN-25-3 68 99.5 63.5 12.5 φ25 φ22 75 68 41.3
ALHN-25.4-3 68 99.5 63.5 12.5 φ25.4 φ22 75 68 41.3
ALHN-30-3 68 99.5 63.5 12.5 φ30 φ27 75 68 41.3
ALHN-50-3 88 122.2 76.2 25 φ50 φ46 95 75 59.8
ALHN-50.8-3 88 122.2 76.2 25 φ50.8 φ46 95 75 59.8
Part Number
A
(mm)
B
(mm)
C
(mm)
D
(mm)
φF
(mm)
φG
(mm)
H
(mm)
I
(mm)
J
(mm)
ALHN-25-5 68 99.5 63.5 74 φ25 φ22 75 68 41.3
ALHN-25.4-5 68 99.5 63.5 74 φ25.4 φ22 75 68 41.3
ALHN-30-5 68 99.5 63.5 74 φ30 φ27 75 68 41.3
ALHN-50-5 88 122.2 76.2 94 φ50 φ46 95 75 59.8
ALHN-50.8-5 88 122.2 76.2 94 φ50.8 φ46 95 75 59.8
Filters
Shutter
Others
Fiber
Three-axis Plate Type
Part Number
Compatible Optics
Diameter
[mm]
Compatible Optics
Thickness
[mm]
Centering Adjustment
Range
[mm]
Centering Adjustment
Resolution
[mm/rotation]
Focus
Adjustment Range
[mm]
Primary material: Aluminum
Finish: Black Anodized
ALHN-25-3 φ25 0 – 28 φ6 0.25 ±3 0.49
ALHN-25.4-3 φ25.4 0 – 28 φ6 0.25 ±3 0.49
ALHN-30-3 φ30 0 – 28 φ6 0.25 ±3 0.49
ALHN-50-3 φ50 0 – 28 φ6 0.25 ±3 0.78
ALHN-50.8-3 φ50.8 0 – 28 φ6 0.25 ±3 0.78
Weight
[kg]
Five-axis Plate Type
Part Number
Compatible Optics Centering Adjustment Tilt Range Tilt Resolution Focus
Diameter
[mm]
Thickness
[mm]
Range
[mm]
Resolution
[mm/rotation]
Tilt
[ ° ]
Rotation
[ ° ]
Tilt
[°/rotation]
Rotation
[°/rotation]
Primary material: Aluminum
Finish: Black Anodized
Adjustment Range
[mm]
ALHN-25-5 φ25 0 – 28 φ6 0.25 ±4 ±4 about 0.5 about 0.5 ±3 0.5
ALHN-25.4-5 φ25.4 0 – 28 φ6 0.25 ±4 ±4 about 0.5 about 0.5 ±3 0.5
ALHN-30-5 φ30 0 – 28 φ6 0.25 ±4 ±4 about 0.5 about 0.5 ±3 0.5
ALHN-50-5 φ50 0 – 28 φ6 0.25 ±3 ±3 about 0.36 about 0.36 ±3 0.75
ALHN-50.8-5 φ50.8 0 – 28 φ6 0.25 ±3 ±3 about 0.36 about 0.36 ±3 0.75
Weight
[kg]
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
WEB http://www.sigma-koki.com/english/ E-mail international@sigma-koki.com TEL +81-3-5638-8228 FAX +81-3-5638-6550
C037

Holders
Caliper Variable Lens Holders
LHCM
Catalog
Code
W4512
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Two-axis lens holders with a compact centering mechanism.
The compact centering adjustment mechanism makes these holders capable of handling a low
optical axis. These holders can be used for adjusting the focus point of a laser beam or the
direction of a collimated beam.
◦These holders can be centering adjustment of the lens of various sizes up to φ50.8mm from φ10mm.
◦These holders can hold and adjust thick achromatic lenses.
◦The thin frame of these holders allows optics to be placed close to the front and back of the lens.
Guide
▶For the focus adjustment of lenses, please use a dovetail stage or a
micrometer adjustment stage. Please contact our International Sales
Division for more information on the selection of models.
▶Three-axis lens holders (ALHN-3RO) which have high resolution for
lens centering adjustment and can clamp the adjustment axis are
also available. C036
▶Five-axis lens holders (ALHN-5RO) which can adjust the tilt of lenses
are also available. C036
▶We can change the post length. Please specify the post length when
you place an order, then we will deliver the product after replacing the
post with one with your specified length. Replacement of the post is
free of charge, but we may charge the difference in price depending
on the length. Please contact our International Sales Division for
more information.)
Light
Sources
Index
Outline Drawing
Attention
▶The adjustment mechanism may not work properly when something
heavy other than a lens is mounted.
Guide
Mirrors
Lenses
LHCM-10/12.7/15 M4 P0.7
G
MAX F
I
H
LHCM20/25/25.4/30/40/50/50.8
G
MAX F
M6 P1
P0.75
H
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Locking hole
6
C
J
MAX E
D
A +0.3
+0.2
Retaining ring
Delrin ring
B
M4 depth 5
M6 P1
Locking hole depth 5
60 C
MAX E
D
A +0.3
+0.2
Retaining ring
Delrin ring
I
B
Others
Fiber
12
Part Number
φD
(mm)
MAX E
(mm)
MAX F
(mm)
G
(mm)
H
(mm)
I
(mm)
J
(mm)
LHCM-10 φ26 57 24 14 11 6 20
LHCM-12.7 φ41 83 32 22 13 7 30
LHCM-15 φ41 83 32 22 13 7 30
Part Number
φD
(mm)
MAX E
(mm)
MAX F
(mm)
G
(mm)
H
(mm)
I
(mm)
LHCM-20 φ58 130 42 29 18 6
LHCM-25 φ64 137 46 32 18 6
LHCM-25.4 φ64 137 46 32 18 6
LHCM-30 φ64 137 46 32 18 6
LHCM-40 φ78 150 52 39 20 7
LHCM-50 φ88 160 57 44 20 7
LHCM-50.8 φ88 160 57 44 20 7
Specifications
Part Number
Options
specified*
Compatible Optics
Diameter φA
[mm]
Compatible Optics
Thickness t
[mm]
Clear Aperture
φB
[mm]
Primary material: Aluminum
Finish: Black Anodized
Height optical axis
Centering Adjustment Range
C
[mm]
[mm]
LHCM-10 N φ10 1 – 6 φ7 12.5 φ1 0.03
LHCM-12.7 N φ12.7 1 – 8 φ12 20 φ2 0.05
LHCM-15 N φ15 1 – 8 φ12 20 φ2 0.05
LHCM-20 N/EE/UU φ20 2 – 12 φ17 27.5 φ3 0.27
LHCM-25 N/EE/UU φ25 2 – 12 φ22 30 φ3 0.28
LHCM-25.4 N/EE/UU φ25.4 2 – 12 φ22 30 φ3 0.28
LHCM-30 N/EE/UU φ30 2 – 12 φ27 30 φ3 0.28
LHCM-40 N/EE/UU φ40 2 – 14 φ36 37.5 φ3 0.31
LHCM-50 N/EE/UU φ50 2 – 14 φ46 42.5 φ3 0.36
LHCM-50.8 N/EE/UU φ50.8 2 – 14 φ46 42.5 φ3 0.36
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Weight
[kg]
C038
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Retaining Rings/Delrin Washers
Retaining Ring Spanners
RR/DR
NRS
RR/DR
Accessories for mirror holders and lens holders.
Catalog
Code
W4017
◦Retaining ring and Delrin ring are one set in five each.
Retaining rings and Delrin rings are sold separately.
◦The retaining ring spanner (NRS) a special tool to
tighten retaining rings is available.
Application
Systems
Optics &
Optical
Coatings
Holders
Guide
Retaining Ring
Delrin Ring
Outline Drawing
Retaining ring
C
Delrin ring
F
Bases
Manual
Stages
▶Please contact our International Sales Division regarding tapered
wide retaining rings for beamsplitter holders.
φA
φB
φD
φE
Actuators
Attention
▶If these are used in products not in our company’s catalog,
screws sometimes will not turn. Do not use these for products
not listed in our catalog.
Screw pitch
Motoeized
Stages
Light
Sources
Retaining Ring
Part Number
Quantity
[Pieces]
Outer
Diameter
φA
[mm]
Inner
Diameter
φB
[mm]
Primary material: Aluminum
Finish: Black Anodized
Thickness
C
[mm]
Screw Pitch
[mm]
RR-10-5 5 φ10.85 φ7 3 0.75
RR-12.7-5 5 φ13.55 φ9.7 3 0.75
RR-15-5 5 φ15.85 φ12 3 0.75
RR-20-5 5 φ20.85 φ17 3 0.75
RR-25-5 5 φ25.85 φ22 3 0.75
RR-25.4-5 5 φ26.25 φ22 3 0.75
RR-30-5 5 φ30.85 φ27 3 0.75
RR-38.1-5 5 φ38.95 φ35 3 0.75
RR-40-5 5 φ40.85 φ37 3 0.75
RR-50-5 5 φ50.85 φ46 3 0.75
RR-50.8-5 5 φ51.65 φ47 3 0.75
RR-52-5 5 φ52.85 φ48 3 0.75
RR-60-5 5 φ60.85 φ56 3 0.75
RR-80-5 5 φ81.1 φ75 3.5 1
RR-100-5 5 φ101.1 φ95 4 1
RR-130-5 5 φ131.1 φ124 4 1
RR-150-5 5 φ151.1 φ144 4 1
Delrin Ring
Part Number
Quantity
[Pieces]
Outer
Diameter
φD
[mm]
Primary material: Delrin
Finish: None
Inner
Diameter
φE
[mm]
Thickness
F
[mm]
DR-10-5 5 φ10 φ7 1
DR-12.7-5 5 φ12.7 φ9.7 1
DR-15-5 5 φ15 φ12 1
DR-20-5 5 φ20 φ17 1
DR-25-5 5 φ25 φ22 1
DR-25.4-5 5 φ25.4 φ22 1
DR-30-5 5 φ30 φ27 1
DR-38.1-5 5 φ38.1 φ35 1
DR-40-5 5 φ40 φ37 1
DR-50-5 5 φ50 φ46 1
DR-50.8-5 5 φ50.8 φ47 1
DR-52-5 5 φ52 φ48 1
DR-60-5 5 φ60 φ56 1
DR-80-5 5 φ80 φ75 1.5
DR-100-5 5 φ100 φ95 1.5
DR-130-5 5 φ130 φ124 2
DR-150-5 5 φ150 φ144 2
Guide
Mirrors
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Index
Lenses
NRS
◦By matching the scale to the outer diameter of the lens,
the wrench spacing can be easily set to the correct
spacing.
NRS
Catalog
Code
W4018
Special purpose retaining ring spanner wrench that can support retaining rings of various sizes.
Optics can be securely fixed in holders without scratching the optics or retaining rings.
Outline Drawing
φ20
Specifications
Part Number
Size Used
[mm]
Primary material: Stainless
Finish: Chrome plating
A
[mm]
B
[mm]
50
NRS-50 For φ10 − φ50 50 70
19
NRS-100 For φ10 − φ100 100 120
NRS-150 For φ10 − φ150 150 170
10
A
B
0.8
φ4
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
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C039

Holders
Mini Lens Holders
Adjustable Round Lens Holders
TLH
LHA
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
TLH
These lens holders are the thinnest to hold lenses.
The width of these holders are designed to be narrower than the
diameter of lenses.
◦Optical systems which use lenses can be placed close to each other in parallel.
◦Please bring the plane side of a lens against the holder.
◦The simple fixation method makes replacement of lenses easy.
◦Can secure plano concave lenses with edge thickness of 1mm.
Catalog
Code
W4101
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Outline Drawing
TLH-10-DRi
TLH-12.7-DRi
M4 P0.7
Lens retaining 1.5
screw A
7
LHA
25
50
M6 P1
15
B
6
Specifications
Part Number
C
C
4
M4 depth 5
Locking hole
Specifications
D
3
Options
specified*
TLH-25.4-DRi
TLH-30-DRi
Clamp for slide
M4 P0.7
43.5
60
25
Compatible Optics
Diameter φC
[mm]
A
1.5
B
12
Clamp for Lens
Lens retaining
screw
7
C
M4 depth 5
4
D
6
Clear Aperture
φD
[mm]
Guide
▶We can change the post length. (If the length of post is specified
at the time of purchase, this product will be delivered after
replacing posts. Post replacement is free of charge, but please
consult our International Sales Division because there may be
extra charges due to differences in length.)
Attention
▶Tightening the lens retaining screws hard will bend these holders.
Please hold lenses lightly to the extent that they do not move.
▶Lenses may come off when these holders are used in environments
subject to vibration or transported while lenses are mounted.
▶Cannot hold biconvex lenses which have short focal length.
Height optical axis
[mm]
Holders for fixing round lenses of any diameter size.
Appropriate for use in applications where there are no lens holders
of compatible diameter or the lens diameter is not decided.
◦The bottom surface of the holder has a V-grooved section, which can fix cylindrical
components other than lenses.
◦Round lenses are fixed securely with the slit on the bottom surface and the lens
clamps.
Guide
Compatible Optics
Thickness
[mm]
TLH-10-DRi N φ10 φ7 15 1 – 4 8.5 7 0.054
TLH-12.7-DRi N φ12.7 φ10 15 1 – 4 11.5 8 0.060
TLH-25.4-DRi N φ25.4 φ22.4 25 1 – 4 24 12 0.065
TLH-30-DRi N φ30 φ27 25 1 – 4 28.5 15 0.065
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
LHA
A
[mm]
Primary material: Aluminum
Finish: Black Anodized
B
[mm]
Catalog
Code
Weight
[kg]
W4020
▶Post length can be changed. If the length of post is specified at
the time of purchase, this product will be delivered after replacing
posts.
▶Post replacement is gratis, but contact our International Sales
Division because there may be extra charges due to differences
in length.
A MAX
H
D
F
E
Attention
▶Make sure to tighten the slide clamps before tightening the lens
clamp.
▶A variety of Post Holders are available to adjust the height of the
mounted lens.
B MIN
Part Number
φA
(mm)
G
φB
(mm)
60
C
(mm)
D
(mm)
E
(mm)
F
(mm)
φG
(mm)
H
(mm)
LHA-25 φ25 φ5 40 45 12 (8) φ12 7.5
LHA-60 φ60 φ10 86 88 14 (9) φ12 9
LHA-100 φ100 φ20 134 135 19 (13) φ20 8
LHA-150 φ150 φ30 200 195 19 (14) φ20 14
Specifications
Part Number
Options
specified*
Compatible Optics
Diameter
[mm]
Primary material: Aluminum
Finish: Black Anodized
Compatible Optics
Thickness
[mm]
Weight
[kg]
LHA-25 N/EE/UU φ5 − φ25 1 − 2.5 0.1
LHA-60 N/EE/UU φ10 − φ60 1 − 4.7 0.2
LHA-100 N/EE/UU φ20 − φ100 1 − 7 0.5
LHA-150 − φ30 − φ150 1 − 7 0.8
* For specifying options, please refer to “Conversion of Posts,
Post Holders and Pedestal Bases of Holders”. C007
C040
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Caliper Variable Lens Holders
SLH
* Except SLH-120
Catalog
Code
W4019
Designed to hold lenses with a range of diameters at a consistent center height.
Appropriate for applications where the lenses get changed out very often.
◦The three jaws of the holder will contact the edge of the lenses, and hold them with spring pressure.
◦Move the levers closer to each other to open the three jaws, and loosen their hold to close the jaws.
◦The position of the three jaws is locked by tightening the clamp.
Guide
▶Post length can be changed. If the length of post is specified at the
time of purchase, this product will be delivered after replacing posts.
▶Replacement of holders with tapered posts will be charged. Contact
our International Sales Division for more information.
Attention
▶Thin lenses may tilt and fall off from the holders when they are held
with excessive spring pressure. Hold lenses with care.
▶Slight displacement will occur in the center of a lens every time a lens
is released and gripped. For precise measurement, use two-axis lens
holders with a centering mechanism (ALHN). C036
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Outline Drawing
SLH-25
M4 P0.7 with taper
SLH-50 M4 P0.7 with taper SLH-80 M6 P1
Index
34
18
Clamp
Lever
Guide
22
14
Clamp
Lever
22
14
Clamp
Lever
121
Mirrors
Lenses
Prisms
51
11
3
8-32UNC
25
60
74
10
3
60 36.5
13.5
9
60 60
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
12
12
12
Others
SLH-120
M6 P1 with taper
Fiber
18
34
Clamp
Lever
156
14
9
61.3 77.5
Specifications
Part Number
Options
specified*
Compatible Optics
Diameter
[mm]
Primary material: Aluminum
Finish: Black Anodized
Compatible Optics
Thickness
[mm]
Weight
[kg]
SLH-25 EE/UU φ5 − φ25 1 − 3 0.1
SLH-50 − φ30 − φ50 1 − 3 0.15
SLH-80 EE/UU φ25 − φ80 1 − 9 0.35
SLH-120 − φ40 − φ110 1 − 9 0.7
20
* For specifying options, please refer to “Conversion of Posts,
Post Holders and Pedestal Bases of Holders”. C007
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
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C041

Holders
Small Lens Claws
MLH
Catalog
Code
W4021
Holders for fixing small diameter lenses of φ15mm or less.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
◦Hold round lenses of any small diameter by clamping them with a spring-loaded arm.
◦MLH-10 is compact in the longitudinal direction, which enables placement of samples (objects) in proximity to lenses.
◦MLH-10 can be installed in a horizontal position using cross clamps (CCHN).
Guide
▶Selfoc® lens claws (MLH-SF) are available for micro lenses with
diameter of φ5mm or less. C043
▶Post length can be changed. If the length of post is specified at the
time of purchase, this product will be delivered after replacing posts.
▶Post replacement is gratis, but consult our International Sales
Division because there may be extra charges due to differences in
post diameter.
Attention
▶If diameter size changed, it changes the center of lens. Use after
adjusting the optical axis height.
▶Recommended mounting method for MLH-10: place the lens on a
horizontal surface and gently release the clamp to secure the lens.
Light
Sources
Index
Outline Drawing
Guide
MLH-15
M4 P0.7
44
MLH-10
M6 P1
135
Mirrors
34 10
φ10
8
70 35
30
Lenses
Prisms
Polarizers
14
24
30
3
φ5 – φ10
Compatible optics diameter
8
φ20 φ12
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
φ6
55
35
Specifications
Part Number
Compatible Optics Diameter
[mm]
Compatible Optics Thickness
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
MLH-15 φ5 − φ15 1 – 6 0.02
Specifications
Part Number
Compatible Optics Diameter
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
MLH-10 φ5 − φ10 0.15
C042
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Selfoc ® Lens Claws
MLH
Catalog
Code
W4051
Holders for fixing micro lenses of φ3mm or less.
Designed to hold small optics at the end of a long and thin arm to allow other optical elements to
be placed close to the element being held. Typical uses include collimator lenses for fiber or laser
diodes.
◦A light spring force holds the optic securely in place.
◦Optics can be mounted easily and securely by first removing the MLH-SF from the adapter, and then clamping an horizontally
placed optic from left and right with its arm.
◦The MLH-10ADP-2 is mounted on a □40mm XYZ stage (TSD-405L), enabling precision position adjustment of optics.
E148
◦The MLH-10ADP-2 is mounted on a fiber holder (FOP), enabling adjustment of position and tilt.
Guide
▶Because there are M6 screw holes on the hips of the MLH-SF, the
post can be extended. However, the post (RO) cannot be mounted
on the MLH-10ADP.
▶Because there is no step on the arm, lens of thickness 2mm or higher
can be fixed.
▶Selfoc ® Lens is a registered trademark of Nippon Sheet Glass Co., Ltd.
Attention
▶Because the tip of the arm has a V groove, rectangular optics can be
mounted tilted. Either fix at a position away from the V groove, or fix
with the optic glued to the flat plane on the top of the arm.
▶The MLH-10ADP-2 cannot be mounted on two-axis pinholes/objective
holders (TAT) other than the FOP.
▶When the MLH-10ADP-2 is mounted on an FOP, it is necessary to
remove the FOP adapter. Delivery of MLH-10ADP-2 and MLH-SF
assembled on the FOP is available. Contact our International Sales
Division for more information.
Specifications
Part Number
Compatible Optics Diameter
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
MLH-SF φ1.5 − φ3 0.02
MLH-10ADP-1 - 0.06
MLH-10ADP-2 - 0.01
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Lenses
Prisms
Outline Drawing
MLH-SF
2
φ1.5 – 3
Compatible optics
diameter
5
85
50 35
Lens retainer
25
47
φ8
M6 P1
depth 7
Countersunk head screw
M2×4…4 screws, M3×6…4 screws
φ40
15
MLH-10ADP-2 MLH-10ADP-1 M6 P1
4-φ2.2 φ4 countersink
15
2-M3 (Opposing)
8
φ15
φ8
4-φ3.5 φ6 countersink
PCDφ32
φ8
2
14
φ22
φ8
12
Set screw
φ12
60 10
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Example of Use
Fixed Selfoc ® Lens Claws
Assembled with the MLH-SF and MLH-10ADP-1
When fixing microscopic lenses simply
Selfoc ® Lens Claws with four-axis
adjustment mechanism
Example of mounting the MLH-SF and MLH-10ADP-2
assembly on a fiber holder (FOP-2DM)
Configured for up/down left/right position adjustment
of devices such as microscopic prisms, and tilt
adjustment of device surfaces
Selfoc ® Lens Claws with two-axis
adjustment mechanism
Example of mounting the MLH-SF and MLH-10ADP-2
assembly on a fiber holder (FOP-1)
Configuration enables optical axis adjustment of
microscopic lenses
Refer to the fiber holder (FOP).
C074
Refer to the fiber holder (FOP).
C074
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C043

Holders
Adjustable Cylindrical Lens Holders
CHA
Catalog
Code
W4022
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Holders for square lenses (cylindrical lenses).
Easy to fix square lenses of any size with its sliding system.
◦Space saving sliding clamp allows optics to be placed in close proximity. The standard type has a cork sheet bonded to
the top and bottom of lens clamping sections to prevent lenses slipping.
◦The flexible type clamps lenses from the front and back with the lens fix frames and lens frames attached to the top and
bottom sections in order to fix thick lenses and prevent lenses falling off.
Guide
▶Post length can be changed. If the length of post is specified at the
time of purchase, this product will be delivered after replacing posts.
▶Post replacement is gratis, but contact our International Sales
Division because there may be extra charges due to differences in
length.
Attention
▶When using the standard type, make sure to tighten the slide clamps
before tightening the lens clamp.
▶When using the standard type, gently tighten the lens clamp to
prevent stressing the lens.
▶Not recommended for round lenses. Use LHA C040
Light
Sources
Index
Outline Drawing
Guide
Mirrors
Lenses
CHA
M6 P1
C
MAX B
For slide
Clamp
E
For lens
Clamp
CHA-60F
Clamp for slide
14
M6 P1
Lens fixing clamp
86 (7)
MAX 60
Lens fixing frame
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
60 D
MAX A
G
MAX 60
92
13
60
Lens fixing clamp
Shutter
Others
Fiber
φF
φ12
Normal Type
Part Number
Options
specified*
Compatible Optics
Thickness
[mm]
Compatible Optics Dimensions
MAX A
[mm]
MAX B
[mm]
CHA-25 N/EE/UU MAX6.5 30 25 40 45 12 φ12 9 0.1
CHA-60 N/EE/UU MAX7.5 65 60 86 93 14 φ12 13.5 0.2
CHA-130 − MAX7.5 55 130 160 82 14 φ20 12.5 0.5
C
[mm]
D
[mm]
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
E
[mm]
φF
[mm]
Primary material: Aluminum
Finish: Black Anodized
G
[mm]
Weight
[kg]
Flexible Type
Part Number
Options
specified*
Compatible Optics
Thickness
[mm]
MAX (vertical)
[mm]
Compatible Optics Dimensions
MAX (horizontal)
[mm]
CHA-60F N/UU MAX9.5 60 60 0.19
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
C044
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60
Fixed Multi-element Lens Holders
LHF-UDL/LHF-M
Catalog
Code
W4023
Special holders for multi-element focusing lenses.
Appropriate for installing focusing lenses in an optical experiment system.
◦Female screws are tailored to fit mounting screws of various focusing lenses. See the compatibility table for appropriate
combinations.
Guide
▶For details of focusing lenses, refer to Optics > ME Optics > Focusing
Lenses. B183
▶For details of cover glass and cover glass holders, refer to Optics >
ME Optics > Focusing Lenses. B183
▶Post length can be changed. If the length of post is specified at the
time of purchase, this product will be delivered after replacing posts.
▶Post replacement is gratis, but contact our International Sales Division
because there may be extra charges due to differences in length.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Outline Drawing
LHF-M
12
M6 P1
C
LHF-UDL
2
D
M6 P1
C
Example of Use
Motoeized
Stages
Light
Sources
φA
F
E
φA
Index
B
60
B
Guide
Mirrors
Specifications
Part Number
φ12
Options
specified*
φA
[mm]
B
[mm]
LHF-M29-25 N/UU φ56 27 M29 P0.75 - - - 0.11
LHF-M34-30 N/UU φ60 29 M34 P0.75 - - - 0.11
LHF-M50.9-50 N/UU φ70 34 M50.9 P0.75 - - - 0.11
LHF-UDL-30 N/UU φ56 27 M34.85 P0.75 23 30 34 0.15
LHF-UDL-40 N/UU φ66 32 M44.85 P0.75 25 40 44 0.18
LHF-UDL-50 N/UU φ76 37 M54.85 P0.75 28 50 54 0.22
C
D
[mm]
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Focusing Lens
Part Number
Reference
Cover
Glass
Cover Glass
Holder
Compatible Holders
Visible Spectrum Achromats
ATL-30-40PY2
ATL-30-50PY2
ATL-30-60PY2
NADL-30-80PY2
PG-33 PGH-36 LHF-M34-30
B180
NADL-30-100PY2
NADL-30-150PY2
NADL-30-200PY2
YAG Laser Focusing Lenses
NYTL-25-20PY1
PG-21 PGH-24 LHF-M29-25
NYTL-30-30PY1
NYTL-30-40PY1
NYTL-30-50PY1
PG-27 PGH-30
NYDL-30-60PY1 B181
LHF-M34-30
NYDL-30-80PY1
NYDL-30-100PY1
NYDL-30-150PY1
Focusing Lenses for Fiber Laser
HFTLSQ-15-20PF1
PG-33
PG-21
PGH-36
PGH-24 Special adapter + LHF-M29-25
HFTLSQ-20-30PF1
Special adapter + LHF-M34-30
HFTLSQ-30-40PF1
HFTLSQ-30-50PF1
PG-27 PGH-30
HFTLSQ-30-60PF1
LHF-M34-30
HFTLSQ-30-80PF1
B182 PG-33 PGH-36
HFTLSQ-30-100PF1
HFDLSQ-30-150PF1
HFTLSQ-50-100PF1
HFDLSQ-50-200PF1
LHF-M50.9-50
HFDLSQ-50-300PF1
φ12
Compatibility Table for Focusing Lenses
E
[mm]
Primary material: Aluminum
Finish: Black Anodized
F
[mm]
Weight
[kg]
Focusing Lens
Part Number
Reference
Cover
Glass
Cover Glass
Holder
Compatible Holders
Excimer Laser Focusing Lenses
ETL-30-40P
ETL-30-50P
ETL-30-60P
ETL-30-80P
NEDL-30-100P
NEDL-30-150P
PG-33 PGH-36 LHF-M34-30
NEDL-30-200P B184
EDL-50-100P
EDL-50-150P
EDL-50-200P
LHF-M50.9-50
EDL-50-250P
EDL-50-300P
Ultraviolet Achromats
UDL-30-50P
UDL-30-80P
UDL-30-100P
LHF-UDL-30
NUDL-30-150P
NUDL-30-200P
UDL-40-80P
NUDL-40-100P
NUDL-40-150P
LHF-UDL-40
B185
NUDL-40-200P
NUDL-40-250P
UDL-50-100P
NUDL-50-150P
NUDL-50-200P
LHF-UDL-50
NUDL-50-250P
NUDL-50-300P
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
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C045

Holders
Objective Lens Holders
LHO
Catalog
Code
W4024
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Special holders for objective lenses. Appropriate for installing objective lenses in an optical experiment
system.
◦Female screws are tailored to fit mounting screws of various objective lenses. See the compatibility table for appropriate
combinations.
◦There are two types of objective lens holders for mounting with M20.32, one is the standard type (LHO-20.32) that allows
placement of targets in close proximity to lenses, and the other is the hooded type (LHO-20.32A) that blocks stray light.
◦Provide stable images at high magnification since objective lenses are mounted on simple and highly rigid holders.
Guide
▶Post length can be changed. If the length of post is specified at the
time of purchase, this product will be delivered after replacing posts.
▶Post replacement is gratis, but contact our International Sales Division
because there may be extra charges due to differences in length.
▶Adapters (TAT-18OA) for adjusting the center of objective lenses with
two-axis pinhole/objective holders (TAT) are also available.
C060
Attention
▶Compatibility of objective lenses from other companies is not
guaranteed even if the screws meet the same standard.
▶High magnification objective lenses require fine adjustment mechanisms
for centering and focus adjustment. Install an adjustment stage under
an objective holder or under a sample (object).
Index
Guide
Mirrors
Lenses
Prisms
Outline Drawing
LHO-20.32
12 φ38
M6 P1 LHO-20.32A M6 P1 LHO-26 M6 P1
M20.32 P0.706
35
φ38
M20.32 P0.706
12
φ47
M26 P0.706
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
17.5
60
96.5
15
18
60
97
60 22.5
Shutter
Others
φ12
φ12
φ12
Fiber
Specifications
Part Number
Options
specified*
Weight
[kg]
LHO-20.32 N/EE/UU 0.08
LHO-20.32A N/UU 0.13
LHO-26 N/UU 0.09
* For specifying options, please refer to “Conversion of
Posts, Post Holders and Pedestal Bases of Holders”.
C007
Example of Use
Primary material: Aluminum
Finish: Black Anodized
Compatibility Table for Objective Lenses
Objective Lens Part Number Compatible Holders
Objective Lenses
OBL-10
LHO-20.32
OBL-20
LHO-20.32A
OBL-40
Long Working Distance Objective Lenses
EPL-5
EPL-10
LHO-20.32
EPLE-20
LHO-20.32A
EPLE-50
EPLE-100
SPAL-2
SPAHL-5
SPAL-10
LHO-26
SPAHL-20
SPAHL-50
Objective Lens Part Number Compatible Holders
Near-ultraviolet Objective Lenses
Near-infrared Objective Lenses
PAL-20-NUV
PAL-50-NUV
LHO-26
LMPAL-20-NIR
LMPAL-50-NIR
Ultraviolet Objective Lenses
NPAL-10-UV-YSF
NPAL-20-UV-YSF
NPAL-50-UV-YSF
LHO-26
NPAL-10-NUV-YST
NPAL-20-NUV-YST
NPAL-50-NUV-YST
Objective Reflection Lenses
OBLR-10A
OBLR-20A
LHO-20.32
OBLR-30
LHO-20.32A
OBLR-40A
C046
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Catalog
Prism Holders KKD/PLH/PAD Code W4025
Holders for mounting block-shaped optics such as cube beamsplitters or right-angle prisms.
All four faces of a prism can be used by mounting a cube prism diagonal to the prism retainer strut.
◦The KKD series is fitted with bidirectional tilt and rotational adjustment mechanisms, enables fine adjustment of the
reflected beam.
◦Any optic size within the specified range can be fixed.
◦Prism retaining screw has a non-rotating tip to insure the prism does not rotate when clamping in place.
Outline Drawing
Guide
▶θαβ axis stages without prism retainer and strut (KKD-C) are also
available. E193
▶Post length can be changed. If the length of post is specified at the
time of purchase, this product will be delivered after replacing posts.
Post replacement is gratis, but consult with our International Sales Division
because there may be extra charges due to differences in length.
Attention
▶KKD-25PH and PLH-25 might not exert sufficient pressure to retain a
prism, and there is a risk that optics might fall out. Use after making
sure that the prism is fixed.
▶After adjusting the KKD series, if the prism retainer is lifted, the prism
table sometimes moves, throwing off adjustment of tilt and rotation.
Use without touching the prism retainer after adjustment.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
KKD-25PH
Rotational adjustment
MAX14
25
(5)
3-M2 depth 4
P.C.D.20
Prism retainer
KKD-25PHRO
Rotational adjustment
(5) 25 MAX14
3-M2 depth 4
P.C.D.20
Prism retainer
Pan head screw
M2×6…3 screws
35
20
3-2.4 mounting hole
4 counterbore
35
20
3
3
M6 P1
3
Tilt adjustment
12.5
10
20
Tilt adjustment
12.5
10
16 20
20
20
22
60
KKD-40PH
MAX12.5
3-M3 depth 5
P.C.D.32
Rotational adjustment
2-M2 depth 4
MIN5 MAX26
Pan head screw
M3×6…3 screws
Pan head screw
M4×8…4 screws
MAX13 60
50
Tilt adjustment
16
4-M4 depth 6
P.C.D.50
KKD-60PH
KKD-40PHRO M4 P0.7 KKD-60PHRO M6 P1
MAX12.5
3-M3 depth 5
P.C.D.32
Rotational adjustment
2-M2 depth 4
MIN5 MAX26
9
M4 depth 3
9
40
32
10
10
40
32
10
10
10 10
32
2
10
25 32
10
32
Tilt adjustment
Tilt adjustment
32
25
2.5
40
M6 P1 depth 7
Prism retainer
MAX 96
3-3.5
6 counterbore
40 2.5
M6 P1 depth 7
Prism retainer
MAX 96
60
Rotational adjustment
2-M3 depth 5 16
Prism retainer
15
MIN10 MAX32
4-4.5 mounting hole
8 counterbore
MAX13
Tilt adjustment
4-M4 depth 6
P.C.D.50
15
MIN10 MAX32
60
50
16
16 16
50
60 2
M6 P1 depth 7
3.5
35
MAX 122
M6 P1 depth 6
16
16
Rotational adjustment
2-M3 depth 5 16 M6 P1 depth 7
Prism retainer
35
60 MAX 122
2
50
60
Guide
Mirrors
Lenses
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Index
Prisms
12
12
12
With Tilt and Rotational Adjustment
Part Number
Compatible Optics
Dimensions
[mm]
Adjustment Range
Rotation
[ ° ]
Adjustment Range
Tilt
[ ° ]
Rotation
[°/rotation]
Resolution
Tilt
[°/rotation]
Primary material: Aluminum
Finish: Black Anodized
KKD-25PH − □10 ±3 ±3 about 0.9 about 2.2 0.05
KKD-25PHRO − □10 ±3 ±3 about 0.9 about 2.2 0.11
KKD-40PH □5 − □26 ±3 ±3 about 2.0 about 1.5 0.20
KKD-40PHRO □5 − □26 ±3 ±3 about 2.0 about 1.5 0.25
KKD-60PH □10 − □32 ±3 ±3 about 1.7 about 1.0 0.40
KKD-60PHRO □10 − □32 ±3 ±3 about 1.7 about 1.0 0.45
Weight
[kg]
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C047

Holders
Prism Holders
KKD/PLH/PAD
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Outline Drawing
PLH-25
Prism retainer
60
M4 P0.7 PLH-40 M6 P1 PLH-60 M6 P1
10 φ25
5 20
Prism retainer
MIN5 MAX26
φ40
32
MAX 77
6
60
Prism retainer
MIN10 MAX32
40 φ60
6
60 MAX 93
Motoeized
Stages
φ12
φ12
φ12
Light
Sources
Index
Guide
Specifications
Part Number
Options specified*
Compatible Optics Dimensions
[mm]
PLH-25 N − □10 0.08
PLH-40 N □5 − □26 0.14
PLH-60 N □10 − □32 0.29
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Prism Holder|PAD
Catalog
Code
W4103
Holders for holding cube beamsplitters.
By eliminating the post of the prism holding, and because
it clamps the lower portion of the side surface of the
cube with a thin nail clamp, it is possible to use a larger
effective diameter in all four directions of the cube prism.
◦Can be mounted on posts or post stands. These holders can also
be mounted directly on a baseplate or stage with an M4 thread.
Outline Drawing
1
A
Prism
Guide
▶Prism holders (KKD) which can adjust the reflected beam angle
of a beamsplitter are also available.
B A
E
D
Clamp (M2 screw)
C
M4 (Bottom mounting)
M3 (Top mounting)
F
Attention
▶Tightening the screw hard may break glass. Please tighten a cube
with the minimum necessary force to the extent that it does not move.
▶Please use with prisms with outer dimension tolerance of ±0.2mm.
These holders may not be able to mount prisms with large outer
dimension tolerance.
Part Number
A
(mm)
B
(mm)
C
(mm)
D
(mm)
E
(mm)
F
(mm)
PAD-10 10 10 15 20 5 10
PAD-12.7 12.7 8.65 15 22.7 6.35 12.7
PAD-15 15 12.5 20 25 7.5 15
Part Number
Compatible Optics
Dimensions
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
PAD-10 □10 0.005
PAD-12.7 □12.7 0.006
PAD-15 □15 0.01
C048
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Polarizer Holders
MPH/PH/SPH
Holders used to adjust the direction of polarization plates and waveplates.
Appropriate for use in precision polarization experiments as the mechanism allows smooth 360
degrees rotation on the optical axis.
◦SPH is fitted with a fine adjustment mechanism in its rotation mechanism, and can be used to create high extinction
states by enabling very fine adjustment of polarization plates.
◦The scale plate on the PH and SPH series can be positioned to provide a convenient reference to the polarizer or crystal
axis.
◦The SPH can be post mounted with the micrometer at the top or at the side for convenient operation in a variety of
environments.
◦The SPH includes a locking mechanism to prevent accidental adjustments.
◦Optics are held in place with retaining rings and Delrin rings.
◦The MPH series is designed for use in small systems and narrow spaces.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
▶Holders for optics sizes not listed in the catalog can be made to
order.
▶Adapters for polarizing prisms are available for both the PH and
SPH holders. C051
▶Post length can be changed. If the length of post is specified at
the time of purchase, this product will be delivered after replacing
posts. Post replacement is gratis, but check with our International
Sales Division because there may be extra charges due to differences
in length.
The angle scale position of PH-ARS, SPH-ARS, GTPC-PH and GTPC-SPH can be freely adjusted.
The scale is easily adjusted to the polarizing axis or the crystal axis of a waveplate by changing the position of this scale plate.
This scale plate enables customers to change the scale position during an experiment, or to adjust the scale to the polarizing axis or the crystal axis
precisely. (The default direction is aligned to the vertical axis, within ±1 degree.)
Clamp screw
for rotation
Variable Scale Plate
Attention
▶If the accompanying post is removed from the PH or SPH series
and an M6 screw is used instead to fix the holder, make sure that
the tip of the screw does not go inside further than 5mm from the
bottom surface of the holder.
▶The holder may not rotate smoothly if a long screw is used
because the tip of the screw might interfere with the rotational
mechanism.
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Set bolt
[How to adjust scale plate]
(1) Mount a polarizing optic in the polarizer holder, and set the direction of the polarizing axis and crystal axis to the polarization reference coordinate.
B093
(2) Tighten the clamp screw for rotation, loosen the set bolt that secures the scale plate, and rotate the scale plate.
(3) Set the scale mark to the required scale position, and tighten the scale plate with the set bolt.
Mounting Compatibility of Polarizer Holders and Polarizing Prism Holders
Polarizer holders (PH-ARS, SPH-ARS) can be used as polarizing prism holders
by purchasing an adapter (GTPC-ADP) additionally. Also, by purchasing the
adapter (GTPC-ADP), a polarizing prism holder for either of the three diameter
sizes, φ15, φ25.4 or φ30mm, can be used for the other two sizes. However, the
adapter is not compatible with the old type prism holders of custom orders
(GTPC-PH-**, GTPC-SPH-**).
Adapters (for optic diameter of φ30 and φ50mm) for polarizer holders (PH-ARS)
are also available as a single item. Contact our International Sales Division for
more information.
Adapter GTPC-ADP
Glan-Thompson prism
Retaining ring
Retaining ring
Polarization plate
Delrin ring
Rotary holder
GTPC-PH30 and other
Adapter for polarizer holder (PH-ARS)
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C049

Holders
Catalog
Polarizer Holders MPH/PH/SPH Code W4027
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Outline Drawing
MPH-12.7R
Pointing line
Pointing line
Clamp
15
32
φ6
30
φ21.2
φ12.7
φ10
M4 depth 5
11
1.6
φ12.7 +0.3
+0.2
5.2
MPH-25.4R/30R
Pointing line
Pointing line
B
(A)
60
φC
φD
φE
M4 depth 5
14.5
2
φD +0.3
+0.2
Clamp
6.5
φ12
Manual
Stages
PH-ARS
M6 P1 (Only PH-100 with taper)
Clamp screw for rotation
E
Actuators
Motoeized
Stages
B H
60
φA
φC +0.3
+0.2
Optic diameter
Marking
M6 P1 depth 5
φD
Part Number
φA
(mm)
B
(mm)
φC
(mm)
φD
(mm)
E
(mm)
φF
(mm)
G
(mm)
H
(mm)
PH-20-ARS φ17 25 φ20 φ51 23 φ12 3.5 29
PH-25.4-ARS φ22 30 φ25.4 φ61 26 φ12 4 35
PH-30-ARS φ27 30 φ30 φ61 26 φ12 4 35
PH-50-ARS φ46 40 φ50 φ81 26 φ12 5 42
Light
Sources
φF
G
PH-50.8-ARS φ47 40 φ50.8 φ81 26 φ12 5 42
PH-100-ARS φ95 73 φ100 φ148 30 φ20 4 66
Index
SPH-30-ARS
M6 P1
7
SPH-50-ARS
M6 P1
7
Fine movement clamp
0 350
10
Fine movement clamp
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
10
46
60 30
41.5 (MIN60)(MAX67)
Rotational fine
43.5
adjustment
φ68
60
37
Clear aperture φ27
φ60
φ30 +0.3
+0.2
M6 P1 depth 5
24
14
11
Coarse movement
rotation clamp
7
60 40 57
49
41.5 (MIN60)(MAX67)
19 25.5
Rotational fine
adjustment
φ90
80
Clear aperture φ46
φ50
M6 P1 depth 5
24
14
12
Coarse movement
rotation clamp
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Small Type
Part Number
φ12
Options
specified*
Compatible Optics
Diameter φD
[mm]
Compatible Optics
Thickness
[mm]
Scale
MIN Reading
[ ° ]
Clear Aperture
φE
[mm]
Optical Axis Height
B
[mm]
MPH-12.7R N φ12.7 2 − 7 5 φ10 15 32 φ22 0.07
MPH-25.4R N φ25.4 2 − 8.5 5 φ22 25 51 φ40 0.083
MPH-30R N φ30 2 − 8.5 5 φ27 27.5 56 φ45 0.09
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
φ12
A
(MAX)
[mm]
Primary material: Aluminum
Finish: Black Anodized
φC
[mm]
Weight
[kg]
Simple Type
Part Number
Options
specified*
Compatible Optics
Diameter
[mm]
Compatible Optics
Thickness
[mm]
Clear Aperture
φA
[mm]
Scale
MIN Reading
[ ° ]
PH-20-ARS N/UU φ20 2 − 10 φ17 1 0.14
PH-25.4-ARS N/UU φ25.4 2 − 10 φ22 1 0.19
PH-30-ARS N/UU φ30 2 − 10 φ27 1 0.19
PH-50-ARS N/UU φ50 2 − 10 φ46 1 0.25
PH-50.8-ARS N/UU φ50.8 2 − 10 φ47 1 0.25
PH-100-ARS N/UU φ100 2 − 10 φ95 1 0.81
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Precision Type
Part Number
Options
specified*
Compatible Optics
Diameter
[mm]
Compatible Optics
Thickness
[mm]
Clear Aperture
[mm]
Fine Adjustment
Range
[ ° ]
Vernier
MIN Reading
[ ′]
Weight
[kg]
Micro
Indicator Conversion
[°/DIV]
SPH-30-ARS N/UU φ30 2 − 10 27 ±5 5 about 0.014 0.32
SPH-50-ARS N/UU φ50 2 − 10 46 ±3 5 about 0.012 0.46
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Primary material: Aluminum
Finish: Black Anodized
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
C050
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Polarizing Prism Holders
GTPC-PH/GTPC-SPH/GTPC-ADP
Catalog
Code
W4028
Holders for adjusting the direction of various sizes of polarizing prisms including Glan-Thompson
prisms. Appropriate for precision alignment of Glan-Thompson prisms or for polarimeter devices.
◦The fine adjustment mechanism in the SPH can be used to detect an extinction ratio of 10 −5 or less.
◦The scale plate on the PH and SPH series can be positioned to provide a convenient reference to the polarizing axis.
C049
◦The SPH can be post mounted with the micrometer at the top or at the side for convenient operation in a variety of
environments.
◦The SPH includes a locking mechanism to prevent accidental adjustments.
◦Polarizing prisms are held in place with retaining rings.
Application
Systems
Optics &
Optical
Coatings
Holders
Guide
▶Post length can be changed. If the length of post is specified at the
time of purchase, this product will be delivered after replacing posts.
Post replacement is gratis, but contact our International Sales Division
because there may be extra charges due to differences in length.
▶Holders for polarizing prisms of diameters or thickness not in the
specifications listed in the catalog can be made to order.
▶Please contact our International Sales Division if you need adapters
equipped with an incidence angle adjustment function for polarizing prism.
▶Please contact our International Sales Division if you need adapters
equipped with eliminated light exit port for gran laser prism.
Attention
▶The prices of rotary holders and adapters do not include the price of
Polarizing prisms. Purchase Polarizing prisms separately.
B094
▶Rotary holders and adapters (GTPC-ADP) are sold separately.
Purchase the combination of three items, a Polarizing prism, adapter
and rotary holder, by checking the combinations listed in the following
specification table.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Outline Drawing
GTPC-PH30/GTPC-PH50 & GTPC-ADP
B C
60
GTPC-SPH30/GTPC-SPH50 & GTPC-ADP
GTPC-ADP
M6 P1 M6 P1
Coarse movement rotation clamp
Truss screw M3×6…2 screws
Fine movement
Rotational fine adjustment
Clamp screw for rotation
clamp
41.5 MAX67
24 D
26 D
Rotary holder 60°
K
Rotary holder
2 L
φA
Optic diameter
marking
Adapter
B C 10
60
φA
Optic diameter
marking
Adapter
30°
3.5
φJ
φI
φH
1
Optic diameter marking
3
φH
φF +0.2
+0.3
φG
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
φ12
7
φ12
Shutter
Holder
Part Number
Adapter
Part Number
φA
(mm)
B
(mm)
C
(mm)
D
(mm)
GTPC-PH30 GTPC-ADP15-29 φ60 30 34.3 7.5
GTPC-PH30 GTPC-ADP25.4-31 φ60 30 34.3 9.5
GTPC-PH30 GTPC-ADP30-39 φ60 30 34.3 17.5
GTPC-PH30 GTPC-ADP30-53 φ60 30 34.3 31.5
GTPC-PH50 GTPC-ADP38-49 φ80 40 41.3 27.5
Holder
Part Number
Adapter
Part Number
φA
(mm)
B
(mm)
C
(mm)
D
(mm)
GTPC-SPH30 GTPC-ADP15-29 φ60 30 46 9.5
GTPC-SPH30 GTPC-ADP25.4-31 φ60 30 46 11.5
GTPC-SPH30 GTPC-ADP30-39 φ60 30 46 19.5
GTPC-SPH30 GTPC-ADP30-53 φ60 30 46 33.5
GTPC-SPH50 GTPC-ADP38-49 φ80 40 57 29.5
Adapter
Part Number
φF
(mm)
φG
(mm)
φH
(mm)
φI
(mm)
φJ
(mm)
K
(mm)
L
(mm)
GTPC-ADP15-29 φ15 φ34 φ12 φ39 φ47 33.5 19
GTPC-ADP25.4-31 φ25.4 φ34 φ22 φ39 φ47 35.5 20
GTPC-ADP30-39 φ30 φ34 φ27 φ39 φ47 43.5 21
GTPC-ADP30-53 φ30 φ34 φ27 φ39 φ47 57.5 19
GTPC-ADP38-49 φ38.1 φ54 φ35 φ60 φ67 53.5 26
Others
Fiber
Simple Type
Holder Part Number
Adapter Part Number
Compatible Optics Diameter
[mm]
Compatible Optics Thickness
[mm]
Scale MIN Reading
[ ° ]
Primary material: Aluminum
Finish: Black Anodized
Total Weight
[kg]
GTPC-PH30 GTPC-ADP15-29 φ15 15 − 29 1 0.25
GTPC-PH30 GTPC-ADP25.4-31 φ25.4 16 − 31 1 0.22
GTPC-PH30 GTPC-ADP30-39 φ30 23 − 39 1 0.21
GTPC-PH30 GTPC-ADP30-53 φ30 39 − 53 1 0.22
GTPC-PH50 GTPC-ADP38-49 φ38 28 − 48.9 1 0.41
Precision Type
Holder Part Number
Adapter Part Number
Compatible Optics
Diameter
[mm]
Compatible Optics
Thickness
[mm]
Fine Adjustment
Range
[ ° ]
Vernier
MIN Reading
[ ′]
Primary material: Aluminum
Finish: Black Anodized
Micro Indicator
Conversion
[°/DIV]
Total Weight
[kg]
GTPC-SPH30 GTPC-ADP15-29 φ15 15 − 29 ±5 5 about 0.014 0.33
GTPC-SPH30 GTPC-ADP25.4-31 φ25.4 16 − 31 ±5 5 about 0.014 0.30
GTPC-SPH30 GTPC-ADP30-39 φ30 23 − 39 ±5 5 about 0.014 0.29
GTPC-SPH30 GTPC-ADP30-53 φ30 39 − 53 ±5 5 about 0.014 0.30
GTPC-SPH50 GTPC-ADP38-49 φ38 28 − 48.9 ±5 5 about 0.014 0.62
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C051

Holders
Rod Form Laser Mounts
Adjustable Laser Holders (with a stand)
LAH
LAHU/LAHU-A
LAH
Catalog
Code
W4029
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Holders for He-Ne lasers.
The six screws can be used to adjust the height and angle of the
mounted laser tube.
◦Laser tube diameters from φ18 to φ55mm are accommodated by changing
the engagement length of the two groups of three screws.
◦The angle of beam tilt can be changed by changing the engagement length
of the six screws.
◦The LAH-2 also includes an adjustment mechanism for changing the beam
tilt angle.
Manual
Stages
Actuators
Outline Drawing
LAH-1T/LAH-1
M6 P1
Fixing screw
70 55
12
Guide
▶Post length can be changed. If the length of post is specified at
the time of purchase, this product will be delivered after replacing
posts. Post replacement is gratis, but check with our International
Sales Division because there may be extra charges due to differences
in length.
Motoeized
Stages
Light
Sources
60 41
50
20
A
Attention
▶After beam adjustment, make sure that the laser is securely fixed
with six fixing screws. Looseness in one screw will cause displacement
in the optical axis or vibration.
Index
Guide
Mirrors
Lenses
LAH-2T/LAH-2
60 61
70
M6 P1
Fixing screw
55
12
50
20
A
Three-Point Support Type
Part
Number
Compatible
Laser
Diameter
[mm]
Length
A
[mm]
Adjustment
Range
Tilt
[ ° ]
Primary material: Aluminum
Finish: Black Anodized
Resolution
Tilt
[°/rotation]
Weight
[kg]
LAH-1T φ18 − φ55 140 - - 0.31
LAH-1 φ18 − φ55 240 - - 0.51
LAH-2T φ18 − φ55 140 ±4 about 0.5 0.45
LAH-2 φ18 − φ55 240 ±2.4 about 0.3 0.91
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
LAHU/LAHU-A
W4030
Cylindrical Laser mounts for use with vibration isolated Rod Mount
system. The damped structure makes the holders appropriate for use
in holograms or interferometry.
Catalog
Code
Filters
Shutter
Others
◦Cylindrical lasers of φ25.4 to φ44.5mm diameter fit in the V-grooved section and are held in place by a single
clamping screw.
◦Holders can be mounted at any position by sliding along the damped rod.
◦Can be directly mounted on a vibration isolator or optical breadboard with 50×50mm matrix M6 screw holes.
◦LAHU-A includes a mechanism to adjust beam tilt and rotation.
Fiber
Outline Drawing
Guide
LAHU
Hexagon socket
head cap screw
M6×15…4 screws
Slide fixing screw
46 75 30 65
Laser fixing screw
▶Consult our International Sales Division if holders with an optical
axis height of 300mm or higher is necessary.
▶Consult our International Sales Division if a vibration isolator or
optical breadboard does not have 50×50mm matrix M6 screw holes.
71.6
A
LAHU-A
Hexagon socket
head cap screw
M6×15…4 screws
Slide fixing screw
69.8
A
13
50.4
88
38.1
MAX44.5
MIN25.4
50.4
Tilt adjustment
46 75 30 65
Laser fixing screw
6
34.1
44.7
4-7 mounting holes
11 counterbore
34.1
44.7
Attention
▶Combined weight of laser and holder is heavy. Pay attention so as
not to drop the holder when loosening the fixing screw of the slide
because it may be too heavy to support with one hand.
▶Lasers with protrusion or in a shape other than cylindrical shape
may not be fixed securely with the holders.
▶Lasers are very delicate instruments. Pushing in a fixing screw
with excessive force sometimes deteriorates the laser performance.
Stand Type
Part Number
Strut
Length
A
[mm]
Strut: Stainless steel Finish: None
Holder material: Aluminum Finish: Black Anodized
Compatible
Laser
Diameter
[mm]
Adjustment Range
Tilt
[ ° ]
Rotation
[ ° ]
Weight
[kg]
13
50.4
88
38.1
MAX44.5
MIN25.4
Rotational
adjustment
50.4
6
4-7 mounting holes
11 counterbore
LAHU-45-POS177 177.8 φ25.4 − φ44.5 - - 2.6
LAHU-45-POS355 355.6 φ25.4 − φ44.5 - - 3.9
LAHU-45A-POS177 177.8 φ25.4 − φ44.5 ±2 ±2 2.7
LAHU-45A-POS355 355.6 φ25.4 − φ44.5 ±2 ±2 4.0
C052
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Laser Holders (Kinematic)
LAH-3
Catalog
Code
W4031
Holders for precisely adjusting tilt and rotation of He-Ne lasers.
Appropriate for holding a guide laser of invisible laser and use as a fixed type pointer.
◦Two actuator styles are available. The M type includes standard micrometers with millimeter markings. The S type
includes simple screw adjusters for minimal protrusion beyond the holder.
◦Three sizes are available for He-Ne lasers of diameter φ31.8mm, φ35.1mm and φ44.5mm. H006
Outline Drawing
LAH-3TM
M6 P1
A
4-4.5
50
64
Kinematic holder
Laser adapter
He-Ne laser
LAH-3TS
M6 P1
16
Guide
▶To use with a high optical axis, mount a post (optional) on a post
holder.
▶To adjust optical axis height, three-point support types (LAH-1,
LAH-2) and stand types (LAHU) are available.
▶Holders for laser diameters not listed in the catalog can be made
to order.
Attention
▶Lasers with protrusion or in a shape other than cylindrical shape
may not be fixed with the holders.
▶Lasers are very delicate instruments. Pressing a laser excessively
with a set bolt sometimes deteriorates the laser performance.
▶Fixing the rear end (or front end) of a laser with a laser adapter may
disable adjustment of a kinematic holder. Fix the laser in the laser
adapter at or around the laser’s center of gravity.
How to Mount He-Ne Lasers
Remove the laser adapter from the kinematic (tilt adjustment) holder first by
removing the four pan head screws. If the cable of a He-Ne laser cannot be
pulled out, put the He-Ne laser through the hole of the kinematic holder first.
(1) Insert the He-Ne laser in the laser adapter half way, and fix with four set
screws.
(2) Mount the adapter in which the laser is mounted in the kinematic holder
with four pan head screws.
(1)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
B
B
Lenses
10
C
10
C
50 M6 P1 depth 8 50 M6 P1 depth 8
(2)
Laser adapter
Kinematic holder
Prisms
Part Number
A
(mm)
B
(mm)
C
(mm)
Accessory Screw
Diameter × Length [mm]
LAH-3TM 100 100 55 M4×10, M4×12 (2 units), M4×14
LAH-3TS 100 100 55 M4×10, M4×12 (2 units), M4×14
He-Ne laser
Polarizers
Lasers
Beam Shaping
Diffusers
Kinematic Type
Part Number
Compatible
Laser
Diameter
[mm]
Optical Axis
Height
C
[mm]
Adjustment Range Resolution Angle Conversion for a Scale Mark
Tilt
[ ° ]
Rotation
[ ° ]
Tilt
[°/rotation]
Rotation
[°/rotation]
Tilt
[°/DIV]
Primary material: Aluminum
Finish: Black Anodized
Rotation
[°/DIV]
LAH-3TS-32 φ31.8 55 ±2.4 ±2.4 about 0.4 about 0.4 - - 0.63
LAH-3TS-35 φ35.1 55 ±2.4 ±2.4 about 0.4 about 0.4 - - 0.63
LAH-3TS-45 φ44.5 55 ±2.4 ±2.4 about 0.4 about 0.4 - - 0.63
LAH-3TM-32 φ31.8 55 ±2.4 ±2.4 about 0.4 about 0.4 about 0.008 about 0.008 0.63
LAH-3TM-35 φ35.1 55 ±2.4 ±2.4 about 0.4 about 0.4 about 0.008 about 0.008 0.63
LAH-3TM-45 φ44.5 55 ±2.4 ±2.4 about 0.4 about 0.4 about 0.008 about 0.008 0.63
Weight
[kg]
Filters
Shutter
Others
Fiber
Laser Diode Holders
W4005
Kinematic mirror holders (MHG-MP30-NL/MHG-HS30-NL) can be used as laser diode
(LDU33) holders when combined with laser mounts (MHG-20LDU). H006
Laser mounts (MHG-20LDU) can be used as fixed LD holders when a post (M6) is attached
to the bottom of the mounts. C018
Catalog
Code
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C053

Holders
Holders for Laser Beam Expanders
BE-M/LBED-H/LBED-YH
Catalog
Code
W4032
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
BE-M22H/BE-M34H
71
60
Outline Drawing
6.5 44
40
2-4.5
LBED-H
LBED-YH
M6 P1
70
25
44
71
60
20
40
10
M
28.5
70
25
2-4.5
10
20
M6 P1
C
B
Rotational fine adjustment
Tilt fine adjustment
Collimation adjustment unit
Clamp Rotational fine adjustment
MAX A
7
Holders for adjusting the angle of a laser beam expander. Compatible
with various beam expanders with mounting threads on the input side
of the expander. (BE, LBED)
◦Two different threads are avaiable for mounting the beam expander to the holder. Check the
compatible holder table before purchase.
◦Strong springs are used in tilt and rotational adjustment mechanisms in order to enable fine adjustment
for beam expanders with long lens tubes.
◦When the post is removed, the holder can be directly mounted to a baseplate with two M4 screws.
Tilt fine adjustment
Guide
▶Holders with integrated laser beam expanders (LBE) are also
available. C054
▶For vertical and horizontal adjustment of beam expander, refer to
the page of beam expander adapters (LBE-ADP). C056
▶Post length can be changed. If the length of post is specified at the
time of purchase, this product will be delivered after replacing posts.
Post replacement is gratis, but contact our International Sales Division
because there may be extra charges due to differences in length.
Attention
▶The rotation center of the tilt and rotational adjustment is away from
the optical axis of beam expander (bottom right edge of holder).
For this reason, great movement of the adjustment mechanism
sometimes causes displacement of the beam center position from
the optical axis of beam expander, or vignetting of the output beam.
▶Moving the collimation adjustment of beam expander after tilt and
rotational adjustment may also move the direction of output beam.
Primary material: Aluminum
Specifications
Finish: Black Coating
Part Number
Compatible Mounting
Angle Adjustment Range
Angle Adjustment Resolution
Weight
Screw Size
Tilt
Rotation
Tilt
Rotation
[kg]
M
[ ° ]
[ ° ]
[°/rotation]
[°/rotation]
BE-M22H M22 P0.75 ±4.3 ±4.3 about 0.62 about 0.62 0.7
BE-M34H M34 P1 ±4.3 ±4.3 about 0.62 about 0.62 0.8
Outline Drawing
Laser Expander Compatible
Part Number Holders
BE-*-266 BE-M34H
BE-*-355 BE-M34H
BE-*-V BE-M22H
LBED-* BE-M22H
BE-*-LD BE-M34H
BE-*-1064 BE-M34H
LBED-*Y BE-M34H
Laser Beam Expander [with Collimation Adjustment] (with holder)
Lens system that enlarges a small laser beam to a large collimated beam. Fine adjustment of collimation
is possible with the collimation ring. Holders with fine tilt and rotation adjustment mechanisms
enable setting of the direction of output collimated beam to the same angle as incident beam.
◦The optical system of beam expanders has an air-gap structure with no adhesive bonded lenses. This structure allows
use of high-power lasers.
◦The Galilean lens design reduces the number of aberration correction lenses needed and shortens the length of beam expander.
◦By rotating the ring attached to the center of beam expander, a focused beam can be changed to a collimated beam and
to a divergent beam. Use when precise collimation adjustment is required or beam waist position needs to be changed.
B198
Guide
▶For vertical and horizontal adjustment of beam expander, refer to
the page of beam expander adapters (LBE-ADP). C056
Attention
Catalog
Code
W4033
▶Using the beam expander in reverse can reduce the size of the
beam, but it will not generally produce a collimated beam due to the
diffraction of small beams.
▶Moving the collimation adjustment after tilt and rotational adjustment
may also move the direction of the output collimated beam. Adjust
tilt and rotation again after collimation adjustment.
▶If the incident beam is not vertical to the incident aperture of the
beam expander, the output beam may become elliptical or partly
vignetted.
Beam Expander Assembled
Part Number
Beam Expander
Part Number
Holders
Part Number
Designed
Wavelength
[nm]
Expansion Ratio
MAX Entrance
Clear Aperture
[mm]
Lens Tube Length
MAX A
[mm]
LBED-3H
LBED-3
400 − 700 3 φ5.4 45 φ26 φ40 0.82
LBED-5H LBED-5 BE-M22H 400 − 700 5 φ3.2 54 φ26 φ40 0.82
LBED-10H LBED-10 400 − 700 10 φ2.6 113 φ36 φ40 0.88
LBED-2YH
LBED-2Y
1064 2 φ15.1 53 φ48 φ60 1.06
LBED-3YH LBED-3Y BE-M34H 1064 3 φ10.2 69 φ48 φ60 1.08
LBED-4YH LBED-4Y 1064 4 φ8.6 98 φ48 φ60 1.14
φB
[mm]
Primary material: Aluminum
Finish: Black Anodized
φC
[mm]
Weight
[kg]
C054
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Laser Beam Expanders with holder
LBE-H
Catalog
Code
W4034
Lens system that enlarges a small laser beam to a large collimated beam for simple experiments.
Holders with fine tilt and rotation adjustment mechanisms enable setting of the direction of output
collimated beam to the same angle as incident beam.
◦The optical system of beam expanders has air-gap structure with no adhesive bonded lenses. This structure allows use
of high-power lasers.
◦The Galilean lens design reduces the number of aberration correction lenses and shortens the length of beam expander.
◦Collimation adjustment (diopter adjustment) is fixed at the optimum position. Collimation adjustment cannot be changed.
B200
Guide
▶This product is delivered with a laser beam expander integrated into
a tilt and rotation adjustment holder.
▶For vertical and horizontal adjustment of beam expander, refer to the
page of beam expander adapters (LBE-ADP). C056
▶Post length can be changed. If the length of post is specified at the
time of purchase, this product will be delivered after replacing posts.
Post replacement is gratis, but contact our International Sales
Division because there may be extra charges due to differences in
length.
Attention
▶Using the beam expander in reverse can reduce the size of the beam,
but it will not generally produce a collimated beam due to the diffraction
of small beams.
▶If the incident beam is not vertical to the incident aperture of the beam
expander, the output beam may become elliptical or partly vignetted.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
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Index
Outline Drawing
LBE-3/LBE-5
M6 P1
7
LBE-10
M6 P1
7
Guide
Mirrors
Lenses
Prisms
64
50
64
50
Polarizers
50
3-φ4.5
50
3-φ4.5
Lasers
Beam Shaping
Diffusers
90
16
13
Laser beam
Expander 3X 5X
Rotational fine adjustment
90
80
13
Rotational fine adjustment
Filters
Shutter
95
55
95
55
Others
Fiber
Tilt fine adjustment
60
60
Laser beam
Expander 10X
Tilt fine adjustment
φ20
φ20
Specifications
Part Number
Beam Expander
Part Number
Wavelength
Designed
[nm]
Expansion
Ratio
MAX Entrance
Clear Aperture
[mm]
Angle Adjustment Range
Tilt
[ ° ]
Rotation
[ ° ]
Angle Adjustment Resolution
Tilt
[°/rotation]
Primary material: Aluminum
Finish: Black Coating, Black Anodized
Rotation
[°/rotation]
LBE-3H LBE-3 400 − 700 3 φ3.8 ±3.7 ±3.7 about 0.46 about 0.46 0.8
LBE-5H LBE-5 400 − 700 5 φ2.7 ±3.7 ±3.7 about 0.46 about 0.46 0.8
LBE-10H LBE-10 400 − 700 10 φ1.7 ±3.7 ±3.7 about 0.46 about 0.46 0.91
LBE-3LH LBE-3L 780 − 830 3 φ3.8 ±3.7 ±3.7 about 0.46 about 0.46 0.8
LBE-5LH LBE-5L 780 − 830 5 φ2.7 ±3.7 ±3.7 about 0.46 about 0.46 0.8
LBE-10LH LBE-10L 780 − 830 10 φ1.7 ±3.7 ±3.7 about 0.46 about 0.46 0.91
LBE-3YH LBE-3Y 1064 3 φ3.8 ±3.7 ±3.7 about 0.46 about 0.46 0.8
LBE-5YH LBE-5Y 1064 5 φ2.7 ±3.7 ±3.7 about 0.46 about 0.46 0.8
LBE-10YH LBE-10Y 1064 10 φ1.7 ±3.7 ±3.7 about 0.46 about 0.46 0.91
Weight
[kg]
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C055

Holders
Adapters for Laser Beam Expanders
LBE-ADP
Catalog
Code
W4035
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
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Sources
Adapters for mounting laser beam expanders to lens holders.
Compatible with all beam expanders of BE/LBED/LBE.
◦Mount laser beam expanders to a variety of lens and mirror holders that mount φ50 optics.
◦Can be used as a fixed type beam expander holders by mounting the adapters directly on posts.
◦Can be mounted on mirror holders (MHG-MP50-NL) or two-axis pinhole/objective lens holders (TAT-16RO) using 4-M3
screws.
Guide
▶For details of the specifications of centering mechanism, refer to
five-axis lens holders (ALHN-50-5RO). C036
▶Adapters for fixing He-Ne laser light sources are provided as
accessories of beam expanders (BE, LBED).
▶For details, refer to laser beam expanders. B198
Attention
▶To mount a beam expander on a five-axis lens holder (ALHN-5RO),
make sure to fix the beam expander on the other side of the
retaining ring. It cannot be mounted in the opposite direction.
▶When fixing a beam expander on a adjustable holder other than a
five-axis lens holder, the adjustable mechanism of the holder may
not work correctly depending on the combination. Contact our
International Sales Division for more information in advance.
Index
Guide
Mirrors
Lenses
Outline Drawing
LBE-ADP
Hexagon socket head cap screw M3×16…4 screws, M3×10…4 screws
3
10 3
φ50 0
−0.1
A
4-M3 depth 5
Specifications
Part Number
LBE-ADP 0.04
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
Prisms
Polarizers
24.5
φ44
M34 P1
8
φ44
32
36
Lasers
Beam Shaping
Diffusers
M6 P1 depth 5
M22 P0.75
A
32
36
4-φ3.5 through hole
2×4-φ6 counterbore
depth 3
Filters
Shutter
Others
Fiber
8
16
Cross section
A-A
Example of Combinations
ALHN-50-5 + LBE-ADP + LBED
RO-20-60 + LBE-ADP
C056
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Technical Note
Spacial Filters
The wavefront of a laser beam can be distorted as it goes through an optical system. Fine dust
particles can create disturbing diffraction patterns. Spacial filters provide a method to remove
many of these disturbances, leaving a clean spherical wavefront.
●Principles
Focusing plane waves with an ideal lens concentrates
light at a small spot. In the case of a
typical laser beam, where the beam diameter is
less than the diameter of the lens, the intensity
distribution at the focus spot will have the same
gaussian distribution that the incoming laser
beam had. If the planar wavefront is disturbed,
the intensity distribution at the focus spot will
not be the same as the incoming beam anymore.
Instead, the disturbances will alter the intensity distribution such
that it has additional spots and rings separate from the central spot.
By placing a pinhole at the central spot, the extra spots and rings
can be blocked, allowing only the undisturbed wavefront to continue.
To use a spatial filter, you need to match the hole size to the size of
focus point (focus spot) of the objective lens.
A hole diameter much larger than the focus spot diameter may not
block all of the distortion and noise.
On the other hand, a hole diameter much smaller than the focus
spot diameter may produce diffraction rings of concentric circles
around a dispersed beam and reduce the total amount of light
passed by an unacceptable amount.
●Configuration
A spatial filter consists of a microscope objective lens and a pinhole. The objective lens is fitted with a linear motion
stage for changing the distance to the pinhole and a two-axis pinhole holder that positions the pinhole in a plane perpendicular
to the optical axis.
To align the spatial filter holder, refer to the chapter on interferometers. A033
●Pinhole Selection
To use a spatial filter, the pinhole diameter needs to match the focus
spot diameter.
Calculate the focus spot diameter from the diameter of incident
beam and the focal length of the objective lens.
Since the beam spot diameter (2ω0) is defined to be where the
intensity falls to 1/e 2 =0.135 times the peak value, 1.1% of incident
light intensity will be lost if the pinhole is the same diameter.
Moreover, diffraction rings will be generated when the laser beam
irradiates the edge of the pinhole. For this reason, select a pinhole
twice as large as the spot diameter (1/e 2 ).
If the pinhole is twice the diameter of the spot, the loss of incident
light intensity will be 0.03%, and there will be no need to worry
about laser light irradiating on the edge of the pinhole.
Pinhole diameter A=4ω0
●Example of Use
Case (A) He-Ne laser 05-LHP-111 Beam diameter (1/e 2 ) 0.59mm
Objective lens OBL-20 focal length 9mm
⇒ Pinhole of choice is PA-25 (25μm) Appropriate product: SFB-16RO-OBL20-25 C058
Case (B) He-Ne laser 05-LHP-171 Beam diameter (1/e 2 ) 1.02mm
Objective lens OBL-10 focal length 16.56mm
⇒ Pinhole of choice is PA-25 (25μm) Appropriate product: SFB-16RO-OBL10-25 C058
Results
Laser Incident
Beam Diameter d
[mm]
Objective Lens
Focal Length f
[mm]
Calculation Results
A
[µm]
●Notes
The above calculation results are for when the distance between the laser and the objective lens is short. The longer the
distance between the laser and the objective lens, the larger the incident beam diameter becomes due to divergence of
the laser beam.
The focus spot diameter decreases in inverse proportion to the
increase in the incident beam diameter.
Thus a pinhole of smaller size needs to be selected.
Incident beam diameter can be calculated with the formula
shown on the right.
Pinhole
Diameter (selected)
[µm]
Case (A) 0.6 9.00 24.2 25
Case (B) 1.0 16.56 26.7 25
Diffraction rings produced when the focus
spot is smaller than the pinhole diameter
2
2ω0=
πNA
d
NA= 2f
Beam diameter of focus spot (Diameter, 1/e 2 ): 2ω0
Wavelength used:
Focal length of objective lens: f
Incident beam diameter (Diameter, 1/e 2 ): d
Intensity Distribution of Beam Spot
Relative Intensity
1.0
0.8
0.6
0.4
0.2
0.135
0.003
0.0
−6
d=dh+×L
Intensity distribution when the pinhole
diameter matches the focus spot
−4 −2 0 2 4 6
Beam diameter []
Wavelength used 632.8nm
1/e 2
Laser output beam diameter (Diameter, 1/e 2 ): dh
Laser beam divergence (full angle): α
Distance from laser to objective lens: L
98.9% of
full intensity
99.97% of
full intensity
Application
Systems
Optics &
Optical
Coatings
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Filters
Shutter
Others
Fiber
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Beam Shaping
Diffusers
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C057

Holders
Spatial Filter Holders
SFB
Catalog
Code
W4036
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Spatial filters are optical instruments for eliminating distorted laser wavefronts and noise to emit beams in clean
spherical waves. Used in optical systems such as interferometers and holograms where wavefront quality is critical.
◦A well corrected achromat in the output beam of the spatial filter can be used to collimate
the filtered beam.
◦Since the objective lens is fitted with a linear motion stage with micrometer to adjust focal
point position, and the pinhole is fitted with a precision two-axis pinhole holder to adjust
in-plane position, spot light of the laser will pass the pinhole with good reproducibility.
◦Designed with an emphasis on stability, beam movement during adjustment is minimal.
◦A PA-25 (hole diameter 25μm) pinhole is included. Pinholes can be changed to match the
diameter of the laser spot.
◦A Coarse/fine pinhole adjustment (SFB-16DMRO) is also available with high resolution
pinhole (XY) adjustment, making alignment of small pinholes easier. The coarse alignment
screws and the linear stage all include locking mechanisms to further enhance stability
during use.
◦To meet a variety of requirements, the mounting position of the objective lens can be changed,
allowing objective lenses with different magnifications to be used.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Guide
▶SFB-16 and SFB-16DM, which are SFB-16RO and SFB-16DMRO
without posts, are also available.
▶Pinholes can be replaced with different diameter pinholes. If pinhole
diameter is specified at the time of purchase, this product will be
delivered with the preferred size. Pinhole replacement is gratis, but
consult our International Sales Division as there may be extra charges
due to differences in hole diameter. When changing pinhole diameter,
change the number “-25” at the end of the part number to the desired
pinhole size.
▶Post length can be changed. If the length of post is specified at the
time of purchase, this product will be delivered with the preferred
length posts. Post replacement is gratis, but contact our International
Sales Division as there may be extra charges due to differences in
length.
Outline Drawing
SFB-16RO
M6 P1
13.8 24.5
Front/back adjustment clamp
50
2-φ4.5 mounting hole
φ8 counterbore
Objective lens
47.5
17.5
17.5
Front/back adjustment
8
A
60
MAX82
25
60
8
35
MAX97
Left/right
adjustment
Pinhole fixing unit details
(Common to SFB)
φ16
4-M3
PCDφ30
60
φ4
φ13
Hole diameter
2.6 φ25µm
Vertical adjustment
MAX84 7.5
Attention
▶Depending on laser wave length and beam diameter, the combination
of objective lenses and pinholes will vary. Refer to the technical notes
before purchase, and confirm diameter of objective lenses and pinholes.
C057
▶If the distance from the laser to the spatial filter is long, the incident
beam diameter in the spatial filter will be large. Therefore, confirm
the combination of objective lens and pinhole diameter using the value
of the incident beam diameter.
▶Mount the unstamped side of the pinhole to the retaining ring side. If
mounted on the reverse side, adequate adjustment range may not be
available due to objective lens and pinhole interference.
▶Spatial filters should not be used with high-power lasers or pulse
laser due to the high energy density at the spot damaging the pinhole.
▶They cannot be used with lasers in the ultraviolet region. When used
with lasers in the near infrared region, non-reflective films are not
effective and transmittance is poor.
▶When replacing pinholes, remove the objective lens first, to allow
access to the retaining ring.
SFB-16DMRO
M6 P1
13.8
Front/back adjustment clamp
50
2-φ4.5 mounting hole
φ8 counterbore
Objective lens
47.5
17.5
17.5
Front/back adjustment
8
A
60
MAX82
24.5
25
60
8
35
MAX100.5
Vertical adjustment
(Coarse/fine movement)
MAX88 7.5
Left/right adjustment
(Coarse/fine movement)
4-M3
PCDφ30
60
φ20
φ20
Micrometer
Part Number
Objective Lens
Objective Lens
Length A
[mm]
Compatible Incidence
Beam diameter (1/e 2 )
[mm]
Pinhole
Diameter
[µm]
Pinhole XY
Adjustment Range
[mm]
Objective Lens
Front and Back
Adjustment Range
[mm]
Primary material: Steel, Aluminum
Finish: Super Black Chrome, Black Anodized
Pinhole XY
Scale MIN Reading
[mm/DIV]
Objective Lens
Front and Back
Scale MIN Reading
[mm/DIV]
SFB-16RO-OBL10-25 OBL-10 30.5 φ1.0 φ25 ±2 ±3 0.01 0.01 0.56
SFB-16RO-OBL20-25 OBL-20 35.2 φ0.6 φ25 ±2 ±3 0.01 0.01 0.56
SFB-16RO-OBL40-25 OBL-40 36.4 φ0.3 φ25 ±2 ±3 0.01 0.01 0.56
Weight
[kg]
Coarse/Fine Movement
Part Number
Objective Lens
Objective Lens
Length A
[mm]
Compatible Incidence
Beam Diameter (1/e 2 )
[mm]
Pinhole
Diameter
[µm]
Pinhole XY
Adjustment
Range
[mm]
Objective Lens
Front and Back
Adjustment Range
[mm]
Pinhole XY
Coarse Resolution
[mm/revolution]
Primary material: Steel, Aluminum
Finish: Super Black Chrome, Black Anodized
Pinhole XY
Scale MIN Reading
[mm/DIV]
Objective Lens
Front and Back
Scale MIN Reading
[mm/DIV]
SFB-16DMRO-OBL10-25 OBL-10 30.5 φ1.0 φ25 ±2 ±3 0.5 0.0025 0.01 0.6
SFB-16DMRO-OBL20-25 OBL-20 35.2 φ0.6 φ25 ±2 ±3 0.5 0.0025 0.01 0.6
SFB-16DMRO-OBL40-25 OBL-40 36.4 φ0.3 φ25 ±2 ±3 0.5 0.0025 0.01 0.6
Weight
[kg]
C058
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Precision Pinhole/Air Slits
PA/FSL
Catalog
Code
W4037
Thin metal foil with a pinhole or slit of less than 400µm.
Used in spatial filters, laser diffraction experiments and microscopic magnification correction.
◦A precision etching process is used to achieve holes with high circularity and slits with high parallelism.
◦For YAG lasers (1064nm) and CO2 lasers (10.6μm), use pinholes for high energy lasers that are made of high thermal
conduction copper coated with high reflectance gold.
◦Pinholes and slits are pre-mounted in aluminum frames for ease of handling and mounting.
Application
Systems
Optics &
Optical
Coatings
Guide
▶Contact our International Sales Division when pinhole foil or slit foil
without aluminum frames are required.
▶When an aperture φ1mm or above is required, use an iris diaphragm
(IH). C061
▶Pinholes of diameters not listed in the catalog can be made to
order.
Common Specifications
Part Number PA PA-HEL FSL
Hole Geometry Perfect circle Perfect circle Slit
Pinhole Material Nickel Copper Nickel
Foil Thickness [µm] 20±5 20±5 20±5
Pinhole Finish None Gold coat (both faces) None
Damage Threshold
(reference)
Attention
-
50MW/cm 2
(@700nm)
Wavelength Used Any 700nm − 10.6µm Any
Frame Material
Aluminum
Frame Finish
Black Anodized
▶Sometimes light will not pass through if dust has adhered to a
pinhole. When light will not pass through clearly, blow lightly near
the hole of the pinhole with an air blower.
▶The structure of pinhole foil or slit foil is very thin and fragile.
Pressure with the fingers or contact with pointed objects can easily
damage the foil.
▶The holes are usually not visible to the naked eye. A high magnification
microscope can be used to inspect the pinholes and slits.
▶For fixed slits, the vertical direction where the marking of the slit
width faces down is the longitudinal direction of the slits.
▶When pulse lasers are focused, even pinholes for high-power
lasers can be easily damaged. When high-power lasers or pulse
lasers are used, calculate the energy density of the laser spot, and
use after confirming that the damage threshold is not exceeded.
-
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Perfect circle
Outline Drawing
Beam Shaping
Diffusers
Part Number
Pinhole Diameter
[µm]
Weight
[kg]
PA-1 φ1 +1
−0 0.001
PA/FSL
1.58
Filters
Shutter
PA-2 φ2±1 0.001
PA-5 φ5±2 0.001
PA-10 φ10±2 0.001
PA-15 φ15±2 0.001
−0.05
φ16 −0.1
φ9.5
φ4
Others
Fiber
PA-20 φ20±2 0.001
A
PA-25 φ25±3 0.001
PA-30 φ30±3 0.001
Marking of pinhole diameter
Units: µ
0.2
PA-40 φ40±3 0.001
PA-50 φ50±4 0.001
Pinhole foil
φ9.5mm t: 20µm
PA-100 φ100±5 0.001
PA-200 φ200±6 0.001
PA-400 φ400±8 0.001
Perfect Circle for High Energy Laser
Part Number
Pinhole Diameter
[µm]
Weight
[kg]
PA-5HEL φ5±2 0.001
PA-10HEL φ10±2 0.001
PA-15HEL φ15±2 0.001
PA-25HEL φ25±3 0.001
PA-50HEL φ50±4 0.001
PA-100HEL φ100±4 0.001
PA-200HEL φ200±6 0.001
Slit
Part Number
Slit Width
[µm]
Length
[mm]
Weight
[kg]
FSL-5 5±2 3 0.001
FSL-10 10±2 3 0.001
FSL-25 25±3 3 0.001
FSL-50 50±4 3 0.001
FSL-100 100±5 3 0.001
FSL-150 150±5 3 0.001
FSL-200 200±6 3 0.001
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C059

Holders
Two-axis Pinhole/Objective Holders
TAT
Catalog
Code
W4038
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Holders for mounting a precision pinhole (PA) or precision air slit (FSL) and to adjust the position of
the pinhole. Can be used to mount microscope objectives when objective lens adapters (TAT-18OA)
are used.
◦Precision ball guide allows smooth travel and fine positioning.
◦Two types of adjusters are available. The micrometer type (TAT-16, TAT-16RO) allows smooth adjustment down to a few
microns. The differential micrometer type (TAT-16DM, TAT-16DMRO) that allows fine adjustment to less than a micron.
◦A unique two-axis integrated guide makes the body only 16mm thick, allowing placement of lenses in proximity to both
the front and back of a pinhole.
◦Two-axis pinhole/objective holders provide φ9mm transmission diameter. This transmission diameter makes this product
appropriate for positioning of various devices. For mounting other devices, consult our International Sales Division.
Guide
▶Fiber optics holders (FOP) with integrated optical fiber receptacles
(FC connector, SMA connector) are also available.
C074
▶Two-axis pinhole/objective holders with large transmission diameter
(TAT-30) and simplified pinhole holders (AH-1) are also available.
W4514
Attention
▶Pinholes (PA) are not included with TAT holders. Purchase pinholes
together with two-axis pinhole/objective holders. C059
▶Retaining rings are included with TAT holders.
Adapters for pinholes are not required.
▶TAT-16 and TAT-16DM do not include a post or post stand.
Use TAT-16RO or TAT-16DMRO to include a post.
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Outline Drawing
TAT-16
MAX91.5
TAT-16RO
Hexagon socket head cap screw M6×12…1 screw
Hexagonal socket head cap screw M4×10…2 screws, Accessory: Retaining ring
40
25
7 2-φ4.5
16 12
59
32
MAX91.5
59
32
MAX84
4-M3 depth 5
PCDφ30
4-M3 depth 4
32
45
59
30
34
φ16
M6 P1, Accessory: Retaining ring
MAX84
4-M3 depth 5
PCDφ30
4-M3 depth 4
φ16
6
TAT-16DM
MAX95.5
62
32
TAT-16DMRO
MAX95.5
16 12
62
32
Hexagon socket head cap screw M6×12…1 screw
Hexagonal socket head cap screw M4×10…2 screws, Accessory: Retaining ring
40
25
7
32
45
62
2-φ4.5
MAX88
4-M3 depth 5
PCDφ30
4-M3 depth 4
30
34
φ16
6
M6 P1, Accessory: Retaining ring
MAX88
4-M3 depth 5
PCDφ30
4-M3 depth 4
φ16
Pinhole mount enlarged view
(Common to TAT)
φ16
4
Pinhole
(Optional)
φ13
Pinhole side
2.6
TAT-16 Series
Objective Lens Adapters
TAT-18OA
Hexagon socket head cap screw
M3×8…4 screws
M20.32
4-φ3.5
P0.706
φ6 counterbore
PCDφ30
φ38
*Objective lenses are optional.
4
8
30
30
32
45
59
60
12.5
32
45
62
60
12.5
φ12
φ12
Specifications
Part Number
Options
specified*
Pinhole XY
Adjustment Range
[mm]
Coarse Resolution
[mm/Rotation]
Fine Resolution
[mm/Rotation]
Scale MIN Reading
[mm/DIV]
TAT-16 UU ±2 0.5 - 0.01 0.26
TAT-16RO − ±2 0.5 - 0.01 0.32
TAT-16DM UU ±2 0.5 0.05 0.0025 0.3
TAT-16DMRO − ±2 0.5 0.05 0.0025 0.36
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Primary material: Iron
Finish: Super Black Chrome
Primary material: Aluminum
Objective Lens Adapters
Finish: Black Anodized
Part Number Compatible Holders Compatible Objective Lenses
Weight
[kg]
TAT-18OA TAT-16 series OBL, EPL, EPLE 0.02
Weight
[kg]
C060
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Iris Diaphragm Holders
IH
Catalog
Code
W4039
Iris diaphragm holders that can change the aperture size without changing the center of the aperture.
Uses include changing the depth of field by controlling the lens aperture in imaging systems and
passing necessary laser beam while blocking optical feedback or stray light in laser experiments.
◦Various aperture sizes are available to suit a variety of requirements.
◦The adjustment lever also functions as a clamp to fix the aperture diameter.
◦Aperture diameter can be adjusted roughly using included scale.
Application
Systems
Optics &
Optical
Coatings
Guide
▶Iris diaphragms (IH) without mount or scale are also available.
C062
▶Post length can be changed. If the length of post is specified at the
time of purchase, this product will be delivered after replacing posts.
Post replacement is gratis, but contact our International Sales Division
because there may be extra charges due to differences in length.
Attention
▶Aperture diameter can be changed by moving the adjustment lever
lightly. The adjustment lever can break if pressed with excessive
force exceeding the adjustment range, or pressed on the wrong
direction. Handle with care.
▶The iris diaphragm consists of thin metal blades. Heat from highpower
lasers may deform the blades and cause them to seize. Not
recommended for use with high-power lasers. (recommended max
power: CW 500mW or less, pulse 30mJ or less)
▶The scale is only a rough guide. There is considerable backlash due
to the structure of the iris diaphragm. There may be a difference
between the hole diameter of iris diaphragm and the scale.
▶The iris diaphragm is a very delicate mechanism.
Do not push or pull on the blades.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Outline Drawing
Guide
IH-R
IH-08R/12R/15R
IH-22R/36R/50R
IH-30
M6 P1
Mirrors
Adjustment lever
M4 P0.7
E
M6 P1
E
18.4 9.5
9.5
φ4
Adjustment lever
Lenses
Prisms
C
(A)
φG
φG
φ30
φ50
φ32
φ30
Polarizers
Lasers
J
B
P
Iris diaphragm side
4
P
Iris diaphragm side
24.5
Beam Shaping
Diffusers
K
I
D
F
1
50
F
60
60
7.6
Iris diaphragm side
Filters
Shutter
Others
φ6
Fiber
Part
Number
A B C D E F
MAX Aperture Diameter
φG
φ12
(Units: mm)
I J K P
IH-08R 38.5 20 10 20 10 4.7 φ8 15 2.5 2-φ2.4 mounting hole, φ4.2 counterbore 4.9
IH-12R 41 20 12.5 25 10 5.3 φ12 20 2.5 2-φ2.4 mounting hole, φ4.2 counterbore 5.2
IH-15R 48 25 15 30 10 5 φ15 20 2.5 2-φ2.4 mounting hole, φ4.2 counterbore 5.2
IH-22R 57.5 30 19 38 12 6 φ22 28 10 2-φ4.5 mounting hole, φ8 counterbore 6.2
IH-36R 75 35 30 60 12 6.4 φ36 44 10 2-φ4.5 mounting hole, φ8 counterbore 6.9
IH-50R 95 45 40 80 14 7.4 φ50 60 10 2-φ4.5 mounting hole, φ8 counterbore 7.9
φ12
φ8 − φ50
Part Number
Options
specified*
Aperture Diameter
MAX
[mm]
Primary material: Aluminum
Finish: Black Anodized
MIN
[mm]
Weight
[kg]
IH-08R N φ8 φ0.7 0.03
IH-12R N φ12 φ0.8 0.03
IH-15R N φ15 φ0.9 0.09
IH-22R N/EE/UU φ22 φ0.9 0.10
IH-36R N/EE/UU φ36 φ1.3 0.15
IH-50R N/EE/UU φ50 φ1.5 0.20
* For specifying options, please refer to “Conversion of Posts, Post Holders
and Pedestal Bases of Holders”. C007
φ30
Part Number
MAX
[mm]
Aperture Diameter
MIN
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
IH-30 φ30 φ1 0.12
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C061

Holders
Iris Diaphragm
IDC/IH-30N
Catalog
Code
W4040
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
An iris diaphragm is used to adjust an aperture without changing the center of the aperture.
Primarily used in the limited spaces of optical instruments to set an aperture size.
◦Bare, unmounted iris diaphragms are ideal for applications where mounted irises are too large or otherwise not appropriate.
◦The IDC series has a thin body, which allows placement of optics in proximity to the front and back of the iris diaphragm.
◦Various aperture sizes are available to suit the usage.
◦The adjustment lever also functions as a clamp to fix the aperture diameter.
Guide
▶Iris diaphragm holders (IH-30/IH-R) which can be fixed to the post
holder are also available. C061
▶Fixed pinholes (PA) with hole diameter 400μm or less are also available.
C059
Attention
▶Aperture diameter can be changed by moving the adjustment lever
lightly. The adjustment lever can break if pressed with excessive
force exceeding the adjustment range, or pressed on the wrong
direction. Handle with care.
▶The iris diaphragm is a very delicate mechanism. Do not push or pull
on the blades.
▶The iris diaphragm consists of thin metal blades. Heat from highpower
lasers may deform the blades and cause them to seize. Not
recommended for use with high-power lasers. (recommended max
power: CW 500mW or less, pulse 30mJ or less)
▶The iris diaphragm does not have a scale. Use the iris diaphragm
holder when a scale is needed.
Outline Drawing
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
IDC
T
0
−0.05
A
L
Aperture diameter MIN
Aperture diameter MAX
IH-30N
32
30
9.5
4
Adjustment lever
50
6
12.6
2.6
30
M34 P0.75
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
S Iris diaphragm side Adjustment lever
Part Number
φA
[mm]
T
[mm]
L
[mm]
S
[mm]
IDC-000 φ14.8 4.5 11 1.30
IDC-001 φ19.8 5 11 1.25
IDC-003 φ24 5 11 1.45
IDC-009 φ33 5.5 11 1.43
IDC-017 φ50 6 15 1.60
IDC-025 φ70 7.5 15 2.05
Iris diaphragm side 2.4
φ8 − φ50
Part Number
Aperture Diameter
MAX
[mm]
MIN
[mm]
Primary material: Aluminum
Finish: Black Anodized
Number of
Blades
[blades]
Weight
[kg]
IDC-000 φ8 φ0.7 9 0.003
IDC-001 φ12 φ0.8 11 0.005
IDC-003 φ15 φ0.9 12 0.007
IDC-009 φ22 φ0.9 14 0.012
IDC-017 φ36 φ1.3 16 0.024
IDC-025 φ50 φ1.5 16 0.062
φ30
Part Number
Aperture Diameter
MAX
[mm]
MIN
[mm]
Primary material: Aluminum
Finish: Black Anodized
Number of
Blades
[blades]
Weight
[kg]
IH-30N φ30 φ1 10 0.03
C062
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Adjustable Slits
PSL/SLX
Catalog
Code
W4041
Adjustable slits have two razor sharp opposing blades that can be adjusted to vary the air gap
between them.
Typical uses include spectrophotometers, Schlieren optical systems and diffraction experiments.
Especially useful in spectrometry and Schlieren optical systems where the slit can be varied to
optimize the light intensity and resolution of the instrument.
◦A precision positioning mechanism keeps the blades straight and parallel with minimum incremental motion on the order
of tens of microns.
◦Two types are available. The PSL-0 is intended for ultraviolet, visible and infrared radiation. The SLX-1 is intended for use
with X-rays and has tantalum blades to efficiently block X-rays.
◦The PSL-0 moves the blades left and right simultaneously, enabling adjustment of slit width without changing the center
position of the slit.
◦The SLX-1 moves the blades independently, left and right, or up and down, thus enabling change of slit position and rectangular
shape.
The slit length on the PSL-0 is adjusted by sliding the slit length adjustment plate.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Guide
▶A Micrometer head type (PSL-2) that allows adjustment of slit width
in increments of less than 10 microns is also available.
W4515
▶Post length can be changed. If the length of post is specified at the
time of purchase, this product will be delivered after replacing posts.
Post replacement is gratis, but contact our International Sales Division
because there may be extra charges due to differences in length.
Attention
▶When high-power lasers or pulse lasers are focused, holes might
appear in the blades. Use after lowering laser output or widening the
beam.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Lenses
Outline Drawing
Prisms
PSL-0
M6 P1
SLX-1
M6 P1
Blade adjustment (vertical)
Polarizers
26
5
Slit side
50 18~20
φ16
Slit width adjustment knob
Blade
66
36
Blade adjustment (right)
Lasers
Beam Shaping
Diffusers
Filters
25
4
13
20
Slit length
Adjustable blade
80
φ20
60
46
26
26
33
60
66
9
18
Blade adjustment (left)
Slit side
Shutter
Others
Fiber
φ20
φ12
φ12
For UV/Visible/IR
Part Number
Options
specified*
Blade Material
Slit Width
Variable Range
[mm]
Slit Width
Scale MIN Reading
[μm/DIV]
Slit Length
Variable Range
[mm]
PSL-0 EE/UU Stainless steel (No Finish) 0 − 4 20 0 − 12 0.24
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Primary material: Aluminum, Brass
Finish: Black Anodized, Chrome Plated
Weight
[kg]
For X-ray
Part Number
Options
specified*
Blade Material
X-ray Resistance
[keV/cm 2 ]
Blade
Variable Range
[mm]
Blade Position
Scale MIN Reading
[μm/DIV]
Primary material: Aluminum
Finish: White Alumite
SLX-1 UU Tantalum (No Finish) 300 0 − 4 10 0.52
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Weight
[kg]
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C063

Holders
Filter Wheels
NDWH
Catalog
Code
W4042
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Lenses
This holder mounts several filters in a turret allowing different filters to be placed into the optical
axis by rotating the turret. It can also be used for adjusting the transmitted light intensity by
switching ND filters of different transmittance, or for switching transmitted wavelength by mounting
color filters.
◦Two types are available. The NDWH-15S has a single turret that holds six filters. The NDWH-15W has two turrets that
hold six filters each.
◦Each type is also available with either a fixed base (NDWH-15S/NDWH-15W) or mounted on a post (NDWH-15SRO/
NDWH-15WRO).
◦The turret has an index every 30 degrees (point where rotation stops). Using this index, the filter can be located at the
positions 0 degrees, 30 degrees, 60 degrees, and 90 degrees.
Guide
▶The filter wheels do not include ND filters. Select from among the ND
filters (AND-15C/FND-15C02). B213
▶Rotary reflection adjustable ND filter holders (NDHN) to continuously
change transmitted light intensity are also available. B224
▶Contact our International Sales Division if the filter case has been lost
or spare cases are required.
▶Post length can be changed for NDWH-15SRO and NDWH-15WRO.
If the length of post is specified at the time of purchase, this product
will be delivered after replacing posts. Post replacement is gratis, but
contact our International Sales Division as there may be extra
charges due to differences in length.
Attention
▶In the case of the lowest filter of the lens turret, the strut of the holder
interferes and light cannot pass through. Except for this position, all
the indexes let light pass through.
▶Special tools are required when removing the filter case. When using
a φ25.4mm filter after removing the filter case, a retaining ring
(NR-25.4) is required. Please contact our International Sales Division
for more information.
▶It is necessary to mount post types with offset for the optical axis.
The amount of offset will vary depending on the position of lens turret
holes.
Prisms
Polarizers
Outline Drawing
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
NDWH-15S
NDWH-15SRO
50
Hexagon socket head cap screw M6×8…2 screws
Expanded view of filter case
M6 P1
(NDWH-15W is the same)
8
7 1
12
7
28.5
46
φ15 +0.3
+0.2
M26.25 P0.75
φ12
Clear
aperture
Delrin ring
Retaining ring
NDWH-15W
NDWH-15WRO
50
Hexagon socket head cap screw M6×8…2 screws
M6 P1
12
7
38
53
Fiber
Filter turret
28.9
M26.25 P0.75
8 20.5 10
12
Filter case
Filter turret
28.9
M26.25 P0.75
8 22
12 12
8
Filter
case
25
35.6
50
φ25.4 +0.3
+0.2
25
35.6
50
φ25.4 +0.3
+0.2
96
3
φ92
Clear aperture φ22
φ32
96
φ92
Clear aperture φ22
14.4
82
25
10
60
9.5
M6 P1
3
14.4
82
25
10
60
9.5
M6 P1
For NDWH-15S
No post
φ12
For NDWH-15W
No post
φ12
Specifications
Part Number
Options
specified*
Compatible Optics Diameter
[mm]
Compatible Optics Max
Thickness
[mm]
Max Number of Mounts
[Units]
Primary material: Aluminum
Finish: Black Anodized
NDWH-15S EE/UU φ15 3 6 0.2
NDWH-15SRO − φ15 3 6 0.26
NDWH-15W EE/UU φ15 3 12 0.34
NDWH-15WRO − φ15 3 12 0.4
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal Bases of Holders”. C007
Weight
[kg]
C064
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Filter Holders
FHS/FH
Catalog
Code
W4043
Holders for optics that require frequent placement and removal in optical experiments such as ND
filters and color filters. Filters with different plate thickness can be changed easily.
◦The small filter holder (FH-10) holds a filter by clamping it between the main body and two spring loaded knobs. After
mounting the holder, pull the knobs to create a space between the main body and the knobs then insert a filter in that
space. When the knobs are released, springs return the knobs, and the filter is clamped between the main body and the
knobs.
◦Filter holders can be used with both round filters and rectangular filters. (Note, the FH-10 can only be used with round
filters.)
◦FH-25 and FH-50 are ideally suited for fine intensity adjustment and transmitted wavelength adjustment because these
can hold several filters simultaneously.
Guide
▶To hold additional filters with the FH-25 and the FH-50 contact our
International Sales Division for more information.
▶Post length can be changed. If the length of post is specified at the
time of purchase, this product will be delivered after replacing posts.
There are fees for post replacement in order to use special posts.
▶Framed ND filters (MAN, MFND) which are ND filters of various
transmittances fitted with filter adapters (FAD) are also available.
B213, B219
Attention
▶When thin filters are placed in FH-25 or FH-50, the filters might move,
causing the optical axis of the optical system to shift by minute
amounts. When used in precision experiments, mount filters in
adapters (FAD).
▶Because the posts for FH-25 and FH-50 have a special shape, they
cannot be replaced with standard posts (RO-**-**). Contact our
International Sales Division regarding different length posts.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Outline Drawing
FHS-25 M6 P1 FHS-50 M6 P1 FH-10 M4 P0.7
2-2.4
10
25
10
17
Spring clip
28
60 20
50
12
Knob
37
MAX thickness 5
Spring clip
MAX thickness 5
Knob
0~3
24 6 8 MAX11.5
20
2-3.5
30
60
4
5
40
10
60
20 10
9
16
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
12
FH-25 Custom shape special post FH-50 Custom shape special post
R11.5
R25
84
5
3
R24
R35
94
12
5
Adapter
FAD-20
25
17
5
17
6
Filter holder adapter
Filter retaining ring
M20.6
P0.5
FAD-50
52
47
5
Filter holder adapter
Filter retaining ring
47
M50.6 P0.5
Shutter
Others
Fiber
60
60
0.4
3.2
1.4
0.4
3.2
1.4
12
12
Filter Holders
Part
Number
Options
specified*
Compatible Optics
Dimensions
[mm]
Thickness
[mm]
Primary material: Aluminum
Finish: Black Anodized
MAX Number
of filter
[Units]
Weight
[kg]
FHS-25 N/EE/UU φ25, □25 0 − 5 1 0.06
FHS-50 N/EE/UU φ50, □50 0 − 5 1 0.08
FH-10 N φ10 − φ20 0 − 3 2 0.02
FH-25 − φ25, □25
0 − 3
(MAX three units) 0− 5
4 0.10
φ50 − φ52
FH-50 −
□50
0 − 5 5 0.11
* For specifying options, please refer to “Conversion of Posts, Post Holders and
Pedestal Bases of Holders”. C007
Adapter
Part Number
Diameter
[mm]
Compatible Optics
Primary material: Aluminum
Finish: Black Anodized
Thickness
[mm]
Weight
[kg]
FAD-20 φ20 0 − 3 0.01
FAD-50 φ50 0 − 3 0.01
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C065

Holders
Automatic Shutters
High Power Laser Shutter Unit
SSH
SHPS
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
SSH
Catalog
Code
W4045
These electromagnetic shutters are intended for applications
including remote on/off of laser light and for timed exposures.
Please connect a dedicated controller to use these shutters.
◦SSH-S is intended for small diameter laser beams (φ4mm or less) while
SSH-25RA is intended for use with large diameter imaging lens systems
(φ24mm or less).
◦Typical applications include holography, exposure of photosensitive
materials and as safety measures of laser optical systems.
◦By removing the post, the shutters can be installed directly on a baseplate
with M3 threads.
◦Shutters can be operated with a PC via the two-axis shutter controller
(SSH-C2B).
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Guide
▶We can change the post length. Please specify the post length when
you place an order, then we will deliver the product after replacing
the post with one with your specified length. Replacement of the
post is free of charge, but we may charge the difference in price
depending on the length. Please contact our International Sales
Division for more information.
Attention
▶Automatic shutter holders cannot be used with high power lasers
or high power pulse lasers. Please use high power laser shutters
(SHPS).
▶Please always use these automatic shutters with the dedicated
controller. Otherwise, these shutters may not operate properly.
▶SSH-25RA cannot operate with the old type shutter controllers
(SSH-C4B, SSH-C1R). SSH-S can operate with SSH-C4B.
▶These shutters and controllers do not come with cables.
▶Please order the dedicated cables along with them.
SHPS
Outline Drawing
60
41
50
13
Cable
insertion slot
SSH-S
8
(Clear aperture)
60 40
32
20
Specifications
Part Number
70
40
32
Shutter
Type
12
2-3.5
Mounting
hole
SSH-25RA
24 (Clear aperture)
13
Cable
insertion
slot
75
60
40
32
40
Aperture
Compatible
Diameter
Controller
[mm]
4
40
32
Shutter
Speed
[s]
80
33.5
4-3.5
mounting hole
6 counterbore
12
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
SSH-S Solenoid type φ8 SSH-C2B about 0.7 – 0.28
SSH-25RA Leaf type φ25 SSH-C2B 0.1 – 0.5
Catalog
Code
W4110
These electromagnetic shutters switch an optical path using
a laser mirror for high power, and are compatible with high
power pulse lasers. Selection of a wavelength that is a
multiple of YAG laser frequency is possible.
◦Typical application is as external shutters used in experiments where
stable laser oscillation is required.
◦When the power supply is cut off or the wiring is disconnected, laser light
is shut off for safety.
◦While the shutter is closed, laser light is safely terminated by beam dumps.
Guide
▶We can make this product compatible with wavelengths or beam diameters not
listed in the catalog.
▶Please order the dedicated shutter controller (SSH-C2B) along with this product.
Outline Drawing
SHPS
75 40
50
(For M6 Optical Table)
Laser Input
Hexagonal socket head cap screw M6×12…4 screws
Flat washer
Positioning 3 hole
for knock pin
100
(For M6 Optical Table)
110
Cable insertion slot
75
Laser Output
50
Beam Dumps
37.5
Attention
▶The dedicate cable (SSH-CA2-LOAA) is not included. Please order
the cable along with the controller.
▶Before ordering this product, please make sure that the energy
density of your laser does not exceed the laser damage threshold.
▶Please always use this shutter unit with the dedicated controller.
Otherwise, these shutters may not operate properly.
▶When the shutter is closed, the sound of metal being hit might
come out from the beam dumps. The sound is caused by a shock
wave generated when laser light converts to heat on the metal
surface. It is not the sound of a mirror breaking in the shutter unit.
▶The beam dumps might become very hot when a high power laser
is used. Please be careful of burns.
Specifications
Part Number
Wavelength
Range
[nm]
Aperture
Diameter
[mm]
Laser Damage
Threshold
(Typical)
[J/cm 2 ]
Laser Power
Limit
[W]
Primary material: Aluminum
Finish: Black Anodized
Shutter
Speed
[ms]
Weight
[kg]
SHPS-266 266 φ8 5

Catalog
Shutter Controller SSH-C W4105
Code
Controllers for driving SSH electromagnetic shutters.
It can operate two units of different types of electromagnetic shutters concurrently.
◦By switching the shutter type, this controller can control the SSH-R (old blade type), SHPS (for high-power laser),
and BSH (for bio) shutters in addition to SSH-25RA and SSH-S.
◦What is required for changing settings such as shutter speed, delay time, and repeat count is only the control knob.
◦With the dedicated software, shutter control and change of various settings can be done with a PC.
◦This controller allows registration of control signals (up to three types) for unknown mechanical electromagnetic
shutters (only those for which control signal formats are released), and can close and open the shutters according
to their performance. (Please check the instruction manual and make sure that setting of control signals is possible
before use.)
Guide
▶Cables compatible with the old type shutters are also available.
▶USB cables (USB-2) and RS232C cables (RS232C/STR-3) are also
available to connect with a PC.
Attention
▶This shutter controller does not come with cables. Please check
the shutter specification and select the appropriate cable.
▶A shutter does not open and close properly if the shutter connected
to the controller is different from the shutter type selected with
the controller. Please specify the correct shutter type.
▶To use a shutter other than Sigma Koki shutters, please set the
appropriate voltage and pulse time. Wrong settings may damage
the shutter.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Shutter Controller
Part Number
SSH-C2B
Outline Drawing
Mirrors
Lenses
Part Number
Controllable Number of Units
Power Source
2ch
DC24V
120VA
Prisms
Polarizers
Power consumption 5 – 40ºC
Shutter type switching
TIMER/BULB mode switching
Functions
External signal polarity switching
Timer setting
Number of times of opening and closing integration
Shutter Control Voltage * 1 5V – 24V
Shutter control current * 2 each CH 0.5A (current limit 1A)
Shutter Speed
0.2ms – 99990s
Delay Time
0.1ms – 999.9ms
External input
0 – 5V Input 2ch, Interlock contact input
15 75
220
23
180 25
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
External output
0 – 5V Output 2ch
Interface
RS232C (D-sub 9 pin female)
Display
LCD ( with white backlight)
Accessories
AC Adapter (DC24V), Interlock connector
*1 The voltage range of control signals that can be set when an unknown
shutter is used.
*2 The current is determined depending on the resistance value of the
electromagnetic shutter to be connected.
Shutter Cable
Product Name Shutter Cable for SSH-25RA Shutter Cable for SSH-S Extension cable for shutter
Part Number SSH-CA2-LORA SSH-CA2-LOAA SSH-CA2-LOAB
Cable Length [m] 2 2 2
Connector
(controller side)
Connector
(shutter side)
One-touch lock type plug
(4-pin male)
One-touch lock type
Round plug
(4-pin male)
One-touch lock type plug
(4-pin male)
One-touch lock type plug
(4-pin male)
One-touch lock type plug
(4-pin male)
One-touch lock type
Cable with socket
(4-pin female)
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C067

Holders
Square Optics Holders
Camera Holders
KMH
CMH
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
KMH
Holders for square plates such as flare plates (BBP), test targets and square filters.
◦Designed to gently hold glass plates, the holder include a soft cork lined back plate and resin tipped clamping screws.
Guide
▶Use the sliding cylindrical lens holder (CHA) to hold rectangular
lenses. C044
▶Post length can be changed. If the length of post is specified at the
time of purchase, this product will be delivered after replacing posts.
Post replacement is gratis, but consult our International Sales Division
as there may be extra charges due to differences in length.
Attention
▶Glass can break if screws are over tightened.
Outline Drawing
Catalog
Code
W4047
Motoeized
Stages
KMH
M6 P1
MIN B
G
Light
Sources
Index
Guide
Mirrors
Lenses
Prisms
Polarizers
Specifications
Part Number
Options
specified*
Compatible Optics
Dimensions
[mm]
Primary material: Aluminum
Finish: Black Anodized
Compatible Optics
Thickness
[mm]
Weight
[kg]
KMH-30 − □10 − □45 3 − 5 0.08
KMH-80 N/EE/UU □45 − □100 1 − 7 0.11
KMH-150 N/EE/UU □100 − □180 6 − 17 0.38
* For specifying options, please refer to “Conversion of Posts, Post Holders
and Pedestal Bases of Holders”. C007
Part Number
MIN B
(mm)
E
φJ
MAX C
(mm)
MIN C
(mm)
60 F
E
(mm)
φ12
F
(mm)
G
(mm)
C
I
H
H
(mm)
I
(mm)
φJ
(mm)
KMH-30 10 5 3 30 15 12 10 3.5 φ12
KMH-80 45 7 1 80 22 15 12.5 4.5 φ12
KMH-150 100 17 6 150 30 30 15 10.5 φ20
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
CMH
W4104
Platforms used for fixing a still camera or video camera.
Since these platforms come with a post, they allow a camera to be used as a part of an optical system.
◦Please loosen the clamp to freely change the direction of the camera, and tighten the clamp to fix the direction.
◦These platforms can mount any camera because they use the mounting screw standard commonly used for cameras.
◦Posts with inch-based screws which can be directly mounted on a camera are also available. D048
Catalog
Code
Outline Drawing
CMH-1
1/4-20UN (inch male thread)
CMH-2
1/4-20UNC
(inch male thread)
Specifications
Part Number
Options
specified*
Load Capacity
[N]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
52
1/4-20UNC
(camera screw)
78 5
143
Clamp
φ55
1/4-20UNC
(camera screw)
100 5
165
Clamp
CMH-1 N 29.5 (about 3kgf) 0.17
CMH-2 N 40 (about 4kgf) 0.34
60
60
* For specifying options, please refer to “Conversion of Posts, Post Holders
and Pedestal Bases of Holders”. C007
φ12
φ12
C068
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Light Shade plate
BBP
Catalog
Code
W4048
Can be used as the light shield for stray light of laser in optical experiment, and also used as the
screen for interferometer or schlieren optics.
◦BBP-2505B is added the scale and it allows easy adjustment of the optical axis of laser beam.
◦BBP-3130B can block out the light in a wide area.
◦With BBP-2505B and BBP-3130B, base unit with magnet is attached to fix easily.
◦BBP-200 is appropriate for observation of bright profile view as surface finished over white matte.
◦Put a graph paper or black paper to suit the customer’s purpose.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
BBP-200
Light
Sources
Guide
▶Appropriate the Square Optics Holders (KMH-80) for BBP-200 to
fix.
Index
Attention
▶Be sure to wear laser safety goggles. When high-power laser or
high energy pulsed laser are exposed to the light shade plate
directly, it is danger scattering light by Light Shade plate enters to
eye directly.
Guide
Mirrors
Lenses
Prisms
Polarizers
Outline Drawing
BBP-200 BBP-2505B BBP-3130B
2
2
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
10
200
250
240
300
3
200
10
3
20
32
50
Magnetic stand
32
3
32
100 100
300
Magnetic stand
Specifications
Part Number Accessory Scale
Primary material: Aluminum
Finish: Clear anodize (BBP-200 only), Black anodize
BBP-200 - - 0.32
BBP-2505B Magnetic stand (1pc) Both sides 0.18
BBP-3130B Magnetic stand (2pcs) - 0.70
Weight
[kg]
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C069

Holders
Test Target Holders
Beam Dumps
TGH
BD
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
TGH
◦The cross wires are retractable and are placed in the center of posts to enable good repeatability.
◦If two target holders are placed leaving an interval, they can be used as a laser beam tilt adjustment jig.
Guide
▶Iris diaphragm (IH) convenient for visible light lasers is also available.
C061
Attention
W4049
Holders used for optical axis adjustment of non-visible light laser etc. Fix IR sensor cards or van paper with spring
clips, insert cross wires in the laser light to confirm the positional relationship of the shadow of beam and cross wire.
Catalog
Code
▶Use IR sensor cards with large light receiving surface. Card type
IR/UV sensors (SIRC-1 or SUVC-1) cannot be used.
Actuators
Motoeized
Stages
Outline Drawing
TGH
M6 P1
42
φ30
11.5 MAX thickness 3
3.5
Spring clip
32
Light
Sources
Index
Specifications
Part
Number
Options
specified*
Clear Aperture
[mm]
Primary material: Aluminum
Finish: Black Anodized
MAX Holding
Thickness
[mm]
Weight
[kg]
TGH-30 N/UU φ30 3 0.09
60 51
30
15
Guide
* For specifying options, please refer to “Conversion of Posts, Post Holders
and Pedestal Bases of Holders”. C007
φ12
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
BD
Beam Dumps safely terminate the beam of high-power lasers and high energy pulse lasers.
The laser light is scattered and absorbed in the beam dump and converted into heat.
◦Because the incident laser beam is scattered onto a conical surface, the light scatter back to the incident side can be
greatly attenuated.
◦BD-40 for small beam diameter (φ5mm or less) and BD-80 for large diameter beams (φ30mm or less) are available.
Guide
▶High-power laser shutters (SHPS) combining optical path switching
shutter and beam diffuser are available. C066
Attention
Catalog
Code
W4050
▶When used with a high-power laser, the beam diffuser might become
quite warm. Be careful not to touch the beam diffuser directly.
▶When used with a high energy pulse laser, the finish of the conical
surface may be lost. The volume of scattering will increase
somewhat, but as long as the conical shape is not changed, the
beam diffuser will maintain performance.
▶When a repeatedly oscillating high energy pulse laser irradiates the
beam diffuser, the beam diffuser sometimes makes a sound like it
is striking metal. This is due to the shock wave produced when the
laser changes to heat on a metallic surface, not damage on the
beam diffuser.
Specifications
Part
Number
Options
specified*
Primary material: Aluminum
Finish: Black Anodized
Aperture Diameter
[mm]
Weight
[kg]
BD-40 N/EE/UU φ10 0.15
BD-80 N/EE/UU φ52 0.65
* For specifying options, please refer to “Conversion
of Posts, Post Holders and Pedestal Bases
of Holders”. C007
BD-40
20
60
Outline Drawing
M6 P1
Anti-reflective
thread processing
Laser beam
φ42
φ10
20
40
BD-80
60 40
M6 P1
Anti-reflective
thread processing
Laser beam
φ81
φ52
60
80
φ12
φ20
C070
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Fiber Optics Mounts
FOM
Catalog
Code
W4106
Fiber holders equipped with an adjustment mechanism for three axes including vertical, horizontal
and focus direction. These holders can handle fibers with various connectors by replacing adapters.
◦The large slit on the adapter cylinder enables connection of various fiber connectors inside the adapter cylinder.
◦It is capable of rotating the polarizing axis of a polarization-preserving fiber for 360 degrees. (See Attention)
◦The focus adjustment lever of the 3-axis holder can move the tip of a fiber in the optical axis direction.
◦Each adjustment mechanism of the 3-axis holder has a clamp mechanism to fix adjustment positions.
◦Adapters compatible with the FC, SMA, and ST connectors of various fibers are available.
Guide
▶Fiber holders equipped with tilt and rotational adjustment mechanisms
(FOP-2, FOP-2-SMA) are available.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Attention
▶Turning the adapter fitted in the 3-axis holder causes the eccentricity
of the fiber core. When turning the adapter, please make sure
to do the fine adjustment of the XY axes of the holder.
▶Pulling a fiber cord hard may cause misalignment of the holder.
▶Readjustment is necessary every time a fiber is taken out.
▶This product does not come with a post. If a post is necessary,
please purchase a post (PO) separately.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Outline Drawing
Index
FOM-3
51 MAX 20
Adjustment
screw clamp
25
M6 P1
Vertical direction
adjustment screw
Focus Adjustment lever
50 MAX 21 47
Horizontal
Adjustment screw
Adjustment screw clamp
Focus clamp
Adapter fixing knob
φ17.3
Adapter fixing knob
FOM-ADP-SMA
φ17.3
FOM-ADP-FC
φ17.3
47 12
47 12
φ26
φ26
Guide
Mirrors
Lenses
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
12.3
6.15
M6 P1 depth 5.5
FOM-ADP-ST
47
12
Shutter
Others
18.2 18.2 2-8-32UNC depth 3.5
φ17.3
φ26
Fiber
3-axis Holder
Part Number
Options
specified*
Centering Adjustment
Range
[mm]
Resolution
[mm/rotation]
Primary material: Aluminum
Finish: Black Anodized
Focus Adjustment
Range
[mm]
Weight
[kg]
FOM-3 UU □2 0.25 ±3 0.14
* For specifying options, please refer to “Conversion of Posts, Post Holders and Pedestal
Bases of Holders”. C007
Attaching the adapter
3-axies Holder
Adapter locking knob
Adapter
Primary material: Brass
Adapter
Finish: None
Part Number
Compatible Fiber Connecter
Weight
[kg]
FOM-ADP-FC FC 0.05
FOM-ADP-SMA SMA 0.05
FOM-ADP-ST ST 0.044
◦Please connect a fiber connector into the adapter cylinder.
◦Please insert the adapter into the 3-axis holder, and secure
it by using the adapter locking knobs located on both ends
of the 3-axis holder.
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C071

Holders
Mini-Fiber Optics Holders
MFH
Catalog
Code
Catalog
Code
W4523
W4524
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Holders used for holding optical fiber strands of various jacket diameters (coating diameters).
By replacing the mounting adapters (MFH-ADP), these holders can mount on various stages in
addition to two-axis pinholes/objective holders.
◦Using the V groove and the resin clamps, these holders hold the tip of an optical fiber where the coating is removed for
approximately 15mm. The V groove and the resin clamps also fix the 900μm jacket right next to the portion to immobilize
the optical fiber.
◦The resin clamps have built-in magnetizable set bolts, and gently fasten an optical fiber by the magnetic force of the
magnets of these fiber holders.
◦There is a keyway on the bottom of these holders. The keyway can be installed on the keys of various mounting adapters
(MFH-ADP) to slide back and forth. The holders are securely fastened on the mounting adapters with set bolts.
Attention
▶These holders cannot be installed in the fiber alignment systems (DAU).
Please contact our International Sales Division for holders for the fiber
alignment systems.
Actuators
Motoeized
Stages
MFH-ADP-2
Light
Sources
Index
MFH-ADP-1
MFH-ADP-3
Guide
Outline Drawing
Mirrors
MFH
25
15.5
Lenses
12 5 8
5.5 5
Prisms
10
24
Polarizers
Lasers
Beam Shaping
Diffusers
Clamp (for clad)
mount size A
Clamp (for jacket)
mount size B
2.5
V groove
Filters
Shutter
Adjust screw for fixing holder
4-M3
Others
Fiber
MFH-ADP-1
Pan head screw M2×6…2 screws
Pan head screw M3×6…2 screws
MFH-ADP-2
Pan head screw M2×6…2 screws
Pan head screw M3×6…2 screws
MFH-ADP-3
Pan head screw
M2×8…4 screws
2-3.5
6 counterbore
25
10 −0.1
−0.15
50
8 32
27.5
20
10
2.5
2-2.2
4 counterbore
2
3
8
8
10 −0.1
−0.15
1
25 25
16
20
4.5
5
25
20.5
30
2-3.5
6 counterbore
33
8 25
10 −0.1
−0.15
R2.5 13
4-2.2
9 15
5
24
15
3
50
2-2.2
4 counterbore
3
40
Holder
Part Number
Jacket diameter
φB
[µm]
Primary material: Aluminum
Finish: Black Anodized
Cladding diameter
φA
[µm]
Weight
[kg]
MFH-250 φ150 – φ250 φ60 – φ130 0.03
MFH-500 φ500 φ125 – φ250 0.03
MFH-900 φ900 φ125 – φ250 0.03
Adapter
Part Number
Overview
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
MFH-ADP-1 For fixing flat surface (M2, M3 counterbored) 0.02
For fixing perpendicular (M2, M3 counterbored)
MFH-ADP-2
0.03
to convert the 90 ° orientation
MFH-ADP-3 For fixing perpendicular (M2 counterbored) 0.03
C072
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Fiber Optics Holders
OFH/OFH-DM
Catalog
Code
W4520
Holders used for securing and adjusting optical fibers with ferrules (fibers before connectors are
attached). When used in combination with the adapter for fiber optics holders (OFH-ADP), these
holders can hold φ0.3mm to φ4mm ferrules.
Guide
▶Fiber optics holders for FC connectors (FOP) and for SMA connectors
(FOP-SMA) are also available. C074
▶We can change the post length. Please specify the post length when
you place an order, then we will deliver the product after replacing the
post with one with your specified length. Because those fiber optics
holders use a special post, replacement of the post is at your expense.
Outline Drawing
◦Turning the longitudinal direction adjustment knob moves
the tip of an optical fiber back and forth, and enables
collimation adjustment in combination with the lens.
◦There are two types, one type which enables only
positioning of optical fibers (OFH-1), and the other type
which is also capable of adjusting tilt of optical fibers
(OFH-2). There is also the type which is capable of fine
adjustment in addition to the forementioned two types
of positioning (DM).
◦The ferrule of an optical fiber is inserted in the adapter
with a slit (OFH-ADP), and then the optical fiber with
the adapter is put through these fiber optics holders.
Tightening the two set bolts located on the edges of these
holders secures the adapter and optical fiber together.
Attention
▶To transmit light into a single-mode fiber, a minute and fine adjustment
mechanism is required. Please contact our International Sales Division
for more information.
▶We keep these holders in stock, however the adapter for fiber optics
holders is produced by order. If you will order the adapter, please
check the delivery date of the adapter.
▶These holders cannot be used with optical fiber strands without ferrules.
Please use the mini-fiber optics holders (MFH). C072
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
OFH-1
M4 P0.7
Tapered
16
Longitudinal direction
adjustment
42
5
14
(12.5)
50
42
4-3.5
9.8 − 12.3
50
42
(12.5)
25
60
Vertical direction
adjustment
Horizontal direction
adjustment
OFH-2
M4 P0.7
Tapered
Rotation direction
adjustment
16
Longitudinal direction
adjustment
Tilt direction
adjustment
42
5
14
17.7 − 20.2
(12.5)
50
50 (12.5)
Vertical direction adjustment
Horizontal direction adjustment
60 25
Guide
Mirrors
Lenses
Prisms
OFH-1DM
M4 P0.7
Tapered
42
5
14
(26)
50
42
12
(26)
Vertical direction
adjustment
Horizontal direction
adjustment
OFH-2DM
M4 P0.7
Tapered
Rotation direction
adjustment
44
14
5
(26)
12
50 (26)
Vertical directionadjustment
Horizontal directionadjustment
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
16
Longitudinal direction
adjustment
50
42
4-3.5
9.8 − 12.3
60 25
16
Longitudinal direction
adjustment
Tilt direction
adjustment
19.7 − 22.2
50
60 25
Center detail
2-M3
Fixing set screw
5 +0.02
0
Shutter
Others
Fiber
12
12
Specifications
Part Number
Centering Adjustment
Range
[mm]
Adjustment Range
Tilt
[ ° ]
Rotation
[ ° ]
Focus Adjustment
Range
[mm]
Centering Adjustment
Resolution
[mm]
Centering Fine
Adjustment Resolution
[mm]
Adjustment Resolution
Tilt
[°/rotation]
Primary material: Aluminum
Finish: Black Anodized
Rotation
[°/rotation]
OFH-1 ±1.25 - - ±1.25 0.5 - - - 0.12
OFH-2 ±1.25 ±2 ±2 ±1.25 0.5 - about 0.7 about 0.7 0.15
OFH-1DM ±1.25 - - ±1.25 0.5 0.05 - - 0.14
OFH-2DM ±1.25 ±2 ±2 ±1.25 0.5 0.05 about 0.7 about 0.7 0.17
Weight
[kg]
Adpter for Fiber Optics Holders|OFH-ADP
Catalog
Code
W4527
We will manufacturer this adapter according to the ferrule diameter of your
optical fiber. We can provide this adapter with inner diameter between φ0.3 and
φ4.0 by 0.1mm increments.
Attention
▶This adapter is not a slit sleeve for ferrules.
Specifications
Part Number
Outer Diameter
[mm]
Inner Diameter
[mm]
Primary material: Delrin
Finish: None
Inner Diameter
MIN unit
[mm]
OFH-ADP φ5 φ0.3 – φ4.0 0.1
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C073

Holders
FC Type Fiber Optics Holders
FOP/FOP-DM
Catalog
Code
W4521
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Guide
▶Two-axis pinholes/objective holders for SMA connectors (FOP−SMA)
are also available.
▶We can change the post length. Please specify the post length when
you place an order, then we will deliver the product after replacing
the post with one with your specified length. Because those fiber
optics holders use a special post, replacement of the post is at
your expense.
▶These holders will be delivered attached with dummy FC connector.
This connector cannot be used for an optical fiber.
Two-axis pinholes/objective holders for optical fibers with
FC connector. These holders are used for collimating light
from a fiber.
◦There are two types; the screw type (FOP) which is capable of simple
adjustment, and the coarse/fine screw type (FOP-DM) which is capable
of fine adjustment.
◦There are FOP-1 which only has a two-axis adjustment mechanism and
FOP-2 which can minutely adjust the center of the luminance distribution
of the collimated beam using a fiber tilt adjustment mechanism.
◦The FC receptacles of FC type fiber optics holders can be replaced with
the receptacles for SMA type fiber holders (FOP-ADP-SMA) or mini-fiber
optics holders (MFH-ADP-3). C072
Attention
▶Because the end of an FC connector comes up against the receptacle,
it is 1.5mm recessed from the end face. When it is necessary
to align the end of the FC connector with the end face of the
holder, please use the connectors for FC type fiber optics (FLAD).
▶If the optical fiber is connected or disconnected once, there is a
possibility that the adjustment of the holder will be misadjusted.
When an optical fiber is reinserted, the adjustment mechanism of
the holder needs to be readjusted.
Light
Sources
Index
Guide
Mirrors
Outline Drawing
FOP-1
M4 P0.7
Tapered
14
10
10.5
16.5
60 50 (12.5)
40
25
15
50 (12.5)
40
15
9.5
9.5
Vertical direction
adjustment screw
4-M2
Horizontal adjustment screw
4-3.2
6 counterbore depth 4
4-M2
FOP-2
M4 P0.7
Tapered
Tilt direction
Adjustment screw
36 through hole
14
Rotation direction
Adjustment screw
(33.5)
10
20.5
60
50 (12.5)
25
15
50
15
9.5
9.5
(12.5)
4-M2
Vertical direction
adjustment screw
4-M2
Horizontal adjustment screw
Lenses
12
12
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
FOP-1DM
M4 P0.7
Tapered
14
16.5
10
10.5
(26)
50
40
60
25
15
50
40
15
9.5
9.5
(26)
Vertical direction
adjustment screw
4-M2
Horizontal adjustment screw
4-3.2
6 counterbore depth 4
4-M2
FOP-2DM
M4 P0.7
Tapered Tilt direction
Adjustment screw
36 through hole
14
Rotation direction
Adjustment screw
(33.5)
10
20.5
60
50 (26)
25
50 (26)
15
15
9.5
9.5
4-M2
Vertical direction adjustment screw
4-M2
Horizontal adjustment screw
Others
Fiber
Specifications
Part Number
Centering Adjustment
Range
[mm]
12
Adjustment Range
Tilt Rotation
[ ° ]
Centering Adjustment
Resolution
[mm/rotation]
Centering Fine
Adjustment Resolution
[mm/rotation]
12
Micro Indicator
Conversion
[mm/DIV]
Primary material: Aluminum
Finish: Black Anodized
Adjustment Resolution
Tilt/Rotation
[°/rotation]
FOP-1 ±1 - 0.5 - - - 0.14
FOP-2 ±1 ±2 0.5 - - about 0.7 0.22
FOP-1DM ±1 - 0.5 0.05 0.0025 - 0.15
FOP-2DM ±1 ±2 0.5 0.05 0.0025 about 0.7 0.24
Weight
[kg]
Adapters for Ferrule|FOP-ADP/FLAD
Catalog
Code
W4528
FOP-ADP
Receptacle for FC connector
used for FOP.
It comes with a connector, but
requests a professional to
connect the connector to a
fiber.
FLAD
Adapter for fixing a fiber
with ferrule, the end of
FC connector, or various
small diameter cylindrical
devices, and mounting
them on two-axis
pinholes/objective
holders.
◦Tightening the set bolt located on the top of the
adapter fastens the ferrule from the side.
◦When using this adapter for a nonstandard ferrule
or for something other than a ferrule, please
make sure that the compatible diameter of the
adapter is appropriate for the target diameter.
Specifications
Part Number
Primary material: Aluminum (FLAD)
Finish: Black Anodized (FLAD)
Ferrule Diameter φA
[mm]
Weight
[kg]
FOP-ADP - -
FLAD-2.5 φ2.5 0.003
FLAD-3.05 φ3.05 0.003
Outline Drawing
FLAD
hexagon socket head cap screw
M2×6…4 screws
9.5
Ferrule
Diameter A
9.5 4
4-2.2
18
C074
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SMA Type Fiber Optics Holders
FOP-SMA/FOP-DM-SMA
Catalog
Code
W4522
Guide
▶Two-axis pinholes/objective holders for FC connectors (FOP)are
also available.
▶We can change the post length. Please specify the post length
when you place an order, then we will deliver the product after
replacing the post with one with your specified length. Because
those fiber optics holders use a special post, replacement of the
post is at your expense.
Outline Drawing
FOP-1-SMA
M4 P0.7
Tapered
1/4-36UNS
6.5
3.2
10
16
60 50 (12.5)
40
25
15
50
40
15
9.5
9.5
(12.5)
Vertical direction
adjustment screw
4-M2
Horizontal adjustment screw
4-3.2
6 counterbore depth 4
4-M2
Two-axis pinholes/objective holders for optical fibers with SMA connector.
These holders are used for collimating the light from a fiber or for introducing
light into a fiber (MMF) such as a small spectroscope.
◦There are two types; the screw type (FOP-SMA) which is capable of simple
adjustment, and the coarse/fine screw type (FOP-DM-SMA) which is
capable of fine adjustment.
◦There are FOP-1-SMA which only has a two-axis adjustment mechanism
and FOP-2-SMA which can minutely adjust the center of the luminance
distribution of the collimated beam using a fiber tilt adjustment mechanism.
◦The SMA receptacles of SMA type fiber optics holders can be replaced with
the adapters for mini-fiber optics holders (MFH-ADP-3). C072
FOP-2-SMA
M4 P0.7
Tapered
36 through hole
Attention
▶If the optical fiber is connected or disconnected once, there is a
possibility that the adjustment of the holder will be misadjusted.
▶When an optical fiber is reinserted, the adjustment mechanism of
the holder needs to be readjusted.
▶Because SMA connectors have short nuts, it is hard to tighten them
completely with the finger.
▶To tighten them securely or to remove them, please use radio pliers
or other tools with a thin tip.
Tilt direction
Adjustment screw
1/4-36UNS
Rotation direction
Adjustment screw
6.5
(33)
3.2
20
(12.5)
50
60
25
15
50
15
9.5
9.5
(12.5)
4-M2
Vertical direction
adjustment screw
4-M2
Horizontal adjustment screw
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Mirrors
12
12
Lenses
FOP-1DM-SMA
M4 P0.7
Tapered
1/4-36UNS
6.5
3.2
10
16
60 50 (26)
40
25
15
50 (26)
40
15
9.5
9.5
Vertical direction
adjustment screw
4-M2
Horizontal adjustment screw
4-3.2
6 counterbore depth 4
4-M2
FOP-2DM-SMA
M4 P0.7
Tapered
36 through hole
Tilt direction
Adjustment screw
1/4-36UNS
6.5
Rotation direction
Adjustment screw
(33)
3.2
20
60
50 (26)
25
50 (26)
15
15
9.5
9.5
4-M2
Vertical direction adjustment screw
4-M2
Horizontal adjustment screw
Prisms
Polarizers
Lasers
Beam Shaping
Diffusers
Filters
Shutter
12
12
Others
Specifications
Part Number
Centering Adjustment
Range
[mm]
Adjustment Range
Tilt Rotation
[ ° ]
Centering Adjustment
Resolution
[mm/rotation]
Centering Fine
Adjustment Resolution
[mm/rotation]
Micro Indicator
Conversion
[mm/DIV]
Primary material: Aluminum
Finish: Black Anodized
Adjustment Resolution
Tilt/Rotation
[°/rotation]
FOP-1-SMA ±1 - 0.5 - - - 0.14
FOP-2-SMA ±1 ±2 0.5 - - about 0.7 0.22
FOP-1DM-SMA ±1 - 0.5 0.05 0.0025 - 0.15
FOP-2DM-SMA ±1 ±2 0.5 0.05 0.0025 about 0.7 0.24
Weight
[kg]
Fiber
Receptacle for SMA Type Fiber Holder|FOP-ADP-SMA
Catalog
Code
W4529
Adapter for changing the two-axis pinholes/objective holders for FOP or MFH-FOP to the two-axis pinholes/objective holders for SMA.
Attention
▶The position of the tip of an optical fiber differs depending
on the type of SMA connector. Please check the
specifications of SMA connectors.
Specifications
Part Number
Weight
[kg]
FOP-ADP-SMA

Holders
Laser Forcasing Holder
FOPT
Catalog
Code
W4526
Application
Systems
Optics &
Optical
Coatings
Holders
These holders convert the diverging ray from an optical fiber with FC or SMA type connector to a
collimated beam using an objective lens.
These holders can adjust the divergence, outgoing direction, and center position of the luminance
distribution (fiber rotation and tilt) of a beam.
◦The objective lenses used in these holders have short focal length (OBL-10) so that collimated light with small beam
diameter can be obtained.
◦The objective lenses used in these holders are for microscope so that high transmittance and high performance (spherical
aberration) can be obtained in the visible light range.
◦When used with a single-mode fiber, these holders can gain a collimated beam with Gaussian distribution.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Guide
▶We can change the post length. Please specify the post length when
you place an order, then we will deliver the product after replacing the
post with one with your specified length. Replacement of the post is
free of charge, but we may charge the difference in price depending on
the length. Please contact our International Sales Division for more
information.
▶These holders will be delivered attached with dummy FC connector.
This connector cannot be used for an optical fiber.
Attention
▶To transmit light into a single-mode fiber, a precise adjustment mechanism
is required. Please contact our International Sales Division for more
information.
▶Some types of connectors are difficult to mount on the receptacles of
two-axis pinholes/objective holders.
▶The collimated beam diameter changes depending on the NA of the
fiber. Generally, beam diameter D is found with the following formula.
D = 2 × NA × f
f: Focal length of objective lens, NA: Numerical aperture of fiber
Mirrors
Lenses
Prisms
Polarizers
Outline Drawing
FOPT
M6 P1
Lasers
50
42
Beam Shaping
Diffusers
Filters
Shutter
Others
Fiber
Horizontal adjustment screw
Tilt direction adjustment screw
62
Clamp
Vertical direction adjustment screw
Connector
Objective lens (OBL-10)
Front/back adjustment
13
37
Rotation direction adjustment screw
Whole tilt direction adjustment screw
76
35
60
20
Specifications
Part Number
Compatible
Connector
Focal length
Objectives
Lens
[mm]
Centering
Adjustment
Range
[mm]
Focus
Adjustment
Range
[mm]
Fiber
Adjustment
Range
Tilt/Rotation
[ ° ]
Holder
Adjustment
Range
Tilt
[ ° ]
Centering
Adjustment
Resolution
[mm/rotation]
Fiber
Adjustment
Resolution
Tilt
[°/rotation]
Fiber
Adjustment
Resolution
Rotation
[°/rotation]
Primary material: Aluminum
Finish: Black Anodized
Holder
Adjustment
Resolution
Tilt
[°/rotation]
FOPT-FC FC 16.6 ±1 ±5 ±2 ±2.5 0.5 about 0.7 about 0.7 about 0.53 0.55
FOPT-SMA SMA 16.6 ±1 ±5 ±2 ±2.5 0.5 about 0.7 about 0.7 about 0.53 0.55
Weight
[kg]
C076
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B a s e s

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B a s e s
I N D E X
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Bases
Vibration lsolation Concepts
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Source of Vibration
There are three primary sources of vibration which can disturb a payload, such as ground vibrations, acoustic noises, and
direct force disturbances.
At one extreme, the ground vibration environment may consist of low level seismic disturbances present everywhere on
earth and the disturbances, imperceptible under ordinary circumstances, present operating problems for highly sensitive
equipment. When cultural vibration effects are added, even wider range of sensitive equipment is affected.
For example, even low-amplitude vibration can affect the performance and yield of lithography equipment such as stepper,
the resolution of electron microscopes, the accuracy of measuring machines, and the performance of many types of
precision equipments and instruments for electro-optical research. The cultural disturbances affecting the sensitive equipments
are man-made and caused by phenomena such as vehicle and foot traffic, human activity, air handling systems,
elevators, machinery and numerous other sources.
3 Factors In Dynamic System
In discussing vibration isolation, it is useful to identify three elements of a dynamic system.
1. The equipment need to be isolated.
2. The support structure (floor).
3. The isolation system between the equipment and the support structure.
Vibration Isolation
In a passive isolation system, two factors affecting isolation efficiency are the natural frequency and damping of the isolator.
The natural frequency is the rate of free oscillation per unit time and damping is
the characteristic which dissipates energy in a dynamic system.
The ratio of forcing frequency (the disturbing frequency) to natural frequency (f/fn)
undamped coil spring
is used to determine the isolation efficiency of any isolation systems.
Transmissibility Tr = | 1 – (f/fn) 2 /1 | × 100%
where
f/fn = the ratio of forcing frequency to natural frequency
0
dampes coil spring
Graph shows typical plots of isolation efficiency Notice that when f/fn is less than
f2=1.414, the curves show that the vibration is magnified, when the forcing
frequency is equal to the natural frequency (f/fn=1), maximum magnification
occurs. At ratios above 1.414, the curves are in the isolation range. Typically
isolators which exhibit the greatest magnification at resonance have the best
isolation efficiency (undamped coil spring).
Generally speaking, low amplification at resonance as shown for the plot of a damped coil spring is desirable; however,
notice that this is accomplished at the expense of isolation efficiency. Pnumatic isolators with an air spring and damping
chamber on the other hand, combines the desirable characteristics of low magnification at resonance and high isolation
efficiency as shown the graph.
The equation for determining the natural frequency of a pneumatic isolators is
Isolation Efficiency %
99.9
Air spring
1.0 1.414
f/fn
margin in vibration
efficiency
Isolated Mass
Piston
fn = 1
2π
AG
V
VS
VR
Diaphragm Air Spring
Spring Chamber
Damping Orifice
Air Reseveroirs
Where
A
G
V
= Ratio of spectific heat, 1/4 for air
= Effective area of air piston, cm 2
= Gravity acceleration
= Volume of air chamber, cm 3
As seen from equation, the natural frequency of the pneumatic isolator depends on the ratio of the piston area to the volume
of the air isolator
Types of Vibration Isolation Systems
Optical Tables
OSDVID Series
Lab Desk Isolators
OSDVID Series
Desk Top Isolators
OSDVIT Series
D004
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Structure of Flat Benches
◦Optical Tops consist of ferro-magnetic stainless steel
(SUS430) top skin plates, carbon steel bottom skin plates
(SPHC), plated steel honeycomb (0.25mm foil, 3.2cm 2 cell
size) sandwiched between two plates and side steel
panels, all bonded with high strength adhesive.
◦High-damping optical tops apply Broadband Damping
technologies and have excellent dynamic stiffness.
◦Honeycomb cores (cell size 3.2cm 2 Side Wall (Steel)
) made of 0.25mm
thick plated steels give maximized stiffness, extensive
Top Skin (Stainless Steel)
contact surface with two plates for high rigidity.
Frame materials (plywood)
◦Top skins are precisely grinded to minimize surface
Adhesive
curves, pressure bonded to achieve
excellent top flatness,lightly sanded with a circular pattern
Bottom Skin
to remove burrs and non-reflecting & non-glare finished. The structure of honeycomb tops Steel Honeycomb Cores
◦Since all mounting holes on top plates are lead-screw
tapped instead of using inserts, deformation or looseness of holes does not occur. The M6(1/4-20) tapped holes are for
mounting optical components, arranged in a regular interval 25mm (1”).
◦Honeycomb cores, top/bottom plates and side walls are rigidly bonded with specially formulated high strength adhesive
which allows no elastic bending and hysteresis. Since all parts are made of structural steels having the same coefficient
of expansion, deformation such as overall distortion does not occur even in the repeatable temperature changes.
◦Cylindrical cups are attached on the bottom of top skins for sealing tapped holes to prevent the inflow of any chemical
substances into inside honeycomb cores.
◦Upon customers’ requests, special mounting holes and various configurations of optical tops are available.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Table Frame
◦Pneumatic Vibration Isolator
Pneumatic vibration isolation supports provide an effective vibration
isolation performance both in vertical and horizontal direction
in regular laboratories of 10Hz – 60Hz. Compressed air
supply systems are required.
◦Damping
Pneumatic vibration isolation supports have damping orifices
quickly decreasing and settling the movement of optical tops
affected by external force or weight transfer.
◦Auto Leveling System
Pneumatic vibration isolation supports are equipped with three
auto leveling valves adjusting the inside pressure of the air
spring chambers automatically. This is to maintain the height
and level of table tops even under eccentric load.
◦Pneumatic vibration isolation supports come with casters and
levelers for easy movement and installation.
◦Pneumatic vibration isolation supports consisting of 4 isolators
can support from 500kg to 2,000kg load. For higher load, long
optical tops or joined tables, quantity of isolators can be increased.
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Delivery Cost
Because the vibration isolator and laboratory bench are heavy, extra shipping costs are required in addition to the price of
those products. Also, to carry in those products, transport, personnel and equipment appropriate to the delivery site are
required. At the time of a quotation, please provide our International Sales Division with the Carry-In Route and Installation
Environment Question Sheet on D016.
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D005

Bases
Active Vibration Isolation Systems
OSDVIA
Catalog
Code
W6500
Application
Systems
Optics &
Optical
Coatings
OSDVIA-T series is the best active vibration isolation system equipped with the high-performance
digital controller that was developed independently for years, it adopts an advanced control
scheme which is robust against variations on system parameters. And it maximizes users’
convenience by being equipped with the LCD display and auto leveling/locking systems.
When using it together with its exclusive Acoustic Enclosure, OSDVIA-T series provides the optimal
environment of measurement which can simultaneously resolve problems caused by the
environmental noise and vibration.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
OSDVIA-T45
OSDVIA-T56
■Features
◦Easy to Installation & Operation :
▷After Power ON, Only Switch On/Off Action required
▷Auto Locking & Leveling Systems
▷LCD Display
◦Modest Design
◦Robust Control by High-Performance Digital Controller
◦Excellent Isolation Performance for the Micro-Vibration
in the range of low-frequency
◦No compressed air supply required
◦Option : Acoustic Enclosures
■Applications
◦Atomic Force Microscopes
◦Scanning Probe Microscopes
◦Interferometers
◦Other Ultra-Precision Measurement Systems
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Specifications
Part Number OSDVIA-T45 OSDVIA-T56 OSDVIA-T67
Dimensions [mm] (W)420 × (D)500 × (H)93 (W)500 × (D)600 × (H)93 (W)600 × (D)700 × (H)93
Max. Load Capacity [kg] 10 – 100 10 – 100 10 – 100
Weight [kg] 25 32 40
Actuator
Using Electro-Magnetic Force
Controlled degrees of Freedom 6
Isolation Performance
–35dB – –40dB/10Hz
Settling Time
7N, Horizontal >3N
Input Voltage [V]
AC85 – 264 / 50 – 60Hz
Power Consumption [W] < 36
Temperature [˚C] 5 – 50
Humidity [%] 20 – 90
Top plate
Solid Aluminum / M6 mounting holes
System Configuration
Controller and vibration isolator unit integrated type
Active Control Range
about 0.5Hz – 100Hz
Initial Horizontal Adjustment
Automatic adjustment
Lock when moving
Automatic locking mechanism
Confirmation of Vibration Isolation Status
Displayed on the front monitor
Transmissibility Curves
(under the payload 50kg, vertical)
D006
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High-performance Vibration Isolation Systems with Steel Honeycomb Top
OSDVIO
Our highest performance vibration isolation system.
Utilizing independent mechanisms for the vertical and horizontal directions, this system achieves
the high performance and efficiency required for the most demanding applications.
◦This vibration isolator rapidly attenuates vibrations transmitted to mounted equipment and instruments, and is essential
for mounting equipment and instruments that are affected by vibration.
◦The bench is lightweight with excellent stiffness due to the steel honeycomb core.
◦The top surface of the bench is magnetic stainless steel plate, with tapped holes (M6 25×25mm matrix) over the entire
surface allowing both magnetic type and screw fixing type systems or equipment to be mounted.
◦The manual leveling system does not require a continuous air supply. The isolators can be pressurized with just a hand
air pump.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Exterior
Light
Sources
Index
Vertical Direction
Natural Frequency
Horizontal Direction
Vibration Isolation
Damping
Honeycomb Material inside Bench
Upper Plate
Bench Material Lateral Side
Lower Plate
Bench Top Surface
Bench Top Surface Finish
Surface Flatness
Hole/Core Sealing
OSDVO
about 1.2 – 1.5Hz
about 1.5 – 1.7Hz
Air Spring Isolations
Air Damping by Orifice
Plated steel honeycomb (0.25m foil, 3.2cm2 cell size)
4.0mm thickness 430 series ferro magnetic stainless steel plate,smooth sanded finish
2.0mm thickness carbon steel plate with damped wood composite, vinyl convert finish
4.0mm thickness carbon steel plate epoxy painted finish
M6 tapped holes on 25×25mm matrix over the entire surface (leaving 37.5mm around the edges)
Unpainted (smooth sanded finish)
±0.1mm over 600mm square
Easy clean cylindrical cup (25mm deep)
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Guide
▶We can produce sizes not listed in the catalog. Contact our
International Sales Division for more information.
▶When installed in locations with no air source, use the silent air
compressor (OSDAC-30) which can be used indoors.
D014
Attention
▶The vibration isolator may not perform normally if used under an
extremely offset load or with instruments or equipment having a
very high center of gravity.
▶Because of the weight, delivery cost will be quoted separately.
Use the carry-in route and installation environment question sheet.
D016
W6001
▶Use the Air Spring Vibration Isolator Model Selection Check Sheet
to check usage, load capacity, or unclear points.
W6002
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D007

Bases
High-performance Vibration Isolation Systems with Steel Honeycomb Top
OSDVIO
Catalog
Code
W6501
Outline Drawing
Application
Systems
OSDVIO series
37.5 M6 (25×25mm matrix)
1 Flat bench …………………… 1
Optics &
Optical
Coatings
25
2 Precision air spring ………… 4
3 Auto level sensor …………… 3
4 Optical Table Support ……… 1
5 Caster………………………… 4
Holders
B
6 Leveling bolt ………………… 4
7 Leveling bolt seat …………… 4
8 Stopper bolt ………………… 4
Bases
A
9 Regulator …………………… 1
Manual
Stages
3
T
1
2
Actuators
4
H
8
9
Motoeized
Stages
6
7
Light
Sources
5
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Specifications
Part Number
A × B
[mm]
H
[mm]
T
[mm]
Load capacity
[kg]
OSDVIO-I-0909M-100t(800H) 900× 900 800 100 300 154
OSDVIO-I-1007M-100t(800H) 1,000× 700 800 100 310 140
OSDVIO-I-1206M-100t(800H) 1,200× 600 800 100 310 141
OSDVIO-I-1207M-100t(800H) 1,200× 700 800 100 290 159
OSDVIO-I-1209M-100t(800H) 1,200× 900 800 100 260 190
OSDVIO-I-1506M-100t(800H) 1,500× 600 800 100 390 187
OSDVIO-I-1507M-100t(800H) 1,500× 700 800 100 370 207
OSDVIO-I-1509M-200t(800H) 1,500× 900 800 200 310 269
OSDVIO-I-1510M-200t(800H) 1,500×1,000 800 200 290 284
OSDVIO-I-1512M-200t(800H) 1,500×1,200 800 200 240 329
OSDVIO-I-1515M-200t(800H) 1,500×1,500 800 200 180 396
OSDVIO-I-1806M-200t(800H) 1,800× 600 800 200 340 234
OSDVIO-I-1807M-200t(800H) 1,800× 700 800 200 320 254
OSDVIO-I-1809M-200t(800H) 1,800× 900 800 200 270 306
OSDVIO-I-1812M-200t(800H) 1,800×1,200 800 200 190 387
OSDVIO-I-1815M-200t(800H) 1,800×1,500 800 200 420 468
OSDVIO-I-2010M-200t(800H) 2,000×1,000 800 200 520 362
OSDVIO-I-2012M-200t(800H) 2,000×1,200 800 200 460 421
OSDVIO-I-2015M-200t(800H) 2,000×1,500 800 200 380 510
OSDVIO-I-2409M-300t(800H) 2,400× 900 800 300 440 453
OSDVIO-I-2412M-300t(800H) 2,400×1,200 800 300 320 578
OSDVIO-I-2415M-300t(800H) 2,400×1,500 800 300 200 701
OSDVIO-I-3009M-300t(800H) 3,000× 900 800 300 350 585
OSDVIO-I-3010M-300t(800H) 3,000×1,000 800 300 300 634
OSDVIO-I-3012M-300t(800H) 3,000×1,200 800 300 200 739
OSDVIO-I-3015M-300t(800H) 3,000×1,500 800 300 450 896
OSDVIO-I-3612M-300t(800H) 3,600×1,200 800 300 480 864
OSDVIO-I-3615M-300t(800H) 3,600×1,500 800 300 309 1051
Weight
[kg]
D008
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Steel Honeycomb Optical Tables
OSDVIO-R
Catalog
Code
W6502
Simple optical lab bench fitted with a table frame and rubber isolators placed between the bench
and the table frame provides a basic level of vibration isolation.
◦The inside of the bench is aluminum honeycomb, which
is lightweight with excellent stiffness.
◦The vibration isolating legs have high stiffness and
stability.
◦The top surface of the bench is magnetic stainless steel
plate, with tapped holes (M6 25×25mm matrix) over the
entire surface allowing both magnetic type and screw
fixing type systems or equipment to be mounted.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Outline Drawing
OSDVIO-R series
25
25
M6 (25×25mm matrix)
A
B
T
H
1 Flat bench ……………………… 1
2 Rubber isolator ………………… 4
3 Trestle table …………………… 1
4 Caster…………………………… 4
5 Leveling bolt …………………… 4
6 Leveling bolt seat ……………… 4
4
* For products with bench thickness (T) 150mm or less, placement of the pipes
connecting the table legs is different.
1
2
3
5
6
Attention
▶Because of the weight, delivery cost will be quoted separately.
Use the carry-in route and installation environment question sheet.
D016
W6001
Common Specifications
Vibration Isolation Method Rigid supports with elastomer mounts
Honeycomb Material
Steel
inside Bench
Upper plate:
4.0mm thickness 430 series ferro magnetic
stainless steel plate,smooth sanded finish
Lateral surface:
Bench Material
2.0mm thickness carbon steel plate with
damped wood composite, vinyl convert finish
Lower plate:
4.0mm thickness carbon steel plate epoxy
painted finish
M6 tapped holes on 25×25mm matrix over the
Bench Top Surface
entire surface (Leaving 37.5mm around the edges)
Bench Top Surface Finish Unpainted (smooth sanded finish)
Surface Flatness ±0.1mm over 600mm square
Hole/Core Sealing Easy clean cylindrical cup (25mm deep)
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Specifications
Part Number
A × B
[mm]
H
[mm]
T
[mm]
Load capacity
[kg]
OSDVIO-R-0909M-100t(800H) 900× 900 800 100 300 149
OSDVIO-R-1007M-100t(800H) 1,000× 700 800 100 310 135
OSDVIO-R-1206M-100t(800H) 1,200× 600 800 100 310 136
OSDVIO-R-1207M-100t(800H) 1,200× 700 800 100 290 154
OSDVIO-R-1209M-100t(800H) 1,200× 900 800 100 260 185
OSDVIO-R-1506M-100t(800H) 1,500× 600 800 100 390 182
OSDVIO-R-1507M-100t(800H) 1,500× 700 800 100 370 202
OSDVIO-R-1509M-200t(800H) 1,500× 900 800 200 310 264
OSDVIO-R-1510M-200t(800H) 1,500×1,000 800 200 290 279
OSDVIO-R-1512M-200t(800H) 1,500×1,200 800 200 240 324
OSDVIO-R-1515M-200t(800H) 1,500×1,500 800 200 180 391
OSDVIO-R-1806M-200t(800H) 1,800× 600 800 200 340 229
OSDVIO-R-1807M-200t(800H) 1,800× 700 800 200 320 249
OSDVIO-R-1809M-200t(800H) 1,800× 900 800 200 270 301
OSDVIO-R-1812M-200t(800H) 1,800×1,200 800 200 190 382
OSDVIO-R-1815M-200t(800H) 1,800×1,500 800 200 420 463
OSDVIO-R-2010M-200t(800H) 2,000×1,000 800 200 520 357
OSDVIO-R-2012M-200t(800H) 2,000×1,200 800 200 460 416
OSDVIO-R-2015M-200t(800H) 2,000×1,500 800 200 380 505
OSDVIO-R-2409M-300t(800H) 2,400× 900 800 300 440 448
OSDVIO-R-2412M-300t(800H) 2,400×1,200 800 300 320 573
OSDVIO-R-2415M-300t(800H) 2,400×1,500 800 300 200 696
OSDVIO-R-3009M-300t(800H) 3,000× 900 800 300 350 580
OSDVIO-R-3010M-300t(800H) 3,000×1,000 800 300 300 629
OSDVIO-R-3012M-300t(800H) 3,000×1,200 800 300 200 734
OSDVIO-R-3015M-300t(800H) 3,000×1,500 800 300 450 891
OSDVIO-R-3612M-300t(800H) 3,600×1,200 800 300 480 859
OSDVIO-R-3615M-300t(800H) 3,600×1,500 800 300 309 1046
Weight
[kg]
Brackets
Adapters
Tools
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
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D009

Bases
Desk type vibration Isolation systems
OSDVID
Catalog
Code
W6503
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
OSDVID series are available in a choice of two types of desk isolators;
Ctype for clean room , L type for laboratory
OSDVID-C series
◦Highly damped stainless steel laminate top.
◦For class one cleanroom compatibility, all polished stainless steel finish
free from particles or contaminants.
◦Designed to be easily cleaned, no dust collecting grooves or ledges.
◦No outgassing components, all air to support the table is appropriately
vented.
◦Perforated top cover to reduce air turbulence in clean rooms.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
OSDVID-L series
◦The thin wall rolling diaphragms with horizontal vibration removal
◦The new round edge top cover of melamine resin. Isolated top completely
separated from top cover for working space
◦The swivel casters for easy layout change. Such as drawer unit, monitor
stand, under shelf increase the functionality of the isolator (optional).
Index
Outline Drawing
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
OSDVID C series L series
D+85
H
D+200
D 100
D 100
D+200
100
100
100 W
R1
L1
W 100
W
W+R1+100
W+L1+100
W+55
Brackets
Adapters
Tools
General Specificaton
Natural Frequency
Isolation Efficiency
Levelling Repeatability
Net Load Capacity
Shipping Weight
Material
Operation
1.2Hz – 2.0Hz
at 10Hz: 75% – 95%
at 20Hz: 85% – 98%
±1.0mm / ±0.05mm
500kg
150 – 250kg
Frame & Top:
All Stainless Steel (“C” Type)
Steel tube, Powder Painted (“L” Type)
Top Cover:
Stainless Steel (“C” Type)
Melamine H.P.Boards (“L” Type)
3 – 5kg/cm 2 Compressed Air or Bottled Nitrogen
Specifications
Part Number
W × D
[mm]
H
[mm]
Load capacity
[kg]
Weight
[kg]
OSDVID-C-45-L-600 400×500 800 500 103
OSDVID-C-56-L-600 500×600 800 500 126
OSDVID-C-77-L-600 700×700 800 500 183
OSDVID-C-86-L-600 800×600 800 500 178
OSDVID-C-88-L-600 800×800 800 500 203
OSDVID-C-96-L-600 900×600 800 500 192
OSDVID-C-97-L-600 900×700 800 500 207
OSDVID-C-99-L-600 900×900 800 500 235
OSDVID-C-107-L-600 1,000×700 800 500 219
OSDVID-C-127-L-600 1,200×700 800 500 245
OSDVID-C-128-L-600 1,200×800 800 500 266
OSDVID-C-158-L-600 1,500×800 800 500 313
OSDVID-L-45-L-600 400×500 800 500 103
OSDVID-L-56-L-600 500×600 800 500 126
OSDVID-L-77-L-600 700×700 800 500 183
OSDVID-L-86-L-600 800×600 800 500 178
OSDVID-L-88-L-600 800×800 800 500 203
OSDVID-L-96-L-600 900×600 800 500 192
OSDVID-L-97-L-600 900×700 800 500 207
OSDVID-L-99-L-600 900×900 800 500 235
OSDVID-L-107-L-600 1,000×700 800 500 219
OSDVID-L-127-L-600 1,200×700 800 500 245
OSDVID-L-128-L-600 1,200×800 800 500 266
OSDVID-L-158-L-600 1,500×800 800 500 313
D010
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Desktop Vibration Isolation Systems
OSDVIT
Catalog
Code
W6504
Installation on top of a table or test bench makes these isolators ready for immediate use.
These tabletop vibration isolators are space-saving and effective for use with small optical systems
and microscopes.
◦Compact Design(portable)
Affordable and practical model, light weight structure
and enhanced convenience in use and installation.
◦Special material(high-damping top)
Laminated with a special material to ensure an excellent
damping performance. [optional] Honeycomb top
plate-increasing height, but any customized mounting
holes available.
◦Auto leveling system(Tri-pole leveling)
Ensuring to help pinpoint experiments used of three
polar leveling valves.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
■Applications
◦Optical Microscopy
◦Surface Profilometry
◦Hardness and roundness Tester
◦Velocimetry
◦Analytical Balance
Attention
▶To achieve adequate vibration isolation performance, always use a
strong table frame to mount the table top type vibration isolator
system on.
▶The vibration isolator may not perform normally if used under an
extremely offset load or with instruments or equipment having a
very high center of gravity.
▶Use the Air Spring Vibration Isolator Model Selection Check Sheet
to check usage, load capacity, or unclear points.
W6002
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Common Specifications
Part Number OSDVIT-45A(25H) OSDVIT-56A(25H) OSDVIT-86A(25H)
Natural Frequency
2.5Hz ~ 0.3Hz
Vibration Isolation
Special diaphragm air springs
Damping
Air damping by orifices
Leveling
Auto leveling by 3 height control valves
Material of Top Plate
Stainless steel laminated top / Honeycomb 25t
Load Capacity 150 kg 150 kg 150 kg
Weight 50 kg 65 kg 80 kg
Steel top (W)432 × (D)532 × (H)84 (W)532 × (D)632 × (H)84 (W)832 × (D)632 × (H)84
Overall Dimension [mm]
Honeycomb 25t (W)430 × (D)530 × (H)110 (W)530 × (D)630 × (H)110 (W)830 × (D)630 × (H)110
Required air supply 4kg/cm 2
Standard Accessories Air regulator & Filter 4φ Nylon tube 6mm, Tube coupling (R 1/4″* 4φ)
Option
Exclusive air compressor
* Besides the above standard sizes, custom dimensions are available upon requests.
Part Number
W × D
[mm]
H
[mm]
Load capacity
[kg]
OSDVIT-45A(25H) 432×532 86 150 50
OSDVIT-56A(25H) 532×632 86 150 65
OSDVIT-86A(25H) 832×632 86 150 80
Weight
[kg]
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D011

Bases
Tabletop Optical Breadbord
OSDVIO-B
Catalog
Code
W6505
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
◦Top skins are made of stainless steel (SUS430), bottom skins are made of steel (SPHC). Plated steel honeycomb cores
are sandwiched between top & bottom skins, all bonded with high strength adhesive.
◦Honeycomb cores (size 3.2cm 2 ) are made of 0.25mm thick plated steels giving maximized stiffness and extensive contact
surface with two plates for high rigidity.
◦Top skins are precisely grinded to minimize surface curves, pressure bonded to achieve excellent top flatness.
◦The M6 (1/4″-20) tapped holes are for mounting optical equipment or components, arranged in a regular interval 25mm (1″).
◦Cylinderical cups are attached on the bottom of top skins for sealing tapped holes to prevent the inflow of any chemical
substances into inside honeycomb cores.
Attention
▶To ensure optimal performance, always prepare rubber isolators to
attach on the four corners, and use a strong table frame to mount
the flat board.
▶Unlike in the case of conventional optical laboratory benches, the
flat boards are not sufficiently thick for their area. Select in
accordance with the purpose and conditions of use.
▶Because of the weight, delivery cost will be quoted separately. Use
the carry-in route and installation environment question sheet.
D016
W6001
Motoeized
Stages
Common Specifications
Light
Sources
Index
Guide
Vibration
Isolation Systems
Outline Drawing
25
25 M6 (25×25mm matrix)
A
B
1
1 Upper plate
2 Lower plate
3 Internal steel honeycomb
Honeycomb Material
inside Bench
Bench Material
Bench Top Surface
Bench Top Surface Finish
Plated steel honeycomb
(0.25m foil, 3.2cm 2 cell size)
Upper plate:
4.0mm thickness 430 series ferro magnetic
stainless steel plate,smooth sanded finish
Lateral surface:
2.0mm thickness carbon steel plate with
damped wood composite, vinyl convert finish
Lower plate:
4.0mm thickness carbon steel plate epoxy
painted finish
M6 tapped holes on 25×25mm matrix over the
entire surface (Leaving 37.5mm around the edges)
Unpainted (smooth sanded finish)
Optical Tables
Darkrooms/
Dark Boxes
2 3
50
Surface Flatness
Hole/Core Sealing
±0.1mm over 600mm square
Easy clean cylindrical cup (25mm deep)
Optical Bases
Posts
Brackets
Adapters
Tools
Part Number
A × B
[mm]
OSDVIO-B-0504M-50t 500× 400 50 17
OSDVIO-B-0605M-50t 600× 500 50 26
OSDVIO-B-0606M-50t 600× 600 50 31
OSDVIO-B-0707M-50t 750× 750 50 49
OSDVIO-B-0806M-50t 800× 600 50 42
OSDVIO-B-0906M-50t 900× 600 50 47
OSDVIO-B-0907M-50t 900× 750 50 59
OSDVIO-B-0909M-50t 900× 900 50 70
OSDVIO-B-1006M-50t 1,000× 600 50 52
OSDVIO-B-1007M-50t 1,000× 750 50 65
OSDVIO-B-1009M-50t 1,000× 900 50 78
OSDVIO-B-1010M-50t 1,000×1,000 50 87
OSDVIO-B-1206M-50t 1,200× 600 50 63
OSDVIO-B-1207M-50t 1,200× 750 50 78
OSDVIO-B-1209M-50t 1,200× 900 50 94
OSDVIO-B-1210M-50t 1,200×1,000 50 104
OSDVIO-B-1212M-50t 1,200×1,200 50 125
OSDVIO-B-1506M-50t 1,500× 600 50 78
OSDVIO-B-1507M-50t 1,500× 750 50 98
OSDVIO-B-1509M-50t 1,500× 900 50 117
OSDVIO-B-1510M-50t 1,500×1,000 50 131
OSDVIO-B-1512M-50t 1,500×1,200 50 157
OSDVIO-B-1806M-50t 1,800× 600 50 94
OSDVIO-B-1807M-50t 1,800× 750 50 117
OSDVIO-B-1809M-50t 1,800× 900 50 141
OSDVIO-B-1812M-50t 1,800×1,200 50 188
OSDVIO-B-2010M-50t 2,000×1,000 50 174
OSDVIO-B-2012M-50t 2,000×1,200 50 209
T
[mm]
Weight
[kg]
D012
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Overhead Table Shelf System
OSDOTS
Catalog
Code
W6506
OSDOTS series (Overhead Table Systems) are good for off-the-isolated table mounting or storage,
such as power supplies, controllers, oscilloscopes, and other instruments, so vivration isolation
will not be affected. The height of shelf can be easily adjusted and optional hanging under-shelf
additionally installed at the desired position under main shelf for more storage or mounting.
◦Convenient location of instruments.
◦Increased table space.
◦mechanical isolation of equipments with fans.
◦Overhead shelf adjusted in height, dree standing.
◦Levelling feet for uneven floors.
◦Formed steel welded design, black power coat finished.
◦Hanging under-shelf for more instruments (Optional).
◦Goiunded-electrical outlets (110V / 220V / 60Hz) on each side of the shelf.
◦N.F.B (30A) for preventing instruments from overload currency.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Outline Drawing
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Specifications
Part Number
Weight
[kg]
OSDOTS-4 106
OSDOTS-5 128
OSDOTS-6 135
OSDOTS-7 157
OSDOTS-8 164
OSDOTS-10 193
OSDOTS-12 249
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D013

Bases
Accessories
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Air Compressor—OSDAC-30
We provide exclusive air compressors at very competitive price for customers who have no air
supply systems. Our exclusive air compressors have compact design and less noise, can be
installed and operated easily.
Specifications
Part Number
Operating Pressure
Pressure Control
Air Delivery
40-80psi
OSDAC-30
Preset Minimum Pressure by Automatic Switch
30l/min. @80psi
Catalog
Code
20 liters
Tank Capacity
Electrical Power: 220VAC 200W
510 × 290 × 500mm
Size (WxDxH)
Net Weight: 23kg
Noise Level
40dB
Air Discharge outlet diameter φ6 with one-touch fitting
Body color
Light Gray
Pressure Indicator
1 ea
Drain Valve
1 ea
Pressure Valve 1
W6507
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Faraday Cages
Clear Acrylic Enclosures
Shield Box
Dark Box
D014
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Guide on Special Orders for Vibration Isolator
We can provide a wide variety of sizes, shapes
or precision not listed in the catalog or for
additional processing of products listed in the
catalog.
Guide
Examples of custom benches
Catalog
Code
▶Use the Question Sheet for Special Orders, and contact our
International Sales Division for more information.
W6004
T-shaped flat bench Notch shape
L-shaped flat bench Outline shaped
Flat bench
flat bench
W6004
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Flat bench with
through holes
T-joint type flat bench
Slot-joint type flat bench
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Custom products
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
A.F.M
LCD Inspection Equipment
Laser
Welding Workstations
PDP Equipment
S.T.M
Optics
Microscope In Semi,Fab
Thin film
Measurement System
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D015

Bases
Question Sheet
Catalog
Code
W6001
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Carry-In Route and Installation Environment Question Sheet
□ To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Customer Information
Installation Site
Affiliation
(Organization Name)
Department
Address
* Fill in Bldg,
Subdivision,
Room.
TEL
Address
* Fill in Bldg,
Subdivision,
Room.
TEL
Model Number
Examined
Check Column
Check Column
Zip Code
FAX
Name
E-mail
If the installation site is different from the above, fill it in below.
Specific Instructions on Carry-in Date (Note 1): Important
(a) Consolidated shipment, without carry-in since it falls in (Items Included in Estimate... (1))
(b) If a weekday nothing special to specify
(c) Specify carry-in date and time on weekdays
(d) Specify Sat., Sun., Holidays
■Quotation ■Order
Carry-in Environment (Customers specifying (3), (4) or (5) in Items included in Estimate, please fill in.)
Installation Floor
Floor number of the installation site?
Above ground basement
Floor
How wide is the service entrance?
Width
mm×Height
mm
Above Ground Sometimes there are differences in grade to the service entrance, how great is the difference in grade? Width
mm
Service Entrance How big is the parking space at the service entrance?
Width
mm×Width
mm
Carry-in Route
What are the minimum width and height of the carry-in passage?
Width
mm×Minimum height
mm
Sometimes there are differences in grade of the carry-in passage, how great is the difference in grade? Width
mm
How big is the entrance of the installation room?
Width
mm×Height
mm
Entrance to
Installation Room
Sometimes there are differences in grade to the entrance, how great is the difference in grade? Width
mm
How wide is the passage in front of the installation room?
Width
mm
Other
What is the type of installation room?
Normal / Clean room
In case of a clean room, is special curing required?
Required / Not required
Carry in to Basement or Above 2nd Floor
How big is the elevator door?
Width
mm×Height
mm
Has Elevator How much space inside the elevator?
What is max payload of the elevator?
Width
Width
mm×Depth mm×Height mm
kg
How big is the special service entrance?
Width mm×Depth mm×Height
mm
No Elevator
Dedicated Service
Entrance Exists
Sometimes there are differences in grade to the entrance, how great is the difference in grade? Difference in grade
mm
Is there a hoist?
Yes / No
Please draw a simple sketch of the carry-in route and attach on a separate sheet of paper. We will contact you separately.
Dedicated Service
Regardless of
Entrance
measures, will not Does Not Exist
go on the elevator Stairs, window
in installation room,
window on passage
(Note 1) After the delivery date is decided based on the designated day, we will contact you separately. When the designated delivery date is changed after contacting you, we may
charge a cancellation fee. Please contact our International Sales Division at least 1 week in advance to change the designated day.
(Note 2) When you have chosen an air spring vibration isolator, fill in the Air Spring Vibration Isolator Model Selection Check Sheet
W6002.
FAX
Service
Counter
Desired Delivery
Date
Date
Items included in Estimate
(1) Reinforced cardboard packaging, consolidated shipment, handover on the track (does not include carry-in)
(2) Simple packaging, zone charter flight, handover after unloading (not including carry-in work)
(3) Simple packaging, zone charter flight, handover after unloading and carry-in (not including installation and adjustments)
(4) Simple packaging, zone charter flights, and handover after unloading, carry-in, installation and adjustment (some personal assistance is possible)
(5) Simple packaging, zone charter flights, and handover after unloading, carry-in, installation and adjustment (without personal assistance)
( )
ex.
Prefecture
Prefecture
Prefecture
ex.
City/Ward/
District
City/Ward/
District
Town
Village
Town
Village
Mr(s)
Mr(s)
* Place checks in the column on the
left considering specifications of
the model you examined, and
difficulty of the carry-in route,
because costs will vary according
to the carry-in conditions and the
specified estimate range.
* Depending on the size, your
machine cannot be delivered on
the carry-in route in one piece,
and sometimes disassembly/
assembly are required.
* Sometimes adjustments are
required depending on the model.
* The rates of shipping/carry-in fees
will vary according to the details
specified on the day of delivery.
D016
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Rubber Isolators
PR
Catalog
Code
W6015
Rubber tile vibration isolators designed to be placed at the four corners of an optical laboratory
bench or other equipment vulnerable to vibrations.
Attention
▶Recommended maximum load is 4.9N/cm 2 (about 5kgf/cm 2 )
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Specifications
Part Number
External Dimensions
[mm]
Thickness
[mm]
Weight per Sheet
[kg]
PR-1010 100×100 10 0.12 4
PR-1515 150×150 10 0.27 4
PR-3030 300×300 10 1.1 1
Quantity
[Pieces]
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
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D017

Bases
Darkroom Kits
Clean Darkroom Kits
DRU
DRUC
Catalog
Code
W6016
Application
Systems
Optics &
Optical
Coatings
Holders
Allow easy installation of a darkroom by assembling the steel framework and covering with blackout
curtains.
◦Covered with a five-side (including the ceiling) integral type black-out curtain to ensure very high light blocking effect.
◦A white LED penlight, which is very effective for checking work in a darkroom, is available as an accessory.
◦Size must be selected considering the vibration isolator size and work space.
Type Darkroom Kits DRU Clean Darkroom Kits DRUC
Bases
Manual
Stages
Exterior
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Features
Black-out Curtain
●Allows easy installation of a darkroom space indispensable
for image measurements, exposure testing,
and optical measurements.
●Easy to dismantle, making it convenient for transportation
and storage.
Material
Obverse side: Polyester, Reverse side: Neoprene rubber
Light Blocking Effect Class 1 shading ability (99.99~100%)
Fire Retardancy Class 1 fire retardant (JIS A 1322)
●Allows easy installation of a clean darkroom space
indispensable for highly accurate and reliable optical
measurements, testing, and other tasks.
●HEPA filters provide Class 100 dust collection
efficiency in terms of cleanliness at the air outlet, with
wind speed of approximately 0.5m/s. Although it
varies according to the darkroom size, the cleanliness
inside the darkroom is roughly Class 7 (Class 10,000)
within 5 minutes after power-up.
●Fitted with an exhaust type compact ventilation fan.
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Guide
▶This product comes as a kit including a black-out curtain, pipes
and a plastic hammer.
▶Estimated time required for assembly: (e.g.) DRU-1816 will take
about 30 minutes (with two people).
▶To ensure optimal cleanliness, wear clean room garments while
working in a darkroom. Clean room garments are available.
▶Replacement HEPA filters (CD3052535) for darkroom kits (DRUC)
are also available. Contact our International Sales Division for
more information.
Frame Pipes
The pipes used for the skeleton framework of the darkroom kits and
clean darkroom kits are φ28mm steel frames. The structure and
strength are as shown in the following figure. These pipes can be
readily connected and assembled with T- and L-shaped joint pipes
using a plastic hammer.
Structure
AAS resin
Strength
A
Attention
B
▶The blackout curtains have a flap-type entrance that has flaps
overlapping in the middle. Curtain-rail-type blackout curtains are
also available. (Easy for getting in and out, but a gap between the
main curtain and the entrance curtain will reduce the light blocking
effect compared to the flap type. Contact our International Sales
Division for more information.)
▶Darkroom kits include curtain tie clips.
▶Custom sizes or shapes not listed in the catalog are available. In
such cases, purchase white LED light separately. Contact our
International Sales Division for more information.
Steel pipe
Adhesive
For bonding
(
steel pipe and)
AAS resin
Anti-rust coating
A
[Dimensions]
450mm
B
[Max. Strength]
about 1,666N (170kgf)
900mm about 784N ( 80kgf)
1,800mm about 392N ( 40kgf)
Specifications
Darkroom Kits
Part Number
Clean Darkroom Kits
Part Number
Frontage
[mm]
DRU-1212 DRUC-1212 1,200 1,200 2,000
DRU-1515 DRUC-1515 1,500 1,500 2,000
DRU-1816 DRUC-1816 1,800 1,600 2,000
DRU-2017 DRUC-2017 2,000 1,700 2,000
DRU-2219 DRUC-2219 2,200 1,900 2,000
DRU-2819 DRUC-2819 2,800 1,900 2,000
DRU-3020 DRUC-3020 3,000 2,000 2,000
Depth
[mm]
Height
[mm]
D018
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Clean Darkroom Equipment
Spirit Levels
DRU / GP-6BK
LMC / LMT
DRU/GP-6BK
Catalog
Code
W6017
■Fluorescent Light (White)
■Ventilation Fans
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Designed to be hung from the steel frame of
the darkroom ceiling for use.
◦Fluorescent light using one lamp.
◦Size: (W)613×(D)136×(H)80mm (excluding protrusions)
◦Weight: 1.2kg
◦Chain length of hook: 360mm (adjustable)
◦Power cord: 0.3m + extension cord 5m
◦Power source: AC100V 50/60Hz
◦Power consumption: 20W
◦Light and glow starter used
Light: FL20SS/Glow starter: FG-IE
Guide
▶Purchase commercial fluorescent lights for replacement.
Specifications
Part Number
■White LED Light
DRU-RL-2
Specifications
Part Number
GP-6BK
Ventilation fans specially engineered to keep out
external light; available in two types: an exhaust
type (DRU-VF) and a suction type (DRU-IF).
◦Size: (W)160×(D)160×(L)193mm (excluding protrusions)
◦Weight: 2.2kg
◦Power cord: 3m (with switch)
◦Power source: AC100V±10% 50/60Hz
◦Power consumption: 14W
◦Rough guide of small ventilation fan suction/exhaust
capability: 2.7m 3 /min. for the motor main unit.
Guide
▶Additional processing of black-out curtain is required to install this
product in a darkroom. Pipes required for installation come with
this product.
▶Suction/exhaust capability of 6.2m 3 /min. type is also available.
Contact our International Sales Division for more information.
Part Number
DRU-IF
DRU-VF
Type
Suction type
Exhaust type
With super luminosity chip white LED, this product is convenient
for adjusting or checking equipment in a darkroom.
◦Actual lighting hours: about 10 hours continuous operation
(rough guide for battery replacement)
◦Main body size: φ22×92mm
◦Weight: 0.061kg (including the battery)
◦Number of batteries: AA battery×1
◦The battery that comes with this product is for testing, and may
run out before the service life expected for new batteries.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
LMC/LMT
Catalog
Code
W6018
Levels convenient for installing a vibration isolator, optical laboratory bench, or various other instruments.
◦The LMC type is round, and the LMT type is
T-shaped.
◦The LMC type provides the horizontal level of
the measured target when the bubble is
centered within the center ring. They can be
secured on equipment or optical system
using their mounting holes.
◦The LMT type allows simultaneous leveling in
two directions, vertical and horizontal.
Outline Drawing
LMC
(φ15)
Index
A
(φ20)
(12)
4
φ32
Bubble
Specifications
Part Number
External Size
[mm]
A
[mm]
Sensitivity
[ ° ]
Material
LMC-2 φ32 3-φ2.5, PCDφ27 1 Aluminum Black coating 0.022
LMC-3 φ32 3-φ2.5, PCDφ26 1 Brass Chrome plated 0.028
LMT-1 45×35 − 1 Aluminum Black coating 0.027
Finish
Weight
[kg]
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D019

Bases
System Diagram of Base System
Application
Systems
Optics &
Optical
Coatings
Holders
How to View the Chart
The connection is checked in order starting from the
standard rod or other attachable rod of our holders, to
rod stands.
The color codes represent 15 patterns of connection
from the rod to board and lab bench, if a color is the
same in each number of the above, the connection will
be possible.
Rod
diameter
12
Part number
−
Posts
Posts
RO
D048, D049
Color Code
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
(Example) for color code (3)
color (red)
20
−
Bases
Posts
12.7 8-32UNC
Post Holders Base plates BoardLab bench
12.7 1/40-20UNC 1/40-20UNC 1/40-20UNC
12.7
UU
Manual
Stages
Actuators
Post Holders
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Rod
diameter
12
20
Rod
diameter
12
20
Mounting screws
(male)
M16
M6
M16
M6
12.7 1/4-20UNC
Mounting screws
(male)
M16
Part number
−
−
−
−
UU
Part number
−
−
High Stability Ball Plunger Post Holders
BRS
D042
Color Code
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
Rod stand
RS
D043
Color Code
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
Adapters
Tools
Carriers
Carriers for Large Optical Rails
Carriers for Small Optical Rails
CAA-L
CAA-LS
D023
D025
Mounting screws
(female)
M16
Part number
−
Color Code
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
Mounting screws
(female) Part number
M16 −
Color Code
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
M6
EE
M6
EE
1/4-20UNC
UU
1/4-20UNC
UU
Optical Rails
Large Low-Profile Optical Rails
Medium Low-Profile Optical Rails
OBT-LH/LUU
OBT-SH-SUU
D022
D024
Color Code
Color Code
Fixing counterbore Part number
1 2 3 4 5 6 7 8
9 10 11 12 13 14 15
Fixing counterbore Part number
1 2 3 4 5 6 7 8
9 10 11 12 13 14 15
M6
EE
M6
EE
1/4-20UNC
UU
1/4-20UNC
UU
D020
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Conversion Adapters
Conversion Size
M6 M4
M6 Conversion Adapters
AD-M6-M4
D030
Color Code
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
Application
Systems
Optics &
Optical
Coatings
Holders
M16
M6
M6
M6
1/4-20UNC 1/4-20UNC
−
EE
UU
Baseplates
Base plates
BSP
D028, D029
Color Code
Mounting screws Mounting Part
(female) long hole number 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
Fixing screw
(female)
Pitch
M4 25P
M6 25P
1/4-20UNC 25.4P
Boards & Lab Bench
Part
number
−
EE
UU
Optical Base plates
OBC
1 2 3 4 5 6 7 8
D032
Color Code
9 10 11 12 13 14 15
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Stand Base/Stand Clamp
RCA / RC
Aluminum Honeycomb Breadboards
HA
Index
M16
M6
M6
M6
−
EE
D044
Color Code
Mounting screws Mounting Part
(female) long hole number 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
Fixing screw
(female)
M6
1/4-20UNC
Pitch
25P
25.4P
D016
Color Code
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
Guide
Vibration
Isolation Systems
Optical Tables
1/4-20UNC 1/4-20UNC
M16
UU
−
Magnet Base
MB
D026
Color Code
Mounting screws
Part
(female) Mounting number 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
Fixing screw
(female)
M6
1/4-20UNC
Pitch
25P
25.4P
Aluminum Honeycomb Optical Tables
HA-L
D014
Color Code
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
M6
Magnetized M6/EE
1/4-20UNC
UU
High-performance Vibration Isolation Systems
with Aluminum Honeycomb Top
TDI-LA
D008
Fixing screw
(female)
M6
Pitch
25P
Color Code
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
1/4-20UNC
25.4P
Scale Installation and Custom Lengths
◦Custom lengths not listed in the catalog are available.
◦To order surface finishing of the cut surfaces, specify “with
reprocessing”.
◦For the OBA-L and OBA-SH series, to use tapped holes on
the lateral side after cutting, specify “with tapped holes”.
◦Since the price varies depending on the specifications such
as one-side cut, both-sides cut, with tapped holes etc., contact
our International Sales Division for more information.
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D021

Bases
Large Optical Rails
Large Low-Profile Optical Rails
OBA-LH
OBT-LH/LUU
Application
Systems
Optics &
Optical
Coatings
Holders
OBA-LH
W6019
Large Optical Rails have a tube-shaped cross section with fins extending radially in four directions.
◦Carriers for large optical rails can be mounted on all four surfaces, top, lateral sides (two faces) and bottom, using these fins.
Guide
▶Contact our International Sales Division for information on scale
installation and length change.
Outline Drawing
Catalog
Code
Bases
OBA-LH
100
A
Manual
Stages
Actuators
Specifications
Part Number
Primary material: Aluminum
Finish: Black Anodized
A
[mm]
B
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
OBA-500LH 500 - 3.3
OBA-1000LH 1,000 - 6.6
100
10
φ84
φ74
Motoeized
Stages
OBA-1500LH 1,500 - 9.9
OBA-2000LH 2,000 - 13.2
2×4-M6 P1 depth 15 φ86PCD
Tapped holes on both ends
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
OBT-LH/LUU
◦100mm-wide, 25mm-high optical rails offer low optical axis and light weight.
Catalog
Code
W6020
Designed to be directly mounted on top of a vibration isolator or optical laboratory bench using M6
bolts.
Guide
▶Contact our International Sales Division for information on scale
installation and length change.
Optical Bases
Posts
Brackets
Adapters
Outline Drawing
OBT-500LH/1500LH
25
10
5.7
52
6.5
11
Hexagon socket head cap screw
M6×18…7 screws/17 screws
Hex wrench for M6…1 screw
φ6.5 φ11 counterbore
10
OBT-1000LH/2000LH
25
10 15
5.7
52
6.5
11
Hexagon socket head cap screw
M6×18…13 screws/23 screws
Hex wrench for M6…1 screw
φ6.5 φ11 counterbore
15
10
Tools
7.6
100
7.6
100
10
20
(50)
C
A
(50)
10
20
(100)
C
A
(100)
C: 100mm pitch between the centers of slotted hole and counterbore
OBT-LUU
25
5.7
Hexagon socket head cap screw M6×18…3 screws/6 screws/9 screws/11 screws (EC)
Hexagon socket head cap screw 1/4-20UNC×3/4…3 screws/6 screws/9 screws/11 screws (US)
50.8
7
7.6
100
11
10
20
B
177.8
C
A
B
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
A
B
C
[mm]
Weight
METRIC INCH
[mm]
[mm]
METRIC INCH
[kg]
OBT-500LH OBT-500LUU 500 72.2 100× 4 177.8× 2 1.7
OBT-1000LH OBT-1000LUU 1,000 55.5 100× 8 177.8× 5 3.5
OBT-1500LH OBT-1500LUU 1,500 38.8 100×14 177.8× 8 5.2
OBT-2000LH OBT-2000LUU 2,000 111 100×18 177.8×10 7.0
D022
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Carriers for Large Optical Rails
CAA-L
Catalog
Code
W6021
Mounted on a large optical rail (OBA-L/LH) or large low-profile optical rails (OBT-LH) freely slide
along the rail and can be locked in place.
◦The CAA-80LF is designed to be attached to the
bottom of a large optical rail for direct clamping to an
optical vibration isolator or laboratory bench.
◦The CAA-100LC is designed to assemble large optical
rails at right angles to each other.
Guide
▶Friction-reducing tape is applied to the carrier surfaces that will be
in contact with optical rails. Use as-is without removing the tape.
Application
Systems
Optics &
Optical
Coatings
Outline Drawing
CAA-40L/40LEE/40LUU
24
11 2-M4 depth 10
33
59.5
150
MAX30
100
50
40
20
CAA-40L
2-M6 P1 depth 7
20
55
59
M16 P1
depth 10
3-M3 depth 6
5-B depth 7
A
A A
A
20
Part Number
A
[mm]
B
CAA-40LEE 25 M6 P1
CAA-40LUU 25.4 1/4-20UNC
CAA-60L/65LEE/65LUU
24
11 11-M4 depth 10
33
59.5
150
MAX30
100
25
25
50
M8 depth 12
15
60
25 25
20
CAA-60L
2-M6 P1 depth 7
47 57 20.5
M16 P1
depth 10
3-M3 depth 6
65
A A
20
15-B depth 7
A
A A
A
Part Number
A
[mm]
B
CAA-65LEE 25 M6 P1
CAA-65LUU 25.4 1/4-20UNC
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
CAA-80L
24
33
11 11-M4 depth 10
59.5
150
MAX30
100
25 25
50
M8 depth 12
15
80
60
25 25
20
CAA-120L/120LEE/120LUU
24
11
17-M4 depth 10
25
120
25 25
2-M6 P1 depth 7
19.5
98
M16 P1
depth 10
4-M3 depth 6
25
2-M6 P1 depth 7
19.5
CAA-100L
24
11
11-M4 depth 10
33
A
59.5
150
MAX30
120
A A
100
25 25
50
M8 depth 12
A
15
100
70
25 25
25-B depth 7
20
2-M6 P1 depth 7
57 57 20.5
M16 P1
depth 10
5-M3 depth 6
CAA-80LF
24
11
33
59.5
MAX30
150
50
CAA-100LC
24
11
Hexagonal socket head cap screw
M4×10…4 screws, Flat washer
80
50
20
59.5
4-5.5
9 backing
counterbore depth 8
Hexagon socket head cap screw
M6×12…4 screws
100
64
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
59.5
150
100
25 25
57
M16 P1
depth 10
A
A A
59.5
150
22
59.5
33
MAX30
50
M8 depth 12
74
20
15
CAA-120L
58
6-M3 depth 6
20
A
Part Number
A
[mm]
B
CAA-120LEE 25 M6 P1
CAA-120LUU 25.4 1/4-20UNC
33
MAX30
20
4-7
11 backing
counterbore depth 7
PCD86
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
Compatible Optical Rails
M4 M6 INCH
[kg]
CAA-40L CAA-40LEE CAA-40LUU
0.29
CAA-60L − − 0.39
− CAA-65LEE CAA-65LUU Large optical rails (OBA-L*/LH) 0.42
CAA-80L − − Large low-profile optical rails 0.5
CAA-100L − − (OBT-LH/LUU)
0.61
CAA-120L CAA-120LEE CAA-120LUU D022
0.72
CAA-80LF − − 0.51
CAA-100LC − − 0.57
* W6019
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D023

Bases
Medium Optical Rails
Medium Low-Profile Optical Rails
OBA-SH
OBT-SH/SUU
Application
Systems
Optics &
Optical
Coatings
OBA-SH
◦Carriers for medium optical rails can be secured to the
four surfaces, top, lateral sides (two faces) and bottom,
using these fins.
W6022
Medium Optical Rails have an X-shaped cross section with fins extending radially in four directions.
Guide
Catalog
Code
▶Contact our International Sales Division for information on scale
installation and length change.
Holders
Bases
Manual
Stages
Outline Drawing
OBA-SH
50
Specifications
Part Number
A
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
OBA-300SH 300 0.9
OBA-500SH 500 1.5
OBA-800SH 800 2.3
OBA-1000SH 1,000 2.9
OBA-1500SH 1,500 4.4
Actuators
OBA-2000SH 2,000 5.8
Motoeized
Stages
Light
Sources
Index
OBT-SH/SUU
Outline Drawing
Catalog
Code
W6023
OBT-300SH
Hexagon socket head cap screw M6×18…5 screws
Hex wrench for M6…1 screw
OBT-500SH/1500SH
Hexagon socket head cap screw M6×18…7 screws/17 screws
Hex wrench for M6…1 screw
Guide
Vibration
Isolation Systems
5.7
25
10
52
6.5
11
6.5 11 counterbore
10
5.7
25
10
52
6.5
11
6.5 11 counterbore
10
Optical Tables
Darkrooms/
Dark Boxes
6.4
10
20
50
(50) 100
300
100
(50)
6.4
10
20
50
(50)
C (100mm pitch between the centers of slotted hole and counterbore)
A
(50)
Optical Bases
Posts
OBT-800SH/1000SH/2000SH
Hexagon socket head cap screw M6×18…11 screws/13 screws/23 screws
Hex wrench for M6…1 screw
Brackets
Adapters
5.7
25
10
15
52 6.5 11 counterbore
6.5
11
15
10
Tools
6.4
50
10
20
(100)
C (100mm pitch between the centers of slotted hole and counterbore)
A
(100)
OBT-300SUU/500SUU/1000SUU
Hexagon socket head cap screw M6×18…2 screws/3 screws/6 screws (EC)
Hexagon socket head cap screw 1/4-20UNC×3/4…2 screws/3 screws/6 screws (UC)
5.7
25
50.8
6.4
50
7
50
8
2-M6 P1
depth 10
A
50mm-wide 25mm-high rail is designed to be directly secured on top of a laboratory bench while keeping a low optical axis.
11
10
20
B
177.8
355.6
A
B
Guide
▶Contact our International Sales Division for information
on scale installation and length change.
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
A
B
C
[mm]
Weight
METRIC INCH
[mm]
[mm]
METRIC INCH
[kg]
OBT-300SH OBT-300SUU 300 61.1 100× 2 177.8×1 0.6
OBT-500SH OBT-500SUU 500 72.2 100× 4 177.8×2 1.1
OBT-800SH − 800 − 100× 6 − 1.7
OBT-1000SH OBT-1000SUU 1,000 55.5 100× 8 177.8×5 2.2
OBT-1500SH − 1,500 − 100×14 − 3.3
OBT-2000SH − 2,000 − 100×18 − 4.4
D024
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Carriers for Medium Optical Rails
Feet for Large Optical Rails
CAA-LS/MB
OBT
CAA-LS/MB
Carriers mount on a medium optical rail, slide freely and can be locked in place at any location.
Catalog
Code
W6024
Application
Systems
Outline Drawing
CAA-25LS/25LSEE/25LSUU
18
8
27
90 34.3
MAX24
4-M2
depth 4
50
30
20
16
25
20 2-M4 depth 5 25
M16 P1 depth 7
2-4.5
Backing
8 counterbore
depth 5
16
CAA-25LS
A
A
3-B depth 6
Part
Number
A
[mm]
B
CAA-25LSEE 25 M6 P1
CAA-25LSUU 25.4 1/4-20UNC
CAA-40LS
18 40
8
32
4-M3 depth 7
27
34.3
90
MAX24
50
32
30
2-M2.6 depth 5
16
3.3
81
2-M4 depth 5
M16 P1 depth 7
2-4.5
Backing
8 counterbore
depth 5
CAA-60LS
18
27
8
34.3
90
MAX24
8-M4
depth 5.5
25
30
25
60
25 25
44
M16 P1 depth 7
18.3
66
4-M3 2-4.5
depth 6
16
Backing
8 counterbore
depth 5
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
CAA-65LSEE/65LSUU
18
8
27
34.3
90
MAX24
16
65
A A
A A
9-B depth 6
Part Number
A
[mm]
CAA-65LSEE 25 M6 P1
CAA-65LSUU 25.4 1/4-20UNC
B
CAA-100LS
8-M4 depth 5.5
18
8
27
34.3
90
MAX24
25
30
25
4-M3
depth 6
16
100
25 25
88
M16 P1 depth 7
13.3
71
2-4.5
Backing
8 counterbore
depth 5
CAA-60MB
18
27
8
34.3
90
MAX24
34
Hexagonal socket head
cap screw M4×10…4 screws
60
50
34.3
25
8-4.5
Backing
7.5 counterbore
16
depth 5
For mounting magnet base
Actuators
Motoeized
Stages
Light
Sources
Index
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
Compatible Optical Rails
M4 M6 INCH
[kg]
CAA-25LS CAA-25LSEE CAA-25LSUU
0.1
CAA-40LS − − 0.13
Medium optical rails (OBA-SH)
CAA-60LS − − 0.17
Medium low-profile optical rails (OBT-SH/SUU)
− CAA-65LSEE CAA-65LSUU 0.19
D024
CAA-100LS − − 0.28
CAA-60MB − − 0.18
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
OBT
Catalog
Code
W6026
◦OBT is a thin plate type of Rail Feet; it is made to be matched with
OBT-LH/SH optical rail. It allows +/−10mm heigth adjustment.
Posts
Brackets
Adapters
Tools
Outline Drawing
OBT-LS
18 15 10
7
Hexagonal socket headcap screw
M6×18…2 screws
2-M6 P1
120
2-M4
30
80
100
20
M8 P1
27 20
10
76
2-M8 P1
OBT-LW
18 15 10
7
M8 P1
Hexagonal socket headcap screw
M6×18…2 screws
2-M6 P1
120
2-M4
30
80
100
M8 P1
20
20
10
OBT-WL
160
100
50
M6 P1
Groove for mounting large low-profile bench
20
2
8
15
M8 P1
55
32
30
12
55
55
27
76
20
30±10
20
30±10
2
medium low-profile bench
Groove for mounting
20
Specifications
Part Number
Compatible Optical Rails
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
OBT-LS Large low-profile optical rails (OBT-LH) D022
0.28
OBT-LW Medium low-profile optical rails (OBT-SH) D024
0.33
OBT-WL
Large low-profile optical rails (OBT-LH)
Medium low-profile optical rails (OBT-SH)
D022
D024
0.24
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D025

Bases
Magnet Base
Flexible Post Holder
MB
MB-MX/MX-AM
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
MB
Designed to arbitrarily lay out and secure optical-system units on top of an optical vibration isolator
or laboratory bench (flat surface of magnetic material).
◦Easy attachment/detachment by switching the lever
ON/OFF.
◦Secured on any position regardless of tapped holes.
◦Have an M16P1 tapped hole at the center of the top
surface to accommodate a post holder, post, or the
like. (Note that the MB-S40 and MB-L40 have an M6
tapped hole.)
Guide
Catalog
Code
W6027
▶A dedicated adapter (SP-130) is available for attaching a stage or
the like to the top surface of the MB-CB-PB. D060
▶The opposite surface of the ON/OFF switching lever of MB-PG can
be also magnetically secured.
▶Aluminum crossed roller slide stages with magnet base (TAG-601,
TAG-602) that integrate a magnet base with manual stage are also
available.
W7013, W7034
Light
Sources
Index
Outline Drawing
MB-S40 MB-L40 MB-CB-PB
MB-BUU
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
15 40
35 32
40
32
4-M3 depth 6
M6 P1 depth 6
10
90°
40
16 16
20
M6 P1 depth 6
8-M3 depth 4.5
20
16 16
40
4-M2 depth 3
20
61.8
50
19.2
55
50
34
4-M4 depth 7
M16 P1 depth 6
21.2 58.5
55
50.8
50
31.75
4-8-32UNC depth 8
1/4-20UNC depth 8
Brackets
Adapters
Tools
MB-L65C-M4
5 65
25 25
8-M4 depth 6
MB-L65A-M6
5 65
25 25
8-M6 P1 depth 6
MB-L65C-M6EE / MB-L65C-1/4UU
5 65
A A 9-B depth 6
M16 P1 depth 6
M16 P1 depth 6
(18.5) 65
20
25 25
16.2
65
(18.5)
25
20 25
16.2
(18.5) 65
20
A A
16.2
Part Number
A
(mm)
MB-L65C-M6EE 25 M6 P1
MB-L65C-1/4UU 25.4 1/4-20UNC
B
MB-PH MB-PG MB-L120-M4 MB-L120-M6
80 21 70
50
70
50
4-M4 depth 8
M16 P1 depth 6
16.7 120
50
52
60
50
4-M4 depth 8
M16 P1 depth 6
120
(31.5)
25 25
25
25 25
6
25
120
25 25
25
24-M4 depth 6
M16 P1 depth 6
18
120
(31.5)
25 25 25 25 25
6
25
120
25 25
25
24-M6 P1 depth 6
M16 P1 depth 6
18
D026
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Specifications
Part Number
M4 M6 INCH
Holding Force
[N]
MB-S40 − − 198 (about 20kgf) 0.4
MB-L40 − − 49 (about 5kgf) 0.2
MB-CB-PB − MB-BUU 294 (about 30kgf) 1
MB-L65C-M4 − − 147 (about 15kgf) 0.5
− MB-L65C-M6EE MB-L65C-1/4UU 147 (about 15kgf) 0.6
− MB-L65A-M6 490 (about 50kgf) 0.6
MB-PH − − 490 (about 50kgf) 2.5
MB-PG − − 294 (about 30kgf) 2.4
MB-L120-M4 MB-L120-M6 − 294 (about 30kgf) 2.4
MB-MX/MX-AM
Weight
[kg]
Post Clamp can be moved freely by loosening the clamp handle to
reposition post mounted holders quickly and easily.
◦The cam style clamping mechanism enables easy locking and release of the
whole joint with a simple turn of the knob.
◦The post clamp is designed to securely hold φ12 posts.
◦The MB-MX has a magnetic base and can be freely secured on optical vibration
isolators or laboratory benches (which are flat and made of magnetic material).
◦The MX-AM is an external thread type, which has an M16P1 external thread on
its bottom that enables direct installation on base plates.
Catalog
Code
W6038
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Outline Drawing
Posts
MB-MX
φ12 0.05
0
12
φ22
16
2
MX-AM
φ12 +0.05
0
12
φ22
16
2
Brackets
Adapters
14.5
60
14.5
60
Tools
φ9.9
(73.5)
Clamp handle
φ9.9
(73.5)
Clamp handle
170
φ50
φ34
353
φ50
17
φ11.9
408
17
φ11.9
225
55
5
φ34
M16 P1
58.5
79.7
50
Specifications
Part Number
Holding Force*
MB-MX 1.96N (about 0.2kgf) 1.9
MX-AM 1.96N (about 0.2kgf) 0.9
* Holding force is a reference value.
Weight
[kg]
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D027

Bases
Base Plate
BSP/FBP
Catalog
Code
W6028
M6/INCH
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Designed to mount optical units on vibration isolators or laboratory benches with M6 tapped holes.
◦Have an M16P1 tapped hole at the center of the top
surface to accommodate a post or post holder. Other
tapped holes on the top surface allow a stage or other
equipment to be secured.
◦Slots allow position adjustment when mounting to a
breadboard. Slots allow use on both metric and inch
hole patterns.
◦The base clamp (BSC-60) allows a base plate to be
secured at an arbitrary position where there is no
tapped hole. D028
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Outline Drawing
BSP-2460
Hexagonal socket headcap screw M6×18…2 screws
Flat washer
60
37
20
10
BSP-40100
Hexagonal socket headcap screw M6×14…2 screws
Flat washer
100
47
32
20 7
Vibration
Isolation Systems
24
20
7
40
32
20
7
Optical Tables
Darkrooms/
Dark Boxes
4-M2 M16 P1
4-M3 M16 P1
4-M2
Optical Bases
Posts
Brackets
Adapters
BSP-70120
Hexagonal socket headcap screw M6×14…6 screws
Flat washer
120
77
2-M4
62
25 25
7
BSP-70170
Hexagonal socket headcap screw M6×14…6 screws
Flat washer
25
170
87
62
25
2-M4
7
Tools
70
62
25 25
30
7
70
62
25 25
30
7
8-M4 4-M3 PCDφ42
4-M4 M16 P1
8-M4
4-M4
M16 P1
4-M3 PCDφ42
Primary material: Aluminum
M6
Finish: Black Anodized
Part Number
Weight
[kg]
BSP-2460 0.027
BSP-40100 0.06
BSP-70120 0.13
BSP-70170 0.18
Primary material: Aluminum
M6/INCH
Finish: Black Anodized
Part Number
Weight
[kg]
FBP-50UU 0.03
FBP-65UU 0.03
BSP-65EE 0.03
FBP-75WUU 0.05
BSP-85EE 0.06
BSP-85UU 0.06
BSP-120EE 0.13
BSP-120UU 0.13
D028
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Application
Systems
Optics &
Optical
Coatings
Holders
Outline Drawing
Bases
FBP-50UU/65UU
Hexagonal socket headcap screw M6×8, M6×18…1 pieces each (EC)
Hexagonal socket headcap screw
1/4-20UNC×5/16, 1/4-20UNC×3/4…1 pieces each (US)
A
20 B
BSP-65EE
Hexagonal socket headcap screw M6×15…2 screws (EC)
Hexagonal socket headcap screw
1/4-20UNC×5/8…2 screws (US)
65
50
20
7
FBP-75WUU
Hexagonal socket headcap screw M6×8, M6×18…1 pieces each (EC)
Hexagonal socket headcap screw
1/4-20UNC×5/16, 1/4-20UNC×3/4…1 pieces each (US)
75
40
Manual
Stages
Actuators
3
7
10 7
25
Part Number
A
(mm)
B
(mm)
FBP-50UU 50 17.5
FBP-65UU 65 32.5
M4 4-M2 depth 4
7
20
25
3
7
7
10
25
Motoeized
Stages
Light
Sources
11
BSP-85EE/85UU
Hexagonal socket headcap screw M6×15…2 screws (85EE)
Hexagonal socket headcap screw 1/4-20UNC×5/8…2 screws (85UU)
85
50
A
7
BSP-120EE/120UU
11
Hexagonal socket headcap screw M6×15…2 screws (120EE)
Hexagonal socket headcap screw 1/4-20UNC×5/8…2 screws (120UU)
120
75
A A
7
Index
Guide
Vibration
Isolation Systems
Optical Tables
7
A
40
70
A A
7
Darkrooms/
Dark Boxes
Optical Bases
B
8-C
Posts
Part Number
A
(mm)
B
C
BSP-85EE 32 M6 P1 M3
BSP-85UU 31.75 1/4-20UNC 6-32UNC
9-B
Part Number
A
(mm)
B
BSP-120EE 25 M6 P1
BSP-120UU 25.4 1/4-20UNC
Brackets
Adapters
Tools
M2
Designed to mount optical units on optical
baseplates (OBB) with M2 tapped holes.
Guide
▶Optical baseplates (OBB) with M2 tapped holes are also available.
D033
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
[kg]
BSP-24 0.004
BSP-39 0.006
BSP-50 0.016
Outline Drawing
BSP-24
Pan head screw M2×8…2 screws
Flat washer
24
18 5
BSP-39
M4 depth 5
Pan head screw M2×6…1 screw
39
7 10 15 7
BSP-50
Pan head screw
M2×6…6 screws
50
40
30
10 10
5
2
12
2.4
M4 depth 5
5 14
2 2.2
4
28
10 10
10
2.2
4
8-M2 depth 4
M4 depth 5
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D029

Bases
Base Clamps
M6 Conversion Adapters
BSC
AD-M6
Application
Systems
Optics &
Optical
Coatings
BSC
Clamp for use with BSP series M6 base plates.
Catalog
Code
W6029
◦Can be used to secure base plates or other equipment
with a plate-shaped protrusion on its bottom surface.
◦Clamps plate thicknesses of 7 − 10mm.
Holders
Bases
Outline Drawing
Manual
Stages
Guide
BSC-60/60UU
60
25
Actuators
Motoeized
Stages
Light
Sources
Index
▶An M6 base plate is normally secured on top of a vibration isolator
or laboratory bench using an M6 bolt with a long-notched section.
This base clamp allows fixing of the base plate at an arbitrary
position even when there is no tapped hole.
Specifications
Part Number
A
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
B
[kg]
BSC-60 14.5 M6 P1 0.04
BSC-60UU 15.5 1/4-20UNC 0.04
A 10
20
B
M5 hexagon socket set screw
26
7
17
Use at 3 or less
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
AD-M6
■M6-M4 Conversion Adapters
◦Adapter for converting a
mounting hole from M6 to M4.
Outline Drawing
AD-M6-M4
φ10
■M6-M2 Conversion Adapters
◦Adapter for converting a
mounting hole from M6 to M2.
Catalog
Code
W6030
Outline Drawing
AD-M6-M2
φ10
φ4
Brackets
Adapters
Tools
4
2
φ4.5
φ6
4
2
φ6
2
φ2.4
Specifications
Part Number
Weight
[kg]
Primary material: Aluminum
Finish: Black Anodized
Quantity
[Pieces]
AD-M6-M4 0.004 10
Specifications
Part Number
Weight
[kg]
Primary material: Aluminum
Finish: Black Anodized
Quantity
[Pieces]
AD-M6-M2 0.005 10
Example of Use of Conversion Adapters
M4 tap
M6M4 Conversion Adapters: AD-M6-M4
Post Holders: RS-12-30
Base Plate: BSP-2460
M6M4 Conversion Adapters: AD-M6-M4
Pedestal Bases: PST-40
Pedestal Clamps: PSCA-11.5
Using adapter AD-M6-M4, (example: OBC-3045) breadboard fasten to.
D030
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Kinematic Bases/Kinematic Base Plate
REP
Catalog
Code
W6031
Kinematic base consisting of upper and lower plates, where the top plate secures a holder or
equipment while the bottom plate is fixed on an optical breadboard.
◦Accurate positional repeatability is achieved by matching the holes on the upper plate to the three steel balls embedded
in the lower plate.
◦There is a type to be fixed with a strong magnet, and with fixation clamp screw or knurling.
◦The magnet type of REP series (□ 25,40,60 mm) can be quickly exchanged by a powerfully forced connection. It is
realized the reproducibility of less than 100μrad.
◦Always secure the lower plate with screws.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Magnet type
Fixed type
Top Plate only (Left)
Actuators
REP-25
Hexagonal socket head cap screw M2×6…4 screws
REP-65EE/65UU
65
Outline Drawing
25
20
REP-65PEE/65PUU
REP-40/40UU
Hexagonal socket head cap screw M6×12…4 screws (65EE)
Hexagonal socket head cap screw 6-20UNC×5/16…4 screws (65UU)
25
1
65
A A
12 12
7-B
5
depth 10
A
A
25
20
4-M2 depth 4 12
M4 depth 4
65
A A
4-2.5
4.2 counterbore
3
Part Number
A
(mm)
B
REP-65EE 25 M6 P1
REP-65UU 25.4 1/4-20UNC
7-B
depth 10
12
40
4-7
11 counterbore
Hexagonal socket head cap screw M3×8…4 screws (40)
Hexagonal socket head cap screw 6-20UNC×5/16…4 screws (40UU)
40
15
A
4-B depth 6
A
Part Number
REP-70
(10)
(10)
A
(mm)
Hexagonal socket head cap screw M4×10…4 screws
70
25 25
17 17
8-M4 depth 8
70
25 25
C depth 6
B
7-4.5 mounting hole
8 counterbore
4-D
6.2 counterbore
4
C
clamp
M16 P1 depth 10
5
φD
(mm)
REP-40 32 M3 M6 P1 3.5
REP-40UU 31.75 6-32UNC 1/4-20UNC 4
21
REP-60
60
50
Hexagonal socket head cap screw M4×8…4 screws
60
50
16
32 3.5
4-M4 depth 6
4-M3 depth 6
4-4.5
8 counterbore
M16×1
32
REP-100
(10)
21 (10) 100
25
Hexagonal socket head cap screw M4×10…4 screws
100
25 25
25
5
clamp
M16 P1 depth 10
8-M4 depth 8
4-4.5 mounting hole
8 counterbore
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
A
65
A
Part Number
A
(mm)
B
REP-65PEE 25 M6 P1
REP-65PUU 25.4 1/4-20UNC
Primary material: Aluminum
Magnet Type Finish: Black Anodized
Part Number
Weight
[kg]
REP-25 0.03
REP-40 0.07
REP-40UU 0.07
REP-60 0.09
Primary material: Iron
Fixed type
Finish: Black matte
Part Number
Weight
[kg]
REP-65EE 0.29
REP-65UU 0.29
REP-70 0.77
REP-100 1.5
Primary material: Aluminum
Top Plate only Finish: Black Anodized
Part Number
Weight
[kg]
REP-65PEE 0.12
REP-65PUU 0.12
Guide
▶Mount (FMB-40) for direct installation of
mirror holders that enables switching of
optical path is also available.
C018
▶We offer top plates for replacement other
than catalog products. WEB reference
W6031
Attention
▶The magnet type of REP series (□25, 40,
60 mm) has a weak structure to offset load
for magnetic force retention. It is recommended
to use that the center of gravity is
matched to the center of the top plate.
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D031

Bases
Catalog
Optical Baseplates OBC Code W6032
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Black Anodized Aluminum Base Plates.
Space-saver on vibration isolators or laboratory benches when configuring optical units.
◦Attached grips allow easy moving and storage.
◦M4 or M6 tapped holes (through holes) are arranged in
a matrix form spaced 25×25mm.
◦Flatness is 0.2mm.
Guide
▶One set of the optical baseplate includes two grips and an aluminum
plate.
▶Custom sizes not listed in the catalog can be purchased.
Contact our International Sales Division for more information.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Outline Drawing
OBC-3045 Series
Hexagon socket head cap screw (stainless steel construction) M6×10…4 screws (3045, 3045-M6)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×3/8…4 screws (3045-1/4UU)
450
A (pitch C×18 holes)
208-F
46
10
3
OBC-4560 Series
Hexagon socket head cap screw (stainless steel construction) M6×10…4 screws (4560-M6)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×3/8…4 screws (4560-1/4UU)
600
46
10
432-F
A (pitch C×24 holes)
3
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
OBC-4545 Series
Hexagon socket head cap screw (stainless steel construction) M6×10…4 screws (4545, 4545-M6)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×3/8…4 screws (4545-1/4UU)
450
A (pitch C×18 holes)
316-F
46
10
3
D
B (pitch C×18 holes)
450
93.5
D
B (pitch C×12 holes)
300
93.5
D
B (pitch C×18 holes)
450
93.5
E
4-7 mounting hole
11 counterbore
Part Number A (mm) B (mm) C (mm) D (mm) E (mm) F
OBC-3045 425 275 25 250 400 M4
OBC-3045-M6 425 275 25 250 400 M6
OBC-3045-1/4UU 431.8 279.4 25.4 254 406.4 1/4-20UNC
4-7 mounting hole
E
11 counterbore
Part Number A (mm) B (mm) C (mm) D (mm) E (mm) F
OBC-4560 575 425 25 400 550 M4
OBC-4560-M6 575 425 25 400 550 M6
OBC-4560-1/4UU 584.2 431.8 25.4 406.4 558.8 1/4-20UNC
4-7 mounting hole
11 counterbore
E
Part Number A (mm) B (mm) C (mm) D (mm) E (mm) F
OBC-4545 425 425 25 400 400 M4
OBC-4545-M6 425 425 25 400 400 M6
OBC-4545-1/4UU 431.8 431.8 25.4 406.4 406.4 1/4-20UNC
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Tapped Holes on Top Surface
Size
Weight
[mm]
[kg]
M4 M6 1/4-20UNC
OBC-3045 OBC-3045-M6 OBC-3045-1/4UU 300×450 3.6
OBC-4545 OBC-4545-M6 OBC-4545-1/4UU 450×450 5.4
OBC-4560 OBC-4560-M6 OBC-4560-1/4UU 450×600 7.3
D032
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Optical Baseplates
OBB/OBC
Catalog
Code
W6033
◦The OBC model has M4 tapped holes on 25×25mm matrix, and the OBB model has M2 tapped holes on 10×10mm matrix.
Guide
▶Medium low-profile optical rails or compact aluminum rails can be
secured on the top surface. In that case, adapters for converting
M6 to M4 (AD-M6-M4) and M6 to M2 (AD-M6-M2) are available.
D030
▶We will accept production of sizes not listed in the catalog.
Contact our International Sales Division for more information.
Attention
▶Note that this product does not come with grips.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Outline Drawing
Motoeized
Stages
OBB-1216
Hexagonal socket headcap screw M6×10…8 screws, M4×12…4 screws
OBB-1230
Hexagonal socket headcap screw M6×10…8 Screws, M4×12…4 screws
Light
Sources
156-M2
depth 4
160
150 (pitch 10×16 holes)
10
10
3
310-M2
depth 4
300
290 (pitch 10×30 holes)
10
10
3
Index
120
100 (pitch 10×11 holes)
10
50
75
100
4.5
120
100 (pitch 10×11 holes)
10
50
75
100
4.5
Guide
Vibration
Isolation Systems
Optical Tables
8-φ7 mounting holes
φ11 counterbore
50
100
125
4-φ4.5 mounting hole
φ8 counterbore
50
225
250
4-φ4.5 mounting hole
φ8 counterbore
8-φ7 mounting holes
φ11 counterbore
Darkrooms/
Dark Boxes
Optical Bases
Posts
OBB-2030
Hexagonal socket headcap screw M6×10…8 screws, M4×12…4 screws
554-M2
depth 4
300
290 (pitch 10×29 holes)
10
10
3
Brackets
Adapters
Tools
200
180 (pitch 10×19 holes)
10
50
150
4.5
8-φ7 mounting holes
φ11 counterbore
50
200
250
4-φ4.5 mounting hole
φ8 counterbore
Specifications
Part Number
Size
[mm]
Tapped Holes on Top Surface
OBB-1216 120×160 M2 0.48
OBB-1230 120×300 M2 0.93
OBB-2030 200×300 M2 1.58
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
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D033

Bases
Optical Baseplates
Aluminum Spacers (□25mm)
OBB/OBC
MSP-25
Application
Systems
Optics &
Optical
Coatings
Holders
Outline Drawing
OBB-121EE/121UU
Hexagonal socket headcap screw M6×10…4 screws (121EE)
Hexagonal socket headcap screw 1/4-20UNC×3/8…4 screws (121UU)
160
150=(P10×15)
10
160-M2
depth 4
10
3
OBB-123EE/123UU
Hexagonal socket headcap screw M6×10…4 screws (123EE)
Hexagonal socket headcap screw 1/4-20UNC×3/8…4 screws (123UU)
300
290=(P10×29)
10
10 314-M2 3
depth 4
10
Bases
Manual
Stages
A
B
100=(P10×10)
120
C
B
10
100=(P10×10)
120
Actuators
B
A
8-φ7
φ11 counterbore
B
A
8-φ7
φ11 counterbore
Motoeized
Stages
Light
Sources
Index
OBB-203EE/203UU
Hexagonal socket headcap screw M6×10…4 screws (203EE)
Hexagonal socket headcap screw 1/4-20UNC×3/8…4 screws (203UU)
300
290=(P10×29)
10
554-M2
depth 4
10
3
10
Guide
Vibration
Isolation Systems
Optical Tables
C
B
180=(10P×18)
200
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
B
A
8-φ7
φ11 counterbore
Adapters
Tools
Specifications
Part Number
Size
[mm]
Tapped Holes on Top
Surface
OBB-121EE 120×160 M2 100 50 - 0.48
OBB-121UU 120×160 M2 101.6 50.8 - 0.48
OBB-123EE 120×300 M2 250 50 100 0.93
OBB-123UU 120×300 M2 254 50.8 101.6 0.93
OBB-203EE 200×300 M2 250 50 150 1.58
OBB-203UU 200×300 M2 254 50.8 152.4 1.58
A
[mm]
B
[mm]
C
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
主 要 材 質 : アルミ
表 面 処 理 : 黒 アルマイト
Example of baseplate usage
D034
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Outline Drawing
OBC-1216
Hexagonal socket headcap screw M6×10…8 screws, M4×12…4 screws
160
10
25 25 25 25 25 25
3
27-M4
through hole
OBC-1230
Hexagonal socket headcap screw M6×10…8 screws, M4×12…4 screws
25
25 25 25 25
300
25
25 25 25 25
47-M4
through hole
10
3
Application
Systems
Optics &
Optical
Coatings
Holders
120
25 25 25 25
4-7 mounting holes
11 counterbore
125
75
4.5
4-7 mounting holes
11 counterbore
4-4.5 mounting hole
8 counterbore
120
25 25 25 25
4-7 mounting holes
11 counterbore
225
75
4-7 mounting holes
11 counterbore
4-4.5 mounting hole
8 counterbore
4.5
Bases
Manual
Stages
Actuators
OBC-2030
Hexagonal socket headcap screw M6×10…8 screws, M4×12…4 screws
Motoeized
Stages
300
25 25 25 25 25 25 25 25 25
25
69-M4
through hole
10
3
Light
Sources
200
25 25 25 25
175
4.5
Index
Guide
25
Vibration
Isolation Systems
25
Optical Tables
Darkrooms/
Dark Boxes
4-7 mounting holes
11 counterbore
275
4-7 mounting holes
11 counterbore
4.5 mounting hole
8 counterbore
Optical Bases
Posts
Brackets
Specifications
Part Number
Size
[mm]
Tapped Holes on Top Surface
OBC-1216 120×160 M4 0.48
OBC-1230 120×300 M4 0.93
OBC-2030 200×300 M4 1.58
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
Adapters
Tools
MSP-25
Catalog
Code
W6034
Spacers for □25mm positioning stages.
Outline Drawing
◦Used when the height
(thickness) of combined
stages is insufficient for the
preset optical axis.
◦Different thickness is available
with 5mm increments.
MSP-25
25
10 10
25
10 10
8-2.4
t
Guide
▶Custom sizes not listed in the catalog can be purchased.
Contact our International Sales Division for more information.
Specifications
Part Number
Thickness t
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
MSP-2505 5 0.008
MSP-2510 10 0.016
MSP-2515 15 0.024
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D035

Bases
Catalog
Aluminum Spacers (□40mm) MSP-40 Code W6035
□40mm spacers for adjusting the height of optical axis.
Application
Systems
Optics &
Optical
Coatings
Holders
◦Used when the stage height (thickness) is lower than
the preset optical axis.
◦Thickness is available starting with 1mm, enabling
adjustment to arbitrary height.
Guide
▶Custom sizes not listed in the catalog can be purchased.
Contact our International Sales Division for more information.
Bases
Manual
Stages
Outline Drawing
Actuators
Motoeized
Stages
MSP-40
Hexagon socket head cap screw M3×8…4 screws (4002, 4003)
Hexagon socket head cap screw M3×10…4 screws (4005)
40
8-φ3.5
16 16
t
MSP-40A
Hexagon socket head cap screw M3×10…4 screws
40
16 16 4-M3 depth 6
t
6
MSP-40B
Hexagon socket head cap screw M3×10…4 screws
40
16 16
4-φ3.5 mounting hole
φ6 counterbore
t
6
Light
Sources
16
16
16
40
16
16
40
16
40
Index
4-φ3.5 mounting hole
φ6 counterbore
4-M3 depth 6
Guide
Vibration
Isolation Systems
Combination Example (Height: 48mm)
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
15mm
MSP-4015B
3mm
MSP-4003
30mm
MSP-4030A
15mm
MSP-4015A
3mm
MSP-4003
Adapters
Tools
32
M3
M3
30mm
MSP-4030B
32
32
32
Height (mm)
Mounting Surface Pattern
P.C.D.32M3
□32M3
5 MSP-4005 MSP-4005
10 MSP-4010A MSP-4010B
15
20
25
30
35
40
45
50
55
60
65
Upper
Lower
Upper
Lower
Upper
Lower
Upper
Lower
Upper
Lower
Upper
Lower
Upper
Lower
Upper
Lower
Upper
Lower
Upper
Lower
Upper
Middle
Lower
MSP-4005
MSP-4010A
MSP-4010
MSP-4010A
MSP-4010
MSP-4015A
MSP-4010
MSP-4020A
MSP-4010
MSP-4025A
MSP-4010
MSP-4030A
MSP-4015
MSP-4030A
MSP-4020
MSP-4030A
MSP-4025
MSP-4030A
MSP-4030
MSP-4030A
MSP-4030
MSP-4005
MSP-4030A
MSP-4005
MSP-4010B
MSP-4010A
MSP-4010B
MSP-4010A
MSP-4015B
MSP-4010A
MSP-4020B
MSP-4010A
MSP-4025B
MSP-4010A
MSP-4030B
MSP-4015A
MSP-4030B
MSP-4020A
MSP-4030B
MSP-4025A
MSP-4030B
MSP-4030A
MSP-4030B
MSP-4030A
MSP-4005
MSP-4030B
Specifications
Part Number
Thickness t
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
MSP-4001 1 0.004
MSP-4002 2 0.009
MSP-4003 3 0.01
MSP-4005 5 0.02
MSP-4010A 10 0.04
MSP-4010B 10 0.04
MSP-4015A 15 0.06
MSP-4015B 15 0.06
MSP-4020A 20 0.09
MSP-4020B 20 0.09
MSP-4025A 25 0.11
MSP-4025B 25 0.11
MSP-4030A 30 0.13
MSP-4030B 30 0.13
D036
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Catalog
Aluminum Spacers (□60mm) MSP-60 Code W6036
□60mm spacers for adjusting the height of optical axis.
◦Used when the stage height (thickness) is lower than
the preset optical axis.
◦Thickness is available starting with 1mm, enabling
adjustment to arbitrary height.
Guide
▶Custom sizes not listed in the catalog can be purchased.
Contact our International Sales Division for more information.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Outline Drawing
Manual
Stages
MSP-60
Hexagonal socket head cap screw M4×8…4 screws (6002, 6003)
Hexagonal socket head cap screw M4×10…4 screws (6005)
60
25 25
8-4.5
32
t
MSP-60A
Hexagonal socket head cap screw M4×10…4 screws
60
25 25
32
4-M4
depth 10
t
5.5
MSP-60B
Hexagonal socket head cap screw M4×10…4 screws
60
t
25 25
32
5.5
Actuators
Motoeized
Stages
32
25 25
60
4-M3
depth 6
32
25 25
60
4×M4
depth 10
4-M3
depth 6
32
25 25
60
Light
Sources
Index
4-3.5
4-4.5 mounting hole
8 counterbore
4-4.5 mounting hole
8 counterbore
Guide
MSP-60C
Hexagon socket head cap screw M3×10…4 screws
25
60
25
32
8-M4 depth 10
32
4-3.5 mounting hole
6 counterbore
25
25
60
t
5.5
50
Combination Example (Height: 57mm)
50
M4
25mm
MSP-6025C
2mm
MSP-6002
30mm
MSP-6030A
50
50
25mm
MSP-6025C
2mm
MSP-6002
30mm
MSP-6030B
M4
25mm
MSP-6025A
M3
2mm
MSP-6002
30mm
MSP-6030C
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
32
32
Height (mm)
Mounting Surface Pattern
P.C.D.50M4 □50M4 □32M3
5 MSP-6005 MSP-6005 MSP-6005
10 MSP-6010A MSP-6010B MSP-6010C
15
20
25
30
35
40
45
50
55
60
65
Upper
Lower
Upper
Lower
Upper
Lower
Upper
Lower
Upper
Lower
Upper
Lower
Upper
Lower
Upper
Lower
Upper
Lower
Upper
Lower
Upper
Middle
Lower
MSP-6005
MSP-6010A
MSP-6010C
MSP-6010A
MSP-6010C
MSP-6015A
MSP-6010C
MSP-6020A
MSP-6010C
MSP-6025A
MSP-6010C
MSP-6030A
MSP-6015C
MSP-6030A
MSP-6020C
MSP-6030A
MSP-6025C
MSP-6030A
MSP-6030C
MSP-6030A
MSP-6030C
MSP-6005
MSP-6030A
MSP-6005
MSP-6010B
MSP-6010C
MSP-6010B
MSP-6010C
MSP-6015B
MSP-6010C
MSP-6020B
MSP-6010C
MSP-6025B
MSP-6010C
MSP-6030B
MSP-6015C
MSP-6030B
MSP-6020C
MSP-6030B
MSP-6025C
MSP-6030B
MSP-6030C
MSP-6030B
MSP-6030C
MSP-6005
MSP-6030B
MSP-6005
MSP-6010C
MSP-6010A
MSP-6010C
MSP-6010A
MSP-6015C
MSP-6010A
MSP-6020C
MSP-6010A
MSP-6025C
MSP-6010A
MSP-6030C
MSP-6015A
MSP-6030C
MSP-6020A
MSP-6030C
MSP-6025A
MSP-6030C
MSP-6030A
MSP-6030C
MSP-6030A
MSP-6005
MSP-6030C
Specifications
Part Number
Thickness t
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
MSP-6001 1 0.01
MSP-6002 2 0.02
MSP-6003 3 0.03
MSP-6005 5 0.05
MSP-6010A 10 0.10
MSP-6010B 10 0.10
MSP-6010C 10 0.10
MSP-6015A 15 0.15
MSP-6015B 15 0.15
MSP-6015C 15 0.15
MSP-6020A 20 0.19
MSP-6020B 20 0.19
MSP-6020C 20 0.19
MSP-6025A 25 0.24
MSP-6025B 25 0.24
MSP-6025C 25 0.24
MSP-6030A 30 0.29
MSP-6030B 30 0.29
MSP-6030C 30 0.29
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D037

Bases
Adjustable Adapter Kits
SP/UP
Catalog
Code
W6037
Platform for adjusting the height of optical axis.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
◦Made up of two aluminum plates and four stainless steel
posts (finish: none).
◦Posts are made to desired length in 1mm increments
between 11mm and 100mm.
◦The SP-124 is compatible with post holders and □60mm
positioning stages.
◦The UP can be directly secured on an optical breadboard.
Guide
▶Make sure to specify the post length A (A=11mm or longer) at the
time of ordering.
▶Custom Posts longer than the lengths listed in the catalog (but
within 300mm) as well as additional processing are available.
Contact our International Sales Division for more information.
Use
W6037 the Question Sheet for Height
Alignment Platform.
Attention
▶Weight does not include the weight of struts.
Light
Sources
Outline Drawing
SP-124-1
Hexagonal socket head cap screw M4×6…4 screws
SP-124-2
Hexagonal socket head cap screw M4×6…4 screws
Index
60
25 25
32
20
8-M4
60
25 25
32
20
8-M4
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
4-M3
M16 P1
20
4-M2
φ12
A 7
32
25
A+14 25
60
4-M3
M16 P1
20
32
4-M2
φ12
A 7
A+14 25 25
60
Posts
Brackets
2
□50
7
4-φ4.5 mounting hole
φ8 counterbore
2
7
4-φ4.5 mounting hole
φ8 counterbore PCDφ50
Adapters
Tools
UP-1216
Hexagon socket head cap screw
M6×18…4 screws, M4×16…4 screws
160
150 (pitch 25×7 holes)
27-M4
UP-1230
Hexagon socket head cap screw
M6×18…4 screws, M4×16…4 screws
300
250 (pitch 25×11 holes)
47-M4
UP-2030
Hexagon socket head cap screw
M6×18…4 screws, M4×16…4 screws
300
250 (pitch 25×11 holes)
69-M4
4-φ7
□50
□100
100
(pitch 25×5 holes)
10
10
4-φ4.5
Aφ20
120
A+20
4-φ4.5
250
200
50
50
φ20
100
(pitch 25×5 holes)
8-φ7
100 10 A 10
A+20 120
8-φ7
□100
250
φ20
150 (pitch 25×7 holes)
10 A 10
A+20 200
Specifications
Part Number
Strut Length
[mm]
SP-124-1
12≦A≦100
0.12
SP-124-2 * 101mm or longer will be quoted separately.
0.12
UP-1216
0.99
UP-1230
11≦A≦100
* 101mm or longer will be quoted separately.
1.89
UP-2030 3.18
Plate material: Aluminum
Plate Finish: Black Anodized
Weight
[kg]
D038
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Post Stand Guide
It is available for a fine-turn to any height, by using a post stand with the lineup of 15 – 76.2mm
height and a dedicated spacer.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Pedestal Bases|PST
Small Pedestal Bases|SPS
Stand Bases|RCA
Motoeized
Stages
Holder
M6
M4
1/4″
8-32UNC
Female Screw
Holders
M4
Female Screw
Supplied Screw
M4
It is the stand base suitable to the rod
stand (RS, BRS).
It can be freely placed in a limited
space.
Light
Sources
Index
CHS:Exclusive
Conversion
Screw
M6 M4
1/4 8-32
Turning hole
SCExclusive
Screw
M4 or 8-32UNC
M4 or 8-32UNC
Female Screw
Turning hole
M4
Female Screw
Magnet
M16
M6
1/4″
Stand Clamp
RC
Post Holders
M16
M6
1/4″
Stand Base
RCA
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Holder Side Supplied Screw
Post Stand
Side
M6 CHS-M4-M6-9 M4
M4 SC-M4-18EE M4
1/4″ CHS-1/4-8U-9 8-32UNC
8-32 SC-8U-18UU 8-32UNC
Stand Clamp
RC
Small Pedestal
Bases
SPS
Pedestral
Bases
PST
Stand Base
PSCA
or PSCS
Posts
Brackets
Adapters
Tools
Small Pedestal Adapters|PS-SP
The spacer for a post stand is used as a height adjustment spacer placed on the post stand.
◦Our post stand (PS series) has a lineup at 5 mm intervals.
The PS-SP series can be used to adjust the fine
height of 0.5-4.5 mm.
■Combination of Small Pedestal Adapters (PS-SP series)
and Screw (SC series) D041, D050
PS-SP
Height
[mm]
Combined Use Case
(Part number)
Available SC
screw Length
[mm]
Protruded Screw
Height
[mm]
0.5 PS-0.5SP 17.5 4
1 PS-1SP 17.5 3.5
1.5 PS-0.5SP+PS-1SP 17.5 3
2 PS-2SP 19.5 4.5
2.5 PS-0.5SP+PS-2SP 19.5 4
3 PS-1SP+PS-2SP 19.5 3.5
3.5 PS-0.5SP+PS-1SP+PS-2SP 21 4.5
4 PS-2SP×2 21 4
4.5 PS-0.5SP+PS-2SP×2 21 3.5
◦The height of optical axis of our holder has been designed in
millimeters (mm). If you want to set inch size, the post stand for
spacer (PS-SPUU series) can be used.
(Example) 2 “[50.8 mm] (optical axis height) = 25 mm (holder
optical axis height) +25 mm (post stand height) +0.8 mm (spacer
thickness for post stand thickness)
■Using the post stand for spacer (PS-SPUU series)
Optical Axis Height
Available Spacer
[INCH]
[mm]
(Part number)
1.5 38.1 PS-3.1SPUU
2 50.8 PS-0.8SPUU
2.5 63.5 PS-3.5SPUU
3 76.2 PS-1.2SPUU
3.5 88.9 PS-3.9SPUU
4 101.6 PS-1.6SPUU
4.5 114.3 PS-4.3SPUU
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D039

Bases
Posts holders
Pedestal Clamps
PST
PSC/PSCA/PSCS
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
PST
Outline Drawing
Catalog
Code
W6039
Pedestal Bases can be mounted directly on a vibration isolator or laboratory benchand are ideal for
flexible positioning of optical units with low optical axis.
PST
Dog Point Set Screws SC-M4-18EE…1 screws,
M4-M6 Conversion screw CHS-M4-M6-9…1 screws (METRIC)
Dog Point Set Screws SC-8U-18UU…1 screws,
8-32-1/4 Conversion screw CHS-1/4-8U-9…1 screws (INCH)
Manual
Stages
METRIC
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Specifications
Part Number
METRIC
INCH
B=M4
B=8-32UNC
Primary material: Stainless Steel
Finish: None
A
[mm]
Weight
[kg]
PST-15 PST-15UU 15 0.07
PST-20 PST-20UU 20 0.08
PST-25 PST-25UU 25 0.1
PST-25.4 PST-25.4UU 25.4 0.1
PST-30 PST-30UU 30 0.12
PST-35 PST-35UU 35 0.15
PST-38.1 PST-38.1UU 38.1 0.16
PST-40 PST-40UU 40 0.17
PST-45 PST-45UU 45 0.19
PST-50 PST-50UU 50 0.21
PST-50.8 PST-50.8UU 50.8 0.21
PST-55 PST-55UU 55 0.23
PST-60 PST-60UU 60 0.25
PST-63.5 PST-63.5UU 63.5 0.26
PST-76.2 PST-76.2UU 76.2 0.31
φ4
locking hole
φ4
12.8
B
locking hole
depth 6
φ26
φ32
PST-15/-20
φ26
φ32
PST-25 – 76.2
B
through hole
5
5
A
B
depth 10
A
M4
17.5 2
Accessory Screw
SC-M4-18EE
8-32UNC
5/64
(2)
17.5
Accessory Screw
SC-8U-18UU
INCH
M6
3
5
14
M4
Accessory Screw
CHS-M4-M6-9
1/4-20UNC
9
1/8
(3.2)
5
14
8-32UNC
Accessory Screw
CHS-1/4-8U-9
9
Posts
Brackets
Adapters
Tools
PSC/PSCA/PSCS
Catalog
Code
W6040
Clamps for Pedestal Bases (PST). Used in combination with a Pedestal, the Pedestal can be freely
positioned and secured on a vibration isolator or laboratory bench.
◦The PSC-10 is used in pairs, for clamping a
Pedestal at two positions, and the PSCA /
PSCS is used for clamping at a single position.
◦Since there is a long hole in the PSCA /
PSCS, it is possible for coarse adjustment
of the horizontal direction.
◦After alignment, tighten the attached M6
screw to secure the Pedestal.
Outline Drawing
PSC-10/10UU
φ25
PSCA/PSCS
Hexagon socket head cap screw (stainless steel construction) M6×12…1 screws (METRIC)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×1/2…1 screws (INCH)
A
28 B
5
22
5
10
6
32
26.5
7
12
A
4
11.5
6.3
3
4.5
Part Number A (mm) B (mm)
PSCA-11.5/11.5UU 60 22
PSCS-11.5/11.5UU 68 25.4
Specifications
Part Number
Primary material: Stainless Steel
Finish: None
A
Weight
[kg]
PSC-10 M6 P1 0.065
PSC-10UU 1/4-20UNC 0.065
Specifications
Part Number
Weight
Primary material Finish
METRIC
INCH
[kg]
PSCA-11.5 PSCA-11.5UU Aluminum Black Anodized 0.02
PSCS-11.5 PSCS-11.5UU stainless Steel None 0.06
D040
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Adapter Plates for Pedestal / Pedestal Adapters
Small Pedestal Base / Small Pedestal Adapters
SP-T / PS-SP
SPS / SPS-SP
SP-T
W6041
Auxiliary parts for Pedestal Bases. Secured on top of a Pedestal for
height adjustment of part of a small optical system or an optical unit.
◦Used in combination with a Pedestal and Pedestal clamp.
◦The SP-25T is designed primarily for □25mm stages with M2 mounting holes, and
the SP-40T is designed primarily for □25mm and □40mm stages with M2 and M3
mounting holes.
Catalog
Code
Application
Systems
Optics &
Optical
Coatings
Holders
Guide
▶Use pedestal adapters (PS-SP) for fine height adjustment that
cannot be managed with adapter plates for pedestal.
▶Custom sizes or shapes not listed in the catalog.
Contact our International Sales Division for more information.
Outline Drawing
SP-25T
8-M2
Countersunk screw
M4×10…1 screws
25
10 10
5
SP-40T
8-M3
Countersunk screw
M4×10…1 screws
40
16 16
20
5
Bases
Manual
Stages
Specifications
Part Number
SP-25T 0.009
SP-40T 0.02
PS-SP
◦Auxiliary spacer plates for pedestal (SP-T). This product
enables fine adjustment that cannot be managed
with adapter plates for pedestal.
◦Attached between the Pedestal and adjustable adapter
kits, and tightened together.
Outline Drawing
PS-SP
φ4.5
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
A
φ26
25
10
10
Guide
Catalog
Code
W6042
▶Custom sizes or shapes not listed in the catalog.
Contact our International Sales Division for more information.
Specifications
Part Number
M4 countersunk
screw hole
40
A
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
PS-0.5SP 0.5 0.002
PS-0.8SPUU 0.8 0.003
PS-1SP 1 0.004
PS-1.2SPUU 1.2 0.005
PS-1.6SPUU 1.6 0.006
PS-2SP 2 0.008
PS-2.5SPUU 2.5 0.01
PS-3.1SPUU 3.1 0.012
PS-3.5SPUU 3.5 0.014
PS-3.9SPUU 3.9 0.016
PS-4.3SPUU 4.3 0.017
16
16
20
4-M2 M4 countersunk screw hole
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
SPS
Small post stand is suitable for connection of an adaptive optics mount holder of φ15 mm or less.
◦It is easy to make any positioning and is fixed by post clamp (RC series).
◦As an optical unit of low optical axis, it can be placed directly on the vibration isolator and
optical bench.
SPS-SP
Specifications
Part Number
Specifications
Part Number
A
[mm]
A
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
SPS-12.5 12.5 0.01
SPS-15 15 0.013
SPS-20 20 0.017
As a spacer for small post stand, it corrects the deviation of the height of the optical axis.
Placing between the post stand and optical element mount holder, it is used after fixing
with fastened together.
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
SPS-0.5SP 0.5 0.0007
SPS-1SP 1 0.0015
SPS-2SP 2 0.003
Catalog
Code
W6079
Outline Drawing
SPS
9
Dog Point Set Screws
SC-M4-14EE…1 screws
φ10
φ20
Catalog
Code
M4 depth 6
Outline Drawing
φ2.5 locking hole
5
A
W6080
SPS-SP
Dog Point Set Screws
SC-M4-16EE…1 screw (2SP only)
A
φ4.5
φ10
Tools
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D041

Bases
High Stability Ball Plunger Post Holders
BRS
Catalog
Code
W6043
Application
Systems
Optics &
Optical
Coatings
Holders
Used for height and rotational coarse/fine adjustment of a post-equipped holder.
The hole shape was modified to hold a post with two lines and one point instead of one line and
one point, offering improved holding stability compared to our conventional products.
◦Fitted with a plunger to gently hold to post while the clamp is loosened,
enabling smooth adjustment with one hand.
◦By adjusting the screw pin at the bottom of post holder, the angle can
be changed 90 degrees.
◦Can be fixed on various places with replacement or addition of optional parts.
Bases
Clamp
Holder
Post
Manual
Stages
Actuators
Motoeized
Stages
Guide
1 line and 1 point 2 lines and 1 point
▶Clamp screws (RS-CB) can be purchased separately.
D045
Light
Sources
Index
Outline Drawing
BRS-12 φ22
BRS-12.7 BRS-20
φ12
Post fixing clamp
φ22
φ12.7
Post fixing clamp
φ30
φ20
Post fixing clamp
Guide
φ22 8
φ12
φ10
φ22 8
φ12.7
φ10
φ30 8
φ20
φ10
Vibration
Isolation Systems
26
Height fixing clamp
26
Height fixing clamp
30
Height fixing clamp
Optical Tables
Darkrooms/
Dark Boxes
A
A−8.5
φ16
9.5
A
A-8.5
φ16
9.5
A
A−8.5
φ16
9.5
Optical Bases
Posts
Brackets
4.5
M16P1
Special link pin
Wrench size 2.5
4.5
Special link pin
Wrench size 2.5
1/4-20UNC
4.5
M16P1
Special link pin
Wrench size 2.5
A-8.5 = Post limit position
Adapters
Tools
Inner Diameter: 12
Part Number
A
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
Inner Diameter: 12.7
Part Number
A
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
Inner Diameter: 20
Part Number
A
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
BRS-12-30 30 0.05
BRS-12.7-25.4UU 25.4 0.04
BRS-20-30 30 0.07
BRS-12-40 40 0.06
BRS-12.7-38.1UU 38.1 0.06
BRS-20-40 40 0.09
BRS-12-50 50 0.07
BRS-12.7-50.8UU 50.8 0.07
BRS-20-50 50 0.1
BRS-12-60 60 0.08
BRS-12.7-63.5UU 63.5 0.08
BRS-20-60 60 0.12
BRS-12-80 80 0.1
BRS-12.7-76.2UU 76.2 0.1
BRS-20-80 80 0.16
BRS-12-100 100 0.12
BRS-12.7-101.6UU 101.6 0.12
BRS-20-100 100 0.19
BRS-12-120 120 0.14
BRS-12.7-127UU 127 0.15
BRS-20-120 120 0.22
BRS-12-130 130 0.15
BRS-12.7-152.4UU 152.4 0.18
BRS-20-130 130 0.24
2-φ3
BRS-12-M6
φ17
Adapters for High Stability Type Post Holders|BRS
8
13.5
M6 P1
BRS-12-PSA
BRS-12-M6-PSA
BRS-12.7-1/4UU-PSA
locking
hole φ3
A
5
φ32
2-φ3
BRS-20-M6
BRS-20-1/4UU
φ25
8
13
A
◦Optional parts for high stability ball plunger post holders (BRS).
◦M6×P1 conversion adapter (BRS-**-M6) is required
for directly securing on a vibration isolator.
Specifications
Part Number
Compatible Post
Holders
Primary material: Stainless Steel
Finish: None
A
Weight
[kg]
BRS-12-M6 BRS-12 − 0.013
BRS-12-PSA BRS-12 M6 P1 0.023
BRS-12-M6-PSA BRS-12 M6 P1 0.02
BRS-12.7-1/4UU-PSA BRS-12.7 1/4-20UNC 0.02
BRS-20-M6 BRS-20 M6 P1 0.03
BRS-20-1/4UU BRS-20 1/4-20UNC 0.03
D042
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Post Holders
RS
Catalog
Code
W6044
Used for height and rotational coarse adjustment of a post-equipped holder.
◦To secure a holder, insert the post into the post holder,
and clamp it using the clamp screw on the side and
that of the intermediate ring on top.
◦Loosening the clamp screw on the side of the main body
while leaving that of the intermediate ring tightened
allows coarse rotational adjustment around the vertical
axis.
◦With three tapped holes provided on the side of the
main body for the clamp screw, it is possible to move
the clamp screw to where it needs to be after setting
up the post holder. (Note that the RS-30 model comes
with three clamp screws as standard.)
◦Fitted with an air-vent hole, enabling easy loading/
unloading of a post.
Guide
▶Intermediate rings (TR) and clamp screws (RS-CB) can be purchased
separately. D044, D045
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Outline Drawing
RS-6 RS-12 RS-20
Light
Sources
φ12
φ6 H7
φ22
φ12 H7
φ30
φ20 H7
Index
A
4
A-3
φ7
φ10
φ10
4
Post fixing clamp
φ12
φ6 H7
φ7
5
Height fixing clamp
M4
A 8
φ22
Post fixing clamp
φ12 H7
φ16
10
Height fixing clamp
A
A-5 8
φ30
Post fixing clamp
φ20 H7
φ16
10
Height fixing clamp
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
5
M16P1
5
M16P1
Brackets
Adapters
Inner Diameter: 6
Part Number
A
[mm]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
RS-6-15 15 0.008
RS-6-20 20 0.009
RS-6-25 25 0.01
RS-6-30 30 0.011
RS-6-35 35 0.012
RS-6-40 40 0.013
Inner Diameter: 12
Part Number
A
[mm]
Primary material: Brass
Finish: Black matte
Weight
[kg]
RS-12-30 30 0.1
RS-12-35 35 0.12
RS-12-40 40 0.13
RS-12-45 45 0.14
RS-12-50 50 0.15
RS-12-55 55 0.16
RS-12-60 60 0.17
RS-12-80 80 0.22
RS-12-100 100 0.26
RS-12-120 120 0.3
RS-12-130 130 0.32
Inner Diameter: 20
Part Number
A
[mm]
Primary material: Brass
Finish: Black matte
Weight
[kg]
RS-20-30 30 0.16
RS-20-35 35 0.17
RS-20-40 40 0.19
RS-20-45 45 0.21
RS-20-50 50 0.22
RS-20-55 55 0.24
RS-20-60 60 0.26
RS-20-80 80 0.32
RS-20-100 100 0.38
RS-20-120 120 0.45
RS-20-130 130 0.48
Tools
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D043

Bases
Stand Base/Stand Clamp
C shape intermediate ring
RCA/RC
TRC
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
RCA/RC
The base can be used to secure the rod stand in a small space.
◦Rod stand base with a magnet and space-saving
clamp to secure this stand base.
◦Clamp for M6 taps with 25mm centers (RC-10-17) and
clamp for M6 taps with 50mm centers (RC-10-25) are
available.
Outline Drawing
RCA
A depth 5.5
RC-10-17/25
Catalog
Code
Hexagon socket
head cap screw
(stainless steel construction)
M6×15…1 screws,Flat washer
A
10 15 B
W6081
Manual
Stages
20
10
11
7
12
20
Actuators
3 locking
hole
12
20
7
5
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Specifications
Magnet
Part Number
RCA-M16
RCA-M6
RCA-UU
Part Number Product Name To hold Mounting
20
5
A
(mm)
M16 P1
M6
1/4-20UNC
Part Number
Primary material: Stainless Steel
Finish: None
Weight
[kg]
RCA-M16 Stand Base M16 Rod Stand Magnet, Stand Clamp (RC-10) 0.023
RCA-M6 Stand Base M6 Rod Stand Magnet, Stand Clamp (RC-10) 0.035
RCA-1/4UU Stand Base 1/4 INCH Rod Stand Magnet, Stand Clamp (RC-10) 0.035
RC-10-17 Stand Clamp Stand Base (RCA-M16) Hexagon socket head bolt M6x15 0.027
RC-10-25 Stand Clamp Stand Base (RCA-M16) Hexagon socket head bolt M6x15 0.031
5
A
(mm)
B
(mm)
RC-10-17 42 17
RC-10-25 50 25
Optical Bases
Posts
Brackets
Adapters
Tools
TRC
Accessory parts for posts (RO)
◦Prevent falling the post mounted on the post holders.
◦C shape intermediate ring can be installed and fix the post after adjusting the height of optical path with holders.
Catalog
Code
W6082
Guide
▶Contact our International Sales Division if the standard intermediate
ring equipped with the post is needed to be replaced with the
C shape intermediate ring.
Attention
▶This product is delivered only by mail.
Outline Drawing
TRC-12/12.7
TRC-20
Specifications
Part Number
Inner Diameter
[mm]
Primary material: Aluminum
Finish: Black Anodized
Quantity [Pieces]
6
20
A H7
10
8
30
20 H7
10
TRC-12 φ12 5
TRC-12.7 φ12.7 5
TRC-20 φ20 5
Part Number
A
(mm)
TRC-12 12
TRC-12.7 12.7
D044
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Clamp Screws (For post holders)
Helicoidal 15mm Jacks / Helicoidal Post Holders
RS-CB
HCS-H / RSN
RS-CB
◦Used to secure posts inserted in post holders.
◦Use these screws as additions for post holders (RS
model) that allow clamping with maximum three clamp
screws to maximize holding strength.
RS-CB
16
8 8
3
19
M5
12
W6046
Clamps for high stability ball plunger post holders (BRS-12, BRS-20) and post holders (RS-12, RS-20, RS-30).
Outline Drawing
Guide
Catalog
Code
▶High stability ball plunger post holders (BRS), post holders (RS)
D042,D043
Attention
▶This product is delivered only by mail.
Primary material: Brass
Specifications
Finish: Chrome Plated
Part Number
Quantity
[Pieces]
RS-CB 5
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
HCS-H
Coarse adjustment Helicoidal Jack.
Catalog
Code
W6047
Actuators
Motoeized
Stages
◦The upper plate moves upward without rotation.
◦With a helicoid screw system, smooth movement of
about 15mm/rotation is possible.
Example of Combinations
Outline Drawing
HCS-H
Hexagonal socket head cap screw
M4×8…4 screws
8-M4 depth 7
60
25 25
32
Light
Sources
Index
60
25 25
32
27
50
64
Guide
Helicoidal 15mm
jack connected to a
post holder.
4-M3 depth 7
Travel 15
M16 P1 depth 7
74 14
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Specifications
Part Number
Load Capacity
[N]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
HCS-H 19.6 (about 2.0kgf) 0.45
52
4
50
64
35.5
4-4.5 mounting hole
Optical Bases
Posts
Brackets
RSN
Helicoidal Post Holder.
W6048
◦Turning the height-adjustment rotary section allows movement of 10mm (about 5mm/
rotation) in the height direction.
◦To secure a holder, insert its post into the post holder, and clamp it using the two clamp
screws on the side of the main body. The upper clamp screw on the side of the main body is
designed to secure a post, and the lower clamp screw is designed to secure a helicoid ring.
◦Fitted with a helicoid screw, these post holders can move the installed post up
and down without turning it.
Outline Drawing
Catalog
Code
Adapters
Tools
Attention
▶Turning the height adjustment rotary section
excessively may cause locking.
Specifications
Part Number
Inner Diameter
[mm]
Primary material: Aluminum
Finish: Black Anodized
Diameter
[mm]
Weight
[kg]
RSN-12 φ12 φ30 0.16
RSN-12.7EE φ12.7 φ30 0.16
RSN-12.7UU φ12.7 φ30 0.16
RSN-20 φ20 φ38 0.21
RSN-12 RSN-12.7EE/12.7UU RSN-20
70 10 30
5
12 H7
M16P1
Post fixing clamp
Height adjustment
rotary section
Height fixing clamp
30
72 10
Part Number
RSN-12.7EE
RSN-12.7UU
12.7 H7
14
25
Post fixing clamp
Height adjustment
rotary section
A
Height fixing clamp
A
M6 P1
1/4-20UNC
70 10 38
5
20 H7
4
M16P1
Post fixing clamp
Height adjustment
rotary section
Height fixing clamp
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D045

Bases
Rod Mount Module / Z Angle Brackets
POSB/BLZ
Catalog
Code
W6051
Application
Systems
Optics &
Optical
Coatings
Rod Mount Modules attach directly to the vibration isolator or laboratory bench.
By attaching Z bracket at a right angle to the unit, horizontal adjustment will also be possible.
◦The rod (material: stainless steel, finish: none) incorporates a vibration damping material.
Example
Holders
Bases
Manual
Stages
Actuators
POSB-177UN BLZ POSB-177UN + BLZ-60
Motoeized
Stages
Light
Sources
Outline Drawing
POSB-UN
Hexagon socket
head cap screw
M6×15…4 screws
φ38.1
POSB-UNEE/UU
Hexagon socket
head cap screw
M6×15…4 screws
28 (55)
4-φ7
φ11 counterbore depth 7
B
Index
Guide
60
46 26.8 25 25
60
25
25
8-M4 depth 7
9-D
depth 7
B
65
C C
φ38.1
Vibration
Isolation Systems
A
M16 P1 depth 6
65
C
C
Optical Tables
A
Darkrooms/
Dark Boxes
Optical Bases
6
4-φ7 mounting hole
φ11 counterbore
50 50
φ88
6
φ88
13
Posts
Brackets
Adapters
Tools
BLZ-60 BLZ-65EE/65UU BLZ-6550EE/6550UU
Hexagon socket head cap screw
M4×12…4 screws
M16 P1 depth 6
3-D
2-M4 depth 8
25 25
7
depth 7 B B
6-M4 depth 7
25
25
48.2
78.2
8.2
Hexagon socket head cap screw M6×15…4 screws(EE)
Hexagon socket head cap screw 1/4-20UNC×5/8…4 screws(UU)
B
B
6-D
through hole
48.2
80.7
7
8.2
Hexagon socket head cap screw M6×12…2 screws(EE)
Hexagon socket head cap screw 1/4-20UNC×1/2…2 screws(UU)
3-D
depth 7 B B 6-D
7
through hole
B
B
50
82.5
7
50
60
4-φ4.5
15 25
45
A
65
4-φ7
15 C
47.5
A
65
2-φ7
15
22.5
Specifications
Part Number
A
[mm]
B
[mm]
POSB-177UN 177.8 - - - 2.1
POSB-355UN 355.6 - - - 3.7
POSB-177UN65EE 177.8 50 25 M6 P1 2.2
POSB-355UN65EE 355.6 50 25 M6 P1 3.8
POSB-177UN65UU 177.8 50.8 25.4 1/4-20UNC 2.2
POSB-355UN65UU 355.6 50.8 25.4 1/4-20UNC 3.8
Z Angle Brackets only
Part Number
A
[mm]
B
[mm]
Primary material: Stainless Steel (No finish)
Coarse adjustment section material: Aluminum Finish: Black Anodized
BLZ-60 - - - - 0.18
BLZ-65EE 50 25 25 M6 P1 0.2
BLZ-65UU 50.8 25.4 25.4 1/4-20UNC 0.2
BLZ-6550EE 50 25 - M6 P1 0.14
BLZ-6550UU 50.8 25.4 - 1/4-20UNC 0.14
C
C
D
D
Weight
[kg]
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
D046
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Poles
PO
Catalog
Code
W6053
Stainless steel pole with an M16P1 external thread at one end.
Used in combination with a cross clamp or rotary cross clamp.
◦Can be combined with other posts via a cross clamp or rotary cross clamp.
◦The PO-12 model is secured with a wrench using a 17mm flat adjacent to the M16P1 external thread.
◦Having a through hole on the side, the PO-20 model is secured using a wrench inserted into the hole.
Guide
▶Custom sizes not listed in the catalog and additional processing.
Contact our International Sales Division for more information.
Use the Question Sheet for Special Order Posts.
W6053
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Outline Drawing
Motoeized
Stages
PO-12
φ4 locking hole
φ12 g6
PO-20
φ4 locking hole
Light
Sources
φ20
17
M16P1
5 6
A
M16P1
5
A
φ20 g6
Index
Specifications
Part Number
PO-12-100
Diameter
[mm]
PO-12-200 200 0.2
PO-12-250
φ12
250 0.24
A
[mm]
Weight
[kg]
100 0.11
PO-12-120 120 0.13
PO-12-150 150 0.15
PO-12-300 300 0.29
PO-12-400 400 0.38
PO-12-500 500 0.46
PO-20-100
100 0.25
PO-20-120 120 0.3
PO-20-150 150 0.37
PO-20-200 200 0.5
PO-20-250
φ20
250 0.62
PO-20-300 300 0.74
PO-20-400 400 0.99
PO-20-500 500 1.24
Primary material: Stainless Steel
Finish: None
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
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D047

Bases
Posts
RO/ROU/ROC
Catalog
Code
W6052
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Stainless steel posts. The RO model is fitted with an M4 or M6 external thread at one end, the ROU
model is fitted with 1/4-20UNC inch external thread, and the ROC model is fitted with an M6P1
external thread.
◦A hole through the side makes it easy to tighten using a
wrench inserted into the hole.
Guide
▶Custom sizes not listed in the catalog are available.
Use the Question Sheet for Special Order Posts.
W6053
▶The ROU model can be used to mount cameras with 1/4-20
tapped holes.
▶High stability ball plunger post holders (BRS), post holders (RS)
D042, D043
Actuators
Outline Drawing
Motoeized
Stages
RO-6
ROU-12
RO-20
Light
Sources
M4
φ2 locking hole
φ6 g6
1/4-20 UNC
C1.5
φ4 locking hole
φ12 g6
M6 P1
φ4 locking hole
Index
4
3
A
5
15
A
5
10
A
φ20 g6
Guide
RO-12
ROC-12
ROU-20
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
M6 P1
5
5
φ4 locking hole
A
φ12 g6
M4
4
C3
10
φ4 locking hole
A
φ12 g6
1/4-20 UNC
5
C1.5
15
φ4 locking hole
A
φ20 g6
Posts
Brackets
Adapters
Tools
φ6 / φ12
Part Number
Diameter
[mm]
Primary material: Stainless Steel
Finish: None
A
[mm]
Weight
[kg]
RO-6-15
15 0.004
RO-6-20 20 0.005
RO-6-25 25 0.006
φ6
RO-6-30 30 0.007
RO-6-40 40 0.008
RO-6-50 50 0.009
RO-12-20
20 0.02
RO-12-30 30 0.03
RO-12-40 40 0.04
RO-12-60 60 0.05
RO-12-80 80 0.07
RO-12-100 100 0.09
RO-12-120 120 0.11
φ12
RO-12-130 130 0.12
RO-12-150 150 0.13
RO-12-200 200 0.18
RO-12-250 250 0.22
RO-12-300 300 0.27
RO-12-400 400 0.36
RO-12-500 500 0.44
ROU-12-30
30 0.03
ROU-12-60 φ12
60 0.05
ROU-12-80 (C1.5)
80 0.07
ROU-12-100 100 0.09
ROC-12-30
30 0.03
ROC-12-60 φ12
60 0.05
ROC-12-80 (C3)
80 0.07
ROC-12-100 100 0.09
φ20
Part Number
Diameter
[mm]
A
[mm]
Weight
[kg]
RO-20-20
20 0.05
RO-20-30 30 0.07
RO-20-40 40 0.1
RO-20-60 60 0.15
RO-20-80 80 0.2
RO-20-100 100 0.25
RO-20-110 110 0.27
RO-20-120 φ20
120 0.3
RO-20-130 130 0.32
RO-20-150 150 0.37
RO-20-200 200 0.5
RO-20-250 250 0.62
RO-20-300 300 0.74
RO-20-400 400 0.98
RO-20-500 500 1.23
ROU-20-30
30 0.07
ROU-20-60 φ20
60 0.15
ROU-20-80 (C1.5)
80 0.20
ROU-20-100 100 0.25
ROC-12
Primary material: Stainless Steel
Finish: None
D048
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Posts
Thread Adapters
RO-EE/UU
CHS
RO-EE/UU
◦The through-hole of the side of the rod is used to insert the hex wrench. By using this, it can be easily attached and
detached to the holder or the like.
◦Accessories can be selected from the type of M4 and M6 or inch type.
Guide
W6083
Stainless steel posts.
In case of using this rod, without buying a new rod, it is possible to be set the holder or the like to the
various optical axis height.
▶Custom sizes not listed in the catalog are available. Use the QuestionSheet
for Special Order Posts.
W6053
Outline Drawing
Catalog
Code
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Example
RO-EE/UU
special screw SC-M4-14EE…1 screws (CHS-M4-M6-5)(EE)
special screw SC-8U-14UU…1 screws (CHS-1/4-8U-5)(UU)
8.8
4
locking
hole
12.8
12.7
B
D
depth 6
A
C
depth 9
M4
RO-12.7-EE
14 2
Accessory
Screw
SC-M4-14EE
M6
M4
3
5 5
10
Accessory
Screw
CHS-M4-M6-5
C: EE type M6P1, UU type 1/4-20UNC
D: EE type M4, UU type 8-32UNC
8-32UNC
RO-12.7-UU
5/64
(2)
14
Accessory
Screw
SC-8U-14UU
1/4-20UNC
8-32UNC
1/8
(3.2)
5 5
10
Accessory
Screw
CHS-1/4-8U-5
Actuators
Motoeized
Stages
Light
Sources
Index
Primary material: Stainless Steel
Specifications
Finish: None
Part Number
A
Weight
METRIC
INCH
[mm]
[kg]
RO-12.7-25.4EE RO-12.7-25.4UU 25.4 0.026
RO-12.7-38.1EE RO-12.7-38.1UU 38.1 0.038
RO-12.7-50.8EE RO-12.7-50.8UU 50.8 0.051
RO-12.7-76.2EE RO-12.7-76.2UU 76.2 0.077
RO-12.7-101.6EE RO-12.7-101.6UU 101.6 0.102
RO-12.7-152.4EE RO-12.7-152.4UU 152.4 0.153
RO-12.7-203.2EE RO-12.7-203.2UU 203.2 0.204
RO-12.7-304.8EE RO-12.7-304.8UU 304.8 0.306
CHS
◦We will prepare the two types of screws INCH and METRIC.
◦If you have misplaced the included screws for extension rod, it can be
purchased separately.
Outline Drawing
Guide
▶It is used for extension rod (RO-12.7-**).
Catalog
Code
W6084
CHS, as a conversion screw, is processed by different thread at both ends, in case of M6 or 1/4
inch for holder side and M4 or 8-32UNC for stand side are different, it can be used as a connecting
screws for mounting.
CHS
A
D
10
5 B
C
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Specifications
Part Number
A
[mm]
B
[mm]
C
Primary material: Stainless Steel
Finish: None
Quantity
D
[Pieces]
CHS-M4-M6-5 3 5 M4 M6 P1 10
CHS-M4-M6-9 3 9 M4 M6 P1 10
CHS-1/4-8U-5 1/8 (3.2) 5 8-32UNC 1/4-20UNC 10
CHS-1/4-8U-9 1/8 (3.2) 9 8-32UNC 1/4-20UNC 10
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D049

Bases
Dog Point Set Screws
Cross Clamps
SC
CCHN
Application
Systems
Optics &
Optical
Coatings
SC
W6085
We offer two types of M4 and 8-32UNC as a stop screw.
One end of the screw serves as a full dog point, and can be used as a screwing side.
In the case that the holder side and the stand side are same M4 or 8-32UNC, it will be used as the
connecting screw. D041
Catalog
Code
Holders
Guide
Outline Drawing
Bases
▶It can also be used as an accessory of the
rod (RO) and the post stand (PST).
SC
C 0.08
0.02
Manual
Stages
B
D
A
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Specifications
Part Number
A
[mm]
B
[mm]
SC-8U-14UU 14 10 5/64 (2) 8-32UNC 10
SC-8U-16UU 15.6 11.6 5/64 (2) 8-32UNC 10
SC-8U-18UU 17.5 13.5 5/64 (2) 8-32UNC 10
SC-8U-20UU 19.5 15.5 5/64 (2) 8-32UNC 10
SC-8U-21UU 21 17 5/64 (2) 8-32UNC 10
SC-M4-14EE 14 10 2 M4 10
SC-M4-16EE 15.6 11.6 2 M4 10
SC-M4-18EE 17.5 13.5 2 M4 10
SC-M4-20EE 19.5 15.5 2 M4 10
SC-M4-21EE 21 17 2 M4 10
C
D
Quantity
[Pieces]
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
CCHN
◦Its split clamp structure allows firm clamping.
Catalog
Code
W6054
Tools
CCHN-6-6
9 15 9
7 6 H7
18
6 H7
CCHN-12-6/CCHN-12.7-6
14 33 14
17 28
CCHN-12-12/CCHN-12.7-12.7
14 33 14
17
28
30
30
4
3
Primary material: Steel
Finish: chrome plating
Cross clamps connect two posts at right angles.
Outline Drawing
Specifications
Part Number
CCHN-6-6 0.021
CCHN-12-6 0.065
CCHN-12.7-6 0.065
CCHN-12-12 0.06
CCHN-12.7-12.7 0.06
CCHN-20-12 0.128
CCHN-20-20 0.11
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
40
A H7 6 H7 30
Part Number A (mm)
CCHN-12-6 12
CCHN-12.7-6 12.7
CCHN-20-12
14
52
24
14
36
20 H7 12 H7 40
40
A H7 A H7 30
Part Number A (mm)
CCHN-12-12 12
CCHN-12.7-12.7 12.7
CCHN-20-20
14
52
24
14
36
20 H7 20 H7 40
D050
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Rotary Cross Clamps
CRHN
Catalog
Code
W6055
Rotary cross clamps connect two posts at an arbitrary angle.
◦Its split clamp structure allows firm clamping.
Application
Systems
Optics &
Optical
Coatings
Holders
Specifications
Part Number
Weight
[kg]
CRHN-6-6 0.032
CRHN-12-6 0.078
CRHN-12.7-6 0.078
CRHN-12-12 0.1
CRHN-12.7-12.7 0.1
CRHN-20-12 0.167
CRHN-20-20 0.196
Primary material: Aluminum
Finish: Black Anodized
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Outline Drawing
Index
CRHN-6-6
9 15
6 H7
26 9
918 8
4
7
18
6 H7
Insert
6
18
6
Guide
Vibration
Isolation Systems
Optical Tables
CRHN-12-6/CRHN-12.7-6
30
14
A H7
33 14
26 9
17
28
18 8
4
6 H7
30
Insert
6
18
6
CRHN-12-12/CRHN-12.7-12.7
14 33 14
17
28
30
12
A H7 A H7 30
Insert
28 18 14
10
12
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Part Number
A
(mm)
CRHN-12-6 12
CRHN-12.7-6 12.7
Part Number
A
(mm)
CRHN-12-12 12
CRHN-12.7-12.7 12.7
Tools
CRHN-20-12
CRHN-20-20
14
52 14
24
36 28 18 14
10
14
52 14
24
36
33 28
14
14
40
20 H7
12 H7
40
Insert
12
12
40
20 H7
20 H7
40
Insert
20
20
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D051

Bases
Z Angle Brackets
ZBR
Bracket for mounting an X-axis stage at right angles to the mounting surface.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦An X-axis stage can be mounted to a vertical surface or
used as a Z-axis stage by mounting the bracket to a
horizontal surface.
◦If the X-axis stage is mounted vertically, attach the stage
such that the micrometer head is on the underside.
◦The TSD-SZ series Z-axis stages for vertical face installation
allow installation with the micrometer head on the
topside.
Attention
▶The finish will be coarse since it is casting, but poses no technical
problems.
Actuators
Outline Drawing
Motoeized
Stages
Light
Sources
Index
ZBR-2530
Pan head screw M2×8…2 screws,
Flat washer
20
4-M2 through hole
4
ZBR-4055/4055UU
Pan head screw M3×10…2 screws, Flat washer (4055)
Hexagonal socket head cap screw 6-32UNC×3/8…2 screws (4055UU)
4-B
through hole
A
A
3-C
through hole
75
5
ZBR-7050/7090
Hexagonal socket head cap screw M4×12…4 screws
(common to 2 types)
4-M4 through hole
50 4-φ4.5 7
through hole
50
20
30
42.5
5
55
B
5
A
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
20
25
2-φ2.4
mounting hole
10
12.5
Part Number
A
40
A
(mm)
2-C
mounting hole
B
D
15
C
(mm)
D
(mm)
ZBR-4055 32 M3 φ3.5 11
ZBR-4055UU 31.75 6-32UNC φ4 10.875
50
70
Part Number
4-φ4.5
mounting hole
A
(mm)
15
25
45
B
(mm)
ZBR-7050 50 80
ZBR-7090 90 120
7
Optical Bases
Posts
ZBR-8060
Hexagonal socket head cap screw M4×12…4 screws
ZBR-100100
Hexagonal socket head cap screw M4×12…4 screws
Brackets
Adapters
4-M4 through hole
90
50
4-φ4.5
through hole
8
Tools
4-M4 through hole
70
50
4-φ4.5
through hole
8
90
50
φ20
70
50
150
60
100
4-M4 depth 8
100
4-M4 depth 8
50
80
4-φ4.5
mounting hole
15
25
49
8
50
4-φ4.5
15 25
100 mounting hole
50
8
Example of Combinations
TSD-601S + ZBR-7050
Primary material: Aluminum
Specifications
(except ZBR-2530)
Finish: Black Anodized
Part Number
Weight
[kg]
ZBR-2530 0.62
ZBR-4055 0.05
ZBR-4055UU 0.05
ZBR-7050 0.18
ZBR-7090 0.24
ZBR-8060 0.28
ZBR-100100 0.58
* For ZBR-2530, primary material is brass, and finish is black coating.
D052
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Catalog
Code
W6056
Outline Drawing
ZBR-7550EE
Hexagonal socket head cap screw M6×12…4 screws
50
ZBR-7550UU
Hexagonal socket head cap screw 1/4-20UNC×1/2…4 screws
50.8
Application
Systems
Optics &
Optical
Coatings
25
8-M6 P1
through hole
7
4-1/4-20UNC
25.4
8-1/4-20UNC
through hole
7
Holders
4-7
4-7
50
25
20
82.5
50.8
25.4
20
82.5
Bases
50
50
50
75
4-7
15 25
48
7
50.8
75
4-7
15 25.4
48
7
Manual
Stages
Actuators
ZBR-7590EE
ZBR-7590UU
Motoeized
Stages
Hexagonal socket head cap screw M6×12…4 screws
Hexagonal socket head cap screw 1/4-20UNC×1/2…4 screws
66
11
66
50.8
11
Light
Sources
50
4-M6
7
25.4
8-1/4-20UNC
7
4-7
4-7
Index
20
50
20
90
122.5
90
122.5
Guide
Vibration
Isolation Systems
Optical Tables
50
75
7
4-7
15
25
48
Darkrooms/
Dark Boxes
Optical Bases
Posts
ZBR-14080EE
ZBR-14080UU
Brackets
Hexagonal socket head cap screw M6×12…4 screws
Hexagonal socket head cap screw 1/4-20UNC×1/2…4 screws
Adapters
100
50
8
101.6
50.8
4-1/4-20UNC
through hole
8
Tools
4-7
52
52
8
8
80
80
100
50
140
101.6
50.8
140
25.4
50.8
50.8
75
7
4-7
15
25.4
48
4-M6
4-M6 P1
through hole
4-7
100
140
4-7
15 25.4
55
101.6
140
4-7
15 25.4
55
Specifications
Part Number
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
ZBR-7550EE 0.2
ZBR-7550UU 0.2
ZBR-7590EE 0.6
ZBR-7590UU 0.6
ZBR-14080EE 0.3
ZBR-14080UU 0.3
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D053

Bases
L Angle Brackets
LBR
Catalog
Code
W6057
Application
Systems
Optics &
Optical
Coatings
Attach an L bracket to the vertical face of the Z-axis, XZ-axis, or XYZ-axis stage to provide a horizontal
mounting surface.
Attention
▶These brackets may cause insufficient travel distance or physical
interference of stages, depending on installation conditions.
Confirm the dimensions before purchase.
Holders
Bases
Manual
Stages
Actuators
Outline Drawing
Motoeized
Stages
Light
Sources
Index
Guide
LBR-2535
Pan head screw M2×8…4 screws
8-M2
depth 5
M6 P1
through hole
35
10 10 10 2.5
22.5
20
25
20
4-2.5
mounting hole
LBR-3440
M16 P1
through hole
Pan head screw M3×6…4 screws
30
18
34
24
4-3.4 mounting hole
6.5 counterbore
6-M3
through hole
M16 P1
through hole
LBR-4053
Pan head screw M3×8…4 screws
16
56
16 16
36
4
32
40
2-M3 depth 4
32
4-3.5
mounting hole
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
5
LBR-6075/6085
10-M4 depth 8
5
20
2.5
35
Hexagonal socket headcap screw M4×12…4 screws
25
84
25 25 4
25 25
60
5
Part Number
1.7
5
A
(mm)
LBR-6075 75
LBR-6085 85
14
40
LBR-6080/6092
10-M4 depth 8
5
Hexagonal socket headcap screw M4×12…4 screws
25
84
25
25
4
25
25
60
5
Part Number
4 32
53.5
A
(mm)
LBR-6080 80
LBR-6092 98
M16 P1
through hole
54
50
4-4.5
mounting hole
M16 P1
through hole
54
20
4-4.5
mounting hole
50
A
40
A
8
8
8
5
8
5
Specifications
Part Number
Weight
[kg]
LBR-2535 0.02
LBR-3440 0.03
LBR-4053 0.05
LBR-6075 0.18
LBR-6080 0.19
LBR-6085 0.19
LBR-6092 0.21
Primary material: Aluminum
Finish: Black Anodized
D054
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Adapter Plate Selection Guide
A variety of adapter plates are available to make it easier to combine stages that do not have
matching mounting holes.
◦The following table can be used to determine the appropriate adapter for combining stages with hole patterns selected
from the left column and the top row.
Guide
▶Custom shapes or sizes not listed in the catalog can be purchased.
▶Send us rough illustration by FAX or mail, or contact our International
Sales Division.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Tapped hole pattern of products to be mounted on under surface
General Adapters
Special Adapters
□32M3
40×40 stage, etc.
upper surface screw pattern
P.C.D.32M3
φ40 rotary stage, etc.
upper surface screw pattern
□50M4
60×60 stage, etc.
upper surface screw pattern
P.C.D.50M4
φ60 rotary stage, etc.
upper surface screw pattern
M16
Screw for
fastening posts,
post holders, etc.
□20M2
Fasten 25×25
stages, etc.
■ Selection List ■
Mounting hole pattern and screw shape of products to be mounted on upper surface
□32M3
Fasten 40×40
stages, etc.
□40M3
Fasten 50×50
stages, etc.
□50M4
Fasten 60×60
stages, etc.
P.C.D.50M4
Fasten φ60 rotary
stages, etc.
(KSP-786 etc.)
SP-132 SP-132 SP-132 SP-132 SP-132
SP-129
SP-132
SP-117
SP-133
SP-129
SP-129
SP-132
SP-129
SP-129
SP-132
SP-133 SP-133 SP-133
SP-103
SP-129
SP-103
SP-129
SP-129
SP-129
SP-132
SP-103
SP-129
SP-132
SP-117
SP-133
MB-CB-CB SP-130 SP-130 SP-130 SP-130 SP-130 SP-130
P.C.D.30M3
φ40 rotary stage, etc.
upper surface screw pattern
TAR-34***
TAR-38***D
TAR-34403L
TAR-34805L
TAS-2060*
SP-129
SP-132
SP-109-1
SP-109-2
SP-131
SP-123
SP-129
SP-132
SP-123
SP-129
SP-129
SP-132
SP-129
SP-132
SP-132
SP-131 SP-131 SP-131 SP-131
SP-131 SP-131 SP-131 SP-131 SP-131
SP-127-1
SP-134
SP-127-1
SP-134
SP-134 SP-134 SP-134 SP-134
□70M4
Fasten 80×80
stages, etc.
□90M4
Fasten 100×100
stages, etc.
□100M4
Fasten 120×120
stages, etc.
M6
internal thread
Fasten mirror holders,
etc. in place of posts.
SP-102-1 SP-102-2 SP-102-3 SP-122
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Example of Combinations
Lens holder LHF-25
X axis stage TSD-601S
Adapter plater SP-129
Adapter plate SP-122
axis rotation stage KSP-606M
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D055

Bases
Adapters
SP
Application
Systems
Optics &
Optical
Coatings
Holders
50×50mm Adapter Plates—SP-102
◦Mounting hole converting adapter for
stages.
Outline Drawing
SP-102
Hexagonal socket head screw M4×6…4 screws
(common to 3 types)
A
B
50
4-M4 through hole
Catalog
Code
W6058
Connection Example
80×80 stage (M4 70×70)
▼
SP-102-1
▼
M4 50×50
Bases
100×100 stage (M4 90×90)
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Specifications
Part Number
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
SP-102-1 0.12
SP-102-2 0.18
SP-102-3 0.27
2 50
4-φ4.5 mounting hole
φ8 counterbore
7
Part Number A (mm) B (mm)
SP-102-1 80 70
SP-102-2 100 90
SP-102-3 120 100
B
A
▼
SP-102-2
▼
M4 50×50
120×120 stage (M4 100×100)
▼
SP-102-3
▼
M4 50×50
Index
Top Plates for KSP/KSPA—SP-103
Catalog
Code
W6059
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
◦Mounting hole-converting adapter for θ
axis rotation stages.
Outline Drawing
SP-103
Hexagonal socket head cap screw
M4×6…4 screws
60
50
32
4-M4 through hole
20
Connection Example
25×25 stage (M2 20×20)
40×40 stage (M3 32×32)
60×60 stage (M4 50×50)
▼
SP-103
▼
Posts
KSP/KSPA (M4 φ50)
Brackets
20
32
50
60
Adapters
Tools
Specifications
Part Number
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
4-φ4.5 mounting hole
φ8 counterbore
4-M3 through hole
4-M2 through hole
SP-103 0.06
2
7
Bottom Plates for KSP-786M—SP-104
Catalog
Code
W6060
◦Mounting hole converting adapter for θ
axis rotation stages (KSP-786M).
Outline Drawing
SP-104
Hexagonal socket head cap screw
M4×6…4 screws
60
50
34
Connection Example
KSP-786M
▼
SP-104
▼
MB-CB-PB
4-M3 through hole
PCDφ42
60×60 stage (M4 50×50)
8
50
60
Specifications
Part Number
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
SP-104 0.06
16
8-φ4.5 mounting hole
2
7
D056
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Top Plates for TAR—SP-109
◦Mounting hole converting
adapter designed specifically
for rack and pinion stages.
Outline Drawing
SP-109-1/2
Hexagon socket head cap screw
M4×6…4 screws
M16 P1 through hole
A
40
20
34
4-φ4.5 mounting hole
φ8 counterbore
2
Part Number A (mm)
SP-109-1 60
SP-109-2 80
7
Post holder etc. (M16 P1)
▼
SP-109-1
▼
TAR-34601
TAR-38601D
TAR-34602
Catalog
Code
Connection Example
W6061
Post holder etc. (M16 P1)
▼
SP-109-2
▼
TAR-34801
TAR-34141
TAR-38801D
TAR-38141D
TAR-34802
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
[kg]
SP-109-1 0.03
SP-109-2 0.04
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Conversion Plate—SP-113N
◦It is a spacer that is possible to set up the
pole (PO) of M16 screw on □40 stage.
◦It can also be used to attach the tilt stage.
(AIS-40B), sample holder (SHA-40), and
polarizer holder (MPH-B) to the □ 40
stage.
Specifications
Part Number
Conversion Plate—SP-114N
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
SP-113N 0.02
◦It is a spacer that is possible to set up the
pole (PO) of M16 screw to the □40 stage
and □40 rotation stage.
◦It can also be used to attach the □40
stage, sample holder (SHA-25) and polarizer
holder (MPH-B) to the rotation stage
(KSP-406, KSW-406).
Specifications
Part Number
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
SP-114N 0.02
Outline Drawing
SP-113N
Hexagon socket head cap screw
M3×6…4 screws
40
32 8-M2 through hole
4-φ3.5 mounting hole 10 10
φ6 counterbore
4-M3 through hole
Outline Drawing
10
10
32
40
7
2
M16 P1 through hole
SP-114N
Hexagon socket head cap screw
M3×6…4 screws
40
32 8-M2 through hole
10 10 4-M3 through hole 7
32
30
30
32
10 10
32
40
Catalog
Code
Catalog
Code
6
M16 P1 through hole
W6086
W6087
3.5
2
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Bottom Plates for KSPA 806M, 1006M—SP-117
Catalog
Code
W6063
◦Mounting hole converting
adapter for θ axis rotation
stages (KSPA-806M and
1006MH).
Outline Drawing
SP-117
Hexagonal socket head cap screw
M4×6…4 screws
60
50
4-M4 through hole
Connection Example
Post holder etc. (M16 P1)
KSPA-806M, 1006MH
▼
SP-117
▼
M4 50×50
M16 P1
through hole
50
60
4-φ4.5 mounting hole
φ8 counterbore
2
7
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
[kg]
SP-117 0.06
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D057

Bases
Adapters
SP
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
M16 P1/M6 P1 Adapter Nuts—SP-121
SP-121-1
SP-121-2
◦Mounting adapter for post systems.
Outline Drawing
SP-121-1
4-φ3 depth 5
Every 90°
φ26
M6 P1
M16 P1
7 5
5
17
SP-121-2
M6 P1
through hole
φ20
M16 P1
M16 P1/M6 P1 Adapter Nuts—SP-121S
6 17
5
11
Main frame of holder etc. (M6 P1 (female))
▼
SP-121-1
▼
M16 P1
Catalog
Code
Connection Example
Catalog
Code
W6065
Post (M6 P1 (male))
▼
SP-121-2
▼
M16 P1
Primary material: Brass
Specifications
Finish: Chrome
Part Number
Weight
[kg]
SP-121-1 0.04
SP-121-2 0.02
W6066
Motoeized
Stages
Light
Sources
Upper surface
◦Mounting adapter for post systems.
Outline Drawing
SP-121S
Connection Example
Post holder etc. (M16 P1 (male))
▼
SP-121S
▼
Baseplate / optical breadboard etc. (M6 P1 (female))
Index
Guide
Under surface
4-φ4 depth 5
Every 90°
φ30
M6 P1
M16 P1 depth 5
5 10
15
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
[kg]
SP-121S 0.01
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
M6P1 Adapter Plates—SP-122
Catalog
Code
W6067
◦Mounting adapter for holders.
◦Adapter to secure a holder with M6 P1 internal thread from below and install on a stage with M4 50×50mm pitch mounting holes.
◦Suitable for setting the optical axis low.
Outline Drawing
SP-122
Hexagonal socket head cap screw M4×10…4 screws
Hexagon socket head cap screw M6×12…1 screw
60
50
Connection Example
M6 P1 (female)
▼
SP-122
▼
M4 50×50
50
60
Attention
▶Note that holders with protrusions
within the φ25 mounting surface may
not be able to be connected.
17
6
φ25
φ6.5
φ11
4-φ4.5 mounting hole
φ8 counterbore
5
10 7
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
[kg]
SP-122 0.1
Top Plates for KSP-406M—SP-123
Catalog
Code
W6068
◦Mounting hole converting
adapter for θ axis rotation
stages (KSP-406M).
Outline Drawing
SP-123
Countersunk screw M3×8…4 screws
40
32
4-M3 through hole
20
20
32
40
Connection Example
25×25 stage (M2 20×20)
40×40 stage (M3 32×32)
▼
SP-123
▼
KSP-406M
KSP-406MR
4-M2
through hole
4-φ3.5 mounting hole φ6 countersink
PCDφ30
3.5
5
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
[kg]
SP-123 0.02
D058
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Top Plate Adapters for TAS-2060—SP-127-1
◦Mounting hole converting
adapter for X- and XY-axis
leadscrew stages (TAS-20601
and 20602).
Outline Drawing
SP-127-1
Hexagonal socket head cap screw
M4×6…4 screws
60
50
20
Catalog
Code
Connection Example
Post holder etc. (M16 P1)
25×25 stage (M2 20×20)
▼
SP-127-1
▼
TAS-20601
TAS-20602
W6069
Application
Systems
Optics &
Optical
Coatings
Holders
13
4-φ4.5 mounting hole
φ8 counterbore
20
38
4-M2 through hole
M16 P1 through hole
2
7
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
[kg]
SP-127-1 0.04
Bases
Manual
Stages
Adapter Plates—SP-129
Catalog
Code
W6071
Actuators
◦Mounting hole-converting
adapter for θ axis rotation
stages.
Outline Drawing
SP-129
Hexagon socket head cap screw
M3×6…4 screws
60
50
4-M2 through hole 40
8-M3 through hole
32
20
4-M4 through hole
M16 P1 through hole
32
30
30
32
20
32
40
50
60
4-φ4.5 mounting hole
φ8 counterbore
6
7
2
3.5
Connection Example
Post holder etc. (M16 P1)
25×25 stage (M2 20×20)
40×40 stage (M3 32×32)
60×60 stage (M4 50×50)
▼
SP-129
▼
KSP-406 (M3 φ30)
40×40 stage (M3 φ32)
60×60 stage (M4 φ50)
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
[kg]
SP-129 0.06
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Adapter Plates—SP-130
Catalog
Code
W6072
Darkrooms/
Dark Boxes
Optical Bases
◦Mounting hole converting
adapter for magnet bases (MB-
CB-PB).
Outline Drawing
SP-130
Hexagonal socket head cap screw
M4×6…4 screws
60
50
40
32
20
8-M4 through hole
8-M3 through hole
4-M2 through hole
Connection Example
Post holder etc. (M16 P1)
25×25 stage (M2 20×20)
40×40 stage (M3 32×32)
60×60 stage (M4 50×50)
▼
SP-130
▼
MB-PB-CB
Posts
Brackets
Adapters
Tools
M16 P1 through hole
34
20
32
40
50
60
4-φ4.5 mounting hole
φ8 counterbore
7
2
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
[kg]
SP-130 0.06
Adapter Plates—SP-131
Catalog
Code
W6073
◦Mounting hole converting
adapter designed specifically
for rack and pinion stages.
Outline Drawing
SP-131
Hexagonal socket head cap screw
M4×6…4 screws
Hexagon socket head cap screw M3×6…4 screws
60
50
40
8-M4 through hole
2
32
M16P1 through hole
8-M3 through hole
Connection Example
Post holder etc. (M16 P1)
40×40 stage (M3 32×32)
60×60 stage (M4 50×50)
▼
SP-131
▼
TAR-34403L (M3 14×24)
TAR-34/38 (M4 20×40)
40
14
4-φ3.5 mounting hole
φ6 counterbore
20
24
32
40
50
60
4-φ4.5 mounting hole 2
φ8 counterbore
7
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
[kg]
SP-131 0.06
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D059

Bases
Adapters
SP
Adapter Plates—SP-132
Catalog
Code
W6074
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦Mounting hole converting
adapter for stages.
Outline Drawing
SP-132
Hexagon socket head cap screw
M3×6…4 screws
60
4-M2
50
through hole 40
4-M3 through hole
32
4-3.5
20
8-M4 through hole
mounting hole
6 counterbore
32
30
30
32
20
32
40
50
60
M16P1 through hole
6
7
2
3.5
Connection Example
Post holder etc. (M16 P1)
25×25 stage (M2 20×20)
50×50 stage (M3 40×40)
60×60 stage (M4 50×50)
▼
SP-132
▼
KSP-406 (M3 φ30)
40×40 stage (M3 32×32)
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
[kg]
SP-132 0.06
Actuators
Motoeized
Stages
Light
Sources
Index
Adapter Plates—SP-133
◦Mounting hole converting
adapter for stages.
Outline Drawing
SP-133
Hexagonal socket head cap screw
M4×6…4 screws
60
50
40
32
20
7
2
Catalog
Code
Connection Example
Post holder etc. (M16 P1)
25×25 stage (M2 20×20)
40×40 stage (M3 32×32)
KSPA-806M/1006MH (M4 φ50)
▼
SP-133
▼
60×60 stage (M4 50×50)
W6075
Guide
Vibration
Isolation Systems
Optical Tables
8-M3 through hole
4-M2 through hole
M16 P1 through hole
4-M4
20
32
40
50
60
4-4.5 mounting hole
8 counterbore
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
[kg]
SP-133 0.06
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Adapter Plates—SP-134
◦Mounting hole converting adapter
for X- and XY-axis leadscrew
stages (TAS-20601 and 20602).
Outline Drawing
SP-134
Hexagonal socket head cap screw
M4×64 screws
60
25 25
40
32
8-M4 through hole
8-M3 through hole
20
50
4-4.5 mounting hole
8 counterbore
13
20
32
40
25 25
60
M16 P1 through hole
7
2
Catalog
Code
Connection Example
Post holder etc. (M16 P1)
25×25 stage (M2 20×20)
40×40 stage (M3 32×32)
60×60 stage (M4 50×50)
▼
SP-134
▼
TAS-20601
TAS-20602
W6076
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
[kg]
SP-134 0.06
Conversion Plate—SP-135
Catalog
Code
W6088
◦It is a spacer for mounting the very small
stage of X-axis block stage (TASB-15 *)
and X-axis leadscrew stage (TAS-15 *) to
□ 25 stage.
◦It can also be attached ultra-compact
goniometer stage (GOH-15), tilt stage
(AIS-25B), sample holder (SHA-25) and
polarizer holder (MPH-B).
Primary material: Aluminum
Specifications
Finish: Black Anodized
Part Number
Weight
[kg]
SP-135 0.01
Outline Drawing
SP-135
Pan head screw M2×4…4 screws
4-2.4 mounting hole
4 counterbore
25
5 5
M6 P1 through hole
20
5 5
25
8-M2 through hole
20
5
2
D060
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Conversion Plate—SP-201
◦It is a spacer for mounting the X-axis long
steel stage (TSD-25501S) to the □ 40
stage.
◦It can also be fixed to φ40 rotation stage
(KSP-406, KSPT-406) and used for XY
assembly of TSD-25501 series.
Outline Drawing
SP-201
Catalog
Code
W6089
Hexagon socket head cap screw M2×4…4 screws
Hexagon socket head cap screw M3×6…4 screws
50
32
7
4-2.4 mounting hole 20
4-3.5 mounting hole 2
4 counterbore
6 counterbore
Application
Systems
Optics &
Optical
Coatings
Holders
Specifications
Part Number
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
SP-201 0.03
32
30
30
32
40
10 10
32
40
6
3.5
8-M2 through hole
2
Bases
Manual
Stages
Conversion Plate—SP-301
◦It is a spacer for mounting the X-axis long
steel stage (TSD-40801S) to □ 60 and □
40 stage.
◦It can also be fixed to φ60 rotation stage
(KSP-606, KSPT-606) and φ40 rotation
stage (KSP-406, KSPT-406).
◦It can also be used for XY assembly of
TSD-40801 series
Specifications
Part Number
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
SP-301 0.08
SP-301
Hexagon socket head cap screw M3×6…4 screws
Hexagon socket head cap screw M4×6…4 screws
60
Outline Drawing
8-4.5 mounting hole
8 counterbore
32
30
25
16
30
32
64
80
25
16
Catalog
Code
4-3.5 mounting hole
6 counterbore
4-M3 through hole
32
25
25
W6090
6
7
2
3.5
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
D061

Bases
Adapters
BSP
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Baseplate—BSP-1016N
◦It is a base plate for fixing the X-axis long stage (TSD-10161, TSD-60121, TSD-60161SDM, TAM-10161, TAM-
60161SDM, etc.) to the breadboard (OBC-M6) and the optical surface plate (HOA, etc.). It can also be used for XY
assembling.
◦It can also be fixed to the □100 stage (TSD-100, TAM-100, etc.) and the base plate (OBC-M4).
Specifications
Part Number
BSP-1016N 0.4
Outline Drawing
BSP-1016N
Hexagon socket head cap screw M4×10…4 screws
Hexagon socket head cap screw M6×10…4 screws
6-7 mounting hole
11 counterbore
12-4.5 mounting hole
100
10
8 counterbore
25 25
8-M4 through hole 3
100
90
50
150
160
25
25
37.5
37.5
Catalog
Code
W6091
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
4.5
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
Baseplate—BSP-1020N
◦It is a base plate for fixing the X-axis long aluminum cross roller stage (TAM-10201SDM, TAMC-10201) to the breadboard
(OBC-M6) and the optical table (HOA, etc.). It can also be used for XY assembling.
◦It can also be used for fixing the □ 100 stage (TSD-100, TAM-100, etc.).
◦Also, it can be fixed to the □ 100 stage (TSD-100, TAM-100, etc.) and the base plate (OBC-M4).
Specifications
Part Number
BSP-1020N 0.5
Outline Drawing
BSP-1020N
Hexagon socket head cap screw M4×10…4 screws
Hexagon socket head cap screw M6×10…4 screws
Catalog
Code
8-7 mounting hole
11 counterbore
W6092
Primary material: Aluminum
Finish: Black Anodized
Weight
[kg]
150
8-4.5 mounting hole
125
10
8 counterbore 25 25
8-M4 through hole 3
25
100
90
25
50
75
4.5
90
180
200
D062
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Screw Set
Adapter Nuts
SCR / SKB / SKD / DK
AND
SCR / SKB / SKD / DK
A set of screws frequently used to install SIGMA KOKI products.
Use for maintenance together with tools.
Catalog
Code
W6077
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Black Pan-head Screw Sets / Stainless Steel Cap Screw Sets
Part Number
SCR-MEN2
Type
Screw
Size
Length [mm]
4 6 8 10 12 15 18 20 25 30
Quantity
Spring
Washer
Flat Washer
Large
M2 ○ ○ ○ ○ ○ ○ ○ ○ − − 30 pieces each 240 pieces 240 pieces
SCR-MEN3 Black panhead M3 ○ ○ ○ ○ ○ ○ ○ ○ − − 30 pieces each 240 pieces 240 pieces
SCR-MEN4 screw M4 − ○ ○ ○ ○ ○ ○ ○ ○ − 30 pieces each 240 pieces 240 pieces
SCR-MEN6 M6 − − ○ ○ ○ ○ ○ ○ ○ ○ 20 pieces each 160 pieces 160 pieces
SCR-MEC3
SCR-MEC SKB-JBX6 SKD-190 DK-20
M3 ○ ○ ○ ○ ○ ○ ○ ○ − − 30 pieces each 240 pieces 240 pieces
SCR-MEC4 SUS cap screw M4 − ○ ○ ○ ○ ○ ○ ○ ○ − 30 pieces each 240 pieces 240 pieces
SCR-MEC6 M6 − − ○ ○ ○ ○ ○ ○ ○ ○ 20 pieces each 160 pieces 160 pieces
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Ball Wrench Set
Part Number
Wrench Size
SKB-JBX6 1.5, 2, 2.5, 3, 4, 5
Chronometer Driver Set
Part Number
Size
DK-20
#0000, #000, #00, #0, #1 (two drivers)
Phillip’s Screw Driver with Grip
Part Number
Size
SKD-190-0-60 #0
SKD-190-1-80 #1
SKD-190-2-75 #2
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
AND
Adapter nuts for changing M6 tapped holes to M4 holes.
Catalog
Code
W6078
Outline Drawing
AND-M6-M4
1
1
5.5
φ8
1
M4
M6 P1
Attention
▶The 8mm-diameter area protrudes for 1mm when mounted on a
flat surface.
▶This product is delivered only by mail.
Specifications
Part Number
Quantity
[Pieces]
Weight
[kg]
AND-M6-M4 10 0.011
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D063

Bases
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Vibration
Isolation Systems
Optical Tables
Darkrooms/
Dark Boxes
Optical Bases
Posts
Brackets
Adapters
Tools
D064
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Manual Positioners
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Manual Positioners
I N D E X
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Manual Positioners
Manual Positioners Guide
Operating Environment of Manual Stages
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
Use manual positioning stages within the following environment temperature range.
Contact us for information regarding using the stages outside the given operational environment temperature range.
*Operating environment
*Recommended environment
Category Operational environment temperature 23°±5°C, 60±10% (without condensation)
Stainless steel manual stages −20°C 〜 +120°C
Stages with digital micrometer head 0°C 〜 +40°C
Other manual stages
−20°C 〜 +70°C
Operating environment temperature changes depending on various conditions such as the type of positioning stage,
installation and operation conditions.
Avoid use of the stages in the following sites.
◦Sites subject to water or oil
◦Sites subject to vibration or impact
◦Sites subject to direct sunlight or radiant heat ◦Sites close to fire
◦Sites subject to dirt and dust
◦Sites subject to inflammable gas and corrosive gas
Installation Direction (Mounting)
The values in the specifications of each product are based on installation on a horizontal surface.
Note that load capacity and other specifications will significantly change for upside down, lateral horizontal and other
installation orientations.
Category Positioning Slide Part Number Upside Down Lateral Horizontal Lateral Vertical
Linear
Rotation
Gonio
Extended contact ball guide method TSD ○ ○ ○
Extended contact ball guide method (flat Z) TSD-**3 × × ×
Extended contact ball guide method (flat Z) TSD-**UD ○ × ×
Crossed roller method TAM ○ ○ ○
Dovetail slide method TASB, TAR ○ ○ ○
Extended contact ball guide method KSPT ○ ○ ○
Crossed roller method KSPB ○ ○ ○
Fitting method KSP, KSPA, KSW, KSC △ △ △
Extended contact ball guide method GOHT, GOHT-S ○ ○ ○
Dovetail slide method GOH, GOHB ○ ○ ○
○: Possible with limits on load and moment, etc.
△: May significantly deteriorate precision depending on installation orientation, but possible with limits on load and moment, etc.
×: Not allowed
θ axis Stages
Note) When using stages in lateral vertical direction, refer to the actuator specifications.
Chapter F Actuators
Goniometer
Inclination
Vacuum
Mounting Methods of Stages
Mounting methods differ depending on the stage type; some stages require the table surface to be moved (by loosening
the clamp), and some stages can be directly mounted.
Linear Stage Rotation Stage Gonio Stage
Ball Guide
Crossed Roller
Manual
rotation
knob
Movable part
Movable part
Dovetail
Lapping
Clamp
Clamp
Adjustment knob
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Loosen the clamp, turn the micrometer
head, and then move the stage to mount.
Accessory Screws
Mounting bolts described in the external dimensions in the catalog are included.
Clamp
Loosen the clamp, turn the adjustment
knob, and then move the stage to mount.
Attach the accessory screws to the two
mounting holes, and do the same thing on
the other side.
E004
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How to Read Micrometer Head and Vernier Scale
Micrometer head and vernier scale are available for reading the stage position.
How to Read a Micrometer Head
How to Read a Vernier Scale
1
2
1
2
1 3
2
Sleeve base line Sleeve Thimble
Application
Systems
Optics &
Optical
Coatings
Holders
If the readable resolution is 0.01mm
1. Read the mark on the sleeve that lines up with the edge of
thimble 1 in units of 0.5mm. In this case, 8.5mm.
2. Read the value 2 on the thimble that lines up with the sleeve
base line in units of 0.01mm. In this case, 0.41mm.
3. Lastly, sum up 1. and 2. to confirm the current position of the
manual stage. 8.5mm+0.41mm=8.91mm
Opposite Models
When installation spaces have constraints or symmetrical
systems are required, we offer opposite models without
price difference. The configuration and orientation of
opposite models are as follows.
■For single axis
Opposite models will be axially symmetrical in the
external dimensions.
1. Read the mark on scale 1 that is coincident with the 0-mark on
vernier scale 2 in units of 1mm. In this case, 7mm.
2. Read mark 1 where the mark on vernier scale 2 and that on
scale 1 line up in units of 0.1mm. In this case, 0.3mm.
3. Lastly, sum up 1. and 2. to confirm the current position of the
stage. 7mm+0.3mm=7.3mm
Travel
Travel is described with ±.
(E.g.) In the case of ±6.5mm, with the outline drawing
position as the center, move for (+)6.5mm in one
direction, and move for (-)6.5mm in the opposite
direction. In this case, the full travel is 13mm.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
6.5mm
6.5mm
TSD-601S
TSD-601SR
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
Grease Used
We use an appropriate grease for each of our manual stages according to the respective characteristics.
Relevant Product
TSD
TSDT
TAM
IPWS
GOH
GOHT
KSP
KSPT
Grease High durability grease Optical special grease
TADC TSDH TSDS
Low dust
generation grease
Vacuum grease
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Usable Temperature Range –20˚C 〜 70˚C –40˚C 〜 200˚C –0˚C 〜 290˚C
■High Durability Grease
A high-grade versatile grease for industrial use. It is best suited for electric motor bearings or machine tool bearings
which are particularly required for high quality and high performance.
In addition, it is excellent in noise reduction, and can be used for a wide range of applications.
■Low Dust Generation Grease (AFF Grease manufactured by THK Co., Ltd.)
Best suited for use in clean rooms because of its excellent low dust generation properties. Since its viscosity resistance
is low, its rolling resistance is stable and excellent in following capability at low speed. Compared with other low dust
generation greases, this grease can offer longer greasing intervals because of its excellent fretting resistance.
■Vacuum Grease (Fomblin Grease YVAC2)
This grease is widely used for various vacuum equipment and for clean rooms. The grease vapor pressure is 5×10 (–13
power) Torr at 20˚C.
■Optical Special Grease
This grease is used in many precision equipment fields because, in addition to lubricating properties, it has high cold
resistance and heat resistance, low oozing properties, no influence on the coating surface, and is harmless to resins.
* We can also replace the greases with ones not listed above. Contact our International Sales Division for more information.
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E005

Manual Positioners
Contact Slide Stages Guide
Application
Systems
Optics &
Optical
Coatings
Stages used for positioning in X, Y
and Z directions (in 3-dimensional plane).
Suitable for various purposes including optical experiments
for research and development and assembly in
systems.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide Structure
Stage Thickness Extended Contact Ball Guide Crossed Roller Guide Dovetail Slide Method
Part Number TSD/TSDH/TSDT/TSDS TADC TAM, TAMC TASB/TAR
Primary Material Steel / Stainless steel Aluminum Aluminum Brass
Structure
Guide
X axis Stages
XY axis Stages
Shape
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Outline of Guide
A guide is directly processed
on the lower and
upper plates of the stage,
quenched and ground.
Steel balls are positioned
between them.
Positioning slide having
cylindrical rollers arranged
orthogonally one after
another in a V groove rail.
Positioning slide having
quenched and ground
guides screwed on the
aluminum bottom and top
plates, and balls between
them.
Face-fitting positioning
slide having trapezoidal
male and female sections.
Stage Thickness ◎ ○ ○ △
Stiffness ◎ ○ ○ ○
Travel Accuracy ◎ ○ ○ △
Resolution ◎ ◎ ◎ △
Weight △ ◎ ◎ ○
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
Crossed Roller Guide
Line contact of rollers in a V groove rail offers high stiffness. In
addition, low friction and almost no differential slip are suitable for
minute feeding.
Dovetail Slide Method
The dovetail groove method with face-fitting guide mechanism is
used. Its high friction coefficient is not suitable for fine positioning,
but very effective in simple positioning.
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
Crossed roller guide
■Features■
Crossed roller guide enabled high precision and
high stiffness.
Aluminum body offers light-weight.
Guide
contact face
Face-fitting positioning slide having
trapezoidal male and female sections
■Features■
The simple guide structure offers low price.
Highly stable due to face-fitting guide.
Compact design is ideal for assembly in
systems or fixing in confined spaces.
□120mm
Others
E006
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Ball Guide Method (TSD/TSDH/TSDT/TSDS Series)
These products are developed based on Sigma Koki’s original processing technology.
■Features
1High Precision 2High Load Capacity 3High stiffness 4High Durability 5Low Profile
Application
Systems
Optics &
Optical
Coatings
■High Load Capacity and High Stiffness
・The four-array contact structure achieves high load capacity
and high stiffness (13 times stiffer than the V groove)
As shown in Fig-1, ball guides are machined across the arcs so that
they have R groove structure and good contact with a ball allowing
stable load capacity against the load in the directions where contact
with the ball occurs frequently.
Fig-1
Contact width
Fig-2
P
P
Holders
Bases
Manual
Stages
Contact angle
■High Durability
・Long life and free of maintenance
Fig-2 shows the pressure distribution of the R groove and the flat
surface. As shown in the figure, pressure exerted on the R groove is
dispersed and does not reach inside. Thus, metal fatigue and wear
are reduced. Data for durability is listed. E014
■High Precision
・The integral (simultaneous) machining achieves high precision (straightness: 0.7 μm or lower)
As shown in Fig-3, the top and bottom plates are integrally and simultaneously machined using an originally devised
machining jig to minimize respective machining errors. That is, to maintain high precision, these plates are machined in
virtually the same state as when a ball is inside.
Fig-3
Top plate
Steel Ball/pressurized control
(Ball size of 2µm each)
Crossed Roller Guide Type
Ball contact structure
R groove
(Ball guide method)
Flat surface
Pressure distribution of one ball
Ball Guide Type
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
Reduction of parts
XYZ axis Stages
Bottom plate
Integrated processing
θ axis Stages
Goniometer
Retainer
TSD Guide
(13 times higher rigidity comparing V groove)
TAM Stage
TSD Stage
Inclination
Vacuum
■Low Profile
・Reduction in the number of parts enables low profiling
Fig-4 shows a comparison of thickness of a crossed roller stage and a ball guide stage. The integration of the guides into
the top and bottom plates allows low profiling of the ball guide stage virtually the same state as when a ball is inside.
Fig-4
TAM-601C (Crossed Roller Stage)
23
TSDH-601C (Ball Guide Stage)
16 −7
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
* The TSDT series further reduces the stage thickness to 10mm.
E016
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E007

Manual Positioners
Contact Slide Stages Option
Option Code
Application
Systems
Option Code
Optics &
Optical
Coatings
Holders
Stage Size
Axis number
Micrometer head
positioning
Opposite Model
Type of
Micrometer head
Standard of length
Bases
TSD
TAM
25
40
1
2
C
S
R
FP
DM
EE
Manual
Stages
TSDH
60
65
3
WP
DL
UU
Actuators
80
100
DG
−
: METRIC
Motoeized
Stages
EE : METRIC (M6)
UU : INCH
Light
Sources
Option Code
FP : Fine-pitch Screw Adjusters
DM : Differential Micrometer Heads
F010
F006
Index
1 : X Axis
2 : XY axis
C : Center
−
WP : Sub-micron Worm Drive Micrometer Heads
DL : Angled Micrometer Heads
F007
F008
3 : Z Axis
S : Side
R: Opposite Model
DG : Micrometer Heads (Digital display)
F005
Guide
Guide
X axis Stages
XY axis Stages
▶If you can not change the feed operation in
the specification of the Option Code, please
consult our sales.
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
Micrometer control position / feed control
Change the micrometer control position or feed control to suit your purpose
……Select according to your purpose such as for price reduction and space saving.
Price Reduction
Standard Micrometer Heads
F004
Center type
Option code FP
FPSA
Fine-pitch
Screw Adjusters
F010
High Resolution
Space Saving
Price of manual stages can be reduced.
Ideal for positioning that does not require
measurement, and installation in confined
spaces.
Option code DM
MHF2-13 Micrometer Heads
F006
Fine positioning is possible by
switching between coarse and fine
adjustments.
Option code WP
WGP Sub-Micron Differential Micrometers
F007
(e.g.)
TSD-601CFP
(e.g.)
TSD-601SDM
(e.g.)
TSD-601SFP
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Side type
Improving
Work Efficiency
Offer low price and space saving
coarse/fine adjustment micrometer
heads. Coarse and fine drive control is
possible throughout the full travel.
Option code DL
MDC-
Angled
Micrometer Heads
F008
Unidirectional control units increases
work efficiency.
(e.g.)
TSD-601SWP
(e.g.)
TSD-601SDL
E008
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θ axis Stages Guide
Stages used for adjustment by rotating samples.
Coarse/fine movement type, transmission hole type, lowprofile
square type and other types are available to suit your
purpose.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Structures and Features
Positioning Slide Lapping Crossed Roller Extended Contact Ball Guide
Part Number KSP/KSPA/KSPS KSPB KSPT
Primary Material Brass / Stainless steel Brass Steel
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Structure
Index
Features
High resolution, coarse movement
of 360° and fine movement of ±5°
are possible, and models with a
transmission hole at the center of
the stage can be used when a
transmission hole is required
Transmission hole, high precision,
high resolution, and high load
capacity
Ultra thin, flexibly support any
installation orientation
Stage Thickness ◯ ◯ ◎
Rigidity ◯ ◎ ◯
Travel Accuracy ○ ◎ ◎
Coarse Rotation Range 360° 360° ±10°
Resolution ○ ◎ ◎
Weight ◎ ◯ ◎
Positioning Slide Lapping (partly crossed roller) Dovetail Slide Method
Part Number KSW KSSA
Primary Material Brass (part Aluminum) Brass
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Structure
Dovetail
Lapping
V Groove Screw
Ohters
Features
Since driven by worm gear,
precision adjustment is possible
for over 360°
Unique rotation stage having
square table surface
Rotation Stage
Stage Thickness △ △
Rigidity ◯ (Aluminum is △) ◯
Travel Accuracy ○ ◎
Coarse Rotation Range 360° ±3 − ±5° (depending on the stage)
Resolution ◯ △
Weight ◎ ◯
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E009

Manual Positioners
Goniometer Stages Guide
Application
Systems
Optics &
Optical
Coatings
Goniometers are rotation stages that rotate
about an axis that is located at a distance
above the surface of the stage.
Used for direction adjustment and correction, or tilting
and rotation of samples.
Products with different guide mechanisms or feed mechanisms
are also available.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Structures and Features
Positioning Slide Extended Contact Ball Guide Dovetail Slide Method
Part Number GOHT GOHTA GOH GOHB
Primary Material SUS440C quench hardened Aluminum Brass Brass
Feeding mechanism Gear Drive Micrometer Head Gear Drive Gear Drive Screw
Light
Sources
Structure
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Stage Size [mm]
□15 METRIC − − ◯ −
□25 METRIC − − ◯ −
□40
METRIC ◯ − ◯ ◯
INCH ◯ − ◯ −
□60 METRIC ◯ − ◯ ◯
□65
METRIC ◯ − ◯ −
INCH ◯ − ◯ −
□120 METRIC − ◯ − −
Features
Unique product
High precision
Ideal for frequent operations
Precision and high
stiffness
High load capacity
Low price
Cost effective
Cost effective
Ideal for permanent
fixation
High durability
Load Capacity ◎ △ ◎ ○ △
Rigidity ◎ ◎ ◎ ○ ○
Travel Accuracy ◎ ◎ ◎ ○ ○
Resolution ○ ◎ ○ ○ ◎
Weight ○ ○ △ ○ ○
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Attachment Pins
Use of attachment pins to reduce assembly adjustment time.
Attention
Attachment Pins
▶In case of single shipment, this product is delivered only by mail.
◦αβ axis is easily assembled by attaching an attachment
pin at the center of a GOHT series stage, and
aligning the center of two goniometer stages.
◦Ideal not only for assembly of single axis stages, but
also for positioning when mounting on instruments or
devices.
Specifications
Catalog
Code
Part Number
GOHT-AP-10
Compatible Products GOHT-40, 60
Primary Material
SUS303
Finish
None
Quantity [pieces] 10
Weight [kg] 0.0005
W7112
E010
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Ball Guide Method (GOHT/GOHTA Series)
These products are developed based on Sigma Koki’s original processing technology.
■Features
1High Precision 2High Load Capacity 3High Stiffness
Application
Systems
Optics &
Optical
Coatings
■High Load Capacity and High Stiffness
・The four-array contact structure achieves high load capacity
and high stiffness (13 times stiffer than the V groove)
As shown in Fig-1, ball guides are machined across the arcs so that
they have R groove structure and good contact with a ball allowing
stable load capacity against the load in the directions where contact
with the ball occurs frequently.
Fig-1
Contact width
Fig-2
P
P
Holders
Bases
Manual
Stages
Contact angle
■High Durability
・Long life and free of maintenance
Fig-2 shows the pressure distribution of the R groove and the flat
surface. As shown in the figure, pressure exerted on the R groove is
dispersed and does not reach inside. Thus, metal fatigue and wear
are reduced. Data for durability is listed. E015
Ball contact structure
R groove
(Ball guide method)
Flat surface
Pressure distribution of one ball
Actuators
Motoeized
Stages
Light
Sources
■High Precision
・Our original processing technology achieved an integral structure of the main body and the guides
As shown in Fig-3, because the crossed roller type goniometer stage, which has been the mainstream, has the guide
separate from the main body, there are many parts. Assembling a large number of parts caused errors or variation, resulting
in translation errors, that is, deviation in the most important rotation center when the stage moved. Our goniometer
stage as shown in Fig-4, has the guide integrated into the main body in order to compensate for assembly errors or
variation by machining accuracy. With the integral structure, the displacement of the rotation center is reduced.
Index
Guide
X axis Stages
Fig-3
Crossed Roller Guide Type
Ball Guide Type (GOHT)
Fig-4
XY axis Stages
Z axis Stages
XZ axis Stages
Rotation Direction
Disk Clamp
Worm Nut and Geer
Worm Nut and Geer anchor bearing
Steel Bottom Plate
The guide is engraved
directly onto the bottom piate.
Attachment Pins
(Locating Hole)
Rock Knob
trolley table
(Integrated guide
processing)
Stage
(Integrated guide processing)
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
・Our ball guide goniometer stage φ0.007mm or less
・Crossed roller goniometer stage manufactured
by another company
φ0.01mm or less
・Measuring method of the displacement of rotation center.
Installing the “master ball” on the top of stage surface.
Then sequentially positioning in a certain direction from
the starting point to the travel end.
Measuring by three-dimensional measuring device the
position of the master ball in each position.
From the coordinate data and obtains the fluctuation
width of the circular orbit, determine the center of rotation
displacement amount.
α axis
Master ball
Height rotation center
αβ axis
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E011

Manual Positioners
Definitions of Specifications and Terminology
Interpretation of the Specification Table
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
1… Part Number ***-**
2… Opposite Model ***-**R
3… Table Size **×**mm
4… Travel ±**mm
5… Positioning Slide
6…
Primary Material
Finish
7… Lead of Actuator **mm
8… Micrometer Position
9… Load capacity **N (**kgf)
10…
Straightness *μm
11…
Travel
Accuracy
Pitch **″
12… Yaw **″
Pitch
**N・m
13…
Max. Moment
Roll
Capacity
**N・m
Yaw
**N・m
Pitch
**″/N・cm
14…
Moment
Stiffness
Roll **″/N・cm
Yaw
**″/N・cm
15… Parallelism *μm
16… Running Parallelism *μm
17… Weight **kg
[Memo]
The drawing shows the types of tilt when a linear
stage travels.
Towards the direction of travel...
Pitch Rotation around the axis in the
horizontal plane perpendicular to the
direction of travel
Yaw Rotation around the axis in the vertical
plane perpendicular to the direction of
travel
Roll Rotation around the axis in the
horizontal plane parallel to the direction
of travel
Definition of Terms in the Specification Table
■Straightness (horizontal direction) [Units: μm]
Roll
1 Part Number
2 Opposite Model
3 Table Size
4 Travel *Indicated by plus and minus using the reference position of
product (when the top and bottom plates are at the same position)
as the reference position. (On the outline drawing in the catalog,
travel in one direction is indicated by +mm and in the opposite
direction is indicated by −mm with the outline drawing position as
the reference position.)
* It indicates the full travel range, it the reference position can not
be determined.
5 Positioning Slide * Extended Contact Ball Guide
Yaw
Pitch
Move the stage and stop it at regular intervals throughout the full
travel of the stage. At each point, measure the deviation from a
reference position in the horizontal plane. The maximum deviation
after correcting the deviation throughout the full travel to 0 is the
straightness in the horizontal plane.
Deviation (µm)
* Crossed roller guide
* Dovetail Slide method
* Leadscrew driving method
* Lapping method
* V groove screw
2
1.5
1
0.5
0
-0.5
-1
-1.5
-2
Maximum value
(Straightness)
Distance (mm)
* Special guide methods other than
the ones listed on the left are
available. Refer to the specification
table of each product.
6 Primary Material Finish
Material used for the product and surface finishing.
7 Lead of Actuator Change in position when the feed control (micrometer head,
fine-pitch screw or the like) is turned one time.
8 Micrometer Position Position of the micrometer with respect to the stage surface is
indicated as center or side.
9 Load Capacity Load capacity at the center of the stage (static load).
* Please contact our International Sales Division if you require to
use them above the ruted load capacity.
10 Travel Accuracy : Straightness (units: μm)
Indicates a deviation from the straight line connecting the start and
end points of the full travel of a linear stage.
11 : Pitch Indicates the degree of tilt around the axis in the horizontal plane
perpendicular to the direction of travel when moving the stage for
full travel.
12 : Yaw Indicates the degree of tilt around the axis in the vertical plane
perpendicular to the direction of travel when moving the stage for
full travel.
: Roll Indicates the degree of tilt around the axis in the horizontal plane
parallel to the direction of travel when moving the stage for full
travel.
13 Max. Moment Capacity (units: N・m)
Load capacity of the stage when a sample is placed away from the
center of the stage.
14 Moment Stiffness (units: ″/N・m)
Stage strength against a load exerted at a position away from the
center of the table top (the table center and the center of gravity of
a sample does not match). Indicates the degree of tilt of the table
top (sec) when 1N load is exerted at the position 1cm away from
the center of the stage surface.
15 Parallelism Parallelism of the stage top surface against the stage bottom
surface.
16 Running Parallelism Parallelism of the stage top surface against the stage bottom
surface when the stage is moved for full travel.
17 Weight Self weight of the product.
Measured value
Value after correction
Measurement interval
E012
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■Straightness (vertical direction) [Units: μm]
Move the stage and stop it at regular intervals throughout the full travel of the
stage. At each point, measure the deviation from a reference position in the
vertical plane. The maximum deviation after correcting the deviation throughout
the full travel to 0 is the straightness in the vertical plane.
Deviation (µm)
2
1.5
1
0.5
0
-0.5
-1
Maximum value
(Straightness)
Measured value
Value after correction
Application
Systems
Optics &
Optical
Coatings
Holders
-1.5
-2
Distance (mm)
Measurement interval
Bases
■Pitch [Units: ″] Move the stage and stop it at regular intervals throughout the full
travel of the stage. At each point, measure the degree of tilt in the
vertical plane. The maximum angular difference is the pitch.
Manual
Stages
Angle (seconds)
20
15
10
5
0
-5
-10
-15
-20
Distance (mm)
Maximum angle
difference
Measurement interval
Actuators
Motoeized
Stages
Light
Sources
■Yaw [Units: ″] Move the stage and stop it at regular intervals throughout the full
travel of the stage. At each point, measure the degree of tilt in the
horizontal plane. The maximum angular difference is the yaw.
Index
Guide
Angle (seconds)
20
15
10
5
0
-5
-10
-15
-20
Distance (mm)
Maximum angle
difference
Measurement interval
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
■Parallelism [Units: μm]
Fix a test indicator on an optical breadboard, bring it into contact with
the top surface of the stage, and measure while moving it over the
whole surface of the stage. The maximum difference of the displacement
value of the test indicator is the parallelism.
■Running Parallelism [Units: μm]
Fix a stage on an optical breadboard. Fix a test indicator on the
top surface of the stage, bring it into contact with the top surface
of the optical breadboard, and measure while moving the stage for
the full travel. The maximum difference of the displacement value
of the test indicator is the running parallelism.
Goniometer
Inclination
Vacuum
■Eccentricity [Units: μm]
Fix a rotation stage on an optical breadboard. Bring a test indicator
into contact with the circumference of the rotation stage, and
measure while turning the stage through one full rotation of 360°.
Half of the maximum difference of the displacement value of the test
indicator (misalignment) is the eccentricity.
■Wobble [Units: μm]
Fix a test indicator on an optical breadboard, bring it into contact with the
edge of the top surface of a rotation stage, and measure while turning the
stage for through one full rotation of 360°. The maximum difference of
the displacement value of the test indicator is the wobble.
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E013

Manual Positioners
Durability Data of Manual Ball Guide Stages
Linear Stage
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
[Test Procedure]
Reciprocate the stage with a load placed vertically on its upper surface, and measure the state
change at that time.
[Test Conditions]
Measurement Sample
Load
Procedure
Operation Cycles (Distance)
TSD-601
100N
13 mm × Both ways/sec
(continuous operation)
10 million times (260 km)
◦TSD series
After 10 million cycles of operation, the guide performance is
stable without significant change in the stiffness, straightness,
pitching, yawing, and running parallelism of the stage guide.
Motor
TSD-601
Weight
Light
Sources
(/Ncm)
0.2
Moment Stiffness
Pitch (/Ncm)
Index
Roll(/Ncm)
Catalog specification value
0.1
Guide
X axis Stages
0
1
2 3
4
5 6 7
8
9
10
Operation cycle (× 10 million times)
XY axis Stages
Z axis Stages
XZ axis Stages
(µm)
0.6
Straightness
XYZ axis Stages
θ axis Stages
0.5
0.4
0.3
Straightness (µm)
Catalog specification value
Goniometer
0.2
0.1
Inclination
Vacuum
0
1
2 3
4
5 6 7
8
9
10
Operation cycle (× 10 million times)
Pitch / Yaw
( )
30
Ball Guide
Crossed Roller
Dovetail
Lapping
20
10
Pitch ( )
Yaw ( )
Catalog specification value
V Groove Screw
Ohters
0
1
2 3
4
5 6 7
8
9
10
Operation cycle (× 10 million times)
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
(µm)
8
6
4
2
0
1
2 3
4
Running Parallelism
Running Parallelism (µm)
Catalog specification value
5 6 7
8
9
10
Operation cycle (× 10 million times)
E014
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Goniometer Stage
[Test Procedure]
Reciprocate the stage with a load placed vertically on its upper surface, and measure the state
change at that time.
[Test Conditions]
Measurement Sample
Load
Procedure
Operation Cycles (Distance)
GOHT-60A85B
50N
±15° × One way/sec
(continuous operation)
600,000 times (30 km)
◦GOHT series
After 600,000 cycles of operation, the guide performance is
stable without significant change in the stiffness and rotation
center displacement of the stage guide.
Weight
GOHT-60A85B
Motor
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Moment Stiffness
Rotation Center Displacement
Motoeized
Stages
(″/N・cm)
0.3
Roll (″/N・cm)
Yaw (″/N・cm)
Catalog specification value
(µm)
10
Rotation Center Displacement
Catalog specification value
Light
Sources
0.2
Index
5
0.1
Guide
0
0 10
20 30 40 50 60
Operation cycle (× 1 million times)
0
0 10
20 30 40 50 60
Operation cycle (× 1 million times)
X axis Stages
XY axis Stages
Z axis Stages
Rotation Stage
[Test Procedure]
Reciprocate the stage with a load placed vertically on its upper surface, and measure the state
change at that time.
[Test Conditions]
Measurement Sample
Load
Procedure
Operation Cycles (Distance)
KSPT-606MH
100N
±10° × Both ways/sec
(continuous operation)
100,000 times (1km)
◦KSPT series
After 100,000 cycles of operation, the guide performance is
stable without significant change in the stiffness, wobble, and
parallelism of the stage guide.
Moment Stiffness
Weight
Wobble / Parallelism
Motor
KSPT-606MH
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
(″/N・cm)
0.6
0.4
0.2
0
1
2 3
Roll (″/N・cm)
Pitch (″/N・cm)
Catalog specification value
4 5 6 7 8 9 10
Operation cycle (× 1 million times)
(mm)
0.04
0.03
0.02
0.01
0
1
2 3
Wobble (mm)
Parallelism (mm)
Catalog specification value
4 5 6 7 8 9 10
Operation cycle (× 1 million times)
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E015

Manual Positioners
Low-profile X axis Steel Stages
TSDT-401/601 Stage size □40/□60mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Ultra thin stages (10mm) provide high stiffness and load capacity in a very low profile packages
that are 40% shorter and 35% lighter than standard TSD stages.
◦Opposed locking clamp to maximize the holding power.
◦Low-profile is ideal for assembling into systems with limited spaces or optical experiments that require low optical axis.
Guide
▶The part number suffix FP indicates products with
fine-pitch screws instead of standard micrometers.
▶Fine Pitch screws have a screw pitch of 0.25mm
and require a hex wrench or the optional hex
wrench with knob (KCL) for adjustment.
F010
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
TSD-601S
Stage Thickness 18mm
TSDT-601S
10mm
Index
TSD-601S
TSDT-601S
Stage weight 0.5kg 0.28kg
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number TSDT-401S TSDT-401SFP TSDT-601S TSDT-601SFP
(Opposite Model) TSDT-401SR TSDT-401SRFP TSDT-601SR TSDT-601SRFP
Table Size [mm] 40×40 40×40 60×60 60×60
Axes of Travel
Micrometer Position Side Side Side Side
Travel [mm] ±6.5 ±6.5 ±6.5 ±6.5
Lead of Actuator [mm/rotation] 0.5 0.25 0.5 0.25
Micrometer Readable Resolution [mm] 0.01 − 0.01 −
Bearing type
Primary Material
Finish
X axis
Extended contact ball guide
Steel
Super black chrome
Load Capacity [N] 147 (15.0kgf) 147 (15.0kgf) 343 (35.0kgf) 343 (35.0kgf)
Travel Accuracy
Straightness [μm] 1 1 1 1
Pitch [ ″] 30 30 25 25
Yaw [ ″] 25 25 15 15
Pitch [N・m] 3.9 3.9 6.4 6.4
Max. Moment
Capacity
Roll [N・m] 3.9 3.9 6.4 6.4
Yaw [N・m] 2.9 2.9 4.9 4.9
Pitch [″/N・cm] 0.36 0.36 0.2 0.2
Moment Stiffness Roll [″/N・cm] 0.3 0.3 0.2 0.2
Yaw [″/N・cm] 0.36 0.36 0.2 0.2
Parallelism [μm] 30 30 30 30
Running Parallelism [μm] 10 10 10 10
Weight [kg] 0.14 0.14 0.28 0.28
E016
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Catalog
Code
W7003
Outline Drawing
TSDT-401S
Low head hexagon socket head cap screw M3×5…4 screws
40
16
40
16 16
9-M3 depth 4
10
1.2
32
TSDT-401SR
Low head hexagon socket head cap screw M3×5…4 screws
40
10
16 16
1.2
9-M3 depth 4
16
40
32
Application
Systems
Optics &
Optical
Coatings
Holders
15
Bases
Manual
Stages
Actuators
TSDT-401SFP
Low head hexagon socket head cap screw M3×5…4 screws
2mm
TSDT-401SRFP
Low head hexagon socket head cap screw M3×5…4 screws
2mm
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
TSDT-601S
Low head hexagon socket head cap screw M4×6…4 screws
60
25
60
25 25
M6 P1 depth 5
8-M4 depth 4.5
10
1.5
TSDT-601SR
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
15
25
(35.5) (53.2)
Inclination
Vacuum
5
16
(35.5)
(53.2)
4-3.5 mounting hole
6 counterbore
32
5
50
Low head hexagon socket head cap screw M4×6…4 screws
60
10
25 25
1.5
M6 P1 depth 5
8-M4 depth 4.5
25
60
50
4-4.5 mounting hole
8 counterbore
(53.2)
(35.5)
25
15
4-4.5 mounting hole
8 counterbore
5
16
(53.2)
(35.5)
15
4-3.5 mounting hole
6 counterbore
Clamp
5
32
Clamp
40
16 16
9-M3 depth 4
10
1.2
9-M3 depth 4
40
16 16
10
1.2
16
16
15 40
16
(35.5) (37.5)
32
4-3.5 mounting hole
6 counterbore
(37.5)
(35.5)
16
15 40
32
4-3.5 mounting hole
6 counterbore
Clamp
32
5
5
32
Clamp
Clamp
50
50
Clamp
Ball Guide
Crossed Roller
TSDT-601SFP
Low head hexagon socket head cap screw M4×6…4 screws
60
15
25
25
Clamp
60
25 25
(35.5) (37.5)
50
M6 P1 depth 5
8-M4 depth 4.5
5
10
1.5
50
2mm
4-4.5 mounting hole
8 counterbore
TSDT-601SRFP
Low head hexagon socket head cap screw M4×6…4 screws
M6 P1 depth 5
8-M4 depth 4.5
5
60
25 25
(37.5)
50
(35.5)
25
25
60
15
Clamp
10
1.5
50
2mm
4-4.5 mounting hole
8 counterbore
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E017

Manual Positioners
X axis Steel Extended Contact Slide Stages
XY axis Steel Extended Contact Slide Stages
TSD-251
TSD-252
Stage size □25mm
Application
Systems
Hardened Steel linear stages with integrated bearing ways for superior stiffness, accuracy and
durability.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Guide
▶Vacuum-compatible stainless steel stages (TSDS-251/252) are also
available. E200, 202
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC TSD-251C TSD-251S TSD-252C TSD-252S
(Opposite Model) METRIC − TSD-251SR − TSD-252SR
Table Size [mm] 25×25 25×25 25×25 25×25
Axes of Travel X axis XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±3 ±3 ±3 ±3
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Finish
Super black chrome
Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)
Straightness [μm] 0.5 0.5 0.5 0.5
Travel Accuracy Pitch [ ″] 30 30 30 30
Yaw [ ″] 25 25 25 25
Pitch [N・m] 3.0 3.0 3.0 3.0
Max. Moment
Capacity
Roll [N・m] 3.7 3.7 3.0 3.0
Yaw [N・m] 3.5 3.5 3.5 3.5
Pitch [″/N・cm] 1.8 1.8 3.0 3.0
Moment Stiffness Roll [″/N・cm] 1.1 1.1 2.2 2.2
Yaw [″/N・cm] 1.1 1.1 2.2 2.2
Parallelism [μm] 30 30 30 30
Running Parallelism [μm] 7 7 10 10
Orthogonality [μm] − − 10 10
Options FP/DL FP/DL FP/DL FP
Weight [kg] 0.07 0.07 0.1 0.1
Option
Option Code
Compatible product
Lead of Actuator Micrometer Readable Resolution
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-42525 0.25 −
DL Differential Micrometer Heads MDC-6.5 0.5 0.01
* Please add an option code as the part number suffix to specify various optional specifications.
* Installation may not be possible depending on the directon of DL.
* The suffix “-C” type uses adhesive for fixing the micrometer. Please contact our International Sales Division for more information on replacement.
E008
E018
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Catalog
Code
Catalog
Code
W7001
W7024
Outline Drawing
TSD-251C
(7)
Hexagonal socket head cap screw M2×4…4 screws
25 MAX41
Clamp
10 10
Application
Systems
Optics &
Optical
Coatings
12 25
10 10
M4 depth 4
7-M2 depth 4
14.2
20
Holders
Bases
1.5
20
9.5
4-2.4 mounting hole
4 counterbore
Manual
Stages
Actuators
TSD-251S
(7)
Hexagonal socket head cap screw M2×4…4 screws
25
10 10
7-M2 depth 4
Clamp
TSD-251SR
(7)
Hexagonal socket head cap screw M2×4…4 screws
25
Clamp
10 10 7-M2 depth 4
Motoeized
Stages
25
12
10
10
M4 depth 4
20
12 25
10 10
M4 depth 4
20
Light
Sources
MAX49
MAX49
Index
12
7
7
1.5
12
20
4-2.4 mounting hole
4 counterbore
4-2.4 mounting hole
4 counterbore
20
1.5
Guide
X axis Stages
XY axis Stages
TSD-252C
Hexagonal socket head cap screw M2×4…4 screws
Z axis Stages
(7)
(7)
25
10 10
MAX41
X axis clamp
XZ axis Stages
XYZ axis Stages
25
MAX41
10
10
7-M2 depth 4
M4 depth 4
20
θ axis Stages
Goniometer
Inclination
Y axis clamp
17.5
Vacuum
9.5
22.2
1.5
20
20
4-2.4 mounting hole
4 counterbore
Ball Guide
Crossed Roller
Dovetail
TSD-252S
7-M2 depth 4
(7)
25
12
20
Hexagonal socket head cap screw M2×4…4 screws
10 10
M4 depth 4
1.5
(7)
Y axis clamp
25 12 15
10 10
MAX49
20
MAX49
7
4-2.4 mounting hole
4 counterbore
X axis clamp
20
TSD-252SR
M4 depth 4
(7)
7 12 25
10
10
Y axis clamp
4-2.4 mounting hole
4 counterbore
Hexagonal socket head cap screw M2×4…4 screws
(7) 25 12
10 10
MAX49
20
1.5
7-M2 depth 4
MAX49
20
15
X axis clamp
20
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E019

Manual Positioners
X axis Steel Extended Contact Slide Stages
XY axis Steel Extended Contact Slide Stages
TSD-401
TSD-402
Stage size □40mm
Application
Systems
Hardened Steel linear stages with integrated bearing ways for superior stiffness, accuracy and
durability.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Guide
▶Vacuum-compatible stainless steel stages (TSDS-401/402) are also
available. E200, 202
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
Specifications
Part Number
METRIC TSD-401C TSD-401S TSD-402C TSD-402S
INCH TSD-401CUU TSD-401SUU TSD-402CUU TSD-402SUU
(Opposite Model)
METRIC − TSD-401SR − TSD-402SR
INCH − TSD-401SRUU − TSD-402SRUU
Table Size [mm] 40×40 40×40 40×40 40×40
Axes of Travel X axis XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±6.5 ±6.5 ±6.5 ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Finish
Super black chrome
Load Capacity [N] 196 (20kgf) 196 (20kgf) 196 (20kgf) 196 (20kgf)
Straightness [μm] 0.5 0.5 0.5 0.5
Travel Accuracy Pitch [ ″] 25 25 25 25
Yaw [ ″] 15 15 15 15
Pitch [N・m] 7.8 7.8 7.8 7.8
Max. Moment
Capacity
Roll [N・m] 7.8 7.8 7.8 7.8
Yaw [N・m] 5.0 5.0 5.0 5.0
Pitch [″/N・cm] 0.3 0.3 0.5 0.5
Moment Stiffness Roll [″/N・cm] 0.2 0.2 0.5 0.5
Yaw [″/N・cm] 0.23 0.23 0.46 0.46
Parallelism [μm] 15 15 30 30
Running Parallelism [μm] 7 7 12 12
Orthogonality [μm] − − 10 10
Options FP/DM/WP/DL FP/DM/WP/DL FP/DM/WP/DL FP/DM/WP
Weight [kg] 0.2 0.2 0.3 0.3
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Option
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 −
DM Differential Micrometer Heads MHF2-13F
WP Sub-micron Worm Drive Micrometer Heads WGP-13
Coars: 0.5
Fine: 0.025
Coars: 0.25
Fine: 0.025
Coars: 0.01
Fine: 0.0005
Coars: 0.005
Fine: 0.0005
DL Differential Micrometer Heads MDC-13 0.5 0.01
* Please add an option code as the part number suffix to specify various optional specifications.
* Installation may not be possible depending on the directon of DL.
* C type is replacement work requires a special tool (MNS). F006
E008
E020
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
Catalog
Code
W7002
W7025
Outline Drawing
TSD-401C/401CUU
40 (9.5)
A A
40
A A
Hexagonal socket head cap screw M3×6…4 screws
Hexagonal socket head cap screw 6/32UNC×3/16…4 screws (UU)
MAX66
Clamp
B
Application
Systems
Optics &
Optical
Coatings
Holders
8-C depth 5
16
1.5
TSD-401S/401SUU
(9.5)
40
A
16 18
1.5 A
B
40
A A
B
MAX74
D depth 5
4-E mounting hole
F counterbore
10.5
17.8
Hexagonal socket head cap screw M3×6…4 screws
Hexagonal socket head cap screw 6/32UNC×3/16…4 screws (UU)
D depth 5
8-C depth 5
9
4-E mounting hole
F counterbore
Clamp
B
Part Number
A
(mm)
B
(mm)
TSD-401SR/401SRUU
(9.5)
40
A A
18
9
C
4-E mounting hole
F counterbore
MAX74
40
A A
B
D
1.5
Hexagonal socket head cap screw M3×6…4 screws
Hexagonal socket head cap screw 6/32UNC×3/16…4 screws (UU)
D depth 5
8-C depth 5
16
E
(mm)
F
(mm)
TSD-401C 16 32 M3 M6 P1 3.5 6
TSD-401CUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
Clamp
B
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Part Number
A
(mm)
B
(mm)
C
D
E
(mm)
F
(mm)
TSD-401S 16 32 M3 M6 P1 3.5 6
TSD-401SUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
Part Number
A
(mm)
B
(mm)
C
D
E
(mm)
F
(mm)
TSD-401SR 16 32 M3 M6 P1 3.5 6
TSD-401SRUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
Guide
X axis Stages
Hexagonal socket head cap screw M3×6…4 screws
Hexagonal socket head cap screw 6/32UNC×3/16…4 screws (UU)
(9.5) 40 MAX66
X axis clamp
A A
8-C depth 5
TSD-402C/402CUU
40 (9.5)
A A
B
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
MAX66
Y axis clamp
D depth 5
21.5
28.8
θ axis Stages
Goniometer
Inclination
Vacuum
27
1.5
TSD-402S/402SUU
(9.5)
8-C depth 5
(9.5)
40
18
A
A
D depth 5
Y axis clamp
27
Part Number
1.5
B
40
A
A
(mm)
B
A
MAX74
4-E mounting hole
F counterbore
B
(mm)
10.5
Hexagonal socket head cap screw M3×6…4 screws
Hexagonal socket head cap screw 6/32UNC×3/16…4 screws (UU)
18
20
X axis clamp
MAX74
9
4-E mounting hole
F counterbore
C
D
B
E
(mm)
Part Number
F
(mm)
TSD-402S 16 32 M3 M6 P1 3.5 6
TSD-402SUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
A
(mm)
B
(mm)
TSD-402SR/402SRUU
(9.5)
40
18
(9.5)
D depth 5
A
A
Y axis clamp
9
4-E mounting hole
F counterbore
Part Number
C
MAX74
40
A A
B
A
(mm)
D
18
Hexagonal socket head cap screw M3×6…4 screws
Hexagonal socket head cap screw 6/32UNC×3/16…4 screws (UU)
1.5
B
(mm)
E
(mm)
8-C depth 5
MAX74
27
C
F
(mm)
TSD-402C 16 32 M3 M6 P1 3.5 6
TSD-402CUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
20
X axis clamp
D
B
E
(mm)
F
(mm)
TSD-402SR 16 32 M3 M6 P1 3.5 6
TSD-402SRUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E021

Manual Positioners
X axis Steel Extended Contact Slide Stages
XY axis Steel Extended Contact Slide Stages
TSD-601
TSD-602
Stage size □60mm
Application
Systems
Hardened Steel linear stages with integrated bearing ways for superior stiffness, accuracy and
durability.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Guide
▶Vacuum-compatible stainless steel stages (TSDS-601/602) are also
available. E200, 202
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
Specifications
Part Number METRIC TSD-601C TSD-601S TSD-602C TSD-602S
(Opposite Model) METRIC − TSD-601SR − TSD-602SR
Table Size [mm] 60×60 60×60 60×60 60×60
Axes of Travel X axis XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±6.5 ±6.5 ±6.5 ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Finish
Super black chrome
Load Capacity [N] 343 (35.0kgf) 343 (35.0kgf) 343 (35.0kgf) 343 (35.0kgf)
Straightness [μm] 0.5 0.5 0.5 0.5
Travel Accuracy Pitch [ ″] 25 25 25 25
Yaw [ ″] 15 15 15 15
Pitch [N・m] 13.2 13.2 13.2 13.2
Max. Moment
Capacity
Roll [N・m] 14.7 14.7 13.2 13.2
Yaw [N・m] 10 10 10 10
Pitch [″/N・cm] 0.08 0.08 0.13 0.13
Moment Stiffness Roll [″/N・cm] 0.05 0.05 0.13 0.13
Yaw [″/N・cm] 0.08 0.08 0.16 0.16
Parallelism [μm] 15 15 30 30
Running Parallelism [μm] 7 7 12 12
Orthogonality [μm] − − 10 10
Options FP/DM/WP/DL FP/DM/WP/DL FP/DM/WP/DL FP/DM/WP
Weight [kg] 0.5 0.5 0.9 0.9
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Option
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 −
DM Differential Micrometer Heads MHF2-13F
WP Sub-micron Worm Drive Micrometer Heads WGP-13
Coars: 0.5
Fine: 0.025
Coars: 0.25
Fine: 0.025
Coars: 0.01
Fine: 0.0005
Coars: 0.005
Fine: 0.0005
DL Differential Micrometer Heads MDC-13 0.5 0.01
* Please add an option code as the part number suffix to specify various optional specifications.
* Installation may not be possible depending on the directon of DL.
* Replacement work requires a special tool (MNS). F006
E008
E022
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
Catalog
Code
W7004
W7026
Outline Drawing
TSD-601C
TSD-601S
(11
60
18 25 25
32
(11
60
20.8
25
25
18
Hexagonal socket head cap screw M4×6…4 screws
60
MAX66
25 25
Clamp
32
8-M4 depth 5
1.5
50
M16 P1 depth 6
4-M3 depth 5
Hexagonal socket head cap screw M4×6…4 screws
60
25 25
Clamp
32
8-M4 depth 5
M16 P1 depth 6
32
MAX88
10.5
4-4.5 mounting hole
8 counterbore
4-M3 depth 5
10.5
50
50
TSD-601SR
(11
10.5 20.8 60
25
25
32
Hexagonal socket head cap screw M4×6…4 screws
60
25 25
Clamp
32
8-M4 depth 5
M16 P1 depth 6
MAX88
4-M3 depth 5
18
50
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
TSD-602C
1.5
50
4-4.5 mounting hole
8 counterbore
Hexagonal socket head cap screw M4×6…4 screws
(11
60
MAX66
4-4.5 mounting hole
8 counterbore
50
1.5
X axis Stages
XY axis Stages
Z axis Stages
MAX66 60 (11
25 25
32
25
25
32
8-M4 depth 5
M16 P1 depth 6
4-M3 depth 5
X axis clamp
50
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Y axis clamp
32
10.5
24.5
Ball Guide
1.5
50
4-4.5 mounting hole
8 counterbore
Crossed Roller
TSD-602S
Hexagonal socket head cap screw M4×6…4 screws
TSD-602SR
Hexagonal socket head cap screw M4×6…4 screws
Dovetail
(11
8-M4 depth 5
20.8 60 (11
32 25 25
32
4-M3 depth 5
Y axis clamp
60 20.8
25 25
32
MAX88
MAX88
M16 P1 depth 6
10.5
24.5
X axis clamp
50
(11
8-M4 depth 5
(11
60
20.8
25
25
10.5
32
Y axis clamp
60
25 25
32
MAX88
20.8
4-M3 depth 5
32 MAX88
M16 P1 depth 6
24.5
X axis clamp
50
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
1.5
50
4-4.5 mounting hole
8 counterbore
4-4.5 mounting hole
8 counterbore
50
1.5
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E023

Manual Positioners
X axis Steel Extended Contact Slide Stages
TSD-651 Stage size □65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Hardened Steel linear stages with integrated bearing ways for superior stiffness, accuracy and
durability.
Guide
▶Vacuum-compatible stainless steel stages (TSDS-651) are also
available. E200
▶It is used M6 size or 1/4 inch size screws for fixing this stage and
on the top of the table with tapped holes.
▶It is available to mount these stages directly on vibration isolation
systems or laboratory benches by using holes for M6 screws or 1/4
inch screws.
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TSD-651C-M6 TSD-651S-M6 TSD-651C25-M6 TSD-651S25-M6
INCH TSD-651CUU TSD-651SUU TSD-651C25UU TSD-651S25UU
(Opposite Model)
METRIC − TSD-651SR-M6 − −
INCH − TSD-651SRUU − −
Table Size [mm] 65×65 65×65 65×65 65×65
Axes of Travel
X axis
Micrometer Position Center Side Center Side
Travel [mm] ±6.5 ±6.5 ±12.5 ±12.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Finish
Super black chrome
Load Capacity [N] 294 (30.0kgf) 294 (30.0kgf) 294 (30.0kgf) 294 (30.0kgf)
Straightness [μm] 0.5 0.5 0.5 0.5
Travel Accuracy Pitch [ ″] 25 25 25 25
Yaw [ ″] 15 15 15 15
Pitch [N・m] 13.2 13.2 13.2 13.2
Max. Moment
Capacity
Roll [N・m] 14.7 14.7 14.7 14.7
Yaw [N・m] 10 10 10 10
Pitch [″/N・cm] 0.08 0.08 0.08 0.08
Moment Stiffness Roll [″/N・cm] 0.05 0.05 0.05 0.05
Yaw [″/N・cm] 0.08 0.08 0.08 0.08
Parallelism [μm] 15 15 15 15
Running Parallelism [μm] 7 7 7 7
Options FP *1 /DM/WP/DL FP *1 /DM/WP/DL FP *2 FP *2
Weight [kg] 0.6 0.6 0.6 0.6
Option
Option Code
FP
Fine-pitch Screw Adjusters
Compatible product
Products Name
Part Number
DM Differential Micrometer Heads MHF2-13F
WP Sub-micron Worm Drive Micrometer Heads WGP-13
Lead of Actuator
[mm/rotation]
Micrometer Readable Resolution
[mm]
FPSA-62540 *1
FPSA-62550 *2 0.25 −
Coars: 0.5
Fine: 0.025
Coars: 0.25
Fine: 0.025
Coars: 0.01
Fine: 0.0005
Coars: 0.005
Fine: 0.0005
DL Differential Micrometer Heads MDC-13 0.5 0.01
* Please add an option code as the part number suffix to specify various optional specifications.
* Installation may not be possible depending on the directon of DL.
* Replacement work requires a special tool (MNS). F006
E008
E024
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W7113
Outline Drawing
TSD-651C-M6/651CUU
(11)
65
A A
20
1.5
65
A A
TSD-651S-M6/651SUU
B
65
A A
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
MAX69
Clamp
9-C depth 6
12
4-7 mounting hole
D counterbore
B
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
9-C depth 6
Part Number
Clamp
A
(mm)
B
(mm)
TSD-651SR-M6/651SRUU
C
D
(mm)
TSD-651C-M6 25 50 M6 P1 11
TSD-651CUU 25.4 50.8 1/4-20UNC 12
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
65
Clamp
A A 9-C depth 6
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
65
A A
B
65
A A
B
Light
Sources
Index
20.5
20.5
(11)
(10)
MAX91
MAX91
20
1.5
Part Number
B
A
(mm)
12.5
4-7 mounting hole
D counterbore
B
(mm)
C
D
(mm)
TSD-651S-M6 25 50 M6 P1 11
TSD-651SUU 25.4 50.8 1/4-20UNC 12
12.5
Part Number
B
A
(mm)
1.5
20
4-7 mounting hole
D counterbore
B
(mm)
C
D
(mm)
TSD-651SR-M6 25 50 M6 P1 11
TSD-651SRUU 25.4 50.8 1/4-20UNC 12
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
TSD-651C25-M6/651C25UU
9-C
depth 6
(11)
65
A
65
A A
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
MAX96
Clamp
B
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
A
20
1.5
TSD-651S25-M6/651S25UU
(11)
B
65
A A
4-7 mounting hole
D counterbore
9-C depth 6
12
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
Clamp
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TSD-651C25-M6 25 50 M6 P1 11
TSD-651C25UU 25.4 50.8 1/4-20UNC 12
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
A
□15mm
20
20.5 65
1.5
A
B
MAX106
12.5
4-7 mounting hole
D counterbore
B
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TSD-651S25-M6 25 50 M6 P1 11
TSD-651S25UU 25.4 50.8 1/4-20UNC 12
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E025

Manual Positioners
XY axis Steel Extended Contact Slide Stages
TSD-652 Stage size □65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Hardened Steel linear stages with integrated bearing ways for superior stiffness, accuracy and
durability.
Guide
▶Vacuum-compatible stainless steel stages (TSDS-652) are also
available. E202
▶It is used M6 size or 1/4 inch size screws for fixing this stage and
on the top of the table with tapped holes.
▶It is available to mount these stages directly on vibration isolation
systems or laboratory benches by using holes for M6 screws or 1/4
inch screws.
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TSD-652C-M6 TSD-652S-M6 TSD-652C25-M6 TSD-652S25-M6
INCH TSD-652CUU TSD-652SUU TSD-652C25UU TSD-652S25UU
(Opposite Model)
METRIC − TSD-652SR-M6 − −
INCH − TSD-652SRUU − −
Table Size [mm] 65×65 65×65 65×65 65×65
Axes of Travel
XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±6.5 ±6.5 ±12.5 ±12.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Finish
Super black chrome
Load Capacity [N] 294 (30.0kgf) 294 (30.0kgf) 294 (30.0kgf) 294 (30.0kgf)
Straightness [μm] 0.5 0.5 0.5 0.5
Travel Accuracy Pitch [ ″] 25 25 25 25
Yaw [ ″] 15 15 15 15
Pitch [N・m] 13.2 13.2 13.2 13.2
Max. Moment
Capacity
Roll [N・m] 13.2 13.2 13.2 13.2
Yaw [N・m] 10 10 10 10
Pitch [″/N・cm] 0.13 0.13 0.13 0.13
Moment Stiffness Roll [″/N・cm] 0.13 0.13 0.13 0.13
Yaw [″/N・cm] 0.16 0.16 0.16 0.16
Parallelism [μm] 30 30 30 30
Running Parallelism [μm] 12 12 12 12
Orthogonality [μm] 10 10 10 10
Options FP *1 /DM/WP/DL FP *1 /DM/WP FP *2 FP *2
Weight [kg] 0.9 0.9 0.9 0.9
Option
Option Code
FP
Fine-pitch Screw Adjusters
Compatible product
Products Name
Part Number
DM Differential Micrometer Heads MHF2-13F
WP Sub-micron Worm Drive Micrometer Heads WGP-13
Lead of Actuator
[mm/rotation]
Micrometer Readable Resolution
[mm]
FPSA-62540 *1
FPSA-62550 *2 0.25 −
Coars: 0.5
Fine: 0.025
Coars: 0.25
Fine: 0.025
Coars: 0.01
Fine: 0.0005
Coars: 0.005
Fine: 0.0005
DL Differential Micrometer Heads MDC-13 0.5 0.01
* Please add an option code as the part number suffix to specify various optional specifications.
* Installation may not be possible depending on the directon of DL.
* Replacement work requires a special tool (MNS). F006
E008
E026
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Catalog
Code
W7114
Outline Drawing
TSD-652C-M6/652CUU
(11)
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
(11) 65
MAX69
A A
X axis clamp
9-C depth 6
Application
Systems
Optics &
Optical
Coatings
65
A
B
Holders
A
MAX69
Bases
Y axis clamp
32
1.5
B
12
4-7 mounting hole
D counterbore
24
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TSD-652C-M6 25 50 M6 P1 11
TSD-652CUU 25.4 50.8 1/4-20UNC 12
Manual
Stages
Actuators
TSD-652S-M6/652SUU
(11) 65
9-C depth 6
A A
65 (11)
A A
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
20.5
24.5
X axis clamp
MAX91
B
TSD-652SR-M6/652SRUU
9-C depth 6
(11)
65
A
A
(11) 65 20.5
A A
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
MAX91
24.5
X axis clamp
B
Motoeized
Stages
Light
Sources
Index
20.5
Y axis clamp
32
1.5
MAX91
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
(11) 65
MAX96
X axis clamp
A A
9-C depth 6
TSD-652C25-M6/652C25UU
A
B
11
4-7 mounting hole
D counterbore
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
65
A
B
Inclination
Vacuum
MAX96
20.5
Part Number
(11)
A
(mm)
B
(mm)
C
D
(mm)
TSD-652S-M6 25 50 M6 P1 11
TSD-652SUU 25.4 50.8 1/4-20UNC 12
Y axis clamp
32
11
1.5
Part Number
MAX91
B
A
(mm)
4-7 mounting hole
D counterbore
B
(mm)
C
D
(mm)
TSD-652SR-M6 25 50 M6 P1 11
TSD-652SRUU 25.4 50.8 1/4-20UNC 12
Y axis clamp
32
1.5
TSD-652S25-M6/652S25UU
9-C depth 6
(11)
B
65
A A
12
24
Part Number
A
(mm)
B
(mm)
TSD-652C25-M6 25 50 M6 P1 11
4-7 mounting hole
TSD-652C25UU 25.4 50.8 1/4-20UNC 12
D counterbore
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
20.5
24.5
X axis clamp
C
D
(mm)
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
20.5 65 (11)
A A
Y axis clamp
32
1.5
MAX106
B
MAX106
11
4-7 mounting hole
D counterbore
B
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TSD-652S25-M6 25 50 M6 P1 11
TSD-652S25UU 25.4 50.8 1/4-20UNC 12
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E027

Manual Positioners
X axis Steel Extended Contact Slide Stages
XY axis Steel Extended Contact Slide Stages
TSD-801
TSD-802
Stage size □80mm
Application
Systems
Hardened Steel linear stages with integrated bearing ways for superior stiffness, accuracy and
durability.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
Specifications
Part Number METRIC TSD-801C TSD-801S TSD-802C TSD-802S
(Opposite Model) METRIC − TSD-801SR − TSD-802SR
Table Size [mm] 80×80 80×80 80×80 80×80
Axes of Travel X axis XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±12.5 ±12.5 ±12.5 ±12.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Finish
Super black chrome
Load Capacity [N] 490 (50.0kgf) 490 (50.0kgf) 490 (50.0kgf) 490 (50.0kgf)
Straightness [μm] 0.5 0.5 0.5 0.5
Travel Accuracy Pitch [ ″] 25 25 25 25
Yaw [ ″] 15 15 15 15
Pitch [N・m] 19.4 19.4 19.4 19.4
Max. Moment
Capacity
Roll [N・m] 21.5 21.5 19.4 19.4
Yaw [N・m] 19.5 19.5 19.5 19.5
Pitch [″/N・cm] 0.04 0.04 0.06 0.06
Moment Stiffness Roll [″/N・cm] 0.02 0.02 0.06 0.06
Yaw [″/N・cm] 0.04 0.04 0.08 0.08
Parallelism [μm] 20 20 40 40
Running Parallelism [μm] 7 7 15 15
Orthogonality [μm] − − 10 10
Options FP/DM/WP FP/DM/WP FP/DM/WP FP/DM/WP
Weight [kg] 0.9 0.9 1.4 1.4
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Option
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62550 0.25 −
DM Differential Micrometer Heads MHF2-13F
WP Sub-micron Worm Drive Micrometer Heads WGP-13
* Please add an option code as the part number suffix to specify various optional specifications.
* The travel of DM and WP is ±6.5 mm.
* Replacement work requires a special tool (MNS). F006
Coars: 0.5
Fine: 0.025
Coars: 0.25
Fine: 0.025
Coars: 0.01
Fine: 0.0005
Coars: 0.005
Fine: 0.0005
E008
E028
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Catalog
Code
Catalog
Code
W7006
W7027
Outline Drawing
TSD-801C
80 (11)
70
25
Hexagonal socket head cap screw M4×8…4 screws
80
70
25 25
MAX94
4-M4 depth 6
M16 P1 depth 6
Clamp
70
Application
Systems
Optics &
Optical
Coatings
Holders
25
Bases
8-M4 depth 5
20
3
70
4-4.5 mounting hole
8 counterbore
12
Manual
Stages
TSD-801S
Hexagonal socket head cap screw M4×8…4 screws
TSD-801SR
Hexagonal socket head cap screw M4×8…4 screws
Actuators
(11)
25
20.8 80
20 70
25
80
70
25 25
MAX122
4-M4 depth 6
M16 P1 depth 6
8-M4 depth 5
12.5
Clamp
70
80 (11)
70
20.8
12.5
25
25
80
70
25 25
MAX122
4-M4 depth 6
M16 P1 depth 6
8-M4 depth 5
20
Clamp
70
Motoeized
Stages
Light
Sources
Index
Guide
TSD-802C
(11)
3
70
4-4.5 mounting hole
8 counterbore
Hexagonal socket head cap screw M4×8…4 screws
(11) 80
MAX94
70
X axis clamp
25 25
4-M4 depth 6
4-4.5 mounting hole
8 counterbore
70
3
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
MAX94
80
70
25 25
8-M4 depth 5 M16 P1 depth 6
70
θ axis Stages
Goniometer
Inclination
Vacuum
Y axis clamp
24
TSD-802S
Hexagonal socket head cap screw M4×8…4 screws
(11) 80 20.8
24.5
70
X axis clamp
4-M4 depth 6 25 25
20.8 80 (11)
32
32 70
25
25
8-M4 depth 5
Y axis clamp
3
3
70
MAX122
70
MAX122
M16 P1 depth 6
11
12
4-4.5 mounting hole
8 counterbore
4-4.5 mounting hole
8 counterbore
70
TSD-802SR
Hexagonal socket head cap screw M4×8…4 screws
(11) 80 20.8
70
X axis clamp
4-M4 depth 6 25 25
8-M4 depth 5
20.8 80 70
(11)
25 25
Y axis clamp
11
4-4.5 mounting hole
8 counterbore
MAX122
70
3
32 MAX122
M16 P1 depth 6
24.5
70
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E029

Manual Positioners
X axis Steel Extended Contact Slide Stages
XY axis Steel Extended Contact Slide Stages
TSD-1001
TSD-1002
Stage size □100mm
Application
Systems
Hardened Steel linear stages with integrated bearing ways for superior stiffness, accuracy and
durability.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC TSD-1001C TSD-1001S TSD-1002C TSD-1002S
(Opposite Model) METRIC − TSD-1001SR − TSD-1002SR
Table Size [mm] 100×100 100×100 100×100 100×100
Axes of Travel X axis XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±12.5 ±12.5 ±12.5 ±12.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Finish
Super black chrome
Load Capacity [N] 588 (60.0kgf) 588 (60.0kgf) 588 (60.0kgf) 588 (60.0kgf)
Straightness [μm] 0.5 0.5 0.5 0.5
Travel Accuracy Pitch [ ″] 25 25 25 25
Yaw [ ″] 15 15 15 15
Pitch [N・m] 35.0 35.0 35.0 35.0
Max. Moment
Capacity
Roll [N・m] 41.7 41.7 35.0 35.0
Yaw [N・m] 32.0 32.0 32.0 32.0
Pitch [″/N・cm] 0.02 0.02 0.03 0.03
Moment Stiffness Roll [″/N・cm] 0.01 0.01 0.03 0.03
Yaw [″/N・cm] 0.02 0.02 0.04 0.04
Parallelism [μm] 20 20 40 40
Running Parallelism [μm] 8 8 15 15
Orthogonality [μm] − − 10 10
Options FP/DG FP FP/DG FP
Weight [kg] 1.5 1.5 2.6 2.6
Option
Option Code
Compatible product
Lead of Actuator Micrometer Readable Resolution
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62550 0.25 −
DG Micrometer Heads (Digital display) MHN2-25DM 0.5 0.001
* Please add an option code as the part number suffix to specify various optional specifications.
* DG is a digital display type. F005
* Replacement work requires a special tool (MNS). F006
E008
E030
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Catalog
Code
Catalog
Code
W7007
W7028
Outline Drawing
TSD-1001C
(11)
Hexagonal socket head cap screw M4×8…4 screws
100
MAX109
90
Clamp
25 25
4-M4 depth 6
M16 P1 depth 6
Application
Systems
Optics &
Optical
Coatings
Holders
100
90
25 25
90
Bases
20
2.5
90
8-M4 depth 5
4-4.5 mounting hole
8 counterbore
10.5
Manual
Stages
TSD-1001S
Hexagonal socket head cap screw M4×8…4 screws
TSD-1001SR
Hexagonal socket head cap screw M4×8…4 screws
Actuators
(11)
100
90
25 25
4-M4 depth 6
M16 P1 depth 6
Clamp
(11)
100
90
25 25
4-M4 depth 6
M16 P1 depth 6
Clamp
Motoeized
Stages
22 100
90
25 25
8-M4 depth 5
90
22 100
90
25 25
8-M4 depth 5
90
Light
Sources
Index
MAX149
10.5
10.5
MAX149
20
2.5
90
4-4.5 mounting hole
8 counterbore
4-4.5 mounting hole
8 counterbore
90
2.5
20
Guide
X axis Stages
TSD-1002C
Hexagonal socket head cap screw M4×8…4 screws
XY axis Stages
(11) 100 MAX109
90
25 25
4-M4 depth 6
X axis clamp
Z axis Stages
XZ axis Stages
XYZ axis Stages
100
90
25
90
θ axis Stages
25
(11)
Goniometer
34 MAX109
Y axis clamp
8-M4 depth 5 M16 P1 depth 6
2.5
90
4-4.5 mounting hole
8 counterbore
10.5
24.5
Inclination
Vacuum
Ball Guide
Crossed Roller
TSD-1002S
4-M4 depth 6
22 100 (11)
90
25 25
8-M4 depth 5
Y axis clamp
34
2.5
Hexagonal socket head cap screw M4×8…4 screws
(11) 100
90
25 25
MAX149
90
22 24.5
X axis clamp
MAX149
M16 P1 depth 6
10.5
4-4.5 mounting hole
8 counterbore
90
TSD-1002SR
4-M4 depth 6
(11)
22
Y axis clamp
100
90
25 25
10.5
4-4.5 mounting hole
8 counterbore
Hexagonal socket head cap screw M4×8…4 screws
(11) 100
90
25 25
MAX149
90
22
2.5
MAX149
M16 P1 depth 6
8-M4 depth 5
34
24.5
X axis clamp
90
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E031

Manual Positioners
X axis Steel Extended Contact Slide Stages (Filtered)
TSD-1201 Stage size □120mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Hardened Steel linear stages with integrated bearing ways for superior stiffness, accuracy and
durability.
◦The clearance hole (φ56) retains it full aperture over the full travel range.
Guide
▶It is used M6 size or 1/4 inch size screws for fixing this stage and
on the top of the table with tapped holes.
▶The M6 type can mount directly on M6 specification vibration isolation
systems and laboratory benches.
▶The suffix “UU” type is able to mount directly on vibration isolation
systems or laboratory benches by using holes for M6 screws or 1/4
inch screws.
Manual
Stages
Actuators
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TSD-1201CH TSD-1201SH TSD-1201CH-M6 TSD-1201SH-M6
INCH − − TSD-1201CHUU TSD-1201SHUU
(Opposite Model)
METRIC − TSD-1201SRH − TSD-1201SRH-M6
INCH − − − TSD-1201SRHUU
Table Size [mm] 120×120 120×120 120×120 120×120
Axes of Travel
X axis
Micrometer Position Center Side Center Side
Travel [mm] ±20 ±20 ±20 ±20
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Finish
Super black chrome
Load Capacity [N] 686 (70.0kgf) 686 (70.0kgf) 686 (70.0kgf) 686 (70.0kgf)
Straightness [μm] 0.5 0.5 0.5 0.5
Travel Accuracy Pitch [ ″] 25 25 25 25
Yaw [ ″] 15 15 15 15
Pitch [N・m] 53.9 53.9 53.9 53.9
Max. Moment
Capacity
Roll [N・m] 49.0 49.0 49.0 49.0
Yaw [N・m] 27.0 27.0 27.0 27.0
Pitch [″/N・cm] 0.03 0.03 0.03 0.03
Moment Stiffness Roll [″/N・cm] 0.02 0.02 0.02 0.02
Yaw [″/N・cm] 0.03 0.03 0.03 0.03
Parallelism [μm] 50 50 50 50
Running Parallelism [μm] 12 12 12 12
Weight [kg] 2.0 2.0 2.0 2.0
E032
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Catalog
Code
W7008
Outline Drawing
TSD-1201CH
(11)
Hexagonal socket head cap screw M4×8…4 screws
120 MAX147
25 25 25 25
Clamp
20-M4 depth 6
Application
Systems
Optics &
Optical
Coatings
25
120
25 25 25
56
100
Holders
Bases
22
12
Manual
Stages
3.5
100
4-4.5 mounting hole
8 counterbore
Actuators
TSD-1201SH
(11)
25
120
25 25 25 25
Hexagonal socket head cap screw M4×8…4 screws
20-M4 depth 6
Clamp
TSD-1201SRH
(11)
25
120
25 25 25
Hexagonal socket head cap screw M4×8…4 screws
25
20-M4 depth 6
Clamp
Motoeized
Stages
Light
Sources
120
25
25 25
56
100
120
25
25 25
56
100
Index
22
22
3.5
100
MAX189
TSD-1201CH-M6/1201CHUU
(11)
A
A
120
A A
A
11.3
4-4.5 mounting hole
8 counterbore
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
MAX147
Clamp
20-C depth 6
22
11.3
4-4.5 mounting hole
8 counterbore
MAX189
100
3.5
22
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
120
A
A
56
B
Goniometer
Inclination
22
F A
TSD-1201SH-M6/1201SHUU
(11)
120
A A A
22
22
A
F
A
Part Number
B
120
A A
B
56
A
MAX189
A
(mm)
4-D mounting hole
E counterbore
12
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
20-C depth 6
11.3
4-D mounting hole
E counterbore
B
(mm)
C
D
(mm)
Clamp
B
E
(mm)
TSD-1201SH-M6 25 100 M6 P1 6.5 11
TSD-1201SHUU 25.4 101.6 1/4-20UNC 7 12
Part Number
TSD-1201SRH-M6/1201SRHUU
20-C depth 6
4-D mounting hole
E counterbore
A
(mm)
A
Part Number
MAX189
B
(mm)
120
A A
B
56
A
A
(mm)
C
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
(11)
A A A A
120
F
22
22
B
(mm)
D
(mm)
C
E
(mm)
TSD-1201CH-M6 25 100 M6 P1 6.5 11
TSD-1201CHUU 25.4 101.6 1/4-20UNC 7 12
Clamp
B
D
(mm)
E
(mm)
TSD-1201SRH-M6 25 100 M6 P1 6.5 11
TSD-1201SRHUU 25.4 101.6 1/4-20UNC 7 12
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E033

Manual Positioners
XY axis Steel Extended Contact Slide Stages (Filtered)
TSD-1202 Stage size □120mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Hardened Steel linear stages with integrated bearing ways for superior stiffness, accuracy and
durability.
◦The clearance hole (φ56) retains it full aperture over the full travel range.
Guide
▶It is used M6 size or 1/4 inch size screws for fixing this stage and
on the top of the table with tapped holes.
▶The M6 type can mount directly on M6 specification vibration isolation
systems and laboratory benches.
▶The suffix “UU” type is able to mount directly on vibration isolation
systems or laboratory benches by using holes for M6 screws or 1/4
inch screws.
Manual
Stages
Actuators
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TSD-1202CH TSD-1202SH TSD-1202CH-M6 TSD-1202SH-M6
INCH − − TSD-1202CHUU TSD-1202SHUU
(Opposite Model)
METRIC − TSD-1202SRH − TSD-1202SRH-M6
INCH − − − TSD-1201SRHUU
Table Size [mm] 120×120 120×120 120×120 120×120
Axes of Travel
XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±20 ±20 ±20 ±20
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Finish
Super black chrome
Load Capacity [N] 686 (70.0kgf) 686 (70.0kgf) 686 (70.0kgf) 686 (70.0kgf)
Straightness [μm] 0.5 0.5 0.5 0.5
Travel Accuracy Pitch [ ″] 25 25 25 25
Yaw [ ″] 15 15 15 15
Pitch [N・m] 49.0 49.0 49.0 49.0
Max. Moment
Capacity
Roll [N・m] 49.0 49.0 49.0 49.0
Yaw [N・m] 27.0 27.0 27.0 27.0
Pitch [″/N・cm] 0.05 0.05 0.05 0.05
Moment Stiffness Roll [″/N・cm] 0.05 0.05 0.05 0.05
Yaw [″/N・cm] 0.06 0.06 0.06 0.06
Parallelism [μm] 50 50 50 50
Running Parallelism [μm] 25 25 25 25
Orthogonality [μm] 10 10 10 10
Weight [kg] 3.1 3.1 3.1 3.1
E034
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Catalog
Code
W7029
Outline Drawing
TSD-1202CH
(11)
Hexagonal socket head cap screw M4×8…4 screws
(11) 120
MAX147
X axis clamp
25 25 25 25
20-M4 depth 6
Application
Systems
Optics &
Optical
Coatings
120
25 25 25 25
56
100
Holders
Bases
MAX147
Y axis clamp
28
Manual
Stages
38
3.5
100
12
4-4.5 mounting hole
8 counterbore
Actuators
TSD-1202SH
(11)
20-M4 depth 6
(11)
120
25
22
Y axis clamp
38
25 25
25
Hexagonal socket head cap screw M4×8…4 screws
120 22 27.5
25 25 25 25
X axis clamp
56
MAX189
MAX189
11.3
100
TSD-1202SRH
(11)
20-M4 depth 6
11.3 22 120 (11)
25 25 25 25
Y axis clamp
25
MAX189
Hexagonal socket head cap screw M4×8…4 screws
120
25 25
56
25
22
MAX189
38
X axis clamp
100
27.5
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
3.5
100
4-4.5 mounting hole
8 counterbore
4-4.5 mounting hole
8 counterbore
100
3.5
XY axis Stages
TSD-1202CH-M6/1202CHUU
(11)
(11)
120
A A A A
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
MAX147
X axis clamp
20-C depth 6
Z axis Stages
XZ axis Stages
XYZ axis Stages
120
A A A A
56
B
θ axis Stages
Goniometer
Inclination
MAX147
Vacuum
Y axis clamp
38
TSD-1202SH-M6/1202SHUU
(11) 120
20-C depth 6 A A A A
(11)
120
22
38
F
A A A A
Y axis clamp
F
Part Number
B
56
MAX189
B
A
(mm)
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
22 27.3
MAX189
11.3
12
4-D mounting hole
E counterbore
4-D mounting hole
E counterbore
B
(mm)
C
28
X axis clamp
B
D
(mm)
Part Number
A
(mm)
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
(11) 120 22
20-C depth 6 A A A A
X axis clamp
TSD-1202SRH-M6/1202SRHUU
(11)
22
A
A
120
A A
Y axis clamp
11.3
B
(mm)
4-D mounting hole
E counterbore
Part Number
56
MAX189
B
C
A
(mm)
F
D
(mm)
MAX189
38
B
(mm)
E
(mm)
TSD-1202CH-M6 25 100 M6 P1 6.5 11
TSD-1202CHUU 25.4 101.6 1/4-20UNC 7 12
E
(mm)
TSD-1202SH-M6 25 100 M6 P1 6.5 11
TSD-1202SHUU 25.4 101.6 1/4-20UNC 7 12
C
B
27.3
D
(mm)
E
(mm)
TSD-1202SRH-M6 25 100 M6 P1 6.5 11
TSD-1202SRHUU 25.4 101.6 1/4-20UNC 7 12
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E035

Manual Positioners
X axis Steel Extended Contact Slide Stages
X axis Steel Extended Contact Slide Stages (Coarse/Fine Movement)
TSD
TSD-SDM
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Hardened Steel linear stages with integrated bearing ways for superior stiffness, accuracy and
durability.
◦The rectangular shape minimizes the footprint while providing longer travel.
◦The coarse/fine movement type uses a 5mm lead screw, enabling fast coarse adjustments. Fine adjustments can then be
made using the opposing micrometer.
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
METRIC TSD-25501S TSD-40801S TSD-60121S TSD-60161SDM
Part Number
INCH − TSD-40801SUU − −
(Opposite Model) METRIC TSD-25501SR TSD-40801SR TSD-60121SR −
Table Size [mm] 25×50 40×80 60×120 60×160
Axes of Travel
X axis
Micrometer Position Side Side Side Side
Travel [mm] ±6.5 ±12.5 ±20
Coars: ±35
Fine: ±3
Lead of Actuator [mm/rotation] 0.5 0.5 0.5
Coars: 5
Fine: 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01
Coars: −
Fine: 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Finish
Super black chrome
Load Capacity [N] 49 (5.0kgf) 196 (20.0kgf) 392 (40.0kgf) 490 (50.0kgf)
Straightness [μm] 1 1 1 1
Travel Accuracy Pitch [ ″] 30 30 25 25
Yaw [ ″] 25 30 15 15
Pitch [N・m] 3.9 7.9 19.6 29.4
Max. Moment
Capacity
Roll [N・m] 2.5 3.9 9.8 9.8
Yaw [N・m] 2.0 4.9 9.8 14.7
Pitch [″/N・cm] 1.2 0.2 0.1 0.07
Moment Stiffness Roll [″/N・cm] 1.6 0.3 0.2 0.2
Yaw [″/N・cm] 1.2 0.2 0.1 0.09
Parallelism [μm] 30 30 50 50
Running Parallelism [μm] 10 10 12 15
Weight [kg] 0.1 0.4 1.0 1.3
E036
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Catalog
Code
Catalog
Code
W7009
W7010
Outline Drawing
TSD-25501S
(6.5)
Hexagonal socket head cap screw M2×4…4 screws
50 15-M2 depth 4
10 10 10 10
Clamp
TSD-25501SR
(6.5)
Hexagonal socket head cap screw M2×4…4 screws
50 15-M2 depth 4
10 10 10 10
Clamp
Application
Systems
Optics &
Optical
Coatings
25
10 10
20
25
10 10
20
Holders
Bases
12
12
MAX76
MAX76
7
7
1.5
12
12
40
4-2.4 mounting hole
4 counterbore
4-2.4 mounting hole
4 counterbore
40
1.5
Manual
Stages
TSD-40801S/40801SUU
Hexagonal socket head cap screw M3×6…4 screws,
Spring washers
TSD-40801SR
Hexagonal socket head cap screw M3×6…4 screws,
Spring washers
Actuators
(9.5)
16 17.5 40
A A
80
A A A A
MAX123
15-C depth 6
9
Clamp
B
9
17.5 40 (9.5)
16 16
80
16 16 16 16
MAX123
15-M3 depth 6
16
Clamp
32
Motoeized
Stages
Light
Sources
Index
1.5
2×B
4-D mounting hole
E counterbore
4-3.5 mounting hole
6 counterbore
64
1.5
Guide
Part Number
A
(mm)
B
(mm)
C
D
(mm)
E
(mm)
TSD-40801S 16 32 M3 3.5 6
TSD-40801SUU 15.875 31.75 6-32UNC 4 6.5
X axis Stages
XY axis Stages
Z axis Stages
TSD-60121S
4-8
(Fixing screw
insertion hole)
(11)
60
20 22
25
25
3.5
TSD-60161SDM
Hexagonal socket head cap screw
M4×8…4 screws
Hexagonal socket head cap screw M4×8…4 screws
120
25 25 25 25
50
100
MAX189
4-8
(Fixing screw
insertion hole)
15-M4 depth 6
(11)
10.5
8-4.5 mounting hole
8 counterbore
Clamp
50
25 25 25
160
TSD-60121SR
4-8
(Fixing screw
insertion hole)
10.5 22 60 (11)
25 25
8-4.5 mounting hole
8 counterbore
25 25 25
25
21-M4 depth 6
Hexagonal socket head cap screw M4×8…4 screws
MAX189
120
25 25
50
100
Clamp
25
15-M4 depth 6
3.5
20
Clamp
50
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
20
3.5
32.5 60
25 25
Coarse adjustment screw
177.5
50
150
11
8-4.5 mounting hole
8 counterbore
50
Coarse/Fine switching
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E037

Manual Positioners
X axis Steel Extended Contact Slide Stages
XY axis Steel Extended Contact Slide Stages
TSD-651-M6/UU
TSD-652-M6/UU
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Hardened Steel linear stages with integrated bearing ways for superior stiffness, accuracy and
durability.
◦It is used M6 size or 1/4 inch size screws for fixing this stage and on the top of the table with tapped holes.
◦The M6 type can mount directly on M6 specification vibration isolation systems and laboratory benches.
◦The suffix “UU” type is able to mount directly on vibration isolation systems or laboratory benches by using holes for M6
screws or 1/4 inch screws.
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
METRIC TSD-65121C-M6 TSD-65121S-M6 TSD-65171S-M6 TSD-65122C-M6 TSD-65122S-M6 TSD-65172S-M6
Part Number
INCH TSD-65121CUU TSD-65121SUU TSD-65171SUU TSD-65122CUU TSD-65122SUU TSD-65172SUU
Table Size [mm] 65×120 65×120 65×170 65×120 65×120 65×170
Axes of Travel X axis XY axis
Micrometer Position Center Side Side Center Side Side
Travel [mm] ±20 ±20 ±25 ±20 ±20 ±25
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Finish
Super black chrome
Load Capacity [N] 392 (40kgf) 392 (40kgf) 490 (50kgf) 392 (40kgf) 392 (40kgf) 490 (50kgf)
Straightness [μm] 3 3 5 3 3 5
Travel Accuracy Pitch [ ″] 25 25 25 25 25 25
Yaw [ ″] 15 15 15 15 15 15
Pitch [N・m] 19.6 19.6 29.4 9.8 9.8 9.8
Max. Moment
Capacity
Roll [N・m] 9.8 9.8 9.8 9.8 9.8 9.8
Yaw [N・m] 9.8 9.8 14.7 9.8 9.8 10
Pitch [″/N・cm] 0.1 0.1 0.07 0.3 0.3 0.27
Moment Stiffness Roll [″/N・cm] 0.2 0.2 0.2 0.3 0.3 0.27
Yaw [″/N・cm] 0.2 0.2 0.2 0.3 0.3 0.27
Parallelism [μm] 50 50 50 100 100 100
Running Parallelism [μm] 12 12 15 25 25 30
Weight [kg] 1.0 1.0 1.7 2.4 2.4 3.4
E038
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Catalog
Code
Catalog
Code
W7115
W7116
Outline Drawing
TSD-65121C-M6/65121CUU
(11)
A
120
A A
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
MAX147
A
Clamp
TSD-65121S-M6/65121SUU
4-10.5
(Fixing screw insertion hole)
(11)
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
120
A A A A 15-C depth 6
Clamp
Application
Systems
Optics &
Optical
Coatings
65
A A
20
15-C depth 6
4-10.5
(Fixing screw insertion hole)
B
20 22 65
A A
MAX189
10.5
B
Holders
Bases
1.5
B
2×B
TSD-65171S-M6/65171SUU
4-10.5
(Fixing screw
insertion hole)
TSD-65122C-M6/65122CUU
X axis clamp
Part Number
B
(11)
20 22 65
A
A
1.5
32
41.5
Part Number
170
A A A A A A
120
MAX147
40
A
(mm)
A
A A A
1.5
MAX234
B
3×B
A
(mm)
TSD-65172C-M6/65172CUU
170
B
(mm)
8-D mounting hole
E counterbore
12
21.5
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
21-C depth 6
10.5
8-D mounting hole
E counterbore
Clamp
B
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
120
MAX147
65
A A
2×B
B
(mm)
A A A A A A
15-C depth 6
Y axis clamp
4-D mounting hole
E counterbore
C
12
TSD-65122S-M6/65122SUU
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
10.5
Y axis clamp
D
(mm)
E
(mm)
TSD-65122C-M6 25 50 M6 P1 6.5 11
TSD-65122CUU 25.4 50.8 1/4-20UNC 7 12
C
D
(mm)
E
(mm)
TSD-65121C-M6 25 50 M6 P1 6.5 11
TSD-65121CUU 25.4 50.8 1/4-20UNC 7 12
Part Number
Part Number
65
A
A
15-C depth 6
1.5
X axis clamp
Part Number
A
(mm)
A
B
2×B
8-D mounting hole
E counterbore
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
120
10.5
A
A
(mm)
B
65
A
A
MAX189
B
(mm)
MAX189
30.5
4-D mounting hole
E counterbore
B
C
(mm)
Y axis clamp
40
D
(mm)
2×B
120
1.5
E
(mm)
TSD-65122S-M6 25 50 M6 P1 6.5 11
TSD-65122SUU 25.4 50.8 1/4-20UNC 7 12
C
D
(mm)
E
(mm)
TSD-65121S-M6 25 50 M6 P1 6.5 11
TSD-65121SUU 25.4 50.8 1/4-20UNC 7 12
A
(mm)
B
(mm)
C
D
(mm)
E
(mm)
TSD-65171S-M6 25 50 M6 P1 6.5 11
TSD-65171SUU 25.4 50.8 1/4-20UNC 7 12
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
65
A A
21-C depth 6
X axis clamp
MAX234
B
65
MAX234
30.5
4-D mounting hole
E counterbore
40
3×B
170
1.5
Part Number
A
(mm)
B
(mm)
C
D
(mm)
E
(mm)
TSD-65172C-M6 25 50 M6 P1 6.5 11
TSD-65172CUU 25.4 50.8 1/4-20UNC 7 12
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E039

Manual Positioners
X axis General-purpose type Stainless Stages
XY axis General-purpose type Stainless Stages
TSDH-251
TSDH-252W
Stage size □25mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
High precision and high stiffness stainless steel stages that have guide grooves on both the quenched
stainless steel stage main body and movable table.
◦SUS440C as main material for this product. To prevent rusting, the finish has been processed with electroless nickel
plating.
Guide
▶It is also available the type of black coating of super black chrome
for the surface finishing. Please contact our International Sales
Division for more information.
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC TSDH-251C TSDH-251S TSDH-252WC TSDH-252WS
(Opposite Model) METRIC − TSDH-251SR − TSDH-252WSR
Table Size [mm] 25×25 25×25 25×25 25×25
Axes of Travel X axis XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±3 ±3 ±3 ±3
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
SUS440C quench hardened
Finish
Electroless nickel
Load Capacity [N] 59.8 (6.0kgf) 59.8 (6.0kgf) 59.8 (6.0kgf) 59.8 (6.0kgf)
Straightness [μm] 1 1 1 1
Travel Accuracy Pitch [ ″] 30 30 30 30
Yaw [ ″] 25 25 25 25
Pitch [N・m] 4.0 4.0 4.0 4.0
Max. Moment
Capacity
Roll [N・m] 5.0 5.0 4.0 4.0
Yaw [N・m] 2.0 2.0 2.0 2.0
Pitch [″/N・cm] 1.8 1.8 3.4 3.4
Moment Stiffness Roll [″/N・cm] 1.6 1.6 3.4 3.4
Yaw [″/N・cm] 2.0 2.0 3.2 3.2
Parallelism [μm] 30 30 50 50
Running Parallelism [μm] 10 10 20 20
Orthogonality [μm] − − 10 10
Options FP/DL FP FP/DL FP
Weight [kg] 0.07 0.07 0.14 0.14
Option
Option Code
Compatible product
Lead of Actuator Micrometer Readable Resolution
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-42525 0.25 −
DL Differential Micrometer Heads MDC-6.5 0.5 0.01
* Please add an option code as the part number suffix to specify various optional specifications.
* Installation may not be possible depending on the directon of DL.
* The suffix “-C” type uses adhesive for fixing the micrometer. Please contact our International Sales Division for more information on replacement.
E008
E040
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Catalog
Code
Catalog
Code
W7117
W7118
Outline Drawing
TSDH-251C
M2 depth 2.5
(7)
Hexagonal socket head cap screw
(stainless steel construction) M2×4…4 screws
25
10 10
MAX41
Clamp
Application
Systems
Optics &
Optical
Coatings
25
10 10
20
Holders
6-M2 depth 3
M4 depth 4
(14.2)
Bases
12
1
20
9.5
4-2.4 mounting hole
4 counterbore
Manual
Stages
Actuators
TSDH-251S
Hexagonal socket head cap screw
(stainless steel construction) M2×4…4 screws
TSDH-251SR
Hexagonal socket head cap screw
(stainless steel construction) M2×4…4 screws
Motoeized
Stages
(7)
25
10 10
M2 depth 2.5
6-M2 depth 3
Clamp
M2 depth 2.5
6-M2 depth 3
25
10 10
(7)
Clamp
Light
Sources
M4 depth 4
M4 depth 4
15.2 25
10 10
20
10 10
25
15.2
20
Index
MAX 44
MAX 44
12
6.8
6.8
1
12
Guide
1
20
4-2.4 mounting hole
4 counterbore
4-2.4 mounting hole
4 counterbore
20
X axis Stages
XY axis Stages
Z axis Stages
TSDH-252WC
Hexagonal socket head cap screw
(stainless steel construction) M2×4…4 screws
XZ axis Stages
XYZ axis Stages
6-M2 depth 3
25
10 10
MAX41
X axis clamp
θ axis Stages
(7)
25
10 10
M2 depth 2.5
20
Goniometer
Inclination
MAX41
M4 depth 4
Vacuum
24
1
Y axis clamp
21.5
26.2
9.5
20
4-2.4 mounting hole
4 counterbore
Ball Guide
Crossed Roller
Dovetail
Lapping
TSDH-252WS
Hexagonal socket head cap screw
(stainless steel construction) M2×4…4 screws
TSDH-252WSR
Hexagonal socket head cap screw
(stainless steel construction) M2×4…4 screws
V Groove Screw
6-M2 depth 3
(7)
15.2 25
10 10
M2 depth 2.5
M4 depth 4
(7)
25
10 10
MAX44
MAX44
18.8
X axis clamp
20
6-M2 depth 3
M2 depth 2.5
(7)
15.2 25
10 10
25
10 10
MAX44
15.2
M4 depth 4
MAX44
18.8
X axis clamp
20
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
Y axis clamp
24
1
6.8
Y axis clamp
6.8
1
24
□80mm
□100mm
□120mm
20
4-2.4 mounting hole
4 counterbore
4-2.4 mounting hole
4 counterbore
20
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E041

Manual Positioners
X axis General-purpose type Stainless Stages
XY axis General-purpose type Stainless Stages
TSDH-401
TSDH-402W
Stage size □40mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
High precision and high stiffness stainless steel stages that have guide grooves on both the quenched
stainless steel stage main body and movable table.
◦SUS440C as main material for this product. To prevent rusting, the finish has been processed with electroless nickel
plating.
Guide
▶It is also available the type of black coating of super black
chrome for the surface finishing. Please contact our International
Sales Division for more information.
▶For the TSDH series, you can select the opposite clamping by
specifying the option code (suffix: OC).
Manual
Stages
Option Code
OC
Products Name
opposite clamp
Actuators
Motoeized
Stages
Light
Sources
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC TSDH-401C TSDH-401S TSDH-402WC TSDH-402WS
(Opposite Model) METRIC − TSDH-401SR − TSDH-402WSR
Table Size [mm] 40×40 40×40 40×40 40×40
Axes of Travel X axis XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±6.5 ±6.5 ±6.5 ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Finish
Extended contact ball guide
SUS440C quench hardened
Electroless nickel
Load Capacity [N] 196 (20kgf) 196 (20kgf) 196 (20kgf) 196 (20kgf)
Travel Accuracy
Straightness [μm] 1 1 1 1
Pitch [ ″] 30 30 30 30
Yaw [ ″] 25 25 25 25
Pitch [N・m] 7.8 7.8 7.8 7.8
Max. Moment
Capacity
Roll [N・m] 7.8 7.8 7.8 7.8
Yaw [N・m] 5 5 5 5
Pitch [″/N・cm] 0.3 0.3 0.66 0.66
Moment Stiffness Roll [″/N・cm] 0.2 0.2 0.66 0.66
Yaw [″/N・cm] 0.23 0.23 0.6 0.6
Parallelism [μm] 30 30 50 50
Running Parallelism [μm] 10 10 20 20
Orthogonality [μm] − − 10 10
Options FP/DL FP/DL FP/DL FP
Weight [kg] 0.2 0.2 0.4 0.4
Option
Option Code
Compatible product
Lead of Actuator Micrometer Readable Resolution
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 −
DL Differential Micrometer Heads MDC-13 0.5 0.01
* Please add an option code as the part number suffix to specify various optional specifications.
* Installation may not be possible depending on the directon of DL.
* Replacement work requires a special tool (MNS). F006
E008
E042
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
Catalog
Code
W7119
W7120
Outline Drawing
TSDH-401C
40 (11)
16
16
Hexagonal socket head cap screw (stainless steel construction)
M3×6…4 screws, Spring washers
40
16 16
MAX66
Clamp
32
Application
Systems
Optics &
Optical
Coatings
Holders
7-M3 depth 5
M6×1 depth 6
10.5
Bases
16
1.5
32
17.8
4-3.5 mounting hole
6 counterbore
Manual
Stages
Actuators
TSDH-401S
40 (11)
16 16
Hexagonal socket head cap screw (stainless steel construction)
M3×6…4 screws, Spring washers
40
16 16
7-M3 depth 5
M6×1 depth 6
Clamp
32
TSDH-401SR
7-M3 depth 5
M6×1 depth 6
Hexagonal socket head cap screw (stainless steel construction)
M3×6…4 screws, Spring washers
40
16 16
Clamp
(11)
16 16
40
32
Motoeized
Stages
Light
Sources
19
MAX70
MAX70
19
Index
Guide
X axis Stages
TSDH-402WC
7-M3 depth 5
MAX66 40 (11)
16 16
Hexagonal socket head cap screw (stainless steel construction)
M3×6…4 screws, Spring washers
40
16 16
MAX66
M6×1 depth 6
X axis clamp
32
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Y axis clamp
26.5
33.8
Vacuum
32
1.5
10.5
TSDH-402WS
7-M3 depth 5
32
4-3.5 mounting hole
6 counterbore
Hexagonal socket head cap screw (stainless steel construction)
M3×6…4 screws, Spring washers
(11) 40 19
25.2
16 16
X axis clamp
TSDH-402WSR
7-M3 depth 5
(11) 40
16 16
Hexagonal socket head cap screw (stainless steel construction)
M3×6…4 screws, Spring washers
19
M6×1 depth 6
X axis clamp
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
(11)
(11)
16
16
1.5
9.2
9.2
32
4-3.5 mounting hole
6 counterbore
4-3.5 mounting hole
6 counterbore
32
1.5
19 40
16 16
M6×1 depth 6
Y axis clamp
32
1.5
MAX70
32
MAX70
9.2
4-3.5 mounting hole
6 counterbore
32
19 40
16 16
MAX70
Y axis clamp
9.2
4-3.5 mounting hole
32
6 counterbore
1.5
MAX70
32
25.2
32
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E043

Manual Positioners
X axis General-purpose type Stainless Stages
XY axis General-purpose type Stainless Stages
TSDH-601
TSDH-602
Stage size □60mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
High precision and high stiffness stainless steel stages that have guide grooves on both the quenched
stainless steel stage main body and movable table.
◦SUS440C as main material for this product. To prevent rusting, the finish has been processed with electroless nickel
plating.
Guide
▶It is also available the type of black coating of super black
chrome for the surface finishing. Please contact our International
Sales Division for more information.
▶For the TSDH series, you can select the opposite clamping by
specifying the option code (suffix: OC).
Option Code
OC
Products Name
opposite clamp
Actuators
Motoeized
Stages
Light
Sources
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC TSDH-601C TSDH-601S TSDH-602C TSDH-602S
(Opposite Model) METRIC - TSDH-601SR - TSDH-602SR
Table Size [mm] 60×60 60×60 60×60 60×60
Axes of Travel X axis XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±6.5 ±6.5 ±6.5 ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Finish
Extended contact ball guide
SUS440C quench hardened
Electroless nickel
Load Capacity [N] 392 (30kgf) 392 (30kgf) 392 (30kgf) 392 (30kgf)
Travel Accuracy
Straightness [μm] 1 1 1 1
Pitch [ ″] 25 25 25 25
Yaw [ ″] 15 15 15 15
Pitch [N・m] 13.2 13.2 13.2 13.2
Max. Moment
Capacity
Roll [N・m] 14.7 14.7 13.2 13.2
Yaw [N・m] 9.8 9.8 9.8 9.8
Pitch [″/N・cm] 0.2 0.2 0.38 0.38
Moment Stiffness Roll [″/N・cm] 0.13 0.13 0.37 0.37
Yaw [″/N・cm] 0.16 0.16 0.39 0.39
Parallelism [μm] 30 30 50 50
Running Parallelism [μm] 10 10 20 20
Orthogonality [μm] − − 10 10
Options FP/DL FP/DL FP/DL FP
Weight [kg] 0.45 0.45 0.9 0.9
Option
Option Code
Compatible product
Lead of Actuator Micrometer Readable Resolution
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 −
DL Differential Micrometer Heads MDC-13 0.5 0.01
* Please add an option code as the part number suffix to specify various optional specifications.
* Installation may not be possible depending on the directon of DL.
* Replacement work requires a special tool (MNS). F006
E008
E044
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
Catalog
Code
W7121
W7122
Outline Drawing
TSDH-601C
(11)
60
25
25
32
Hexagonal socket head cap screw
(stainless steel construction) M4×6…4 screws
60
MAX66
25 25
Clamp
32
6-M4 depth 6
4-M3 depth 5
M4 depth 5
50
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
2-M4 depth 5
16
1
TSDH-601S
19 60 (11)
25 25
32
4H7
50
8.6
4-4.5 mounting hole
8 counterbore
Hexagonal socket head cap screw
(stainless steel construction) M4×6…4 screws
60
25 25
Clamp
32
6-M4 depth 6
4-M3 depth 5
M4 depth 5
4H7
50
TSDH-601SR
19 60 (11)
25
25
32
Hexagonal socket head cap screw
(stainless steel construction) M4×6…4 screws
60
25 25
Clamp
32
6-M4 depth 6
4-M3 depth 5
M4 depth 5
2-M4 depth 5
4H7
50
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
2-M4 depth 5
MAX83.5
MAX83.5
9.2
9.2
Guide
16
1
4-4.5 mounting hole
8 counterbore
TSDH-602C
2-M4 depth 5
50
Hexagonal socket head cap screw
(stainless steel construction) M4×6…4 screws
60
MAX66
25 25
32
X axis clamp
4-4.5 mounting hole
8 counterbore
50
1
16
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
(11)
XYZ axis Stages
60
25
25
32
50
θ axis Stages
Goniometer
6-M4 depth 6
M4 depth 5
Inclination
MAX66
4-M3 depth 5
Vacuum
Y axis clamp
24.6
32
1
TSDH-602S
6-M4 depth 6
4-M3 depth 5
(11)
4H7
50
8.6
4-4.5 mounting hole
8 counterbore
Hexagonal socket head cap screw
(stainless steel construction) M4×6…4 screws
60 19
25 25
25.2
32
X axis clamp
TSDH-602SR
2-M4 depth 5
(11)
Hexagonal socket head cap screw
(stainless steel construction) M4×6…4 screws
60 19
25 25
X axis clamp
32
6-M4 depth 6
4-M3 depth 5
M4 depth 5
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
60
25 25
19
32
32
M4 depth 5
Y axis clamp
1
MAX83.5
50
MAX83.5
9.2
2-M4 depth 5
4-4.5 mounting hole
8 counterbore
4H7
50
19 60
25 25
32
Y axis clamp
9.2
4-4.5 mounting hole
8 counterbore
MAX83.5
50
1
MAX83.5
32
25.2
4H7
50
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E045

Manual Positioners
X axis Aluminum Crossed Roller Slide Stages
XY axis Aluminum Crossed Roller Slide Stages
TAM-401
TAM-402
Stage size □40mm
Application
Systems
Light-weight and high precision linear stages have black anodized aluminum bodies fitted with
crossed roller bearings.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
Specifications
Part Number
METRIC TAM-401C TAM-401S TAM-402C TAM-402S
INCH TAM-401CUU TAM-401SUU TAM-402CUU TAM-402SUU
(Opposite Model)
METRIC - TAM-401SR - TAM-402SR
INCH - TAM-401SRUU - TAM-402SRUU
Table Size [mm] 40×40 40×40 40×40 40×40
Axes of Travel X axis XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±6.5 ±6.5 ±6.5 ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Crossed roller
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)
Straightness [μm] 2 2 2 2
Travel Accuracy Pitch [ ″] 40 40 40 40
Yaw [ ″] 25 25 25 25
Pitch [N・m] 2.75 2.75 2.75 2.75
Max. Moment
Capacity
Roll [N・m] 3.0 3.0 2.75 2.75
Yaw [N・m] 2.5 2.5 2.5 2.5
Pitch [″/N・cm] 0.66 0.66 1.22 1.22
Moment Stiffness
Roll [″/N・cm] 0.36 0.36 1.22 1.22
Parallelism [μm] 30 30 50 50
Running Parallelism [μm] 10 10 20 20
Orthogonality [μm] − − 10 10
Options FP/DM/WP/DL FP/DM/WP/DL FP/DM/WP/DL FP/DM/WP
Weight [kg] 0.13 0.13 0.25 0.25
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Option
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 −
DM Differential Micrometer Heads MHF2-13F
WP Sub-micron Worm Drive Micrometer Heads WGP-13
Coars: 0.5
Fine: 0.025
Coars: 0.25
Fine: 0.025
Coars: 0.01
Fine: 0.0005
Coars: 0.005
Fine: 0.0005
DL Differential Micrometer Heads MDC-13 0.5 0.01
* Please add an option code as the part number suffix to specify various optional specifications.
* Installation may not be possible depending on the directon of DL.
E008
E046
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

I
I
I
I
I
I
Catalog
Code
Catalog
Code
W7011
W7032
Outline Drawing
TAM-401C/401CUU
40 (12)
A
E
40
A A
E
Pan head screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
MAX66
Clamp
B
Application
Systems
Optics &
Optical
Coatings
Holders
A
19
F
B
8-D depth 7
C
11.5
4-G mounting hole
H counterbore
Part Number
A
(mm)
B
(mm)
C
D
E
(mm)
F
G
(mm)
H
(mm)
I
(mm)
TAM-401C 16 32 M6 P1 depth 8 M3 20 4-M2 depth 5 3.5 6 2
TAM-401CUU 15.875 31.75 1/4-20UNC depth 5 6-32UNC 4 6.5 1.5
Bases
Manual
Stages
TAM-401S/401SUU
(12)
40
A A
E
Pan head screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
TAM-401SR/401SRUU
Pan head screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
Actuators
Motoeized
Stages
40
21
A
C
F
8-D depth 7
Clamp
(12)
C
40
A A
E
F
8-D depth 7
Clamp
A
E
B
21 40
A A
E
B
Light
Sources
MAX73
10.5
10.5
MAX73
Index
19
19
Part Number
TAM-402C/402CUU
(12)
A
(mm)
B
B
(mm)
(12) 40
A A
E
4-G mounting hole
H counterbore
C
Pan head screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
MAX66
8-D depth 7
C
D
E
(mm)
F
G
(mm)
X axis clamp
H
(mm)
I
(mm)
TAM-401S 16 32 M6 P1 depth 8 M3 20 4-M2 depth 5 3.5 6 2
TAM-401SUU 15.875 31.75 1/4-20UNC depth 5 6-32UNC 4 6.5 1.5
4-G mounting hole
H counterbore
Part Number
A
(mm)
B
B
(mm)
C
D
E
(mm)
F
G
(mm)
H
(mm)
I
(mm)
TAM-401SR 16 32 M6 P1 depth 8 M3 20 4-M2 depth 5 3.5 6 2
TAM-401SRUU 15.875 31.75 1/4-20UNC depth 5 6-32UNC 4 6.5 1.5
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
40
A A
E
B
θ axis Stages
Goniometer
MAX66
F
Inclination
Vacuum
Y axis clamp
24.5
32
TAM-402S/402SUU
40
21
32
F
B
(12) 40
8-D depth 7
A A
E
(12)
A
A
X axis clamp
E
Part Number
A
(mm)
B
B
(mm)
MAX73
11.5
4-G mounting hole
H counterbore
Pan head screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
21
10.5
Y axis clamp
C
MAX73
23.5
4-G mounting hole
H counterbore
C
D
E
(mm)
Part Number
B
A
(mm)
B
(mm)
C
TAM-402SR/402SRUU
8-D depth 7
(12)
40
21
D
A
A
23.5
E
X axis clamp
Part Number
E
(mm)
(12)
F
A
(mm)
F
40
A A
E
MAX73
B
B
(mm)
G
(mm)
21
C
Pan head screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
MAX73
32
Y axis clamp
4-G mounting hole
H counterbore
C
H
(mm)
I
(mm)
TAM-402C 16 32 M6 P1 depth 8 M3 20 4-M2 depth 5 3.5 6 2
TAM-402CUU 15.875 31.75 1/4-20UNC depth 5 6-32UNC 4 6.5 1.5
F
G
(mm)
H
(mm)
I
(mm)
TAM-402S 16 32 M6 P1 depth 8 M3 20 4-M2 depth 5 3.5 6 2
TAM-402SUU 15.875 31.75 1/4-20UNC depth 5 6-32UNC 4 6.5 1.5
D
10.5
E
(mm)
B
F
G
(mm)
H
(mm)
I
(mm)
TAM-402SR 16 32 M6 P1 depth 8 M3 20 4-M2 depth 5 3.5 6 2
TAM-402SRUU 15.875 31.75 1/4-20UNC depth 5 6-32UNC 4 6.5 1.5
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E047

Manual Positioners
X axis Aluminum Crossed Roller Slide Stages
XY axis Aluminum Crossed Roller Slide Stages
TAM-601
TAM-602
Stage size □60mm
Application
Systems
Optics &
Optical
Coatings
Holders
Light-weight and high precision linear stages have black anodized aluminum bodies fitted with
crossed roller bearings.
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
Specifications
Part Number METRIC TAM-601C TAM-601S TAM-602C TAM-602S
(Opposite Model) METRIC − TAM-601SR − TAM-602SR
Table Size [mm] 60×60 60×60 60×60 60×60
Axes of Travel X axis XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±6.5 ±6.5 ±6.5 ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Crossed roller
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 196 (20.0kgf) 196 (20.0kgf) 196 (20.0kgf) 196 (20.0kgf)
Straightness [μm] 2 2 2 2
Travel Accuracy Pitch [ ″] 25 25 25 25
Yaw [ ″] 15 15 15 15
Pitch [N・m] 5.8 5.8 5.8 5.8
Max. Moment
Capacity
Roll [N・m] 5.8 5.8 5.8 5.8
Yaw [N・m] 5.8 5.8 5.8 5.8
Pitch [″/N・cm] 0.3 0.3 0.6 0.6
Moment Stiffness
Roll [″/N・cm] 0.25 0.25 0.6 0.6
Parallelism [μm] 30 30 50 50
Running Parallelism [μm] 10 10 20 20
Orthogonality [μm] − − 10 10
Options FP/DM/WP/DL FP/DM/WP/DL FP/DM/WP/DL FP/DM/WP
Weight [kg] 0.3 0.3 0.6 0.6
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Option
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 −
DM Differential Micrometer Heads MHF2-13F
WP Sub-micron Worm Drive Micrometer Heads WGP-13
Coars: 0.5
Fine: 0.025
Coars: 0.25
Fine: 0.025
Coars: 0.01
Fine: 0.0005
Coars: 0.005
Fine: 0.0005
DL Differential Micrometer Heads MDC-13 0.5 0.01
* Please add an option code as the part number suffix to specify various optional specifications.
* Installation may not be possible depending on the directon of DL.
E008
E048
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
Catalog
Code
W7012
W7033
Outline Drawing
TAM-601C
(14)
60
25
Hexagonal socket head cap screw M4×8…4 screws
60
25 25
MAX66
8-M4 depth 7
M16 P1 depth 6
Clamp
50
Application
Systems
Optics &
Optical
Coatings
Holders
25
Bases
23
2.5
50
15.5
4-4.5 mounting hole
8 counterbore
Manual
Stages
TAM-601S
Hexagonal socket head cap screw M4×8…4 screws
TAM-601SR
Hexagonal socket head cap screw M4×8…4 screws
Actuators
(14)
60
25 25
8-M4 depth 7
M16 P1 depth 6
Clamp
(14)
60
25 25
8-M4 depth 7
M16 P1 depth 6
Clamp
Motoeized
Stages
60
25
50
60
25
50
Light
Sources
21
25
21
Index
MAX88
MAX88
23
12.3
25
2.5
50
4-4.5 mounting hole
8 counterbore
12.3
4-4.5 mounting hole
8 counterbore
50
2.5
23
Guide
X axis Stages
TAM-602C
(14)
Hexagonal socket head cap screw M4×8…4 screws
60 MAX66
25 25
X axis clamp
XY axis Stages
Z axis Stages
XZ axis Stages
(14)
XYZ axis Stages
Y axis clamp
38 MAX66 60
25 25
8-M4 depth 7
M16 P1 depth 6
15.5
30.5
50
θ axis Stages
Goniometer
Inclination
Vacuum
2.5
50
4-4.5 mounting hole
8 counterbore
Ball Guide
Crossed Roller
TAM-602S
8-M4 depth 7
(14)
Hexagonal socket head cap screw M4×8…4 screws
(14) 60 21
25 25
Y axis clamp
12.3
TAM-602SR
Hexagonal socket head cap screw M4×8…4 screws
(14) 60 21
8-M4 depth 7 Y axis clamp
25 25
(14)
Dovetail
Lapping
V Groove Screw
Ohters
38 21 60
25 25
M16 P1 depth 6
2.5
X axis clamp
MAX88
50
MAX88
27.3
4-4.5 mounting hole
8 counterbore
50
27.3
21 60
2.5
25 25
X axis clamp
MAX88
50
MAX88
M16 P1 depth 6
38
4-4.5 mounting hole
8 counterbore
50
12.3
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E049

Manual Positioners
X axis Aluminum Crossed Roller Slide Stages
TAM-651 Stage size □65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Light-weight and high precision linear stages have black anodized aluminum bodies fitted with
crossed roller bearings.
◦It is used M6 size or 1/4 inch size screws for fixing this stage and on the top of the table with tapped holes.
◦It is available to mount these stages directly on vibration isolation systems or laboratory benches by using holes for M6
screws or 1/4 inch screws.
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Specifications
Part Number
METRIC TAM-651C-M6 TAM-651S-M6 TAM-651C25-M6 TAM-651S25-M6
INCH TAM-651CUU TAM-651SUU TAM-651C25UU TAM-651S25UU
(Opposite Model)
METRIC − TAM-651SR-M6 − −
INCH − TAM-651SRUU − −
Table Size [mm] 65×65 65×65 65×65 65×65
Axes of Travel
X axis
Micrometer Position Center Side Center Side
Travel [mm] ±6.5 ±6.5 ±12.5 ±12.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Crossed roller
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 196 (20kgf) 196 (20kgf) 196 (20kgf) 196 (20kgf)
Straightness [μm] 2 2 2 2
Vacuum
Travel Accuracy
Pitch [ ″] 25 25 35 35
Yaw [ ″] 15 15 25 25
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
Pitch [N・m] 4.9 4.9 4.9 4.9
Max. Moment
Capacity
Roll [N・m] 4.9 4.9 4.9 4.9
Yaw [N・m] 4.9 4.9 4.9 4.9
Pitch [″/N・cm] 0.3 0.3 0.3 0.3
Moment Stiffness
Roll [″/N・cm] 0.25 0.25 0.25 0.25
Parallelism [μm] 30 30 30 30
Running Parallelism [μm] 10 10 10 10
Options FP *1 /DM/WP/DL FP *1 /DM/WP/DL FP *2 FP *2
Weight [kg] 0.3 0.3 0.3 0.3
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Option
Option Code
FP
Fine-pitch Screw Adjusters
Compatible product
Products Name
Part Number
DM Differential Micrometer Heads MHF2-13F
WP Sub-micron Worm Drive Micrometer Heads WGP-13
Lead of Actuator
[mm/rotation]
Micrometer Readable Resolution
[mm]
FPSA-62540 *1
FPSA-62550 *2 0.25 −
Coars: 0.5
Fine: 0.025
Coars: 0.25
Fine: 0.025
Coars: 0.01
Fine: 0.0005
Coars: 0.005
Fine: 0.0005
DL Differential Micrometer Heads MDC-13 0.5 0.01
* Please add an option code as the part number suffix to specify various optional specifications.
* Installation may not be possible depending on the directon of DL.
E008
E050
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W7123
Outline Drawing
TAM-651C-M6/651CUU
(14)
A
65
A A
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
MAX68
Clamp
9-C depth 7
Application
Systems
Optics &
Optical
Coatings
Holders
A
Bases
25
TAM-651S-M6/651SUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
65
Clamp
A A
9-C depth 7
21 65 (14)
3
A
A
17.5
B
TAM-651SR-M6/651SRUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
65
A A
Clamp
9-C depth 7
21 65 (14)
A
A
B
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
TAM-651C25-M6/651C25UU
(14)
65
A A
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
MAX96
Clamp
9-C depth 7
θ axis Stages
Goniometer
Inclination
Vacuum
A
65
B
65
B
B
4-D mounting hole
11 counterbore
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TAM-651C-M6 25 50 M6 P1 6.5
TAM-651CUU 25.4 50.8 1/4-20UNC 7
25
3
Part Number
MAX94
B
A
(mm)
14.3
4-D mounting hole
11 counterbore
B
(mm)
C
D
(mm)
TAM-651S-M6 25 50 M6 P1 6.5
TAM-651SUU 25.4 50.8 1/4-20UNC 7
14.3
4-D mounting hole
11 counterbore
Part Number
MAX94
B
A
(mm)
3
25
B
(mm)
C
D
(mm)
TAM-651SR-M6 25 50 M6 P1 6.5
TAM-651SRUU 25.4 50.8 1/4-20UNC 7
A
25
3
B
4-D mounting hole
11 counterbore
17.5
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TAM-651C25-M6 25 50 M6 P1 6.5
TAM-651C25UU 25.4 50.8 1/4-20UNC 7
Ball Guide
Crossed Roller
Dovetail
TAM-651S25-M6/651S25UU
(14)
65
A A
9-C depth 7
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
Clamp
Lapping
V Groove Screw
Ohters
65
A A
B
□15mm
□25mm
□40mm
□60mm
21
□65mm
MAX116
□80mm
□100mm
25
3
B
14.3
4-D mounting hole
11 counterbore
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TAM-651S25-M6 25 50 M6 P1 6.5
TAM-651S25UU 25.4 50.8 1/4-20UNC 7
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E051

Manual Positioners
XY axis Aluminum Crossed Roller Slide Stages
TAM-652 Stage size □65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Light-weight and high precision linear stages have black anodized aluminum bodies fitted with
crossed roller bearings.
◦It is used M6 size or 1/4 inch size screws for fixing this stage and on the top of the table with tapped holes.
◦It is available to mount these stages directly on vibration isolation systems or laboratory benches by using holes for M6
screws or 1/4 inch screws.
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
Specifications
Part Number
METRIC TAM-652C-M6 TAM-652S-M6 TAM-652C25-M6 TAM-652S25-M6
INCH TAM-652CUU TAM-652SUU TAM-651C25UU TAM-651S25UU
(Opposite Model)
METRIC − TAM-652SR-M6 − −
INCH − TAM-652SRUU − −
Table Size [mm] 65×65 65×65 65×65 65×65
Axes of Travel
XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±6.5 ±6.5 ±12.5 ±12.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
XYZ axis Stages
θ axis Stages
Bearing type
Primary Material
Finish
Crossed roller
Aluminum
Black anodized
Goniometer
Inclination
Load Capacity [N] 196 (20kgf) 196 (20kgf) 196 (20kgf) 196 (20kgf)
Straightness [μm] 2 2 2 2
Travel Accuracy Pitch [ ″] 25 25 35 35
Vacuum
Max. Moment
Capacity
Yaw [ ″] 15 15 25 25
Pitch [N・m] 4.9 4.9 4.9 4.9
Roll [N・m] 4.9 4.9 4.9 4.9
Yaw [N・m] 4.9 4.9 4.9 4.9
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
Pitch [″/N・cm] 0.6 0.6 0.6 0.6
Moment Stiffness
Roll [″/N・cm] 0.6 0.6 0.6 0.6
Parallelism [μm] 50 50 50 50
Running Parallelism [μm] 20 20 20 20
Orthogonality [μm] 10 10 10 10
Options FP *1 /DM/WP/DL FP *1 /DM/WP FP *2 FP *2
Weight [kg] 0.75 0.75 0.75 0.75
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Option
Option Code
FP
Fine-pitch Screw Adjusters
Compatible product
Products Name
Part Number
DM Differential Micrometer Heads MHF2-13F
WP Sub-micron Worm Drive Micrometer Heads WGP-13
Lead of Actuator
[mm/rotation]
Micrometer Readable Resolution
[mm]
FPSA-62540 *1
FPSA-62550 *2 0.25 −
Coars: 0.5
Fine: 0.025
Coars: 0.25
Fine: 0.025
Coars: 0.01
Fine: 0.0005
Coars: 0.005
Fine: 0.0005
DL Differential Micrometer Heads MDC-13 0.5 0.01
* Please add an option code as the part number suffix to specify various optional specifications.
* Installation may not be possible depending on the directon of DL.
E008
E052
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W7124
Outline Drawing
TAM-652C-M6/652CUU
(14)
(14) 65
A A
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
MAX68
X axis clamp
9-C depth 7
Application
Systems
Optics &
Optical
Coatings
65
A
Holders
A
B
MAX68
Y axis clamp
40
B
4-D mounting hole
11 counterbore
TAM-652S-M6/652SUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
(14) 65 21
14.3
9-C depth 7
Y axis clamp
A A
21 65 (14)
3
A
A
MAX94
17.5
32.5
B
Part Number
A
(mm)
TAM-652SR-M6/652SRUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
(14) 65 21
9-C depth 7
Y axis clamp
A A
21 65 (14)
A
A
B
(mm)
C
MAX94
D
(mm)
TAM-652C-M6 25 50 M6 P1 6.5
TAM-652CUU 25.4 50.8 1/4-20UNC 7
B
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
X axis clamp
MAX94
MAX94
14.3
Guide
40
29.3
29.3
40
X axis Stages
3
Part Number
B
4-D mounting hole
11 counterbore
A
(mm)
B
(mm)
C
D
(mm)
TAM-652S-M6 25 50 M6 P1 6.5
TAM-652SUU 25.4 50.8 1/4-20UNC 7
3
X axis clamp
Part Number
B
A
(mm)
4-D mounting hole
11 counterbore
B
(mm)
C
D
(mm)
TAM-652SR-M6 25 50 M6 P1 6.5
TAM-652SRUU 25.4 50.8 1/4-20UNC 7
XY axis Stages
Z axis Stages
XZ axis Stages
TAM-652C25-M6/652C25UU
(14)
65
A A
(14)
65
A A
MAX96
9-C depth 7
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
X axis clamp
B
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
MAX96
Y axis clamp
40
3
TAM-652S25-M6/652S25UU
(14) 65
A A
9-C depth 7
(14)
65
21
40
A
A
X axis clamp
3
B
B
MAX116
17.5
32.5
TAM-652C25-M6 25 50 M6 P1 6.5
4-D mounting hole
11 counterbore
TAM-652C25UU 25.4 50.8 1/4-20UNC 7
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
21
14.3
MAX116
29.3
4-D mounting hole
11 counterbore
Y axis clamp
B
Part Number
Part Number
A
(mm)
A
(mm)
B
(mm)
B
(mm)
C
D
(mm)
TAM-652S25-M6 25 50 M6 P1 6.5
TAM-652S25UU 25.4 50.8 1/4-20UNC 7
C
D
(mm)
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E053

Manual Positioners
X axis Aluminum Crossed Roller Slide Stages
XY axis Aluminum Crossed Roller Slide Stages
TAM-801
TAM-802
Stage size □80mm
Application
Systems
Light-weight and high precision linear stages have black anodized aluminum bodies fitted with
crossed roller bearings.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC TAM-801C TAM-801S TAM-802C TAM-802S
(Opposite Model) METRIC − TAM-801SR − TAM-802SR
Table Size [mm] 80×80 80×80 80×80 80×80
Axes of Travel X axis XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±7.5 ±7.5 ±7.5 ±7.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Crossed roller
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 392 (40.0kgf) 392 (40.0kgf) 392 (40.0kgf) 392 (40.0kgf)
Straightness [μm] 2 2 2 2
Travel Accuracy Pitch [ ″] 25 25 25 25
Yaw [ ″] 15 15 15 15
Pitch [N・m] 12.3 12.3 12.3 12.3
Max. Moment
Capacity
Roll [N・m] 15.7 15.7 12.3 12.3
Yaw [N・m] 14.7 14.7 14.7 14.7
Pitch [″/N・cm] 0.12 0.12 0.23 0.23
Moment Stiffness
Roll [″/N・cm] 0.1 0.1 0.23 0.23
Parallelism [μm] 30 30 50 50
Running Parallelism [μm] 10 10 20 20
Orthogonality [μm] − − 10 10
Options FP/DM/WP FP/DM/WP FP/DM/WP FP/DM/WP
Weight [kg] 0.6 0.6 0.9 0.9
Option
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62550 0.25 −
Coars: 0.5
DM Differential Micrometer Heads MHF2-13F
Fine: 0.025
Coars: 0.25
WP Sub-micron Worm Drive Micrometer Heads WGP-13
Fine: 0.025
* Please add an option code as the part number suffix to specify various optional specifications.
* The travel of DM and WP is ±6.5 mm.
Coars: 0.01
Fine: 0.0005
Coars: 0.005
Fine: 0.0005
E008
E054
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
Catalog
Code
W7014
W7035
Outline Drawing
TAM-801C
M16 P1 depth 6
8-M4 depth 7
Hexagonal socket head cap screw M4×8…4 screws
80 MAX84
70
25 25
32
4-M3 depth 6
4-M4 depth 7
Clamp
Application
Systems
Optics &
Optical
Coatings
(14)
4-M4 depth 7
(PCD62)
Holders
80
70
TAM-801S
24 25 25
32
3
70
16
4-4.5 mounting hole
8 counterbore
Hexagonal socket head cap screw M4×8…4 screws
80
70
M16 P1 depth 6
8-M4 depth 7
25 25
32
4-M3 depth 6
4-M4 depth 7
(14)
80
70
25
32
25
4-M4 depth 7
(PCD62)
70
Clamp
70
TAM-801SR
Hexagonal socket head cap screw M4×8…4 screws
80
70
M16 P1 depth 6 25 25 4-M3 depth 6
8-M4 depth 7
32 4-M4 depth 7
(14)
80
70
25
32
25
4-M4 depth 7
(PCD62)
Clamp
70
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
22
22
MAX113
MAX113
24
14.5
14.5
24
Guide
TAM-802C
3
M16 P1 depth 6
8-M4 depth 7
70
4-4.5 mounting hole
8 counterbore
Hexagonal socket head cap screw M4×8…4 screws
(14)
80 MAX84
70
25 25
32
X axis clamp
4-4.5 mounting hole
8 counterbore
70
3
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
80 (14)
70
25
32
25
70
XYZ axis Stages
θ axis Stages
Goniometer
MAX84
4-M4 depth 7
(PCD62)
4-M4 depth 7
8-M3 depth 6
Inclination
Vacuum
32
40
3
Y axis clamp
70
16
4-4.5 mounting hole
8 counterbore
Ball Guide
Crossed Roller
TAM-802S
M16 P1 depth 6
4-M4 depth 7
4-M4 depth 7
(PCD62)
Hexagonal socket head cap screw M4×8…4 screws
(14)
80 22
70
25 25
32
Y axis clamp
14.5
TAM-802SR
M16 P1 depth 6
4-M4 depth 7
4-M4 depth 7
(PCD62)
(14)
Hexagonal socket head cap screw M4×8…4 screws
80
70
25 25
32
22
Y axis clamp
Dovetail
Lapping
V Groove Screw
Ohters
(14)
22 80
70
25
32
25
8-M4 depth 7
4-M3 depth 6
40
3
X axis clamp
MAX113
70
MAX113
30.5
4-4.5 mounting hole
8 counterbore
70
22 80 (14)
70
25
25
30.5
32
3
X axis clamp
MAX113
70
MAX113
8-M4 depth 7
4-M3 depth 6
14.5
40
4-4.5 mounting hole
8 counterbore
70
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E055

Manual Positioners
X axis Aluminum Crossed Roller Slide Stages
XY axis Aluminum Crossed Roller Slide Stages
TAM-1001
TAM-1002
Stage size □100mm
Application
Systems
Optics &
Optical
Coatings
Holders
Light-weight and high precision linear stages have black anodized aluminum bodies fitted with
crossed roller bearings.
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC TAM-1001C TAM-1001S TAM-1002C TAM-1002S
(Opposite Model) METRIC − TAM-1001SR − TAM-1002SR
Table Size [mm] 100×100 100×100 100×100 100×100
Axes of Travel X axis XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±12.5 ±12.5 ±12.5 ±12.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Crossed roller
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 490 (50.0kgf) 490 (50.0kgf) 490 (50.0kgf) 490 (50.0kgf)
Straightness [μm] 2 2 2 2
Travel Accuracy Pitch [ ″] 25 25 25 25
Yaw [ ″] 15 15 15 15
Pitch [N・m] 27.5 27.5 27.5 27.5
Max. Moment
Capacity
Roll [N・m] 40.7 40.7 27.5 27.5
Yaw [N・m] 30.9 30.9 30.9 30.9
Pitch [″/N・cm] 0.09 0.09 0.17 0.17
Moment Stiffness
Roll [″/N・cm] 0.07 0.07 0.17 0.17
Parallelism [μm] 50 50 50 50
Running Parallelism [μm] 15 15 25 25
Orthogonality [μm] − − 10 10
Options FP/DG FP FP/DG FP
Weight [kg] 0.9 0.9 1.5 1.5
Option
Option Code
Compatible product
Lead of Actuator Micrometer Readable Resolution
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62550 0.25 −
DG Micrometer Heads (Digital display) MHN2-25DM 0.5 0.001
* Please add an option code as the part number suffix to specify various optional specifications.
* DG is a digital display type. F005
E008
E056
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Catalog
Code
Catalog
Code
W7015
W7036
Outline Drawing
TAM-1001S
(14)
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
100 MAX109
90
Clamp
25 25
4-M4 depth 8
8-M4 depth 8
Application
Systems
Optics &
Optical
Coatings
Holders
25
100
90
90
25
Bases
25
2.5
TAM-1001S
(14)
22.5 100
90
25
25
90
M16 P1 depth 6
4-4.5 mounting hole
8 counterbore
15
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
100
90
Clamp
25 25
4-M4 depth 8
M16 P1 depth 6
8-M4 depth 8
90
TAM-1001SR
22.5 100 90
(14)
25 25
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
100
90
Clamp
25 25
4-M4 depth 8
M16 P1 depth 6
8-M4 depth 8
90
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
25
MAX143
15.2
15.2
MAX143
25
Guide
90
4-4.5 mounting hole
8 counterbore
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
(14) 100
MAX109
90
X axis clamp
4-M4 depth 8
25 25
2.5
TAM-1002S
(14)
4-4.5 mounting hole
8 counterbore
90
2.5
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
MAX109 100
90
25 25
8-M4 depth 8
M16 P1 depth 6
90
θ axis Stages
Goniometer
Inclination
Vacuum
32
42
2.5
Y axis clamp
TAM-1002S
4-M4 depth 8
(14)
(14)
90
4-4.5 mounting hole
8 counterbore
15
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
100 22.5
15.2
90
Y axis clamp
25 25
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
(14) 100 22.5
90
Y axis clamp
4-M4 depth 8
25 25
8-M4 depth 8
TAM-1002SR
(14)
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
22.5 100
90
25 25
8-M4 depth 8
M16 P1 depth 6
42
2.5
X axis clamp
MAX143
90
MAX143
32.2
4-4.5 mounting hole
8 counterbore
90
22.5 100
90
25 25
M16 P1 depth 6
32.2
2.5
X axis clamp
MAX143
90
MAX143
42
4-4.5 mounting hole
8 counterbore
15.2
90
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E057

Manual Positioners
X axis Aluminum Crossed Roller Slide Stages
TAM-1201 Stage size □120mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Light-weight and high precision linear stages have black anodized aluminum bodies fitted with
crossed roller bearings.
◦There is a lineup of three types of stages which has M4, M6, and 1/4 inch screw holes on each top of the stages.
◦The stage type of part number suffix M6 are using M6 size screws both for fixing its body and for mounting on the top of
the table with tapped holes.
◦The M6 type can mount directly on M6 specification vibration isolation systems and laboratory benches.
◦The stage type of part number suffix “UU” are using 1/4 inch size screws both for fixing its body and for mounting on the
top of the table with tapped holes.
◦These stages can be mounted directly on the vibration isolation tables or laboratory benches by using holes for 1/4 inch
screw size.
Attention
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TAM-1201C TAM-1201S TAM-1201C-M6 TAM-1201S-M6
INCH − − TAM-1201CUU TAM-1201SUU
(Opposite Model)
METRIC − TAM-1201SR − TAM-1201SR-M6
INCH − − − TAM-1201SRUU
Table Size [mm] 120×120 120×120 120×120 120×120
Axes of Travel
X axis
Micrometer Position Center Side Center Side
Travel [mm] ±20 ±20 ±20 ±20
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Crossed roller
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 588 (60.0kgf) 588 (60.0kgf) 588 (60.0kgf) 588 (60.0kgf)
Straightness [μm] 2 2 2 2
Travel Accuracy Pitch [ ″] 40 40 40 40
Yaw [ ″] 25 25 25 25
Pitch [N・m] 40.7 40.7 40.7 40.7
Max. Moment
Capacity
Roll [N・m] 60.3 60.3 60.3 60.3
Yaw [N・m] 52.0 52.0 52.0 52.0
Pitch [″/N・cm] 0.07 0.07 0.07 0.07
Moment Stiffness
Roll [″/N・cm] 0.05 0.05 0.05 0.05
Parallelism [μm] 50 50 50 50
Running Parallelism [μm] 15 15 15 15
Weight [kg] 1.3 1.3 1.3 1.3
E058
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Catalog
Code
W7125
Outline Drawing
TAM-1201C
(14)
25
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
120
MAX147
Clamp
25 25 25 25
24-M4 depth 8
M16 P1 depth 6
Application
Systems
Optics &
Optical
Coatings
Holders
120
25 25 25
100
Bases
25
2.5
100
4-4.5 mounting hole
8 counterbore
15
Manual
Stages
TAM-1201S
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
TAM-1201SR
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
Actuators
120 (14)
25 25
120
25 25 25
25
24-M4 depth 8
M16 P1 depth 6
Clamp
100
120 (14)
25 25
25
120
25 25
25
24-M4depth 8
M16 P1 depth 6
Clamp
100
Motoeized
Stages
Light
Sources
25 25
25 25
Index
15.2
Guide
25
22.5
MAX188
25
22.5
MAX188
15.2
2.5
100
4-4.5 mounting hole
8 counterbore
4-4.5 mounting hole
8 counterbore
100
2.5
X axis Stages
XY axis Stages
TAM-1201C-M6/1201CUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
Z axis Stages
A
120
A A
A
MAX147
Clamp
XZ axis Stages
(14)
25-C depth 7
XYZ axis Stages
A A
θ axis Stages
120
A
B
Goniometer
A
Inclination
25
1.5
B
4-D mounting hole
11 counterbore
15
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TAM-1201C-M6 25 100 M6 P1 6.5
TAM-1201CUU 25.4 101.6 1/4-20UNC 7
Vacuum
TAM-1201S-M6/1201SUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
TAM-1201SR-M6/1201SRUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
Ball Guide
Crossed Roller
(14)
A
120
A A
A
25-C depth 7
Clamp
(14)
A
120
A A
A
25-C depth 7
Clamp
Dovetail
Lapping
120
A A
A
B
120
A A
A
B
V Groove Screw
Ohters
A
A
□15mm
22.5
25
1.5
Part Number
B
MAX188
A
(mm)
15.2
4-D mounting hole
11 counterbore
B
(mm)
C
D
(mm)
TAM-1201S-M6 25 100 M6 P1 6.5
TAM-1201SUU 25.4 101.6 1/4-20UNC 7
22.5
15.2
4-D mounting hole
11 counterbore
Part Number
MAX188
A
(mm)
B
B
(mm)
1.5
25
C
D
(mm)
TAM-1201S-M6 25 100 M6 P1 6.5
TAM-1201SUU 25.4 101.6 1/4-20UNC 7
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E059

Manual Positioners
X axis Aluminum Crossed Roller Slide Stages
TAM-1202 Stage size □120mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Light-weight and high precision linear stages have black anodized aluminum bodies fitted with
crossed roller bearings.
◦There is a lineup of three types of stages which has M4, M6, and 1/4 inch screw holes on each top of the stages.
◦The stage type of part number suffix M6 are using M6 size screws both for fixing its body and for mounting on the top of
the table with tapped holes.
◦The M6 type can mount directly on M6 specification vibration isolation systems and laboratory benches.
◦The stage type of part number suffix “UU” are using 1/4 inch size screws both for fixing its body and for mounting on the
top of the table with tapped holes.
◦These stages can be mounted directly on the vibration isolation tables or laboratory benches by using holes for 1/4 inch
screw size.
Attention
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
(Opposite Model)
METRIC TAM-1202C TAM-1202S TAM-1202C-M6 TAM-1202S-M6
INCH − − TAM-1202CUU TAM-1202SUU
METRIC − TAM-1202SR − TAM-1202SR-M6
INCH − − − TAM-1202SRUU
Table Size [mm] 120×120 120×120 120×120 120×120
Axes of Travel
Micrometer Position Center Side Center Side
Travel [mm] ±20 ±20 ±20 ±20
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Finish
XY axis
Crossed roller
Aluminum
Black anodized
Load Capacity [N] 588 (60.0kgf) 588 (60.0kgf) 588 (60.0kgf) 588 (60.0kgf)
Travel Accuracy
Straightness [μm] 2 2 2 2
Pitch [ ″] 40 40 40 40
Yaw [ ″] 25 25 25 25
Pitch [N・m] 40.7 40.7 40.7 40.7
Max. Moment
Capacity
Roll [N・m] 40.7 40.7 40.7 40.7
Yaw [N・m] 52 52 52 52
Pitch [″/N・cm] 0.13 0.13 0.13 0.13
Moment Stiffness
Roll [″/N・cm] 0.13 0.13 0.13 0.13
Parallelism [μm] 50 50 50 50
Running Parallelism [μm] 30 30 30 30
Orthogonality [μm] 10 10 10 10
Weight [kg] 2.5 2.5 2.5 2.5
E060
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Catalog
Code
W7126
Outline Drawing
TAM-1202C
Hexagonal socket head cap screw
M4×8…4 screws, Spring washers
(14)
42 MAX147 120
2.5
25 25 25 25
(14) 120 MAX147
25 25 25 25
24-M4 depth 8
M16 P1 depth 6
15
32
X axis clamp
100
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Y axis clamp
100
4-4.5 mounting hole
8 counterbore
Actuators
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
(14) 120
22.5 15.2
25 25 25 25
24-M4 depth 8 Y axis clamp
TAM-1202S
(14)
120
25 25 25 25
MAX188
100
TAM-1202SR
(14) 120
24-M4 depth 8 25 25 25 25
(14)
25 25
120
25
25
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
22.5
MAX188
Y axis clamp
100
Motoeized
Stages
Light
Sources
Index
22.5
M16 P1 depth 6
MAX188
22.5
MAX188
M16 P1 depth 6
15.2
Guide
42
2.5
X axis clamp
100
32.2
4-4.5 mounting hole
8 counterbore
32.2
2.5
X axis clamp
100
42
4-4.5 mounting hole
8 counterbore
X axis Stages
XY axis Stages
TAM-1202C-M6/1202CUU
Hexagonal socket head cap screw
M6×8…4 screws (M6)
Hexagonal socket head cap screw
1/4-20UNC×5/16…4 screws (UU)
120 (14)
A A
(14)
120 MAX147
A A A A
25-C depth 7
X axis clamp
B
Z axis Stages
XZ axis Stages
XYZ axis Stages
A A
θ axis Stages
Goniometer
MAX147
Inclination
Y axis clamp
TAM-1202S-M6/1202SUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
(14) 120 22.5
15.2
25-C depth 7
A A A A
Y axis clamp
(14)
120
22.5
42
A A A A
X axis clamp
1.5
Part Number
MAX188
B
A
(mm)
42
MAX188
1.5
32.2
4-D mounting hole
11 counterbore
B
(mm)
B
C
B
15
4-D mounting hole
11 counterbore
D
(mm)
TAM-1202S-M6 25 100 M6 P1 6.5
TAM-1202SUU 25.4 101.6 1/4-20UNC 7
32
Part Number
TAM-1202SR-M6/1202SRUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
(14) 120 22.5
25-C depth 7
A A A A Y axis clamp
(14)
120
22.5
32.2
A A A A
1.5
X axis clamp
Part Number
MAX188
A
(mm)
B
A
(mm)
B
(mm)
MAX188
42
15.2
4-D mounting hole
11 counterbore
B
(mm)
C
B
D
(mm)
TAM-1202SR-M6 25 100 M6 P1 6.5
TAM-1202SRUU 25.4 101.6 1/4-20UNC 7
C
D
(mm)
TAM-1202C-M6 25 100 M6 P1 6.5
TAM-1202CUU 25.4 101.6 1/4-20UNC 7
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E061

Manual Positioners
X axis Long Travel Aluminum Crossed Roller Slide Stages
XY axis Long Travel Aluminum Crossed Roller Slide Stages
TAM-10161
TAM-10162
Application
Systems
Optics &
Optical
Coatings
Light-weight and high precision linear stages have black anodized aluminum bodies fitted with
crossed roller bearings.
◦The rectangular stage is effective for ensuring long travel.
◦The coarse/fine movement type uses 5mm lead screw, enabling long travel in a short time. Minute adjustment is also
possible with the micrometer head for fine adjustment.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Attention
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC TAM-10161C TAM-10161SDM TAM-10161S TAM-10162C TAM-10162S
(Opposite Model) METRIC − − TAM-10161SR − TAM-10162SR
Table Size [mm] 100×160 100×160 100×160 100×160 100×160
Axes of Travel X axis XY axis
Micrometer Position Center Side Side Center Side
Travel [mm] ±25
Coars: ±35
Fine: ±3
±25 ±25 ±25
Lead of Actuator [mm/rotation] 0.5
Coars: 5
Fine: 0.5
0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01 0.01
Bearing type
Crossed roller
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 588 (60.0kgf) 588 (60.0kgf) 588 (60.0kgf) 588 (60.0kgf) 588 (60.0kgf)
Straightness [μm] 2 2 2 2 2
Travel Accuracy Pitch [ ″] 40 40 40 40 40
Yaw [ ″] 25 25 25 25 25
Pitch [N・m] 62.8 62.8 62.8 60.8 60.8
Max. Moment
Capacity
Roll [N・m] 60.8 60.8 60.8 60.8 60.8
Yaw [N・m] 58.9 58.8 58.9 58.9 58.9
Pitch [″/N・cm] 0.046 0.046 0.046 0.087 0.087
Moment Stiffness
Roll [″/N・cm] 0.04 0.04 0.04 0.087 0.087
Parallelism [μm] 100 100 100 200 200
Running Parallelism [μm] 15 20 15 30 30
Weight [kg] 1.3 1.4 1.4 2.5 2.7
E062
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Catalog
Code
Catalog
Code
W7016
W7037
Outline Drawing
TAM-10161C
(14)
25
25
100
90
25
2.5
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
160
90
25 25 25 25
18-M4 depth 8 M16 P1 depth 6
90
150
MAX204
4-8
(Fixing screw
insertion hole)
8-4.5 mounting hole
8 counterbore
14
Clamp
90
TAM-10161SDM
M16 P1 depth 6
(32.5) 100 (14)
25
25
90
25
2.5
Hexagonal socket head cap screw M4×6…4 screws
160
90
25 25 25 25
177.5
150
Coarse
screw
18-M4 depth 6
4-8
(Fixing screw
insertion hole)
15
8-4.5 mounting hole
8 counterbore
Clamp
90
Coarse/Fine
switching clamp
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
TAM-10161S
100 (14)
90
25
25
25 25
2.5
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
160
90
18-M4 depth 8
25 25 25 25 4-8
Clamp
(Fixing screw insertion hole)
M16 P1 depth 6
MAX239
90
150
13.5
8-4.5 mounting hole
8 counterbore
90
TAM-10161SR
(14)
13.5 25 100
25
90
25
8-4.5 mounting hole
8 counterbore
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
160
90
25 25 25 25
MAX239
90
150
18-M4 depth 8
4-8
(Fixing screw
insertion hole)
M16 P1 depth 6
2.5
25
Clamp
90
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
TAM-10162C
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
160
MAX204
100
90
25 25
4-8
X axis clamp
(Fixing screw
insertion hole)
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
160
90
25 25
25
25
90
XYZ axis Stages
θ axis Stages
MAX204
M16 P1 depth 6
18-M4 depth 8
Goniometer
Inclination
Vacuum
Y axis clamp
39
2.5
50
14
90
150
8-4.5 mounting hole
8 counterbore
Ball Guide
Crossed Roller
TAM-10162S
4-8
(Fixing screw
insertion hole)
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
160
90
25 25 25 25
Y axis clamp
13.5
TAM-10162SR
Hexagonal socket head cap screw M4×8…4 screws,
Spring washers
160
4-8
90
(Fixing screw
insertion hole)
25 25 25 25
M16 P1 depth 6 Y axis clamp
Dovetail
Lapping
V Groove Screw
Ohters
160
100
90
25 25
M16 P1 depth 6
50
2.5
X axis clamp
MAX239
90
MAX239
18-M4 depth 8
38.5
8-4.5 mounting hole
8 counterbore
90
150
50
160
38.5
100
2.5
90
25 25
18-M4 depth 8
MAX239
90
X axis clamp
MAX239
8-4.5 mounting hole
8 counterbore
13.5
90
150
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E063

Manual Positioners
X axis Long Travel Aluminum Crossed Roller Slide Stages
TAMC-1
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Light-weight and high precision rectangle linear stages have black anodized aluminum bodies
fitted with crossed roller bearings.
◦A leadscrew drive system (2mm pitch) with crank style
handle enables smooth, fast travel.
◦The standard type is fitted with a scale of readable
resolution 1mm on the stage and a scale of 100 steps
per rotation on the handle (readable resolution 20μm).
Guide
▶The TAMC-20201(LS) supports hole patterns of both □180mm and
□175mm, and can be directly mounted on a 25mm pitch optical
breadboard.
▶The models with the part number suffix LS are fitted with a digital
display scale with a readable resolution of 10μm.
▶The digital display scale has a reset function and a memory
function to retain the value at the time the power is turned off
(redisplay the value being displayed when the power is turned off).
Motoeized
Stages
Outline Drawing
Light
Sources
Index
TAMC-10161
100 (11)
90
25
25
Hexagonal socket head cap screw M4×12…4 screws
Spring washers
160
74
90
Clamp
25 25 25 25 25 25
25-M4
depth 6
90
TAMC-10201
100 (11)
90
25
25
Hexagonal socket head cap screw M4×12…4 screws
Spring washers
200
89
45 90 45 29-M4
Clamp
25 25 25 25 25 25 depth 6
90
Guide
15.5
15.5
X axis Stages
XY axis Stages
30
6.5
150
4-φ4.5 mounting hole
φ8 counterbore
30
6.5
180
4-φ4.5 mounting hole
φ8 counterbore
Z axis Stages
XZ axis Stages
XYZ axis Stages
TAMC-10161LS
(11)
25
Hexagonal socket head cap screw M4×12…4 screws
Spring washers
160
74
25 25
90
25
25 25
25-M4
depth 6
Clamp
TAMC-10201LS
(11)
45
25
Hexagonal socket head cap screw M4×12…4 screws
Spring washers
200
89
90 45 29-M4
Clamp
25 25 25 25 25 depth 6
θ axis Stages
Goniometer
Inclination
Vacuum
100
90
(39.4)
30
25 25
6.5
150
15.5
4-φ4.5 mounting hole
φ8 counterbore
90
(39.4) 100
90
30
6.5 25 25
180
15.5
4-φ4.5 mounting hole
φ8 counterbore
90
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number TAMC-10161 TAMC-10161LS TAMC-10201 TAMC-10201LS
Table Size [mm] 100×160 100×160 100×200 100×200
Axes of Travel
X axis
Handle Position Center Center Center Center
Travel [mm] ±35 ±35 ±50 ±50
Lead of Actuator [mm/rotation] 2.0 2.0 2.0 2.0
Readable Resolution [mm] 0.02 0.01 0.02 0.01
Bearing type
Crossed roller
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 588 (60.0kgf) 588 (60.0kgf) 980 (100.0kgf) 980 (100.0kgf)
Straightness [μm] 2 2 3 3
Travel Accuracy Pitch [ ″] 40 40 60 60
Yaw [ ″] 25 25 25 25
Pitch [N・m] 62.8 62.8 100.0 100.0
Max. Moment
Capacity
Roll [N・m] 60.8 60.8 99.1 99.1
Yaw [N・m] 58.8 58.8 98.1 98.1
Moment Stiffness
Pitch [″/N・cm] 0.046 0.046 0.036 0.036
Roll [″/N・cm] 0.04 0.04 0.03 0.03
Parallelism [μm] 100 100 100 100
Running Parallelism [μm] 15 15 25 25
Weight [kg] 1.6 1.7 1.9 2.1
E064
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Catalog
Code
W7018
Outline Drawing
TAMC-20201/20201-M6/20201UU
Hexagon socket head cap screw M6×10…4 screws
Hexagon socket head cap screw M6×10…4 screws (M6)
Hexagon socket head cap screw 1/4-20UNC×1/2… screws (UU)
200 (11)
B
6×A
A
B
200 89
B
6×A 7-E
A depth 12
49-F
depth 6
E depth 6
Clamp
C
D
TAMC-30301/30301-M6/30301UU
Hexagon socket head cap screw M6×12…4 screws
Hexagon socket head cap screw M6×12…4 screws (M6)
Hexagon socket head cap screw 1/4-20UNC×1/2…4 screws (UU)
300
99
B
10×A
A 4-C depth 12
(13)
300
B
10×A
A
121-D
Clamp
B
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
B
7
11
5.5 (4 places)
Actuators
35
18
45
22.5
Motoeized
Stages
C
D
Part Number A (mm) B (mm) C (mm) D (mm) E F
TAMC-20201 25 90 175 180 M6 P1 M4
TAMC-20201-M6 25 87.5 175 M6 P1 M6 P1
TAMC-20201UU 25.4 88.9 177.8 1/4-20UNC 1/4-20UNC
6.5
B
4-7 mounting hole
11 counterbore
Part Number A (mm) B (mm) C D
TAMC-30301 25 275 M6 P1 M4 depth 8
TAMC-30301-M6 25 275 M6 P1 M6 P1 depth 10
TAMC-30301UU 25.4 279.4 1/4-20UNC 1/4-20UNC depth 10
Light
Sources
Index
TAMC-20201LS
Hexagon socket head cap screw M6×10…4 screws
TAMC-30301LS
Hexagon socket head cap screw M6×12…4 screws
200 (11)
90 90
6×25=150
25
90
200
90
6×25=150
25
89
7-M6 P1
depth 12
49-M4
depth 6
M6 P1
depth 6
175
180
Clamp
300 (13)
275
10×25=250
25
300
275
10×25=250
25
99
Clamp
275
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
(39.4)
175
180
7
11
5.5 (4 places)
(39.4)
121-M4 depth 6
4-M6 P1 depth 12
θ axis Stages
Goniometer
35
18
45
Inclination
6.5
275
4-7 mounting hole
11 counterbore
22.5
Vacuum
Specifications
METRIC TAMC-20201 TAMC-20201-M6 TAMC-20201LS TAMC-30301 TAMC-30301-M6 TAMC-30301LS
Part Number
INCH − TAMC-20201UU − − TAMC-30301UU −
Table Size [mm] 200×200 200×200 200×200 300×300 300×300 300×300
Axes of Travel
X axis
Micrometer Position Center Center Center Center Center Center
Travel [mm] ±50 ±50 ±50 ±60 ±60 ±60
Lead of Actuator [mm/rotation] 2.0 2.0 2.0 2.0 2.0 2.0
Micrometer Readable Resolution [mm] 0.02 0.02 0.01 0.02 0.02 0.01
Bearing type
Crossed roller
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 1176 (120.0kgf) 1176 (120.0kgf) 1176 (120.0kgf) 1274 (130.0kgf) 1274 (130.0kgf) 1274 (130.0kgf)
Straightness [μm] 4 4 4 5 5 5
Travel Accuracy Pitch [ ″] 60 60 60 60 60 60
Yaw [ ″] 25 25 25 25 25 25
Max. Moment
Capacity
Moment Stiffness
Pitch [N・m] 112.0 112.0 112.0 117.0 117.0 117.0
Roll [N・m] 119.0 119.0 119.0 122.0 122.0 122.0
Yaw [N・m] 113.0 113.0 113.0 116.0 116.0 116.0
Pitch [″/N・cm] 0.036 0.036 0.036 0.03 0.03 0.03
Roll [″/N・cm] 0.026 0.026 0.026 0.024 0.024 0.024
Parallelism [μm] 100 100 100 100 100 100
Running Parallelism [μm] 25 25 25 40 40 40
Weight [kg] 3.5 3.5 3.7 10.7 10.7 10.9
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E065

Manual Positioners
XY axis Aluminum Crossed Roller Slide Stages
TAMC-2
Application
Systems
Optics &
Optical
Coatings
Holders
Leadscrew type large linear stages have black anodized aluminum bodies fitted with crossed roller
bearings.
◦Drive of this stage will be able by using adjustment handle with screw feed system in (2mm pitch), and the stage is
moved smoothly with a small load.
Guide
▶The TAMC-20202 supports the hole patterns of both □180mm and
□175mm, possible to be directly mounted on a 25mm pitch
optical breadboard.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TAMC-20202 TAMC-20202-M6 TAMC-30302 TAMC-30302-M6
INCH − TAMC-20202UU − TAMC-30302UU
Table Size [mm] 200×200 200×200 300×300 300×300
Axes of Travel
Micrometer Position Center Center Center Center
Travel [mm] ±50 ±50 ±60 ±60
XY axis
Lead of Actuator [mm/rotation] 2 2 2 2
Micrometer Readable Resolution [mm] 0.02 0.02 0.02 0.02
Bearing type
Primary Material
Finish
Crossed roller
Aluminum
Black anodized
Load Capacity [N] 1176 (120.0kgf) 1176 (120.0kgf) 1274 (130.0kgf) 1274 (130.0kgf)
Travel Accuracy
Straightness [μm] 4 4 5 5
Pitch [ ″] 60 60 60 60
Yaw [ ″] 25 25 25 25
Pitch [N・m] 112.0 112.0 117.0 117.0
Max. Moment
Capacity
Roll [N・m] 112.0 112.0 117.0 117.0
Yaw [N・m] 113.0 113.0 116.0 116.0
Pitch [″/N・cm] 0.06 0.06 0.06 0.06
Moment Stiffness
Roll [″/N・cm] 0.06 0.06 0.06 0.06
Parallelism [μm] 200 200 200 200
Running Parallelism [μm] 50 50 80 80
Weight [kg] 6.0 6.0 16.5 16.5
E066
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Catalog
Code
W7038
Outline Drawing
TAMC-20202
Hexagonal socket head cap screw M6×10…4 screws
(11)
200
90 90
6×25=150
25
200
90 90
6×25=150
25
89
7-M6 P1
depth 12
49-M4
depth 6
M6 P1
depth 6
175
180
X axis clamp
TAMC-20202-M6/20202UU
Hexagonal socket head cap screw M6×10…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/2…4 screws (UU)
(11)
200
B
B
6×A
A
B
200
B
6×A
A
89
E depth 12
F depth 6
M6 P1
depth 6
X axis clamp
C
D
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
7
11
5.5 (4 places)
7
11
5.5 (4 places)
89
Y axis clamp
55
175
180
18
38
89
Y axis clamp
55
18
38
Actuators
Motoeized
Stages
Part Number
C
D
A
(mm)
B
(mm)
C
(mm)
TAMC-20202-M6 25 87.5 175 M6 P1 M6 P1
TAMC-20202UU 25.4 88.9 177.8 1/4-20UNC 1/4-20UNC
E
F
Light
Sources
Index
TAMC-30302
Hexagonal socket head cap screw M6×12…4 screws
TAMC-30302-M6/30302UU
Hexagonal socket head cap screw M6×12…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/2…4 screws (UU)
Guide
X axis Stages
XY axis Stages
(13)
99
300 (13)
275
10×25=250
25
300 99
275
10×25=250
25
121-M4 depth 6
4-M6 P1 depth 12
X axis clamp
275
99 300
(13)
B
10×A
(13)
A
300 99
B
10×A
A 4-C
depth 12
121-D
X axis clamp
B
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Y axis clamp
47.5
Y axis clamp
47.5
Ball Guide
Crossed Roller
70
22.5
70
22.5
Dovetail
6.5
275
4-7 mounting hole
11 counterbore
6.5
B
4-7 mounting hole
11 counterbore
Lapping
V Groove Screw
Part Number
A
(mm)
B
(mm)
TAMC-30302-M6 25 275 M6 P1 M6 P1 depth 10
TAMC-30302UU 25.4 279.4 1/4-20UNC 1/4-20UNC depth 10
C
D
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E067

Manual Positioners
X axis Aluminium Stages
XY axis Aluminium Stages
TADC-401
TADC-402W
Stage size □40mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
The high stiffness integral guide evolved into a separate type offering low price, high stiffness and
lightweight.
◦High quality translation stage with smooth travel. Optimal for positioning and alignment.
◦Because a steel ball travels in contact with the R groove at four points, these stages have stable load capacity in all
directions.
◦Long life but free of maintenance.
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TADC-401C TADC-401S TADC-402WC TADC-402WS
INCH TADC-401CUU TADC-401SUU TADC-402WCUU TADC-402WSUU
(Opposite Model)
METRIC − TADC-401SR − TADC-402WSR
INCH − TADC-401SRUU − TADC-402WSRUU
Table Size [mm] 40×40 40×40 40×40 40×40
Axes of Travel X axis XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±6.5 ±6.5 ±6.5 ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)
Travel Accuracy Straightness [μm] 3 3 3 3
Pitch [N・m] 2.5 2.5 2.5 2.5
Max. Moment
Capacity
Roll [N・m] 3 3 2.5 2.5
Yaw [N・m] 2.5 2.5 2.5 2.5
Pitch [″/N・cm] 0.66 0.66 1.22 1.22
Moment Stiffness
Roll [″/N・cm] 0.36 0.36 1.22 1.22
Parallelism [μm] 30 30 50 50
Running Parallelism [μm] 10 10 20 20
Orthogonality [μm] − − 10 10
Options FP/DL FP/DL FP/DL FP
Weight [kg] 0.15 0.15 0.3 0.3
Option
Option Code
Compatible product
Lead of Actuator Micrometer Readable Resolution
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 −
DL Differential Micrometer Heads MDC-13 0.5 0.01
* Please add an option code as the part number suffix to specify various optional specifications.
* Installation may not be possible depending on the directon of DL.
* Replacement work requires a special tool (MNS). F006
E008
E068
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Catalog
Code
Catalog
Code
W7127
W7128
Outline Drawing
TADC-401C/401CUU
Hexagon socket head cap screw
(stainless steel construction)
M3×6…4 screws, Spring washers
Hexagon socket head cap screw
(stainless steel construction)
6-32UNC×1/4…4 screws (UU)
TADC-401S/401SUU
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws, Spring washers
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×1/4…4 screws (UU)
40
Clamp
A A
19 40 (11)
16
A
A
1.5
Part Number
MAX70
TADC-402WC/402WCUU
Hexagon socket head cap screw
(stainless steel construction)
M3×6…4 screws, Spring washers
Hexagon socket head cap screw
(stainless steel construction)
6-32UNC×1/4…4 screws (UU)
B
A
(mm)
7-D depth 6
C
9.2
(11)
40
16
A
A
1.5
4-E mounting hole
F counterbore
B
(mm)
MAX66 40 (11)
A
A
C
40 MAX66
A A
B
40
A A
7-D depth 6
C
4-E mounting hole
F counterbore
B
D
MAX66
7-D depth 6
C
E
(mm)
10.5
F
(mm)
TSD-401S 16 32 M6 P1 depth 5 M3 3.5 6
TSD-401SUU 15.875 31.75 1/4-20UNC depth 5 6-32UNC 4 6.5
Clamp
B
Part Number
TADC-401SR/401SRUU
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws, Spring washers
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×1/4…4 screws (UU)
40
A A
Clamp
9.2 19 40 (11)
A A
4-E mounting hole
F counterbore
X axis clamp
B
A
(mm)
B
(mm)
MAX70
B
1.5
C
7-D depth 6
C
16
D
E
(mm)
B
F
(mm)
TSD-401C 16 32 M6 P1 depth 5 M3 3.5 6
TSD-401CUU 15.875 31.75 1/4-20UNC depth 5 6-32UNC 4 6.5
Part Number
A
(mm)
B
(mm)
C
D
E
(mm)
F
(mm)
TSD-401SR 16 32 M6 P1 depth 5 M3 3.5 6
TSD-401SRUU 15.875 31.75 1/4-20UNC depth 5 6-32UNC 4 6.5
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
32
16 16
1.5
B
Y axis clamp
4-E mounting hole
F counterbore
10.5
26.5
Part Number
A
(mm)
B
(mm)
C
D
E
(mm)
F
(mm)
TSD-402WC 16 32 M6 P1 depth 5 M3 3.5 6
TSD-402WCUU 15.875 31.75 1/4-20UNC depth 5 6-32UNC 4 6.5
Inclination
Vacuum
TADC-402WS/402WSUU
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws, Spring washers
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×1/4…4 screws (UU)
(11) 40 19
25.2
7-D depth 6
A A
X axis clamp
19 40 (11)
A A
Y axis clamp
32
16
16
1.5
Part Number
MAX70
B
A
(mm)
C
MAX70
9.2
4-E mounting hole
F counterbore
B
(mm)
C
D
B
E
(mm)
F
(mm)
TSD-402WS 16 32 M6 P1 depth 5 M3 3.5 6
TSD-402WSUU 15.875 31.75 1/4-20UNC depth 5 6-32UNC 4 6.5
TADC-402WSR/402WSRUU
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws, Spring washers
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×1/4…4 screws (UU)
(11) 40 19
7-D depth 6
A A
X axis clamp
19 40 (11)
A A
Y axis clamp
9.2
4-E mounting hole
F counterbore
Part Number
MAX70
B
A
(mm)
1.5
C
B
(mm)
MAX70
16
16
32
C
25.2
D
B
E
(mm)
F
(mm)
TSD-402WSR 16 32 M6 P1 depth 5 M3 3.5 6
TSD-402WSRUU 15.875 31.75 1/4-20UNC depth 5 6-32UNC 4 6.5
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E069

Manual Positioners
X axis Aluminium Stages
XY axis Aluminium Stages
TADC-601
TADC-602W
Stage size □60mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
The high stiffness integral guide evolved into a separate type offering low price, high stiffness and
lightweight.
◦High quality translation stage with smooth travel. Optimal for positioning and alignment.
◦Because a steel ball travels in contact with the R groove at four points, these stages have stable load capacity in all
directions.
◦Long life but free of maintenance.
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC TADC-601C TADC-601S TADC-602WC TADC-602WS
(Opposite Model) METRIC − TADC-601SR − TADC-602WSR
Table Size [mm] 60×60 60×60 60×60 60×60
Axes of Travel X axis XY axis
Micrometer Position Center Side Center Side
Travel [mm] ±6.5 ±6.5 ±6.5 ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 196 (20.0kgf) 196 (20.0kgf) 196 (20.0kgf) 196 (20.0kgf)
Travel Accuracy Straightness [μm] 3 3 3 3
Pitch [N・m] 4.9 4.9 4.9 4.9
Max. Moment
Capacity
Roll [N・m] 4.9 4.9 4.9 4.9
Yaw [N・m] 4.9 4.9 4.9 4.9
Pitch [″/N・cm] 0.3 0.3 0.6 0.6
Moment Stiffness
Roll [″/N・cm] 0.25 0.25 0.6 0.6
Parallelism [μm] 30 30 50 50
Running Parallelism [μm] 10 10 20 20
Orthogonality [μm] − − 10 10
Options FP/DL FP/DL FP/DL FP
Weight [kg] 0.2 0.2 0.4 0.4
Option
Option Code
Compatible product
Lead of Actuator Micrometer Readable Resolution
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 −
DL Differential Micrometer Heads MDC-13 0.5 0.01
* Please add an option code as the part number suffix to specify various optional specifications.
* Installation may not be possible depending on the directon of DL.
* Replacement work requires a special tool (MNS). F006
E008
E070
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Catalog
Code
Catalog
Code
W7129
W7130
Outline Drawing
TADC-601C
60 (11)
25 25
32
Hexagon socket head cap screw
(stainless steel construction) M4×6…4 screws
60 MAX66
25 25
Clamp
32
9-M4 depth 6
4-M3 depth 5
50
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
18
2
50 4-4.5 mounting hole
8 counterbore
9.5
Manual
Stages
TADC-601S
Hexagon socket head cap screw
(stainless steel construction) M4×6…4 screws
TADC-601SR
Hexagon socket head cap screw
(stainless steel construction) M4×6…4 screws
Actuators
60 (11)
25 25
32
60
25 25
32
9-M4 depth 6
4-M3 depth 5
Clamp
50
(11)
60
25 25
32
60
25 25
32
9-M4 depth 6
4-M3 depth 5
Clamp
50
Motoeized
Stages
Light
Sources
19
19
Index
MAX84
MAX84
9.7
18
2
50
4-4.5 mounting hole
8 counterbore
9.7
2
50
18
4-4.5 mounting hole
8 counterbore
Guide
X axis Stages
TADC-602WC
60 (11)
25 25
32
MAX66
Hexagon socket head cap screw
(stainless steel construction) M4×6…4 screws
60 MAX66
25 25
32
9-M4 depth 6
4-M3 depth 5
X axis clamp
50
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Y axis clamp
27.5
18
2
36
18
50
4-4.5 mounting hole
8 counterbore
Hexagon socket head cap screw
TADC-602WS
(stainless steel construction) M4×6…4 screws
(11) 60 19
27.7
25 25
X axis clamp
9-M4 depth 6
32
60 (11)
25 25
32
19
4-M3 depth 5
Y axis clamp
36
18
18
2
MAX84
50
MAX84
9.7
9.5
4-4.5 mounting hole
8 counterbore
50
TADC-602WSR
9-M4 depth 6
19 60 (11)
25 25
32
Y axis clamp
9.7
Hexagon socket head cap screw
(stainless steel construction) M4×6…4 screws
(11) 60 19
25 25
X axis clamp
32
4-M3 depth 5
MAX84
50
2
MAX84
18
18
36
4-4.5 mounting hole
8 counterbore
27.7
50
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E071

Manual Positioners
X axis Preset Stages
TASB-1 Stage size □15/□25/□40/□60/□65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Preset stages with dovetail slide guide and leadscrew adjustment system, suitable for assembly in
systems.
◦Ideal for less frequent operations, fine adjustment or permanent fixation.
◦These stages have a block shape with minimal protrusions including the adjustment knob, in order to minimizing the
installation space.
Guide
▶A hex wrench with knob and clamping wrench are included.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Mounting Method
Detailed Illustration
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
The bottom mounting
holes of preset stages
are tapped holes.
These stages allow
mounting from the top or
the bottom, convenient
for securing on optical
breadboards or other
instruments as well as
assembling in systems.
Use the screws of the
sizes listed in the table
on the right for mounting.
About Mounting Holes
Part Number
Clamp
Secure from
the top
Secure from
the bottom
TASB-151 M2 M2.6
TASB-251 M2 M3
TASB-401 M3 M4
TASB-401UU 6-32UNC −
TASB-601 M4 M5
TASB-651-M6 M6 M8
TASB-651UU 1/4-20UNC 5/16-18UNC
* When mounting from the top surface, slide the
top surface to insert screws in mounting holes.
Clamp with a screw
from the top
Clamp with a screw
from the bottom
Top mounting
Tapped holes are used as
counterbores because screws
are smaller than tapped holes
and will go in without any
interference.
Bottom mounting
Clamp with screws that match
the specification of tapped
holes.
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TASB-151 TASB-251 TASB-401 TASB-601 TASB-651-M6
INCH − − TASB-401UU − TASB-651UU
Table Size [mm] 15×15 25×25 40×40 60×60 65×65
Axes of Travel
Travel [mm] ±2 ±3 ±7 ±10 ±12.5
Screw Pitch [mm] 0.4 0.5 0.5 0.5 0.5
Bearing type
Primary Material
Finish
X axis
Dovetail method
Brass
Black matte
Load Capacity [N] 9.8 (1.0kgf) 49 (5.0kgf) 98.1 (10.0kgf) 147 (15.0kgf) 147 (15.0kgf)
Travel Accuracy Straightness [μm] 10 10 10 10 10
Pitch [N・m] 0.5 2.0 4.0 5.1 5.1
Max. Moment
Capacity
Roll [N・m] 0.5 2.0 3.75 5.1 5.1
Yaw [N・m] 0.2 1.0 3.0 4.0 4.0
Pitch [″/N・cm] 8.0 2.0 0.61 0.4 0.35
Moment Stiffness
Roll [″/N・cm] 7.0 1.5 0.51 0.3 0.35
Parallelism [μm] 50 50 50 50 50
Weight [kg] 0.02 0.06 0.2 0.5 0.7
E072
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Catalog
Code
W7019
Outline Drawing
TASB-151
Pan head screw M2×5…3 screws, One 2.5mm hex wrench with knob, One 0.89mm hex wrench
hex wrench with knob size 2.5mm, hex wrench size for clamp 0.89mm
15 3
10
TASB-251
Pan head screw M2×6…3 screws, One 3mm hex wrench with knob, One 0.89mm hex wrench
hex wrench with knob size 3mm, hex wrench size for clamp 0.89mm
25 4
M4 depth 4.5 10 10
1.5 locking hole
Application
Systems
Optics &
Optical
Coatings
Holders
8 15
10
Clamp
4 4
4-M2 depth 2.5
10
25
10 10
15
Clamp
6.7 6
8-M2 depth 4
20
Bases
Manual
Stages
3
10
3-2.2 4 counterbore (Top mounting)
3-M2.6 (Bottom mounting)
3
20
3-2.5 4.5 counterbore (Top mounting)
3-M3 (Bottom mounting)
Actuators
TASB-401/401UU
Pan head screw M3×8…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench
Hexagonal socket head cap screw 6-32UNC×3/8…4 screws,
One 3mm hex wrench with knob, One 1.5mm hex wrench (UU)
hex wrench with knob size 3mm, hex wrench size for clamp 1.5mm
C depth 5 40 4
8-D depth 5
A A
1.5 locking hole
TASB-601
Hexagonal socket head cap screw M4×10…4 screws,
One 3mm hex wrench with knob, One 1.5mm hex wrench
hex wrench with knob size 3mm, hex wrench size for clamp 1.5mm
9-M4 depth 5
60
25 25
32
5
4-M3 depth 5
Motoeized
Stages
Light
Sources
Index
2 locking hole
40
A
A
6
B
60
25 25
32
8
50
Guide
X axis Stages
Clamp
Clamp
XY axis Stages
18
8.8
21
10
Z axis Stages
Part Number
5
A
(mm)
B
B
(mm)
4-E F counterbore (Top mounting)
G (Bottom mounting)
C
D
E
(mm)
F
(mm)
TASB-401 16 32 M4 M3 3.3 6 4-M4
TASB-401UU 15.875 31.75 8-32UNC 6-32UNC 4 6.5
B
Adjustment wrench size B=3
G
5.5
50
4-4.2 8 counterbore (Top mounting)
4-M5 (Bottom mounting)
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
TASB-651-M6/651UU
Hexagonal socket head cap screw M6×12…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/2…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench (UU)
hex wrench with knob size 3mm, hex wrench size for clamp 1.5mm
Vacuum
9-C depth 6
A
65 5
A
2 locking hole
Ball Guide
Crossed Roller
Dovetail
A
Lapping
65
A
8
B
V Groove Screw
Ohters
23
4.5
Part Number
Clamp
A
(mm)
B
B
(mm)
11
4-6.7 11 counterbore (Top mounting)
4-D (Bottom mounting)
TASB-651-M6 25 50 M6 M8
TASB-651UU 25.4 50.8 1/4-20UNC 5/16-18UNC
B
Adjustment wrench size B=3
C
D
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E073

Manual Positioners
XY axis Preset Stages
TASB-2 Stage size □15/□25/□40/□60/□65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Preset stages with dovetail slide guide and leadscrew adjustment system, suitable for assembly in
systems.
◦Ideal for less frequent operations, fine adjustment or permanent fixation.
◦These stages have a block shape with minimal protrusions including the adjustment knob, in order to minimizing the
installation space.
Guide
▶A hex wrench with knob and clamping wrench are included.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Mounting Method
Detailed Illustration
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
The bottom mounting
holes of preset stages
are tapped holes.
These stages allow
mounting from the top or
the bottom, convenient
for securing on optical
breadboards or other
instruments as well as
assembling in systems.
Use the screws of the
sizes listed in the table
on the right for mounting.
Clamp
About Mounting Holes
Part Number
Secure from
the top
Secure from
the bottom
TASB-152 M2 M2.6
TASB-252 M2 M3
TASB-402 M3 M4
TASB-402UU 6-32UNC −
TASB-602 M4 M5
TASB-652-M6 M6 M8
TASB-652UU 1/4-20UNC 5/16-18UNC
* When mounting from the top surface, slide the
top surface to insert screws in mounting holes.
Clamp with a screw
from the top
Clamp with a screw
from the bottom
Top mounting
Tapped holes are used as
counterbores because screws
are smaller than tapped holes
and will go in without any
interference.
Bottom mounting
Clamp with screws that match
the specification of tapped
holes.
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TASB-152 TASB-252 TASB-402 TASB-602 TASB-652-M6
INCH − − TASB-402UU − TASB-652UU
Table Size [mm] 15×15 25×25 40×40 60×60 65×65
Axes of Travel
Travel [mm] ±2 ±3 ±7 ±10 ±12.5
Screw Pitch [mm] 0.4 0.5 0.5 0.5 0.5
Bearing type
Primary Material
Finish
XY axis
Dovetail method
Brass
Black matte
Load Capacity [N] 9.8 (1.0kgf) 49 (5.0kgf) 98.1 (10.0kgf) 147 (15.0kgf) 147 (15.0kgf)
Travel Accuracy Straightness [μm] 10 10 10 10 10
Pitch [N・m] 0.5 2.0 3.75 5.1 5.1
Max. Moment
Capacity
Roll [N・m] 0.5 2.0 3.75 5.1 5.1
Yaw [N・m] 0.2 1.0 3.0 4.0 4.0
Pitch [″/N・cm] 15 3.57 1.12 0.7 0.7
Moment Stiffness
Roll [″/N・cm] 15 3.57 1.12 0.7 0.7
Parallelism [μm] 100 100 100 100 100
Weight [kg] 0.03 0.11 0.3 0.83 1.12
E074
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Catalog
Code
W7201
Outline Drawing
TASB-152
Pan head screw M2×5…3 screws, One 2.5mm hex wrench with knob, One 0.89mm hex wrench
hex wrench with knob size 2.5mm, hex wrench size for clamp 0.89mm
4 4 X axis clamp
15 3
10
4
10
10
4-M2 depth 2.5
15
Y axis clamp
3
TASB-252
Pan head screw M2×6…3 screws, One 3mm hex wrench with knob, One 0.89mm hex wrench
hex wrench with knob size 3mm, hex wrench size for clamp 0.89mm
1.5 locking hole 6
M4 depth 4.5
6.7
25 4
10 10
6
20
10 10 1.5 locking hole X axis clamp
8-M2 depth 4
25 4
Y axis clamp
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
14
3
10
10
3-2.2 4 counterbore (Top mounting)
3-M2.6 (Bottom mounting)
26
3
20
17.7
3-2.5 4.5 counterbore (Top mounting)
3-M3 (Bottom mounting)
Actuators
Motoeized
Stages
TASB-402/402UU
Pan head screw M3×8…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench
Hexagonal socket head cap screw 6-32UNC×3/8…4 screws,
One 3mm hex wrench with knob, One 1.5mm hex wrench (UU)
hex wrench with knob size 3mm, hex wrench size for clamp 1.5mm
1.5 locking hole
4
40
A
A
6
C depth 5
6
X axis clamp
8.8
B
TASB-602
Hexagonal socket head cap screw M4×10…4 screws,
One 3mm hex wrench with knob, One 1.5mm hex wrench
hex wrench with knob size 3mm, hex wrench size for clamp 1.5mm
60 5
25
2 locking hole
32
8
4-M3 depth 5
2 locking hole
10
50
Light
Sources
Index
Guide
8-D depth 5 A
Y axis clamp
40
A
4
1.5 locking hole
25
9-M4 depth 5
Y axis clamp
25
60
32
25
5
8
X axis clamp
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
30
5
Part Number
A
(mm)
B
B
(mm)
20.8
4-E F counterbore(Top mounting)
G (Bottom mounting)
C
D
E
(mm)
F
(mm)
TASB-402 16 32 M4 M3 3.3 6 4-M4
TASB-402UU 15.875 31.75 8-32UNC 6-32UNC 4 6.5
B
Adjustment wrench size B=3
G
35
5.5
50
24
4-4.2 8 counterbore (Top mounting)
4-M5 (Bottom mounting)
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
TASB-652-M6/652UU
Hexagonal socket head cap screw M6×12…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/2…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench (UU)
hex wrench with knob size 3mm, hex wrench size for clamp 1.5mm
65 5
A
8
8
9-C depth 6
11
B
X axis clamp
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
A
37
4.5
A
Y axis clamp
B
A
65 5
2 locking hole
25
4-6.7 11 counterbore (Top mounting)
4-D (Bottom mounting)
Part Number
A
(mm)
B
(mm)
TASB-652-M6 25 50 M6 M8
TASB-652UU 25.4 50.8 1/4-20UNC 5/16-18UNC
B
Adjustment wrench size B=3
C
D
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E075

Manual Positioners
X axis Leadscrew Stages
XY axis Leadscrew Stages
TAS-1
TAS-2
Application
Systems
Leadscrew stages with dovetail slide guide and leadscrew adjustment system, suitable for fine
adjustment.
◦A large adjustment knob provides good sensitivity and ease of use
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Mounting Method
Clamp
Guide
▶Using the top plate spacer for TAS-2060 (SP-127-1 and SP-134) to
convert mounting holes, post holders and various stages can be
mounted. D059, D061
Index
Guide
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
X axis Stages
XY axis Stages
Stage must be translated to provide access to all of the mounting
holes.
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC TAS-24301 TAS-20601 TAS-24302 TAS-20602
(Opposite Model) METRIC TAS-24301R TAS-20601R TAS-24302R TAS-20602R
Table Size [mm] 24×30 18×60 24×30 18×60
Axes of Travel X axis XY axis
Travel [mm] ±4 ±7.5 ±4 ±7.5
Screw Pitch [mm] 0.5 0.5 0.5 0.5
Bearing type
Dovetail method
Primary Material
Brass
Finish
Super black chrome
Load Capacity [N] 68.7 (7.0kgf) 147 (15.0kgf) 68.7 (7.0kgf) 147 (15.0kgf)
Travel Accuracy Straightness [μm] 20 20 20 20
Pitch [N・m] 0.5 0.5 0.5 0.5
Max. Moment
Capacity
Roll [N・m] 0.5 0.5 0.5 0.5
Yaw [N・m] 0.5 0.7 0.5 0.7
Pitch [″/N・cm] 0.51 0.25 1.5 1.27
Moment Stiffness
Roll [″/N・cm] 1.0 1.0 1.5 1.27
Parallelism [μm] 50 50 100 100
Weight [kg] 0.2 0.5 0.4 0.9
E076
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Catalog
Code
W7020
Catalog
Code
W7039
Outline Drawing
TAS-24301
Pan head screw M3×5…4 screws
TAS-24301R
Pan head screw M3×5…4 screws
Application
Systems
6-M3 depth 5
40
30
20
(15)
6-M3 depth 5
40
30
20
(15)
Clamp
Optics &
Optical
Coatings
24
15.5 15
10
6 (Fixing screw insertion hole)
14
7.75
Clamp
24
15
10
6(Fixing screw insertion hole)
15.5
14
7.75
Holders
Bases
1
10
32
4-3.5 mounting hole
6 counterbore
1
10
32
4-3.5 mounting hole
6 counterbore
Manual
Stages
TAS-20601
Hexagonal socket head cap screw M4×10…4 screws
TAS-20601R
Hexagonal socket head cap screw M4×10…4 screws
Actuators
4-M4 depth 6
77 (16)
60
50
4-M4 depth 6
77 (16)
60
50
Clamp
Motoeized
Stages
Light
Sources
60
38
13
18
50
60
38
13
18
50
Index
60
Clamp
60
20
5
50
16
25
4-4.5 mounting hole
20
5
50
16
25
4-4.5 mounting hole
Guide
X axis Stages
TAS-24302
Pan head screw M3×5…4 screws
40
14
(15) Y axis clamp
23.25
TAS-24302R
Pan head screw M3×5…4 screws
40 (15)
14
23.25
X axis clamp
XY axis Stages
Z axis Stages
XZ axis Stages
(15)
(15)
XYZ axis Stages
40
30
20
14
40
30
20
14
θ axis Stages
10
15
24
6-M3 depth 5
Y axis clamp
10
15
24
6-M3 depth 5
Goniometer
Inclination
31
7.75
31
7.75
Vacuum
1
X axis clamp
10
32
4-3.5 mounting hole
6 counterbore
1
10
32
4-3.5 mounting hole
6 counterbore
Ball Guide
TAS-20602
Hexagonal socket head cap screw M4×10…4 screws
TAS-20602R
Hexagonal socket head cap screw M4×10…4 screws
Crossed Roller
77 (16)
77 (16)
Dovetail
18
16
18
16
Lapping
(16)
77
60
38
13
18
50
77 (16)
60
38
13
Y axis clamp
18
50
V Groove Screw
Ohters
□15mm
50
60
4-M4 depth 6
X axis clamp
50
60
4-M4 depth 6
□25mm
□40mm
□60mm
Y axis clamp
60
X axis clamp
60
□65mm
□80mm
□100mm
40
36
45
40
36
45
□120mm
5
50
4-4.5 mounting hole
5
50
4-4.5 mounting hole
Others
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E077

Manual Positioners
X axis Rack and Pinion Dovetail Stages
TARW/TAR Stage size 25×30mm
Application
Systems
Optics &
Optical
Coatings
Holders
Rack and pinion stages with dovetail slides, suitable for frequent operations that require quick
motion and long travel.
◦Long travel type dovetail stage with table size of 25×30mm.
◦The feed handle and adjustment knob improved operability.
Guide
▶The TAR-25 series can be delivered with more than one movable
table. Contact our International Sales Division for more information.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Mounting Method
Tapped holes are used for mounting
holes (clamping holes) so that
compact rack and pinion dovetail
stages can be assembled in optical
breadboards and systems as well as
secured on other instruments from
both top and bottom.
Part Number From the top From the bottom
TARW-25501 M3 M4
TAR-25801 M2 M3, (M4)
TAR-25121 M2 M3, (M4)
TAR-25161 M2 M3, (M4)
Attention
▶Since the feed handle of TARW-25501 protrudes from the bottom
surface of the stage, it cannot be directly secured on a flat surface.
A recess is required using a spacer or the like
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC TARW-25501 TAR-25801 TAR-25121 TAR-25161
Table Size [mm] 25×50 25×30 25×30 25×30
Axes of Travel
Travel [mm] ±10 ±25 ±45 ±65
Lead of Actuator [mm/rotation] about 20 about 20 about 20 about 20
Vernier Scale [mm] 0.1 0.1 0.1 0.1
Bearing type
Primary Material
Finish
X axis
Dovetail method
Brass
Super black chrome
Load Capacity [N] 78.5 (8.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)
Travel Accuracy Straightness [μm] 20 30 40 50
Pitch [N・m] 1.2 0.5 0.5 0.5
Max. Moment
Capacity
Roll [N・m] 0.6 0.5 0.5 0.5
Yaw [N・m] 1.0 0.5 0.5 0.5
Pitch [″/N・cm] 1.22 2.03 2.03 2.03
Moment Stiffness
Roll [″/N・cm] 2.45 1.53 1.53 1.53
Parallelism [μm] 50 50 80 80
Weight [kg] 0.22 0.22 0.3 0.36
E078
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Catalog
Code
W7021
Outline Drawing
TARW-25501
Pan head screw
M3×8…4 screws
3-M4 depth 5
22 (20) 25
20
Clamp
3.8
50
10-M3 depth 5
40
10 10 10 10
4-M3 depth 4
20 4-M2 depth 4
20
6.8
40
2-3.3 6 counterbore (Top mounting)
4-M4 (Bottom mounting)
20
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
TAR-25801
Pan head screw
M2×6…4 screws
80
22
20 20 20
3.5
Motoeized
Stages
25
20
20
Light
Sources
(20)
20
2-M4 depth 4
4-M2 depth 4
8-2.5 4.2 counterbore (Top mounting)
8-M3 (Bottom mounting)
Index
Clamp
15.2
30 25.2
Guide
X axis Stages
35
35
3-M4 depth 5
XY axis Stages
Z axis Stages
TAR-25121
Pan head screw
M2×6…6 screws
20
20
120
20
22
20 20 3.5
XZ axis Stages
XYZ axis Stages
θ axis Stages
25
20
20
Goniometer
(20)
Clamp
20
2-M4 depth 4
4-M2 depth 4
15.2
12-2.5 4.2 counterbore (Top mounting)
12-M3 (Bottom mounting)
Inclination
Vacuum
30
25.2
Ball Guide
55 55
3-M4 depth 5
Crossed Roller
Dovetail
TAR-25161
Pan head screw
M2×6…8 screws
20
160
20 20 20 20 20
22
20 3.5
Lapping
V Groove Screw
Ohters
25
20
□15mm
(20)
20
Clamp
30
50 50
2-M4 depth 4
4-M2 depth 4
50
4-M4 depth 5
15.2
25.2
16-2.5 4.2 counterbore (Top mounting)
16-M3 (Bottom mounting)
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E079

Manual Positioners
X axis Rack and Pinion Dovetail Stages
X axis Dual Drive Rack and Pinion Dovetail Stages
TAR-1
TAR-D
Application
Systems
Rack and pinion stages with dovetail slides, suitable for frequent operations that require quick
motion and long travel.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Mounting Method
Guide
▶Using the top plate spacer for TAR (SP-109 and SP-131) to convert
mounting holes, post holders and various stages can be mounted.
D057, D060
Primary material: Aluminum
Bottom Plate Finish: Black Anodized
TAR 34601/34801/34141 include a base plate that allows mounting
on instruments or bases fitted with M4 tapped holes on □50mm,
preventing the handle from contacting the mounting surface.
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
60
50
20
60
50
36
4
10
4
4-φ4.5 mounting hole
φ8 counterbore
4-φ4.5 stage surface mounting hole
φ8 counterbore
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
METRIC TAR-34601 TAR-34801 TAR-34141 TAR-38651-M6 TAR-381201-M6 TAR-38601D TAR-38801D TAR-38141D
Part Number
INCH − − − TAR-38651UU TAR-381201UU − − −
Table Size [mm] 34×60 34×80 34×140 38×65 38×120 38×60 38×80 38×140
Axes of Travel
X axis
Travel [mm] ±15 ±25 ±50 ±15 ±40
Lead of Actuator [mm/rotation] about 20 about 20 about 20 about 20 about 20
Coars: ±15
Fine: ±15
Coars: about
20
Fine: 2.5
Coars: ±25
Fine: ±25
Coars: about
20
Fine: 2.5
Coars: ±50
Fine: ±50
Coars: about
20
Fine: 2.5
Vernier Scale [mm] 0.1 0.1 0.1 0.1 0.1 0.1 0.1 0.1
Bearing type
Dovetail method
Primary Material
Brass
Finish
Super black chrome
Load Capacity [N]
147
(15.0kgf)
196
(20.0kgf)
245
(25.0kgf)
147
(15.0kgf)
245
(25.0kgf)
147
(15.0kgf)
196
(20.0kgf)
Travel Accuracy Straightness [μm] 20 30 30 20 30 20 30 30
Pitch [N・m] 2.9 3.8 6.9 2.9 6 2.9 3.8 6.9
Max. Moment
Capacity
Roll [N・m] 1.5 1.5 2.0 1.5 1.5 1.5 1.5 2.0
Yaw [N・m] 2.0 2.6 3.9 2.0 3.0 2.00 2.6 3.9
Pitch [″/N・cm] 0.36 0.26 0.05 0.36 0.7 0.51 0.36 0.05
Moment Stiffness
Roll [″/N・cm] 0.82 0.82 0.82 0.82 0.2 0.92 0.92 0.92
Parallelism [μm] 60 60 80 60 80 60 60 80
Weight [kg] 0.5 0.8 1.0 0.6 1.0 0.5 0.8 1.0
245
(25.0kgf)
E080
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Catalog
Code
Catalog
Code
W7022
W7504
Outline Drawing
TAR-34601
Hexagonal socket
head cap screw
M4×8…
60
20 20
6-M4 depth 5
TAR-34801
Hexagonal socket
head cap screw
M4×8…4 screws
80
60
20 20
6-M4 depth 5
Application
Systems
Optics &
Optical
Coatings
(22) 60
20
Clamp
35
30
34
16
50
35 (22) 60
20
Clamp
34
30 16
50
Holders
Bases
Manual
Stages
4
50
4-4.5 mounting hole
8 counterbore
4
50
4-4.5 mounting hole
8 counterbore
Actuators
TAR-34141
Hexagonal socket
head cap screw
M4×8…
4 screws
35 (22) 60
20
4
Clamp
140
20 20 20 20
30
60
50
34
10-M4 depth 5
4-4.5 mounting hole
8 counterbore
16
50
TAR-38651-M6
TAR-38651UU
Hexagonal socket head cap screw
M6×10…4 screws (M6)
Hexagonal socket head cap screw
1/4-20UNC×3/8…4 screws (UU)
65
38
(14)
38
A
3
Clamp
65
A A
7-C depth 8
B
4-D mounting hole
4-11 counterbore
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TAR-38651-M6 25 50 M6 P1 6.5
TAM-38651UU 25.4 50.8 1/4-20UNC 7
30
18
B
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
TAR-38601D
Hexagonal socket
head cap screw
M4×8…4 screws
60
20 20
6-M4 depth 5
TAR-38801D
Hexagonal socket
head cap screw
M4×8…4 screws
80
60
20 20
6-M4 depth 5
XZ axis Stages
XYZ axis Stages
θ axis Stages
60
20
38
50
60
20
38
50
Goniometer
(34)
Clamp
22
30
Coarse movement knob
Fine movement knob
16
(34)
Clamp
22
30
Coarse movement knob
Fine movement knob
16
Inclination
Vacuum
35
35
3
50
4-4.5 mounting hole
8 counterbore
3
50
4-4.5 mounting hole
8 counterbore
Ball Guide
TAR-38141D
Hexagonal socket
head cap screw
M4×8…4 screws
60
20
140
60
20 20 20 20
10-M4 depth 5
38
50
TAR-381201-M6
TAR-381201UU
Hexagonal socket head cap screw
M6×10…4 screws (M6)
Hexagonal socket head cap screw
1/4-20UNC×3/8…4 screws (UU)
65
38
A
A
120
A A
A
11-C depth 8
B
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
(34)
35
3
Clamp
22
30
50
Coarse movement knob
Fine movement knob
4-4.5 mounting hole
8 counterbore
16
Part Number
(14)
38
3
A
(mm)
Clamp
30
B
65
B
(mm)
4-D mounting hole
4-11 counterbore
C
18
D
(mm)
TAM-381201-M6 25 50 M6 P1 6.5
TAM-381201UU 25.4 50.8 1/4-20UNC 7
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E081

Manual Positioners
XY axis Rack and Pinion Dovetail Stages
TARW/TAR-2
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Leadscrew stages with dovetail slide guide and leadscrew adjustment system, suitable for fine
adjustment.
Guide
▶Using the top plate spacer for TAR (SP-109) and that for TAS-2060
(SP-127-1), post holders and various stages can be mounted.
D057, D059
Attention
▶Since the feed handle of TARW-25502 protrudes from the stage
main body, it cannot be directly secured on a flat surface.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Mounting Method
TAS model
Clamp
Primary material: Aluminum
Bottom Plate Finish: Black Anodized
TAR-34602/34802 include a base plate that allows mounting on
instruments or bases fitted with M4 tapped holes on □50mm,
preventing the handle from contacting the mounting surface.
60
Index
50
36
10
4
4-φ4.5 mounting hole
φ8 counterbore
Guide
X axis Stages
Stage must be translated to provide access to all of the mounting
holes.
60
50
20
4
4-φ4.5 stage surface mounting hole
φ8 counterbore
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TARW-25502 TAR-34602 TAR-34802 TAR-38652-M6 TAR-381202-M6
INCH − − − TAR-38652UU TAR-381202UU
Table Size [mm] 25×50 34×60 34×80 38×65 38×120
Axes of Travel
Travel [mm] ±10 ±15 ±25 ±15 ±40
Lead of Actuator [mm/rotation] about 20 about 20 about 20 about 20 about 20
Vernier Scale [mm] 0.1 0.1 0.1 0.1 0.1
Bearing type
Primary Material
Finish
XY axis
Dovetail method
Brass
Super black chrome
Load Capacity [N] 78.5 (8.0kgf) 147 (15.0kgf) 196 (20.0kgf) 147 (15.0kgf) 245 (25.0kgf)
Travel Accuracy Straightness [μm] 20 20 30 20 30
Pitch [N・m] 0.6 1.5 1.5 2.9 3.0
Max. Moment
Capacity
Roll [N・m] 0.6 1.5 1.5 1.5 1.5
Yaw [N・m] 1.0 2.0 2.6 2.0 2.5
Pitch [″/N・cm] 3.67 1.2 1.1 0.15 0.3
Moment Stiffness
Roll [″/N・cm] 3.67 1.2 1.1 0.15 0.15
Parallelism [μm] 100 140 160 140 160
Weight [kg] 0.44 1.0 1.6 1.2 1.9
E082
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Catalog
Code
W7040
Outline Drawing
TARW-25502
3-M4 depth 5
(17.5)
Pan head screw M3×8…4 screws
50 (7.5)
28.8
X axis clamp
3.8
20
4-M3 depth 4
4-M2 depth 4
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
10 10 10 10
Manual
Stages
44
6.8
50
20
40
20
40
25
20
Y axis clamp
10-M3 depth 5
20
4-3.3 6 counterbore (Top mounting)
4-M4 (Bottom mounting)
Actuators
25
Motoeized
Stages
TAR-34602
Hexagonal socket head cap screw M4×8…4 screws
60 (22)
34
20
TAR-34802
Hexagonal socket head cap screw M4×8…4 screws
80
34
20
(35)
Light
Sources
Index
60
(22)
70
4 20 20
X axis clamp
30
50
51
30
Y axis clamp
6-M4 depth 5
4-4.5 mounting hole
8 counterbore
16
50
60 (22) 60
20 20
4
X axis clamp
30
50
30
41
80
Y axis clamp
6-M4 depth 5
4-4.5 mounting hole
8 counterbore
16
50
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
TAR-38652-M6/38652UU
Hexagonal socket head cap screw M6×10…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
7-C depth 8
65
(14)
A
A
X axis clamp
66
3
Part Number
65
38
A
30
B
A
(mm)
(14)
46 30
Y axis clamp
4-D mounting hole
4-11 counterbore
B
(mm)
C
18
B
D
(mm)
TAR-38652-M6 25 50 M6 P1 6.5
TAM-38652UU 25.4 50.8 1/4-20UNC 7
TAR-381202-M6/381202UU
Hexagonal socket head cap screw M6×10…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
65
(14)
66
A
A
X axis clamp
3
7-C depth 8
Part Number
120 (11)
38
A
30
B
65
A
(mm)
30
Y axis clamp
46
4-D mounting hole
4-11 counterbore
B
(mm)
65
C
18
D
(mm)
TAM-381202-M6 25 50 M6 P1 6.5
TAM-381202UU 25.4 50.8 1/4-20UNC 7
B
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E083

Manual Positioners
X axis Long Travel Leadscrew Stages
LST Stage size □160mm
Long travel type leadscrew stages for X-axis adjustment.
Application
Systems
Optics &
Optical
Coatings
Holders
◦Linear bearings are used for the positioning slide, and the leadscrew is either 2mm pitch (LST-16100/16200) or 5mm
pitch (LST-16400), suitable for relatively less frequent operations that require long travel.
◦Convenient crank style handle for adjustment.
◦Tapped holes on the table top allow use in combination with other fine drive stages
Guide
▶To use the LST series in combination with XY axis stages, contact
our International Sales Division.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC LST-16100 LST-16100-M6 LST-16200 LST-16200-M6 LST-16400 LST-16400-M6
INCH − LST-16100UU − LST-16200UU − LST-16400UU
Table Size [mm] 160×160 160×160 160×160 160×160 160×160 160×160
Axes of Travel
Travel [mm] ±50 ±50 ±100 ±100 ±200 ±200
Screw Pitch [mm] 2 2 2 2 5 5
Bearing type
Primary Material
Finish
X axis
Linear bearing
Aluminum
Black anodized
Load Capacity [N] 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf)
Travel Accuracy Straightness [μm] 10 10 10 10 20 20
Max. Moment Pitch [N・m] 7.8 7.8 7.8 7.8 7.8 7.8
Capacity
Roll [N・m] 5.8 5.8 5.8 5.8 5.8 5.8
Pitch [″/N・cm] 0.25 0.25 0.25 0.25 0.25 0.25
Moment Stiffness
Roll [″/N・cm] 0.5 0.5 0.5 0.5 0.5 0.5
Parallelism [μm] 100 100 150 150 200 200
Weight [kg] 4.8 4.8 5.5 5.5 7.0 7.0
E084
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Catalog
Code
W7023
Outline Drawing
LST-16100/16200/16400
Hexagonal socket head cap screw M6×22…4 screws, Spring washers, Flat washers
A
160
140
90
25 25 25 25
(70
Application
Systems
Optics &
Optical
Coatings
Holders
165
160
140
90
25 25 25 25
150
Bases
Manual
Stages
(12
M16 P1 depth 6
4-M6 P1 depth 8
28-M4 depth 8
Clamp
Actuators
C±D
75
12
B
43
4-7 mounting hole
Part Number
A
(mm)
B
(mm)
C
(mm)
D
(mm)
LST-16100 290 250 145 50
LST-16200 390 350 195 100
LST-16300 590 550 295 200
Motoeized
Stages
Light
Sources
LST-16100-M6/16200-M6/16400-M6
Hexagonal socket head cap screw M6×22…4 screws, Spring washers, Flat washers
Index
A
(70
160
25
140
25 25 25
Guide
X axis Stages
165
160
140
25 25
25
150
XY axis Stages
Z axis Stages
25
XZ axis Stages
XYZ axis Stages
(12
29-M6 P1depth 8
Clamp
θ axis Stages
C±D
Goniometer
75
43
Part Number
A
(mm)
B
(mm)
C
(mm)
D
(mm)
LST-16100-M6 290 250 145 50
Inclination
Vacuum
12
B
4-7 mounting hole
LST-16200-M6 390 350 195 100
LST-16300-M6 590 550 295 200
LST-16100UU/16200UU/16400UU
A
160
139.7
25.4 25.4 25.4 25.4
Hexagonal socket head cap screw 1/4-20UNC×7/8…4 screws, Spring washers, Flat washers
(70
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
165
160
139.7
25.4 25.4
25.4
150
Ohters
25.4
□15mm
□25mm
(12
29-1/4-20UNC depth 8
Clamp
□40mm
□60mm
C±D
□65mm
□80mm
75
12
B
43
4-7 mounting hole
Part Number
A
(mm)
B
(mm)
C
(mm)
D
(mm)
LST-16100UU 290 250 145 50
LST-16200UU 390 350 195 100
LST-16300UU 590 550 295 200
□100mm
□120mm
Others
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E085

Manual Positioners
Z axis Steel Extended Contact Slide Stages TSD-3 Stage size □25/□40/□60/□65mm
Z axis Steel Extended Contact Slide Stages (Inverted) TSD-UD Stage size □60/□65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Flat Z axis stages transmit the micrometer motion from a horizontal direction to a vertical direction
using a pivot mechanism.
Stable in every direction and allowing precise height adjustment due to the steel balls contacting
the R groove of the guide at four points during travel.
◦The TSD-UD stages are hanging type stages which the Z axis steel extended contact slide stages in the TSD series
could not offer.These stages enable configuration of optical systems or camera alignment on walls or ceilings which has
been impossible so far.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
Guide
▶Vacuum-compatible stainless steel stages (TSDS) are also available.
E204
Attention
▶Since the structure uses the principle of leverage, the feed rate
fluctuates against the scale depending on the travel (about
±0.02mm for micrometer head 0.5mm/rotation).
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Specifications
METRIC TSD-253 TSD-403 TSD-603 TSD-653-M6 TSD-603UD TSD-653UD-M6
Part Number
INCH − TSD-403UU − TSD-653UU − TSD-653UDUU
Table Size [mm] 25×25 40×40 60×60 65×65 60×60 65×65
Axes of Travel
Z axis
Travel [mm] ±3 ±3 ±5 ±5 ±5 ±5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Steel
(Upper and lower plate: Aluminum)
Finish Black matte Black matte / Black anodized
Load Capacity [N] 29.4 (3.0kgf) 88.3 (9.0kgf) 147 (15.0kgf) 147 (15.0kgf) 98 (10.0kgf) 98 (10.0kgf)
Travel Accuracy Straightness [μm] 2.5 2.5 2.5 2.5 2.5 2.5
Ball Guide
Crossed Roller
Dovetail
Max. Moment
Capacity
Moment Stiffness
Pitch [N・m] 1.0 3.9 6.9 6.9 6.9 6.9
Roll [N・m] 1.0 3.9 6.9 6.9 6.9 6.9
Pitch [″/N・cm] 5.0 1.2 0.41 0.41 0.41 0.41
Roll [″/N・cm] 5.0 1.2 0.41 0.41 0.41 0.41
Lapping
V Groove Screw
Ohters
Parallelism [μm] 80 80 80 80 80 80
Running Parallelism [μm] 15 20 20 20 20 20
Options FP *1 FP *1 FP *2 /DM/WP FP *2 /DM/WP − −
Weight [kg] 0.1 0.25 1.0 1.1 1.0 1.1
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Option
Option Code
FP
Fine-pitch Screw Adjusters
Compatible product
Products Name
Part Number
Lead of Actuator
[mm/rotation]
Micrometer Readable Resolution
[mm]
FPSA-42525 *1
FPSA-62540 *2 0.25 −
Coars: 0.5
DM Differential Micrometer Heads MHF2-13F
Fine: 0.025
Coars: 0.25
WP Sub-micron Worm Drive Micrometer Heads WGP-13
Fine: 0.025
* Please add an option code as the part number suffix to specify various optional specifications.
* The load capacity of the FP type is 39.2N (4.0kgf).
Coars: 0.01
Fine: 0.0005
Coars: 0.005
Fine: 0.0005
E008
E086
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Catalog
Code
Catalog
Code
W7041
W7513
Outline Drawing
TSD-253
Hexagonal socket head cap screw M2×6…3screws
7-M2 depth 4 25 MAX38
10 10
3-2.4 mounting hole
20 Clamp
25 (3)
10 10
20
TSD-403/403UU
Hexagonal socket head cap screw M3×8…3screws
Hexagonal socket head cap screw 6-32UNC×5/16…3screws (UU)
40 MAX32
7-C depth 5
A A
3-D mounting hole
40
A
A
Clamp
B
B
Application
Systems
Optics &
Optical
Coatings
Holders
3.5
34.3
2
43.5
Bases
24±3
4 4
7
34±3
5
5
10
Manual
Stages
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TSD-403 16 32 M3 3.5
TSD-403UU 15.875 31.75 6-32UNC 4
Actuators
Motoeized
Stages
TSD-603
7-M4 depth 6
Hexagonal socket head cap screw M4×12…4 screws
60 (7)
25 25
32
TSD-653-M6/653UU
Hexagonal socket head cap screw M6×12…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/2…4 screws (UU)
7-C depth 6
65
A A
(4.5)
Light
Sources
Index
60
25
25
32
50
65
A A
B
Guide
X axis Stages
MAX44
4-M3
depth 6
55±5
7 7
M16 P1 depth 6
Clamp
15
55±5 MAX41
7
Clamp
15
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
50
4-4.5 mounting hole
7
Part Number
B
A
(mm)
4-7 mounting hole
B
(mm)
TSD-653-M6 25 50 M6 P1
TSD-653UU 25.4 50.8 1/4-20UNC
C
θ axis Stages
Goniometer
Inclination
Vacuum
TSD-603UD
7-M4 depth 6
Hexagonal socket head cap screw M4×12…4 screws
60 (7)
25 25
32
TSD-653UD-M6/653UDUU
Hexagonal socket head cap screw M6×12…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/2…4 screws (UU)
7-C depth 6
65
A A
(4.5)
Ball Guide
Crossed Roller
Dovetail
60
25
32
50
65
A
B
Lapping
25
A
V Groove Screw
MAX44
4-M3
depth 6
55±5
7 7
50
M16 P1 depth 6
Clamp
4-4.5 mounting hole
15
MAX41
55±2.5
7 7
Part Number
B
A
(mm)
Clamp
4-7 mounting hole
B
(mm)
TSD-653UD-M6 25 50 M6 P1
TSD-653UDUU 25.4 50.8 1/4-20UNC
15
C
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E087

Manual Positioners
Z axis Steel Extended Contact Slide Stages
TSD-3 Stage size □80/□100/□120mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Flat Z axis stages transmit the micrometer motion from a horizontal direction to a vertical direction
using a pivot mechanism.
Stable in every direction and allowing precise height adjustment due to the steel balls contacting
the R groove of the guide at four points during travel.
Attention
▶The structure does not allow upside down installation since the
spring inside the stage might not be able to withstand the load and
may stretch.
▶Since the structure uses the principle of leverage, the feed rate
fluctuates against the scale depending on the travel (about ±0.02mm
for micrometer head 0.5mm/rotation).
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Specifications
Part Number
METRIC TSD-803 TSD-1003 TSD-1203 TSD-1203-M6
INCH − − − TSD-1203UU
Table Size [mm] 80×80 100×100 120×120 120×120
Axes of Travel
Z axis
Travel [mm] ±5 ±10 ±10 ±10
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Extended contact ball guide
Steel
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Finish
Black matte
Load Capacity [N] 147 (15.0kgf) 245 (25.0kgf) 245 (25.0kgf) 245 (25.0kgf)
Travel Accuracy Straightness [μm] 2.5 2.5 2.5 2.5
Max. Moment Pitch [N・m] 6.9 9.8 9.8 9.8
Capacity
Roll [N・m] 6.9 9.8 9.8 9.8
Pitch [″/N・cm] 0.41 0.36 0.36 0.36
Moment Stiffness
Roll [″/N・cm] 0.41 0.36 0.36 0.36
Parallelism [μm] 80 100 100 100
Running Parallelism [μm] 20 20 20 20
Options FP *1 FP *2 FP *2 FP *2
Weight [kg] 1.2 3.5 4.2 4.2
Option
Option Code
Compatible product
Products Name
Part Number
Lead of Actuator
[mm/rotation]
Micrometer Readable Resolution
[mm]
FPSA-62540
FP
*1
Fine-pitch Screw Adjusters
FPSA-62555 *2 0.25 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The load capacity of the FP type is 39.2N (4.0kgf).
E088
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Catalog
Code
W7042
Outline Drawing
TSD-803
Hexagonal socket head cap screw
M4×8…4 screws
4-M4 depth 6
80
70
25 25
7 7
Application
Systems
Optics &
Optical
Coatings
80
70
25
25
70
Holders
MAX34
7-M4 depth 6
M16 P1 depth 6
Bases
55±5
Clamp
15
Manual
Stages
2.5
70
4-4.5 mounting hole
8 counterbore
Actuators
TSD-1003
Hexagonal socket head cap screw
M4×10…4 screws, Spring washers
4-M4 depth 8
100 (6)
90
25 25
9 9
Motoeized
Stages
Light
Sources
100
MAX87
90±10 90
50
6-M4 depth 8
M16 P1 depth 6
Clamp
10.5
90
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
4.5
90
4-4.5 mounting hole
8 counterbore
θ axis Stages
TSD-1203
Hexagonal socket head cap screw M4×10…4 screws, Spring washers
120
50 50
7-M4 depth 8
25 25
9 9
TSD-1203-M6/1203UU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
21-C depth 8
A
120
A A
A
9
9
Goniometer
Inclination
Vacuum
MAX77 120
50 50
50
6-M4 depth 8
M16 P1 depth 6
100
120
MAX77
A A A
A
B
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
Clamp
10.5
Clamp
10.5
□15mm
□25mm
90±10
90±10
□40mm
□60mm
□65mm
4.5
100
4-4.5 mounting hole
8 counterbore
2
B
4-7 mounting hole
11 counterbore
□80mm
□100mm
Part Number
A
(mm)
B
(mm)
TSD-1203-M6 25 100 M6 P1
TSD-1203UU 25.4 101.6 1/4-20UNC
C
□120mm
Others
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E089

Manual Positioners
Z axis Steel Extended Contact Slide Stages (Vertical)
TSD-L Stage size □25/□40/□60/□65mm
Z axis stages integrating a stage and Z bracket.
Application
Systems
◦Hardened Steel linear stages with integrated bearing ways for superior stiffness, accuracy and durability
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Specifications
Part Number
METRIC TSD-253L TSD-403L TSD-603L TSD-653L-M6
INCH − TSD-403LUU − TSD-653LUU
(Opposite Model)
METRIC TSD-253RL TSD-403RL TSD-603RL TSD-653RL-M6
INCH − TSD-403RLUU − TSD-653RLUU
Table Size [mm] 25×25 40×40 60×60 65×65
Axes of Travel
Z axis
Travel [mm] ±3 ±6.5 ±6.5 ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Finish
Super black chrome
Load Capacity [N] 14.7 (1.5kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)
Vacuum
Ball Guide
Crossed Roller
Travel Accuracy
Max. Moment
Capacity
Straightness [μm] 1 1 1 1
Pitch [ ″] 30 25 25 25
Yaw [ ″] 25 15 15 15
Pitch [N・m] 2.2 5.0 10.0 10.0
Roll [N・m] 3.5 5.0 9.0 9.0
Yaw [N・m] 2.0 5.0 10.0 10.0
Pitch [″/N・cm] 1.8 0.3 0.08 0.08
Dovetail
Lapping
V Groove Screw
Ohters
Moment Stiffness Roll [″/N・cm] 1.1 0.2 0.05 0.05
Yaw [″/N・cm] 1.1 0.23 0.08 0.08
Running Parallelism [μm] 15 20 20 20
Squareness [μm] 30 30 30 30
Options FP *1 FP *2 /DM/WP FP *2 /DM/WP FP *2 /DM/WP
Weight [kg] 0.1 0.3 0.8 1.0
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Option
Option Code
FP
Fine-pitch Screw Adjusters
Compatible product
Products Name
Part Number
Lead of Actuator
[mm/rotation]
Micrometer Readable Resolution
[mm]
FPSA-42525 *1
FPSA-62540 *2 0.25 −
Coars: 0.5
DM Differential Micrometer Heads MHF2-13F
Fine: 0.025
Coars: 0.25
WP Sub-micron Worm Drive Micrometer Heads WGP-13
Fine: 0.025
* Please add an option code as the part number suffix to specify various optional specifications.
Coars: 0.01
Fine: 0.0005
Coars: 0.005
Fine: 0.0005
E008
E090
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Catalog
Code
W7044
Outline Drawing
TSD-253L
Hexagonal socket head cap screw M2×6…4 screws
20 4-2.4 mounting hole
Clamp
7
M4 depth 4
20
6-M2 depth 4
TSD-253RL
Hexagonal socket head cap screw M2×6…4 screws
20
4-2.4 mounting hole
Clamp
7
M4 depth 4
20
6-M2 depth 4
Application
Systems
Optics &
Optical
Coatings
Holders
3
25±3
61.2
10
10
25
37.5
37.5
25
10
10
61.2
25±3
3
Bases
12.5
17.5
TSD-403L/403LUU
2.5 12 25
Hexagonal socket head cap screw M3×6…4 screws
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
B 4-E mounting hole
Clamp
10.5
0.5
35±6.5
82
A
(7)
D depth 5
A 8-C depth 5
A
A
40
55
(7) 25 12
TSD-403RL/403RLUU
Hexagonal socket head cap screw M3×6…4 screws
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
B 4-E mounting hole
Clamp
55
D depth 5
8-C depth 5
40
A
A
A
A
82
35±6.5
2.5
0.5
12.5
17.5
10.5
3
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
3
A
24
F
19.5
40
(9.5)
(9.5)
40 19.5
F
A
24
Part Number
A
(mm)
B
(mm)
C
D
E
(mm)
F
(mm)
TSD-403L 16 32 M3 M6 P1 3.5 4
TSD-403LUU 15.875 31.75 6-32UNC 1/4-20UNC 4 3.625
TSD-603L
Hexagonal socket head cap screw M4×8…4 screws
50
4-4.5 mounting hole
Part Number
A
(mm)
B
(mm)
C
D
E
(mm)
F
(mm)
TSD-403RL 16 32 M3 M6 P1 3.5 4
TSD-403RLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 3.625
TSD-603RL
Hexagonal socket head cap screw M4×8…4 screws
50
4-4.5 mounting hole
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
12
25
25
32
4-M3 depth 5
9-M4 depth 6
4-M3 depth 5
9-M4 depth 6
25
25
32
12
XYZ axis Stages
θ axis Stages
Goniometer
3.5
50±6.5
96.3
32
25
25
60
80
80
60
25
25
32
96.3
50±6.5
3.5
Inclination
Vacuum
4
25
35
5
20.8
60 (11)
(11)
60
20.8 5
25
35
4
TSD-653L-M6/653LUU
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
B
4-D mounting hole
11 counterbore
Clamp
12
A A 9-C depth 6
TSD-653RL-M6/653RLUU
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
4-D mounting hole
B
11 counterbore
Clamp
12
9-C depth 6 A A
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
1.5
A E
39.6
6
50±6.5
( 96.3)
20.8 65
(11)
Part Number
A
(mm)
B
(mm)
C
D
(mm)
E
(mm)
TSD-653L-M6 25 50 M6 P1 6.5 7.5
TSD-653LUU 25.4 50.8 1/4-20UNC 7 7.1
A
A
65
82.5
82.5
65
A
A
(11)
65
20.8
(96.3)
50±6.5
6
E A
39.6
Part Number
A
(mm)
B
(mm)
C
D
(mm)
E
(mm)
TSD-653RL-M6 25 50 M6 P1 6.5 7.5
TSD-653RLUU 25.4 50.8 1/4-20UNC 7 7.1
1.5
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E091

Manual Positioners
Catalog
L Angle Brackets TSD-LB Code W7133
L angle brackets for the TSD-L series.
Application
Systems
Optics &
Optical
Coatings
Attention
▶There are limit on load capacity. Please contact our International
Sales Division for more information.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Outline Drawing
TSD-253LB
Example (Stage are not included)
Hexagon socket head cap screw (stainless steel construction) M2×6…4 screws
TSD-403LB-M3/403LBUU
Hexagonal socket head cap screw M3×6…4 screws (M3)
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
3-C depth 6
4-M2 through hole
Light
Sources
Index
17.5
M4 through hole
20
25
20
10
4-M2 through hole
25
3
E
20
D through hole
20
A A
40
B
A
A
5-C through hole
40
2
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
TSD-603LB
10 12.5
25
4-φ2.4
φ4 counterbore
Hexagonal socket head cap screw M4×10…4 screws
3-M4 depth 8
6
Part Number
A
(mm)
20
A
TSD-653LB-M6/653LBUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
40
7
4-φF
φG counterbore
B
(mm)
C
3-D depth 7
D
7
E
(mm)
F
(mm)
G
(mm)
TSD-403LB-M3 16 32 M3 M6 P1 28 3.5 6
TSD-403LBUU 15.88 31.75 6-32UNC 1/4-20UNC 27.98 4 6.5
Inclination
40
60
25
F
A
Vacuum
20
32
20
25
C
20
A
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
4-M2 depth 4
Both sides
M6 P1
Specifications
METRIC TSD-253LB TSD-403LB-M3 TSD-603LB TSD-653LB-M6
INCH − TSD-403LBUU − TSD-653LBUU
Part
Number
20
32
25 25
60
50
5-M4 through hole
4-M3 through hole
30
25
60
9.5
4-φ4.5
φ8 counterbore
60
9.5
4.5
4-M2 depth 4
Both sides
Part Number
Primary Material
Aluminum
Finish
Black anodized
Weight [kg] 0.03 0.05 0.07 0.08
A
20
C
65
B
A
A
(mm)
6-D through hole
4-E through hole
A 32.5
B
(mm)
65
9.5
4-φ7
φ11 counterbore
C
(mm)
D
65
9.5
2
E
F
(mm)
TSD-653LB-M6 25 50 28 M6 P1 M3 45
TSD-653LBUU 25.4 50.8 27.98 1/4-20UNC 6-32UNC 45.2
E092
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Catalog
Z axis General-purpose type Stainless Stages TSDH-L Stage size □25/□40/□60mm Code W7131
High precision and high stiffness stainless steel stages that have guide grooves on both the
quenched stainless steel stage main body and movable table.
◦SUS440C as main material for this product. To prevent rusting, the finish has been processed with electroless nickel plating.
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Outline Drawing
TSDH-253L
Hexagon socket head cap screw
(stainless steel construction) M2×8…2 screws
2-φ2.4
mounting hole
20
TSDH-403L
Hexagon socket head cap screw
(stainless steel construction) M3×8…2 screws
32
2-φ3.5 mounting hole
φ6 counterbore
TSDH-603L
50
32
Hexagon socket head cap screw
(stainless steel construction)
M3×8…2 screws, M4×12…2 screws
2-φ4.5 mounting hole
φ8 counterbore
2-φ3.5 mounting hole
φ6 counterbore
Motoeized
Stages
Light
Sources
M4 depth 4
6-M2 depth 3
M2 depth 2.5
37.5
Clamp
25
10 10
10 10
(7) 25 15.2
53
25±3
5.7
12
11.5
26
28.5
5.5
Specifications
Part Number METRIC TSDH-253L TSDH-403L TSDH-603L
Table Size [mm] 25×25 40×40 60×60
Axes of Travel
Z axis
Travel [mm] ±3 ±6.5 ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
SUS440C quench hardened
Finish
Electroless nickel
Load Capacity [N] 9.8 (1.0kgf) 19.6 (2.0kgf) 49 (5.0kgf)
Straightness [μm] 1 1 1
Travel Accuracy Pitch [ ″] 30 30 25
Yaw [ ″] 25 25 15
Pitch [N・m] 0.7 1.0 1.0
Max. Moment
Capacity
Roll [N・m] 0.5 1.0 1.0
Yaw [N・m] 0.4 1.0 1.0
Pitch [″/N・cm] 4.7 0.9 0.6
Moment Stiffness Roll [″/N・cm] 3.2 0.8 0.6
Yaw [″/N・cm] 3.0 0.6 0.4
Running Parallelism [μm] 20 20 20
Squareness [μm] 30 30 30
Options FP *1 FP *2 FP *2
Weight [kg] 0.1 0.25 0.65
Option
Option Code
55
Clamp
M6P1 depth 6
7-M3 depth 5
40
16
16
(11)
16
Compatible product
Products Name
40
16
19.5
80
35±6.5
Part Number
8
15.5
32
36
4
5.5
40
31
4-M3 depth 5
67-M4 depth 6
80
60
25 25
32
Lead of Actuator
[mm/rotation]
Clamp
(11)
32
25 25
60 19.5
M4 depth 5
2-M4 depth 5 8
91
50±6.5
Micrometer Readable Resolution
[mm]
FPSA-42525
FP
*1
Fine-pitch Screw Adjusters
FPSA-62540 *2 0.25 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
4
15.5
45
7
9.5
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E093

Manual Positioners
Z axis Steel Extended Contact Slide Stages (Vertical Mounting)
TSD-SZ Stage size □25/□40/□60/□65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Z axis stages designed for mounting on a vertical surface with the micrometer head on the
movable stage side and the micrometer stop on the bottom side of the stage.
◦Hardened Steel linear stages with integrated bearing ways for superior stiffness, accuracy and durability.
Guide
▶Products fitted with a long table are also available.
E096
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
Specifications
θ axis Stages
Goniometer
Inclination
Vacuum
Part Number
METRIC TSD-251SZ TSD-401SZ TSD-601SZ TSD-651SZ25-M6
INCH − TSD-401SZUU − TSD-651SZ25UU
(Opposite Model)
METRIC TSD-251SRZ TSD-401SRZ TSD-601SRZ −
INCH − TSD-401SRZUU − −
Table Size [mm] 25×25 40×40 60×60 65×65
Axes of Travel
Z axis
Travel [mm] ±3 ±6.5 ±6.5 ±12.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Bearing type
Primary Material
Finish
Extended contact ball guide
Steel
Super black chrome
Load Capacity [N] 14.7 (1.5kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)
Travel Accuracy Straightness [μm] 1 1 1 1
Max. Moment Pitch [N・m] 2.2 5.0 8.0 8.0
Capacity
Roll [N・m] 2.1 5.0 8.0 8.0
Moment Stiffness Pitch [″/N・cm] 1.63 0.31 0.2 0.2
Running Parallelism [μm] 10 10 10 10
Options FP *1 FP *2 FP *2 FP *3
Weight [kg] 0.07 0.2 0.5 0.6
Option
Option Code
FP
Fine-pitch Screw Adjusters
Compatible product
Products Name
Part Number
Lead of Actuator
[mm/rotation]
Micrometer Readable Resolution
[mm]
FPSA-42525 *1
FPSA-62540 *2
0.25 − E008
FPSA-62550 *3
* Please add an option code as the part number suffix to specify various optional specifications.
E094
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Catalog
Code
W7049
Outline Drawing
TSD-251SZ
1.5
Clamp
M4 depth 4
7-M2 depth 4
25
10 10
Hexagonal socket head cap screw M2×4…4 screws
20
10 10
(7) 25 13.3
4-2.4 mounting hole
4 counterbore
40.7
12.5±3
12
7
20
TSD-251SRZ
20
12
7
12.5±3
Hexagonal socket head cap screw M2×4…4 screws
4-2.4 mounting hole
4 counterbore
40.7
(13.5)
20
10 10
1.5
M4 depth 4
7-M2 depth 4
10 10
25
25 (7)
Clamp
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
TSD-401SZ/401SZUU
Hexagonal socket head cap screw M3×6…4 screws
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
TSD-401SRZ/401SRZUU
Hexagonal socket head cap screw M3×6…4 screws
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
Actuators
1.5
B
4-E mounting hole
F counterbore
4-E mounting hole
F counterbore
B
1.5
Motoeized
Stages
Clamp
D depth 5
8-C depth 5
A
A
16
8
16
8
A
A
Clamp
D depth 5
8-C depth 5
Light
Sources
40
A A
65.5
20±6.5
B
B
20±6.5
65.5
A A
40
Index
(9.5)
Part Number
A
(mm)
40 19.5
B
(mm)
C
D
E
(mm)
F
(mm)
TSD-401SZ 16 32 M3 M6 P1 3.5 6
TSD-401SZUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
Part Number
A
(mm)
B
(mm)
19.5 40 (9.5)
C
D
E
(mm)
F
(mm)
TSD-401SRZ 16 32 M3 M6 P1 3.5 6
TSD-401SRZUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
Guide
X axis Stages
XY axis Stages
Z axis Stages
TSD-601SZ
1.5
Hexagonal socket head cap screw M4×6…4 screws
50
4-4.5 mounting hole
8 counterbore
TSD-601SRZ
Hexagonal socket head cap screw M4×6…4 screws
4-4.5 mounting hole
50
8 counterbore
1.5
XZ axis Stages
XYZ axis Stages
Clamp
Clamp
θ axis Stages
4-M3 depth 5
8-M4 depth 5
25 25
32
M16 P1 depth 6
18
9.5
9.5
18
M16 P1 depth 6
25
32
25
4-M3 depth 5
8-M4 depth 5
Goniometer
Inclination
60
25 25
32
71
30±6.5
50
50
30±6.5
71
32
25 25
60
Vacuum
(11)
60 20
20
60 (11)
Ball Guide
TSD-651SZ25-M6/651SZ25UU
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
B 4-7
D counterbore
1.5
Crossed Roller
Dovetail
Lapping
V Groove Screw
11
Ohters
9-C depth 6
65
A
A
Part Number
A
(11) 65
A
A
(mm)
20
MAX71.5
B
(mm)
32.5±12.5
C
20
B
D
(mm)
TSD-651SZ25-M6 25 50 M6 P1 11
TSD-651SZ25UU 25.4 50.8 1/4-20UNC 12
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E095

Manual Positioners
Z axis Steel Extended Contact Slide Stages (Vertical Mounting)
TSD-SZ
Application
Systems
Optics &
Optical
Coatings
Z axis stages designed for mounting on a vertical surface with the micrometer head on the
movable stage side and the micrometer stop on the bottom side of the stage.
The rectangular shape minimizes the footprint while providing longer travel.
◦Hardened Steel linear stages with integrated bearing ways for superior stiffness, accuracy and durability.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
METRIC TSD-25501SZ TSD-40801SZ TSD-60121SZ TSD-65121SZ-M6
Part Number
INCH − TSD-40801SZUU − TSD-65121SZUU
Table Size [mm] 25×50 40×80 60×120 65×120
Axes of Travel
Z axis
Travel [mm] ±6.5 ±12.5 ±20 ±20
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Finish
Super black chrome
Load Capacity [N] 9.8 (1.0kgf) 19.6 (2.0kgf) 29.4 (3.0kgf) 29.4 (3.0kgf)
Travel Accuracy Straightness [μm] 2 2 2 3
Max. Moment Pitch [N・m] 2.0 2.6 3 3
Capacity
Roll [N・m] 1.4 2.6 3 3
Moment Stiffness Pitch [″/N・cm] 1.12 0.15 0.1 0.1
Running Parallelism [μm] 10 10 10 10
Weight [kg] 0.1 0.4 1.0 1.2
E096
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Catalog
Code
W7132
Outline Drawing
TSD-25501SZ
Hexagonal socket head cap screw M2×4…4 screws
1.5
Clamp
15-M2 depth 4
20
10 10
4-2.4 mounting hole
4 counterbore
12
7
TSD-40801SZ/40801SZUU
Hexagonal socket head cap screw M3×6…4 screws
Hexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)
1.5
Clamp
15-C depth 6
A
B
A
16
8
4-D
E counterbore
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
50
10 10 10 10
(6.5) 25 13.3
65.4
25±6.5
40
80
A A A A
(9.5)
40
20
MAX112
40±12.5
2×B
Manual
Stages
Actuators
Part Number
A
(mm)
B
(mm)
C
D
(mm)
E
(mm)
TSD-40801SZ 16 32 M3 3.5 6
TSD-40801SZUU 15.875 31.75 6-32UNC 4 6.5
Motoeized
Stages
Light
Sources
TSD-60121SZ
Hexagonal socket head cap screw M4×8…4 screws
TSD-65121SZ-M6/65121SZUU
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
Index
3.5
Clamp
50
8-4.5 mounting hole
8 counterbore
20
10.5
1.5
Clamp
B
8-D
E counterbore
10.5
Guide
X axis Stages
XY axis Stages
15-M4 depth 6
4-8
(Fixing screw
insertion hole)
120
25 25 25 25
25 25
172.7
60±20
50
100
15-C depth 6
120
A A A A
A
A
MAX192.7
60±20
B
2×B
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
(11)
60
23
(11)
65
23
20
Part Number
A
(mm)
B
(mm)
C
D
(mm)
E
(mm)
TSD-65121SZ-M6 25 50 M6 P1 6.5 11
TSD-65121SZUU 25.4 50.8 1/4-20UNC 7 12
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E097

Manual Positioners
Z axis Aluminum Crossed Roller Slide Stages (Vertical)
TAM-3L Stage size □40/□60/□65/□80mm
Application
Systems
Light-weight Z axis aluminum stages integrating a stage and Z bracket.
Crossed roller guide enables smooth travel.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Specifications
Part Number
METRIC TAM-403L TAM-603L TAM-653L-M6 TAM-803L
INCH TAM-403LUU − TAM-653LUU −
(Opposite Model)
METRIC TAM-403RL − TAM-653RL-M6 −
INCH TAM-403RLUU − TAM-653RLUU −
Table Size [mm] 40×40 60×60 65×65 80×80
Axes of Travel
Z axis
Travel [mm] ±6.5 ±6.5 ±6.5 ±7.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Crossed roller
Primary Material
Finish
Aluminum
Black anodized
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)
Travel Accuracy Straightness [μm] 2 2 2 2
Max. Moment Pitch [N・m] 3.0 5.0 5.0 7.0
Capacity
Roll [N・m] 3.0 5.0 5.0 7.0
Moment Stiffness Pitch [″/N・cm] 0.66 0.3 0.3 0.12
Running Parallelism [μm] 20 20 20 20
Squareness [μm] 30 30 30 30
Options FP *1 /DM/WP FP *1 /DM/WP FP *1 /DM/WP FP *2
Weight [kg] 0.15 0.3 0.4 0.6
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Option
Option Code
FP
Fine-pitch Screw Adjusters
Compatible product
Products Name
Part Number
Lead of Actuator
[mm/rotation]
Micrometer Readable Resolution
[mm]
FPSA-62540 *1
FPSA-62550 *2 0.25 −
Coars: 0.5
DM Differential Micrometer Heads MHF2-13F
Fine: 0.025
Coars: 0.25
WP Sub-micron Worm Drive Micrometer Heads WGP-13
Fine: 0.025
* Please add an option code as the part number suffix to specify various optional specifications.
Coars: 0.01
Fine: 0.0005
Coars: 0.005
Fine: 0.0005
E008
E098
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Catalog
Code
W7050
Outline Drawing
TAM-403L/403LUU
Hexagonal socket head cap screw M3×10…2 screws
Hexagonal socket head cap screw 6-32UNC×3/8…2 screws (UU)
10.4
B
2-3.8 mounting hole
Clamp
TAM-403RL/403RLUU
Hexagonal socket head cap screw M3×10…2 screws
Hexagonal socket head cap screw 6-32UNC×3/8…2 screws (UU)
2-3.8 mounting hole
Clamp
B
10.4
Application
Systems
Optics &
Optical
Coatings
Holders
A
A
C depth 7
8-D depth 5
C depth 7
8-D depth 5
A
A
Bases
30±6.5
75.5
A
A
40
50
40
50
A
A
75.5
30±6.5
Manual
Stages
5
24
27.5
6
21
40
(12)
(12) 40 21
6
24
27.5
5
Actuators
Part Number
A
(mm)
B
(mm)
TAM-403L 16 32 M6 P1 M3
TAM-403LUU 15.875 31.75 1/4-20UNC 6-32UNC
C
D
Part Number
A
(mm)
B
(mm)
TAM-403RL 16 32 M6 P1 M3
TAM-403RLUU 15.875 31.75 1/4-20UNC 6-32UNC
C
D
Motoeized
Stages
TAM-603L
Hexagonal socket head cap screw M4×12…4 screws
TAM-803L
Hexagonal socket head cap screw M4×12…4 screws
Light
Sources
4-4.5 mounting hole
50
50
4-4.5 mounting hole
Index
Clamp
Clamp
Guide
12.3
25 25
M16 P1 depth 6
8-M4 depth 8
14.5
70
25 25
8-M4 depth 8
4-M4 depth 8
X axis Stages
XY axis Stages
Z axis Stages
40±6.5
91
25 25
60
70
60±7.5
125.5
25
25
70
80
100
XZ axis Stages
XYZ axis Stages
θ axis Stages
7
25
58.5
28.5
8.5
21 60
(14)
7
25 33.5
63.5
8.5 22
M16 P1 depth 6 4-M4 depth 8
(PCD62)
80
(14)
4-M3 depth 8
(PCD42)
Goniometer
Inclination
Vacuum
TAM-653L-M6/653LUU
Hexagonal socket head cap screw M6×15…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/8…4 screws (UU)
TAM-653RL-M6/653RLUU
Hexagonal socket head cap screw M6×15…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/8…4 screws (UU)
B
4-E mounting hole
4-E mounting hole
B
Ball Guide
Crossed Roller
35 C
35 C
Dovetail
Lapping
13.8
A
A
Clamp
9-D depth 8
Clamp
9-D depth 8
A
A
13.8
V Groove Screw
Ohters
10
68
Part Number
10
45±6.5
100
A
(mm)
21
B
(mm)
65
C
(mm)
(14)
A
A
D
65
77.5
E
(mm)
TAM-653L-M6 25 50 25 M6 P1 6.5
TAM-653LUU 25.4 50.8 25.4 1/4-20UNC 7
77.5
65
A
A
(14)
Part Number
65
A
(mm)
21
B
(mm)
100
45±6.5
C
(mm)
10
68
D
10
E
(mm)
TAM-653RL-M6 25 50 25 M6 P1 6.5
TAM-653RLUU 25.4 50.8 25.4 1/4-20UNC 7
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E099

Manual Positioners
Z axis Aluminium Stages (Vertical Mounting)
TADC-L Stage size □40/□60mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
The high stiffness integral guide evolved into a separate type offering low price, high stiffness and
lightweight.
◦High quality translation stage with smooth travel. Optimal for positioning and alignment.
◦Because a steel ball travels in contact with the R groove at four points, these stages have stable load capacity in all
directions.
◦Special L angle brackets are attached to the TADC-SZ series.
Guide
▶Vertical mounting type stages without a L angle bracket are also
available.
W7514
Attention
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TADC-403L TADC-603L
INCH TADC-403LUU −
(Opposite Model)
METRIC TADC-403RL TADC-603RL
INCH TADC-403RLUU −
Table Size [mm] 40×40 60×60
Axes of Travel
Z axis
Micrometer Position
Side
Travel [mm] ±6.5 ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 24.5 (2.5kgf) 29.4 (3kgf)
Travel Accuracy Straightness [μm] 3 3
Max. Moment Pitch [N・m] 2.5 4.9
Capacity
Roll [N・m] 2.5 4.9
Moment Stiffness Pitch [″/N・cm] 0.66 0.3
Running Parallelism [μm] 10 10
Options FP FP
Weight [kg] 0.2 0.36
Option
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
E100
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Catalog
Code
W7135
Outline Drawing
TADC-403L/403LUU
Hexagon socket head cap screw (stainless steel construction) M3×8…2 screws
Hexagon socket head cap screw
(stainless steel construction) 6-32UNC×5/16…2 screws (UU)
B
2-4 mounting hole
6.5 counterbore
Clamp
TADC-403RL/403RLUU
Hexagon socket head cap screw (stainless steel construction) M3×8…2 screws
Hexagon socket head cap screw
(stainless steel construction) 6-32UNC×5/16…2 screws (UU)
B
2-4 mounting hole
6.5 counterbore
Application
Systems
Optics &
Optical
Coatings
Holders
8
Clamp
8
Bases
A
A
C
7-D depth 6
C
7-D depth 6
A
A
Manual
Stages
5.5
35±6.5
79.5
A A
40
55
55
40
A A
79.5
35±6.5
5.5
Actuators
4
15.5
32
36
19.5
40
(11)
(11) 40 19.5
15.5
32
36
4
Motoeized
Stages
Part Number
A
(mm)
B
(mm)
TADC-403L 16 32 M6 P1 depth 5 M3
TADC-403LUU 15.875 31.75 1/4-20UNC depth 5 6-32UNC
C
D
Part Number
A
(mm)
B
(mm)
TADC-403RL 16 32 M6 P1 depth 5 M3
TADC-403RLUU 15.875 31.75 1/4-20UNC depth 5 6-32UNC
C
D
Light
Sources
Index
TADC-603L
Hexagonal socket head cap screw (stainless steel construction) M3×8…2 screws
TADC-603RL
Hexagonal socket head cap screw (stainless steel construction) M3×8…2 screws
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
2-4.5 mounting hole
8 counterbore
2-3.5 mounting hole
6 counterbore
50
32
33
42
42
33
50
32
2-4.5 mounting hole
8 counterbore
2-3.5 mounting hole
6 counterbore
Goniometer
Inclination
Vacuum
Clamp
Clamp
9.5
25 25
32
4-M3 depth 5
9-M4 depth 6
4-M3 depth 5 25 25
9-M4 depth 6
32
9.5
Ball Guide
Crossed Roller
50±6.5
95
32
25 25
60
60
25
25
32
95
50±6.5
Dovetail
Lapping
V Groove Screw
9.5
7
4
4
Ohters
17.5
47
19.5
60
(11)
(11) 60
19.5
17.5
47
7
9.5
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E101

Manual Positioners
Z axis Preset Stages
TASB-3 Stage size □15/□25/□40/□60/□65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Space-saving, compact Z axis stages with horizontal table top, suitable for less frequent
operations that require fine adjustment.
◦Ideal for less frequent operations, fine adjustment or permanent fixation.
◦These stages have a block shape with minimal protrusions including the adjustment knob, in order to minimizing the
installation space.
Guide
▶A hex wrench with knob and clamping wrench are included.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Mounting Method
Detailed Illustration
Index
Guide
Clamp
Clamp with a screw
from the top
Top mounting
Tapped holes are used as
counterbores because screws
are smaller than tapped holes
and will go in without any
interference.
X axis Stages
XY axis Stages
Z axis Stages
Clamp with a screw
from the bottom
Bottom mounting
Clamp with screws that match
the specification of tapped
holes.
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
The bottom mounting
holes of preset stages
are tapped holes.
These stages allow
mounting from the top or
the bottom, convenient
for securing on optical
breadboards or other
instruments as well as
assembling in systems.
Use the screws of the
sizes listed in the table
on the right for mounting.
About Mounting Holes
Part Number
Secure from
the top
Secure from
the bottom
TASB-153 M2 M2.6
TASB-253 M2 M3
TASB-403 M3 M4
TASB-403UU 6-32UNC −
TASB-603 M4 M5
TASB-653-M6 M6 M8
TASB-653UU 1/4-20UNC 5/16-18UNC
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TASB-153 TASB-253 TASB-403 TASB-603 TASB-653-M6
INCH − − TASB-403UU − TASB-653UU
Table Size [mm] 15×15 25×25 40×40 60×60 65×65
Axes of Travel
Travel [mm] +2 / −0 +3 / −0 +5 / −0 +7 / −0 +7 / −0
Screw Pitch [mm] 0.4 0.5 0.5 0.5 0.5
Bearing type
Primary Material
Finish
Z axis
Dovetail slide method
Brass
Black matte
Load Capacity [N] 4.9 (0.5kgf) 6.9 (0.7kgf) 29.4 (3kgf) 98.1 (10kgf) 98.1 (10kgf)
Travel Accuracy Straightness [μm] 30 30 30 30 30
Max. Moment Pitch [N・m] − 0.3 0.5 1.0 1.0
Capacity
Roll [N・m] − 0.3 0.5 1.0 1.0
Moment Stiffness
Pitch [″/N・cm] − 6.1 4.59 0.7 0.7
Roll [″/N・cm] − 4.1 2.55 1.7 1.7
Parallelism [μm] 100 100 100 100 100
Weight [kg] 0.012 0.05 0.2 0.9 1.1
E102
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Catalog
Code
W7051
Outline Drawing
TASB-153
Hexagonal socket head cap screw M2×5…4 screws, One 0.89mm hex wrench Adjustment hole size 1.8mm, wrench size for Clamp 0.89mm
15
[Enlarged view of Clamp]
10 4-M2 depth 3
Application
Systems
Optics &
Optical
Coatings
15
3 3
15
10
10
10
5.6
Clamp
4-2.2 (Top mounting )
4-M2.6 (Bottom mounting )
10
Clamp
Holders
Bases
TASB-253
4
(Fixing screw insertion hole)
Hexagonal socket head cap screw M2×6…3screws, One 0.89mm hex wrench
25
10 10
6-M2 depth 3.5
M4 depth 4.5
Clamp
wrench size for Clamp 0.89mm
Manual
Stages
Actuators
10 10
3 25
23
3 4.5
3-2.4 (Top mounting)
3-M3 (Bottom mounting)
20
10
Motoeized
Stages
Light
Sources
TASB-403/403UU
G
(Fixing screw insertion hole)
TASB-603
5 40
34 5
0
8
(Fixing screw insertion hole)
A A
6
4
Hexagonal socket head cap screw M3×8…3 screws, One 1.5mm hex wrench
Hexagonal socket head cap screw 6-32UNC×5/16…3 screws, One 1.5mm hex wrench (UU)
A
40
Hexagonal socket head cap screw M4×10…3 screws, One 1.5mm hex wrench
60
A
25 25
32
C depth 5
6-D depth 5
4-M3 depth 8
8-M4 depth 8
Clamp
3-E (Top mounting)
3-F (Bottom mounting)
Clamp
B
A
Part Number
A
(mm)
wrench size for Clamp 1.5mm
hex wrench size for Clamp 1.5mm (UU)
B
(mm)
Adjustment hole size 3mm, wrench size for Clamp 1.5mm
C
D
E
(mm)
TASB-403 16 32 M4 M3 3.3 4-M4 6
F
G
(mm)
TASB-403UU 15.875 31.75 8-32UNC 6-32UNC 4 6.5
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
60
25 25
32
25
Vacuum
5
38
6 8
TASB-653-M6/653UU
11
(Fixing screw insertion hole)
65
4.5
38 7
0
A
A
8
6
3-4.2 (Top mounting)
3-M5 (Bottom mounting)
50
Hexagonal socket head cap screw M6×12…3 screws, One 1.5mm hex wrench for Clamp, One 5mm hex wrench (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/2…3 screws, One 1.5mm hex wrench for Clamp, One 3/16inch hex wrench (UU)
hex wrench size for Clamp 1.5mm, hex wrench size 5mm (M6)
hex wrench size for Clamp 1.5mm, 3/16inch hex wrench (UU)
65
A A
9-C depth 8
Clamp
3-6.7 (Top mounting)
3-D (Bottom mounting)
B
A
Part Number
A
(mm)
B
(mm)
TASB-653-M6 25 50 M6 M8
TASB-653UU 25.4 50.8 1/4-20UNC 5/16-18UNC
C
D
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E103

Manual Positioners
Z axis Rack and Pinion Dovetail Stages (Vertical)
Z axis Rack and Pinion Dovetail Stages (Vertical)
TARW-L
TAR-L
Catalog
Code
Catalog
Code
W7052
W7053
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Z axis rack and pinion stages, ideal for frequent operations that require quick motion and long
travel.
TAR-34403L Bottom Plate
TAR-34403L include a
base plate that allows
mounting on instruments
or bases fitted with M4
tapped holes on □50mm,
preventing the handle from
contacting the mounting
surface.
13.5
22.5
3-M3
through hole
60
50
12
4-φ4.5 mounting hole
φ8 counterbore
"Primary material: Aluminum
Finish: Black Anodized"
50
60
10
4
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TARW-25503L TAR-34403L TAR-34603L TAR-34803L TAR-38403L-M6 TAR-60553D TAR-60703D
INCH − − − − TAR-38403LUU − −
Table Size [mm] 25×50 34×40 34×60 34×80 38×40 60×60 60×60
Axes of Travel
Travel [mm] ±10 +25 / −20 ±15 +20 / −10 +45 / −0
Lead of Actuator [mm/rotation] about 20 about 20 about 20 about 20 about 20
Z axis
Coars: +18 / −0
Fine: +18 / −0
Coars: about 20
Fine: about 2.5
Coars: +33 / −0
Fine: +33 / −0
Coars: about 20
Fine: about 2.5
Vernier Readable Resolution [mm] 0.1 0.1 0.1 0.1 0.1 0.1 0.1
Bearing type
Primary Material
Finish
Dovetail slide method
Brass / Aluminum
Super black chrome / Black anodized
Load Capacity [N] 9.8 (1.0kgf) 14.7 (1.5kgf) 14.7 (1.5kgf) 14.7 (1.5kgf) 14.7 (1.5kgf) 14.7 (1.5kgf) 14.7 (1.5kgf)
Travel Accuracy Straightness [μm] 30 20 20 30 30 20 20
Max. Moment Pitch [N・m] 0.6 1.5 1.4 1.9 1.5 1.5 1.5
Capacity
Roll [N・m] 0.5 1.0 1.2 1.5 1.0 1.0 1.0
Moment Stiffness Pitch [″/N・cm] 1.53 0.51 0.41 0.41 0.51 0.61 0.61
Parallelism [μm] − − − − − 80 80
Squareness [μm] 50 50 100 100 50 − −
Weight [kg] 0.3 0.5 0.8 1.1 0.6 0.55 0.6
E104
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Catalog
Z axis Dual Drive Rack and Pinion Dovetail Stages TAR-3D Code W7515
Outline Drawing
TARW-25503L
3-M4 depth 5
10-M3 depth 5
63
50
10 10 10
10
25 20
20
20
40
50
Pan head screw M3×10…2 screws
Pan head screw M4×10…2 screws
20
Clamp
(73)
38±10
2-4.5 mounting hole
2-3.5 mounting hole
18
22.5 10
36
5
TAR-34403L
10
4
50
60
9
Hexagonal socket head cap screw M4×8…4 screws
54 25
−20
(99)
30
4-M3 depth 5
Clamp
4-4.5 mounting hole
8 counterbore
52
34
24
50
60
14
40 21.5
94
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
TAR-34603L
Hexagonal socket head cap screw M4×12…4 screws
TAR-34803L
Hexagonal socket head cap screw M4×12…4 screws
Motoeized
Stages
30
30
Light
Sources
6-M4 depth 5
60
34
20
TAR-34601
ZBR-7050
6-M4 depth 5
60
34
20
TAR-34801
ZBR-7050
Index
80
60
20 20
(95)
20
90
80
20
(110)
Guide
50±15
50 20
−10
X axis Stages
4-4.5
mounting hole
35
Clamp
50 50
70 17
80
25
7
4-4.5
mounting hole
50
70
35
Clamp
50
17 80
25
7
XY axis Stages
Z axis Stages
TAR-38403L-M6/38403LUU
Hexagonal socket head cap screw M6×10…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
XZ axis Stages
XYZ axis Stages
30
25.5
θ axis Stages
46
Goniometer
38
A
4-C depth 6
Inclination
5
Vacuum
10
3
TAR-60553D
8-M4 depth 7
60
54 25
−20
(99)
Clamp
B 4-D mounting hole B
65 11 counterbore
65
25
25
60
25 25
A
40
94
Hexagonal socket head cap screw M4×8…4 screws
M16 P1 depth 7
Coarse movement knob
Fine movement knob 22
30
32
18 (Travel)
42
4.5
107
50
60
60
34
Clamp
55
4-4.5 mounting hole
8 counterbore
50
Part Number
A
(mm)
TAR-60703D
60
8-M4 depth 7 25 25
60
25
25
M16 P1 depth 7
Coarse movement knob
Fine movement
knob
33 (Travel)
42
B
(mm)
4.5
Hexagonal socket head cap screw M4×8…4 screws
107
22
30
50
60
C
60
34
Clamp
70
D
(mm)
TAR-38403L-M6 25 50 M6 6.5
TAR-38403LUU 25.4 50.8 1/4-20UNC 7
4-4.5 mounting hole
8 counterbore
47
50
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E105

Manual Positioners
Z axis Long Travel Leadscrew Stages
LSV Stage size □160mm
Long-type leadscrew stages for Z axis adjustment, enabling long height adjustment.
Application
Systems
Optics &
Optical
Coatings
◦Suitable for less frequent operations and adjustment that requires large up and
down travel.
◦Convenient crank style handle for adjustment.
◦Tapped holes on the table top allow use in combination with other fine drive
stages.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC LSV-16100L LSV-16100L-M6 LSV-16200L LSV-16200L-M6
INCH − LSV-16100LUU − LSV-16200LUU
Table Size [mm] 160×160
Axes of Travel
Screw Pitch [mm] 2 2 2 2
Readable Resolution [mm] 1 1 1 1
Travel [mm] ±50 ±50 ±100 ±100
Bearing type
Primary Material
Finish
Z axis
Linear bearing
Aluminum
Black anodized
Load Capacity [N] 78.4 (8.0kgf) 78.4 (8.0kgf) 78.4 (8.0kgf) 78.4 (8.0kgf)
Travel Accuracy Straightness [μm] 10 10 10 10
Max. Moment
Capacity
Pitch [N・m] 4.9 4.9 4.9 4.9
Moment Stiffness Pitch [″/N・cm] 0.36 0.36 0.71 0.71
Weight [kg] 4.7 4.7 5.3 5.3
E106
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70
50
70
50
70
50
Catalog
Code
W7054
Outline Drawing
LSV-16100L/16200L
Hexagonal socket head cap screw
M6×25…4 screws,
Spring washers, Flat washers
(70)
63
Application
Systems
Optics &
Optical
Coatings
150
100
100 10
4-7 mounting hole
4-4.5 mounting hole
A
4-M6 depth 8
160
140
90
25 25 25
25
28-M4 depth 8
M16 P1 depth 6
Clamp
B±C
100 90 80 70 60 50 40 30 20 10 0 10 20 30 40 60 80 90 100
Holders
Bases
Manual
Stages
Actuators
25
15
Motoeized
Stages
25 25 25 25 120
90
140
160
165
(12)
Part Number
A
(mm)
B
(mm)
D
(mm)
LSV-16100L 295 150 50
LSV-16200L 395 200 100
Light
Sources
LSV-16100L-M6/16200L-M6
Hexagonal socket head cap screw
M6×25…4 screws,
Spring washers, Flat washers
150
100
10
100
8-7 mounting hole
(70)
A
29-M6 P1
depth 8
160
140
25 25 25 25
Clamp
B±C
63
100 90 80 70 60 50 40 30 20 10 0 10 20 30 40 60 80 90 100
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
25
Goniometer
25 25 25 25
140
160
165
(12)
120
15
Part Number
A
(mm)
B
(mm)
D
(mm)
LSV-16100L-M6 295 150 50
LSV-16200L-M6 395 200 100
Inclination
Vacuum
LSV-16100LUU/16200LUU
Hexagonal socket head cap screw
1/4-20UNC×1…4 screws,
Spring washers, Flat washers
(70)
63
Ball Guide
Crossed Roller
152.4
101.6
9.2
Dovetail
Lapping
101.6
8-7 mounting hole
A
160
139.7
25.4 25.4 25.4
25.4
25.4 25.4 25.4 25.4
139.7
160
165
29-1/4-20UNC depth 8
Clamp
B±C
25.8
(12)
100 90 80 70 60 50 40 30 20 10 0 10 20 30 40 60 80 90 100
120
15
Part Number
A
(mm)
B
(mm)
D
(mm)
LSV-16100LUU 295 150 50
LSV-16200LUU 395 200 100
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E107

Manual Positioners
Precision Labjacks
LJ/LJA
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Z axis precision stages that achieve extremely high parallelism using Sigma Koki’s unique
adjustment technology.
◦The top and bottom plates of the LJ model are made of steel (magnet bases can be attached and detached), and those
of the LJA are made of aluminum (light-weight).
◦Pantograph mechanism provides a large adjustment range and high load capacity.
◦Rotate the adjustment handle to adjust the height while keeping the table surface level.
◦Firm clamping is achieved with split clamp system.
Guide
▶Height is adjustable using the special spacer kits (LJS).
E114
▶Use the special platform (LJP) to mount larger samples.
E112
▶α(β) axis tilt stage (AIS) in the same
size as the stage area of labjack can
be mounted. E194
Actuators
Motoeized
Stages
Light
Sources
Index
Travel Variation Per Adjustment Handle Rotation
LJ/LJA-80133 LJ/LJA-10163 LJ/LJA-16223
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
Travel [mm]
30
25
20
15
10
5
Travel [mm]
50
40
30
20
10
Travel [mm]
80
60
40
20
XYZ axis Stages
0
0 5 10 15 20 25
Number of Rotations [rotation]
0
0 10 20 30 40 50
Number of Rotations [rotation]
0
0 15 30 45 60 75 90
Number of Rotations [rotation]
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number LJ-80133 LJA-80133 LJ-10163 LJA-10163 LJ-16223 LJA-16223
Table Size [mm] 80×132 80×132 100×160 100×160 160×220 160×220
Axes of Travel
Travel [mm] 22 22 40 40 70 70
Primary Material Steel Aluminum Steel Aluminum Steel Aluminum
Finish Super black chrome Black anodized Super black chrome Black anodized Super black chrome Black anodized
Load Capacity [N] 196 (20.0kgf) 196 (20.0kgf) 245 (25.0kgf) 245 (25.0kgf) 294 (30.0kgf) 294 (30.0kgf)
Max. Moment Pitch [N・m] 29.4 29.4 38 38 49 49
Capacity
Roll [N・m] 2.9 2.9 4 4 6 6
Parallelism [μm] 100 100 100 100 100 100
Weight [kg] 3.1 2.3 5.3 3.4 9.9 5.9
Z axis
E108
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Catalog
Code
W7055
Outline Drawing
LJ/LJA-80133
Hexagonal socket head cap screw
M6×12…4 screws,
One 5mm hex wrench
Travel 22
D
9-M4 depth E
80
25 25
MAX 14
MIN 3
A (51) A
4-4.5 mounting hole
60
50
5
75
25 25
140
50
7
75
48
132 MAX 44
MIN 33
160
Clamp
B
4-M6
Part Number
(3)
132 (44)
160
Height MAX state
C
External Dimensions
A B C D E
Remarks
LJ-80133 6.5 32 43 64 6.5 Top plate and bottom plate ST specifications
LJA-80133 6 31.5 42.5 63 6 Top plate and bottom plate AL specifications
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
LJ/LJA-10163
Hexagonal socket head cap screw
M6×16…4 screws,
One 5mm hex wrench
100
25 25
9-M4 depth E
25 25
Clamp
61.5
Light
Sources
Index
D Travel 40
A (62) A
MAX 28 160
MAX 84
MIN 7
MIN 63
160
2-7
140
2-6.5
4-4.5 mounting hole 50 4-M6
80
50
7
50
75 75
5
B
Part Number
(7) 160
(84)
160
Height MAX state
External Dimensions
C
A B C D E
Remarks
LJ-10163 11 42 62 84 11 Top plate and bottom plate ST specifications
LJA-10163 10 41 61 82 10 Top plate and bottom plate AL specifications
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
LJ/LJA-16223
Hexagonal socket head cap screw
M6×16…4 screws,
One 5mm hex wrench
Travel 70
D
160
25-M4 depth E
25 25 25 25
25 25 25 25
Clamp
61.5
MAX 43 220 MAX 123
(6)
220 (123)
MIN 6
MIN 86
A (80) A
8-4.5 mounting hole
140
120
100
50
6-7 mounting hole
220
200
100
50
90 90
100 100
4-M6
B
4-6.5 mounting hole
Part Number
220
Height MAX state
External Dimensions
A B C D E
C
Remarks
LJ-16223 11 51 86 102 11 Top plate and bottom plate ST specifications
LJA-16223 10 50 85 100 10 Top plate and bottom plate AL specifications
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E109

Manual Positioners
Precision Labjacks
LJA-M6/LJA-UU
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Z axis precision stages that achieve extremely high parallelism using Sigma Koki’s unique
adjustment technology.
◦The top and bottom plates of the LJ model are made of steel (magnet bases can be attached and detached), and those
of the LJA are made of aluminum (light-weight).
◦Pantograph mechanism provides a large adjustment range and high load capacity.
◦Rotate the adjustment handle to adjust the height while keeping the table surface level.
◦Firm clamping is achieved with split clamp system.
Guide
▶Use the special platform (LJP) to mount larger samples.
E112
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Travel Variation Per Adjustment Handle Rotation
LJA-80133-M6/UU LJA-10163-M6/UU LJA-16223-M6/UU
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
Travel [mm]
30
25
20
15
10
5
Travel [mm]
50
40
30
20
10
Travel [mm]
80
60
40
20
XYZ axis Stages
0
0 5 10 15 20 25
Number of Rotations [rotation]
0
0 10 20 30 40 50
Number of Rotations [rotation]
0
0 15 30 45 60 75 90
Number of Rotations [rotation]
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC LJA-80133-M6 LJA-10163-M6 LJA-16223-M6
INCH LJA-80133UU LJA-10163UU LJA-16223UU
Table Size [mm] 80×132 100×160 160×220
Axes of Travel
Travel [mm] 22 40 70
Primary Material
Finish
Z axis
Aluminum
Black anodized
Load Capacity [N] 196 (20Kgf) 245 (25Kgf) 294 (30Kgf)
Max. Moment Pitch [N・m] 29.4 38 49
Capacity
Roll [N・m] 2.9 4 6
Parallelism [μm] 100 100 100
Weight [kg] 2.3 3.4 5.9
E110
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Catalog
Code
W7136
Outline Drawing
LJA-80133-M6/80133UU
Hexagonal socket head cap screw
M6×12…4 screws,
One 5mm hex wrench (M6)
Hexagonal socket head cap screw
1/4-20UNC×1/2…4 screws,
One 5mm hex wrench (UU)
Travel 22
80
63
A
A
MAX 14
MIN 3
6
6 (51)
9-B depth 6
A A
132
160
2-7
Clamp
48
MAX 44
MIN 33
4-M6
31.5
(3) 132 (44)
160
Height MAX state
42.5
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
7
140
150
Part Number
A
(mm)
LJA-80133-M6 25 M6 P1
LJA-80133UU 25.4 1/4-20UNC
B
Actuators
Motoeized
Stages
LJA-10163-M6/10163UU
Hexagonal socket head cap screw
M6×12…4 screws,
One 5mm hex wrench (M6)
Hexagonal socket head cap screw
1/4-20UNC×1/2…4 screws,
One 5mm hex wrench (UU)
100
A A
9-B depth 10
A
A
Clamp
61.5
Light
Sources
Index
82 Travel 40
MAX 28 160 MAX 84 (7) 160
(84)
MIN 7
MIN 63
10 (62) 10
80
7
75.6
7.6
160
140
150
7
4-M6
41
160
Height MAX state
Part Number
61
A
(mm)
LJA-10163-M6 25 M6 P1
LJA-10163UU 25.4 1/4-20UNC
B
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
LJA-16223-M6/16223UU
Hexagonal socket head cap screw
M6×12…4 screws,
One 5mm hex wrench (M6)
Hexagonal socket head cap screw
1/4-20UNC×1/2…4 screws,
One 5mm hex wrench (UU)
170
A A A
A
A
A
A
25-B depth 10
Clamp
61.5
Inclination
Vacuum
A
Ball Guide
MAX48
MIN11
210
MIN128
MIN91
(11)
210 (123)
Crossed Roller
Dovetail
Travel 70
10
Lapping
V Groove Screw
100
(80)
85
Ohters
10
50
151.2
140
4-7
210
190
4-8.2
151.2
4-M6
210
Height MAX state
Part Number
A
(mm)
LJA-16223-M6 25 M6 P1
LJA-16223UU 25.4 1/4-20UNC
B
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E111

Manual Positioners
Platform for Labjacks
LJP
Application
Systems
Optics &
Optical
Coatings
Holders
Platform for precision labjacks (LJ/LJA).
Larger samples can be mounted by changing the platform.
Guide
▶We will accept production of sizes not listed in the catalog.
Contact our International Sales Division for more information.
▶Usable as a simplified optical baseplate for configuring a small
optical system.
▶Platforms with grips (OBC) that have M4 or M6 tapped holes
(25mm matrix) are also available. D032
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Outline Drawing
LJP-120
Hexagonal socket head cap screw M4×12…4 screws
21-M4
120
25 25 25
25 10
LJP-200
Hexagonal socket head cap screw M4×12…4 screws
200
45-M4
25 25 25 25 25 25
10
25
Guide
25
25
X axis Stages
120
25
25
200
25 25
XY axis Stages
25
25
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
4-4.5
8 counterbore depth 5.5
LJP-300
Hexagonal socket head cap screw M4×12…4 screws
300
117-M4
25 25 25 25 25 25 25
25
25 25 25 10
4-4.5
8 counterbore depth 5.5
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
300
25 25 25 25 25 25 25 25 25 25
Ohters
4-4.5
8 counterbore depth 5.5
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number LJP-120 LJP-200 LJP-300
Size [mm] 120×120 200×200 300×300
Primary Material
Aluminum
Finish
Black anodized
Weight [kg] 0.4 1.1 2.4
E112
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Catalog
Code
W7057
Outline Drawing
LJP-200-M6/200UU
Hexagonal socket head cap screw M6×10…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
45-C depth 10
A
A
200
A A A A
10
LJP-300-M6/300UU
Hexagonal socket head cap screw M6×10…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
300
117-C depth 10 A A A A A A A A A A
10
A A
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
200
A A A A A
B
A
300
A A A A A
B
A
Manual
Stages
Actuators
B
4-7
D counterbore depth 8
A A
B
4-7
D counterbore depth 8
Motoeized
Stages
Light
Sources
Part Number
A
(mm)
B
(mm)
C
D
(mm)
LJP-200-M6 25 50 M6 P1 11
LJP-200UU 25.4 50.8 1/4-20UNC 12
Part Number
A
(mm)
B
(mm)
C
D
(mm)
LJP-300-M6 25 50 M6 P1 11
LJP-300UU 25.4 50.8 1/4-20UNC 12
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
Specifications
Part Number
METRIC LJP-200-M6 LJP-300-M6
INCH LJP-200UU LJP-300UU
Size [mm] 200×200 300×300
Primary Material
Aluminum
Finish
Black anodized
Weight [kg] 1.1 2.4
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E113

Manual Positioners
Catalog
Adjustable Spacer Kits for Labjacks LJS Code W7056
Spacer kits for precision labjacks (LJ/LJA).
Application
Systems
Optics &
Optical
Coatings
Holders
◦A kit contains one plate (made of steel) and three different lengths of posts, 20, 40 and 80mm (four posts for each).
Height can be adjusted by combining these posts (height can be added to 20, 40, 60, 80, 100, 120 and 140mm).
◦Refer to the outline drawing regarding the connection diagram to the precision labjacks.
Guide
▶We will accept production of sizes not listed in the catalog.
Contact our International Sales Division for more information.
Bases
Connection Example
Manual
Stages
Actuators
Motoeized
Stages
LJS-1016
Light
Sources
Index
Outline Drawing
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
LJS-8016
Hexagonal socket head cap screw
M6×12…4screws, One 5mm hex wrench
160
150
140
50
4-φ6.5
φ12 counterbore depth 6.5
LJS-1016
Hexagonal socket head cap screw
M6×12…4screws, One 5mm hex wrench
160
150
140
50
4-φ6.5
φ12 counterbore depth 6.5
LJS-1622
Hexagonal socket head cap screw M6×12…4screws,
One 5mm hex wrench
220
200
180
100
4-φ6.5
50
φ12 counterbore
depth 6.5
6-φ7
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
80
60
8 A
50
4-7
φ16
4-φ6.5
4-5
100
80
2-7
4-φ4.5
11 A
50
2-φ7
2-φ6.5
φ16
2-5
160
140
120
100
11 A 50
8-φ4.5
200
φ16
4-φ6.5
Ball Guide
Crossed Roller
Dovetail
Lapping
φ3 locking hole
M6 depth 12
M6 P1
A
A+7
A
[mm]
20
40
80
φ3 locking hole
M6 depth 12
M6 P1
A
A+10
A
[mm]
20
40
80
φ3 locking hole
M6 depth 12
M6 P1
A
A+10
A
[mm]
20
40
80
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number LJS-8016 LJS-1016 LJS-1622
Compatible Labjack Part Number
LJ-80133
LJA-80133
LJ-10163
LJA-10163
LJ-16223
LJA-16223
Primary Material Steel Steel Steel
Finish Super black chrome Super black chrome Super black chrome
Weight [kg] 1.7 2.2 3.9
* There are mounting holes of 4-Φ4.5 also □100mm on LJS-1622.
E114
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High Load Capacity Jacks
TSM Stage size □200mm
Catalog
Code
W7505
Using the jack screw method, this is a large scale Z-axis stage.
◦By turning the handle on the side, the top surface of
the stage will move up and down. Since the handle is
interlocked, the stage surface will move when operating
either one.
◦The transmitted hole in the center of the stage remains
always the through hole diameter unchanged even if
the table is moved.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Outline Drawing
TSM-2003
Hexagonal socket head cap screw M6×15…8 screws, Flat washers
200
(20)
Travel 10 43
180
20
8-M4 depth 10
50 50
TSM-2003-M6/2003UU
Hexagonal socket head cap screw M6×15…8 screws, Flat washers (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/8…8 screws (UU)
8-C depth 10
200
D
A A
(20)
Travel 10 43
20
Motoeized
Stages
Light
Sources
Index
200
180
(20)
50
(20)
50
70
(through hole)
50
Operating handle
96
200
D
A A
70
(through hole)
A
Operating handle
B
Guide
X axis Stages
80
80
XY axis Stages
(19)
8-12
(Fixing screw
insertion hole)
50
Clamp
8-10 (Top plate)
8-4.5 (Bottom plate)
Operating handle
(19)
8-12
(Fixing screw
insertion hole)
A
Clamp
8-12 (Top plate)
8-7 (Bottom plate)
Operating handle
Z axis Stages
XZ axis Stages
XYZ axis Stages
96
6.5
12
8
B
7
12
8
θ axis Stages
Goniometer
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TSM-2003-M6 50 96 M6 P1 180
TSM-2003UU 50.8 96.04 1/4-20UNC 177.8
Inclination
Vacuum
Specifications
METRIC TSM-2003 TSM-2003-M6
Part Number
INCH − TSM-2003UU
Table Size [mm] 200×200 200×200
Axes of Travel
Z axis
Travel [mm] 10 10
Lead of Actuator [mm/rotation] 1.0 1.0
Readable Resolution [mm] 1 1
Bearing type
Jack screw method
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 490 (50.0kgf) 490 (50.0kgf)
Travel Accuracy Straightness [μm] 200 200
Max. Moment Pitch [N・m] 4.9 4.9
Capacity
Roll [N・m] 4.9 4.9
Pitch [″/N・cm] 0.05 0.05
Moment Stiffness
Roll [″/N・cm] 0.05 0.05
Parallelism [μm] 150 150
Weight [kg] 5.0 5.0
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E115

Manual Positioners
XZ axis Steel Extended Contact Slide Stages
TSD-254 Stage size □25mm
TSD-404 Stage size □40mm
These stages are combinations of ball bearing slide guide X axis stages and flat Z axis stages.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Guide
▶Vacuum-compatible stainless steel stages (TSDS-254/404) are also
available. E206
Attention
▶The structure does not allow upside down installation since the
spring inside the stage might not be able to withstand the load and
may stretch.
▶Since the structure uses the principle of leverage, the feed rate
fluctuates against the scale depending on the travel (about
±0.02mm for micrometer head 0.5mm/rotation).
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TSD-254C TSD-254S TSD-404C TSD-404S
INCH − − TSD-404CUU TSD-404SUU
(Opposite Model)
METRIC − TSD-254SR − TSD-404SR
INCH − − − TSD-404SRUU
Table Size [mm] 25×25 25×25 40×40 40×40
Axes of Travel
XZ axis
Micrometer Position Center Side Center Side
Travel [mm] X axis ±3 Z axis ±3 X axis ±3 Z axis ±3 X axis ±6.5 Z axis ±3 X axis ±6.5 Z axis ±3
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Finish
Super black chrome + Black matte
Load Capacity [N] 29.4 (3.0kgf) 29.4 (3.0kgf) 88.3 (9.0kgf) 88.3 (9.0kgf)
Travel Accuracy Straightness [μm] 5 5 2.5 2.5
Max. Moment Pitch [N・m] 1.0 1.0 3.9 3.9
Capacity
Roll [N・m] 1.0 1.0 3.9 3.9
Pitch [″/N・cm] 8.95 8.95 2.14 2.14
Moment Stiffness
Roll [″/N・cm] 8.75 8.75 2.04 2.04
Parallelism [μm] 110 110 110 110
Options FP FP FP FP
Weight [kg] 0.17 0.17 0.45 0.45
Option for □25mm
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-42525 0.25 − E008
Option for □40mm
Option Code
FP
Compatible product
Products Name
Part Number
X axis: FPSA-62540
Fine-pitch Screw Adjusters
Z axis: FPSA-42525
Lead of Actuator
[mm/rotation]
* Please add an option code as the part number suffix to specify various optional specifications.
* The load capacity of the FP type is 39.2N (4.0kgf). (□40mm)
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
Micrometer Readable Resolution
[mm]
0.25 − E008
E116
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Catalog
Code
Catalog
Code
W7058
W7059
Outline Drawing
TSD-254C
MAX38 25 (7)
10 10
3.5
Hexagonal socket head cap screw M2×4…4 screws
25
10 10
MAX41
7-M2 depth 4
X axis clamp
20
Application
Systems
Optics &
Optical
Coatings
Holders
Z axis clamp
19
Bases
TSD-254S
36±3
24
12
1.5
20
9.5
4-2.4 mounting hole
4 counterbore
Hexagonal socket head cap screw M2×4…4 screws
TSD-254SR
Hexagonal socket head cap screw M2×4…4 screws
Manual
Stages
Actuators
(7)
3.5
MAX49
25
10 10
X axis clamp
MAX49
25
10 10
(3)
7-M2 depth 4
(7)
X axis clamp
Motoeized
Stages
MAX38 25
10 10
7-M2 depth 4
Z axis clamp
19
20
10 10
MAX38 25
Z axis clamp
19
20
Light
Sources
Index
12
36±3
24
1.5
24
36±3
20
7
4-2.4 mounting hole
4 counterbore
7
4-2.4 mounting hole
4 counterbore
20
1.5
12
Guide
X axis Stages
TSD-404C/404CUU
(9.5)
2
40
A
A
Hexagonal socket head cap screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)
MAX66
X axis clamp
XY axis Stages
Z axis Stages
XZ axis Stages
40
A
B
XYZ axis Stages
MAX32
A
7-C depth 5
Z axis clamp
26
θ axis Stages
Goniometer
Inclination
34
50±3
16
1.5
B
4-D mounting hole
E counterbore
10.5
Part Number
A
(mm)
B
(mm)
C
D
(mm)
E
(mm)
TSD-404C 16 32 M3 3.5 6
TSD-404CUU 15.875 31.75 6-32UNC 4 6.5
Vacuum
TSD-404S/404SUU
Hexagonal socket head cap screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)
(9.5)
40
MAX32
A
A
34
50±3
16
1.5
Part Number
2
40
A A
B
A
(mm)
MAX34
7-C depth 5
Z axis clamp
9
4-D mounting hole
E counterbore
B
(mm)
C
X axis clamp
26
D
(mm)
B
E
(mm)
TSD-404S 16 32 M3 3.5 6
TSD-404SUU 15.875 31.75 6-32UNC 4 6.5
TSD-404SR/404SRUU
Hexagonal socket head cap screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)
2
7-C depth 5
Z axis clamp
4-D mounting hole
E counterbore
Part Number
MAX74
40
A A
B
A
(mm)
1.5
A
A
(9.5)
40
MAX32
34
50±3
16
B
(mm)
X axis clamp
C
26
B
D
(mm)
E
(mm)
TSD-404SR 16 32 M3 3.5 6
TSD-404SRUU 15.875 31.75 6-32UNC 4 6.5
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E117

Manual Positioners
XZ axis Steel Extended Contact Slide Stages
TSD-604 Stage size □60mm
TSD-654 Stage size □65mm
These stages are combinations of ball bearing slide guide X axis stages and flat Z axis stages.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Guide
▶Vacuum-compatible stainless steel stages (TSDS-604/654) are also
available. E206
Attention
▶The structure does not allow upside down installation since the
spring inside the stage might not be able to withstand the load and
may stretch.
▶Since the structure uses the principle of leverage, the feed rate
fluctuates against the scale depending on the travel (about
±0.02mm for micrometer head 0.5mm/rotation).
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
(Opposite Model)
METRIC TSD-604C TSD-604S TSD-654C-M6 TSD-654S-M6
INCH − − TSD-654CUU TSD-654SUU
METRIC − TSD-604SR − TSD-654SR-M6
INCH − − − TSD-654SRUU
Table Size [mm] 60×60 60×60 65×65 65×65
Axes of Travel
Micrometer Position Center Side Center Side
Travel [mm] X axis ±6.5 Z axis ±5 X axis ±6.5 Z axis ±5 X axis ±6.5 Z axis ±5 X axis ±6.5 Z axis ±5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Finish
XZ axis
Extended contact ball guide
Steel
Super black chrome + Black matte
Load Capacity [N] 147 (15.0kgf) 147 (15.0kgf) 147 (15.0kgf) 147 (15.0kgf)
Travel Accuracy Straightness [μm] 2.5 2.5 2.5 2.5
Max. Moment Pitch [N・m] 6.9 6.9 6.9 6.9
Capacity
Roll [N・m] 6.9 6.9 6.9 6.9
Pitch [″/N・cm] 0.73 0.73 0.73 0.73
Moment Stiffness
Roll [″/N・cm] 0.64 0.64 0.64 0.64
Parallelism [μm] 110 110 110 110
Options FP FP FP FP
Weight [kg] 1.5 1.5 1.7 1.7
Option
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The load capacity of the FP type is 39.2N (4.0kgf).
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
E118
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Catalog
Code
Catalog
Code
W7060
W7137
Outline Drawing
TSD-604C
7-M4 depth 6
MAX44 60 (11)
25 25
32
4-M3
depth 6
Hexagonal socket head cap screw M4×6…4 screws
60
25 25
32
MAX66
M16 P1 depth 6
Z axis clamp
33
X axis clamp
50
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
73±5
55
10.5
Manual
Stages
1.5
18
50
4-4.5 mounting hole
8 counterbore
Actuators
TSD-604S
7-M4 depth 6
73±5 MAX44 60 (11)
55 25 25
18
32
1.5
TSD-654C-M6/654CUU
7-C depth 6
(11)
Hexagonal socket head cap screw M4×6…4 screws
60
25 25
32
MAX88
50
65
A A
4-M3 depth 6
M16 P1 depth 6
Z axis clamp
10.5
4-4.5 mounting hole
8 counterbore
MAX69
33
X axis clamp
50
TSD-604SR
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
X axis clamp
4-M3 depth 6
M16 P1 depth 6
10.5
4-4.5 mounting hole
8 counterbore
Hexagonal socket head cap screw M4×6…4 screws
60 7-M4 depth 6
25 25
32
X axis clamp
MAX88
50
32
25 25
1.5
55
73±5
18
(11)
MAX44 60
Z axis clamp
33
50
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
65
A
A
B
θ axis Stages
MAX41
75±5
20 55
1.5
B
Z axis clamp
TSD-654S-M6/654SUU
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
7-C depth 6 65
X axis clamp
A A
(11)
65
MAX41
75±5
20 55
A
A
1.5
Part Number
MAX91
B
12
4-7 mounting hole
D counterbore
Z axis clamp
12.5
4-7 mounting hole
D counterbore
A
(mm)
B
(mm)
35
35
B
C
Part Number
D
(mm)
TSD-654S-M6 25 50 M6 P1 11
TSD-654SUU 25.4 50.8 1/4-20UNC 12
A
(mm)
B
(mm)
TSD-654SR-M6/654SRUU
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
65
7-C depth 6 A A
4-7 mounting hole
D counterbore
Part Number
C
MAX91
B
A
A
1.5
A
(mm)
(5)
MAX41 65 (11)
Z axis clamp
55
75±5
20
D
(mm)
TSD-654C-M6 25 50 M6 P1 11
TSD-654CUU 25.4 50.8 1/4-20UNC 12
B
(mm)
35
C
X axis clamp
B
D
(mm)
TSD-654SR-M6 25 50 M6 P1 11
TSD-654SRUU 25.4 50.8 1/4-20UNC 12
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E119

Manual Positioners
XZ axis Steel Extended Contact Slide Stages
TSD-804 Stage size □80mm
TSD-1004 Stage size □100mm
These stages are combinations of ball bearing slide guide X axis stages and flat Z axis stages.
Application
Systems
Optics &
Optical
Coatings
Holders
Attention
▶The structure does not allow upside down installation since the
spring inside the stage might not be able to withstand the load and
may stretch.
▶Since the structure uses the principle of leverage, the feed rate
fluctuates against the scale depending on the travel (about
±0.02mm for micrometer head 0.5mm/rotation).
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Specifications
Part Number METRIC TSD-804C TSD-804S TSD-1004C TSD-1004S
(Opposite Model) METRIC − TSD-804SR − TSD-1004SR
Table Size [mm] 80×80 80×80 100×100 100×100
Axes of Travel
XZ axis
Micrometer Position Center Side Center Side
Travel [mm] X axis ±12.5 Z axis ±5 X axis ±12.5 Z axis ±5 X axis ±12.5 Z axis ±10 X axis ±12.5 Z axis ±10
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Finish
Super black chrome + Black matte
Load Capacity [N] 147 (15.0kgf) 147 (15.0kgf) 245 (25.0kgf) 245 (25.0kgf)
Travel Accuracy Straightness [μm] 2.5 2.5 2.5 2.5
Max. Moment
Capacity
Pitch [N・m] 6.9 6.9 9.8 9.8
Roll [N・m] 6.9 6.9 9.8 9.8
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Pitch [″/N・cm] 0.61 0.61 0.42 0.42
Moment Stiffness
Roll [″/N・cm] 0.57 0.57 0.39 0.39
Parallelism [μm] 110 110 130 130
Options FP FP FP FP
Weight [kg] 2.1 2.1 5.0 5.0
Option for □80mm
Option Code
FP
Option for □100mm
Compatible product
Products Name
Part Number
X axis: FPSA-62550
Fine-pitch Screw Adjusters
Z axis: FPSA-62540
Lead of Actuator
[mm/rotation]
Micrometer Readable Resolution
[mm]
0.25 − E008
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62555 0.25 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The load capacity of the FP type is 39.2N (4.0kgf).
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
E120
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Catalog
Code
Catalog
Code
W7061
W7062
Outline Drawing
TSD-804C
4-M4 depth 6
80 (11)
70
25
25
Hexagonal socket head cap screw M4×8…4 screws
80 MAX94
70
X axis clamp
25 25
70
Application
Systems
Optics &
Optical
Coatings
Holders
MAX34
7-M4 depth 6
M16 P1 depth 6
Z axis clamp
35
Bases
75±5
55
20
3
70
12
4-4.5 mounting hole
8 counterbore
Manual
Stages
Actuators
TSD-804S
4-M4 depth 6
75±5 MAX34 80 (11)
70
55
20
25
25
3
Hexagonal socket head cap screw M4×8…4 screws
80
70
25 25
7-M4 depth 6 X axis clamp
M16 P1 depth 6
MAX122
70
Z axis clamp
12.5
4-4.5 mounting hole
8 counterbore
35
70
TSD-804SR
7-M4 depth 6
M16 P1 depth 6
12.5
4-4.5 mounting hole
8 counterbore
Hexagonal socket head cap screw M4×8…4 screws
80
70
25 25
MAX122
70
25
25
3
4-M4 depth 6
70
80 (11)
MAX34
Z axis clamp
55
75±5
20
35
X axis clamp
70
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
TSD-1004C
4-M4 depth 8
(11)
Hexagonal socket head cap screw M4×8…4 screws
100 MAX109
90
25 25
X axis clamp
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
110±10 MAX87 100
90
50
6-M4
depth 8 M16 P1 depth 6
90
Z axis clamp
10.5
30.5
90
θ axis Stages
Goniometer
Inclination
Vacuum
20
2.5
90
4-4.5 mounting hole
8 counterbore
Ball Guide
TSD-1004S
4-M4 depth 8
(11)
MAX87 100
90
50
110±10
90
20
2.5
100
90
25 25
90
Hexagonal socket head cap screw M4×8…4 screws
MAX149
6-M4 depth 8
M16 P1 depth 6
Z axis clamp
10.5
4-4.5 mounting hole
8 counterbore
X axis clamp
30.5
90
TSD-1004SR
Hexagonal socket head cap screw M4×8…4 screws
100 (6)
6-M4 depth 8 90 4-M4 depth 8
X axis clamp
25 25
M16 P1 depth 6
10.5
4-4.5 mounting hole
8 counterbore
MAX149
90
2.5
50
90
90
110±10
20
(11)
100
MAX87
Z axis clamp
30.5
90
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E121

Manual Positioners
XZ axis Steel Extended Contact Slide Stages
TSD-1204 Stage size □120mm
These stages are combinations of ball bearing slide guide X axis stages and flat Z axis stages.
Application
Systems
Optics &
Optical
Coatings
Holders
Attention
▶The structure does not allow upside down installation since the
spring inside the stage might not be able to withstand the load and
may stretch.
▶Since the structure uses the principle of leverage, the feed rate
fluctuates against the scale depending on the travel (about
±0.02mm for micrometer head 0.5mm/rotation).
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
(Opposite Model)
METRIC TSD-1204C TSD-1204S TSD-1204C-M6 TSD-1204S-M6
INCH − − TSD-1204CUU TSD-1204SUU
METRIC − TSD-1204SR − TSD-1204SR-M6
INCH − − − TSD-1204SRUU
Table Size [mm] 120×120 120×120 120×120 120×120
Axes of Travel
Micrometer Position Center Side Center Side
Travel [mm] X axis ±20 Z axis ±5 X axis ±20 Z axis ±5 X axis ±20 Z axis ±5 X axis ±20 Z axis ±5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Finish
XZ axis
Extended contact ball guide
Steel
Super black chrome + Black matte
Load Capacity [N] 245 (25.0kgf) 245 (25.0kgf) 245 (25.0kgf) 245 (25.0kgf)
Travel Accuracy Straightness [μm] 2.5 2.5 2.5 2.5
Max. Moment Pitch [N・m] 9.8 9.8 9.8 9.8
Capacity
Roll [N・m] 9.8 9.8 9.8 9.8
Pitch [″/N・cm] 0.4 0.4 0.4 0.4
Moment Stiffness
Roll [″/N・cm] 0.38 0.38 0.38 0.38
Parallelism [μm] 150 150 150 150
Weight [kg] 6.2 6.2 6.2 6.2
E122
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Catalog
Code
W7063
Outline Drawing
TSD-1204C
7-M4 depth 8
(11)
Hexagonal socket head cap screw M4×8…4 screws
120 MAX147
50 50
X axis clamp
25 25
Application
Systems
Optics &
Optical
Coatings
120
50
50
100
Holders
112±10 MAX77
90 50
6-M4 depth 8
M16 P1 depth 6
Z axis clamp
12
32.5
Bases
Manual
Stages
3.5
22
100
4-4.5 mounting hole
8 counterbore
Actuators
TSD-1204S
7-M4 depth 8
(11)
120
50
112±10 MAX77
22 90 50
50
3.5
TSD-1204C-M6/1204CUU
22-C depth 8
(11)
A
Hexagonal socket head cap screw M4×8…4 screws
120
50 50
25 25
MAX189
100
120
A A A A
6-M4 depth 8 X axis clamp
M16 P1 depth 6
Z axis clamp
11.3
4-4.5 mounting hole
8 counterbore
MAX147
32.5
100
TSD-1204SR
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
X axis clamp
Hexagonal socket head cap screw M4×8…4 screws
120
6-M4 depth 8
7-M4 depth 8 50 50
25 25
X axis clamp
M16 P1 depth 6
11.3
4-4.5 mounting hole
8 counterbore
MAX189
100
50
50
50
3.5
22
(11)
120
MAX77
Z axis clamp
90
112±10
32.5
100
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
120
A
A
B
θ axis Stages
112±10
90 MAX77
22
A
2
TSD-1204S-M6/1204SUU
B
Z axis clamp
4-D mounting hole
E counterbore
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
22-C depth 8 120
A A A A
X axis clamp
(11)
120
A
A
A
A
12
32.5
B
Part Number
A
(mm)
B
(mm)
TSD-1204SR-M6/1204SRUU
C
D
(mm)
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
120 22-C depth 8
A A A A
X axis clamp
A
A
A A
(11)
120
E
(mm)
TSD-1204C-M6 25 50 M6 P1 6.5 11
TSD-1204CUU 25.4 50.8 1/4-20UNC 7 12
B
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
90 MAX77
112±10
22
2
Part Number
MAX189
A
(mm)
Z axis clamp
11.3
4-D mounting hole
E counterbore
B
(mm)
C
32.5
D
(mm)
E
(mm)
TSD-1204S-M6 25 50 M6 P1 6.5 11
TSD-1204SUU 25.4 50.8 1/4-20UNC 7 12
11.3
4-D mounting hole
E counterbore
Part Number
MAX189
B
A
(mm)
2
MAX77
Z axis clamp
90
112±10
22
B
(mm)
C
32.5
D
(mm)
E
(mm)
TSD-1204SR-M6 25 50 M6 P1 6.5 11
TSD-1204SRUU 25.4 50.8 1/4-20UNC 7 12
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E123

Manual Positioners
XZ axis Steel Extended Contact Slide Stages (Vertical)
TSD-254L Stage size □25mm
TSD-404L Stage size □40mm
These stages are combinations of ball bearing slide guide X axis stages and flat Z axis stages.
Application
Systems
Optics &
Optical
Coatings
Guide
▶Vacuum-compatible stainless steel stages (TSDS-254*L/404*L)
are also available. E208
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
(Opposite Model)
METRIC TSD-254CL TSD-254SL TSD-404CL TSD-404SL
INCH − − TSD-404CLUU TSD-404SLUU
METRIC − TSD-254SRL − TSD-404SRL
INCH − − − TSD-404SRLUU
Table Size [mm] 25×25 25×25 40×40 40×40
Axes of Travel
Micrometer Position Center Side Center Side
Travel [mm] X axis ±3 Z axis ±3 X axis ±3 Z axis ±3 X axis ±6.5 Z axis ±6.5 X axis ±6.5 Z axis ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Finish
XZ axis
Extended contact ball guide
Steel
Super black chrome
Load Capacity [N] 14.7 (1.5kgf) 14.7 (1.5kgf) 49 (5.0kgf) 49 (5.0kgf)
Travel Accuracy Straightness [μm] 1 1 1.0 1.0
Max. Moment Pitch [N・m] 2.2 2.2 5.0 5.0
Capacity
Roll [N・m] 2.1 2.1 5.0 5.0
Moment Stiffness Pitch [″/N・cm] 5.1 5.1 0.9 0.9
Options FP FP FP FP
Weight [kg] 0.17 0.17 0.5 0.5
Option for □25mm
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-42525 0.25 − E008
Option for □40mm
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
E124
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Catalog
Code
Catalog
Code
W7065
W7066
Outline Drawing
TSD-254CL
9.5
MAX41
Hexagonal socket head cap screw M2×4…4 screws
20
25
7 12 25
37±3
49.5
X axis clamp
73.2
1.5
20
20
(7)
M4 depth 4
6-M2 depth 4
Z axis clamp
10 10
25
12 37.5
4-2.4 mounting hole
4 counterbore
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
TSD-254SL
Hexagonal socket head cap screw M2×4…4 screws
TSD-254SRL
Hexagonal socket head cap screw M2×4…4 screws
Actuators
7 12 25 12
20
M4 depth 4
6-M2 depth 4
Z axis clamp
7
12 25 12
20
M4 depth 4
6-M2 depth 4
Z axis clamp
Motoeized
Stages
7
20
25
MAX49
37±3
49.5
X axis clamp
73.2
1.5
20
10 10
25
12 37.5
4-2.4 mounting hole
4 counterbore
X axis clamp
20
25
MAX49
7
37±3
49.5
(73.2)
1.5
20
10 10
25
37.5
12
4-2.4 mounting hole
4 counterbore
Light
Sources
Index
Guide
TSD-404CL/404CLUU
10.5
Hexagonal socket head cap screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)
19.5 40
A A
(9.5)
D depth 5
8-C depth 5
Z axis clamp
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
98
A A
40
55
XYZ axis Stages
0.5
51±6.5
71
θ axis Stages
10.5
MAX66
B
40
X axis clamp
1.5
B
16
4-E mounting hole
F counterbore
Goniometer
Inclination
Part Number
A
(mm)
B
(mm)
C
D
E
(mm)
F
(mm)
TSD-404CL 16 32 M3 M6 P1 3.5 6
TSD-404CLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
Vacuum
Ball Guide
TSD-404SL/404SLUU
Hexagonal socket head cap screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)
TSD-404SRL/404SRLUU
Hexagonal socket head cap screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)
Crossed Roller
Dovetail
Lapping
10.5
19.5 40 18
A A
D depth 5
8-C depth 5
Z axis clamp
10.5
19.5 40 18
A A
D depth 5
8-C depth 5
Z axis clamp
V Groove Screw
Ohters
9
Part Number
MAX34
B
40
A
(mm)
0.5
B
(mm)
71
51±6.5
98
1.5
X axis clamp
C
D
B
A A
40
55
16
4-E mounting hole
F counterbore
E
(mm)
F
(mm)
TSD-404SL 16 32 M3 M6 P1 3.5 6
TSD-404SLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
B
40
Part Number
0.5
MAX34
9
A
(mm)
71
51±6.5
98
1.5
X axis clamp
B
(mm)
C
B
A A
40
55
16
4-E mounting hole
F counterbore
D
E
(mm)
F
(mm)
TSD-404SRL 16 32 M3 M6 P1 3.5 6
TSD-404SRLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E125

Manual Positioners
XZ axis Steel Extended Contact Slide Stages (Vertical)
TSD-604L Stage size □60mm
TSD-654L Stage size □65mm
These stages are combinations of ball bearing slide guide X axis stages and flat Z axis stages.
Application
Systems
Optics &
Optical
Coatings
Guide
▶Vacuum-compatible stainless steel stages (TSDS-604*L/654*L)
are also available. E208
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
(Opposite Model)
METRIC TSD-604CL TSD-604SL TSD-654CL-M6 TSD-654SL-M6
INCH − − TSD-654CLUU TSD-654SLUU
METRIC − TSD-604SRL − TSD-654SRL-M6
INCH − − − TSD-654SRLUU
Table Size [mm] 60×60 60×60 65×65 65×65
Axes of Travel
Micrometer Position Center Side Center Side
Travel [mm] X axis ± 6.5 Z axis ±6.5 X axis ±6.5 Z axis ±6.5 X axis ±6.5 Z axis ±6.5 X axis ±6.5 Z axis ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Finish
XZ axis
Extended contact ball guide
Steel
Super black chrome
Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)
Travel Accuracy Straightness [μm] 1 1 1 1
Max. Moment Pitch [N・m] 8.0 8.0 8.0 8.0
Capacity
Roll [N・m] 8.0 8.0 8.0 8.0
Moment Stiffness Pitch [″/N・cm] 0.45 0.45 0.45 0.45
Options FP FP FP FP
Weight [kg] 1.3 1.3 1.6 1.6
Option
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
E126
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Catalog
Code
Catalog
Code
W7067
W7138
Outline Drawing
TSD-604CL
Hexagonal socket head cap screw M4×6…4 screws
20.8 60
12
25 25
32
(11)
4-M3 depth 5
9-M4 depth 6
Z axis clamp
Application
Systems
Optics &
Optical
Coatings
25
Holders
10.5
32
60
MAX66
50
60
3.5
68±6.5
98
X axis clamp
114.3
1.5
50
25
18
80
4-4.5 mounting hole
8 counterbore
Bases
Manual
Stages
Actuators
TSD-604SL
Hexagonal socket head cap screw M4×6…4 screws
20.8 60 20.8
12
25 25
32
9-M4 depth 6
4-M3 depth 5
Z axis clamp
TSD-604SRL
12
Hexagonal socket head cap screw M4×6…4 screws
20.8 60 20.8
9-M4 depth 6
25 25
32
4-M3 depth 5
Z axis clamp
Motoeized
Stages
Light
Sources
25
10.5
3.5
68±6.5
98
114.3
32
25
60
80
18
X axis clamp
3.5
10.5
68±6.5
98
114.3
32
25 25
60
80
18
Index
Guide
50
60
MAX88
X axis clamp
1.5
50
4-4.5 mounting hole
8 counterbore
50
60
MAX88
1.5
50
4-4.5 mounting hole
8 counterbore
X axis Stages
XY axis Stages
TSD-654CL-M6/654CLUU
12
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
20.8 65 (11)
A A
9-C depth 6
Z axis clamp
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
6
70±6.5
102.5
(116.3)
65
82.5
Goniometer
Inclination
Vacuum
12
B
65
B
A
A
MAX69
X axis clamp
1.5
20
4-7 mounting hole
D counterbore
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TSD-654CL-M6 25 50 M6 P1 11
TSD-654CLUU 25.4 50.8 1/4-20UNC 12
TSD-654SL-M6/654SLUU
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
12
20.8
65
A A
20.5
A
9-C depth 6
Z axis clamp
TSD-654SRL-M6/654SRLUU
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
12
20.8
65
A A
20.5
A
9-C depth 6
Z axis clamp
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
12.5
B
65
MAX91
Part Number
6
70±6.5
102.5
X axis clamp
A
(mm)
(116.3)
1.5
B
(mm)
B
C
A
65
82.5
20
4-7 mounting hole
D counterbore
D
(mm)
TSD-654SL-M6 25 50 M6 P1 11
TSD-654SLUU 25.4 50.8 1/4-20UNC 12
X axis clamp
B
65
MAX91
Part Number
6
12.5
70±6.5
A
(mm)
102.5
(116.3)
1.5
B
(mm)
B
C
A
65
82.5
20
4-7 mounting hole
D counterbore
D
(mm)
TSD-654SRL-M6 25 50 M6 P1 11
TSD-654SRLUU 25.4 50.8 1/4-20UNC 12
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E127

Manual Positioners
XZ axis Aluminum Crossed Roller Slide Stages (Vertical)
TAM-4L Stage size □40/□60mm
Application
Systems
Stages that combined a light-weight Z axis aluminum stage, which integrated the stage with a Z axis
bracket, with an X axis aluminum stage.
Crossed roller guide enables smooth travel.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TAM-404CL TAM-404SL TAM-604CL TAM-604SL
INCH TAM-404CLUU TAM-404SLUU − −
(Opposite Model)
METRIC − TAM-404SRL − TAM-604SRL
INCH − TAM-404SRLUU − −
Table Size [mm] 40×40 60×60
Axes of Travel
XZ axis
Micrometer Position Center Side Center Side
Travel [mm] X axis ±6.5 Z axis ±6.5 X axis ±6.5 Z axis ±6.5 X axis ±6.5 Z axis ±6.5 X axis ±6.5 Z axis ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Crossed roller
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)
Travel Accuracy Straightness [μm] 2 2 2 2
Max. Moment Pitch [N・m] 2.75 2.75 5.0 5.0
Capacity
Roll [N・m] 3.0 3.0 5.0 5.0
Moment Stiffness Pitch [″/N・cm] 1.4 1.4 0.6 0.6
Options FP FP FP FP
Weight [kg] 0.3 0.3 0.6 0.6
Option
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
E128
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W7202
Outline Drawing
TAM-404CL/404CLUU
10.4
Hexagonal socket head cap screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
21 40 (12)
8-D depth 5
A A
C depth 7
Z axis clamp
94.5
A
A
40
50
Application
Systems
Optics &
Optical
Coatings
Holders
11.5
MAX66
Part Number
TAM-404SL/401SLUU
Pan head screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
10.4
B
40
A
(mm)
4
B
(mm)
49±6.5
69
X axis clamp
C
21
G
A
40
D
A
B
E
(mm)
21
19
4-E mounting hole
F counterbore
F
(mm)
8-D depth 5
C depth 7
Z axis clamp
G
(mm)
TAM-404CL 16 32 M6 P1 M3 3.5 6 2
TAM-404CLUU 15.875 31.75 1/4-20UNC 6-32UNC 4 6.5 1.5
TAM-404SRL/401SRLUU
Pan head screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
10.4
21
A
40
A
21
8-D depth 5
C depth 7
Z axis clamp
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
49±6.5
69
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
TAM-602CL
Hexagonal socket head cap screw M4×8…4 screws
12.3 21 60
25 25
(14)
8-M4 depth 8
M16 P1 depth 6
Z axis clamp
θ axis Stages
Goniometer
Inclination
Vacuum
25
94.5
A A
40
50
94.5
A A
40
50
4
4
49±6.5
69
10.5
B
40
MAX73
X axis clamp
G
B
19
4-E mounting hole
F counterbore
B
40
MAX73
10.5
G
X axis clamp
B
19
4-E mounting hole
F counterbore
Part Number
A
(mm)
B
(mm)
C
D
E
(mm)
F
(mm)
G
(mm)
TAM-404SL 16 32 M6 P1 M3 3.5 6 2
TAM-404SLUU 15.875 31.75 1/4-20UNC 6-32UNC 4 6.5 1.5
Part Number
A
(mm)
B
(mm)
C
D
E
(mm)
F
(mm)
G
(mm)
TAM-404SRL 16 32 M6 P1 M3 3.5 6 2
TAM-404SRLUU 15.875 31.75 1/4-20UNC 6-32UNC 4 6.5 1.5
12.3
15.5
MAX66
TAM-602SL
12.3
50
60
MAX88
50
60
1.5
63±6.5
93
X axis clamp
114
2.5
Hexagonal socket head cap screw M4×8…4 screws
1.5
63±6.5
93
X axis clamp
114
2.5
21 60 21
25 25
50
25
25
50
8-M4 depth 8
M16 P1 depth 6
Z axis clamp
60
70
23
4-4.5 mounting hole
8 counterbore
25
60
23 70
4-4.5 mounting hole
8 counterbore
X axis clamp
TAM-602SRL
12.3
50
60
MAX88
1.5
12.3
Hexagonal socket head cap screw M4×8…4 screws
63±6.5
93
114
2.5
21 60
25 25
21
8-M4 depth 8
M16 P1 depth 6
Z axis clamp
25
25
60
70
23
50 4-4.5 mounting hole
8 counterbore
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E129

Manual Positioners
XZ axis Aluminum Crossed Roller Slide Stages (Vertical)
TAM-4L Stage size □65/□80mm
Application
Systems
Stages that combined a light-weight Z axis aluminum stage, which integrated the stage with a Z axis
bracket, with an X axis aluminum stage.
Crossed roller guide enables smooth travel.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TAM-654CL-M6 TAM-654SL-M6 TAM-804CL TAM-804SL
INCH TAM-654CLUU TAM-654SLUU − −
(Opposite Model)
METRIC − TAM-654SRL-M6 − −
INCH − TAM-654SRLUU − −
Table Size [mm] 65×65 65×65 80×80 80×80
Axes of Travel
XZ axis
Micrometer Position Center Side Center Side
Travel [mm] X axis ±6.5 Z axis ±6.5 X axis ±6.5 Z axis ±6.5 X axis ±7.5 Z axis ±7.5 X axis ±7.5 Z axis ±7.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Crossed roller
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)
Travel Accuracy Straightness [μm] 2 2 2 2
Max. Moment Pitch [N・m] 5.0 5.0 7.0 7.0
Capacity
Roll [N・m] 5.0 5.0 7.0 7.0
Moment Stiffness Pitch [″/N・cm] 0.6 0.6 0.25 0.25
Options FP FP FP FP
Weight [kg] 0.7 0.7 1.2 1.2
Option for □65mm
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008
Option for □80mm
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62550 0.25 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
E130
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W7202
Outline Drawing
TAM-654CL-M6/654CLUU
13.8
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
21 65 (14)
A A 9-C depth 8
Z axis clamp
A
Application
Systems
Optics &
Optical
Coatings
Holders
17.5
MAX68
B
65
2.5
70±6.5
102.5
125
3
X axis clamp
B
A
65
77.5
25
4-D mounting hole
11 counterbore
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TAM-654CL-M6 25 50 M6 P1 6.5
TAM-654CLUU 25.4 50.8 1/4-20UNC 7
Bases
Manual
Stages
TAM-654SL-M6/654SLUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
13.8
21
A
65
A
(14)
9-C depth 8
Z axis clamp
TAM-654SRL-M6/654SRLUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
13.8
21
65
A A
21
9-C depth 8
Z axis clamp
Actuators
Motoeized
Stages
Light
Sources
14.3
2.5
70±6.5
102.5
125
A A
65
77.5
X axis clamp
2.5
70±6.5
102.5
125
A A
65
77.5
Index
25
25
B
65
MAX94
X axis clamp
3
B
4-D mounting hole
11 counterbore
B
65
MAX94
14.3
3
B
4-D mounting hole
11 counterbore
Guide
X axis Stages
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TAM-654SL-M6 25 50 M6 P1 6.5
TAM-654SLUU 25.4 50.8 1/4-20UNC 7
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TAM-654SRL-M6 25 50 M6 P1 6.5
TAM-654SRLUU 25.4 50.8 1/4-20UNC 7
XY axis Stages
Z axis Stages
XZ axis Stages
TAM-804CL
Hexagonal socket head cap screw M4×8…4 screws
XYZ axis Stages
14.5
4-M4 depth 8
(PCD62)
22 80
70
25 25
(14)
8-M4 depth 8
4-M4 depth 8
4-M3 depth 8
(PCD42)
θ axis Stages
Goniometer
Inclination
124
149.5
25 25
70
80
100
Vacuum
6.5
84±7.5
Z axis clamp
16
TAM-804SL
14.5
MAX84
Hexagonal socket head cap screw M4×8…4 screws
14.5
70
80
MAX113
70
80
6.5
X axis clamp
M16 P1 depth 6
84±7.5
4-M4 depth 8
(PCD62)
124
X axis clamp
149.5
3
4-4.5 mounting hole
8 counterbore
22
70
80
70
25 25
70
(14)
M16 P1 depth 6
8-M4 depth 8
4-M4 depth 8
4-M3 depth 8
(PCD42)
22
3
25
25
70
80
24
4-4.5 mounting hole
8 counterbore
100
24
Z axis clamp
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E131

Manual Positioners
XZ axis Preset Stages
TASB-4 Stage size □15/□25/□40/□60/□65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Space-saving, compact XZ axis stages with horizontal table top, suitable for less frequent
operations that require fine adjustment.
◦Ideal for less frequent operations and fine adjustment.
◦Elimination of adjustment knobs can prevent errant operations, and elimination of protrusions makes these stages
suitable for assembly in systems.
Guide
▶A hex wrench with knob and clamping wrench are included.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Mounting Method
Detailed Illustration
Index
Guide
Clamp with a screw
from the top
Top mounting
Tapped holes are used as
counterbores because screws
are smaller than tapped holes
and will go in without any
interference.
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
Clamp
About Mounting Holes
Clamp with a screw
from the bottom
Bottom mounting
Clamp with screws that match
the specification of tapped
holes.
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
The bottom mounting
holes of preset stages
are tapped holes.
These stages allow
mounting from the top or
the bottom, convenient
for securing on optical
breadboards or other
instruments as well as
assembling in systems.
Use the screws of the
sizes listed in the table
on the right for mounting.
Part Number
Secure from
the top
Secure from
the bottom
TASB-154 M2 M2.6
TASB-254 M2 M3
TASB-404 M3 M4
TASB-404UU 6-32UNC −
TASB-604 M4 M5
TASB-654-M6 M6 M8
TASB-654UU 1/4-20UNC 5/16-18UNC
* When mounting from the top surface, slide the
top surface to insert screws in mounting holes.
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TASB-154 TASB-254 TASB-404 TASB-604 TASB-654-M6
INCH − − TASB-404UU − TASB-654UU
Table Size [mm] 15×15 25×25 40×40 60×60 65×65
Axes of Travel
Travel [mm]
X axis ±2
Z axis +2 / −0
X axis ±3
Z axis +3 / −0
XZ axis
X axis ±7
Z axis +5 / −0
X axis ±10
Z axis +7 / −0
X axis ±12.5
Z axis +7 / −0
Screw Pitch [mm] 0.4 0.5 0.5 0.5 0.5
Bearing type
Primary Material
Finish
Dovetail slide method
Brass
Black matte
Load Capacity [N] 4.9 (0.5kgf) 6.9 (0.7kgf) 29.4 (3.0kgf) 98.1 (10.0kgf) 98.1 (10.0kgf)
Travel Accuracy Straightness [μm] 30 30 30 30 30
Max. Moment Pitch [N・m] − 0.3 0.5 1.0 1.0
Capacity
Roll [N・m] − 0.3 0.5 1.0 1.0
Moment Stiffness
Pitch [″/N・cm] − 8.2 5.2 1.1 1.1
Roll [″/N・cm] − 5.6 3.1 2.1 2.1
Parallelism [μm] 150 150 150 150 150
Weight [kg] 0.03 0.11 0.4 1.4 1.8
E132
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Catalog
Code
W7203
Outline Drawing
TASB-154
Pan head screw M2×5…3 screws, One 2.5mm hex wrench with knob,
One 0.89mm hex wrench
15
10
3
Z axis clamp
X axis=Wrench size for adjustment 2.5mm, Z axis=Adjustment hole size 1.8mm
Wrench size for clamp common to X and Z axes=0.89mm
[Enlarged view of clamp position]
Z axis clamp
Application
Systems
Optics &
Optical
Coatings
15
10
4
10
10
Holders
X axis clamp
4-M2 depth 3
4
15
23
8
15
23
8
Bases
Manual
Stages
TASB-254
Pan head screw M2×6…3 screws, One 3mm hex wrench with knob,
One 0.89mm hex wrench
25 4
10 10
Wrench size for adjustment X axis=3mm,
Wrench size for clamp common to X and Z axes=0.89mm
Actuators
3 25
10 10
6
23 15
38
20
Motoeized
Stages
Light
Sources
3
6.7
3
10
3-2.2 4 counterbore (Top mounting)
3-M2.6 (Bottom mounting)
6-M2 depth 3.5
M4 depth 4.5
Z axis clamp
X axis clamp
1.5 locking hole
Index
20
3-2.5 4.5 counterbore (Top mounting)
3-M3 (Bottom mounting)
TASB-404/404UU
Pan head screw M3×8…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench
Hexagonal socket head cap screw 6-32UNC×3/8…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench (UU)
Wrench size for adjustment X axis=3mm, Wrench size for clamp common to X and Z axes=1.5mm
One 3mm hex wrench with knob,hex wrench size for clamp 1.5mm (UU)
C depth 5 40 4
A A 6-D depth 5
Z axis clamp
Guide
X axis Stages
XY axis Stages
A
6
Z axis Stages
5 40
A
1.5 locking hole
B
XZ axis Stages
X axis clamp
34
52 5
0
18
XYZ axis Stages
θ axis Stages
TASB-604
Hexagonal socket head cap screw M4×10…4 screws,
One 3mm hex wrench with knob, One 1.5mm hex wrench
X axis=Wrench size for adjustment 3mm, Z axis=Adjustment hole size 3mm
Wrench size for clamp common to X and Z axes=1.5mm
4-M3 depth 8
60
25
25
32
60
25 25
32
5
5
8-M4 depth 8
8
B
8.8
2 locking hole
4-E F counterbore (Top mounting)
G (Bottom mounting)
Z axis clamp
50
Part Number
TASB-654-M6/654UU
Hexagonal socket head cap screw M6×12…4 screws,
One 3mm hex wrench with knob, One 1.5mm hex wrench (M6)
Hexagonal socket head cap screw 6-32UNC×3/8…4 screws,
One 3mm hex wrench with knob, One 1.5mm hex wrench (UU)
Hex wrench size with knob 3mm, hex wrench size for clamp 1.5mm (M6)
Hex wrench size with knob 3mm, hex wrench size for clamp 1.5mm (UU)
65 5
A A 8-C depth 8
Z axis clamp
65
A
A
A
(mm)
B
(mm)
8
C
2 locking hole
D
E
(mm)
F
(mm)
TASB-404 16 32 M4 M3 3.3 6 M4
TASB-404UU 15.875 31.75 8-32UNC 6-32UNC 4 6.5
B
G
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
5
X axis clamp
5.5
50
10
38
59
21
4-4.2 8 counterbore (Top mounting)
4-M5 (Bottom mounting)
4.5
X axis clamp
4.5
Part Number
B
A
(mm)
11
38
61 7
0
23
4-6.7 11 counterbore (Top mounting)
4-D (Bottom mounting)
B
(mm)
TASB-654-M6 25 50 M6 M8
TASB-654UU 25.4 50.8 1/4-20UNC 5/16-18UNC
C
D
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E133

Manual Positioners
XZ axis Leadscrew Stages (Vertical)
XZ axis Rack and Pinion Dovetail Stages (Vertical)
TAS-4L
TAR-4L
Catalog
Code
Catalog
Code
W7069
W7070
Application
Systems
Optics &
Optical
Coatings
The TAS type stages have dovetail groove guide and leadscrew adjustment system, suitable for
less frequent operations that require fine adjustment.
The TAR type stages have dovetail groove guide and rack and pinion system, suitable for frequent
operations that require quick motion and long travel.
◦The feed handle offers excellent operability.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Guide
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
■Mounting Method of TAR-25504L
Use M3 pan head screws (only on
both edges) to secure from the top,
and M4 pan head screws to secure
from the bottom.
■Components
Part Number
Z axis
X axis
TAR-25504L
TARW-25503L
TARW-25501
TAR-34804L include a base plate that allows mounting on instruments
or bases fitted with M4 tapped holes on □50mm,
preventing the handle from contacting the mounting surface.
60
50
20
60
50
36
Bottom Plate
4
10
4
Primary material: Aluminum
Finish: Black Anodized
4-φ4.5 mounting hole
φ8 counterbore
4-φ4.5 stage surface mounting hole
φ8 counterbore
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TAS-24304L TAS-20604L TAR-25504L TAR-34804L TAR-38404L-M6 TAR-60554D TAR-60704D
INCH − − − − TAR-38404LUU − −
Table Size [mm] 24×30 18×60 25×50 34×40 38×40 60×60 60×60
Axes of Travel
Travel [mm]
X axis ±4
Z axis ±4
X axis ±7.5
Z axis ±7.5
X axis ±10
Z axis ±10
XZ axis
X axis ±25
Z axis +25 / −20
X axis ±15
Z axis +45 / −0
Lead of Actuator [mm/rotation] 0.5 0.5 about 20 about 20 about 20
X axis +27 / −0
Z axis +18 / −0
Coars: about 20
Fine: about 2.5
X axis +37 / −0
Z axis +33 / −1
Coars: about 20
Fine: about 2.5
Vernier Readable Resolution [mm] − 0.1
Bearing type
Dovetail slide method
Primary Material
Brass
Finish
Super black chrome
Load Capacity [N] 4.9 (0.5kgf) 9.8 (1.0kgf) 9.8 (1.0kgf) 14.7 (1.5kgf) 14.7 (1.5kgf) 24.5 (2.5kgf) 24.5 (2.5kgf)
Travel Accuracy Straightness [μm] 20 20 30 30 30 30 30
Max. Moment Pitch [N・m] 0.5 0.2 0.5 0.5 0.5 0.4 0.4
Capacity
Roll [N・m] 0.2 0.2 0.5 0.5 0.5 0.5 0.5
Moment Stiffness Pitch [″/N・cm] − − 3.98 2 2 − −
Weight [kg] 0.42 1.0 0.52 1.1 1.2 0.83 0.85
E134
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Catalog
XZ axis Fine and Coarse Drive Rack and pinion Dovetail Stages (Vertical) TAR-4D Code W7516
Outline Drawing
TAS-24304L
24
15
10
Pan head screw M3×5…4 screws
14
TAS-20604L
38
13
Hexagonal socket head cap screw M4×10…4 screws
4-M4 depth 6
18
Application
Systems
Optics &
Optical
Coatings
6-M3 depth 5
Z axis clamp
Z axis clamp
Holders
X axis clamp
71
30
20
TAR-25504L
3-M4 depth 5
10-M3 depth 5
63
50
10 10 10 10
22
35.5±4
1
4-3.5 mounting hole
6 counterbore
25
20
20
10
32
40
Pan head screw M3×8…4 screws
20
Z axis clamp
MAX95
60±10
7.75
(15)
X axis clamp
113
60
50
TAR-34804L
X axis clamp
50
60
93
X axis clamp
16
5
25.5
50
60
57.5±7.5
Hexagonal socket head cap screw M4×8…4 screws
4
9
79 +25
–20
119
30
Z axis clamp
35
34
24
4-4.5
mounting hole
4-M3 depth 5
14
40
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
35
3.8
20
10 25 20
40
2-3.3 6 counterbore (Top mounting)
50
4-M4 (Bottom mounting)
3.2
16
50
(22) 60
4
4-4.5 mounting hole
8 counterbore
50
60
80
Guide
X axis Stages
TAR-38404L-M6/38404LUU
Hexagonal socket head cap screw M6×10…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
27
38
A
4-C depth 6
XY axis Stages
Z axis Stages
XZ axis Stages
5
XYZ axis Stages
30
A
40
θ axis Stages
X axis clamp
2.5
82+25−20
122
Z axis clamp
Goniometer
Inclination
18
(14)
B
65
4-D mounting hole
11 counterbore
3
B
65
38
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TAR-38404L-M6 25 50 M6 6.5
TAR-38404LUU 25.4 50.8 1/4-20UNC 7
Vacuum
TAR-60554D
6-M4 depth 7
Hexagonal socket head cap screw M4×8…4 screws
60
M16 P1 depth 7
25 25
TAR-60704D
6-M4 depth 7
Hexagonal socket head cap screw M4×8…4 screws
60
25 25
M16 P1 depth 7
Ball Guide
Crossed Roller
25
25
Dovetail
60
25
Coars knob
Fine knob
51 Travel 18
30
22
30
4.5
(134)
107
50
60
50
60
32
34
Clamp
55
4-4.5 mounting hole
8 counterbore
Travel 33 60
25
Coars knob
Fine knob
51
30
22
30
(144)
107
4.5
50
60
50
34 60
47
Clamp
70
4-4.5 mounting hole
8 counterbore
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E135

Manual Positioners
XYZ axis Steel Extended Contact Slide Stages
TSD-255 Stage size □25mm
TSD-405 Stage size □40mm
These stages are combinations of ball bearing slide guide XY axis stages and flat Z axis stages.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Guide
▶Vacuum-compatible stainless steel stages (TSDS-255/405) are also
available. E210
Attention
▶The structure does not allow upside down installation since the
spring inside the stage might not be able to withstand the load and
may stretch.
▶Since the structure uses the principle of leverage, the feed rate
fluctuates against the scale depending on the travel (about
±0.02mm for micrometer head 0.5mm/rotation).
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
(Opposite Model)
METRIC TSD-255C TSD-255S TSD-405C TSD-405S
INCH − − TSD-405CUU TSD-405SUU
METRIC − TSD-255SR − TSD-405SR
INCH − − − TSD-405SRUU
Table Size [mm] 25×25 25×25 40×40 40×40
Axes of Travel
XYZ axis
Micrometer Position Center Side Center Side
Travel [mm] XY axis ±3 Z axis ±3 XY axis ±3 Z axis ±3 XY axis ±6.5 Z axis ±3 XY axis ±6.5 Z axis ±3
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Finish
Extended contact ball guide
Steel
Super black chrome + Black matte
Load Capacity [N] 29.4 (3.0kgf) 29.4 (3.0kgf) 88.3 (9.0kgf) 88.3 (9.0kgf)
Travel Accuracy Straightness [μm] 5 5 2.5 2.5
Max. Moment Pitch [N・m] 1.0 1.0 3.9 3.9
Capacity
Roll [N・m] 1.0 1.0 3.9 3.9
Pitch [″/N・cm] 10.55 10.55 2.34 2.34
Moment Stiffness
Roll [″/N・cm] 10.55 10.55 2.34 2.34
Parallelism [μm] 130 130 130 130
Options FP FP FP FP
Weight [kg] 0.2 0.2 0.55 0.55
Option for □25mm
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number
[mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-42525 0.25 − E008
Option for □40mm
Option Code
FP
Compatible product
Products Name
Part Number
XY axis: FPSA-62540
Fine-pitch Screw Adjusters
Z axis: FPSA-42525
Lead of Actuator
[mm/rotation]
* Please add an option code as the part number suffix to specify various optional specifications.
* The load capacity of the FP type is 39.2N (4.0kgf). (□40mm)
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
Micrometer Readable Resolution
[mm]
0.25 − E008
E136
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Catalog
Code
Catalog
Code
W7071
W7072
Outline Drawing
TSD-255C
Hexagonal socket head cap screw
M2×4…4 screws
MAX41
25
10 10
7-M2 depth 4
10 10
25
Y axis clamp
20
Application
Systems
Optics &
Optical
Coatings
MAX41
Holders
TSD-255S
17.5
1.5
Hexagonal socket head cap screw M2×4…4 screws
(3)
20
Z axis clamp
20 24
44±3
9.5
27
X axis clamp
4-2.4 mounting hole
4 counterbore
TSD-255SR
Hexagonal socket head cap screw M2×4…4 screws
Bases
Manual
Stages
Actuators
7-M2 depth 4
(7)
25
10 10
MAX38
44±3
24
20
12 MAX49
25
10 10
Z axis clamp
15
Y axis clamp
7
27
20
MAX49
15
MAX49 (7)
25
10 10
10 10
24 MAX38 25
7-M2 depth 4
Y axis clamp
Z axis clamp
1.5
20
44±3
27
7
20
Motoeized
Stages
Light
Sources
Index
1.5
20
X axis clamp
4-2.4 mounting hole
4 counterbore
20
X axis clamp
4-2.4 mounting hole
4 counterbore
Guide
X axis Stages
TSD-405C/405CUU
Hexagonal socket head cap screw
M3×6…4 screws, Spring washers
Hexagonal socket head cap screw
6-32UNC×3/16…4 screws (UU)
MAX66
40
A A Y axis clamp
A
A
40 (9.5)
X axis clamp
B
XY axis Stages
Z axis Stages
XZ axis Stages
7-C depth 5
XYZ axis Stages
MAX66
θ axis Stages
Z axis clamp
34
10.5
37
Goniometer
Inclination
21.5
1.5
B
27
61±3
4-D mounting hole
E counterbore
Part Number
A
(mm)
B
(mm)
C
D
(mm)
E
(mm)
TSD-405C 16 32 M3 3.5 6
TSD-405CUU 15.875 31.75 6-32UNC 4 6.5
Vacuum
TSD-405S/405SUU
Hexagonal socket head cap screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)
7-C depth 5
61±3
MAX74
34
27
18
4-D mounting hole
E counterbore
Part Number
40
A A
B
MAX74
A
A
1.5
A
(mm)
40 (9.5)
Z axis clamp
20
B
(mm)
Y axis clamp
C
37
9
X axis clamp
B
D
(mm)
E
(mm)
TSD-405S 16 32 M3 3.5 6
TSD-405SUU 15.875 31.75 6-32UNC 4 6.5
TSD-405SR/405SRUU
Hexagonal socket head cap screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×3/16…4 screws (UU)
40 (9.5) 9
A A 7-C depth 5
Y axis clamp
X axis clamp
20
MAX74
4-D mounting hole
E counterbore
Part Number
MAX74
B
A
A
1.5
A
(mm)
40 (9.5)
MAX32
Z axis clamp
27 34
61±3
B
(mm)
C
37
B
D
(mm)
E
(mm)
TSD-405SR 16 32 M3 3.5 6
TSD-405SRUU 15.875 31.75 6-32UNC 4 6.5
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E137

Manual Positioners
XYZ axis Steel Extended Contact Slide Stages
TSD-605 Stage size □60mm
TSD-655 Stage size □65mm
These stages are combinations of ball bearing slide guide XY axis stages and flat Z axis stages.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Guide
▶Vacuum-compatible stainless steel stages (TSDS-605/655) are also
available. E210
Attention
▶The structure does not allow upside down installation since the
spring inside the stage might not be able to withstand the load and
may stretch.
▶Since the structure uses the principle of leverage, the feed rate
fluctuates against the scale depending on the travel (about
±0.02mm for micrometer head 0.5mm/rotation).
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
(Opposite Model)
METRIC TSD-605C TSD-605S TSD-655C-M6 TSD-655S-M6
INCH − − TSD-655CUU TSD-655SUU
METRIC − TSD-605SR − TSD-655SR-M6
INCH − − − TSD-655SRUU
Table Size [mm] 60×60 60×60 65×65 65×65
Axes of Travel
XYZ axis
Micrometer Position Center Side Center Side
Travel [mm] XY axis ±6.5 Z axis ±5 XY axis ±6.5 Z axis ±5 XY axis ±6.5 Z axis ±5 XY axis ±6.5 Z axis ±5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Finish
Extended contact ball guide
Steel
Super black chrome + Black matte
Load Capacity [N] 147 (15.0kgf) 147 (15.0kgf) 147 (15.0kgf) 147 (15.0kgf)
Travel Accuracy Straightness [μm] 2.5 2.5 2.5 2.5
Max. Moment Pitch [N・m] 6.9 6.9 6.9 6.9
Capacity
Roll [N・m] 6.9 6.9 6.9 6.9
Pitch [″/N・cm] 0.81 0.81 0.81 0.81
Moment Stiffness
Roll [″/N・cm] 0.81 0.81 0.81 0.81
Parallelism [μm] 130 130 130 130
Options FP FP FP FP
Weight [kg] 1.9 1.9 2.0 2.0
Option
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number
[mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The load capacity of the FP type is 39.2N (4.0kgf).
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
E138
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Catalog
Code
Catalog
Code
W7073
W7141
Outline Drawing
TSD-605C
Hexagonal socket head cap screw
M4×6…4 screws
MAX66 60
25 25
7-M4
depth 6 32
(11)
32
25
(11)
Y axis clamp
X axis clamp
Application
Systems
Optics &
Optical
Coatings
60
24.5
50
4-M3 depth 6
M16 P1 depth 6
Z axis clamp
32 55 25
87±5 MAX66
10.5
47
Holders
Bases
Manual
Stages
TSD-605S
4-M3 depth 6
MAX88
M16 P1 depth 6
20.8
Hexagonal socket head cap screw M4×6…4 screws
60
25 25
32
MAX88
7-M4 depth 6
32
25 25
MAX44 60 (11)
1.5
50
10.5
47
4-4.5 mounting hole
8 counterbore
Y axis clamp
X axis clamp
50
TSD-605SR
4-M3 depth 6
MAX88
Hexagonal socket head cap screw M4×6…4 screws
60 (11)
7-M4 depth 6
25 25
10.5
32
Y axis clamp
MAX88
M16 P1 depth 6
47
Z axis clamp
32
25 25
MAX44 60
50
X axis clamp
Actuators
Motoeized
Stages
Light
Sources
Index
87±5
32 55
4-4.5 mounting hole
8 counterbore
50
TSD-655C-M6/655CUU
1.5
Hexagonal socket head cap screw
M6×6…4 screws (M6)
Hexagonal socket head cap screw
1/4-20UNC×1/4…4 screws (UU)
Z axis clamp
24.5
MAX69
7-C
depth 6
65
A A
(11)
A A
65 (11)
24.5
4-4.5 mounting hole
8 counterbore
Y axis clamp
X axis clamp
B
50
1.5
32 55
87±5
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
MAX69
Z axis clamp
12
47
θ axis Stages
Goniometer
Inclination
TSD-655S-M6/655SUU
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
7-C depth 6
87±5
55
32
MAX91
4-7 mounting hole
D counterbore
Part Number
20.5
65
A A
MAX91
B
A
(mm)
24
(11)
(11)
A A
65
MAX41
1.5
Z axis clamp
1.5
24.5
B
(mm)
B
11
47
55
32
87±5
4-7 mounting hole
D counterbore
Y axis clamp
X axis clamp
C
B
D
(mm)
TSD-655S-M6 25 50 M6 P1 11
TSD-655SUU 25.4 50.8 1/4-20UNC 12
Part Number
TSD-655SR-M6/655SRUU
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
24.5
MAX91
20.5
4-7 mounting hole
D counterbore
Part Number
A
(mm)
65
A A
MAX91
B
1.5
(11) 7-C depth 6
A
A
A
(mm)
B
(mm)
(11)
65
MAX41
Z axis clamp
32 55
87±5
B
(mm)
47
Y axis clamp
C
X axis clamp
B
D
(mm)
TSD-655SR-M6 25 50 M6 P1 11
TSD-655SRUU 25.4 50.8 1/4-20UNC 12
C
D
(mm)
TSD-655C-M6 25 50 M6 P1 11
TSD-655CUU 25.4 50.8 1/4-20UNC 12
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E139

Manual Positioners
XYZ axis Steel Extended Contact Slide Stages
TSD-805 Stage size □80mm
TSD-1005 Stage size □100mm
These stages are combinations of ball bearing slide guide XY axis stages and flat Z axis stages.
Application
Systems
Optics &
Optical
Coatings
Holders
Attention
▶The structure does not allow upside down installation since the
spring inside the stage might not be able to withstand the load and
may stretch.
▶Since the structure uses the principle of leverage, the feed rate
fluctuates against the scale depending on the travel (about
±0.02mm for micrometer head 0.5mm/rotation).
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Specifications
Part Number METRIC TSD-805C TSD-805S TSD-1005C TSD-1005S
(Opposite Model) METRIC TSD-805SR − TSD-1005SR
Table Size [mm] 80×80 80×80 100×100 100×100
Axes of Travel
XYZ axis
Micrometer Position Center Side Center Side
Travel [mm] XY axis ±12.5 Z axis ±5 XY axis ±12.5 Z axis ±5 XY axis ± 12.5 Z axis ±10 XY axis ±12.5 Z axis ±10
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Steel
Inclination
Finish
Super black chrome + Black matte
Vacuum
Load Capacity [N] 147 (15.0kgf) 147 (15.0kgf) 245 (25.0kgf) 245 (25.0kgf)
Travel Accuracy Straightness [μm] 2.5 2.5 2.5 2.5
Max. Moment
Capacity
Pitch [N・m] 6.9 6.9 9.8 9.8
Roll [N・m] 6.9 6.9 9.8 9.8
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Pitch [″/N・cm] 0.67 0.67 0.45 0.45
Moment Stiffness
Roll [″/N・cm] 0.67 0.67 0.45 0.45
Parallelism [μm] 130 130 150 150
Options FP FP FP FP
Weight [kg] 2.6 2.6 6.1 6.1
Option for □80mm
Option Code
FP
Option for □100mm
Products Name
Fine-pitch Screw Adjusters
Compatible product
Part Number
XY axis: FPSA-62550
X axis: FPSA-62540
Lead of Actuator
[mm/rotation]
Micrometer Readable Resolution
[mm]
0.25 − E008
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number
[mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62555 0.25 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The load capacity of the FP type is 39.2N (4.0kgf).
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
E140
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Catalog
Code
Catalog
Code
W7074
W7075
Outline Drawing
TSD-805C
MAX94
4-M4
depth 6
Hexagonal socket head cap screw M4×8…4 screws
80
70
25 25
(11)
(11)
Y axis clamp
X axis clamp
Application
Systems
Optics &
Optical
Coatings
25
25
70
80
70
Holders
7-M4 depth 6
M16 P1 depth 6
MAX94
Bases
24
Z axis clamp
3
TSD-805S
7-M4 depth 6
MAX122
M16 P1 depth 6
87±5
55
32
4-4.5 mounting hole
8 counterbore
TSD-1005C
70
20.8 80
70
25 25
32 55
87±5
4-4.5 mounting hole
8 counterbore
12
47
Hexagonal socket head cap screw M4×8…4 screws
MAX122
70
25
(11)
3
25
24.5 70
MAX34
80
MAX109 100 (11)
90
4-M4 depth 8 25 25
4-M4 depth 6
Z axis clamp
11
47
Y axis clamp
X axis clamp
70
Hexagonal socket head cap screw M4×8…4 screws
50
90
100 (11)
Y axis clamp
X axis clamp
90
TSD-805SR
7-M4 depth 6
24.5
MAX122
3
Hexagonal socket head cap screw M4×8…4 screws
20.8 80
70 4-M4 depth 6
25 25
Y axis clamp
MAX122
70
(11)
25 25
70
80
MAX34
M16 P1 depth 6
Z axis clamp
55
32
87±5
4-4.5 mounting hole
8 counterbore
47
11
X axis clamp
70
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
6-M4 depth 8
M16 P1 depth 6
MAX109
Goniometer
Inclination
Z axis clamp
44.5
10.5
Vacuum
34
24.5
90
124±10
TSD-1005S
6-M4 depth 8
2.5
22
90
Hexagonal socket head cap screw M4×8…4 screws
100
90
25 25
4-4.5 mounting hole
8 counterbore
4-M4 depth 8
(11)
Y axis clamp
X axis clamp
TSD-1005SR
6-M4 depth 8
100
90
25 25
Hexagonal socket head cap screw M4×8…4 screws
(11)
4-M4 depth 8
10.5
Y axis clamp
X axis clamp
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
124±10
90
MAX149
M16 P1 depth 6
34
10.5
4-4.5 mounting hole
8 counterbore
MAX149
90
50
90
100
2.5
24.5
MAX87
Z axis clamp
44.5
90
24.5
MAX149
4-4.5 mounting hole
8 counterbore
MAX149
90
50
90
100
2.5
MAX87
M16 P1 depth 6
Z axis clamp
90
124±10
34
44.5
90
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E141

Manual Positioners
XYZ axis Steel Extended Contact Slide Stages
TSD-1205 Stage size □120mm
These stages are combinations of ball bearing slide guide XY axis stages and flat Z axis stages.
Application
Systems
Optics &
Optical
Coatings
Holders
Attention
▶The structure does not allow upside down installation since the
spring inside the stage might not be able to withstand the load and
may stretch.
▶Since the structure uses the principle of leverage, the feed rate
fluctuates against the scale depending on the travel (about
±0.02mm for micrometer head 0.5mm/rotation).
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
(Opposite Model)
METRIC TSD-1205C TSD-1205S TSD-1205C-M6 TSD-1205S-M6
INCH − − TSD-1205CUU TSD-1205SUU
METRIC − TSD-1205SR − TSD-1205SR-M6
INCH − − − TSD-1205SRUU
Table Size [mm] 120×120 120×120 120×120 120×120
Axes of Travel
XYZ axis
Micrometer Position Center Side Center Side
Travel [mm] XY axis ±20 Z axis ±10 XY axis ±20 Z axis ±10 XY axis ±20 Z axis ±10 XY axis ±20 Z axis ±10
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Finish
Extended contact ball guide
Steel
Super black chrome + Black matte
Load Capacity [N] 245 (25.0kgf) 245 (25.0kgf) 245 (25.0kgf) 245 (25.0kgf)
Travel Accuracy Straightness [μm] 2.5 2.5 2.5 2.5
Max. Moment Pitch [N・m] 9.8 9.8 9.8 9.8
Capacity
Roll [N・m] 9.8 9.8 9.8 9.8
Pitch [″/N・cm] 0.41 0.41 0.41 0.41
Moment Stiffness
Roll [″/N・cm] 0.41 0.41 0.41 0.41
Parallelism [μm] 150 150 150 150
Weight [kg] 7.3 7.3 7.3 7.3
E142
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Catalog
Code
W7142
Outline Drawing
TSD-1205C
Hexagonal socket head cap screw
M4×8…4 screws
MAX147 120
50 50
7-M4 depth 8 25 25
6-M4 depth 8
M16 P1 depth 6
(11)
50
50 50
MAX147 120 (11)
Y axis clamp
X axis clamp
100
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Z axis clamp
90
128±10
12
48.5
Manual
Stages
TSD-1205S
22 120
7-M4 depth 8 50 50
6-M4 depth 8 25 25
128±10
90 MAX189
M16 P1 depth 6
38
4-4.5 mounting hole 100
8 counterbore
TSD-1205C-M6/1205CUU
Hexagonal socket head cap screw
M6×8…4 screws (M6)
Hexagonal socket head cap screw
1/4-20UNC×5/16…4 screws (UU)
Hexagonal socket head cap screw M4×8…4 screws
MAX189
28
50
50 50
3.5
(11)
120
MAX77
Z axis clamp
27.5
B
4-D mounting hole
E counterbore
TSD-1205S-M6/1205SUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
22-C depth 8
MAX189
90
128±10
38
22
4-D mounting hole
E counterbore
Part Number
120
A A A A
MAX189
B
A
(mm)
A A A A
28
(11)
120
MAX77
Z axis clamp
2
27.3
B
(mm)
3.5
100
48.5
Y axis clamp
X axis clamp
100
MAX147 120
22-C depth 8 A A A A
2
C
48.5
11.3
38
4-4.5 mounting hole
8 counterbore
(11)
A A
A
A
38
(11)
120
MAX147
Z axis clamp
90
128±10
Y axis clamp
X axis clamp
B
11.3
D
(mm)
E
(mm)
TSD-1205S-M6 25 100 M6 P1 6.5 11
TSD-1205SUU 25.4 101.6 1/4-20UNC 7 12
TSD-1205SR
M16 P1 depth 6
27.5
MAX189
4-4.5 mounting hole
8 counterbore
12
48.5
Y axis clamp
X axis clamp
B
Part Number
Hexagonal socket head cap screw M4×8…4 screws
120 6-M4 depth 8
11.3
50 50 7-M4 depth 8
25 25
X axis clamp
X axis clamp
MAX189
100
50
50
120
3.5
50
90
128±10
38
(11)
MAX77
Z axis clamp
TSD-1205SR-M6/1205SRUU
48.5
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
120 (11) 22-C depth 8 11.3
A A A A
Y axis clamp
X axis clamp
27.3
MAX189
Part Number
A
(mm)
MAX189
B
A
(mm)
B
(mm)
A A A A
2
(11)
120
MAX77
Z axis clamp
90
128±10
38
4-D mounting hole
E counterbore
B
(mm)
C
48.5
100
B
D
(mm)
E
(mm)
TSD-1205SR-M6 25 100 M6 P1 6.5 11
TSD-1205SRUU 25.4 101.6 1/4-20UNC 7 12
C
D
(mm)
E
(mm)
TSD-1205C-M6 25 100 M6 P1 6.5 11
TSD-1205CUU 25.4 101.6 1/4-20UNC 7 12
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E143

Manual Positioners
XYZ axis Steel Extended Contact Slide Stages (Vertical)
TSD-255L Stage size □25mm
TSD-405L Stage size □40mm
Application
Systems
Optics &
Optical
Coatings
These stages are combinations of ball bearing slide guide XY axis stages and vertical mounting
type Z axis stages.
Guide
▶Vacuum-compatible stainless steel stages (TSDS-255*L/405*L)
are also available. E212
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
(Opposite Model)
METRIC TSD-255CL TSD-255SL TSD-405CL TSD-405SL
INCH − − TSD-405CLUU TSD-405SLUU
METRIC − TSD-255SRL − TSD-405SRL
INCH − − − TSD-405SRLUU
Table Size [mm] 25×25 25×25 40×40 40×40
Axes of Travel
XYZ axis
Micrometer Position Center Side Center Side
Travel [mm] XY axis ±3 Z axis ±3 XY axis ±3 Z axis ±3 XY axis ±6.5 Z axis ±6.5 XY axis ±6.5 Z axis ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Finish
Extended contact ball guide
Steel
Super black chrome
Load Capacity [N] 14.7 (1.5kgf) 14.7 (1.5kgf) 49 (5.0kgf) 49 (5.0kgf)
Travel Accuracy Straightness [μm] 1 1 1 1
Max. Moment Pitch [N・m] 2.2 2.2 5.0 5.0
Capacity
Roll [N・m] 2.1 2.1 5.0 5.0
Moment Stiffness Pitch [″/N・cm] 6.7 6.7 1.1 1.1
Options FP FP FP FP
Weight [kg] 0.2 0.2 0.6 0.6
Option for □25mm
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-42525 0.25 − E008
Option for □40mm
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
E144
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Catalog
Code
Catalog
Code
W7077
W7078
Outline Drawing
TSD-255CL
Hexagonal socket head cap screw M2×4…4 screws
7
25 (7)
M4 depth 4
20
6-M2 depth 4
Z axis clamp
17.5
45±3
57.5
81.2
9.5
10 10
25
20 37.5
20
X axis clamp
MAX41 20
MAX41 25 (6.5)
1.5
Y axis clamp
4-2.4 mounting hole
4 counterbore
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
TSD-255SL
Hexagonal socket head cap screw M2×4…4 screws
TSD-255SRL
Hexagonal socket head cap screw M2×4…4 screws
Actuators
7
25 12
M4 depth 4
20
6-M2 depth 4
7 12 25
20
M4 depth 4
6-M2 depth 4
Z axis clamp
Motoeized
Stages
7
20
25
MAX49
45±3
57.5
(6.5)
81.2
15
1.5
20
MAX49
10 10
25
20 37.5
4-2.4 mounting hole
4 counterbore
X axis clamp
12
20
25
MAX49
7
45±3
57.5
81.2
1.5
Y axis clamp
4-2.4 mounting hole
4 counterbore
20
MAX49
10 10
15 25
20 37.5
Light
Sources
Index
Guide
TSD-405CL/405CLUU
10.5
Hexagonal socket head cap screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×3/6…4 screws (UU)
40
A A
(9.5)
D depth 5
8-C depth 5
Z axis clamp
A
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
21.5
MAX66
Part Number
B
40
A
(mm)
0.5
62±6.5
82
109
10.5
X axis clamp
(9.5)
B
(mm)
C
D
MAX66
E
(mm)
B
F
(mm)
TSD-405CL 16 32 M3 M6 P1 3.5 6
TSD-405CLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
1.5
A
40
55
27
Y axis clamp
4-E mounting hole
F counterbore
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
TSD-405SL/405SLUU
Hexagonal socket head cap screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×3/6…4 screws (UU)
10.5 40
A A
18
D depth 5
8-C depth 5
Z axis clamp
TSD-405SRL/405SRLUU
Hexagonal socket head cap screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×3/6…4 screws (UU)
10.5 19.5 40
A A
D depth 5
8-C depth 5
Z axis clamp
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
A
9
A
X axis clamp
B
40
MAX74
Part Number
0.5
A
(mm)
62±6.5
82
109
Y axis clamp
(9.5)
B
(mm)
20
C
1.5
B
MAX74
D
A
40
55
27
4-E mounting hole
F counterbore
E
(mm)
F
(mm)
TSD-405SL 16 32 M3 M6 P1 3.5 6
TSD-405SLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
X axis clamp
18
Part Number
B
40
MAX74
0.5
A
(mm)
9
62±6.5
82
109
Y axis clamp
4-E mounting hole
F counterbore
B
(mm)
C
1.5
B
MAX74
D
A
E
(mm)
40
20
55
27
F
(mm)
TSD-405SRL 16 32 M3 M6 P1 3.5 6
TSD-405SRLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E145

Manual Positioners
XYZ axis Steel Extended Contact Slide Stages (Vertical)
TSD-605L Stage size □60mm
TSD-655L Stage size □65mm
Application
Systems
Optics &
Optical
Coatings
These stages are combinations of ball bearing slide guide XY axis stages and vertical mounting
type Z axis stages.
Guide
▶Vacuum-compatible stainless steel stages (TSDS-605*L/655*L)
are also available. E212
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
(Opposite Model)
METRIC TSD-605CL TSD-605SL TSD-655CL-M6 TSD-655SL-M6
INCH − − TSD-655CLUU TSD-655SLUU
METRIC − TSD-605SRL − TSD-655SRL-M6
INCH − − − TSD-655SRLUU
Table Size [mm] 60×60 60×60 65×65 65×65
Axes of Travel
XYZ axis
Micrometer Position Center Side Center Side
Travel [mm] XY axis ±6.5 Z axis ±6.5 XY axis ±6.5 Z axis ±6.5 XY axis ±6.5 Z axis ±6.5 XY axis ±6.5 Z axis ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Finish
Extended contact ball guide
Steel
Super black chrome
Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)
Travel Accuracy Straightness [μm] 1 1 1 1
Max. Moment Pitch [N・m] 8.0 8.0 8.0 8.0
Capacity
Roll [N・m] 8.0 8.0 8.0 8.0
Moment Stiffness Pitch [″/N・cm] 0.58 0.58 0.58 0.58
Options FP FP FP FP
Weight [kg] 1.7 1.7 1.9 1.9
Option
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
E146
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
Catalog
Code
W7079
W7143
Outline Drawing
TSD-605CL
Hexagonal socket head cap screw M4×6…4 screws
60
12 25 25
32
(11)
9-M4 depth 6
4-M3 depth 5
Z axis clamp
32
25
60
Application
Systems
Optics &
Optical
Coatings
Holders
24.5
MAX66
TSD-605SL
3.5
82±6.5
112
128.3
10.5
50
X axis clamp
MAX66 50
60 (11)
Hexagonal socket head cap screw M4×6…4 screws
1.5
25
32 80
Y axis clamp
4-4.5 mounting hole
8 counterbore
TSD-605SRL
Hexagonal socket head cap screw M4×6…4 screws
Bases
Manual
Stages
Actuators
12
60 20.8
25 25
32
9-M4 depth 6
4-M3 depth 5
Z axis clamp
32
25
60
12
20.8
60
25 25
32
9-M4 depth 6
4-M3 depth 5
Z axis clamp
32
25
60
Motoeized
Stages
Light
Sources
10.5
X axis clamp
3.5
82±6.5
112
128.3
24.5
25
32
80
X axis clamp
3.5
10.5
82±6.5
112
128.3
25
80
24.5
32
Index
50
60
MAX88
Y axis clamp
(11)
1.5
50
MAX88
4-4.5 mounting hole
8 counterbore
20.8
50
60
MAX88
1.5
Y axis clamp
4-4.5 mounting hole
8 counterbore
50
MAX88
Guide
X axis Stages
TSD-655CL-M6/655CLUU
12
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
65 (11)
A A
9-C depth 6
Z axis clamp
A
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
6
82±6.5
114.5
(128.3)
A
65
82.5
θ axis Stages
Goniometer
24
MAX69
B
65
12
X axis clamp
(11)
MAX69
B
32
Y axis clamp
4-7 mounting hole
D counterbore
1.5
Inclination
Vacuum
Part Number
TSD-655SL-M6/655SLUU
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
12
A
(mm)
B
(mm)
C
65
A A
D
(mm)
TSD-655CL-M6 25 50 M6 P1 11
TSD-655CLUU 25.4 50.8 1/4-20UNC 12
20.8
9-C depth 6
Z axis clamp
TSD-655SRL-M6/655SRLUU
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
12
20.8 65 MAX26
A A
9-C depth 6
Z axis clamp
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
A
A
X axis clamp
11
B
65
MAX91
Part Number
6
82±6.5
114.5
128.3
Y axis clamp
(11)
A
(mm)
24.5
B
(mm)
1.5
B
MAX91
C
A
65
82.5
32
4-7 mounting hole
D counterbore
D
(mm)
TSD-655SL-M6 25 50 M6 P1 11
TSD-655SLUU 25.4 50.8 1/4-20UNC 12
X axis clamp
20.5
B
65
MAX91
Part Number
6
11
82±6.5
114.5
128.3
Y axis clamp
A
(mm)
1.5
B
(mm)
B
C
A
65
82.5
24.5
32
4-7 mounting hole
D counterbore
D
(mm)
TSD-655SRL-M6 25 50 M6 P1 11
TSD-655SRLUU 25.4 50.8 1/4-20UNC 12
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E147

Manual Positioners
XYZ axis Aluminum Crossed Roller Slide Stages (Vertical)
TAM-5L Stage size □40/□60mm
Application
Systems
Light-weight XYZ axis aluminum stages integrating a stage and Z bracket.
Crossed roller guide enables smooth travel.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
(Opposite Model)
METRIC TAM-405CL TAM-405SL TAM-605CL TAM-605SL
INCH TAM-405CLUU TAM-405SLUU − −
METRIC − TAM-405SRL − TAM-605SRL
INCH − TAM-405SRLUU − −
Table Size [mm] 40×40 40×40 60×60 60×60
Axes of Travel
XYZ axis
Micrometer Position Center Side Center Side
Travel [mm] XY axis ±6.5 Z axis ±6.5 XY axis ±6.5 Z axis ±6.5 XY axis ±6.5 Z axis ±6.5 XY axis ±6.5 Z axis ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Finish
Crossed roller
Aluminum
Black anodized
Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)
Travel Accuracy Straightness [μm] 2 2 2 2
Max. Moment Pitch [N・m] 2.75 2.75 5.0 5.0
Capacity
Roll [N・m] 3.0 3.0 5.0 5.0
Moment Stiffness Pitch [″/N・cm] 1.9 1.9 0.9 0.9
Options FP FP FP FP
Weight [kg] 0.4 0.4 0.9 0.9
Option
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
E148
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W7081
Outline Drawing
TAM-405CL/405CLUU
10.4
Pan head screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
A
40
A
(12)
8-D depth 5
C depth 7
Z axis clamp
Application
Systems
Optics &
Optical
Coatings
24.5
62±6.5
82
107.5
11.5
B
X axis clamp
MAX66 40 (12)
Part Number
A
(mm)
4
B
(mm)
C
MAX66
D
B
E
(mm)
A
40
50
Y axis clamp
4-E mounting hole
F counterbore
G
A
F
(mm)
32
G
(mm)
TAM-405CL 16 32 M6 P1 M3 3.5 6 2
TAM-405CLUU 15.875 31.75 1/4-20UNC 6-32UNC 4 6.5 1.5
Holders
Bases
Manual
Stages
Actuators
TAM-405SL/405SLUU
Pan head screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
10.4
40
A A
21
8-D depth 5
C depth 7
Z axis clamp
TAM-405SRL/405SRLUU
Pan head screw M3×6…4 screws, Spring washers
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
10.4
21 40
A A 8-D depth 5
C depth 7
Z axis clamp
Motoeized
Stages
Light
Sources
Index
A
23.5
A
B
40
MAX73
Part Number
4
62±6.5
82
107.5
X axis clamp
(12)
A
(mm)
B
(mm)
Y axis clamp
10.5
C
B
MAX73
D
G
A
40
50
32
4-E mounting hole
F counterbore
E
(mm)
F
(mm)
G
(mm)
TAM-405SL 16 32 M6 P1 M3 3.5 6 2
TAM-405SLUU 15.875 31.75 1/4-20UNC 6-32UNC 4 6.5 1.5
21
Part Number
4
23.5
62±6.5
82
107.5
Y axis clamp
G
B
X axis clamp
40 (12) 4-E mounting hole
MAX73
F counterbore
A
(mm)
B
(mm)
C
B
MAX73
D
A
E
(mm)
40
50
10.5
F
(mm)
G
(mm)
TAM-405SRL 16 32 M6 P1 M3 3.5 6 2
TAM-405SRLUU 15.875 31.75 1/4-20UNC 6-32UNC 4 6.5 1.5
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
TAM-605CL
Hexagonal socket head cap screw M4×8…4 screws
θ axis Stages
12.3
60
25 25
(14)
8-M4 depth 8
M16 P1 depth 6
Z axis clamp
Goniometer
Inclination
30.5
MAX66
TAM-605SL
27.3
12.3
50
60
MAX88
50
60
1.5
78±6.5
108
(14)
129
X axis clamp
15.5
MAX66 50
Hexagonal socket head cap screw M4×8…4 screws
1.5
78±6.5
108
129
X axis clamp
(14)
Y axis clamp
12.3
50
MAX88
2.5 25
60
25 25
60
70
2.5
60 21 8-M4 depth 8
25 25 M16 P1 depth 6
Z axis clamp
25
70
38
4-4.5 mounting hole
8 counterbore
38
Y axis clamp
4-4.5 mounting hole
8 counterbore
TAM-605SRL
21
12.3
1.5
Hexagonal socket head cap screw M4×8…4 screws
21 60
25 25
8-M4 depth 8
M16 P1 depth 6
Z axis clamp
27.3
78±6.5
108
129
Y axis clamp
50
X axis clamp
50
60 (14) 4-4.5 mounting hole MAX88
MAX88
8 counterbore
25
25
2.5
60
70
12.3
38
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E149

Manual Positioners
XYZ axis Aluminum Crossed Roller Slide Stages (Vertical)
TAM-5L Stage size □65/□80mm
Application
Systems
Light-weight XYZ axis aluminum stages integrating a stage and Z bracket.
Crossed roller guide enables smooth travel.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
(Opposite Model)
METRIC TAM-655CL-M6 TAM-655SL-M6 TAM-805CL TAM-805SL
INCH TAM-655CLUU TAM-655SLUU − −
METRIC − TAM-655SRL-M6 − −
INCH − TAM-655SRLUU − −
Table Size [mm] 65×65 65×65 80×80 80×80
Axes of Travel
XYZ axis
Micrometer Position Center Side Center Side
Travel [mm] XY axis ±6.5 Z axis ±6.5 XY axis ±6.5 Z axis ±6.5 XY axis ±7.5 Z axis ±7.5 XY axis ±7.5 Z axis ±7.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Finish
Crossed roller
Aluminum
Black anodized
Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf) 49 (5.0kgf)
Travel Accuracy Straightness [μm] 2 2 2 2
Max. Moment Pitch [N・m] 5.0 5.0 7.0 7.0
Capacity
Roll [N・m] 5.0 5.0 7.0 7.0
Moment Stiffness Pitch [″/N・cm] 0.9 0.9 0.35 0.35
Options FP FP FP FP
Weight [kg] 1.15 1.15 1.5 1.5
Option for □65mm
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 0.25 − E008
Option for □80mm
Compatible product
Lead of Actuator Micrometer Readable Resolution
Option Code
Products Name
Part Number [mm/rotation]
[mm]
FP Fine-pitch Screw Adjusters FPSA-62550 0.25 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
E150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W7081
Outline Drawing
TAM-655CL-M6/655CLUU
13.8
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
65 (14)
A A 9-C depth 8
Z axis clamp
Application
Systems
Optics &
Optical
Coatings
2.5
85±6.5
117.5
140
A A
65
77.5
Holders
Bases
32.5
MAX68
Part Number
B
65
A
(mm)
TAM-655SL-M6/655SLUU
17.5
X axis clamp
(14)
B
(mm)
MAX68
TAM-655CL-M6 25 50 M6 P1 6.5
TAM-655CLUU 25.4 50.8 1/4-20UNC 7
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
13.8
21 65 (14)
A A 9-C depth 8
Z axis clamp
C
B
3
40
Y axis clamp
4-D mounting hole
11 counterbore
D
(mm)
TAM-655SRL-M6/655SRLUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
13.8
21 65 (14)
A A 9-C depth 8
Z axis clamp
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
29.3
2.5
85±6.5
117.5
140
Y axis clamp
14.3
B X axis clamp B
65
MAX94
MAX94
A A
65
77.5
3
40
4-D mounting hole
11 counterbore
21
B
65
MAX94
2.5
29.3
117.5
85±6.5
140
Y axis clamp
3
X axis clamp
4-D mounting hole
11 counterbore
B
MAX94
A A
65
40 77.5
Guide
X axis Stages
XY axis Stages
Z axis Stages
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TAM-655SL-M6 25 50 M6 P1 6.5
TAM-655SLUU 25.4 50.8 1/4-20UNC 7
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TAM-655SRL-M6 25 50 M6 P1 6.5
TAM-655SRLUU 25.4 50.8 1/4-20UNC 7
XZ axis Stages
XYZ axis Stages
TAM-805CL
Hexagonal socket head cap screw M4×8…4 screws
14.5
4-M4 depth 8
(PCD62)
4-M3 depth 8
(PCD42)
80
70
25 25
(14)
4-M4 depth 8
8-M4 depth 8
Z axis clamp
θ axis Stages
Goniometer
Inclination
Vacuum
6.5
100±7.5
140
165.5
M16 P1 depth 6
16
25 25
70
80
100
Ball Guide
32
3
40
Crossed Roller
MAX84
70
80
X axis clamp
(14)
MAX84 70
Y axis clamp
4-4.5 mounting hole
8 counterbore
Dovetail
Lapping
TAM-805SL
30.5
Hexagonal socket head cap screw M4×8…4 screws
14.5
6.5
100±7.5
140
165.5
70
X axis clamp
80 (14)
MAX113
4-M4 depth 8
(PCD62)
4-M3 depth 8
(PCD42)
M16 P1 depth 6
Y axis clamp
14.5
80
70
25 25
70
MAX113
22
4-M4 depth 8
8-M4 depth 8
Z axis clamp
25 25
70
80
100
3
40
4-4.5 mounting hole
8 counterbore
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E151

Manual Positioners
XYZ axis Preset Stages
TASB-5 Stage size □15/□25/□40/□60/□65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Space-saving, compact XYZ axis stages with horizontal table top, suitable for less frequent
operations that require fine adjustment.
◦Ideal for less frequent operations and fine adjustment.
◦Elimination of adjustment knobs can prevent errant operations, and elimination of protrusions makes these stages
suitable for assembly in systems.
Guide
▶A hex wrench with knob and clamping wrench are included.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Mounting Method
Detailed Illustration
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
Clamp
About Mounting Holes
Clamp with a screw
from the top
Clamp with a screw
from the bottom
Top mounting
Tapped holes are used as
counterbores because screws
are smaller than tapped holes
and will go in without any
interference.
Bottom mounting
Clamp with screws that match
the specification of tapped
holes.
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
The bottom mounting
holes of preset stages
are tapped holes.
These stages allow
mounting from the top or
the bottom, convenient
for securing on optical
breadboards or other
instruments as well as
assembling in systems.
Use the screws of the
sizes listed in the table
on the right for mounting.
Part Number
Secure from
the top
Secure from
the bottom
TASB-155 M2 M2.6
TASB-255 M2 M3
TASB-405 M3 M4
TASB-405UU 6-32UNC −
TASB-605 M4 M5
TASB-655-M6 M6 M8
TASB-655UU 1/4-20UNC 5/16-18UNC
* When mounting from the top surface, slide the
top surface to insert screws in mounting holes.
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC TASB-155 TASB-255 TASB-405 TASB-605 TASB-655-M6
INCH − − TASB-405UU − TASB-655UU
Table Size [mm] 15×15 25×25 40×40 60×60 65×65
Axes of Travel
Travel [mm]
XY axis ±2
Z axis +2 / −0
XY axis ±3
Z axis +3 / −0
XYZ axis
XY axis ±7
Z axis +5 / −0
XY axis ±10
Z axis +7 / −0
XY axis ±12.5
Z axis +7 / −0
Screw Pitch [mm] 0.4 0.5 0.5 0.5 0.5
Bearing type
Primary Material
Finish
Dovetail slide method
Brass
Black matte
Load Capacity [N] 4.9 (0.5kgf) 6.9 (0.7kgf) 29.4 (3.0kgf) 98.1 (10.0kgf) 98.1 (10.0kgf)
Travel Accuracy Straightness [μm] 30 30 30 30 30
Max. Moment Pitch [N・m] − 0.3 0.5 1.0 1.0
Capacity
Roll [N・m] − 0.3 0.5 1.0 1.0
Moment Stiffness
Pitch [″/N・cm] − 9.7 5.8 1.5 1.5
Roll [″/N・cm] − 7.7 3.7 2.5 2.5
Parallelism [μm] 200 200 200 200 200
Weight [kg] 0.04 0.16 0.53 1.73 2.22
E152
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Catalog
Code
W7082
Outline Drawing
TASB-155
Pan head screw M2×5…3 screws, One 2.5mm hex wrench with knob,
One 0.89mm hex wrench
15
10
3
15
10 4
Z axis clamp
3
4
10
X axis clamp
XY axis=Wrench size for adjustment 2.5mm, Z axis=Adjustment hole size 1.8mm
Wrench size for clamp common to XYZ axes=0.89mm
[Enlarged view of clamp position]
Z axis clamp
4
X axis clamp
10
Application
Systems
Optics &
Optical
Coatings
Holders
Y axis clamp
4-M2 depth 3
15
14
15
14
Bases
29
29
3
10
10
3-2.2 4 counterbore (Top mounting)
3-M2.6 (Bottom mounting)
Manual
Stages
TASB-255
Pan head screw M2×6…3 screws,
One 3mm hex wrench with knob, One 0.89mm hex wrench
Wrench size for adjustment XY axes=3mm,
Wrench size for clamp common to XYZ axes=0.89mm
Actuators
25 4
1.5 locking hole
4
10 10
Z axis clamp
6.7
Motoeized
Stages
25
10 10
6-M2 depth 3.5
Y axis clamp
17.7 6
M4 depth 4.5
1.5 locking hole
23
49
26
20
X axis clamp
Light
Sources
Index
Pan head screw M3×8…4 screws, One 3mm hex wrench with knob, One 1.5mm hex wrench
Hexagonal socket head cap screw 6-32UNC×3/8…4 screws,
One 3mm hex wrench with knob, One 1.5mm hex wrench (UU)
1.5 locking hole
40 5
A A 6-D depth 5 Z axis clamp 8.8 X axis clamp
TASB-405/405UU
4
3
20
3-2.5 4.5 counterbore (Top mounting)
3-M3 (Bottom mounting)
Wrench size for adjustment XY axis=3mm,
Wrench size for clamp common to XYZ axes=1.5mm
One 3mm hex wrench with knob,hex wrench size for clamp 1.5mm (UU)
Guide
X axis Stages
XY axis Stages
Z axis Stages
40
A
A
B
XZ axis Stages
C depth 5
34
30
XYZ axis Stages
Y axis clamp
5
B
20.8
1.5 locking hole
64 5
0
4-E F counterbore (Top mounting)
4-G (Bottom mounting)
Part Number
A
(mm)
B
(mm)
C
D
E
(mm)
F
(mm)
TASB-405 16 32 M4 M3 3.3 6 M4
TASB-405UU 15.875 31.75 8/32UNC 6-32UNC 4 6.5
G
θ axis Stages
Goniometer
Inclination
Vacuum
TASB-605
Hexagonal socket head cap screw M4×10…4 screws,
One 3mm hex wrench with knob, One 1.5mm hex wrench
XY axes=Wrench size for adjustment 3mm, Z axis=Adjustment hole size 3mm
Wrench size for clamp common to XYZ axes=1.5mm
2 locking hole
60 5
25 25
32
60
25 25
32
5
8
Z axis clamp
8-M4 depth 8
10
X axis clamp
50
TASB-655-M6/655UU
Hexagonal socket head cap screw M6×12…4 screws,
One 3mm hex wrench with knob, One 1.5mm hex wrench (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/2…4 screws,
One 3mm hex wrench with knob, One 1.5mm hex wrench (UU)
Hex wrench size with knob 3mm, hex wrench size for clamp 1.5mm (M6)
Hex wrench size with knob 3mm, hex wrench size for clamp 1.5mm (UU)
2 locking hole
65 5
8-C depth 8
A A
11
Z axis clamp
5
65
A
A
B
X axis clamp
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
4-M3 depth 8
Y axis clamp
5.5
50
2 locking hole
24
38 35
73
4-4.2 8 counterbore (Top mounting)
4-M5 (Bottom mounting)
Y axis clamp
4.5
B
Part Number
25
2 locking hole
38
75 7
0
37
4-6.711 counterbore (Top mounting)
4-D (Bottom mounting)
A
(mm)
B
(mm)
TASB-655-M6 25 50 M6 M8
TASB-655UU 25.4 50.8 1/4-20UNC 5/16-18UNC
C
D
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E153

Manual Positioners
XYZ axis Leadscrew Stages (Vertical)
XYZ axis Rack and Pinion Dovetail Stages (Vertical)
TAS-5L
TAR-5L
Application
Systems
Optics &
Optical
Coatings
The TAS type stages have dovetail groove guide and leadscrew adjustment system, suitable for
less frequent operations that require fine adjustment.
The TAR type stages have dovetail groove guide and rack and pinion system, suitable for frequent
operations that require quick motion and long travel.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Guide
Attention
Light
Sources
■Mounting Method of TAR-25505L
Use M3 pan head screws (only on both
edges) to secure from the top, and M4 pan
head screws to secure from the bottom.
▶Micrometer brackets may extend above the top surface of some
stages. Check drawings for more information.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Index
■Components
Guide
Part Number
Z axis
XY axis
TAR-25505L
TARW-25503L
TARW-25502
X axis Stages
Bottom Plate
Primary material: Aluminum
Finish: Black Anodized
XY axis Stages
Z axis Stages
TAR-34805L include a base plate that allows mounting on instruments
or bases fitted with M4 tapped holes on □50mm,
preventing the handle from contacting the mounting surface.
XZ axis Stages
XYZ axis Stages
θ axis Stages
60
50
36
10
4
4-φ4.5 mounting hole
φ8 counterbore
Goniometer
Inclination
60
50
20
4
4-φ4.5 stage surface mounting hole
φ8 counterbore
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
METRIC TAS-24305L TAS-20605L TAR-25505L TAR-34805L TAR-38405L-M6
Part Number
INCH − − − − TAR-38405LUU
Table Size [mm] 24×30 18×60 25×50 34×40 38×40
Axes of Travel
XYZ axis
Travel [mm]
XY axis ±4
Z axis ±4
XY axis ±7.5
Z axis ±7.5
XY axis ±10
Z axis ±10
X axis +20 / −25
Y axis ±25
Z axis +25 / −20
XY axis ±15
Z axis +45 / −0
Lead of Actuator [mm/rotation] 0.5 0.5 about 20 about 20 about 20
Vernier Readable Resolution [mm] − 0.1
Bearing type
Dovetail slide method
Primary Material
Brass
Finish
Super black chrome
Load Capacity [N] 4.9 (0.5kgf) 9.8 (1.0kgf) 9.8 (1.0kgf) 14.7 (1.5kgf) 14.7 (1.5kgf)
Travel Accuracy Straightness [μm] 30 30 30 30 30
Max. Moment Pitch [N・m] 0.1 0.1 0.5 0.5 1.5
Capacity
Roll [N・m] 0.1 0.1 0.5 0.5 1.0
Weight [kg] 0.62 1.5 0.75 2.1 1.8
E154
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Catalog
Code
W7083
Catalog
Code
W7084
Outline Drawing
TAS-24305L
Pan head screw M3×5…4 screws
TAS-20605L
Hexagonal socket head cap screw M4×10…4 screws
Application
Systems
24
15
10
14
38
13
4-M4 depth 6
18
Optics &
Optical
Coatings
6-M3 depth 5
Y axis clamp
Z axis clamp
Holders
86
30
20
Z axis clamp
7.75
51±4
23.25
133
60
50
Y axis clamp
76±7.5
31.5
Bases
1
4-3.5 mounting hole
6 counterbore
10
32
40
X axis clamp
(15)
24
46.5
(15)
5
50
60
36
X axis clamp
4-4.5 mounting hole
50
60
16
Manual
Stages
93
Actuators
TAR-25505L
3-M4 depth 5
10-M3 depth 5
Pan head screw M3×8…4 screws
25 20
20
Motoeized
Stages
Light
Sources
63
44
50
1010 10 10
20
Z axis clamp
X axis clamp
(117)
82±10
12.5
Y axis clamp
28.8
Index
25
50
3.2
3.8
2-3.3 6 counterbore (Top mounting)
4-M4 (Bottom mounting)
20
40
50
17.5
Guide
X axis Stages
XY axis Stages
TAR-34805L
35
Hexagonal socket head cap screw M4×8…4 screws
34
24
4-M3 depth 5
Z axis
+
9
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
30
14
40
−
Goniometer
Z axis clamp
X axis clamp
144
104 +25
−20
36±20
Y axis clamp
Inclination
Vacuum
4
4-4.5 mounting hole
8 counterbore
−
50
60
Y axis
+
22
−
50
60
80
X axis
+
35
Ball Guide
Crossed Roller
TAR-38405L-M6/38405LUU
Hexagonal socket head cap screw M6×10…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…4 screws (UU)
Dovetail
Lapping
27
38
A
4-C depth 6
5
V Groove Screw
Ohters
30
Z axis clamp
A
40
X axis clamp
150
110 +25
−20
2.5
Y axis clamp
□15mm
□25mm
□40mm
□60mm
□65mm
3
□80mm
4-D mounting hole
11 counterbore
B
65 14
B
65 (14)
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TAR-38405L-M6 25 50 M6 6.5
□100mm
□120mm
Others
TAR-38405LUU 25.4 50.8 1/4-20UNC 7
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E155

Manual Positioners
Thin Type Rotation Stage with Central Aperture
KSPT Stage size □40/□60mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Square footprint θ-axis rotation stages with a clear aperture at the center, achieving table
thickness of 10mm.
Allows installation in arbitrary direction such as vertical or inverted installations due to these
stages having stiffness equal to the TSD.
◦Ideal for assembling in systems that require minute angle adjustment, or for configuring optical systems with low optical
axis because of its low-profile form.
Comparison of Thickness when the KSPT is Used (KSP and TSD → KSPT and TSDT)
Guide
▶Low-profile X axis steel stage (TSDT) with stage thickness of
10mm is also available. E016
▶Fitted with opposed clamp as standard.
▶The part number suffix FP indicates products with
fine-pitch screws instead of standard micrometers.
Fine Pitch screws have a screw pitch of 0.25mm
and require a hex wrench or the optional hex
wrench with knob (KCL) for adjustment.
F010
Attention
▶When installing on a vertical surface, please make sure to place
the micrometer head upside down. Structurally, the spring inside
the stage might not be able to withstand the load and may stretch.
Guide
10.5
51
X axis Stages
XY axis Stages
50
60
50
60
5
30
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Part Number A B
θ axis KSP-606M KSPT-606MH
Y axis
TSDT-601S
TSD-602S
X axis
TSDT-601S
TSDT-601S + KSPT-606MH
combination
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number KSPT-406MH KSPT-406MHFP KSPT-606MH KSPT-606MHFP
Opposite ModelPart Number KSPT-406MRH KSPT-406MRHFP KSPT-606MRH KSPT-606MRHFP
Table Size [mm] 40×40 40×40 60×60 60×60
Rotation Range [ ° ] ±10 ±10 ±10 ±10
Bearing type
Extended contact ball guide
Primary Material
Steel
Finish
Black matte
Load Capacity [N] 78.4 (8.0kgf) 78.4 (8.0kgf) 147 (15.0kgf) 147 (15.0kgf)
Max. Moment Pitch [N・m] 3.9 3.9 6.4 6.4
Capacity
Roll [N・m] 3.9 3.9 6.4 6.4
Pitch [″/N・cm] 0.3 0.3 0.15 0.15
Moment Stiffness
Roll [″/N・cm] 0.6 0.6 0.3 0.3
Parallelism [μm] 30 30 30 30
Eccentricity [μm] 10 10 10 10
Wobble [μm] 10 10 10 10
Weight [kg] 0.11 0.11 0.18 0.18
E156
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Catalog
Code
W7085
Outline Drawing
KSPT-406MH
Low head hexagon socket head cap screw
M3×5…4 screws
40
32
4-M3 depth 4.5
10
1.5
KSPT-406MRH
1.5
10
Low head hexagon socket head cap screw
M3×5…4 screws
40
32
4-M3 depth 4.5
Application
Systems
Optics &
Optical
Coatings
40
32
21
32
32
21
32
40
Holders
15
4-3.5 mounting hole
6 counterbore
4-3.5 mounting hole
6 counterbore
15
Bases
Clamp
MAX40.7
MAX58.5
5
5
MAX58.5
MAX40.7
Clamp
Manual
Stages
32
32
Actuators
KSPT-406MHFP
40
32
Low head hexagon socket head cap screw
M3×5…4 screws
40
10
32
4-M3 depth 4.5
1.5
21
32
3mm
KSPT-406MRHFP
32
10
1.5
Low head hexagon socket head cap screw
3mm
M3×5…4 screws
40
32
4-M3 depth 4.5
21
32
40
Motoeized
Stages
Light
Sources
Index
15
4-3.5 mounting hole
6 counterbore
4-3.5 mounting hole
6 counterbore
15
Clamp
MAX40.7
MAX43
Guide
X axis Stages
32
XY axis Stages
KSPT-606MH
Low head hexagon socket head cap screw
M4×6…4 screws
KSPT-606MRH
Low head hexagon socket head cap screw
M4×6…4 screws
Z axis Stages
60
50
4-M4 depth 4.5
10
1.5
XZ axis Stages
XYZ axis Stages
60
50
40
50
θ axis Stages
Goniometer
Inclination
4-4.5 mounting hole
8 counterbore
Vacuum
MAX42.5
MAX60.5
5
5
5
MAX43
MAX40.7
Clamp
32
1.5
10
60
50
4-M4 depth 4.5
50
40
50
60
15
4-4.5 mounting hole
8 counterbore
15
Clamp
MAX60.5
MAX42.5
Clamp
5
50
50
Ball Guide
Crossed Roller
KSPT-606MHFP
60
50
Low head hexagon socket head cap screw
M4×6…4 screws
4-M4 depth 4.5
10
1.5
3mm
KSPT-406MRHFP
1.5
10
Low head hexagon socket head cap screw
M4×6…4 screws
60
50
3mm
4-M4 depth 4.5
Dovetail
Lapping
V Groove Screw
Ohters
15
60
50
Clamp
MAX42.5
50
40
MAX44.5
5
50
4-4.5 mounting hole
8 counterbore
50
4-4.5 mounting hole
8 counterbore
5
MAX44.5
50
40
MAX42.5
50
15
60
Clamp
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E157

Manual Positioners
θ axis Rotation Stages
KSP-256/406
KSP-606/656/786
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
θ axis (rotation) coarse/fine adjustment stages with plane bearings offer coarse rotation
adjustment of 360° and fine adjustment (with either a micrometer head or fine-pitch screw).
Directly rotate the stage upper plate for coarse adjustment, then clamp the clutch screw and use
micrometer head or fine-pitch screw (±5°) for fine adjustment.
◦The main body of these stages is made of brass for high stiffness. (Except for KSP-786M)
◦The through hole at the center of the stage can be used as a transmission hole.
Guide
▶Using the top plate for KSP-406 (SP-123) to convert mounting
holes, various stages can be mounted. D059
▶Using the top plate for KSP/KSPA (SP-103) to convert mounting
holes, various stages can be mounted. D056
▶Using the bottom plate for KSP-786M (SP-104) to convert mounting
holes, mounting on magnet bases or □60mm stages (M4
50×50) is possible. D056
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC KSP-256 KSP-406M KSP-606M KSP-656M-M6 KSP-786M
INCH − KSP-406MUU − KSP-656MUU −
(Opposite Model) METRIC − KSP-406MR KSP-606MR − −
Table Size [mm] φ25 φ40 φ60 φ65 φ60
Rotation Range [ ° ] Coarse: 360 Fine: ±5 Coarse: 360 Fine: ±5 Coarse: 360 Fine: ±5 Coarse: 360 Fine: ±5 Coarse: 360 Fine: ±5
Scale Readable Resolution 2° 2° 1° 1° 5′
Micrometer Readable Resolution − about 1′24.2″ about 55.8″ about 43.5″ about 51.6″
Bearing type
Lapping method
Primary Material Brass Aluminum
Finish Super black chrome Black anodized
Load Capacity [N] 29.4 (3.0kgf) 49.0 (5.0kgf) 68.6 (7.0kgf) 68.6 (7.0kgf) 49 (5.0kgf)
Max. Moment Capacity [N・m] 0.15 0.3 0.75 0.75 1.3
Moment Stiffness [″/N・cm] 6.1 1.5 0.4 0.4 1.5
Parallelism [μm] 20 20 20 20 50
Eccentricity [μm] 20 20 20 20 20
Wobble [μm] 15 20 20 20 20
Options − FP FP FP FP
Weight [kg] 0.09 0.3 0.6 0.7 0.4
Option
Compatible product
Micrometer Readable Resolution
Option Code
Products Name
Part Number
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
E158
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Catalog
Code
Catalog
Code
W7086
W7088
Outline Drawing
KSP-256
M4 depth 5
3 through hole
Pan head screw M2×5…3 screws
17 12.5
Coarse/Fine switching clamp
7.7
MAX28
25
20
10
25
3-2.4 mounting hole
4 counterbore
MAX28
4-M2 depth 3.5
4-M2 depth 5
PCD20
10
20
2
13 (9) 34.5
Clamp
KSP-406M/406MUU
Pan head screw M3×6…3 screws
Hexagonal socket head cap screw 6-32UNC×1/4…3 screws (UU)
40
B depth 5.5
A
F
4-C depth 6
5 through hole
E
PCDD
Part Number
24.5 20
8
3-G mounting hole
H counterbore
A
(mm)
E
A
50
(9)
MAX42.5 MAX40
Clamp
Coarse/Fine switching clamp
40
B
C
2
13
D
(mm)
E
(mm)
F
G H
(mm) (mm)
KSP-406M 32 M6 P1 M3 30 20 4-M2 depth 2 3.5 6
KSP-406MUU 31.75 1/4-20UNC 6-32UNC 31.75 4 6.5
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
KSP-606M
M16 P1 depth 7
6 through hole
Hexagonal socket head cap screw M4×10…3 screws
60
50
32
4-M3 depth 6
4-M4 depth 8
PCD50
KSP-606MR
M16 P1 depth 7
6 through hole
Hexagonal socket head cap screw M4×10…3 screws
60
50
32
4-M3 depth 6
4-M4 depth 8
PCD50
Index
Guide
10 37 30
Coarse/Fine switching clamp
MAX68
60
3-4.5 mounting hole
7.5 counterbore
MAX57
32
50
6
75
19 (17)
Clamp
Clamp
19 (17)
75
50
32
Coarse/Fine switching clamp
6
MAX57
60
MAX68
3-4.5 mounting hole
7.5 counterbore
30
37
10
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
KSP-656M-M6/656MUU
Hexagonal socket head cap screw M6×8…3 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…3 screws (UU)
C depth 9
5 through hole
65
D
4-B depth 7
PCD A
KSP-786M
4-3.5 mounting hole 6 counterbore
PCD42
Pan head screw M3×12…4 screws
78
4-M4 depth 5
PCD50
Ball Guide
Crossed Roller
39.5 32.5
D
80
M16 P1 depth 17
15 through hole
Coarse/Fine switching clamp
39
49
Dovetail
Lapping
V Groove Screw
Ohters
MAX68
Coarse/Fine switching clamp
11
Part Number
A
(mm)
65
MAX57
B
(14)
3
Clamp
20
3-E mounting hole
11 counterbore
C
D
(mm)
E
(mm)
KSP-656M-M6 50 M6 P1 M6 P1 50 φ6.5
KSP-656MUU 50.8 1/4-20UNC 1/4-20UNC 50.8 φ7
7
MAX65 37.5
60
7.5
20
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E159

Manual Positioners
θ axis Rotation Stages with Aperture
KSPA
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
θ axis (rotation) coarse/fine adjustment stages with plane bearings offer coarse rotation adjustment
of 360° and fine adjustment (with either a micrometer head or fine-pitch screw).
Directly rotate the stage upper plate for coarse adjustment, then clamp the clutch screw and use
micrometer head or fine-pitch screw (±5°) for fine adjustment.
◦Light-weight and high precision aluminum rotation stages.
◦The through hole at the center of the stage can be used as a transmission hole.
Guide
▶Using the top plate for KSP/KSPA (SP-103) to convert mounting
holes, various stages can be mounted. D056
▶Mounting holes can be converted using the bottom plate for
KSPA-806M/1006M (SP-117). D058
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC KSPA-806M KSPA-986M KSPA-806MH KSPA-1006MH
Table Size [mm] φ80 φ98 φ57 φ76
Rotation Range [ ° ] Coarse: 360 Fine: ±5 Coarse: 360 Fine: ±5 Coarse: 360 Fine: ±5 Coarse: 360 Fine: ±5
Scale Readable Resolution 5′ 5′ 5′ 5′
Micrometer Readable Resolution about 1′08.8″ about 52.9″ about 51.6″ about 42.1″
Bearing type
Lapping method
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 58.8 (6.0kgf) 68.6 (7.0kgf) 49.0 (5.0kgf) 68.6 (7.0kgf)
Max. Moment Capacity [N・m] 1.0 1.0 0.88 0.98
Moment Stiffness [″/N・cm] 0.8 0.8 0.61 0.2
Parallelism [μm] 50 50 30 40
Eccentricity [μm] 20 20 20 20
Wobble [μm] 20 20 20 20
Options FP FP FP FP
Weight [kg] 0.5 0.7 0.45 0.6
Option
Compatible product
Micrometer Readable Resolution
Option Code
Products Name
Part Number
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
E160
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Catalog
Code
W7090
Outline Drawing
KSPA-806M
8-M4 depth 6
3-4.5mounting hole
8 counterbore
25
Hexagonal socket head cap screw M4×20…3 screws, Spring washers
25
25
MAX53
4-M4 depth 6
PCD62
Application
Systems
Optics &
Optical
Coatings
Holders
25
M16 P1 depth 8
10 through hole
MAX68.5
Bases
28
14
80 (12)
Coarse/Fine switching clamp
Manual
Stages
Actuators
KSPA-986M
8-M4 depth 6
3-4.5mounting hole
8 counterbore
25
Hexagonal socket head cap screw M4×20…3 screws, Spring washers
25 25
MAX62
4-M4 depth 6
PCD62
Motoeized
Stages
Light
Sources
Index
14 25
M16 P1 depth 8
10 through hole
28
MAX68
98 (12)
Coarse/Fine switching clamp
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
KSPA-806MH
Clamp
MAX46
MAX63
34
(through hole)
Hexagonal socket head cap screw M4×8…4 screws, Spring washers
8-M3 depth 5
32
70
80
57
13.5
Coarse/Fine switching clamp
2.5
3-4.5mounting hole
8 counterbore
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
KSPA-1006MH
Clamp
MAX48
50
32
MAX63
32
70
80
54
( through hole)
50
90
100
32
Hexagonal socket head cap screw M4×8…4 screws, Spring washers
8-M4 depth 5
50
50
90
100
76
14.5
Coarse/Fine switching clamp
21
28
24
32
7
2.5
7
4-4.5mounting hole
8 counterbore
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E161

Manual Positioners
θ axis Rotation Stages with Aperture
KSPB
Application
Systems
Optics &
Optical
Coatings
Holders
θ axis (rotation) coarse/fine adjustment stages with plane bearings offer coarse rotation adjustment
of 360° and fine adjustment (with either a micrometer head or fine-pitch screw).
Directly rotate the stage upper plate for coarse adjustment, then clamp the clutch screw and use
micrometer head or fine-pitch screw (±5°) for fine adjustment.
◦Brass stage and steel crossed roller offer high precision
and high stiffness.
◦The through hole at the center of the stage can be used
as a transmission hole.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Outline Drawing
KSPB-906M
Hexagonal socket head cap screw M4×8…4 screws
φ8
25 25 8-M4 depth 6
(Fixing screw insertion hole)
M16 P1 through hole
KSPB-906M-M6/906MUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
φ11
A A
(Fixing screw insertion hole)
9-B depth 6
25
A
Guide
X axis Stages
XY axis Stages
Z axis Stages
Vernier
MAX75
Coarse/Fine switching clamp
22
φ90
MAX56
25
103
3.5 (11)
Clamp
Vernier
MAX75
Coarse/Fine switching clamp
22
φ90
MAX56
A
(11) 103
2.5
Clamp
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
13.5
4-φ4.5 mounting hole
φ8 counterbore
Part Number
13.5
A
(mm)
4-φC mounting hole
φ11 counterbore
B
φC
(mm)
KSPB-906M-M6 25 M6 P1 φ6.5
KSPB-906MUU 25.4 1/4-20UNC φ7
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
METRIC KSPB-906M KSPB-906M-M6
Part Number
INCH − KSPB-906MUU
Table Size [mm] φ90 φ90
Rotation Range [ ° ] Coarse: 360 Fine: ±5 Coarse: 360 Fine: ±5
Scale Readable Resolution 5′ 5′
Micrometer Readable Resolution about 41.25″ about 41.25″
Bearing type
Crossed roller
Primary Material
Brass
Finish
Super black chrome
Load Capacity [N] 147 (15.0kgf) 147 (15.0kgf)
Max. Moment Capacity [N・m] 5.0 5.0
Moment Stiffness [″/N・cm] 0.2 0.2
Parallelism [μm] 50 50
Eccentricity [μm] 20 20
Wobble [μm] 20 20
Options FP FP
Weight [kg] 1.3 1.3
Option
Compatible product
Micrometer Readable Resolution
Option Code
Products Name
Part Number
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
E162
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Catalog
Code
W7091
Outline Drawing
KSPB-1206MH
Hexagonal socket head cap screw M4×8…4 screws
9
50
4-M4 depth 5
(Fixing screw inserting hole)
4-M4 depth 5
PCD100
Vernier
64
(through hole)
Clamp
50
133
KSPB-1206MH-M6/1206MHUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
4-D depth 7
PCDB
4-D depth 7
Vernier
A
62
(through hole)
11
(Fixing screw insertion hole)
A
Clamp
133
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
MAX75 MAX56
Coarse/Fine switching clamp
120
(9)
MAX75 MAX56
Coarse/Fine switching clamp
120
(9)
Manual
Stages
19
2.5
10.5
22
2.5
4-4.5 mounting hole
8 counterbore
12.5
4-C mounting hole
11 counterbore
Actuators
KSPB-1606MH
Hexagonal socket head cap screw M4×8…4 screws
4-M4 depth 5
100
11
(Fixing screw inserting hole)
Part Number
A
(mm)
φB
(mm)
φC
(mm)
KSPB-1206MH-M6 50 φ100 φ6.5 M6 P1
KSPB-1206MH-UU 50.8 φ101.6 φ7 1/4-20UNC
KSPB-1606MH-M6/1606MUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
11
A
(Fixing screw insertion hole)
4-B depth 6
D
Motoeized
Stages
Light
Sources
Index
Vernier
Coarse/Fine
switching clamp
19
10.5
102
(through hole)
MAX75 MAX56
160
Clamp
100
2.5 (8) 174
4-4.5 mounting hole
8 counterbore
Vernier
Coarse/Fine switching clamp
22
12.5
MAX75
102
(through hole)
160
MAX56
4-7 mounting hole
11 counterbore
A
Clamp
2.5
174
(8)
Part Number
A
(mm)
B
KSPB-1606MH-M6 100 M6 P1
KSPB-1606MH-M6UU 101.6 1/4-20UNC
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Specifications
METRIC KSPB-1206MH KSPB-1206MH-M6 KSPB-1606MH KSPB-1606MH-M6
Part Number
INCH − KSPB-1206MHUU − KSPB-1606MHUU
Table Size [mm] φ120 φ120 φ160 φ160
Rotation Range [ ° ] Coarse: 360 Fine: ±4 Coarse: 360 Fine: ±4 Coarse: 360 Fine: ±3 Coarse: 360 Fine: ±3
Scale Readable Resolution 5′ 5′ 5′ 5′
Micrometer Readable Resolution about 31.8″ about 31.8″ about 23.7″ about 23.7″
Bearing type
Crossed roller
Primary Material
Brass
Finish
Super black chrome
Load Capacity [N] 196 (20.0kgf) 196 (20.0kgf) 196 (20.0kgf) 196 (20.0kgf)
Max. Moment Capacity [N・m] 7.8 7.8 9.8 9.8
Moment Stiffness [″/N・cm] 0.1 0.1 0.1 0.1
Parallelism [μm] 50 50 50 50
Eccentricity [μm] 30 30 30 30
Wobble [μm] 20 20 20 20
Options FP FP FP FP
Weight [kg] 1.1 1.1 1.5 1.5
Option
Compatible product
Micrometer Readable Resolution
Option Code
Products Name
Part Number
[mm]
FP Fine-pitch Screw Adjusters FPSA-62540 − E008
* Please add an option code as the part number suffix to specify various optional specifications.
* The FP type requires a hex wrench or the optional hex wrench with knob (KCL) for driving operation. F010
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E163

Manual Positioners
θ axis Rotation Stages
θ axis Rotation Stages with Square Top
KSC
KSSA
Catalog
Code
Catalog
Code
W7506
W7508
Application
Systems
Optics &
Optical
Coatings
Holders
The top plate of KSC stage can be rotated 360°(coarse) by turning the handle attached side of the top
plate. It is a general-purpose θ axis stage with an aluminum body, best suited for weight reduction.
The KSSA stages are unique fine rotation stages having a square table top. These stages are suitable
for making minute angle adjustment, or being assembed in devices because there is no protrusion
such as micrometers.
◦The KSSA stages come with a
hexagonal wrench with knob and
clamping wrench.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
Outline Drawing
KSC-606
KSSA-406
Clamp
25 32
20
M16 P1 depth 8
4
Hexagonal socket head cap screw M4×8…4 screws
32
20
φ60
4-M2 depth 5
4-φ4.5 mounting hole φ8 counterbore
PCDφ50
4-M3 depth 5
3-M4 depth 5
PCDφ50
handle
Hexagonal socket head cap screw M3×8…3 screws,
One 3mm hex wrench with knob, One 1.5mm hex wrench
Wrench size for adjustment 3mm, Wrench size for clamp 1.5mm
KSSA-256
Hexagonal socket head cap screw M2×8…3 screws,
One 3mm hex wrench with knob, One 0.89mm hex wrench
Wrench size for adjustment 3mm, Wrench size for clamp 0.89mm
20
2.5 17
20
Clamp
25
10 10
KSSA-606
Hexagonal socket head cap screw M4×8…3 screws,
One 3mm hex wrench with knob, One 1.5mm hex wrench
Wrench size for adjustment 3mm, Wrench size for clamp 1.5mm
3.5
M4 depth 4
10 10
4.5
25
7-M2 depth 4
4.5
XYZ axis Stages
θ axis Stages
Goniometer
17
Clamp
40
16 16
3
4.5
17
Clamp
60
25 25
32
Inclination
Vacuum
32
16
16
40
50
32
25
25
60
3.5
32
M6 P1 depth 6 7-M3 depth 4
4.5
50
M16 P1 depth 6 4-M3 depth 4
7-M4 depth 4
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC KSC-606 KSSA-256 KSSA-406 KSSA-606
Table Size [mm] φ60 25×25 40×40 60×60
Rotation Range [ ° ] 360 ±3 ±5 ±7
Scale Readable Resolution 1° − − −
Micrometer Readable Resolution [ ° ] − about 3.18 about 1.92 about 1.47
Bearing type Lapping method Dovetail method
Primary Material Aluminum Brass
Finish Black anodized Super black chrome
Load Capacity [N] 68.6 (7.0kgf) 29.4 (3.0kgf) 49.0 (5.0kgf) 68.6 (7.0kgf)
Max. Moment Capacity [N・m] − − − −
Moment Stiffness [″/N・cm] 1.5 2.0 1.5 1.0
Parallelism [μm] 50 50 50 50
Eccentricity [μm] 20 − − −
Wobble [μm] 20 − − −
Weight [kg] 0.19 0.09 0.23 0.5
* When using the M3 or M4 screws in the screw hole on the top surface of this stage, please use the screws within the length of the tap depth. There is a risk of
damaging the sliding surface.
E164
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Catalog
θ axis Rotation Stages (Worm Nut and Gear Drive) KSW Code W7507
Driven by a worm gear, these rotation stages are capable of precise adjustment over a full 360°rotation.
◦The through hole at the center of the stage can be used
as a transmission hole.
Attention
▶KSW-256 and KSW-1006 do not have a clamping mechanism.
▶KSW-256 and KSW-406 do not have a vernier scale.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Outline Drawing
KSW-256
Pan head screw M2×10…3 screws
Compatible optics diameter
10 MAX 4t
25
20
10
14.5
21.5
Actuators
Motoeized
Stages
4-M2 depth 3.5
Retaining ring
Delrin ring
10
20
25
25
16
Light
Sources
Index
15
7
6.8
8
3-2.4 mounting hole
Guide
KSW-406/406UU
Pan head screw M3×8…3 screws,
Hexagonal socket head cap screw 6-32UNC×5/16…3 screws (UU)
KSW-606
Hexagonal socket head cap screw M4×10…3 screws,
One 1.5mm hex wrench (Coarse/Fine switching)
X axis Stages
4-A depth 5
PCDB
E counterbore
Compatible optics diameter
F MAX 6t
Compatible optics diameter
30 MAX 6t
22 37
XY axis Stages
Z axis Stages
XZ axis Stages
45
C
8
Retaining ring
Delrin ring
Clamp
25
4
C
40 17.1
H
40
10.5
G 3-D mounting hole
Part
Number
KSW-406 KSW-406UU
A M3 6-32UNC
B (mm) φ32 φ31.75
C (mm) 32 31.75
D (mm) φ3.5 φ4
E (mm) φ6 φ6.5
F (mm) φ15 φ12.7
G (mm) φ12 φ10
H
8-32UNC
depth5
60
30
5 50
4-M4 depth 5
PCD50
Clamp
50
60
60
26
26.5
Retaining ring
Delrin ring
13.5
3-4.5 mounting hole
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Specifications
Part Number
METRIC KSW-256 KSW-406 KSW-606
INCH − KSW-406UU −
Table Size [mm] φ25 φ40 φ60
Rotation Range [ ° ] Fine: 360° Fine: 360° Fine: 360°
Scale Readable Resolution 5° 2° 10′
Knob Rotation Angle [°/1 rotation] about 8 about 7.5 about 4
Bearing type
Lapping method
Primary Material
Brass
Finish
Super black chrome
Load Capacity [N] 29.4 (3.0kgf) 49.0 (5.0kgf) 98.0 (10.0kgf)
Max. Moment Capacity Pitch [N・m] 0.14 0.29 0.49
Moment Stiffness Pitch [″/N・cm] 6.1 1.5 0.9
Parallelism [μm] 30 30 50
Eccentricity [μm] 20 20 20
Wobble [μm] 15 20 20
Weight [kg] 0.07 0.3 0.55
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E165

Manual Positioners
θ axis Rotation Stages (Worm Nut and Gear Drive)
KSW
Application
Systems
Optics &
Optical
Coatings
Driven by a worm gear, these rotation stages are capable of precise adjustment over a full
360°rotation.
◦The through hole at the center of the stage can be used as a transmission hole.
Attention
▶KSW-1006 does not have a clamping mechanism.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC KSW-656-M6 KSW-1006 KSW-1206 KSW-1206-M6
INCH KSW-656UU − − KSW-1206UU
Table Size [mm] φ65mm φ84mm φ120mm φ120mm
Rotation Range [ ° ]
Coarse: 360°
Fine: 360°
−
Fine: 360°
Coarse: 360°
Fine: 360°
Coarse: 360°
Fine: 360°
Scale Readable Resolution 10′ 5′ 5′ 5′
Knob Rotation Angle [°/1 rotation] 4 2.05 1.62 1.62
Bearing type Lapping method Lapping method Crossed roller Crossed roller
Primary Material Brass Aluminum Brass
Finish Super black chrome Black anodized Super black chrome
Load Capacity [N] 98.0 (10.0kgf) 78.4 (8.0kgf) 196.0 (20.0kgf) 196.0 (20.0kgf)
Max. Moment Capacity Pitch [N・m] 0.49 1.0 9.8 9.8
Moment Stiffness Pitch [″/N・cm] 0.9 0.5 0.15 0.15
Parallelism [μm] 50 70 60 60
Eccentricity [μm] 20 20 30 30
Wobble [μm] 20 20 30 30
Weight [kg] 0.6 0.62 2.2 2.2
E166
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Catalog
Code
W7507
Outline Drawing
KSW-656-M6/656UU
Compatible optics diameter
30 MAX 6t
Hexagonal socket head cap screw M6×10…3 screws, One 1.5mm hex wrench (Coarse/Fine switching) (M6)
Hexagonal socket head cap screw 1/4-20UNC×3/8…3 screws, One 1.5mm hex wrench (Coarse/Fine switching) (UU)
22 37
Application
Systems
Optics &
Optical
Coatings
E
Holders
65
C
4-A depth 5
PCDB
Clamp
C
65
65
26.5
Retaining ring
Delrin ring
Bases
Manual
Stages
30
5
26
13.5
3-D mounting hole
Part Number
A
B
(mm)
C
(mm)
D
(mm)
KSW-656-M6 M6 φ50 50 φ6.5
KSW-656UU 1/4-20UNC φ50.8 50.8 φ7 8-32UNC depth 5
E
Actuators
Motoeized
Stages
KSW-1006
50
Hexagonal socket head cap screw M4×6…4 screws
50
4-4.5 mounting hole
8 counterbore
M6 P1 depth 5
Light
Sources
Index
50
36
30
50
60
4-M4 depth 5 20 4-4.58 counterbore
100
depth 5
84
50 Top
32.5
62
10
112
17
10
2
84
Compatible optics
diameter
50 MAX 6t
46
47
60
6
12
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
1.5
108
[Adapter]
Goniometer
Inclination
KSW-1206
Hexagonal socket head cap screw M4×12…4 screws, Spring washer,
One 1.5mm hex wrench (Coarse/Fine switching)
120
100
70
50
100
70
50
4-M4 depth 7
4-M4 depth 7
4-M4 depth 7
PCD100
KSW-1206-M6/1206UU
Hexagonal socket head cap screw M6×12…4 screws, Spring washer, One 1.5mm hex wrench (Coarse/Fine switching) (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/2…4 screws, One 1.5mm hex wrench (Coarse/Fine switching) (UU)
120
D
C
D
C
4-A depth 7
4-A depth 7
PCDB
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
(9)
Clamp
40
6
120 17.2
120
62
19.5
4-4.5 mounting hole
(9) 120 (17.2)
Clamp
120
40
6
Part Number
A
62
B
(mm)
19.5
4-E mounting hole
C
(mm)
D
(mm)
E
(mm)
KSW-1206-M6 M6 P1 φ100 50 100 φ6.5
KSW-1206UU 1/4-20UNC φ101.6 50.8 101.6 φ7
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E167

Manual Positioners
Extended Contact Ball Slide Goniometers
GOHT-40A Stage size □40mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
High precision goniometers with integrated bearing ways for superior stiffness, accuracy and
durability.
Their smooth movement is ideal for frequent operations.
◦Disc clamp improves the stability of clamping.
◦Integral-guide structure offers high performance of rotation center displacement φ0.007mm.
◦Attachment pins (accessories) are ideal for positioning when assembling into αβ axis or mounting on various instruments
or devices.
Guide
▶Attachment pins (GOHT-AP) can be purchased separately.
E010
▶Contact our International Sales Division if you desire a rotation
center height not listed in the catalog.
▶Motorized extended guide goniometers (OSMS-40A***) with
stepping motor are also available. G082
Actuators
Motoeized
Stages
Light
Sources
Index
OSMS-40A
▶For the surface finishing, the white coating of electroless nickel
plating is also available.
W7092
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC GOHT-40A20B GOHT-40A40B GOHT-40A60B GOHT-40A75B
INCH GOHT-40A20BUU GOHT-40A40BUU GOHT-40A60BUU GOHT-40A75BUU
(Opposite Model)
METRIC GOHT-40A20BR GOHT-40A40BR GOHT-40A60BR GOHT-40A75BR
INCH GOHT-40A20BRUU GOHT-40A40BRUU GOHT-40A60BRUU GOHT-40A75BRUU
Table Size [mm] 40×40 40×40 40×40 40×40
Axes of Travel
α axis
Rotation Center Height [mm] 20±0.1 40±0.1 60±0.1 75±0.1
Angle Range [ ° ] ±20 ±10 ±8 ±6
Vernier Readable Resolution 0.1° 0.1° 0.1° 0.1°
Travel per Knob Rotation [ ° ] about 2.31 about 1.41 about 1.08 about 0.89
Rotation Center Displacement [mm] φ0.007 or less φ0.007 or less φ0.007 or less φ0.007 or less
Bearing type
Extended contact ball guide
Primary Material
SUS440C quench hardened
Finish
Super black chrome
Load Capacity [N] 58.8 (6.0kgf) 58.8 (6.0kgf) 58.8 (6.0kgf) 58.8 (6.0kgf)
Pitch [N・m] 2.0 2.0 2.0 2.0
Max. Moment Capacity Roll [N・m] 3.0 3.0 3.0 3.0
Yaw [N・m] 2.0 2.0 2.0 2.0
Roll [″/N・cm] 0.6 0.6 0.6 0.6
Moment Stiffness
Yaw [″/N・cm] 0.6 0.6 0.6 0.6
Parallelism [μm] 30 30 30 30
Weight [kg] 0.2 0.2 0.2 0.2
E168
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Catalog
Code
W7092
Outline Drawing
GOHT-40AB
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws
Attachment pin for M4…1 pin
40 (17)
16 16
(8)
Clamp
40 (20)
16 16
6-M3 depth 5
GOHT-40ABR
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws
Attachment pin for M4…1 pin
6-M3 depth 5
(20)
40
16 16
(8)
Clamp
16 16
40 (17)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
M4 depth D
2-M3 depth 3
2-M3 depth 3
M4 depth D
Manual
Stages
Rotation center
Rotation center
A B
10
C
C
10
A B
Actuators
32
4-3.5 mounting hole
6 counterbore
32
4H7
4H7
32
4-3.5 mounting hole
6 counterbore
32
Motoeized
Stages
Part Number
A
(mm)
B
(mm)
C
(mm)
D
(mm)
GOHT-40A20B 20 20 2 4
GOHT-40A40B 20 40 1.5 4
GOHT-40A60B 15 60 1 3
GOHT-40A75B 15 75 1 3
Part Number
A
(mm)
B
(mm)
C
(mm)
D
(mm)
GOHT-40A20BR 20 20 2 4
GOHT-40A40BR 20 40 1.5 4
GOHT-40A60BR 15 60 1 3
GOHT-40A75BR 15 75 1 3
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
GOHT-40ABUU
Low head hexagon socket head cap screw (stainless steel construction)
6-32UNC×1/4…4 screws, Attachment pin for 8-32UNC…1 pin
GOHT-40ABRUU
Low head hexagon socket head cap screw (stainless steel construction)
6-32UNC×1/4…4 screws, Attachment pin for 8-32UNC…1 pin
XZ axis Stages
XYZ axis Stages
θ axis Stages
Clamp
40 (17)
15.875 15.875
(8) 40 (20)
15.875 15.875 6-6-32UNC depth 5
2-6-32UNC depth 3
6-6-32UNC depth 5
2-6-32UNC depth 3
(20)
40 (8)
15.875 15.875
Clamp
15.875 15.875
40 (17)
Goniometer
Inclination
Vacuum
8-32UNC depth D
8-32UNC depth D
Rotation center
Rotation center
Ball Guide
Crossed Roller
A B
10
C
C
10
A B
Dovetail
31.75
4-4 mounting hole
6.5 counterbore
31.75
4H7
4H7
31.75
4-4 mounting hole
6.5 counterbore
31.75
Lapping
V Groove Screw
Ohters
Part Number
A
(mm)
B
(mm)
C
(mm)
D
(mm)
GOHT-40A20BUU 20 20 2 4
GOHT-40A40BUU 20 40 1.5 4
GOHT-40A60BUU 15 60 1 3
GOHT-40A75BUU 15 75 1 3
Part Number
A
(mm)
B
(mm)
C
(mm)
D
(mm)
GOHT-40A20BRUU 20 20 2 4
GOHT-40A40BRUU 20 40 1.5 4
GOHT-40A60BRUU 15 60 1 3
GOHT-40A75BRUU 15 75 1 3
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E169

Manual Positioners
αβ axis Extended Contact Ball Slide Goniometers
GOHT-40B Stage size □40mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
High precision goniometers with integrated bearing ways for superior stiffness, accuracy and
durability.
Their smooth movement is ideal for frequent operations.
◦Disc clamp improves the stability of clamping.
◦Integral-guide structure offers high performance of rotation center displacement φ0.007mm.
Guide
▶Attachment pins (GOHT-AP) can be purchased separately.
E010
▶Contact our International Sales Division if you desire a rotation
center height not listed in the catalog.
▶Motorized extended guide goniometers (OSMS-40A***) with
stepping motor are also available. G082
Actuators
Motoeized
Stages
Light
Sources
OSMS-40A
▶For the surface finishing, the white coating of electroless nickel
plating is also available.
W7104
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC GOHT-40B20B GOHT-40B40B GOHT-40B60B
INCH GOHT-40B20BUU GOHT-40B40BUU GOHT-40B60BUU
(Opposite Model)
METRIC GOHT-40B20BR GOHT-40B40BR GOHT-40B60BR
INCH GOHT-40B20BRUU GOHT-40B40BRUU GOHT-40B60BRUU
Table Size [mm] 40×40 40×40 40×40
Axes of Travel
αβ axis
Rotation Center Height [mm] 20±0.2 40±0.2 60±0.2
(Upper) β axis ±20 ±10 ±8
Angle Range [ ° ]
(Lower) α axis ±10 ±8 ±6
Vernier Readable Resolution 0.1° 0.1° 0.1°
(Upper) β axis about 2.31 about 1.41 about 1.08
Travel per Knob Rotation [ ° ]
(Lower) α axis about 1.41 about 1.08 about 0.89
Rotation Center Displacement [mm] φ0.007 or less φ0.007 or less φ0.007 or less
Bearing type
Extended contact ball guide
Primary Material
SUS440C quench hardened
Finish
Super black chrome
Load Capacity [N] 58.8 (6.0kgf) 58.8 (6.0kgf) 58.8 (6.0kgf)
Pitch [N・m] 2.0 2.0 2.0
Max. Moment Capacity Roll [N・m] 2.0 2.0 2.0
Yaw [N・m] 2.0 2.0 2.0
Parallelism [μm] 30 30 30
Weight [kg] 0.4 0.4 0.4
E170
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Catalog
Code
W7104
Outline Drawing
GOHT-40BB
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws
Attachment pins for M4…1 pin
axis clamp
(17)
(8) 40 (20)
16 16
6-M3 depth 5
GOHT-40BBR
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws
Attachment pins for M4…1 pin
6-M3 depth 5
(20)
40
16 16
(8)
axis clamp
(17)
Application
Systems
Optics &
Optical
Coatings
Holders
40
16
16
16
16
40
Bases
2-M3 depth 3
2-M3 depth 3
(20)
D depth D
(20)
M4 depth D
Manual
Stages
Rotation center
Rotation center
Actuators
A B
C
axis clamp
C
A B
Motoeized
Stages
axis clamp
32
4H7
32
4-3.5 mounting hole
6 counterbore
4-3.5 mounting hole
6 counterbore
32
4H7
32
Light
Sources
Part Number
A
(mm)
B
(mm)
C
(mm)
D
(mm)
GOHT-40B20B 40 20 1.5 4
GOHT-40B40B 35 40 1 4
GOHT-40B60B 30 60 1 3
Part Number
A
(mm)
B
(mm)
C
(mm)
D
(mm)
GOHT-40B20BR 40 20 1.5 4
GOHT-40B40BR 35 40 1 4
GOHT-40B60BR 30 60 1 3
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
GOHT-40BBUU
Low head hexagon socket head cap screw (stainless steel construction)
6-32UNC×1/4…4screws, Attachment pins for 8-32UNC…1 pin
GOHT-40BBRUU
Low head hexagon socket head cap screw (stainless steel construction)
6-32UNC×1/4…4screws, Attachment pins for 8-32UNC…1 pin
θ axis Stages
Goniometer
Inclination
axis clamp
(8) 40 (20)
15.875 15.875
6-6-32UNC depth 5
6-6-32UNC depth 5
(20) 40 (8)
15.875 15.875
axis clamp
Vacuum
(17)
2-6-32UNC depth 3
2-6-32UNC depth 3
40
15.875
40
15.875
(17)
15.875
15.875
Ball Guide
(20)
8-32UNC depth D
(20)
8-32UNC depth D
Crossed Roller
Dovetail
Rotation center
Rotation center
Lapping
V Groove Screw
A B
axis clamp
A B
Ohters
31.75
Part Number
A
(mm)
C
4H7
31.75
B
(mm)
4-4 mounting hole
6.5 counterbore
C
(mm)
D
(mm)
GOHT-40B20BUU 40 20 1.5 4
GOHT-40B40BUU 35 40 1 4
GOHT-40B60BUU 30 60 1 3
C
axis clamp
4-4 mounting hole 4H7
6.5 counterbore 31.75
Part Number
A
(mm)
B
(mm)
31.75
C
(mm)
D
(mm)
GOHT-40B20BRUU 40 20 1.5 4
GOHT-40B40BRUU 35 40 1 4
GOHT-40B60BRUU 30 60 1 3
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E171

Manual Positioners
Extended Contact Ball Slide Goniometers
αβ axis Extended Contact Ball Slide Goniometers
GOHT-60A
GOHT-60B
Stage size □60mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
High precision goniometers with integrated bearing ways for superior stiffness, accuracy and
durability.
Their smooth movement is ideal for frequent operations.
◦Disc clamp improves the stability of clamping.
◦Integral-guide structure offers high performance of rotation center displacement φ0.007mm.
Guide
▶Attachment pins (GOHT-AP) can be purchased separately.
E010
▶Contact our International Sales Division if you desire a rotation
center height not listed in the catalog.
▶Motorized extended guide goniometers (OSMS-60A***) with
stepping motor are also available. G084
Actuators
Motoeized
Stages
Light
Sources
Index
OSMS-60A
▶For the surface finishing, the white coating of electroless nickel
plating is also available.
W7093(α axis), W7105(αβ axis)
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
α axis
β axis
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
(Opposite Model)
METRIC
METRIC
GOHT-
60A35B
GOHT-
60A35BR
GOHT-
60A60B
GOHT-
60A60BR
GOHT-
60A85B
GOHT-
60A85BR
GOHT-
60A105B
GOHT-
60A105BR
GOHT-
60B35B
GOHT-
60B35BR
GOHT-
60B60B
GOHT-
60B60BR
GOHT-
60B85B
GOHT-
60B85BR
Table Size [mm] 60×60 60×60 60×60 60×60 60×60 60×60 60×60
Axes of Travel α axis αβ axis
Rotation Center Height [mm] 35±0.1 60±0.1 85±0.1 105±0.1 35±0.2 60±0.2 85±0.2
Angle Range [ ° ]
(Upper) β axis − − − − ±20 ±15 ±10
(Lower) α axis ±20 ±15 ±10 ±8 ±15 ±10 ±8
Vernier Readable Resolution 0.1° 0.1° 0.1° 0.1° 0.1° 0.1° 0.1°
Travel per Knob Rotation [ ° ]
(Upper) β axis − − − − about 2.2 about 1.46 about 1.15
(Lower) α axis about 2.2 about 1.46 about 1.15 about 0.95 about 1.46 about 1.15 about 0.95
Rotation Center Displacement [mm] φ0.007 or less φ0.007 or less φ0.007 or less φ0.007 or less φ0.007 or less φ0.007 or less φ0.007 or less
Bearing type
Primary Material
Finish
Extended contact ball guide
SUS440C quench hardened
Super black chrome
Load Capacity [N] 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf)
Max. Moment Capacity
Moment Stiffness
Pitch [N・m] 3.0 3.0 3.0 3.0 3.0 3.0 3.0
Roll [N・m] 6.0 6.0 6.0 6.0 3.0 3.0 3.0
Yaw [N・m] 3.0 3.0 3.0 3.0 3.0 3.0 3.0
Roll [″/N・cm] 0.25 0.25 0.25 0.25 − − −
Yaw [″/N・cm] 0.1 0.1 0.1 0.1 − − −
Parallelism [μm] 30 30 30 30 30 30 30
Weight [kg] 0.6 0.6 0.6 0.6 1.2 1.2 1.2
E172
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Catalog
Code
Catalog
Code
W7093
W7105
Outline Drawing
GOHT-60AB
Hexagon socket head cap screw (stainless steel construction) M4×8…4 screws,
Attachment pins for M4…1 pin
Clamp
(10) 60
25 25
32
(23)
6-M4 depth 5
GOHT-60ABR
Hexagon socket head cap screw (stainless steel construction) M4×8…4 screws,
Attachment pins for M4…1 pin
6-M4 depth 5
(23)
60 (10)
25 25 Clamp
32
Application
Systems
Optics &
Optical
Coatings
Holders
60
25
32
32
25
(17)
(17)
60
Bases
25
4-M3 depth 4
M4depth 4
2-M4 depth 4
2-M4 depth 4
M4depth 4
25
4-M3 depth 4
Manual
Stages
Rotation center
Rotation center
Actuators
A B
C
C
A B
Motoeized
Stages
50
4-4.5 mounting hole
8 counterbore
50
4H7
4H7
50
4-4.5 mounting hole
8 counterbore
50
Light
Sources
GOHT-60BB
Hexagon socket head cap screw (stainless steel construction) M4×8…4 screws,
Attachment pins for M4…1 pin
Rotation center
Part Number
axis clamp
(23) 60 (17)
A
(mm)
25
25
32
B
(10)
B
(mm)
60
25 25
32
(23)
C
(mm)
GOHT-60A35B 25 35 3
GOHT-60A60B 25 60 3
GOHT-60A85B 20 85 2
GOHT-60A105B 20 105 2
6-M4 depth 5
4-M3 depth 4
2-M4 depth 4
M4 depth 4
GOHT-60BBR
Hexagon socket head cap screw (stainless steel construction) M4×8…4 screws,
Attachment pins for M4…1 pin
6-M4 depth 5
4-M3 depth 4
2-M4 depth 4
Part Number
(23)
M4depth 4
60
25 25
32
A
(mm)
axis clamp
(10)
32
B
25
(17)
25
(23) 60
B
(mm)
C
(mm)
GOHT-60A35BR 25 35 3
GOHT-60A60BR 25 60 3
GOHT-60A85BR 20 85 2
GOHT-60A105BR 20 105 2
Rotation center
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
50
Part Number
A
A
(mm)
C
50
B
(mm)
axis clamp
4-4.5 mounting hole
8 counterbore
C
(mm)
GOHT-60B35B 50 35 3
GOHT-60B60B 45 60 2
GOHT-60B85B 40 85 2
axis clamp
4-4.5 mounting hole
8 counterbore
Part Number
50
C
A
A
(mm)
B
(mm)
50
C
(mm)
GOHT-60B35BR 50 35 3
GOHT-60B60BR 45 60 2
GOHT-60B85BR 40 85 2
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E173

Manual Positioners
Extended Contact Ball Slide Goniometers
αβ axis Extended Contact Ball Slide Goniometers
GOHT-65A
GOHT-65B
Stage size □65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
High precision goniometers with integrated bearing ways for superior stiffness, accuracy and
durability.
Their smooth movement is ideal for frequent operations.
◦Disc clamp improves the stability of clamping.
◦Integral-guide structure offers high performance of rotation center displacement φ0.007mm.
Guide
▶Attachment pins (GOHT-AP) can be purchased separately.
E010
▶Contact our International Sales Division if you desire a rotation
center height not listed in the catalog.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
(Opposite Model)
METRIC
INCH
METRIC
INCH
GOHT-
65A50B-M6
GOHT-
65A50BUU
GOHT-
65A50BR-M6
GOHT-
65A50BRUU
GOHT-
65A75B-M6
GOHT-
65A75BUU
GOHT-
65A75BR-M6
GOHT-
65A75BRUU
GOHT-
65A100B-M6
GOHT-
65A100BUU
GOHT-
65A100BR-M6
GOHT-
65A100BRUU
GOHT-
65B50B-M6
GOHT-
65B50BUU
GOHT-
65B50BR-M6
GOHT-
65B50BRUU
GOHT-
65B75B-M6
GOHT-
65B75BUU
GOHT-
65B75BR-M6
GOHT-
65B75BRUU
Table Size [mm] 65×65 65×65 65×65 65×65 65×65
Axes of Travel α axis αβ axis
Rotation Center Height [mm] 50±0.1 75±0.1 100±0.1 50±0.2 75±0.2
Angle Range [ ° ]
(Upper) β axis − − − ±20 ±15
(Lower) α axis ±20 ±15 ±10 ±15 ±10
Vernier Readable Resolution 0.1° 0.1° 0.1° 0.1° 0.1°
Travel per Knob Rotation [ ° ]
(Upper) β axis − − − about 1.70 about 1.22
(Lower) α axis about 1.70 about 1.22 about 0.95 about 1.22 about 0.95
Rotation Center Displacement [mm] φ0.007 or less φ0.007 or less φ0.007 or less φ0.007 or less φ0.007 or less
Bearing type
Primary Material
Finish
Extended contact ball guide
SUS440C quench hardened
Super black chrome
Load Capacity [N] 98 (10kgf) 98 (10kgf) 98 (10kgf) 98 (10kgf) 98 (10kgf)
Max. Moment Capacity
Moment Stiffness
Pitch [N・m] 3.5 3.5 3.5 3.5 3.5
Roll [N・m] 6.5 6.5 6.5 3.5 3.5
Yaw [N・m] 3.5 3.5 3.5 3.5 3.5
Roll [″/N・cm] 0.3 0.3 0.3 − −
Yaw [″/N・cm] 0.3 0.3 0.3 − −
Parallelism [μm] 30 30 30 30.0 30.0
Weight [kg] 0.75 0.75 0.75 1.5 1.5
E174
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Catalog
Code
Catalog
Code
W7144
W7145
Outline Drawing
GOHT-65AB-M6/65ABUU
Low head hexagon socket head cap screw (stainless steel construction)
M6×6…4 screws, Attachment pins for M6…1 pin (M6)
Low head hexagon socket head cap screw (stainless steel construction)
1/4-20UNC×1/4…4 screws, Attachment pins for 1/4-20UNC…1 pin (UU)
(17)
Clamp
B
B
9-C depth 6
GOHT-65ABR-M6/65ABRUU
Low head hexagon socket head cap screw (stainless steel construction)
M6×6…4 screws, Attachment pins for M6…1 pin (M6)
Low head hexagon socket head cap screw (stainless steel construction)
1/4-20UNC×1/4…4 screws, Attachment pins for 1/4-20UNC…1 pin (UU)
9-C depth 6
B
B
Clamp
(17)
Application
Systems
Optics &
Optical
Coatings
Holders
B
Bases
65
B B
B
65
Manual
Stages
65 (23)
(23)
65
(10)
Rotation center
Rotation center
Actuators
A
A
Motoeized
Stages
25
50.4
1.5
4-7 mounting hole
12 counterbore
4H7
50.4
4H7
50.4
1.5
4-7 mounting hole
12 counterbore
50.4
25
Light
Sources
Part Number
A
(mm)
B
(mm)
GOHT-65A50B-M6 50 25 M6 P1
GOHT-65A50BUU 50 25.4 1/4-20UNC
GOHT-65A75B-M6 75 25 M6 P1
GOHT-65A75BUU 75 25.4 1/4-20UNC
GOHT-65A100B-M6 100 25 M6 P1
GOHT-65A100BUU 100 25.4 1/4-20UNC
C
Part Number
A
(mm)
B
(mm)
GOHT-65A50BR-M6 50 25 M6 P1
GOHT-65A50BRUU 50 25.4 1/4-20UNC
GOHT-65A75BR-M6 75 25 M6 P1
GOHT-65A75BRUU 75 25.4 1/4-20UNC
GOHT-65A100BR-M6 100 25 M6 P1
GOHT-65A100BRUU 100 25.4 1/4-20UNC
C
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
GOHT-65BB-M6/65BBUU
Low head hexagon socket head cap screw (stainless steel construction)
M6×6…4 screws, Attachment pins for M6…1 pin (M6)
Low head hexagon socket head cap screw (stainless steel construction)
1/4-20UNC×1/4…4 screws, Attachment pins for 1/4-20UNC…1 pin (UU)
axis clamp
65 (23)
B B
GOHT-65BBR-M6/65BBRUU
Low head hexagon socket head cap screw (stainless steel construction)
M6×6…4 screws, Attachment pins for M6…1 pin (M6)
Low head hexagon socket head cap screw (stainless steel construction)
1/4-20UNC×1/4…4 screws, Attachment pins for 1/4-20UNC…1 pin (UU)
(23)
65
B B
axis clamp
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
(17)
(17)
9-C depth 6
9-C depth 6
65
B B
B B
65
Ball Guide
Crossed Roller
(23)
(23)
Dovetail
Rotation center
50.4
Part Number
50 A
A
(mm)
4H7
50.4
B
(mm)
1.5
axis clamp
4-6.5 mounting hole
12 counterbore
GOHT-65B50B-M6 50 25 M6 P1
GOHT-65B50BUU 50 25.4 1/4-20UNC
GOHT-65B75B-M6 75 25 M6 P1
GOHT-65B75BUU 75 25.4 1/4-20UNC
C
axis clamp
1.5
4-7 mounting hole
12 counterbore
Part Number
4H7
50.4
50 A
A
(mm)
B
(mm)
50.4
Rotation center
GOHT-65B50BR-M6 50 25 M6 P1
GOHT-65B50BRUU 50 25.4 1/4-20UNC
GOHT-65B75BR-M6 75 25 M6 P1
GOHT-65B75BRUU 75 25.4 1/4-20UNC
C
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E175

Manual Positioners
Extended Contact Micrometer Goniometers
GOHT-40A-S Stage size □40mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
High precision goniometers with integrated bearing ways for superior stiffness, accuracy and
durability.
Their smooth movement is ideal for frequent operations.
◦Fitted with micrometers, enabling accurate operations compared to feeding with knobs (GOHT).
◦Attachment pins (accessories) are ideal for positioning when assembling into αβ axis or mounting on various instruments
or devices.
Guide
▶Attachment pins (GOHT-AP) can be purchased separately.
E010
▶Contact our International Sales Division if you desire a rotation
center height not listed in the catalog.
▶Motorized extended guide goniometers (OSMS-40A***) with
stepping motor are also available. G082
Attention
▶When assembled to an αβ axis stage, the micrometer head of the
α axis stage interferes. Please contact our International Sales
Division for more information.
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC GOHT-40A20BMS GOHT-40A40BMS GOHT-40A60BMS GOHT-40A75BMS
INCH GOHT-40A20BMSUU GOHT-40A40BMSUU GOHT-40A60BMSUU GOHT-40A75BMSUU
(Opposite Model)
METRIC GOHT-40A20BMSR GOHT-40A40BMSR GOHT-40A60BMSR GOHT-40A75BMSR
INCH GOHT-40A20BMSRUU GOHT-40A40BMSRUU GOHT-40A60BMSRUU GOHT-40A75BMSRUU
Table Size [mm] 40×40 40×40 40×40 40×40
Axes of Travel
α axis
Micrometer Position Side Side Side Side
Rotation Center Height [mm] 20±0.1 40±0.1 60±0.1 75±0.1
Angle Range [ ° ] ±11 ±7 ±5.5 ±4.5
Travel per Knob Rotation [ ° ] about 0.9 about 0.55 about 0.42 about 0.35
Rotation Center Displacement [mm] φ0.007 or less φ0.007 or less φ0.007 or less φ0.007 or less
Bearing type
Extended contact ball guide
Primary Material
SUS440C quench hardened
Finish
Super black chrome
Load Capacity [N] 58.8 (6.0kgf) 58.8 (6.0kgf) 58.8 (6.0kgf) 58.8 (6.0kgf)
Pitch [N・m] 2.0 2.0 2.0 2.0
Max. Moment Capacity Roll [N・m] 3.0 3.0 3.0 3.0
Yaw [N・m] 2.0 2.0 2.0 2.0
Roll [″/N・cm] 0.6 0.6 0.6 0.6
Moment Stiffness
Yaw [″/N・cm] 0.6 0.6 0.6 0.6
Parallelism [μm] 30 30 30 30
Weight [kg] 0.2 0.2 0.2 0.2
E176
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Catalog
Code
W7146
Outline Drawing
GOHT-40ABMS
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws
Attachment pins for M4…1 pin
40 (17)
16 16
(8) 40
16 16
Clamp
6-M3 depth 5
M4 depth D
2-M3 depth 3
GOHT-40ABMSR
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws
Attachment pins for M4…1 pin
Clamp
6-M3 depth 5
2-M4 depth D
2-M3 depth 3
40
16 16
(8)
16 16
40 (17)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
(20)
(80.5)
(80.5)
(20)
Manual
Stages
Rotation center
Rotation center
Actuators
A B
32
4-3.5 mounting hole
6 counterbore
32
4H7
C
C
4H7
32
4-3.5
6 counterbore
32
A B
Motoeized
Stages
Light
Sources
Part Number
A
(mm)
B
(mm)
C
(mm)
GOHT-40A20BMS 20 20 2 4
GOHT-40A40BMS 20 40 1.5 4
GOHT-40A60BMS 15 60 1 3
GOHT-40A75BMS 15 75 1 3
D
(mm)
Part Number
A
(mm)
B
(mm)
C
(mm)
GOHT-40A20BRMS 20 20 2 4
GOHT-40A40BRMS 20 40 1.5 4
GOHT-40A60BRMS 15 60 1 3
GOHT-40A75BRMS 15 75 1 3
D
(mm)
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
GOHT-40ABMSUU
Low head hexagon socket head cap screw (stainless steel construction)
6-32UNC×1/4…4 screws, Attachment pins for 8-32UNC…1 pin
GOHT-40ABMSRUU
Low head hexagon socket head cap screw (stainless steel construction)
6-32UNC×1/4…4 screws, Attachment pins for 8-32UNC…1 pin
θ axis Stages
Goniometer
Inclination
(7) 40
15.875 15.875
Clamp
Clamp
40 (7)
15.875 15.875
Vacuum
40 (17)
15.875
15.875
6-6-32UNC depth 5
8-32UNC depth D
2-6-32UNC depth 3
6-6-32UNC depth 5
8-32UNC depth D
2-6-32UNC depth 3
15.875 15.875
40 (17)
Ball Guide
(20)
(20)
Crossed Roller
(80.5)
(80.5)
Dovetail
Rotation center
Rotation center
Lapping
V Groove Screw
A B
C
C
A B
Ohters
31.75
Part Number
A
(mm)
4H7
B
(mm)
4-4 mounting hole
31.75 6.5 counterbore
C
(mm)
GOHT-40A20BMSUU 20 20 2 4
GOHT-40A40BMSUU 20 40 1.5 4
GOHT-40A60BMSUU 15 60 1 3
GOHT-40A75BMSUU 15 75 1 3
D
(mm)
4-4 mounting hole
6.5 counterbore
Part Number
31.75
4H7
A
(mm)
B
(mm)
31.75
C
(mm)
GOHT-40A20BMSRUU 20 20 2 4
GOHT-40A40BMSRUU 20 40 1.5 4
GOHT-40A60BMSRUU 15 60 1 3
GOHT-40A75BMSRUU 15 75 1 3
D
(mm)
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E177

Manual Positioners
Extended Contact Micrometer Goniometers
GOHT-60A-S Stage size □60mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
High precision goniometers with integrated bearing ways for superior stiffness, accuracy and
durability.
Their smooth movement is ideal for frequent operations.
◦Fitted with micrometers, enabling accurate operations compared to feeding with knobs (GOHT).
◦Attachment pins (accessories) are ideal for positioning when assembling into αβ axis or mounting on various instruments
or devices.
Guide
▶Attachment pins (GOHT-AP) can be purchased separately.
E010
▶Contact our International Sales Division if you desire a rotation
center height not listed in the catalog.
▶Motorized extended guide goniometers (OSMS-60A***) with
stepping motor are also available. G084
Attention
▶When assembled to an αβ axis stage, the micrometer head of the
α axis stage interferes. Please contact our International Sales
Division for more information.
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC GOHT-60A35BMS GOHT-60A60BMS GOHT-60A85BMS GOHT-60A105BMS
(Opposite Model) METRIC GOHT-60A35BMSR GOHT-60A60BMSR GOHT-60A85BMSR GOHT-60A105BMSR
Table Size [mm] 60×60 60×60 60×60 60×60
Axes of Travel
α axis
Micrometer Position Side Side Side Side
Rotation Center Height [mm] 35±0.1 60±0.1 85±0.1 105±0.1
Angle Range [ ° ] ±7 ±4.5 ±3.5 ±3
Travel per Knob Rotation [ ° ] about 0.0096 about 0.38 about 0.3 about 0.25
Rotation Center Displacement [mm] φ0.007 or less φ0.007 or less φ0.007 or less φ0.007 or less
Bearing type
Extended contact ball guide
Primary Material
SUS440C quench hardened
Finish
Super black chrome
Load Capacity [N] 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf)
Pitch [N・m] 3.0 3.0 3.0 3.0
Max. Moment Capacity Roll [N・m] 6.0 6.0 6.0 6.0
Yaw [N・m] 3.0 3.0 3.0 3.0
Roll [″/N・cm] 0.25 0.25 0.25 0.25
Moment Stiffness
Yaw [″/N・cm] 0.1 0.1 0.1 0.1
Parallelism [μm] 30 30 30 30
Weight [kg] 0.6 0.6 0.6 0.6
E178
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Catalog
Code
W7147
Outline Drawing
GOHT-60ABMS
Hexagon socket head cap screw (stainless steel construction) M4×8…4 screws
Attachment pin for M4…1 pin
3-M4 depth 4
(5)
60 (32.5)
25 25
32
4-M3 depth 4
Application
Systems
Optics &
Optical
Coatings
Holders
(17)
(20) 60
25 25
32
6-M4 depth 5
Bases
Manual
Stages
Rotation center
Actuators
A B
Motoeized
Stages
C
50
4-4.5 mounting hole
8 counterbore
50
4H7
Light
Sources
Part Number
A
(mm)
B
(mm)
C
(mm)
GOHT-60A35BMS 25 35 3
GOHT-60A60BMS 25 60 3
GOHT-60A85BMS 20 85 2
GOHT-60A105BMS 20 105 2
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
GOHT-60ABMSR
Hexagon socket head cap screw (stainless steel construction) M4×8…4 screws
Attachment pin for M4…1 pin
XYZ axis Stages
θ axis Stages
Goniometer
4-M3 depth 4
(32.5)
25
60
25
32
(5)
3-M4 depth 4
(17)
Inclination
Vacuum
6-M4 depth 5
32
25
60
Rotation center
4H7
50
Part Number
4-4.5 mounting hole
8 counterbore
A
(mm)
50
B
(mm)
C
25
A B
(20)
C
(mm)
GOHT-60A35BMSR 25 35 3
GOHT-60A60BMSR 25 60 3
GOHT-60A85BMSR 20 85 2
GOHT-60A105BMSR 20 105 2
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E179

Manual Positioners
Extended Contact Micrometer Goniometers
GOHT-65A-S Stage size □65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
High precision goniometers with integrated bearing ways for superior stiffness, accuracy and
durability.
Their smooth movement is ideal for frequent operations.
◦Fitted with micrometers, enabling accurate operations compared to feeding with knobs (GOHT).
◦Attachment pins (accessories) are ideal for positioning when assembling into αβ axis or mounting on various instruments
or devices.
Guide
▶Attachment pins (GOHT-AP) can be purchased separately.
E010
▶Contact our International Sales Division if you desire a rotation
center height not listed in the catalog.
▶Motorized extended guide goniometers (OSMS-60A***) with
stepping motor are also available. G084
Attention
▶When assembled to an αβ axis stage, the micrometer head of the
α axis stage interferes. Please contact our International Sales
Division for more information.
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC GOHT-65A50BMS-M6 GOHT-65A75BMS-M6 GOHT-65A100BMS-M6
INCH GOHT-65A50BMSUU GOHT-65A75BMSUU GOHT-65A100BMSUU
(Opposite Model)
METRIC GOHT-65A50BMSR-M6 GOHT-65A75BMSR-M6 GOHT-65A100BMSR-M6
INCH GOHT-65A50BMSRUU GOHT-65A75BMSRUU GOHT-65A100BMSRUU
Table Size [mm] 65×65 65×65 65×65
Axes of Travel
α axis
Micrometer Position Side Side Side
Rotation Center Height [mm] 50±0.1 75±0.1 100±0.1
Angle Range [ ° ] ±10 ±7 ±6
Travel per Knob Rotation [ ° ] about 0.44 about 0.32 about 0.25
Rotation Center Displacement [mm] φ0.007 or less φ0.007 or less φ0.007 or less
Bearing type
Extended contact ball guide
Primary Material
SUS440C quench hardened
Finish
Super black chrome
Load Capacity [N] 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf)
Pitch [N・m] 3.0 3.0 3.0
Max. Moment Capacity Roll [N・m] 6.0 6.0 6.0
Yaw [N・m] 3.0 3.0 3.0
Roll [″/N・cm] 0.25 0.25 0.25
Moment Stiffness
Yaw [″/N・cm] 0.1 0.1 0.1
Parallelism [μm] 30 30 30
Weight [kg] 0.7 0.7 0.7
E180
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Catalog
Code
W7148
Outline Drawing
GOHT-65ABMS
Hexagon socket head cap screw (stainless steel construction) M6×8…4 screws
Attachment pins for M6…1 pin
GOHT-65ABMSR
Hexagon socket head cap screw (stainless steel construction) M6×8…4 screws
Attachment pins for M6…1 pin
Application
Systems
Optics &
Optical
Coatings
Clamp
25
25
25 25
Clamp
Holders
(20) 65 (17)
25 25
9-M6 P1depth6
9-M6 P1 depth6
25 25
(20) 65 (17)
Bases
Manual
Stages
65 (52)
Rotation center
Rotation center
(52)
65
Actuators
A
A
Motoeized
Stages
25
1.5
50.4
4-7 mounting hole 4H7
12 counterbore
50.4
4H7
50.4
4-7 mounting hole
12 counterbore
50.4
1.5
25
Light
Sources
Index
Part Number
A
(mm)
GOHT-65A50BMS-M6 50
GOHT-65A75BMS-M6 75
GOHT-65A100BMS-M6 100
GOHT-65ABMSUU
Low head hexagon socket head cap screw (stainless steel construction)
1/4-20UNC×1/4…4 screws, Attachments pin for 1/420UNC…1 pin
Clamp
25.4
25.4
Part Number
A
(mm)
GOHT-65A50BMSR-M6 50
GOHT-65A75BMSR-M6 75
GOHT-65A100BMSR-M6 100
GOHT-65ABMSRUU
Low head hexagon socket head cap screw (stainless steel construction)
1/4-20UNC×1/4…4 screws, Attachment pins for 1/420UNC…1 pin
25.4 25.4
Clamp
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
65 (17)
25.4 25.4
9-1/4-20UNC depth6
9-1/4-20UNC depth6
25.4 25.4 (17)
Ball Guide
Crossed Roller
Dovetail
(20)
Lapping
65 (52)
Rotation center
Rotation center
(52)
65
V Groove Screw
Ohters
A
25
1.5
50.4
4-7 mounting hole 4H7
12 counterbore
50.4
Part Number
A
(mm)
GOHT-65A50BMSUU 50
GOHT-65A75BMSUU 75
GOHT-65A100BMSUU 100
4H7
4-7 mounting hole
50.4 12 counterbore
50.4
Part Number
A
(mm)
GOHT-65A50BMSRUU 50
GOHT-65A75BMSRUU 75
GOHT-65A100BMSRUU 100
1.5
25 A
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E181

Manual Positioners
α axis Goniometers GOH-15A Stage size □15mm
α axis Goniometers / αβ axis Goniometers GOH-25A/25B Stage size □25mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Goniometers fitted with dovetail slide and worm gear, suitable for orientation adjustment (angle
adjustment or correction).
◦The goniometer with stage size □15mm (GOH-15A10) is unique to Sigma-Koki.
Guide
▶To operate the GOH-15A10, fit a hex wrench to a hexagonal
socket.
Attention
▶The GOH-15A10 is not fitted with scale or clamping mechanism.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC GOH-15A10 GOH-25A18 GOH-25A30 GOH-25A40 GOH-25B18 GOH-25B30
(Opposite Model) METRIC − GOH-25A18R GOH-25A30R GOH-25A40R GOH-25B18R GOH-25B30R
Table Size [mm] 15×15 25×25 25×25 25×25 25×25 25×25
Axes of Travel α axis αβ axis
Rotation Center Height [mm] 10±0.1 18±0.1 30±0.1 40±0.1 18±0.1 30±0.1
Angle Range [ ° ]
(Upper) β axis − − − − ±20 ±15
(Lower) α axis ±20 ±20 ±15 ±10 ±15 ±10
Vernier Readable Resolution − 12′ 12′ 12′ 12′ 12′
Travel per Knob Rotation [ ° ]
(Upper) β axis − − − − about 3.1 about 2.17
(Lower) α axis about 5 about 3.1 about 2.17 about 1.67 about 2.17 about 1.67
Rotation Center Displacement [mm] φ0.1 or less φ0.1 or less φ0.1 or less φ0.1 or less φ0.1 or less φ0.1 or less
Bearing type
Dovetail slide method
Primary Material
Brass
Finish
Super black chrome
Load Capacity [N] 9.8 (1.0kgf) 19.6 (2.0kgf) 19.6 (2.0kgf) 19.6 (2.0kgf) 19.6 (2.0kgf) 19.6 (2.0kgf)
Pitch [N・m] 0.03 0.35 0.35 0.35 0.35 0.35
Max. Moment Capacity
Roll [N・m] 0.05 0.4 0.4 0.4 0.35 0.35
Moment Stiffness Roll [″/N・cm] − 1.0 1.0 1.0 − −
Parallelism [μm] 50 50 50 50 100 100
Weight [kg] 0.02 0.07 0.06 0.06 0.13 0.12
E182
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Catalog
Code
W7097
Catalog
Code
Catalog
Code
W7096
W7106
Outline Drawing
GOH-15A10
15 (1.1)
10
Pan head screw M2×5…2 screws
1 18 2.5
15
4-M2 depth 2
10
2.5mm
Application
Systems
Optics &
Optical
Coatings
Holders
3.3
Rotation center
Bases
10
10
10
2
2-2.3 mounting hole
4 counterbore
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
GOH-25A
25 (6)
20
Pan head screw M2×4…4 screws
25 (9)
Clamp
10 10
2.5mm
GOH-25AR
Pan head screw M2×4…4 screws
(9) 25
10 10
Clamp
20
25 (6)
2.5mm
Index
Guide
6-M2 depth 3
Rotation center
Rotation center
6-M2 depth 3
X axis Stages
XY axis Stages
A B
4.5
4.5
A B
Z axis Stages
2
20 4-2.4 mounting hole 20
4 counterbore
20 4-2.4 mounting hole
4 counterbore
20
2
XZ axis Stages
Part Number
A
(mm)
B
(mm)
GOH-25A18 12 18
GOH-25A30 10 30
GOH-25A40 10 40
Part Number
A
(mm)
B
(mm)
GOH-25A18R 12 18
GOH-25A30R 10 30
GOH-25A40R 10 40
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
GOH-25B
axis clamp
B C
(9) 25 (6)
10 A
20
4-2.4 mounting hole
4 counterbore
Part Number
20
Pan head screw M2×4…4 screws
25 (9)
10 10 6-M2 depth 3
Rotation center
2
14.5
axis clamp
A
(mm)
4.5
20
B
(mm)
C
(mm)
GOH-25B18 12 22 18
GOH-25B30 10 20 30
GOH-25BR
20
4.5
Part Number
Pan head screw M2×4…4 screws
(9) 25
6-M2 depth 3 10 10
Rotation center
14.5
2
axis clamp
20
A
(mm)
10 A
20
B C (9) 25 (6)
axis clamp
4-2.4 mounting hole
B
(mm)
C
(mm)
GOH-25B18R 12 22 18
GOH-25B30R 10 20 30
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E183

Manual Positioners
α axis Goniometers
αβ axis Goniometers
GOH-40A
GOH-40B
Stage size □40mm
Application
Systems
Goniometers fitted with dovetail slide and worm gear, suitable for orientation adjustment (angle
adjustment or correction).
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC GOH-40A15 GOH-40A35 GOH-40A51 GOH-40B15 GOH-40B35
INCH GOH-40A15UU GOH-40A35UU GOH-40A51UU GOH-40B15UU GOH-40B35UU
(Opposite Model)
METRIC GOH-40A15R GOH-40A35R GOH-40A51R GOH-40B15R GOH-40B35R
INCH GOH-40A15RUU GOH-40A35RUU GOH-40A51RUU GOH-40B15RUU GOH-40B35RUU
Table Size [mm] 40×40 40×40 40×40 40×40 40×40
Axes of Travel α axis αβ axis
Rotation Center Height [mm] 15±0.1 35±0.1 51±0.1 15±0.1 35±0.1
Angle Range [ ° ]
(Upper) β axis − − − ±20 ±20
(Lower) α axis ±20 ±20 ±15 ±20 ±15
Vernier Readable Resolution 12′ 12′ 12′ 12′ 12′
Travel per Knob Rotation [ ° ]
(Upper) β axis − − − about 2.83 about 1.74
(Lower) α axis about 2.83 about 1.74 about 1.27 about 1.74 about 1.27
Rotation Center Displacement [mm] φ0.1 or less φ0.1 or less φ0.1 or less φ0.1 or less φ0.1 or less
Bearing type
Dovetail slide method
Primary Material
Brass
Finish
Super black chrome
Load Capacity [N] 68.7 (7.0kgf) 68.7 (7.0kgf) 68.7 (7.0kgf) 68.7 (7.0kgf) 68.7 (7.0kgf)
Pitch [N・m] 0.9 0.9 0.9 0.9 0.9
Max. Moment Capacity
Roll [N・m] 1.2 1.2 1.2 0.9 0.9
Moment Stiffness Roll [″/N・cm] 0.51 0.51 0.51 − −
Parallelism [μm] 50 50 50 100 100
Weight [kg] 0.25 0.20 0.18 0.45 0.38
E184
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I
I
Catalog
Code
Catalog
Code
W7098
W7149
Outline Drawing
GOH-40A/GOH-40AUU
Pan head screw M3×6…4 screws
Pan head screw 6-32UNC×5/16…4 screws, Custom head (6×H2) (UU)
40 (10)
2.5mm
GOH-40AR/GOH-40ARUU
Pan head screw M3×6…4 screws
Pan head screw 6-32UNC×5/16…4 screws, Custom head (6×H2) (UU)
(10)
40
2.5mm
Application
Systems
Optics &
Optical
Coatings
40 (7)
F
D
F
D
Clamp
F
D
Clamp
D
F
40 (7)
Holders
Bases
4-G
E
H
Rotation center
H
Rotation center
4-G
E
Manual
Stages
A B
C
C
A B
Actuators
3
F
4-I mounting hole
J counterbore
F
F
4-I mounting hole
J counterbore
F
3
Motoeized
Stages
Part Number
A B C D
(mm) (mm) (mm) (mm)
E
F
(mm)
G
H
I J
(mm) (mm)
GOH-40A15 20 15 7 20 4-M2 depth 3 32 M3 depth 5 M6 P1 depth 6 φ3.5 φ6
GOH-40A35 16 35 7 20 4-M2 depth 3 32 M3 depth 5 M4 depth 4 φ3.5 φ6
GOH-40A51 15 51 6.5 20 4-M2 depth 3 32 M3 depth 5 M4 depth 4 φ3.5 φ6
GOH-40A15UU 20 15 7 31.75 6-32UNC depth 5 1/4-20UNC depth 6 φ4 φ6.5
GOH-40A35UU 16 35 7 31.75 6-32UNC depth 5 8-32UNC depth 4 φ4 φ6.5
GOH-40A51UU 15 51 6.5 31.75 6-32UNC depth 5 8-32UNC depth 4 φ4 φ6.5
Part Number
A B C D
(mm) (mm) (mm) (mm)
E
F
(mm)
G
H
I J
(mm) (mm)
GOH-40A15R 20 15 7 20 4-M2 depth 3 32 M3 depth 5 M6 P1 depth 6 φ3.5 φ6
GOH-40A35R 16 35 7 20 4-M2 depth 3 32 M3 depth 5 M4 depth 4 φ3.5 φ6
GOH-40A51R 15 51 6.5 20 4-M2 depth 3 32 M3 depth 5 M4 depth 4 φ3.5 φ6
GOH-40A15RUU 20 15 7 31.75 6-32UNC depth 5 1/4-20UNC depth 6 φ4 φ6.5
GOH-40A35RUU 16 35 7 31.75 6-32UNC depth 5 8-32UNC depth 4 φ4 φ6.5
GOH-40A51RUU 15 51 6.5 31.75 6-32UNC depth 5 8-32UNC depth 4 φ4 φ6.5
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
GOH-40B/GOH-40BUU
Pan head screw M3×6…4 screws
Pan head screw 6-32UNC×5/16…4 screws, Custom head (6×H2) (UU)
2.5mm
GOH-40BR/GOH-40BRUU
Pan head screw M3×6…4 screws
Pan head screw 6-32UNC×5/16…4 screws, Custom head (6×H2) (UU)
2.5mm
Goniometer
Inclination
axis clamp
(7)
40
I
G
(10)
4-J
(10) 40
4-J
I
G
axis clamp
(7)
Vacuum
40
(10)
C D
A B
G
4-L mounting hole
M counterbore
H
I
K
Rotation center
3
F
E
axis clamp
A B C D E F G
Part Number
(mm) (mm) (mm) (mm) (mm) (mm) (mm)
H
I
(mm)
J
K
L M
(mm) (mm)
GOH-40B15 16 20 35 15 7 23 20 4-M2 depth 3 32 M3 depth 5 M6 P1 depth 6 φ3.5 φ6
GOH-40B35 15 16 31 35 6.5 22 20 4-M2 depth 3 32 M3 depth 5 M4 depth 4 φ3.5 φ6
GOH-40B15UU 16 20 35 15 7 23 31.75 6-32UNC depth 5 1/4-20UNC depth 6 φ4 φ6.5
GOH-40B35UU 15 16 31 35 6.5 22 31.75 6-32UNC depth 5 8-32UNC depth 4 φ4 φ6.5
I
I
E
axis clamp
K
Rotation center
F
3
I
G
H
A B
C D
40
(10)
4-L mounting hole
M counterbore
A B C D E F G
Part Number
(mm) (mm) (mm) (mm) (mm) (mm) (mm)
H
I
(mm)
J
K
L M
(mm) (mm)
GOH-40B15R 16 20 35 15 7 23 20 4-M2 depth 3 32 M3 depth 5 M6 P1 depth 6 φ3.5 φ6
GOH-40B35R 15 16 31 35 6.5 22 20 4-M2 depth 3 32 M3 depth 5 M4 depth 4 φ3.5 φ6
GOH-40B15RUU 16 20 35 15 7 23 31.75 6-32UNC depth 5 1/4-20UNC depth 6 φ4 φ6.5
GOH-40B35RUU 15 16 31 35 6.5 22 31.75 6-32UNC depth 5 8-32UNC depth 4 φ4 φ6.5
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E185

Manual Positioners
α axis Goniometers
αβ axis Goniometers
GOH-60A
GOH-60B
Stage size □60mm
Application
Systems
Goniometers fitted with dovetail slide and worm gear, suitable for orientation adjustment (angle
adjustment or correction).
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC GOH-60A50 GOH-60A84 GOH-60A115 GOH-60B50 GOH-60B84
(Opposite Model) METRIC GOH-60A50R GOH-60A84R GOH-60A115R GOH-60B50R GOH-60B84R
Table Size [mm] 60×60 60×60 60×60 60×60 60×60
Axes of Travel α axis αβ axis
Rotation Center Height [mm] 50±0.1 84±0.1 115±0.1 50±0.1 84±0.1
Angle Range [ ° ]
(Upper) β axis − − − ±20 ±15
(Lower) α axis ±20 ±15 ±10 ±15 ±10
Vernier Readable Resolution 5′ 5′ 5′ 5′ 5′
Travel per Knob Rotation [ ° ]
(Upper) β axis − − − about 1.03 about 0.71
(Lower) α axis about 1.03 about 0.71 about 0.58 about 0.71 about 0.58
Rotation Center Displacement [mm] φ0.1 or less φ0.1 or less φ0.1 or less φ0.1 or less φ0.1 or less
Bearing type
Dovetail slide method
Primary Material
Brass
Finish
Super black chrome
Load Capacity [N] 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf)
Pitch [N・m] 1.6 1.6 1.6 1.6 1.6
Max. Moment Capacity
Roll [N・m] 2.2 2.2 2.2 1.6 1.6
Moment Stiffness Roll [″/N・cm] 0.3 0.3 0.3 − −
Parallelism [μm] 50 50 50 100 100
Weight [kg] 1.0 0.9 0.85 1.9 1.75
E186
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Catalog
Code
W7100
Catalog
Code
W7108
Outline Drawing
GOH-60A
Hexagonal socket head cap screw M4×8…4 screws
Clamp
60 (25)
25 25
GOH-60AR
Hexagonal socket head cap screw M4×8…4 screws
Clamp
(25) 60
25 25
Application
Systems
Optics &
Optical
Coatings
60 (15)
25
25
Rotation center
Rotation center
25
25
60 (15)
Holders
Bases
9-M4 depth 4
C
C
9-M4 depth 4
Manual
Stages
A
Actuators
B
4
B
A
50 4-4.5 mounting hole
8 counterbore
50
50
4-4.5 mounting hole
8 counterbore
50
4
Motoeized
Stages
Part Number
A
(mm)
B
(mm)
C
(mm)
GOH-60A50 34 16.9 50
GOH-60A84 31 15.9 84
GOH-60A115 24 10 115
Part Number
A
(mm)
B
(mm)
C
(mm)
GOH-60A50R 34 16.9 50
GOH-60A84R 31 15.9 84
GOH-60A115R 24 10 115
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
GOH-60B
Hexagonal socket head cap screw M4×8…4 screws
GOH-60BR
Hexagonal socket head cap screw M4×8…4 screws
XYZ axis Stages
axis clamp
axis clamp
θ axis Stages
60
25 25
(25)
(25) 60
25 25
Goniometer
(15)
(15)
Inclination
60
25 25
25 25
60
Vacuum
C (25)
B
9-M4 depth 4
E
F
Rotation center
Rotation center
F
9-M4 depth 4
E
B
C (25)
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
A
4-4.5 mounting hole
8 counterbore
Part Number
50
A
(mm)
4
B
(mm)
D
axis clamp
C
(mm)
D
(mm)
50
E
(mm)
F
(mm)
GOH-60B50 31 34 65 15.9 47.9 50
GOH-60B84 24 31 55 10 39.9 84
50
Part Number
D
4
axis clamp
A
(mm)
B
(mm)
C
(mm)
50
D
(mm)
A
4-4.5 mounting hole
8 counterbore
E
(mm)
F
(mm)
GOH-60B50R 31 34 65 15.9 47.9 50
GOH-60B84R 24 31 55 10 39.9 84
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E187

Manual Positioners
α axis Goniometers −M6−
αβaxis Goniometers −M6−
GOH-65A
GOH-65B
Stage size □65mm
Application
Systems
Goniometers fitted with dovetail slide and worm gear, suitable for orientation adjustment (angle
adjustment or correction).
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC GOH-65A50-M6 GOH-65A76-M6 GOH-65A100-M6 GOH-65B50-M6 GOH-65B76-M6
INCH GOH-65A50UU GOH-65A76UU GOH-65A100UU GOH-65B50UU GOH-65B76UU
(Opposite Model)
METRIC GOH-65A50R-M6 GOH-65A76R-M6 GOH-65A100R-M6 GOH-65B50R-M6 GOH-65B76R-M6
INCH GOH-65A50RUU GOH-65A76RUU GOH-65A100RUU GOH-65B50RUU GOH-65B76RUU
Table Size [mm] 65×65 65×65 65×65 65×65 65×65
Axes of Travel α axis αβ axis
Rotation Center Height [mm] 50±0.1 76±0.1 100±0.1 50±0.1 76±0.1
Angle Range [ ° ]
(Upper) β axis − − − ±20 ±15
(Lower) α axis ±20 ±15 ±10 ±15 ±10
Vernier Readable Resolution 5′ 5′ 5′ 5′ 5′
Travel per Knob Rotation [ ° ]
(Upper) β axis − − − about 1.16 about 0.84
(Lower) α axis about 1.16 about 0.84 about 0.65 about 0.84 about 0.65
Rotation Center Displacement [mm] φ0.1 or less φ0.1 or less φ0.1 or less φ0.1 or less φ0.1 or less
Bearing type
Dovetail slide method
Primary Material
Brass
Finish
Super black chrome
Load Capacity [N] 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf)
Pitch [N・m] 1.0 1.0 1.0 1.0 1.0
Max. Moment Capacity
Roll [N・m] 1.5 1.5 1.5 1.5 1.5
Moment Stiffness Roll [″/N・cm] 0.3 0.3 0.3 − −
Parallelism [μm] 50 50 50 100 100
Weight [kg] 0.88 0.86 0.86 1.74 1.72
E188
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Catalog
Code
Catalog
Code
W7150
W7151
Outline Drawing
GOH-65A-M6/GOH-65AUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
6-D depth 8
(14.5)
Clamp
D depth F
GOH-65AR-M6/GOH-65ARUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
Clamp
D depth F
6-D depth 8
(14.5)
Application
Systems
Optics &
Optical
Coatings
Holders
65
C
C
65
Bases
65
C
(25)
Manual
Stages
Actuators
B
C
C
C
(25) 65
Rotation center
B
C
C
Rotation center
(10)
Motoeized
Stages
A
2
G
16
4-E mounting hole
11 counterbore
(10)
G
G
16
4-E mounting hole
11 counterbore
G
2
A
Light
Sources
GOH-65B-M6/GOH-65BUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
M6 P1 depth 6
(15)
Part Number
A
(mm)
65
25 25
B
(mm)
C
(mm)
axis clamp
(25)
D
E
(mm)
F
(mm)
G
(mm)
GOH-65A50-M6 26 50 25 M6 P1 φ6.5 8 50
GOH-65A76-M6 24 76 25 M6 P1 φ6.5 6 50
GOH-65A100-M6 24 100 25 M6 P1 φ6.5 6 50
GOH-65A50UU 26 50 25.4 1/4-20UNC φ7 8 50.8
GOH-65A76UU 24 76 25.4 1/4-20UNC φ7 6 50.8
GOH-65A100UU 24 100 25.4 1/4-20UNC φ7 6 50.8
Part Number
A
(mm)
B
(mm)
C
(mm)
GOH-65BR-M6/GOH-65BRUU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
(25)
D
65
25.4 25.4
E
(mm)
F
(mm)
axis clamp
(14.5)
G
(mm)
GOH-65A50R-M6 26 50 25 M6 P1 φ6.5 8 50
GOH-65A76R-M6 24 76 25 M6 P1 φ6.5 6 50
GOH-65A100R-M6 24 100 25 M6 P1 φ6.5 6 50
GOH-65A50RUU 26 50 25.4 1/4-20UNC φ7 8 50.8
GOH-65A76RUU 24 76 25.4 1/4-20UNC φ7 6 50.8
GOH-65A100RUU 24 100 25.4 1/4-20UNC φ7 6 50.8
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
65
25 25
25.4
25.4
65
Ball Guide
(25)
6-M6 P1 depth 8
Rotation center
Rotation center
6-1/4-20UNC
depth 8
1-4-20UNC
depth 6
Crossed Roller
Dovetail
Lapping
C
C
V Groove Screw
Ohters
2
Part Number
50
A
(mm)
A
24
B
axis clamp
4-6.5 mounting hole
11 counterbore
B
(mm)
C
(mm)
D
(mm)
E
50
F
(mm)
G
(mm)
H
(mm)
GOH-65B50-M6 26 50 50 25 M6 P1 φ6.5 8 50
GOH-65B76-M6 24 48 76 25 M6 P1 φ6.5 6 50
GOH-65B50UU 26 50 50 25.4 1/4-20UNC φ7 8 50.8
GOH-65B76UU 24 48 76 25.4 1/4-20UNC φ7 6 50.8
50.8
Part Number
A
(mm)
(10)
(34)
axis clamp
B
(mm)
C
(mm)
D
(mm)
50.8
E
2
24 A
B
4-7 mounting hole
11 counterbore
F
(mm)
G
(mm)
H
(mm)
GOH-65B50R-M6 26 50 50 25 M6 P1 φ6.5 8 50
GOH-65B76R-M6 24 48 76 25 M6 P1 φ6.5 6 50
GOH-65B50RUU 26 50 50 25.4 1/4-20UNC φ7 8 50.8
GOH-65B76RUU 24 48 76 25.4 1/4-20UNC φ7 6 50.8
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E189

Manual Positioners
α axis Screw Goniometers with V-Grooved Guide
GOHB-40A Stage size □40mm
Catalog
Code
W7102
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Cost-effective goniometers with V-groove guide and leadscrew drive.
Leadscrew mechanism has large contact area, offering excellent durability.
◦Rotation center is larger than the conventional goniometers
(GOH).
Guide
▶Contact our International Sales Division if you desire a rotation
center height not listed in the catalog.
Attention
▶Not fitted with vernier.
Manual
Stages
Actuators
Motoeized
Stages
Outline Drawing
GOHB-40A
GOHB-40AR
Light
Sources
Hexagonal socket head cap screw M3×6…4 screws
(8.6)
4
40
32
Clamp
16
2.5mm Hexagonal socket head cap screw M3×6…4 screws 2.5mm
Clamp
16 40
32
4
Index
40
32
32
40
(8.6)
Guide
X axis Stages
XY axis Stages
Z axis Stages
M4 depth 5
A
20
4-M3 depth 6
Rotation center
7
A
2.5 (Hexagonal)
2.5 (Hexagonal)
A
4-M3 depth 6
Rotation center
7
M4 depth 5
20 A
XZ axis Stages
XYZ axis Stages
2
32
32
4-3.5 mounting hole
6.5 counterbore
Aview
A view
32
4-3.5 mounting hole
32
6.5 counterbore
2
θ axis Stages
Goniometer
Inclination
Part Number
A
(mm)
GOHB-40A40 40
GOHB-40A60 60
GOHB-40A100 100
GOHB-40A120 120
Part Number
A
(mm)
GOHB-40A40R 40
GOHB-40A60R 60
GOHB-40A100R 100
GOHB-40A120R 120
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC GOHB-40A40 GOHB-40A60 GOHB-40A100 GOHB-40A120
(Opposite Model) METRIC GOHB-40A40R GOHB-40A60R GOHB-40A100R GOHB-40A120R
Table Size [mm] 40×40 40×40 40×40 40×40
Axes of Travel
Rotation Center Height [mm] 40±0.1 60±0.1 100±0.1 120±0.1
Angle Range [ ° ] ±8 ±6 ±4 ±3
Travel per Knob Rotation [ ° ] about 0.54 about 0.39 about 0.25 about 0.22
Rotation Center Displacement [mm] φ0.05 or less φ0.05 or less φ0.05 or less φ0.05 or less
Bearing type
Primary Material
Finish
α axis
V groove method
Brass
Super black chrome
Load Capacity [N] 39.2 (4.0kgf) 39.2 (4.0kgf) 39.2 (4.0kgf) 39.2 (4.0kgf)
Pitch [N・m] 1.0 1.0 1.0 1.0
Max. Moment
Capacity
Roll [N・m] 2.0 2.0 2.0 2.0
Yaw [N・m] 2.0 2.0 2.0 2.0
Pitch [″/N・cm] 0.5 0.5 0.5 0.5
Moment Stiffness Roll [″/N・cm] 0.4 0.4 0.4 0.4
Yaw [″/N・cm] 0.35 0.35 0.35 0.35
Weight [kg] 0.25 0.25 0.25 0.25
E190
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α axis Screw Goniometers with V-Grooved Guide
GOHB-60A Stage size □60mm
Catalog
Code
W7103
Cost-effective goniometers with V-groove guide and leadscrew drive.
Leadscrew mechanism has large contact area, offering excellent durability.
◦Rotation center is larger than the conventional goniometers
(GOH).
Guide
▶Contact our International Sales Division if you desire a rotation
center height not listed in the catalog.
Application
Systems
Optics &
Optical
Coatings
Holders
Attention
▶Not fitted with vernier.
Bases
Manual
Stages
Actuators
Outline Drawing
GOHB-60A
(8.6)
GOHB-60AR
Hexagonal socket head cap screw M4×8…4 screws 2.5mm Hexagonal socket head cap screw M4×8…4 screws 2.5mm
4
60
50
32
Clamp
27
Clamp
27 60 4
50
32
Motoeized
Stages
Light
Sources
Index
60
50
32
32
50
(8.6)
60
Guide
4-M4 depth 6
M4 depth 5
A
25
4-M3 depth 6
Rotation center
9
A
2.5 (Hexagonal)
2.5 (Hexagonal)
A
9
4-M3 depth 6
Rotation center
4-M4 depth 6
M4 depth 5
A
25
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
3.5
50
4-4.5 mounting hole
8 counterbore
Part Number
A
(mm)
GOHB-60A35 35
GOHB-60A50 50
GOHB-60A75 75
GOHB-60A100 100
GOHB-60A125 125
50
A view
A view
50
4-4.5 mounting hole
8 counterbore
Part Number
A
(mm)
GOHB-60A35R 35
GOHB-60A50R 50
GOHB-60A75R 75
GOHB-60A100R 100
GOHB-60A125R 125
50
3.5
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Specifications
Part Number METRIC GOHB-60A35 GOHB-60A50 GOHB-60A75 GOHB-60A100 GOHB-60A125
(Opposite Model) METRIC GOHB-60A35R GOHB-60A50R GOHB-60A75R GOHB-60A100R GOHB-60A125R
Table Size [mm] 60×60 60×60 60×60 60×60 60×60
Axes of Travel
α axis
Rotation Center Height [mm] 35±0.1 50±0.1 75±0.1 100±0.1 125±0.1
Angle Range [ ° ] ±11 ±8 ±6 ±4.5 ±4
Travel per Knob Rotation [ ° ] about 0.56 about 0.43 about 0.31 about 0.25 about 0.2
Rotation Center Displacement [mm] φ0.05 or less φ0.05 or less φ0.05 or less φ0.05 or less φ0.05 or less
Bearing type
V groove method
Primary Material
Brass
Finish
Super black chrome
Load Capacity [N] 58.8 (6.0kgf) 58.8 (6.0kgf) 58.8 (6.0kgf) 58.8 (6.0kgf) 58.8 (6.0kgf)
Pitch [N・m] 2.0 2.0 2.0 2.0 2.0
Max. Moment Capacity Roll [N・m] 3.0 3.0 3.0 3.0 3.0
Yaw [N・m] 3.0 3.0 3.0 3.0 3.0
Pitch [″/N・cm] 0.4 0.4 0.4 0.4 0.4
Moment Stiffness Roll [″/N・cm] 0.3 0.3 0.3 0.3 0.3
Yaw [″/N・cm] 0.2 0.2 0.2 0.2 0.2
Weight [kg] 0.65 0.65 0.65 0.65 0.65
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E191

0
0
Manual Positioners
α axis Goniometers
αβ axis Goniometers
GOHTA-120A
GOHTA-120B
Stage size □120mm
Catalog
Code
Catalog
Code
W7139
W7140
The primary material is aluminum, but the ball guide type positioning slide offers high load capacity.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Guide
▶Contact our International Sales Division if you desire a rotation
center height not listed in the catalog.
Light
Sources
Index
Outline Drawing
GOHTA-120A182/228
120 (52)
25 25 25 25
Hexagonal socket head cap screw M4×10…4 screws
Spring washer
Rotation center
GOHTA-120B182
(13)
120 (52)
25 25 25 25
Hexagonal socket head cap screw M4×10…4 screws
Spring washer
Rotation center
Guide
X axis Stages
XY axis Stages
Z axis Stages
(13) 120
25 25 25 25
25-M4 depth 6
Clamp
A
(52) 120
25 25 25 25
28
25-M4 depth 6
182
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
46
5
(14.4)
100 4-4.5 mounting hole 100
8 counterbore
Part Number
A
(mm)
GOHTA-120A182 182
GOHTA-120A228 228
92
46
46
axis clamp
axis clamp 100 4-4.5 mounting hole
100
8 counterbore
5
(60.4)
(14.4)
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC GOHTA-120A182 GOHTA-120A228 GOHTA-120B182
Table Size [mm] 120×120 120×120 120×120
Axes of Travel α axis αβ axis
Rotation Center Height [mm] 182 228 182
Angle Range [ ° ]
(Upper) β axis − − ±5
(Lower) α axis ±5 ±5 ±5
Vernier Readable Resolution 1′ 1′ 1′
Travel per Knob Rotation [ ° ]
(Upper) β axis − − about 0.33
(Lower) α axis about 0.33 about 0.33 about 0.33
Rotation Center Displacement [mm] φ0.02 or loss φ0.02 or loss φ0.04 or loss
Bearing type
Extended contact ball guide
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 294 (30.0kgf) 294 (30.0kgf) 294 (30.0kgf)
Pitch [N・m] 19.6 19.6 19.6
Max. Moment Capacity
Roll [N・m] 44.1 44.1 19.6
Moment Stiffness Roll [″/N・cm] 0.02 0.02 −
Parallelism [μm] 100 100 200
Weight [kg] 2.2 2.2 4.4
E192
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θαβ axis Stages
KKD
Catalog
Code
W7111
Tilt/rotation stages for adjusting the tilt of a sample on the table top to an arbitrary angle.
Their compact and low-profile form is effective in confined spaces and compact optical systems.
◦Use the adjustment ring for tilt adjustment and the feed knob for rotational adjustment.
◦Be careful of the load on the stage since it is for light-load use.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Outline Drawing
KKD-25C
Rotational adjustment
8.7
MAX14
25
4-M2 depth 4
PCD20
Pan head screw M2×6…3 screws
35
20
25
3-2.4 mounting hole
4 counterbore
3 20
16
KKD-40C/40UU
Pan head screw M3×6…3 screws
Hexagonal socket head cap screw 6-32UNC×1/4…3 screws (UU)
MAX12.5
3-C depth 5
PCDA
Rotational
adjustment
B depth 7
40
A
D
40
E
D
3
A
40
Tilt adjustment
Tilt adjustment
2.5
KKD-60C
Hexagonal socket head cap screw M4×8…4 screws
MAX13
4-M4 depth 6
PCD50
Rotational adjustment
M6 P1 depth 7
15
60
50
32
60
4-4.5 mounting hole
8 counterbore
32
35 50
60
3.5
Tilt adjustment
4-M3 depth 5
2
KKD-65-M6/65UU
Hexagonal socket head cap screw M6×8…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×5/16…4 screws (UU)
MAX12
Rotational adjustment
B depth 7
15
C depth 5
(Center of the botton plate)
65
A
Tilt adjustment
A
65 2
4-B depth 6
PCDA
65
2
35
4-7 mounting hole
11 counterbore
Part Number
A
(mm)
B
C
KKD-65-M6 50 M6 P1 M4
KKD-65UU 50.8 1/4-20UNC 8-32UNC
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
9
3-F mounting hole
G counterbore
2
25
Part Number
A
(mm)
B
C
D
(mm)
Specifications
Part Number
METRIC KKD-25C KKD-40C KKD-60C KKD-65-M6
INCH − KKD-40UU − KKD-65UU
Table Size [mm] φ25 φ40 φ60 φ65
Rotation Range [mm] ±3 ±3 ±3 ±3
α axis ±3 ±3 ±3 ±3
Tilt Range [ ° ]
β axis ±3 ±3 ±3 ±3
θ axis about 0.9 about 2 about 1.7 about 1.68
Travel per Knob Rotation [ ° ] α axis about 2.2 about 1.5 about 1 about 1.2
β axis about 2.2 about 1.5 about 1 about 1.2
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 1 (0.1kgf) 2 (0.2kgf) 4.9 (0.5kgf) 4.9 (0.5kgf)
Weight [kg] 0.05 0.1 0.3 0.5
E
F
(mm)
G
(mm)
KKD-40C 32 M6 P1 M3 20 3-M2 depth 4 3.5 6
KKD-40UU 31.75 1/4-20UNC 6-32UNC 4 6.5
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E193

Manual Positioners
α(β) axis Tilt Stages
AIS
Application
Systems
Optics &
Optical
Coatings
Tilt stages for adjusting the tilt of a sample on the table top to an arbitrary angle.
The control component (adjustment ring) is located on the side of the stage to minimize protrusions.
◦The adjustment ring type is ideal for quick and easy tilt
adjustment.
◦The micrometer type is effective in confined spaces
where vertical control from the top is required.
Holders
Bases
Attention
▶Please use in surface load because the three-point support
structure. It can not be used hanging on the wall or upside down.
Manual
Stages
Actuators
Motoeized
Stages
Outline Drawing
AIS-25B
Pan head screw M2×6…2 screws, Flat washers
AIS-40B/40BUU
Pan head screw M3×6…2 screws, Flat washers
Hexagonal socket head cap screw 6-32UNC×1/4…2 screws (UU)
Light
Sources
1.5
25
20
6-M2 depth 3
3.4
40
B
6-C depth 4
D depth 5
Index
25
10 10
2-4
Driver hole
40
3.4
A
A
2-6.5
Driver hole
15
Guide
X axis Stages
3
2-2.4 mounting hole
4 counterbore
20
16
2
2-4 mounting hole
6.5 counterbore
B
E depth 5
(Center of the botton plate)
XY axis Stages
Z axis Stages
Part Number
A
(mm)
B
(mm)
C D E
AIS-40B 16 32 M3 M6 P1 M6 P1
AIS-40BUU 15.875 31.75 6-32UNC 1/4-20UNC 8-32UNC
XZ axis Stages
XYZ axis Stages
AIS-60B
Hexagonal socket head cap screw M4×8…2 screws
AIS-65B-M6/65BUU
Hexagonal socket head cap screw M6×6…2 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…2 screws (UU)
θ axis Stages
Goniometer
3
60
50
32
6-M4 depth 5
4-M3 depth 6
M6 P1 depth 7
4
A
65
A
7-B depth 6
Inclination
60
25
32
65
A
Vacuum
25
A
2-8
Driver hole
4
11
Driver hole
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
20.5
4
2-4.5 mounting hole
8 counterbore
50
M6 P1 depth 8
(Center of the botton plate)
20.5
1.5
2-7 mounting hole
11 counterbore
50
C depth 5
Part Number
A
(mm)
B
C
AIS-65B-M6 25 M6 P1 M4
AIS-65BUU 25.4 1/4-20UNC 8-32UNC
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC AIS-25B AIS-40B AIS-60B AIS-65B-M6
INCH − AIS-40BUU − AIS-65BUU
Table Size [mm] 25×25 40×40 60×60 65×65
Tilt Range [ ° ] ±2 ±2 ±2 ±2
Travel per Knob Rotation [ ° ] about 1.8 about 1 about 0.65 about 0.58
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 9.8 (1.0kgf) 29.4 (3.0kgf) 49.0 (5.0kgf) 49.0 (5.0kgf)
Weight [kg] 0.04 0.06 0.17 0.2
E194
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Catalog
Code
W7110
Guide
▶Since the table sizes of AIS-8013B/1016B/1622B are the same as
that of the precision labjacks (LJ/LJA), these can be used in combination
with the labjacks. E108
Application
Systems
Outline Drawing
Optics &
Optical
Coatings
AIS-100B
Hexagonal socket head cap screw M4×10…4 screws,
Spring washers
AIS-100CM
Hexagonal socket head cap screw M4×12…4 screws,
Spring washers
Holders
2
25
100
90
25
9-M4 depth 4
100
50
32
Bases
100
90
25 25
50
100
50
32
4-8
Driver hole
Manual
Stages
Actuators
4-8
Driver hole
4-M4 depth 8
4-M3 depth 6
M16 P1 depth 12
Motoeized
Stages
(68)
Light
Sources
5
Index
AIS-8013B
80
50
32
3
4-M4 depth 8
4-M3 depth 7
Hexagonal socket head cap screw
M4×16…4 screws
132
50
32
4-8
Driver hole
M16 P1 depth 12
AIS-1016B
25
25
Hexagonal socket head cap screw
M4×16…4 screws
160
AIS-1622B
Hexagonal socket head cap screw
M4×16…4 screws
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
34
34
25 25 25 25
20-M4 depth 8
3 220
M16 P1 depth 12
25 25 25 25
4-8
Driver hole
34
23
29
50
4-4.5 mounting hole
8 counterbore
7
4-4.5 mounting hole
8 counterbore
M16 P1 depth 12
(Center of the botton plate)
100
25
10-M4 depth 8
3 160
M16 P1 depth 12
50 25
4-8
Driver hole
12
Specifications
50
4-4.5 mounting hole
12
50
4-4.5 mounting hole
12
100
4-4.5 mounting hole
Part Number METRIC AIS-100B AIS-100CM AIS-8013B AIS-1016B AIS-1622B
Table Size [mm] 100×100 100×100 80×130 100×160 160×120
α axis (Narrow side direction) ±2 ±3 ±1.4 ±1.2 ±0.7
Tilt Range [ ° ]
β axis (Long side direction) − − ±0.8 ±0.7 ±0.6
Travel per Knob α axis (Narrow side direction) about 0.36 about 0.35 about 0.74 about 0.6 about 0.33
Rotation [ ° ] β axis (Long side direction) about 0.36 about 0.35 about 0.37 about 0.32 about 0.22
Primary Material
Aluminum
Finish
Black anodized
Load Capacity [N] 68.6 (7.0kgf) 68.6 (7.0kgf) 78.4 (8.0kgf) 98.0 (10.0kgf) 98.0 (10.0kgf)
Weight [kg] 0.51 0.6 0.8 1.2 2.5
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E195

Manual Positioners
Stainless Steel Linear Slides
IPWS
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
IPWS series is a high precision linear movement slide guide with integrated processing type of two
configuration parts, processing and hardening polish the guide directly to the (upper plate) moving
table and the lower plate, which installed the steel ball.
Preload of Impulse Ways
■There are two preloads for impulse ways as shown in the following
table. The standard preload is applied to the standard impulse
ways. The standard preload, either zero or only a slight preload,
provides smooth travel. On the other hand, the light preload
applies a preload slightly larger than the standard preload, making
it suited to usage that requires enhanced stiffness or under slight
vibrations. Impulse ways with a higher-than-standard preload are
also available upon request. Contact our International sales
Division for more information.
Type Standard (Zero) Preload Light Preload
Preload +2 – –3 –2 – –4
Condition
◦Location or usage under only
slight vibration
◦Smooth travel
◦Location or usage under a load
in a specific direction
◦Location or usage under slight
vibration
◦Location or usage under a slight
prying load
◦Location or usage under a
complex load
Motoeized
Stages
Light
Sources
Outline Drawing
IPWS-F1515
Hexagonal socket head cap screw
Hexagonal socket head cap screw
(stainless steel construction) M2×4…2 screws
IPWS-F1530
(stainless steel construction) M2×4…3 screws
15 4-M2 depth 3
8
30 8-M2 depth 3
8
8
0.5 8 7 8
0.5 12
Index
2-M2 depth 3
7
15
7.5
5 (Fixing screw insertion hole)
1.3
4-M2 depth 3
15
1.3 7
15
5 (Fixing screw insertion hole)
7.5
2-M2 depth 4
The mounting screw
Guide
X axis Stages
XY axis Stages
Z axis Stages
IPWS-F1540
2-2.5 4.2 counterbore (Top mounting)
2-M3 depth 1 (Bottom mounting)
Hexagonal socket head cap screw
(stainless steel construction) M2×4…3 screws
40
8
8-M2 depth 3
8 17 8
0.5
7 8 7
IPWS-F2020
Hexagonal socket head cap screw
(stainless steel construction) M2×6…2 screws
10
4-M2 depth 3
0.5
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
2
6
IPWS-F2040
Hexagonal socket head cap screw
(stainless steel construction) M2×6…3 screws
2
10
20
12
10
3-2.4 mounting hole
4.2 counterbore
4-M2 depth 3
25
1.3 7
15
5 (Fixing screw insertion hole)
7.5
4-M2 depth 4
The mounting screw
2-M2 depth 4
6
3.3 12
20
5.5 (Fixing screw insertion hole)
10
2
15 15
3-2.4 mounting hole
4.2 counterbore
2.5
10
2-2.5 4.2 counterbore (Top mounting)
2-M3 depth 3 (Bottom mounting)
40 10
8-M2 depth 3
12 8 12
0.5 19
IPWS-F2060
12
60
28
Hexagonal socket head cap screw
(stainless steel construction) M2×6…3 screws
12
8-M2 depth 3
10
0.5 15 9 15
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
4-M2
depth 4
2.5
6
14
14 14
6
3.3 12
20
5.5 (Fixing screw insertion hole)
3-2.4 mounting hole
4.2 counterbore
10
2-M2 depth 5
The mounting screw
2.5
6
34 6
24 24
3.3 12
20
5.5 (Fixing screw insertion hole)
4-M2 depth 4
3-2.4 mounting hole
4.2 counterbore
10
4-M2 depth 5
The mounting screw
Specifications
Part Number METRIC IPWS-F1515 IPWS-F1530 IPWS-F1540 IPWS-F2020 IPWS-F2040 IPWS-F2060
Table Size [mm] 15×15 15×30 15×40 20×20 20×40 20×60
Axes of Travel
X axis
Travel [mm] ±3 ±9 ±12 ±4 ±12 ±18
Bearing type
Extended contact ball guide
Primary Material
SUS440C quench hardened
Finish
None
Pitch [N・m] 0.4 1.2 1.8 0.7 1.8 3
Max. Moment
Roll [N・m] 0.8 2 2.8 1.6 2.7 4.2
Capacity
Yaw [N・m] 0.4 1.2 1.8 0.7 1.8 3
Parallelism [μm] 30 30 30 30 30 30
Running Parallelism [μm] 10 10 10 10 10 10
Weight [kg] 0.01 0.02 0.03 0.02 0.04 0.07
E196
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Catalog
Code
W7512
Outline Drawing
IPWS-F3030
Hexagonal socket head cap screw
(stainless steel construction) M3×6…2 screws
30
12
4-M3 depth 5
20 0.5
10
IPWS-F3050
50
20 20
Hexagonal socket head cap screw
(stainless steel construction) M3×6…3 screws
6-M3 depth 5
12
0.5 17
Application
Systems
Optics &
Optical
Coatings
18
30
18
18
30
18
Holders
2-M3 depth 5
4
12
2.8
2-M3 depth 6
The mounting screw
4-M3 depth 5
7 (Fixing screw insertion hole)
12 8 12
2.8
2-M3 depth 6
The mounting screw
Bases
4
21
2-3.5 mounting hole
6.5 counterbore
15
15
3-3.5 mounting hole
6.5 counterbore
Manual
Stages
IPWS-F3070
4
Hexagonal socket head cap screw
(stainless steel construction) M3×6…3 screws
IPWS-F3090
Hexagonal socket head cap screw
(stainless steel construction) M3×6…3 screws
Actuators
20
70
20
20
8-M3 depth 5
12
0.5 12 13 12
Motoeized
Stages
4-M3
depth 5
12
28
12
2.8 18
30
18
7 (Fixing screw insertion hole)
4-M3 depth 6
The mounting screw
4
20
90
40 20
8-M3 depth 5
12
0.5 22 13 22
4-M3 depth 5
12
48 12
18
30
7 (Fixing screw insertion hole)
2.8
18
4-M3 depth 6
The mounting screw
Light
Sources
Index
25 25
3-3.5 mounting hole
6.5 counterbore
35
35
3-3.5 mounting hole
6.5 counterbore
IPWS-F4040
Hexagonal socket head cap screw
(stainless steel construction) M4×6…4 screws
40 15
30 4-M4 depth 6
0.5 10
IPWS-F4070
30
70
30
Hexagonal socket head cap screw
(stainless steel construction) M4×6…4 screws
6-M4 depth 6
15
0.5
20
Guide
X axis Stages
XY axis Stages
24
40
25
14
24
40
25
14
Z axis Stages
2-M3 depth 5
22
4-M4 depth 6
The mounting screw
4-M3 depth 5
22
8
22
4-M4 depth 6
The mounting screw
XZ axis Stages
XYZ axis Stages
4
24
2
4-4.5 mounting hole
8 counterbore
4
40
2
4-4.5 mounting hole
8 counterbore
θ axis Stages
Goniometer
IPWS-F40100
100
30 30
Hexagonal socket head cap screw (stainless steel construction) M4×6…6screws
30
8-M4 depth 6
15
0.5 50
Inclination
Vacuum
24
40
25
14
Specifications
4-M3 depth 5
4
2
22 38
35
35
2-8 (Fixing screw insertion hole)
22
6-4.5 mounting hole
8 counterbore
4-M4 depth 6
The mounting screw
Part Number METRIC IPWS-F3030 IPWS-F3050 IPWS-F3070 IPWS-F3090 IPWS-F4040 IPWS-F4070 IPWS-F40100
Table Size [mm] 30×30 30×50 30×70 30×90 40×40 40×70 40×100
Axes of Travel
X axis
Travel [mm] ±7 ±14 ±20 ±27 ±10 ±20 ±30
Bearing type
Extended contact ball guide
Primary Material
SUS440C quench hardened
Finish
None
Pitch [N・m] 2 3.9 5.3 7.3 3.9 7.9 11.9
Max. Moment
Roll [N・m] 5.3 9.2 11.9 15.9 13.2 23.9 34.4
Capacity
Yaw [N・m] 2 3.9 5.3 7.3 3.9 7.9 11.9
Parallelism [μm] 30 30 30 30 30 30 30
Running Parallelism [μm] 10 10 10 15 10 10 15
Weight [kg] 0.07 0.12 0.16 0.21 0.15 0.26 0.38
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E197

Manual Positioners
Stainless Steel Linear Slides
IPWS
Catalog
Code
W7512
Application
Systems
Optics &
Optical
Coatings
Outline Drawing
IPWS-F40130
Hexagonal socket head cap screw
(stainless steel construction)
M4×6…6 screws
130
30 60
30
8-M4 depth 6
24
40
15
0.5
25
30 20 30
14
Holders
4-M3 depth 5
22
2-8 (Fixing screw insertion hole)
68 22
8-M4 depth 6
The mounting screw
Bases
4
Manual
Stages
Actuators
IPWS-F6060
Hexagonal socket head cap screw
(stainless steel construction)
5×10…4 screws
2
50
60
40
50
6-4.5 mounting hole
8 counterbore
4-M5 depth 8
20
0.5 26
Motoeized
Stages
36
60
38
24
Light
Sources
2-M4 depth 6
30
6
5
4-M5 depth 10
The mounting screw
Index
44
4-5.5 mounting hole
9.5 counterbore
Guide
IPWS-F60100
Hexagonal socket head cap screw
(stainless steel construction)
M5×10…4 screws
40
100
40
6-M5 depth 8
20
0.5
52
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
4-M4 depth 6
30 10 30
4-M5 depth 10
The mounting screw
XYZ axis Stages
6
θ axis Stages
70
5
36
60
38
24
4-5.5 mounting hole
9.5 counterbore
Goniometer
Inclination
IPWS-F60140
Hexagonal socket head cap screw
(stainless steel construction)
M5×10…6 screws
140
40 40
40
8-M5 depth 8
20
0.5 32 18 32
Vacuum
36
60
38
24
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
4-M4 depth 6
6
2-10 (Fixing screw insertion hole)
30 50 30
50
50
5
6-5.5 mounting hole
9.5 counterbore
8-M5 depth 10
The mounting screw
Specifications
Part Number METRIC IPWS-F40130 IPWS-F6060 IPWS-F60100 IPWS-F60140
Table Size [mm] 40×130 60×60 60×100 60×140
Axes of Travel
X axis
Travel [mm] ±37.5 ±13 ±30 ±40
Bearing type
Extended contact ball guide
Primary Material
SUS440C quench hardened
Finish
None
Pitch [N・m] 16.9 17.7 28.3 42.5
Max. Moment
Capacity
Roll [N・m] 47.7 59.7 89.5 129
Yaw [N・m] 16.9 17.7 28.3 42.5
Parallelism [μm] 50 30 30 50
Running Parallelism [μm] 15 10 15 15
Weight [kg] 0.5 0.47 0.78 1.1
E198
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Vacuum Guidance for Stainless Steel Stages
The amount of gas emitted from a vacuum compatible manual stage was measured.
According to the analysis of gas, the gas consists mainly of water and hydrocarbon. It is assumed
that moisture on the stage surface and part of the grease used as drive lubricating oil evaporated.
Application
Systems
■Emitted amount of gas
Part Number
Emitted Amount of Gas Q
(after 40 minutes of emission)
(Torr・l/s/unit) (Pa・l/s/unit)
TSDS-602S 3.57×10 −5 4.76×10 −3
TSDS-603 1.65×10 −5 2.20×10 −3
Evaluation and Device Specifications
Exhaust system: Turbo-Molecular Pump STP-301
Seiyu Instruments Inc. (Now Edwards Japan Limited)
Pumping speed: 300l/sec
Mass spectroscope: Quad Mass Spectrometer QME200
Pfeiffer Vacuum
Mass range: 1 − 200amu
Optics &
Optical
Coatings
Holders
Bases
Emitted amount of gas is found by the following equation:
Q =
(P − P′) × V
t× N
P : Vacuum immediately after seal off
P′: Vacuum after seal-off time has elapsed
N : Number of stage units (1unit)
V : Vacuum chamber volume (l)
t : Seal-off time (600s)
Manual
Stages
Actuators
Motoeized
Stages
■Vacuum of Vacuum Chamber
Vacuum [pa]
1×10 −3
1×10 −4
1×10 −5
1×10 −6
0
5 10
Time [h]
TSDS-602S
TSDS-603
Empty chamber
15 20 25
■Mass Component Ratio
Mass
Number
1
2
6
12
14
15
18
20
22
27
28
29
31
32
34
36
39
41
43
47
Component Ratio []
TSDS-602S TSDS-603
7.48 8.72
6.56 7.75
0.01 −
0.51
−
2.26
9.7
−
0.01
4.9
−
7.44
−
0.24
0.13
−
3.19
10.99
11.79
0.04
0.66
2.84
3.06
17.92
0.13
0.01
4.56
11.46
4.94
0.3
1.65
0.16
0.19
2.94
6.97
5.56
0.05
Ion
H +
H2 +
C 2+
C +
N+, CO 2 +, CH2 +
CH3+, NH +
H2O +
HF+, Ar 2+
CO2 2+
C2H3 +
CO+, N2+, C2H4 +
C2H5 +
C2H2OH +
O 2 +, S +
H2S +
HCl +
C3H3 +
C3H5 +
C3H5 +
CH3S +
Gas Molecule
H2, water vapor, hydrocarbon
H2, water vapor, hydrocarbon
CO, CO2, hydrocarbon
CO, CO2, hydrocarbon
N2, NH3, CO, hydrocarbon
Hydrocarbon, NH3
H2O
HF, Ar
CO2
Hydrocarbon
CO, CO2, N2, Hydrocarbon
Hydrocarbon
C2H3OH
O2, H2S, SO2
H2S
HCl
Hydrocarbon
Hydrocarbon
Hydrocarbon
CH2SH
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
■Interpretation of Mass Peak
The following list shows major gases that appear for each mass number when mass peaks (mass spectra) of residual gas
are measured, and their interpretations.
List of Residual Gas Spectra
Mass
Ion
Number
Remarks
Mass
Number
Ion
Remarks
1 H + H2, H2O, hydrocarbons, etc 30 NO + Appears immediately after emission of dirty vacuum system.
2 H2 + H2, H2O, hydrocarbons, etc 31 CH3O + Alcohol
3 HD + Abundance ratio of D is about 0.01%. 32 O2 + Becomes N23 : O32 = 4 : 1 when air leak occurs.
4 He + 35 Cl +
12 C + CO, CO2, hydrocarbons 37 Cl + Cl35 : Cl37 = 3 : 1
14 N + , CH2 + , CO2 + N2, CO2, hydrocarbons 39 K + , C3H3 + K + dissociates from filament.
15 CH3 + Molecule that has CH4, CH3 40 Ar + , C3H4 + Ar makes up 1% of the atmosphere.
16 C + , CH4 + O2, CH4, oxygen compounds 41 C3H5 + Hydrocarbon
17 OH + H2O 42 C3H6 + Hydrocarbon
18 H2O + H2O, OH + : H2O+ ≒ 1 : 5 43 C3H7 + Hydrocarbon
19 F + Sometimes adsorbed to filaments and electrode surface. 44 CO2 +
20 Ar + , H2O + , Ne + H2O(20) is present about 0.2% of abundance ratio of O15. 50 C4H2 + Hydrocarbon
22 CO2 2+ , Ne + Abundance ratio of NE22 is 8.8%. 51 C4H3 + Hydrocarbon
23 Na + Sometimes adsorbed to filaments and electrode surface. 55 C4H7 + Hydrocarbon
27 C2H3 + Hydrocarbon 56 C4H8 + Hydrocarbon
28 N2 + , CO + Remain till the last. 57 C4H9 + Hydrocarbon
29 C2H5 + , N2 + , CO + Abundance ratio of N15 is 0.7%, and that of C13 is 1.1%.
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E199

Manual Positioners
X axis Stainless Steel Extended Contact Slide Stages
TSDS-1 Stage size □25/□40/□60/□65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Stainless Steel Linear Stages suitable for hard vacuum and clean room applications have the same
design and performance as TSD stages
Completely made of stainless steel, they offering excellent corrosion resistance.
Both the stage and the stainless steel micrometer head are lubricated with a high grade vacuum
grease (YVAC2).
Guide
▶The TSDS series offers stages suitable for use in clean rooms or
vacuum applications.
Vacuum measurement data E199
Also ideal for use in airtight spaces that have to avoid outgassing.
Attention
▶There may be protrusions from the top surface depending on the
components that secure the micrometer heads.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC
TSDS-
251C
TSDS-
251S
INCH − −
TSDS-
401C
TSDS-
401CUU
TSDS-
401S
TSDS-
401SUU
TSDS-
601C
−
TSDS-
601S
−
TSDS-
651C-M6
TSDS-
651CUU
TSDS-
651S-M6
TSDS-
651SUU
Table Size [mm] 25×25 25×25 40×40 40×40 60×60 60×60 65×65 65×65
Axes of Travel
X axis
Micrometer Position Center Side Center Side Center Side Center Side
Travel [mm] ±3 ±3 ±6.5 ±6.5 ±6.5 ±6.5 ±6.5 ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Stainless steel
Finish
None
Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 147 (15.0kgf) 147 (15.0kgf) 343 (35.0kgf) 343 (35.0kgf) 343 (35.0kgf) 343 (35.0kgf)
Straightness [μm] 0.5 0.5 0.5 0.5 0.5 0.5 0.5 0.5
Travel Accuracy Pitch [ ″] 30 30 30 30 25 25 25 25
Yaw [ ″] 25 25 25 25 15 15 15 15
Pitch [N・m] 3.0 3.0 3.9 3.9 6.4 6.4 8.8 8.8
Max. Moment
Capacity
Roll [N・m] 3.7 3.7 3.9 3.9 6.4 6.4 9.8 9.8
Yaw [N・m] 1.5 1.5 2.5 2.5 4.9 4.9 4.9 4.9
Pitch [″/N・cm] 1.8 1.8 0.36 0.36 0.2 0.2 0.2 0.2
Moment Stiffness Roll [″/N・cm] 1.6 1.6 0.3 0.3 0.2 0.2 0.2 0.2
Yaw [″/N・cm] 2.0 2.0 0.4 0.4 0.2 0.2 0.2 0.2
Parallelism [μm] 30 30 15 15 15 15 30 30
Running Parallelism [μm] 10 10 10 10 10 10 10 10
Weight [kg] 0.07 0.07 0.2 0.2 0.5 0.5 0.55 0.55
E200
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Catalog
Code
W7005
Outline Drawing
TSDS-251C
(7)
Hexagon socket head cap screw (stainless steel construction)
M2×4…4 screws
25 MAX41
Clamp
10 10
TSDS-251S
(7)
Hexagon socket head cap screw (stainless steel construction)
M2×4…4 screws
25
Clamp
10 10 7-M2 depth 4
M4 depth 4
Application
Systems
Optics &
Optical
Coatings
25
10 10
M4 depth 4
7-M2 depth 4
20
11.5 25
10 10
MAX49
20
Holders
9.5
7
Bases
12
14
1.5
12
20
4-2.4mounting hole
4counterbore
TSDS-401C/401CUU
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws,Spring washers
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×3/16…4 screws (UU)
(9.5)
40
A A
8-C depth 5
16
Part Number
1.5
40
A A
B
A
(mm)
D depth 5
MAX67
10.5
4-E mounting hole
Fcounterbore
B
(mm)
C
17.8
D
Clamp
B
E
(mm)
F
(mm)
TSDS-401C 16 32 M3 M6 P1 3.5 6
TSDS-401CUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
1.5
20
4-2.4mounting hole
4counterbore
TSDS-401S/401SUU
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws,Spring washers
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×3/16…4 screws (UU)
40 (9.5)
A A
17.5
16
Part Number
1.5
40
A A
B
A
(mm)
MAX74
D depth 5
8-C depth 5
9
4-Emounting hole
Fcounterbore
B
(mm)
C
D
Clamp
B
E
(mm)
F
(mm)
TSDS-401S 16 32 M3 M6 P1 3.5 6
TSDS-401SUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
TSDS-601C
Hexagon socket head cap screw (stainless steel construction)
M4×6…4 screws
60
MAX67
25 25
32
Clamp
8-M4 depth 5
TSDS-601S
Hexagon socket head cap screw (stainless steel construction)
M4×6…4 screws
60
25 25
32
Clamp
8-M4 depth 5
XY axis Stages
Z axis Stages
XZ axis Stages
(11)
M16 P1 depth 6
(11)
M16 P1 depth 6
XYZ axis Stages
60
25
32
50
60
25
32
4-M3 depth 5
50
θ axis Stages
25
25
Goniometer
4-M3 depth 5
20.8
Inclination
10.5
MAX89
10.5
Vacuum
1.5
18
18
50
4-4.5mounting hole
8counterbore
TSDS-651C-M6/651CUU
Hexagon socket head cap screw (stainless steel construction) M6×6…4 screws (M6)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×1/4…4 screws (UU)
65
MAX69
A A
Clamp
9-C depth 6
(11)
65
A
20
1.5 A
Part Number
B
A
(mm)
12
4-D mounting hole
E counterbore
B
(mm)
C
B
D
(mm)
E
(mm)
TSDS-651C-M6 25 50 M6 6.5 11
TSDS-651CUU 25.4 50.8 1/4-20UNC 7 12
1.5
50
4-4.5mounting hole
8counterbore
TSDS-651S-M6/651SUU
Hexagon socket head cap screw (stainless steel construction) M6×6…4 screws (M6)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×1/4…4 screws (UU)
65
A A
Clamp
9-C depth 6
(11)
65
A A
20 20.8
1.5
Part Number
MAX91
B
A
(mm)
12.5
4-D mounting hole
E counterbore
B
(mm)
C
B
D
(mm)
E
(mm)
TSDS-651S-M6 25 50 M6 6.5 11
TSDS-651SUU 25.4 50.8 1/4-20UNC 7 12
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E201

Manual Positioners
XY axis Stainless Steel Extended Contact Slide Stages
TSDS-2 Stage size □25/□40/□60/□65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Stainless Steel Linear Stages suitable for hard vacuum and clean room applications have the same
design and performance as TSD stages.
Completely made of stainless steel, they offering excellent corrosion resistance.
Both the stage and the stainless steel micrometer head are lubricated with a high grade vacuum
grease (YVAC2).
Guide
▶The TSDS series offers stages suitable for use in clean rooms or
vacuum applications.
Vacuum measurement data E199
Also ideal for use in airtight spaces that have to avoid outgassing.
Attention
▶There may be protrusions from the top surface depending on the
components that secure the micrometer heads.
▶Note that some samples might not be able to be fixed on the stage
depending on their shapes, or required travel might not be ensured.
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC
TSDS-
252C
TSDS-
252S
INCH − −
TSDS-
402C
TSDS-
402CUU
TSDS-
402S
TSDS-
402SUU
TSDS-
602C
−
TSDS-
602S
−
TSDS-
652C-M6
TSDS-
652CUU
TSDS-
652S-M6
TSDS-
652SUU
Table Size [mm] 25×25 25×25 40×40 40×40 60×60 60×60 65×65 65×65
Axes of Travel
XY axis
Micrometer Position Center Side Center Side Center Side Center Side
Travel [mm] ±3 ±3 ±6.5 ±6.5 ±6.5 ±6.5 ±6.5 ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Stainless steel
Finish
None
Load Capacity [N] 49 (5.0kgf) 49 (5.0kgf) 147 (15.0kgf) 147 (15.0kgf) 343 (35.0kgf) 343 (35.0kgf) 343 (35.0kgf) 343 (35.0kgf)
Straightness [μm] 0.5 0.5 0.5 0.5 0.5 0.5 0.5 0.5
Travel Accuracy Pitch [ ″] 30 30 30 30 25 25 25 25
Yaw [ ″] 25 25 25 25 15 15 15 15
Pitch [N・m] 3.0 3.0 3.9 3.9 6.4 6.4 8.8 8.8
Max. Moment
Capacity
Roll [N・m] 3.0 3.0 3.9 3.9 6.4 6.4 8.8 8.8
Yaw [N・m] 1.5 1.5 2.5 2.5 4.9 4.9 4.9 4.9
Pitch [″/N・cm] 3.4 3.4 0.66 0.66 0.41 0.41 0.41 0.41
Moment Stiffness Roll [″/N・cm] 3.4 3.4 0.66 0.66 0.41 0.41 0.41 0.41
Yaw [″/N・cm] 4.0 4.0 0.8 0.8 0.41 0.41 0.41 0.41
Parallelism [μm] 50 50 30 30 30 30 50 50
Running Parallelism [μm] 20 20 20 20 20 20 20 20
Orthogonality [μm] 10 10 10 10 10 10 10 10
Weight [kg] 0.1 0.1 0.3 0.3 0.9 0.9 1.2 1.2
E202
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Catalog
Code
W7031
Outline Drawing
TSDS-252C
(7)
MAX41 25
10 10
Y axis clamp
20
Hexagon socket head cap screw (stainless steel construction)
M2×4…4 screws
(7) 25 MAX41
X axis clamp
10 10
1.5
20
7-M2 depth 4
M4 depth 4
9.5
4-2.4 mounting hole
4 counterbore
TSDS-402C/402CUU
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws, Spring washers
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×3/16…4 screws (UU)
(9.5)
40
A
A
(9.5) 40
A A
MAX67
8-C depth 5
22
20
17.5
X axis clamp
B
Hexagon socket head cap screw (stainless steel construction)
M2×4…4 screws
7-M2 depth 4 (7) 25 11.5 15
X axis clamp
10 10
TSDS-252S
20 11.5 25 (7)
10 10
M4 depth 4
Y axis clamp
1.5
MAX49
20
TSDS-402S/402SUU
MAX49
7
4-2.4 mounting hole
4 counterbore
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws, Spring washers
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×3/16…4 screws (UU)
(9.5) 40 17.5
20
X axis clamp
8-C depth 5 A A
(9.5)
40
A
A
MAX74
20
B
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
MAX67
D depth 5
17.5
D depth 5
MAX74
Light
Sources
Y axis clamp
10.5
21.5
28.8
Y axis clamp
Index
TSDS-602C
(11)
60
25 25
32
MAX67
1.5
(11)
Hexagon socket head cap screw (stainless steel construction)
M4×6…4 screws
60 MAX67
25 25
X axis clamp
32
8-M4 depth 5
M16 P1 depth 6
4-M3 depth 5
50
Hexagon socket head cap screw (stainless steel construction)
M4×6…4 screws
(11) 60 20.8 24.5
8-M4 depth 5 25 25
X axis clamp
32
M16 P1 depth 6
TSDS-602S
20.8 60 (11)
25
32
25
4-M3 depth 5
MAX89
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Y axis clamp
24.5
Vacuum
32
10.5
32
10.5
9
27
27
Part Number
B 4-E mounting hole
F counterbore
A
(mm)
B
(mm)
C
D
E
(mm)
F
(mm)
TSDS-402C 16 32 M3 M6 P1 3.5 6
TSDS-402CUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
1.5
Part Number
B
A
(mm)
4-E mounting hole
F counterbore
B
(mm)
MAX89
C
D
50
E
(mm)
F
(mm)
TSDS-402S 16 32 M3 M6 P1 3.5 6
TSDS-402SUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
Y axis clamp
1.5
50
TSDS-652C-M6/652CUU
4-4.5 mounting hole
8 counterbore
Hexagon socket head cap screw (stainless steel construction) M6×6…4 screws (M6)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×1/4…4 screws (UU)
(11) 65 MAX69
A A
X axis clamp
9-C depth 6
(11)
32 MAX69 65
A
A
Y axis clamp
B 4-D mounting hole
E counterbore
Part Number
A
(mm)
B
(mm)
C
D
(mm)
E
(mm)
TSDS-652C-M6 25 50 M6 6.5 11
TSDS-652CUU 25.4 50.8 1/4-20UNC 7 12
1.5
12
24
B
1.5
50
TSDS-652S-M6/652SUU
4-4.5 mounting hole
8 counterbore
Hexagon socket head cap screw (stainless steel construction) M6×6…4 screws (M6)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×1/4…4 screws (UU)
(11) 65 20.8
24.5
9-C depth 6
A A
X axis clamp
(11)
65
A A
20.8
Y axis clamp
32
1.5
Part Number
MAX91
B
A
(mm)
MAX91
11
4-D mounting hole
E counterbore
B
(mm)
C
B
D
(mm)
E
(mm)
TSDS-652S-M6 25 50 M6 6.5 11
TSDS-652SUU 25.4 50.8 1/4-20UNC 7 12
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E203

Manual Positioners
Catalog
Z axis Stainless Steel Extended Contact Slide Stages TSDS-3 Stage size □25/□40/□60/□65mm Code W7043
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Stainless Steel Linear Stages suitable for hard vacuum and clean room applications have the same
design and performance as TSD stages.
Completely made of stainless steel, they offering excellent corrosion resistance. Both the stage
and the stainless steel micrometer head are lubricated with a high grade vacuum grease (YVAC2).
Guide
▶The TSDS series offers stages suitable for use in clean rooms or
vacuum applications.
Vacuum measurement data E199
Also ideal for use in airtight spaces that have to avoid outgassing.
Attention
▶The structure does not allow upside down installation since the
spring inside the stage might not be able to withstand the load and
may stretch.
▶Since the structure uses the principle of leverage, the feed rate
fluctuates against the scale depending on the travel (about
±0.02mm for micrometer head 0.5mm/rotation).
Motoeized
Stages
Outline Drawing
Light
Sources
Index
TSDS-253
7-M2 depth 4
25 (3)
10
10
Hexagon socket head cap screw
(stainless steel construction) M2×6…3 screws
25
10 10
MAX38
3-φ2.4 mounting hole
Clamp
20
20
TSDS-403/403UU
7-C depth 5
40
A
A
Hexagon socket head cap screw (stainless steel construction) M3×8…3 screws
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×3/8…3 screws (UU)
40 MAX32
A A
Clamp 3-φD mounting hole B
B
3.5
34.3
2
43.5
Guide
X axis Stages
24±3
4 4
7
34±3
5
5
10
Part Number
A
(mm)
B
(mm)
C
D
(mm)
TSDS-403 16 32 M3 3.5
TSDS-403UU 15.875 31.75 6-32UNC 4
XY axis Stages
Z axis Stages
XZ axis Stages
TSDS-603
7-M4 depth 6
Hexagon socket head cap screw
(stainless steel construction) M4×12…4 screws
60
(7)
25 25
32
TSDS-653-M6/653UU
65
7-C depth 6 A A
Hexagon socket head cap screw (stainless steel construction) M6×12…3 screws (M6)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×1/2…4 screws (UU)
(4.5)
XYZ axis Stages
25
θ axis Stages
60
32
50
25
65
B
A
A
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
MAX44
4-M3 depth 6
55±5
7 7
50
Specifications
M16 P1 depth 6
Clamp
4-φ4.5 mounting hole
15
55±5 MAX42
7
7
4-φ7
mounting hole
Part Number
METRIC TSDS-253 TSDS-403 TSDS-603 TSDS-653-M6
INCH − TSDS-403UU − TSDS-653UU
Table Size [mm] 25×25 40×40 60×60 65×65
Axes of Travel
Z axis
Travel [mm] ±3 ±3 ±5 ±5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Stainless steel
Finish
None
Load Capacity [N] 29.4 (3.0kgf) 88.3 (9.0kgf) 147 (15.0kgf) 147 (15.0kgf)
Travel Accuracy Straightness [μm] 5 2.5 2.5 2.5
Max. Moment Pitch [N・m] 1 3.9 6.9 6.9
Capacity
Roll [N・m] 1 3.9 6.9 6.9
Moment Stiffness
Pitch [″/N・cm] 7.14 1.84 0.51 0.51
Roll [″/N・cm] 7.15 1.84 0.51 0.51
Parallelism [μm] 80 80 80 80
Running Parallelism [μm] 15 20 25 25
Weight [kg] 0.1 0.25 1.0 1.1
B
Clamp
15
Part Number
A
(mm)
B
(mm)
TSDS-653-M6 25 50 M6
TSDS-653UU 25.4 50.8 1/4-20UNC
C
E204
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Catalog
Z axis Stainless Steel Extended Contact Slide Stages (Vertical) TSDS-3L Stage size □25/□40/□60/□65mm Code W7152
Stainless Steel Linear Stages suitable for hard vacuum and clean room applications have the same
design and performance as TSD stages.
Completely made of stainless steel, they offering excellent corrosion resistance. Both the stage
and the stainless steel micrometer head are lubricated with a high grade vacuum grease (YVAC2).
Guide
▶The TSDS series offers stages suitable for use in clean rooms or
vacuum applications.
Vacuum measurement data E199
Also ideal for use in airtight spaces that have to avoid outgassing.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Outline Drawing
TSDS-253L
Hexagon socket head cap screw (stainless steel construction)
M2×6…4 screws
20 4-φ2.4 mounting hole
Clamp
TSDS-403L/403LUU
Hexagonal socket head cap screw M3×6…4 screws
Hexagonal socket head cap screw 6-32UNC×1/4…4 screws (UU)
B 4-φE mounting hole
Clamp
Motoeized
Stages
Light
Sources
3
7
25±3
2.5
12.5
17.5
61
11.5
20
25
M4 depth 4
6-M2 depth 4
10 10
25
(7)
37.5
3
10.5
A
24
0.5
F
35±6.5
82.5
19.5
A
40
A
D depth 5
8-C depth 5
A A
40
55
(9.5)
Part
Number
TSDS-
403L
TSDS-
403LUU
A (mm) 16 15.875
B (mm) 32 31.75
C M3 6-32UNC
D M6 P1 1/4-20UNC
E (mm) 3.5 4
F (mm) 4 3.625
Index
Guide
X axis Stages
XY axis Stages
TSDS-603L
12
Hexagon socket head cap screw (stainless steel construction)
M4×8…4 screws
50
4-φ4.5 mounting hole
25 25
32
Clamp
4-M3 depth 5
9-M4 depth 6
TSDS-653L-M6/653LUU
12
A
Hexagonal socket head cap screw M6×6…4 screws (M6)
Hexagonal socket head cap screw 1/4-20UNC×1/4…4 screws (UU)
B
4-φD mounting hole
φ11 counterbore
Clamp
A
9-C depth 6
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
4
3.5
25 5
35
Specifications
Part Number
METRIC TSDS-253L TSDS-403L TSDS-603L TSDS-653L-M6
INCH − TSDS-403LUU − TSDS-653LUU
Table Size [mm] 25×25 40×40 60×60 65×65
Axes of Travel
Z axis
Micrometer Position Side Side Side Side
Travel [mm] ±3 ±6.5 ±6.5 ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Stainless steel
Finish
None
Load Capacity [N] 14.7 (1.5kgf) 49.0 (5.0kgf) 49.0 (5.0kgf) 49.0 (5.0kgf)
Travel Accuracy Straightness [μm] 1 1 1 1
Max. Moment
Capacity
50±6.5
(97)
(21) 60 (11)
32
25 25
60
80
1.5
A
39.6
Pitch [N・m] 2.2 5 8 8
Roll [N・m] 2.1 5 8 8
Moment Stiffness Pitch [″/N・cm] 3.3 0.6 0.25 0.25
Parallelism [μm] 20 20 20 20
Running Parallelism [μm] 30 30 30 30
Weight [kg] 0.1 0.3 0.8 0.9
6
50±6.5
96.8
E 20.8 65 (11)
A A
65
82.5
Part
Number
TSDS-
653L-M6
TSDS-
653LUU
A (mm) 25 25.4
B (mm) 50 50.8
C M6 P1 1/4-20UNC
E (mm) 6.5 7
F (mm) 11 12
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E205

Manual Positioners
XZ axis Stainless Steel Extended Contact Slide Stages
TSDS-4 Stage size □25/□40/□60/□65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
XZ axis Stainless Steel Stages suitable for hard vacuum and clean room applications have the
same design and performance as TSD stages.
◦Made completely of stainless steel, offering excellent corrosion resistance.
◦Both the stage and micrometer head use high vacuum grease (YVAC2).
Guide
▶The TSDS series offers stages suitable for use in clean rooms or
vacuum applications.
Vacuum measurement data E199
Also ideal for use in airtight spaces that have to avoid outgassing.
Attention
▶The structure does not allow upside down installation since the
spring inside the stage might not be able to withstand the load and
may stretch.
▶Since the structure uses the principle of leverage, the feed rate
fluctuates against the scale depending on the travel (about
±0.02mm for micrometer head 0.5mm/rotation).
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC
TSDS-
254C
TSDS-
254S
INCH − −
TSDS-
404C
TSDS-
404CUU
TSDS-
404S
TSDS-
404SUU
TSDS-
604C
−
TSDS-
604S
−
TSDS-
654C-M6
TSDS-
654CUU
TSDS-
654S-M6
TSDS-
654SUU
Table Size [mm] 25×25 25×25 40×40 40×40 60×60 60×60 65×65 65×65
Axes of Travel
XZ axis
Micrometer Position Center Side Center Side Center Side Center Side
Travel [mm]
X axis ±3
Z axis ±3
X axis ±3
Z axis ±3
X axis ±6.5
Z axis ±3
X axis ±6.5
Z axis ±3
X axis ±6.5
Z axis ±5
X axis ±6.5
Z axis ±5
X axis ±6.5
Z axis ±5
X axis ±6.5
Z axis ±5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Stainless steel
Finish
None
Load Capacity [N] 29.4 (3.0kgf) 29.4 (3.0kgf) 88.3 (9.0kgf) 88.3 (9.0kgf) 147 (15.0kgf) 147 (15.0kgf) 147 (15.0kgf) 147 (15.0kgf)
Travel Accuracy Straightness [μm] 5 5 2.5 2.5 2.5 2.5 2.5 2.5
Max. Moment Pitch [N・m] 1.0 1.0 3.9 3.9 6.9 6.9 6.9 6.9
Capacity
Roll [N・m] 1.0 1.0 3.9 3.9 6.9 6.9 6.9 6.9
Pitch [″/N・cm] 8.95 8.95 2.2 2.2 0.75 0.75 0.75 0.75
Moment Stiffness
Roll [″/N・cm] 8.75 8.75 2.15 2.15 0.75 0.75 0.75 0.75
Parallelism [μm] 110 110 110 110 110 110 110 110
Weight [kg] 0.17 0.17 0.45 0.45 1.5 1.5 1.65 1.65
E206
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W7064
Outline Drawing
TSDS-254C
(7)
25
MAX38
36±3
24
10
10
12
1.5
TSDS-404C/404CUU
Hexagon socket head cap screw (stainless steel construction)
M2×4…4 screws
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws, Spring washers
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×3/16…4 screws (UU)
TSDS-604C
(11)
60
MAX44
25
25
MAX32 40 (9.5)
A
A
50±3
34
16
7-M4 depth 6
32
1.5
3.5
2
Part Number
4-M3 depth 6
25
10 10
20
40
A A
B
MAX41
A
(mm)
7-M2 depth 4
Z axis clamp
9.5
4-2.4 mounting hole
4 counterbore
MAX67
7-C depth 5
Z axis clamp
Hexagon socket head cap screw (stainless steel construction)
M4×6…4 screws
60 MAX67
25 25
32
X axis clamp
M16 P1 depth 6
10.5
4-D mounting hole
E counterbore
B
(mm)
C
19
26
X axis clamp
20
X axis clamp
B
D
(mm)
50
E
(mm)
TSDS-404C 16 32 M3 3.5 6
TSDS-404CUU 15.875 31.75 6-32UNC 4 6.5
TSDS-254S
MAX38 25 (7)
10 10
36±3
24
12
1.5
Hexagon socket head cap screw (stainless steel construction)
M2×4…4 screws
MAX49
3.5 25
10 10
X axis clamp
TSDS-404S/404SUU
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws, Spring washers
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×3/16…4 screws (UU)
MAX74
2 40
A A
X axis clamp
MAX32 40 (9.5)
TSDS-604S
7-M4 depth 6
A
A
50±3
34
16
MAX44 60 (11)
25 25
32
1.5
Part Number
20
B
7-M2 depth 4
Z axis clamp
7
4-2.4 mounting hole
4 counterbore
7-C depth 5
Z axis clamp
4-D mounting hole
E counterbore
A
(mm)
B
(mm)
9
19
Hexagon socket head cap screw (stainless steel construction)
M4×6…4 screws
60
25 25 4-M3 depth 6
32
X axis clamp
M16 P1 depth 6
26
20
C
B
50
D
(mm)
E
(mm)
TSDS-404S 16 32 M3 3.5 6
TSDS-404SUU 15.875 31.75 6-32UNC 4 6.5
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
33
MAX89
33
Inclination
73±5
55
Z axis clamp
10.5
73±5
55
Z axis clamp
10.5
Vacuum
18
50
4-4.5 mounting hole
8 counterbore
TSDS-654C-M6/654CUU
Hexagon socket head cap screw (stainless steel construction) M6×6…4 screws (M6)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×1/4…4 screws (UU)
7-C depth 6
65 MAX69
X axis clamp
A A
(11)
65
1.5
A
A
B
18
1.5
50
4-4.5 mounting hole
8 counterbore
TSDS-654S-M6/654SUU
Hexagon socket head cap screw (stainless steel construction) M6×6…4 screws (M6)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×1/4…4 screws (UU)
65
7-C depth 6
X axis clamp
A A
(11)
65
A
A
B
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
75±5 MAX42
20 55
1.5
Part Number
B
A
(mm)
Z axis clamp
12
4-D mounting hole
E counterbore
B
(mm)
C
35
D
(mm)
E
(mm)
TSDS-654C-M6 25 50 M6 6.5 11
TSDS-654CUU 25.4 50.8 1/4-20UNC 7 12
75±5 MAX42
20 55
1.5
Part Number
MAX91
B
A
(mm)
Z axis clamp
12.5
4-D mounting hole
E counterbore
B
(mm)
C
35
D
(mm)
E
(mm)
TSDS-654S-M6 25 50 M6 6.5 11
TSDS-654SUU 25.4 50.8 1/4-20UNC 7 12
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E207

Manual Positioners
XYZ axis Stainless Steel Extended Contact Slide Stages (Vertical)
TSDS-4L Stage size □25/□40/□60/□65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
XYZ axis Stainless Steel Stages suitable for hard vacuum and clean room applications have the
same design and performance as TSD stages.
◦Made completely of stainless steel, offering excellent corrosion resistance.
◦Both the stage and micrometer head use high vacuum grease (YVAC2).
Guide
▶The TSDS series offers stages suitable for use in clean rooms or
vacuum applications.
Vacuum measurement data E199
Also ideal for use in airtight spaces that have to avoid outgassing.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC
TSDS-
254CL
TSDS-
254SL
INCH − −
TSDS-
404CL
TSDS-
404CLUU
TSDS-
404SL
TSDS-
404SLUU
TSDS-
604CL
−
TSDS-
604SL
−
TSDS-
654CL-M6
TSDS-
654CLUU
TSDS-
654SL-M6
TSDS-
654SLUU
Table Size [mm] 25×25 25×25 40×40 40×40 60×60 60×60 65×65 65×65
Axes of Travel
Micrometer Position Center Side Center Side Center Side Center Side
Travel [mm]
X axis ±3
Z axis ±3
X axis ±3
Z axis ±3
X axis ±6.5
Z axis ±3
X axis ±6.5
Z axis ±3
XZ axis
X axis ±6.5
Z axis ±6.5
X axis ±6.5
Z axis ±6.5
X axis ±6.5
Z axis ±6.5
X axis ±6.5
Z axis ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5 0.5 0.5 0.5 0.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01 0.01 0.01 0.01 0.01
Bearing type
Extended contact ball guide
Primary Material
Stainless steel
Finish
None
Load Capacity [N] 14.7 (1.5kgf) 14. (1.5kgf) 49 (5kgf) 49 (5kgf) 49 (5kgf) 49 (5kgf) 49 (5kgf) 49 (5kgf)
Travel Accuracy Straightness [μm] 1 1 1 1 1 1 1 1
Max. Moment Pitch [N・m] 2.2 2.2 3.9 3.9 8.0 8.0 8.0 8.0
Capacity
Roll [N・m] 2.1 2.1 3.9 3.9 8.0 8.0 8.0 8.0
Moment Stiffness Pitch [″/N・cm] 5.1 5.1 0.96 0.96 0.45 0.45 0.45 0.45
Weight [kg] 0.17 0.17 0.5 0.5 1.3 1.3 1.45 1.45
E208
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Catalog
Code
W7068
Outline Drawing
TSDS-254CL
9.5
Hexagon socket head cap screw (stainless steel construction)
M2×4…4 screws
7
20
MAX41 25
37±3
49.5
X axis clamp
25 (7)
M4 depth 4
20 6-M2 depth 4
Z axis clamp
10 10
25
12 37.5
TSDS-404CL/404CLUU
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws, Spring washers
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×3/16…4 screws (UU)
11.5
73
1.5
20
4-2.4 mounting hole
4 counterbore
TSDS-254SL
7
20
25
MAX49
Hexagon socket head cap screw (stainless steel construction)
M2×4…4 screws
7
37±3
49.5
X axis clamp
11.5
M4 depth 4
6-M2 depth 4
Z axis clamp
10 10
25
37.5
TSDS-404SL/404SLUU
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws, Spring washers
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×3/16…4 screws (UU)
11.5
73
1.5
25
20
20
12
4-2.4 mounting hole
4 counterbore
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
10.5
98.5
19.5
40
A A
(9.5)
D depth 5
8-C depth 5
Z axis clamp
A A
40
55
10.5 19.5 40 17.5
A A D depth 5
8-C depth 5
Z axis clamp
98.5
A A
40
55
Motoeized
Stages
Light
Sources
10.5
MAX67
B
40
0.5
51±6.5
71
X axis clamp
1.5
B
16
4-E mounting hole
F counterbore
9
B
40
MAX74
0.5
51±6.5
71
X axis clamp
1.5
B
16
4-E mounting hole
F counterbore
Index
Part Number
A
(mm)
B
(mm)
C
D
E
(mm)
F
(mm)
TSDS-404CL 16 32 M3 M6 P1 3.5 6
TSDS-404CLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
Part Number
A
(mm)
B
(mm)
C
D
E
(mm)
F
(mm)
TSDS-404SL 16 32 M3 M6 P1 3.5 6
TSDS-404SLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
Guide
X axis Stages
XY axis Stages
Z axis Stages
TSDS-604CL
Hexagon socket head cap screw (stainless steel construction)
M4×6…4 screws
TSDS-604SL
Hexagon socket head cap screw (stainless steel construction)
M4×6…4 screws
XZ axis Stages
12
4-M3 depth 5
(21)
60 (11)
25 25 9-M4 depth 5
32
Z axis clamp
12
4-M3 depth 5
(21) 60 20.5
25 25
32
9-M4 depth 5
Z axis clamp
XYZ axis Stages
θ axis Stages
10.5
X axis clamp
3.5
68±6.5
98
114.8
32
25 25
60
80
X axis clamp
3.5
68±6.5
98
114.8
32
25 25
60
80
Goniometer
Inclination
Vacuum
18
10.5
18
50 50 4-4.5 mounting hole
MAX67 60
8 counterbore
1.5
50 50 4-4.5 mounting hole
60
8 counterbore
MAX89
1.5
Ball Guide
TSDS-654CL-M6/654CLUU
Hexagon socket head cap screw (stainless steel construction) M6×6…4 screws (M6)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×1/4…4 screws (UU)
20.8 65
12 A A
(11)
9-C depth 6
Z axis clamp
TSDS-654SL-M6/654SLUU
Hexagon socket head cap screw (stainless steel construction) M6×6…4 screws (M6)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×1/4…4 screws (UU)
20.8 65
12 A A
20.8
9-C depth 6
Z axis clamp
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
X axis clamp
Part Number
B
65
MAX134
A
(mm)
6
70±6.5
102.5
B
(mm)
96.8
C
B
D
(mm)
A A
65
82.5
20
4-D mounting hole
E counterbore
E
(mm)
TSDS-654CL-M6 25 50 M6 6.5 11
TSDS-654CLUU 25.4 50.8 1/4-20UNC 7 12
X axis clamp
B
65
MAX94
Part Number
6
70±6.5
102.5
A
(mm)
96.8
B
(mm)
B
C
A A
65
82.5
20
4-D mounting hole
E counterbore
D
(mm)
E
(mm)
TSDS-654SL-M6 25 50 M6 6.5 11
TSDS-654SLUU 25.4 50.8 1/4-20UNC 7 12
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E209

Manual Positioners
XYZ axis Stainless Steel Extended Contact Slide Stages
TSDS-5 Stage size □25/□40/□60/□65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
XYZ axis Stainless Steel Stages suitable for hard vacuum and clean room applications have the
same design and performance as TSD stages.
◦Made completely of stainless steel, offering excellent corrosion resistance.
◦Both the stage and micrometer head use high vacuum grease (YVAC2).
Guide
▶The TSDS series offers stages suitable for use in clean rooms or
vacuum applications.
Vacuum measurement data E199
Also ideal for use in airtight spaces that have to avoid outgassing.
Attention
▶The structure does not allow upside down installation since the
spring inside the stage might not be able to withstand the load and
may stretch.
▶Since the structure uses the principle of leverage, the feed rate
fluctuates against the scale depending on the travel (about
±0.02mm for micrometer head 0.5mm/rotation).
Motoeized
Stages
Light
Sources
Outline Drawing
Index
TSDS-255C
Hexagon socket head cap screw (stainless steel construction)
M2×4…4 screws
TSDS-255S
Hexagon socket head cap screw (stainless steel construction)
M2×4…4 screws
Guide
X axis Stages
XY axis Stages
MAX41 25
10 10
7-M2 depth 4
10 10
MAX41 25
Y axis clamp
20
11.5
7-M2 depth 4
MAX38 25 (7)
10 10
MAX49
25
10 10
Y axis clamp
20
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Z axis clamp (3)
17.5
1.5
20
20 24
44±3
X axis clamp
4-φ2.4 mounting hole
φ4 counterbore
27
9.5
44±3
20 24
1.5
20
Z axis clamp
15
X axis clamp
4-φ2.4 mounting hole
φ4 counterbore
27
7
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC
TSDS-
255C
TSDS-
255S
INCH − −
TSDS-
405C
TSDS-
405CUU
TSDS-
405S
TSDS-
405SUU
TSDS-
605C
−
TSDS-
605S
−
TSDS-
655C-M6
TSDS-
655CUU
TSDS-
655S-M6
TSDS-
655SUU
Table Size [mm] 25×25 25×25 40×40 40×40 60×60 60×60 65×65 65×65
Axes of Travel
XYZ axis
Micrometer Position Center Side Center Side Center Side Center Side
Travel [mm]
XY axis ±3
Z axis ±3
XY axis ±3
Z axis ±3
XY axis ±6.5
Z axis ±3
XY axis ±6.5
Z axis ±3
XY axis ±6.5
Z axis ±5
XY axis ±6.5
Z axis ±5
XY axis ±6.5
Z axis ±5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5 0.5 0.5 0.5 0.5
XY axis ±6.5
Z axis ±5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Finish
Extended contact ball guide
Stainless steel
Load Capacity [N] 29.4 (3.0kgf) 29.4 (3.0kgf) 88.3 (9.0kgf) 88.3 (9.0kgf) 147 (15.0kgf) 147 (15.0kgf) 147 (15.0kgf) 147 (15.0kgf)
Travel Accuracy Straightness [μm] 5 5 2.5 2.5 2.5 2.5 2.5 2.5
Max. Moment Pitch [N・m] 1.0 1.0 3.9 3.9 6.9 6.9 6.9 6.9
Capacity
Roll [N・m] 1.0 1.0 3.9 3.9 6.9 6.9 6.9 6.9
Pitch [″/N・cm] 10.55 10.55 2.5 2.5 1.0 1.0 1.0 1.0
Moment Stiffness
Roll [″/N・cm] 10.55 10.55 2.5 2.5 1.0 1.0 1.0 1.0
Parallelism [μm] 130 130 130 130 130 130 130 130
Weight [kg] 0.2 0.2 0.55 0.55 1.9 1.9 2.2 2.2
None
E210
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W7076
Outline Drawing
TSDS-405C/405CUU
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws, Spring washers
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×3/16…4 screws (UU)
21.5
MAX67 40 (9.5)
A A
7-C depth 5
Z axis clamp
1.5
Part Number
B
A
(mm)
A
A
34
27
(9.5)
40
MAX67
61±3
4-D mounting hole
E counterbore
B
(mm)
Y axis clamp
C
37
X axis clamp
B
10.5
D
(mm)
E
(mm)
TSDS-405C 16 32 M3 3.5 6
TSDS-405CUU 15.875 31.75 6-32UNC 4 6.5
TSDS-405S/405SUU
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws, Spring washers
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×3/16…4 screws (UU)
17.5 40
7-C depth 5 A A
Y axis clamp
X axis clamp
61±3
MAX74
34
27
4-D mounting hole
E counterbore
Part Number
MAX74
B
A
(mm)
A
A
1.5
(9.5)
40
Z axis clamp
20
B
(mm)
C
9
37
B
D
(mm)
E
(mm)
TSDS-405S 16 32 M3 3.5 6
TSDS-405SUU 15.875 31.75 6-32UNC 4 6.5
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
TSDS-605C
Hexagon socket head cap screw (stainless steel construction)
M4×6…4 screws
MAX67 60 (11)
25 25
32
Y axis clamp
(11)
TSDS-605S
4-M3 depth 6
20.8
Hexagon socket head cap screw (stainless steel construction)
M4×6…4 screws
60 (11)
25 25 7-M4 depth 6
Y axis clamp
32
(11)
Index
Guide
4-M3 depth 6
M16 P1 depth 6
32
25
25
7-M4
depth 6
60
MAX67
50
MAX89
M16 P1 depth 6
MAX89
32
25 25
MAX44 60
10.5
50
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
Z axis clamp
10.5
47
Z axis clamp
47
XYZ axis Stages
24.5
55
32
87±5
87±5
32 55
24.5
θ axis Stages
Goniometer
1.5
50
X axis clamp
4-4.5 mounting hole
8 counterbore
4-4.5 mounting hole
8 counterbore
50
1.5
X axis clamp
Inclination
Vacuum
TSDS-655C-M6/655CUU
Hexagon socket head cap screw (stainless steel construction) M6×6…4 screws (M6)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×1/4…4 screws (UU)
TSDS-655S-M6/655SUU
Hexagon socket head cap screw (stainless steel construction) M6×6…4 screws (M6)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×1/4…4 screws (UU)
MAX69
7-C depth 6
65
A A
(11)
(11)
Y axis clamp
X axis clamp
7-C depth 6
65
A A
(11)
Y axis clamp
X axis clamp
Ball Guide
Crossed Roller
A
A
65
B
MAX91
A
A
65
B
Dovetail
Lapping
MAX69
MAX91
MAX42
47
11
V Groove Screw
Ohters
24
1.5
Part Number
B
A
(mm)
Z axis clamp
32 55
87±5
4-D mounting hole
E counterbore
B
(mm)
C
12
47
D
(mm)
E
(mm)
TSDS-655C-M6 25 50 M6 6.5 11
TSDS-655CUU 25.4 50.8 1/4-20UNC 7 12
87±5
55
32
4-D mounting hole
E counterbore
Part Number
B
A
(mm)
Z axis clamp
1.5
24.5
B
(mm)
C
D
(mm)
E
(mm)
TSDS-655S-M6 25 50 M6 6.5 11
TSDS-655SUU 25.4 50.8 1/4-20UNC 7 12
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
E211

Manual Positioners
XYZ axis Stainless Steel Extended Contact Slide Stages (Vertical)
TSDS-5L Stage size □25/□40/□60/□65mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
XYZ axis Stainless Steel Stages suitable for hard vacuum and clean room applications have the
same design and performance as TSD stages.
◦Made completely of stainless steel, offering excellent corrosion resistance.
◦Both the stage and micrometer head use high vacuum grease (YVAC2).
Guide
▶The TSDS series offers stages suitable for use in clean rooms or
vacuum applications.
Vacuum measurement data E199
Also ideal for use in airtight spaces that have to avoid outgassing.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number
METRIC
TSDS-
255CL
TSDS-
255SL
INCH − −
TSDS-
405CL
TSDS-
405CLUU
TSDS-
405SL
TSDS-
405SLUU
TSDS-
605CL
−
TSDS-
605SL
−
TSDS-
655CL-M6
TSDS-
655CLUU
TSDS-
655SL-M6
TSDS-
655SLUU
Table Size [mm] 25×25 25×25 40×40 40×40 60×60 60×60 65×65 65×65
Axes of Travel
XYZ axis
Micrometer Position Center Side Center Side Center Side Center Side
Travel [mm]
XY axis ±3
Z axis ±3
XY axis ±3
Z axis ±3
XY axis ±6.5
Z axis ±3
XY axis ±6.5
Z axis ±3
XY axis ±6.5
Z axis ±6.5
XY axis ±6.5
Z axis ±6.5
XY axis ±6.5
Z axis ±6.5
Lead of Actuator [mm/rotation] 0.5 0.5 0.5 0.5 0.5 0.5 0.5 0.5
XY axis ±6.5
Z axis ±6.5
Micrometer Readable Resolution [mm] 0.01 0.01 0.01 0.01 0.01 0.01 0.01 0.01
Bearing type
Primary Material
Finish
Extended contact ball guide
Stainless steel
Load Capacity [N] 14.7 (1.5kgf) 14.7 (1.5kgf) 49 (5kgf) 49 (5kgf) 49 (5kgf) 49 (5kgf) 49 (5kgf) 49 (5kgf)
Travel Accuracy Straightness [μm] 1 1 1 1 1 1 1 1
Max. Moment Pitch [N・m] 2.2 2.2 3.9 3.9 8.0 8.0 8.0 8.0
Capacity
Roll [N・m] 2.1 2.1 3.9 3.9 8.0 8.0 8.0 8.0
Moment Stiffness Pitch [″/N・cm] 6.7 6.7 1.26 1.26 0.58 0.58 0.58 0.58
Weight [kg] 0.2 0.2 0.6 0.6 1.7 1.7 2.0 2.0
None
E212
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W7080
Outline Drawing
TSDS-255CL
Hexagon socket head cap screw (stainless steel construction)
M2×4…4 screws
7
25
20
(7)
M4 depth 4
6-M2 depth 4
Z axis clamp
TSDS-255SL
Hexagon socket head cap screw (stainless steel construction)
M2×4…4 screws
25 11.5
7
20
M4 depth 4
6-M2 depth 4
Z axis clamp
Application
Systems
Optics &
Optical
Coatings
17.5
20
45±3
57.5
MAX41 25 (6.5)
81
X axis clamp
9.5
MAX41 20
1.5
10 10
25
20 37.5
Y axis clamp
4-2.4 mounting hole
4 counterbore
7
20
25
MAX49
45±3
57.5
81
15
Y axis clamp
1.5
(6.5) X axis clamp
20
MAX49
10 10
25
20 37.5
4-2.4 mounting hole
4 counterbore
Holders
Bases
Manual
Stages
TSDS-405CL/405CLUU
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws, Spring washers
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×3/16…4 screws (UU)
21.5
MAX67
B
40
10.5 40 (9.5)
A A D depth 5
8-C depth 5
Z axis clamp
0.5
82
62±6.5
(9.5)
109.5
X axis clamp
10.5
MAX67
B
1.5
A
A
40
55
27
Y axis clamp
4-E mounting hole
F counterbore
TSDS-405SL/405SLUU
Hexagon socket head cap screw (stainless steel construction) M3×6…4 screws, Spring washers
Hexagon socket head cap screw (stainless steel construction) 6-32UNC×3/16…4 screws (UU)
X axis clamp
9
B
40
MAX74
10.5
0.5
62±6.5
(9.5)
82
109.5
Y axis clamp
20
1.5
40
A A
B
MAX74
17.5
A
A
D depth 5
8-C depth 5
Z axis clamp
40
55
27
4-E mounting hole
F counterbore
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Part Number
A
(mm)
B
(mm)
C
D
E
(mm)
TSDS-405CL 16 32 M3 M6 P1 3.5 6
F
(mm)
TSDS-405CLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
Part Number
A
(mm)
B
(mm)
C
D
E
(mm)
TSDS-405SL 16 32 M3 M6 P1 3.5 6
F
(mm)
TSDS-405SLUU 15.875 31.75 6-32UNC 1/4-20UNC 4 6.5
X axis Stages
XY axis Stages
Z axis Stages
TSDS-605CL
24.5
MAX67
50
60
12
Hexagon socket head cap screw (stainless steel construction)
M4×6…4 screws
3.5
82±6.5
112
(129)
X axis clamp
10.5
4-M3 depth 5
MAX67
60 (11) 9-M4 depth 6
25 25
32
Z axis clamp
50
32
1.5
25 25
60
80
32
Y axis clamp
4-4.5 mounting hole
8 counterbore
TSDS-605SL
X axis clamp
10.5
Hexagon socket head cap screw (stainless steel construction)
M4×6…4 screws
12
3.5
82±6.5
112
(129)
4-M3 depth 5
24.5
60 20.5
25 25
32
9-M4 depth 5
Z axis clamp
32
25 25
60
50 Y axis clamp
50 4-4.5 mounting hole
60
MAX89 8 counterbore
MAX89 (11)
1.5
80
32
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
TSDS-655CL-M6/655CLUU
Hexagon socket head cap screw (stainless steel construction) M6×6…4 screws (M6)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×1/4…4 screws (UU)
20.8 65
12 A A
(11)
9-C depth 6
Z axis clamp
TSDS-655SL-M6/655SLUU
Hexagon socket head cap screw (stainless steel construction) M6×6…4 screws (M6)
Hexagon socket head cap screw (stainless steel construction) 1/4-20UNC×1/4…4 screws (UU)
20.8 65
12 A A
20.8
9-C depth 6
Z axis clamp
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
MAX69
Part Number
B
65
6
A
(mm)
82±6.5
114.5
128.8
X axis clamp
B
(mm)
MAX69
C
B
D
(mm)
A A
65
82.5
32
Y axis clamp
4-D mounting hole
E counterbore
E
(mm)
TSDS-655CL-M6 25 50 M6 6.5 11
TSDS-655CLUU 25.4 50.8 1/4-20UNC 7 12
X axis clamp
Part Number
B
65
MAX91
A
(mm)
6
82±6.5
114.5
128.8
(11)
B
(mm)
C
B
MAX91
A A
65
82.5
32
4-D mounting hole
E counterbore
D
(mm)
E
(mm)
TSDS-655SL-M6 25 50 M6 6.5 11
TSDS-655SLUU 25.4 50.8 1/4-20UNC 7 12
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E213

Manual Positioners
Catalog
Stainless Steel Rotation Stages KSPS Code W7087
Application
Systems
Optics &
Optical
Coatings
Holders
θ axis (rotation) coarse/fine adjustment stages that use a fitting method, offering coarse rotation
adjustment of 360° and fine adjustment (micrometer head).
Directly rotate the stage top plate for coarse adjustment, and clamp the coarse adjustment part
and use micrometer head (±5°) for fine adjustment.
◦Made completely of stainless steel, offering excellent
corrosion resistance. Both the stage and micrometer
head use high vacuum grease (YVAC2).
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Outline Drawing
KSPS-406M
M6 P1 depth 5.5
φ5 through hole
Hexagon socket head cap screw (stainless steel construction)
M3×6…3 screws
40
32
20
4-M2 depth 4
4-M3 depth 6
PCDφ30
KSPS-606M
M16 P1 depth 7
φ6 through hole
Hexagon socket head cap screw (stainless steel construction)
M4×10…3 screws
60
50
32
4-M3 depth 6
4-M4 depth 8
PCDφ50
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
20
24.5
Coarse/Fine switching clamp
8
MAX42.5
φ40
3-φ3.5 mounting hole
φ6 counterbore
30
20
32
2
(9) 50
13
10 37 30
Coarse/Fine switching clamp
MAX68
φ60
45
32
50
6
19 (17) 75
3-φ4.5 mounting hole
φ7.5 counterbore
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
Specifications
Part Number METRIC KSPS-406M KSPS-606M
Table Size [mm] φ40.0 φ60.0
Angle of Rotation [ ° ] Coars: 360° Fine: ±5° Coars: 360° Fine: ±5°
Micrometer Position Center Side
Scale Readable Resolution 2° 1°
Micrometer Readable Resolution ≒1′24.2″ ≒55.8″
Bearing type
Lapping method
Primary Material
Stainless steel
Finish
None
Load Capacity [N] 49 (5.0kgf) 68.6 (7.0kgf)
Max. Moment Capacity [N・m] 0.3 0.75
Moment Stiffness [″/N・m] 1.5 1
Parallelism [μm] 30 50
Eccentricity [μm] 20 20
Wobble [μm] 20 20
Weight [kg] 0.3 0.6
E214
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α axis Stainless Steel Goniometers
αβ axis Stainless Steel Goniometers
GOHS-40A Stage size □40mm
GOHS-40B Stage size □40mm
Catalog
Code
Catalog
Code
W7099
W7107
Goniometers fitted with dovetail groove and worm gear, suitable for orientation adjustment (angle
adjustment or correction).
Best suited for use in vacuum because high vacuum grease (YVAC2) is used.
Guide
▶The TSDS series offers stages suitable for use in clean rooms or
vacuum applications.
Vacuum measurement data E199
Also ideal for use in airtight spaces that have to avoid outgassing.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Outline Drawing
Light
Sources
GOHS-40A15/35
Hexagon socket head cap screw (stainless steel construction)
M3×6…4 screws
2.5mm
GOHS-40B15
Hexagon socket head cap screw (stainless steel construction)
M3×6…4 screws
2.5mm
Index
40 (7)
32
20
40 (10)
32
20
Clamp
(7)
40
32
20
40
32
20
(10)
4-M3 depth 5
Guide
X axis Stages
4-M3 depth 5
4-M2 depth 3
C
Rotational adjustment
(10)
Rotational adjustment
4-M2 depth 5
M6 P1 depth 6
XY axis Stages
Z axis Stages
A B
7
15
36
20
axis clamp
XZ axis Stages
XYZ axis Stages
3
32 32
4-3.5 mounting hole
6 counterbore
16
4-3.5 mounting hole
6 counterbore
32
3
23
7
axis clamp
32
θ axis Stages
Gonio
Part Number
A
(mm)
B
(mm)
GOHS-40A15 20 15 M6 P1 depth 6
GOHS-40A35 16 35 M4 depth 4
C
Inclination
Vacuum
Specifications
Part Number METRIC GOHS-40A15 GOHS-40A35 GOHS-40B15
Table Size [mm] 40×40 40×40 40×40
Axes of Travel α axis αβ axis
Rotation Center Height [mm] 15±0.1 35±0.1 15±0.1
Angle Range [ ° ] ±20 ±20 ±20
Vernier Readable Resolution 12′ 12′ 12′
Travel per Knob Rotation (Upper) β axis − − about 2.83°
[ ° ]
(Lower) α axis about 2.83° about 1.74° about 1.74°
Rotation Center Displacement [mm] φ2mm or less φ2mm or less φ2mm or less
Bearing type
Dovetail slide method
Primary Material
Stainless steel
Finish
None
Load Capacity [N] 68.7 (7.0kgf) 68.7 (7.0kgf) 68.7 (7.0kgf)
Pitch [N・m] 0.9 0.9 0.9
Max. Moment Capacity
Roll [N・m] 1.2 1.2 0.9
Moment Stiffness Roll [″/N・m] 0.51 0.51 −
Parallelism [μm] 50 50 100
Weight [kg] 0.25 0.2 0.45
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
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E215

Manual Positioners
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
X axis Stages
XY axis Stages
Z axis Stages
XZ axis Stages
XYZ axis Stages
θ axis Stages
Goniometer
Inclination
Vacuum
Ball Guide
Crossed Roller
Dovetail
Lapping
V Groove Screw
Ohters
□15mm
□25mm
□40mm
□60mm
□65mm
□80mm
□100mm
□120mm
Others
E216
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Actuators

A c t u a t o r s
I N D E X
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Actuator Mounting System Chart
Travel 6.5 Travel 13 Travel 13 Travel 13
Travel 25
(Units: mm)
Application
Systems
25 Series
3.5
6
M4
FPSA-42525
3.5 8
6
7.5
MDC-6.5
MHAN Series
LMHB Series
9.5
M9.5 6
6
SHT1-6.5
25×50 Series
3.5
6
6
SHT1-13
SGDC10-13
SGSP-13ACT-B0
40 Series
60 Series
SHS2-13
9.5
M9.5
9.5
FPSA-62540
9.5 0
−0.01
5
M6
6
6
MHB Series
MDC-13
SGSP-25ACT-B0
SHN2-25
100 Series
10
M9.5
FPSA-62555
6.35
11.5
M9.5×0.5 5 5
9.5 4
15
6
M6
9.5
6
Standard Type
Fine Pitch Type
(0.25mm)
Angled
Micrometer
Remote
Actuator
Stepping Motor Drive
Small Actuators
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Micrometer Heads
Differential
Micrometer Heads
SFN-01
9.5
SOM-C13E
5
SOM-C25E
6.35
OptMike
with Encoder
Fine-pitch Screws
Remote
M9.5 6 4
PKA
SFN-02
Standard Type
MHF2-13F
5
WGP-13
Coarse/Fine
Movable Type
MHN2-25M
Digital Display
Type
(TSD-100 only)
OptMike
ACT
Travel 25 Travel 15
Travel 40
Travel 50
TSD-80 Series
40×80 Series
9.5
M 9.5
TAM-80 Series
5 9.5
M 9.5
6.35
120 Series
60×120 Series
65×120 Series
6.35
100×160 Series
65×170 Series
6.35
SHS2-25
9.5
M6
SHM2-15
15
M6
SHN2-40
10
M9.5
15
MHN2-50T
10
M9.5
15
Fine Pitch Type
(0.25mm)
FPSA-62550
M9.5×0.5
FPSA-62550
6
Standard Type
SGDC10-25
Remote
Actuator
5
9.5
SOM-C15E
OptMike
with Encoder
Attention
▶R-type spherical tips are available for some products, but they
should be used after considering the object.
Guide
▶Standard and fine-pitch actuators cover the entire lineup of stages
and holders. Regarding the compatibility of actuators not shown
above, refer to the page of each product or outline drawing.
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F003

Actuators
Catalog
Micrometer Heads (Maintenance parts) SFN/SHTS/SHT/SHSS/SHS/SHM Code W8001
Micrometer heads used with Sigma Koki manual stages and holders.
Application
Systems
Optics &
Optical
Coatings
Travel: 15mm or less
SFN-01 SFN-02 SHTS1-6.5 SHT1-6.5
Holders
Bases
Manual
Stages
Actuators
6
Nut
M9.5 P0.5
14
9.5 −0.015
0
4
9.5
(12.5)
22
23
M9.5 P0.5
6
(5)
11
16
4
23
(29)
3.5
SUS440C
(8.5)
6 −0.012
0
15
6
9
22
(28.5)
SUS303
3.5
(8.5)
0
−0.008
6
15
6
9.3
21.7
(28.2)
Motoeized
Stages
18.5
(29)
Light
Sources
SHT1-13 SHSS2-13 SHS2-13 SHM2-15
Index
Micrometer Heads
Differential
Micrometer Heads
Fine-pitch Screws
Remote
PKA
3.5
6 −0.008
0
(9)
6
9.3
28.7
22 (41.7)
Nut
M9.5 P0.5
5
SUS440C
14
9.5 −0.015
0
4
9.5
(14)
32
SUS303
13
Nut
M9.5 P0.5
5
14
9.5 −0.009
0
4
9.5
(14)
13
31.5
Nut
M9.5 P0.5
6.35
14
9.5 −0.009
0
4
15
(17)
43.5
15
OptMike
27
(45)
27 (44.5)
32
(58.5)
ACT
Attention
▶Depending on the stage type, there is the possibility of shortened
travel or interference with mounting parts. Contact our International
Sales Division when you exchange the micrometer head.
Specifications
Part Number
Travel
[mm]
Type
Readable Resolution
[mm]
Lead of Actuator
[mm]
Load Capacity
(Static load)
[N]
SFN-01 0 − 6 Fine pitch 0.005 0.25 19.6 (2kgf) 0.06
SFN-02 0 − 6 Fine pitch 0.005 0.25 19.6 (2kgf) 0.03
SHTS1-6.5 0 − 6.5 Stainless steel 0.01 0.5 29.4 (3kgf) 0.01
SHT1-6.5 0 − 6.5 Standard 0.01 0.5 29.4 (3kgf) 0.01
SHT1-13 0 − 13 Small diameter 0.01 0.5 39.2 (4kgf) 0.015
SHSS2-13 0 − 13 Stainless steel 0.01 0.5 39.2 (4kgf) 0.04
SHS2-13 0 − 13 Standard 0.01 0.5 39.2 (4kgf) 0.03
SHM2-15 0 − 15 Standard 0.01 0.5 39.2 (4kgf) 0.06
Weight
[kg]
F004
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Catalog
Micrometer Heads (Maintenance parts) SHS/SHN/SHH/MHN Code W8002
Travel: 25mm or more
SHS2-25
SHN2-25
Application
Systems
Optics &
Optical
Coatings
Nut
M9.5 P0.5
9.5 −0.009
0
Nut
M9.5 P0.5
10 0
−0.009
Holders
5
14
9.5
37
4
(12)
13
43.5
(68.5)
6.35
14
42
4
15
(17)
53.5
18
(78.3)
Bases
Manual
Stages
Actuators
MHN2-25M
SHN2-40
Motoeized
Stages
Light
Sources
Index
42 (139.5)
14
(17)
4
15
114.5
Nut
M9.5 P0.5
10 −0.009
0
Micrometer Heads
Differential
Micrometer Heads
6.35
Nut
M9.5 P0.5
10 0
−0.009
(58)
18
6.35
14
57
4
15
(17)
68.5
18
(108.5)
Fine-pitch Screws
Remote
PKA
OptMike
ACT
SHH2-50
Nut
M12 P0.5
8
21
12 −0.011
0
16
4
29
(38)
89.5
88
(139.5)
Attention
▶Depending on the stage type, there is the possibility of shortened
travel or interference with mounting parts. Contact our International
Sales Division when you exchange the micrometer head.
Specifications
Part Number
Travel
[mm]
Type
Readable Resolution
[mm]
Lead of Actuator
[mm]
Load Capacity
(Static load)
[N]
SHS2-25 0 − 25 Small diameter 0.01 0.5 39.2 (4kgf) 0.05
SHN2-25 0 − 25 Standard 0.01 0.5 39.2 (4kgf) 0.09
MHN2-25M 0 − 25 Digital display 0.001 0.5 39.2 (4kgf) 0.235
SHN2-40 0 − 40 Small diameter 0.01 0.5 39.2 (4kgf) 0.12
SHH2-50 0 − 50 Standard 0.01 0.5 39.2 (4kgf) 0.23
Weight
[kg]
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F005

Actuators
Differential Micrometer Heads (Maintenance parts)
Nut Drivers
MHF
MNS
MHF (Travel Coarse: 0 − 13mm, Fine: 0 − 0.2mm)
Catalog
Code
W8003
Application
Systems
MHF2-13
MHF2-13F
Optics &
Optical
Coatings
Holders
Bases
Nut
M9.5 P0.5
SR3
9.5 −0.009
0
Fine-feed thimble
Coarse-feed thimble
Nut
M9.5 P0.5
9.5 0
−0.009
Fine-feed thimble
Coarse-feed thimble
Manual
Stages
Actuators
5
14
4
15
(17)
30
21
67.5
(80.5)
13
5
14
4
9.5
(14)
27
20
67.5
(80.5)
13
Motoeized
Stages
Light
Sources
Attention
▶Depending on the stage type, there is the possibility of shortened
travel or interference with mounting parts. Contact our International
Sales Division when you exchange the micrometer head.
Index
Micrometer Heads
Differential
Micrometer Heads
Specifications
Part Number
MHF2-13
MHF2-13F
Travel
[mm]
Coarse: 0 − 13
Fine: 0 − 0.2
Coarse: 0 − 13
Fine: 0 − 0.2
Type
Coarse/Fine
Coarse/Fine
Readable Resolution
[mm]
Coarse: 0.01
Fine: 0.0005
Coarse: 0.01
Fine: 0.0005
Lead of Actuator
[mm]
Coarse: 0.5
Fine: 0.025
Coarse: 0.5
Fine: 0.025
Load Capacity
(Static load)
[N]
Weight
[kg]
9.8 (1kgf) 0.1
9.8 (1kgf) 0.1
Fine-pitch Screws
Remote
PKA
OptMike
ACT
MNS
Special tool required to remove or secure micrometer heads.
Catalog
Code
W8004
◦Special nuts are used for fastening micrometers on some manual stages (TSD and TSDS series). This custom nut driver
makes removing and attaching these nuts easier and faster.
Guide
▶This product comes as a set of two head sizes. Refer to the
following table for compatible stages.
Head Size
[mm]
For φ12.5
For φ14.5
* TSD-40 C type only.
Part Number of Compatible Stage
TSD-40*/60/65/-80, TSDC-40/60, TSDH-40/60
TSD-100/TSD-120
Specifications
Part Number
MNS-12.5-14.5
Attention
▶Not all manual stages (TSD and TSDS series) are compatible.
Contact our International Sales Division if you have any question.
▶We will replace the micrometer heads of a manual stage with a finepitch
screw upon request. Note that replacement of the micrometer
heads by customers may not be covered by the warranty of the
stage itself.
Outline Drawing
MNS-12.5-14.5
Head for 12.5 (mounted on the grip)
(compatible with TSD-40/60/65/-80, TSDC-40/60, TSDH-40/60)
0.9
1.3
Head for 14.5 (compatible with TSD-100 and 120)
1.9
2
24
12.5
Head
9.7
14
35
100
Grip
12.2
14.5
14
F006
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Catalog
Sub-micron Worm Drive Micrometer Heads WGP Code W8005
Fitted with Sigma Koki’s unique worm-gear mechanism to enable coarse and fine adjustment over
the entire travel (13mm).
The compact design is suitable for downsizing systems or reducing adjustment time.
◦The fine/coarse switching knob allows switching between coarse- or fine-adjustment at any position.
◦Allows resolution of 0.5μm over the entire travel.
◦Non-rotating spindle
■Part Names and Handling Instructions
Fine adjustment knob
(3) Fine adjustment
Spindle advance
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Coarse adjustment knob
(1) Coarseadjustment
Coarse/fine switching knob
(2) Coarse adjustment lock
(1) Coarse adjustment
Make a rough position adjustment using the coarse adjustment knob.
(2) Coarse adjustment lock
Lock the coarse drive with the coarse/fine switching knob.
(3) Fine adjustment
Make a fine adjustment using the fine adjustment knob.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Common Specifications
Travel [mm] Coarse: 0 − 13, Fine: 0 − 13
Load Capacity (Static load) [N]
39.2 (4kgf)
Readable Resolution [mm] Coarse: 0.005, Fine: 0.0005
Lead of Actuator [mm] Coarse: 0.25, Fine: 0.005
Part Number
WGP-13
WGP-13R
Tip Shape
Flat type
R type
Micrometer Heads
Differential
Micrometer Heads
Weight [kg] 0.1
Fine-pitch Screws
Remote
Outline Drawing
PKA
WGP-13
27 55.5
(14)
(4.5)
WGP-13R
28.5 55.5 (4.5)
(15.5)
OptMike
ACT
9.5
9.5
4
4
φ20
φ16
φ5
5
×10
µ
0
φ20
φ20
φ16
φ5
5
×10
µ
0
φ20
20
20
Nut
M9.5 P0.5
φ9.5 −0.02
0
0
φ12
6.5
Nut
M9.5 P0.5
φ9.5 0
−0.02
0
φ12
6.5
Fine adjustment knob
Fine adjustment knob
1div
SR2
1div
0.5µm
0.5µm
φ14
φ14
Coarse/fine switching knob
Coarse/fine switching knob
Guide
▶Can be purchased assembled with manual stage. Contact our
International Sales Division for more information.
Attention
▶Depending on the stage type, there is the possibility of shortened
travel or interference with mounting parts. Contact our International
Sales Division when you exchange the micrometer head.
▶The stopper inside the micrometer locks when you keep turning
the coarse/fine adjustment knob. Stop turning the knob if you feel
overload, otherwise it will cause damage.
▶Since the fine-adjustment uses a worm-gear mechanism, we
recommend positioning from one direction to minimize backlash
effects.
Example of combination with stage
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F007

Actuators
Catalog
Angled Micrometer Heads MDC Code W8006
Application
Systems
Optics &
Optical
Coatings
Holders
Unique right angle drives are direct replacements for micrometer heads used on Sigma Koki manual
stages. Unidirectional control units are suitable for assembly into systems, offering excellent
operability in confined spaces and improving work efficiency.
◦Compatible with the mounting brackets of micrometer
heads used in products listed in the catalog.
◦Angled micrometer heads can be rotated and secured
at any position. Adjust to the most convenient position
depending on the situation.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Example of mounting onto stage
Guide
▶When an angled micrometer head and stage are purchased together,
they will be delivered in assembled condition. Contact our
International Sales Division for more information. Depending on
the combination, modification or additional work is required.
Please check our International Sales Division together with the
request of assembly.
▶Can be purchased assembled with manual stage. Contact our
International Sales Division for more information.
▶Since the angled micrometer heads uses a pivoting mechanism,
the feed rate of the micrometer heads compared to the scale is 1:1
at and around the center, but will be slightly less at the ends of travel.
Thus, use the micrometer scale to make rough estimates only.
Attention
▶Depending on the stage type and installation direction to attach an
angled micrometer head, there is the possibility of shortened travel
or interference with mounting parts. Contact our International
Sales Division when you exchange the micrometer head.
▶MDC-6.5 requires a special nut driver. Contact our International
Sales Division for more information.
Micrometer Heads
Differential
Micrometer Heads
Fine-pitch Screws
Remote
PKA
OptMike
Outline Drawing
MDC-6.5
(28.2)
21.7
25
φ9.3
φ6 −0.012
0
3
Micrometer head
SHT1-6.5
φ3.5
Nut
M6 P0.5
MDC-6.5R
(28.2)
25 21.7
φ9.3
φ6 −0.012
0
3
Micrometer head
SHT1-6.5
Nut
M6 P0.5
φ3.5
ACT
6.5
22.5
7.5
(8.5)
15
φ8
9
3
Nut
M6 P0.5
φ8
Slot width 0.8
depth 1.5
6.5
(8.5)
7.5
22.5 15
φ8
SR1.75
9
3
Nut
M6 P0.5
φ8
Slot width 0.8
depth 1.5
MDC-13
MDC-13R
(44.5)
35.5 31.5
φ13
φ9.5 0
−0.015
Micrometer head
SHS2-13
4
Nut
M9.5 P0.5
φ5
φ11.5
4
M9.5 P0.5
(44.5)
35.5 31.5
φ13
φ9.5 −0.015
0
Micrometer head
SHS2-13
4
Nut
M9.5 P0.5
φ5
φ11.5
4
M9.5 P0.5
6
29
9.5
(14)
27
16
Nut
φ11.5
Slot width 1
depth 1.5
6
29
9.5
(14)
27
SR2.5
16
Nut
φ11.5
Slot width 1
depth 1.5
Specifications
Part Number
Travel
[mm]
Readable Resolution
[mm]
Lead of Actuator
[mm]
Load Capacity
(Static load)
[N]
Tip Shape
MDC-6.5 0 − 6.5 0.01 0.5 29.4 (3kgf) Flat type 0.03
MDC-6.5R 0 − 6.5 0.01 0.5 29.4 (3kgf) R type 0.03
MDC-13 0 − 13 0.01 0.5 39.2 (4kgf) Flat type 0.07
MDC-13R 0 − 13 0.01 0.5 39.2 (4kgf) R type 0.07
Weight
[kg]
F008
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Catalog
Differential Micrometer Heads SHSP/SHPA/SHPB/SHPT/SHPC Code W8007
Differential adjustment screws combine the ability to translate over long distances with the precision
of a differential thread for fine motion.
The double-spindle differential mechanism offers smooth coarse- and fine-adjustment.
■Part Names
Lock nut
Coarse adjustment knob
Fine adjustment knob
Lock nut
Coarse adjustment knob
Fine adjustment knob
Application
Systems
Optics &
Optical
Coatings
Coarse
adjustment screw
Mounting bushing
Holders
Attention
Bases
▶Note that fine adjustment is fitted with a scale, but coarse adjustment
is not.
Manual
Stages
SHSP-9 SHSP-12 SHSP-19
Actuators
MAX 2.3
SR2.3
4
10
MAX 16.5
MIN 14
10
12
MAX 5.1
6
MAX 16.5
13.2 MIN 14
12
14
MAX 2.3
SR2.3
4
MAX 16.5
20 MIN 14
10
12
Motoeized
Stages
Light
Sources
M5 P0.5
2.5
M7 P0.5
3
M5 P0.5
4
Index
Specifications
Part Number
Travel of Coarse
Drive
[mm]
Travel of Fine Drive
[mm]
Readable Resolution
for Fine Drive
[mm]
Lead of Actuator
for Coarse Drive
[mm]
Lead of Actuator
for Fine Drive
[mm]
Load Capacity
(Static load)
[N]
SHSP-9 0 − 5 0 − 0.25 0.0025 0.5 0.05 19.6 (2kgf) 0.01
SHSP-12 0 − 6.5 0 − 0.25 0.0025 0.5 0.05 29.4 (3kgf) 0.02
SHSP-19 0 − 11 0 − 0.25 0.0025 0.5 0.05 29.4 (3kgf) 0.01
Weight
[kg]
Micrometer Heads
Differential
Micrometer Heads
Fine-pitch Screws
Remote
PKA
SHPA-4.5 SHPB-7 SHPT-7 SHPC-10
OptMike
ACT
MAX 7
17.5
MAX 21
MIN 18.5
MAX 13
17.5
MAX 21
MIN 18.5
MAX 15.9
18.5
MAX 21
MIN 18.5
MAX 14.3
23
MAX 21
MIN 18.5
SR2
6
18
20
6
18
20
6
18
20
6
18
20
M14 P1
6
11
4
M14 P1
10
15
4
M10 P0.5
4
M14 P1
10
15
4
Specifications
Part Number
Travel of Coarse
Drive
[mm]
Travel of Fine Drive
[mm]
Readable Resolution
for Fine Drive
[mm]
Lead of Actuator
for Coarse Drive
[mm]
Lead of Actuator
for Fine Drive
[mm]
Load Capacity
(Static load)
[N]
SHPA-4.5 0 − 4.5 0 − 0.25 0.001 0.5 0.05 29.4 (3kgf) 0.06
SHPB-7 0 − 7 0 − 0.25 0.001 0.5 0.05 29.4 (3kgf) 0.06
SHPT-7 0 − 7 0 − 0.25 0.001 0.5 0.05 29.4 (3kgf) 0.05
SHPC-10 0 − 10 0 − 0.25 0.001 0.5 0.05 29.4 (3kgf) 0.06
Weight
[kg]
■Mounting Method
Mounting plate
Secure with a lock nut
Mounting bushing
Coarse drive
Fine drive
(1) Screw the mounting bushing into (2) Make coarse adjustment using the (3) After coarse adjustment, tighten the lock nut on
the mounting plate to attach the coarse adjustment knob.
the mounting bushing, and make fine adjustment
micrometer.
using the fine adjustment knob.
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F009

Actuators
Fine-pitch Screw Adjusters
FPSA
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Suitable as direct replacements brackets of micrometer heads used on Sigma Koki manual stages.
Elimination of knobs saves space and prevents inadvertent operation.
◦The screw bushing has a lock mechanism.
◦The flat-type tip is compatible with Sigma Koki manual stages and holders, enabling specification changes.
◦Use a hex wrench with knob (KCL) or your hex wrench for adjustment.
Guide
▶Can be purchased assembled with manual stage. Contact our
International Sales Division for more information.
Attention
▶Consider the object before replacing the flat-type tip with the
R-type tip.
Actuators
Motoeized
Stages
Light
Sources
Index
Micrometer Heads
Example of combination with stage
Differential
Micrometer Heads
Fine-pitch Screws
Remote
PKA
OptMike
ACT
Hex Wrench with Knob
KCL-203
3
9
KCL-304
4
11
Specifications
Part Number
Compatible Products
2
φ6
φ10
3
φ10
φ14
KCL-203
KCL-304
FPSA-42525(R)
FPSA-62540(R)/FPSA-62550(R)/FPSA-62555(R)
■Part Names and Handling Instructions
Spindle
Clamp screw
(3) Spindle lock
Spindle advance
Hex wrench used
Part Number FPSA-42525(R) FPSA-62540(R)/62550(R)/62555(R)
(2) Position
adjustment
Control part
Screw bushing
Control Part
B
B
Hex wrench with knob
or hex wrench
Wrench size for adjustment: B=2 Wrench size for adjustment: B=3
(1) Attaching the adjustment wrench
(1) Attaching the adjustment wrench
Attach the hex wrench or hex wrench with knob.
(2) Position adjustment
Adjust the position by turning the wrench.
(3) Spindle lock
Lock the spindle with the clamp screw.
Clamp Lock Wrench size for clamp: B=1.5mm
B
F010
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Catalog
Code
W8008
Length 25mm Length 40mm Length 50mm Length 55mm
Application
Systems
Optics &
Optical
Coatings
Tip Shape/Flat Type
FPSA-42525 FPSA-62540 FPSA-62550 FPSA-62555
M4 P0.25
6 −0.02
0
2.5
M9.5 P0.5
M6 P0.25
9.5 −0.03
0
3
M6 P0.25
M9.5 P0.5
9.5 −0.03
0
3
M9.5 P0.5
M6 P0.25
10 0
−0.03
3
Holders
Bases
Manual
Stages
6
9 11
20.5
25
9
2
14
4
9.5
17.5 16
40
13
3
14
13
4
9.5 3
27.5 16
50
14
27
4
15
21.5
55
13
3
Actuators
Motoeized
Stages
Specifications
Part Number
Screw
Pitch
[mm]
FPSA-42525R FPSA-62540R FPSA-62550R FPSA-62555R
Length
[mm]
Bush
Diameter
[mm]
Bush
Length
[mm]
Load Capacity
(Static load)
[N]
FPSA-42525 M4 0.25 25 6.0 6.0 29.4 (3kgf) 0.005
FPSA-62540 M6 0.25 40 9.5 5.5 39.2 (4kgf) 0.019
FPSA-62550 M6 0.25 50 9.5 5.5 39.2 (4kgf) 0.021
FPSA-62555 M6 0.25 55 10.0 11.0 39.2 (4kgf) 0.025
Tip Shape/R Type
Weight
[kg]
Light
Sources
Micrometer Heads
Differential
Micrometer Heads
Remote
PKA
Index
Fine-pitch Screws
M4 P0.25
SR1.25
6 0
−0.02
2.5
M9.5 P0.5
M6 P0.25
SR2
9.5 −0.03
0
3
M9.5 P0.5
M6 P0.25
SR2
9.5 −0.03
0
3
M9.5 P0.5
M6 P0.25
SR2
10 −0.03
0
3
OptMike
ACT
9
14
13
14
13
14
13
1.2
6
9 11
20.5
25
26.2
2
1.4
4
9.5
17.5 16
40
41.4
3
1.4
4
9.5 3
27.5 16
50
51.4
1.4
27
4
15
21.5
55
56.4
3
Specifications
Part Number
Screw
Pitch
[mm]
Length
[mm]
Bush
Diameter
[mm]
Bush
Length
[mm]
Load Capacity
(Static load)
[N]
FPSA-42525R M4 0.25 26.2 6.0 6.0 29.4 (3kgf) 0.005
FPSA-62540R M6 0.25 41.4 9.5 5.5 39.2 (4kgf) 0.019
FPSA-62550R M6 0.25 51.4 9.5 5.5 39.2 (4kgf) 0.021
FPSA-62555R M6 0.25 56.4 10.0 11.0 39.2 (4kgf) 0.025
Weight
[kg]
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F011

Actuators
Remote Actuator
Remote Controller
SGDC
SRC
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
SGDC
It is a low cost actuator equipped with a DC motor of a small size and high thrust force.
It is compatible with micrometer head using the manual stage of Sigma Koki and can be easily
automated.
◦A customer can remove the micrometer head on its own and replace with the remote actuator.
◦It is possible to select the movement amount of 13mm and 25mm depending on the application.
◦Since USB interface is a standard feature, it can easily be operated from the PC.
◦Since the remote control is possible, it can also be used in a hard place to work as well as a narrow place.
◦The speed can be adjusted while driving. * Adjust by variable speed knob and I/O
Attention
Catalog
Code
W8016
▶When replacing the micrometer head with the remote actuator, micro
nut is required in order to remove the micro. Please contact our
international sales division, if the micro nut is required.
▶Please be careful when handling cable. Shock, compression,
bending, twisting, tensile bring to the disconnection of the cable.
Motoeized
Stages
Light
Sources
Index
Micrometer Heads
Outline Drawing
Differential
Micrometer Heads
SGDC-10-13/13F
17.5
A
Cable length 500±30
SGDC10-25
31.5
120
Cable length 500±30
Fine-pitch Screws
φ5
(30)
φ4.8
φ5
(30)
φ4.8
Remote
PKA
OptMike
ACT
M9.5×0.5
Par Number
φ9.5 −0.01
0
A
[mm]
SGDC10-13 102
SGDC10-13F 105
(13.6)
φ11.2
(13.6)
(φ10.6)
(φ8.95)
(6.7)
(22)
(5) (43.5)
R30
M9.5×0.5
φ9.5 −0.01
0
(13.6)
φ11.2
(13.6)
(φ10.6)
φ10
(φ8.95)
(6.7)
(5)
(22)
(43.5)
R30
φ10
Specifications
Sensitivity (resolving power) Under 0.1μm for reference
Lead of Screw
M3 P=0.5mm
Backlash
29.5 (3kgf) 0.06
SGDC10-13F 17.5 0.2 >68.6 (7kgf) 0.06
SGDC10-25 31.5 1 >29.5 (3kgf) 0.08
*1 It is the guaranteed value for maximum speed. The speed can be adjusted.
*2 It is the guaranteed value at the maximum speed setting on the controller. Please be careful
that the maximum thrust force can be over 20kgf.
Method of fixation
Mounting methods (ex. TSD-601S)
There are three methods of fixing for the actuator.
When installing the unit, we recommend Fixing Nut
method with the nut (M9.5×0.5).
Compatible with most manual
translation stages
1. Fixing a stage to tighten the Clamp
screw of the stage.
2. Use the Allen wrench and remove
the bracket from the stage.
4. Remote actuator is inserted and it
fixes with Set screw and Nut.
Please attach to direction of motor
cable or twist of cable carefully.
(1) Fixing nut (2) Tightening slot (3) Set screw
Nut
Tightening
bolta
slotted
Set screw
Easy
conversion
3. Set screw is removed with Allen
wrench and nut is removed with
Nut driver. Micrometer can be
removed.
5. A remote actuator is attached to a
stage.
* Please attach a stage and an actuator in parallel.
F012
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System Chart
Remote Controller
Remote Actuator
Application
Systems
RS232C
PC
USB
USB
SRC-101
Changing-over switch BOX
Extension cable
SGDC10-13
Optics &
Optical
Coatings
Holders
USB Cable
RS232C Cable
USB
RS232C
SRC-303
SGDC10-13F
Bases
Manual
Stages
SRC-201
SGDC10-25
MDC-4-2/3/5
■Extension cable
(43.5)
(6.7) (5)
(φ10.6)
(φ8.95)
φ4.8
(14)
(41.5)
(30.5) (5.5)
(φ12.6)
(12.6)
Specifications
Par Number
Product Name
Length of Cable
[m]
MDC-4-2 Extension cable 2
MDC-4-3 Extension cable 3
MDC-4-5 Extension cable 5
USB/MINI-B-2 USB cable 2
Actuators
Motoeized
Stages
Light
Sources
Index
SRC
Catalog
Code
W8017
Micrometer Heads
Differential
Micrometer Heads
Fine-pitch Screws
Remote
PKA
OptMike
SRC-101 SRC-201 SRC-303 (changing-over switch BOX)
ACT
Outline Drawing
* excluding protrusions
SRC-101 SRC-201 SRC-303
82
84.5
82
24
100 43.7 96.7
Specifications for SRC-101/201
Number of Controlling Axis
Source Voltage
Apparent Power
1 axis
DC6V
30VA
AC adaptor AC100 − 240V ±10%
Drive System
Limit Sensor
Motor type
PWM Control
Overload Detection Style
DC motor (DC6V)
Temperature of Operation 5 − 40°C
Storage Temperature
20 − 80%RH
(no condensation)
Control Switch −20°C − 60°C
Control Switch
Shift Transmission,
Micromotion, JOG
42.25 (42.25) 21.85 (21.85)
2-M4 fixing tap hole
26 45.7 (25)
2-M4
fixing tap hole
26 45.7 (25)
Specifications
24
(43.5)
Cable length
300±50
Par Number Interfaces Control Signals
100
Weight
[kg]
SRC-101 USB − 0.15
SRC-201 USB, RS232C Input Signals 6, Output Signals 4 0.38
SRC-303 − − 0.15
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F013

Actuators
Ultrasonic Motor Driven Actuator
PKA
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Ultrasonic Motor Driven Actuator Guide
High resolution and high-speed motion ultrasonic motor driven actuator, allowing remote control.
Compact shape with silent activation.
Friction activation system enables position-holding function when power is OFF.
Drive System
Features
■Compact
Smaller motors are used compared to electromagnetic
motors, enabling configuration of compact systems.
These actuators are approximately the same size as manual
types and allow remote control, making them suitable for
position adjustment in compact spaces.
■Fine Adjustment
The SPD SEL HI/LOW selection switch of the 2-axis
controller (PKA-ID-02) allows switching between coarse
drive and fine drive to make fine angle and position
adjustment smoothly.
■Silent Operation
Since the PKA series uses ultrasonic motors, the driving
sound is extremely quiet, only a friction sound comes out.
Micrometer Heads
Differential
Micrometer Heads
Fine-pitch Screws
Remote
Oscillator
Friction head
Motion of
friction head
Moving body
The PKA series uses the ultrasonic motor drive system, in
which the stage and actuator are powered by friction drive.
It drives the table face by controlling the oscillator so that
the tip of ultrasonic motor (friction head) moves in a circular
orbit, and moving the pressure contacted moving object.
PKA
OptMike
ACT
Tanslation Stages
◦Stage type actuator utilizing a cross roller guide with excellent
rigidity and straightness.
◦While the drive source is a small ultrasonic motor, high load
capacity of 20N is ensured.
◦Two table sizes, □40mm and □60mm, are available.
Outline Drawing
PKA40-15X
56
40
16 16
20
Catalog
Code
W8009
6-M3 depth 4
20
32
40
Cable length 2.5m
4-M2 depth 3
12.5
1
13
PKA40-15X
PKA60-20X
4-3.5
6 counterbore depth 3
Specifications
Part Number PKA40-15X PKA60-20X
Table Size [mm] 40×40 60×60
PKA60-20X
76
60
25 25
20
6-M4 depth 8
mark depth4
Travel [mm] 15 20
Resolution [μm] 2 or lower 2 or lower
Holding Power [N] 1 1
Load Capacity [N] 20 (about 2kgf) 20 (about 2kgf)
20
25 25
60
Weight [kg] 0.1 0.2
Cable length 2.5m
4-M2 depth 3
12.5
1
13
4-4.5
8.5 counterbore depth 3
F014
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Remote Control Mirror Holder
Catalog
Code
W8010
◦Compact ultrasonic motor
driven actuator mounted
on high stability model
mirror holders (MHG
series).
Outline Drawing
PKA-12.7MH
2×M6
φ7.5
counterbore
40
22
13.7
22
φ12.7
φ10
Cable length
2.5m
Application
Systems
Optics &
Optical
Coatings
Holders
10
40
Mirror
thickness 3 – 5
37.7
Bases
Specifications
Part Number PKA-12.7MH PKA-25.4MH
Compatible Optics Diameter [mm] φ12.7 φ25.4
Compatible Optics Thickness [mm] 3 − 5 3 − 5
Number of Adjustable Axes 2 2
Travel [ ° ] ±2.5 ±3
Resolution [ ″] 2.0 or lower 0.5 or lower
Weight [kg] 0.2 0.4
PKA-25.4MH
2-M6P1
φ8
counterbore
56
28
21
9
56
28
φ25.4
φ22
Mirror
thickness 3 – 5
52.5
Cable length
2.5m
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Compact Actuator
◦High thrust force produced by using ball screw design.
◦Can be used to automate manual stages by replacing manual micrometer heads (travel: 13mm).
◦High speed motion (about 0.5mm/sec)
Catalog
Code
W8011
Index
Micrometer Heads
Outline Drawing
Travel 13 61
19
Specifications
Part Number
PKA-13ACT
Differential
Micrometer Heads
Fine-pitch Screws
φ9.5
M9.5 P0.5
5.5
9.5
41.7
Cable length 2.5m
Travel [mm] 13
Resolution [μm]
1 or lower
Holding Power [N] 30
Maximum Travel Speed [mm/s] 0.5 or more
Weight [kg] 0.2
Remote
PKA
OptMike
ACT
2-Axis Controller
W8012
◦Easy to manually control with jog sticks.
◦Automatic control is possible by issuing simple commands from a PC connected via
RS232C.
Catalog
Code
Guide
▶Compatible with the measurement and control software
SGTERM and SGEMCS. G024, G025
▶Sample programs are available for download on the website.
◦SGCommander 32-bit version for Windows ® (only for RS232C)
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
Attention
▶Power supply of the PKA-ID-02 is
DC24V 1.8A. You need to purchase
the PAT-001-POW1 (AC adapter) or
prepare an adapter separately.
List of Commands
Command Name Command Details
Absolute coordinate pulse set command A Specifies the absolute coordinate value.
Absolute travel pulse set command M Specifies the absolute travel.
Drive command G Starts driving.
Theoretical origin return command N Returns to the theoretical origin.
Stop command L Stops travel.
Theoretical origin setting command R Resets the coordinate value.
Status check command Q Returns the status of coordinate value, etc.
Status check command 2 ! Returns B (Busy) or R (Ready).
Internal information check command ? Returns the internal information.
Speed setting command
S
Sets the pulse per step when
the SPDSEL switch is set to LOW.
Specifications
Part Number
PKA-ID-02
Number of Adjustable Axes 2
Interface
Manual Operation
Power Voltage
RS232C
Jog stick
DC24V
1.8A
Current Consumption [A] 1.8
Outer Dimensions [mm]
(W)50 × (D)142 × (H)100
Weight [kg] 0.53
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F015

Actuators
OptMike with Encoder
OptMike-E (B type) Controllers
SOM-C
OMEC
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
SOM-C
Motorized positioning micrometer heads fitted with an actuator whose lead screw is connected to
a compact and highly efficient DC motor, encoder and high resolution gear head, achieving smooth
operation with no vibration. Compatible with micrometer heads used on Sigma Koki manual stages,
making it easy to motorize them.
◦Embedded micro photo sensor enables limit/origin positioning by micron units.
◦Encoder is set at the front of the motor instead of rear, there is no integration count for lost motion or backlash of
gearhead.
◦Precision ground lead screw minimizes backlash.
Catalog
Code
W8013
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Micrometer Heads
Differential
Micrometer Heads
Fine-pitch Screws
Remote
PKA
OptMike
ACT
OptMike with encoder can be fixed in 2 ways described below.
Fixing with a nut as shown in (1) is recommended for secure fixing
and higher stability.
(1)
(2)
Nut (attached)
Mounting Methods
Note 1)
Note 2)
Clamping bolt Note 1)
Guide
▶Use the OptMike-E (B type) controllers (OMEC-2BG/4BG) sold
separately. F017
▶Refer to the list of compatible products. F020
Attention
▶Secure with the attached nut when installing onto device or
equipment. Be aware that securing by a set screw with point load
(excessive load or tightening) may cause malfunction.
RP17-13PA-12PC
Hirose Electric Co., Ltd.
TO
CONTROLLER
■Extension Cable for OptMike SOM-BCA
15
46
36
1
2
3
4
5
6
7
8
9
10
11
12
φ5
RP17-13JA-12SC
Hirose Electric Co., Ltd.
44
34
RP17-13PA-12PC
Connection specifications RP17-13JA-12SC
1
2
3
4
5
6
7
8
9
10
11
12
15.5
TO
OPTMIKE
Slot
Note 1) Chamfer at least 0.5mm on mounting bracket inlet.
Note 2) Make sure not to clamp too hard to avoid the OptMike body
getting crooked.
Specifications
Part Number
Cable Length
[m]
SOM-BCA5 5
SOM-BCA10 10
System Chart
Example of Combination with Stage
USB cable
USB
RS232C cable
RS232C 9P
GP-IB cable
GP-IB
PC
GP-IB
RS232C 9P
USB
All-purpose terminal
software
SGTERME
G024
AC100 – 120V/200 – 240V
50/60Hz
Measurement and
control software
SGEMCSE
G025
OptMike-E (B type) controllers
OMEC-2BG/4BG
OptMike with Encoder
SOM-C13E/15E/25E
SOM-C13ER/15ER/25ER
F016
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R
Outline Drawing
SOM-C13E
M9.5 P0.5
6
9.5 0
−0.015
4
9.5
Travel 13 13.5 120
20
SOM-C15E
M9.5 P0.5
6
Travel 15
9.5 0
−0.015
4
15
17 122
20
SOM-C25E
6
Travel 25
M9.5 P0.5
4
10 −0.015
0
15
17
25
20
15 10 5 0
132
20
Application
Systems
Optics &
Optical
Coatings
Holders
SOM-C13ER SOM-C15ER SOM-C25ER
M9.5 P0.5
9.5
M9.5 P0.5
9.5
M9.5 P0.5
10
Bases
6
Travel 13
9.5
13.5
120
20
6
15
Travel 15 17
122
Travel 25
20
6
15
17
25 20 15 10 5 0
132
20
Manual
Stages
Common Specifications
Maximum Travel [mm/sec] 0.1
Minimum Travel [mm/sec] 0.0015
Positional Repeatability [mm] 0.002
Lost Motion [mm] 0.003
Resolution [mm] 0.001
Thrust [N]
29.4 (3kgf)
Ambient Temperature [°C] 0 − 60
Ambient Humidity [%] 20 − 80
Cable Length [m] 1.3
Specifications
Part Number
Travel
[mm]
Tip Shape
Positioning
Accuracy
[mm]
Weight
[kg]
SOM-C13E 13 Flat type 0.012 0.19
SOM-C13ER 13 R type 0.012 0.19
SOM-C15E 15 Flat type 0.012 0.2
SOM-C15ER 15 R type 0.012 0.2
SOM-C25E 25 Flat type 0.015 0.2
SOM-C25ER 25 R type 0.015 0.2
Actuators
Motoeized
Stages
Light
Sources
Index
Micrometer Heads
Differential
Micrometer Heads
OMEC
Catalog
Code
W8014
For the OptMike with encoder (SOM-C).
Fitted with RS232C, GP-IB and USB interfaces to allow both automatic control from a PC and manual
control with a jog stick.
◦Enables control of complex operations by issuing simple commands from a PC via the
interfaces.
◦Enables reliable and accurate operation with a double-loop positioning system by
control system using both speed and position.
Fine-pitch Screws
Remote
PKA
OptMike
ACT
Attention
▶The USB interface is compatible only with Sigma Koki’s
software.
▶This controller is not compatible with Sigma Koki's
OptMike without encoder or products of other companies.
Connecting such products will interfere with normal
operation and may cause malfunction.
Specifications
Part Number
Number of Control Axes
[axes]
OMEC-2BG 2
OMEC-4BG 4
■General Specifications ■Interface Specifications ■List of Commands
AC100-120V/200-240V
Connector D-Sub 9pin, female connector, inch screw
Power Voltage
Command Name Command Functions
50/60Hz 20VA
Baud rate 4800/9600/19200/38400
Data length 8 bits
Operation Temperature 5 − 40°C
Machine origin return H Returns to the machine origin.
RS232C Parity None
Ambient Humidity 20 − 85%RH (without condensation)
Stop bit 1 bit
Clears the coordinates of
Theoretical origin setting R
Delimiter CR + LF/CR/LF
current position.
Storage Temperature −20 − 60°C
Flow control None
Speed setting D Sets the travel speed.
External Dimensions
Weight
(W)200 × (H)52 × (D)172mm
(not including protrusions)
1.5kg
■Performance Specifications
2 axes (2BG)
Number of Control Axes 4 axes (4BG, but maximum 2 axes of
the same group for simultaneous drive)
Coordinate Set Range ±32,767
Travel Speed
Travel Speed Setting
Pulse Travel Distance
1.5 − 100μm/sec
32 steps
1μm/pulse
GP-IB
USB
■Driver
Compatible Motor
Setting address 1 − 30
Delimiter CR + LF/CR/LF/EOI
Full Speed mode is supported
Delimiter CR
Coreless DC servo motor
Overload Detection
(overcurrent detection)
Equipped
Encoder Signal
A/B-phase, 1μm/pulse by duplexing
on the driver side
Limit Sensor
+limit and −limit
(The direction in which the spindle is pulled is “−”)
Polarity
Normal close
Relative travel drive M Relative position travel drive
Absolute travel drive A Absolute position travel drive
Stop L Stops OptMIke travel.
Theoretical origin return N Returns to the theoretical origin.
Control command X Sets lost motion.
Device status check Q Checks the OptMIke coordinates.
Checks the controller status. ? Checks the controller status.
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F017

Actuators
Compact Stepping Motor Actuators
SGSP-ACT
Application
Systems
Optics &
Optical
Coatings
Low price actuator fitted with a high-performance compact stepping motor and precision ground
screws. Use in place of micrometer heads on Sigma Koki manual stages or mirror holders to motorize
them.
◦Compatible with all Sigma-Koki stepper motor controllers.
◦Models for 13mm and 25mm travel are available.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Micrometer Heads
Differential
Micrometer Heads
Fine-pitch Screws
Remote
PKA
OptMike
ACT
Common Specifications
Single-Pulse Travel [μm]
(full step/half step)
Type
Motor Part Number
Feed screw [mm]
Outline Drawing
SGSP-13ACT-B0
1/0.5
5-phase stepping motor 0.35A/phase
(Oriental Motor Co., Ltd.)
PK513PB-C9 (□20mm)
Precision ground screw φ4, 0.5mm lead
Guide
▶Refer to the list of compatible products. F020
▶Custom tapped tips can be supplied. Contact our International
Sales Division for more information.
▶Recommended controllers include the single axis stage controller
(GSC-01) and 2 axis stage controllers (GSC-02).
G098, G099
■Schematic
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13RA-12SD
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6 6 N.C. (not used)
7 7
+VS
5–24VDC
8 8 GND (0V)
9 9 LS (+)
10 10 LS (–)
11 11 N.C. (not used)
12 12 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E-Phase
D-Phase
C-Phase
A phase
B-Phase
Reverse motor side (+)
limit sensor
ON when light incident
Note 1
Sharp Corporation
Micro photo sensor
GP1S092HCPI
Motor side (–)
limit sensor
ON when light incident
Note 1
* Regarding sensor power + VS, use current of about 30mA.
Note 1 The limit sensor on the motor side is the minus limit sensor. Motorized stages are not fitted with origin
and origin proximity sensors. Limit sensors are used as origin detection sensors.
Note 2 Compatible cable connector: Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
SGSP-13ACTR-B0
20
M9.5×0.5
φ9.5 0
-0.015
16
20
φ6
31
20
M9.5×0.5
SR4
φ9.5 -0.015
0
16
20
φ6
31
5.5
9.5
Travel13 14 86
5.5
9.5
Travel 13 14 86
SGSP-25ACT-B0
SGSP-25ACTR-B0
20
M9.5×0.5
φ10 -0.015
0
16
20
φ6
31
20
M9.5×0.5
SR4
φ10 -0.015
0
16
20
φ6
31
9
15
Travel 25 17
98
9
15
Travel 25 17
98
Part Number
Tip Shape
Travel
[mm]
Maximum Travel
[mm/sec]
Positioning
Accuracy
[mm]
Positional
Repeatability
[mm]
Lost Motion
[mm]
Load Capacity
(Static load)
[N]
SGSP-13ACT-B0 Flat type 13 2 0.01 0.003 0.005 29.4 (3kgf) 0.16
SGSP-13ACTR-B0 R type 13 2 0.01 0.003 0.005 29.4 (3kgf) 0.16
SGSP-25ACT-B0 Flat type 25 2 0.015 0.003 0.005 29.4 (3kgf) 0.18
SGSP-25ACTR-B0 R type 25 2 0.015 0.003 0.005 29.4 (3kgf) 0.18
Weight
[kg]
F018
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Catalog
Code
W8015
Compatible Controllers / Drivers and Cables
Controller
GSC-01
GSC-02
[1 axis]
[2 axes]
G098 − G099
Cable
D15RP-CA
G108
Stage
SGSP-ACT
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
System Chart
Actuators
Stepping Motor Drive
Small Actuators
SGSP-13ACT-B0
Motoeized
Stages
Light
Sources
1-axis stage controller
GSC-01
G098
Index
PC
SGSP-25ACT-B0
Micrometer Heads
Differential
Micrometer Heads
RS232C 9P
RS232C 9P
STAGE1
DC24V 1.3A
Fine-pitch Screws
Remote
For the power supply, you need to
purchasethe optional PAT-001-POW1
or prepare an adapter separately.
PKA
G109
RS232C cable
Joystick terminal
SJT-02
G106
2-axis stage controller
GSC-02
PAT-001-POW1
G099
D15RP cable
D15RP-CA
G108–
Stepping Motor Drive
Small Actuators
SGSP-13ACTR-B0
OptMike
ACT
One of
them
can be
connected
SJT-02 RS232C
STAGE2 STAGE1
MINI cable
MINI-CA-SG
G108–
Measurement and control software
SGEMCSE
G025
DC24V 2A
For the power supply, you need to
purchasethe optional PAT-001-POW1
or prepare an adapter separately.
PAT-001-POW1
SGSP-25ACTR-B0
All-purpose terminal software
SGTERME
G024
ActiveX for measurement and control
SGACTXE
G022
ActiveX for PAT control
SGPATXE
G022
Various drivers
SG
G021
SG-5MA
SG-55MA
Sample program
LabVIEW
SG
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F019

Actuators
List of Products Compatible with SOM-C and SGSP-ACT
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
■List of Products Compatible with SOM-C13E
Gimbal Mirror Holders (MHAN) C026
MHAN-25.4S
MHAN-50S
MHAN-30S
MHAN-50.8S
MHAN-40S
MHAN-60S
LMHA-30 LMHA-50
Topmike Vertical Control Mirror Holders (LMHB) C024
LMHB-30M LMHB-50M LHMB-60M
Close-proximity Mirror Holders (MHE) C029
MHE-30MR MHE-30ML
Steel Extended Contact Slide Stages (TSD) Chapter E Manual Positioners
TSD-401C
TSD-403L
TSD-601C
TSD-603
TSD-401S
TSD-405CL
TSD-601S
TSD-603L
TSD-402C
TSD-405SL
TSD-602C
TSD-604C
TSD-402S
Aluminum Crossed Roller Slide Stages (TAM)
TAM-401C
TAM-403L
TAM-601C
TAM-603L
TAM-401S
TAM-404CL
TAM-601S
TAM-604CL
TAM-402C
TAM-404SL
TAM-602C
TAM-604SL
TSD-602S
TSD-604S TSD-605CL TSD-605S TSD-605C TSD-605SL
Chapter E Manual Positioners
TAM-405CL
TAM-602S
TAM-605CL
●Combined with gimbal mirror holder
MHAN-25.4S
●Combined with steel extended
contact slide stage
TSD-601S
Light
Sources
Index
Micrometer Heads
Differential
Micrometer Heads
Fine-pitch Screws
Remote
PKA
OptMike
ACT
■List of Products Compatible with SOM-C15E
Aluminum Crossed Roller Slide Stages (TAM)
Chapter E Manual Positioners
TAM-801C TAM-801S TAM-802C TAM-802S TAM-803L
■List of Products Compatible with SOM-C25E
Steel Extended Contact Slide Stages (TSD)
TSD-801C
TSD-1001C
■List of Products Compatible with SGSP-13ACT-B0
Gimbal Mirror Holders (MHAN) C026
MHAN-25.4S
MHAN-50S
MHAN-30S
MHAN-50.8S
MHAN-40S
MHAN-60S
Topmike Vertical Control Mirror Holders (LMHB) C024
LMHB-30M LMHB-50M LHMB-60M
Steel Extended Contact Slide Stages (TSD)
Chapter E Manual Positioners
TSD-401C
TSD-403L
TSD-601C
TSD-604C
TSD-605C
TSD-401S
TSD-404CL
TSD-601S
TSD-604S
TSD-605CL
TSD-402C
TSD-404SL
TSD-602C
TSD-604CL
Aluminum Crossed Roller Slide Stages
TAM-401C
TAM-403L
TAM-601C
TAM-603L
TSD-801S
TSD-1001S
TAM-401S
TAM-404CL
TAM-601S
TAM-604CL
TSD-802C
TSD-1002C
Aluminum Crossed Roller Slide Stages (TAM)
TAM-1001C
TAM-1002C
TAM-1001S
TAM-1002S
TAM-402C
TAM-404SL
TAM-602C
TAM-604SL
Chapter E Manual Positioners
TSD-802S
TSD-1002S
E056
TSD-405CL
TSD-603
TSD-604SL
■List of Products Compatible with SGSP-25ACT-B0
Steel Extended Contact Slide Stages (TSD)
TSD-801C
TSD-1001C
TSD-801S
TSD-1001S
TSD-802C
TSD-1002C
Aluminum Crossed Roller Slide Stages (TAM)
TAM-1001C
TAM-1002C
TAM-1001S
TAM-1002S
TSD-603L
Chapter E Manual Positioners
TAM-405CL
TAM-602S
TAM-605CL
TAM-605SL
Chapter E Manual Positioners
TSD-1002S
E056
●Combined with aluminum
crossed roller slide stages
TAM-1001SR
●Combined with steel extended
contact slide stage
TSD-403L
Guide
▶Contact our International Sales Division for price and lead time.
▶We will accept assembly separately. Contact our International
Sales Division for more information.
F020
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Motion Control Products
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Motion Control Products
I N D E X
Quality Assurance
We verify the working accuracy when stage assembly is
completed. All products we ship are compliant to JIS or
have passed company regulations.
Serial Number
A sticker like the one shown in the picture is
affixed onto Sigma Koki products. It shows
information such as our company logo, part
number, and serial number.
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Motion Control Products
Motorized Stages Guide
Measurement of Linear Stage Accuracy
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Positional Accuracy
Positioning is performed
successively from the
reference position in one
direction at a fixed
interval across the range
of travel. The difference
between the target
values and measured
values at each of the
positioning points is
calculated, and the
difference between the
minimum and maximum
values is taken to be the
positioning accuracy.
Positioning Accuracy
Multiple
positioning
Target position
Difference between min. and max. values
Positioning is performed
multiple times in the (+)
forward and (–)
backward directions on
any position (e.g. both
ends or center point) of
the stage, and the mean
value of the deviation
amount with respect to
the stop position is
calculated.
The maximum of the
numerical values is taken
to be lost motion.
Lost Motion
Bidirectional
positioning
Targetposition
Mean value of multiple positionings
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Positioning is performed
multiple times from the
same direction on any
position (e.g. both ends
or center point) of the
stage, and the maximum
value of the deviation
amount with respect to
the stop position is
calculated.
The maximum of those
numerical values is taken
to be positional
repeatability.
Positional Repeatability
Max. error
Multiple
positioning
Target position
A fixed load is applied to
the (+) forward or (–)
backward direction on
any position (e.g. both
ends or center point) of
the stage.
The total deviation in the
respective direction at
that time is taken to be
backlash.
Backlash
Deviation by (-)
backward direction load
Deviation by (+)
forward direction load
Stop position
Deviation in both directions
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Working Accuracy
Running Parallelism
Orthogonality of Motion
Measure the working displacement of the Y axis when referenced
to the X axis of the XY axis stage with a square. The displacement
at this time is taken to be the orthogonality of motion.
Perpendicularity of Motion
Place a dial gauge on the Z stage, and measure the displacement
with respect to a vertical plate. The displacement at this time is
taken to be the perpendicularity of motion.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
This is the displacement in the height
Max. displacement value
direction between the stage mounting
surface and the travel guide of the stage.
The displacement in the vertical direction of the table during stage
motion along the full stroke is taken to be the running parallelism.
(Reference) Measurement Result (OSMS20-35)
1 2 3 4 5 6 7 8 9
Target Position [μm] 0 2500 5000 7500 10000 12500 15000 17500 20000
Positioning Direction ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓
Position Deviation [μm] 1st time 0.0 –1.2 –0.1 –0.5 0.2 –0.8 –0.3 –0.5 –0.1 –1.4 –0.4 –1.1 –1.7 –2.3 0.3 0.1 –1.5 –1.8
(Measured Value − Target Position) 2nd time –0.6 –1.2 –0.2 –0.4 0.1 –0.7 –0.2 –0.6 –0.3 –1.4 –0.8 –0.9 –1.7 –2.5 0.0 –0.1 –1.5 –1.9
3rd time –0.4 –0.9 –0.1 –0.8 0.2 –1.3 –0.4 –0.7 –0.1 –1.3 –0.8 –1.2 –1.5 –2.6 0.3 0.0 –1.5 –1.9
4th time –0.2 –1.6 –0.3 –0.6 –0.2 –0.9 –0.4 –0.6 –0.3 –1.2 –0.8 –1.2 –1.5 –2.5 0.3 –0.2 –1.5 –2.0
5th time –1.0 –1.2 –0.3 –0.6 0.0 –1.4 –0.5 –0.6 –0.2 –1.2 –0.6 –1.1 –1.6 –2.6 0.2 –0.1 –1.7 –2.0
Mean Position Deviation X –0.44 –1.22 –0.20 –0.58 0.06 –1.02 –0.36 –0.60 –0.20 –1.30 –0.68 –1.10 –1.60 –2.50 0.22 –0.06 –1.54 –1.92
Standard Deviation X 0.38 0.25 0.10 0.15 0.17 0.31 0.11 0.07 0.10 0.10 0.18 0.12 0.10 0.12 0.13 0.11 0.09 0.08
X+S –0.06 –0.97 –0.10 –0.43 0.23 –0.71 –0.25 –0.53 –0.10 –1.20 –0.50 –0.98 –1.50 –2.38 0.35 0.05 –1.45 –1.84
X−S –0.82 –1.47 –0.30 –0.73 –0.11 –1.33 –0.47 –0.67 –0.30 –1.40 –0.86 –1.22 –1.70 –2.62 0.09 –0.17 –1.63 –2.00
Lost Motion B=X↑−X↓ 0.78 0.38 1.08 0.24 1.10 0.42 0.90 0.28 0.38
Maximum (Position Deviation) Value S↑+S↓+|B| 1.41 0.63 1.56 0.42 1.30 0.72 1.12 0.52 0.55
Wobble per Rotation 1.00 0.80 0.80 0.90 0.70 1.60 2.60 1.90
■Result Maximum Lost Motion 1.10μm
Average Lost Motion
0.62μm
Positional Repeatability
Unidirectional Positioning ↑ 0.77μm
↓ 0.62μm
Bidirectional Positioning 1.56μm
Positioning Accuracy
2.97μm
Error per Rotation (maximum) 2.60μm
G004
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Moment Stiffness (Pitch/Yaw/Roll)
Moment stiffness is the stage strength against load exerted at a point away from the center of the table face.
(The center of the table face does not match the center of gravity of work.)
It indicates the degree of tilt of the table face (sec) when 1N load is exerted at a point 1cm away from the center of the stage
face.
Yaw
Pitch Yaw Roll
Application
Systems
Optics &
Optical
Coatings
Holders
Pitch
Bases
Roll
Manual
Stages
Angular Accuracy
Pitch
Pitch is the angle displacement of the table face in the pitch direction
while the stage is in motion.
It indicates the maximum angle displacement during full travel.
Parallelism
It indicates the parallelism of the table fixed on the stage against the
base plane.
Yaw
Yaw is the angle displacement of the table face in the yaw direction
while the stage is in motion.
It indicates the maximum angle displacement during full travel.
Actuators
Motoeized
Stages
Light
Sources
Index
(Reference) Measurement of XY axis Stage Accuracy
Positioning Accuracy Positional Repeatability Lost Motion
Error [µ]
Error [µ]
Error [µ]
150
100
50
0
12
8
4
0
12
8
4
0
OSMS20-85 OSMS26-200 OSMS33-300
0 50 100
Load Factor [%]
0 50 100
Load Factor [%]
0 50 100
Load Factor [%]
Single axis X axis of XY Y axis of XY
Error [µ]
Error [µ]
Error [µ]
150
100
50
0
12
8
4
0
12
8
4
0
0
0 50 100 0 50
100
Load Factor [%]
0 50 100
Load Factor [%]
0 50 100
Load Factor [%]
Error [µ]
Error [µ]
Error [µ]
250
200
150
100
50
12
8
4
0
12
8
4
0
Load Factor [%]
0 50 100
Load Factor [%]
0 50 100
Load Factor [%]
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Higher load factor at the travel
end of motorized stages
increases the deflection on
Y axis, resulting in extremely
poor positioning accuracy.
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G005

Motion Control Products
Motorized Stages Guide
Measurement of Rotation Stage Accuracy
Application
Systems
Optics &
Optical
Coatings
Positional Accuracy
Positioning Accuracy
Reference position
Positional Repeatability
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Max. error
Multiple positioning
Target position
Positioning is performed successively from the reference position in
one direction at a fixed interval across almost the entire range of travel.
The difference between the target values and measured values at each
of the positioning points is calculated, and the difference between the
minimum and maximum values is taken to be the positioning accuracy.
Lost Motion
Max. error
Multiple positioning
Target position
Positioning is performed multiple times from the same direction on
any position of the stage, and the maximum value of the deviation
amount with respect to the stop position is calculated.
The maximum of those numerical values is taken to be positional
repeatability.
Backlash
Light
Sources
Bidirectional positioning
(+) forward direction load
Index
Bidirectional positioning
Target
position
Mean value of multiple
positioning results
(-) backward direction load
Target
position
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Positioning is performed multiple times in the (+) forward and (–)
backward directions on any position (e.g. both ends or center
point) of the stage, and the mean value of the deviation amount
with respect to the stop position is calculated.
The maximum of the numerical values is taken to be lost motion.
Working Accuracy
Wobble
A fixed load is applied to the (+) forward or (–) backward direction
on any position of the stage.
The total deviation in the respective direction at that time is taken
to be backlash.
Concentricity
Cables
Piezo
Ideal rotation axis
Deviation between the two axes
Actual rotation axis
Displacement in height direction
between the rotary table and
the mounting base surface
Reference plane
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Wobble is the maximum displacement in the height direction
between the rotary table and the mounting base surface when the
rotation stage is rotated once.
(Reference) Measurement Result (SGSP-60YAW-0B)
Concentricity is the difference between the ideal rotation center
and the actual rotation center when the rotation stage is rotated
once.
0 1 2 3 4 5 6 7 8 9 10 11 12
Target Position [ ° ] 0 29 58 87 116 145 174 203 232 261 290 319 348
Positioning Direction ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓
Position Deviation [ ° ] 1st time 0.000 0.015 –0.009 0.003 –0.010 –0.001 –0.013 –0.004 –0.012 0.001 –0.007 0.009 –0.007 0.009 0.000 0.012 0.004 0.016 0.002 0.015 0.007 0.020 0.000 0.013 –0.001 0.010
(Measured Value − Target Position) 2nd time 0.002 0.015 –0.007 0.003 –0.009 –0.001 –0.012 –0.004 –0.012 0.001 –0.006 0.009 –0.007 0.009 –0.001 0.013 0.004 0.016 0.002 0.015 0.007 0.020 0.000 0.013 –0.001 0.011
3rd time 0.003 0.015 –0.007 0.003 –0.009 –0.001 –0.012 –0.004 –0.012 0.001 –0.007 0.009 –0.007 0.009 –0.001 0.013 0.004 0.016 0.002 0.015 0.007 0.020 0.000 0.014 –0.001 0.011
4th time 0.003 0.016 –0.007 0.003 –0.009 –0.001 –0.013 –0.004 –0.012 0.000 –0.006 0.009 –0.007 0.009 –0.001 0.013 0.004 0.016 0.002 0.015 0.007 0.020 –0.001 0.014 –0.001 0.011
5th time 0.002 0.016 –0.007 0.004 –0.009 –0.001 –0.013 –0.004 –0.012 0.001 –0.007 0.009 –0.007 0.009 –0.001 0.014 0.003 0.016 0.002 0.015 0.007 0.020 –0.001 0.014 –0.001 0.011
Mean Position Deviation X 0.002 0.015 –0.007 0.003 –0.010 –0.001 –0.012 –0.004 –0.012 0.001 –0.007 0.009 –0.007 0.009 –0.001 0.013 0.004 0.016 0.002 0.015 0.007 0.020 0.000 0.014 –0.001 0.011
Standard Deviation X 0.001 0.000 –0.001 0.000 –0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000
X+S 0.003 0.016 –0.007 0.004 –0.009 –0.001 –0.012 –0.004 –0.012 0.001 –0.006 0.009 –0.007 0.009 0.000 0.013 0.004 0.016 0.002 0.015 0.007 0.020 0.000 0.014 –0.001 0.011
X−S 0.001 0.015 –0.008 0.003 –0.010 –0.001 –0.013 –0.004 –0.012 0.000 –0.007 0.009 –0.007 0.009 –0.001 0.013 0.003 0.016 0.002 0.015 0.007 0.020 –0.001 0.013 –0.001 0.010
Lost Motion B=X↑−X↓ 0.0135 0.0107 0.0084 0.0088 0.0125 0.0154 0.0163 0.0136 0.0122 0.0127 0.0130 0.0139 0.0120
Maximum (Position Deviation) Value S↑+S↓+|B| 0.0148 0.0116 0.0091 0.0091 0.0129 0.0158 0.0168 0.0142 0.0127 0.0131 0.0133 0.0144 0.0125
■Result Maximum Lost Motion 0.0163° Wobble Accuracy 12μm
Positional Repeatability
Parallelism 27μm
Unidirectional Positioning ↑ 0.0022° Concentricity 8μm
↓ 0.0009°
Bidirectional Positioning 0.0168°
Positioning Accuracy 0.0330°
Error per Rotation (maximum) 2.60°
G006
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Angular Accuracy
Moment Stiffness
Parallelism
Application
Systems
Optics &
Optical
Coatings
Holders
Attitude displacement angle
Bases
The angular displacement of the stage when unit moment load is
applied.
The parallelism of the table fixed on the stage against the base
plane.
Manual
Stages
Measurement of Goniometer Stage Accuracy
Positional Accuracy
Actuators
Motoeized
Stages
Positional Repeatability
Positioning is performed multiple times from the same direction on
any position of the stage, and the maximum value of the deviation
amount with respect to the stop position is calculated.
The maximum of those numerical values is taken to be positional
repeatability.
Ideal rotation center
Rotation Center Height
The distance to the top surface of the table from the ideal rotation
center.
Light
Sources
Index
Multiple
positioning
Target position
Reference
position
Rotation center height
(WD)
Guide
Maximum error
Multiple
positioning
Target position
Maximum error
Reference position
Ideal
rotation center
Rotation center
height
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Rotation Center Deviation Accuracy
The maximum deviation range from the ideal rotation center
position when a gonio stage is moved throughout the full travel.
Ideal rotation center
Ideal rotation center
Lost Motion
Positioning is performed multiple times in the (+) forward and (–)
backward directions on any position (e.g. both ends or center
point) of the stage, and the mean value of the deviation amount
with respect to the stop position is calculated.
The maximum of the numerical values is taken to be lost motion.
Cables
Piezo
Rotation center
deviation accuracy range
Actual rotation center
Ideal
rotation center
Rotation center
deviation accuracy
range
Actual
rotation center
Mean value of multiple positioning results
Target position
Bidirectional
positioning
Mean value of
multiple positioning
X Translation
Theta Rotation
Goniometer
Target position
Vacuum
Angular Accuracy
Moment Stiffness
Options
□40mm
□60mm
The angular displacement of the stage when unit moment load is
applied.
□80mm
□85mm
□100mm
□120mm
Others
Attitude displacement angle
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G007

Motion Control Products
Motorized Stages Guide
Accuracy Verification
Application
Systems
Motorized stage accuracy is, in principle, confirmed in compliance with the JIS test code for machine tools (JIS B 6190).
In addition, all measuring instruments are traceable standard instruments compliant to the national standard.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Category Measurement Item Device Used Standards
Light
Sources
Index
Guide
Linear Stage
Positioning Accuracy
Positional Repeatability
Lost Motion
Dynamic Calibrator
(HP5529A)
JIS B 6190
Running Parallelism Dial Indicator Company Standard
Pitch/Yaw Auto Collimator Company Standard
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
It has to be guaranteed that measured values and indicated
values are within the specification range of international
standard values. In other words, traceability must
be ensured. JIS defined this traceability as “the capacity
to trace measurement results back to the domestic
measurement standards, with the use of measuring
instruments that have gone through a sequence of calibrations
with high-ranking standards.”
Linear Stage Traceability System Diagram
State
Institution
Manufacturer
National Institute of Standards and Technology
(NIST)
Agilent Technologies, Inc.
Calibration
Device
Dynamic Calibrator
Category Measurement Item Device Used Standards
X Translation
Theta Rotation
Goniometer
Rotation Stage
Positional Repeatability
Rotary Encoder
Company Standard
Lost Motion
Wobble Accuracy Dial Indicator Company Standard
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Goniometer Stage
Positional Repeatability
Lost Motion
Rotation Center Height
Rotation Center Deviation Accuracy
Accuracy Check in Assembled State
We check accuracy of motorized stages as a single unit.
Regarding the accuracy check in assembled state, we
need to confirm use conditions etc. Contact our International
Sales Division separately.
Rotary Encoder
Three Dimensional Instrumentation
Company Standard
Company Standard
Accuracy Check at Delivery Destination
We cannot conduct accuracy check at delivery destinations.
We will request a check from organizations such as
Japan Quality Assurance Organization as necessary.
Contact our International Sales Division separately for
more information.
G008
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Interpretation of the Specification Table
Specifications
1… Part Number **-**
2… Opposite Model **-**R
3…
Travel
**mm
4… Table Size **×**mm
5… Mechanical Feed Screw
6… Specifications Positioning Slide
7… Stage Material
8… Weight **kg
9…
Resolution
(Full)
(Half)
**μm/pulse
**μm/pulse
10… MAX Speed **mm/sec
11… Repeatability **μm
12… Positional Repeatability **μm
13… Load Capacity **N (**kgf)
Pitch **″/N・cm
Moment
14… Accuracy
Yaw **″/N・cm
Stiffness
Specifications
Roll **″/N・cm
15… Lost Motion **μm
16… Backlash **μm
17… Parallelism **μm
18… Running Parallelism **μm
19… Orthogonality of Motion **μm
20… Perpendicularity of Motion **μm
21… Pitch / Yaw **″/**″
22…
Sensor Part Number
23… Limit Sensor
Sensor
24… Origin Sensor
25… Proximity Origin Sensor
26…
Motor / Sensor Specifications
Type
27… Motor Motor Part Number
28… Step Angle
29…
Power Voltage
30… Current Consumption
Sensor
31… Control Output
32… Output Logic
Compatible Driver / Controller
33…
Control System
Compatible Driver
34… Compatible Controller
[Memo]
The drawing shows the types of tilt when a linear stage travels.
Towards the direction of travel...
Pitch Rotation around the axis in the horizontal plane perpendicular to the direction of travel
Yaw Rotation around the axis in the vertical plane perpendicular to the direction of travel
Roll Rotation around the axis in the horizontal plane parallel to the direction of travel
1 Part Number
2 Opposite Model
[Mechanical Specifications]
3 Travel Indicates the full travel.
4 Table Size Size of top table face.
5 Feed Screw * Ball screw
* Precision ground screws
6 Positioning Slide * Outer rail structure
* Crossed roller guide
7 Stage Material Material used for the product.
8 Weight Self weight of the product.
[Accuracy Specifications] Refer to the accuracy verification page for more information.
G004 − G007
9 Resolution (Full) Travel per pulse for full step
(Half) Travel per pulse for half step
10 MAX Speed MAX speed of the product (maximum travel speed).
11 Positioning Accuracy Deviation between the measured value and the target
value at the positioning point.
12 Positional Repeatability Deviation in stop positions when unidirectional positioning
is performed multiple times.
13 Load Capacity Load capacity at the center of the stage.
14 Moment Stiffness Stage strength against a load exerted at a position away
from the center of the table top (the table center and the
center of gravity of a work does not match). It indicates
the degree of tilt of the table top (″) when 1N load is
exerted at the position 1cm away from the center of the
stage surface.
Pitch
Stiffness in the direction of tilt around the axis in the
horizontal plane perpendicular to the direction of travel
when moving the stage for full travel.
Yaw
Stiffness in the direction of tilt around the axis in the
vertical plane perpendicular to the direction of travel when
moving the stage for full travel.
Roll
Stiffness in the direction of tilt around the axis in the
horizontal plane parallel to the direction of travel when
moving the stage for full travel.
15 Lost Motion Deviation between the stop position of forward positioning
and that of backward positioning.
16 Backlash Deviation in each direction when a certain load is exerted
in forward and backward directions at an arbitrary position
on the stage.
17 Parallelism The parallelism of the table fixed on the stage against the
base plane.
* Note that it is different from “Running Parallelism”.
18 Running Parallelism Displacement in the vertical direction of the table during
stage motion along the full travel.
19 Orthogonality of Motion Working displacement in the direction perpendicular to the
Y axis when referenced to the X axis motion of the XY axis
stage.
20 Perpendicularity of Motion Displacement between the Z axis stage and the perpendicular
optical breadboard when moving the stage for full
travel.
21 Pitch Maximum angle displacement in the direction of tilt around
the axis in the horizontal plane perpendicular to the
direction of travel when moving the stage for full travel.
Yaw
Maximum angle displacement in the direction of tilt around
the axis in the vertical plane perpendicular to the direction
of travel when moving the stage for full travel.
[Sensor]
22 Sensor Part Number Sensor used for the product.
23 Limit Sensor Indicates whether fitted with a limit sensor.
24 Origin Sensor Indicates whether fitted with an origin sensor.
25 Proximity Origin Sensor Indicates whether fitted with a proximity origin sensor.
[Motor Specifications]
26 Type Type of motor.
27 Motor Part Number Part number of motor used for the product.
28 Step Angle Step angle of the motor.
[Sensor Specifications]
29 Power Voltage
30 Current Consumption Specifications of the sensor.
31 Control Output
32 Output Logic
[Compatible Driver / Controller]
33 Compatible Driver Driver/controller compatible with the product.
34 Compatible Controller
Pitch
Yaw
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Roll
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G009

Motion Control Products
Stepping Motors Guide
Operating Environment of Motorized Stages
Application
Systems
Optics &
Optical
Coatings
Holders
Use motorized positioning stages within the following operational environment temperature range.
Contact our International Sales Division separately if you desire to use the stages outside the operational environment
temperature range.
*Operating environment
*Recommended environment
Temperature: 5°C − 40°C Temperature: 23°C ±5°
Humidity: 30% − 80% (without condensation) Humidity: 60±10% (without condensation)
Bases
Manual
Stages
Actuators
Operational environment temperature changes depending on various conditions such as the type of motorized positioning
stage, installation and operation conditions.
Avoid use of the stages in the following sites.
◦Sites subject to water or oil
◦Sites subject to direct sunlight or radiant heat
◦Sites subject to dirt and dust
◦Sites subject to vibration or impact
◦Sites close to fire
◦Sites subject to inflammable gas and corrosive gas
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
Life Cycle
Although the life cycle varies depending on intended use
or application, 2,000 to 3,000 hours for linear systems
and 1,000 to 1,500 hours/year (about 3 to 4 hours/day) for
rotation/goniometer systems are assumed.
Note that the above assumption may not apply to repeated
operations (high-speed drive or high-load drive).
Careful maintenance or supply of grease is important for
using the products for a long time without a problem.
G018 Maintenance / Grease Replacement
Example of Installation Procedure
Storage
When not using motorized stages for a long time, store
motorized stages wrapped with anti-rust paper, or store
in a plastic bag with a desiccant.
Storage Temperature: 0°C − 40°C
Humidit: 10% − 85% (without condensation)
AC Servo Motor
Cables
Piezo
OSMS
Linear
OSMS-(Z)
SGSP-YAW
Rotation
X Translation
Theta Rotation
Goniometer
OSMS-ZF
HPS
SGSP-A
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Attention
▶Recommended parallelism for stage mounting surface is 0.02 or lower. A product might be warped when it exceeds 0.02, causing abnormal
operation.
▶When mounting another product on the upper table of a motorized stage, make sure that the stage is not subjected to abnormal external force.
▶Foreign substances in tapped holes on the upper table or on the side of the stage will cause malfunction.
G010
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Mounting Orientation
The values in the specifications of each product are based on installation on a level surface.
Note that load capacity and other precision values will significantly change for upside down, lateral horizontal and other
installation orientations, because mounting on other than the horizontal surface require securing with screws.
Category Series Name Positioning Slide Upside Down Lateral Horizontal Lateral Vertical
OSMS Outer Rail ○ ○ ○
Linear HPS Ball Guide ○ ○ △
TAMM, KST Crossed Roller ○ ○ △
SGSP-YAW Worm and Worm Wheel ○ △ △
Rotation HDS-YAW Bearing ○ △ △
KST Crossed Roller ○ ○ △
Goniometer
OSMS-A/B Ball Guide ○ ○ △
SGSP-A/B Crossed Roller ○ △ △
Please contact our International Sales Division regarding other unclear points related to mounting orientation.
Selection Guide
○: Possible with limits on load capacity and other accuracy.
△: Possible depending on the model, with limits on load capacity and other accuracy.
×: Not allowed
Motorized stages are categorized in several different travel axes and types by the differences in
structure or positioning slide.
Since precision, stiffness and price differ depending on the type, select a product ideal for the
intended purpose.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Precision
Linear Rotation Goniometor
Series Name Relevant Product Series Name Relevant Product Series Name Relevant Product
Controllers/Drivers
Softwares
High
KST
Crossed Roller
G062 –
KST
Bearing
G078
Stepping Motor
AC Servo Motor
Cables
Piezo
TAMM
Crossed Roller
G060
HDS-
YAW
Bearing
G080
OSMS
Ball Guide
G082
X Translation
Theta Rotation
Goniometer
HPS
Ball Guide
G060
OSMS
Outer Rail
SGSP
Bearing
G074 –
SGSP
Crossed Roller
G086
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Bottom
G032 –
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G011

Motion Control Products
Stepping Motors Guide
Linear
Application
Systems
Optics &
Optical
Coatings
Holders
HPS Series
Durable linear stages with excellent cost performance.
Motor Variation
Compatible with 2 phase stepping motor, α stepping motor and AC servo motor manufactured
by Oriental Motor Co., Ltd. in addition to the standard 5 phase stepping motor.
Bases
Manual
Stages
Low Price
High Durability
Integration of the main unit and guide has reduced the number of
parts and assembly man-hours, offering low price.
Ball screws are used for the feed mechanism to achieve both low
price and durability.
Actuators
Motoeized
Stages
Light
Sources
Index
OSMS Series
Stepping motor stages compatible with versatile travel range between 35 to 500mm and can be used in any orientation.
Slim Body
These stages are our standard CE-compliant motorized
stages, covering motors neatly. These stages offer attractive
range of travel by fully utilizing the features of the outer rails.
Guide
Line Up
Full closed loop control for stage table positioning, and linear
encoder version for coordinate counting are standard line up.
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Safety Cover
Safety specifications of these stages
are compliant with safety requirements
on electrical measuring and control
equipment and electrical equipment
for laboratory use (EN61010-1:2010).
Option
Slim Body
The structure in which the
U-shaped outer rail and inner
block with center integrated ball
screw offers high stiffness, high
precision and minimum footprint.
Various options are available according to the application. Geared
motors and electromagnetic brakes are available for high-load
specifications and Z axis specifications, respectively. Contact our
International Sales Division for more information.
■XY axis mounting becomes easier.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Part Number
5 Phase Stepping Motor
Achieves the minimum size and
minimum weight with high speed
and high torque. The rated current
is 0.75A/phase which is common
to all sizes.
Table Size
[mm]
Wide
[mm]
Base Plate
Stages can be installed by
securing with bolts without
removing their covers. If rigidity is
required, the base plates can be
removed.
Height
[mm]
Travel
[mm]
Load Capacity
[N]
OSMS20-35(X) 85×85 85 35.7 35 78.4
OSMS20-85(X) 85×85 85 35.7 85 78.4
OSMS26-50(X) 100×100 100 42 50 117
OSMS26-100(X) 100×100 100 42 100 117
OSMS26-200(X) 100×100 100 42 200 117
OSMS26-300(X) 100×100 100 42 300 117
OSMS33-300(X) 120×120 120 57 300 196
OSMS33-500(X) 120×120 120 57 500 196
Two single axis stages can be assembled
directly and used as an XY axis stage without
the need of XY-axis mounting plates.
Motorized Extended Guide
Goniometer
Translation Motorized Stages,
Flat Z axis - 5 Phase Stepping Motor
G012
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TAMM Series
Motorized crossed roller stages that combine compactness, low-profile and high durability
High Durability
Compact/
Low-profile
Line contact with rollers and V groove rail offers high stiffness, low friction
and virtually no differential slip, suitable for minute feeding.
“Ideal for space-saving and assembly of systems with low optical
axis.”
Application
Systems
Optics &
Optical
Coatings
Holders
Sizes
□40/□60/□100mm are available.
Bases
Manual
Stages
KST Series
Actuators
High Precision
High Load
Capacity
High precision stages with steel body relatively strong against heat, and in which
precision ball screws and crossed roller guide are arranged with highest precision.
Achieved the maximum load capacity of 392N (40.0kgf).
Motoeized
Stages
Light
Sources
High Stability
Steel body fitted with large table face can mount anything.
Index
Guide
Controllers/Drivers
Softwares
Rotation
SGSP-YAW Series
Stepping motor driven rotation stages fitted with bearing guide and worm gear feed mechanism
Stepping Motor
AC Servo Motor
Cables
Piezo
Low Price
Compact/
Low-profile
Number of parts and assembly time were reduced to lower the
price.
Ideal for space-saving and assembly of systems with low optical
axis.
Sizes
φ40/φ60/φ80/φ120/φ160mm are available.
X Translation
Theta Rotation
Goniometer
Vacuum
HDS-YAW
High durability rotation motorized stages for minute angle adjustment.
High Durability
Isokinetic
Ball screws and steel belts used in the drive mechanism offer
excellent durability in minute angles.
Since it converts linear motion by the ball screw into rotational
motion by the steel belt, there is no difference between traveling
center and end by rotation speed and resolution.
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Sizes
φ40/φ60/φ80/φ120/φ160mm are available.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G013

Motion Control Products
Stepping Motors Guide
KST-YAW Series
Application
Systems
High precision and high stability rotation motorized stages fitted with bearing positioning slide
Optics &
Optical
Coatings
Holders
High Precision
High Load
Capacity
High repeatability stages fitted with bearing positioning slide.
Achieved the maximum load capacity of 392N (40.0kgf).
Bases
High Stability
Steel body fitted with large table face can mount anything.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
Goniometer
OSMS Sereis
High precision motorized goniometers with integrated bearing ways for superior stiffness, accuracy and durability
Their smooth movement is ideal for frequent angle adjustment.
Low Price
High Precision High
Stiffness High Durability
Number of parts and assembly time were reduced to lower
the price.
Integrated ball guide structure in which guides are
directly processed on the main body minimized machining/assembly
errors and improved rotation center
accuracy.
AC Servo Motor
Cables
Piezo
SGSP-A/B Series
Stepping motor driven motorized goniometer stages fitted with crossed roller guide
High Stiffness
High stiffness goniometer stages fitted with excellent abrasion
resistant crossed roller guide.
Operability
Products with two axes combined offer further flexible alignment.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Lightweight
Aluminum body offers lightweight.
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
G014
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GS/CS series Guide
Full closed loop control system that controls a motorized stage with built-in high resolution compact
linear encoder using a special controller.
◦Linear encoder signal feedback and micro-step drive can minimize lead error, which is inherent to feed screw mechanism.
◦Small glass scale of linear expansion coefficient enabled a highly reliable positioning system stable against fluctuations in
ambient environment.
◦Ideal for use in positioning that requires precision in submicron units, and prolonged driving that is affected by reproducibility
by temperature drift.
Application
Systems
Optics &
Optical
Coatings
Full Closed Control System (Image diagram)
Holders
Bases
Positioning instruction
Liner scale
Detector
Feed screw
SHOT-GS
Position signal feedback
Error from the target position
One turn of screw
Lead error
Table position
Open loop control
During feedback control
Reduce lead error,
and improve positioning
accuracy
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
System Chart
Guide
PC
Sample software
(download from website)
SGCommander
LabVIEW
HIT Sample
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
GP-IB cable
USB cable
RS232C cable
Cables
Piezo
CJ-200A
GP-IB
RS232C USB I/O / Terminal Block
LAN cable USB RS232C
HIT-M HIT-S HIT-S HIT-S Maximum
8 units
ETHERNET
can be linked
I/O control
external device
I/O
MDR cable
JD-100 JS-300 JB-400
G106
G107
SHOT-GS G102
STAGE1 – 4 STAGE1 – 4
DHR-CA cable
GSE-CA cable
AC100-240V
50/60Hz
Power cable (2m)
comes with main body.
OSMS(CS) series
I/O control
external device
DHR-CA cable
DC24V 1A
GSE-CA cable
Link cable
Link cable
DC24V 1A
DC24V 1A
DC24V 1A
STAGE SCALE STAGE SCALE STAGE SCALE
KST(GS) series
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G015

Motion Control Products
SGMV series Translation Motorized Stages - AC servo Motor
SGMV
Application
Systems
Optics &
Optical
Coatings
Holders
High precision/high stiffness stages driven by AC servo motor. The stage structure unifies the
functions of precision linear guide and precision ball screw, places the linear guide, inner block
(table) and drive ball screw at the same position, and uses high stiffness U-shape outer rail for the
guide to offer small footprint with large load rating.
◦AC servo motor stages are recommended for production equipment that runs at high speed accompanied by rapid acceleration/deceleration
for reduction of takt time, because they generate sufficient torque in high-speed area and are less
subject to position deviation.
◦Stepping motor stages are recommended for positioning of optical systems that requires stability at rest.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Motor Type Stepping Motor Servo Motor
Control Method Open loop control Semi-closed loop control
Torque
Characteristic
Stability at Rest
Recommended
Application
Torque is large in low speed and
small in high-speed area
Very stable under normal conditions,
but cannot detect position deviation
caused by external force, etc.
Applications that exert light load and
require stability at rest, such as
positioning and measurement in
optical systems or small areas
Generate the same torque throughout the
low-speed area to high-speed area
Deviation may occur within the range of in
position, but it returns to the original
position by detecting position deviation
due to external force, etc. with an encoder.
Applications that do not allow position
deviation even during high-speed
operation or load fluctuation, such as
production lines
Guide
Controllers/Drivers
Softwares
◦The control system has automatic tuning functions, and a stage controller system usable just by connecting with a special
cable as well as servo pack that has high compatibility with the existing FA system are available.
■Configuration Example Using Stage Controller
Stages driven by AC servo motor
Stepping Motor
AC Servo Motor
Cables
Piezo
PC
LAN cable
RS232C cable
ETHERNET
RS232C
I/O/Terminal Block
PGC-04
DRIVER1/2/3/4
DC24V
PAG-ACS cable
Servo pack
SGDV-2R9E91A
Sample Software
(download from website)
I/O control
external device
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
■Configuration Example Using Servo Pack
If the servo pack is used as
a single unit, a controller needs
to be prepared separately.
User Controller
PC
Servo Pack
Adjustment Software
Sigma Win+
(SW lectric orporation)
CN1
I/O
Servo Pack
SGDV-2R9EPIA
CN4
Motor
CN2
PG
JZSP-CF1G00-01-E
CN3
DC24V
JZSP-CF1M00-03-E
(SW lectric orporation)
JZSP-CMP00-03-E
(SW lectric orporation)
Stages driven by AC servo motor
G016
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Stabilizing (Fall-Prevention) Mechanism
Catalog
Code
W9007
Mounting of Electromagnetic Brake Equipped Motors
A normally closed type electromagnetic brake exerts braking force when the power is off and
securely holds load. It prevents the movable table from falling to avoid sample damage.
OSMS26-100(Z)
Example of electromagnetic brake
assembly dimensions
◦Change stepping motors or servo motors (optional) used for Z axis motorized
stages to electromagnetic brake equipped motors.
Guide
▶Contact our International Sales Division for changing to electromagnetic
brake. Or use the mortorized stage system question
sheet. G111
▶To drive a motorized stage, DC24V power voltage is required.
Attention
▶External dimensions diagram will change because motors are
changed to electromagnetic brake equipped motors.
Wiring Example
Lead wire for brake of electromagnetic brake equipped motor
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Stage controller side
Motorized stage side
Guide
Controllers/Drivers
Mounting of Reduction Gear Equipped Motors
OSMS26-100(Z)
Example of reduction
gear equipped motor
assembly dimensions
Deceleration, high torque and high resolution can be achieved by
changing to reduction gear equipped motors.Effective for
downsizing and weight saving of systems since it does not require
power supply.
◦Change 5-phase stepping motors or servo motors used for Z axis motorized
stages to reduction gear equipped motors.
Guide
▶Contact our International Sales Division for changing motors. Or
use the motorized stage system question sheet. G111
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Limit Sensor
Attention
▶Outline drawing may change because motors are changed with
reduction gear equipped motors. The OSMS20 series are not
compatible.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
◦Regarding the limit sensor used for motorized stages, refer to the specification of each product.
◦We will change output operations or add a limit sensor on special orders.
■Input/Output Circuit Diagram (NPN output type)
Main Circuit
ZD2
Tr2
ZD1
Tr1
Lead wire color for cable type (Note 1)
(Brown) +V
Load
(Black) Output 1 (Note 2)
Load
50mA MAX.
(White) Output 2 (Note 2)
50mA MAX.
(Blue) 0V
+
−
5〜24V DC
±10%
■Output Operation
Output 1
Output 2
Lead Wire Color
Black
White
Output Operation
ON when light enters (NORMAL CLOSE)
ON when shaded (NORMAL OPEN)
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Internal circuit
Example of external connection
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G017

Motion Control Products
Controllers
GSC-01
GSC-02
SHOT-702
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
G098 G099 G100
Standard driver (full step/half step)
0.75A/phase rated motor or lower
Single axis 1 − 2 axes 1 − 2 axes
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor Stage
OSMS-ZF
SGSP-40/60YAW
SGSP-ACT-B0
OSMS-40
series
TAMM
OSMS-60
HPS
HDS
series
OSMS20/26/33
SGSP-80/120/160YAW
series
KST
series
D15RP-CA
cable
D15RP-CA
cable
Not compatible
Not compatible
D15RP-CA
cable
D15RP-CA
cable
Not compatible
Not compatible
D15RP-CA
cable
D15RP-CA
cable
D15D15A
cable
Not compatible
Stepping Motor
AC Servo Motor
Cables
Piezo
Stages with built in
Glass-scale Encoder
OSMS(CS)
series
KST(GS)
series
Not compatible
Not compatible
Not compatible
Not compatible
Not compatible
Not compatible
Part Name 1 axis Stage Controller 2 axis Stage Controller 2 axis Stage Controller
Part Number GSC-01 GSC-02 SHOT-702
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Primary Functions
General Specifications
Interface
Controller Function ○ ○ ○
Number of Control Axes 1 2 2
Stored Program Control − △ −
Feedback Control − − −
Circular Interpolation Control − − −
Linear Interpolation Control − − −
Driver Function Standard Standard Standard
Micro-step (Max. Division) 2 2 (half step only) 250
Driving Current (A/phase) 0.8 0.8 1.1
Power Voltage
DC24V
1.2A
DC24V
2A
AC100 − 240V
50/60Hz
Power Consumption 30VA 48VA 50VA
External Dimensions (W×H×Dmm) 47×90×125 180×40×125 260×70×280
Weight (kg) 0.4 0.7 2.8
GP-IB − − −
RS232C ○ ○ ○
USB − − −
Ethernet − − −
G018
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Various cables G108 − G109
GIP-101
SHOT-302GS
SHOT-304GS
HIT-M
HIT-S
PGC-04
Application
Systems
Optics &
Optical
Coatings
G101 G102 G102 G103 G103 G104
Micro-step driver
Holders
Bases
Single axis
1.4A/phase rated motor or lower
1 − 2 axes
1 − 4 axes
0.75A/phase rated motor or lower
1 − 8 axes
4 axes
Manual
Stages
D15RP-CA
cable
D15RP-CA
cable
D15RP-CA
cable
D15RP-CA cable
D15RP-CA
cable
Actuators
Motoeized
Stages
D15RP-CA
cable
D15RP-CA
cable
D15RP-CA
cable
D15RP-CA cable
D15RP-CA
cable
Light
Sources
Index
D15D15A
cable
D15D15A
cable
D15D15A
cable
D15D15A cable
D15D15A
cable
Guide
Not compatible
D15D15A
cable
D15D15A
cable
Not compatible
D15D15A
cable
Controllers/Drivers
Softwares
Stepping Motor
Not compatible
DHR/GSE
cable
DHR/GSE
cable
DHR/GSE cable
Not compatible
AC Servo Motor
Cables
Piezo
Not compatible
DHR/GSE
cable
DHR/GSE
cable
Not compatible
Not compatible
Intelligent Positioning
System
2 axis Stage Controller 4 axis Stage Controller
Extensible Stage Controller
(Master)
Extensible Stage Controller
(Slave)
Pulus Generating Controller
GIP-101 SHOT-302GS SHOT-304GS HIT-M HIT-S PGC-04
○ ○ ○ − ○
1 2 4 8 − 4
− ○ ○ − ○
− Glass scale Glass scale (except for KST(GS)) −
− ○ ○ − ○
− 2 axes 3 axes − ○
Micro-step Micro-step − Micro-step −
250 250 − 250 −
0.75 1.4 − 1.1 −
AC100−240V
50/60Hz
AC100−240V
50/60Hz
100VA 160VA 300VA 24VA 34VA
145×205×81 270×118×302 130×120×50 180×140×60
DC24V
1A
2.0 5.5 6.5 0.62 0.63 1.3
− ○ ○ − − −
○ ○ ○ ○ − ○
− ○ ○ ○ − −
− − − ○ − ○
DC24V
1.4A
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
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G019

Motion Control Products
Drivers
Application
Systems
Optics &
Optical
Coatings
Part Name
Part Number
Holders
Driving Motor
Drive System
Bases
Driving Current (A/phase)
Excitation System
Manual
Stages
Primary Functions
Number of Divisions
Input Signal
Actuators
Input Logic
Max. Response Frequency
Motoeized
Stages
Auto Current Down OFF Input
Motor Excitation OFF Input
Light
Sources
Micro-step Selection Input
Origin Excitation Timing Output
Index
Input Voltage
General Specifications
Operating Temperature Range
Guide
Controllers/Drivers
External Dimensions (W×H×Dmm)
Weight (kg)
Softwares
Stepping Motor
AC Servo Motor
OSMS40-5ZF
SGSP-ACT
series
Stage
Motor Used
PK513PB-C9
Basic Step
Angle
[ ° ]
Phase Current
[A/phase]
0.35
External Dimensions
[W×H×Dmm]
(excluding shaft)
20×20×72
Cables
Piezo
OSMS20-35
OSMS20-85
series
TS3664N4E10
0.75
24×24×31
SGSP-40/60YAW
HDS-60
series
TS3664N4
0.72
0.66
24×24×31
X Translation
Theta Rotation
Goniometer
Vacuum
OSMS26
OSMS60-ZF
SGSP-60A/B
TAMM
OSMS-40/60
SGSP-80/120/160YAW
HPS
HDS-80/120
series
OSMS80-20ZF
PK523HPB-C12
PK525HPB-C4
0.75
28×28×32
28×28×51.5
Options
A7177-90215KTG
0.036
28×28×61.3
□40mm
□60mm
□80mm
OSMS33
series
TS3667N43E967
42×42×47
□85mm
□100mm
□120mm
KST-120/160YAW
series
TS3624N42E967
0.72
60×60×56.5
Others
KST-50 / KST(GS)-50
KST-100 / KST(GS)-100
KST-200 / KST(GS)-200
series
PK564-NBW
PK566-NBW
PK569-NBW
1.4
60×60×46.5
60×60×57.5
60×60×87
G020
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Catalog
Code
W9051
Application
Systems
Compact Driver
Compact Driver
Compact
Micro-step Driver
Compact
Micro-step Driver
Micro-step Driver
Micro-step Driver
SG-5MA SG-5M SG-55MA SG-55M SG-514MSC MC-7514PCL
5-phase stepping motor
Bipolar constant current pentagon drive
0.25 − 0.85 0.5 − 1.4 0.23 − 0.75 0.5 − 1.6 0.3 − 1.4 0.5 − 1.4
DC20 − 40V
1.5A Max
Full/Half step Micro-step Micro-step Micro-step
Two types
1, 2
1 clock input method
2 clock input method
16 types
1, 2, 4, 5, 8, 10, 16, 20, 25, 40,
50, 80, 100, 125, 200, 250
1 clock input method
2 clock input method
16 types
1, 2, 2.5, 5, 8, 10, 20, 25, 40,
50, 80, 100, 125, 200, 250
2 clock input method
16 types
1, 2, 4, 5, 8, 10, 16, 20, 25, 40,
50, 80, 100, 125, 200, 250
1 clock input method
2 clock input method
Photocoupler input
Photocoupler input
C-MOS equivalent
negative logic input
Photocoupler input
50kpps 500kpps 500kpps 500kpps
None None None Equipped
Equipped Equipped Equipped Equipped
None
4 bit signal input or switching by the number of
division setting switch
4 bit signal input
Switching by the number
of division setting switch
None Equipped Equipped Equipped
DC20 − 40V
3A Max
DC24 − 36V
1.5A Max
DC24 − 36V
3A Max
For motor drive:
DC24 − 36V ±10%
2A or lower
For logic:
DC5V ±5% 0.1A or lower
AC100 − 230V±10%
50/60Hz
3.5A Max
0 − 40°C 0 − 40°C 0 − 40°C 0−40°C
77×32×45 105×38×74 91×36×70 170×130×39
0.1 0.2 0.2 0.75
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
○
×
○
×
○
×
AC Servo Motor
Cables
○
○
○
○
○
○
Piezo
○
○
○
○
○
○
○*
○
○*
○
○
○
X Translation
○*
○
○*
○
○
○
Theta Rotation
Goniometer
○*
○
○*
○
○
○
Vacuum
Options
○*
○
○*
○
○
○
□40mm
□60mm
□80mm
□85mm
×
○
×
○
○
* DC36V * DC36V * DC36V
○
□100mm
□120mm
Others
×
○
×
○
○
○
* Can be used with 0.75A/phase.
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G021

Motion Control Products
Softwares
Software for creating operation check or automation applications and for supporting program development are available.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Sample Softwares
SGCommander
RS232C interface
stage controller control software.
In addition to remote control from a PC,
simple program control using Excel is possible.
LabVIEW Sample Program
Sample module for controlling stages
using the graphical programming environment LabVIEW
of National Instruments Corporation
Compatible with LabVIEW 5.1/6i/7.1/8.6/2010/2012
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Special Application Softwares
SGTERME
Terminal software for receiving and sending
commands input in Excel cells.
Applications can be developed flexibly using
repetition and conditional branching macros,
without programming knowledge.
Compatible with 32/64bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
SGEMCSE
G024 G025
Trial Version
Trial Version
Software for positioning & measurement that automatically collects
data and outputs results in Excel simply by selecting a controller and
setting a measuring instrument.
Applications can be developed using the program measurement
function with routine drive patterns and the Excel instruction measurement
function that measures arbitrary coordinates, without programs.
Compatible with 32/64bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Software for Positioning, Measurement & Analysis
SGMACSE
Trial Version
Software with enhanced functions such as
real-time graphical display, analysis or
correction of measurement data and
RS232C binary data exchange.
Compatible with 32 bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
Software for Monitoring & Control
SGVIEWE
Software for measuring dimensions and angles based on
images loaded from a USB camera connected to a PC, as
well as for saving loaded images.
It can measure an arbitrary point or perform simple time-lapse
measurement when used in combination with a stage.
Compatible with 64 bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
Automated Collimation Measurement Software
SGCAMSE
Used in combination with the collimation
checker system, this software automatically
measures laser light collimation (parallelism)
and judges good or bad.
Trial Version
Compatible with 32 bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
Software for Liquid Crystal Evaluation System
SGLCESE
Being compatible with major color luminance meters
and spectroradiometers, this software packaged
luminance, chromaticity, viewing angle characteristics
and other functions required for flat panel evaluation.
Compatible with 64 bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Library for Program Development
Component Software for VB.NET
SGNETXE
RS232C/GP-IB/USB communication library
enabling control programming for stage
controller with VB.NET.
Compatible with 32/64bit version of Windows ® XP/Vista/7
* NET Framework1.1 or later version is required.
ActiveX for Positioning & Measurement
SGACTXE/SGPATXE/SGSFSXE
RS232C/GP-IB/USB communication library
enabling control programming for stage controller
with VB6.0 or VBA.
32 bit Windows ® -only
* Windows ® Vista/7 does not work with USB.
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Guide
▶Contact our International Sales Division for more information.
Information is also available on .
Part Name
Software for Positioning, Measurement & Analysis
Automated Collimation Measurement Software
Software for Monitoring & Control
Software for Liquid Crystal Evaluation System
Part Number
SGMACSE
SGCAMSE
SGVIEWE
SGLCESE
Part Name
Component Software for VB.NET
ActiveX for Positioning & Measurement
Part Number
SGNETXE
SGACTXE
SGPATXE
SGSFSXE
G022
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Catalog
Code
W9058
Free Software|SGCommander (for RS232C) Windows®Version
(For SHOT(Mark)-102/202/204, FINE(Mark)-501/502/503, FINE-01, SHOT-302GS/304GS, PAT-001, OMEC-2BF/2BG/4BF/4BG, SHOT-602,
CSG-602R/522R, MINI-5D, BS-302GS/304GS, PKA-ID-02, SHOT-702, FINE-01γ, GIP-101, GSC-01/02)
Free software is available to operate your controller easily from a PC. Each axis of a connected
motorized stage can be moved using buttons on the screen. The software can be downloaded from
our website.
1Jog operation
3Homing control
Home > Support > Software Information > Sample Software: SGCommander
2Speed specification
4Travel control
Simple operations
are possible such
as travel by specifying
an axis (pulse
instruction), homing
or jog operation.
Controllers such as SHOT-30*
/702 and FINE-**, which have
a built-in program function,
allow editing of programs
from a PC. Since data can be
downloaded/uploaded from/to
Excel sheets, it is easy to edit
programs. In addition, upload
of memory switch or download
mode is available.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Free Software (for HIT)|
HIT sample for LAN/RS232C
Free software is available for HIT of SGCommander.
Free Application|
LabVIEW (for v.5.1/v.6i/v.7.1/v.8.6/v.2010/v.2012) RS232C/GP-IB
LabVIEW application is available for LabVIEW
users.
Light
Sources
Index
Guide
1
2
6
7
8
5
4
3
Functions
1Relative position
travel
2Origin return
3IO menu
4Command input
(Terminal)
5Number of
division setting
6Speed change
7Program editing
8Memory switch
menu
Port number
PortInit.vi
Stage drive shaft number
SetSpeed.vi Move.vi
Minimum speed (pulse/sec) Acceleration time (ms) Number of pulses per travel
Maximum speed (pulse/sec) Drive direction (T: +, F: -)
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Other: 30 Day Trial Version|SGEMCSE / SGTERME
SGEMCSE.....SGEMCSE is software for collecting data or measuring using
automatic positioning equipment, measuring instrument or
controller, and is offered 30 days for free.
SGTERM E.....It allows command input using Excel for easy program making.
SGTERME is ideal software to link with various devices, and is
offered 30 days for free.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G023

Motion Control Products
Catalog
Terminal Software SGTERME Code W9059
General-purpose communication terminal software that uses Excel.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
◦Positioning and measurement can be performed just by listing and executing
commands in an Excel sheet.
◦Continuous process or step-by-step process can be selected.
◦Use of SGTERM’s original control scripts, “If”, “Jump”, “Loop” and “Print” in an Excel
worksheet simplifies processing control.
◦Since measurement results are output to an Excel sheet, easy to analyze and manage
measured data.
◦Set content can be saved as a “*.SGE” file, which facilitates setting of the same
process again.
◦RS232C* 1 /GP-IB* 2 /USB* 3 interfaces are supported.
◦Compatible with Windows ® XP/Vista/7* 4 .
Manual
Stages
Actuators
Part Number
SGTERME
*1 RS-232C ports are available from COM1 to COM8.
*2 As for GP-IB, only GP-IB of National Instruments Corporation is supported.
*3 USB is only supported for SHOT-302/304 series, HIT-M, FINE-01γ/503 series, and OMEC-2BG/4BG series.
*4 Conditions when used with Windows ® 7 are as follows.
・Administrative right is required for installation as well as execution.
・32/64 bit versions are supported. Check on our website for the latest support status.
Motoeized
Stages
Light
Sources
SGTERME
Processing with Excel
makes editing of collected data easy
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Condition setting
Measurement display
Data collection
Control display
Result acquisition
PC
X Translation
Theta Rotation
Goniometer
Give measurement
instructions or
collect data
using Excel
Measuring instrument
Stage controller
G018 − G019
Vacuum
Options
Motorized stage
□40mm
Register a device
Operation settings
Create an instruction file with Excel
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Run commands written in
cells in order.
Perform repetition or
conditional branching
using control scripts.
Cell functions and VBA
can also be used in
combination.
G024
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Catalog
Software for Positioning & Measurement SGEMCSE Code W9060
Positioning and measurement software highly compatible with motorized
positioning devices offered by Sigma Koki.
◦Multiple repetition of positioning/measurement sequence is easily realized.
◦Various functions are available such as manual or time-series measurement and
count presetting.
◦By creating Excel instruction files, both stage control and measurement with a measuring
instrument can be performed simultaneously.
◦Since measurement results are output to an Excel sheet, easy to analyze and manage
measured data.
◦Set content can be saved as a “*.SGS” file, which facilitates setting of the same
process again.
◦Using this software in combination with motorized positioning devices offered by
Sigma Koki, a positioning and measurement system can be easily configured.
◦RS232C* 1 /GP-IB* 2 /USB* 3 interfaces are supported.
◦Compatible with Windows ® XP/Vista/7* 4 .
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Part Number
SGEMCSE
*1 RS-232C ports are available from COM1 to COM8.
*2 As for GP-IB, only GP-IB of National Instruments Corporation is supported.
*3 USB is only supported for SHOT-302/304 series, HIT-M, FINE-01γ/503 series, and OMEC-2BG/4BG series.
*4 Conditions when used with Windows ® 7 are as follows.
・Administrative right is required for installation as well as execution.
・32/64 bit versions are supported. Check on our website for the latest support status.
Actuators
Motoeized
Stages
Light
Sources
Index
Controller
Guide
Controllers/Drivers
Softwares
Stepping Motor
PC
Measuring instrument
AC Servo Motor
Link with Excel
Automatic measuring
Measurement display
Automatic positioning
Data collection, etc.
[Attention]
May not be compatible depending on the specifications
of measuring instrument.(E.g. When responding to one
measurement command with multiple data items)
Cables
Piezo
No programming knowledge is required.
Just select a controller and input the minimum travel.
In addition to routine drive patterns, arbitrary measurement points
can be specified using Excel.
Automatically load data to Excel from a measuring instrument.
Register a device
Operation settings
Stage controller
G018 − G019
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Program instruction
Machine origin Theoretical origin
or
Create an instruction file with Excel
Motorized stage
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G025

Motion Control Products
Motorized Stage/Controller/Cable Sets
These sets are offered at value prices. These sets are easy to operate. Enjoy them as soon as they arrive.
Application
Systems
X axis Set|HPS60-20X-SET
Optics &
Optical
Coatings
Holders
Bases
This set enables easy automatic positioning in
one straight direction and JOG operation.
・Stage size : 60mm×60mm
・Travel : 20mm
・Load Capacity : 49N [5kgf]
・Cable lengh : 3m
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Products Name Part Number Quantity
High Performance Motorized Stages HPS60-20X-M5 1 G028
Single axis Stage Controller GSC-01 1 G098
AC Adapter PAT-001-POW1 1 ー
D15RP Cable D15RP-CA-3 1 G108
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
XY axis Set|SetHPS120-60XY-SET
This set enables XY axis automatic alignment,
and program operation without using a PC.
・Stage size : 120mm×120mm
・Travel : 60mm
・Load Capacity : 88.2 [9kgf]
・Cable lengh : 3m
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Products Name Part Number Quantity
High Performance Motorized Stages HPS120-60X-M5 2 G028
2 axis Stage Controller GSC-02 1 G099
Joystick Terminal SJT-02 1 G106
AC Adapter PAT-001-POW1 1 ー
D15RP Cable D15RP-CA-3 2 G108
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
For easier positioning ... Manual stages which can be used in combination.
■θ axis Rotation Stages
KSP-606M
■Z axis Steel Extended Contact Slide Stages
TSD-603
E144 E086
G026
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Catalog
Code
W9062
Xyθ axis Set|HPS/HDS120-XYθ-SET
Motorized stage system for minute positioning
and angle adjustment such as for marking of
semiconductor wafers.
・It can be controlled externally using Ethernet/RS232C/
USB interface.Also, the number of axes is extendable
by adding slave controllers (Part Number: HIT-S).
・Stage size
・Travel
: φ120mm
: ±6° [θ axis]
: 60mm [XY axis]
・Load Capacity : 58.8N [6kgf]
・Cable lengh : 3m
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Products Name Part Number Part Number
High Performance Motorized Stages HPS120-60X-M5 2 G028
High durability automatic rotation stage HDS-120YAW 1 G080
Extensible Stage Controller (Master) HIT-M 1 G103
Extensible Stage Controller (Slave) HIT-S 3 G103
AC Adapter 1 ー
D15RP Cable D15RP-CA-3 3 G108
Actuators
Motoeized
Stages
Light
Sources
Index
XYZ axis Set|OSMS20-XYZ-SET
This set is best suited for measuring and
inspection equipment and for XYZ axis
automatic positioning of workpieces.
◦It can be controlled externally using RS232C/GP-IB/USB
interface, or manually using a joy stick (JS-300).
・Stage size : 60mm×60mm
・Travel : 85mm [XY axis], 10mm [Z axis]
・Load Capacity : 29.4N [3kgf]
・Cable lengh : 3m
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Products Name Part Number Part Number
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor OSMS20-85(X) 2 G032
Translation Motorized Stages, Flat Z axis - 5 Phase Stepping Motor OSMS60-10ZF 1 G070
4 axis Stage Controllers SHOT-304GS 1 G102
Joystick Terminal JS-300 1 G107
D15RP Cable D15RP-CA-3 1 G108
D15D15A Cable D15D15A-CA-3 2 G108
MDR14-CA-2.5 Cable MDR14-CA-2.5 1 G109
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Make it more convenient … Software for stage control
■Software for Positioning,
Measurement & Analysis
SGMACSE
■Software for Monitoring & Control
SGVIEWE
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
G022 G022
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G027

Motion Control Products
High Performance Motorized Stages
HPS
Motorized stages with ball screws offering middle/high performance at low price.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
◦Ball screws with improved durability compared to the
existing TSDM series.
◦Our original high precision integrated ball guide used in
place of a cross roller guide makes it possible to offer a
price lower than the TAMM series.
Guide
▶Please contact us when assembled into XYZ axis or use in
reversion on the ceiling or vertical direction.
▶Opposite model or various motor changes are optionally available.
G030
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number HPS60-20X-M5 HPS80-50X-M5 HPS120-60X-M5
Travel [mm] 20 50 60
Table Size [mm] 60×60 80×80 120×120
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Positioning Slide Ball guide Ball guide Ball guide
Stage Material Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized
Weight [kg] 0.6 1 1.5
(Full) [μm/pulse] 2 2 2
Resolution
(Half) [μm/pulse] 1 1 1
MAX Speed [mm/sec] 10 10 10
Positioning Accuracy [μm] 15 25 25
Positional Repeatability [μm] ±1 ±2 ±2
Load Capacity [N] 49 (5kgf) 73.5 (7.5kgf) 98 (10kgf)
Pitch [″/N・cm] 0.4 0.5 0.5
Moment
Stiffness
Yaw [″/N・cm] 0.4 0.5 0.5
Roll [″/N・cm] 0.3 0.2 0.2
Lost Motion [μm] 1 2 2
Backlash [μm] 1 2 2
Parallelism [μm] 30 40 50
Running Parallelism [μm] 10 10 10
Pitch [″] / Yaw [″] 25/25 30/25 30/25
Sensor Part Number
Micro photo sensor: GP1S097HCZ(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Equipped (NORMAL OPEN)
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK523HPB-C12 (□28mm)
Step Angle 0.72°
Power Voltage DC5 - 24V ±10%
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA
When load current is 16mA, the residual voltage is under 0.4V When load current is 50mA, the residual voltage is under 0.7V
Output Logic
In the case of light shielded ,output transistor OFF (No conduction): Limit sensor
In the case of light shielded ,output transistor ON (Conduction): Origin sensor
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G028
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9061
Outline Drawing
HPS60-20X-M5
(153)
Hexagon socket head cap screw M4×12…4 screws
60
50
32
6-M4×0.7 depth 8
4-M3×0.5 depth 6
HPS80-50X-M5
Hexagon socket head cap screw M4×12…4 screws
(199)
100
4-M4×0.7 depth 8
70
50
6-M4×0.7 depth 8
Application
Systems
Optics &
Optical
Coatings
Holders
20
(29)
15
(450)
mounting hole for attachment pins (bezel side)
HPS120-60X-M5
50
4
32
50
60
(15)
M4×0.7 depth 5
Travel 10 6 Travel 10
1
counterbore for attachment pins (mounting side)
GOHT-AP
6.5
30
2-M4×0.7 depth 4
4-4.5 mounting hole
8 counterbore
Hexagon socket head cap screw M4×12…4 screws
50
20
(29)
15
(450)
M4×0.7
depth 5
mounting hole for attachment pins (bezel side)
70
4
6
50
70
80
counterbore for attachment pins (mounting side)
GOHT-AP
Travel 25 6 Travel 25
1
50
(15)
2-M4×0.7 depth 4
30
4-4.5 mounting hole
8 counterbore
70
4-4.5 mounting notch
8 counterbore
depth 4.5
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
(224)
120
100
70
50
6-M4x0.7 depth 8
4-M4x0.7 depth 8
4-M6x1 depth 12
Index
Guide
Controllers/Drivers
20
50
70
100
120
(450)
50
M4×0.7 depth 5 2-M4×0.7 depth 4
counterbore for attachment pins (mounting side)
GOHT-AP
Travel 30 6
Travel 30
(15)
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
(29)
15
4
30
1
mounting hole for attachment pins (bezel side)
100
4
4-6.5 mounting hole
11 counterbore
100
X Translation
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
Note 2
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13R-12SC
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 ORG
7
Sensor
Power source 12V
8 GND (0V)
9 LS (+)
10 LS (−)
11 FG
12 FG
5-Phase Stepping
Motor
E-Phase
D-Phase
Originside (ORG)
limit sensor
ON when shaded
C-Phase
A phase
B-Phase
Opposite side (−)
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
Motor side (+) GP1S097HCZ0F
limit sensor
ON when light enters
Note 1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-MHIT-S [8 axes]
PGC-14 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
Stage
HPS60-20X-M5
HPS80-50X-M5
HPS120-60X-M5
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with proximity origin sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
G020 − G021
MINI-CA-SG
G108
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G029

Motion Control Products
High Performance Motorized Stage Options
HPS Option
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Specification Method of Option Code
■Option Code
Stage size Travel
Opposite
Model
Motor option
HPS
60 20 5
None
80 - 50 X - M 2
R
120 60 A
L
Guide
None: Standerd model
R: Opposite model
5: 5 Phase Stepping Motor (Standerd model)
2: 2 Phase Motor with Driver
A: α-step Motor with Driver
L: No motor
▶Please contact us when assembled into XYZ axis or use in
reversion on the ceiling or vertical direction.
▶Replacement with electromagnetic brakes or grease change is also
available. Contact our International Sales Division for more
information.
■Example of Code Specification
HPS60-20X□-M□
■Features of Options
2 Phase Motor
with Driver
α Stepping Motor
with Driver
No Motor
It can reduce the total cost because a driver is equipped. On the
other hand, precision is inferior to 5 phase motors.
Can be replaced with an α stepping motor with driver which can
move fast. The motor also has built-in encoder.
No Motor Provide a stage without motor because the customer
mounts own motor. Note that mounting and adjustment of a motor
requires specialized skills.
Light
Sources
HPS120-60X-MA
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications (ex. HPS60-20X)
Part Number HPS60-20X-M2 HPS60-20X-MA HPS60-20X-ML
Travel [mm] 20 20 20
Table Size [mm] 60×60 60×60 60×60
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Positioning Slide Ball guide Ball guide Ball guide
Stage Material Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized
Weight [kg] 0.6 1 0.6
Resolution
(Full) [μm/pulse] 5 2 (500P/R) −
(Half) [μm/pulse] 2.5 1 (1000P/R) −
MAX Speed [mm/sec] 20 40 −
Positioning Accuracy [μm] 15 15 −
Positional Repeatability [μm] ±2 ±0.5 −
Load Capacity [N] 49 (5kgf) 49 (5kgf) 49 (5kgf)
Pitch [″/N・cm] 0.4 0.4 0.4
Moment
Stiffness
Yaw [″/N・cm] 0.4 0.4 0.4
Roll [″/N・cm] 0.3 0.3 0.3
Lost Motion [μm] 1 1 −
Backlash [μm] 1 1 1
Parallelism [μm] 30 30 30
Running Parallelism [μm] 10 10 10
Pitch [″] / Yaw [″] 25/25 25/25 25-25
Sensor Part Number
Micro photo sensor:
GP1S097HCZ (Sharp Corporation)
Micro photo sensor:
GP1S097HCZ (Sharp Corporation)
Micro photo sensor:
GP1S097HCZ (Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Equipped (NORMAL OPEN)
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Driver
Sensor
Type
2-phase stepping motor
(Oriental Motor Co., Ltd.)
α STEP motor
(Oriental Motor Co., Ltd.)
(No motor)
Motor Part Number PKP223D15B (□28mm) ARM26SBK (□28mm) −
Step Angle 1.8° 0.72°(500P/R) −
Part Number A8576-0415Y ARD-K −
Power input DC24V±10% 1A DC24V ±10% 0.9A −
Power Voltage DC5 - 24V ±10%
Current Consumption
60mA or lower (20mA or lower per sensor) A8576-0415Y
Control Output
DC24V±10% 1A
NPN open collector output DC30V or lower, 50mA
Output Logic
When load current is 16mA, the residual voltage is under 0.4V When load current is 50mA, the residual voltage is under 0.7V
In the case of light shielded ,output transistor OFF (No conduction): Limit sensor
G030
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Outline Drawing
HPS60-20X-M2
Hexagon socket
head cap screw M4×8…6 screws
(153)
60
50
32
6-M4×0.7 depth 8
4-M3×0.5 depth 6
Application
Systems
Optics &
Optical
Coatings
φ20
32
50
60
Holders
(29)
15
(450)
mounting hole for attachment pins (bezel side)
M4×0.7 depth 5
counterbore for attachment pins (mounting side)
GOHT-AP
φ6
Travel 10 Travel 10
1
φ4
50
6.5
(15)
30
4-φ4.5 mounting hole
φ8 counterbore
50
Bases
Manual
Stages
Actuators
HPS60-20X-MA
Hexagon socket
head cap screw M4×8…6 screws
(187)
60
50
32
6-M4×0.7 depth 8
4-M3×0.5 depth 6
Motoeized
Stages
Light
Sources
φ20
32
50
60
Index
(29)
Guide
Controllers/Drivers
Softwares
Stepping Motor
HPS60-20X-ML
(110)
Hexagon socket
head cap screw M4×8…6 screws
7
60
50
32
6-M4×0.7 depth 8
4-M3×0.5 depth 6
AC Servo Motor
Cables
Piezo
(29)
6.5
30
(15)
32
50
60
23
4-φ3 drill hole
φ5 counterbore depth 3
(450)
φ22 H7
φ4 g6
Travel 10
20.5 6
10
1
φ6
counterbore for attachment pins (mounting side)
GOHT-AP
Travel 10
23
15
(450)
mounting hole for attachment pins (bezel side)
M4×0.7 depth 5
counterbore for attachment pins (mounting side)
GOHT-AP
φ6
Travel 10 Travel 10
1
φ4
50
6.5
(15)
30
4-φ4.5 mounting hole
φ8 counterbore
50
8.5
mounting hole for attachment pins (bezel side)
φ4
50
4-φ4.5 mounting hole
φ8 counterbore
50
X Translation
Theta Rotation
Goniometer
■Connection Diagram
1
2
3
4
5
6
7
8
9
Note 2
1
2
3
4
5
6
7
8
9
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13JA-12SC
Sensor
Power source 12V
GND (0V)
LS (+)
LS (−)
ORG
NC
NC
NC
NC
Opposite side (−)
limit sensor
ON when light enters
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
Originside (ORG)
limit sensor
ON when shaded
Sharp Corporation
Micro photo sensor
GP1S097HCZ0F
■(Reference) Motor Comparison Table
Section
5 Phase
Stepping Motor
2 Phase
Stepping Motor
αSTEP Motor
Positioning Accuracy ○ ○ ◎
Minute Feed Accuracy ○ ○ ○
Speed Stability ○ △ ◎
Heat Generation
(Continuous Operation)
○ △ ◎
Max. Speed ○ ○ ◎
Rising Responsiveness ○ ○ ◎
*Rough guide for when the motors are mounted on our motorized stage.
(◎ : goodness ○ : standard △ : inferior)
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the (+) forward direction limit sensor.
There is no origin proximity sensor for this motorized stage.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G031

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS20-(X) Stage size □85mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS20-35(X) OSMS20-85(X)
Part Number (-M6) OSMS20-35(X)-M6 OSMS20-85(X)-M6
Part Number (-INCH) OSMS20-35(X)-INCH OSMS20-85(X)-INCH
Travel [mm] 35 85
Table Size [mm] 85×85 85×85
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 1.1 1.3
(Full) [μm/pulse] 2 2
Resolution
(Half) [μm/pulse] 1 1
MAX Speed [mm/sec] 25 25
Positioning Accuracy [μm] 5 10
Positional Repeatability [μm] 3 3
Load Capacity [N] 78.4 (8.0kgf) 78.4 (8.0kgf)
Pitch [″/N・cm] 0.4 0.4
Moment
Stiffness
Yaw [″/N・cm] 0.25 0.25
Roll [″/N・cm] 0.35 0.35
Lost Motion [μm] 3 3
Backlash [μm] 3 3
Parallelism [μm] 30 30
Running Parallelism [μm] 10 10
Pitch [″] / Yaw [″] 30/20 30/20
Sensor Part Number
Micro photo sensor: GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped Equipped
Proximity Origin Sensor None Equipped
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3664N4E10 (□24mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G032
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9063
Outline Drawing
OSMS20-(X)
Hexagon socket head cap screw M4×8…8 screws (35)
Hexagon socket head cap screw M4×8…10 screws (85)
85
75
35 35
A
25 25
75
85
21-M4×0.7 depth 6
(depth 5)
25 25
70
85
Application
Systems
Optics &
Optical
Coatings
Holders
E mounting hole
D
B
C
Bases
29
16
Travel F
Travel F
35.7
Part Number A B C D E F
OSMS20-35(X) 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS20-85(X) 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Manual
Stages
Actuators
OSMS20-(X)-M6
Hexagon socket head cap screw M4×8…8 screws (35)
Hexagon socket head cap screw M4×8…10 screws (85)
85
75
A
35 35
25 25
12-M4×0.7 depth 6
(depth 5)
Motoeized
Stages
Light
Sources
75
85
25
25
70
85
Index
E mounting hole
D
B
C
9-M6×1 depth 6
(depth 5)
Travel F
Travel F
Part Number A B C D E F
Guide
29
16
35.7
OSMS20-35(X)-M6 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS20-85(X)-M6 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Controllers/Drivers
Softwares
OSMS20-(X)-INCH
Hexagon socket head cap screw 8 / 32UNC×5 / 16…8 screws (35)
Hexagon socket head cap screw 8 / 32UNC×5 / 16…10 screws (85)
A
85
76.2
34.93 34.93
25.4 25.4
12-8-32UNC depth 6
(depth 5)
Stepping Motor
AC Servo Motor
Cables
Piezo
76.2
85
25.4 25.4
69.85
85
E mounting hole
D
B
C
6-1/4-20UNC depth 6
(depth 5)
Travel F
Travel F
Part Number A B C D E F
29
16
35.7
OSMS20-35(X)-INCH 183.5 60.8 34.5 76.2(25.4×3) 8-φ4.5 17.5
OSMS20-85(X)-INCH 233.5 85.8 35 101.6(25.4×4) 10-φ4.5 42.5
X Translation
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Connector Pin Number
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
5-Phase Stepping
Motor
E-Phase A phase
Originside (ORG)
limit sensor D-Phase
B-Phase
ON when shaded
C-Phase
Originside (NEAR)
limit sensor
ON when shaded
Note 3
Motor side (+)
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
Opposite side (−)
GP1S097HC1
limit sensor
ON when light enters
Note 1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS20-35(X)
OSMS20-85(X)
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1 The motor side limit sensor is the + direction limit sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Note 3 OSMS20-35 is not fitted with proximity origin sensor.
13 and 14P are short-circuited
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G033

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS20-(XY) Stage size □85mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number OSMS20-35(XY) OSMS20-85(XY)
Part Number (-M6) OSMS20-35(XY)-M6 OSMS20-85(XY)-M6
Part Number (-INCH) OSMS20-35(XY)-INCH OSMS20-85(XY)-INCH
Travel [mm] 35 85
Table Size [mm] 85×85 85×85
Feed Screw Ball screw diameter φ6mm, 1mm lead Ball screw diameter φ6mm, 1mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 2.2 2.6
Resolution
(Full) [μm/pulse] 2 2
(Half) [μm/pulse] 1 1
Accuracy MAX Speed [mm/sec] 25 25
Specifications Load Capacity [N] 68.6(7.0kgf) 68.6(7.0kgf)
Backlash [μm] 3 3
Orthogonality of Motion [μm] 5 5
Sensor Part Number
Micro photo sensor: GP1S092HCPIF(Sharp Corporation)
Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped Equipped
Proximity Origin Sensor None Equipped
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Motor
Sensor
(Reference) Precision Specifications of Single Axis Stage
Part Number OSMS20-35(X) OSMS20-85(X)
Accuracy
Specifications
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3664N4E10 (□24mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Positioning Accuracy [μm] 5 7
Positional Repeatability [μm] 3 3
Pitch [″/N・cm] 0.4 0.4
Moment
Stiffness
Yaw [″/N・cm] 0.25 0.25
Roll [″/N・cm] 0.35 0.35
Lost Motion [μm] 3 3
Parallelism [μm] 30 30
Running Parallelism [μm] 10 10
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G034
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9064
Outline Drawing
OSMS20-(XY)
Hexagon socket head cap screw M3×6…4 screws
85
75
67.2
Application
Systems
Optics &
Optical
Coatings
85
75
35 35
25 25
21-M4×0.7 depth 6
(depth 5)
25
25
70
85
E mounting hole
Travel F 85 Travel F
B
A
C D
Part Number A B C D E F
Holders
Bases
Manual
Stages
Travel F
A
85
Travel F
B
35.7
71.4
OSMS20-35(XY) 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS20-85(XY) 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Actuators
OSMS20-(XY)-M6
85
75
35 35
25 25
12-M4×0.7 depth 6
(depth 5)
25 25
70
85
9-M6×1 depth 6
(depth 5)
E mounting hole
Hexagon socket head cap screw M3×6…4 screws
85
75
67.2
Travel F 85 Travel F
B
A
C D
Part Number A B C D E F
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
OSMS20-(XY)-INCH
Travel F 85 Travel F
B
A
Hexagon socket head cap screw M3×6…4 screws
85
76.2
67.2
35.7
71.4
OSMS20-35(XY)-M6 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS20-85(XY)-M6 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Softwares
Stepping Motor
AC Servo Motor
Cables
85
76.2
34.93 34.93
25.4 25.4
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
12-8-32UNC depth 6
(depth 5)
25.4 25.4
69.85
85
6-1/4-20UNC depth 6
(depth 5)
Connector Pin Number
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
E mounting hole
Travel F 85 Travel F
B
A
Originside (ORG)
limit sensor
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Note 3
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
5-Phase Stepping
Motor
E-Phase
D-Phase
Travel F 85 Travel F
C-Phase
B
A phase
A
B-Phase
Sharp Corporation
Micro photo sensor
GP1S097HC1
35.7
71.4
C D
Part Number A B C D E F
OSMS20-35(XY)-INCH 183.5 60.8 34.5 76.2(25.4×3) 8-φ4.5 17.5
OSMS20-85(XY)-INCH 233.5 85.8 35 101.6(25.4×4) 10-φ4.5 42.5
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS20-35(XY)
OSMS20-85(XY)
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1 The motor side limit sensor is the + direction limit sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Note 3 OSMS20-35 is not fitted with proximity origin sensor.
13 and 14P are short-circuited
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G035

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS20-(Z) Stage size □85mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS20-35(Z) OSMS20-85(Z)
Part Number (-M6) OSMS20-35(Z)-M6 OSMS20-85(Z))-M6
Part Number (-INCH) OSMS20-35(Z)-INCH OSMS20-85(Z)-INCH
Travel [mm] 35 85
Table Size [mm] 85×85 85×85
Feed Screw Ball screw diameter φ6mm, 1mm lead Ball screw diameter φ6mm, 1mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 2.3 2.5
(Full) [μm/pulse] 2 2
Resolution
(Half) [μm/pulse] 1 1
MAX Speed [mm/sec] 5 5
Positioning Accuracy [μm] 10 20
Positional Repeatability [μm] 3 5
Load Capacity [N] 29.4 (3.0kgf)* 1 29.4 (3.0kgf)* 1
Accuracy
Pitch [″/N・cm] 0.8 0.8
Specifications
Moment
Yaw [″/N・cm] 0.5 0.5
Stiffness
Roll [″/N・cm] 0.7 0.7
Lost Motion [μm] 3 3
Backlash [μm] 3 3
Orthogonality of Motion [μm] 25 30
Pitch [″] / Yaw [″] 45/20 45/20
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Sensor
Origin Sensor Equipped Equipped
Proximity Origin Sensor None Equipped
*1 If you use the controller of 2.
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3664N4E10(□24mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Control System
Compatible Driver 1: SG-5M, SG-5MA 2: SG-55M, SG-55MA, SG-514MSC, SG-5151, KR-525M, MC-7514PCL
Compatible Controller 1: GSC-01, GSC-02 2: SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G036
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9065
Outline Drawing
OSMS20-(Z)
85
70
25 25
25 25
35 35
75
85
Hexagon socket head cap screw M4×8…4 screws
A
Travel C
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
21-M4×0.7 depth 6
(depth 5)
75
85
B
Travel C
8
10
5 75
85
4-4.5
mounting hole
Part Number A B C
OSMS20-35(Z) 217.7 95 17.5
OSMS20-85(Z) 267.7 120 42.5
Manual
Stages
Actuators
OSMS20-(Z)-M6
85
70
25 25
25
35
25
35
75
85
12-M4×0.7 depth 6
(depth 5)
9-M6×1 depth 6
(depth 5)
Hexagon socket head cap screw M4×8…4 screws
75
85
B
A
Travel C Travel C
8
10
5 75
85
4-4.5
mounting hole
Part Number A B C
OSMS20-35(Z)-M6 217.7 95 17.5
OSMS20-85(Z)-M6 267.7 120 42.5
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
OSMS20-(Z)-INCH
85
69.85
25.4 25.4
Hexagon socket head cap screw M4×8…4 screws
Travel C
Stepping Motor
AC Servo Motor
Cables
Piezo
25.4 25.4
34.93 34.93
76.2
85
A
12-8-32UNC depth 6
(depth 5)
6-1/4-20UNC depth 6
(depth 5)
76.2
85
B
Travel C
10
4.4
76.2
85
Part Number A B C
OSMS20-35(Z)-INCH 216.4 94.6 17.5
OSMS20-85(Z)-INCH 267.7 120 42.5
X Translation
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Connector Pin Number
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
5-Phase Stepping
Motor
E-Phase A phase
Originside (ORG)
limit sensor D-Phase
B-Phase
ON when shaded
C-Phase
Originside (NEAR)
limit sensor
ON when shaded
Note 3
Motor side (+)
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
Opposite side (−)
GP1S097HC1
limit sensor
ON when light enters
Note 1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS20-35(Z)
OSMS20-85(Z)
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1 The motor side limit sensor is the + direction limit sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Note 3 OSMS20-35 is not fitted with proximity origin sensor.
13 and 14P are short-circuited
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G037

Motion Control Products
Precision Motorized Stages with Built-in Compact Scale
OSMS(CS)20-(X) Stage size □85mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
The dedicated stage controllers (SHOT-302GS/304GS, HIT series) offer a full closed loop system
with high precision and high reliability.
Specifications
Part Number OSMS(CS)20-35(X) OSMS(CS)20-85(X)
Part Number (-M6) OSMS(CS)20-35(X)-M6 OSMS(CS)20-85(X)-M6
Part Number (-INCH) OSMS(CS)20-35(X)-INCH OSMS(CS)20-85(X)-INCH
Travel [mm] 35 85
Table Size [mm] 85×85 85×85
Feed Screw Ball screw diameterφ6mm, 1mm lead Ball screw diameter φ6mm, 1mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 1.4 1.6
Resolution
(Full) [μm/pulse] 2 2
(Half) [μm/pulse] 1 1
MAX Speed [mm/sec] 25 25
Positioning Accuracy [μm] 5 10
Positional Repeatability [μm] 2 2
Load Capacity [N] 78.4 (8.0kgf) 78.4 (8.0kgf)
Accuracy
Pitch [″/N・cm] 0.4 0.4
Specifications Moment
Stiffness
Yaw [″/N・cm] 0.25 0.25
Roll [″/N・cm] 0.35 0.35
Lost Motion [μm] 3 3
Backlash [μm] 3 3
Parallelism [μm] 30 30
Running Parallelism [μm] 10 10
Pitch [″] / Yaw [″] 30/20 30/20
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped Equipped
Proximity Origin Sensor None Equipped
Scale head Resolution [μm] 0.5 0.5
Motor / Sensor Specifications
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor
Motor Part Number
TS3664N4E10 (□24mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Sensor
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Scale head Power Voltage / Current Consumption DC5V±5% / 50mA
Compatible Cable
Cable
Driver Cable
Scale Cable
◦The stages enable high stiffness and high precision positioning
because their structure, which is strong against
momentum and combined load, is less susceptible to pitching,
rolling and yawing.
◦A compact scale is built in, but the installation space is
the same as that of other OSMS series when the travel
is the same.
Guide
▶Contact our International Sales Division for replacement of motors
or for stabilizing (drop-preventing) mechanism.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶Contact our International Sales Division to use the stage as an XY
axis or a Z axis stage.
D15D15A-CA
GSEF-CA-3
Compatible Driver / Controller
Compatible Driver −
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G038
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9066
Outline Drawing
OSMS(CS)20-(X)
Hexagon socket head cap screw M3×6…4 screws
C
B
A
85
75
35 35
25 25
21-M4×0.7 depth 6
( depth 5)
25 25
70
85
Application
Systems
Optics &
Optical
Coatings
Holders
H mounting hole
F
D
E
Bases
29
16
Travel G
Travel G
35.7
Part Number A B C D E F
OSMS(CS)20-35(X) 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS(CS)20-85(X) 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Manual
Stages
Actuators
OSMS(CS)20-(X)-M6
A
Hexagon socket head cap screw M3×6…4 screws
85
75
35 35
25 25
12-M4×0.7 depth 6
( depth 5)
Motoeized
Stages
Light
Sources
25 25
70
85
Index
E mounting hole
Travel F
29
16
D
B
C
Travel F
35.7
9-M6×1 depth 6
( depth 5)
Part Number A B C D E F
OSMS(CS)20-35(X)-M6 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS(CS)20-85(X)-M6 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Guide
Controllers/Drivers
Softwares
Stepping Motor
OSMS(CS)20-(X)-INCH
Hexagon socket head cap screw M3×6…4 screws
AC Servo Motor
A
85
76.2
34.93 34.93
25.4 25.4
12-8-32UNC depth 6
(depth 5)
Cables
Piezo
76.2
85
25.4 25.4
69.85
85
E mounting hole
D
B
C
6-1/4-20UNC depth 6
(depth 5)
Travel F
Travel F
Part Number A B C D E F
29
16
35.7
OSMS(CS)20-35(X)-INCH 183.5 60.8 34.5 76.2 (25.4×3) 8-φ4.5 17.5
OSMS(CS)20-85(X)-INCH 233.5 85.8 35 101.6 (25.4×4) 10-φ4.5 42.5
X Translation
Theta Rotation
Goniometer
Compatible Controllers / Drivers and Cables
Controller
Cable
Stage
Vacuum
Options
□40mm
□60mm
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
D15D15A-CA
G108
Cable
OSMS(CS)
□80mm
□85mm
□100mm
□120mm
Others
G102 − G103
GSEF-CA
G109
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G039

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS26-(X) Stage size □100mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS26-50(X) OSMS26-100(X) OSMS26-200(X) OSMS26-300(X)
Part Number (-M6) OSMS26-50(X)-M6 OSMS26-100(X)-M6 OSMS26-200(X)-M6 OSMS26-300(X)-M6
Part Number (-INCH) OSMS26-50(X)-INCH OSMS26-100(X)-INCH OSMS26-200(X)-INCH OSMS26-300(X)-INCH
Travel [mm] 50 100 200 300
Mechanical
Specifications
Accuracy
Specifications
Sensor
Table Size [mm]
(M6, INCH)
Feed Screw
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 2.2 2.7 3.8 4.0
(Full) [μm/pulse] 4 4 4 4
Resolution
(Half) [μm/pulse] 2 2 2 2
MAX Speed [mm/sec] 40 40 40 40
Positioning Accuracy [μm] 5 10 15 20
Positional Repeatability [μm] 3 3 6 6
Load Capacity [N] 117 (12.0kgf) 117 (12.0kgf) 117 (12.0kgf) 117 (12.0kgf)
Pitch [″/N・cm] 0.23 0.23 0.23 0.23
Moment
Stiffness
Yaw [″/N・cm] 0.12 0.12 0.12 0.12
Roll [″/N・cm] 0.2 0.2 0.2 0.2
Lost Motion [μm] 3 3 5 5
Backlash [μm] 3 3 3 3
Parallelism [μm] 50 50 50 50
Running Parallelism [μm] 10 10 10 20
Pitch [″] / Yaw [″] 25/20 25/20 30/25 30/25
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Limit Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Origin Sensor Equipped Equipped Equipped Equipped
Proximity Origin Sensor Equipped Equipped Equipped Equipped
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK525HPB-C4(□28mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G040
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9067
Outline Drawing
OSMS26-(X)
Hexagon socket head cap screw M4×8…6 screws
A
100
45 45
75
35 35
25 25
16 16
27-M4×0.7 depth 6
Application
Systems
Optics &
Optical
Coatings
Holders
E mounting hole
Travel F
D
B
Travel F
C
90
100
16 16
25 25
35 35
45 45
100
8-M3×0.5 depth 6
Part Number A B C D E F
OSMS26-50(X) 268.5 87 12 150 (25, 50×2, 25) 10-φ4.5 25
OSMS26-100(X) 318.5 112 12 200 (50×4) 10-φ4.5 50
Bases
Manual
Stages
34
19
43
OSMS26-200(X) 418.5 162 12 300 (50×6) 14-φ4.5 100
OSMS26-300(X) 518.5 212 12 400 (50×8) 18-φ4.5 150
Actuators
OSMS26-(X)-M6
Hexagon socket head cap screw M4×8…6 screws
A
120
50 50
75
35 35
25 25
16 16
17-M6×1 depth 6
10-M4×0.7 depth 6
Motoeized
Stages
Light
Sources
100
120
16 16
25 25
35 35
50 50
120
Index
E mounting hole
D
B
C
8-M3×0.5 depth 6
Part Number A B C D E F
Guide
Travel F
Travel F
OSMS26-50(X)-M6 268.5 87 12 150 (25, 50×2, 25) 10-φ4.5 25
OSMS26-100(X)-M6 318.5 112 12 200 (50×4) 10-φ4.5 50
Controllers/Drivers
34
19
OSMS26-(X)-INCH
Hexagon socket head cap screw M4×8…6 screws
A
43
OSMS26-200(X)-M6 418.5 162 12 300 (50×6) 14-φ4.5 100
OSMS26-300(X)-M6 518.5 212 12 400(50×8) 18-φ4.5 150
120
50.8 50.8
76.2
69.85
25.4 25.4 17-1/4-20UNC depth 6
15.88 15.88 10-8-32UNC depth 6
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
101.6
120
25.4 25.4
69.85
50.8 50.8
120
E mounting hole
Travel F
D
B
Travel F
C
15.88
Part Number
8-6-32UNC
A B
depth
C
6
D E F
OSMS26-50(X)-INCH 268.5 87 10.8 152.4 (25.4, 50.8×2, 25.4) 10-φ7 25
OSMS26-100(X)-INCH 318.5 112 10.4 203.2 (50.8×4) 10-φ7 50
34
19
43
OSMS26-200(X)-INCH 418.5 162 9.6 304.8 (50.8×6) 10-φ7 100
OSMS26-300(X)-INCH 518.5 212 8.8 406.4 (50.8×8) 10-φ7 150
X Translation
Theta Rotation
■Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
5-Phase Stepping
Motor
E phase
C phase
A phase
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
■Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS26-50(X)
OSMS26-100(X)
OSMS26-200(X)
OSMS26-300(X)
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G041

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS26-(XY) Stage size □100mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number OSMS26-50(XY) OSMS26-100(XY) OSMS26-200(XY) OSMS26-300(XY)
Part Number (-M6) OSMS26-50(XY)-M6 OSMS26-100(XY)-M6 OSMS26-200(XY)-M6 OSMS26-300(XY)-M6
Part Number (-INCH) OSMS26-50(XY)-INCH OSMS26-100(XY)-INCH OSMS26-200(XY)-INCH OSMS26-300(XY)-INCH
Travel [mm] 50 100 200 300
Mechanical
Specifications
Accuracy
Specifications
Sensor
Table Size [mm]
(M6, INCH)
Feed Screw
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 4.4 5.4 7.6 8.0
Resolution
(Full) [μm/pulse] 4 4 4 4
(Half) [μm/pulse] 2 2 2 2
MAX Speed [mm/sec] 40 40 40 40
Load Capacity [N] 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf)
Backlash [μm] 3 3 3 3
Orthogonality of Motion [μm] 5 5 10 5
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Limit Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Origin Sensor Equipped Equipped Equipped Equipped
Proximity Origin Sensor Equipped Equipped Equipped Equipped
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Motor
Sensor
(Reference) Precision Specifications of Single Axis Stage
Part Number OSMS26-50(X) OSMS26-100(X) OSMS26-200(X) OSMS26-300(X)
Accuracy
Specifications
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK525HPB-C4 (□28mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Positioning Accuracy [μm] 5 10 15 15
Positional Repeatability [μm] 3 3 6 6
Pitch [″/N・cm] 0.23 0.23 0.23 0.23
Moment
Stiffness
Yaw [″/N・cm] 0.12 0.12 0.12 0.12
Roll [″/N・cm] 0.2 0.2 0.2 0.2
Lost Motion [μm] 3 3 5 5
Parallelism [μm] 50 50 50 50
Running Parallelism [μm] 10 10 10 10
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G042
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9068
Outline Drawing
OSMS26-(XY)
Hexagon socket
head cap screw M4×8…6 screws
100
45 45
75
35 35
25 25
16 16
27-M4×0.7 depth 6
E mounting hole
100
90
79
Travel F
Application
Systems
Optics &
Optical
Coatings
Holders
16
16
25 25
35 35
45 45
100
8-M3×0.5 depth 6
OSMS26-(XY)-M6
Hexagon socket
head cap screw M4×8…6 screws
Travel F
A
100
120
100
79
Travel F
B
Travel F 100
B
A
43
86
C D
Part Number A B C D E F
OSMS26-50(XY) 268.5 87 12 150 (25, 50×2, 25) 10-φ7 25
OSMS26-100(XY) 318.5 112 12 200 (50×4) 10-φ7 50
OSMS26-200(XY) 418.5 162 12 300 (50×6) 10-φ7 100
OSMS26-300(XY) 518.5 212 12 400 (50×8) 10-φ7 150
Bases
Manual
Stages
Actuators
Motoeized
Stages
120
50 50
75
35 35
25 25
16 16
17-M6×1 depth 6
10-M4×0.7 depth 6
E mounting hole
Travel F
Light
Sources
Index
1616
25 25
35 35
50 50
120
A
8-M3×0.5 depth 6
Travel F
A
120
Travel F
B
120
Travel F
B
43
86
C D
Part Number A B C D E F
OSMS26-50(XY)-M6 268.5 87 12 150 (25, 50×2, 25) 10-φ7 25
OSMS26-100(XY)-M6 318.5 112 12 200 (50×4) 10-φ7 50
OSMS26-200(XY)-M6 418.5 162 12 300 (50×6) 10-φ7 100
OSMS26-300(XY)-M6 518.5 212 12 400 (50×8) 10-φ7 150
Guide
Controllers/Drivers
Softwares
Stepping Motor
OSMS26-(XY)-INCH
Hexagon socket
head cap screw M4×8…6 screws
120
50.8 50.8
76.2
69.85
25.4 25.4
15.88 15.88
17-1/4-20UNC depth 6
10-8-32UNC depth 6
15.8815.88
25.4 25.4
69.85
50.8 50.8
120
8-6-32UNC depth 6
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
E mounting hole
Travel F
A
120
101.6
79
120
5-Phase Stepping
Motor
E phase
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
Travel F
B
C phase
A phase
Travel F 120 Travel F
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
B
A
43
86
C D
Part Number A B C D E F
OSMS26-50(XY)-INCH 268.5 87 10.8 152.4 (25.4, 50.8×2, 25.4) 10-φ7 25
OSMS26-100(XY)-INCH 318.5 112 10.4 203.2 (50.8×4) 10-φ7 50
OSMS26-200(XY)-INCH 418.5 162 9.6 304.8 (50.8×6) 10-φ7 100
OSMS26-300(XY)-INCH 518.5 212 8.8 406.4 (50.8×8) 10-φ7 150
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS26-50(XY)
OSMS26-100(XY)
OSMS26-200(XY)
OSMS26-300(XY)
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G043

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS26-(Z) Stage size □100mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS26-50(Z) OSMS26-100(Z) OSMS26-200(Z) OSMS26-300(Z)
Part Number (-M6) OSMS26-50(Z)-M6 OSMS26-100(Z)-M6 OSMS26-200(Z)-M6 OSMS26-300(Z)-M6
Part Number (-INCH) OSMS26-50(Z)-INCH OSMS26-100(Z)-INCH OSMS26-200(Z)-INCH OSMS26-300(Z)-INCH
Travel [mm] 50 100 200 150
Mechanical
Specifications
Accuracy
Specifications
Sensor
Table Size [mm]
(M6, INCH)
Feed Screw
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 4.4 4.9 7.2 7.4
(Full) [μm/pulse] 4 4 4 4
Resolution
(Half) [μm/pulse] 2 2 2 2
MAX Speed [mm/sec] 10 10 10 10
Positioning Accuracy [μm] 15 20 30 40
Positional Repeatability [μm] 3 3 6 6
Load Capacity [N] 39.2 (4.0kgf) 39.2 (4.0kgf) 39.2 (4.0kgf) 39.2 (4.0kgf)
Pitch [″/N・cm] 0.4 0.4 0.4 0.4
Moment
Stiffness
Yaw [″/N・cm] 0.15 0.15 0.15 0.15
Roll [″/N・cm] 0.20 0.20 0.20 0.20
Lost Motion [μm] 3 3 5 5
Backlash [μm] 3 3 3 3
Orthogonality of Motion [μm] 30 40 50 40
Pitch [″] / Yaw [″] 50/20 50/20 55/20 55/20
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Limit Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Origin Sensor Equipped Equipped Equipped Equipped
Proximity Origin Sensor Equipped Equipped Equipped Equipped
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK525HPB-C4 (□28mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G044
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9069
Outline Drawing
OSMS26-(Z)
100
45 45
75
35 35
27-M4×0.7 depth 6
25 25
16 16
Hexagon socket head cap screw M4×8…6 screws
Travel C
OSMS26-(Z)-M6
120
50 50
75
35 35
25 25
16 16 17-M6×1 depth 6
10-M4×0.7 depth 6
Hexagon socket head cap screw M4×8…6 screws
Travel C
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
16
25
35
45
16
25
35
45
100
A
16 16
25 25
35 35
50 50
120
A
Manual
Stages
8-M3×0.5 depth 6
B
Travel C
10
8-M3×0.5 depth 6
B
Travel C
10
Actuators
Motoeized
Stages
90 5 90
100
100
100
120
10
100
120
Light
Sources
Part Number A B C
OSMS26-50(Z) 306 125 25
OSMS26-100(Z) 356.5 150 50
OSMS26-200(Z) 463 200 100
OSMS26-300(Z) 556.5 250 150
Part Number A B C
OSMS26-50(Z)-M6 306 125 25
OSMS26-100(Z)-M6 356.5 150 50
OSMS26-200(Z)-M6 463 200 100
OSMS26-300(Z)-M6 556.5 250 150
Index
Guide
OSMS26-(Z)-INCH
Hexagon socket head cap screw M4×8…6 screws
Controllers/Drivers
Softwares
120
50.8 50.8
76.2
69.85
25.4 25.4
15.88 15.88
17-1/4-20UNC depth 6
10-8-32UNC depth 6
Travel C
Stepping Motor
AC Servo Motor
Cables
Piezo
15.88
25.4 25.4
69.85
50.8 50.8
120
A
8-6-32UNC depth 6
B
Travel C
Part Number A B C
101.6
120
10
9.2
101.6
120
OSMS26-50(Z)-INCH 305.6 124.6 25
OSMS26-100(Z)-INCH 356.5 150 50
OSMS26-200(Z)-INCH 463 199.2 100
OSMS26-300(Z)-INCH 556.5 250 150
X Translation
Theta Rotation
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
5-Phase Stepping
Motor
E phase
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS26-50(Z)
OSMS26-100(Z)
OSMS26-200(Z)
OSMS26-300(Z)
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G045

Motion Control Products
Precision Motorized Stages with Built-in Compact Scale
OSMS(CS)26-(X) Stage size □100mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
The dedicated stage controllers (SHOT-302GS/304GS, HIT series) offer a full closed loop system
with high precision and high reliability.
Specifications
Part Number OSMS(CS)26-100(X) OSMS(CS)26-200(X)
Part Number (-M6) OSMS(CS)26-100(X)-M6 OSMS(CS)26-200(X)-M6
Part Number (-INCH) OSMS(CS)26-100(X)-INCH OSMS(CS)26-200(X)-INCH
Travel [mm] 100 200
Table Size [mm]
(M6, INCH)
100×100
(120×120)
100×100
(120×120)
Mechanical
Specifications
Feed Screw
Positioning Slide
Ball screw diameter φ8mm, 2mm lead
Outer rail structure
Ball screw diameter φ8mm, 2mm lead
Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 3.2 4.3
Resolution
(Full) [μm/pulse] 4 4
(Half) [μm/pulse] 2 2
MAX Speed [mm/sec] 40 40
Positioning Accuracy [μm] 10 15
Positional Repeatability [μm] 2 3
Load Capacity [N] 117 (12.0kgf) 117 (12.0kgf)
Accuracy
Pitch [″/N・cm] 0.23 0.23
Specifications Moment
Stiffness
Yaw [″/N・cm] 0.12 0.12
Roll [″/N・cm] 0.2 0.2
Lost Motion [μm] 3 5
Backlash [μm] 3 3
Parallelism [μm] 50 50
Running Parallelism [μm] 10 10
Pitch [″] / Yaw [″] 25/20 30/25
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped Equipped
Proximity Origin Sensor Equipped Equipped
Scale head Resolution [μm] 0.5 0.5
Motor / Sensor Specifications
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor
Motor Part Number
PK525HPB-C4 (□28mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Sensor
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Scale head Power Voltage / Current Consumption DC5V±25% / 50mA
Compatible Cable
Cable
Driver Cable
Scale Cable
◦The stages enable high stiffness and high precision positioning
because their structure, which is strong against
momentum and combined load, is less susceptible to pitching,
rolling and yawing.
◦A compact scale is built in, but the installation space is
the same as that of other OSMS series when the travel
is the same.
Guide
▶Contact our International Sales Division for replacement of motors
or for stabilizing (drop-preventing) mechanism.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶Contact our International Sales Division to use the stage as an XY
axis or a Z axis stage.
D15D15A-CA
GSEF-CA-3
Compatible Driver / Controller
Compatible Driver −
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G046
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9070
Outline Drawing
OSMS26-(X)
Hexagon socket head cap screw M4×8…6 screws
A
100
45 45
75
35 35
25 25
16 16
27-M4×0.7 depth 6
Application
Systems
Optics &
Optical
Coatings
Holders
E mounting hole
Travel F
D
B
Travel F
C
90
100
16 16
25 25
35 35
45 45
100
8-M3×0.5 depth 6
Part Number A B C D E F
Bases
Manual
Stages
34
19
43
OSMS(CS)26-100(X) 318.5 112 12 200 (50×4) 10-φ4.5 50
OSMS(CS)26-200(X) 418.5 162 12 300 (50×6) 14-φ4.5 100
Actuators
OSMS26-(X)-M6
Hexagon socket head cap screw M4×8…6 screws
A
120
50 50
75
35 35
25 25
16 16
17-M6×1 depth 6
10-M4×0.7 depth 6
Motoeized
Stages
Light
Sources
100
120
16 16
25 25
35 35
50 50
120
Index
E mounting hole
D
B
C
8-M3×0.5 depth 6
Guide
34
19
OSMS26-(X)-INCH
Travel F
Travel F
Hexagon socket head cap screw M4×8…6 screws
A
43
Part Number A B C D E F
OSMS(CS)26-100(X)-M6 318.5 112 12 200 (50×4) 10-φ4.5 50
OSMS(CS)26-200(X)-M6 418.5 162 12 300 (50×6) 14-φ4.5 100
120
50.8 50.8
76.2
69.85
25.4 25.4 17-1/4-20UNC depth 6
15.88 15.88 10-8-32UNC depth 6
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
101.6
120
25.4 25.4
69.85
50.8 50.8
120
E mounting hole
D
B
C
15.88
8-6-32UNC depth 6
Travel F
Travel F
34
19
43
Part Number A B C D E F
OSMS(CS)26-100(X)-INCH 318.5 112 10.4 203.2 (50.8×4) 10-φ7 50
OSMS(CS)26-200(X)-INCH 418.5 162 9.6 304.8 (50.8×6) 10-φ7 100
X Translation
Theta Rotation
Goniometer
■Compatible Controllers / Drivers and Cables
Controller
Cable
Stage
Vacuum
Options
□40mm
□60mm
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
D15D15A-CA
G108
Cable
OSMS(CS)
□80mm
□85mm
□100mm
□120mm
Others
G102 − G103
GSEF-CA
G109
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G047

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS33-(X) Stage size □120mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS33-300(X) OSMS33-500(X)
Part Number (-M6) OSMS33-300(X)-M6 OSMS33-500(X)-M6
Part Number (-INCH) OSMS33-300(X)-INCH OSMS33-500(X)-INCH
Travel [mm] 300 500
Table Size [mm] 120×120 120×120
Feed Screw Ball screw diameter φ10mm, 10mm lead Ball screw diameter φ10mm, 10mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 7.0 8.6
(Full) [μm/pulse] 20 20
Resolution
(Half) [μm/pulse] 10 10
MAX Speed [mm/sec] 120 120
Positioning Accuracy [μm] 25 25
Positional Repeatability [μm] 6 6
Load Capacity [N] 196 (20.0kgf) 196 (20.0kgf)
Accuracy
Pitch [″/N・cm] 0.12 0.12
Specifications Moment
Stiffness
Yaw [″/N・cm] 0.08 0.08
Roll [″/N・cm] 0.1 0.1
Lost Motion [μm] 5 5
Backlash [μm] 3 3
Parallelism [μm] 50 50
Running Parallelism [μm] 15 25
Pitch [″] / Yaw [″] 40/25 40/25
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Sensor
Origin Sensor Equipped Equipped
Proximity Origin Sensor Equipped Equipped
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3667N43E967 (□42mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G048
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9071
Outline Drawing
OSMS33-(X)
Hexagon socket head cap screw M5×10…4 screws
A
120
50 50
35 35
25 25
16-M4×0.7 depth 8
Application
Systems
Optics &
Optical
Coatings
100
120
25 25
35 35
50 50
120
Holders
E mounting hole
D
B
C
9-M6×1 depth 8
Bases
48.7
26
Travel F
Travel F
56.7
Part Number A B C D E F
OSMS33-300(X) 530.3 211.8 61.8 300 (50×6) 14-φ6.5 150
OSMS33-500(X) 730.3 311.8 61.8 500 (50×10) 22-φ6.5 250
Manual
Stages
Actuators
OSMS33-(X)-M6
Hexagon socket head cap screw M5×10…4 screws
A
120
50 50
35 35
25 25
8-M4×0.7 depth 8
8-M6×1 depth 8
Motoeized
Stages
E mounting hole
D
B
C
100
120
25 25
35 35
50 50
120
9-M6×1 depth 8
Light
Sources
Index
Travel F
Travel F
Part Number A B C D E F
Guide
48.7
26
56.7
OSMS33-300(X)-M6 530.3 211.8 61.8 300 (50×6) 14-φ6.5 150
OSMS33-500(X)-M6 730.3 311.8 61.8 500 (50×10) 22-φ6.5 250
Controllers/Drivers
Softwares
OSMS33-(X)-INCH
Hexagon socket head cap screw M5×10…4 screws
A
120
50.8 50.8
34.93 34.92
25.4 25.4
8-8-32UNC depth 8
8-1/4-20UNC depth 8
Stepping Motor
AC Servo Motor
Cables
101.6
120
25.4
34.925
50.8
25.4
34.925
50.8
120
Piezo
E mounting hole
D
B
C
9-1/4-20UNC depth 8
Travel F
Travel F
Part Number A B C D E F
48.7
26
56.7
OSMS33-300(X)-INCH 530.3 211.8 59.4 304.8 (50.8×6) 14-φ7 150
OSMS33-500(X)-INCH 730.3 311.8 57.8 508 (50.8×10) 22-φ7 250
X Translation
Theta Rotation
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
6
1
2
3
4
5
6
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND (0V)
7 7 ORG
8 8
+VS
9 9
5 − 24VDC
RESERVE
10 10 N.C. (not used)
11 11 LS (+)
12 12 LS (−)
13 13 N.C. (not used)
14 14 NEAR
15 15 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
Compatible Controllers / Drivers and Cables
Controller
SHOT-702 [2 axes]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G100 − G105
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
OSMS33‐300(X)
OSMS33‐500(X)
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G049

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS33-(XY) Stage size □120mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number OSMS33-300(XY) OSMS33-500(XY)
Part Number (-M6) OSMS33-300(XY)-M6 OSMS33-500(XY)-M6
Part Number (-INCH) OSMS33-300(XY)-INCH OSMS33-500(XY)-INCH
Travel [mm] 300 500
Table Size [mm] 120×120 120×120
Feed Screw Ball screw diameter φ10mm, 10mm lead Ball screw diameter φ10mm, 10mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 14.0 17.2
Resolution
(Full) [μm/pulse] 20 20
(Half) [μm/pulse] 10 10
Accuracy MAX Speed [mm/sec] 80 80
Specifications Load Capacity [N] 156 (16.0kgf) 156 (16.0kgf)
Backlash [μm] 3 3
Orthogonality of Motion [μm] 5 5
Sensor Part Number
Micro photo sensor: GP1S092HCPIF(Sharp Corporation)
Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None
Proximity Origin Sensor None None
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Motor
Sensor
(Reference) Precision Specifications of Single Axis Stage
Part Number OSMS33-300(X) OSMS33-500(X)
Accuracy
Specifications
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3667N43E967 (□42mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
40mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Positioning Accuracy [μm] 15 20
Positional Repeatability [μm] 6 6
Pitch [″/N・cm] 0.12 0.12
Moment
Stiffness
Yaw [″/N・cm] 0.08 0.08
Roll [″/N・cm] 0.08 0.08
Lost Motion [μm] 5 5
Parallelism [μm] 50 50
Running Parallelism [μm] 10 10
Compatible Driver / Controller
Compatible Driver SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G050
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9072
Outline Drawing
OSMS33-(XY)
Hexagon socket
head cap screw M5×10…4 screws
E mounting hole
120
100
89
Application
Systems
Optics &
Optical
Coatings
120
50 50
35 35
16-M4×0.7depth 8
25 25
25
25
35 35
50 50
120
9-M6×1 depth 8
OSMS33-(XY)-M6
Hexagon socket
head cap screw M5×10…4 screws
120
50 50
8-M4×0.7 depth 8
35 35
25 25 8-M6×1 depth 8
25 25
35 35
50 50
120
9-M6×1 depth 8
OSMS33-(XY)-INCH
Hexagon socket
head cap screw M5×10…4 screws
120
50.8 50.8
34.925 34.925
8-8-32UNC depth 8
25.4 25.4 8-1/4-20UNC depth 8
25.4
34.925
50.8 50.8
120
9-1/4-20UNC depth 8
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
6
1
2
3
4
5
6
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND (0V)
7 7 ORG
8 8
+VS
9 9
5 − 24VDC
RESERVE
10 10 N.C. (not used)
11 11 LS (+)
12 12 LS (−)
13 13 N.C. (not used)
14 14 NEAR
15 15 N.C. (not used)
Note 2
Travel 250 120 Travel 250
B
A
E mounting hole
Travel F
E mounting hole
Travel F
A
120
100
89
120
120
101.6
89
Travel F
B
120 Travel F
B
A
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
5-Phase Stepping
Motor
E phase
C phase
Travel F
120
Travel F
Travel F 120 Travel F
120 Travel F
Travel F
A phase
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
B
B
B
A
A
A
56.7
113.4
56.7
113.4
56.7
113.4
C D
C D
C D
Part Number A B C D E F
OSMS33-300(XY) 530.3 211.8 61.8 300 (50×6) 14-φ7 150
OSMS33-500(XY) 730.3 311.8 61.8 500 (50×10) 22-φ7 250
Part Number A B C D E F
OSMS33-300(XY)-M6 530.3 211.8 61.8 300 (50×6) 14-φ7 150
OSMS33-500(XY)-M6 730.3 311.8 61.8 500 (50×10) 22-φ7 250
Part Number A B C D E F
OSMS33-300(XY)-INCH 530.3 211.8 59.4 304.8 (50.8×6) 14-φ7 150
OSMS33-500(XY)-INCH 730.3 311.8 57.8 508 (50.8×10) 22-φ7 250
Compatible Controllers / Drivers and Cables
Controller
SHOT-702 [2 axes]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G100 − G105
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
OSMS33‐300(XY)
OSMS33‐500(XY)
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G051

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS33-(Z)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS33-300(Z) OSMS33-500(Z)
Part Number (-M6) OSMS33-300(Z)-M6 OSMS33-500(Z)-M6
Part Number (-INCH) OSMS33-300(Z)-INCH OSMS33-500(Z)-INCH
Travel [mm] 300 500
Table Size [mm] 120×120 120×120
Mechanical
Feed Screw Ball screw diameter φ10mm, 10mm lead Ball screw diameter φ10mm, 10mm lead
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 14.5 16.1
(Full) [μm/pulse] 20 20
Resolution
(Half) [μm/pulse] 10 10
MAX Speed [mm/sec] 30 30
Positioning Accuracy [μm] 50 50
Positional Repeatability [μm] 6 6
Accuracy
Load Capacity [N] 68.6 (7.0kgf) 68.6 (7.0kgf)
Specifications
Pitch [″/N・cm] 0.2 0.2
Moment
Stiffness
Yaw [″/N・cm] 0.15 0.15
Roll [″/N・cm] 0.15 0.15
Lost Motion [μm] 5 5
Backlash [μm] 3 3
Orthogonality of Motion [μm] 30 35
Pitch [″] / Yaw [″] 50/25 55/25
Sensor Part Number
Micro photo sensor: GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Sensor
Origin Sensor None None
Proximity Origin Sensor None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3667N43E967 (□42mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
40mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Control
System
Compatible Driver
Compatible Controller
SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G052
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9073
Outline Drawing
OSMS33-(Z)
Hexagon socket head cap screw M4×8…6 screws
OSMS33-(Z)-M6
Hexagon socket head cap screw M4×8…6 screws
Application
Systems
Optics &
Optical
Coatings
120
50 50
35 35
25 25
25 25
35 35
50 50
120
16-M4×0.7 depth 8
9-M6×1 depth 8
B
A
Travel C Travel C
20
120
50 50
35 35
25 25
25 25
35 35
50 50
9-M6×1 depth 8
120
8-M4×0.7 depth 8
8-M6×1 depth 8
B
A
Travel C Travel C
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
100 10 100
120
120
100
120
10 100
120
Light
Sources
Part Number A B C
OSMS33-300(Z) 620 250 150
OSMS33-500(Z) 768.5 350 250
Part Number A B C
OSMS33-300(Z)-M6 620 250 150
OSMS33-500(Z)-M6 768.5 350 250
Index
OSMS33-(Z)-INCH
Hexagon socket head cap screw M4×8…6 screws
Guide
Controllers/Drivers
Softwares
120
50.8 50.8
34.925 34.925
25.4 25.4
25.4 25.4
34.93 34.93
50.8 50.8
120
8-8-32UNC depth 8
8-1/4-20UNC depth 8
9-1/4-20UNC depth 8
B
A
Travel C Travel C
Stepping Motor
AC Servo Motor
Cables
Piezo
Part Number A B C
101.6
120
9.2
101.6
120
OSMS33-300(Z)-INCH 620 248.4 150
OSMS33-500(Z)-INCH 768.5 350 250
X Translation
Theta Rotation
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
6
1
2
3
4
5
6
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND (0V)
7 7 ORG
8 8
+VS
9 9
5 − 24VDC
RESERVE
10 10 N.C. (not used)
11 11 LS (+)
12 12 LS (−)
13 13 N.C. (not used)
14 14 NEAR
15 15 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
Compatible Controllers / Drivers and Cables
Controller
SHOT-702 [2 axes]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G100 − G105
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
OSMS33‐300(Z)
OSMS33‐500(Z)
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G053

Motion Control Products
Precision Motorized Stages with Built-in Compact Scale
OSMS(CS)33-(X) Stage size □120mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
The dedicated stage controllers (SHOT-302GS/304GS, HIT series) offer a full closed loop system
with high precision and high reliability.
Specifications
Part Number OSMS(CS)33-300(X) OSMS(CS)33-500(X)
Part Number (-M6) OSMS(CS)33-300(X)-M6 OSMS(CS)33-500(X)-M6
Part Number (-INCH) OSMS(CS)33-300(X)-INCH OSMS(CS)33-500(X)-ICH
Travel [mm] 300 500
Table Size [mm] 120×120 120×120
Feed Screw Ball screw diameter φ10mm, 10mm lead Ball screw diameter φ10mm, 10mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 7.8 9.6
(Full) [μm/pulse] 20 20
Resolution
(Half) [μm/pulse] 10 10
MAX Speed [mm/sec] 100 100
Positioning Accuracy [μm] 25 25
Positional Repeatability [μm] 5 5
Load Capacity [N] 196 (20.0kgf) 196 (20.0kgf)
Accuracy
Pitch [″/N・cm] 0.12 0.12
Specifications Moment
Stiffness
Yaw [″/N・cm] 0.08 0.08
Roll [″/N・cm] 0.1 0.1
Lost Motion [μm] 5 5
Backlash 3 3
Parallelism [μm] 50 50
Running Parallelism [μm] 15 25
Pitch [″] / Yaw [″] 40/25 40/25
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped Equipped
Proximity Origin Sensor Equipped Equipped
Scale head Resolution [μm] 0.5 0.5
Motor / Sensor Specifications
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor
Motor Part Number
TS3667N43E967 (□42mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Sensor
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Scale head Power Voltage / Current Consumption DC5V±5% / 100mA
Compatible Cable
Cable
Driver Cable
Scale Cable
◦The stages enable high stiffness and high precision positioning
because their structure, which is strong against
momentum and combined load, is less susceptible to pitching,
rolling and yawing.
◦A compact scale is built in, but the installation space is
the same as that of other OSMS series when the travel
is the same.
Guide
▶Contact our International Sales Division for replacement of motors
or for stabilizing (drop-preventing) mechanism.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶Contact our International Sales Division to use the stage as an XY
axis or a Z axis stage.
D15D15A-CA
GSEF-CA-3
Compatible Driver / Controller
Compatible Driver −
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G054
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9074
Outline Drawing
OSMS(CS)33-(X)
Hexagon socket head cap screw M5×10…4 screws
A
120
50 50
35 35
25 25
16-M4×0.7 depth 8
Application
Systems
Optics &
Optical
Coatings
100
120
25 25
35 35
50 50
120
Holders
E mounting hole
D
B
C
9-M6×1 depth 8
Bases
48.7
26
Travel F
Travel F
56.7
Part Number A B C D E F
OSMS(CS)33-300(X) 530.3 211.8 61.8 300 (50×6) 14-φ7 150
OSMS(CS)33-500(X) 730.3 311.8 61.8 500 (5×10) 22-φ7 250
Manual
Stages
Actuators
OSMS(CS)33-(X)-M6
Hexagon socket head cap screw M5×10…4 screws
A
120
50 50
35 35
25 25
8-M4×0.7 depth 8
8-M6×1 depth 8
Motoeized
Stages
E mounting hole
D
B
C
100
120
25 25
35 35
50 50
120
9-M6×1 depth 8
Light
Sources
Index
Travel F
Travel F
Part Number A B C D E F
Guide
48.7
26
56.7
OSMS(CS)33-300(X)-M6 530.3 211.8 61.8 300 (50×6) 14-φ7 150
OSMS(CS)33-500(X)-M6 730.3 311.8 61.8 500 (5×10) 22-φ7 250
Controllers/Drivers
Softwares
OSMS(CS)33-(X)-INCH
Hexagon socket head cap screw M5×10…4 screws
A
120
50.8 50.8
34.93 34.92
25.4 25.4
8-8-32UNC depth 8
8-1/4-20UNC depth 8
Stepping Motor
AC Servo Motor
Cables
101.6
120
25.4
34.925
50.8
25.4
34.925
50.8
120
Piezo
E mounting hole
D
B
C
9-1/4-20UNC depth 8
Travel F
Travel F
Part Number A B C D E F
48.7
26
56.7
OSMS(CS)33-300(X)-INCH 530.3 211.8 59.4 304.8 (50.8×6) 14-φ7 150
OSMS(CS)33-500(X)-INCH 730.3 311.8 57.8 508 (50.8×10) 22-φ7 250
X Translation
Theta Rotation
Goniometer
Compatible Controllers / Drivers and Cables
Controller
Cable
Stage
Vacuum
Options
□40mm
□60mm
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
D15D15A-CA
G108
Cable
OSMS(CS)
□80mm
□85mm
□100mm
□120mm
Others
G102 − G103
GSEF-CA
G109
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G055

Motion Control Products
SGMV series Translation Motorized Stages - AC servo Motor
SGMV
High precision/high stiffness stages driven by AC servo motor.
Application
Systems
Optics &
Optical
Coatings
◦The stage structure unifies the functions of precision
linear guide and precision ball screw, places the linear
guide, inner block (table) and drive ball screw at the
same position, and uses high stiffness U-shape outer
rail for the guide to offer small footprint with large load
rating.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Specifications
Part Number SGMV20-35(X) SGMV20-80(X) SGMV26-100(X) SGMV26-200(X)
Travel [mm] 35 80 100 200
Table Size [mm] 60×60 60×60 80×80 80×80
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ8mm,
2mm lead
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 0.7 1 1.7 2.5
(Full) [μm/pulse] 2 2 4 4
Resolution
(Half) [μm/pulse] 1 1 2 2
MAX Speed [mm/sec] 35 80 130 130
Positioning Accuracy [μm] 7 10 10 15
Positional Repeatability [μm] 4 5 5 6
Load Capacity [N] 80 (8kgf) 80 (8kgf) 130 (13kgf) 130 (13kgf)
Pitch [″/N・cm] 0.4 0.4 0.23 0.23
Moment
Stiffness
Yaw [″/N・cm] 0.25 0.25 0.12 0.12
Roll [″/N・cm] 0.35 0.35 0.2 0.2
Lost Motion [μm] 2 2 2 2
Backlash [μm] 2 2 2 2
Parallelism [μm] 30 30 50 50
Running Parallelism [μm] 10 10 10 10
Pitch [″] / Yaw [″] 30/20 30/20 30/20 30/25
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co.,Ltd.)
Limit Sensor
Equipped (NORMAL
CLOSE)
Equipped (NORMAL
CLOSE)
Equipped (NORMAL
CLOSE)
Equipped (NORMAL
CLOSE)
Origin Sensor None None None None
Proximity Origin Sensor None None None None
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Type
Motor
Motor Part Number
Step Angle
Power Voltage
Current Consumption
Sensor
Control Output
Output Logic
AC servo Motor 10W (YASKAWA Electric Corporation)
SGMMV-A1E2A21 (□25mm)
0.0318N・m
DC5 - 24V±10%
30mA or lower (15mA or lower per sensor)
NPN open collector output DC30V or lower, 50mA or lower
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SGDV-2R9EP1A
Control System
Compatible Controller
PGC-04
G056
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9075
Outline Drawing
SGMV20-35(X)
Hexagon socket head cap screw M3×6…6 screws
(223)
60
25 25
16 16
SGMV20-80(X)
Hexagon socket
head cap screw
M3×6…6 screws
(273)
(88.5)
60
25 25
16 16
Application
Systems
Optics &
Optical
Coatings
Encoder cable
Motor cable
Limit sensor cable
(78.4)
Travel 17.5
18
25
16 16
25
8-M4 depth 6
8-M3 depth 6
Travel 17.5
60
Encoder cable
Motor cable
Limit sensor cable
(78.4)
Travel 40 Travel 40
25
18
16 16
25
8-M4 depth 6
8-M3 depth 6
60
Holders
Bases
Manual
Stages
(26.6)
15
(34.5)
14 32 14
2
27
2×4-3.4mounting hole
6.5 counterbore
44
2
27
1
2×5-3.4 mounting hole
16 16 44 29.5 6.5 counterbore
Actuators
SGMV26-100(X)
Hexagon socket
head cap screw M4×8…6 screws
(337)
80
70
25 25
32
(115.6)
Motoeized
Stages
Light
Sources
Encoder cable
(88.4)
16
25
16
25 25
70
80
Index
Motor cable
4-M4 depth 6
8-M4 depth 6
4-M3 depth 6
Travel 50 Travel 50
Guide
Limit sensor cable
Controllers/Drivers
0.2 24.8
55 25 25 55 (36)
2
33
2×5-4.5 mounting hole
8 counterbore
Softwares
Stepping Motor
SGMV26-200(X)
Hexagon socket
head cap screw M4×8…6 screws
(437)
80
70
25 25
32
(165.6)
AC Servo Motor
Cables
Piezo
Encoder cable
Motor cable
Limit sensor cable
Controller / Servo Pack
Part Number
PGC-04
SGDV-2R9EP1A
Cable
(88.4)
Products Name
4-M4 depth 6
Pulus Generating Controller
Servo Packs for Driving Servo Motor
PGC-04
Travel 100
SGDV-2R9EP1A
0.2 24.8
80 15 50 15
Part Number
Cable Length
Controller Side Stage Side Servo Pack Side
[m]
PGC-ACS-2 10126-3000PE DE-957S-NR 10126-3000PE 2
JZSP-CF1M00-03E − − − 3
JZSP-CMP00-03E − − − 3
JZSP-CF1G00-01-E − − − 1
8-M4 depth 6
4-M3 depth 6
Travel 100
80 (46)
2
33
25
16
16
25 25
70
80
2×6-4.5 mounting hole
8 counterbore
Connection Diagram
1
2
3
4
5
6
7
8
9
Note 2
1
2
3
4
5
6
7
8
9
Connector Pin Number
Japan Ariation Electronics Industry, Ltd.
DE-9P-NR
VS
5 − 24VDC
GND (0V)
LS (+)
LS (−)
N.C. (not used)
N.C. (not used)
N.C. (not used)
N.C. (not used)
N.C. (not used)
Encoder cable* 2
Cable Length 280mm
Plug: 55102-0600 (Molex Japan Co., Ltd.)
Motor cable* 2
Cable Length 280mm
Receptacle: 43025-0400 (Molex Japan Co., Ltd.)
Limit sensor cable
Cable Length 280mm
D-sub9Pin (JAE)
Connector DE-9P-NR
Hood DE-C8-J9-F1-1R
*2
Servo Pack SGDV-2R9EP1A
Motor side (+)
limit sensor
ON when light enters
Note 1
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Opposite side (−)
limit sensor
ON when light enters
Note 1
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with origin and proximity origin sensors.
Limit sensors are used as origin detection sensors.
Note 2 Compatible cable connector:
Japan Ariation Electronics Industry, Ltd. DE-C8-J9-F1-1R
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G057

Motion Control Products
Thin Long Travel Stage
KLSA/KLSS
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
These stages are thin but ensure long travel.
These thin motorized stages can minimize the stage height even when used in combination.
◦Four linear guide blocks are located at optimal
positions to improve positional repeatability.
◦To place importance on price, KLSA which has an
aluminum body is recommended. To place importance
on rigidity, KLSS which has a steel body is
recommended.
Guide
▶Please contact us when assembled into XYZ axis or use in
reversion on the ceiling or vertical direction.
▶Opposite model or various motor changes are optionally available.
G030
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number KLSA-100X KLSS-100X KLSA-200X KLSS-200X
Travel [mm] 100 100 200 200
Table Size [mm] 80×80 80×80 120×120 120×120
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ8mm,
2mm lead
Ball screw diameter φ8mm,
2mm lead
Ball screw diameter φ10mm,
5mm lead
Ball screw diameter φ10mm,
5mm lead
Positioning Slide Liner guide Liner guide Liner guide Liner guide
Stage Material Aluminum Steel Aluminum Steel
Finish Black anodized Black chromium oxide Black anodized Black chromium oxide
Weight [kg] 2.2 3.5 5.1 7.7
(Full) [μm/pulse] 4 4 10 10
Resolution
(Half) [μm/pulse] 2 2 5 5
MAX Speed [mm/sec] 30 30 50 50
Positioning Accuracy [μm] 15 15 20 20
Positional Repeatability [μm] ±1 ±1 ±1 ±1
Load Capacity [N] 147 (15kgf) 147 (15kgf) 294 (30kgf) 294 (30kgf)
Pitch [″/N・cm] 0.05 0.05 0.02 0.02
Moment
Stiffness
Yaw [″/N・cm] 0.05 0.05 0.02 0.02
Roll [″/N・cm] 0.1 0.1 0.02 0.02
Lost Motion [μm] 4 4 4 4
Backlash [μm] 1 1 1 1
Parallelism [μm] 50 50 50 50
Orthogonality of Motion [μm] 10 10 10 10
Pitch [″] / Yaw [″] 20/15 20/15 40/20 40/20
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co.,Ltd.) Limit sensor, origin sensor
Limit Sensor Equipped Equipped Equipped Equipped
Origin Sensor Equipped Equipped Equipped Equipped
Proximity Origin Sensor None None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK545-NBW (□42mm)
Step Angle 0.72°
Power Voltage DC+5V - +24V
Current Consumption
45mA or lower (15mA or lower per sensor)
Control Output
NPN open collector output 50mA
Output Logic
In the case of light shielded ,output transistor OFF (No conduction): Limit sensor
In the case of light shielded ,output transistor ON (Conduction): Origin sensor
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G058
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9076
Outline Drawing
KLSA-100X
(63)
Hexagon socket head cap screw M4×8…6 screws
303
240
4-M4×0.7 depth 8
80
70
KLSA-200X
(63)
Hexagon socket head cap screw M4×8…6 screws
433
370
120
100
4-M6×1 depth 8
Application
Systems
Optics &
Optical
Coatings
Holders
100
42
70
80
140
42
100
120
Bases
Manual
Stages
22.5
50 50
25.5
100 100
Actuators
44
0.5
70
70
70
5
45
(15)
8-M5×0.8 Bottom hole 5.2
8 counterbore
49.5
0.5
100
100
100
(35)
4
50
8-M8×1.25 Bottom hole 6.8
11 counterbore
Motoeized
Stages
Light
Sources
KLSS-100X
Hexagon socket head cap screw M4×8…6 screws
KLSS-200X
Hexagon socket head cap screw M4×8…6 screws
Index
(63)
303
240
80
70
4-M4×0.7 depth 8
(63)
433
370
120
100
4-M6×1 depth 8
Guide
Controllers/Drivers
100
42
70
80
140
42
100
120
Softwares
Stepping Motor
AC Servo Motor
44
22.5
50 50
5
45
49.5
25.5
100 100
4
50
Cables
Piezo
0.5
70
70
70
(15)
8-M5×0.8 Bottom hole 4.2
8 counterbore
0.5
100
100
100
(35)
8-M8×1.25 Bottom hole 6.8
11 counterbore
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6
7
6
7
GND
ORG
8 8 +VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
11
12
13
LS (+)
LS (−)
GND Short
14 14 NEAR circoit
15 15 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
Originside
ON when shaded
Note 1
D phase
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with origin and proximity origin sensors.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Compatible Controllers / Drivers and Cables
Controller
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G102 − G105
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
KLSA-100X
KLSS-100X
KLSA-200X
KLSS-200X
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G059

Motion Control Products
Aluminum Crossed Roller Guide Motorized Stage
TAMM Stage size □40/□60/□100mm
Motorized crossed roller stages that combine compactness, low-profile and high durability.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦Linear motorized stages fitted with anti-creep crossed roller
guide and special nut-shape ball screw configuration,
offering low-profile and high durability.
◦ Aluminum is used as a main material to achieve lightweight,
compact and slim body, effective for spacesaving.
Guide
▶A spacer is required when fixing the stage on a vibration isolator
bench. It can be purchased separately. D055 -
▶After purchasing two X axis stages, to assemble them into an XY
axis stage, assembly adjustment cost and performance inspection
cost will be charged separately.
▶Contact our International Sales Division if you desire to change
motors, etc. Or, use the motorized stage system question sheet.
G111
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number TAMM40-10C TAMM60-15C TAMM100-50C TAMM100-100C
Opposite ModelPart Number TAMM40-10CR TAMM60-15CR TAMM100-50CR TAMM100-100CR
Travel [mm] 10 15 50 100
Table Size [mm] 40×40 60×60 100×100 100×175
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ4mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Positioning Slide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 0.33 0.48 1.9 2.9
(Full) [μm/pulse] 2 2 2 2
Resolution
(Half) [μm/pulse] 1 1 1 1
MAX Speed [mm/sec] 10 10 10 10
Positioning Accuracy [μm] 6 6 6 10
Positional Repeatability [μm] 1 1 1 1
Load Capacity [N] 29.4 (3.0kgf) 49 (5.0kgf) 98 (10.0kgf) 98 (10.0kgf)
Moment Stiffness[″/N・cm] 1.5 0.5 0.05 0.03
Lost Motion [μm] 1 1 1 1
Backlash [μm] 1 1 1 1
Parallelism [μm] 30 30 30 30
Running Parallelism [μm] 10 10 10 10
Pitch [″] / Yaw [″] 25/25 20/20 20/15 20/15
Sensor Part Number
Limit Sensor
Origin Sensor
Micro photo sensor: GP1S097HCZ (Sharp Corporation)
Limit Sensor, Origin Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL OPEN)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL OPEN)
Micro photo sensor: PM-L24 (SUNX Co.,Ltd.)
Limit Sensor, Origin Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL OPEN)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL OPEN)
Proximity Origin Sensor None None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number C9863-90215P (□28mm) PK544NBW (□42mm)
Step Angle 0.72°
Power Voltage DC+5V - +24V
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output 50mA
Output Logic
In the case of light shielded ,output transistor OFF (No conduction): Limit sensor
In the case of light shielded ,output transistor ON (Conduction): Origin sensor
Compatible Driver / Controller
Control System
Compatible Driver
Compatible Controller
SG-5M, SG-5MA, SG-55M, SG-55MA,
SG-514MSC, MC-7514PCL
GSC-01, GSC-02, SHOT-702, GIP-101,
SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
SG-5M, SG-55M, SG-514MSC, MC-7514PCL
SHOT-702, SHOT-302GS,
SHOT-304GS, HIT-M・HIT-S
G060
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9009
Outline Drawing
TAMM40-10C
Hexagon socket
head cap screw
M3×6…4 screws
(128.5)
88.5 40
32
20
4-M3 depth 6
4-M2 depth 4
TAMM60-15C
Hexagon socket
head cap screw
M4×8…4 screws
(153.5)
93.5 60
50
32
4-M4 depth 6
4-M3 depth 6
Application
Systems
Optics &
Optical
Coatings
20
16 16
(14.5) 40
(54.5)
32
25
25
60
(74.5)
Holders
Travel 5
Travel 5
2-M3 depth 3
Travel 7.5
(14.5)
2-M4 depth 3
Travel 7.5
Bases
28
1.5
18
28
14
2
20
Connection Diagram
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13JA-12SC
1 1 Motor lead
2 2 Motor lead
3 3 Motor lead
4 4 Motor lead
5 5 Motor lead
6 6 ORG
Sensor
7 7
Power source 12V
8 8 GND (0V)
9 9 LS (+)
10 10 LS (−)
11
12
11
12
FG
FG
Note 2
32
32
4-3.5 mounting hole
6 counterbore
(5)
5-Phase Stepping
Motor
E-Phase
D-Phase
Originside (ORG)
limit sensor
ON when shaded
Opposite side (−)
limit sensor
ON when light enters
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
C-Phase
A phase
B-Phase
Sharp Corporation
Micro photo sensor
GP1S097HCZ
*Regarding sensor power + VS, use current of about 30mA.
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with proximity origin sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
14
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
50 50
4-4.5 mounting hole
8 counterbore
Compatible Controllers / Drivers and Cables
G020 − G021
(4)
Cable
D15RP-CA
G108
Cable
MINI-CA-SG
G108
Stage
TAMM40-10C
TAMM60-15C
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
TAMM100-50C
(104.5)
204.5
Hexagon socket head cap screw M4×8…4 screws
100
90
60
25 25
8-M4×0.7 depth 8
4-M4×0.7 depth 8
6-M4×0.7 depth 8
TAMM100-100C
(122.5)
Hexagon socket head cap screw M4×8…4 screws
297.5
175
90
70
25 25
4-M4×0.7 depth 6
4-M4×0.7 depth 6
8-M4×0.7 depth 6
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
45
25
60
42.5 0.5
0.5
21.5
25
100
25 25
70
90
100
45
(450)
25
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6
7
6
7
GND
ORG
8 8 +VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
11
12
13
LS (+)
LS (−)
GND Short
14 14 NEAR circoit
15 15 N.C. (not used)
Note 2
90
M4×0.7 depth 8
25
16
43
(15)
4-M5×0.8
8 counterbore
4H7
5-Phase Stepping
Motor
E phase
Originside
ON when shaded
Note 1
D phase
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
90
A phase
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with origin and proximity origin sensors.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
42.5 0.5
0.5
21.5
45
90 90
10
43
(15)
6-M5×0.8
8 counterbore
Compatible Controllers / Drivers and Cables
Controller
SHOT-702 [2 axes]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
G100 − G103
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
TAMM100-50C
TAMM100-100C
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G061

Motion Control Products
Precision Motorized Stages - 5 Phase Stepping Motor
KST-X
High precision X axis stages fitted with precision ball screws and precision crossed roller.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦Steel body offers excellent stiffness and high load
capacity.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc. Or, use the motorized stage system question sheet.
G111
Attention
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number KST-50X KST-100X KST-200X
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 50 100 200
Table Size [mm] 165×165 165×200 165×360
Feed Screw
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ14mm,
2mm lead
Positioning Slide Crossed roller Crossed roller Crossed roller
Stage Material Steel (S50C) Steel (S50C) Steel (S50C)
Weight [kg] 8.6 10.2 20.0
(Full) [μm/pulse] 2 2 4
Resolution
(Half) [μm/pulse] 1 1 2
MAX Speed [mm/sec] 10 10 20
Positioning Accuracy [μm] 5 7 8
Positional Repeatability [μm] 2 2 2
Load Capacity [N] 392 (40.0kgf) 392 (40.0kgf) 392 (40.0kgf)
Pitch [″/N・cm] 0.01 0.01 0.01
Moment
Stiffness
Yaw [″/N・cm] 0.01 0.01 0.01
Roll [″/N・cm] 0.005 0.005 0.005
Lost Motion [μm] 1 1 1
Backlash [μm] 1 1 1
Parallelism [μm] 50 70 100
Running Parallelism [μm] 10 10 20
Pitch [″] / Yaw [″] 15/15 20/20 20/20
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co., Ltd.): Limit sensor, origin sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 1.4A/phase (Oriental Motor Co., Ltd.)
Motor Part Number PK564-NBW (□60mm) PK566-NBW (□60mm) PK569-NBW (□60mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Current Consumption
45mA or lower (15mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, SG-5151, KR-525M
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS
G062
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9023
Outline Drawing
KST-50X
Hexagon socket head cap screw M6×15…4 screws
165
150
110
50 50
90
70
50
25-M4 depth 8
4-M6 depth 12
KST-100X
Hexagon socket head cap screw M6×15…4 screws
200
150
110
50 50
90
70
50
25-M4 depth 8
4-M6 depth 12
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
(274.5)
50
70
90
50 50
110
150
165
(350.3)
50
70
90
50 50
110
150
165
Manual
Stages
Travel 25 Travel 25
Travel 50 Travel 50
Actuators
(61)
31
1
150
(209.2)
7
15
8
10
65
Bottom plate 4-mounting notch
7.5
(61)
31
1
65
7
15
Bottom plate 4-mounting notch
150 25
(269.2)
8
10
Motoeized
Stages
Light
Sources
Index
KST-200X
Hexagon socket head cap screw M6×15…8 screws
360
150
110
50 50
90
70
50
25-M4 depth 8
4-M6 depth 12
Guide
Controllers/Drivers
Softwares
Stepping Motor
50
70
90
50
50
110
150
165
AC Servo Motor
Cables
(585)
Piezo
Travel 100 Travel 100
(61)
31
1
7
15
50 150 50 55
(482.2)
8
10
65
Bottom plate 8-mounting notch
X Translation
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
6
7
8
1
2
3
4
5
6
7
8
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND
ORG
+VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
14
11
12
13
14
LS (+)
LS (−)
GND
NEAR
15 15 N.C. (not used)
Note 2
Short
circuit
5-Phase Stepping
Motor
E phase
D phase
Origin sensor
ON when light enters
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Compatible Controllers / Drivers and Cables
Controller
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
Driver
Drivers
G102
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
KST-X
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
KST-50/100/200 is fitted with an origin sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G063

Motion Control Products
Precision Motorized Stages with built in Glass-scale Encoder
KST(GS)
Application
Systems
Optics &
Optical
Coatings
Holders
Linear scales consist of “scales” used as a ruler and a “detector” which obtains positional
information from the scales.
◦Linear scales are used in indispensable processes in
many fields, and mainly used in equipment for manufacturing
electronic devices such as
semiconductors, flat panel displays (FPD), and printed
wiring boards,
electronic component mounting machine, machine
tools, and carrier machine.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Guide
▶Theoretical resolution of the glass scale is set to 0.05μm.
▶Contact our International Sales Division for resolutions not listed in
the catalog.
Attention
▶When operating the KST(GS) series with closed loop control, in
order to use it within the specifications listed in the catalog, the
number of motor divisions of the controller is recommended to be
set to 100 or higher (travel per pulse is 0.05μm or less).
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number KST(GS)-50X KST(GS)-100X KST(GS)-200X
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 50 100 200
Table Size [mm] 165×165 165×200 165×360
Feed Screw
MotorSpecifications
Motor
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ14mm,
2mm lead
guide Crossed roller guide Crossed roller guide Crossed roller guide
Stage Material Steel Steel Steel
Weight [kg] 9.2 14.3 19.4
(Full) [μm/pulse] 2 2 4
Resolution
(Half) [μm/pulse] 1 1 2
MAX Speed [mm/sec] 10 10 20
Positioning Accuracy [μm] 3 4 5
Positional Repeatability [μm] 0.5 0.5 0.8
Load Capacity [N] 392 (40.0kgf) 392 (40.0kgf) 392 (40.0kgf)
Pitch [″/N・cm] 0.01 0.01 0.01
Moment
Stiffness
Yaw [″/N・cm] 0.01 0.01 0.01
Roll [″/N・cm] 0.005 0.005 0.005
Lost Motion [μm] 0.5 0.5 0.5
Backlash [μm] 1 1 1
Parallelism [μm] 50 70 100
Running Parallelism [μm] 10 10 20
Pitch [″] / Yaw [″] 15/15 20/20 20/20
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co.,Ltd.) Limit sensor, origin sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None None
Proximity Origin Sensor None None None
Type
5-phase stepping motor 1.4A/phase (Oriental Motor Co., Ltd.)
Motor Part Number PK564-NBW (□60mm) PK566-NBW (□60mm) PK569-NBW (□60mm)
Step Angle 0.72°
Compatible Controller
Compatible Controller
SHOT-302GS, SHOT-304GS
G064
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9040
Outline Drawing
KST(GS)-50X
Hexagon socket head cap screw M6×15…4 screws
165
150
110
50 50
90
70
50
25-M4 depth 8
4-M6 depth 12
KST(GS)-100X
Hexagon socket head cap screw M6×15…4 screws
200
150
110
50 50
90
25-M4 depth 8
70
50
4-M6 depth 12
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
(174.7)
50
70
90
50 50
110
150
165
(182.7)
50
70
90
50 50
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
KST(GS)-200X
(183)
Hexagon socket head cap screw M6×15…8 screws
360
150
110
50 50
25-M4 depth 8
90
70
4-M6 depth 12
50
50
70
90
50 50
110
150
165
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
(585)
Travel 100 Travel 100
(63)
31
65
110
150
165
(274.5)
(350.3)
Travel 25 Travel 25
Travel 50 Travel 50
(63)
31
1
7
15
150
8
7.5
10
65
Bottom plate 4-mounting notch
(63)
31
1
(345.5)
150
7
15
8
10
65
Bottom plate 4-mounting notch
25
1
7
15
50 150 50 55
10
Bottom plate 8-mounting notch
X Translation
Theta Rotation
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
5-Phase Stepping
Motor
E phase
A phase
Compatible Controllers / Cables
Controller
Cable
Stage
Goniometer
Vacuum
Options
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6
7
6
7
GND
ORG
8 8 +VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
11
12
13
LS (+)
LS (−)
GND Short
14 14 NEAR circoit
15 15 N.C. (not used)
Note 2
D phase
Originside
ON when shaded
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
G102
DHR-CA
G109
Cable
GSE-CA
G109
KST(GS)-50X
KST(GS)-100X
KST(GS)-200X
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
KST-50/100/200 is fitted with an origin sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G065

Motion Control Products
Precision Motorized Stages - 5 Phase Stepping Motor
KST-XY
High precision XY axis stages fitted with precision ball screws and precision crossed roller.
Application
Systems
Optics &
Optical
Coatings
Holders
◦Steel body offers excellent stiffness and high load
capacity.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc. Or, use the motorized stage system question sheet.
G111
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number KST-50XY KST-100XY KST-200XY
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 50 100 200
Table Size [mm] 165×165 165×200 165×360
Feed Screw
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ14mm,
2mm lead
Positioning Slide Crossed roller Crossed roller Crossed roller
Stage Material Steel (S50C) Steel (S50C) Steel (S50C)
Weight [kg] 17.2 20.4 40.0
Resolution
(Full) [μm/pulse] 2 2 4
(Half) [μm/pulse] 1 1 2
MAX Speed [mm/sec] 10 10 20
Positioning Accuracy [μm] 10 12 15
Positional Repeatability [μm] 2 2 2
Load Capacity [N] 196 (20.0kgf) 196 (20.0kgf) 196 (20.0kgf)
Lost Motion [μm] 1 1 1
Backlash [μm] 1 1 1
Orthogonality of Motion [μm] 5 5 10
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co., Ltd.): Limit sensor, origin sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Proximity Origin Sensor None None None
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Motor / Sensor Specifications
Type
5-phase stepping motor 1.4A/phase (Oriental Motor Co., Ltd.)
Motor
Motor Part Number PK564-NBW (□60mm) PK566-NBW (□60mm) PK569-NBW (□60mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Sensor
Current Consumption
45mA or lower (15mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
(Reference) Precision Specifications of Single Axis Stage
Part Number KST-50X KST-100X KST-200X
Accuracy
Specifications
Pitch [″/N・cm] 0.01 0.01 0.01
Moment
Stiffness
Yaw [″/N・cm] 0.01 0.01 0.01
Roll [″/N・cm] 0.005 0.005 0.005
Parallelism [μm] 50 70 100
Running Parallelism [μm] 10 10 20
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, SG-5151, KR-525M
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS
G066
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9024
Outline Drawing
KST-50XY
Hexagon socket head cap screw M6×15…4 screws
25-M4 depth 8
4-M6 depth 12
Travel 25
KST-100XY
Hexagon socket head cap screw M6×15…4 screws
25-M4 depth 8
4-M6 depth 12
Travel 50
Application
Systems
Optics &
Optical
Coatings
Holders
Travel 25
50
70
90
50 50
110
150
165
82.5
(274.5)
50
70
90
50
50
Travel 25
110
150
165
Travel 25
82.5
(274.5)
8
10
65
130
7
15
7.5
Bottom plate 4-mounting notch
150
Travel 50
50
70
90
50 50
110
150
200
(104.8)
(350.3)
50
70
90
50 50
110
150
Travel 50
165
Travel 50
(104.8)
(350.3)
8
10
65
130
7
15
Bottom plate 4-mounting notch
150
25
Bases
Manual
Stages
Actuators
Motoeized
Stages
KST-200XY
Hexagon socket head cap screw M6×15…8 screws
Light
Sources
Index
Guide
Travel 100
(585)
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6
7
6
7
GND
ORG
8 8 +VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
11
12
13
LS (+)
LS (−)
GND Short
14 14 NEAR circoit
15 15 N.C. (not used)
Note 2
50
70
90
50 50
110
150
165
360
180
5-Phase Stepping
Motor
E phase
Originside
ON when shaded
Note 1
D phase
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
Note 1 The motor side limit sensor is the + direction limit sensor.
KST-50/100/200 is fitted with an origin sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
25-M4 depth 8
4-M6 depth 12
50
70
90
Travel 100
C phase
A phase
50
50
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Travel 100
110
150
165
Travel 100
180
(585)
65
130
7
8
10
15
55 50 150 50
Controller
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
Driver
Bottom plate 8-mounting notch
Compatible Controllers / Drivers and Cables
Drivers
G102
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
KST-XY
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G067

Motion Control Products
Precision Motorized Stages - 5 Phase Stepping Motor
KST-Z
High precision Z axis stages fitted with precision ball screws and precision crossed roller.
Application
Systems
Optics &
Optical
Coatings
Holders
◦Steel body offers excellent stiffness and high load
capacity.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc. Or, use the motorized stage system question sheet.
G111
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number KST-50Z KST-100Z KST-200Z
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 50 100 200
Table Size [mm] 165×165 165×200 165×360
Feed Screw
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ14mm,
2mm lead
Positioning Slide Crossed roller Crossed roller Crossed roller
Stage Material Steel (S50C) Steel (S50C) Steel (S50C)
Weight [kg] 12.8 14.5 27.0
(Full) [μm/pulse] 2 2 4
Resolution
(Half) [μm/pulse] 1 1 2
MAX Speed [mm/sec] 10 10 20
Positioning Accuracy [μm] 5 7 8
Positional Repeatability [μm] 2 2 2
Load Capacity [N] 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf)
Pitch [″/N・cm] 0.015 (Y pitch) 0.020 (Y pitch) 0.030 (Y pitch)
Moment
Stiffness
Yaw [″/N・cm] 0.01 (X pitch) 0.015 (X pitch) 0.020 (X pitch)
Roll [″/N・cm] 0.005 0.015 0.015
Lost Motion [μm] 1 1 1
Backlash [μm] 1 1 1
Perpendicularity of Motion [μm] 10 15 25
Pitch [″] / Yaw [″] 20/15 25/20 25/25
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co., Ltd.): Limit sensor, origin sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 1.4A/phase (Oriental Motor Co., Ltd.)
Motor Part Number PK564-NBW (□60mm) PK566-NBW (□60mm) PK569-NBW (□60mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Current Consumption
45mA or lower (15mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, SG-5151, KR-525M
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS
G068
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9025
Outline Drawing
KST-50Z
Hexagon socket head cap screw M6×20…4 screws
25-M4 depth 8
4-M6 depth 12
Travel 25
KST-100Z
Hexagon socket head cap screw M6×20…4 screws
25-M4 depth 8
4-M6 depth 12
Travel 50
Application
Systems
Optics &
Optical
Coatings
Holders
50
70
90
50 50
110
150
165
(347)
50
70
90
50
50
Bases
Manual
Stages
KST-200Z
Hexagon socket head cap screw M6×20…4 screws
Actuators
Motoeized
Stages
Light
Sources
Index
25-M4 depth 8
4-M6 depth 12
Travel 100
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
325
110
150
200
(440.5)
155
195
50
70
90
50 50
110
150
165
Travel 25
7.5
7.5
150
165
4-7 mounting hole
50
70
90
50 50
110
150
165
Travel 50
10
7.5
7.5
150
165
4-7 mounting hole
50
70
90
50 50
110
150
360
(730)
Travel 100
7.5
50
70
90
50 50
110
150
165
10
7.5
150
165
4-7 mounting hole
X Translation
Theta Rotation
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6
7
6
7
GND
ORG
8 8 +VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
11
12
13
LS (+)
LS (−)
GND Short
14 14 NEAR circoit
15 15 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
Originside
ON when shaded
Note 1
D phase
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Compatible Controllers / Drivers and Cables
Controller
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
Driver
Drivers
G102
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
KST-Z
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
KST-50/100/200 is fitted with an origin sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G069

Motion Control Products
Translation Motorized Stages, Flat Z axis - 5 Phase Stepping Motor
OSMS-ZF Stage size □40/□60/□80mm
Application
Systems
Optics &
Optical
Coatings
Holders
Z axis stepping motor driven stages for measurement and inspection, offering high stiffness and
high precision.
The table that travels up and down is horizontal and offers smooth travel.
◦Originally designed horizontal plane Z axis stages in
which a motor is incorporated in its main body for
space-saving.
◦Minimized protrusions make these stages ideal for
system assembly
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS40-5ZF OSMS60-5ZF OSMS60-10ZF OSMS80-20ZF
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 5 5 10 20
Table Size [mm] 40×40 60×60 60×60 80×80
Feed Screw
Ball screw diameter φ5mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 0.35 0.6 0.6 1.6
(Full) [μm/pulse] 1.0 2.0 2.0 0.2
Resolution
(Half) [μm/pulse] 0.5 1.0 1.0 0.1
MAX Speed [mm/sec] 2 4 4 1
Positional Repeatability [μm] 10 10 10 10
Load Capacity [N] 19.6 (2.0kgf) 39.2 (4.0kgf) 39.2 (4.0kgf) 147 (15.0kgf)
Pitch [″/N・cm] 2.0 0.4 0.4 0.2
Moment
Stiffness
Yaw [″/N・cm] 2.0 1.0 1.0 1.0
Roll [″/N・cm] 1.0 1.0 1.0 1.0
Lost Motion [μm] 5 5 5 5
Parallelism [μm] 50 50 50 50
Running Parallelism [μm] 15 15 15 15
Pitch [″] 25 20 20 25
Sensor Part Number
Micro photo sensor: GP1S097HCZ0F (Sharp Corporation): Limit Sensor (60-5ZF/60-10ZF)
Micro photo sensor: PM-U24 (SUNX Co.,Ltd.): Limit Sensor (40-5ZF/80-20ZF)
Limit Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Origin Sensor None None None None
Proximity Origin Sensor None None None None
Motor / Sensor Specifications
Motor
Sensor
Type
Motor Part Number
5-phase stepping motor 0.35A/
phase (Oriental Motor Co., Ltd.)
PK513PA-C21
(□20mm)
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
PK523HPB-C12
(□28mm)
PK523HPB-C12
(□28mm)
A7177-90215KTG
(□28mm)
Step Angle 0.72° 0.036°
Power Voltage
DC5 − 24V ±10% or lower
Current Consumption
30mA or lower (15mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Control System Compatible Driver SG-5MA, SG-55MA,
SG-514MSC
Compatible Controller
SG-5M, SG-5MA, SG-55M, SG-55MA,
SG-514MSC, MC-7514PCL
GSC-01, GSC-02, SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
SG-55M, SG-55MA,
SG-514MSC, MC-7514PCL
G070
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9077
Outline Drawing
OSMS40-5ZF
Hexagon socket head cap screw M3×15…4 screws
OSMS60-5ZF
Hexagon socket head cap screw M4×15…4 screws
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
OSMS60-10ZF
Hexagon socket head cap screw M4×15…4 screws
OSMS80-20ZF
Hexagon socket head cap screw M4×15…4 screws
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Connection Diagram
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13RA-12SD
1 1 Motor lead
2 2 Motor lead
3 3 Motor lead
4 4 Motor lead
5 5 Motor lead
6 6 N.C. (not used)
7
8
9
10
7
8
9
10
+VS
5 − 24VDC
GND (0V)
LS (+)
LS (−)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
D phase
Opposite side (+)
limit sensor
ON when light enters
Note 1
Motor side (−)
limit sensor
ON when shaded
Note 1
C phase
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with proximity origin sensors.
Limit sensors are used as origin detection sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
A phase
B phase
(60-5ZF/60-10ZF)
Sharp Corporation
Micro photo sensor
GP1S097HCZ0F
40-5ZF/80-20ZF
SUNX Co., Ltd.
Micro photo sensor
PM-U24
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
MINI-CA-SG
G020 − G021
G108
* Adaptation SG-5MA, only SG-55MA is (0.35A/phase) OSMS40-5ZF
Stage
OSMS-ZF
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G071

Motion Control Products
Actuator for Objective Lenses (Stepper motor type)
SGSP-OBL
Stepping motor type objective lens actuator compatible with long strokes.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
◦Since this actuator uses a stepping motor, it can be
connected to our various controllers.
◦It is compact and high resolution, best suited for incorporation
into a microscope lens tube or an auto focus
system.
◦Can be used for upright type and inverted type microscopes.
Guide
▶The dedicated adapters are available according to the microscope
and screw size of objective lens of each manufacturer.
Attention
▶The dedicated adapters are required for mounting the actuator on
microscopes and objective lenses.
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number
Mechanical
Specifications
Accuracy
Specifications
Sensor
SGSP-OBL-3
Travel [mm] 3
Table Size [mm]
(Mounted adapter)
Feed Screw
Precision ground screw φ6mm, 0.5mm lead
Positioning Slide
Crossed roller guide
Stage Material
Aluminum
Finish
White anodized
Weight [kg] 0.4
(Full) [μm/pulse] 1
Resolution
(Half) [μm/pulse] 0.5
MAX Speed [mm/sec] 1
Positioning Accuracy [μm] 5
Positional Repeatability [μm] 2
Load Capacity [N]
4.9 (0.5kgf)
Moment Stiffness[″/N・cm]
−
Lost Motion [μm] 2
Backlash [μm] 1
Parallelism [μm]
−
Running Parallelism [μm] 2
Pitch [″] / Yaw [″] 15/15
Sensor Part Number
Micro photo sensor: GP1S092HCPI (Sharp Corporation)
Limit Sensor
Equipped (NORMAL CLOSE)
Origin Sensor
None
Proximity Origin Sensor
None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.35A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK513PA-C21 (□20mm)
Step Angle 0.72°
Power Voltage
DC - 5V - +24V±10%
Current Consumption
40mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output 50mA
Output Logic
In the case of light shielded ,output transistor OFF (No conduction): Limit sensor
Compatible Driver / Controller
Compatible Driver SG-5MA, SG-55MA, SG-514MSC
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G072
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Catalog
Code
W9078
Outline Drawing
52
(4.5)
Application
Systems
Optics &
Optical
Coatings
(1.8)
54
74.6
Holders
(24)
(6)
38.5 (15.518.5)
(5457)
Bases
Manual
Stages
Actuators
(1.8) 40
14
Motoeized
Stages
Connection Diagram
Light
Sources
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13RA-12SD
5-Phase Stepping
Motor
E-Phase
A phase
Index
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6 6 N.C. (not used)
7
8
9
10
7
8
9
10
VS
5 − 24VDC
GND (0V)
LS (+)
LS (−)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
D-Phase
Motor side ()
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C-Phase
B-Phase
Sharp Corporation
Micro photo sensor
GP1S092HCPI
*Regarding sensor power + VS, use current of about 30mA.
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with proximity origin sensors.
Limit sensors are used as origin detection sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Objective Lens Adapters
Outline Drawing
Specifications
Part Number
OBL-ADP3-M**A
OBL-ADP3-M**B
Mounting Screw Size
[mm]
OBL-ADP3-MA
30
28
14.5
2 4.5
B
A
38
A
[mm]
OBL-ADP3-MB
A
2
9
28
30
38
OBL-ADP3-M20.32A Microscope side M20.32 M20.32 P=0.706 (W0.8×1/36) 15
OBL-ADP3-M20.32B Objective lens side M20.32 M20.32 P=0.706 (W0.8×1/36) −
OBL-ADP3-M25.0A Microscope side M25.0 M25.0 P=0.75 20
OBL-ADP3-M25.0B Objective lens side M25.0 M25.0 P=0.75 −
OBL-ADP3-M26.0A Microscope side M26.0 M26.0 P=0.706 (W26.0×1/36) 21
OBL-ADP3-M26.0B Objective lens side M26.0 M26.0 P=0.706 (W26.0×1/36) −
B
[mm]
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G073

Motion Control Products
Rotation Motorized Stages
SGSP-YAW
Stepping motor driven rotation stages fitted with bearing guide and worm gear feed mechanism.
Application
Systems
◦Motorized stages suitable for positioning for measuring,
inspection and evaluation instruments.
Optics &
Optical
Coatings
Holders
Guide
▶Rotation Range
Minus limit sensor: −2.5° Scale: 0°
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
▶Homing of rotation motorized stages is performed using the CW
limit sensor as the origin sensor.
▶Origin detection is adjusted so that the stage stops at 0 degrees
when homing is performed in the MINI system at half step.
Attention
Clockwise CW direction
Stops at near 0° (−2.5°)
Counterclockwise
CCW direction to ∞
▶Attention is required when mounting in upside down direction or on
a vertical plane.
▶Precision and load capacity specifications may be partly not
satisfied depending on the mounting direction.
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number SGSP-40YAW SGSP-60YAW-0B SGSP-60YAW-W-0B
Mechanical
Specifications
Accuracy
Specifications
Sensor
Rotation Range
Move in the counterclockwise CCW direction to ∞, and stop at near 0 degree (−2.5°) in the clockwise CW direction.
Table Size [mm] φ40 φ60 φ60
Travel Mechanism
(reduction ratio)
Worm gear (1:144) Worm gear (1:144) Worm gear (1:144)
Positioning Slide Bearing method Bearing method Bearing method
Stage Material Aluminum / Aluminum bronze Aluminum / Aluminum bronze Aluminum / Aluminum bronze
Weight [kg] 0.35 0.45 1.0
(Full) [°/pulse] 0.005 0.005 0.005
Resolution
(Half) [°/pulse] 0.0025 0.0025 0.0025
MAX Speed [°/sec] 30 30 30
Positioning Accuracy [ ° ] 0.1 0.1 −
Positional Repeatability [ ° ] 0.02 0.02 0.02
Load Capacity [N] 19.6 (2.0kgf) 29.4 (3.0kgf) 29.4 (3.0kgf)
Moment Stiffness [″/N・cm] 2 1 −
Lost Motion [ ° ] 0.05 0.05 0.05
Backlash [ ° ] 0.1 0.1 0.1
Parallelism [μm] 50 50 −
Concentricity [μm] 30 30 −
Wobble [mm] 0.02 0.02 −
Sensor Part Number
Micro Photoelectric Sensor:
PM-F24 (SUNX Co., Ltd.)
Micro Photoelectric Sensor:
PM-R24 (SUNX Co., Ltd.)
Micro Photoelectric Sensor:
PM-R24 (SUNX Co., Ltd.)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None None
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.66A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3664N4 (□24mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Current Consumption
15mA or lower
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G074
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9027
Outline Drawing
SGSP-40YAW
14
Hexagon socket head cap screw M3×15…3 screws
(91)
M6 depth 5 21
+0.025
15( +0.005)
SGSP-60YAW-0B
Hexagonal socket head cap screw M4×10…3 screws
(112)
+0.025
25() +0.005
Application
Systems
Optics &
Optical
Coatings
(15)
(56)
20
32
21
51.5
(26)
(70)
32
50
30
64
Holders
(14.5)
86
20
32
4-M2 depth 5
4-M3 depth 5
P.C.D.32
(14)
32
50
60
5
5
4-M3 depth 5.5
Bases
40
4-M4 depth 5.5
P.C.D.50
30
107
60
Manual
Stages
(27.5)
14.5
11
28
(27.5)
14
28
Actuators
0.5
SGSP-60YAW-W-0B
3-3.6 mounting hole
6 counterbore
Hexagonal socket head cap screw M4×10…4 screws
(155.5)
(112)
+0.025
25() +0.005
0.5
5
2-M6 depth 5 3-4.6 mounting hole
8 counterbore
Motoeized
Stages
Light
Sources
75
60
Index
(52.5)
(128.5)
110
55
100
60
32
2-M4
M16×1
Guide
50
60
(19.8)
(60.8)
4-M4 depth 5.5
P.C.D.50
4-M3 depth 5.5
32
50
30
60
60
When homing of SGSP-60YAW-W-0B is
performed, the position will become as
shown below.
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
(74.3)
41
20
6
40
75
Cables
Piezo
Connection Diagram
6.3
6
4-4.5 mounting hole
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13RA-12SC
5-Phase Stepping
Motor
E phase
A phase
1 1 Motor lead
2 2 Motor lead
3 3 Motor lead
4 4 Motor lead
5 5 Motor lead
6 6 N.C. (not used)
7
8
9
7
8
9
+VS
GND (0V)
10 10
Machine origin sensor
(CW limit sensor)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
D phase
Machine origin sensor Note 1
(CW limit sensor)
C phase
SUNX Co., Ltd.
Micro photo sensor
PM-F24/R24
ON when light enters
B phase
Note 1 When a travel command in the “+” direction is issued, the mounting table rotates to ∞ in
the CCW (counterclockwise) direction viewed from the top surface, but it is stopped by
the machine origin sensor (CW limit sensor) in the CW (clockwise) direction.
Detect the machine origin using the method (MINI system) that detects the origin with a
machine origin sensor (CW limit sensor).
Note 2 Compatible cable connector: Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
Machine Origin Detection
MINI System
When the machine origin detection command is
issued, the stage starts traveling in the CW (-)
direction at the operating speed (F) set with the
memory switch, and stops by the CW (-) side
limit sensor. Then it travels in the CCW (+)
direction at the operating speed (F) for 1000
pulses.
After stop, it starts traveling in the CW (-)
direction again at the starting speed (S), and
stops by the CW (-) side limit sensor. After that,
it travels in the CCW (+) direction at the
operating speed (F) for 1000 pulses.
This position is regarded as the machine origin.
Operating speed (F)
Stage
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
Starting speed (S)
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
CW (−) side limit sensor
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
G020 − G021
Cable
D15RP-CA
G108
Cable
MINI-CA-SG
G108
Stage
SGSP-40YAW
SGSP-60YAW-OB
SGSP-60YAW-W-OB
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G075

Motion Control Products
Rotation Motorized Stages
SGSP-YAW
Stepping motor driven rotation stages fitted with bearing guide and worm gear feed mechanism.
Application
Systems
◦Motorized stages suitable for positioning for measuring,
inspection and evaluation instruments.
Optics &
Optical
Coatings
Holders
Guide
▶Rotation Range
Minus limit sensor : −2.5° Scale : 0°
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Clockwise CW direction
Stops at near 0° (−2.5°)
Counterclockwise
CCW direction to ∞
▶Homing of rotation motorized stages is performed using the CW
limit sensor as the origin sensor.
▶Origin detection is adjusted so that the stage stops at 0 degrees
when homing is performed in the MINI system at half step.
Attention
▶Attention is required when mounting in upside down direction or on
a vertical plane.
▶Precision and load capacity specifications may be partly not
satisfied depending on the mounting direction.
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number SGSP-80YAW SGSP-120YAW SGSP-160YAW SGSP-120YAW-W
Mechanical
Specifications
Accuracy
Specifications
Sensor
Rotation Range
Move in the counterclockwise CCW direction to ∞, and stop at near 0 degree (−2.5°) in the clockwise CW direction.
Table Size [mm] φ80 φ120 φ160 φ120
Travel Mechanism
(reduction ratio)
Worm gear (1:144) Worm gear (1:144) Worm gear (1:144) Worm gear (1:144)
Positioning Slide Bearing method Crossed roller Crossed roller Crossed roller
Stage Material
Aluminum / Aluminum bronze Aluminum / Aluminum bronze Aluminum / Aluminum bronze Aluminum / Aluminum bronze
Weight [kg] 1.1 2.0 2.5 5.5
(Full) [°/pulse] 0.005 0.005 0.005 0.005
Resolution
(Half) [°/pulse] 0.0025 0.0025 0.0025 0.0025
MAX Speed [°/sec] 30 30 30 30
Positioning Accuracy [ ° ] 0.15 0.1 0.1 −
Positional Repeatability [ ° ] 0.02 0.02 0.02 0.02
Load Capacity [N] 98 (10.0kgf) 196 (20.0kgf) 196 (20.0kgf) 196 (20.0kgf)
Moment Stiffness [″/N・cm] 0.2 0.1 0.1 −
Lost Motion [ ° ] 0.05 0.05 0.05 −
Backlash [ ° ] 0.08 0.08 0.08 0.08
Parallelism [μm] 50 50 60 −
Concentricity [μm] 30 30 30 −
Wobble [mm] 0.02 0.02 0.02 −
Sensor Part Number
Micro Photoelectric Sensor: PM-F24 (SUNX Co., Ltd.)
Limit Sensor
Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None None None
Proximity Origin Sensor None None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK525HPB-C4 (□28mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Current Consumption
15mA or lower
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G076
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9028
Outline Drawing
SGSP-80YAW
Hexagonal socket head cap screw M4×10…3 screws
(153)
+0.04
32() +0.005
SGSP-120YAW
Hexagon socket head cap screw M6×10…3 screws
(183.5)
Application
Systems
Optics &
Optical
Coatings
SGSP-160YAW
(33)
17
(98)
4-M4 depth 5
1
32
50
70
40
80
80
(117)
32
50
70
5
40
89
4-M3 depth 5
4-M4 depth 5
P.C.D.62
2-M6 depth 5
35
17
3-4.5 mounting hole
8.2 counterbore
Hexagon socket head cap screw M6×10…3 screws
(202.5)
(183.5)
11 mounting hole
(68.7)
(17.5)
SGSP-120YAW-W
(33)
18
(137)
2
+0.05
+0.005
64()
50
100
61
123
120
50
100
122
5
61
128
4-M4 depth 6
4-M4 depth 6
P.C.D.100
35
3-6.5 mounting hole
11 counterbore
Hexagon socket head cap screw M6×18…3 screws
(246)
(183.5)
50
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
(68.7)
(156)
(137)
+0.05
+0.005
60( )
50
100
61
122
(92.7)
(208)
170
150
50
85
4-M4 depth 6
64
()
+0.05
+0.005
145
115
25 25
Index
(17.5)
4-M4 depth 6
50
100
123
61
4-M4 depth 6
(27.5)
(83.5)
4-M4 depth 6
P.C.D.100
50
100
122
61
25 25
M16×160
8-M4
Guide
Controllers/Drivers
Softwares
160
120
Stepping Motor
(33)
18
2
Connection Diagram
5
35
43
3-6.5 mounting hole
11 counterbore
(99)
56
28
10
10
55
101
4-6.5 mounting hole
AC Servo Motor
Cables
Piezo
Connector Pin Number
Hirose Electric Co., Ltd.
SDAB-15P equivalent
5-Phase Stepping
Motor
E phase
A phase
If homing of SGSP-120YAW-W is
performed, the position will become as
shown below.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Note 2
1 Motor lead
2 Motor lead
3 Mmotor lead
4 Motor lead
5 Mmotor lead
6 GND
7
8 VS
9 N.C. (not used)
10 N.C. (not used)
11
Machine origin sensor
12
(CW limit sensor)
13 GND
14
15 N.C. (not used)
Machine Origin Detection
MINI System
When the machine origin detection command is
issued, the stage starts traveling in the CW (-)
direction at the operating speed (F) set with the
memory switch, and stops by the CW (-) side
limit sensor. Then it travels in the CCW (+)
direction at the operating speed (F) for 1000
pulses.
After stop, it starts traveling in the CW (-)
direction again at the starting speed (S), and
stops by the CW (-) side limit sensor. After that,
it travels in the CCW (+) direction at the
operating speed (F) for 1000 pulses.
This position is regarded as the machine origin.
D phase
Machine origin sensor Note 1
(CW limit sensor)
C phase
Operating speed (F)
Stage
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
Starting speed (S)
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
CW (−) side limit sensor
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-F24
ON when light enters
Note 1 When a travel command in the “+” direction is issued, the mounting table rotates to ∞ in
the CCW (counterclockwise) direction viewed from the top surface, but it is stopped by
the machine origin sensor (CW limit sensor) in the CW (clockwise) direction.
Detect the machine origin using the method (MINI system) that detects the origin with a
machine origin sensor (CW limit sensor).
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Compatible Controllers / Drivers and Cables
Controller
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G088 − G096
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
SGSP-80YAW
SGSP-120YAW
SGSP-160YAW
SGSP-120YAW-W
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G077

Motion Control Products
Precision Rotation Motorized Stages
KST-YAW
High precision and high stability rotation motorized stages fitted with bearing positioning slide.
Application
Systems
Optics &
Optical
Coatings
◦Rotation motorized stages suitable for when high load
capacity is required.
◦Back up various inspection instruments according to
usage such as the type, size, and measurement range
of the measuring object.
Holders
Bases
Guide
▶Rotation Range
Minus limit sensor: −2.5° Scale: 0°
Manual
Stages
Clockwise CW direction
Stops at near 0° (−2.5°)
Counterclockwise
CCW direction to ∞
Actuators
Motoeized
Stages
Light
Sources
Index
▶Homing of rotation motorized stages is performed using the CW
limit sensor as the origin sensor.
▶Origin detection is adjusted so that the stage stops at 0 degrees
when homing is performed in the MINI system at half step.
Attention
▶Attention is required when mounting in upside down direction or on
a vertical plane.
▶Precision and load capacity specifications may be partly not
satisfied depending on the mounting direction.
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number KST-120YAW KST-160YAW
Mechanical
Specifications
Accuracy
Specifications
Sensor
Rotation Range
Move in the counterclockwise CCW direction to ∞, and stop at near 0 degree (−2.5°) in the clockwise CW direction.
Table Size [mm] φ120 φ160
Travel Mechanism
(reduction ratio)
Worm gear (1:144) Worm gear (1:144)
Positioning Slide Bearing method Bearing method
Stage Material Aluminum / Aluminum bronze Aluminum / Aluminum bronze
Weight [kg] 5 8.5
Resolution
(Full) [°/pulse] 0.005 0.005
(Half) [°/pulse] 0.0025 0.0025
MAX Speed [°/sec] 30 30
Positioning Accuracy [ ° ] 0.1 0.1
Positional Repeatability [ ° ] 0.01 0.01
Load Capacity [N] 343 (35.0kgf) 392 (40.0kgf)
Moment Stiffness [″/N・cm] 0.015 0.01
Lost Motion [ ° ] 0.01 0.01
Backlash [ ° ] 0.003 0.003
Parallelism [μm] 50 50
Concentricity [μm] 20 20
Wobble [mm] 0.01 0.01
Sensor Part Number Micro Photoelectric Sensor: PM-U24 (SUNX Co., Ltd.) Micro Photo Sensor: PM-R24 (SUNX Co., Ltd.)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None
Proximity Origin Sensor None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 1.4A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3624N42E (□60mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Current Consumption
15mA or lower
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF
Compatible Driver / Controller
Compatible Driver SG-5M*, SG-55M*, SG-514MSC*, MC-7514PCL (* DC36V)
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS
G078
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9029
Outline Drawing
KST-120YAW
Hexagon socket head cap screw M6×154 screws
(228.5)
KST-160YAW
Hexagon socket head cap screw M6×254 screws
(261)
Application
Systems
Optics &
Optical
Coatings
Holders
(50)
(149)
70
+0.04
+0.005
56()
50
100
60
(82)
(197)
112
7 mounting hole
+0.05
+0.005
80()
100
140
150
82
Bases
(42)
8-M4 depth 6
P.C.D.100
30
50
100
60
156
120
4-M4 depth 10
(41.5)
8-M4 depth 10
P.C.D.100
3-M6 depth 12
P.C.D.140
15
100
140
150
189
160
82
3-7
mounting hole
4-M6 depth 12
Manual
Stages
Actuators
Motoeized
Stages
(77)
45
12.5
12
82
4-7 mounting hole
(79.5)
47.5
12.5
12
90
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Note 1
Connector Pin Number
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND
7
8 VS
9 N.C. (not used)
10 N.C. (not used)
11
Machine origin sensor
12
(CW limit sensor)
13 GND
14
15 N.C. (not used)
Machine Origin Detection
MINI System
When the machine origin detection command is
issued, the stage starts traveling in the CW (-)
direction at the operating speed (F) set with the
memory switch, and stops by the CW (-) side
limit sensor. Then it travels in the CCW (+)
direction at the operating speed (F) for 1000
pulses.
After stop, it starts traveling in the CW (-)
direction again at the starting speed (S), and
stops by the CW (-) side limit sensor. After that,
it travels in the CCW (+) direction at the
operating speed (F) for 1000 pulses.
This position is regarded as the machine origin.
5-Phase Stepping
Motor
E phase
D phase
SUNX Co., Ltd.
Micro photo sensor
120YAW PM-U24
160YAW PM-R24
ON when light enters
Machine origin sensor
(CW limit sensor)
Note 1 Compatible cable connector: DDK Ltd. 17JE-13150
C phase
Operating speed (F)
Stage
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
Starting speed (S)
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
CW (−) side limit sensor
A phase
B phase
Compatible Controllers / Drivers and Cables
Controller
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
Driver
Drivers
G102
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
KST-120YAW
KST-160YAW
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G079

Motion Control Products
High Durability Motorized Rotation Stages
HDS-YAW
It is a small angle adjusting automatic rotation stages using in the alignments for a marker of semiconductor wafer.
Application
Systems
Optics &
Optical
Coatings
Holders
◦Good for the automatic alignment device which needs for adjusting the small angle of rotation by each sample.
◦By using the ball screw system on the drive mechanism, it can reduce abrasion and backlash of parts which realized high
durability.
◦Since it converted linear motion by the ball screw into rotational motion by the steel belt, there is no difference between
traveling center and end by rotation speed and resolution.
Guide
▶Rotation range
CCW (+)
CW (–)
Bases
Manual
Stages
Actuators
HDS-60YAW , HDS-80YAW
Counterclockwise CCW Direction (+)
Stop on +5°
HDS-120YAW
Counterclockwise CCW Direction (+)
Stop on +6°
HDS-60YAW , HDS-80YAW
Clockwise CW Direction (-)
Stop on -5°
HDS-120YAW
Clockwise CW Direction (-)
Stop on -6°
Motoeized
Stages
Light
Sources
Attention
▶Please be mounted HDS series in horizontal. Can not be guaranteed
the performance if used in reversion on the roof or
vertically situation. If you would like a special mounting, please
contact our sales department.
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number HDS-60YAW HDS-80YAW HDS-120YAW
Mechanical
Specifications
Accuracy
Specifications
Sensor
Rotation Range ±5° ±5° ±6°
Table Size [mm] φ60 φ80 φ120
Travel Mechanism Ball screw with steel belt Ball screw with steel belt Ball screw with steel belt
Positioning Slide Bearing method Bearing method Crossed roller guide
Stage Material Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized
Weight [kg] 0.5 0.9 1.4
Resolution
(Full) [°/pulse] ≒0.00053 ≒0.00038 ≒0.00022
(Half) [°/pulse] ≒0.00027 ≒0.00019 ≒0.00011
MAX Speed [°/sec] 60 60 60
Positioning Accuracy [°] 0.05 0.05 0.05
Positional Repeatability [°] 0.003 0.003 0.003
Load Capacity [N] 29.4 (3.0kgf) 58.8 (3.0kgf) 98 (10kgf)
Moment Stiffness [″/N・cm] 1 0.2 0.1
Lost Motion [°] 0.003 0.003 0.003
Backlash [°] 0.05 0.05 0.05
Parallelism [μm] 50 50 50
Concentricity [μm] 10 10 10
Wobble [mm] 0.01 0.01 0.01
Sensor Part Number
Micro photo sensor: GP1S097HCZ(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Equipped (NORMAL OPEN)
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.66A/phase
(Tamagawa Seiki Co., Ltd.)
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number TS3664N4 (□24mm) C9863-90215P (□28mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
60mA or lower (20mA per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
“When shaded: Output transistor OFF (no conduction): Limit sensor
When shaded: Output transistor ON (conduction): Origin sensor”
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC
Control System
Compatible Controller
GSC-01, GIP-101, GSC-02, SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G080
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9079
Outline Drawing
HDS-60YAW
Hexagon socket head cap screw M4×12…3 screws
(126)
25 ( 0.025
0.005)
HDS-80YAW
Hexagon socket head cap screw M4×12…3 screws
(142)
132
Application
Systems
Optics &
Optical
Coatings
32 ( 0.070
0.005)
Holders
90
32
50
30
32
50
70.05
(110.5)
Bases
12.5
4-M4 depth 5.5
P.C.D.50
119.5
32
50
30
60
4-M3 depth 5.5
4.5
28
40
32
4-M3 depth 5
4-M4 depth 5 50
70
4-M4 depth 5
P.C.D.62
40
88
80
Manual
Stages
Actuators
Motoeized
Stages
HDS-120YAW
Hexagon socket
head cap screw M6×12…3 screws
3-4.5 mounting hole
8 counterbore
(164)
155
6.5
35
3-4.5 mounting hole
8.2 counterbore
Light
Sources
Index
Guide
Controllers/Drivers
64 (0.005
−0.050 )
50
100
(161.9)
Softwares
Stepping Motor
AC Servo Motor
60
Cables
50
100
130
60
4-M4 depth 6
4-M4 depth 6
P.C.D.100
Piezo
120
4
35
3-6.5 mounting hole
11 counterbore
X Translation
Theta Rotation
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
Note 2
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13R-12SC
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 ORG
7
Sensor
Power source 12V
8 GND (0V)
9 LS (+)
10 LS (−)
11 FG
12 FG
5-Phase Stepping
Motor
E-Phase A phase
D-Phase
B-Phase
C-Phase
Originside (ORG)
limit sensor
ON when shaded
Opposite side (−)
limit sensor
ON when light enters
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
GP1S097HCZ0F
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
Stage
HDS-60YAW
HDS-80YAW
HDS-120YAW
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the (+) forward direction limit sensor.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
G020 − G021
MINI-CA-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G081

Motion Control Products
Motorized Extended Guide Goniometer
OSMS-40A Stage size □40mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
High precision motorized goniometers with integrated bearing ways for superior stiffness, accuracy
and durability.
Their smooth movement is ideal for frequent angle adjustment.
◦Cost-effective motorized stages achieved by integrated
structure in which guides are directly processed on the
main body to reduce the number of parts and assembly
time.
◦Attachment pins (accessories) are ideal for positioning
when assembling into αβ axis or mounting on various
instruments or devices.
Guide
▶Contact our International Sales Division
if you desire to assemble into an αβ axis
stage.
▶Contact our International Sales Division
if you desire a rotation center height not
listed in the catalog.
▶Manual type (GOHT-40) is also available.
E168
GOHT-40
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS-40A60 OSMS-40A75
(Opposite Model) OSMS-40A60R OSMS-40A75R
Mechanical
Specifications
Size Tolerance
Accuracy
Specifications
Sensor
Travel [°] ±5 ±4
Table Size [mm] 40×40 40×40
Travel Mechanism
(reduction ratio)
Worm gear (1: 332) Worm gear (1: 406)
Positioning Slide Extended Contact Ball Guide Extended Contact Ball Guide
Stage Material SUS440C quench hardened SUS440C quench hardened
Finish Super black chrome Super black chrome
Weight [kg] 0.4 0.4
Stage Height [mm] 15 15
Rotation Center Height [mm] 60±0.1 75±0.1
Rotation Center Deflection Accuracy [mm] Within φ0.01 Within φ0.01
(Full) [°/pulse] about 0.00217 about 0.00177
Resolution
(Half) [°/pulse] about 0.00108 about 0.00089
MAX Speed [°/sec] 10 8.9
Positional Repeatability [°] ±0.004 ±0.004
Load Capacity [N] 19.6(2.0kgf) 19.6(2.0kgf)
Moment Stiffness [″/N・cm] Roll 0.6 Yaw 0.6 Roll 0.6 Yaw 0.6
Lost Motion [°] 0.02 0.02
Sensor Part Number
Micro photo sensor: GP1S092HCPIF(Sharp Corporation): Limit Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK523HPB-C12 (□28mm)
Step Angle 0.72°
Power Voltage DC - 5V - +24V
Current Consumption
40mA or lower (20mA per sensor)
Control Output
NPN open collector output 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G082
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9079
Outline Drawing
OSMS-40A60
(51)
(31.6)
15.8
(125.9)
78.3
M3depth 3
M4depth 3
4 H7
Hexagon socket head cap screw M3×6…4 screws,
Attachment pins
40
16 16
(7.6)
6-M3depth 5
M3depth 3
16
16
40
(14.5)
60
15
(10)
32 32
Rotation center
1
4-3.5 mounting hole
6 counterbore
OSMS-40A60R
Rotation center
1
4-3.5 mounting hole
6 counterbore
32
Hexagon socket head cap screw M3×6…4 screws,
Attachment pins
(125.9)
(7.6) 40
78.3
6-M3depth 5 16 16 M3depth 3
M3depth 3
40
(14.5)
(10) 15 60 16 16
32
M4depth 3
4 H7
(51)
(31.6)
15.8
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
OSMS-40A75
(51)
Hexagon socket head cap screw M3×6…4 screws,
Attachment pins
(125.9)
78.3
40 (7.6)
16 16 6-M3depth 5
M3depth 3
M3depth 3
16 16
40
OSMS-40A75R
Hexagon socket head cap screw M3×6…4 screws,
Attachment pins
(7.6)
6-M3depth 5
M3depth 3
40
16 16
40
16 16
(125.9)
78.3
M3depth 3
(51)
Guide
Controllers/Drivers
Softwares
Stepping Motor
M4depth 3
(14.5)
Rotation center
Rotation center
(14.5)
M4depth 3
AC Servo Motor
Cables
(31.6)
15.8
4 H7
(10) 15 75
32 32
1
4-3.5 mounting hole
6 counterbore
1
4-3.5 mounting hole
6 counterbore
32
(10) 15
75
32
4 H7
15.8
(31.6)
Piezo
X Translation
Theta Rotation
Connection Diagram
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13R-12SD
1 1 Motor lead
2 2 Motor lead
3 3 Motor lead
4 4 Motor lead
5 5 Motor lead
6 6 N.C. (not used)
7
8
9
10
7
8
9
10
VS
5~24VDC
GND (0V)
LS (+)
LS (−)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E-Phase
D-Phase
C-Phase
A phase
B-Phase
Motor side (+)
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
GP1S092HCPI
Opposite side (−)
limit sensor
ON when shaded
Note 1
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with origin and proximity origin sensors.
Limit sensors are used as origin detection sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
G020 − G021
Cable
D15RP-CA
G108
Cable
MINI-CA-SG
G108
Stage
OSMS-40A
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G083

Motion Control Products
Motorized Extended Guide Goniometer
OSMS-60A Stage size □60mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
High precision motorized goniometers with integrated bearing ways for superior stiffness, accuracy
and durability.
Their smooth movement is ideal for frequent angle adjustment.
◦Cost-effective motorized stages achieved by integrated
structure in which guides are directly processed on the
main body to reduce the number of parts and assembly
time.
◦Attachment pins (accessories) are ideal for positioning
when assembling into αβ axis or mounting on various
instruments or devices.
Guide
▶Contact our International Sales Division if
you desire to assemble into an αβ axis
stage.
▶Manual type (GOHT-60) is also available.
E172
Motoeized
Stages
GOHT-60
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS-60A60 OSMS-60A85 OSMS-60A105
(Opposite Model) OSMS-60A60R OSMS-60A85R OSMS-60A105R
Mechanical
Specifications
Size Tolerance
Accuracy
Specifications
Sensor
Travel [°] ±14 ±9 ±7
Table Size [mm] 60×60 60×60 60×60
Travel Mechanism
(reduction ratio)
Worm gear (1: 246) Worm gear (1: 314) Worm gear (1: 380)
Positioning Slide Extended Contact Ball Guide Extended Contact Ball Guide Extended Contact Ball Guide
Stage Material SUS440C quench hardened SUS440C quench hardened SUS440C quench hardened
Finish Super black chrome Super black chrome Super black chrome
Weight [kg] 0.85 0.75 0.75
Stage Height [mm] 25 20 20
Rotation Center Height [mm] 60±0.1 85±0.1 105±0.1
Rotation Center Deflection Accuracy [mm] Within φ0.01 Within φ0.01 Within φ0.01
(Full) [°/pulse] about 0.00293 about 0.00229 about 0.00198
Resolution
(Half) [°/pulse] about 0.00146 about 0.00115 about 0.00095
MAX Speed [°/sec] 10 8 6.6
Positional Repeatability [°] ±0.004 ±0.004 ±0.004
Load Capacity [N] 29.4(3.0kgf) 29.4 (3.0kgf) 29.4 (3.0kgf)
Moment Stiffness [″/N・cm] Roll 0.3 Yaw 0.3 Roll 0.3 Yaw 0.3 Roll 0.3 Yaw 0.3
Lost Motion [°] 0.02 0.02 0.02
Sensor Part Number
Micro photo sensor: GP1S097HCZ0F(Sharp Corporation): Limit Sensor, Origin Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Equipped (NORMAL OPEN)
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK523HPB-C12 (□28mm)
Step Angle 0.72°
Power Voltage DC - 5V - +24V
Current Consumption
60mA or lower (20mA per sensor)
Control Output
NPN open collector output 50mA
Output Logic
When shaded: Output transistor OFF (no conduction): Limit sensor
When shaded: Output transistor ON (conduction): Origin sensor
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G084
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9080
Outline Drawing
OSMS-60A60
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
80
60 (9.3)
25 25 M4 depth 4
4-M3 depth 4 32
M4 depth 4
OSMS-60A60R
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
(9.3) 60
80
M4 depth 4 25 25
M4 depth 4 32
4-M3 depth 4
Application
Systems
Optics &
Optical
Coatings
(56)
32
25
60
60
25
32
(56)
Holders
25
(13.4)
25
M4 depth 4 6-M4 depth 5
Rotation center
Rotation center
(13.4)
6-M4 depth 5
M4 depth 4
Bases
(31.6)
15.8
OSMS-60A85
4 H7
50
(8) 25 60
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
80
60 (9.3)
M4 depth 4 25 25 6-M4 depth 5
4-M3 depth 4 32 M4 depth 4
25
50
3
4-4.5 mounting hole
8 counterbore
3
4-4.5 mounting hole
8 counterbore
OSMS-60A85R
50
(8) 25 60
50 4 H7
15.8
(31.6)
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
(9.3) 60
80
6-M4 depth 5 25 25 M4 depth 4
M4 depth 4 32 4-M3 depth 4
25
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
(56)
M4 depth 4
32
25
60
Rotation center
Rotation center
60
25
32
M4 depth 4
(56)
Index
(31.6)
15.8
(13.4)
(13.4)
4 H7
OSMS-60A105
(56)
(8) 20 85
50 50
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
80
60 (9.3)
M4 depth 4 25 25
32
6-M4 depth 5
4-M3 depth 4
M4 depth 4
32
25
25
60
2
4-4.5 mounting hole
8 counterbore
2
4-4.5 mounting hole
8 counterbore
OSMS-60A105R
50
(8) 20 85
50
4 H7
15.8
(31.6)
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
(9.3) 60
80
6-M4 depth 5
25 25 M4 depth 4
32
M4 depth 4
4-M3 depth 4
60
25 25
32
(56)
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
M4 depth 4
Rotation center
Rotation center
M4 depth 4
(13.4)
(31.6)
15.8
(13.4)
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 ORG
7
+VS
524VDC
8 GND (0V)
9 LS (+)
10 LS (−)
11 FG
12 FG
4 H7
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13R-12SD
50
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
Note 2
(8) 20
105
50
5-Phase Stepping
Motor
E-Phase
D-Phase
Originside (ORG)
limit sensor
ON when shaded
Opposite side (−)
limit sensor
ON when light enters
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
2
4-4.5 mounting hole
8 counterbore
C-Phase
A phase
B-Phase
Sharp Corporation
Micro photo sensor
GP1S097HCZ0F
2
4-4.5 mounting hole
8 counterbore
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
50
20 105
(8)
50
Cable
D15RP-CA
G108
Cable
4 H7
15.8
(31.6)
Stage
OSMS-60A
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with proximity origin sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
G020 − G021
MINI-CA-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G085

Motion Control Products
Motorized Goniometers - 5 Phase Stepping Motor
SGSP-A Stage size □60mm
Stepping motor driven motorized goniometer stages fitted with crossed roller guide.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
◦High stiffness goniometer stages fitted with excellent
abrasion-resistant crossed roller guide.
◦Rotation center height from the table face is selectable
according to the usage from 75mm, 100mm or 130mm.
Guide
▶After purchasing two α axis stages, to assemble them into an αβ
axis stage, assembly adjustment cost and performance inspection
cost will be charged separately.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number SGSP-60A75 SGSP-60A100 SGSP-60A130
Mechanical
Specifications
Size Tolerance
Accuracy
Specifications
Sensor
Angle Range [°] ±7 ±5 ±4
Table Size [mm] 60×60 60×60 60×60
Positioning Slide Crossed roller guide Crossed roller guide Crossed roller guide
Travel Mechanism Worm and worm wheel Worm and worm wheel Worm and worm wheel
Stage Material Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized
Weight [kg] 0.65 0.55 0.65
Stage Height [mm] 35 30 35
Rotation Center Height [mm] 75 100 130
Rotation Center Deflection Accuracy [mm] φ0.05 φ0.05 φ0.05
(Full) [°/pulse] about 0.002 about 0.001 about 0.001
Resolution
(Half) [°/pulse] about 0.001 about 0.0005 about 0.0005
MAX Speed [°/sec] 6 6 6
Positional Repeatability [°] ±0.004 ±0.004 ±0.004
Load Capacity [N] 24.5 (2.5kgf) 24.5 (2.5kgf) 24.5 (2.5kgf)
Moment Stiffness [″/N・cm] 1 1 1
Lost Motion [°] 0.02 0.02 0.02
Sensor Part Number
Micro photo sensor: GP1S092HCPI(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None None
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
C9863-90215P
Step Angle 0.72°
Power Voltage
DC5 - 24V
Current Consumption
40mA or lower (20mA per sensor)
Control Output
NPN open collector output 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G086
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9034
Outline Drawing
SGSP-60A75
SGSP-60A100
Hexagonal socket head cap screw M4×18…4 screws
Hexagonal socket head cap screw M4×8…4 screws
(137)
(137)
77
60
77 60
9-M4 depth 4
25 25 25 25 9-M4 depth 4
Application
Systems
Optics &
Optical
Coatings
(3.8) (59.6)
25 25
60
Rotation center
(3.8) (59.6)
25 25
60
Rotation center
Holders
Bases
75
100
Manual
Stages
Actuators
(31.1)
(16.7)
15.3
0.52
(112)
50
35
14
4-4.2 mounting hole
8 counterbore
50
(33.2)
(18.8)
17.9
2.62
112
30
4
50
4-4.2 mounting hole
50
8 counterbore
Motoeized
Stages
SGSP-60A130
Hexagonal socket head cap screw M4×18…4 screws
Light
Sources
(137)
77 60
25 25
9-M4 depth 4
Index
(4.3) (59.6)
25 25
60
Rotation center
Guide
Controllers/Drivers
Softwares
Stepping Motor
130
AC Servo Motor
Cables
32.1
35
14
Piezo
16.8
1.52
(112)
50
4-4.2 mounting hole
8 counterbore
50
X Translation
Theta Rotation
Connection Diagram
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13RA-12SD
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6 6 N.C. (not used)
7
8
9
10
7
8
9
10
VS
5 − 24VDC
GND (0V)
LS (+)
LS (−)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
D phase
C phase
A phase
B phase
Motor side ()
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
GP1S092HCPI
Opposite side (−)
limit sensor
ON when light enters
Note 1 1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
G098 − G103
Driver
Drivers
Cable
D15RP-CA
G108
Cable
Stage
SGSP-60A
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. PR17-13PA-12PC/RP17-PC-122
G020 − G021
MINI-CA-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G087

Motion Control Products
Motorized Goniometers - 5 Phase Stepping Motor
SGSP-B Stage size □60mm
Stepping motor driven motorized goniometer stages fitted with crossed roller guide.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
◦Combination of two axes of excellent abrasion-resistant
z stages enables flexible alignment.
◦Rotation center height from the table face is selectable
according to the usage from 75mm or 100mm.
Attention
▶Assembly was adjusted for precision of both α and β axis stages.
Note that if you disassemble the two axes, they might not work
normally and may require assembly readjustment by us.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number SGSP-60B75 SGSP-60B100
Mechanical
Specifications
Size Tolerance
Accuracy
Specifications
Sensor
Angle Range [ ° ]
(Upper) β axis: ±7 β axis: ±5
(Lower) α axis: ±5 α axis: ±4
Table Size [mm] 60×60 60×60
Positioning Slide Crossed roller Crossed roller
Travel Mechanism Worm and worm wheel Worm and worm wheel
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 1.10 (2 axes) 1.20 (2 axes)
Stage Height [mm] 55 65
Rotation Center Height [mm] 75 100
Rotation Center Deflection Accuracy [mm] − −
Resolution
(Full) [°/pulse] α axis: about 0.001, β axis: about 0.002 α axis: about 0.001, β axis: about 0.001
(Half) [°/pulse] α axis: about 0.0005, β axis: about 0.001 α axis: about 0.0005, β axis: about 0.0005
MAX Speed [°/sec] 6 6
Positional Repeatability [ ° ] Within ±0.004 Within ±0.004
Load Capacity [N] 19.1 (1.9kgf) 19.1 (1.9kgf)
Moment Stiffness [″/N・cm] − −
Lost Motion [ ° ] − −
Sensor Part Number
GP1S092HCPI (Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None
Proximity Origin Sensor None None
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
C9863-90215P
Step Angle 0.72°
Power Voltage
DC5 − 24V
Current Consumption
40mA or lower (20mA per sensor)
Control Output
NPN open collector output 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
Configuration
Part Number SGSP-60B75 SGSP-60B100
(Upper) β axis SGSP-60A75 SGSP-60A100
(Lower) α axis SGSP-60A100 SGSP-60A130
(Reference) Precision Specifications of Single Axis Stage
Part Number SGSP-60A75 SGSP-60A100 SGSP-60A130
Accuracy
Specifications
Positional Repeatability [ ° ] ±0.004 ±0.004 ±0.004
Moment Stiffness [″/N・cm] 1 1 1
Lost Motion [ ° ] 0.02 0.02 0.02
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G088
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9035
Outline Drawing
SGSP-60B75
(3.8) (59.6)
Hexagonal socket head cap screw M4×8…4 screws
SGSP-60B100
(3.8) (59.6)
Hexagonal socket head cap screw M4×18…4 screws
Application
Systems
Optics &
Optical
Coatings
(3.8) (59.6)
25 25
60
(137)
25
25
60 77
(173)
9-M4 depth 4
(3.8) (59.6)
25 25
60
(137)
25 25
60 77
(173)
9-M4 depth 4
Rotation center
Holders
Bases
Manual
Stages
Rotation center
Actuators
75
100
Motoeized
Stages
(33.2)
4
55
35.8
(36.8)
(51.1)
(32.1)
14
65
(37.6)
52.9
(53.8)
(68.2)
Light
Sources
(112)
50
4-4.2 mounting hole
8 counterbore
50
(112)
16.8
1.52
(112)
50
4-4.2 mounting hole
8 counterbore
50
(112)
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Connection Diagram
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13RA-12SD
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6 6 N.C. (not used)
7
8
9
10
7
8
9
10
VS
5 − 24VDC
GND (0V)
LS (+)
LS (−)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
D phase
C phase
A phase
B phase
Motor side ()
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
GP1S092HCPI
Opposite side (−)
limit sensor
ON when light enters
Note 1 1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
G098 − G103
Driver
Drivers
Cable
D15RP-CA
G108
Cable
Stage
SGSP-60B
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. PR17-13PA-12PC/RP17-PC-122
G020 − G021
MINI-CA-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G089

Motion Control Products
Vacuum Compatible Motorized Stage Guide
VSGSP Guide
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
For use in vacuum environments, the vacuum compatible stage series offers replacement with a
stainless steel or machined aluminum body as well as replacement with vacuum grease, and uses
a vacuum rated motor and a contact type or mechanical driven type switch, and Teflon coated
cables for signal wires.
The series is suited for positioning in environments where the degree of vacuum is between 10 –4
and 10 –5 Pa. For the vacuum characteristics, see the measurement data of outgas volume, degree
of vacuum, and mass component ratio.
◦In addition to the standard lineup, motor replacement, sensor replacement, special specifications such as vacuum
compatible large mirror holders, and replacement of grease to vacuum grease for the guides or feed screws of standard
specification stages to deal with low vacuum specifications are available. Contact our International Sales Division for
more information.
Manual
Stages
Vacuum Compatible 5 Phase Stepping Motor
The □24mm minimum size and lightest type motor
saves space.
Compact Body
Machined Aluminum and use of a crossed roller
for the linear guide achieved the thin body.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Teflon Coated Cable
Vacuum Grease
(Fomblin Grease)
Rotation Table
The body is made of aluminum machining.
Vacuum Grease
(Fomblin Grease)
Limit Sensor
The copper plate contact type limit sensor
enables limit detection inside a vacuum chamber.
Limit Sensor
The high-vacuum compatible limit switch enables origin
detection with high repeatability inside a vacuum chamber.
* Only for VSGSP-120YAW
Vacuum Compatible 5 Phase Stepping Motor
The motor size for VSGSP-60YAW is □24mm
and VSGSP-120YAW is □42mm.
[Attention]
To use a vacuum compatible stage in a vacuum chamber, the connection cables between the vacuum side and
the atmosphere side need to be relayed using a vacuum current feedthrough or the like. Prepare the feedthrough
according to the vacuum chamber specifications.
Vacuum side (ex.: Vacuum chamber)
Air side
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor Cable
Sensor Cable
Vacuum current feedthrough
D15D15A-CA Cable etc
Guide
▶Because heat dissipation generally deteriorates in vacuum,
specification temperature conditions are stricter than those for
atmosphere. Check the usage conditions such as stage operation
to make sure that the motor case temperature does not exceed
80°C.
[Example of Special Order]
Vacuum Compatible Large Mirror Holder
G090
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●Emitted amount of gas
Emitted Amount of Gas Q
Part Number
(after 40 minutes of emission)
(Torr・l/s/unit)
(Pa・l/s/unit)
VSGSP26-200 4.77×10 −4 6.36×10 −2
VSGSP-60 6.75×10 −5 9.00×10 −3
VSGSP-120YAW 4.78×10 −4 6.37×10 −2
Emitted amount of gas is found by the following equation:
Evaluation and Device Specifications
Exhaust system: Turbo-Molecular Pump STP-301
Seiyu Instruments Inc. (Now Edwards Japan Limited)
Pumping speed: 300l/sec
Mass spectroscope: Quad Mass Spectrometer QME200
Pfeiffer Vacuum
Mass range: 1 − 200amu
Application
Systems
Optics &
Optical
Coatings
Holders
Q =
(P − P′) × V
t× N
P : Vacuum immediately after seal off
P′: Vacuum after seal-off time has elapsed
N : Number of stage units (1unit)
V : Vacuum chamber volume (l)
t : Seal-off time (600s)
Bases
From the measurement results of gas volume discharged from a vacuum compatible motorized stage
The main components of outgas are water and nitrogen. This is because the gas was caused by residual air on the
stage surface, and grease used for drive components is considered to have little impact on the amount of gas.
●Vacuum of Vacuum Chamber
Vacuum [pa]
1×10 -3 Empty chamber
VSGSP-60
VSGSP-120YAW
1×10 -4
VSGSP26-200
1×10 -5
1×10 -6
1×10 -7
40
300 600 1440
Time [min]
60
●Mass Component Ratio
Mass
Number
1
2
12
13
14
15
16
17
18
20
26
27
28
29
30
31
32
39
41
42
43
44
45
50
Component Ratio [%]
VSGSP-60 VSGSP26-200 VSGSP-120YAW
19.58
2.81
0.60
0.17
0.79
−
3.03
15.77
48.02
0.22
0.33
0.83
2.17
0.73
0.08
0.14
0.26
0.39
0.51
−
0.74
0.40
−
−
19.96
5.28
0.85
−
1.26
2.37
−
−
17.30
−
−
4.53
2.49
6.08
−
0.31
−
2.57
7.44
−
8.00
−
0.31
0.23
17.90
3.34
0.79
−
0.91
−
2.98
14.48
43.89
0.29
0.53
1.52
2.76
1.44
−
0.27
0.27
0.78
1.07
0.41
1.01
0.66
0.31
−
Ion
H +
H2 +
C +
CH +
N + , CO 2+ , CH2 +
CH3 + , NH +
O + , CH4 + , NH2 +
OH + , NH3 +
H2O +
HF + , Ar 2+
C2H2 +
C2H3 +
CO + , N2 + , C2H4 +
C2H5 +
C2H6 + , NO +
C2H2OH +
O 2+ , S +
C3H3 +
C3H5 +
C3H6 +
C3H5 +
C3H8 + , CO2 + , N2O + , C2H4OH +
C2H5O +
C4H2 +
Gas Molecule
H2, water vapor, hydrocarbon
H2, water vapor, hydrocarbon
CO, CO2, hydrocarbon
Hydrocarbon
N2, NH3, CO, hydrocarbon
Hydrocarbon, NH3
O2, CH4, NH3
H2O, NH3
H2O
HF, Ar
Hydrocarbon
Hydrocarbon
CO, CO2, N2, hydrocarbon
Hydrocarbon
C2H6, NO
C2H3OH
O2, H2S, SO2
Hydrocarbon
Hydrocarbon
Hydrocarbon
Hydrocarbon
C3H8, CO2, N2O, C2H4OH
C2H5OH
Hydrocarbon
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Data
●Interpretation of Mass Peak
The following list shows major gases that appear for each mass number when mass peaks (mass spectra) of residual gas
are measured, and their interpretations.
List of Residual Gas Spectra
Mass
Ion
Number
Remarks
Mass
Number
Ion
Remarks
1 H + H2, H2O, hydrocarbons, etc 30 NO + Appears immediately after emission of dirty vacuum system.
2 H2 + H2, H2O, hydrocarbons, etc 31 CH3O + Alcohol
3 HD + Abundance ratio of D is about 0.01%. 32 O2 + Becomes N23 : O32 = 4 : 1 when air leak occurs.
4 He + 35 Cl +
12 C + CO, CO2, hydrocarbons 37 Cl + Cl35 : Cl37 = 3 : 1
14 N + , CH2 + , CO2 + N2, CO2, hydrocarbons 39 K + , C3H3 + K + dissociates from filament.
15 CH3 + Molecule that has CH4, CH3 40 Ar + , C3H4 + Ar makes up 1% of the atmosphere.
16 C + , CH4 + O2, CH4, oxygen compounds 41 C3H5 + Hydrocarbon
17 OH + H2O 42 C3H6 + Hydrocarbon
18 H2O + H2O, OH + : H2O+ ≒ 1 : 5 43 C3H7 + Hydrocarbon
19 F + Sometimes adsorbed to filaments and electrode surface. 44 CO2 +
20 Ar + , H2O + , Ne + H2O(20) is present about 0.2% of abundance ratio of O15. 50 C4H2 + Hydrocarbon
22 CO2 2+ , Ne + Abundance ratio of NE22 is 8.8%. 51 C4H3 + Hydrocarbon
23 Na + Sometimes adsorbed to filaments and electrode surface. 55 C4H7 + Hydrocarbon
27 C2H3 + Hydrocarbon 56 C4H8 + Hydrocarbon
28 N2 + , CO + Remain till the last. 57 C4H9 + Hydrocarbon
29 C2H5 + , N2 + , CO + Abundance ratio of N15 is 0.7%, and that of C13 is 1.1%.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G091

Motion Control Products
Vacuum Applications Miniature Motorized Stages
VSGSP-60
Application
Systems
Optics &
Optical
Coatings
Compact motorized stages used for experiments and inside a chamber of measuring instrument.
Compact slim body is effective for space-saving.
Guide
▶Fitted with 1m teflon coated cable to directly connect the vacuum
motor or vacuum limit switch to the connector of chamber.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Specifications
Part Number VSGSP-60(X) VSGSP-60(XY) VSGSP-60(Z)
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 20 20 20
Table Size [mm] 55×60 55×60 55×60
Feed Screw
Precision ground screw φ4mm,
0.5mm lead
Precision ground screw φ4mm,
0.5mm lead
Precision ground screw φ4mm,
0.5mm lead
Positioning Slide Crossed roller guide Crossed roller guide Crossed roller guide
Stage Material Aluminum Aluminum Aluminum
Finish None None None
Weight [kg] 0.55 1.1 0.6
(Full) [μm] 1 1 1
Resolution
(Half) [μm] 0.5 0.5 0.5
MAX Speed [mm/sec] 5 5 −
Positional Repeatability [μm] 6 6 6
Load Capacity [N] 29.4 (3.0kgf) 19.6 (2.0kgf) 14.7 (1.5kgf)
Lost Motion [μm] 5 5 5
Type Vacuum limit switch Vacuum limit switch Vacuum limit switch
Limit Sensor Contact type Contact type Contact type
Origin Sensor None None None
Proximity Origin Sensor None None None
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Type
Vacuum compatible 5-phase stepping motor 0.66A/phase (Tamagawa Seiki Co., Ltd.)
Motor
Motor Part Number
TS3664N5 (□24mm)
Step Angle 0.72°
Control Output Contact type Contact type Contact type
Sensor
Output Logic NORMAL OPEN NORMAL OPEN NORMAL OPEN
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G092
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9081
Outline Drawing
VSGSP-60(X)
(115.5)
Hexagonal socket head cap screw M4×10…4 screws
27.8
VSGSP-60(XY)
(127.6)
Hexagonal socket head cap screw M4×10…4 screws
Travel 10
Application
Systems
Optics &
Optical
Coatings
(97.8)
Teflon cable
1m
20
20
60
(146.2)
Teflon cable
1m
20 20
22 22
55
40
Holders
Bases
20 20
22 22
55
2-M4 depth 8
4-M4 depth 8
Travel 10 Travel 10
Travel 10
20 20
60
4-M4 depth 8
2-M4 depth 8
Travel 10
Travel 10
4.5
4-4.5 mounting hole
7.5 counterbore
Manual
Stages
Actuators
27
15
3
40
28
4.5
4-4.5 mounting hole
7.5 counterbore
40
43
15
56
Motoeized
Stages
3
40
Light
Sources
VSGSP-60(Z)
Hexagonal socket head cap screw M4×15…2 screws
Index
Teflon cable 1m
2-M4 depth 8
4-M4 depth 8
60
40
Guide
(128)
Controllers/Drivers
40
55
44
40
8
Softwares
Stepping Motor
40
60 27.8
(97.4)
53
5
2-4.5 mounting hole
AC Servo Motor
Cables
Piezo
Vacuum Limit Switch
GND (0V) black lead
Motor side (+) limit switch
LS (+)white lead
Opposite side (−) limit switch
LS (−)red lead
* Use the motor side and opposite side limit switches as normal open.
Wiring of Vacuum Stages
The vacuum compatible stepping motor TS3664N5 used for vacuum stages
has five bare lead wires.
For wiring, they correspond to the motor lead colors shown in the wiring
diagrams of driver or cable as follows.
(The motor leads shown in the connection diagrams of driver or cable indicate
wiring of stepping motors used for normal stages.)
Corresponding
connection
Vacuum stage motor lead color
1
Blue
2
Red
3
Red White
4
Yellow
5
Black
Vacuum compatible stage motor
connection diagram
E phase
Black
Blue
A phase
Red
Motor lead color
shown in driver or cable connection diagram
Blue
Red
Orange
Green
Black
5-phase stepping motor
connection diagram
E phase
Black
Blue
A phase
Red
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
*
Stage
VSGSP-60(X)
VSGSP-60(XY)
VSGSP-60(Z)
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
D phase
C phase
Yellow
B phase
Red White
D phase
C phase
Green
B phase
Orange
MINI-CA-SG
G020 − G021
G108
* Make the cable into bare wire specification after purchase.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G093

Motion Control Products
Vacuum Compatible Motorized Stages
VSGSP-(X)
Motorized stages fitted with a limit sensor compatible with vacuum environments.
Application
Systems
Optics &
Optical
Coatings
◦Linear system has a long travel between 35 − 200mm, and is as compact as the conventional SGSP series.
Guide
▶Motor cables and sensor cables are 1m bare wires.
Holders
■Limit Sensor (high vacuum compatible switch)
Bases
Manual
Stages
Linear stage series normal close specification
Actuators
Motoeized
Stages
Rotation stage series normal open specification Note 1
Note 1 Set the controller of vacuum compatible motorized rotation stages to normal open.
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number VSGSP20-35(X) VSGSP20-85(X) VSGSP26-200(X)
Travel [mm] 35 85 200
Table Size [mm] 60×60 60×60 80×80
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum / Stainless steel Aluminum / Stainless steel Aluminum / Stainless steel
Finish None None None
Weight [kg] 1.0 1.1 2.5
(Full) [μm] 2 2 4
Resolution
(Half) [μm] 1 1 2
MAX Speed [mm/sec] 10 10 20
Positional Repeatability [μm] 5 5 10
Load Capacity [N] 39.2(4.0kgf) 39.2(4.0kgf) 58.8(6.0kgf)
Lost Motion [μm] 3 3 10
Sensor Part Number GN-PT5M3B-1 (Metrol Co., Ltd.) GN-PT5M3B-1 (Metrol Co., Ltd.) GN-PT5M3B-1 (Metrol Co., Ltd.)
Limit Sensor
Vacuum touch sensor
(NORMAL CLOSE)
Vacuum touch sensor
(NORMAL CLOSE)
Vacuum touch sensor
(NORMAL CLOSE)
Origin Sensor None None None
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
Vacuum compatible 5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number A7298-90215KV (□28mm) A7298-90215KV (□28mm) A7298-90215KV (□28mm)
Step Angle 0.72°
Power Voltage
DC5−24V
Current Consumption
10mA(Max 20mA)
Control Output
Mechanical
Output Logic NORMAL CLOSE NORMAL CLOSE NORMAL CLOSE
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G094
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9082
Outline Drawing
VSGSP20-35(X)
20
28
50
Hexagonal socket head cap screw M4×12…4 screws
209
110
60
25 25
16 16
6-M4×0.7 depth 6
8-M3×0.5 depth 6
16 16
25 25
60
VSGSP20-85(X)
20
28
50
Hexagonal socket head cap screw M4×12…4 screws
259
160
60
25 25
16 16
6-M4×0.7 depth 6
8-M3×0.5 depth 6
16 16
25 25
60
Application
Systems
Optics &
Optical
Coatings
Holders
Motor cable 1m
PTFE lead wire AWG26
5 bare leads
50
Sensor cable 1m
PTFE lead wire equivalent to AWG27
Travel 17.5 60 Travel 17.5
2-M4×0.7 depth 5
Motor cable 1m
PTFE lead wire AWG26
5 bare leads
50
Sensor cable 1m
PTFE lead wire equivalent to AWG27
Travel 42.5 60 Travel 42.5
2-M4×0.7 depth 5
Bases
Manual
Stages
34
20
8-4.5 mounting hole
5 25 25 25 25 5
7
34
34
20
8-4.5 mounting hole
5
50 50 50 5
7
34
8-4.5
Actuators
VSGSP26-200(X)
28
70
Hexagonal socket head cap screw M4×12…8 screws
417
310 5
80
70
4-M3×0.5 depth 6
25 25
8-M4×0.7 depth 6
16 16
4-M4×0.7 depth 6
Motoeized
Stages
Light
Sources
Index
20
16 16
25 25
70
80
1m motor cable
PTFE lead wire AWG26
5 bare leads
Sensor cable 1m
PTFE lead wire equivalent to AWG27
Guide
Controllers/Drivers
Softwares
Travel 100 80 Travel 100
Stepping Motor
AC Servo Motor
38
24
41
10-4.5 mounting hole
15 35 70 70 70 35 15
8
70
Cables
Piezo
X Translation
Theta Rotation
Connection Diagram
1
2
3
4
5
6
1
2
3
4
5
6
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND (0V)
7 7 Origin sensor (not used)
8 8 +VS (not used)
9 9 N.C. (not used)
10 10 N.C. (not used)
11
12
11
12
LS (+)
LS (−)
13 13 GND (not used)
14 14 Origin proximity sensor (not used)
15 15 +VS (not used)
5-Phase Stepping
Motor
E phase
D phase
C phase
Motor side (+)
limit sensor
A phase
B phase
ReverseMotor side (−)
limit sensor
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
*
Stage
VSGSP20-35(X)
VSGSP20-85(X)
VSGSP26-200(X)
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
* Motor cables and sensor cables are bare wires.
MINI-CA-SG
G020 − G021
G108
* Make the cable into bare wire specification after purchase.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G095

Motion Control Products
Vacuum Compatible Rotation Motorized Stage
VSGSP-YAW
Application
Systems
Optics &
Optical
Coatings
Rotation motorized stages for vacuum environment.
The φ60mm compact type is space saving, and best suited for experiments and use in chambers
of inspection equipment.
The φ120mm type is equipped with a limit sensor compatible with vacuum environments. It is thin
but has high load capacity because of its □42mm large motor.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Guide
▶Motor cables and sensor cables are 1m bare wires.
Guide
▶Rotation Range
Minus limit sensor: −2.5° Scale: 0°
Light
Sources
Index
Clockwise CW direction
Stops at near 0° (−2.5°)
Counterclockwise
CCW direction to ∞
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number VSGSP-60YAW VSGSP-120YAW
Rotation Range
In the CW or CCW direction to ∞
Counterclockwise CCW direction to ∞, Clockwise CW
direction stops at near 0 degree (−2.5°)
Table Size [mm] φ60 φ120
Mechanical
Feed Screw Worm and worm wheel Worm and worm wheel
Specifications Positioning Slide Bearing Crossed roller
Stage Material Aluminum Aluminum / Stainless steel
Finish None None
Weight [kg] 0.45 1.7
Resolution
(Full) [ ° ] 0.005 0.005
(Half) [ ° ] 0.0025 0.0025
Accuracy MAX Speed [°/sec] 20 20
Specifications Positional Repeatability [ ° ] 0.02 0.02
Load Capacity [N] 29.4 (3.0kgf) 98.0 (10.0kgf)
Lost Motion [ ° ] 0.05 0.05
Type None GN-STM35A-1 (Metrol Co., Ltd.)
Sensor
Limit Sensor None Vacuum touch sensor (NORMAL OPEN)
Origin Sensor None None
Proximity Origin Sensor None None
Motor / Sensor Specifications
Motor
Sensor
Type
Vacuum compatible 5-phase stepping motor 0.66A/phase
(Tamagawa Seiki Co., Ltd.)
▶Homing of rotation motorized stages is performed using the CW
limit sensor as the origin sensor.
▶Origin detection is adjusted so that the stage stops at 0 degrees
when homing is performed in the MINI system at half step.
Vacuum compatible 5-phase stepping motor 0.75A/phase
(Oriental Motor Co., Ltd.)
Motor Part Number TS3664N5 (□24mm) PK543V-NB (□42mm)
Step Angle 0.72° 0.72°
Control Output ー DC5−24V
Output Logic ー Current Consumption 10mA(Max 20mA)
Control Output Contact type Mechanical
Output Logic NORMAL OPEN NORMAL OPEN
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G096
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9083
Outline Drawing
VSGSP-60YAW
Hexagonal socket
head cap screw M4×10…3 screws
VSGSP-120YAW
Hexagon socket
head cap screw M6×10…3 screws
174.5
Application
Systems
Optics &
Optical
Coatings
(117)
0.025
25 () 0.005
20
Holders
70
Teflon
cable
1m
32
50
30
64.5
60
32
50
30
64
4-M3 depth 5.5
4-M4 depth 5.5
P.C.D.50
2-M6 depth 5
138
Motor cable 1m
PTFE lead wire AWG26
5 bare leads
Sensor cable 1m
PTFE lead wire equivalent to AWG27
64
50
100
123
120
61
50
100
61
122
4-M4×0.7 depth 8
P.C.D.100
4-M4×0.7 depth 8
Bases
Manual
Stages
Actuators
Motoeized
Stages
26
14
2
5
14
28
4-4.5 mounting hole
8 counterbore
43
22
3.5
45
3-6.5 mounting hole
11 counterbore
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Wiring of Vacuum Stages
The vacuum compatible stepping motor TS3664N5 used for vacuum stages
has five bare lead wires.
For wiring, they correspond to the motor lead colors shown in the wiring
diagrams of driver or cable as follows.
(The motor leads shown in the connection diagrams of driver or cable indicate
wiring of stepping motors used for normal stages.)
Corresponding
connection
Vacuum stage motor lead color
1
Blue
2
Red
3
Red White
4
Yellow
5
Black
Vacuum compatible stage motor
connection diagram
Black E phase
D phase
Blue
C phase
Yellow
A phase
Red
B phase
Red White
Motor lead color
shown in driver or cable connection diagram
Blue
Red
Orange
Green
Black
5-phase stepping motor connection diagram
(SGSP series)
E phase
Black
D phase
Limit Sensor (high vacuum compatible switch)
Blue
C phase
Green
A phase
Red
B phase
Orange
Linear stage series normal close specification
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
*
Stage
VSGSP-60YAW
VSGSP-120YAW
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Rotation stage series normal open specification Note 1
Note 1 Set the controller of vacuum compatible motorized rotation stages to normal open.
MINI-CA-SG
G020 − G021
G108
* Make the cable into bare wire specification after purchase.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G097

Motion Control Products
Catalog
Single axis Stage Controller GSC-01 Code W9042
A single axis stage controller with built-in 5-phase stepping motor driver.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦External control with RS232C interface, operation with a jog switch on the front panel, and jog operation with external I/O
are available.
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2012)
Attention
▶Power supply is DC+24V 2A.
You need to purchase the PAT-001-POW1 (AC adapter) or prepare an
adapter separately
Actuators
Motoeized
Stages
Part Name
Single axis Stage Controller
AC Adapter
Part Number
GSC-01
PAT-001-POW1
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
■Primary Functions
Controller Function
○
Number of Control Axes 1
Stored Program Control
−
Feedback Control
−
Circular Interpolation Control −
Linear Interpolation Control −
Driver Function
Standard
Micro-step (Max. Division) 2
Driving Current (A/phase) 0.2 − 0.8
■General Specifications
Power Voltage
DC24V
2A
Power Consumption
48VA
Operating Temperature 5 − 40°C
Storage Temperature
−
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 47×125×90
Weight (kg) 0.4
■Performance Specifications
Coordinate Indication Range −
Max. Travel to Set 16,777,215
Max. Driving Speed (pps) 20,000
Min. Driving Speed (pps) 100
Acceleration/Deceleration Time (ms) 0 − 1,000
■I/O Specification
Origin Sensor
−
Proximity Sensor
−
CW (+) Limit
○
CCW (−) Limit
○
General Purpose Input
4 points
General Purpose Output 4 points
Control Input
3 points
Control Output
−
Trigger Output
−
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
Origin Offset Setting
Jog Operation Speed Setting
○
○
○
○
○
−
−
−
○
○
○
○
○
○
○
○
○
■Interface
GP-IB
RS232C
USB
Ethernet
−
○
−
−
X Translation
Theta Rotation
Goniometer
■GSC-01 System Chart
D15D15A-CA cable
Stepping Motor Stage
OSMS
series
Vacuum
Options
GSC-01
G108
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
PC
Sample softwaer
(download from website)
◦SGCommander
◦LabVIEW
RS232C cable
I/O control
external device
RS232C
I/O
STAGE
DC24V 1.3A
D15RP-CA cable
G108
OSMS-ZF
SGSP-40/60YAW
SGSP-ACT-B0
TAMM
OSMS-A
HPS
HDS
series
For the power supply,
you need to purchase the
optional PAT-001-POW1
or prepare an adapter
separately.
G098
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
2 axis Stage Controller GSC-02 Code W9044
A 2 axis stage controller with built-in 5-phase stepping motor driver.
◦External control with RS232C interface, manual operation and programmed operation with a dedicated controller (SJT-02).
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
Attention
▶Power supply is DC+24V 2A.
You need to purchase the PAT-001-POW1 (AC adapter) or prepare an
adapter separately
Part Name
Part Number
2 axis Stage Controller GSC-02
Joystick Terminal
SJT-02
AC Adapter
PAT-001-POW1
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
■Primary Functions
Controller Function
○
Number of Control Axes 2
Stored Program Control
△
Feedback Control
−
Circular Interpolation Control −
Linear Interpolation Control −
Driver Function
Standard
Micro-step (Max. Division) 2 (half step only)
Driving Current (A/phase) 0.3 − 0.8
△…Programs can be controlled using SJT-02.
■General Specifications
Power Voltage
DC24V
2A
Power Consumption
48VA
Operating Temperature 5 − 40°C
Storage Temperature −20 − 60°C
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 180×40×125
Weight (kg) 0.7
■Interface
GP-IB
RS232C
USB
Ethernet
−
○
−
−
■Optional
CJ-200A
−
JS-300
−
JB-400
−
SJT-02
○
■Performance Specifications
Coordinate Indication Range −
Max. Travel to Set 16,777,214
Max. Driving Speed (pps) 20,000
Min. Driving Speed (pps) 1
Acceleration/Deceleration Time (ms) 0 − 1,000
■I/O Specification
Origin Sensor
○
Proximity Sensor
○
CW (+) Limit
○
CCW (−) Limit
○
General Purpose Input
−
General Purpose Output
−
Control Input
−
Control Output
−
Trigger Output
−
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
○
○
○
−
○
−
−
−
○
○
○
○
○
−
−
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
■GSC-02 System Chart
D15D15A-CA cable
Stepping Motor Stage
OSMS
series
X Translation
Theta Rotation
Goniometer
PC
Sample softwaer
(download from website)
◦SGCommander
◦LabVIEW
RS232C cable
RS232C
SJT-02
* Either a PC or the SJT-02
can be connected.
Connecting both at the same
time is not possible.
GSC-02
STAGE1 — 2
G108
D15RP-CA cable
G108
OSMS-ZF
SGSP-40/60YAW
SGSP-ACT-B0
TAMM
OSMS-A
HPS
HDS
series
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
DC24V 2A
Others
SJT-02
G106
For the power supply, you need to purchase
the optional PAT-001-POW1 or prepare an
adapter separately
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G099

Motion Control Products
Catalog
2 axis Stage Controller SHOT-702 Code W9045
A 2 axis stage controller with built-in micro-step driver.
Application
Systems
Optics &
Optical
Coatings
Holders
◦External control with RS232C interface and manual operation with dedicated controllers (JS-300, JB-400).
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
■Primary Functions
Controller Function
○
Number of Control Axes 2
Stored Program Control
−
Feedback Control
−
Circular Interpolation Control −
Linear Interpolation Control −
Driver Function
Micro-step
Micro-step (Max. Division) 250
Driving Current (A/phase) 0.1 − 1.1
■General Specifications
Power Voltage
AC100 − 240V
50/60Hz
Power Consumption
50VA
Operating Temperature 5 − 40°C
Storage Temperature −20 − 60°C
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 260×70×280
Weight (kg) 2.8
■Interface
GP-IB
RS232C
USB
Ethernet
−
○
−
−
SHOT-702 System Chart
■Optional
CJ-200A
JS-300
JB-400
JD-100
SJT-02
■Performance Specifications
Coordinate Indication Range −
Max. Travel to Set 268,435,455
Max. Driving Speed (pps) 500,000
Min. Driving Speed (pps) 1
Acceleration/Deceleration Time (ms) 1 − 1,000
■I/O Specification
Origin Sensor
Proximity Sensor
CW (+) Limit
CCW (−) Limit
General Purpose Input
General Purpose Output
Control Input
Control Output
Trigger Output
SHOT-702
Part Name
Part Number
2 axis Stage Controller SHOT-702
Joy Stick
JS-300
Jog Operation Box
JB-400
Jog Dial
JD-100
MDR Cable
MDR14-CA-2.5
−
○
○
○
−
○
○
○
○
1 point
1 point
1 point
1 point
−
D15RP-CA cable
G108
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
Stepping Motor Stage
OSMS-ZF
SGSP-40/60YAW
SGSP-ACT-B0
OSMS-A/B
TAMM40/60
HPS
HDS
series
○
○
○
○
○
−
−
−
○
○
○
○
○
○
○
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
PC
Sample softwaer
(download from website)
SGCommander
LabVIEW
RS232C cable
I/O control
external device
RS232C
I/O
MDR cable
STAGE1 - 2
AC100-240V
50/60Hz
Power cable (2m)
comes with main body.
D15D15A-CA cable
OSMS series
SGSP-80/120/160YAW
TAMM100
series
JD-100
G106
JS-300
G107
JB-400
G107
G108
G100
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Intelligent Positioning System GIP-101 Code W9046
A single axis controller with built-in micro-step driver having a 5-point preset function.
◦Compatible with objective lens turrets and other LASER accessory units in addition to motorized stages fitted with
5-phase stepping motor.
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
■Primary Functions
Controller Function
○
Number of Control Axes 1
Stored Program Control
−
Feedback Control
−
Circular Interpolation Control −
Linear Interpolation Control −
Driver Function
Micro-step
Micro-step (Max. Division) 250
Driving Current (A/phase) 0.23 − 0.75
■General Specifications
Power Voltage
AC100 − 240V
50/60Hz
Power Consumption
100VA
Operating Temperature 0 − 40°C
Storage Temperature
−
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 145×205×81
Weight (kg) 2
■Interface
■Performance Specifications
Part Name
Intelligent Positioning System
Coordinate Indication Range −
Max. Travel to Set 16,777,214
Max. Driving Speed (pps) 22,000
Min. Driving Speed (pps) 50
Acceleration/Deceleration Time (ms)
20 − 1,000
16 steps
■I/O Specification
Origin Sensor
Proximity Sensor
CW (+) Limit
CCW (−) Limit
General Purpose Input
General Purpose Output
Control Input
Control Output
Trigger Output
○
○
○
○
−
−
6 points
1 point
−
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
Part Number
GIP-101
○
○
○
○
○
○
−
−
○
○
○
○
○
○
○
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
GP-IB
RS232C
USB
Ethernet
−
○
−
−
X Translation
Theta Rotation
Stepping Motor Stage
Goniometer
■GIP-101 System Chart
D15RP-CA cable
SGSP-40/60YAW
SGSP-ACT-B0
series
Vacuum
Options
PC
Sample softwaer
(download from website)
◦SGCommander
◦LabVIEW
RS232C cable
I/O control
external device
Stop switch
RS232C
I/O
STOP
GIP-101
STAGE
AC100-240V
50/60Hz
Power cable (3m)
comes with main body.
G108
D15D15A-CA cable
OSMS series
SGSP-80/120/160YAW
TAMM100
series
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G101

Motion Control Products
Catalog
2 axis / 4 axis Stage Controllers SHOT-GS Code W9047
2 axis and 4 axis stage controllers with built-in micro-step driver.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
◦External control with RS232C/GP-IB/USB interfaces, manual operation with a control pad (CJ-200A) or dedicated controllers
(JS-300, JB-400,JD-100), and automatic control with two banks of stored programs are available.
◦Full closed loop control is possible when used in combination with a stage with built in glass-scale.
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
◦LabVIEW for GP-IB (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
■Primary Functions
Part Number
Controller Function
SHOT-302GS/304GS System Chart
PC
Sample softwaer
(download from website)
SGCommander
LabVIEW
USB cable
RS232C cable
GP-IB cable
I/O control
external device
SHOT-302GS SHOT-304GS
USB
RS232C
GP-IB
I/O/Terminal Block
○
Number of Control Axes 2 4
Stored Program Control
Feedback Control
Circular Interpolation Control
Linear Interpolation Control
Driver Function
○
GS
○
2 axes
Micro-step
Micro-step (Max. Division) 250
Driving Current (A/phase) 0.25 − 1.4
CJ-200A
■General Specifications
Power Voltage
Required
AC100 − 240V
50/60Hz
Power Consumption 160VA 300VA
Operating Temperature 5 − 40°C
Storage Temperature −20 − 60°C
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 270×302×118
Weight (kg) 5.5 6.5
■Interface
GP-IB
RS232C
USB
Ethernet
○
○
○
−
CJ-200A
SHOT-GS
JD-100
G106
■Optional
CJ-200A
JS-300
JB-400
JD-100
SJT-02
■Performance Specifications
Coordinate Indication Range ±999,999,999
Max. Travel to Set 268,435,455
Max. Driving Speed (pps) 500,000
Min. Driving Speed (pps) 1
Acceleration/Deceleration Time (ms) 0 − 1,000
■I/O Specification
Origin Sensor
Proximity Sensor
CW (+) Limit
CCW (−) Limit
General Purpose Input
General Purpose Output
Control Input
Control Output
Trigger Output
STAGE1 - 4
SCALE1 - 4
AC100-240V
50/60Hz
Power cable (2m)
comes with main body.
MDR cable
JS-300
JB-400
G107
Part Name
Part Number
2 axis Stage Controller SHOT-302GS
4 axis Stage Controller SHOT-304GS
Control Pad
CJ-200A
Joy Stick
JS-300
Jog Operation Box
JB-400
Jog Dial
JD-100
MDR Cable
MDR14-CA-2.5
○
○
○
○
−
○
○
○
○
4 points
4 points
15 points
5 points
○
D15RA-CA cable
G108
D15D15A cable
G108
DHR-CA cable
G108
GSE-CA cable
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
Stepping Motor Stage
OSMS-ZF
SGSP-40/60YAW
OSMS-A/B
SGSP-ACT-B0
TAMM40/60
HPS
HDS
series
OSMS series
SGSP-80/120/160YAW
KST
TAMM100
series
Stages with built in Glass-scale Encoder
OSMS(CS)
KST(GS)
series
○
○
○
○
○
−
○
○
○
○
○
○
○
○
○
G108
G102
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Extensible Stage Controller HIT-M/S Code W9048
Stage control system with Master controller and from one to eight slave Axes.
◦Control with RS232C/USB/Ethernet interfaces is available.
◦Full closed loop control is possible when used in combination with a stage with built in glass-scale.
Guide
▶Sample programs are available for download from our website.
◦HIT sample
◦SGCommander 32-bit version for Windows ® (only for RS232C)
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
Attention
▶Power supply is DC+24V 1A. Depending on the number of stage axes,
rated current of 2A (single axis) to 9A (8 axes) is required. You need to
purchase the PAT-001-POW1 (AC adapter) or prepare an adapter separately.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Part Name
Extensible Stage Controller (Master)
Extensible Stage Controller (Slave)
LAN Cable
AC Adapter
Part Number
HIT-M
HIT-S
LAN-2
PAT-001-POW1
Actuators
Motoeized
Stages
■Primary Functions
■Optional
■Control Command
Light
Sources
Part Number HIT-M HIT-S
CJ-200A
−
Machine Origin Return
○
Controller Function ○ −
Number of Control Axes 8 −
JS-300
JB-400
−
−
Theoretical Origin Setting
Relative Position Drive
○
○
Index
Stored Program Control ○ −
JD-100
−
Absolute Position Drive
○
Feedback Control GS −
SJT-02
−
Jog Operation
○
Circular Interpolation Control ○ −
Linear Interpolation Control 3 axes −
■Performance Specifications
Position Appointment
Circular Interpolation Control
−
○
Guide
Driver Function − Micro-step
Coordinate Indication Range
−
Linear Interpolation Control
○
Controllers/Drivers
Micro-step (Max. Division) − 250
Driving Current (A/phase) − 0.1 − 1.1
Max. Travel to Set 134,217,727
Max. Driving Speed (pps) 500,000
Drive
Deceleration Stop
○
○
Softwares
■General Specifications
Min. Driving Speed (pps) 1
Acceleration/Deceleration Time (ms) 1 − 1,000
Emergency Stop
Speed Setting
○
○
Stepping Motor
Power Voltage
Power Consumption
DC24V
1A
24VA
■I/O Specification
Origin Sensor
○
Motor Free/Hold
Port Input
Port Output
○
○
○
AC Servo Motor
Cables
Operating Temperature 5 − 40°C
Storage Temperature −20 − 60°C
Ambient Humidity
20 − 80%RH
Proximity Sensor
CW (+) Limit
CCW (−) Limit
○
○
○
Stepping Motor Stage
Piezo
External Dimensions (W×H×Dmm) 130×120×50
Weight (kg) 0.62 0.63
■Interface
GP-IB
RS232C
−
○
General Purpose Input
General Purpose Output
Control Input
Control Output
Trigger Output
4 points
4 points
−
−
−
OSMS-A/B
OSMS-ZF
SGSP-40/60YAW
SGSP-ACT-B0
TAMM40/60
HPS
HDS
series
USB
○
D15RP-CA cable
Ethernet
○
X Translation
HIT System Chart
PC
USB cable
RS232C cable
LAN cable
USB
RS232C
ETHERNET
I/O
HIT-M
HIT-S
STAGE
SCALE
STAGE
SCALE
G108
D15D15A-CA cable
OSMS series
SGSP-80/120/160YAW
TAMM100
series
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
Sample softwaer
(download from website)
HIT sample
I/O control
external device
DC24V 1A
DC24V 1A
Link cable
DC24V 1A
Link cable
STAGE
SCALE
G108
D15D15A-CA cable
G108
Stages with built in Glass-scale Encoder
OSMS(CS)
series
□80mm
□85mm
□100mm
□120mm
Others
DC24V 1A
GSE-CA cable
Maximum 8 units
can be linked
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G103

Motion Control Products
Pulse Generating Controller
PGC-04
A 4-axis pulse generator type controller that can be connected to the various motor drivers.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦External control with USB and Ethernet interfaces are available.
◦Can be manually operated by a Handy Terminal (JS-300, JB-400, JD-100).
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
Attention
▶Cable and motor driver are sold separately. Please purchase 5-phase
stepping motor drivers SG-55M or prepare compatible driver of
customer choice.
▶Power supply is DC+24V 2A. You need to purchase the PAT-001-POW1
(AC adapter) or prepare an adapter separately.
Actuators
Motoeized
Stages
Light
Sources
Products Name
Pulse Generating Controller
Joystick Terminal
Jog Operation Box
Jog Dial
AC Adapter
Part Number
PGC-04
JS-300
JB-400
JD-100
PAT-001-POW
Index
■Primary Functions
■Optional
■Control Command
Controller Function
○
CJ-200A
−
Machine Origin Return
○
Guide
Controllers/Drivers
Number of Control Axes 4
Stored Program Control
○
Feedback Control
−
JS-300
JB-400
JD-100
○
○
○
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
○
○
○
Softwares
Stepping Motor
Circular Interpolation Control
Linear Interpolation Control
Driver Function
○
○
−
SJT-02
■Performaifications
−
Jog Operation
Position Appointment
Circular Interpolation Control
○
−
○
AC Servo Motor
Cables
Piezo
Micro-step (Max. Division)
Driving Current (A/phase)
■General Specifications
Power Voltage
−
−
DC24V
Coordinate Indication Range −
Max. Travel to Set 16,777,215
Max. Driving Speed (pps) 4,000,000
Min. Driving Speed (pps) 1
Acceleration/Deceleration Time (ms) 1 − 1,000
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
○
−
○
○
○
Power Consumption 1.4A
Operating Temperature 5 − 40°C
■I/O Specification
Motor Free/Hold
Port Input
○
○
Storage Temperature
−
Origin Sensor
○
Port Output
○
Ambient Humidity
20 − 80%RH
Proximity Sensor
○
External Dimensions (W×H×Dmm) 180×140×60
CW (+) Limit
○
Weight (kg) 1.3
CCW (−) Limit
○
X Translation
Theta Rotation
Goniometer
■Interface
GP-IB
RS232C
USB
−
○
−
General Purpose Input
General Purpose Output
Control Input
Control Output
Trigger Output
4 points
4 points
−
−
−
Vacuum
Ethernet
○
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
G104
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9084
System Diagram
5-phase Stepping Motor Driver
(ex.SG-55M)
5-phase Stepping Motorized Stage (ex.HPS60-20(X)-M5 etc.)
Application
Systems
Optics &
Optical
Coatings
Holders
PGC-55M Cable
Motor Cable: (Oriental Motor Co., Ltd.)etc
Bases
Manual
Stages
Actuators
PC
2-phase Stepping Motor Driver
(ex:A8576-0415Y)
2-phase Stepping Motorized Stages (ex.HPS60-20(X)-M2 etc.)
Motoeized
Stages
Light
Sources
RS232C Cable
LAN Cable
Index
RS232C
Ethernet
PGC-0415Y cable
Guide
(ex.ARD-K)
(ex.ARD-K)
cable
STEP Motorized Stages (ex.HPS60-20(X)-MA etc.)
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
PGC-04
Cables
Piezo
PGC-STEP Cable: PGC-ARD-2
AC Servo Driver
(ex.SGDV-2R9EP1A)
Motor Cable: CC030VAF2
*Supplied to the STEP Driver (Oriental Motor Co., Ltd.)
AC Servo Motorized Stages (ex.SGMV20-35(X))
X Translation
Theta Rotation
Goniometer
Vacuum
Options
PGC-ACS Cable: PGC-ACS-2
Motor Cable: JZSP-CF1M00-03-E (Yasukawa Electric Corporation)
Encoder Cable: JZSP-CMP00-03-E (Yasukawa Electric Corporation)
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G105

Motion Control Products
Joystick Terminal
Jog Dial
SJT-02
JD-100
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
SJT-02
A dedicated joystick terminal for the GSC-02 controller to manually operate a motorized stage.
Internal program memory allows automatic operation without using a PC.
Attention
▶Pin 1 of GSC-02 connector for use with the SJT-02 has an electrical
output of +24V. Under no circumstances should it be connected to
a PC. Although it has a protective circuit, be sure to disconnect
either RS232C or SJT-02, otherwise there is a risk of damage.
* If RS232C and SJT-02 are connected at the same time, neither of
them will function.
Specifications
Part Number
SJT-02
Type
Joystick
Power Supply
Supplied from controller
Display
LCD (16 digits × 2 lines)
External Dimensions [W×H×Dmm] 94×30×140
Weight [kg] 0.45
General Specifications
Catalog
Code
W9049
Power Supply
DC+24V
Supplied from a 2 axis stage controller (GSC-02/SHOT-602).
Operating Temperature 5 − 40°C
Ambient Humidity 20 − 80%RH (without condensation)
External Dimensions (W)94 × (H)30 × (D)140mm
Weight
560g (including a special cable)
Display
LDC 16 digits, 2 lines
Connecting Cable Attached special connecting cable (detachable)
Performance Specifications
Number of Control Axes 2 axes
Operation Mode
MANUAL (M) / TEACHING (T) / RUN (R)
EDIT (E) / MEM SW SET Mode
Coordinate Indication Range
X axis: Approx. −99999999 − +99999999 pulses
Y axis: Approx. −99999999 − +99999999 pulses
Coordinate Input Range
X axis: Approx. −16777214 − +16777214 pulses
Y axis: Approx. −16777214 − +16777214 pulses
X axis: Displayed left side of coordinate symbol
Limit Sensor Status
(“L” is displayed when detected.)
Y axis: Displayed left side of coordinate symbol
(“L” is displayed when detected.)
Speed Parameter Switchable among 10 steps
Min. Driving Speed (S) 1 − 20000pps
Max. Driving Speed (F) 1 − 20000pps
Acceleration /Deceleration Time (R) 0 − 1000mS
Coordinate Display Unit [PLS] [μm] [ ° ]
Program Memory Capacity 128 steps × 4 channels
Program Parameter
Wait time 0 − 25.5 [sec] Unit: 0.1 sec
Repeated 0 − 99999999 [times]
Origin Return Axes X axis only / Y axis only / Both axes
Motor Rotation Direction
X axis: Positive (POS) / Negative (NEG)
Y axis: Positive (POS) / Negative (NEG)
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
JD-100
W9085
Manual operation of motorized stages is possible using the JOG buttons or JOG dial.
The RATE button allows easy switching of the travel per click (2 steps).
Mode switching between SHOT-302GS/SHOT-304GS and switching of travel speed (4 steps) can be
performed at hand.
Functions
LCD Panel
MODE Button
RATE Button
AXIS-SEL
Button
SPEED Button
JOG+/− Button
Specifications
None
Catalog
Code
Switches between SHOT-302GS/SHOT-304GS modes.
Changes the travel per click.
(Normal RATE: 1 pulse/click, High RATE: 5 pulses/click)
Switches the motion axes (1 to 4 axes) using the jog dial.
Switches the travel speed in 4 steps set with the controller.
Operates in +/- direction while the respective button is
being pressed.
Part Number
JD-100
Type
Jog Dial
Cable
MDR14-CA-2.5 (purchase separately)
Display
None
External Dimensions [W×H×Dmm] 130×36×145
Weight [kg] 0.6
G106
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Joy Stick
Jog Operation Box
JS-300
JB-400
Catalog
Code
W9050
A dedicated joystick terminal for the GSC-02 controller to manually operate a motorized stage.
Internal program memory allows automatic operation without using a PC.
JS-300
◦Allows easy manual operation of a motorized stage
using a joystick.
Specifications
Part Number
JS-300
Type
Button operation
Cable
MDR14-CA-2.5 (purchase separately)
Display
LCD (16 digits × 4 lines)
External Dimensions [W×H×Dmm] 120×50×160
Weight [kg] 0.7
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Functions
LCD Panel
MODE Button
E-ORG Button
ZERO Button
Control Axis Switch Button
Joystick
M-ORG Button
Third axis Operating Switch
SPEED Button
STOP Button
JB-400
Display digits: 16 digits × 4 lines
Switches modes (SHOT-302GS/SHOT-304GS)
Returns to theoretical (electric) origin
Sets theoretical (electric) origin
Switches the operating axis of joystick (1, 2 or 3, 4 axes) (Enabled only for SHOT-304GS)
Joystick Controls 1, 2 or 3, 4 axes
Machine Origin Return
Operates third axis
Switches the travel speed (4 stages) set with SHOT-302GS/SHOT-304GS
Emergency stop
◦Enable manual operation of motorized stages. It also
has a program function.
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Functions
LCD Panel
Program Button
SPEED Button
MODE Button
ORG X/Y Button
Reset X/Y Button
STOP Button
JOG/Pulse Button
X axis / Y axis Control Button
CLEAR Button
Numeric Keypad (0 − 9)
SET Button
Display digits: 16 digits × 4 lines
Executes SHOT-302GS/SHOT-304GS internal programs
Switches the travel speed (4 stages) set with SHOT-302GS/SHOT-304GS
Switches between SHOT-302GS/SHOT-304GS models
Returns X/Y axis to machine origin
Sets theoretical (electric) origin of X/Y axis
Emergency stop
Switches between JOG operation and fixed pulse operation
When set to JOG operation:
Move while the button is being pressed
Resets the fixed pulse setting to zero
Inputs the number of fixed pulse
Completes setting of fixed pulse
Specifications
Part Number
JB-400
Type
Button operation
Cable
MDR14-CA-2.5 (purchase separately)
Display
LCD (16 digits × 4 lines)
External Dimensions [W×H×Dmm] 178×38×195
Weight [kg] 0.7
When set to fixed pulse operation:
Move for the registered number of pulses at each press of the button
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G107

Motion Control Products
Cables
Catalog
Code
W9052
Application
Systems
Optics &
Optical
Coatings
Cables for connecting between motorized stages and
controllers or drivers.
Select cables according to control methods or operating
environments.
◦Refer to compatible controllers/drivers and cables described on the
page of each motorized stage.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
D15RP-CA Cable
Controller side (15 pins)
D-sub15pin
(Male Type)
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND
Origin sensor
+VS
N.C.
N.C.
Limit sensor (+)
Limit sensor (−)
GND
Origin proximity sensor
+VS
D15D15A-CA Cable
Controller side (15 pins)
17JE-23150-02(D1)
(Male Type) DDK Ltd.
Stage side (15 pins)
17JE-13150-02(D1)A
(Female Type) DDK Ltd.
Pin Number
Pin Number
Orange/Black1
1 Motor lead
1 Motor lead
Orange/Red1 Inner shield
2 Motor lead
2 Motor lead
Light grey/Black1
3 Motor lead
3 Motor lead
Light grey/Red1
4 Motor lead
4 Motor lead
White/Black1
5 Motor lead
5 Motor lead
White/Red1
6 GND
6 GND
Yellow/Black1
7 Origin sensor
7 Origin sensor
Yellow/Red1
8 +VS
8 +VS
Pink/Black1
9 Autoconfig
9 Autoconfig
Pink/Red1
10 Reserve
10 Reserve
Orange/Black2
11 Limit sensor (+)
11 Limit sensor (+)
Orange/Red2
12 Limit sensor (−)
12 Limit sensor (−)
Light grey/Black2
13 GND
13 GND
Light grey/Red2
14 Origin proximity sensor
14 Origin proximity sensor
15 N.C.
Outer shield 15 N.C.
For the color of the cable wiring, it is marked
with an insulating color, dot color and number of dots.
(Reference) Rough guide of the minimum bending radius is 60mm.
Specifications
Brown
Red
Orange
Green
Black
Brown
Gray
White
Purple
Black
Stage side (12 pins)
RP17-13PA-12PC
(Male Type)
Hirose Electric Co., Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
Origin sensor
+VS
GND
Limit sensor (+)
Limit sensor (−)
F.G.
F.G.
Black
Outer shield
Black
(Reference) Rough guide of the minimum bending radius is 40mm.
MINI-CA-SG Cable
Driver side
terminal is
not processed
Stage side (12 pins)
RP17-13PA-12PC
(Male Type)
Hirose Electric Co., Ltd.
Pin Number
Brown
1 Motor lead
Red
2 Motor lead
Orange
3 Motor lead
Yellow
4 Motor lead
Green
5 Motor lead
Blue
6 N.C.
Purple
7 +VS
Gray
8 GND
White
9 Limit sensor (+)
Black
10 Limit sensor (−)
11 F.G.
Inner shield
12 F.G.
Outer shield
(Reference) Rough guide of the minimum bending radius is 40mm.
DAC-SG Cable
Driver side
terminal is
not processed
Inner shield
Outer shield
Multiple 13 core cable
Black
White
Red
Green
Yellow
Gray
Brown
Blue
Pink
Light Blue
Light Green
Orange
Purple
Inner shield
Outer shield
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Case
Stage side (15 pins)
17JE-13150-02 (D1)
Hood: 17JE-15H-1A
(Female Type) DDK Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND
Origin sensor
+VS
N.C.
N.C.
Limit sensor (+)
Limit sensor (−)
GND
Origin proximity sensor
+VS
Part Number Controller Side Stage Side
Cable Length
[m]
D15RP-CA-2 D-sub 15pin / male type RP17-13PA-12PC / 12pin 2
D15RP-CA-3 D-sub 15pin / male type RP17-13PA-12PC / 12pin 3
D15RP-CA-5 D-sub 15pin / male type RP17-13PA-12PC / 12pin 5
MINI-CA-SG-1 Unprocessed RP17-13PA-12PC / 12pin 1
MINI-CA-SG-2 Unprocessed RP17-13PA-12PC / 12pin 2
MINI-CA-SG-3 Unprocessed RP17-13PA-12PC / 12pin 3
MINI-CA-SG-4 Unprocessed RP17-13PA-12PC / 12pin 4
MINI-CA-SG-5 Unprocessed RP17-13PA-12PC / 12pin 5
D15D15A-CA-2 17JE-23150 / male type 17JE-13150 / female type 2
D15D15A-CA-3 17JE-23150 / male type 17JE-13150 / female type 3
D15D15A-CA-5 17JE-23150 / male type 17JE-13150 / female type 5
DAC-SG-2 Unprocessed 17JE-13150 / female type 2
DAC-SG-3 Unprocessed 17JE-13150 / female type 3
DAC-SG-4 Unprocessed 17JE-13150 / female type 4
DAC-SG-5 Unprocessed 17JE-13150 / female type 5
G108
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Catalog
Code
W9053
Cables for precision motorized stages with built in glass-scale encoder.
MDR14-CA-2.5 Cable
Controller side (14 pins)
Connector: 10114-3000PE
Shell: 10314-52F0-008
Sumitomo 3M Limited
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
Signal GND
+5V
RXD+
TXD+
STOP−
Signal GND
+5V
RXD−
TXD−
CONNECT−
Case
Blue
Red
Gray
White
Orange
Green
Brown
Purple
Black
Yellow
Inner shield
Outer shield
Stage side (14 pins)
Connector: 10114-3000PE
Shell: 10314-52F0-008
Sumitomo 3M Limited
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
Signal GND
+5V
RXD+
TXD+
STOP−
Signal GND
+5V
RXD−
TXD−
CONNECT−
Case
◦The MDR14-CA-2.5 cable is for connecting between
SHOT-302GS/ 304GS/SHOT-702 and JS-300/JB-400.
Specifications
Part Number Controller Side JS/JB side
Cable Length
[m]
MDR14-CA-2.5 10114-3000PE 10114-3000PE 2.5
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
DHR-CA-3 Cable
Controller side (15 pins)
Connector: 17JE-23150-02(D1)
Hood: 17JE-15H-1A-CF
(Male Type) DDK Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND
Origin sensor
+VS
Auto config
N.C.
Limit sensor (+)
Limit sensor (−)
GND
Origin proximity sensor
+VS
Clamp bracket
Specifications
Brown
Red
Orange
Yellow
Green
Gray
Green
Blue
White
Black
Green
Green
Purple
Inner shield
Outer shield
Stage side (10 pins)
HR10A-10P-10PC(73)
(Male Type)
Hirose Electric Co., Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
Clamp
Bracket
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
Auto config
Limit sensor power
GND
Limit sensor (+)
Limit sensor (−)
Part Number Controller Side Stage Side
Cable Length
[m]
DHR-CA-3 17JE-23150-02(D1) HR10A-10P-10PC(73) 3
F.G.
GSE-CA-3 Cable
Controller side (15 pins)
Connector: D02-M15SG-N-F1
Hood: DE-C8-J9-F1-1R
(Male Type)
Japan Aviation Electronics Industry, Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Signal GND
Signal GND
+5V
+5V
Alarm−
A+
A−
B+
B−
FG
Case
Specifications
Blue
Green
Red
Brown
White
Orange
Yellow
Purple
Gray
Black
Inner shield
Outer shield
Stage side (15 pins)
Connector: D02-M15SG-N-FO
Hood: DE-C8-J9-F1-1R
(Female Type)
Japan Aviation Electronics Industry, Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
A−
A+
B−
B+
Alarm−
+5V
Signal GND
FG
Case
Part Number Controller Side Stage Side
Cable Length
[m]
GSE-CA-3 D02-M15SG-N-F1 D02-M15SG-N-F0 3
D02-M15SG-N-F1 D02-M15SG-N-F0
GSEF-CA-3
(with ferrite core)
3
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Other Cables
Catalog
Code
W9054
DOS/V PC
(D-sub 9pin female type)
1
2
3
4
5
6
7
8
9
Specifications
RS232C Cable GP-IB Cable USB Cable
Sigma Koki controller
(D-sub 9pin male type)
1
2
3
4
5
6
7
8
9
Part Number
Cable Length
[m]
RS232C/STR-1.8 1.8
RS232C/STR-3 3
RS232C/STR-4.5 4.5
Specifications
Part Number
Cable Length
[m]
GP-IB-0.5 0.5
GP-IB-1 1
GP-IB-2 2
GP-IB-3 3
GP-IB-4 4
USB
A connector
male type
1
2
3
4
Frame
Specifications
Shield
1
2
3
4
Frame
2m
Fully connected straight cable
USB
B connector
male type
Part Number
Cable Length
[m]
USB-1 1
USB-2 2
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G109

Motion Control Products
Maintenance / Grease Replacement
AFA/AFB/AFE/YVAC
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Maintenance
To maintain smooth operation, grease condition needs to be inspected and checked periodically
and grease needs to be supplied if necessary.
Use of grease will prevent rust, extending product life cycle significantly.
Catalog
Code
W9005
Effect of Grease
Minimizes friction to enable smooth drive.
Grease Up Method
1 Wipe off old grease.
2 Pour grease to supply in a syringe or the like.
3 Move the entire travel several times to apply grease thoroughly.
4 Wipe off grease that runs over in step 3.
* Too much grease will cause dust to adhere. Wipe the excess grease
clean.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Guide
▶We will perform filling of grease (charged separately). Contact our
International Sales Division for more information.
Specifications
Attention
▶Handling of grease requires attention. Avoid contamination with
foreign substances, mixing with different type of grease or air, and
heat treatment.
Part Number AFA AFB
Motorized Stages Used
SGSP15 Series
SGSP20 Series
SGSP26 Series
SGSP33 Series
SGSP46 Series
SGSP65 Series
TAMM
Manufacturer THK CO., LTD. THK CO., LTD.
Operating Temperature Range [°C] −45 〜 +160 −15 〜 +100
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Replacement of Grease
Grease used for motorized stages can be replaced with grease for clean room environments or
grease for vacuum applications.
Replacement Sites
Motorized stage : Ball screw part, crossed roller part (TSDM/TAMM series)
Always contact our International Sales Division since grease used for each component (guide part /
screw part) is different.
Rotation stage : Cannot be replaced by customers. Contact our International Sales Division for more information.
Goniometer stage : Cannot be replaced by customers. Contact our International Sales Division for more information.
(Always contact our International Sales Division since grease used for each component is different for goniometer stages.)
Features
Low dust generation grease for clean room environments
Reduces burden for maintenance since it is hard to deteriorate
and has long life.
It may lose fluidity and get hard suddenly in low-temperature
environments.
Catalog
Code
W9006
Fomblin Vacuum Grease
Has excellent heat resistance, lubricity and compatibility
with other materials.
It has long life and is usable in high temperature (−20°C
〜 +250°C).
Specifications
Part Number AFE-GREASE-C YVAC-GREASE-C
Number of Axes [axis] 1 1
Manufacturer THK CO., LTD. Solvay Solexis
Name Low dust generation grease for clean room environments Fomblin Vacuum Grease
Part Number AFE YVAC
Operating Temperature Range [°C] −40 〜 +120 −25 〜 +250
G110
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Question Sheet
Motorized Stage System Question Sheet
To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Affiliation
(Organization Name)
Department
Quantity
Usage
Weight of
Sample, etc.
Table Size
Number of Axes
Resolution
Changing Motor
Name
TEL FAX E-mail
Country/Address
Project Name
Drawing number
Desired
Delivery Date
Research and development
For incorporation
(equipment / production)
(Full)
(Half)
Estimate
Budget
Part Number
Axis Direction
Changing Travel
(changing limit sensor position)
mm Travel
Load
Capacity
Positioning
Accuracy
Positional
Repeatability
Yes: byDate
X axis
Electromagnetic brake Reduction gear Other (AC servo)
* Write more detailed specifications here. (Rough illustration is acceptable.)
■Quotation ■Order
Date
XY axis Z axis
(Tentative name is okay)
No
JP Yen
Fill in this column if you desire to modify a product listed on the catalog or if you have a base product.
Combination
mm
kgf
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Others
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Sigma Koki Co., Ltd.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G111

Motion Control Products
Piezo Guide
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
For the guide mechanism, Sigma fine stages adopted a guide system that utilizes elastic deformation of metals
and a mechanism to increase deformation of piezo elements. These originally designed stages achieved readable
resolution of 10nm during closed loop control, ideal for uses that require high-speed high-precision positioning.
Structure of Sigma Fine Stage
Displacement
Magnification Method
Piezo actuator and
displacement magnification
mechanism offer a large
operating range.
Displacement
Force
Digital Sensor
Closed loop control is
possible with a digital
sensor that does not
require any high precision
analog amplifier or AD
conversion circuit.
SFS-H Internal Structural Drawing
Upper plate
X axis mechanism
Baseplate
Piezo
actuator
Sensor counter board
Digital sensor
Piezo actuator
input connector
Digital sensor output connector
Operating Environment of Sigma Fine Stage
Use fine stages within the following operating environment
temperature range. Contact us separately if you desire to
use the stages outside the operating environment temperature
range.
*Operating environment
Temperature: 10°C − 30°C
Humidity: 20% − 60%
(without condensation)
*Recommended environment
Temperature: 20°C ±1°C
Humidity: 40% or lower
Since durability of piezo elements used in the SFS/SFS-H
stage series will deteriorate in high humidity environments,
use them in the above environments.
Guide
Sigma Fine System Chart
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
GP-IB
GP-IB cable
PC
Sample software
(download from website)
SGCommander
LabVIEW
USB cable
RS232C cable
RS232C USB
USB RS232C
Function generator
BNC-BNC cable
Analog input
AC100V
50/60Hz
AC100V
50/60Hz
CJ-200A
FINE-503
PIEZO 1/2/3 SENSOR 1/2/3
FINE-01γ
CJ-200A PIEZO SENSOR
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Single axis
(comes with cables)
SFS-H40X
SFS-H40Z
FINE cable
DS1 cable
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
For objective lens
(comes with cables)
SFS-OBL-1
SFS-OBL-2
SFAI-OBL-1-R
Single axis
SFS-H60X
SFS-H60Z
2 axes
SFS-H60XY
SFS-120XY(WA)
3 axes
SFS-H60XYZ
G112
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Accuracy Measurement Example: Sigma Fine Stage System SFS-H (Linear Stage)
High Speed Convergence Data
The following graph shows the hysteresis
curve unique to piezo actuators during open
loop control travel.
100
80
1st time
2nd time
Travel
Application
Systems
Optics &
Optical
Coatings
Holders
Displacement (µm)
60
40
20
Bases
0⇔75μm pulse rate (16Hz)
Closed loop control
by SFS-H60X at 150g load
(Reference)
(Reference)
0⇒1μm step convergence data (15msec)
Closed loop control
by SFS-H60X at 150g load
0
−20
−10 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150
Voltage (V)
(Reference)
Manual
Stages
Actuators
100
1st forward 5th forward
90
1st backward 5th backward
2nd forward 6th forward
80
2nd backward 6th backward
3rd forward 7th forward
70
3rd backward 7th backward
60 4th forward
4th backward
50
40
30
20
10
0
0 20 40 60 80 100
Command Value [µm]
Travel [µm]
Linearity
0⇔80μm linearity within 0.3%
Closed loop control
by SFS-H60X at 150g load
Measured Value [µm]
0.30
0.25
0.20
0.15
0.10
0.05
0.00
Positional Repeatability
Positional Repeatability (Forward)
Positional Repeatability (Backward)
0 10 20 30 40 50 60 70 80 90 100
Command Position [µm]
0⇔80μm positional repeatability 50nm or lower
by SFS-H60X at 150g load
Characteristics when feed amount is small in
closed loop control. Hysteresis disappears
in open loop control.
Displacement (µm)
6
5
4
3
2
1
Characteristics of Fine Feed
0
0 1 2 3 4 5 6
Indicated Value (µm) (Reference)
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
Straightness
Deviation from the straight line in the
direction of travel.
Pitch
Tilt around the axis in the horizontal plane
perpendicular to the direction of travel.
Characteristics of Yaw
Rotation around the axis in the vertical plane
perpendicular to the direction of travel.
AC Servo Motor
Cables
Piezo
Error (µm)
0.5
0.4
0.3
0.2
0.1
0
-0.1
-0.2
-0.3
-0.4
-0.5
0 8 16 24 32 40 48 56 64 72 80
Machine Position [µm] (Reference)
Pitch (″)
1
0.5
0
-0.5
-1
-1.5
-2
-2.5
1st time
2nd time
3rd time
-3
-10 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150
Voltage (V)
(Reference)
Follow-up example with Respect to Analog Input: SFS-H (Linear Stage) *Controlled by FINE-01γ
Yaw (″)
1
0.5
0
-0.5
-1
-1.5
-2
-2.5
1st time
2nd time
3rd time
-3
-10 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150
Voltage (V)
(Reference)
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Displacement (µm)
-10.6
-10.8
-11
-11.2
-11.4
-11.6
-11.8
-12
Capacitive sensor (user machine)
Position command value
Displacement (µm)
30
20
10
0
-10
-20
-30
-40
High Speed Convergence Data
Capacitive sensor (user machine)
Position command value
Input waveform: Navy/Output waveform: Light blue
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
-12.2 0 5 10 15 20 25
Time (sec)
0 0.4 0.8 1.2 1.6
0.2 0.6 1 1.4 1.8 2
Time (sec)
SFS-H40X
Staircase wave input/output waveforms
(Step 50nm 20-step staircase wave)
SFS-H40X
Saw-tooth wave input/output waveforms
(Uniform motion 35μm1Hz)
SFS-H40X
Rectangular wave input/output (30Hz)
SFS-H40X
Sine wave input/output (30Hz)
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G113

Motion Control Products
Sigma Fine (Piezo) Stages (high stiffness type)
XY Piezo Stages Aperture Type
SFS-H
SFS-120XY(WA)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
These piezo stages achieved fine movement of theoretical resolution of 1nm, offering high
precision, high stiffness and high speed with adoption of digital sensors.
SFS-H
◦These piezo stages offer high precision and high resolution positioning
because full closed loop control is possible with digital sensors.
◦With piezo elements used as actuators, travel between 90μm − 100μm
in open loop control, and fine movement of theoretical resolution of 1nm
are possible.
◦Readable resolution of 10nm is achieved during full closed loop control
with adoption of a digital sensor (micro-displacement sensor based on
the frequency digital conversion method) used as position detection
sensors.
◦Sigma Koki controller FINE series offers high speed. G117
Regarding pulse rate, SFS-H (linear) achieved 10 − 15Hz, or 25Hz when
the current FINE-01γ analog input is used.
Motoeized
Stages
Outline Drawing
Light
Sources
Index
SFS-H40X(CL)
Hexagon socket head cap screw M3×10…2 screws
40
16 16
6-M3 depth 4
2-φ2 +0.01
0
SFS-H40Z(CL)
Hexagon socket head cap screw M3×10…2 screws
40
16 16
2-φ2 +0.01
0
32
8
16 16
40
32
8
16 16
40
Guide
DS cable
2
FINE cable
4.5
FINE cable
2.5
6-M3 depth 4
DS cable
7
Controllers/Drivers
Softwares
Stepping Motor
4
7
20
2-φ3.5 mounting hole
32
φ6 counterbore
Travel direction
6
2-φ3.5 mounting hole
φ6 counterbore
32
4
25
Travel direction
AC Servo Motor
Cables
Piezo
SFS-H60X(CL)
Hexagon socket head cap screw M4×10…4 screws
60
25 25
16 16
8-M3 depth 5
2-φ2 +0.01
0
SFS-H60XY(CL)
Hexagon socket head cap screw M4×10…4 screws
(18.3) 60
25 25
8-M3 depth 5
16 16
2-φ2 +0.01
0
50
16 16
25 25
60
50
16 16
25 25
60
Y axis
travel direction
(11)
(11)
11 12
4-M4 depth 5
6.3
6.3
4-M4 depth 5
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
9.9
4.3
50
Travel direction
6
23
4-φ4.5 mounting hole
φ8 counterbore
Specifications
Part Number SFS-H40X(CL) SFS-H40Z(CL) SFS-H60X(CL) SFS-H60XY(CL)
Travel 90μm±15% 100μm±15% 100μm±15% 100μm±15%
Table Size [mm] 40×40 40×40 60×60 60×60
Actuator Piezo actuator Piezo actuator Piezo actuator Piezo actuator
Weight [kg] 0.28 0.28 0.4 0.43
Theoretical Resolution (open-loop) [nm] 1 1 1 1
Resolution (closed-loop) [nm] 10 10 10 10
Linearity [%] 0.3 or lower 0.3 or lower 0.3 or lower 0.3 or lower
Perpendicularity (Horizontal Direction) [μm] 1 1 1 1
Positional Repeatability [μm] 0.1 or lower 0.1 or lower 0.1 or lower 0.1 or lower
Load Capacity [N] 9.8 (1.0kgf) 6.7 (0.7kgf) 19.6 (2.0kgf) 14.7 (1.5kgf)
Micro-displacement Sensor Digital Sensor Digital Sensor Digital Sensor Digital Sensor
Compatible Cable Attached cable (2m) Attached cable (2m)
9.5
4.3
50
X axis travel direction
FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
6
23
4-φ4.5 mounting hole
φ8 counterbore
FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
G114
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Catalog
Code
Catalog
Code
W9054
W9055
Outline Drawing
SFS-H60Z(CL)
Hexagon socket head cap screw M4×10…4 screws
60
25 25
16 16
4-M4 depth 5
2-φ2 +0.01
0
SFS-H60XYZ(CL)
Hexagon socket head cap screw M4×10…4 screws
(19.3)
60
25 25
16 16
4-M4 depth 5
2-φ2 +0.01
0
Application
Systems
Optics &
Optical
Coatings
50
8.9
4.1
11 11
50
SFS-120XY(WA)
16 16
25 25
8-M3 depth 5
5.5
28
60
(11)
Travel direction
4-φ4.5 mounting hole
φ8 counterbore
8-M3 depth 5
4-φ4.5 mounting hole
φ8 counterbore
◦A high precision positioning XY axis stage with 50×50mm aperture fitted with a piezo element as an actuator and digital
sensor for position feedback, suitable for fine movement of samples under a microscope.
◦Can be driven with the Sigma fine stage controller FINE-503. Since the controller supports RS232C, GP-IB (FINE-503
only) and USB interfaces, position control can be performed easily from a PC using the software for positioning & measurement
SGEMCSE, SGTERME and SGSFSXE.
◦Ideal for applications such as incorporation into various types of microscopes, precision measurement, semiconductor
test equipment, high-precision mask alignment, scanning interferometer, image processor, and biotechnology systems.
50
11
12
12
4.3
12.6 12.6
50
16 16
25 25
6
40
60
(11)
Travel direction
X
Z
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Outline Drawing
SFS-120XY(WA)
Hexagon socket
head cap screw M4×8…4 screws
120
100
60
50 4-M4 through
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Travel direction
100
50
58
100
120
X
Y
(13)
18 7 10 16
Specifications
Part Number SFS-H60Z(CL) SFS-H60XYZ(CL) SFS-120XY(WA)
Travel 100μm±15% 100μm±15% 100μm±10%
Table Size [mm] 60×60 60×60 120×120
Actuator Piezo actuator Piezo actuator Piezo actuator
Weight [kg] 0.33 0.63 1.2
Theoretical Resolution (open-loop) [nm] 1 1 1
Resolution (closed-loop) [nm] 10 10 10
Linearity [%] 0.3 or lower 0.5 or lower −
Perpendicularity (Horizontal Direction) [μm] 1 1 1 or lower
Positional Repeatability [μm] 0.1 or lower 0.15 or lower 0.1 or lower
Load Capacity [N] 9.8 (1.0kgf) 9.8 (1.0kgf) 19.6 (2.0kgf)
Micro-displacement Sensor Digital sensor Digital sensor Digital sensor
Compatible Cable
FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
7
6.5
FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
100
3.5
19.5
20
4-φ4.5 mounting hole
φ8 counterbore
FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
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G115

Motion Control Products
Catalog
Piezo Actuator for Objective Lens SFS-OBL (Upright)/SFAI-OBL (Inverted) Code W9056
(SFS-OBL-1 only)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Objective lens actuator for inverted microscope employing a piezo element as actuator and digital
sensor for feedback.
◦Compact, and enabling high-speed high-resolution positioning.
◦Travel is 100μm at open loop.
◦Two types of erected model and inverted model are available for
incorporation into various types of microscopes.
◦In the case of the Sigma fine stage series, these actuators can be
driven with the controller (FINE-01γ/503(CL)). Since RS232C,
GP-IB (FINE-503 only) and USB interfaces are supported, position
control can be performed easily from a PC using the software for
positioning & measurement SGEMCSE, SGTERME and SGSFSXE.
Guide
▶Adapters compatible with screw sizes of other manufacturers’ objective lenses
are also available.
▶SFS-OBL-2 uses a metal enclosure type piezo actuator to improve environment
resistance such as humidity compared to SFS-OBL-1.
Motoeized
Stages
Light
Sources
Outline Drawing
SFS-OBL-1
23
(68.5)
φ36.4
SFS-OBL-2
23
(68.5)
φ36.4
SFAI-OBL-1R
60.8
42
[Accessory] Special adapter
26.5
19.5 7
Index
Guide
Controllers/Drivers
4.2
45
8.1 25.5
7
φ32
29.5 20
φ40
OBL-ADP-M**A
(2)
31
Travel
direction
OBL-ADP-M**B
4.2
55
8.1 25.5
7
φ32
29.5 20
φ40
OBL-ADP-M**A
(2)
41
Travel
direction
OBL-ADP-M**B
30 40
19.5
20
15.5 (2)
(2)
M5 depth 10
φ10
OBL-ADP3-M**B
Travel
direction
M5
OBL-ADP3-M**A
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number SFS-OBL-1 SFS-OBL-2 SFAI-OBL-1R
Travel 100μm±15% 100μm±15% 100μm±15%
Objective Lens Diameter [mm] Diameter φ39 or less Diameter φ39 or less Diameter φ39 or less
Dimensions [mm] (W)75.5 × (H)45 × (D)40 (W)75.5 × (H)55 × (D)40 (W)60.8 × (H)30 × (D)40
Actuator Piezo element Piezo element Piezo element
Weight [kg] 0.15 0.24 0.15
Theoretical Resolution (open-loop) [nm] 1 1 about 0.8
Resolution (closed-loop) [nm] 10 10 10
Straightness (Xy Xz Yx Yz) [μm] 1 or lower 1 or lower 0.2 or lower
Positional Repeatability [μm] 0.1 or lower 0.1 or lower 0.1 or lower
Load Capacity [N] − − 4.9 (0.5kgf)
Micro-displacement Sensor Digital sensor Digital sensor Digital sensor
Compatible Adapter OBL-ADP-** OBL-ADP-** OBL-ADP3-**
Accessories Cable (2m) Cable (2m) Cable (2m), four special lift spacers
X Translation
Theta Rotation
Goniometer
Vacuum
Options
OBL-ADP-MA OBL-ADP-MB OBL-ADP3-MA OBL-ADP3-MB
φ36
φ32
Objective Lens Adapters
14.5
3 4.5
φ38
B
A
A
2
4
φ28
φ32
φ38
φ30
φ28
14.5
2 4.5
φ38
B
A
A
2
9
φ28
φ30
φ38
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
SFS-OBL Compatible Adapters
Part Number
Mounting Screw Size
[mm]
A
[mm]
B
[mm]
OBL-ADP-M20.32A Microscope side M20.32 M20.32 P=0.706 (W0.8×1/36) 15
OBL-ADP-M20.32B Objective lens side M20.32 M20.32 P=0.706 (W0.8×1/36) −
OBL-ADP-M25.0A Microscope side M25.0 M25.0 P=0.75 20
OBL-ADP-M25.0B Objective lens side M25.0 M25.0 P=0.75 −
OBL-ADP-M26.0A Microscope side M26.0 M26.0 P=0.706 (W26.0×1/36) 21
OBL-ADP-M26.0B Objective lens side M26.0 M26.0 P=0.706 (W26.0×1/36) −
SFAI-OBL Compatible Adapters
Part Number
Mounting Screw Size
[mm]
A
[mm]
B
[mm]
OBL-ADP3-M20.32A Microscope side M20.32 M20.32 P=0.706 (W0.8×1/36) 15
OBL-ADP3-M20.32B Objective lens side M20.32 M20.32 P=0.706 (W0.8×1/36) −
OBL-ADP3-M25.0A Microscope side M25.0 M25.0 P=0.75 20
OBL-ADP3-M25.0B Objective lens side M25.0 M25.0 P=0.75 −
OBL-ADP3-M26.0A Microscope side M26.0 M26.0 P=0.706 (W26.0×1/36) 21
OBL-ADP3-M26.0B Objective lens side M26.0 M26.0 P=0.706 (W26.0×1/36) −
G116
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Catalog
SFS Controllers FINE Code W9057
Controllers with built-in piezo drivers for single axis / 3 axes.
FINE-01γ
FINE-503(CL)
■Primary Functions
Part Number FINE-01γ FINE-503(CL)
Controller Function
○
Number of Control Axes 1 3
Stored Program Control
○
Feedback Control
Digital sensor
■General Specifications
Power Voltage
AC100V ±10%
50/60Hz
Power Consumption
50VA
Operating Temperature 10 − 30°C
Storage Temperature −20 − 60°C
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 225×118×250 270×118×297
Weight (kg) 3.5 5.3
SFS Software
■Interface
GP-IB − ○
RS232C
○
USB
○
Analog input ○ −
■Optional
CJ-200A
○
SKBNC-BNC-3.0 ○ −
■Performance Specifications
Coordinate Indication Range ±999,999nm
Max. Travel to Set
±999,999nm
◦These controllers are fitted with digital sensor input for
each axis, enabling closed loop control by correcting
hysteresis curve unique to piezo.
◦Being connected to a PC via RS232C, GP-IB, or USB
interface, the FINE-503(CL) allows control of a fine stage
by simple commands sent from a PC.
◦In addition to PC control via RS232C or USB interface,
the FINE-01γ enables high-speed control synchronized
with analog signal input.
Part Name
Part Number
1 axis SFS Controller with Analog Input Function FINE-01γ
3 axes SFS Controller FINE-503(CL)
Control Pad
CJ-200A
FINE Cable
FINE-CA-3
DS Cable
DS1-CA-3
BNC-BNC Cable
SKBNC-BNC-3.0
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
○
○
○
○
○
−
−
−
○
−
−
○
−
−
−
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Free Software|SGCommander (for RS232C) Windows ® Version
Free software is available to operate your controller easily from a PC. Each axis of a connected motorized stage can be
moved using buttons on the screen. The software can be downloaded from our website.
(1) Jog operation
(3) Homing control (4) Travel control
LabVIEW application is
available for LabVIEW
users.
(2) Speed specification
Simple operations are possible such
as travel by specifying an axis, homing
or jog operation.
Free Application
LabVIEW (for v.5.1/v.6i/v.7.1/v.8.6/v.2010) RS232C/GP-IB
Port number
PortInit.vi
Stage drive shaft number
SetSpeed.vi Move.vi
Minimum speed (pulse/sec) Acceleration time (ms) Number of pulses per travel
Maximum speed (pulse/sec) Drive direction (T: +, F: -)
Controllers such as SHOT-30*/702 and
FINE-**, which have a built-in program
function, allow editing of programs
from a PC. Since data can be
downloaded/uploaded from/to Excel
sheets, it is easy to edit programs. In
addition, upload of memory switch or
download mode is available.
Other: 30 Day Trial Version (SGEMCSE/SGTERME)
Trial Version
SGEMCSE.....SGEMCSE is software for collecting data or measuring using
G025 automatic positioning equipment, measuring instrument or
controller, and is offered
30 days for free.
SGTERME.....It allows command input
G024 using Excel for easy
program making.
SGTERME is ideal
software to link with
various devices, and is
offered 30 days for free.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
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G117

Motion Control Products
Catalog
ECS Positioners ECS series Code W9200
Application
Systems
Optics &
Optical
Coatings
Holders
With Industrial Line positioners, attocube has genuinely combined highest precision piezodrive
technology with extremely rugged, yet cost effective design.
◦All ECS positioners of the Industrial Line are dedicated for operation at ambient temperature and depending on the model
for pressures ranging from atmospheric to UHV.
◦The ECS drive series features implemented crossed roller bearings and is thus specified for high loads of up to several
kilograms and guiding errors of less than 0.1mrad in pitch, yaw, and roll.
◦This powerful performance is supplemented by travel ranges up to 50mm, step sizes as small as 50nm, and optional
position sensor for closed loop operation with 1nm resolution. Attocube’s Industrial Line positioners are available in a wide
variety of designs, sizes, and travel ranges and can be stacked directly on top of each other for multi axis operation.
Bases
Specifications
Manual
Stages
Exterior
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
Products Name X axis positioner X axis positioner X axis positioner Goniometer Goniometer Rotator Rotator
Part Number ECS3030 ECS3080 ECS5050 ECGt5050 ECGp5050 ECR3030 ECR5050
Position Resolution 1nm 1nm 1nm 0.000001° 0.000001° 0.00001° −
Closed-loop
travel properties
Position Repeatability 50nm 50nm 50nm ±0.00005° ±0.00005° ±0.0005° −
Accuracy
< 0.01%
of travel range
< 0.01%
of travel range
< 0.01%
of travel range
≒0.001° ≒0.001° ≒0.002° −
Open-loop Minimum step size 50nm 50nm 50nm 0.0001° 0.0001° 0.0004° 0.0002°
travel properties Fine positioning range 1.6μm 1.6μm 1.6μm 0.0014° 0.0011° 0.012° 0.006°
Travel Range 20mm 50mm 30mm 10° 10° 360° 360°
Table Dimensions [mm] 30×30 30×80 50×50 50×50 50×50 30×30 50×50
Positioning Slide
Crossed Roller
Bearing
Crossed Roller
Bearing
Crossed Roller
Bearing
Crossed Roller
Bearing
Crossed Roller
Bearing
Ball Bearing
Ball Bearing
Aluminum 0.029 0.078 0.070 0.137 0.137 0.28 0.1
Weight [kg]
Stainless steel 0.051 0.147 0.247 0.247 0.247 0.66 0.215
Maximum Travel Speed 4.5mm/sec 4.5mm/sec 4.5mm/sec ≒1°/sec ≒1°/sec ≒10°/sec ≒5°/sec
Load Capacity (horizontal mounting) 9kg 24kg 15kg 1kg 1kg 2kg 2kg
* Closed-loop properties are available if “encoder option” is selected. For ordering, add suffix “/NUM” after the model number.
AC Servo Motor
Cables
Piezo
Control of Industrial Line Positioners—ECC100
The three axes controller ECC100 is used for driving all ECS positioners either in open loop or
closed loop mode, depending on the corresponding positioner model.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Controller Hardware
Part Number
ECC100
Chassis [mm]
about (W)210 × (H)50 × (D)210
Weight [kg] 1.9
Power supply
100/115/230V, 50−60Hz
Power consumption
max. 100W
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Software features
The ECC100 is delivered with a basic software package providing
windows based software including LabView driver set and DLL.
A dedicated software package /PRO providing enhanced controller
functionality can be upgraded at any time. The /SYNC option offers
the use of an Ethernet interface and allows for using the controller
with Epics drivers.
Output Signals
Stepping - voltage range
Stepping - frequency range
Stepping - maximum current
Resolution of signal generation
Output connectors
0 − 45V
0 − 5kHz (1 axis)
0 − 2kHz (3 axes simultaneously)
>5A Peak
680μV (16 bit)
SubD 15 connectors
G118
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Motion Control Products
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Motion Control Products
I N D E X
Quality Assurance
We verify the working accuracy when stage assembly is
completed. All products we ship are compliant to JIS or
have passed company regulations.
Serial Number
A sticker like the one shown in the picture is
affixed onto Sigma Koki products. It shows
information such as our company logo, part
number, and serial number.
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Motion Control Products
Motorized Stages Guide
Measurement of Linear Stage Accuracy
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Positional Accuracy
Positioning is performed
successively from the
reference position in one
direction at a fixed
interval across the range
of travel. The difference
between the target
values and measured
values at each of the
positioning points is
calculated, and the
difference between the
minimum and maximum
values is taken to be the
positioning accuracy.
Positioning Accuracy
Multiple
positioning
Target position
Difference between min. and max. values
Positioning is performed
multiple times in the (+)
forward and (–)
backward directions on
any position (e.g. both
ends or center point) of
the stage, and the mean
value of the deviation
amount with respect to
the stop position is
calculated.
The maximum of the
numerical values is taken
to be lost motion.
Lost Motion
Bidirectional
positioning
Targetposition
Mean value of multiple positionings
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Positioning is performed
multiple times from the
same direction on any
position (e.g. both ends
or center point) of the
stage, and the maximum
value of the deviation
amount with respect to
the stop position is
calculated.
The maximum of those
numerical values is taken
to be positional
repeatability.
Positional Repeatability
Max. error
Multiple
positioning
Target position
A fixed load is applied to
the (+) forward or (–)
backward direction on
any position (e.g. both
ends or center point) of
the stage.
The total deviation in the
respective direction at
that time is taken to be
backlash.
Backlash
Deviation by (-)
backward direction load
Deviation by (+)
forward direction load
Stop position
Deviation in both directions
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Working Accuracy
Running Parallelism
Orthogonality of Motion
Measure the working displacement of the Y axis when referenced
to the X axis of the XY axis stage with a square. The displacement
at this time is taken to be the orthogonality of motion.
Perpendicularity of Motion
Place a dial gauge on the Z stage, and measure the displacement
with respect to a vertical plate. The displacement at this time is
taken to be the perpendicularity of motion.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
This is the displacement in the height
Max. displacement value
direction between the stage mounting
surface and the travel guide of the stage.
The displacement in the vertical direction of the table during stage
motion along the full stroke is taken to be the running parallelism.
(Reference) Measurement Result (OSMS20-35)
1 2 3 4 5 6 7 8 9
Target Position [μm] 0 2500 5000 7500 10000 12500 15000 17500 20000
Positioning Direction ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓
Position Deviation [μm] 1st time 0.0 –1.2 –0.1 –0.5 0.2 –0.8 –0.3 –0.5 –0.1 –1.4 –0.4 –1.1 –1.7 –2.3 0.3 0.1 –1.5 –1.8
(Measured Value − Target Position) 2nd time –0.6 –1.2 –0.2 –0.4 0.1 –0.7 –0.2 –0.6 –0.3 –1.4 –0.8 –0.9 –1.7 –2.5 0.0 –0.1 –1.5 –1.9
3rd time –0.4 –0.9 –0.1 –0.8 0.2 –1.3 –0.4 –0.7 –0.1 –1.3 –0.8 –1.2 –1.5 –2.6 0.3 0.0 –1.5 –1.9
4th time –0.2 –1.6 –0.3 –0.6 –0.2 –0.9 –0.4 –0.6 –0.3 –1.2 –0.8 –1.2 –1.5 –2.5 0.3 –0.2 –1.5 –2.0
5th time –1.0 –1.2 –0.3 –0.6 0.0 –1.4 –0.5 –0.6 –0.2 –1.2 –0.6 –1.1 –1.6 –2.6 0.2 –0.1 –1.7 –2.0
Mean Position Deviation X –0.44 –1.22 –0.20 –0.58 0.06 –1.02 –0.36 –0.60 –0.20 –1.30 –0.68 –1.10 –1.60 –2.50 0.22 –0.06 –1.54 –1.92
Standard Deviation X 0.38 0.25 0.10 0.15 0.17 0.31 0.11 0.07 0.10 0.10 0.18 0.12 0.10 0.12 0.13 0.11 0.09 0.08
X+S –0.06 –0.97 –0.10 –0.43 0.23 –0.71 –0.25 –0.53 –0.10 –1.20 –0.50 –0.98 –1.50 –2.38 0.35 0.05 –1.45 –1.84
X−S –0.82 –1.47 –0.30 –0.73 –0.11 –1.33 –0.47 –0.67 –0.30 –1.40 –0.86 –1.22 –1.70 –2.62 0.09 –0.17 –1.63 –2.00
Lost Motion B=X↑−X↓ 0.78 0.38 1.08 0.24 1.10 0.42 0.90 0.28 0.38
Maximum (Position Deviation) Value S↑+S↓+|B| 1.41 0.63 1.56 0.42 1.30 0.72 1.12 0.52 0.55
Wobble per Rotation 1.00 0.80 0.80 0.90 0.70 1.60 2.60 1.90
■Result Maximum Lost Motion 1.10μm
Average Lost Motion
0.62μm
Positional Repeatability
Unidirectional Positioning ↑ 0.77μm
↓ 0.62μm
Bidirectional Positioning 1.56μm
Positioning Accuracy
2.97μm
Error per Rotation (maximum) 2.60μm
G004
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Moment Stiffness (Pitch/Yaw/Roll)
Moment stiffness is the stage strength against load exerted at a point away from the center of the table face.
(The center of the table face does not match the center of gravity of work.)
It indicates the degree of tilt of the table face (sec) when 1N load is exerted at a point 1cm away from the center of the stage
face.
Yaw
Pitch Yaw Roll
Application
Systems
Optics &
Optical
Coatings
Holders
Pitch
Bases
Roll
Manual
Stages
Angular Accuracy
Pitch
Pitch is the angle displacement of the table face in the pitch direction
while the stage is in motion.
It indicates the maximum angle displacement during full travel.
Parallelism
It indicates the parallelism of the table fixed on the stage against the
base plane.
Yaw
Yaw is the angle displacement of the table face in the yaw direction
while the stage is in motion.
It indicates the maximum angle displacement during full travel.
Actuators
Motoeized
Stages
Light
Sources
Index
(Reference) Measurement of XY axis Stage Accuracy
Positioning Accuracy Positional Repeatability Lost Motion
Error [µ]
Error [µ]
Error [µ]
150
100
50
0
12
8
4
0
12
8
4
0
OSMS20-85 OSMS26-200 OSMS33-300
0 50 100
Load Factor [%]
0 50 100
Load Factor [%]
0 50 100
Load Factor [%]
Single axis X axis of XY Y axis of XY
Error [µ]
Error [µ]
Error [µ]
150
100
50
0
12
8
4
0
12
8
4
0
0
0 50 100 0 50
100
Load Factor [%]
0 50 100
Load Factor [%]
0 50 100
Load Factor [%]
Error [µ]
Error [µ]
Error [µ]
250
200
150
100
50
12
8
4
0
12
8
4
0
Load Factor [%]
0 50 100
Load Factor [%]
0 50 100
Load Factor [%]
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Higher load factor at the travel
end of motorized stages
increases the deflection on
Y axis, resulting in extremely
poor positioning accuracy.
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G005

Motion Control Products
Motorized Stages Guide
Measurement of Rotation Stage Accuracy
Application
Systems
Optics &
Optical
Coatings
Positional Accuracy
Positioning Accuracy
Reference position
Positional Repeatability
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Max. error
Multiple positioning
Target position
Positioning is performed successively from the reference position in
one direction at a fixed interval across almost the entire range of travel.
The difference between the target values and measured values at each
of the positioning points is calculated, and the difference between the
minimum and maximum values is taken to be the positioning accuracy.
Lost Motion
Max. error
Multiple positioning
Target position
Positioning is performed multiple times from the same direction on
any position of the stage, and the maximum value of the deviation
amount with respect to the stop position is calculated.
The maximum of those numerical values is taken to be positional
repeatability.
Backlash
Light
Sources
Bidirectional positioning
(+) forward direction load
Index
Bidirectional positioning
Target
position
Mean value of multiple
positioning results
(-) backward direction load
Target
position
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Positioning is performed multiple times in the (+) forward and (–)
backward directions on any position (e.g. both ends or center
point) of the stage, and the mean value of the deviation amount
with respect to the stop position is calculated.
The maximum of the numerical values is taken to be lost motion.
Working Accuracy
Wobble
A fixed load is applied to the (+) forward or (–) backward direction
on any position of the stage.
The total deviation in the respective direction at that time is taken
to be backlash.
Concentricity
Cables
Piezo
Ideal rotation axis
Deviation between the two axes
Actual rotation axis
Displacement in height direction
between the rotary table and
the mounting base surface
Reference plane
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Wobble is the maximum displacement in the height direction
between the rotary table and the mounting base surface when the
rotation stage is rotated once.
(Reference) Measurement Result (SGSP-60YAW-0B)
Concentricity is the difference between the ideal rotation center
and the actual rotation center when the rotation stage is rotated
once.
0 1 2 3 4 5 6 7 8 9 10 11 12
Target Position [ ° ] 0 29 58 87 116 145 174 203 232 261 290 319 348
Positioning Direction ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓
Position Deviation [ ° ] 1st time 0.000 0.015 –0.009 0.003 –0.010 –0.001 –0.013 –0.004 –0.012 0.001 –0.007 0.009 –0.007 0.009 0.000 0.012 0.004 0.016 0.002 0.015 0.007 0.020 0.000 0.013 –0.001 0.010
(Measured Value − Target Position) 2nd time 0.002 0.015 –0.007 0.003 –0.009 –0.001 –0.012 –0.004 –0.012 0.001 –0.006 0.009 –0.007 0.009 –0.001 0.013 0.004 0.016 0.002 0.015 0.007 0.020 0.000 0.013 –0.001 0.011
3rd time 0.003 0.015 –0.007 0.003 –0.009 –0.001 –0.012 –0.004 –0.012 0.001 –0.007 0.009 –0.007 0.009 –0.001 0.013 0.004 0.016 0.002 0.015 0.007 0.020 0.000 0.014 –0.001 0.011
4th time 0.003 0.016 –0.007 0.003 –0.009 –0.001 –0.013 –0.004 –0.012 0.000 –0.006 0.009 –0.007 0.009 –0.001 0.013 0.004 0.016 0.002 0.015 0.007 0.020 –0.001 0.014 –0.001 0.011
5th time 0.002 0.016 –0.007 0.004 –0.009 –0.001 –0.013 –0.004 –0.012 0.001 –0.007 0.009 –0.007 0.009 –0.001 0.014 0.003 0.016 0.002 0.015 0.007 0.020 –0.001 0.014 –0.001 0.011
Mean Position Deviation X 0.002 0.015 –0.007 0.003 –0.010 –0.001 –0.012 –0.004 –0.012 0.001 –0.007 0.009 –0.007 0.009 –0.001 0.013 0.004 0.016 0.002 0.015 0.007 0.020 0.000 0.014 –0.001 0.011
Standard Deviation X 0.001 0.000 –0.001 0.000 –0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000
X+S 0.003 0.016 –0.007 0.004 –0.009 –0.001 –0.012 –0.004 –0.012 0.001 –0.006 0.009 –0.007 0.009 0.000 0.013 0.004 0.016 0.002 0.015 0.007 0.020 0.000 0.014 –0.001 0.011
X−S 0.001 0.015 –0.008 0.003 –0.010 –0.001 –0.013 –0.004 –0.012 0.000 –0.007 0.009 –0.007 0.009 –0.001 0.013 0.003 0.016 0.002 0.015 0.007 0.020 –0.001 0.013 –0.001 0.010
Lost Motion B=X↑−X↓ 0.0135 0.0107 0.0084 0.0088 0.0125 0.0154 0.0163 0.0136 0.0122 0.0127 0.0130 0.0139 0.0120
Maximum (Position Deviation) Value S↑+S↓+|B| 0.0148 0.0116 0.0091 0.0091 0.0129 0.0158 0.0168 0.0142 0.0127 0.0131 0.0133 0.0144 0.0125
■Result Maximum Lost Motion 0.0163° Wobble Accuracy 12μm
Positional Repeatability
Parallelism 27μm
Unidirectional Positioning ↑ 0.0022° Concentricity 8μm
↓ 0.0009°
Bidirectional Positioning 0.0168°
Positioning Accuracy 0.0330°
Error per Rotation (maximum) 2.60°
G006
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Angular Accuracy
Moment Stiffness
Parallelism
Application
Systems
Optics &
Optical
Coatings
Holders
Attitude displacement angle
Bases
The angular displacement of the stage when unit moment load is
applied.
The parallelism of the table fixed on the stage against the base
plane.
Manual
Stages
Measurement of Goniometer Stage Accuracy
Positional Accuracy
Actuators
Motoeized
Stages
Positional Repeatability
Positioning is performed multiple times from the same direction on
any position of the stage, and the maximum value of the deviation
amount with respect to the stop position is calculated.
The maximum of those numerical values is taken to be positional
repeatability.
Ideal rotation center
Rotation Center Height
The distance to the top surface of the table from the ideal rotation
center.
Light
Sources
Index
Multiple
positioning
Target position
Reference
position
Rotation center height
(WD)
Guide
Maximum error
Multiple
positioning
Target position
Maximum error
Reference position
Ideal
rotation center
Rotation center
height
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Rotation Center Deviation Accuracy
The maximum deviation range from the ideal rotation center
position when a gonio stage is moved throughout the full travel.
Ideal rotation center
Ideal rotation center
Lost Motion
Positioning is performed multiple times in the (+) forward and (–)
backward directions on any position (e.g. both ends or center
point) of the stage, and the mean value of the deviation amount
with respect to the stop position is calculated.
The maximum of the numerical values is taken to be lost motion.
Cables
Piezo
Rotation center
deviation accuracy range
Actual rotation center
Ideal
rotation center
Rotation center
deviation accuracy
range
Actual
rotation center
Mean value of multiple positioning results
Target position
Bidirectional
positioning
Mean value of
multiple positioning
X Translation
Theta Rotation
Goniometer
Target position
Vacuum
Angular Accuracy
Moment Stiffness
Options
□40mm
□60mm
The angular displacement of the stage when unit moment load is
applied.
□80mm
□85mm
□100mm
□120mm
Others
Attitude displacement angle
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G007

Motion Control Products
Motorized Stages Guide
Accuracy Verification
Application
Systems
Motorized stage accuracy is, in principle, confirmed in compliance with the JIS test code for machine tools (JIS B 6190).
In addition, all measuring instruments are traceable standard instruments compliant to the national standard.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Category Measurement Item Device Used Standards
Light
Sources
Index
Guide
Linear Stage
Positioning Accuracy
Positional Repeatability
Lost Motion
Dynamic Calibrator
(HP5529A)
JIS B 6190
Running Parallelism Dial Indicator Company Standard
Pitch/Yaw Auto Collimator Company Standard
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
It has to be guaranteed that measured values and indicated
values are within the specification range of international
standard values. In other words, traceability must
be ensured. JIS defined this traceability as “the capacity
to trace measurement results back to the domestic
measurement standards, with the use of measuring
instruments that have gone through a sequence of calibrations
with high-ranking standards.”
Linear Stage Traceability System Diagram
State
Institution
Manufacturer
National Institute of Standards and Technology
(NIST)
Agilent Technologies, Inc.
Calibration
Device
Dynamic Calibrator
Category Measurement Item Device Used Standards
X Translation
Theta Rotation
Goniometer
Rotation Stage
Positional Repeatability
Rotary Encoder
Company Standard
Lost Motion
Wobble Accuracy Dial Indicator Company Standard
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Goniometer Stage
Positional Repeatability
Lost Motion
Rotation Center Height
Rotation Center Deviation Accuracy
Accuracy Check in Assembled State
We check accuracy of motorized stages as a single unit.
Regarding the accuracy check in assembled state, we
need to confirm use conditions etc. Contact our International
Sales Division separately.
Rotary Encoder
Three Dimensional Instrumentation
Company Standard
Company Standard
Accuracy Check at Delivery Destination
We cannot conduct accuracy check at delivery destinations.
We will request a check from organizations such as
Japan Quality Assurance Organization as necessary.
Contact our International Sales Division separately for
more information.
G008
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Interpretation of the Specification Table
Specifications
1… Part Number **-**
2… Opposite Model **-**R
3…
Travel
**mm
4… Table Size **×**mm
5… Mechanical Feed Screw
6… Specifications Positioning Slide
7… Stage Material
8… Weight **kg
9…
Resolution
(Full)
(Half)
**μm/pulse
**μm/pulse
10… MAX Speed **mm/sec
11… Repeatability **μm
12… Positional Repeatability **μm
13… Load Capacity **N (**kgf)
Pitch **″/N・cm
Moment
14… Accuracy
Yaw **″/N・cm
Stiffness
Specifications
Roll **″/N・cm
15… Lost Motion **μm
16… Backlash **μm
17… Parallelism **μm
18… Running Parallelism **μm
19… Orthogonality of Motion **μm
20… Perpendicularity of Motion **μm
21… Pitch / Yaw **″/**″
22…
Sensor Part Number
23… Limit Sensor
Sensor
24… Origin Sensor
25… Proximity Origin Sensor
26…
Motor / Sensor Specifications
Type
27… Motor Motor Part Number
28… Step Angle
29…
Power Voltage
30… Current Consumption
Sensor
31… Control Output
32… Output Logic
Compatible Driver / Controller
33…
Control System
Compatible Driver
34… Compatible Controller
[Memo]
The drawing shows the types of tilt when a linear stage travels.
Towards the direction of travel...
Pitch Rotation around the axis in the horizontal plane perpendicular to the direction of travel
Yaw Rotation around the axis in the vertical plane perpendicular to the direction of travel
Roll Rotation around the axis in the horizontal plane parallel to the direction of travel
1 Part Number
2 Opposite Model
[Mechanical Specifications]
3 Travel Indicates the full travel.
4 Table Size Size of top table face.
5 Feed Screw * Ball screw
* Precision ground screws
6 Positioning Slide * Outer rail structure
* Crossed roller guide
7 Stage Material Material used for the product.
8 Weight Self weight of the product.
[Accuracy Specifications] Refer to the accuracy verification page for more information.
G004 − G007
9 Resolution (Full) Travel per pulse for full step
(Half) Travel per pulse for half step
10 MAX Speed MAX speed of the product (maximum travel speed).
11 Positioning Accuracy Deviation between the measured value and the target
value at the positioning point.
12 Positional Repeatability Deviation in stop positions when unidirectional positioning
is performed multiple times.
13 Load Capacity Load capacity at the center of the stage.
14 Moment Stiffness Stage strength against a load exerted at a position away
from the center of the table top (the table center and the
center of gravity of a work does not match). It indicates
the degree of tilt of the table top (″) when 1N load is
exerted at the position 1cm away from the center of the
stage surface.
Pitch
Stiffness in the direction of tilt around the axis in the
horizontal plane perpendicular to the direction of travel
when moving the stage for full travel.
Yaw
Stiffness in the direction of tilt around the axis in the
vertical plane perpendicular to the direction of travel when
moving the stage for full travel.
Roll
Stiffness in the direction of tilt around the axis in the
horizontal plane parallel to the direction of travel when
moving the stage for full travel.
15 Lost Motion Deviation between the stop position of forward positioning
and that of backward positioning.
16 Backlash Deviation in each direction when a certain load is exerted
in forward and backward directions at an arbitrary position
on the stage.
17 Parallelism The parallelism of the table fixed on the stage against the
base plane.
* Note that it is different from “Running Parallelism”.
18 Running Parallelism Displacement in the vertical direction of the table during
stage motion along the full travel.
19 Orthogonality of Motion Working displacement in the direction perpendicular to the
Y axis when referenced to the X axis motion of the XY axis
stage.
20 Perpendicularity of Motion Displacement between the Z axis stage and the perpendicular
optical breadboard when moving the stage for full
travel.
21 Pitch Maximum angle displacement in the direction of tilt around
the axis in the horizontal plane perpendicular to the
direction of travel when moving the stage for full travel.
Yaw
Maximum angle displacement in the direction of tilt around
the axis in the vertical plane perpendicular to the direction
of travel when moving the stage for full travel.
[Sensor]
22 Sensor Part Number Sensor used for the product.
23 Limit Sensor Indicates whether fitted with a limit sensor.
24 Origin Sensor Indicates whether fitted with an origin sensor.
25 Proximity Origin Sensor Indicates whether fitted with a proximity origin sensor.
[Motor Specifications]
26 Type Type of motor.
27 Motor Part Number Part number of motor used for the product.
28 Step Angle Step angle of the motor.
[Sensor Specifications]
29 Power Voltage
30 Current Consumption Specifications of the sensor.
31 Control Output
32 Output Logic
[Compatible Driver / Controller]
33 Compatible Driver Driver/controller compatible with the product.
34 Compatible Controller
Pitch
Yaw
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Roll
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G009

Motion Control Products
Stepping Motors Guide
Operating Environment of Motorized Stages
Application
Systems
Optics &
Optical
Coatings
Holders
Use motorized positioning stages within the following operational environment temperature range.
Contact our International Sales Division separately if you desire to use the stages outside the operational environment
temperature range.
*Operating environment
*Recommended environment
Temperature: 5°C − 40°C Temperature: 23°C ±5°
Humidity: 30% − 80% (without condensation) Humidity: 60±10% (without condensation)
Bases
Manual
Stages
Actuators
Operational environment temperature changes depending on various conditions such as the type of motorized positioning
stage, installation and operation conditions.
Avoid use of the stages in the following sites.
◦Sites subject to water or oil
◦Sites subject to direct sunlight or radiant heat
◦Sites subject to dirt and dust
◦Sites subject to vibration or impact
◦Sites close to fire
◦Sites subject to inflammable gas and corrosive gas
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
Life Cycle
Although the life cycle varies depending on intended use
or application, 2,000 to 3,000 hours for linear systems
and 1,000 to 1,500 hours/year (about 3 to 4 hours/day) for
rotation/goniometer systems are assumed.
Note that the above assumption may not apply to repeated
operations (high-speed drive or high-load drive).
Careful maintenance or supply of grease is important for
using the products for a long time without a problem.
G018 Maintenance / Grease Replacement
Example of Installation Procedure
Storage
When not using motorized stages for a long time, store
motorized stages wrapped with anti-rust paper, or store
in a plastic bag with a desiccant.
Storage Temperature: 0°C − 40°C
Humidit: 10% − 85% (without condensation)
AC Servo Motor
Cables
Piezo
OSMS
Linear
OSMS-(Z)
SGSP-YAW
Rotation
X Translation
Theta Rotation
Goniometer
OSMS-ZF
HPS
SGSP-A
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Attention
▶Recommended parallelism for stage mounting surface is 0.02 or lower. A product might be warped when it exceeds 0.02, causing abnormal
operation.
▶When mounting another product on the upper table of a motorized stage, make sure that the stage is not subjected to abnormal external force.
▶Foreign substances in tapped holes on the upper table or on the side of the stage will cause malfunction.
G010
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Mounting Orientation
The values in the specifications of each product are based on installation on a level surface.
Note that load capacity and other precision values will significantly change for upside down, lateral horizontal and other
installation orientations, because mounting on other than the horizontal surface require securing with screws.
Category Series Name Positioning Slide Upside Down Lateral Horizontal Lateral Vertical
OSMS Outer Rail ○ ○ ○
Linear HPS Ball Guide ○ ○ △
TAMM, KST Crossed Roller ○ ○ △
SGSP-YAW Worm and Worm Wheel ○ △ △
Rotation HDS-YAW Bearing ○ △ △
KST Crossed Roller ○ ○ △
Goniometer
OSMS-A/B Ball Guide ○ ○ △
SGSP-A/B Crossed Roller ○ △ △
Please contact our International Sales Division regarding other unclear points related to mounting orientation.
Selection Guide
○: Possible with limits on load capacity and other accuracy.
△: Possible depending on the model, with limits on load capacity and other accuracy.
×: Not allowed
Motorized stages are categorized in several different travel axes and types by the differences in
structure or positioning slide.
Since precision, stiffness and price differ depending on the type, select a product ideal for the
intended purpose.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Precision
Linear Rotation Goniometor
Series Name Relevant Product Series Name Relevant Product Series Name Relevant Product
Controllers/Drivers
Softwares
High
KST
Crossed Roller
G062 –
KST
Bearing
G078
Stepping Motor
AC Servo Motor
Cables
Piezo
TAMM
Crossed Roller
G060
HDS-
YAW
Bearing
G080
OSMS
Ball Guide
G082
X Translation
Theta Rotation
Goniometer
HPS
Ball Guide
G060
OSMS
Outer Rail
SGSP
Bearing
G074 –
SGSP
Crossed Roller
G086
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Bottom
G032 –
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G011

Motion Control Products
Stepping Motors Guide
Linear
Application
Systems
Optics &
Optical
Coatings
Holders
HPS Series
Durable linear stages with excellent cost performance.
Motor Variation
Compatible with 2 phase stepping motor, α stepping motor and AC servo motor manufactured
by Oriental Motor Co., Ltd. in addition to the standard 5 phase stepping motor.
Bases
Manual
Stages
Low Price
High Durability
Integration of the main unit and guide has reduced the number of
parts and assembly man-hours, offering low price.
Ball screws are used for the feed mechanism to achieve both low
price and durability.
Actuators
Motoeized
Stages
Light
Sources
Index
OSMS Series
Stepping motor stages compatible with versatile travel range between 35 to 500mm and can be used in any orientation.
Slim Body
These stages are our standard CE-compliant motorized
stages, covering motors neatly. These stages offer attractive
range of travel by fully utilizing the features of the outer rails.
Guide
Line Up
Full closed loop control for stage table positioning, and linear
encoder version for coordinate counting are standard line up.
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Safety Cover
Safety specifications of these stages
are compliant with safety requirements
on electrical measuring and control
equipment and electrical equipment
for laboratory use (EN61010-1:2010).
Option
Slim Body
The structure in which the
U-shaped outer rail and inner
block with center integrated ball
screw offers high stiffness, high
precision and minimum footprint.
Various options are available according to the application. Geared
motors and electromagnetic brakes are available for high-load
specifications and Z axis specifications, respectively. Contact our
International Sales Division for more information.
■XY axis mounting becomes easier.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Part Number
5 Phase Stepping Motor
Achieves the minimum size and
minimum weight with high speed
and high torque. The rated current
is 0.75A/phase which is common
to all sizes.
Table Size
[mm]
Wide
[mm]
Base Plate
Stages can be installed by
securing with bolts without
removing their covers. If rigidity is
required, the base plates can be
removed.
Height
[mm]
Travel
[mm]
Load Capacity
[N]
OSMS20-35(X) 85×85 85 35.7 35 78.4
OSMS20-85(X) 85×85 85 35.7 85 78.4
OSMS26-50(X) 100×100 100 42 50 117
OSMS26-100(X) 100×100 100 42 100 117
OSMS26-200(X) 100×100 100 42 200 117
OSMS26-300(X) 100×100 100 42 300 117
OSMS33-300(X) 120×120 120 57 300 196
OSMS33-500(X) 120×120 120 57 500 196
Two single axis stages can be assembled
directly and used as an XY axis stage without
the need of XY-axis mounting plates.
Motorized Extended Guide
Goniometer
Translation Motorized Stages,
Flat Z axis - 5 Phase Stepping Motor
G012
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TAMM Series
Motorized crossed roller stages that combine compactness, low-profile and high durability
High Durability
Compact/
Low-profile
Line contact with rollers and V groove rail offers high stiffness, low friction
and virtually no differential slip, suitable for minute feeding.
“Ideal for space-saving and assembly of systems with low optical
axis.”
Application
Systems
Optics &
Optical
Coatings
Holders
Sizes
□40/□60/□100mm are available.
Bases
Manual
Stages
KST Series
Actuators
High Precision
High Load
Capacity
High precision stages with steel body relatively strong against heat, and in which
precision ball screws and crossed roller guide are arranged with highest precision.
Achieved the maximum load capacity of 392N (40.0kgf).
Motoeized
Stages
Light
Sources
High Stability
Steel body fitted with large table face can mount anything.
Index
Guide
Controllers/Drivers
Softwares
Rotation
SGSP-YAW Series
Stepping motor driven rotation stages fitted with bearing guide and worm gear feed mechanism
Stepping Motor
AC Servo Motor
Cables
Piezo
Low Price
Compact/
Low-profile
Number of parts and assembly time were reduced to lower the
price.
Ideal for space-saving and assembly of systems with low optical
axis.
Sizes
φ40/φ60/φ80/φ120/φ160mm are available.
X Translation
Theta Rotation
Goniometer
Vacuum
HDS-YAW
High durability rotation motorized stages for minute angle adjustment.
High Durability
Isokinetic
Ball screws and steel belts used in the drive mechanism offer
excellent durability in minute angles.
Since it converts linear motion by the ball screw into rotational
motion by the steel belt, there is no difference between traveling
center and end by rotation speed and resolution.
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Sizes
φ40/φ60/φ80/φ120/φ160mm are available.
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G013

Motion Control Products
Stepping Motors Guide
KST-YAW Series
Application
Systems
High precision and high stability rotation motorized stages fitted with bearing positioning slide
Optics &
Optical
Coatings
Holders
High Precision
High Load
Capacity
High repeatability stages fitted with bearing positioning slide.
Achieved the maximum load capacity of 392N (40.0kgf).
Bases
High Stability
Steel body fitted with large table face can mount anything.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
Goniometer
OSMS Sereis
High precision motorized goniometers with integrated bearing ways for superior stiffness, accuracy and durability
Their smooth movement is ideal for frequent angle adjustment.
Low Price
High Precision High
Stiffness High Durability
Number of parts and assembly time were reduced to lower
the price.
Integrated ball guide structure in which guides are
directly processed on the main body minimized machining/assembly
errors and improved rotation center
accuracy.
AC Servo Motor
Cables
Piezo
SGSP-A/B Series
Stepping motor driven motorized goniometer stages fitted with crossed roller guide
High Stiffness
High stiffness goniometer stages fitted with excellent abrasion
resistant crossed roller guide.
Operability
Products with two axes combined offer further flexible alignment.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Lightweight
Aluminum body offers lightweight.
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
G014
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GS/CS series Guide
Full closed loop control system that controls a motorized stage with built-in high resolution compact
linear encoder using a special controller.
◦Linear encoder signal feedback and micro-step drive can minimize lead error, which is inherent to feed screw mechanism.
◦Small glass scale of linear expansion coefficient enabled a highly reliable positioning system stable against fluctuations in
ambient environment.
◦Ideal for use in positioning that requires precision in submicron units, and prolonged driving that is affected by reproducibility
by temperature drift.
Application
Systems
Optics &
Optical
Coatings
Full Closed Control System (Image diagram)
Holders
Bases
Positioning instruction
Liner scale
Detector
Feed screw
SHOT-GS
Position signal feedback
Error from the target position
One turn of screw
Lead error
Table position
Open loop control
During feedback control
Reduce lead error,
and improve positioning
accuracy
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
System Chart
Guide
PC
Sample software
(download from website)
SGCommander
LabVIEW
HIT Sample
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
GP-IB cable
USB cable
RS232C cable
Cables
Piezo
CJ-200A
GP-IB
RS232C USB I/O / Terminal Block
LAN cable USB RS232C
HIT-M HIT-S HIT-S HIT-S Maximum
8 units
ETHERNET
can be linked
I/O control
external device
I/O
MDR cable
JD-100 JS-300 JB-400
G106
G107
SHOT-GS G102
STAGE1 – 4 STAGE1 – 4
DHR-CA cable
GSE-CA cable
AC100-240V
50/60Hz
Power cable (2m)
comes with main body.
OSMS(CS) series
I/O control
external device
DHR-CA cable
DC24V 1A
GSE-CA cable
Link cable
Link cable
DC24V 1A
DC24V 1A
DC24V 1A
STAGE SCALE STAGE SCALE STAGE SCALE
KST(GS) series
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
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G015

Motion Control Products
SGMV series Translation Motorized Stages - AC servo Motor
SGMV
Application
Systems
Optics &
Optical
Coatings
Holders
High precision/high stiffness stages driven by AC servo motor. The stage structure unifies the
functions of precision linear guide and precision ball screw, places the linear guide, inner block
(table) and drive ball screw at the same position, and uses high stiffness U-shape outer rail for the
guide to offer small footprint with large load rating.
◦AC servo motor stages are recommended for production equipment that runs at high speed accompanied by rapid acceleration/deceleration
for reduction of takt time, because they generate sufficient torque in high-speed area and are less
subject to position deviation.
◦Stepping motor stages are recommended for positioning of optical systems that requires stability at rest.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Motor Type Stepping Motor Servo Motor
Control Method Open loop control Semi-closed loop control
Torque
Characteristic
Stability at Rest
Recommended
Application
Torque is large in low speed and
small in high-speed area
Very stable under normal conditions,
but cannot detect position deviation
caused by external force, etc.
Applications that exert light load and
require stability at rest, such as
positioning and measurement in
optical systems or small areas
Generate the same torque throughout the
low-speed area to high-speed area
Deviation may occur within the range of in
position, but it returns to the original
position by detecting position deviation
due to external force, etc. with an encoder.
Applications that do not allow position
deviation even during high-speed
operation or load fluctuation, such as
production lines
Guide
Controllers/Drivers
Softwares
◦The control system has automatic tuning functions, and a stage controller system usable just by connecting with a special
cable as well as servo pack that has high compatibility with the existing FA system are available.
■Configuration Example Using Stage Controller
Stages driven by AC servo motor
Stepping Motor
AC Servo Motor
Cables
Piezo
PC
LAN cable
RS232C cable
ETHERNET
RS232C
I/O/Terminal Block
PGC-04
DRIVER1/2/3/4
DC24V
PAG-ACS cable
Servo pack
SGDV-2R9E91A
Sample Software
(download from website)
I/O control
external device
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
■Configuration Example Using Servo Pack
If the servo pack is used as
a single unit, a controller needs
to be prepared separately.
User Controller
PC
Servo Pack
Adjustment Software
Sigma Win+
(SW lectric orporation)
CN1
I/O
Servo Pack
SGDV-2R9EPIA
CN4
Motor
CN2
PG
JZSP-CF1G00-01-E
CN3
DC24V
JZSP-CF1M00-03-E
(SW lectric orporation)
JZSP-CMP00-03-E
(SW lectric orporation)
Stages driven by AC servo motor
G016
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Stabilizing (Fall-Prevention) Mechanism
Catalog
Code
W9007
Mounting of Electromagnetic Brake Equipped Motors
A normally closed type electromagnetic brake exerts braking force when the power is off and
securely holds load. It prevents the movable table from falling to avoid sample damage.
OSMS26-100(Z)
Example of electromagnetic brake
assembly dimensions
◦Change stepping motors or servo motors (optional) used for Z axis motorized
stages to electromagnetic brake equipped motors.
Guide
▶Contact our International Sales Division for changing to electromagnetic
brake. Or use the mortorized stage system question
sheet. G111
▶To drive a motorized stage, DC24V power voltage is required.
Attention
▶External dimensions diagram will change because motors are
changed to electromagnetic brake equipped motors.
Wiring Example
Lead wire for brake of electromagnetic brake equipped motor
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Stage controller side
Motorized stage side
Guide
Controllers/Drivers
Mounting of Reduction Gear Equipped Motors
OSMS26-100(Z)
Example of reduction
gear equipped motor
assembly dimensions
Deceleration, high torque and high resolution can be achieved by
changing to reduction gear equipped motors.Effective for
downsizing and weight saving of systems since it does not require
power supply.
◦Change 5-phase stepping motors or servo motors used for Z axis motorized
stages to reduction gear equipped motors.
Guide
▶Contact our International Sales Division for changing motors. Or
use the motorized stage system question sheet. G111
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Limit Sensor
Attention
▶Outline drawing may change because motors are changed with
reduction gear equipped motors. The OSMS20 series are not
compatible.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
◦Regarding the limit sensor used for motorized stages, refer to the specification of each product.
◦We will change output operations or add a limit sensor on special orders.
■Input/Output Circuit Diagram (NPN output type)
Main Circuit
ZD2
Tr2
ZD1
Tr1
Lead wire color for cable type (Note 1)
(Brown) +V
Load
(Black) Output 1 (Note 2)
Load
50mA MAX.
(White) Output 2 (Note 2)
50mA MAX.
(Blue) 0V
+
−
5〜24V DC
±10%
■Output Operation
Output 1
Output 2
Lead Wire Color
Black
White
Output Operation
ON when light enters (NORMAL CLOSE)
ON when shaded (NORMAL OPEN)
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Internal circuit
Example of external connection
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G017

Motion Control Products
Controllers
GSC-01
GSC-02
SHOT-702
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
G098 G099 G100
Standard driver (full step/half step)
0.75A/phase rated motor or lower
Single axis 1 − 2 axes 1 − 2 axes
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor Stage
OSMS-ZF
SGSP-40/60YAW
SGSP-ACT-B0
OSMS-40
series
TAMM
OSMS-60
HPS
HDS
series
OSMS20/26/33
SGSP-80/120/160YAW
series
KST
series
D15RP-CA
cable
D15RP-CA
cable
Not compatible
Not compatible
D15RP-CA
cable
D15RP-CA
cable
Not compatible
Not compatible
D15RP-CA
cable
D15RP-CA
cable
D15D15A
cable
Not compatible
Stepping Motor
AC Servo Motor
Cables
Piezo
Stages with built in
Glass-scale Encoder
OSMS(CS)
series
KST(GS)
series
Not compatible
Not compatible
Not compatible
Not compatible
Not compatible
Not compatible
Part Name 1 axis Stage Controller 2 axis Stage Controller 2 axis Stage Controller
Part Number GSC-01 GSC-02 SHOT-702
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Primary Functions
General Specifications
Interface
Controller Function ○ ○ ○
Number of Control Axes 1 2 2
Stored Program Control − △ −
Feedback Control − − −
Circular Interpolation Control − − −
Linear Interpolation Control − − −
Driver Function Standard Standard Standard
Micro-step (Max. Division) 2 2 (half step only) 250
Driving Current (A/phase) 0.8 0.8 1.1
Power Voltage
DC24V
1.2A
DC24V
2A
AC100 − 240V
50/60Hz
Power Consumption 30VA 48VA 50VA
External Dimensions (W×H×Dmm) 47×90×125 180×40×125 260×70×280
Weight (kg) 0.4 0.7 2.8
GP-IB − − −
RS232C ○ ○ ○
USB − − −
Ethernet − − −
G018
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Various cables G108 − G109
GIP-101
SHOT-302GS
SHOT-304GS
HIT-M
HIT-S
PGC-04
Application
Systems
Optics &
Optical
Coatings
G101 G102 G102 G103 G103 G104
Micro-step driver
Holders
Bases
Single axis
1.4A/phase rated motor or lower
1 − 2 axes
1 − 4 axes
0.75A/phase rated motor or lower
1 − 8 axes
4 axes
Manual
Stages
D15RP-CA
cable
D15RP-CA
cable
D15RP-CA
cable
D15RP-CA cable
D15RP-CA
cable
Actuators
Motoeized
Stages
D15RP-CA
cable
D15RP-CA
cable
D15RP-CA
cable
D15RP-CA cable
D15RP-CA
cable
Light
Sources
Index
D15D15A
cable
D15D15A
cable
D15D15A
cable
D15D15A cable
D15D15A
cable
Guide
Not compatible
D15D15A
cable
D15D15A
cable
Not compatible
D15D15A
cable
Controllers/Drivers
Softwares
Stepping Motor
Not compatible
DHR/GSE
cable
DHR/GSE
cable
DHR/GSE cable
Not compatible
AC Servo Motor
Cables
Piezo
Not compatible
DHR/GSE
cable
DHR/GSE
cable
Not compatible
Not compatible
Intelligent Positioning
System
2 axis Stage Controller 4 axis Stage Controller
Extensible Stage Controller
(Master)
Extensible Stage Controller
(Slave)
Pulus Generating Controller
GIP-101 SHOT-302GS SHOT-304GS HIT-M HIT-S PGC-04
○ ○ ○ − ○
1 2 4 8 − 4
− ○ ○ − ○
− Glass scale Glass scale (except for KST(GS)) −
− ○ ○ − ○
− 2 axes 3 axes − ○
Micro-step Micro-step − Micro-step −
250 250 − 250 −
0.75 1.4 − 1.1 −
AC100−240V
50/60Hz
AC100−240V
50/60Hz
100VA 160VA 300VA 24VA 34VA
145×205×81 270×118×302 130×120×50 180×140×60
DC24V
1A
2.0 5.5 6.5 0.62 0.63 1.3
− ○ ○ − − −
○ ○ ○ ○ − ○
− ○ ○ ○ − −
− − − ○ − ○
DC24V
1.4A
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
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G019

Motion Control Products
Drivers
Application
Systems
Optics &
Optical
Coatings
Part Name
Part Number
Holders
Driving Motor
Drive System
Bases
Driving Current (A/phase)
Excitation System
Manual
Stages
Primary Functions
Number of Divisions
Input Signal
Actuators
Input Logic
Max. Response Frequency
Motoeized
Stages
Auto Current Down OFF Input
Motor Excitation OFF Input
Light
Sources
Micro-step Selection Input
Origin Excitation Timing Output
Index
Input Voltage
General Specifications
Operating Temperature Range
Guide
Controllers/Drivers
External Dimensions (W×H×Dmm)
Weight (kg)
Softwares
Stepping Motor
AC Servo Motor
OSMS40-5ZF
SGSP-ACT
series
Stage
Motor Used
PK513PB-C9
Basic Step
Angle
[ ° ]
Phase Current
[A/phase]
0.35
External Dimensions
[W×H×Dmm]
(excluding shaft)
20×20×72
Cables
Piezo
OSMS20-35
OSMS20-85
series
TS3664N4E10
0.75
24×24×31
SGSP-40/60YAW
HDS-60
series
TS3664N4
0.72
0.66
24×24×31
X Translation
Theta Rotation
Goniometer
Vacuum
OSMS26
OSMS60-ZF
SGSP-60A/B
TAMM
OSMS-40/60
SGSP-80/120/160YAW
HPS
HDS-80/120
series
OSMS80-20ZF
PK523HPB-C12
PK525HPB-C4
0.75
28×28×32
28×28×51.5
Options
A7177-90215KTG
0.036
28×28×61.3
□40mm
□60mm
□80mm
OSMS33
series
TS3667N43E967
42×42×47
□85mm
□100mm
□120mm
KST-120/160YAW
series
TS3624N42E967
0.72
60×60×56.5
Others
KST-50 / KST(GS)-50
KST-100 / KST(GS)-100
KST-200 / KST(GS)-200
series
PK564-NBW
PK566-NBW
PK569-NBW
1.4
60×60×46.5
60×60×57.5
60×60×87
G020
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Catalog
Code
W9051
Application
Systems
Compact Driver
Compact Driver
Compact
Micro-step Driver
Compact
Micro-step Driver
Micro-step Driver
Micro-step Driver
SG-5MA SG-5M SG-55MA SG-55M SG-514MSC MC-7514PCL
5-phase stepping motor
Bipolar constant current pentagon drive
0.25 − 0.85 0.5 − 1.4 0.23 − 0.75 0.5 − 1.6 0.3 − 1.4 0.5 − 1.4
DC20 − 40V
1.5A Max
Full/Half step Micro-step Micro-step Micro-step
Two types
1, 2
1 clock input method
2 clock input method
16 types
1, 2, 4, 5, 8, 10, 16, 20, 25, 40,
50, 80, 100, 125, 200, 250
1 clock input method
2 clock input method
16 types
1, 2, 2.5, 5, 8, 10, 20, 25, 40,
50, 80, 100, 125, 200, 250
2 clock input method
16 types
1, 2, 4, 5, 8, 10, 16, 20, 25, 40,
50, 80, 100, 125, 200, 250
1 clock input method
2 clock input method
Photocoupler input
Photocoupler input
C-MOS equivalent
negative logic input
Photocoupler input
50kpps 500kpps 500kpps 500kpps
None None None Equipped
Equipped Equipped Equipped Equipped
None
4 bit signal input or switching by the number of
division setting switch
4 bit signal input
Switching by the number
of division setting switch
None Equipped Equipped Equipped
DC20 − 40V
3A Max
DC24 − 36V
1.5A Max
DC24 − 36V
3A Max
For motor drive:
DC24 − 36V ±10%
2A or lower
For logic:
DC5V ±5% 0.1A or lower
AC100 − 230V±10%
50/60Hz
3.5A Max
0 − 40°C 0 − 40°C 0 − 40°C 0−40°C
77×32×45 105×38×74 91×36×70 170×130×39
0.1 0.2 0.2 0.75
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
○
×
○
×
○
×
AC Servo Motor
Cables
○
○
○
○
○
○
Piezo
○
○
○
○
○
○
○*
○
○*
○
○
○
X Translation
○*
○
○*
○
○
○
Theta Rotation
Goniometer
○*
○
○*
○
○
○
Vacuum
Options
○*
○
○*
○
○
○
□40mm
□60mm
□80mm
□85mm
×
○
×
○
○
* DC36V * DC36V * DC36V
○
□100mm
□120mm
Others
×
○
×
○
○
○
* Can be used with 0.75A/phase.
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G021

Motion Control Products
Softwares
Software for creating operation check or automation applications and for supporting program development are available.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Sample Softwares
SGCommander
RS232C interface
stage controller control software.
In addition to remote control from a PC,
simple program control using Excel is possible.
LabVIEW Sample Program
Sample module for controlling stages
using the graphical programming environment LabVIEW
of National Instruments Corporation
Compatible with LabVIEW 5.1/6i/7.1/8.6/2010/2012
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Special Application Softwares
SGTERME
Terminal software for receiving and sending
commands input in Excel cells.
Applications can be developed flexibly using
repetition and conditional branching macros,
without programming knowledge.
Compatible with 32/64bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
SGEMCSE
G024 G025
Trial Version
Trial Version
Software for positioning & measurement that automatically collects
data and outputs results in Excel simply by selecting a controller and
setting a measuring instrument.
Applications can be developed using the program measurement
function with routine drive patterns and the Excel instruction measurement
function that measures arbitrary coordinates, without programs.
Compatible with 32/64bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Software for Positioning, Measurement & Analysis
SGMACSE
Trial Version
Software with enhanced functions such as
real-time graphical display, analysis or
correction of measurement data and
RS232C binary data exchange.
Compatible with 32 bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
Software for Monitoring & Control
SGVIEWE
Software for measuring dimensions and angles based on
images loaded from a USB camera connected to a PC, as
well as for saving loaded images.
It can measure an arbitrary point or perform simple time-lapse
measurement when used in combination with a stage.
Compatible with 64 bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
Automated Collimation Measurement Software
SGCAMSE
Used in combination with the collimation
checker system, this software automatically
measures laser light collimation (parallelism)
and judges good or bad.
Trial Version
Compatible with 32 bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
Software for Liquid Crystal Evaluation System
SGLCESE
Being compatible with major color luminance meters
and spectroradiometers, this software packaged
luminance, chromaticity, viewing angle characteristics
and other functions required for flat panel evaluation.
Compatible with 64 bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Library for Program Development
Component Software for VB.NET
SGNETXE
RS232C/GP-IB/USB communication library
enabling control programming for stage
controller with VB.NET.
Compatible with 32/64bit version of Windows ® XP/Vista/7
* NET Framework1.1 or later version is required.
ActiveX for Positioning & Measurement
SGACTXE/SGPATXE/SGSFSXE
RS232C/GP-IB/USB communication library
enabling control programming for stage controller
with VB6.0 or VBA.
32 bit Windows ® -only
* Windows ® Vista/7 does not work with USB.
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Guide
▶Contact our International Sales Division for more information.
Information is also available on .
Part Name
Software for Positioning, Measurement & Analysis
Automated Collimation Measurement Software
Software for Monitoring & Control
Software for Liquid Crystal Evaluation System
Part Number
SGMACSE
SGCAMSE
SGVIEWE
SGLCESE
Part Name
Component Software for VB.NET
ActiveX for Positioning & Measurement
Part Number
SGNETXE
SGACTXE
SGPATXE
SGSFSXE
G022
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9058
Free Software|SGCommander (for RS232C) Windows®Version
(For SHOT(Mark)-102/202/204, FINE(Mark)-501/502/503, FINE-01, SHOT-302GS/304GS, PAT-001, OMEC-2BF/2BG/4BF/4BG, SHOT-602,
CSG-602R/522R, MINI-5D, BS-302GS/304GS, PKA-ID-02, SHOT-702, FINE-01γ, GIP-101, GSC-01/02)
Free software is available to operate your controller easily from a PC. Each axis of a connected
motorized stage can be moved using buttons on the screen. The software can be downloaded from
our website.
1Jog operation
3Homing control
Home > Support > Software Information > Sample Software: SGCommander
2Speed specification
4Travel control
Simple operations
are possible such
as travel by specifying
an axis (pulse
instruction), homing
or jog operation.
Controllers such as SHOT-30*
/702 and FINE-**, which have
a built-in program function,
allow editing of programs
from a PC. Since data can be
downloaded/uploaded from/to
Excel sheets, it is easy to edit
programs. In addition, upload
of memory switch or download
mode is available.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Free Software (for HIT)|
HIT sample for LAN/RS232C
Free software is available for HIT of SGCommander.
Free Application|
LabVIEW (for v.5.1/v.6i/v.7.1/v.8.6/v.2010/v.2012) RS232C/GP-IB
LabVIEW application is available for LabVIEW
users.
Light
Sources
Index
Guide
1
2
6
7
8
5
4
3
Functions
1Relative position
travel
2Origin return
3IO menu
4Command input
(Terminal)
5Number of
division setting
6Speed change
7Program editing
8Memory switch
menu
Port number
PortInit.vi
Stage drive shaft number
SetSpeed.vi Move.vi
Minimum speed (pulse/sec) Acceleration time (ms) Number of pulses per travel
Maximum speed (pulse/sec) Drive direction (T: +, F: -)
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Other: 30 Day Trial Version|SGEMCSE / SGTERME
SGEMCSE.....SGEMCSE is software for collecting data or measuring using
automatic positioning equipment, measuring instrument or
controller, and is offered 30 days for free.
SGTERM E.....It allows command input using Excel for easy program making.
SGTERME is ideal software to link with various devices, and is
offered 30 days for free.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G023

Motion Control Products
Catalog
Terminal Software SGTERME Code W9059
General-purpose communication terminal software that uses Excel.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
◦Positioning and measurement can be performed just by listing and executing
commands in an Excel sheet.
◦Continuous process or step-by-step process can be selected.
◦Use of SGTERM’s original control scripts, “If”, “Jump”, “Loop” and “Print” in an Excel
worksheet simplifies processing control.
◦Since measurement results are output to an Excel sheet, easy to analyze and manage
measured data.
◦Set content can be saved as a “*.SGE” file, which facilitates setting of the same
process again.
◦RS232C* 1 /GP-IB* 2 /USB* 3 interfaces are supported.
◦Compatible with Windows ® XP/Vista/7* 4 .
Manual
Stages
Actuators
Part Number
SGTERME
*1 RS-232C ports are available from COM1 to COM8.
*2 As for GP-IB, only GP-IB of National Instruments Corporation is supported.
*3 USB is only supported for SHOT-302/304 series, HIT-M, FINE-01γ/503 series, and OMEC-2BG/4BG series.
*4 Conditions when used with Windows ® 7 are as follows.
・Administrative right is required for installation as well as execution.
・32/64 bit versions are supported. Check on our website for the latest support status.
Motoeized
Stages
Light
Sources
SGTERME
Processing with Excel
makes editing of collected data easy
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Condition setting
Measurement display
Data collection
Control display
Result acquisition
PC
X Translation
Theta Rotation
Goniometer
Give measurement
instructions or
collect data
using Excel
Measuring instrument
Stage controller
G018 − G019
Vacuum
Options
Motorized stage
□40mm
Register a device
Operation settings
Create an instruction file with Excel
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Run commands written in
cells in order.
Perform repetition or
conditional branching
using control scripts.
Cell functions and VBA
can also be used in
combination.
G024
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Catalog
Software for Positioning & Measurement SGEMCSE Code W9060
Positioning and measurement software highly compatible with motorized
positioning devices offered by Sigma Koki.
◦Multiple repetition of positioning/measurement sequence is easily realized.
◦Various functions are available such as manual or time-series measurement and
count presetting.
◦By creating Excel instruction files, both stage control and measurement with a measuring
instrument can be performed simultaneously.
◦Since measurement results are output to an Excel sheet, easy to analyze and manage
measured data.
◦Set content can be saved as a “*.SGS” file, which facilitates setting of the same
process again.
◦Using this software in combination with motorized positioning devices offered by
Sigma Koki, a positioning and measurement system can be easily configured.
◦RS232C* 1 /GP-IB* 2 /USB* 3 interfaces are supported.
◦Compatible with Windows ® XP/Vista/7* 4 .
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Part Number
SGEMCSE
*1 RS-232C ports are available from COM1 to COM8.
*2 As for GP-IB, only GP-IB of National Instruments Corporation is supported.
*3 USB is only supported for SHOT-302/304 series, HIT-M, FINE-01γ/503 series, and OMEC-2BG/4BG series.
*4 Conditions when used with Windows ® 7 are as follows.
・Administrative right is required for installation as well as execution.
・32/64 bit versions are supported. Check on our website for the latest support status.
Actuators
Motoeized
Stages
Light
Sources
Index
Controller
Guide
Controllers/Drivers
Softwares
Stepping Motor
PC
Measuring instrument
AC Servo Motor
Link with Excel
Automatic measuring
Measurement display
Automatic positioning
Data collection, etc.
[Attention]
May not be compatible depending on the specifications
of measuring instrument.(E.g. When responding to one
measurement command with multiple data items)
Cables
Piezo
No programming knowledge is required.
Just select a controller and input the minimum travel.
In addition to routine drive patterns, arbitrary measurement points
can be specified using Excel.
Automatically load data to Excel from a measuring instrument.
Register a device
Operation settings
Stage controller
G018 − G019
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Program instruction
Machine origin Theoretical origin
or
Create an instruction file with Excel
Motorized stage
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G025

Motion Control Products
Motorized Stage/Controller/Cable Sets
These sets are offered at value prices. These sets are easy to operate. Enjoy them as soon as they arrive.
Application
Systems
X axis Set|HPS60-20X-SET
Optics &
Optical
Coatings
Holders
Bases
This set enables easy automatic positioning in
one straight direction and JOG operation.
・Stage size : 60mm×60mm
・Travel : 20mm
・Load Capacity : 49N [5kgf]
・Cable lengh : 3m
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Products Name Part Number Quantity
High Performance Motorized Stages HPS60-20X-M5 1 G028
Single axis Stage Controller GSC-01 1 G098
AC Adapter PAT-001-POW1 1 ー
D15RP Cable D15RP-CA-3 1 G108
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
XY axis Set|SetHPS120-60XY-SET
This set enables XY axis automatic alignment,
and program operation without using a PC.
・Stage size : 120mm×120mm
・Travel : 60mm
・Load Capacity : 88.2 [9kgf]
・Cable lengh : 3m
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Products Name Part Number Quantity
High Performance Motorized Stages HPS120-60X-M5 2 G028
2 axis Stage Controller GSC-02 1 G099
Joystick Terminal SJT-02 1 G106
AC Adapter PAT-001-POW1 1 ー
D15RP Cable D15RP-CA-3 2 G108
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
For easier positioning ... Manual stages which can be used in combination.
■θ axis Rotation Stages
KSP-606M
■Z axis Steel Extended Contact Slide Stages
TSD-603
E144 E086
G026
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Catalog
Code
W9062
Xyθ axis Set|HPS/HDS120-XYθ-SET
Motorized stage system for minute positioning
and angle adjustment such as for marking of
semiconductor wafers.
・It can be controlled externally using Ethernet/RS232C/
USB interface.Also, the number of axes is extendable
by adding slave controllers (Part Number: HIT-S).
・Stage size
・Travel
: φ120mm
: ±6° [θ axis]
: 60mm [XY axis]
・Load Capacity : 58.8N [6kgf]
・Cable lengh : 3m
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Products Name Part Number Part Number
High Performance Motorized Stages HPS120-60X-M5 2 G028
High durability automatic rotation stage HDS-120YAW 1 G080
Extensible Stage Controller (Master) HIT-M 1 G103
Extensible Stage Controller (Slave) HIT-S 3 G103
AC Adapter 1 ー
D15RP Cable D15RP-CA-3 3 G108
Actuators
Motoeized
Stages
Light
Sources
Index
XYZ axis Set|OSMS20-XYZ-SET
This set is best suited for measuring and
inspection equipment and for XYZ axis
automatic positioning of workpieces.
◦It can be controlled externally using RS232C/GP-IB/USB
interface, or manually using a joy stick (JS-300).
・Stage size : 60mm×60mm
・Travel : 85mm [XY axis], 10mm [Z axis]
・Load Capacity : 29.4N [3kgf]
・Cable lengh : 3m
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Products Name Part Number Part Number
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor OSMS20-85(X) 2 G032
Translation Motorized Stages, Flat Z axis - 5 Phase Stepping Motor OSMS60-10ZF 1 G070
4 axis Stage Controllers SHOT-304GS 1 G102
Joystick Terminal JS-300 1 G107
D15RP Cable D15RP-CA-3 1 G108
D15D15A Cable D15D15A-CA-3 2 G108
MDR14-CA-2.5 Cable MDR14-CA-2.5 1 G109
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Make it more convenient … Software for stage control
■Software for Positioning,
Measurement & Analysis
SGMACSE
■Software for Monitoring & Control
SGVIEWE
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
G022 G022
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G027

Motion Control Products
High Performance Motorized Stages
HPS
Motorized stages with ball screws offering middle/high performance at low price.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
◦Ball screws with improved durability compared to the
existing TSDM series.
◦Our original high precision integrated ball guide used in
place of a cross roller guide makes it possible to offer a
price lower than the TAMM series.
Guide
▶Please contact us when assembled into XYZ axis or use in
reversion on the ceiling or vertical direction.
▶Opposite model or various motor changes are optionally available.
G030
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number HPS60-20X-M5 HPS80-50X-M5 HPS120-60X-M5
Travel [mm] 20 50 60
Table Size [mm] 60×60 80×80 120×120
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Positioning Slide Ball guide Ball guide Ball guide
Stage Material Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized
Weight [kg] 0.6 1 1.5
(Full) [μm/pulse] 2 2 2
Resolution
(Half) [μm/pulse] 1 1 1
MAX Speed [mm/sec] 10 10 10
Positioning Accuracy [μm] 15 25 25
Positional Repeatability [μm] ±1 ±2 ±2
Load Capacity [N] 49 (5kgf) 73.5 (7.5kgf) 98 (10kgf)
Pitch [″/N・cm] 0.4 0.5 0.5
Moment
Stiffness
Yaw [″/N・cm] 0.4 0.5 0.5
Roll [″/N・cm] 0.3 0.2 0.2
Lost Motion [μm] 1 2 2
Backlash [μm] 1 2 2
Parallelism [μm] 30 40 50
Running Parallelism [μm] 10 10 10
Pitch [″] / Yaw [″] 25/25 30/25 30/25
Sensor Part Number
Micro photo sensor: GP1S097HCZ(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Equipped (NORMAL OPEN)
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK523HPB-C12 (□28mm)
Step Angle 0.72°
Power Voltage DC5 - 24V ±10%
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA
When load current is 16mA, the residual voltage is under 0.4V When load current is 50mA, the residual voltage is under 0.7V
Output Logic
In the case of light shielded ,output transistor OFF (No conduction): Limit sensor
In the case of light shielded ,output transistor ON (Conduction): Origin sensor
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G028
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9061
Outline Drawing
HPS60-20X-M5
(153)
Hexagon socket head cap screw M4×12…4 screws
60
50
32
6-M4×0.7 depth 8
4-M3×0.5 depth 6
HPS80-50X-M5
Hexagon socket head cap screw M4×12…4 screws
(199)
100
4-M4×0.7 depth 8
70
50
6-M4×0.7 depth 8
Application
Systems
Optics &
Optical
Coatings
Holders
20
(29)
15
(450)
mounting hole for attachment pins (bezel side)
HPS120-60X-M5
50
4
32
50
60
(15)
M4×0.7 depth 5
Travel 10 6 Travel 10
1
counterbore for attachment pins (mounting side)
GOHT-AP
6.5
30
2-M4×0.7 depth 4
4-4.5 mounting hole
8 counterbore
Hexagon socket head cap screw M4×12…4 screws
50
20
(29)
15
(450)
M4×0.7
depth 5
mounting hole for attachment pins (bezel side)
70
4
6
50
70
80
counterbore for attachment pins (mounting side)
GOHT-AP
Travel 25 6 Travel 25
1
50
(15)
2-M4×0.7 depth 4
30
4-4.5 mounting hole
8 counterbore
70
4-4.5 mounting notch
8 counterbore
depth 4.5
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
(224)
120
100
70
50
6-M4x0.7 depth 8
4-M4x0.7 depth 8
4-M6x1 depth 12
Index
Guide
Controllers/Drivers
20
50
70
100
120
(450)
50
M4×0.7 depth 5 2-M4×0.7 depth 4
counterbore for attachment pins (mounting side)
GOHT-AP
Travel 30 6
Travel 30
(15)
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
(29)
15
4
30
1
mounting hole for attachment pins (bezel side)
100
4
4-6.5 mounting hole
11 counterbore
100
X Translation
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
Note 2
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13R-12SC
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 ORG
7
Sensor
Power source 12V
8 GND (0V)
9 LS (+)
10 LS (−)
11 FG
12 FG
5-Phase Stepping
Motor
E-Phase
D-Phase
Originside (ORG)
limit sensor
ON when shaded
C-Phase
A phase
B-Phase
Opposite side (−)
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
Motor side (+) GP1S097HCZ0F
limit sensor
ON when light enters
Note 1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-MHIT-S [8 axes]
PGC-14 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
Stage
HPS60-20X-M5
HPS80-50X-M5
HPS120-60X-M5
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with proximity origin sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
G020 − G021
MINI-CA-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G029

Motion Control Products
High Performance Motorized Stage Options
HPS Option
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Specification Method of Option Code
■Option Code
Stage size Travel
Opposite
Model
Motor option
HPS
60 20 5
None
80 - 50 X - M 2
R
120 60 A
L
Guide
None: Standerd model
R: Opposite model
5: 5 Phase Stepping Motor (Standerd model)
2: 2 Phase Motor with Driver
A: α-step Motor with Driver
L: No motor
▶Please contact us when assembled into XYZ axis or use in
reversion on the ceiling or vertical direction.
▶Replacement with electromagnetic brakes or grease change is also
available. Contact our International Sales Division for more
information.
■Example of Code Specification
HPS60-20X□-M□
■Features of Options
2 Phase Motor
with Driver
α Stepping Motor
with Driver
No Motor
It can reduce the total cost because a driver is equipped. On the
other hand, precision is inferior to 5 phase motors.
Can be replaced with an α stepping motor with driver which can
move fast. The motor also has built-in encoder.
No Motor Provide a stage without motor because the customer
mounts own motor. Note that mounting and adjustment of a motor
requires specialized skills.
Light
Sources
HPS120-60X-MA
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications (ex. HPS60-20X)
Part Number HPS60-20X-M2 HPS60-20X-MA HPS60-20X-ML
Travel [mm] 20 20 20
Table Size [mm] 60×60 60×60 60×60
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Positioning Slide Ball guide Ball guide Ball guide
Stage Material Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized
Weight [kg] 0.6 1 0.6
Resolution
(Full) [μm/pulse] 5 2 (500P/R) −
(Half) [μm/pulse] 2.5 1 (1000P/R) −
MAX Speed [mm/sec] 20 40 −
Positioning Accuracy [μm] 15 15 −
Positional Repeatability [μm] ±2 ±0.5 −
Load Capacity [N] 49 (5kgf) 49 (5kgf) 49 (5kgf)
Pitch [″/N・cm] 0.4 0.4 0.4
Moment
Stiffness
Yaw [″/N・cm] 0.4 0.4 0.4
Roll [″/N・cm] 0.3 0.3 0.3
Lost Motion [μm] 1 1 −
Backlash [μm] 1 1 1
Parallelism [μm] 30 30 30
Running Parallelism [μm] 10 10 10
Pitch [″] / Yaw [″] 25/25 25/25 25-25
Sensor Part Number
Micro photo sensor:
GP1S097HCZ (Sharp Corporation)
Micro photo sensor:
GP1S097HCZ (Sharp Corporation)
Micro photo sensor:
GP1S097HCZ (Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Equipped (NORMAL OPEN)
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Driver
Sensor
Type
2-phase stepping motor
(Oriental Motor Co., Ltd.)
α STEP motor
(Oriental Motor Co., Ltd.)
(No motor)
Motor Part Number PKP223D15B (□28mm) ARM26SBK (□28mm) −
Step Angle 1.8° 0.72°(500P/R) −
Part Number A8576-0415Y ARD-K −
Power input DC24V±10% 1A DC24V ±10% 0.9A −
Power Voltage DC5 - 24V ±10%
Current Consumption
60mA or lower (20mA or lower per sensor) A8576-0415Y
Control Output
DC24V±10% 1A
NPN open collector output DC30V or lower, 50mA
Output Logic
When load current is 16mA, the residual voltage is under 0.4V When load current is 50mA, the residual voltage is under 0.7V
In the case of light shielded ,output transistor OFF (No conduction): Limit sensor
G030
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Outline Drawing
HPS60-20X-M2
Hexagon socket
head cap screw M4×8…6 screws
(153)
60
50
32
6-M4×0.7 depth 8
4-M3×0.5 depth 6
Application
Systems
Optics &
Optical
Coatings
φ20
32
50
60
Holders
(29)
15
(450)
mounting hole for attachment pins (bezel side)
M4×0.7 depth 5
counterbore for attachment pins (mounting side)
GOHT-AP
φ6
Travel 10 Travel 10
1
φ4
50
6.5
(15)
30
4-φ4.5 mounting hole
φ8 counterbore
50
Bases
Manual
Stages
Actuators
HPS60-20X-MA
Hexagon socket
head cap screw M4×8…6 screws
(187)
60
50
32
6-M4×0.7 depth 8
4-M3×0.5 depth 6
Motoeized
Stages
Light
Sources
φ20
32
50
60
Index
(29)
Guide
Controllers/Drivers
Softwares
Stepping Motor
HPS60-20X-ML
(110)
Hexagon socket
head cap screw M4×8…6 screws
7
60
50
32
6-M4×0.7 depth 8
4-M3×0.5 depth 6
AC Servo Motor
Cables
Piezo
(29)
6.5
30
(15)
32
50
60
23
4-φ3 drill hole
φ5 counterbore depth 3
(450)
φ22 H7
φ4 g6
Travel 10
20.5 6
10
1
φ6
counterbore for attachment pins (mounting side)
GOHT-AP
Travel 10
23
15
(450)
mounting hole for attachment pins (bezel side)
M4×0.7 depth 5
counterbore for attachment pins (mounting side)
GOHT-AP
φ6
Travel 10 Travel 10
1
φ4
50
6.5
(15)
30
4-φ4.5 mounting hole
φ8 counterbore
50
8.5
mounting hole for attachment pins (bezel side)
φ4
50
4-φ4.5 mounting hole
φ8 counterbore
50
X Translation
Theta Rotation
Goniometer
■Connection Diagram
1
2
3
4
5
6
7
8
9
Note 2
1
2
3
4
5
6
7
8
9
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13JA-12SC
Sensor
Power source 12V
GND (0V)
LS (+)
LS (−)
ORG
NC
NC
NC
NC
Opposite side (−)
limit sensor
ON when light enters
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
Originside (ORG)
limit sensor
ON when shaded
Sharp Corporation
Micro photo sensor
GP1S097HCZ0F
■(Reference) Motor Comparison Table
Section
5 Phase
Stepping Motor
2 Phase
Stepping Motor
αSTEP Motor
Positioning Accuracy ○ ○ ◎
Minute Feed Accuracy ○ ○ ○
Speed Stability ○ △ ◎
Heat Generation
(Continuous Operation)
○ △ ◎
Max. Speed ○ ○ ◎
Rising Responsiveness ○ ○ ◎
*Rough guide for when the motors are mounted on our motorized stage.
(◎ : goodness ○ : standard △ : inferior)
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the (+) forward direction limit sensor.
There is no origin proximity sensor for this motorized stage.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G031

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS20-(X) Stage size □85mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS20-35(X) OSMS20-85(X)
Part Number (-M6) OSMS20-35(X)-M6 OSMS20-85(X)-M6
Part Number (-INCH) OSMS20-35(X)-INCH OSMS20-85(X)-INCH
Travel [mm] 35 85
Table Size [mm] 85×85 85×85
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 1.1 1.3
(Full) [μm/pulse] 2 2
Resolution
(Half) [μm/pulse] 1 1
MAX Speed [mm/sec] 25 25
Positioning Accuracy [μm] 5 10
Positional Repeatability [μm] 3 3
Load Capacity [N] 78.4 (8.0kgf) 78.4 (8.0kgf)
Pitch [″/N・cm] 0.4 0.4
Moment
Stiffness
Yaw [″/N・cm] 0.25 0.25
Roll [″/N・cm] 0.35 0.35
Lost Motion [μm] 3 3
Backlash [μm] 3 3
Parallelism [μm] 30 30
Running Parallelism [μm] 10 10
Pitch [″] / Yaw [″] 30/20 30/20
Sensor Part Number
Micro photo sensor: GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped Equipped
Proximity Origin Sensor None Equipped
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3664N4E10 (□24mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G032
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9063
Outline Drawing
OSMS20-(X)
Hexagon socket head cap screw M4×8…8 screws (35)
Hexagon socket head cap screw M4×8…10 screws (85)
85
75
35 35
A
25 25
75
85
21-M4×0.7 depth 6
(depth 5)
25 25
70
85
Application
Systems
Optics &
Optical
Coatings
Holders
E mounting hole
D
B
C
Bases
29
16
Travel F
Travel F
35.7
Part Number A B C D E F
OSMS20-35(X) 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS20-85(X) 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Manual
Stages
Actuators
OSMS20-(X)-M6
Hexagon socket head cap screw M4×8…8 screws (35)
Hexagon socket head cap screw M4×8…10 screws (85)
85
75
A
35 35
25 25
12-M4×0.7 depth 6
(depth 5)
Motoeized
Stages
Light
Sources
75
85
25
25
70
85
Index
E mounting hole
D
B
C
9-M6×1 depth 6
(depth 5)
Travel F
Travel F
Part Number A B C D E F
Guide
29
16
35.7
OSMS20-35(X)-M6 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS20-85(X)-M6 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Controllers/Drivers
Softwares
OSMS20-(X)-INCH
Hexagon socket head cap screw 8 / 32UNC×5 / 16…8 screws (35)
Hexagon socket head cap screw 8 / 32UNC×5 / 16…10 screws (85)
A
85
76.2
34.93 34.93
25.4 25.4
12-8-32UNC depth 6
(depth 5)
Stepping Motor
AC Servo Motor
Cables
Piezo
76.2
85
25.4 25.4
69.85
85
E mounting hole
D
B
C
6-1/4-20UNC depth 6
(depth 5)
Travel F
Travel F
Part Number A B C D E F
29
16
35.7
OSMS20-35(X)-INCH 183.5 60.8 34.5 76.2(25.4×3) 8-φ4.5 17.5
OSMS20-85(X)-INCH 233.5 85.8 35 101.6(25.4×4) 10-φ4.5 42.5
X Translation
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Connector Pin Number
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
5-Phase Stepping
Motor
E-Phase A phase
Originside (ORG)
limit sensor D-Phase
B-Phase
ON when shaded
C-Phase
Originside (NEAR)
limit sensor
ON when shaded
Note 3
Motor side (+)
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
Opposite side (−)
GP1S097HC1
limit sensor
ON when light enters
Note 1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS20-35(X)
OSMS20-85(X)
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1 The motor side limit sensor is the + direction limit sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Note 3 OSMS20-35 is not fitted with proximity origin sensor.
13 and 14P are short-circuited
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G033

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS20-(XY) Stage size □85mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number OSMS20-35(XY) OSMS20-85(XY)
Part Number (-M6) OSMS20-35(XY)-M6 OSMS20-85(XY)-M6
Part Number (-INCH) OSMS20-35(XY)-INCH OSMS20-85(XY)-INCH
Travel [mm] 35 85
Table Size [mm] 85×85 85×85
Feed Screw Ball screw diameter φ6mm, 1mm lead Ball screw diameter φ6mm, 1mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 2.2 2.6
Resolution
(Full) [μm/pulse] 2 2
(Half) [μm/pulse] 1 1
Accuracy MAX Speed [mm/sec] 25 25
Specifications Load Capacity [N] 68.6(7.0kgf) 68.6(7.0kgf)
Backlash [μm] 3 3
Orthogonality of Motion [μm] 5 5
Sensor Part Number
Micro photo sensor: GP1S092HCPIF(Sharp Corporation)
Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped Equipped
Proximity Origin Sensor None Equipped
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Motor
Sensor
(Reference) Precision Specifications of Single Axis Stage
Part Number OSMS20-35(X) OSMS20-85(X)
Accuracy
Specifications
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3664N4E10 (□24mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Positioning Accuracy [μm] 5 7
Positional Repeatability [μm] 3 3
Pitch [″/N・cm] 0.4 0.4
Moment
Stiffness
Yaw [″/N・cm] 0.25 0.25
Roll [″/N・cm] 0.35 0.35
Lost Motion [μm] 3 3
Parallelism [μm] 30 30
Running Parallelism [μm] 10 10
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G034
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9064
Outline Drawing
OSMS20-(XY)
Hexagon socket head cap screw M3×6…4 screws
85
75
67.2
Application
Systems
Optics &
Optical
Coatings
85
75
35 35
25 25
21-M4×0.7 depth 6
(depth 5)
25
25
70
85
E mounting hole
Travel F 85 Travel F
B
A
C D
Part Number A B C D E F
Holders
Bases
Manual
Stages
Travel F
A
85
Travel F
B
35.7
71.4
OSMS20-35(XY) 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS20-85(XY) 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Actuators
OSMS20-(XY)-M6
85
75
35 35
25 25
12-M4×0.7 depth 6
(depth 5)
25 25
70
85
9-M6×1 depth 6
(depth 5)
E mounting hole
Hexagon socket head cap screw M3×6…4 screws
85
75
67.2
Travel F 85 Travel F
B
A
C D
Part Number A B C D E F
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
OSMS20-(XY)-INCH
Travel F 85 Travel F
B
A
Hexagon socket head cap screw M3×6…4 screws
85
76.2
67.2
35.7
71.4
OSMS20-35(XY)-M6 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS20-85(XY)-M6 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Softwares
Stepping Motor
AC Servo Motor
Cables
85
76.2
34.93 34.93
25.4 25.4
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
12-8-32UNC depth 6
(depth 5)
25.4 25.4
69.85
85
6-1/4-20UNC depth 6
(depth 5)
Connector Pin Number
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
E mounting hole
Travel F 85 Travel F
B
A
Originside (ORG)
limit sensor
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Note 3
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
5-Phase Stepping
Motor
E-Phase
D-Phase
Travel F 85 Travel F
C-Phase
B
A phase
A
B-Phase
Sharp Corporation
Micro photo sensor
GP1S097HC1
35.7
71.4
C D
Part Number A B C D E F
OSMS20-35(XY)-INCH 183.5 60.8 34.5 76.2(25.4×3) 8-φ4.5 17.5
OSMS20-85(XY)-INCH 233.5 85.8 35 101.6(25.4×4) 10-φ4.5 42.5
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS20-35(XY)
OSMS20-85(XY)
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1 The motor side limit sensor is the + direction limit sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Note 3 OSMS20-35 is not fitted with proximity origin sensor.
13 and 14P are short-circuited
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G035

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS20-(Z) Stage size □85mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS20-35(Z) OSMS20-85(Z)
Part Number (-M6) OSMS20-35(Z)-M6 OSMS20-85(Z))-M6
Part Number (-INCH) OSMS20-35(Z)-INCH OSMS20-85(Z)-INCH
Travel [mm] 35 85
Table Size [mm] 85×85 85×85
Feed Screw Ball screw diameter φ6mm, 1mm lead Ball screw diameter φ6mm, 1mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 2.3 2.5
(Full) [μm/pulse] 2 2
Resolution
(Half) [μm/pulse] 1 1
MAX Speed [mm/sec] 5 5
Positioning Accuracy [μm] 10 20
Positional Repeatability [μm] 3 5
Load Capacity [N] 29.4 (3.0kgf)* 1 29.4 (3.0kgf)* 1
Accuracy
Pitch [″/N・cm] 0.8 0.8
Specifications
Moment
Yaw [″/N・cm] 0.5 0.5
Stiffness
Roll [″/N・cm] 0.7 0.7
Lost Motion [μm] 3 3
Backlash [μm] 3 3
Orthogonality of Motion [μm] 25 30
Pitch [″] / Yaw [″] 45/20 45/20
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Sensor
Origin Sensor Equipped Equipped
Proximity Origin Sensor None Equipped
*1 If you use the controller of 2.
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3664N4E10(□24mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Control System
Compatible Driver 1: SG-5M, SG-5MA 2: SG-55M, SG-55MA, SG-514MSC, SG-5151, KR-525M, MC-7514PCL
Compatible Controller 1: GSC-01, GSC-02 2: SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G036
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9065
Outline Drawing
OSMS20-(Z)
85
70
25 25
25 25
35 35
75
85
Hexagon socket head cap screw M4×8…4 screws
A
Travel C
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
21-M4×0.7 depth 6
(depth 5)
75
85
B
Travel C
8
10
5 75
85
4-4.5
mounting hole
Part Number A B C
OSMS20-35(Z) 217.7 95 17.5
OSMS20-85(Z) 267.7 120 42.5
Manual
Stages
Actuators
OSMS20-(Z)-M6
85
70
25 25
25
35
25
35
75
85
12-M4×0.7 depth 6
(depth 5)
9-M6×1 depth 6
(depth 5)
Hexagon socket head cap screw M4×8…4 screws
75
85
B
A
Travel C Travel C
8
10
5 75
85
4-4.5
mounting hole
Part Number A B C
OSMS20-35(Z)-M6 217.7 95 17.5
OSMS20-85(Z)-M6 267.7 120 42.5
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
OSMS20-(Z)-INCH
85
69.85
25.4 25.4
Hexagon socket head cap screw M4×8…4 screws
Travel C
Stepping Motor
AC Servo Motor
Cables
Piezo
25.4 25.4
34.93 34.93
76.2
85
A
12-8-32UNC depth 6
(depth 5)
6-1/4-20UNC depth 6
(depth 5)
76.2
85
B
Travel C
10
4.4
76.2
85
Part Number A B C
OSMS20-35(Z)-INCH 216.4 94.6 17.5
OSMS20-85(Z)-INCH 267.7 120 42.5
X Translation
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Connector Pin Number
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
5-Phase Stepping
Motor
E-Phase A phase
Originside (ORG)
limit sensor D-Phase
B-Phase
ON when shaded
C-Phase
Originside (NEAR)
limit sensor
ON when shaded
Note 3
Motor side (+)
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
Opposite side (−)
GP1S097HC1
limit sensor
ON when light enters
Note 1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS20-35(Z)
OSMS20-85(Z)
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1 The motor side limit sensor is the + direction limit sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Note 3 OSMS20-35 is not fitted with proximity origin sensor.
13 and 14P are short-circuited
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G037

Motion Control Products
Precision Motorized Stages with Built-in Compact Scale
OSMS(CS)20-(X) Stage size □85mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
The dedicated stage controllers (SHOT-302GS/304GS, HIT series) offer a full closed loop system
with high precision and high reliability.
Specifications
Part Number OSMS(CS)20-35(X) OSMS(CS)20-85(X)
Part Number (-M6) OSMS(CS)20-35(X)-M6 OSMS(CS)20-85(X)-M6
Part Number (-INCH) OSMS(CS)20-35(X)-INCH OSMS(CS)20-85(X)-INCH
Travel [mm] 35 85
Table Size [mm] 85×85 85×85
Feed Screw Ball screw diameterφ6mm, 1mm lead Ball screw diameter φ6mm, 1mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 1.4 1.6
Resolution
(Full) [μm/pulse] 2 2
(Half) [μm/pulse] 1 1
MAX Speed [mm/sec] 25 25
Positioning Accuracy [μm] 5 10
Positional Repeatability [μm] 2 2
Load Capacity [N] 78.4 (8.0kgf) 78.4 (8.0kgf)
Accuracy
Pitch [″/N・cm] 0.4 0.4
Specifications Moment
Stiffness
Yaw [″/N・cm] 0.25 0.25
Roll [″/N・cm] 0.35 0.35
Lost Motion [μm] 3 3
Backlash [μm] 3 3
Parallelism [μm] 30 30
Running Parallelism [μm] 10 10
Pitch [″] / Yaw [″] 30/20 30/20
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped Equipped
Proximity Origin Sensor None Equipped
Scale head Resolution [μm] 0.5 0.5
Motor / Sensor Specifications
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor
Motor Part Number
TS3664N4E10 (□24mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Sensor
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Scale head Power Voltage / Current Consumption DC5V±5% / 50mA
Compatible Cable
Cable
Driver Cable
Scale Cable
◦The stages enable high stiffness and high precision positioning
because their structure, which is strong against
momentum and combined load, is less susceptible to pitching,
rolling and yawing.
◦A compact scale is built in, but the installation space is
the same as that of other OSMS series when the travel
is the same.
Guide
▶Contact our International Sales Division for replacement of motors
or for stabilizing (drop-preventing) mechanism.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶Contact our International Sales Division to use the stage as an XY
axis or a Z axis stage.
D15D15A-CA
GSEF-CA-3
Compatible Driver / Controller
Compatible Driver −
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G038
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9066
Outline Drawing
OSMS(CS)20-(X)
Hexagon socket head cap screw M3×6…4 screws
C
B
A
85
75
35 35
25 25
21-M4×0.7 depth 6
( depth 5)
25 25
70
85
Application
Systems
Optics &
Optical
Coatings
Holders
H mounting hole
F
D
E
Bases
29
16
Travel G
Travel G
35.7
Part Number A B C D E F
OSMS(CS)20-35(X) 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS(CS)20-85(X) 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Manual
Stages
Actuators
OSMS(CS)20-(X)-M6
A
Hexagon socket head cap screw M3×6…4 screws
85
75
35 35
25 25
12-M4×0.7 depth 6
( depth 5)
Motoeized
Stages
Light
Sources
25 25
70
85
Index
E mounting hole
Travel F
29
16
D
B
C
Travel F
35.7
9-M6×1 depth 6
( depth 5)
Part Number A B C D E F
OSMS(CS)20-35(X)-M6 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS(CS)20-85(X)-M6 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Guide
Controllers/Drivers
Softwares
Stepping Motor
OSMS(CS)20-(X)-INCH
Hexagon socket head cap screw M3×6…4 screws
AC Servo Motor
A
85
76.2
34.93 34.93
25.4 25.4
12-8-32UNC depth 6
(depth 5)
Cables
Piezo
76.2
85
25.4 25.4
69.85
85
E mounting hole
D
B
C
6-1/4-20UNC depth 6
(depth 5)
Travel F
Travel F
Part Number A B C D E F
29
16
35.7
OSMS(CS)20-35(X)-INCH 183.5 60.8 34.5 76.2 (25.4×3) 8-φ4.5 17.5
OSMS(CS)20-85(X)-INCH 233.5 85.8 35 101.6 (25.4×4) 10-φ4.5 42.5
X Translation
Theta Rotation
Goniometer
Compatible Controllers / Drivers and Cables
Controller
Cable
Stage
Vacuum
Options
□40mm
□60mm
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
D15D15A-CA
G108
Cable
OSMS(CS)
□80mm
□85mm
□100mm
□120mm
Others
G102 − G103
GSEF-CA
G109
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G039

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS26-(X) Stage size □100mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS26-50(X) OSMS26-100(X) OSMS26-200(X) OSMS26-300(X)
Part Number (-M6) OSMS26-50(X)-M6 OSMS26-100(X)-M6 OSMS26-200(X)-M6 OSMS26-300(X)-M6
Part Number (-INCH) OSMS26-50(X)-INCH OSMS26-100(X)-INCH OSMS26-200(X)-INCH OSMS26-300(X)-INCH
Travel [mm] 50 100 200 300
Mechanical
Specifications
Accuracy
Specifications
Sensor
Table Size [mm]
(M6, INCH)
Feed Screw
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 2.2 2.7 3.8 4.0
(Full) [μm/pulse] 4 4 4 4
Resolution
(Half) [μm/pulse] 2 2 2 2
MAX Speed [mm/sec] 40 40 40 40
Positioning Accuracy [μm] 5 10 15 20
Positional Repeatability [μm] 3 3 6 6
Load Capacity [N] 117 (12.0kgf) 117 (12.0kgf) 117 (12.0kgf) 117 (12.0kgf)
Pitch [″/N・cm] 0.23 0.23 0.23 0.23
Moment
Stiffness
Yaw [″/N・cm] 0.12 0.12 0.12 0.12
Roll [″/N・cm] 0.2 0.2 0.2 0.2
Lost Motion [μm] 3 3 5 5
Backlash [μm] 3 3 3 3
Parallelism [μm] 50 50 50 50
Running Parallelism [μm] 10 10 10 20
Pitch [″] / Yaw [″] 25/20 25/20 30/25 30/25
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Limit Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Origin Sensor Equipped Equipped Equipped Equipped
Proximity Origin Sensor Equipped Equipped Equipped Equipped
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK525HPB-C4(□28mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G040
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9067
Outline Drawing
OSMS26-(X)
Hexagon socket head cap screw M4×8…6 screws
A
100
45 45
75
35 35
25 25
16 16
27-M4×0.7 depth 6
Application
Systems
Optics &
Optical
Coatings
Holders
E mounting hole
Travel F
D
B
Travel F
C
90
100
16 16
25 25
35 35
45 45
100
8-M3×0.5 depth 6
Part Number A B C D E F
OSMS26-50(X) 268.5 87 12 150 (25, 50×2, 25) 10-φ4.5 25
OSMS26-100(X) 318.5 112 12 200 (50×4) 10-φ4.5 50
Bases
Manual
Stages
34
19
43
OSMS26-200(X) 418.5 162 12 300 (50×6) 14-φ4.5 100
OSMS26-300(X) 518.5 212 12 400 (50×8) 18-φ4.5 150
Actuators
OSMS26-(X)-M6
Hexagon socket head cap screw M4×8…6 screws
A
120
50 50
75
35 35
25 25
16 16
17-M6×1 depth 6
10-M4×0.7 depth 6
Motoeized
Stages
Light
Sources
100
120
16 16
25 25
35 35
50 50
120
Index
E mounting hole
D
B
C
8-M3×0.5 depth 6
Part Number A B C D E F
Guide
Travel F
Travel F
OSMS26-50(X)-M6 268.5 87 12 150 (25, 50×2, 25) 10-φ4.5 25
OSMS26-100(X)-M6 318.5 112 12 200 (50×4) 10-φ4.5 50
Controllers/Drivers
34
19
OSMS26-(X)-INCH
Hexagon socket head cap screw M4×8…6 screws
A
43
OSMS26-200(X)-M6 418.5 162 12 300 (50×6) 14-φ4.5 100
OSMS26-300(X)-M6 518.5 212 12 400(50×8) 18-φ4.5 150
120
50.8 50.8
76.2
69.85
25.4 25.4 17-1/4-20UNC depth 6
15.88 15.88 10-8-32UNC depth 6
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
101.6
120
25.4 25.4
69.85
50.8 50.8
120
E mounting hole
Travel F
D
B
Travel F
C
15.88
Part Number
8-6-32UNC
A B
depth
C
6
D E F
OSMS26-50(X)-INCH 268.5 87 10.8 152.4 (25.4, 50.8×2, 25.4) 10-φ7 25
OSMS26-100(X)-INCH 318.5 112 10.4 203.2 (50.8×4) 10-φ7 50
34
19
43
OSMS26-200(X)-INCH 418.5 162 9.6 304.8 (50.8×6) 10-φ7 100
OSMS26-300(X)-INCH 518.5 212 8.8 406.4 (50.8×8) 10-φ7 150
X Translation
Theta Rotation
■Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
5-Phase Stepping
Motor
E phase
C phase
A phase
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
■Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS26-50(X)
OSMS26-100(X)
OSMS26-200(X)
OSMS26-300(X)
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G041

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS26-(XY) Stage size □100mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number OSMS26-50(XY) OSMS26-100(XY) OSMS26-200(XY) OSMS26-300(XY)
Part Number (-M6) OSMS26-50(XY)-M6 OSMS26-100(XY)-M6 OSMS26-200(XY)-M6 OSMS26-300(XY)-M6
Part Number (-INCH) OSMS26-50(XY)-INCH OSMS26-100(XY)-INCH OSMS26-200(XY)-INCH OSMS26-300(XY)-INCH
Travel [mm] 50 100 200 300
Mechanical
Specifications
Accuracy
Specifications
Sensor
Table Size [mm]
(M6, INCH)
Feed Screw
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 4.4 5.4 7.6 8.0
Resolution
(Full) [μm/pulse] 4 4 4 4
(Half) [μm/pulse] 2 2 2 2
MAX Speed [mm/sec] 40 40 40 40
Load Capacity [N] 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf)
Backlash [μm] 3 3 3 3
Orthogonality of Motion [μm] 5 5 10 5
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Limit Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Origin Sensor Equipped Equipped Equipped Equipped
Proximity Origin Sensor Equipped Equipped Equipped Equipped
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Motor
Sensor
(Reference) Precision Specifications of Single Axis Stage
Part Number OSMS26-50(X) OSMS26-100(X) OSMS26-200(X) OSMS26-300(X)
Accuracy
Specifications
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK525HPB-C4 (□28mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Positioning Accuracy [μm] 5 10 15 15
Positional Repeatability [μm] 3 3 6 6
Pitch [″/N・cm] 0.23 0.23 0.23 0.23
Moment
Stiffness
Yaw [″/N・cm] 0.12 0.12 0.12 0.12
Roll [″/N・cm] 0.2 0.2 0.2 0.2
Lost Motion [μm] 3 3 5 5
Parallelism [μm] 50 50 50 50
Running Parallelism [μm] 10 10 10 10
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G042
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9068
Outline Drawing
OSMS26-(XY)
Hexagon socket
head cap screw M4×8…6 screws
100
45 45
75
35 35
25 25
16 16
27-M4×0.7 depth 6
E mounting hole
100
90
79
Travel F
Application
Systems
Optics &
Optical
Coatings
Holders
16
16
25 25
35 35
45 45
100
8-M3×0.5 depth 6
OSMS26-(XY)-M6
Hexagon socket
head cap screw M4×8…6 screws
Travel F
A
100
120
100
79
Travel F
B
Travel F 100
B
A
43
86
C D
Part Number A B C D E F
OSMS26-50(XY) 268.5 87 12 150 (25, 50×2, 25) 10-φ7 25
OSMS26-100(XY) 318.5 112 12 200 (50×4) 10-φ7 50
OSMS26-200(XY) 418.5 162 12 300 (50×6) 10-φ7 100
OSMS26-300(XY) 518.5 212 12 400 (50×8) 10-φ7 150
Bases
Manual
Stages
Actuators
Motoeized
Stages
120
50 50
75
35 35
25 25
16 16
17-M6×1 depth 6
10-M4×0.7 depth 6
E mounting hole
Travel F
Light
Sources
Index
1616
25 25
35 35
50 50
120
A
8-M3×0.5 depth 6
Travel F
A
120
Travel F
B
120
Travel F
B
43
86
C D
Part Number A B C D E F
OSMS26-50(XY)-M6 268.5 87 12 150 (25, 50×2, 25) 10-φ7 25
OSMS26-100(XY)-M6 318.5 112 12 200 (50×4) 10-φ7 50
OSMS26-200(XY)-M6 418.5 162 12 300 (50×6) 10-φ7 100
OSMS26-300(XY)-M6 518.5 212 12 400 (50×8) 10-φ7 150
Guide
Controllers/Drivers
Softwares
Stepping Motor
OSMS26-(XY)-INCH
Hexagon socket
head cap screw M4×8…6 screws
120
50.8 50.8
76.2
69.85
25.4 25.4
15.88 15.88
17-1/4-20UNC depth 6
10-8-32UNC depth 6
15.8815.88
25.4 25.4
69.85
50.8 50.8
120
8-6-32UNC depth 6
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
E mounting hole
Travel F
A
120
101.6
79
120
5-Phase Stepping
Motor
E phase
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
Travel F
B
C phase
A phase
Travel F 120 Travel F
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
B
A
43
86
C D
Part Number A B C D E F
OSMS26-50(XY)-INCH 268.5 87 10.8 152.4 (25.4, 50.8×2, 25.4) 10-φ7 25
OSMS26-100(XY)-INCH 318.5 112 10.4 203.2 (50.8×4) 10-φ7 50
OSMS26-200(XY)-INCH 418.5 162 9.6 304.8 (50.8×6) 10-φ7 100
OSMS26-300(XY)-INCH 518.5 212 8.8 406.4 (50.8×8) 10-φ7 150
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS26-50(XY)
OSMS26-100(XY)
OSMS26-200(XY)
OSMS26-300(XY)
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G043

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS26-(Z) Stage size □100mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS26-50(Z) OSMS26-100(Z) OSMS26-200(Z) OSMS26-300(Z)
Part Number (-M6) OSMS26-50(Z)-M6 OSMS26-100(Z)-M6 OSMS26-200(Z)-M6 OSMS26-300(Z)-M6
Part Number (-INCH) OSMS26-50(Z)-INCH OSMS26-100(Z)-INCH OSMS26-200(Z)-INCH OSMS26-300(Z)-INCH
Travel [mm] 50 100 200 150
Mechanical
Specifications
Accuracy
Specifications
Sensor
Table Size [mm]
(M6, INCH)
Feed Screw
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 4.4 4.9 7.2 7.4
(Full) [μm/pulse] 4 4 4 4
Resolution
(Half) [μm/pulse] 2 2 2 2
MAX Speed [mm/sec] 10 10 10 10
Positioning Accuracy [μm] 15 20 30 40
Positional Repeatability [μm] 3 3 6 6
Load Capacity [N] 39.2 (4.0kgf) 39.2 (4.0kgf) 39.2 (4.0kgf) 39.2 (4.0kgf)
Pitch [″/N・cm] 0.4 0.4 0.4 0.4
Moment
Stiffness
Yaw [″/N・cm] 0.15 0.15 0.15 0.15
Roll [″/N・cm] 0.20 0.20 0.20 0.20
Lost Motion [μm] 3 3 5 5
Backlash [μm] 3 3 3 3
Orthogonality of Motion [μm] 30 40 50 40
Pitch [″] / Yaw [″] 50/20 50/20 55/20 55/20
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Limit Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Origin Sensor Equipped Equipped Equipped Equipped
Proximity Origin Sensor Equipped Equipped Equipped Equipped
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK525HPB-C4 (□28mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G044
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9069
Outline Drawing
OSMS26-(Z)
100
45 45
75
35 35
27-M4×0.7 depth 6
25 25
16 16
Hexagon socket head cap screw M4×8…6 screws
Travel C
OSMS26-(Z)-M6
120
50 50
75
35 35
25 25
16 16 17-M6×1 depth 6
10-M4×0.7 depth 6
Hexagon socket head cap screw M4×8…6 screws
Travel C
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
16
25
35
45
16
25
35
45
100
A
16 16
25 25
35 35
50 50
120
A
Manual
Stages
8-M3×0.5 depth 6
B
Travel C
10
8-M3×0.5 depth 6
B
Travel C
10
Actuators
Motoeized
Stages
90 5 90
100
100
100
120
10
100
120
Light
Sources
Part Number A B C
OSMS26-50(Z) 306 125 25
OSMS26-100(Z) 356.5 150 50
OSMS26-200(Z) 463 200 100
OSMS26-300(Z) 556.5 250 150
Part Number A B C
OSMS26-50(Z)-M6 306 125 25
OSMS26-100(Z)-M6 356.5 150 50
OSMS26-200(Z)-M6 463 200 100
OSMS26-300(Z)-M6 556.5 250 150
Index
Guide
OSMS26-(Z)-INCH
Hexagon socket head cap screw M4×8…6 screws
Controllers/Drivers
Softwares
120
50.8 50.8
76.2
69.85
25.4 25.4
15.88 15.88
17-1/4-20UNC depth 6
10-8-32UNC depth 6
Travel C
Stepping Motor
AC Servo Motor
Cables
Piezo
15.88
25.4 25.4
69.85
50.8 50.8
120
A
8-6-32UNC depth 6
B
Travel C
Part Number A B C
101.6
120
10
9.2
101.6
120
OSMS26-50(Z)-INCH 305.6 124.6 25
OSMS26-100(Z)-INCH 356.5 150 50
OSMS26-200(Z)-INCH 463 199.2 100
OSMS26-300(Z)-INCH 556.5 250 150
X Translation
Theta Rotation
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
5-Phase Stepping
Motor
E phase
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS26-50(Z)
OSMS26-100(Z)
OSMS26-200(Z)
OSMS26-300(Z)
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G045

Motion Control Products
Precision Motorized Stages with Built-in Compact Scale
OSMS(CS)26-(X) Stage size □100mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
The dedicated stage controllers (SHOT-302GS/304GS, HIT series) offer a full closed loop system
with high precision and high reliability.
Specifications
Part Number OSMS(CS)26-100(X) OSMS(CS)26-200(X)
Part Number (-M6) OSMS(CS)26-100(X)-M6 OSMS(CS)26-200(X)-M6
Part Number (-INCH) OSMS(CS)26-100(X)-INCH OSMS(CS)26-200(X)-INCH
Travel [mm] 100 200
Table Size [mm]
(M6, INCH)
100×100
(120×120)
100×100
(120×120)
Mechanical
Specifications
Feed Screw
Positioning Slide
Ball screw diameter φ8mm, 2mm lead
Outer rail structure
Ball screw diameter φ8mm, 2mm lead
Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 3.2 4.3
Resolution
(Full) [μm/pulse] 4 4
(Half) [μm/pulse] 2 2
MAX Speed [mm/sec] 40 40
Positioning Accuracy [μm] 10 15
Positional Repeatability [μm] 2 3
Load Capacity [N] 117 (12.0kgf) 117 (12.0kgf)
Accuracy
Pitch [″/N・cm] 0.23 0.23
Specifications Moment
Stiffness
Yaw [″/N・cm] 0.12 0.12
Roll [″/N・cm] 0.2 0.2
Lost Motion [μm] 3 5
Backlash [μm] 3 3
Parallelism [μm] 50 50
Running Parallelism [μm] 10 10
Pitch [″] / Yaw [″] 25/20 30/25
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped Equipped
Proximity Origin Sensor Equipped Equipped
Scale head Resolution [μm] 0.5 0.5
Motor / Sensor Specifications
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor
Motor Part Number
PK525HPB-C4 (□28mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Sensor
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Scale head Power Voltage / Current Consumption DC5V±25% / 50mA
Compatible Cable
Cable
Driver Cable
Scale Cable
◦The stages enable high stiffness and high precision positioning
because their structure, which is strong against
momentum and combined load, is less susceptible to pitching,
rolling and yawing.
◦A compact scale is built in, but the installation space is
the same as that of other OSMS series when the travel
is the same.
Guide
▶Contact our International Sales Division for replacement of motors
or for stabilizing (drop-preventing) mechanism.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶Contact our International Sales Division to use the stage as an XY
axis or a Z axis stage.
D15D15A-CA
GSEF-CA-3
Compatible Driver / Controller
Compatible Driver −
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G046
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9070
Outline Drawing
OSMS26-(X)
Hexagon socket head cap screw M4×8…6 screws
A
100
45 45
75
35 35
25 25
16 16
27-M4×0.7 depth 6
Application
Systems
Optics &
Optical
Coatings
Holders
E mounting hole
Travel F
D
B
Travel F
C
90
100
16 16
25 25
35 35
45 45
100
8-M3×0.5 depth 6
Part Number A B C D E F
Bases
Manual
Stages
34
19
43
OSMS(CS)26-100(X) 318.5 112 12 200 (50×4) 10-φ4.5 50
OSMS(CS)26-200(X) 418.5 162 12 300 (50×6) 14-φ4.5 100
Actuators
OSMS26-(X)-M6
Hexagon socket head cap screw M4×8…6 screws
A
120
50 50
75
35 35
25 25
16 16
17-M6×1 depth 6
10-M4×0.7 depth 6
Motoeized
Stages
Light
Sources
100
120
16 16
25 25
35 35
50 50
120
Index
E mounting hole
D
B
C
8-M3×0.5 depth 6
Guide
34
19
OSMS26-(X)-INCH
Travel F
Travel F
Hexagon socket head cap screw M4×8…6 screws
A
43
Part Number A B C D E F
OSMS(CS)26-100(X)-M6 318.5 112 12 200 (50×4) 10-φ4.5 50
OSMS(CS)26-200(X)-M6 418.5 162 12 300 (50×6) 14-φ4.5 100
120
50.8 50.8
76.2
69.85
25.4 25.4 17-1/4-20UNC depth 6
15.88 15.88 10-8-32UNC depth 6
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
101.6
120
25.4 25.4
69.85
50.8 50.8
120
E mounting hole
D
B
C
15.88
8-6-32UNC depth 6
Travel F
Travel F
34
19
43
Part Number A B C D E F
OSMS(CS)26-100(X)-INCH 318.5 112 10.4 203.2 (50.8×4) 10-φ7 50
OSMS(CS)26-200(X)-INCH 418.5 162 9.6 304.8 (50.8×6) 10-φ7 100
X Translation
Theta Rotation
Goniometer
■Compatible Controllers / Drivers and Cables
Controller
Cable
Stage
Vacuum
Options
□40mm
□60mm
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
D15D15A-CA
G108
Cable
OSMS(CS)
□80mm
□85mm
□100mm
□120mm
Others
G102 − G103
GSEF-CA
G109
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G047

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS33-(X) Stage size □120mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS33-300(X) OSMS33-500(X)
Part Number (-M6) OSMS33-300(X)-M6 OSMS33-500(X)-M6
Part Number (-INCH) OSMS33-300(X)-INCH OSMS33-500(X)-INCH
Travel [mm] 300 500
Table Size [mm] 120×120 120×120
Feed Screw Ball screw diameter φ10mm, 10mm lead Ball screw diameter φ10mm, 10mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 7.0 8.6
(Full) [μm/pulse] 20 20
Resolution
(Half) [μm/pulse] 10 10
MAX Speed [mm/sec] 120 120
Positioning Accuracy [μm] 25 25
Positional Repeatability [μm] 6 6
Load Capacity [N] 196 (20.0kgf) 196 (20.0kgf)
Accuracy
Pitch [″/N・cm] 0.12 0.12
Specifications Moment
Stiffness
Yaw [″/N・cm] 0.08 0.08
Roll [″/N・cm] 0.1 0.1
Lost Motion [μm] 5 5
Backlash [μm] 3 3
Parallelism [μm] 50 50
Running Parallelism [μm] 15 25
Pitch [″] / Yaw [″] 40/25 40/25
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Sensor
Origin Sensor Equipped Equipped
Proximity Origin Sensor Equipped Equipped
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3667N43E967 (□42mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G048
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9071
Outline Drawing
OSMS33-(X)
Hexagon socket head cap screw M5×10…4 screws
A
120
50 50
35 35
25 25
16-M4×0.7 depth 8
Application
Systems
Optics &
Optical
Coatings
100
120
25 25
35 35
50 50
120
Holders
E mounting hole
D
B
C
9-M6×1 depth 8
Bases
48.7
26
Travel F
Travel F
56.7
Part Number A B C D E F
OSMS33-300(X) 530.3 211.8 61.8 300 (50×6) 14-φ6.5 150
OSMS33-500(X) 730.3 311.8 61.8 500 (50×10) 22-φ6.5 250
Manual
Stages
Actuators
OSMS33-(X)-M6
Hexagon socket head cap screw M5×10…4 screws
A
120
50 50
35 35
25 25
8-M4×0.7 depth 8
8-M6×1 depth 8
Motoeized
Stages
E mounting hole
D
B
C
100
120
25 25
35 35
50 50
120
9-M6×1 depth 8
Light
Sources
Index
Travel F
Travel F
Part Number A B C D E F
Guide
48.7
26
56.7
OSMS33-300(X)-M6 530.3 211.8 61.8 300 (50×6) 14-φ6.5 150
OSMS33-500(X)-M6 730.3 311.8 61.8 500 (50×10) 22-φ6.5 250
Controllers/Drivers
Softwares
OSMS33-(X)-INCH
Hexagon socket head cap screw M5×10…4 screws
A
120
50.8 50.8
34.93 34.92
25.4 25.4
8-8-32UNC depth 8
8-1/4-20UNC depth 8
Stepping Motor
AC Servo Motor
Cables
101.6
120
25.4
34.925
50.8
25.4
34.925
50.8
120
Piezo
E mounting hole
D
B
C
9-1/4-20UNC depth 8
Travel F
Travel F
Part Number A B C D E F
48.7
26
56.7
OSMS33-300(X)-INCH 530.3 211.8 59.4 304.8 (50.8×6) 14-φ7 150
OSMS33-500(X)-INCH 730.3 311.8 57.8 508 (50.8×10) 22-φ7 250
X Translation
Theta Rotation
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
6
1
2
3
4
5
6
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND (0V)
7 7 ORG
8 8
+VS
9 9
5 − 24VDC
RESERVE
10 10 N.C. (not used)
11 11 LS (+)
12 12 LS (−)
13 13 N.C. (not used)
14 14 NEAR
15 15 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
Compatible Controllers / Drivers and Cables
Controller
SHOT-702 [2 axes]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G100 − G105
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
OSMS33‐300(X)
OSMS33‐500(X)
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G049

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS33-(XY) Stage size □120mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number OSMS33-300(XY) OSMS33-500(XY)
Part Number (-M6) OSMS33-300(XY)-M6 OSMS33-500(XY)-M6
Part Number (-INCH) OSMS33-300(XY)-INCH OSMS33-500(XY)-INCH
Travel [mm] 300 500
Table Size [mm] 120×120 120×120
Feed Screw Ball screw diameter φ10mm, 10mm lead Ball screw diameter φ10mm, 10mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 14.0 17.2
Resolution
(Full) [μm/pulse] 20 20
(Half) [μm/pulse] 10 10
Accuracy MAX Speed [mm/sec] 80 80
Specifications Load Capacity [N] 156 (16.0kgf) 156 (16.0kgf)
Backlash [μm] 3 3
Orthogonality of Motion [μm] 5 5
Sensor Part Number
Micro photo sensor: GP1S092HCPIF(Sharp Corporation)
Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None
Proximity Origin Sensor None None
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Motor
Sensor
(Reference) Precision Specifications of Single Axis Stage
Part Number OSMS33-300(X) OSMS33-500(X)
Accuracy
Specifications
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3667N43E967 (□42mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
40mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Positioning Accuracy [μm] 15 20
Positional Repeatability [μm] 6 6
Pitch [″/N・cm] 0.12 0.12
Moment
Stiffness
Yaw [″/N・cm] 0.08 0.08
Roll [″/N・cm] 0.08 0.08
Lost Motion [μm] 5 5
Parallelism [μm] 50 50
Running Parallelism [μm] 10 10
Compatible Driver / Controller
Compatible Driver SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G050
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9072
Outline Drawing
OSMS33-(XY)
Hexagon socket
head cap screw M5×10…4 screws
E mounting hole
120
100
89
Application
Systems
Optics &
Optical
Coatings
120
50 50
35 35
16-M4×0.7depth 8
25 25
25
25
35 35
50 50
120
9-M6×1 depth 8
OSMS33-(XY)-M6
Hexagon socket
head cap screw M5×10…4 screws
120
50 50
8-M4×0.7 depth 8
35 35
25 25 8-M6×1 depth 8
25 25
35 35
50 50
120
9-M6×1 depth 8
OSMS33-(XY)-INCH
Hexagon socket
head cap screw M5×10…4 screws
120
50.8 50.8
34.925 34.925
8-8-32UNC depth 8
25.4 25.4 8-1/4-20UNC depth 8
25.4
34.925
50.8 50.8
120
9-1/4-20UNC depth 8
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
6
1
2
3
4
5
6
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND (0V)
7 7 ORG
8 8
+VS
9 9
5 − 24VDC
RESERVE
10 10 N.C. (not used)
11 11 LS (+)
12 12 LS (−)
13 13 N.C. (not used)
14 14 NEAR
15 15 N.C. (not used)
Note 2
Travel 250 120 Travel 250
B
A
E mounting hole
Travel F
E mounting hole
Travel F
A
120
100
89
120
120
101.6
89
Travel F
B
120 Travel F
B
A
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
5-Phase Stepping
Motor
E phase
C phase
Travel F
120
Travel F
Travel F 120 Travel F
120 Travel F
Travel F
A phase
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
B
B
B
A
A
A
56.7
113.4
56.7
113.4
56.7
113.4
C D
C D
C D
Part Number A B C D E F
OSMS33-300(XY) 530.3 211.8 61.8 300 (50×6) 14-φ7 150
OSMS33-500(XY) 730.3 311.8 61.8 500 (50×10) 22-φ7 250
Part Number A B C D E F
OSMS33-300(XY)-M6 530.3 211.8 61.8 300 (50×6) 14-φ7 150
OSMS33-500(XY)-M6 730.3 311.8 61.8 500 (50×10) 22-φ7 250
Part Number A B C D E F
OSMS33-300(XY)-INCH 530.3 211.8 59.4 304.8 (50.8×6) 14-φ7 150
OSMS33-500(XY)-INCH 730.3 311.8 57.8 508 (50.8×10) 22-φ7 250
Compatible Controllers / Drivers and Cables
Controller
SHOT-702 [2 axes]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G100 − G105
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
OSMS33‐300(XY)
OSMS33‐500(XY)
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G051

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS33-(Z)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS33-300(Z) OSMS33-500(Z)
Part Number (-M6) OSMS33-300(Z)-M6 OSMS33-500(Z)-M6
Part Number (-INCH) OSMS33-300(Z)-INCH OSMS33-500(Z)-INCH
Travel [mm] 300 500
Table Size [mm] 120×120 120×120
Mechanical
Feed Screw Ball screw diameter φ10mm, 10mm lead Ball screw diameter φ10mm, 10mm lead
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 14.5 16.1
(Full) [μm/pulse] 20 20
Resolution
(Half) [μm/pulse] 10 10
MAX Speed [mm/sec] 30 30
Positioning Accuracy [μm] 50 50
Positional Repeatability [μm] 6 6
Accuracy
Load Capacity [N] 68.6 (7.0kgf) 68.6 (7.0kgf)
Specifications
Pitch [″/N・cm] 0.2 0.2
Moment
Stiffness
Yaw [″/N・cm] 0.15 0.15
Roll [″/N・cm] 0.15 0.15
Lost Motion [μm] 5 5
Backlash [μm] 3 3
Orthogonality of Motion [μm] 30 35
Pitch [″] / Yaw [″] 50/25 55/25
Sensor Part Number
Micro photo sensor: GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Sensor
Origin Sensor None None
Proximity Origin Sensor None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3667N43E967 (□42mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
40mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Control
System
Compatible Driver
Compatible Controller
SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G052
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9073
Outline Drawing
OSMS33-(Z)
Hexagon socket head cap screw M4×8…6 screws
OSMS33-(Z)-M6
Hexagon socket head cap screw M4×8…6 screws
Application
Systems
Optics &
Optical
Coatings
120
50 50
35 35
25 25
25 25
35 35
50 50
120
16-M4×0.7 depth 8
9-M6×1 depth 8
B
A
Travel C Travel C
20
120
50 50
35 35
25 25
25 25
35 35
50 50
9-M6×1 depth 8
120
8-M4×0.7 depth 8
8-M6×1 depth 8
B
A
Travel C Travel C
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
100 10 100
120
120
100
120
10 100
120
Light
Sources
Part Number A B C
OSMS33-300(Z) 620 250 150
OSMS33-500(Z) 768.5 350 250
Part Number A B C
OSMS33-300(Z)-M6 620 250 150
OSMS33-500(Z)-M6 768.5 350 250
Index
OSMS33-(Z)-INCH
Hexagon socket head cap screw M4×8…6 screws
Guide
Controllers/Drivers
Softwares
120
50.8 50.8
34.925 34.925
25.4 25.4
25.4 25.4
34.93 34.93
50.8 50.8
120
8-8-32UNC depth 8
8-1/4-20UNC depth 8
9-1/4-20UNC depth 8
B
A
Travel C Travel C
Stepping Motor
AC Servo Motor
Cables
Piezo
Part Number A B C
101.6
120
9.2
101.6
120
OSMS33-300(Z)-INCH 620 248.4 150
OSMS33-500(Z)-INCH 768.5 350 250
X Translation
Theta Rotation
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
6
1
2
3
4
5
6
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND (0V)
7 7 ORG
8 8
+VS
9 9
5 − 24VDC
RESERVE
10 10 N.C. (not used)
11 11 LS (+)
12 12 LS (−)
13 13 N.C. (not used)
14 14 NEAR
15 15 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
Compatible Controllers / Drivers and Cables
Controller
SHOT-702 [2 axes]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G100 − G105
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
OSMS33‐300(Z)
OSMS33‐500(Z)
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G053

Motion Control Products
Precision Motorized Stages with Built-in Compact Scale
OSMS(CS)33-(X) Stage size □120mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
The dedicated stage controllers (SHOT-302GS/304GS, HIT series) offer a full closed loop system
with high precision and high reliability.
Specifications
Part Number OSMS(CS)33-300(X) OSMS(CS)33-500(X)
Part Number (-M6) OSMS(CS)33-300(X)-M6 OSMS(CS)33-500(X)-M6
Part Number (-INCH) OSMS(CS)33-300(X)-INCH OSMS(CS)33-500(X)-ICH
Travel [mm] 300 500
Table Size [mm] 120×120 120×120
Feed Screw Ball screw diameter φ10mm, 10mm lead Ball screw diameter φ10mm, 10mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 7.8 9.6
(Full) [μm/pulse] 20 20
Resolution
(Half) [μm/pulse] 10 10
MAX Speed [mm/sec] 100 100
Positioning Accuracy [μm] 25 25
Positional Repeatability [μm] 5 5
Load Capacity [N] 196 (20.0kgf) 196 (20.0kgf)
Accuracy
Pitch [″/N・cm] 0.12 0.12
Specifications Moment
Stiffness
Yaw [″/N・cm] 0.08 0.08
Roll [″/N・cm] 0.1 0.1
Lost Motion [μm] 5 5
Backlash 3 3
Parallelism [μm] 50 50
Running Parallelism [μm] 15 25
Pitch [″] / Yaw [″] 40/25 40/25
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped Equipped
Proximity Origin Sensor Equipped Equipped
Scale head Resolution [μm] 0.5 0.5
Motor / Sensor Specifications
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor
Motor Part Number
TS3667N43E967 (□42mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Sensor
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Scale head Power Voltage / Current Consumption DC5V±5% / 100mA
Compatible Cable
Cable
Driver Cable
Scale Cable
◦The stages enable high stiffness and high precision positioning
because their structure, which is strong against
momentum and combined load, is less susceptible to pitching,
rolling and yawing.
◦A compact scale is built in, but the installation space is
the same as that of other OSMS series when the travel
is the same.
Guide
▶Contact our International Sales Division for replacement of motors
or for stabilizing (drop-preventing) mechanism.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶Contact our International Sales Division to use the stage as an XY
axis or a Z axis stage.
D15D15A-CA
GSEF-CA-3
Compatible Driver / Controller
Compatible Driver −
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G054
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9074
Outline Drawing
OSMS(CS)33-(X)
Hexagon socket head cap screw M5×10…4 screws
A
120
50 50
35 35
25 25
16-M4×0.7 depth 8
Application
Systems
Optics &
Optical
Coatings
100
120
25 25
35 35
50 50
120
Holders
E mounting hole
D
B
C
9-M6×1 depth 8
Bases
48.7
26
Travel F
Travel F
56.7
Part Number A B C D E F
OSMS(CS)33-300(X) 530.3 211.8 61.8 300 (50×6) 14-φ7 150
OSMS(CS)33-500(X) 730.3 311.8 61.8 500 (5×10) 22-φ7 250
Manual
Stages
Actuators
OSMS(CS)33-(X)-M6
Hexagon socket head cap screw M5×10…4 screws
A
120
50 50
35 35
25 25
8-M4×0.7 depth 8
8-M6×1 depth 8
Motoeized
Stages
E mounting hole
D
B
C
100
120
25 25
35 35
50 50
120
9-M6×1 depth 8
Light
Sources
Index
Travel F
Travel F
Part Number A B C D E F
Guide
48.7
26
56.7
OSMS(CS)33-300(X)-M6 530.3 211.8 61.8 300 (50×6) 14-φ7 150
OSMS(CS)33-500(X)-M6 730.3 311.8 61.8 500 (5×10) 22-φ7 250
Controllers/Drivers
Softwares
OSMS(CS)33-(X)-INCH
Hexagon socket head cap screw M5×10…4 screws
A
120
50.8 50.8
34.93 34.92
25.4 25.4
8-8-32UNC depth 8
8-1/4-20UNC depth 8
Stepping Motor
AC Servo Motor
Cables
101.6
120
25.4
34.925
50.8
25.4
34.925
50.8
120
Piezo
E mounting hole
D
B
C
9-1/4-20UNC depth 8
Travel F
Travel F
Part Number A B C D E F
48.7
26
56.7
OSMS(CS)33-300(X)-INCH 530.3 211.8 59.4 304.8 (50.8×6) 14-φ7 150
OSMS(CS)33-500(X)-INCH 730.3 311.8 57.8 508 (50.8×10) 22-φ7 250
X Translation
Theta Rotation
Goniometer
Compatible Controllers / Drivers and Cables
Controller
Cable
Stage
Vacuum
Options
□40mm
□60mm
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
D15D15A-CA
G108
Cable
OSMS(CS)
□80mm
□85mm
□100mm
□120mm
Others
G102 − G103
GSEF-CA
G109
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G055

Motion Control Products
SGMV series Translation Motorized Stages - AC servo Motor
SGMV
High precision/high stiffness stages driven by AC servo motor.
Application
Systems
Optics &
Optical
Coatings
◦The stage structure unifies the functions of precision
linear guide and precision ball screw, places the linear
guide, inner block (table) and drive ball screw at the
same position, and uses high stiffness U-shape outer
rail for the guide to offer small footprint with large load
rating.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Specifications
Part Number SGMV20-35(X) SGMV20-80(X) SGMV26-100(X) SGMV26-200(X)
Travel [mm] 35 80 100 200
Table Size [mm] 60×60 60×60 80×80 80×80
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ8mm,
2mm lead
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 0.7 1 1.7 2.5
(Full) [μm/pulse] 2 2 4 4
Resolution
(Half) [μm/pulse] 1 1 2 2
MAX Speed [mm/sec] 35 80 130 130
Positioning Accuracy [μm] 7 10 10 15
Positional Repeatability [μm] 4 5 5 6
Load Capacity [N] 80 (8kgf) 80 (8kgf) 130 (13kgf) 130 (13kgf)
Pitch [″/N・cm] 0.4 0.4 0.23 0.23
Moment
Stiffness
Yaw [″/N・cm] 0.25 0.25 0.12 0.12
Roll [″/N・cm] 0.35 0.35 0.2 0.2
Lost Motion [μm] 2 2 2 2
Backlash [μm] 2 2 2 2
Parallelism [μm] 30 30 50 50
Running Parallelism [μm] 10 10 10 10
Pitch [″] / Yaw [″] 30/20 30/20 30/20 30/25
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co.,Ltd.)
Limit Sensor
Equipped (NORMAL
CLOSE)
Equipped (NORMAL
CLOSE)
Equipped (NORMAL
CLOSE)
Equipped (NORMAL
CLOSE)
Origin Sensor None None None None
Proximity Origin Sensor None None None None
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Type
Motor
Motor Part Number
Step Angle
Power Voltage
Current Consumption
Sensor
Control Output
Output Logic
AC servo Motor 10W (YASKAWA Electric Corporation)
SGMMV-A1E2A21 (□25mm)
0.0318N・m
DC5 - 24V±10%
30mA or lower (15mA or lower per sensor)
NPN open collector output DC30V or lower, 50mA or lower
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SGDV-2R9EP1A
Control System
Compatible Controller
PGC-04
G056
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9075
Outline Drawing
SGMV20-35(X)
Hexagon socket head cap screw M3×6…6 screws
(223)
60
25 25
16 16
SGMV20-80(X)
Hexagon socket
head cap screw
M3×6…6 screws
(273)
(88.5)
60
25 25
16 16
Application
Systems
Optics &
Optical
Coatings
Encoder cable
Motor cable
Limit sensor cable
(78.4)
Travel 17.5
18
25
16 16
25
8-M4 depth 6
8-M3 depth 6
Travel 17.5
60
Encoder cable
Motor cable
Limit sensor cable
(78.4)
Travel 40 Travel 40
25
18
16 16
25
8-M4 depth 6
8-M3 depth 6
60
Holders
Bases
Manual
Stages
(26.6)
15
(34.5)
14 32 14
2
27
2×4-3.4mounting hole
6.5 counterbore
44
2
27
1
2×5-3.4 mounting hole
16 16 44 29.5 6.5 counterbore
Actuators
SGMV26-100(X)
Hexagon socket
head cap screw M4×8…6 screws
(337)
80
70
25 25
32
(115.6)
Motoeized
Stages
Light
Sources
Encoder cable
(88.4)
16
25
16
25 25
70
80
Index
Motor cable
4-M4 depth 6
8-M4 depth 6
4-M3 depth 6
Travel 50 Travel 50
Guide
Limit sensor cable
Controllers/Drivers
0.2 24.8
55 25 25 55 (36)
2
33
2×5-4.5 mounting hole
8 counterbore
Softwares
Stepping Motor
SGMV26-200(X)
Hexagon socket
head cap screw M4×8…6 screws
(437)
80
70
25 25
32
(165.6)
AC Servo Motor
Cables
Piezo
Encoder cable
Motor cable
Limit sensor cable
Controller / Servo Pack
Part Number
PGC-04
SGDV-2R9EP1A
Cable
(88.4)
Products Name
4-M4 depth 6
Pulus Generating Controller
Servo Packs for Driving Servo Motor
PGC-04
Travel 100
SGDV-2R9EP1A
0.2 24.8
80 15 50 15
Part Number
Cable Length
Controller Side Stage Side Servo Pack Side
[m]
PGC-ACS-2 10126-3000PE DE-957S-NR 10126-3000PE 2
JZSP-CF1M00-03E − − − 3
JZSP-CMP00-03E − − − 3
JZSP-CF1G00-01-E − − − 1
8-M4 depth 6
4-M3 depth 6
Travel 100
80 (46)
2
33
25
16
16
25 25
70
80
2×6-4.5 mounting hole
8 counterbore
Connection Diagram
1
2
3
4
5
6
7
8
9
Note 2
1
2
3
4
5
6
7
8
9
Connector Pin Number
Japan Ariation Electronics Industry, Ltd.
DE-9P-NR
VS
5 − 24VDC
GND (0V)
LS (+)
LS (−)
N.C. (not used)
N.C. (not used)
N.C. (not used)
N.C. (not used)
N.C. (not used)
Encoder cable* 2
Cable Length 280mm
Plug: 55102-0600 (Molex Japan Co., Ltd.)
Motor cable* 2
Cable Length 280mm
Receptacle: 43025-0400 (Molex Japan Co., Ltd.)
Limit sensor cable
Cable Length 280mm
D-sub9Pin (JAE)
Connector DE-9P-NR
Hood DE-C8-J9-F1-1R
*2
Servo Pack SGDV-2R9EP1A
Motor side (+)
limit sensor
ON when light enters
Note 1
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Opposite side (−)
limit sensor
ON when light enters
Note 1
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with origin and proximity origin sensors.
Limit sensors are used as origin detection sensors.
Note 2 Compatible cable connector:
Japan Ariation Electronics Industry, Ltd. DE-C8-J9-F1-1R
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G057

Motion Control Products
Thin Long Travel Stage
KLSA/KLSS
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
These stages are thin but ensure long travel.
These thin motorized stages can minimize the stage height even when used in combination.
◦Four linear guide blocks are located at optimal
positions to improve positional repeatability.
◦To place importance on price, KLSA which has an
aluminum body is recommended. To place importance
on rigidity, KLSS which has a steel body is
recommended.
Guide
▶Please contact us when assembled into XYZ axis or use in
reversion on the ceiling or vertical direction.
▶Opposite model or various motor changes are optionally available.
G030
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number KLSA-100X KLSS-100X KLSA-200X KLSS-200X
Travel [mm] 100 100 200 200
Table Size [mm] 80×80 80×80 120×120 120×120
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ8mm,
2mm lead
Ball screw diameter φ8mm,
2mm lead
Ball screw diameter φ10mm,
5mm lead
Ball screw diameter φ10mm,
5mm lead
Positioning Slide Liner guide Liner guide Liner guide Liner guide
Stage Material Aluminum Steel Aluminum Steel
Finish Black anodized Black chromium oxide Black anodized Black chromium oxide
Weight [kg] 2.2 3.5 5.1 7.7
(Full) [μm/pulse] 4 4 10 10
Resolution
(Half) [μm/pulse] 2 2 5 5
MAX Speed [mm/sec] 30 30 50 50
Positioning Accuracy [μm] 15 15 20 20
Positional Repeatability [μm] ±1 ±1 ±1 ±1
Load Capacity [N] 147 (15kgf) 147 (15kgf) 294 (30kgf) 294 (30kgf)
Pitch [″/N・cm] 0.05 0.05 0.02 0.02
Moment
Stiffness
Yaw [″/N・cm] 0.05 0.05 0.02 0.02
Roll [″/N・cm] 0.1 0.1 0.02 0.02
Lost Motion [μm] 4 4 4 4
Backlash [μm] 1 1 1 1
Parallelism [μm] 50 50 50 50
Orthogonality of Motion [μm] 10 10 10 10
Pitch [″] / Yaw [″] 20/15 20/15 40/20 40/20
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co.,Ltd.) Limit sensor, origin sensor
Limit Sensor Equipped Equipped Equipped Equipped
Origin Sensor Equipped Equipped Equipped Equipped
Proximity Origin Sensor None None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK545-NBW (□42mm)
Step Angle 0.72°
Power Voltage DC+5V - +24V
Current Consumption
45mA or lower (15mA or lower per sensor)
Control Output
NPN open collector output 50mA
Output Logic
In the case of light shielded ,output transistor OFF (No conduction): Limit sensor
In the case of light shielded ,output transistor ON (Conduction): Origin sensor
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G058
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9076
Outline Drawing
KLSA-100X
(63)
Hexagon socket head cap screw M4×8…6 screws
303
240
4-M4×0.7 depth 8
80
70
KLSA-200X
(63)
Hexagon socket head cap screw M4×8…6 screws
433
370
120
100
4-M6×1 depth 8
Application
Systems
Optics &
Optical
Coatings
Holders
100
42
70
80
140
42
100
120
Bases
Manual
Stages
22.5
50 50
25.5
100 100
Actuators
44
0.5
70
70
70
5
45
(15)
8-M5×0.8 Bottom hole 5.2
8 counterbore
49.5
0.5
100
100
100
(35)
4
50
8-M8×1.25 Bottom hole 6.8
11 counterbore
Motoeized
Stages
Light
Sources
KLSS-100X
Hexagon socket head cap screw M4×8…6 screws
KLSS-200X
Hexagon socket head cap screw M4×8…6 screws
Index
(63)
303
240
80
70
4-M4×0.7 depth 8
(63)
433
370
120
100
4-M6×1 depth 8
Guide
Controllers/Drivers
100
42
70
80
140
42
100
120
Softwares
Stepping Motor
AC Servo Motor
44
22.5
50 50
5
45
49.5
25.5
100 100
4
50
Cables
Piezo
0.5
70
70
70
(15)
8-M5×0.8 Bottom hole 4.2
8 counterbore
0.5
100
100
100
(35)
8-M8×1.25 Bottom hole 6.8
11 counterbore
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6
7
6
7
GND
ORG
8 8 +VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
11
12
13
LS (+)
LS (−)
GND Short
14 14 NEAR circoit
15 15 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
Originside
ON when shaded
Note 1
D phase
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with origin and proximity origin sensors.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Compatible Controllers / Drivers and Cables
Controller
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G102 − G105
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
KLSA-100X
KLSS-100X
KLSA-200X
KLSS-200X
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G059

Motion Control Products
Aluminum Crossed Roller Guide Motorized Stage
TAMM Stage size □40/□60/□100mm
Motorized crossed roller stages that combine compactness, low-profile and high durability.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦Linear motorized stages fitted with anti-creep crossed roller
guide and special nut-shape ball screw configuration,
offering low-profile and high durability.
◦ Aluminum is used as a main material to achieve lightweight,
compact and slim body, effective for spacesaving.
Guide
▶A spacer is required when fixing the stage on a vibration isolator
bench. It can be purchased separately. D055 -
▶After purchasing two X axis stages, to assemble them into an XY
axis stage, assembly adjustment cost and performance inspection
cost will be charged separately.
▶Contact our International Sales Division if you desire to change
motors, etc. Or, use the motorized stage system question sheet.
G111
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number TAMM40-10C TAMM60-15C TAMM100-50C TAMM100-100C
Opposite ModelPart Number TAMM40-10CR TAMM60-15CR TAMM100-50CR TAMM100-100CR
Travel [mm] 10 15 50 100
Table Size [mm] 40×40 60×60 100×100 100×175
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ4mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Positioning Slide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 0.33 0.48 1.9 2.9
(Full) [μm/pulse] 2 2 2 2
Resolution
(Half) [μm/pulse] 1 1 1 1
MAX Speed [mm/sec] 10 10 10 10
Positioning Accuracy [μm] 6 6 6 10
Positional Repeatability [μm] 1 1 1 1
Load Capacity [N] 29.4 (3.0kgf) 49 (5.0kgf) 98 (10.0kgf) 98 (10.0kgf)
Moment Stiffness[″/N・cm] 1.5 0.5 0.05 0.03
Lost Motion [μm] 1 1 1 1
Backlash [μm] 1 1 1 1
Parallelism [μm] 30 30 30 30
Running Parallelism [μm] 10 10 10 10
Pitch [″] / Yaw [″] 25/25 20/20 20/15 20/15
Sensor Part Number
Limit Sensor
Origin Sensor
Micro photo sensor: GP1S097HCZ (Sharp Corporation)
Limit Sensor, Origin Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL OPEN)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL OPEN)
Micro photo sensor: PM-L24 (SUNX Co.,Ltd.)
Limit Sensor, Origin Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL OPEN)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL OPEN)
Proximity Origin Sensor None None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number C9863-90215P (□28mm) PK544NBW (□42mm)
Step Angle 0.72°
Power Voltage DC+5V - +24V
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output 50mA
Output Logic
In the case of light shielded ,output transistor OFF (No conduction): Limit sensor
In the case of light shielded ,output transistor ON (Conduction): Origin sensor
Compatible Driver / Controller
Control System
Compatible Driver
Compatible Controller
SG-5M, SG-5MA, SG-55M, SG-55MA,
SG-514MSC, MC-7514PCL
GSC-01, GSC-02, SHOT-702, GIP-101,
SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
SG-5M, SG-55M, SG-514MSC, MC-7514PCL
SHOT-702, SHOT-302GS,
SHOT-304GS, HIT-M・HIT-S
G060
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9009
Outline Drawing
TAMM40-10C
Hexagon socket
head cap screw
M3×6…4 screws
(128.5)
88.5 40
32
20
4-M3 depth 6
4-M2 depth 4
TAMM60-15C
Hexagon socket
head cap screw
M4×8…4 screws
(153.5)
93.5 60
50
32
4-M4 depth 6
4-M3 depth 6
Application
Systems
Optics &
Optical
Coatings
20
16 16
(14.5) 40
(54.5)
32
25
25
60
(74.5)
Holders
Travel 5
Travel 5
2-M3 depth 3
Travel 7.5
(14.5)
2-M4 depth 3
Travel 7.5
Bases
28
1.5
18
28
14
2
20
Connection Diagram
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13JA-12SC
1 1 Motor lead
2 2 Motor lead
3 3 Motor lead
4 4 Motor lead
5 5 Motor lead
6 6 ORG
Sensor
7 7
Power source 12V
8 8 GND (0V)
9 9 LS (+)
10 10 LS (−)
11
12
11
12
FG
FG
Note 2
32
32
4-3.5 mounting hole
6 counterbore
(5)
5-Phase Stepping
Motor
E-Phase
D-Phase
Originside (ORG)
limit sensor
ON when shaded
Opposite side (−)
limit sensor
ON when light enters
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
C-Phase
A phase
B-Phase
Sharp Corporation
Micro photo sensor
GP1S097HCZ
*Regarding sensor power + VS, use current of about 30mA.
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with proximity origin sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
14
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
50 50
4-4.5 mounting hole
8 counterbore
Compatible Controllers / Drivers and Cables
G020 − G021
(4)
Cable
D15RP-CA
G108
Cable
MINI-CA-SG
G108
Stage
TAMM40-10C
TAMM60-15C
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
TAMM100-50C
(104.5)
204.5
Hexagon socket head cap screw M4×8…4 screws
100
90
60
25 25
8-M4×0.7 depth 8
4-M4×0.7 depth 8
6-M4×0.7 depth 8
TAMM100-100C
(122.5)
Hexagon socket head cap screw M4×8…4 screws
297.5
175
90
70
25 25
4-M4×0.7 depth 6
4-M4×0.7 depth 6
8-M4×0.7 depth 6
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
45
25
60
42.5 0.5
0.5
21.5
25
100
25 25
70
90
100
45
(450)
25
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6
7
6
7
GND
ORG
8 8 +VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
11
12
13
LS (+)
LS (−)
GND Short
14 14 NEAR circoit
15 15 N.C. (not used)
Note 2
90
M4×0.7 depth 8
25
16
43
(15)
4-M5×0.8
8 counterbore
4H7
5-Phase Stepping
Motor
E phase
Originside
ON when shaded
Note 1
D phase
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
90
A phase
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with origin and proximity origin sensors.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
42.5 0.5
0.5
21.5
45
90 90
10
43
(15)
6-M5×0.8
8 counterbore
Compatible Controllers / Drivers and Cables
Controller
SHOT-702 [2 axes]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
G100 − G103
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
TAMM100-50C
TAMM100-100C
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G061

Motion Control Products
Precision Motorized Stages - 5 Phase Stepping Motor
KST-X
High precision X axis stages fitted with precision ball screws and precision crossed roller.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦Steel body offers excellent stiffness and high load
capacity.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc. Or, use the motorized stage system question sheet.
G111
Attention
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number KST-50X KST-100X KST-200X
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 50 100 200
Table Size [mm] 165×165 165×200 165×360
Feed Screw
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ14mm,
2mm lead
Positioning Slide Crossed roller Crossed roller Crossed roller
Stage Material Steel (S50C) Steel (S50C) Steel (S50C)
Weight [kg] 8.6 10.2 20.0
(Full) [μm/pulse] 2 2 4
Resolution
(Half) [μm/pulse] 1 1 2
MAX Speed [mm/sec] 10 10 20
Positioning Accuracy [μm] 5 7 8
Positional Repeatability [μm] 2 2 2
Load Capacity [N] 392 (40.0kgf) 392 (40.0kgf) 392 (40.0kgf)
Pitch [″/N・cm] 0.01 0.01 0.01
Moment
Stiffness
Yaw [″/N・cm] 0.01 0.01 0.01
Roll [″/N・cm] 0.005 0.005 0.005
Lost Motion [μm] 1 1 1
Backlash [μm] 1 1 1
Parallelism [μm] 50 70 100
Running Parallelism [μm] 10 10 20
Pitch [″] / Yaw [″] 15/15 20/20 20/20
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co., Ltd.): Limit sensor, origin sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 1.4A/phase (Oriental Motor Co., Ltd.)
Motor Part Number PK564-NBW (□60mm) PK566-NBW (□60mm) PK569-NBW (□60mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Current Consumption
45mA or lower (15mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, SG-5151, KR-525M
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS
G062
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9023
Outline Drawing
KST-50X
Hexagon socket head cap screw M6×15…4 screws
165
150
110
50 50
90
70
50
25-M4 depth 8
4-M6 depth 12
KST-100X
Hexagon socket head cap screw M6×15…4 screws
200
150
110
50 50
90
70
50
25-M4 depth 8
4-M6 depth 12
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
(274.5)
50
70
90
50 50
110
150
165
(350.3)
50
70
90
50 50
110
150
165
Manual
Stages
Travel 25 Travel 25
Travel 50 Travel 50
Actuators
(61)
31
1
150
(209.2)
7
15
8
10
65
Bottom plate 4-mounting notch
7.5
(61)
31
1
65
7
15
Bottom plate 4-mounting notch
150 25
(269.2)
8
10
Motoeized
Stages
Light
Sources
Index
KST-200X
Hexagon socket head cap screw M6×15…8 screws
360
150
110
50 50
90
70
50
25-M4 depth 8
4-M6 depth 12
Guide
Controllers/Drivers
Softwares
Stepping Motor
50
70
90
50
50
110
150
165
AC Servo Motor
Cables
(585)
Piezo
Travel 100 Travel 100
(61)
31
1
7
15
50 150 50 55
(482.2)
8
10
65
Bottom plate 8-mounting notch
X Translation
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
6
7
8
1
2
3
4
5
6
7
8
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND
ORG
+VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
14
11
12
13
14
LS (+)
LS (−)
GND
NEAR
15 15 N.C. (not used)
Note 2
Short
circuit
5-Phase Stepping
Motor
E phase
D phase
Origin sensor
ON when light enters
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Compatible Controllers / Drivers and Cables
Controller
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
Driver
Drivers
G102
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
KST-X
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
KST-50/100/200 is fitted with an origin sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G063

Motion Control Products
Precision Motorized Stages with built in Glass-scale Encoder
KST(GS)
Application
Systems
Optics &
Optical
Coatings
Holders
Linear scales consist of “scales” used as a ruler and a “detector” which obtains positional
information from the scales.
◦Linear scales are used in indispensable processes in
many fields, and mainly used in equipment for manufacturing
electronic devices such as
semiconductors, flat panel displays (FPD), and printed
wiring boards,
electronic component mounting machine, machine
tools, and carrier machine.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Guide
▶Theoretical resolution of the glass scale is set to 0.05μm.
▶Contact our International Sales Division for resolutions not listed in
the catalog.
Attention
▶When operating the KST(GS) series with closed loop control, in
order to use it within the specifications listed in the catalog, the
number of motor divisions of the controller is recommended to be
set to 100 or higher (travel per pulse is 0.05μm or less).
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number KST(GS)-50X KST(GS)-100X KST(GS)-200X
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 50 100 200
Table Size [mm] 165×165 165×200 165×360
Feed Screw
MotorSpecifications
Motor
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ14mm,
2mm lead
guide Crossed roller guide Crossed roller guide Crossed roller guide
Stage Material Steel Steel Steel
Weight [kg] 9.2 14.3 19.4
(Full) [μm/pulse] 2 2 4
Resolution
(Half) [μm/pulse] 1 1 2
MAX Speed [mm/sec] 10 10 20
Positioning Accuracy [μm] 3 4 5
Positional Repeatability [μm] 0.5 0.5 0.8
Load Capacity [N] 392 (40.0kgf) 392 (40.0kgf) 392 (40.0kgf)
Pitch [″/N・cm] 0.01 0.01 0.01
Moment
Stiffness
Yaw [″/N・cm] 0.01 0.01 0.01
Roll [″/N・cm] 0.005 0.005 0.005
Lost Motion [μm] 0.5 0.5 0.5
Backlash [μm] 1 1 1
Parallelism [μm] 50 70 100
Running Parallelism [μm] 10 10 20
Pitch [″] / Yaw [″] 15/15 20/20 20/20
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co.,Ltd.) Limit sensor, origin sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None None
Proximity Origin Sensor None None None
Type
5-phase stepping motor 1.4A/phase (Oriental Motor Co., Ltd.)
Motor Part Number PK564-NBW (□60mm) PK566-NBW (□60mm) PK569-NBW (□60mm)
Step Angle 0.72°
Compatible Controller
Compatible Controller
SHOT-302GS, SHOT-304GS
G064
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9040
Outline Drawing
KST(GS)-50X
Hexagon socket head cap screw M6×15…4 screws
165
150
110
50 50
90
70
50
25-M4 depth 8
4-M6 depth 12
KST(GS)-100X
Hexagon socket head cap screw M6×15…4 screws
200
150
110
50 50
90
25-M4 depth 8
70
50
4-M6 depth 12
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
(174.7)
50
70
90
50 50
110
150
165
(182.7)
50
70
90
50 50
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
KST(GS)-200X
(183)
Hexagon socket head cap screw M6×15…8 screws
360
150
110
50 50
25-M4 depth 8
90
70
4-M6 depth 12
50
50
70
90
50 50
110
150
165
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
(585)
Travel 100 Travel 100
(63)
31
65
110
150
165
(274.5)
(350.3)
Travel 25 Travel 25
Travel 50 Travel 50
(63)
31
1
7
15
150
8
7.5
10
65
Bottom plate 4-mounting notch
(63)
31
1
(345.5)
150
7
15
8
10
65
Bottom plate 4-mounting notch
25
1
7
15
50 150 50 55
10
Bottom plate 8-mounting notch
X Translation
Theta Rotation
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
5-Phase Stepping
Motor
E phase
A phase
Compatible Controllers / Cables
Controller
Cable
Stage
Goniometer
Vacuum
Options
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6
7
6
7
GND
ORG
8 8 +VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
11
12
13
LS (+)
LS (−)
GND Short
14 14 NEAR circoit
15 15 N.C. (not used)
Note 2
D phase
Originside
ON when shaded
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
G102
DHR-CA
G109
Cable
GSE-CA
G109
KST(GS)-50X
KST(GS)-100X
KST(GS)-200X
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
KST-50/100/200 is fitted with an origin sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G065

Motion Control Products
Precision Motorized Stages - 5 Phase Stepping Motor
KST-XY
High precision XY axis stages fitted with precision ball screws and precision crossed roller.
Application
Systems
Optics &
Optical
Coatings
Holders
◦Steel body offers excellent stiffness and high load
capacity.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc. Or, use the motorized stage system question sheet.
G111
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number KST-50XY KST-100XY KST-200XY
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 50 100 200
Table Size [mm] 165×165 165×200 165×360
Feed Screw
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ14mm,
2mm lead
Positioning Slide Crossed roller Crossed roller Crossed roller
Stage Material Steel (S50C) Steel (S50C) Steel (S50C)
Weight [kg] 17.2 20.4 40.0
Resolution
(Full) [μm/pulse] 2 2 4
(Half) [μm/pulse] 1 1 2
MAX Speed [mm/sec] 10 10 20
Positioning Accuracy [μm] 10 12 15
Positional Repeatability [μm] 2 2 2
Load Capacity [N] 196 (20.0kgf) 196 (20.0kgf) 196 (20.0kgf)
Lost Motion [μm] 1 1 1
Backlash [μm] 1 1 1
Orthogonality of Motion [μm] 5 5 10
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co., Ltd.): Limit sensor, origin sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Proximity Origin Sensor None None None
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Motor / Sensor Specifications
Type
5-phase stepping motor 1.4A/phase (Oriental Motor Co., Ltd.)
Motor
Motor Part Number PK564-NBW (□60mm) PK566-NBW (□60mm) PK569-NBW (□60mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Sensor
Current Consumption
45mA or lower (15mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
(Reference) Precision Specifications of Single Axis Stage
Part Number KST-50X KST-100X KST-200X
Accuracy
Specifications
Pitch [″/N・cm] 0.01 0.01 0.01
Moment
Stiffness
Yaw [″/N・cm] 0.01 0.01 0.01
Roll [″/N・cm] 0.005 0.005 0.005
Parallelism [μm] 50 70 100
Running Parallelism [μm] 10 10 20
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, SG-5151, KR-525M
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS
G066
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9024
Outline Drawing
KST-50XY
Hexagon socket head cap screw M6×15…4 screws
25-M4 depth 8
4-M6 depth 12
Travel 25
KST-100XY
Hexagon socket head cap screw M6×15…4 screws
25-M4 depth 8
4-M6 depth 12
Travel 50
Application
Systems
Optics &
Optical
Coatings
Holders
Travel 25
50
70
90
50 50
110
150
165
82.5
(274.5)
50
70
90
50
50
Travel 25
110
150
165
Travel 25
82.5
(274.5)
8
10
65
130
7
15
7.5
Bottom plate 4-mounting notch
150
Travel 50
50
70
90
50 50
110
150
200
(104.8)
(350.3)
50
70
90
50 50
110
150
Travel 50
165
Travel 50
(104.8)
(350.3)
8
10
65
130
7
15
Bottom plate 4-mounting notch
150
25
Bases
Manual
Stages
Actuators
Motoeized
Stages
KST-200XY
Hexagon socket head cap screw M6×15…8 screws
Light
Sources
Index
Guide
Travel 100
(585)
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6
7
6
7
GND
ORG
8 8 +VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
11
12
13
LS (+)
LS (−)
GND Short
14 14 NEAR circoit
15 15 N.C. (not used)
Note 2
50
70
90
50 50
110
150
165
360
180
5-Phase Stepping
Motor
E phase
Originside
ON when shaded
Note 1
D phase
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
Note 1 The motor side limit sensor is the + direction limit sensor.
KST-50/100/200 is fitted with an origin sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
25-M4 depth 8
4-M6 depth 12
50
70
90
Travel 100
C phase
A phase
50
50
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Travel 100
110
150
165
Travel 100
180
(585)
65
130
7
8
10
15
55 50 150 50
Controller
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
Driver
Bottom plate 8-mounting notch
Compatible Controllers / Drivers and Cables
Drivers
G102
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
KST-XY
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G067

Motion Control Products
Precision Motorized Stages - 5 Phase Stepping Motor
KST-Z
High precision Z axis stages fitted with precision ball screws and precision crossed roller.
Application
Systems
Optics &
Optical
Coatings
Holders
◦Steel body offers excellent stiffness and high load
capacity.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc. Or, use the motorized stage system question sheet.
G111
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number KST-50Z KST-100Z KST-200Z
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 50 100 200
Table Size [mm] 165×165 165×200 165×360
Feed Screw
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ14mm,
2mm lead
Positioning Slide Crossed roller Crossed roller Crossed roller
Stage Material Steel (S50C) Steel (S50C) Steel (S50C)
Weight [kg] 12.8 14.5 27.0
(Full) [μm/pulse] 2 2 4
Resolution
(Half) [μm/pulse] 1 1 2
MAX Speed [mm/sec] 10 10 20
Positioning Accuracy [μm] 5 7 8
Positional Repeatability [μm] 2 2 2
Load Capacity [N] 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf)
Pitch [″/N・cm] 0.015 (Y pitch) 0.020 (Y pitch) 0.030 (Y pitch)
Moment
Stiffness
Yaw [″/N・cm] 0.01 (X pitch) 0.015 (X pitch) 0.020 (X pitch)
Roll [″/N・cm] 0.005 0.015 0.015
Lost Motion [μm] 1 1 1
Backlash [μm] 1 1 1
Perpendicularity of Motion [μm] 10 15 25
Pitch [″] / Yaw [″] 20/15 25/20 25/25
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co., Ltd.): Limit sensor, origin sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 1.4A/phase (Oriental Motor Co., Ltd.)
Motor Part Number PK564-NBW (□60mm) PK566-NBW (□60mm) PK569-NBW (□60mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Current Consumption
45mA or lower (15mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, SG-5151, KR-525M
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS
G068
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9025
Outline Drawing
KST-50Z
Hexagon socket head cap screw M6×20…4 screws
25-M4 depth 8
4-M6 depth 12
Travel 25
KST-100Z
Hexagon socket head cap screw M6×20…4 screws
25-M4 depth 8
4-M6 depth 12
Travel 50
Application
Systems
Optics &
Optical
Coatings
Holders
50
70
90
50 50
110
150
165
(347)
50
70
90
50
50
Bases
Manual
Stages
KST-200Z
Hexagon socket head cap screw M6×20…4 screws
Actuators
Motoeized
Stages
Light
Sources
Index
25-M4 depth 8
4-M6 depth 12
Travel 100
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
325
110
150
200
(440.5)
155
195
50
70
90
50 50
110
150
165
Travel 25
7.5
7.5
150
165
4-7 mounting hole
50
70
90
50 50
110
150
165
Travel 50
10
7.5
7.5
150
165
4-7 mounting hole
50
70
90
50 50
110
150
360
(730)
Travel 100
7.5
50
70
90
50 50
110
150
165
10
7.5
150
165
4-7 mounting hole
X Translation
Theta Rotation
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6
7
6
7
GND
ORG
8 8 +VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
11
12
13
LS (+)
LS (−)
GND Short
14 14 NEAR circoit
15 15 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
Originside
ON when shaded
Note 1
D phase
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Compatible Controllers / Drivers and Cables
Controller
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
Driver
Drivers
G102
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
KST-Z
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
KST-50/100/200 is fitted with an origin sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G069

Motion Control Products
Translation Motorized Stages, Flat Z axis - 5 Phase Stepping Motor
OSMS-ZF Stage size □40/□60/□80mm
Application
Systems
Optics &
Optical
Coatings
Holders
Z axis stepping motor driven stages for measurement and inspection, offering high stiffness and
high precision.
The table that travels up and down is horizontal and offers smooth travel.
◦Originally designed horizontal plane Z axis stages in
which a motor is incorporated in its main body for
space-saving.
◦Minimized protrusions make these stages ideal for
system assembly
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS40-5ZF OSMS60-5ZF OSMS60-10ZF OSMS80-20ZF
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 5 5 10 20
Table Size [mm] 40×40 60×60 60×60 80×80
Feed Screw
Ball screw diameter φ5mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 0.35 0.6 0.6 1.6
(Full) [μm/pulse] 1.0 2.0 2.0 0.2
Resolution
(Half) [μm/pulse] 0.5 1.0 1.0 0.1
MAX Speed [mm/sec] 2 4 4 1
Positional Repeatability [μm] 10 10 10 10
Load Capacity [N] 19.6 (2.0kgf) 39.2 (4.0kgf) 39.2 (4.0kgf) 147 (15.0kgf)
Pitch [″/N・cm] 2.0 0.4 0.4 0.2
Moment
Stiffness
Yaw [″/N・cm] 2.0 1.0 1.0 1.0
Roll [″/N・cm] 1.0 1.0 1.0 1.0
Lost Motion [μm] 5 5 5 5
Parallelism [μm] 50 50 50 50
Running Parallelism [μm] 15 15 15 15
Pitch [″] 25 20 20 25
Sensor Part Number
Micro photo sensor: GP1S097HCZ0F (Sharp Corporation): Limit Sensor (60-5ZF/60-10ZF)
Micro photo sensor: PM-U24 (SUNX Co.,Ltd.): Limit Sensor (40-5ZF/80-20ZF)
Limit Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Origin Sensor None None None None
Proximity Origin Sensor None None None None
Motor / Sensor Specifications
Motor
Sensor
Type
Motor Part Number
5-phase stepping motor 0.35A/
phase (Oriental Motor Co., Ltd.)
PK513PA-C21
(□20mm)
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
PK523HPB-C12
(□28mm)
PK523HPB-C12
(□28mm)
A7177-90215KTG
(□28mm)
Step Angle 0.72° 0.036°
Power Voltage
DC5 − 24V ±10% or lower
Current Consumption
30mA or lower (15mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Control System Compatible Driver SG-5MA, SG-55MA,
SG-514MSC
Compatible Controller
SG-5M, SG-5MA, SG-55M, SG-55MA,
SG-514MSC, MC-7514PCL
GSC-01, GSC-02, SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
SG-55M, SG-55MA,
SG-514MSC, MC-7514PCL
G070
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9077
Outline Drawing
OSMS40-5ZF
Hexagon socket head cap screw M3×15…4 screws
OSMS60-5ZF
Hexagon socket head cap screw M4×15…4 screws
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
OSMS60-10ZF
Hexagon socket head cap screw M4×15…4 screws
OSMS80-20ZF
Hexagon socket head cap screw M4×15…4 screws
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Connection Diagram
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13RA-12SD
1 1 Motor lead
2 2 Motor lead
3 3 Motor lead
4 4 Motor lead
5 5 Motor lead
6 6 N.C. (not used)
7
8
9
10
7
8
9
10
+VS
5 − 24VDC
GND (0V)
LS (+)
LS (−)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
D phase
Opposite side (+)
limit sensor
ON when light enters
Note 1
Motor side (−)
limit sensor
ON when shaded
Note 1
C phase
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with proximity origin sensors.
Limit sensors are used as origin detection sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
A phase
B phase
(60-5ZF/60-10ZF)
Sharp Corporation
Micro photo sensor
GP1S097HCZ0F
40-5ZF/80-20ZF
SUNX Co., Ltd.
Micro photo sensor
PM-U24
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
MINI-CA-SG
G020 − G021
G108
* Adaptation SG-5MA, only SG-55MA is (0.35A/phase) OSMS40-5ZF
Stage
OSMS-ZF
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G071

Motion Control Products
Actuator for Objective Lenses (Stepper motor type)
SGSP-OBL
Stepping motor type objective lens actuator compatible with long strokes.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
◦Since this actuator uses a stepping motor, it can be
connected to our various controllers.
◦It is compact and high resolution, best suited for incorporation
into a microscope lens tube or an auto focus
system.
◦Can be used for upright type and inverted type microscopes.
Guide
▶The dedicated adapters are available according to the microscope
and screw size of objective lens of each manufacturer.
Attention
▶The dedicated adapters are required for mounting the actuator on
microscopes and objective lenses.
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number
Mechanical
Specifications
Accuracy
Specifications
Sensor
SGSP-OBL-3
Travel [mm] 3
Table Size [mm]
(Mounted adapter)
Feed Screw
Precision ground screw φ6mm, 0.5mm lead
Positioning Slide
Crossed roller guide
Stage Material
Aluminum
Finish
White anodized
Weight [kg] 0.4
(Full) [μm/pulse] 1
Resolution
(Half) [μm/pulse] 0.5
MAX Speed [mm/sec] 1
Positioning Accuracy [μm] 5
Positional Repeatability [μm] 2
Load Capacity [N]
4.9 (0.5kgf)
Moment Stiffness[″/N・cm]
−
Lost Motion [μm] 2
Backlash [μm] 1
Parallelism [μm]
−
Running Parallelism [μm] 2
Pitch [″] / Yaw [″] 15/15
Sensor Part Number
Micro photo sensor: GP1S092HCPI (Sharp Corporation)
Limit Sensor
Equipped (NORMAL CLOSE)
Origin Sensor
None
Proximity Origin Sensor
None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.35A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK513PA-C21 (□20mm)
Step Angle 0.72°
Power Voltage
DC - 5V - +24V±10%
Current Consumption
40mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output 50mA
Output Logic
In the case of light shielded ,output transistor OFF (No conduction): Limit sensor
Compatible Driver / Controller
Compatible Driver SG-5MA, SG-55MA, SG-514MSC
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G072
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Catalog
Code
W9078
Outline Drawing
52
(4.5)
Application
Systems
Optics &
Optical
Coatings
(1.8)
54
74.6
Holders
(24)
(6)
38.5 (15.518.5)
(5457)
Bases
Manual
Stages
Actuators
(1.8) 40
14
Motoeized
Stages
Connection Diagram
Light
Sources
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13RA-12SD
5-Phase Stepping
Motor
E-Phase
A phase
Index
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6 6 N.C. (not used)
7
8
9
10
7
8
9
10
VS
5 − 24VDC
GND (0V)
LS (+)
LS (−)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
D-Phase
Motor side ()
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C-Phase
B-Phase
Sharp Corporation
Micro photo sensor
GP1S092HCPI
*Regarding sensor power + VS, use current of about 30mA.
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with proximity origin sensors.
Limit sensors are used as origin detection sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Objective Lens Adapters
Outline Drawing
Specifications
Part Number
OBL-ADP3-M**A
OBL-ADP3-M**B
Mounting Screw Size
[mm]
OBL-ADP3-MA
30
28
14.5
2 4.5
B
A
38
A
[mm]
OBL-ADP3-MB
A
2
9
28
30
38
OBL-ADP3-M20.32A Microscope side M20.32 M20.32 P=0.706 (W0.8×1/36) 15
OBL-ADP3-M20.32B Objective lens side M20.32 M20.32 P=0.706 (W0.8×1/36) −
OBL-ADP3-M25.0A Microscope side M25.0 M25.0 P=0.75 20
OBL-ADP3-M25.0B Objective lens side M25.0 M25.0 P=0.75 −
OBL-ADP3-M26.0A Microscope side M26.0 M26.0 P=0.706 (W26.0×1/36) 21
OBL-ADP3-M26.0B Objective lens side M26.0 M26.0 P=0.706 (W26.0×1/36) −
B
[mm]
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G073

Motion Control Products
Rotation Motorized Stages
SGSP-YAW
Stepping motor driven rotation stages fitted with bearing guide and worm gear feed mechanism.
Application
Systems
◦Motorized stages suitable for positioning for measuring,
inspection and evaluation instruments.
Optics &
Optical
Coatings
Holders
Guide
▶Rotation Range
Minus limit sensor: −2.5° Scale: 0°
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
▶Homing of rotation motorized stages is performed using the CW
limit sensor as the origin sensor.
▶Origin detection is adjusted so that the stage stops at 0 degrees
when homing is performed in the MINI system at half step.
Attention
Clockwise CW direction
Stops at near 0° (−2.5°)
Counterclockwise
CCW direction to ∞
▶Attention is required when mounting in upside down direction or on
a vertical plane.
▶Precision and load capacity specifications may be partly not
satisfied depending on the mounting direction.
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number SGSP-40YAW SGSP-60YAW-0B SGSP-60YAW-W-0B
Mechanical
Specifications
Accuracy
Specifications
Sensor
Rotation Range
Move in the counterclockwise CCW direction to ∞, and stop at near 0 degree (−2.5°) in the clockwise CW direction.
Table Size [mm] φ40 φ60 φ60
Travel Mechanism
(reduction ratio)
Worm gear (1:144) Worm gear (1:144) Worm gear (1:144)
Positioning Slide Bearing method Bearing method Bearing method
Stage Material Aluminum / Aluminum bronze Aluminum / Aluminum bronze Aluminum / Aluminum bronze
Weight [kg] 0.35 0.45 1.0
(Full) [°/pulse] 0.005 0.005 0.005
Resolution
(Half) [°/pulse] 0.0025 0.0025 0.0025
MAX Speed [°/sec] 30 30 30
Positioning Accuracy [ ° ] 0.1 0.1 −
Positional Repeatability [ ° ] 0.02 0.02 0.02
Load Capacity [N] 19.6 (2.0kgf) 29.4 (3.0kgf) 29.4 (3.0kgf)
Moment Stiffness [″/N・cm] 2 1 −
Lost Motion [ ° ] 0.05 0.05 0.05
Backlash [ ° ] 0.1 0.1 0.1
Parallelism [μm] 50 50 −
Concentricity [μm] 30 30 −
Wobble [mm] 0.02 0.02 −
Sensor Part Number
Micro Photoelectric Sensor:
PM-F24 (SUNX Co., Ltd.)
Micro Photoelectric Sensor:
PM-R24 (SUNX Co., Ltd.)
Micro Photoelectric Sensor:
PM-R24 (SUNX Co., Ltd.)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None None
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.66A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3664N4 (□24mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Current Consumption
15mA or lower
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G074
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Catalog
Code
W9027
Outline Drawing
SGSP-40YAW
14
Hexagon socket head cap screw M3×15…3 screws
(91)
M6 depth 5 21
+0.025
15( +0.005)
SGSP-60YAW-0B
Hexagonal socket head cap screw M4×10…3 screws
(112)
+0.025
25() +0.005
Application
Systems
Optics &
Optical
Coatings
(15)
(56)
20
32
21
51.5
(26)
(70)
32
50
30
64
Holders
(14.5)
86
20
32
4-M2 depth 5
4-M3 depth 5
P.C.D.32
(14)
32
50
60
5
5
4-M3 depth 5.5
Bases
40
4-M4 depth 5.5
P.C.D.50
30
107
60
Manual
Stages
(27.5)
14.5
11
28
(27.5)
14
28
Actuators
0.5
SGSP-60YAW-W-0B
3-3.6 mounting hole
6 counterbore
Hexagonal socket head cap screw M4×10…4 screws
(155.5)
(112)
+0.025
25() +0.005
0.5
5
2-M6 depth 5 3-4.6 mounting hole
8 counterbore
Motoeized
Stages
Light
Sources
75
60
Index
(52.5)
(128.5)
110
55
100
60
32
2-M4
M16×1
Guide
50
60
(19.8)
(60.8)
4-M4 depth 5.5
P.C.D.50
4-M3 depth 5.5
32
50
30
60
60
When homing of SGSP-60YAW-W-0B is
performed, the position will become as
shown below.
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
(74.3)
41
20
6
40
75
Cables
Piezo
Connection Diagram
6.3
6
4-4.5 mounting hole
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13RA-12SC
5-Phase Stepping
Motor
E phase
A phase
1 1 Motor lead
2 2 Motor lead
3 3 Motor lead
4 4 Motor lead
5 5 Motor lead
6 6 N.C. (not used)
7
8
9
7
8
9
+VS
GND (0V)
10 10
Machine origin sensor
(CW limit sensor)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
D phase
Machine origin sensor Note 1
(CW limit sensor)
C phase
SUNX Co., Ltd.
Micro photo sensor
PM-F24/R24
ON when light enters
B phase
Note 1 When a travel command in the “+” direction is issued, the mounting table rotates to ∞ in
the CCW (counterclockwise) direction viewed from the top surface, but it is stopped by
the machine origin sensor (CW limit sensor) in the CW (clockwise) direction.
Detect the machine origin using the method (MINI system) that detects the origin with a
machine origin sensor (CW limit sensor).
Note 2 Compatible cable connector: Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
Machine Origin Detection
MINI System
When the machine origin detection command is
issued, the stage starts traveling in the CW (-)
direction at the operating speed (F) set with the
memory switch, and stops by the CW (-) side
limit sensor. Then it travels in the CCW (+)
direction at the operating speed (F) for 1000
pulses.
After stop, it starts traveling in the CW (-)
direction again at the starting speed (S), and
stops by the CW (-) side limit sensor. After that,
it travels in the CCW (+) direction at the
operating speed (F) for 1000 pulses.
This position is regarded as the machine origin.
Operating speed (F)
Stage
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
Starting speed (S)
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
CW (−) side limit sensor
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
G020 − G021
Cable
D15RP-CA
G108
Cable
MINI-CA-SG
G108
Stage
SGSP-40YAW
SGSP-60YAW-OB
SGSP-60YAW-W-OB
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G075

Motion Control Products
Rotation Motorized Stages
SGSP-YAW
Stepping motor driven rotation stages fitted with bearing guide and worm gear feed mechanism.
Application
Systems
◦Motorized stages suitable for positioning for measuring,
inspection and evaluation instruments.
Optics &
Optical
Coatings
Holders
Guide
▶Rotation Range
Minus limit sensor : −2.5° Scale : 0°
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Clockwise CW direction
Stops at near 0° (−2.5°)
Counterclockwise
CCW direction to ∞
▶Homing of rotation motorized stages is performed using the CW
limit sensor as the origin sensor.
▶Origin detection is adjusted so that the stage stops at 0 degrees
when homing is performed in the MINI system at half step.
Attention
▶Attention is required when mounting in upside down direction or on
a vertical plane.
▶Precision and load capacity specifications may be partly not
satisfied depending on the mounting direction.
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number SGSP-80YAW SGSP-120YAW SGSP-160YAW SGSP-120YAW-W
Mechanical
Specifications
Accuracy
Specifications
Sensor
Rotation Range
Move in the counterclockwise CCW direction to ∞, and stop at near 0 degree (−2.5°) in the clockwise CW direction.
Table Size [mm] φ80 φ120 φ160 φ120
Travel Mechanism
(reduction ratio)
Worm gear (1:144) Worm gear (1:144) Worm gear (1:144) Worm gear (1:144)
Positioning Slide Bearing method Crossed roller Crossed roller Crossed roller
Stage Material
Aluminum / Aluminum bronze Aluminum / Aluminum bronze Aluminum / Aluminum bronze Aluminum / Aluminum bronze
Weight [kg] 1.1 2.0 2.5 5.5
(Full) [°/pulse] 0.005 0.005 0.005 0.005
Resolution
(Half) [°/pulse] 0.0025 0.0025 0.0025 0.0025
MAX Speed [°/sec] 30 30 30 30
Positioning Accuracy [ ° ] 0.15 0.1 0.1 −
Positional Repeatability [ ° ] 0.02 0.02 0.02 0.02
Load Capacity [N] 98 (10.0kgf) 196 (20.0kgf) 196 (20.0kgf) 196 (20.0kgf)
Moment Stiffness [″/N・cm] 0.2 0.1 0.1 −
Lost Motion [ ° ] 0.05 0.05 0.05 −
Backlash [ ° ] 0.08 0.08 0.08 0.08
Parallelism [μm] 50 50 60 −
Concentricity [μm] 30 30 30 −
Wobble [mm] 0.02 0.02 0.02 −
Sensor Part Number
Micro Photoelectric Sensor: PM-F24 (SUNX Co., Ltd.)
Limit Sensor
Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None None None
Proximity Origin Sensor None None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK525HPB-C4 (□28mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Current Consumption
15mA or lower
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G076
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9028
Outline Drawing
SGSP-80YAW
Hexagonal socket head cap screw M4×10…3 screws
(153)
+0.04
32() +0.005
SGSP-120YAW
Hexagon socket head cap screw M6×10…3 screws
(183.5)
Application
Systems
Optics &
Optical
Coatings
SGSP-160YAW
(33)
17
(98)
4-M4 depth 5
1
32
50
70
40
80
80
(117)
32
50
70
5
40
89
4-M3 depth 5
4-M4 depth 5
P.C.D.62
2-M6 depth 5
35
17
3-4.5 mounting hole
8.2 counterbore
Hexagon socket head cap screw M6×10…3 screws
(202.5)
(183.5)
11 mounting hole
(68.7)
(17.5)
SGSP-120YAW-W
(33)
18
(137)
2
+0.05
+0.005
64()
50
100
61
123
120
50
100
122
5
61
128
4-M4 depth 6
4-M4 depth 6
P.C.D.100
35
3-6.5 mounting hole
11 counterbore
Hexagon socket head cap screw M6×18…3 screws
(246)
(183.5)
50
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
(68.7)
(156)
(137)
+0.05
+0.005
60( )
50
100
61
122
(92.7)
(208)
170
150
50
85
4-M4 depth 6
64
()
+0.05
+0.005
145
115
25 25
Index
(17.5)
4-M4 depth 6
50
100
123
61
4-M4 depth 6
(27.5)
(83.5)
4-M4 depth 6
P.C.D.100
50
100
122
61
25 25
M16×160
8-M4
Guide
Controllers/Drivers
Softwares
160
120
Stepping Motor
(33)
18
2
Connection Diagram
5
35
43
3-6.5 mounting hole
11 counterbore
(99)
56
28
10
10
55
101
4-6.5 mounting hole
AC Servo Motor
Cables
Piezo
Connector Pin Number
Hirose Electric Co., Ltd.
SDAB-15P equivalent
5-Phase Stepping
Motor
E phase
A phase
If homing of SGSP-120YAW-W is
performed, the position will become as
shown below.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Note 2
1 Motor lead
2 Motor lead
3 Mmotor lead
4 Motor lead
5 Mmotor lead
6 GND
7
8 VS
9 N.C. (not used)
10 N.C. (not used)
11
Machine origin sensor
12
(CW limit sensor)
13 GND
14
15 N.C. (not used)
Machine Origin Detection
MINI System
When the machine origin detection command is
issued, the stage starts traveling in the CW (-)
direction at the operating speed (F) set with the
memory switch, and stops by the CW (-) side
limit sensor. Then it travels in the CCW (+)
direction at the operating speed (F) for 1000
pulses.
After stop, it starts traveling in the CW (-)
direction again at the starting speed (S), and
stops by the CW (-) side limit sensor. After that,
it travels in the CCW (+) direction at the
operating speed (F) for 1000 pulses.
This position is regarded as the machine origin.
D phase
Machine origin sensor Note 1
(CW limit sensor)
C phase
Operating speed (F)
Stage
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
Starting speed (S)
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
CW (−) side limit sensor
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-F24
ON when light enters
Note 1 When a travel command in the “+” direction is issued, the mounting table rotates to ∞ in
the CCW (counterclockwise) direction viewed from the top surface, but it is stopped by
the machine origin sensor (CW limit sensor) in the CW (clockwise) direction.
Detect the machine origin using the method (MINI system) that detects the origin with a
machine origin sensor (CW limit sensor).
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Compatible Controllers / Drivers and Cables
Controller
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G088 − G096
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
SGSP-80YAW
SGSP-120YAW
SGSP-160YAW
SGSP-120YAW-W
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G077

Motion Control Products
Precision Rotation Motorized Stages
KST-YAW
High precision and high stability rotation motorized stages fitted with bearing positioning slide.
Application
Systems
Optics &
Optical
Coatings
◦Rotation motorized stages suitable for when high load
capacity is required.
◦Back up various inspection instruments according to
usage such as the type, size, and measurement range
of the measuring object.
Holders
Bases
Guide
▶Rotation Range
Minus limit sensor: −2.5° Scale: 0°
Manual
Stages
Clockwise CW direction
Stops at near 0° (−2.5°)
Counterclockwise
CCW direction to ∞
Actuators
Motoeized
Stages
Light
Sources
Index
▶Homing of rotation motorized stages is performed using the CW
limit sensor as the origin sensor.
▶Origin detection is adjusted so that the stage stops at 0 degrees
when homing is performed in the MINI system at half step.
Attention
▶Attention is required when mounting in upside down direction or on
a vertical plane.
▶Precision and load capacity specifications may be partly not
satisfied depending on the mounting direction.
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number KST-120YAW KST-160YAW
Mechanical
Specifications
Accuracy
Specifications
Sensor
Rotation Range
Move in the counterclockwise CCW direction to ∞, and stop at near 0 degree (−2.5°) in the clockwise CW direction.
Table Size [mm] φ120 φ160
Travel Mechanism
(reduction ratio)
Worm gear (1:144) Worm gear (1:144)
Positioning Slide Bearing method Bearing method
Stage Material Aluminum / Aluminum bronze Aluminum / Aluminum bronze
Weight [kg] 5 8.5
Resolution
(Full) [°/pulse] 0.005 0.005
(Half) [°/pulse] 0.0025 0.0025
MAX Speed [°/sec] 30 30
Positioning Accuracy [ ° ] 0.1 0.1
Positional Repeatability [ ° ] 0.01 0.01
Load Capacity [N] 343 (35.0kgf) 392 (40.0kgf)
Moment Stiffness [″/N・cm] 0.015 0.01
Lost Motion [ ° ] 0.01 0.01
Backlash [ ° ] 0.003 0.003
Parallelism [μm] 50 50
Concentricity [μm] 20 20
Wobble [mm] 0.01 0.01
Sensor Part Number Micro Photoelectric Sensor: PM-U24 (SUNX Co., Ltd.) Micro Photo Sensor: PM-R24 (SUNX Co., Ltd.)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None
Proximity Origin Sensor None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 1.4A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3624N42E (□60mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Current Consumption
15mA or lower
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF
Compatible Driver / Controller
Compatible Driver SG-5M*, SG-55M*, SG-514MSC*, MC-7514PCL (* DC36V)
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS
G078
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9029
Outline Drawing
KST-120YAW
Hexagon socket head cap screw M6×154 screws
(228.5)
KST-160YAW
Hexagon socket head cap screw M6×254 screws
(261)
Application
Systems
Optics &
Optical
Coatings
Holders
(50)
(149)
70
+0.04
+0.005
56()
50
100
60
(82)
(197)
112
7 mounting hole
+0.05
+0.005
80()
100
140
150
82
Bases
(42)
8-M4 depth 6
P.C.D.100
30
50
100
60
156
120
4-M4 depth 10
(41.5)
8-M4 depth 10
P.C.D.100
3-M6 depth 12
P.C.D.140
15
100
140
150
189
160
82
3-7
mounting hole
4-M6 depth 12
Manual
Stages
Actuators
Motoeized
Stages
(77)
45
12.5
12
82
4-7 mounting hole
(79.5)
47.5
12.5
12
90
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Note 1
Connector Pin Number
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND
7
8 VS
9 N.C. (not used)
10 N.C. (not used)
11
Machine origin sensor
12
(CW limit sensor)
13 GND
14
15 N.C. (not used)
Machine Origin Detection
MINI System
When the machine origin detection command is
issued, the stage starts traveling in the CW (-)
direction at the operating speed (F) set with the
memory switch, and stops by the CW (-) side
limit sensor. Then it travels in the CCW (+)
direction at the operating speed (F) for 1000
pulses.
After stop, it starts traveling in the CW (-)
direction again at the starting speed (S), and
stops by the CW (-) side limit sensor. After that,
it travels in the CCW (+) direction at the
operating speed (F) for 1000 pulses.
This position is regarded as the machine origin.
5-Phase Stepping
Motor
E phase
D phase
SUNX Co., Ltd.
Micro photo sensor
120YAW PM-U24
160YAW PM-R24
ON when light enters
Machine origin sensor
(CW limit sensor)
Note 1 Compatible cable connector: DDK Ltd. 17JE-13150
C phase
Operating speed (F)
Stage
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
Starting speed (S)
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
CW (−) side limit sensor
A phase
B phase
Compatible Controllers / Drivers and Cables
Controller
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
Driver
Drivers
G102
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
KST-120YAW
KST-160YAW
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G079

Motion Control Products
High Durability Motorized Rotation Stages
HDS-YAW
It is a small angle adjusting automatic rotation stages using in the alignments for a marker of semiconductor wafer.
Application
Systems
Optics &
Optical
Coatings
Holders
◦Good for the automatic alignment device which needs for adjusting the small angle of rotation by each sample.
◦By using the ball screw system on the drive mechanism, it can reduce abrasion and backlash of parts which realized high
durability.
◦Since it converted linear motion by the ball screw into rotational motion by the steel belt, there is no difference between
traveling center and end by rotation speed and resolution.
Guide
▶Rotation range
CCW (+)
CW (–)
Bases
Manual
Stages
Actuators
HDS-60YAW , HDS-80YAW
Counterclockwise CCW Direction (+)
Stop on +5°
HDS-120YAW
Counterclockwise CCW Direction (+)
Stop on +6°
HDS-60YAW , HDS-80YAW
Clockwise CW Direction (-)
Stop on -5°
HDS-120YAW
Clockwise CW Direction (-)
Stop on -6°
Motoeized
Stages
Light
Sources
Attention
▶Please be mounted HDS series in horizontal. Can not be guaranteed
the performance if used in reversion on the roof or
vertically situation. If you would like a special mounting, please
contact our sales department.
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number HDS-60YAW HDS-80YAW HDS-120YAW
Mechanical
Specifications
Accuracy
Specifications
Sensor
Rotation Range ±5° ±5° ±6°
Table Size [mm] φ60 φ80 φ120
Travel Mechanism Ball screw with steel belt Ball screw with steel belt Ball screw with steel belt
Positioning Slide Bearing method Bearing method Crossed roller guide
Stage Material Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized
Weight [kg] 0.5 0.9 1.4
Resolution
(Full) [°/pulse] ≒0.00053 ≒0.00038 ≒0.00022
(Half) [°/pulse] ≒0.00027 ≒0.00019 ≒0.00011
MAX Speed [°/sec] 60 60 60
Positioning Accuracy [°] 0.05 0.05 0.05
Positional Repeatability [°] 0.003 0.003 0.003
Load Capacity [N] 29.4 (3.0kgf) 58.8 (3.0kgf) 98 (10kgf)
Moment Stiffness [″/N・cm] 1 0.2 0.1
Lost Motion [°] 0.003 0.003 0.003
Backlash [°] 0.05 0.05 0.05
Parallelism [μm] 50 50 50
Concentricity [μm] 10 10 10
Wobble [mm] 0.01 0.01 0.01
Sensor Part Number
Micro photo sensor: GP1S097HCZ(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Equipped (NORMAL OPEN)
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.66A/phase
(Tamagawa Seiki Co., Ltd.)
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number TS3664N4 (□24mm) C9863-90215P (□28mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
60mA or lower (20mA per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
“When shaded: Output transistor OFF (no conduction): Limit sensor
When shaded: Output transistor ON (conduction): Origin sensor”
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC
Control System
Compatible Controller
GSC-01, GIP-101, GSC-02, SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G080
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9079
Outline Drawing
HDS-60YAW
Hexagon socket head cap screw M4×12…3 screws
(126)
25 ( 0.025
0.005)
HDS-80YAW
Hexagon socket head cap screw M4×12…3 screws
(142)
132
Application
Systems
Optics &
Optical
Coatings
32 ( 0.070
0.005)
Holders
90
32
50
30
32
50
70.05
(110.5)
Bases
12.5
4-M4 depth 5.5
P.C.D.50
119.5
32
50
30
60
4-M3 depth 5.5
4.5
28
40
32
4-M3 depth 5
4-M4 depth 5 50
70
4-M4 depth 5
P.C.D.62
40
88
80
Manual
Stages
Actuators
Motoeized
Stages
HDS-120YAW
Hexagon socket
head cap screw M6×12…3 screws
3-4.5 mounting hole
8 counterbore
(164)
155
6.5
35
3-4.5 mounting hole
8.2 counterbore
Light
Sources
Index
Guide
Controllers/Drivers
64 (0.005
−0.050 )
50
100
(161.9)
Softwares
Stepping Motor
AC Servo Motor
60
Cables
50
100
130
60
4-M4 depth 6
4-M4 depth 6
P.C.D.100
Piezo
120
4
35
3-6.5 mounting hole
11 counterbore
X Translation
Theta Rotation
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
Note 2
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13R-12SC
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 ORG
7
Sensor
Power source 12V
8 GND (0V)
9 LS (+)
10 LS (−)
11 FG
12 FG
5-Phase Stepping
Motor
E-Phase A phase
D-Phase
B-Phase
C-Phase
Originside (ORG)
limit sensor
ON when shaded
Opposite side (−)
limit sensor
ON when light enters
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
GP1S097HCZ0F
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
Stage
HDS-60YAW
HDS-80YAW
HDS-120YAW
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the (+) forward direction limit sensor.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
G020 − G021
MINI-CA-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G081

Motion Control Products
Motorized Extended Guide Goniometer
OSMS-40A Stage size □40mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
High precision motorized goniometers with integrated bearing ways for superior stiffness, accuracy
and durability.
Their smooth movement is ideal for frequent angle adjustment.
◦Cost-effective motorized stages achieved by integrated
structure in which guides are directly processed on the
main body to reduce the number of parts and assembly
time.
◦Attachment pins (accessories) are ideal for positioning
when assembling into αβ axis or mounting on various
instruments or devices.
Guide
▶Contact our International Sales Division
if you desire to assemble into an αβ axis
stage.
▶Contact our International Sales Division
if you desire a rotation center height not
listed in the catalog.
▶Manual type (GOHT-40) is also available.
E168
GOHT-40
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS-40A60 OSMS-40A75
(Opposite Model) OSMS-40A60R OSMS-40A75R
Mechanical
Specifications
Size Tolerance
Accuracy
Specifications
Sensor
Travel [°] ±5 ±4
Table Size [mm] 40×40 40×40
Travel Mechanism
(reduction ratio)
Worm gear (1: 332) Worm gear (1: 406)
Positioning Slide Extended Contact Ball Guide Extended Contact Ball Guide
Stage Material SUS440C quench hardened SUS440C quench hardened
Finish Super black chrome Super black chrome
Weight [kg] 0.4 0.4
Stage Height [mm] 15 15
Rotation Center Height [mm] 60±0.1 75±0.1
Rotation Center Deflection Accuracy [mm] Within φ0.01 Within φ0.01
(Full) [°/pulse] about 0.00217 about 0.00177
Resolution
(Half) [°/pulse] about 0.00108 about 0.00089
MAX Speed [°/sec] 10 8.9
Positional Repeatability [°] ±0.004 ±0.004
Load Capacity [N] 19.6(2.0kgf) 19.6(2.0kgf)
Moment Stiffness [″/N・cm] Roll 0.6 Yaw 0.6 Roll 0.6 Yaw 0.6
Lost Motion [°] 0.02 0.02
Sensor Part Number
Micro photo sensor: GP1S092HCPIF(Sharp Corporation): Limit Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK523HPB-C12 (□28mm)
Step Angle 0.72°
Power Voltage DC - 5V - +24V
Current Consumption
40mA or lower (20mA per sensor)
Control Output
NPN open collector output 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G082
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9079
Outline Drawing
OSMS-40A60
(51)
(31.6)
15.8
(125.9)
78.3
M3depth 3
M4depth 3
4 H7
Hexagon socket head cap screw M3×6…4 screws,
Attachment pins
40
16 16
(7.6)
6-M3depth 5
M3depth 3
16
16
40
(14.5)
60
15
(10)
32 32
Rotation center
1
4-3.5 mounting hole
6 counterbore
OSMS-40A60R
Rotation center
1
4-3.5 mounting hole
6 counterbore
32
Hexagon socket head cap screw M3×6…4 screws,
Attachment pins
(125.9)
(7.6) 40
78.3
6-M3depth 5 16 16 M3depth 3
M3depth 3
40
(14.5)
(10) 15 60 16 16
32
M4depth 3
4 H7
(51)
(31.6)
15.8
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
OSMS-40A75
(51)
Hexagon socket head cap screw M3×6…4 screws,
Attachment pins
(125.9)
78.3
40 (7.6)
16 16 6-M3depth 5
M3depth 3
M3depth 3
16 16
40
OSMS-40A75R
Hexagon socket head cap screw M3×6…4 screws,
Attachment pins
(7.6)
6-M3depth 5
M3depth 3
40
16 16
40
16 16
(125.9)
78.3
M3depth 3
(51)
Guide
Controllers/Drivers
Softwares
Stepping Motor
M4depth 3
(14.5)
Rotation center
Rotation center
(14.5)
M4depth 3
AC Servo Motor
Cables
(31.6)
15.8
4 H7
(10) 15 75
32 32
1
4-3.5 mounting hole
6 counterbore
1
4-3.5 mounting hole
6 counterbore
32
(10) 15
75
32
4 H7
15.8
(31.6)
Piezo
X Translation
Theta Rotation
Connection Diagram
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13R-12SD
1 1 Motor lead
2 2 Motor lead
3 3 Motor lead
4 4 Motor lead
5 5 Motor lead
6 6 N.C. (not used)
7
8
9
10
7
8
9
10
VS
5~24VDC
GND (0V)
LS (+)
LS (−)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E-Phase
D-Phase
C-Phase
A phase
B-Phase
Motor side (+)
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
GP1S092HCPI
Opposite side (−)
limit sensor
ON when shaded
Note 1
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with origin and proximity origin sensors.
Limit sensors are used as origin detection sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
G020 − G021
Cable
D15RP-CA
G108
Cable
MINI-CA-SG
G108
Stage
OSMS-40A
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G083

Motion Control Products
Motorized Extended Guide Goniometer
OSMS-60A Stage size □60mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
High precision motorized goniometers with integrated bearing ways for superior stiffness, accuracy
and durability.
Their smooth movement is ideal for frequent angle adjustment.
◦Cost-effective motorized stages achieved by integrated
structure in which guides are directly processed on the
main body to reduce the number of parts and assembly
time.
◦Attachment pins (accessories) are ideal for positioning
when assembling into αβ axis or mounting on various
instruments or devices.
Guide
▶Contact our International Sales Division if
you desire to assemble into an αβ axis
stage.
▶Manual type (GOHT-60) is also available.
E172
Motoeized
Stages
GOHT-60
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS-60A60 OSMS-60A85 OSMS-60A105
(Opposite Model) OSMS-60A60R OSMS-60A85R OSMS-60A105R
Mechanical
Specifications
Size Tolerance
Accuracy
Specifications
Sensor
Travel [°] ±14 ±9 ±7
Table Size [mm] 60×60 60×60 60×60
Travel Mechanism
(reduction ratio)
Worm gear (1: 246) Worm gear (1: 314) Worm gear (1: 380)
Positioning Slide Extended Contact Ball Guide Extended Contact Ball Guide Extended Contact Ball Guide
Stage Material SUS440C quench hardened SUS440C quench hardened SUS440C quench hardened
Finish Super black chrome Super black chrome Super black chrome
Weight [kg] 0.85 0.75 0.75
Stage Height [mm] 25 20 20
Rotation Center Height [mm] 60±0.1 85±0.1 105±0.1
Rotation Center Deflection Accuracy [mm] Within φ0.01 Within φ0.01 Within φ0.01
(Full) [°/pulse] about 0.00293 about 0.00229 about 0.00198
Resolution
(Half) [°/pulse] about 0.00146 about 0.00115 about 0.00095
MAX Speed [°/sec] 10 8 6.6
Positional Repeatability [°] ±0.004 ±0.004 ±0.004
Load Capacity [N] 29.4(3.0kgf) 29.4 (3.0kgf) 29.4 (3.0kgf)
Moment Stiffness [″/N・cm] Roll 0.3 Yaw 0.3 Roll 0.3 Yaw 0.3 Roll 0.3 Yaw 0.3
Lost Motion [°] 0.02 0.02 0.02
Sensor Part Number
Micro photo sensor: GP1S097HCZ0F(Sharp Corporation): Limit Sensor, Origin Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Equipped (NORMAL OPEN)
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK523HPB-C12 (□28mm)
Step Angle 0.72°
Power Voltage DC - 5V - +24V
Current Consumption
60mA or lower (20mA per sensor)
Control Output
NPN open collector output 50mA
Output Logic
When shaded: Output transistor OFF (no conduction): Limit sensor
When shaded: Output transistor ON (conduction): Origin sensor
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G084
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9080
Outline Drawing
OSMS-60A60
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
80
60 (9.3)
25 25 M4 depth 4
4-M3 depth 4 32
M4 depth 4
OSMS-60A60R
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
(9.3) 60
80
M4 depth 4 25 25
M4 depth 4 32
4-M3 depth 4
Application
Systems
Optics &
Optical
Coatings
(56)
32
25
60
60
25
32
(56)
Holders
25
(13.4)
25
M4 depth 4 6-M4 depth 5
Rotation center
Rotation center
(13.4)
6-M4 depth 5
M4 depth 4
Bases
(31.6)
15.8
OSMS-60A85
4 H7
50
(8) 25 60
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
80
60 (9.3)
M4 depth 4 25 25 6-M4 depth 5
4-M3 depth 4 32 M4 depth 4
25
50
3
4-4.5 mounting hole
8 counterbore
3
4-4.5 mounting hole
8 counterbore
OSMS-60A85R
50
(8) 25 60
50 4 H7
15.8
(31.6)
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
(9.3) 60
80
6-M4 depth 5 25 25 M4 depth 4
M4 depth 4 32 4-M3 depth 4
25
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
(56)
M4 depth 4
32
25
60
Rotation center
Rotation center
60
25
32
M4 depth 4
(56)
Index
(31.6)
15.8
(13.4)
(13.4)
4 H7
OSMS-60A105
(56)
(8) 20 85
50 50
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
80
60 (9.3)
M4 depth 4 25 25
32
6-M4 depth 5
4-M3 depth 4
M4 depth 4
32
25
25
60
2
4-4.5 mounting hole
8 counterbore
2
4-4.5 mounting hole
8 counterbore
OSMS-60A105R
50
(8) 20 85
50
4 H7
15.8
(31.6)
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
(9.3) 60
80
6-M4 depth 5
25 25 M4 depth 4
32
M4 depth 4
4-M3 depth 4
60
25 25
32
(56)
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
M4 depth 4
Rotation center
Rotation center
M4 depth 4
(13.4)
(31.6)
15.8
(13.4)
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 ORG
7
+VS
524VDC
8 GND (0V)
9 LS (+)
10 LS (−)
11 FG
12 FG
4 H7
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13R-12SD
50
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
Note 2
(8) 20
105
50
5-Phase Stepping
Motor
E-Phase
D-Phase
Originside (ORG)
limit sensor
ON when shaded
Opposite side (−)
limit sensor
ON when light enters
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
2
4-4.5 mounting hole
8 counterbore
C-Phase
A phase
B-Phase
Sharp Corporation
Micro photo sensor
GP1S097HCZ0F
2
4-4.5 mounting hole
8 counterbore
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
50
20 105
(8)
50
Cable
D15RP-CA
G108
Cable
4 H7
15.8
(31.6)
Stage
OSMS-60A
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with proximity origin sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
G020 − G021
MINI-CA-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G085

Motion Control Products
Motorized Goniometers - 5 Phase Stepping Motor
SGSP-A Stage size □60mm
Stepping motor driven motorized goniometer stages fitted with crossed roller guide.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
◦High stiffness goniometer stages fitted with excellent
abrasion-resistant crossed roller guide.
◦Rotation center height from the table face is selectable
according to the usage from 75mm, 100mm or 130mm.
Guide
▶After purchasing two α axis stages, to assemble them into an αβ
axis stage, assembly adjustment cost and performance inspection
cost will be charged separately.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number SGSP-60A75 SGSP-60A100 SGSP-60A130
Mechanical
Specifications
Size Tolerance
Accuracy
Specifications
Sensor
Angle Range [°] ±7 ±5 ±4
Table Size [mm] 60×60 60×60 60×60
Positioning Slide Crossed roller guide Crossed roller guide Crossed roller guide
Travel Mechanism Worm and worm wheel Worm and worm wheel Worm and worm wheel
Stage Material Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized
Weight [kg] 0.65 0.55 0.65
Stage Height [mm] 35 30 35
Rotation Center Height [mm] 75 100 130
Rotation Center Deflection Accuracy [mm] φ0.05 φ0.05 φ0.05
(Full) [°/pulse] about 0.002 about 0.001 about 0.001
Resolution
(Half) [°/pulse] about 0.001 about 0.0005 about 0.0005
MAX Speed [°/sec] 6 6 6
Positional Repeatability [°] ±0.004 ±0.004 ±0.004
Load Capacity [N] 24.5 (2.5kgf) 24.5 (2.5kgf) 24.5 (2.5kgf)
Moment Stiffness [″/N・cm] 1 1 1
Lost Motion [°] 0.02 0.02 0.02
Sensor Part Number
Micro photo sensor: GP1S092HCPI(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None None
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
C9863-90215P
Step Angle 0.72°
Power Voltage
DC5 - 24V
Current Consumption
40mA or lower (20mA per sensor)
Control Output
NPN open collector output 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G086
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9034
Outline Drawing
SGSP-60A75
SGSP-60A100
Hexagonal socket head cap screw M4×18…4 screws
Hexagonal socket head cap screw M4×8…4 screws
(137)
(137)
77
60
77 60
9-M4 depth 4
25 25 25 25 9-M4 depth 4
Application
Systems
Optics &
Optical
Coatings
(3.8) (59.6)
25 25
60
Rotation center
(3.8) (59.6)
25 25
60
Rotation center
Holders
Bases
75
100
Manual
Stages
Actuators
(31.1)
(16.7)
15.3
0.52
(112)
50
35
14
4-4.2 mounting hole
8 counterbore
50
(33.2)
(18.8)
17.9
2.62
112
30
4
50
4-4.2 mounting hole
50
8 counterbore
Motoeized
Stages
SGSP-60A130
Hexagonal socket head cap screw M4×18…4 screws
Light
Sources
(137)
77 60
25 25
9-M4 depth 4
Index
(4.3) (59.6)
25 25
60
Rotation center
Guide
Controllers/Drivers
Softwares
Stepping Motor
130
AC Servo Motor
Cables
32.1
35
14
Piezo
16.8
1.52
(112)
50
4-4.2 mounting hole
8 counterbore
50
X Translation
Theta Rotation
Connection Diagram
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13RA-12SD
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6 6 N.C. (not used)
7
8
9
10
7
8
9
10
VS
5 − 24VDC
GND (0V)
LS (+)
LS (−)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
D phase
C phase
A phase
B phase
Motor side ()
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
GP1S092HCPI
Opposite side (−)
limit sensor
ON when light enters
Note 1 1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
G098 − G103
Driver
Drivers
Cable
D15RP-CA
G108
Cable
Stage
SGSP-60A
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. PR17-13PA-12PC/RP17-PC-122
G020 − G021
MINI-CA-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G087

Motion Control Products
Motorized Goniometers - 5 Phase Stepping Motor
SGSP-B Stage size □60mm
Stepping motor driven motorized goniometer stages fitted with crossed roller guide.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
◦Combination of two axes of excellent abrasion-resistant
z stages enables flexible alignment.
◦Rotation center height from the table face is selectable
according to the usage from 75mm or 100mm.
Attention
▶Assembly was adjusted for precision of both α and β axis stages.
Note that if you disassemble the two axes, they might not work
normally and may require assembly readjustment by us.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number SGSP-60B75 SGSP-60B100
Mechanical
Specifications
Size Tolerance
Accuracy
Specifications
Sensor
Angle Range [ ° ]
(Upper) β axis: ±7 β axis: ±5
(Lower) α axis: ±5 α axis: ±4
Table Size [mm] 60×60 60×60
Positioning Slide Crossed roller Crossed roller
Travel Mechanism Worm and worm wheel Worm and worm wheel
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 1.10 (2 axes) 1.20 (2 axes)
Stage Height [mm] 55 65
Rotation Center Height [mm] 75 100
Rotation Center Deflection Accuracy [mm] − −
Resolution
(Full) [°/pulse] α axis: about 0.001, β axis: about 0.002 α axis: about 0.001, β axis: about 0.001
(Half) [°/pulse] α axis: about 0.0005, β axis: about 0.001 α axis: about 0.0005, β axis: about 0.0005
MAX Speed [°/sec] 6 6
Positional Repeatability [ ° ] Within ±0.004 Within ±0.004
Load Capacity [N] 19.1 (1.9kgf) 19.1 (1.9kgf)
Moment Stiffness [″/N・cm] − −
Lost Motion [ ° ] − −
Sensor Part Number
GP1S092HCPI (Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None
Proximity Origin Sensor None None
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
C9863-90215P
Step Angle 0.72°
Power Voltage
DC5 − 24V
Current Consumption
40mA or lower (20mA per sensor)
Control Output
NPN open collector output 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
Configuration
Part Number SGSP-60B75 SGSP-60B100
(Upper) β axis SGSP-60A75 SGSP-60A100
(Lower) α axis SGSP-60A100 SGSP-60A130
(Reference) Precision Specifications of Single Axis Stage
Part Number SGSP-60A75 SGSP-60A100 SGSP-60A130
Accuracy
Specifications
Positional Repeatability [ ° ] ±0.004 ±0.004 ±0.004
Moment Stiffness [″/N・cm] 1 1 1
Lost Motion [ ° ] 0.02 0.02 0.02
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G088
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9035
Outline Drawing
SGSP-60B75
(3.8) (59.6)
Hexagonal socket head cap screw M4×8…4 screws
SGSP-60B100
(3.8) (59.6)
Hexagonal socket head cap screw M4×18…4 screws
Application
Systems
Optics &
Optical
Coatings
(3.8) (59.6)
25 25
60
(137)
25
25
60 77
(173)
9-M4 depth 4
(3.8) (59.6)
25 25
60
(137)
25 25
60 77
(173)
9-M4 depth 4
Rotation center
Holders
Bases
Manual
Stages
Rotation center
Actuators
75
100
Motoeized
Stages
(33.2)
4
55
35.8
(36.8)
(51.1)
(32.1)
14
65
(37.6)
52.9
(53.8)
(68.2)
Light
Sources
(112)
50
4-4.2 mounting hole
8 counterbore
50
(112)
16.8
1.52
(112)
50
4-4.2 mounting hole
8 counterbore
50
(112)
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Connection Diagram
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13RA-12SD
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6 6 N.C. (not used)
7
8
9
10
7
8
9
10
VS
5 − 24VDC
GND (0V)
LS (+)
LS (−)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
D phase
C phase
A phase
B phase
Motor side ()
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
GP1S092HCPI
Opposite side (−)
limit sensor
ON when light enters
Note 1 1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
G098 − G103
Driver
Drivers
Cable
D15RP-CA
G108
Cable
Stage
SGSP-60B
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. PR17-13PA-12PC/RP17-PC-122
G020 − G021
MINI-CA-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G089

Motion Control Products
Vacuum Compatible Motorized Stage Guide
VSGSP Guide
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
For use in vacuum environments, the vacuum compatible stage series offers replacement with a
stainless steel or machined aluminum body as well as replacement with vacuum grease, and uses
a vacuum rated motor and a contact type or mechanical driven type switch, and Teflon coated
cables for signal wires.
The series is suited for positioning in environments where the degree of vacuum is between 10 –4
and 10 –5 Pa. For the vacuum characteristics, see the measurement data of outgas volume, degree
of vacuum, and mass component ratio.
◦In addition to the standard lineup, motor replacement, sensor replacement, special specifications such as vacuum
compatible large mirror holders, and replacement of grease to vacuum grease for the guides or feed screws of standard
specification stages to deal with low vacuum specifications are available. Contact our International Sales Division for
more information.
Manual
Stages
Vacuum Compatible 5 Phase Stepping Motor
The □24mm minimum size and lightest type motor
saves space.
Compact Body
Machined Aluminum and use of a crossed roller
for the linear guide achieved the thin body.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Teflon Coated Cable
Vacuum Grease
(Fomblin Grease)
Rotation Table
The body is made of aluminum machining.
Vacuum Grease
(Fomblin Grease)
Limit Sensor
The copper plate contact type limit sensor
enables limit detection inside a vacuum chamber.
Limit Sensor
The high-vacuum compatible limit switch enables origin
detection with high repeatability inside a vacuum chamber.
* Only for VSGSP-120YAW
Vacuum Compatible 5 Phase Stepping Motor
The motor size for VSGSP-60YAW is □24mm
and VSGSP-120YAW is □42mm.
[Attention]
To use a vacuum compatible stage in a vacuum chamber, the connection cables between the vacuum side and
the atmosphere side need to be relayed using a vacuum current feedthrough or the like. Prepare the feedthrough
according to the vacuum chamber specifications.
Vacuum side (ex.: Vacuum chamber)
Air side
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor Cable
Sensor Cable
Vacuum current feedthrough
D15D15A-CA Cable etc
Guide
▶Because heat dissipation generally deteriorates in vacuum,
specification temperature conditions are stricter than those for
atmosphere. Check the usage conditions such as stage operation
to make sure that the motor case temperature does not exceed
80°C.
[Example of Special Order]
Vacuum Compatible Large Mirror Holder
G090
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●Emitted amount of gas
Emitted Amount of Gas Q
Part Number
(after 40 minutes of emission)
(Torr・l/s/unit)
(Pa・l/s/unit)
VSGSP26-200 4.77×10 −4 6.36×10 −2
VSGSP-60 6.75×10 −5 9.00×10 −3
VSGSP-120YAW 4.78×10 −4 6.37×10 −2
Emitted amount of gas is found by the following equation:
Evaluation and Device Specifications
Exhaust system: Turbo-Molecular Pump STP-301
Seiyu Instruments Inc. (Now Edwards Japan Limited)
Pumping speed: 300l/sec
Mass spectroscope: Quad Mass Spectrometer QME200
Pfeiffer Vacuum
Mass range: 1 − 200amu
Application
Systems
Optics &
Optical
Coatings
Holders
Q =
(P − P′) × V
t× N
P : Vacuum immediately after seal off
P′: Vacuum after seal-off time has elapsed
N : Number of stage units (1unit)
V : Vacuum chamber volume (l)
t : Seal-off time (600s)
Bases
From the measurement results of gas volume discharged from a vacuum compatible motorized stage
The main components of outgas are water and nitrogen. This is because the gas was caused by residual air on the
stage surface, and grease used for drive components is considered to have little impact on the amount of gas.
●Vacuum of Vacuum Chamber
Vacuum [pa]
1×10 -3 Empty chamber
VSGSP-60
VSGSP-120YAW
1×10 -4
VSGSP26-200
1×10 -5
1×10 -6
1×10 -7
40
300 600 1440
Time [min]
60
●Mass Component Ratio
Mass
Number
1
2
12
13
14
15
16
17
18
20
26
27
28
29
30
31
32
39
41
42
43
44
45
50
Component Ratio [%]
VSGSP-60 VSGSP26-200 VSGSP-120YAW
19.58
2.81
0.60
0.17
0.79
−
3.03
15.77
48.02
0.22
0.33
0.83
2.17
0.73
0.08
0.14
0.26
0.39
0.51
−
0.74
0.40
−
−
19.96
5.28
0.85
−
1.26
2.37
−
−
17.30
−
−
4.53
2.49
6.08
−
0.31
−
2.57
7.44
−
8.00
−
0.31
0.23
17.90
3.34
0.79
−
0.91
−
2.98
14.48
43.89
0.29
0.53
1.52
2.76
1.44
−
0.27
0.27
0.78
1.07
0.41
1.01
0.66
0.31
−
Ion
H +
H2 +
C +
CH +
N + , CO 2+ , CH2 +
CH3 + , NH +
O + , CH4 + , NH2 +
OH + , NH3 +
H2O +
HF + , Ar 2+
C2H2 +
C2H3 +
CO + , N2 + , C2H4 +
C2H5 +
C2H6 + , NO +
C2H2OH +
O 2+ , S +
C3H3 +
C3H5 +
C3H6 +
C3H5 +
C3H8 + , CO2 + , N2O + , C2H4OH +
C2H5O +
C4H2 +
Gas Molecule
H2, water vapor, hydrocarbon
H2, water vapor, hydrocarbon
CO, CO2, hydrocarbon
Hydrocarbon
N2, NH3, CO, hydrocarbon
Hydrocarbon, NH3
O2, CH4, NH3
H2O, NH3
H2O
HF, Ar
Hydrocarbon
Hydrocarbon
CO, CO2, N2, hydrocarbon
Hydrocarbon
C2H6, NO
C2H3OH
O2, H2S, SO2
Hydrocarbon
Hydrocarbon
Hydrocarbon
Hydrocarbon
C3H8, CO2, N2O, C2H4OH
C2H5OH
Hydrocarbon
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Data
●Interpretation of Mass Peak
The following list shows major gases that appear for each mass number when mass peaks (mass spectra) of residual gas
are measured, and their interpretations.
List of Residual Gas Spectra
Mass
Ion
Number
Remarks
Mass
Number
Ion
Remarks
1 H + H2, H2O, hydrocarbons, etc 30 NO + Appears immediately after emission of dirty vacuum system.
2 H2 + H2, H2O, hydrocarbons, etc 31 CH3O + Alcohol
3 HD + Abundance ratio of D is about 0.01%. 32 O2 + Becomes N23 : O32 = 4 : 1 when air leak occurs.
4 He + 35 Cl +
12 C + CO, CO2, hydrocarbons 37 Cl + Cl35 : Cl37 = 3 : 1
14 N + , CH2 + , CO2 + N2, CO2, hydrocarbons 39 K + , C3H3 + K + dissociates from filament.
15 CH3 + Molecule that has CH4, CH3 40 Ar + , C3H4 + Ar makes up 1% of the atmosphere.
16 C + , CH4 + O2, CH4, oxygen compounds 41 C3H5 + Hydrocarbon
17 OH + H2O 42 C3H6 + Hydrocarbon
18 H2O + H2O, OH + : H2O+ ≒ 1 : 5 43 C3H7 + Hydrocarbon
19 F + Sometimes adsorbed to filaments and electrode surface. 44 CO2 +
20 Ar + , H2O + , Ne + H2O(20) is present about 0.2% of abundance ratio of O15. 50 C4H2 + Hydrocarbon
22 CO2 2+ , Ne + Abundance ratio of NE22 is 8.8%. 51 C4H3 + Hydrocarbon
23 Na + Sometimes adsorbed to filaments and electrode surface. 55 C4H7 + Hydrocarbon
27 C2H3 + Hydrocarbon 56 C4H8 + Hydrocarbon
28 N2 + , CO + Remain till the last. 57 C4H9 + Hydrocarbon
29 C2H5 + , N2 + , CO + Abundance ratio of N15 is 0.7%, and that of C13 is 1.1%.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G091

Motion Control Products
Vacuum Applications Miniature Motorized Stages
VSGSP-60
Application
Systems
Optics &
Optical
Coatings
Compact motorized stages used for experiments and inside a chamber of measuring instrument.
Compact slim body is effective for space-saving.
Guide
▶Fitted with 1m teflon coated cable to directly connect the vacuum
motor or vacuum limit switch to the connector of chamber.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Specifications
Part Number VSGSP-60(X) VSGSP-60(XY) VSGSP-60(Z)
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 20 20 20
Table Size [mm] 55×60 55×60 55×60
Feed Screw
Precision ground screw φ4mm,
0.5mm lead
Precision ground screw φ4mm,
0.5mm lead
Precision ground screw φ4mm,
0.5mm lead
Positioning Slide Crossed roller guide Crossed roller guide Crossed roller guide
Stage Material Aluminum Aluminum Aluminum
Finish None None None
Weight [kg] 0.55 1.1 0.6
(Full) [μm] 1 1 1
Resolution
(Half) [μm] 0.5 0.5 0.5
MAX Speed [mm/sec] 5 5 −
Positional Repeatability [μm] 6 6 6
Load Capacity [N] 29.4 (3.0kgf) 19.6 (2.0kgf) 14.7 (1.5kgf)
Lost Motion [μm] 5 5 5
Type Vacuum limit switch Vacuum limit switch Vacuum limit switch
Limit Sensor Contact type Contact type Contact type
Origin Sensor None None None
Proximity Origin Sensor None None None
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Type
Vacuum compatible 5-phase stepping motor 0.66A/phase (Tamagawa Seiki Co., Ltd.)
Motor
Motor Part Number
TS3664N5 (□24mm)
Step Angle 0.72°
Control Output Contact type Contact type Contact type
Sensor
Output Logic NORMAL OPEN NORMAL OPEN NORMAL OPEN
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G092
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9081
Outline Drawing
VSGSP-60(X)
(115.5)
Hexagonal socket head cap screw M4×10…4 screws
27.8
VSGSP-60(XY)
(127.6)
Hexagonal socket head cap screw M4×10…4 screws
Travel 10
Application
Systems
Optics &
Optical
Coatings
(97.8)
Teflon cable
1m
20
20
60
(146.2)
Teflon cable
1m
20 20
22 22
55
40
Holders
Bases
20 20
22 22
55
2-M4 depth 8
4-M4 depth 8
Travel 10 Travel 10
Travel 10
20 20
60
4-M4 depth 8
2-M4 depth 8
Travel 10
Travel 10
4.5
4-4.5 mounting hole
7.5 counterbore
Manual
Stages
Actuators
27
15
3
40
28
4.5
4-4.5 mounting hole
7.5 counterbore
40
43
15
56
Motoeized
Stages
3
40
Light
Sources
VSGSP-60(Z)
Hexagonal socket head cap screw M4×15…2 screws
Index
Teflon cable 1m
2-M4 depth 8
4-M4 depth 8
60
40
Guide
(128)
Controllers/Drivers
40
55
44
40
8
Softwares
Stepping Motor
40
60 27.8
(97.4)
53
5
2-4.5 mounting hole
AC Servo Motor
Cables
Piezo
Vacuum Limit Switch
GND (0V) black lead
Motor side (+) limit switch
LS (+)white lead
Opposite side (−) limit switch
LS (−)red lead
* Use the motor side and opposite side limit switches as normal open.
Wiring of Vacuum Stages
The vacuum compatible stepping motor TS3664N5 used for vacuum stages
has five bare lead wires.
For wiring, they correspond to the motor lead colors shown in the wiring
diagrams of driver or cable as follows.
(The motor leads shown in the connection diagrams of driver or cable indicate
wiring of stepping motors used for normal stages.)
Corresponding
connection
Vacuum stage motor lead color
1
Blue
2
Red
3
Red White
4
Yellow
5
Black
Vacuum compatible stage motor
connection diagram
E phase
Black
Blue
A phase
Red
Motor lead color
shown in driver or cable connection diagram
Blue
Red
Orange
Green
Black
5-phase stepping motor
connection diagram
E phase
Black
Blue
A phase
Red
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
*
Stage
VSGSP-60(X)
VSGSP-60(XY)
VSGSP-60(Z)
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
D phase
C phase
Yellow
B phase
Red White
D phase
C phase
Green
B phase
Orange
MINI-CA-SG
G020 − G021
G108
* Make the cable into bare wire specification after purchase.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G093

Motion Control Products
Vacuum Compatible Motorized Stages
VSGSP-(X)
Motorized stages fitted with a limit sensor compatible with vacuum environments.
Application
Systems
Optics &
Optical
Coatings
◦Linear system has a long travel between 35 − 200mm, and is as compact as the conventional SGSP series.
Guide
▶Motor cables and sensor cables are 1m bare wires.
Holders
■Limit Sensor (high vacuum compatible switch)
Bases
Manual
Stages
Linear stage series normal close specification
Actuators
Motoeized
Stages
Rotation stage series normal open specification Note 1
Note 1 Set the controller of vacuum compatible motorized rotation stages to normal open.
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number VSGSP20-35(X) VSGSP20-85(X) VSGSP26-200(X)
Travel [mm] 35 85 200
Table Size [mm] 60×60 60×60 80×80
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum / Stainless steel Aluminum / Stainless steel Aluminum / Stainless steel
Finish None None None
Weight [kg] 1.0 1.1 2.5
(Full) [μm] 2 2 4
Resolution
(Half) [μm] 1 1 2
MAX Speed [mm/sec] 10 10 20
Positional Repeatability [μm] 5 5 10
Load Capacity [N] 39.2(4.0kgf) 39.2(4.0kgf) 58.8(6.0kgf)
Lost Motion [μm] 3 3 10
Sensor Part Number GN-PT5M3B-1 (Metrol Co., Ltd.) GN-PT5M3B-1 (Metrol Co., Ltd.) GN-PT5M3B-1 (Metrol Co., Ltd.)
Limit Sensor
Vacuum touch sensor
(NORMAL CLOSE)
Vacuum touch sensor
(NORMAL CLOSE)
Vacuum touch sensor
(NORMAL CLOSE)
Origin Sensor None None None
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
Vacuum compatible 5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number A7298-90215KV (□28mm) A7298-90215KV (□28mm) A7298-90215KV (□28mm)
Step Angle 0.72°
Power Voltage
DC5−24V
Current Consumption
10mA(Max 20mA)
Control Output
Mechanical
Output Logic NORMAL CLOSE NORMAL CLOSE NORMAL CLOSE
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G094
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9082
Outline Drawing
VSGSP20-35(X)
20
28
50
Hexagonal socket head cap screw M4×12…4 screws
209
110
60
25 25
16 16
6-M4×0.7 depth 6
8-M3×0.5 depth 6
16 16
25 25
60
VSGSP20-85(X)
20
28
50
Hexagonal socket head cap screw M4×12…4 screws
259
160
60
25 25
16 16
6-M4×0.7 depth 6
8-M3×0.5 depth 6
16 16
25 25
60
Application
Systems
Optics &
Optical
Coatings
Holders
Motor cable 1m
PTFE lead wire AWG26
5 bare leads
50
Sensor cable 1m
PTFE lead wire equivalent to AWG27
Travel 17.5 60 Travel 17.5
2-M4×0.7 depth 5
Motor cable 1m
PTFE lead wire AWG26
5 bare leads
50
Sensor cable 1m
PTFE lead wire equivalent to AWG27
Travel 42.5 60 Travel 42.5
2-M4×0.7 depth 5
Bases
Manual
Stages
34
20
8-4.5 mounting hole
5 25 25 25 25 5
7
34
34
20
8-4.5 mounting hole
5
50 50 50 5
7
34
8-4.5
Actuators
VSGSP26-200(X)
28
70
Hexagonal socket head cap screw M4×12…8 screws
417
310 5
80
70
4-M3×0.5 depth 6
25 25
8-M4×0.7 depth 6
16 16
4-M4×0.7 depth 6
Motoeized
Stages
Light
Sources
Index
20
16 16
25 25
70
80
1m motor cable
PTFE lead wire AWG26
5 bare leads
Sensor cable 1m
PTFE lead wire equivalent to AWG27
Guide
Controllers/Drivers
Softwares
Travel 100 80 Travel 100
Stepping Motor
AC Servo Motor
38
24
41
10-4.5 mounting hole
15 35 70 70 70 35 15
8
70
Cables
Piezo
X Translation
Theta Rotation
Connection Diagram
1
2
3
4
5
6
1
2
3
4
5
6
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND (0V)
7 7 Origin sensor (not used)
8 8 +VS (not used)
9 9 N.C. (not used)
10 10 N.C. (not used)
11
12
11
12
LS (+)
LS (−)
13 13 GND (not used)
14 14 Origin proximity sensor (not used)
15 15 +VS (not used)
5-Phase Stepping
Motor
E phase
D phase
C phase
Motor side (+)
limit sensor
A phase
B phase
ReverseMotor side (−)
limit sensor
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
*
Stage
VSGSP20-35(X)
VSGSP20-85(X)
VSGSP26-200(X)
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
* Motor cables and sensor cables are bare wires.
MINI-CA-SG
G020 − G021
G108
* Make the cable into bare wire specification after purchase.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G095

Motion Control Products
Vacuum Compatible Rotation Motorized Stage
VSGSP-YAW
Application
Systems
Optics &
Optical
Coatings
Rotation motorized stages for vacuum environment.
The φ60mm compact type is space saving, and best suited for experiments and use in chambers
of inspection equipment.
The φ120mm type is equipped with a limit sensor compatible with vacuum environments. It is thin
but has high load capacity because of its □42mm large motor.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Guide
▶Motor cables and sensor cables are 1m bare wires.
Guide
▶Rotation Range
Minus limit sensor: −2.5° Scale: 0°
Light
Sources
Index
Clockwise CW direction
Stops at near 0° (−2.5°)
Counterclockwise
CCW direction to ∞
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number VSGSP-60YAW VSGSP-120YAW
Rotation Range
In the CW or CCW direction to ∞
Counterclockwise CCW direction to ∞, Clockwise CW
direction stops at near 0 degree (−2.5°)
Table Size [mm] φ60 φ120
Mechanical
Feed Screw Worm and worm wheel Worm and worm wheel
Specifications Positioning Slide Bearing Crossed roller
Stage Material Aluminum Aluminum / Stainless steel
Finish None None
Weight [kg] 0.45 1.7
Resolution
(Full) [ ° ] 0.005 0.005
(Half) [ ° ] 0.0025 0.0025
Accuracy MAX Speed [°/sec] 20 20
Specifications Positional Repeatability [ ° ] 0.02 0.02
Load Capacity [N] 29.4 (3.0kgf) 98.0 (10.0kgf)
Lost Motion [ ° ] 0.05 0.05
Type None GN-STM35A-1 (Metrol Co., Ltd.)
Sensor
Limit Sensor None Vacuum touch sensor (NORMAL OPEN)
Origin Sensor None None
Proximity Origin Sensor None None
Motor / Sensor Specifications
Motor
Sensor
Type
Vacuum compatible 5-phase stepping motor 0.66A/phase
(Tamagawa Seiki Co., Ltd.)
▶Homing of rotation motorized stages is performed using the CW
limit sensor as the origin sensor.
▶Origin detection is adjusted so that the stage stops at 0 degrees
when homing is performed in the MINI system at half step.
Vacuum compatible 5-phase stepping motor 0.75A/phase
(Oriental Motor Co., Ltd.)
Motor Part Number TS3664N5 (□24mm) PK543V-NB (□42mm)
Step Angle 0.72° 0.72°
Control Output ー DC5−24V
Output Logic ー Current Consumption 10mA(Max 20mA)
Control Output Contact type Mechanical
Output Logic NORMAL OPEN NORMAL OPEN
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G096
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9083
Outline Drawing
VSGSP-60YAW
Hexagonal socket
head cap screw M4×10…3 screws
VSGSP-120YAW
Hexagon socket
head cap screw M6×10…3 screws
174.5
Application
Systems
Optics &
Optical
Coatings
(117)
0.025
25 () 0.005
20
Holders
70
Teflon
cable
1m
32
50
30
64.5
60
32
50
30
64
4-M3 depth 5.5
4-M4 depth 5.5
P.C.D.50
2-M6 depth 5
138
Motor cable 1m
PTFE lead wire AWG26
5 bare leads
Sensor cable 1m
PTFE lead wire equivalent to AWG27
64
50
100
123
120
61
50
100
61
122
4-M4×0.7 depth 8
P.C.D.100
4-M4×0.7 depth 8
Bases
Manual
Stages
Actuators
Motoeized
Stages
26
14
2
5
14
28
4-4.5 mounting hole
8 counterbore
43
22
3.5
45
3-6.5 mounting hole
11 counterbore
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Wiring of Vacuum Stages
The vacuum compatible stepping motor TS3664N5 used for vacuum stages
has five bare lead wires.
For wiring, they correspond to the motor lead colors shown in the wiring
diagrams of driver or cable as follows.
(The motor leads shown in the connection diagrams of driver or cable indicate
wiring of stepping motors used for normal stages.)
Corresponding
connection
Vacuum stage motor lead color
1
Blue
2
Red
3
Red White
4
Yellow
5
Black
Vacuum compatible stage motor
connection diagram
Black E phase
D phase
Blue
C phase
Yellow
A phase
Red
B phase
Red White
Motor lead color
shown in driver or cable connection diagram
Blue
Red
Orange
Green
Black
5-phase stepping motor connection diagram
(SGSP series)
E phase
Black
D phase
Limit Sensor (high vacuum compatible switch)
Blue
C phase
Green
A phase
Red
B phase
Orange
Linear stage series normal close specification
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
*
Stage
VSGSP-60YAW
VSGSP-120YAW
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Rotation stage series normal open specification Note 1
Note 1 Set the controller of vacuum compatible motorized rotation stages to normal open.
MINI-CA-SG
G020 − G021
G108
* Make the cable into bare wire specification after purchase.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G097

Motion Control Products
Catalog
Single axis Stage Controller GSC-01 Code W9042
A single axis stage controller with built-in 5-phase stepping motor driver.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦External control with RS232C interface, operation with a jog switch on the front panel, and jog operation with external I/O
are available.
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2012)
Attention
▶Power supply is DC+24V 2A.
You need to purchase the PAT-001-POW1 (AC adapter) or prepare an
adapter separately
Actuators
Motoeized
Stages
Part Name
Single axis Stage Controller
AC Adapter
Part Number
GSC-01
PAT-001-POW1
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
■Primary Functions
Controller Function
○
Number of Control Axes 1
Stored Program Control
−
Feedback Control
−
Circular Interpolation Control −
Linear Interpolation Control −
Driver Function
Standard
Micro-step (Max. Division) 2
Driving Current (A/phase) 0.2 − 0.8
■General Specifications
Power Voltage
DC24V
2A
Power Consumption
48VA
Operating Temperature 5 − 40°C
Storage Temperature
−
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 47×125×90
Weight (kg) 0.4
■Performance Specifications
Coordinate Indication Range −
Max. Travel to Set 16,777,215
Max. Driving Speed (pps) 20,000
Min. Driving Speed (pps) 100
Acceleration/Deceleration Time (ms) 0 − 1,000
■I/O Specification
Origin Sensor
−
Proximity Sensor
−
CW (+) Limit
○
CCW (−) Limit
○
General Purpose Input
4 points
General Purpose Output 4 points
Control Input
3 points
Control Output
−
Trigger Output
−
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
Origin Offset Setting
Jog Operation Speed Setting
○
○
○
○
○
−
−
−
○
○
○
○
○
○
○
○
○
■Interface
GP-IB
RS232C
USB
Ethernet
−
○
−
−
X Translation
Theta Rotation
Goniometer
■GSC-01 System Chart
D15D15A-CA cable
Stepping Motor Stage
OSMS
series
Vacuum
Options
GSC-01
G108
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
PC
Sample softwaer
(download from website)
◦SGCommander
◦LabVIEW
RS232C cable
I/O control
external device
RS232C
I/O
STAGE
DC24V 1.3A
D15RP-CA cable
G108
OSMS-ZF
SGSP-40/60YAW
SGSP-ACT-B0
TAMM
OSMS-A
HPS
HDS
series
For the power supply,
you need to purchase the
optional PAT-001-POW1
or prepare an adapter
separately.
G098
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
2 axis Stage Controller GSC-02 Code W9044
A 2 axis stage controller with built-in 5-phase stepping motor driver.
◦External control with RS232C interface, manual operation and programmed operation with a dedicated controller (SJT-02).
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
Attention
▶Power supply is DC+24V 2A.
You need to purchase the PAT-001-POW1 (AC adapter) or prepare an
adapter separately
Part Name
Part Number
2 axis Stage Controller GSC-02
Joystick Terminal
SJT-02
AC Adapter
PAT-001-POW1
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
■Primary Functions
Controller Function
○
Number of Control Axes 2
Stored Program Control
△
Feedback Control
−
Circular Interpolation Control −
Linear Interpolation Control −
Driver Function
Standard
Micro-step (Max. Division) 2 (half step only)
Driving Current (A/phase) 0.3 − 0.8
△…Programs can be controlled using SJT-02.
■General Specifications
Power Voltage
DC24V
2A
Power Consumption
48VA
Operating Temperature 5 − 40°C
Storage Temperature −20 − 60°C
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 180×40×125
Weight (kg) 0.7
■Interface
GP-IB
RS232C
USB
Ethernet
−
○
−
−
■Optional
CJ-200A
−
JS-300
−
JB-400
−
SJT-02
○
■Performance Specifications
Coordinate Indication Range −
Max. Travel to Set 16,777,214
Max. Driving Speed (pps) 20,000
Min. Driving Speed (pps) 1
Acceleration/Deceleration Time (ms) 0 − 1,000
■I/O Specification
Origin Sensor
○
Proximity Sensor
○
CW (+) Limit
○
CCW (−) Limit
○
General Purpose Input
−
General Purpose Output
−
Control Input
−
Control Output
−
Trigger Output
−
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
○
○
○
−
○
−
−
−
○
○
○
○
○
−
−
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
■GSC-02 System Chart
D15D15A-CA cable
Stepping Motor Stage
OSMS
series
X Translation
Theta Rotation
Goniometer
PC
Sample softwaer
(download from website)
◦SGCommander
◦LabVIEW
RS232C cable
RS232C
SJT-02
* Either a PC or the SJT-02
can be connected.
Connecting both at the same
time is not possible.
GSC-02
STAGE1 — 2
G108
D15RP-CA cable
G108
OSMS-ZF
SGSP-40/60YAW
SGSP-ACT-B0
TAMM
OSMS-A
HPS
HDS
series
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
DC24V 2A
Others
SJT-02
G106
For the power supply, you need to purchase
the optional PAT-001-POW1 or prepare an
adapter separately
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G099

Motion Control Products
Catalog
2 axis Stage Controller SHOT-702 Code W9045
A 2 axis stage controller with built-in micro-step driver.
Application
Systems
Optics &
Optical
Coatings
Holders
◦External control with RS232C interface and manual operation with dedicated controllers (JS-300, JB-400).
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
■Primary Functions
Controller Function
○
Number of Control Axes 2
Stored Program Control
−
Feedback Control
−
Circular Interpolation Control −
Linear Interpolation Control −
Driver Function
Micro-step
Micro-step (Max. Division) 250
Driving Current (A/phase) 0.1 − 1.1
■General Specifications
Power Voltage
AC100 − 240V
50/60Hz
Power Consumption
50VA
Operating Temperature 5 − 40°C
Storage Temperature −20 − 60°C
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 260×70×280
Weight (kg) 2.8
■Interface
GP-IB
RS232C
USB
Ethernet
−
○
−
−
SHOT-702 System Chart
■Optional
CJ-200A
JS-300
JB-400
JD-100
SJT-02
■Performance Specifications
Coordinate Indication Range −
Max. Travel to Set 268,435,455
Max. Driving Speed (pps) 500,000
Min. Driving Speed (pps) 1
Acceleration/Deceleration Time (ms) 1 − 1,000
■I/O Specification
Origin Sensor
Proximity Sensor
CW (+) Limit
CCW (−) Limit
General Purpose Input
General Purpose Output
Control Input
Control Output
Trigger Output
SHOT-702
Part Name
Part Number
2 axis Stage Controller SHOT-702
Joy Stick
JS-300
Jog Operation Box
JB-400
Jog Dial
JD-100
MDR Cable
MDR14-CA-2.5
−
○
○
○
−
○
○
○
○
1 point
1 point
1 point
1 point
−
D15RP-CA cable
G108
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
Stepping Motor Stage
OSMS-ZF
SGSP-40/60YAW
SGSP-ACT-B0
OSMS-A/B
TAMM40/60
HPS
HDS
series
○
○
○
○
○
−
−
−
○
○
○
○
○
○
○
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
PC
Sample softwaer
(download from website)
SGCommander
LabVIEW
RS232C cable
I/O control
external device
RS232C
I/O
MDR cable
STAGE1 - 2
AC100-240V
50/60Hz
Power cable (2m)
comes with main body.
D15D15A-CA cable
OSMS series
SGSP-80/120/160YAW
TAMM100
series
JD-100
G106
JS-300
G107
JB-400
G107
G108
G100
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Intelligent Positioning System GIP-101 Code W9046
A single axis controller with built-in micro-step driver having a 5-point preset function.
◦Compatible with objective lens turrets and other LASER accessory units in addition to motorized stages fitted with
5-phase stepping motor.
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
■Primary Functions
Controller Function
○
Number of Control Axes 1
Stored Program Control
−
Feedback Control
−
Circular Interpolation Control −
Linear Interpolation Control −
Driver Function
Micro-step
Micro-step (Max. Division) 250
Driving Current (A/phase) 0.23 − 0.75
■General Specifications
Power Voltage
AC100 − 240V
50/60Hz
Power Consumption
100VA
Operating Temperature 0 − 40°C
Storage Temperature
−
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 145×205×81
Weight (kg) 2
■Interface
■Performance Specifications
Part Name
Intelligent Positioning System
Coordinate Indication Range −
Max. Travel to Set 16,777,214
Max. Driving Speed (pps) 22,000
Min. Driving Speed (pps) 50
Acceleration/Deceleration Time (ms)
20 − 1,000
16 steps
■I/O Specification
Origin Sensor
Proximity Sensor
CW (+) Limit
CCW (−) Limit
General Purpose Input
General Purpose Output
Control Input
Control Output
Trigger Output
○
○
○
○
−
−
6 points
1 point
−
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
Part Number
GIP-101
○
○
○
○
○
○
−
−
○
○
○
○
○
○
○
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
GP-IB
RS232C
USB
Ethernet
−
○
−
−
X Translation
Theta Rotation
Stepping Motor Stage
Goniometer
■GIP-101 System Chart
D15RP-CA cable
SGSP-40/60YAW
SGSP-ACT-B0
series
Vacuum
Options
PC
Sample softwaer
(download from website)
◦SGCommander
◦LabVIEW
RS232C cable
I/O control
external device
Stop switch
RS232C
I/O
STOP
GIP-101
STAGE
AC100-240V
50/60Hz
Power cable (3m)
comes with main body.
G108
D15D15A-CA cable
OSMS series
SGSP-80/120/160YAW
TAMM100
series
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G101

Motion Control Products
Catalog
2 axis / 4 axis Stage Controllers SHOT-GS Code W9047
2 axis and 4 axis stage controllers with built-in micro-step driver.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
◦External control with RS232C/GP-IB/USB interfaces, manual operation with a control pad (CJ-200A) or dedicated controllers
(JS-300, JB-400,JD-100), and automatic control with two banks of stored programs are available.
◦Full closed loop control is possible when used in combination with a stage with built in glass-scale.
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
◦LabVIEW for GP-IB (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
■Primary Functions
Part Number
Controller Function
SHOT-302GS/304GS System Chart
PC
Sample softwaer
(download from website)
SGCommander
LabVIEW
USB cable
RS232C cable
GP-IB cable
I/O control
external device
SHOT-302GS SHOT-304GS
USB
RS232C
GP-IB
I/O/Terminal Block
○
Number of Control Axes 2 4
Stored Program Control
Feedback Control
Circular Interpolation Control
Linear Interpolation Control
Driver Function
○
GS
○
2 axes
Micro-step
Micro-step (Max. Division) 250
Driving Current (A/phase) 0.25 − 1.4
CJ-200A
■General Specifications
Power Voltage
Required
AC100 − 240V
50/60Hz
Power Consumption 160VA 300VA
Operating Temperature 5 − 40°C
Storage Temperature −20 − 60°C
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 270×302×118
Weight (kg) 5.5 6.5
■Interface
GP-IB
RS232C
USB
Ethernet
○
○
○
−
CJ-200A
SHOT-GS
JD-100
G106
■Optional
CJ-200A
JS-300
JB-400
JD-100
SJT-02
■Performance Specifications
Coordinate Indication Range ±999,999,999
Max. Travel to Set 268,435,455
Max. Driving Speed (pps) 500,000
Min. Driving Speed (pps) 1
Acceleration/Deceleration Time (ms) 0 − 1,000
■I/O Specification
Origin Sensor
Proximity Sensor
CW (+) Limit
CCW (−) Limit
General Purpose Input
General Purpose Output
Control Input
Control Output
Trigger Output
STAGE1 - 4
SCALE1 - 4
AC100-240V
50/60Hz
Power cable (2m)
comes with main body.
MDR cable
JS-300
JB-400
G107
Part Name
Part Number
2 axis Stage Controller SHOT-302GS
4 axis Stage Controller SHOT-304GS
Control Pad
CJ-200A
Joy Stick
JS-300
Jog Operation Box
JB-400
Jog Dial
JD-100
MDR Cable
MDR14-CA-2.5
○
○
○
○
−
○
○
○
○
4 points
4 points
15 points
5 points
○
D15RA-CA cable
G108
D15D15A cable
G108
DHR-CA cable
G108
GSE-CA cable
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
Stepping Motor Stage
OSMS-ZF
SGSP-40/60YAW
OSMS-A/B
SGSP-ACT-B0
TAMM40/60
HPS
HDS
series
OSMS series
SGSP-80/120/160YAW
KST
TAMM100
series
Stages with built in Glass-scale Encoder
OSMS(CS)
KST(GS)
series
○
○
○
○
○
−
○
○
○
○
○
○
○
○
○
G108
G102
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Extensible Stage Controller HIT-M/S Code W9048
Stage control system with Master controller and from one to eight slave Axes.
◦Control with RS232C/USB/Ethernet interfaces is available.
◦Full closed loop control is possible when used in combination with a stage with built in glass-scale.
Guide
▶Sample programs are available for download from our website.
◦HIT sample
◦SGCommander 32-bit version for Windows ® (only for RS232C)
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
Attention
▶Power supply is DC+24V 1A. Depending on the number of stage axes,
rated current of 2A (single axis) to 9A (8 axes) is required. You need to
purchase the PAT-001-POW1 (AC adapter) or prepare an adapter separately.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Part Name
Extensible Stage Controller (Master)
Extensible Stage Controller (Slave)
LAN Cable
AC Adapter
Part Number
HIT-M
HIT-S
LAN-2
PAT-001-POW1
Actuators
Motoeized
Stages
■Primary Functions
■Optional
■Control Command
Light
Sources
Part Number HIT-M HIT-S
CJ-200A
−
Machine Origin Return
○
Controller Function ○ −
Number of Control Axes 8 −
JS-300
JB-400
−
−
Theoretical Origin Setting
Relative Position Drive
○
○
Index
Stored Program Control ○ −
JD-100
−
Absolute Position Drive
○
Feedback Control GS −
SJT-02
−
Jog Operation
○
Circular Interpolation Control ○ −
Linear Interpolation Control 3 axes −
■Performance Specifications
Position Appointment
Circular Interpolation Control
−
○
Guide
Driver Function − Micro-step
Coordinate Indication Range
−
Linear Interpolation Control
○
Controllers/Drivers
Micro-step (Max. Division) − 250
Driving Current (A/phase) − 0.1 − 1.1
Max. Travel to Set 134,217,727
Max. Driving Speed (pps) 500,000
Drive
Deceleration Stop
○
○
Softwares
■General Specifications
Min. Driving Speed (pps) 1
Acceleration/Deceleration Time (ms) 1 − 1,000
Emergency Stop
Speed Setting
○
○
Stepping Motor
Power Voltage
Power Consumption
DC24V
1A
24VA
■I/O Specification
Origin Sensor
○
Motor Free/Hold
Port Input
Port Output
○
○
○
AC Servo Motor
Cables
Operating Temperature 5 − 40°C
Storage Temperature −20 − 60°C
Ambient Humidity
20 − 80%RH
Proximity Sensor
CW (+) Limit
CCW (−) Limit
○
○
○
Stepping Motor Stage
Piezo
External Dimensions (W×H×Dmm) 130×120×50
Weight (kg) 0.62 0.63
■Interface
GP-IB
RS232C
−
○
General Purpose Input
General Purpose Output
Control Input
Control Output
Trigger Output
4 points
4 points
−
−
−
OSMS-A/B
OSMS-ZF
SGSP-40/60YAW
SGSP-ACT-B0
TAMM40/60
HPS
HDS
series
USB
○
D15RP-CA cable
Ethernet
○
X Translation
HIT System Chart
PC
USB cable
RS232C cable
LAN cable
USB
RS232C
ETHERNET
I/O
HIT-M
HIT-S
STAGE
SCALE
STAGE
SCALE
G108
D15D15A-CA cable
OSMS series
SGSP-80/120/160YAW
TAMM100
series
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
Sample softwaer
(download from website)
HIT sample
I/O control
external device
DC24V 1A
DC24V 1A
Link cable
DC24V 1A
Link cable
STAGE
SCALE
G108
D15D15A-CA cable
G108
Stages with built in Glass-scale Encoder
OSMS(CS)
series
□80mm
□85mm
□100mm
□120mm
Others
DC24V 1A
GSE-CA cable
Maximum 8 units
can be linked
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G103

Motion Control Products
Pulse Generating Controller
PGC-04
A 4-axis pulse generator type controller that can be connected to the various motor drivers.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦External control with USB and Ethernet interfaces are available.
◦Can be manually operated by a Handy Terminal (JS-300, JB-400, JD-100).
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
Attention
▶Cable and motor driver are sold separately. Please purchase 5-phase
stepping motor drivers SG-55M or prepare compatible driver of
customer choice.
▶Power supply is DC+24V 2A. You need to purchase the PAT-001-POW1
(AC adapter) or prepare an adapter separately.
Actuators
Motoeized
Stages
Light
Sources
Products Name
Pulse Generating Controller
Joystick Terminal
Jog Operation Box
Jog Dial
AC Adapter
Part Number
PGC-04
JS-300
JB-400
JD-100
PAT-001-POW
Index
■Primary Functions
■Optional
■Control Command
Controller Function
○
CJ-200A
−
Machine Origin Return
○
Guide
Controllers/Drivers
Number of Control Axes 4
Stored Program Control
○
Feedback Control
−
JS-300
JB-400
JD-100
○
○
○
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
○
○
○
Softwares
Stepping Motor
Circular Interpolation Control
Linear Interpolation Control
Driver Function
○
○
−
SJT-02
■Performaifications
−
Jog Operation
Position Appointment
Circular Interpolation Control
○
−
○
AC Servo Motor
Cables
Piezo
Micro-step (Max. Division)
Driving Current (A/phase)
■General Specifications
Power Voltage
−
−
DC24V
Coordinate Indication Range −
Max. Travel to Set 16,777,215
Max. Driving Speed (pps) 4,000,000
Min. Driving Speed (pps) 1
Acceleration/Deceleration Time (ms) 1 − 1,000
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
○
−
○
○
○
Power Consumption 1.4A
Operating Temperature 5 − 40°C
■I/O Specification
Motor Free/Hold
Port Input
○
○
Storage Temperature
−
Origin Sensor
○
Port Output
○
Ambient Humidity
20 − 80%RH
Proximity Sensor
○
External Dimensions (W×H×Dmm) 180×140×60
CW (+) Limit
○
Weight (kg) 1.3
CCW (−) Limit
○
X Translation
Theta Rotation
Goniometer
■Interface
GP-IB
RS232C
USB
−
○
−
General Purpose Input
General Purpose Output
Control Input
Control Output
Trigger Output
4 points
4 points
−
−
−
Vacuum
Ethernet
○
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
G104
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9084
System Diagram
5-phase Stepping Motor Driver
(ex.SG-55M)
5-phase Stepping Motorized Stage (ex.HPS60-20(X)-M5 etc.)
Application
Systems
Optics &
Optical
Coatings
Holders
PGC-55M Cable
Motor Cable: (Oriental Motor Co., Ltd.)etc
Bases
Manual
Stages
Actuators
PC
2-phase Stepping Motor Driver
(ex:A8576-0415Y)
2-phase Stepping Motorized Stages (ex.HPS60-20(X)-M2 etc.)
Motoeized
Stages
Light
Sources
RS232C Cable
LAN Cable
Index
RS232C
Ethernet
PGC-0415Y cable
Guide
(ex.ARD-K)
(ex.ARD-K)
cable
STEP Motorized Stages (ex.HPS60-20(X)-MA etc.)
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
PGC-04
Cables
Piezo
PGC-STEP Cable: PGC-ARD-2
AC Servo Driver
(ex.SGDV-2R9EP1A)
Motor Cable: CC030VAF2
*Supplied to the STEP Driver (Oriental Motor Co., Ltd.)
AC Servo Motorized Stages (ex.SGMV20-35(X))
X Translation
Theta Rotation
Goniometer
Vacuum
Options
PGC-ACS Cable: PGC-ACS-2
Motor Cable: JZSP-CF1M00-03-E (Yasukawa Electric Corporation)
Encoder Cable: JZSP-CMP00-03-E (Yasukawa Electric Corporation)
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G105

Motion Control Products
Joystick Terminal
Jog Dial
SJT-02
JD-100
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
SJT-02
A dedicated joystick terminal for the GSC-02 controller to manually operate a motorized stage.
Internal program memory allows automatic operation without using a PC.
Attention
▶Pin 1 of GSC-02 connector for use with the SJT-02 has an electrical
output of +24V. Under no circumstances should it be connected to
a PC. Although it has a protective circuit, be sure to disconnect
either RS232C or SJT-02, otherwise there is a risk of damage.
* If RS232C and SJT-02 are connected at the same time, neither of
them will function.
Specifications
Part Number
SJT-02
Type
Joystick
Power Supply
Supplied from controller
Display
LCD (16 digits × 2 lines)
External Dimensions [W×H×Dmm] 94×30×140
Weight [kg] 0.45
General Specifications
Catalog
Code
W9049
Power Supply
DC+24V
Supplied from a 2 axis stage controller (GSC-02/SHOT-602).
Operating Temperature 5 − 40°C
Ambient Humidity 20 − 80%RH (without condensation)
External Dimensions (W)94 × (H)30 × (D)140mm
Weight
560g (including a special cable)
Display
LDC 16 digits, 2 lines
Connecting Cable Attached special connecting cable (detachable)
Performance Specifications
Number of Control Axes 2 axes
Operation Mode
MANUAL (M) / TEACHING (T) / RUN (R)
EDIT (E) / MEM SW SET Mode
Coordinate Indication Range
X axis: Approx. −99999999 − +99999999 pulses
Y axis: Approx. −99999999 − +99999999 pulses
Coordinate Input Range
X axis: Approx. −16777214 − +16777214 pulses
Y axis: Approx. −16777214 − +16777214 pulses
X axis: Displayed left side of coordinate symbol
Limit Sensor Status
(“L” is displayed when detected.)
Y axis: Displayed left side of coordinate symbol
(“L” is displayed when detected.)
Speed Parameter Switchable among 10 steps
Min. Driving Speed (S) 1 − 20000pps
Max. Driving Speed (F) 1 − 20000pps
Acceleration /Deceleration Time (R) 0 − 1000mS
Coordinate Display Unit [PLS] [μm] [ ° ]
Program Memory Capacity 128 steps × 4 channels
Program Parameter
Wait time 0 − 25.5 [sec] Unit: 0.1 sec
Repeated 0 − 99999999 [times]
Origin Return Axes X axis only / Y axis only / Both axes
Motor Rotation Direction
X axis: Positive (POS) / Negative (NEG)
Y axis: Positive (POS) / Negative (NEG)
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
JD-100
W9085
Manual operation of motorized stages is possible using the JOG buttons or JOG dial.
The RATE button allows easy switching of the travel per click (2 steps).
Mode switching between SHOT-302GS/SHOT-304GS and switching of travel speed (4 steps) can be
performed at hand.
Functions
LCD Panel
MODE Button
RATE Button
AXIS-SEL
Button
SPEED Button
JOG+/− Button
Specifications
None
Catalog
Code
Switches between SHOT-302GS/SHOT-304GS modes.
Changes the travel per click.
(Normal RATE: 1 pulse/click, High RATE: 5 pulses/click)
Switches the motion axes (1 to 4 axes) using the jog dial.
Switches the travel speed in 4 steps set with the controller.
Operates in +/- direction while the respective button is
being pressed.
Part Number
JD-100
Type
Jog Dial
Cable
MDR14-CA-2.5 (purchase separately)
Display
None
External Dimensions [W×H×Dmm] 130×36×145
Weight [kg] 0.6
G106
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Joy Stick
Jog Operation Box
JS-300
JB-400
Catalog
Code
W9050
A dedicated joystick terminal for the GSC-02 controller to manually operate a motorized stage.
Internal program memory allows automatic operation without using a PC.
JS-300
◦Allows easy manual operation of a motorized stage
using a joystick.
Specifications
Part Number
JS-300
Type
Button operation
Cable
MDR14-CA-2.5 (purchase separately)
Display
LCD (16 digits × 4 lines)
External Dimensions [W×H×Dmm] 120×50×160
Weight [kg] 0.7
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Functions
LCD Panel
MODE Button
E-ORG Button
ZERO Button
Control Axis Switch Button
Joystick
M-ORG Button
Third axis Operating Switch
SPEED Button
STOP Button
JB-400
Display digits: 16 digits × 4 lines
Switches modes (SHOT-302GS/SHOT-304GS)
Returns to theoretical (electric) origin
Sets theoretical (electric) origin
Switches the operating axis of joystick (1, 2 or 3, 4 axes) (Enabled only for SHOT-304GS)
Joystick Controls 1, 2 or 3, 4 axes
Machine Origin Return
Operates third axis
Switches the travel speed (4 stages) set with SHOT-302GS/SHOT-304GS
Emergency stop
◦Enable manual operation of motorized stages. It also
has a program function.
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Functions
LCD Panel
Program Button
SPEED Button
MODE Button
ORG X/Y Button
Reset X/Y Button
STOP Button
JOG/Pulse Button
X axis / Y axis Control Button
CLEAR Button
Numeric Keypad (0 − 9)
SET Button
Display digits: 16 digits × 4 lines
Executes SHOT-302GS/SHOT-304GS internal programs
Switches the travel speed (4 stages) set with SHOT-302GS/SHOT-304GS
Switches between SHOT-302GS/SHOT-304GS models
Returns X/Y axis to machine origin
Sets theoretical (electric) origin of X/Y axis
Emergency stop
Switches between JOG operation and fixed pulse operation
When set to JOG operation:
Move while the button is being pressed
Resets the fixed pulse setting to zero
Inputs the number of fixed pulse
Completes setting of fixed pulse
Specifications
Part Number
JB-400
Type
Button operation
Cable
MDR14-CA-2.5 (purchase separately)
Display
LCD (16 digits × 4 lines)
External Dimensions [W×H×Dmm] 178×38×195
Weight [kg] 0.7
When set to fixed pulse operation:
Move for the registered number of pulses at each press of the button
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G107

Motion Control Products
Cables
Catalog
Code
W9052
Application
Systems
Optics &
Optical
Coatings
Cables for connecting between motorized stages and
controllers or drivers.
Select cables according to control methods or operating
environments.
◦Refer to compatible controllers/drivers and cables described on the
page of each motorized stage.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
D15RP-CA Cable
Controller side (15 pins)
D-sub15pin
(Male Type)
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND
Origin sensor
+VS
N.C.
N.C.
Limit sensor (+)
Limit sensor (−)
GND
Origin proximity sensor
+VS
D15D15A-CA Cable
Controller side (15 pins)
17JE-23150-02(D1)
(Male Type) DDK Ltd.
Stage side (15 pins)
17JE-13150-02(D1)A
(Female Type) DDK Ltd.
Pin Number
Pin Number
Orange/Black1
1 Motor lead
1 Motor lead
Orange/Red1 Inner shield
2 Motor lead
2 Motor lead
Light grey/Black1
3 Motor lead
3 Motor lead
Light grey/Red1
4 Motor lead
4 Motor lead
White/Black1
5 Motor lead
5 Motor lead
White/Red1
6 GND
6 GND
Yellow/Black1
7 Origin sensor
7 Origin sensor
Yellow/Red1
8 +VS
8 +VS
Pink/Black1
9 Autoconfig
9 Autoconfig
Pink/Red1
10 Reserve
10 Reserve
Orange/Black2
11 Limit sensor (+)
11 Limit sensor (+)
Orange/Red2
12 Limit sensor (−)
12 Limit sensor (−)
Light grey/Black2
13 GND
13 GND
Light grey/Red2
14 Origin proximity sensor
14 Origin proximity sensor
15 N.C.
Outer shield 15 N.C.
For the color of the cable wiring, it is marked
with an insulating color, dot color and number of dots.
(Reference) Rough guide of the minimum bending radius is 60mm.
Specifications
Brown
Red
Orange
Green
Black
Brown
Gray
White
Purple
Black
Stage side (12 pins)
RP17-13PA-12PC
(Male Type)
Hirose Electric Co., Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
Origin sensor
+VS
GND
Limit sensor (+)
Limit sensor (−)
F.G.
F.G.
Black
Outer shield
Black
(Reference) Rough guide of the minimum bending radius is 40mm.
MINI-CA-SG Cable
Driver side
terminal is
not processed
Stage side (12 pins)
RP17-13PA-12PC
(Male Type)
Hirose Electric Co., Ltd.
Pin Number
Brown
1 Motor lead
Red
2 Motor lead
Orange
3 Motor lead
Yellow
4 Motor lead
Green
5 Motor lead
Blue
6 N.C.
Purple
7 +VS
Gray
8 GND
White
9 Limit sensor (+)
Black
10 Limit sensor (−)
11 F.G.
Inner shield
12 F.G.
Outer shield
(Reference) Rough guide of the minimum bending radius is 40mm.
DAC-SG Cable
Driver side
terminal is
not processed
Inner shield
Outer shield
Multiple 13 core cable
Black
White
Red
Green
Yellow
Gray
Brown
Blue
Pink
Light Blue
Light Green
Orange
Purple
Inner shield
Outer shield
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Case
Stage side (15 pins)
17JE-13150-02 (D1)
Hood: 17JE-15H-1A
(Female Type) DDK Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND
Origin sensor
+VS
N.C.
N.C.
Limit sensor (+)
Limit sensor (−)
GND
Origin proximity sensor
+VS
Part Number Controller Side Stage Side
Cable Length
[m]
D15RP-CA-2 D-sub 15pin / male type RP17-13PA-12PC / 12pin 2
D15RP-CA-3 D-sub 15pin / male type RP17-13PA-12PC / 12pin 3
D15RP-CA-5 D-sub 15pin / male type RP17-13PA-12PC / 12pin 5
MINI-CA-SG-1 Unprocessed RP17-13PA-12PC / 12pin 1
MINI-CA-SG-2 Unprocessed RP17-13PA-12PC / 12pin 2
MINI-CA-SG-3 Unprocessed RP17-13PA-12PC / 12pin 3
MINI-CA-SG-4 Unprocessed RP17-13PA-12PC / 12pin 4
MINI-CA-SG-5 Unprocessed RP17-13PA-12PC / 12pin 5
D15D15A-CA-2 17JE-23150 / male type 17JE-13150 / female type 2
D15D15A-CA-3 17JE-23150 / male type 17JE-13150 / female type 3
D15D15A-CA-5 17JE-23150 / male type 17JE-13150 / female type 5
DAC-SG-2 Unprocessed 17JE-13150 / female type 2
DAC-SG-3 Unprocessed 17JE-13150 / female type 3
DAC-SG-4 Unprocessed 17JE-13150 / female type 4
DAC-SG-5 Unprocessed 17JE-13150 / female type 5
G108
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Catalog
Code
W9053
Cables for precision motorized stages with built in glass-scale encoder.
MDR14-CA-2.5 Cable
Controller side (14 pins)
Connector: 10114-3000PE
Shell: 10314-52F0-008
Sumitomo 3M Limited
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
Signal GND
+5V
RXD+
TXD+
STOP−
Signal GND
+5V
RXD−
TXD−
CONNECT−
Case
Blue
Red
Gray
White
Orange
Green
Brown
Purple
Black
Yellow
Inner shield
Outer shield
Stage side (14 pins)
Connector: 10114-3000PE
Shell: 10314-52F0-008
Sumitomo 3M Limited
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
Signal GND
+5V
RXD+
TXD+
STOP−
Signal GND
+5V
RXD−
TXD−
CONNECT−
Case
◦The MDR14-CA-2.5 cable is for connecting between
SHOT-302GS/ 304GS/SHOT-702 and JS-300/JB-400.
Specifications
Part Number Controller Side JS/JB side
Cable Length
[m]
MDR14-CA-2.5 10114-3000PE 10114-3000PE 2.5
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
DHR-CA-3 Cable
Controller side (15 pins)
Connector: 17JE-23150-02(D1)
Hood: 17JE-15H-1A-CF
(Male Type) DDK Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND
Origin sensor
+VS
Auto config
N.C.
Limit sensor (+)
Limit sensor (−)
GND
Origin proximity sensor
+VS
Clamp bracket
Specifications
Brown
Red
Orange
Yellow
Green
Gray
Green
Blue
White
Black
Green
Green
Purple
Inner shield
Outer shield
Stage side (10 pins)
HR10A-10P-10PC(73)
(Male Type)
Hirose Electric Co., Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
Clamp
Bracket
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
Auto config
Limit sensor power
GND
Limit sensor (+)
Limit sensor (−)
Part Number Controller Side Stage Side
Cable Length
[m]
DHR-CA-3 17JE-23150-02(D1) HR10A-10P-10PC(73) 3
F.G.
GSE-CA-3 Cable
Controller side (15 pins)
Connector: D02-M15SG-N-F1
Hood: DE-C8-J9-F1-1R
(Male Type)
Japan Aviation Electronics Industry, Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Signal GND
Signal GND
+5V
+5V
Alarm−
A+
A−
B+
B−
FG
Case
Specifications
Blue
Green
Red
Brown
White
Orange
Yellow
Purple
Gray
Black
Inner shield
Outer shield
Stage side (15 pins)
Connector: D02-M15SG-N-FO
Hood: DE-C8-J9-F1-1R
(Female Type)
Japan Aviation Electronics Industry, Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
A−
A+
B−
B+
Alarm−
+5V
Signal GND
FG
Case
Part Number Controller Side Stage Side
Cable Length
[m]
GSE-CA-3 D02-M15SG-N-F1 D02-M15SG-N-F0 3
D02-M15SG-N-F1 D02-M15SG-N-F0
GSEF-CA-3
(with ferrite core)
3
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Other Cables
Catalog
Code
W9054
DOS/V PC
(D-sub 9pin female type)
1
2
3
4
5
6
7
8
9
Specifications
RS232C Cable GP-IB Cable USB Cable
Sigma Koki controller
(D-sub 9pin male type)
1
2
3
4
5
6
7
8
9
Part Number
Cable Length
[m]
RS232C/STR-1.8 1.8
RS232C/STR-3 3
RS232C/STR-4.5 4.5
Specifications
Part Number
Cable Length
[m]
GP-IB-0.5 0.5
GP-IB-1 1
GP-IB-2 2
GP-IB-3 3
GP-IB-4 4
USB
A connector
male type
1
2
3
4
Frame
Specifications
Shield
1
2
3
4
Frame
2m
Fully connected straight cable
USB
B connector
male type
Part Number
Cable Length
[m]
USB-1 1
USB-2 2
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G109

Motion Control Products
Maintenance / Grease Replacement
AFA/AFB/AFE/YVAC
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Maintenance
To maintain smooth operation, grease condition needs to be inspected and checked periodically
and grease needs to be supplied if necessary.
Use of grease will prevent rust, extending product life cycle significantly.
Catalog
Code
W9005
Effect of Grease
Minimizes friction to enable smooth drive.
Grease Up Method
1 Wipe off old grease.
2 Pour grease to supply in a syringe or the like.
3 Move the entire travel several times to apply grease thoroughly.
4 Wipe off grease that runs over in step 3.
* Too much grease will cause dust to adhere. Wipe the excess grease
clean.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Guide
▶We will perform filling of grease (charged separately). Contact our
International Sales Division for more information.
Specifications
Attention
▶Handling of grease requires attention. Avoid contamination with
foreign substances, mixing with different type of grease or air, and
heat treatment.
Part Number AFA AFB
Motorized Stages Used
SGSP15 Series
SGSP20 Series
SGSP26 Series
SGSP33 Series
SGSP46 Series
SGSP65 Series
TAMM
Manufacturer THK CO., LTD. THK CO., LTD.
Operating Temperature Range [°C] −45 〜 +160 −15 〜 +100
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Replacement of Grease
Grease used for motorized stages can be replaced with grease for clean room environments or
grease for vacuum applications.
Replacement Sites
Motorized stage : Ball screw part, crossed roller part (TSDM/TAMM series)
Always contact our International Sales Division since grease used for each component (guide part /
screw part) is different.
Rotation stage : Cannot be replaced by customers. Contact our International Sales Division for more information.
Goniometer stage : Cannot be replaced by customers. Contact our International Sales Division for more information.
(Always contact our International Sales Division since grease used for each component is different for goniometer stages.)
Features
Low dust generation grease for clean room environments
Reduces burden for maintenance since it is hard to deteriorate
and has long life.
It may lose fluidity and get hard suddenly in low-temperature
environments.
Catalog
Code
W9006
Fomblin Vacuum Grease
Has excellent heat resistance, lubricity and compatibility
with other materials.
It has long life and is usable in high temperature (−20°C
〜 +250°C).
Specifications
Part Number AFE-GREASE-C YVAC-GREASE-C
Number of Axes [axis] 1 1
Manufacturer THK CO., LTD. Solvay Solexis
Name Low dust generation grease for clean room environments Fomblin Vacuum Grease
Part Number AFE YVAC
Operating Temperature Range [°C] −40 〜 +120 −25 〜 +250
G110
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Question Sheet
Motorized Stage System Question Sheet
To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Affiliation
(Organization Name)
Department
Quantity
Usage
Weight of
Sample, etc.
Table Size
Number of Axes
Resolution
Changing Motor
Name
TEL FAX E-mail
Country/Address
Project Name
Drawing number
Desired
Delivery Date
Research and development
For incorporation
(equipment / production)
(Full)
(Half)
Estimate
Budget
Part Number
Axis Direction
Changing Travel
(changing limit sensor position)
mm Travel
Load
Capacity
Positioning
Accuracy
Positional
Repeatability
Yes: byDate
X axis
Electromagnetic brake Reduction gear Other (AC servo)
* Write more detailed specifications here. (Rough illustration is acceptable.)
■Quotation ■Order
Date
XY axis Z axis
(Tentative name is okay)
No
JP Yen
Fill in this column if you desire to modify a product listed on the catalog or if you have a base product.
Combination
mm
kgf
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Others
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Sigma Koki Co., Ltd.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G111

Motion Control Products
Piezo Guide
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
For the guide mechanism, Sigma fine stages adopted a guide system that utilizes elastic deformation of metals
and a mechanism to increase deformation of piezo elements. These originally designed stages achieved readable
resolution of 10nm during closed loop control, ideal for uses that require high-speed high-precision positioning.
Structure of Sigma Fine Stage
Displacement
Magnification Method
Piezo actuator and
displacement magnification
mechanism offer a large
operating range.
Displacement
Force
Digital Sensor
Closed loop control is
possible with a digital
sensor that does not
require any high precision
analog amplifier or AD
conversion circuit.
SFS-H Internal Structural Drawing
Upper plate
X axis mechanism
Baseplate
Piezo
actuator
Sensor counter board
Digital sensor
Piezo actuator
input connector
Digital sensor output connector
Operating Environment of Sigma Fine Stage
Use fine stages within the following operating environment
temperature range. Contact us separately if you desire to
use the stages outside the operating environment temperature
range.
*Operating environment
Temperature: 10°C − 30°C
Humidity: 20% − 60%
(without condensation)
*Recommended environment
Temperature: 20°C ±1°C
Humidity: 40% or lower
Since durability of piezo elements used in the SFS/SFS-H
stage series will deteriorate in high humidity environments,
use them in the above environments.
Guide
Sigma Fine System Chart
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
GP-IB
GP-IB cable
PC
Sample software
(download from website)
SGCommander
LabVIEW
USB cable
RS232C cable
RS232C USB
USB RS232C
Function generator
BNC-BNC cable
Analog input
AC100V
50/60Hz
AC100V
50/60Hz
CJ-200A
FINE-503
PIEZO 1/2/3 SENSOR 1/2/3
FINE-01γ
CJ-200A PIEZO SENSOR
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Single axis
(comes with cables)
SFS-H40X
SFS-H40Z
FINE cable
DS1 cable
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
For objective lens
(comes with cables)
SFS-OBL-1
SFS-OBL-2
SFAI-OBL-1-R
Single axis
SFS-H60X
SFS-H60Z
2 axes
SFS-H60XY
SFS-120XY(WA)
3 axes
SFS-H60XYZ
G112
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Accuracy Measurement Example: Sigma Fine Stage System SFS-H (Linear Stage)
High Speed Convergence Data
The following graph shows the hysteresis
curve unique to piezo actuators during open
loop control travel.
100
80
1st time
2nd time
Travel
Application
Systems
Optics &
Optical
Coatings
Holders
Displacement (µm)
60
40
20
Bases
0⇔75μm pulse rate (16Hz)
Closed loop control
by SFS-H60X at 150g load
(Reference)
(Reference)
0⇒1μm step convergence data (15msec)
Closed loop control
by SFS-H60X at 150g load
0
−20
−10 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150
Voltage (V)
(Reference)
Manual
Stages
Actuators
100
1st forward 5th forward
90
1st backward 5th backward
2nd forward 6th forward
80
2nd backward 6th backward
3rd forward 7th forward
70
3rd backward 7th backward
60 4th forward
4th backward
50
40
30
20
10
0
0 20 40 60 80 100
Command Value [µm]
Travel [µm]
Linearity
0⇔80μm linearity within 0.3%
Closed loop control
by SFS-H60X at 150g load
Measured Value [µm]
0.30
0.25
0.20
0.15
0.10
0.05
0.00
Positional Repeatability
Positional Repeatability (Forward)
Positional Repeatability (Backward)
0 10 20 30 40 50 60 70 80 90 100
Command Position [µm]
0⇔80μm positional repeatability 50nm or lower
by SFS-H60X at 150g load
Characteristics when feed amount is small in
closed loop control. Hysteresis disappears
in open loop control.
Displacement (µm)
6
5
4
3
2
1
Characteristics of Fine Feed
0
0 1 2 3 4 5 6
Indicated Value (µm) (Reference)
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
Straightness
Deviation from the straight line in the
direction of travel.
Pitch
Tilt around the axis in the horizontal plane
perpendicular to the direction of travel.
Characteristics of Yaw
Rotation around the axis in the vertical plane
perpendicular to the direction of travel.
AC Servo Motor
Cables
Piezo
Error (µm)
0.5
0.4
0.3
0.2
0.1
0
-0.1
-0.2
-0.3
-0.4
-0.5
0 8 16 24 32 40 48 56 64 72 80
Machine Position [µm] (Reference)
Pitch (″)
1
0.5
0
-0.5
-1
-1.5
-2
-2.5
1st time
2nd time
3rd time
-3
-10 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150
Voltage (V)
(Reference)
Follow-up example with Respect to Analog Input: SFS-H (Linear Stage) *Controlled by FINE-01γ
Yaw (″)
1
0.5
0
-0.5
-1
-1.5
-2
-2.5
1st time
2nd time
3rd time
-3
-10 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150
Voltage (V)
(Reference)
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Displacement (µm)
-10.6
-10.8
-11
-11.2
-11.4
-11.6
-11.8
-12
Capacitive sensor (user machine)
Position command value
Displacement (µm)
30
20
10
0
-10
-20
-30
-40
High Speed Convergence Data
Capacitive sensor (user machine)
Position command value
Input waveform: Navy/Output waveform: Light blue
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
-12.2 0 5 10 15 20 25
Time (sec)
0 0.4 0.8 1.2 1.6
0.2 0.6 1 1.4 1.8 2
Time (sec)
SFS-H40X
Staircase wave input/output waveforms
(Step 50nm 20-step staircase wave)
SFS-H40X
Saw-tooth wave input/output waveforms
(Uniform motion 35μm1Hz)
SFS-H40X
Rectangular wave input/output (30Hz)
SFS-H40X
Sine wave input/output (30Hz)
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G113

Motion Control Products
Sigma Fine (Piezo) Stages (high stiffness type)
XY Piezo Stages Aperture Type
SFS-H
SFS-120XY(WA)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
These piezo stages achieved fine movement of theoretical resolution of 1nm, offering high
precision, high stiffness and high speed with adoption of digital sensors.
SFS-H
◦These piezo stages offer high precision and high resolution positioning
because full closed loop control is possible with digital sensors.
◦With piezo elements used as actuators, travel between 90μm − 100μm
in open loop control, and fine movement of theoretical resolution of 1nm
are possible.
◦Readable resolution of 10nm is achieved during full closed loop control
with adoption of a digital sensor (micro-displacement sensor based on
the frequency digital conversion method) used as position detection
sensors.
◦Sigma Koki controller FINE series offers high speed. G117
Regarding pulse rate, SFS-H (linear) achieved 10 − 15Hz, or 25Hz when
the current FINE-01γ analog input is used.
Motoeized
Stages
Outline Drawing
Light
Sources
Index
SFS-H40X(CL)
Hexagon socket head cap screw M3×10…2 screws
40
16 16
6-M3 depth 4
2-φ2 +0.01
0
SFS-H40Z(CL)
Hexagon socket head cap screw M3×10…2 screws
40
16 16
2-φ2 +0.01
0
32
8
16 16
40
32
8
16 16
40
Guide
DS cable
2
FINE cable
4.5
FINE cable
2.5
6-M3 depth 4
DS cable
7
Controllers/Drivers
Softwares
Stepping Motor
4
7
20
2-φ3.5 mounting hole
32
φ6 counterbore
Travel direction
6
2-φ3.5 mounting hole
φ6 counterbore
32
4
25
Travel direction
AC Servo Motor
Cables
Piezo
SFS-H60X(CL)
Hexagon socket head cap screw M4×10…4 screws
60
25 25
16 16
8-M3 depth 5
2-φ2 +0.01
0
SFS-H60XY(CL)
Hexagon socket head cap screw M4×10…4 screws
(18.3) 60
25 25
8-M3 depth 5
16 16
2-φ2 +0.01
0
50
16 16
25 25
60
50
16 16
25 25
60
Y axis
travel direction
(11)
(11)
11 12
4-M4 depth 5
6.3
6.3
4-M4 depth 5
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
9.9
4.3
50
Travel direction
6
23
4-φ4.5 mounting hole
φ8 counterbore
Specifications
Part Number SFS-H40X(CL) SFS-H40Z(CL) SFS-H60X(CL) SFS-H60XY(CL)
Travel 90μm±15% 100μm±15% 100μm±15% 100μm±15%
Table Size [mm] 40×40 40×40 60×60 60×60
Actuator Piezo actuator Piezo actuator Piezo actuator Piezo actuator
Weight [kg] 0.28 0.28 0.4 0.43
Theoretical Resolution (open-loop) [nm] 1 1 1 1
Resolution (closed-loop) [nm] 10 10 10 10
Linearity [%] 0.3 or lower 0.3 or lower 0.3 or lower 0.3 or lower
Perpendicularity (Horizontal Direction) [μm] 1 1 1 1
Positional Repeatability [μm] 0.1 or lower 0.1 or lower 0.1 or lower 0.1 or lower
Load Capacity [N] 9.8 (1.0kgf) 6.7 (0.7kgf) 19.6 (2.0kgf) 14.7 (1.5kgf)
Micro-displacement Sensor Digital Sensor Digital Sensor Digital Sensor Digital Sensor
Compatible Cable Attached cable (2m) Attached cable (2m)
9.5
4.3
50
X axis travel direction
FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
6
23
4-φ4.5 mounting hole
φ8 counterbore
FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
G114
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Catalog
Code
Catalog
Code
W9054
W9055
Outline Drawing
SFS-H60Z(CL)
Hexagon socket head cap screw M4×10…4 screws
60
25 25
16 16
4-M4 depth 5
2-φ2 +0.01
0
SFS-H60XYZ(CL)
Hexagon socket head cap screw M4×10…4 screws
(19.3)
60
25 25
16 16
4-M4 depth 5
2-φ2 +0.01
0
Application
Systems
Optics &
Optical
Coatings
50
8.9
4.1
11 11
50
SFS-120XY(WA)
16 16
25 25
8-M3 depth 5
5.5
28
60
(11)
Travel direction
4-φ4.5 mounting hole
φ8 counterbore
8-M3 depth 5
4-φ4.5 mounting hole
φ8 counterbore
◦A high precision positioning XY axis stage with 50×50mm aperture fitted with a piezo element as an actuator and digital
sensor for position feedback, suitable for fine movement of samples under a microscope.
◦Can be driven with the Sigma fine stage controller FINE-503. Since the controller supports RS232C, GP-IB (FINE-503
only) and USB interfaces, position control can be performed easily from a PC using the software for positioning & measurement
SGEMCSE, SGTERME and SGSFSXE.
◦Ideal for applications such as incorporation into various types of microscopes, precision measurement, semiconductor
test equipment, high-precision mask alignment, scanning interferometer, image processor, and biotechnology systems.
50
11
12
12
4.3
12.6 12.6
50
16 16
25 25
6
40
60
(11)
Travel direction
X
Z
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Outline Drawing
SFS-120XY(WA)
Hexagon socket
head cap screw M4×8…4 screws
120
100
60
50 4-M4 through
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Travel direction
100
50
58
100
120
X
Y
(13)
18 7 10 16
Specifications
Part Number SFS-H60Z(CL) SFS-H60XYZ(CL) SFS-120XY(WA)
Travel 100μm±15% 100μm±15% 100μm±10%
Table Size [mm] 60×60 60×60 120×120
Actuator Piezo actuator Piezo actuator Piezo actuator
Weight [kg] 0.33 0.63 1.2
Theoretical Resolution (open-loop) [nm] 1 1 1
Resolution (closed-loop) [nm] 10 10 10
Linearity [%] 0.3 or lower 0.5 or lower −
Perpendicularity (Horizontal Direction) [μm] 1 1 1 or lower
Positional Repeatability [μm] 0.1 or lower 0.15 or lower 0.1 or lower
Load Capacity [N] 9.8 (1.0kgf) 9.8 (1.0kgf) 19.6 (2.0kgf)
Micro-displacement Sensor Digital sensor Digital sensor Digital sensor
Compatible Cable
FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
7
6.5
FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
100
3.5
19.5
20
4-φ4.5 mounting hole
φ8 counterbore
FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
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G115

Motion Control Products
Catalog
Piezo Actuator for Objective Lens SFS-OBL (Upright)/SFAI-OBL (Inverted) Code W9056
(SFS-OBL-1 only)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Objective lens actuator for inverted microscope employing a piezo element as actuator and digital
sensor for feedback.
◦Compact, and enabling high-speed high-resolution positioning.
◦Travel is 100μm at open loop.
◦Two types of erected model and inverted model are available for
incorporation into various types of microscopes.
◦In the case of the Sigma fine stage series, these actuators can be
driven with the controller (FINE-01γ/503(CL)). Since RS232C,
GP-IB (FINE-503 only) and USB interfaces are supported, position
control can be performed easily from a PC using the software for
positioning & measurement SGEMCSE, SGTERME and SGSFSXE.
Guide
▶Adapters compatible with screw sizes of other manufacturers’ objective lenses
are also available.
▶SFS-OBL-2 uses a metal enclosure type piezo actuator to improve environment
resistance such as humidity compared to SFS-OBL-1.
Motoeized
Stages
Light
Sources
Outline Drawing
SFS-OBL-1
23
(68.5)
φ36.4
SFS-OBL-2
23
(68.5)
φ36.4
SFAI-OBL-1R
60.8
42
[Accessory] Special adapter
26.5
19.5 7
Index
Guide
Controllers/Drivers
4.2
45
8.1 25.5
7
φ32
29.5 20
φ40
OBL-ADP-M**A
(2)
31
Travel
direction
OBL-ADP-M**B
4.2
55
8.1 25.5
7
φ32
29.5 20
φ40
OBL-ADP-M**A
(2)
41
Travel
direction
OBL-ADP-M**B
30 40
19.5
20
15.5 (2)
(2)
M5 depth 10
φ10
OBL-ADP3-M**B
Travel
direction
M5
OBL-ADP3-M**A
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number SFS-OBL-1 SFS-OBL-2 SFAI-OBL-1R
Travel 100μm±15% 100μm±15% 100μm±15%
Objective Lens Diameter [mm] Diameter φ39 or less Diameter φ39 or less Diameter φ39 or less
Dimensions [mm] (W)75.5 × (H)45 × (D)40 (W)75.5 × (H)55 × (D)40 (W)60.8 × (H)30 × (D)40
Actuator Piezo element Piezo element Piezo element
Weight [kg] 0.15 0.24 0.15
Theoretical Resolution (open-loop) [nm] 1 1 about 0.8
Resolution (closed-loop) [nm] 10 10 10
Straightness (Xy Xz Yx Yz) [μm] 1 or lower 1 or lower 0.2 or lower
Positional Repeatability [μm] 0.1 or lower 0.1 or lower 0.1 or lower
Load Capacity [N] − − 4.9 (0.5kgf)
Micro-displacement Sensor Digital sensor Digital sensor Digital sensor
Compatible Adapter OBL-ADP-** OBL-ADP-** OBL-ADP3-**
Accessories Cable (2m) Cable (2m) Cable (2m), four special lift spacers
X Translation
Theta Rotation
Goniometer
Vacuum
Options
OBL-ADP-MA OBL-ADP-MB OBL-ADP3-MA OBL-ADP3-MB
φ36
φ32
Objective Lens Adapters
14.5
3 4.5
φ38
B
A
A
2
4
φ28
φ32
φ38
φ30
φ28
14.5
2 4.5
φ38
B
A
A
2
9
φ28
φ30
φ38
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
SFS-OBL Compatible Adapters
Part Number
Mounting Screw Size
[mm]
A
[mm]
B
[mm]
OBL-ADP-M20.32A Microscope side M20.32 M20.32 P=0.706 (W0.8×1/36) 15
OBL-ADP-M20.32B Objective lens side M20.32 M20.32 P=0.706 (W0.8×1/36) −
OBL-ADP-M25.0A Microscope side M25.0 M25.0 P=0.75 20
OBL-ADP-M25.0B Objective lens side M25.0 M25.0 P=0.75 −
OBL-ADP-M26.0A Microscope side M26.0 M26.0 P=0.706 (W26.0×1/36) 21
OBL-ADP-M26.0B Objective lens side M26.0 M26.0 P=0.706 (W26.0×1/36) −
SFAI-OBL Compatible Adapters
Part Number
Mounting Screw Size
[mm]
A
[mm]
B
[mm]
OBL-ADP3-M20.32A Microscope side M20.32 M20.32 P=0.706 (W0.8×1/36) 15
OBL-ADP3-M20.32B Objective lens side M20.32 M20.32 P=0.706 (W0.8×1/36) −
OBL-ADP3-M25.0A Microscope side M25.0 M25.0 P=0.75 20
OBL-ADP3-M25.0B Objective lens side M25.0 M25.0 P=0.75 −
OBL-ADP3-M26.0A Microscope side M26.0 M26.0 P=0.706 (W26.0×1/36) 21
OBL-ADP3-M26.0B Objective lens side M26.0 M26.0 P=0.706 (W26.0×1/36) −
G116
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Catalog
SFS Controllers FINE Code W9057
Controllers with built-in piezo drivers for single axis / 3 axes.
FINE-01γ
FINE-503(CL)
■Primary Functions
Part Number FINE-01γ FINE-503(CL)
Controller Function
○
Number of Control Axes 1 3
Stored Program Control
○
Feedback Control
Digital sensor
■General Specifications
Power Voltage
AC100V ±10%
50/60Hz
Power Consumption
50VA
Operating Temperature 10 − 30°C
Storage Temperature −20 − 60°C
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 225×118×250 270×118×297
Weight (kg) 3.5 5.3
SFS Software
■Interface
GP-IB − ○
RS232C
○
USB
○
Analog input ○ −
■Optional
CJ-200A
○
SKBNC-BNC-3.0 ○ −
■Performance Specifications
Coordinate Indication Range ±999,999nm
Max. Travel to Set
±999,999nm
◦These controllers are fitted with digital sensor input for
each axis, enabling closed loop control by correcting
hysteresis curve unique to piezo.
◦Being connected to a PC via RS232C, GP-IB, or USB
interface, the FINE-503(CL) allows control of a fine stage
by simple commands sent from a PC.
◦In addition to PC control via RS232C or USB interface,
the FINE-01γ enables high-speed control synchronized
with analog signal input.
Part Name
Part Number
1 axis SFS Controller with Analog Input Function FINE-01γ
3 axes SFS Controller FINE-503(CL)
Control Pad
CJ-200A
FINE Cable
FINE-CA-3
DS Cable
DS1-CA-3
BNC-BNC Cable
SKBNC-BNC-3.0
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
○
○
○
○
○
−
−
−
○
−
−
○
−
−
−
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Free Software|SGCommander (for RS232C) Windows ® Version
Free software is available to operate your controller easily from a PC. Each axis of a connected motorized stage can be
moved using buttons on the screen. The software can be downloaded from our website.
(1) Jog operation
(3) Homing control (4) Travel control
LabVIEW application is
available for LabVIEW
users.
(2) Speed specification
Simple operations are possible such
as travel by specifying an axis, homing
or jog operation.
Free Application
LabVIEW (for v.5.1/v.6i/v.7.1/v.8.6/v.2010) RS232C/GP-IB
Port number
PortInit.vi
Stage drive shaft number
SetSpeed.vi Move.vi
Minimum speed (pulse/sec) Acceleration time (ms) Number of pulses per travel
Maximum speed (pulse/sec) Drive direction (T: +, F: -)
Controllers such as SHOT-30*/702 and
FINE-**, which have a built-in program
function, allow editing of programs
from a PC. Since data can be
downloaded/uploaded from/to Excel
sheets, it is easy to edit programs. In
addition, upload of memory switch or
download mode is available.
Other: 30 Day Trial Version (SGEMCSE/SGTERME)
Trial Version
SGEMCSE.....SGEMCSE is software for collecting data or measuring using
G025 automatic positioning equipment, measuring instrument or
controller, and is offered
30 days for free.
SGTERME.....It allows command input
G024 using Excel for easy
program making.
SGTERME is ideal
software to link with
various devices, and is
offered 30 days for free.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
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G117

Motion Control Products
Catalog
ECS Positioners ECS series Code W9200
Application
Systems
Optics &
Optical
Coatings
Holders
With Industrial Line positioners, attocube has genuinely combined highest precision piezodrive
technology with extremely rugged, yet cost effective design.
◦All ECS positioners of the Industrial Line are dedicated for operation at ambient temperature and depending on the model
for pressures ranging from atmospheric to UHV.
◦The ECS drive series features implemented crossed roller bearings and is thus specified for high loads of up to several
kilograms and guiding errors of less than 0.1mrad in pitch, yaw, and roll.
◦This powerful performance is supplemented by travel ranges up to 50mm, step sizes as small as 50nm, and optional
position sensor for closed loop operation with 1nm resolution. Attocube’s Industrial Line positioners are available in a wide
variety of designs, sizes, and travel ranges and can be stacked directly on top of each other for multi axis operation.
Bases
Specifications
Manual
Stages
Exterior
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
Products Name X axis positioner X axis positioner X axis positioner Goniometer Goniometer Rotator Rotator
Part Number ECS3030 ECS3080 ECS5050 ECGt5050 ECGp5050 ECR3030 ECR5050
Position Resolution 1nm 1nm 1nm 0.000001° 0.000001° 0.00001° −
Closed-loop
travel properties
Position Repeatability 50nm 50nm 50nm ±0.00005° ±0.00005° ±0.0005° −
Accuracy
< 0.01%
of travel range
< 0.01%
of travel range
< 0.01%
of travel range
≒0.001° ≒0.001° ≒0.002° −
Open-loop Minimum step size 50nm 50nm 50nm 0.0001° 0.0001° 0.0004° 0.0002°
travel properties Fine positioning range 1.6μm 1.6μm 1.6μm 0.0014° 0.0011° 0.012° 0.006°
Travel Range 20mm 50mm 30mm 10° 10° 360° 360°
Table Dimensions [mm] 30×30 30×80 50×50 50×50 50×50 30×30 50×50
Positioning Slide
Crossed Roller
Bearing
Crossed Roller
Bearing
Crossed Roller
Bearing
Crossed Roller
Bearing
Crossed Roller
Bearing
Ball Bearing
Ball Bearing
Aluminum 0.029 0.078 0.070 0.137 0.137 0.28 0.1
Weight [kg]
Stainless steel 0.051 0.147 0.247 0.247 0.247 0.66 0.215
Maximum Travel Speed 4.5mm/sec 4.5mm/sec 4.5mm/sec ≒1°/sec ≒1°/sec ≒10°/sec ≒5°/sec
Load Capacity (horizontal mounting) 9kg 24kg 15kg 1kg 1kg 2kg 2kg
* Closed-loop properties are available if “encoder option” is selected. For ordering, add suffix “/NUM” after the model number.
AC Servo Motor
Cables
Piezo
Control of Industrial Line Positioners—ECC100
The three axes controller ECC100 is used for driving all ECS positioners either in open loop or
closed loop mode, depending on the corresponding positioner model.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Controller Hardware
Part Number
ECC100
Chassis [mm]
about (W)210 × (H)50 × (D)210
Weight [kg] 1.9
Power supply
100/115/230V, 50−60Hz
Power consumption
max. 100W
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Software features
The ECC100 is delivered with a basic software package providing
windows based software including LabView driver set and DLL.
A dedicated software package /PRO providing enhanced controller
functionality can be upgraded at any time. The /SYNC option offers
the use of an Ethernet interface and allows for using the controller
with Epics drivers.
Output Signals
Stepping - voltage range
Stepping - frequency range
Stepping - maximum current
Resolution of signal generation
Output connectors
0 − 45V
0 − 5kHz (1 axis)
0 − 2kHz (3 axes simultaneously)
>5A Peak
680μV (16 bit)
SubD 15 connectors
G118
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Motion Control Products
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Motion Control Products
I N D E X
Quality Assurance
We verify the working accuracy when stage assembly is
completed. All products we ship are compliant to JIS or
have passed company regulations.
Serial Number
A sticker like the one shown in the picture is
affixed onto Sigma Koki products. It shows
information such as our company logo, part
number, and serial number.
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Motion Control Products
Motorized Stages Guide
Measurement of Linear Stage Accuracy
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Positional Accuracy
Positioning is performed
successively from the
reference position in one
direction at a fixed
interval across the range
of travel. The difference
between the target
values and measured
values at each of the
positioning points is
calculated, and the
difference between the
minimum and maximum
values is taken to be the
positioning accuracy.
Positioning Accuracy
Multiple
positioning
Target position
Difference between min. and max. values
Positioning is performed
multiple times in the (+)
forward and (–)
backward directions on
any position (e.g. both
ends or center point) of
the stage, and the mean
value of the deviation
amount with respect to
the stop position is
calculated.
The maximum of the
numerical values is taken
to be lost motion.
Lost Motion
Bidirectional
positioning
Targetposition
Mean value of multiple positionings
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Positioning is performed
multiple times from the
same direction on any
position (e.g. both ends
or center point) of the
stage, and the maximum
value of the deviation
amount with respect to
the stop position is
calculated.
The maximum of those
numerical values is taken
to be positional
repeatability.
Positional Repeatability
Max. error
Multiple
positioning
Target position
A fixed load is applied to
the (+) forward or (–)
backward direction on
any position (e.g. both
ends or center point) of
the stage.
The total deviation in the
respective direction at
that time is taken to be
backlash.
Backlash
Deviation by (-)
backward direction load
Deviation by (+)
forward direction load
Stop position
Deviation in both directions
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Working Accuracy
Running Parallelism
Orthogonality of Motion
Measure the working displacement of the Y axis when referenced
to the X axis of the XY axis stage with a square. The displacement
at this time is taken to be the orthogonality of motion.
Perpendicularity of Motion
Place a dial gauge on the Z stage, and measure the displacement
with respect to a vertical plate. The displacement at this time is
taken to be the perpendicularity of motion.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
This is the displacement in the height
Max. displacement value
direction between the stage mounting
surface and the travel guide of the stage.
The displacement in the vertical direction of the table during stage
motion along the full stroke is taken to be the running parallelism.
(Reference) Measurement Result (OSMS20-35)
1 2 3 4 5 6 7 8 9
Target Position [μm] 0 2500 5000 7500 10000 12500 15000 17500 20000
Positioning Direction ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓
Position Deviation [μm] 1st time 0.0 –1.2 –0.1 –0.5 0.2 –0.8 –0.3 –0.5 –0.1 –1.4 –0.4 –1.1 –1.7 –2.3 0.3 0.1 –1.5 –1.8
(Measured Value − Target Position) 2nd time –0.6 –1.2 –0.2 –0.4 0.1 –0.7 –0.2 –0.6 –0.3 –1.4 –0.8 –0.9 –1.7 –2.5 0.0 –0.1 –1.5 –1.9
3rd time –0.4 –0.9 –0.1 –0.8 0.2 –1.3 –0.4 –0.7 –0.1 –1.3 –0.8 –1.2 –1.5 –2.6 0.3 0.0 –1.5 –1.9
4th time –0.2 –1.6 –0.3 –0.6 –0.2 –0.9 –0.4 –0.6 –0.3 –1.2 –0.8 –1.2 –1.5 –2.5 0.3 –0.2 –1.5 –2.0
5th time –1.0 –1.2 –0.3 –0.6 0.0 –1.4 –0.5 –0.6 –0.2 –1.2 –0.6 –1.1 –1.6 –2.6 0.2 –0.1 –1.7 –2.0
Mean Position Deviation X –0.44 –1.22 –0.20 –0.58 0.06 –1.02 –0.36 –0.60 –0.20 –1.30 –0.68 –1.10 –1.60 –2.50 0.22 –0.06 –1.54 –1.92
Standard Deviation X 0.38 0.25 0.10 0.15 0.17 0.31 0.11 0.07 0.10 0.10 0.18 0.12 0.10 0.12 0.13 0.11 0.09 0.08
X+S –0.06 –0.97 –0.10 –0.43 0.23 –0.71 –0.25 –0.53 –0.10 –1.20 –0.50 –0.98 –1.50 –2.38 0.35 0.05 –1.45 –1.84
X−S –0.82 –1.47 –0.30 –0.73 –0.11 –1.33 –0.47 –0.67 –0.30 –1.40 –0.86 –1.22 –1.70 –2.62 0.09 –0.17 –1.63 –2.00
Lost Motion B=X↑−X↓ 0.78 0.38 1.08 0.24 1.10 0.42 0.90 0.28 0.38
Maximum (Position Deviation) Value S↑+S↓+|B| 1.41 0.63 1.56 0.42 1.30 0.72 1.12 0.52 0.55
Wobble per Rotation 1.00 0.80 0.80 0.90 0.70 1.60 2.60 1.90
■Result Maximum Lost Motion 1.10μm
Average Lost Motion
0.62μm
Positional Repeatability
Unidirectional Positioning ↑ 0.77μm
↓ 0.62μm
Bidirectional Positioning 1.56μm
Positioning Accuracy
2.97μm
Error per Rotation (maximum) 2.60μm
G004
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Moment Stiffness (Pitch/Yaw/Roll)
Moment stiffness is the stage strength against load exerted at a point away from the center of the table face.
(The center of the table face does not match the center of gravity of work.)
It indicates the degree of tilt of the table face (sec) when 1N load is exerted at a point 1cm away from the center of the stage
face.
Yaw
Pitch Yaw Roll
Application
Systems
Optics &
Optical
Coatings
Holders
Pitch
Bases
Roll
Manual
Stages
Angular Accuracy
Pitch
Pitch is the angle displacement of the table face in the pitch direction
while the stage is in motion.
It indicates the maximum angle displacement during full travel.
Parallelism
It indicates the parallelism of the table fixed on the stage against the
base plane.
Yaw
Yaw is the angle displacement of the table face in the yaw direction
while the stage is in motion.
It indicates the maximum angle displacement during full travel.
Actuators
Motoeized
Stages
Light
Sources
Index
(Reference) Measurement of XY axis Stage Accuracy
Positioning Accuracy Positional Repeatability Lost Motion
Error [µ]
Error [µ]
Error [µ]
150
100
50
0
12
8
4
0
12
8
4
0
OSMS20-85 OSMS26-200 OSMS33-300
0 50 100
Load Factor [%]
0 50 100
Load Factor [%]
0 50 100
Load Factor [%]
Single axis X axis of XY Y axis of XY
Error [µ]
Error [µ]
Error [µ]
150
100
50
0
12
8
4
0
12
8
4
0
0
0 50 100 0 50
100
Load Factor [%]
0 50 100
Load Factor [%]
0 50 100
Load Factor [%]
Error [µ]
Error [µ]
Error [µ]
250
200
150
100
50
12
8
4
0
12
8
4
0
Load Factor [%]
0 50 100
Load Factor [%]
0 50 100
Load Factor [%]
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Higher load factor at the travel
end of motorized stages
increases the deflection on
Y axis, resulting in extremely
poor positioning accuracy.
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G005

Motion Control Products
Motorized Stages Guide
Measurement of Rotation Stage Accuracy
Application
Systems
Optics &
Optical
Coatings
Positional Accuracy
Positioning Accuracy
Reference position
Positional Repeatability
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Max. error
Multiple positioning
Target position
Positioning is performed successively from the reference position in
one direction at a fixed interval across almost the entire range of travel.
The difference between the target values and measured values at each
of the positioning points is calculated, and the difference between the
minimum and maximum values is taken to be the positioning accuracy.
Lost Motion
Max. error
Multiple positioning
Target position
Positioning is performed multiple times from the same direction on
any position of the stage, and the maximum value of the deviation
amount with respect to the stop position is calculated.
The maximum of those numerical values is taken to be positional
repeatability.
Backlash
Light
Sources
Bidirectional positioning
(+) forward direction load
Index
Bidirectional positioning
Target
position
Mean value of multiple
positioning results
(-) backward direction load
Target
position
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Positioning is performed multiple times in the (+) forward and (–)
backward directions on any position (e.g. both ends or center
point) of the stage, and the mean value of the deviation amount
with respect to the stop position is calculated.
The maximum of the numerical values is taken to be lost motion.
Working Accuracy
Wobble
A fixed load is applied to the (+) forward or (–) backward direction
on any position of the stage.
The total deviation in the respective direction at that time is taken
to be backlash.
Concentricity
Cables
Piezo
Ideal rotation axis
Deviation between the two axes
Actual rotation axis
Displacement in height direction
between the rotary table and
the mounting base surface
Reference plane
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Wobble is the maximum displacement in the height direction
between the rotary table and the mounting base surface when the
rotation stage is rotated once.
(Reference) Measurement Result (SGSP-60YAW-0B)
Concentricity is the difference between the ideal rotation center
and the actual rotation center when the rotation stage is rotated
once.
0 1 2 3 4 5 6 7 8 9 10 11 12
Target Position [ ° ] 0 29 58 87 116 145 174 203 232 261 290 319 348
Positioning Direction ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓ ↑ ↓
Position Deviation [ ° ] 1st time 0.000 0.015 –0.009 0.003 –0.010 –0.001 –0.013 –0.004 –0.012 0.001 –0.007 0.009 –0.007 0.009 0.000 0.012 0.004 0.016 0.002 0.015 0.007 0.020 0.000 0.013 –0.001 0.010
(Measured Value − Target Position) 2nd time 0.002 0.015 –0.007 0.003 –0.009 –0.001 –0.012 –0.004 –0.012 0.001 –0.006 0.009 –0.007 0.009 –0.001 0.013 0.004 0.016 0.002 0.015 0.007 0.020 0.000 0.013 –0.001 0.011
3rd time 0.003 0.015 –0.007 0.003 –0.009 –0.001 –0.012 –0.004 –0.012 0.001 –0.007 0.009 –0.007 0.009 –0.001 0.013 0.004 0.016 0.002 0.015 0.007 0.020 0.000 0.014 –0.001 0.011
4th time 0.003 0.016 –0.007 0.003 –0.009 –0.001 –0.013 –0.004 –0.012 0.000 –0.006 0.009 –0.007 0.009 –0.001 0.013 0.004 0.016 0.002 0.015 0.007 0.020 –0.001 0.014 –0.001 0.011
5th time 0.002 0.016 –0.007 0.004 –0.009 –0.001 –0.013 –0.004 –0.012 0.001 –0.007 0.009 –0.007 0.009 –0.001 0.014 0.003 0.016 0.002 0.015 0.007 0.020 –0.001 0.014 –0.001 0.011
Mean Position Deviation X 0.002 0.015 –0.007 0.003 –0.010 –0.001 –0.012 –0.004 –0.012 0.001 –0.007 0.009 –0.007 0.009 –0.001 0.013 0.004 0.016 0.002 0.015 0.007 0.020 0.000 0.014 –0.001 0.011
Standard Deviation X 0.001 0.000 –0.001 0.000 –0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000
X+S 0.003 0.016 –0.007 0.004 –0.009 –0.001 –0.012 –0.004 –0.012 0.001 –0.006 0.009 –0.007 0.009 0.000 0.013 0.004 0.016 0.002 0.015 0.007 0.020 0.000 0.014 –0.001 0.011
X−S 0.001 0.015 –0.008 0.003 –0.010 –0.001 –0.013 –0.004 –0.012 0.000 –0.007 0.009 –0.007 0.009 –0.001 0.013 0.003 0.016 0.002 0.015 0.007 0.020 –0.001 0.013 –0.001 0.010
Lost Motion B=X↑−X↓ 0.0135 0.0107 0.0084 0.0088 0.0125 0.0154 0.0163 0.0136 0.0122 0.0127 0.0130 0.0139 0.0120
Maximum (Position Deviation) Value S↑+S↓+|B| 0.0148 0.0116 0.0091 0.0091 0.0129 0.0158 0.0168 0.0142 0.0127 0.0131 0.0133 0.0144 0.0125
■Result Maximum Lost Motion 0.0163° Wobble Accuracy 12μm
Positional Repeatability
Parallelism 27μm
Unidirectional Positioning ↑ 0.0022° Concentricity 8μm
↓ 0.0009°
Bidirectional Positioning 0.0168°
Positioning Accuracy 0.0330°
Error per Rotation (maximum) 2.60°
G006
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Angular Accuracy
Moment Stiffness
Parallelism
Application
Systems
Optics &
Optical
Coatings
Holders
Attitude displacement angle
Bases
The angular displacement of the stage when unit moment load is
applied.
The parallelism of the table fixed on the stage against the base
plane.
Manual
Stages
Measurement of Goniometer Stage Accuracy
Positional Accuracy
Actuators
Motoeized
Stages
Positional Repeatability
Positioning is performed multiple times from the same direction on
any position of the stage, and the maximum value of the deviation
amount with respect to the stop position is calculated.
The maximum of those numerical values is taken to be positional
repeatability.
Ideal rotation center
Rotation Center Height
The distance to the top surface of the table from the ideal rotation
center.
Light
Sources
Index
Multiple
positioning
Target position
Reference
position
Rotation center height
(WD)
Guide
Maximum error
Multiple
positioning
Target position
Maximum error
Reference position
Ideal
rotation center
Rotation center
height
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Rotation Center Deviation Accuracy
The maximum deviation range from the ideal rotation center
position when a gonio stage is moved throughout the full travel.
Ideal rotation center
Ideal rotation center
Lost Motion
Positioning is performed multiple times in the (+) forward and (–)
backward directions on any position (e.g. both ends or center
point) of the stage, and the mean value of the deviation amount
with respect to the stop position is calculated.
The maximum of the numerical values is taken to be lost motion.
Cables
Piezo
Rotation center
deviation accuracy range
Actual rotation center
Ideal
rotation center
Rotation center
deviation accuracy
range
Actual
rotation center
Mean value of multiple positioning results
Target position
Bidirectional
positioning
Mean value of
multiple positioning
X Translation
Theta Rotation
Goniometer
Target position
Vacuum
Angular Accuracy
Moment Stiffness
Options
□40mm
□60mm
The angular displacement of the stage when unit moment load is
applied.
□80mm
□85mm
□100mm
□120mm
Others
Attitude displacement angle
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G007

Motion Control Products
Motorized Stages Guide
Accuracy Verification
Application
Systems
Motorized stage accuracy is, in principle, confirmed in compliance with the JIS test code for machine tools (JIS B 6190).
In addition, all measuring instruments are traceable standard instruments compliant to the national standard.
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Category Measurement Item Device Used Standards
Light
Sources
Index
Guide
Linear Stage
Positioning Accuracy
Positional Repeatability
Lost Motion
Dynamic Calibrator
(HP5529A)
JIS B 6190
Running Parallelism Dial Indicator Company Standard
Pitch/Yaw Auto Collimator Company Standard
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
It has to be guaranteed that measured values and indicated
values are within the specification range of international
standard values. In other words, traceability must
be ensured. JIS defined this traceability as “the capacity
to trace measurement results back to the domestic
measurement standards, with the use of measuring
instruments that have gone through a sequence of calibrations
with high-ranking standards.”
Linear Stage Traceability System Diagram
State
Institution
Manufacturer
National Institute of Standards and Technology
(NIST)
Agilent Technologies, Inc.
Calibration
Device
Dynamic Calibrator
Category Measurement Item Device Used Standards
X Translation
Theta Rotation
Goniometer
Rotation Stage
Positional Repeatability
Rotary Encoder
Company Standard
Lost Motion
Wobble Accuracy Dial Indicator Company Standard
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Goniometer Stage
Positional Repeatability
Lost Motion
Rotation Center Height
Rotation Center Deviation Accuracy
Accuracy Check in Assembled State
We check accuracy of motorized stages as a single unit.
Regarding the accuracy check in assembled state, we
need to confirm use conditions etc. Contact our International
Sales Division separately.
Rotary Encoder
Three Dimensional Instrumentation
Company Standard
Company Standard
Accuracy Check at Delivery Destination
We cannot conduct accuracy check at delivery destinations.
We will request a check from organizations such as
Japan Quality Assurance Organization as necessary.
Contact our International Sales Division separately for
more information.
G008
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Interpretation of the Specification Table
Specifications
1… Part Number **-**
2… Opposite Model **-**R
3…
Travel
**mm
4… Table Size **×**mm
5… Mechanical Feed Screw
6… Specifications Positioning Slide
7… Stage Material
8… Weight **kg
9…
Resolution
(Full)
(Half)
**μm/pulse
**μm/pulse
10… MAX Speed **mm/sec
11… Repeatability **μm
12… Positional Repeatability **μm
13… Load Capacity **N (**kgf)
Pitch **″/N・cm
Moment
14… Accuracy
Yaw **″/N・cm
Stiffness
Specifications
Roll **″/N・cm
15… Lost Motion **μm
16… Backlash **μm
17… Parallelism **μm
18… Running Parallelism **μm
19… Orthogonality of Motion **μm
20… Perpendicularity of Motion **μm
21… Pitch / Yaw **″/**″
22…
Sensor Part Number
23… Limit Sensor
Sensor
24… Origin Sensor
25… Proximity Origin Sensor
26…
Motor / Sensor Specifications
Type
27… Motor Motor Part Number
28… Step Angle
29…
Power Voltage
30… Current Consumption
Sensor
31… Control Output
32… Output Logic
Compatible Driver / Controller
33…
Control System
Compatible Driver
34… Compatible Controller
[Memo]
The drawing shows the types of tilt when a linear stage travels.
Towards the direction of travel...
Pitch Rotation around the axis in the horizontal plane perpendicular to the direction of travel
Yaw Rotation around the axis in the vertical plane perpendicular to the direction of travel
Roll Rotation around the axis in the horizontal plane parallel to the direction of travel
1 Part Number
2 Opposite Model
[Mechanical Specifications]
3 Travel Indicates the full travel.
4 Table Size Size of top table face.
5 Feed Screw * Ball screw
* Precision ground screws
6 Positioning Slide * Outer rail structure
* Crossed roller guide
7 Stage Material Material used for the product.
8 Weight Self weight of the product.
[Accuracy Specifications] Refer to the accuracy verification page for more information.
G004 − G007
9 Resolution (Full) Travel per pulse for full step
(Half) Travel per pulse for half step
10 MAX Speed MAX speed of the product (maximum travel speed).
11 Positioning Accuracy Deviation between the measured value and the target
value at the positioning point.
12 Positional Repeatability Deviation in stop positions when unidirectional positioning
is performed multiple times.
13 Load Capacity Load capacity at the center of the stage.
14 Moment Stiffness Stage strength against a load exerted at a position away
from the center of the table top (the table center and the
center of gravity of a work does not match). It indicates
the degree of tilt of the table top (″) when 1N load is
exerted at the position 1cm away from the center of the
stage surface.
Pitch
Stiffness in the direction of tilt around the axis in the
horizontal plane perpendicular to the direction of travel
when moving the stage for full travel.
Yaw
Stiffness in the direction of tilt around the axis in the
vertical plane perpendicular to the direction of travel when
moving the stage for full travel.
Roll
Stiffness in the direction of tilt around the axis in the
horizontal plane parallel to the direction of travel when
moving the stage for full travel.
15 Lost Motion Deviation between the stop position of forward positioning
and that of backward positioning.
16 Backlash Deviation in each direction when a certain load is exerted
in forward and backward directions at an arbitrary position
on the stage.
17 Parallelism The parallelism of the table fixed on the stage against the
base plane.
* Note that it is different from “Running Parallelism”.
18 Running Parallelism Displacement in the vertical direction of the table during
stage motion along the full travel.
19 Orthogonality of Motion Working displacement in the direction perpendicular to the
Y axis when referenced to the X axis motion of the XY axis
stage.
20 Perpendicularity of Motion Displacement between the Z axis stage and the perpendicular
optical breadboard when moving the stage for full
travel.
21 Pitch Maximum angle displacement in the direction of tilt around
the axis in the horizontal plane perpendicular to the
direction of travel when moving the stage for full travel.
Yaw
Maximum angle displacement in the direction of tilt around
the axis in the vertical plane perpendicular to the direction
of travel when moving the stage for full travel.
[Sensor]
22 Sensor Part Number Sensor used for the product.
23 Limit Sensor Indicates whether fitted with a limit sensor.
24 Origin Sensor Indicates whether fitted with an origin sensor.
25 Proximity Origin Sensor Indicates whether fitted with a proximity origin sensor.
[Motor Specifications]
26 Type Type of motor.
27 Motor Part Number Part number of motor used for the product.
28 Step Angle Step angle of the motor.
[Sensor Specifications]
29 Power Voltage
30 Current Consumption Specifications of the sensor.
31 Control Output
32 Output Logic
[Compatible Driver / Controller]
33 Compatible Driver Driver/controller compatible with the product.
34 Compatible Controller
Pitch
Yaw
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Roll
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G009

Motion Control Products
Stepping Motors Guide
Operating Environment of Motorized Stages
Application
Systems
Optics &
Optical
Coatings
Holders
Use motorized positioning stages within the following operational environment temperature range.
Contact our International Sales Division separately if you desire to use the stages outside the operational environment
temperature range.
*Operating environment
*Recommended environment
Temperature: 5°C − 40°C Temperature: 23°C ±5°
Humidity: 30% − 80% (without condensation) Humidity: 60±10% (without condensation)
Bases
Manual
Stages
Actuators
Operational environment temperature changes depending on various conditions such as the type of motorized positioning
stage, installation and operation conditions.
Avoid use of the stages in the following sites.
◦Sites subject to water or oil
◦Sites subject to direct sunlight or radiant heat
◦Sites subject to dirt and dust
◦Sites subject to vibration or impact
◦Sites close to fire
◦Sites subject to inflammable gas and corrosive gas
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
Life Cycle
Although the life cycle varies depending on intended use
or application, 2,000 to 3,000 hours for linear systems
and 1,000 to 1,500 hours/year (about 3 to 4 hours/day) for
rotation/goniometer systems are assumed.
Note that the above assumption may not apply to repeated
operations (high-speed drive or high-load drive).
Careful maintenance or supply of grease is important for
using the products for a long time without a problem.
G018 Maintenance / Grease Replacement
Example of Installation Procedure
Storage
When not using motorized stages for a long time, store
motorized stages wrapped with anti-rust paper, or store
in a plastic bag with a desiccant.
Storage Temperature: 0°C − 40°C
Humidit: 10% − 85% (without condensation)
AC Servo Motor
Cables
Piezo
OSMS
Linear
OSMS-(Z)
SGSP-YAW
Rotation
X Translation
Theta Rotation
Goniometer
OSMS-ZF
HPS
SGSP-A
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Attention
▶Recommended parallelism for stage mounting surface is 0.02 or lower. A product might be warped when it exceeds 0.02, causing abnormal
operation.
▶When mounting another product on the upper table of a motorized stage, make sure that the stage is not subjected to abnormal external force.
▶Foreign substances in tapped holes on the upper table or on the side of the stage will cause malfunction.
G010
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Mounting Orientation
The values in the specifications of each product are based on installation on a level surface.
Note that load capacity and other precision values will significantly change for upside down, lateral horizontal and other
installation orientations, because mounting on other than the horizontal surface require securing with screws.
Category Series Name Positioning Slide Upside Down Lateral Horizontal Lateral Vertical
OSMS Outer Rail ○ ○ ○
Linear HPS Ball Guide ○ ○ △
TAMM, KST Crossed Roller ○ ○ △
SGSP-YAW Worm and Worm Wheel ○ △ △
Rotation HDS-YAW Bearing ○ △ △
KST Crossed Roller ○ ○ △
Goniometer
OSMS-A/B Ball Guide ○ ○ △
SGSP-A/B Crossed Roller ○ △ △
Please contact our International Sales Division regarding other unclear points related to mounting orientation.
Selection Guide
○: Possible with limits on load capacity and other accuracy.
△: Possible depending on the model, with limits on load capacity and other accuracy.
×: Not allowed
Motorized stages are categorized in several different travel axes and types by the differences in
structure or positioning slide.
Since precision, stiffness and price differ depending on the type, select a product ideal for the
intended purpose.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Precision
Linear Rotation Goniometor
Series Name Relevant Product Series Name Relevant Product Series Name Relevant Product
Controllers/Drivers
Softwares
High
KST
Crossed Roller
G062 –
KST
Bearing
G078
Stepping Motor
AC Servo Motor
Cables
Piezo
TAMM
Crossed Roller
G060
HDS-
YAW
Bearing
G080
OSMS
Ball Guide
G082
X Translation
Theta Rotation
Goniometer
HPS
Ball Guide
G060
OSMS
Outer Rail
SGSP
Bearing
G074 –
SGSP
Crossed Roller
G086
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Bottom
G032 –
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G011

Motion Control Products
Stepping Motors Guide
Linear
Application
Systems
Optics &
Optical
Coatings
Holders
HPS Series
Durable linear stages with excellent cost performance.
Motor Variation
Compatible with 2 phase stepping motor, α stepping motor and AC servo motor manufactured
by Oriental Motor Co., Ltd. in addition to the standard 5 phase stepping motor.
Bases
Manual
Stages
Low Price
High Durability
Integration of the main unit and guide has reduced the number of
parts and assembly man-hours, offering low price.
Ball screws are used for the feed mechanism to achieve both low
price and durability.
Actuators
Motoeized
Stages
Light
Sources
Index
OSMS Series
Stepping motor stages compatible with versatile travel range between 35 to 500mm and can be used in any orientation.
Slim Body
These stages are our standard CE-compliant motorized
stages, covering motors neatly. These stages offer attractive
range of travel by fully utilizing the features of the outer rails.
Guide
Line Up
Full closed loop control for stage table positioning, and linear
encoder version for coordinate counting are standard line up.
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Safety Cover
Safety specifications of these stages
are compliant with safety requirements
on electrical measuring and control
equipment and electrical equipment
for laboratory use (EN61010-1:2010).
Option
Slim Body
The structure in which the
U-shaped outer rail and inner
block with center integrated ball
screw offers high stiffness, high
precision and minimum footprint.
Various options are available according to the application. Geared
motors and electromagnetic brakes are available for high-load
specifications and Z axis specifications, respectively. Contact our
International Sales Division for more information.
■XY axis mounting becomes easier.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Part Number
5 Phase Stepping Motor
Achieves the minimum size and
minimum weight with high speed
and high torque. The rated current
is 0.75A/phase which is common
to all sizes.
Table Size
[mm]
Wide
[mm]
Base Plate
Stages can be installed by
securing with bolts without
removing their covers. If rigidity is
required, the base plates can be
removed.
Height
[mm]
Travel
[mm]
Load Capacity
[N]
OSMS20-35(X) 85×85 85 35.7 35 78.4
OSMS20-85(X) 85×85 85 35.7 85 78.4
OSMS26-50(X) 100×100 100 42 50 117
OSMS26-100(X) 100×100 100 42 100 117
OSMS26-200(X) 100×100 100 42 200 117
OSMS26-300(X) 100×100 100 42 300 117
OSMS33-300(X) 120×120 120 57 300 196
OSMS33-500(X) 120×120 120 57 500 196
Two single axis stages can be assembled
directly and used as an XY axis stage without
the need of XY-axis mounting plates.
Motorized Extended Guide
Goniometer
Translation Motorized Stages,
Flat Z axis - 5 Phase Stepping Motor
G012
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TAMM Series
Motorized crossed roller stages that combine compactness, low-profile and high durability
High Durability
Compact/
Low-profile
Line contact with rollers and V groove rail offers high stiffness, low friction
and virtually no differential slip, suitable for minute feeding.
“Ideal for space-saving and assembly of systems with low optical
axis.”
Application
Systems
Optics &
Optical
Coatings
Holders
Sizes
□40/□60/□100mm are available.
Bases
Manual
Stages
KST Series
Actuators
High Precision
High Load
Capacity
High precision stages with steel body relatively strong against heat, and in which
precision ball screws and crossed roller guide are arranged with highest precision.
Achieved the maximum load capacity of 392N (40.0kgf).
Motoeized
Stages
Light
Sources
High Stability
Steel body fitted with large table face can mount anything.
Index
Guide
Controllers/Drivers
Softwares
Rotation
SGSP-YAW Series
Stepping motor driven rotation stages fitted with bearing guide and worm gear feed mechanism
Stepping Motor
AC Servo Motor
Cables
Piezo
Low Price
Compact/
Low-profile
Number of parts and assembly time were reduced to lower the
price.
Ideal for space-saving and assembly of systems with low optical
axis.
Sizes
φ40/φ60/φ80/φ120/φ160mm are available.
X Translation
Theta Rotation
Goniometer
Vacuum
HDS-YAW
High durability rotation motorized stages for minute angle adjustment.
High Durability
Isokinetic
Ball screws and steel belts used in the drive mechanism offer
excellent durability in minute angles.
Since it converts linear motion by the ball screw into rotational
motion by the steel belt, there is no difference between traveling
center and end by rotation speed and resolution.
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Sizes
φ40/φ60/φ80/φ120/φ160mm are available.
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G013

Motion Control Products
Stepping Motors Guide
KST-YAW Series
Application
Systems
High precision and high stability rotation motorized stages fitted with bearing positioning slide
Optics &
Optical
Coatings
Holders
High Precision
High Load
Capacity
High repeatability stages fitted with bearing positioning slide.
Achieved the maximum load capacity of 392N (40.0kgf).
Bases
High Stability
Steel body fitted with large table face can mount anything.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
Goniometer
OSMS Sereis
High precision motorized goniometers with integrated bearing ways for superior stiffness, accuracy and durability
Their smooth movement is ideal for frequent angle adjustment.
Low Price
High Precision High
Stiffness High Durability
Number of parts and assembly time were reduced to lower
the price.
Integrated ball guide structure in which guides are
directly processed on the main body minimized machining/assembly
errors and improved rotation center
accuracy.
AC Servo Motor
Cables
Piezo
SGSP-A/B Series
Stepping motor driven motorized goniometer stages fitted with crossed roller guide
High Stiffness
High stiffness goniometer stages fitted with excellent abrasion
resistant crossed roller guide.
Operability
Products with two axes combined offer further flexible alignment.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Lightweight
Aluminum body offers lightweight.
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
G014
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GS/CS series Guide
Full closed loop control system that controls a motorized stage with built-in high resolution compact
linear encoder using a special controller.
◦Linear encoder signal feedback and micro-step drive can minimize lead error, which is inherent to feed screw mechanism.
◦Small glass scale of linear expansion coefficient enabled a highly reliable positioning system stable against fluctuations in
ambient environment.
◦Ideal for use in positioning that requires precision in submicron units, and prolonged driving that is affected by reproducibility
by temperature drift.
Application
Systems
Optics &
Optical
Coatings
Full Closed Control System (Image diagram)
Holders
Bases
Positioning instruction
Liner scale
Detector
Feed screw
SHOT-GS
Position signal feedback
Error from the target position
One turn of screw
Lead error
Table position
Open loop control
During feedback control
Reduce lead error,
and improve positioning
accuracy
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
System Chart
Guide
PC
Sample software
(download from website)
SGCommander
LabVIEW
HIT Sample
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
GP-IB cable
USB cable
RS232C cable
Cables
Piezo
CJ-200A
GP-IB
RS232C USB I/O / Terminal Block
LAN cable USB RS232C
HIT-M HIT-S HIT-S HIT-S Maximum
8 units
ETHERNET
can be linked
I/O control
external device
I/O
MDR cable
JD-100 JS-300 JB-400
G106
G107
SHOT-GS G102
STAGE1 – 4 STAGE1 – 4
DHR-CA cable
GSE-CA cable
AC100-240V
50/60Hz
Power cable (2m)
comes with main body.
OSMS(CS) series
I/O control
external device
DHR-CA cable
DC24V 1A
GSE-CA cable
Link cable
Link cable
DC24V 1A
DC24V 1A
DC24V 1A
STAGE SCALE STAGE SCALE STAGE SCALE
KST(GS) series
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
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G015

Motion Control Products
SGMV series Translation Motorized Stages - AC servo Motor
SGMV
Application
Systems
Optics &
Optical
Coatings
Holders
High precision/high stiffness stages driven by AC servo motor. The stage structure unifies the
functions of precision linear guide and precision ball screw, places the linear guide, inner block
(table) and drive ball screw at the same position, and uses high stiffness U-shape outer rail for the
guide to offer small footprint with large load rating.
◦AC servo motor stages are recommended for production equipment that runs at high speed accompanied by rapid acceleration/deceleration
for reduction of takt time, because they generate sufficient torque in high-speed area and are less
subject to position deviation.
◦Stepping motor stages are recommended for positioning of optical systems that requires stability at rest.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Motor Type Stepping Motor Servo Motor
Control Method Open loop control Semi-closed loop control
Torque
Characteristic
Stability at Rest
Recommended
Application
Torque is large in low speed and
small in high-speed area
Very stable under normal conditions,
but cannot detect position deviation
caused by external force, etc.
Applications that exert light load and
require stability at rest, such as
positioning and measurement in
optical systems or small areas
Generate the same torque throughout the
low-speed area to high-speed area
Deviation may occur within the range of in
position, but it returns to the original
position by detecting position deviation
due to external force, etc. with an encoder.
Applications that do not allow position
deviation even during high-speed
operation or load fluctuation, such as
production lines
Guide
Controllers/Drivers
Softwares
◦The control system has automatic tuning functions, and a stage controller system usable just by connecting with a special
cable as well as servo pack that has high compatibility with the existing FA system are available.
■Configuration Example Using Stage Controller
Stages driven by AC servo motor
Stepping Motor
AC Servo Motor
Cables
Piezo
PC
LAN cable
RS232C cable
ETHERNET
RS232C
I/O/Terminal Block
PGC-04
DRIVER1/2/3/4
DC24V
PAG-ACS cable
Servo pack
SGDV-2R9E91A
Sample Software
(download from website)
I/O control
external device
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
■Configuration Example Using Servo Pack
If the servo pack is used as
a single unit, a controller needs
to be prepared separately.
User Controller
PC
Servo Pack
Adjustment Software
Sigma Win+
( cc
CN1
I/O
Servo Pack
SGDV-2R9EPIA
CN4
Motor
CN2
PG
JZSP-CF1G00-01-E
CN3
DC24V
JZSP-CF1M00-03-E
( cc
JZSP-CMP00-03-E
( cc
Stages driven by AC servo motor
G016
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Stabilizing (Fall-Prevention) Mechanism
Catalog
Code
W9007
Mounting of Electromagnetic Brake Equipped Motors
A normally closed type electromagnetic brake exerts braking force when the power is off and
securely holds load. It prevents the movable table from falling to avoid sample damage.
OSMS26-100(Z)
Example of electromagnetic brake
assembly dimensions
◦Change stepping motors or servo motors (optional) used for Z axis motorized
stages to electromagnetic brake equipped motors.
Guide
▶Contact our International Sales Division for changing to electromagnetic
brake. Or use the mortorized stage system question
sheet. G111
▶To drive a motorized stage, DC24V power voltage is required.
Attention
▶External dimensions diagram will change because motors are
changed to electromagnetic brake equipped motors.
Wiring Example
Lead wire for brake of electromagnetic brake equipped motor
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Stage controller side
Motorized stage side
Guide
Controllers/Drivers
Mounting of Reduction Gear Equipped Motors
OSMS26-100(Z)
Example of reduction
gear equipped motor
assembly dimensions
Deceleration, high torque and high resolution can be achieved by
changing to reduction gear equipped motors.Effective for
downsizing and weight saving of systems since it does not require
power supply.
◦Change 5-phase stepping motors or servo motors used for Z axis motorized
stages to reduction gear equipped motors.
Guide
▶Contact our International Sales Division for changing motors. Or
use the motorized stage system question sheet. G111
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Limit Sensor
Attention
▶Outline drawing may change because motors are changed with
reduction gear equipped motors. The OSMS20 series are not
compatible.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
◦Regarding the limit sensor used for motorized stages, refer to the specification of each product.
◦We will change output operations or add a limit sensor on special orders.
■Input/Output Circuit Diagram (NPN output type)
Main Circuit
ZD2
Tr2
ZD1
Tr1
Lead wire color for cable type (Note 1)
(Brown) +V
Load
(Black) Output 1 (Note 2)
Load
50mA MAX.
(White) Output 2 (Note 2)
50mA MAX.
(Blue) 0V
+
−
524V DC
±10%
■Output Operation
Output 1
Output 2
Lead Wire Color
Black
White
Output Operation
ON when light enters (NORMAL CLOSE)
ON when shaded (NORMAL OPEN)
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Internal circuit
Example of external connection
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G017

Motion Control Products
Controllers
GSC-01
GSC-02
SHOT-702
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
G098 G099 G100
Standard driver (full step/half step)
0.75A/phase rated motor or lower
Single axis 1 − 2 axes 1 − 2 axes
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor Stage
OSMS-ZF
SGSP-40/60YAW
SGSP-ACT-B0
OSMS-40
series
TAMM
OSMS-60
HPS
HDS
series
OSMS20/26/33
SGSP-80/120/160YAW
series
KST
series
D15RP-CA
cable
D15RP-CA
cable
Not compatible
Not compatible
D15RP-CA
cable
D15RP-CA
cable
Not compatible
Not compatible
D15RP-CA
cable
D15RP-CA
cable
D15D15A
cable
Not compatible
Stepping Motor
AC Servo Motor
Cables
Piezo
Stages with built in
Glass-scale Encoder
OSMS(CS)
series
KST(GS)
series
Not compatible
Not compatible
Not compatible
Not compatible
Not compatible
Not compatible
Part Name 1 axis Stage Controller 2 axis Stage Controller 2 axis Stage Controller
Part Number GSC-01 GSC-02 SHOT-702
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Primary Functions
General Specifications
Interface
Controller Function ○ ○ ○
Number of Control Axes 1 2 2
Stored Program Control − △ −
Feedback Control − − −
Circular Interpolation Control − − −
Linear Interpolation Control − − −
Driver Function Standard Standard Standard
Micro-step (Max. Division) 2 2 (half step only) 250
Driving Current (A/phase) 0.8 0.8 1.1
Power Voltage
DC24V
1.2A
DC24V
2A
AC100 − 240V
50/60Hz
Power Consumption 30VA 48VA 50VA
External Dimensions (W×H×Dmm) 47×90×125 180×40×125 260×70×280
Weight (kg) 0.4 0.7 2.8
GP-IB − − −
RS232C ○ ○ ○
USB − − −
Ethernet − − −
G018
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Various cables G108 − G109
GIP-101
SHOT-302GS
SHOT-304GS
HIT-M
HIT-S
PGC-04
Application
Systems
Optics &
Optical
Coatings
G101 G102 G102 G103 G103 G104
Micro-step driver
Holders
Bases
Single axis
1.4A/phase rated motor or lower
1 − 2 axes
1 − 4 axes
0.75A/phase rated motor or lower
1 − 8 axes
4 axes
Manual
Stages
D15RP-CA
cable
D15RP-CA
cable
D15RP-CA
cable
D15RP-CA cable
D15RP-CA
cable
Actuators
Motoeized
Stages
D15RP-CA
cable
D15RP-CA
cable
D15RP-CA
cable
D15RP-CA cable
D15RP-CA
cable
Light
Sources
Index
D15D15A
cable
D15D15A
cable
D15D15A
cable
D15D15A cable
D15D15A
cable
Guide
Not compatible
D15D15A
cable
D15D15A
cable
Not compatible
D15D15A
cable
Controllers/Drivers
Softwares
Stepping Motor
Not compatible
DHR/GSE
cable
DHR/GSE
cable
DHR/GSE cable
Not compatible
AC Servo Motor
Cables
Piezo
Not compatible
DHR/GSE
cable
DHR/GSE
cable
Not compatible
Not compatible
Intelligent Positioning
System
2 axis Stage Controller 4 axis Stage Controller
Extensible Stage Controller
(Master)
Extensible Stage Controller
(Slave)
Pulus Generating Controller
GIP-101 SHOT-302GS SHOT-304GS HIT-M HIT-S PGC-04
○ ○ ○ − ○
1 2 4 8 − 4
− ○ ○ − ○
− Glass scale Glass scale (except for KST(GS)) −
− ○ ○ − ○
− 2 axes 3 axes − ○
Micro-step Micro-step − Micro-step −
250 250 − 250 −
0.75 1.4 − 1.1 −
AC100−240V
50/60Hz
AC100−240V
50/60Hz
100VA 160VA 300VA 24VA 34VA
145×205×81 270×118×302 130×120×50 180×140×60
DC24V
1A
2.0 5.5 6.5 0.62 0.63 1.3
− ○ ○ − − −
○ ○ ○ ○ − ○
− ○ ○ ○ − −
− − − ○ − ○
DC24V
1.4A
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
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G019

Motion Control Products
Drivers
Application
Systems
Optics &
Optical
Coatings
Part Name
Part Number
Holders
Driving Motor
Drive System
Bases
Driving Current (A/phase)
Excitation System
Manual
Stages
Primary Functions
Number of Divisions
Input Signal
Actuators
Input Logic
Max. Response Frequency
Motoeized
Stages
Auto Current Down OFF Input
Motor Excitation OFF Input
Light
Sources
Micro-step Selection Input
Origin Excitation Timing Output
Index
Input Voltage
General Specifications
Operating Temperature Range
Guide
Controllers/Drivers
External Dimensions (W×H×Dmm)
Weight (kg)
Softwares
Stepping Motor
AC Servo Motor
OSMS40-5ZF
SGSP-ACT
series
Stage
Motor Used
PK513PB-C9
Basic Step
Angle
[ ° ]
Phase Current
[A/phase]
0.35
External Dimensions
[W×H×Dmm]
(excluding shaft)
20×20×72
Cables
Piezo
OSMS20-35
OSMS20-85
series
TS3664N4E10
0.75
24×24×31
SGSP-40/60YAW
HDS-60
series
TS3664N4
0.72
0.66
24×24×31
X Translation
Theta Rotation
Goniometer
Vacuum
OSMS26
OSMS60-ZF
SGSP-60A/B
TAMM
OSMS-40/60
SGSP-80/120/160YAW
HPS
HDS-80/120
series
OSMS80-20ZF
PK523HPB-C12
PK525HPB-C4
0.75
28×28×32
28×28×51.5
Options
A7177-90215KTG
0.036
28×28×61.3
□40mm
□60mm
□80mm
OSMS33
series
TS3667N43E967
42×42×47
□85mm
□100mm
□120mm
KST-120/160YAW
series
TS3624N42E967
0.72
60×60×56.5
Others
KST-50 / KST(GS)-50
KST-100 / KST(GS)-100
KST-200 / KST(GS)-200
series
PK564-NBW
PK566-NBW
PK569-NBW
1.4
60×60×46.5
60×60×57.5
60×60×87
G020
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Catalog
Code
W9051
Application
Systems
Compact Driver
Compact Driver
Compact
Micro-step Driver
Compact
Micro-step Driver
Micro-step Driver
Micro-step Driver
SG-5MA SG-5M SG-55MA SG-55M SG-514MSC MC-7514PCL
5-phase stepping motor
Bipolar constant current pentagon drive
0.25 − 0.85 0.5 − 1.4 0.23 − 0.75 0.5 − 1.6 0.3 − 1.4 0.5 − 1.4
DC20 − 40V
1.5A Max
Full/Half step Micro-step Micro-step Micro-step
Two types
1, 2
1 clock input method
2 clock input method
16 types
1, 2, 4, 5, 8, 10, 16, 20, 25, 40,
50, 80, 100, 125, 200, 250
1 clock input method
2 clock input method
16 types
1, 2, 2.5, 5, 8, 10, 20, 25, 40,
50, 80, 100, 125, 200, 250
2 clock input method
16 types
1, 2, 4, 5, 8, 10, 16, 20, 25, 40,
50, 80, 100, 125, 200, 250
1 clock input method
2 clock input method
Photocoupler input
Photocoupler input
C-MOS equivalent
negative logic input
Photocoupler input
50kpps 500kpps 500kpps 500kpps
None None None Equipped
Equipped Equipped Equipped Equipped
None
4 bit signal input or switching by the number of
division setting switch
4 bit signal input
Switching by the number
of division setting switch
None Equipped Equipped Equipped
DC20 − 40V
3A Max
DC24 − 36V
1.5A Max
DC24 − 36V
3A Max
For motor drive:
DC24 − 36V ±10%
2A or lower
For logic:
DC5V ±5% 0.1A or lower
AC100 − 230V±10%
50/60Hz
3.5A Max
0 − 40°C 0 − 40°C 0 − 40°C 0−40°C
77×32×45 105×38×74 91×36×70 170×130×39
0.1 0.2 0.2 0.75
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
○
×
○
×
○
×
AC Servo Motor
Cables
○
○
○
○
○
○
Piezo
○
○
○
○
○
○
○*
○
○*
○
○
○
X Translation
○*
○
○*
○
○
○
Theta Rotation
Goniometer
○*
○
○*
○
○
○
Vacuum
Options
○*
○
○*
○
○
○
□40mm
□60mm
□80mm
□85mm
×
○
×
○
○
* DC36V * DC36V * DC36V
○
□100mm
□120mm
Others
×
○
×
○
○
○
* Can be used with 0.75A/phase.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G021

Motion Control Products
Softwares
Software for creating operation check or automation applications and for supporting program development are available.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Sample Softwares
SGCommander
RS232C interface
stage controller control software.
In addition to remote control from a PC,
simple program control using Excel is possible.
LabVIEW Sample Program
Sample module for controlling stages
using the graphical programming environment LabVIEW
of National Instruments Corporation
Compatible with LabVIEW 5.1/6i/7.1/8.6/2010/2012
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Special Application Softwares
SGTERME
Terminal software for receiving and sending
commands input in Excel cells.
Applications can be developed flexibly using
repetition and conditional branching macros,
without programming knowledge.
Compatible with 32/64bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
SGEMCSE
G024 G025
Trial Version
Trial Version
Software for positioning & measurement that automatically collects
data and outputs results in Excel simply by selecting a controller and
setting a measuring instrument.
Applications can be developed using the program measurement
function with routine drive patterns and the Excel instruction measurement
function that measures arbitrary coordinates, without programs.
Compatible with 32/64bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Software for Positioning, Measurement & Analysis
SGMACSE
Trial Version
Software with enhanced functions such as
real-time graphical display, analysis or
correction of measurement data and
RS232C binary data exchange.
Compatible with 32 bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
Software for Monitoring & Control
SGVIEWE
Software for measuring dimensions and angles based on
images loaded from a USB camera connected to a PC, as
well as for saving loaded images.
It can measure an arbitrary point or perform simple time-lapse
measurement when used in combination with a stage.
Compatible with 64 bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
Automated Collimation Measurement Software
SGCAMSE
Used in combination with the collimation
checker system, this software automatically
measures laser light collimation (parallelism)
and judges good or bad.
Trial Version
Compatible with 32 bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
Software for Liquid Crystal Evaluation System
SGLCESE
Being compatible with major color luminance meters
and spectroradiometers, this software packaged
luminance, chromaticity, viewing angle characteristics
and other functions required for flat panel evaluation.
Compatible with 64 bit version of Windows ® XP/Vista/7
* Refer to our website for the latest support status.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Library for Program Development
Component Software for VB.NET
SGNETXE
RS232C/GP-IB/USB communication library
enabling control programming for stage
controller with VB.NET.
Compatible with 32/64bit version of Windows ® XP/Vista/7
* NET Framework1.1 or later version is required.
ActiveX for Positioning & Measurement
SGACTXE/SGPATXE/SGSFSXE
RS232C/GP-IB/USB communication library
enabling control programming for stage controller
with VB6.0 or VBA.
32 bit Windows ® -only
* Windows ® Vista/7 does not work with USB.
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Guide
▶Contact our International Sales Division for more information.
Information is also available on .
Part Name
Software for Positioning, Measurement & Analysis
Automated Collimation Measurement Software
Software for Monitoring & Control
Software for Liquid Crystal Evaluation System
Part Number
SGMACSE
SGCAMSE
SGVIEWE
SGLCESE
Part Name
Component Software for VB.NET
ActiveX for Positioning & Measurement
Part Number
SGNETXE
SGACTXE
SGPATXE
SGSFSXE
G022
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Catalog
Code
W9058
Free Software|SGCommander (for RS232C) Windows®Version
(For SHOT(Mark)-102/202/204, FINE(Mark)-501/502/503, FINE-01, SHOT-302GS/304GS, PAT-001, OMEC-2BF/2BG/4BF/4BG, SHOT-602,
CSG-602R/522R, MINI-5D, BS-302GS/304GS, PKA-ID-02, SHOT-702, FINE-01γ, GIP-101, GSC-01/02)
Free software is available to operate your controller easily from a PC. Each axis of a connected
motorized stage can be moved using buttons on the screen. The software can be downloaded from
our website.
1Jog operation
3Homing control
Home > Support > Software Information > Sample Software: SGCommander
2Speed specification
4Travel control
Simple operations
are possible such
as travel by specifying
an axis (pulse
instruction), homing
or jog operation.
Controllers such as SHOT-30*
/702 and FINE-**, which have
a built-in program function,
allow editing of programs
from a PC. Since data can be
downloaded/uploaded from/to
Excel sheets, it is easy to edit
programs. In addition, upload
of memory switch or download
mode is available.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Free Software (for HIT)|
HIT sample for LAN/RS232C
Free software is available for HIT of SGCommander.
Free Application|
LabVIEW (for v.5.1/v.6i/v.7.1/v.8.6/v.2010/v.2012) RS232C/GP-IB
LabVIEW application is available for LabVIEW
users.
Light
Sources
Index
Guide
1
2
6
7
8
5
4
3
Functions
1Relative position
travel
2Origin return
3IO menu
4Command input
(Terminal)
5Number of
division setting
6Speed change
7Program editing
8Memory switch
menu
Port number
PortInit.vi
Stage drive shaft number
SetSpeed.vi Move.vi
Minimum speed (pulse/sec) Acceleration time (ms) Number of pulses per travel
Maximum speed (pulse/sec) Drive direction (T: +, F: -)
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Other: 30 Day Trial Version|SGEMCSE / SGTERME
SGEMCSE.....SGEMCSE is software for collecting data or measuring using
automatic positioning equipment, measuring instrument or
controller, and is offered 30 days for free.
SGTERM E.....It allows command input using Excel for easy program making.
SGTERME is ideal software to link with various devices, and is
offered 30 days for free.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G023

Motion Control Products
Catalog
Terminal Software SGTERME Code W9059
General-purpose communication terminal software that uses Excel.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
◦Positioning and measurement can be performed just by listing and executing
commands in an Excel sheet.
◦Continuous process or step-by-step process can be selected.
◦Use of SGTERM’s original control scripts, “If”, “Jump”, “Loop” and “Print” in an Excel
worksheet simplifies processing control.
◦Since measurement results are output to an Excel sheet, easy to analyze and manage
measured data.
◦Set content can be saved as a “*.SGE” file, which facilitates setting of the same
process again.
◦RS232C* 1 /GP-IB* 2 /USB* 3 interfaces are supported.
◦Compatible with Windows ® XP/Vista/7* 4 .
Manual
Stages
Actuators
Part Number
SGTERME
*1 RS-232C ports are available from COM1 to COM8.
*2 As for GP-IB, only GP-IB of National Instruments Corporation is supported.
*3 USB is only supported for SHOT-302/304 series, HIT-M, FINE-01γ/503 series, and OMEC-2BG/4BG series.
*4 Conditions when used with Windows ® 7 are as follows.
・Administrative right is required for installation as well as execution.
・32/64 bit versions are supported. Check on our website for the latest support status.
Motoeized
Stages
Light
Sources
SGTERME
Processing with Excel
makes editing of collected data easy
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Condition setting
Measurement display
Data collection
Control display
Result acquisition
PC
X Translation
Theta Rotation
Goniometer
Give measurement
instructions or
collect data
using Excel
Measuring instrument
Stage controller
G018 − G019
Vacuum
Options
Motorized stage
□40mm
Register a device
Operation settings
Create an instruction file with Excel
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Run commands written in
cells in order.
Perform repetition or
conditional branching
using control scripts.
Cell functions and VBA
can also be used in
combination.
G024
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Catalog
Software for Positioning & Measurement SGEMCSE Code W9060
Positioning and measurement software highly compatible with motorized
positioning devices offered by Sigma Koki.
◦Multiple repetition of positioning/measurement sequence is easily realized.
◦Various functions are available such as manual or time-series measurement and
count presetting.
◦By creating Excel instruction files, both stage control and measurement with a measuring
instrument can be performed simultaneously.
◦Since measurement results are output to an Excel sheet, easy to analyze and manage
measured data.
◦Set content can be saved as a “*.SGS” file, which facilitates setting of the same
process again.
◦Using this software in combination with motorized positioning devices offered by
Sigma Koki, a positioning and measurement system can be easily configured.
◦RS232C* 1 /GP-IB* 2 /USB* 3 interfaces are supported.
◦Compatible with Windows ® XP/Vista/7* 4 .
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Part Number
SGEMCSE
*1 RS-232C ports are available from COM1 to COM8.
*2 As for GP-IB, only GP-IB of National Instruments Corporation is supported.
*3 USB is only supported for SHOT-302/304 series, HIT-M, FINE-01γ/503 series, and OMEC-2BG/4BG series.
*4 Conditions when used with Windows ® 7 are as follows.
・Administrative right is required for installation as well as execution.
・32/64 bit versions are supported. Check on our website for the latest support status.
Actuators
Motoeized
Stages
Light
Sources
Index
Controller
Guide
Controllers/Drivers
Softwares
Stepping Motor
PC
Measuring instrument
AC Servo Motor
Link with Excel
Automatic measuring
Measurement display
Automatic positioning
Data collection, etc.
[Attention]
May not be compatible depending on the specifications
of measuring instrument.(E.g. When responding to one
measurement command with multiple data items)
Cables
Piezo
No programming knowledge is required.
Just select a controller and input the minimum travel.
In addition to routine drive patterns, arbitrary measurement points
can be specified using Excel.
Automatically load data to Excel from a measuring instrument.
Register a device
Operation settings
Stage controller
G018 − G019
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Program instruction
Machine origin Theoretical origin
or
Create an instruction file with Excel
Motorized stage
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G025

Motion Control Products
Motorized Stage/Controller/Cable Sets
These sets are offered at value prices. These sets are easy to operate. Enjoy them as soon as they arrive.
Application
Systems
X axis Set|HPS60-20X-SET
Optics &
Optical
Coatings
Holders
Bases
This set enables easy automatic positioning in
one straight direction and JOG operation.
・Stage size : 60mm×60mm
・Travel : 20mm
・Load Capacity : 49N [5kgf]
・Cable lengh : 3m
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Products Name Part Number Quantity
High Performance Motorized Stages HPS60-20X-M5 1 G028
Single axis Stage Controller GSC-01 1 G098
AC Adapter PAT-001-POW1 1 ー
D15RP Cable D15RP-CA-3 1 G108
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
XY axis Set|SetHPS120-60XY-SET
This set enables XY axis automatic alignment,
and program operation without using a PC.
・Stage size : 120mm×120mm
・Travel : 60mm
・Load Capacity : 88.2 [9kgf]
・Cable lengh : 3m
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Products Name Part Number Quantity
High Performance Motorized Stages HPS120-60X-M5 2 G028
2 axis Stage Controller GSC-02 1 G099
Joystick Terminal SJT-02 1 G106
AC Adapter PAT-001-POW1 1 ー
D15RP Cable D15RP-CA-3 2 G108
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
For easier positioning ... Manual stages which can be used in combination.
■θ axis Rotation Stages
KSP-606M
■Z axis Steel Extended Contact Slide Stages
TSD-603
E144 E086
G026
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Catalog
Code
W9062
Xyθ axis Set|HPS/HDS120-XYθ-SET
Motorized stage system for minute positioning
and angle adjustment such as for marking of
semiconductor wafers.
・It can be controlled externally using Ethernet/RS232C/
USB interface.Also, the number of axes is extendable
by adding slave controllers (Part Number: HIT-S).
・Stage size
・Travel
: φ120mm
: ±6° [θ axis]
: 60mm [XY axis]
・Load Capacity : 58.8N [6kgf]
・Cable lengh : 3m
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Products Name Part Number Part Number
High Performance Motorized Stages HPS120-60X-M5 2 G028
High durability automatic rotation stage HDS-120YAW 1 G080
Extensible Stage Controller (Master) HIT-M 1 G103
Extensible Stage Controller (Slave) HIT-S 3 G103
AC Adapter 1 ー
D15RP Cable D15RP-CA-3 3 G108
Actuators
Motoeized
Stages
Light
Sources
Index
XYZ axis Set|OSMS20-XYZ-SET
This set is best suited for measuring and
inspection equipment and for XYZ axis
automatic positioning of workpieces.
◦It can be controlled externally using RS232C/GP-IB/USB
interface, or manually using a joy stick (JS-300).
・Stage size : 60mm×60mm
・Travel : 85mm [XY axis], 10mm [Z axis]
・Load Capacity : 29.4N [3kgf]
・Cable lengh : 3m
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Products Name Part Number Part Number
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor OSMS20-85(X) 2 G032
Translation Motorized Stages, Flat Z axis - 5 Phase Stepping Motor OSMS60-10ZF 1 G070
4 axis Stage Controllers SHOT-304GS 1 G102
Joystick Terminal JS-300 1 G107
D15RP Cable D15RP-CA-3 1 G108
D15D15A Cable D15D15A-CA-3 2 G108
MDR14-CA-2.5 Cable MDR14-CA-2.5 1 G109
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Make it more convenient … Software for stage control
■Software for Positioning,
Measurement & Analysis
SGMACSE
■Software for Monitoring & Control
SGVIEWE
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
G022 G022
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G027

Motion Control Products
High Performance Motorized Stages
HPS
Motorized stages with ball screws offering middle/high performance at low price.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
◦Ball screws with improved durability compared to the
existing TSDM series.
◦Our original high precision integrated ball guide used in
place of a cross roller guide makes it possible to offer a
price lower than the TAMM series.
Guide
▶Please contact us when assembled into XYZ axis or use in
reversion on the ceiling or vertical direction.
▶Opposite model or various motor changes are optionally available.
G030
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number HPS60-20X-M5 HPS80-50X-M5 HPS120-60X-M5
Travel [mm] 20 50 60
Table Size [mm] 60×60 80×80 120×120
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Positioning Slide Ball guide Ball guide Ball guide
Stage Material Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized
Weight [kg] 0.6 1 1.5
(Full) [μm/pulse] 2 2 2
Resolution
(Half) [μm/pulse] 1 1 1
MAX Speed [mm/sec] 10 10 10
Positioning Accuracy [μm] 15 25 25
Positional Repeatability [μm] ±1 ±2 ±2
Load Capacity [N] 49 (5kgf) 73.5 (7.5kgf) 98 (10kgf)
Pitch [″/N・cm] 0.4 0.5 0.5
Moment
Stiffness
Yaw [″/N・cm] 0.4 0.5 0.5
Roll [″/N・cm] 0.3 0.2 0.2
Lost Motion [μm] 1 2 2
Backlash [μm] 1 2 2
Parallelism [μm] 30 40 50
Running Parallelism [μm] 10 10 10
Pitch [″] / Yaw [″] 25/25 30/25 30/25
Sensor Part Number
Micro photo sensor: GP1S097HCZ(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Equipped (NORMAL OPEN)
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK523HPB-C12 (□28mm)
Step Angle 0.72°
Power Voltage DC5 - 24V ±10%
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA
When load current is 16mA, the residual voltage is under 0.4V When load current is 50mA, the residual voltage is under 0.7V
Output Logic
In the case of light shielded ,output transistor OFF (No conduction): Limit sensor
In the case of light shielded ,output transistor ON (Conduction): Origin sensor
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G028
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9061
Outline Drawing
HPS60-20X-M5
(153)
Hexagon socket head cap screw M4×12…4 screws
60
50
32
6-M4×0.7 depth 8
4-M3×0.5 depth 6
HPS80-50X-M5
Hexagon socket head cap screw M4×12…4 screws
(199)
100
4-M4×0.7 depth 8
70
50
6-M4×0.7 depth 8
Application
Systems
Optics &
Optical
Coatings
Holders
20
(29)
15
(450)
mounting hole for attachment pins (bezel side)
HPS120-60X-M5
50
4
32
50
60
(15)
M4×0.7 depth 5
Travel 10 6 Travel 10
1
counterbore for attachment pins (mounting side)
GOHT-AP
6.5
30
2-M4×0.7 depth 4
4-4.5 mounting hole
8 counterbore
Hexagon socket head cap screw M4×12…4 screws
50
20
(29)
15
(450)
M4×0.7
depth 5
mounting hole for attachment pins (bezel side)
70
4
6
50
70
80
counterbore for attachment pins (mounting side)
GOHT-AP
Travel 25 6 Travel 25
1
50
(15)
2-M4×0.7 depth 4
30
4-4.5 mounting hole
8 counterbore
70
4-4.5 mounting notch
8 counterbore
depth 4.5
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
(224)
120
100
70
50
6-M4x0.7 depth 8
4-M4x0.7 depth 8
4-M6x1 depth 12
Index
Guide
Controllers/Drivers
20
50
70
100
120
(450)
50
M4×0.7 depth 5 2-M4×0.7 depth 4
counterbore for attachment pins (mounting side)
GOHT-AP
Travel 30 6
Travel 30
(15)
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
(29)
15
4
30
1
mounting hole for attachment pins (bezel side)
100
4
4-6.5 mounting hole
11 counterbore
100
X Translation
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
Note 2
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13R-12SC
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 ORG
7
Sensor
Power source 12V
8 GND (0V)
9 LS (+)
10 LS (−)
11 FG
12 FG
5-Phase Stepping
Motor
E-Phase
D-Phase
Originside (ORG)
limit sensor
ON when shaded
C-Phase
A phase
B-Phase
Opposite side (−)
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
Motor side (+) GP1S097HCZ0F
limit sensor
ON when light enters
Note 1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-MHIT-S [8 axes]
PGC-14 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
Stage
HPS60-20X-M5
HPS80-50X-M5
HPS120-60X-M5
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with proximity origin sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
G020 − G021
MINI-CA-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G029

Motion Control Products
High Performance Motorized Stage Options
HPS Option
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Specification Method of Option Code
■Option Code
Stage size Travel
Opposite
Model
Motor option
HPS
60 20 5
None
80 - 50 X - M 2
R
120 60 A
L
Guide
None: Standerd model
R: Opposite model
5: 5 Phase Stepping Motor (Standerd model)
2: 2 Phase Motor with Driver
A: α-step Motor with Driver
L: No motor
▶Please contact us when assembled into XYZ axis or use in
reversion on the ceiling or vertical direction.
▶Replacement with electromagnetic brakes or grease change is also
available. Contact our International Sales Division for more
information.
■Example of Code Specification
HPS60-20X□-M□
■Features of Options
2 Phase Motor
with Driver
α Stepping Motor
with Driver
No Motor
It can reduce the total cost because a driver is equipped. On the
other hand, precision is inferior to 5 phase motors.
Can be replaced with an α stepping motor with driver which can
move fast. The motor also has built-in encoder.
No Motor Provide a stage without motor because the customer
mounts own motor. Note that mounting and adjustment of a motor
requires specialized skills.
Light
Sources
HPS120-60X-MA
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications (ex. HPS60-20X)
Part Number HPS60-20X-M2 HPS60-20X-MA HPS60-20X-ML
Travel [mm] 20 20 20
Table Size [mm] 60×60 60×60 60×60
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Positioning Slide Ball guide Ball guide Ball guide
Stage Material Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized
Weight [kg] 0.6 1 0.6
Resolution
(Full) [μm/pulse] 5 2 (500P/R) −
(Half) [μm/pulse] 2.5 1 (1000P/R) −
MAX Speed [mm/sec] 20 40 −
Positioning Accuracy [μm] 15 15 −
Positional Repeatability [μm] ±2 ±0.5 −
Load Capacity [N] 49 (5kgf) 49 (5kgf) 49 (5kgf)
Pitch [″/N・cm] 0.4 0.4 0.4
Moment
Stiffness
Yaw [″/N・cm] 0.4 0.4 0.4
Roll [″/N・cm] 0.3 0.3 0.3
Lost Motion [μm] 1 1 −
Backlash [μm] 1 1 1
Parallelism [μm] 30 30 30
Running Parallelism [μm] 10 10 10
Pitch [″] / Yaw [″] 25/25 25/25 25-25
Sensor Part Number
Micro photo sensor:
GP1S097HCZ (Sharp Corporation)
Micro photo sensor:
GP1S097HCZ (Sharp Corporation)
Micro photo sensor:
GP1S097HCZ (Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Equipped (NORMAL OPEN)
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Driver
Sensor
Type
2-phase stepping motor
(Oriental Motor Co., Ltd.)
α STEP motor
(Oriental Motor Co., Ltd.)
(No motor)
Motor Part Number PKP223D15B (□28mm) ARM26SBK (□28mm) −
Step Angle 1.8° 0.72°(500P/R) −
Part Number A8576-0415Y ARD-K −
Power input DC24V±10% 1A DC24V ±10% 0.9A −
Power Voltage DC5 - 24V ±10%
Current Consumption
60mA or lower (20mA or lower per sensor) A8576-0415Y
Control Output
DC24V±10% 1A
NPN open collector output DC30V or lower, 50mA
Output Logic
When load current is 16mA, the residual voltage is under 0.4V When load current is 50mA, the residual voltage is under 0.7V
In the case of light shielded ,output transistor OFF (No conduction): Limit sensor
G030
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Outline Drawing
HPS60-20X-M2
Hexagon socket
head cap screw M4×8…6 screws
(153)
60
50
32
6-M4×0.7 depth 8
4-M3×0.5 depth 6
Application
Systems
Optics &
Optical
Coatings
φ20
32
50
60
Holders
(29)
15
(450)
mounting hole for attachment pins (bezel side)
M4×0.7 depth 5
counterbore for attachment pins (mounting side)
GOHT-AP
φ6
Travel 10 Travel 10
1
φ4
50
6.5
(15)
30
4-φ4.5 mounting hole
φ8 counterbore
50
Bases
Manual
Stages
Actuators
HPS60-20X-MA
Hexagon socket
head cap screw M4×8…6 screws
(187)
60
50
32
6-M4×0.7 depth 8
4-M3×0.5 depth 6
Motoeized
Stages
Light
Sources
φ20
32
50
60
Index
(29)
Guide
Controllers/Drivers
Softwares
Stepping Motor
HPS60-20X-ML
(110)
Hexagon socket
head cap screw M4×8…6 screws
7
60
50
32
6-M4×0.7 depth 8
4-M3×0.5 depth 6
AC Servo Motor
Cables
Piezo
(29)
6.5
30
(15)
32
50
60
23
4-φ3 drill hole
φ5 counterbore depth 3
(450)
φ22 H7
φ4 g6
Travel 10
20.5 6
10
1
φ6
counterbore for attachment pins (mounting side)
GOHT-AP
Travel 10
23
15
(450)
mounting hole for attachment pins (bezel side)
M4×0.7 depth 5
counterbore for attachment pins (mounting side)
GOHT-AP
φ6
Travel 10 Travel 10
1
φ4
50
6.5
(15)
30
4-φ4.5 mounting hole
φ8 counterbore
50
8.5
mounting hole for attachment pins (bezel side)
φ4
50
4-φ4.5 mounting hole
φ8 counterbore
50
X Translation
Theta Rotation
Goniometer
■Connection Diagram
1
2
3
4
5
6
7
8
9
Note 2
1
2
3
4
5
6
7
8
9
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13JA-12SC
Sensor
Power source 12V
GND (0V)
LS (+)
LS (−)
ORG
NC
NC
NC
NC
Opposite side (−)
limit sensor
ON when light enters
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
Originside (ORG)
limit sensor
ON when shaded
Sharp Corporation
Micro photo sensor
GP1S097HCZ0F
■(Reference) Motor Comparison Table
Section
5 Phase
Stepping Motor
2 Phase
Stepping Motor
αSTEP Motor
Positioning Accuracy ○ ○ ◎
Minute Feed Accuracy ○ ○ ○
Speed Stability ○ △ ◎
Heat Generation
(Continuous Operation)
○ △ ◎
Max. Speed ○ ○ ◎
Rising Responsiveness ○ ○ ◎
*Rough guide for when the motors are mounted on our motorized stage.
(◎ : goodness ○ : standard △ : inferior)
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the (+) forward direction limit sensor.
There is no origin proximity sensor for this motorized stage.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G031

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS20-(X) Stage size □85mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS20-35(X) OSMS20-85(X)
Part Number (-M6) OSMS20-35(X)-M6 OSMS20-85(X)-M6
Part Number (-INCH) OSMS20-35(X)-INCH OSMS20-85(X)-INCH
Travel [mm] 35 85
Table Size [mm] 85×85 85×85
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 1.1 1.3
(Full) [μm/pulse] 2 2
Resolution
(Half) [μm/pulse] 1 1
MAX Speed [mm/sec] 25 25
Positioning Accuracy [μm] 5 10
Positional Repeatability [μm] 3 3
Load Capacity [N] 78.4 (8.0kgf) 78.4 (8.0kgf)
Pitch [″/N・cm] 0.4 0.4
Moment
Stiffness
Yaw [″/N・cm] 0.25 0.25
Roll [″/N・cm] 0.35 0.35
Lost Motion [μm] 3 3
Backlash [μm] 3 3
Parallelism [μm] 30 30
Running Parallelism [μm] 10 10
Pitch [″] / Yaw [″] 30/20 30/20
Sensor Part Number
Micro photo sensor: GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped Equipped
Proximity Origin Sensor None Equipped
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3664N4E10 (□24mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G032
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9063
Outline Drawing
OSMS20-(X)
Hexagon socket head cap screw M4×8…8 screws (35)
Hexagon socket head cap screw M4×8…10 screws (85)
85
75
35 35
A
25 25
75
85
21-M4×0.7 depth 6
(depth 5)
25 25
70
85
Application
Systems
Optics &
Optical
Coatings
Holders
E mounting hole
D
B
C
Bases
29
16
Travel F
Travel F
35.7
Part Number A B C D E F
OSMS20-35(X) 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS20-85(X) 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Manual
Stages
Actuators
OSMS20-(X)-M6
Hexagon socket head cap screw M4×8…8 screws (35)
Hexagon socket head cap screw M4×8…10 screws (85)
85
75
A
35 35
25 25
12-M4×0.7 depth 6
(depth 5)
Motoeized
Stages
Light
Sources
75
85
25
25
70
85
Index
E mounting hole
D
B
C
9-M6×1 depth 6
(depth 5)
Travel F
Travel F
Part Number A B C D E F
Guide
29
16
35.7
OSMS20-35(X)-M6 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS20-85(X)-M6 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Controllers/Drivers
Softwares
OSMS20-(X)-INCH
Hexagon socket head cap screw 8 / 32UNC×5 / 16…8 screws (35)
Hexagon socket head cap screw 8 / 32UNC×5 / 16…10 screws (85)
A
85
76.2
34.93 34.93
25.4 25.4
12-8-32UNC depth 6
(depth 5)
Stepping Motor
AC Servo Motor
Cables
Piezo
76.2
85
25.4 25.4
69.85
85
E mounting hole
D
B
C
6-1/4-20UNC depth 6
(depth 5)
Travel F
Travel F
Part Number A B C D E F
29
16
35.7
OSMS20-35(X)-INCH 183.5 60.8 34.5 76.2(25.4×3) 8-φ4.5 17.5
OSMS20-85(X)-INCH 233.5 85.8 35 101.6(25.4×4) 10-φ4.5 42.5
X Translation
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Connector Pin Number
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
5-Phase Stepping
Motor
E-Phase A phase
Originside (ORG)
limit sensor D-Phase
B-Phase
ON when shaded
C-Phase
Originside (NEAR)
limit sensor
ON when shaded
Note 3
Motor side (+)
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
Opposite side (−)
GP1S097HC1
limit sensor
ON when light enters
Note 1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS20-35(X)
OSMS20-85(X)
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1 The motor side limit sensor is the + direction limit sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Note 3 OSMS20-35 is not fitted with proximity origin sensor.
13 and 14P are short-circuited
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G033

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS20-(XY) Stage size □85mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number OSMS20-35(XY) OSMS20-85(XY)
Part Number (-M6) OSMS20-35(XY)-M6 OSMS20-85(XY)-M6
Part Number (-INCH) OSMS20-35(XY)-INCH OSMS20-85(XY)-INCH
Travel [mm] 35 85
Table Size [mm] 85×85 85×85
Feed Screw Ball screw diameter φ6mm, 1mm lead Ball screw diameter φ6mm, 1mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 2.2 2.6
Resolution
(Full) [μm/pulse] 2 2
(Half) [μm/pulse] 1 1
Accuracy MAX Speed [mm/sec] 25 25
Specifications Load Capacity [N] 68.6(7.0kgf) 68.6(7.0kgf)
Backlash [μm] 3 3
Orthogonality of Motion [μm] 5 5
Sensor Part Number
Micro photo sensor: GP1S092HCPIF(Sharp Corporation)
Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped Equipped
Proximity Origin Sensor None Equipped
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Motor
Sensor
(Reference) Precision Specifications of Single Axis Stage
Part Number OSMS20-35(X) OSMS20-85(X)
Accuracy
Specifications
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3664N4E10 (□24mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Positioning Accuracy [μm] 5 7
Positional Repeatability [μm] 3 3
Pitch [″/N・cm] 0.4 0.4
Moment
Stiffness
Yaw [″/N・cm] 0.25 0.25
Roll [″/N・cm] 0.35 0.35
Lost Motion [μm] 3 3
Parallelism [μm] 30 30
Running Parallelism [μm] 10 10
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G034
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9064
Outline Drawing
OSMS20-(XY)
Hexagon socket head cap screw M3×6…4 screws
85
75
67.2
Application
Systems
Optics &
Optical
Coatings
85
75
35 35
25 25
21-M4×0.7 depth 6
(depth 5)
25
25
70
85
E mounting hole
Travel F 85 Travel F
B
A
C D
Part Number A B C D E F
Holders
Bases
Manual
Stages
Travel F
A
85
Travel F
B
35.7
71.4
OSMS20-35(XY) 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS20-85(XY) 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Actuators
OSMS20-(XY)-M6
85
75
35 35
25 25
12-M4×0.7 depth 6
(depth 5)
25 25
70
85
9-M6×1 depth 6
(depth 5)
E mounting hole
Hexagon socket head cap screw M3×6…4 screws
85
75
67.2
Travel F 85 Travel F
B
A
C D
Part Number A B C D E F
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
OSMS20-(XY)-INCH
Travel F 85 Travel F
B
A
Hexagon socket head cap screw M3×6…4 screws
85
76.2
67.2
35.7
71.4
OSMS20-35(XY)-M6 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS20-85(XY)-M6 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Softwares
Stepping Motor
AC Servo Motor
Cables
85
76.2
34.93 34.93
25.4 25.4
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
12-8-32UNC depth 6
(depth 5)
25.4 25.4
69.85
85
6-1/4-20UNC depth 6
(depth 5)
Connector Pin Number
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
E mounting hole
Travel F 85 Travel F
B
A
Originside (ORG)
limit sensor
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Note 3
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
5-Phase Stepping
Motor
E-Phase
D-Phase
Travel F 85 Travel F
C-Phase
B
A phase
A
B-Phase
Sharp Corporation
Micro photo sensor
GP1S097HC1
35.7
71.4
C D
Part Number A B C D E F
OSMS20-35(XY)-INCH 183.5 60.8 34.5 76.2(25.4×3) 8-φ4.5 17.5
OSMS20-85(XY)-INCH 233.5 85.8 35 101.6(25.4×4) 10-φ4.5 42.5
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS20-35(XY)
OSMS20-85(XY)
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1 The motor side limit sensor is the + direction limit sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Note 3 OSMS20-35 is not fitted with proximity origin sensor.
13 and 14P are short-circuited
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G035

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS20-(Z) Stage size □85mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS20-35(Z) OSMS20-85(Z)
Part Number (-M6) OSMS20-35(Z)-M6 OSMS20-85(Z))-M6
Part Number (-INCH) OSMS20-35(Z)-INCH OSMS20-85(Z)-INCH
Travel [mm] 35 85
Table Size [mm] 85×85 85×85
Feed Screw Ball screw diameter φ6mm, 1mm lead Ball screw diameter φ6mm, 1mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 2.3 2.5
(Full) [μm/pulse] 2 2
Resolution
(Half) [μm/pulse] 1 1
MAX Speed [mm/sec] 5 5
Positioning Accuracy [μm] 10 20
Positional Repeatability [μm] 3 5
Load Capacity [N] 29.4 (3.0kgf)* 1 29.4 (3.0kgf)* 1
Accuracy
Pitch [″/N・cm] 0.8 0.8
Specifications
Moment
Yaw [″/N・cm] 0.5 0.5
Stiffness
Roll [″/N・cm] 0.7 0.7
Lost Motion [μm] 3 3
Backlash [μm] 3 3
Orthogonality of Motion [μm] 25 30
Pitch [″] / Yaw [″] 45/20 45/20
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Sensor
Origin Sensor Equipped Equipped
Proximity Origin Sensor None Equipped
*1 If you use the controller of 2.
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3664N4E10(□24mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Control System
Compatible Driver 1: SG-5M, SG-5MA 2: SG-55M, SG-55MA, SG-514MSC, SG-5151, KR-525M, MC-7514PCL
Compatible Controller 1: GSC-01, GSC-02 2: SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G036
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9065
Outline Drawing
OSMS20-(Z)
85
70
25 25
25 25
35 35
75
85
Hexagon socket head cap screw M4×8…4 screws
A
Travel C
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
21-M4×0.7 depth 6
(depth 5)
75
85
B
Travel C
8
10
5 75
85
4-4.5
mounting hole
Part Number A B C
OSMS20-35(Z) 217.7 95 17.5
OSMS20-85(Z) 267.7 120 42.5
Manual
Stages
Actuators
OSMS20-(Z)-M6
85
70
25 25
25
35
25
35
75
85
12-M4×0.7 depth 6
(depth 5)
9-M6×1 depth 6
(depth 5)
Hexagon socket head cap screw M4×8…4 screws
75
85
B
A
Travel C Travel C
8
10
5 75
85
4-4.5
mounting hole
Part Number A B C
OSMS20-35(Z)-M6 217.7 95 17.5
OSMS20-85(Z)-M6 267.7 120 42.5
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
OSMS20-(Z)-INCH
85
69.85
25.4 25.4
Hexagon socket head cap screw M4×8…4 screws
Travel C
Stepping Motor
AC Servo Motor
Cables
Piezo
25.4 25.4
34.93 34.93
76.2
85
A
12-8-32UNC depth 6
(depth 5)
6-1/4-20UNC depth 6
(depth 5)
76.2
85
B
Travel C
10
4.4
76.2
85
Part Number A B C
OSMS20-35(Z)-INCH 216.4 94.6 17.5
OSMS20-85(Z)-INCH 267.7 120 42.5
X Translation
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Connector Pin Number
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
5-Phase Stepping
Motor
E-Phase A phase
Originside (ORG)
limit sensor D-Phase
B-Phase
ON when shaded
C-Phase
Originside (NEAR)
limit sensor
ON when shaded
Note 3
Motor side (+)
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
Opposite side (−)
GP1S097HC1
limit sensor
ON when light enters
Note 1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS20-35(Z)
OSMS20-85(Z)
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1 The motor side limit sensor is the + direction limit sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Note 3 OSMS20-35 is not fitted with proximity origin sensor.
13 and 14P are short-circuited
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G037

Motion Control Products
Precision Motorized Stages with Built-in Compact Scale
OSMS(CS)20-(X) Stage size □85mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
The dedicated stage controllers (SHOT-302GS/304GS, HIT series) offer a full closed loop system
with high precision and high reliability.
Specifications
Part Number OSMS(CS)20-35(X) OSMS(CS)20-85(X)
Part Number (-M6) OSMS(CS)20-35(X)-M6 OSMS(CS)20-85(X)-M6
Part Number (-INCH) OSMS(CS)20-35(X)-INCH OSMS(CS)20-85(X)-INCH
Travel [mm] 35 85
Table Size [mm] 85×85 85×85
Feed Screw Ball screw diameterφ6mm, 1mm lead Ball screw diameter φ6mm, 1mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 1.4 1.6
Resolution
(Full) [μm/pulse] 2 2
(Half) [μm/pulse] 1 1
MAX Speed [mm/sec] 25 25
Positioning Accuracy [μm] 5 10
Positional Repeatability [μm] 2 2
Load Capacity [N] 78.4 (8.0kgf) 78.4 (8.0kgf)
Accuracy
Pitch [″/N・cm] 0.4 0.4
Specifications Moment
Stiffness
Yaw [″/N・cm] 0.25 0.25
Roll [″/N・cm] 0.35 0.35
Lost Motion [μm] 3 3
Backlash [μm] 3 3
Parallelism [μm] 30 30
Running Parallelism [μm] 10 10
Pitch [″] / Yaw [″] 30/20 30/20
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped Equipped
Proximity Origin Sensor None Equipped
Scale head Resolution [μm] 0.5 0.5
Motor / Sensor Specifications
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor
Motor Part Number
TS3664N4E10 (□24mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Sensor
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Scale head Power Voltage / Current Consumption DC5V±5% / 50mA
Compatible Cable
Cable
Driver Cable
Scale Cable
◦The stages enable high stiffness and high precision positioning
because their structure, which is strong against
momentum and combined load, is less susceptible to pitching,
rolling and yawing.
◦A compact scale is built in, but the installation space is
the same as that of other OSMS series when the travel
is the same.
Guide
▶Contact our International Sales Division for replacement of motors
or for stabilizing (drop-preventing) mechanism.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶Contact our International Sales Division to use the stage as an XY
axis or a Z axis stage.
D15D15A-CA
GSEF-CA-3
Compatible Driver / Controller
Compatible Driver −
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G038
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9066
Outline Drawing
OSMS(CS)20-(X)
Hexagon socket head cap screw M3×6…4 screws
C
B
A
85
75
35 35
25 25
21-M4×0.7 depth 6
( depth 5)
25 25
70
85
Application
Systems
Optics &
Optical
Coatings
Holders
H mounting hole
F
D
E
Bases
29
16
Travel G
Travel G
35.7
Part Number A B C D E F
OSMS(CS)20-35(X) 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS(CS)20-85(X) 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Manual
Stages
Actuators
OSMS(CS)20-(X)-M6
A
Hexagon socket head cap screw M3×6…4 screws
85
75
35 35
25 25
12-M4×0.7 depth 6
( depth 5)
Motoeized
Stages
Light
Sources
25 25
70
85
Index
E mounting hole
Travel F
29
16
D
B
C
Travel F
35.7
9-M6×1 depth 6
( depth 5)
Part Number A B C D E F
OSMS(CS)20-35(X)-M6 183.5 60.8 35.8 75 (25×3) 8-φ4.5 17.5
OSMS(CS)20-85(X)-M6 233.5 85.8 35.8 100 (25×4) 10-φ4.5 42.5
Guide
Controllers/Drivers
Softwares
Stepping Motor
OSMS(CS)20-(X)-INCH
Hexagon socket head cap screw M3×6…4 screws
AC Servo Motor
A
85
76.2
34.93 34.93
25.4 25.4
12-8-32UNC depth 6
(depth 5)
Cables
Piezo
76.2
85
25.4 25.4
69.85
85
E mounting hole
D
B
C
6-1/4-20UNC depth 6
(depth 5)
Travel F
Travel F
Part Number A B C D E F
29
16
35.7
OSMS(CS)20-35(X)-INCH 183.5 60.8 34.5 76.2 (25.4×3) 8-φ4.5 17.5
OSMS(CS)20-85(X)-INCH 233.5 85.8 35 101.6 (25.4×4) 10-φ4.5 42.5
X Translation
Theta Rotation
Goniometer
Compatible Controllers / Drivers and Cables
Controller
Cable
Stage
Vacuum
Options
□40mm
□60mm
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
D15D15A-CA
G108
Cable
OSMS(CS)
□80mm
□85mm
□100mm
□120mm
Others
G102 − G103
GSEF-CA
G109
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G039

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS26-(X) Stage size □100mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS26-50(X) OSMS26-100(X) OSMS26-200(X) OSMS26-300(X)
Part Number (-M6) OSMS26-50(X)-M6 OSMS26-100(X)-M6 OSMS26-200(X)-M6 OSMS26-300(X)-M6
Part Number (-INCH) OSMS26-50(X)-INCH OSMS26-100(X)-INCH OSMS26-200(X)-INCH OSMS26-300(X)-INCH
Travel [mm] 50 100 200 300
Mechanical
Specifications
Accuracy
Specifications
Sensor
Table Size [mm]
(M6, INCH)
Feed Screw
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 2.2 2.7 3.8 4.0
(Full) [μm/pulse] 4 4 4 4
Resolution
(Half) [μm/pulse] 2 2 2 2
MAX Speed [mm/sec] 40 40 40 40
Positioning Accuracy [μm] 5 10 15 20
Positional Repeatability [μm] 3 3 6 6
Load Capacity [N] 117 (12.0kgf) 117 (12.0kgf) 117 (12.0kgf) 117 (12.0kgf)
Pitch [″/N・cm] 0.23 0.23 0.23 0.23
Moment
Stiffness
Yaw [″/N・cm] 0.12 0.12 0.12 0.12
Roll [″/N・cm] 0.2 0.2 0.2 0.2
Lost Motion [μm] 3 3 5 5
Backlash [μm] 3 3 3 3
Parallelism [μm] 50 50 50 50
Running Parallelism [μm] 10 10 10 20
Pitch [″] / Yaw [″] 25/20 25/20 30/25 30/25
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Limit Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Origin Sensor Equipped Equipped Equipped Equipped
Proximity Origin Sensor Equipped Equipped Equipped Equipped
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK525HPB-C4(□28mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G040
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9067
Outline Drawing
OSMS26-(X)
Hexagon socket head cap screw M4×8…6 screws
A
100
45 45
75
35 35
25 25
16 16
27-M4×0.7 depth 6
Application
Systems
Optics &
Optical
Coatings
Holders
E mounting hole
Travel F
D
B
Travel F
C
90
100
16 16
25 25
35 35
45 45
100
8-M3×0.5 depth 6
Part Number A B C D E F
OSMS26-50(X) 268.5 87 12 150 (25, 50×2, 25) 10-φ4.5 25
OSMS26-100(X) 318.5 112 12 200 (50×4) 10-φ4.5 50
Bases
Manual
Stages
34
19
43
OSMS26-200(X) 418.5 162 12 300 (50×6) 14-φ4.5 100
OSMS26-300(X) 518.5 212 12 400 (50×8) 18-φ4.5 150
Actuators
OSMS26-(X)-M6
Hexagon socket head cap screw M4×8…6 screws
A
120
50 50
75
35 35
25 25
16 16
17-M6×1 depth 6
10-M4×0.7 depth 6
Motoeized
Stages
Light
Sources
100
120
16 16
25 25
35 35
50 50
120
Index
E mounting hole
D
B
C
8-M3×0.5 depth 6
Part Number A B C D E F
Guide
Travel F
Travel F
OSMS26-50(X)-M6 268.5 87 12 150 (25, 50×2, 25) 10-φ4.5 25
OSMS26-100(X)-M6 318.5 112 12 200 (50×4) 10-φ4.5 50
Controllers/Drivers
34
19
OSMS26-(X)-INCH
Hexagon socket head cap screw M4×8…6 screws
A
43
OSMS26-200(X)-M6 418.5 162 12 300 (50×6) 14-φ4.5 100
OSMS26-300(X)-M6 518.5 212 12 400(50×8) 18-φ4.5 150
120
50.8 50.8
76.2
69.85
25.4 25.4 17-1/4-20UNC depth 6
15.88 15.88 10-8-32UNC depth 6
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
101.6
120
25.4 25.4
69.85
50.8 50.8
120
E mounting hole
Travel F
D
B
Travel F
C
15.88
Part Number
8-6-32UNC
A B
depth
C
6
D E F
OSMS26-50(X)-INCH 268.5 87 10.8 152.4 (25.4, 50.8×2, 25.4) 10-φ7 25
OSMS26-100(X)-INCH 318.5 112 10.4 203.2 (50.8×4) 10-φ7 50
34
19
43
OSMS26-200(X)-INCH 418.5 162 9.6 304.8 (50.8×6) 10-φ7 100
OSMS26-300(X)-INCH 518.5 212 8.8 406.4 (50.8×8) 10-φ7 150
X Translation
Theta Rotation
■Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
5-Phase Stepping
Motor
E phase
C phase
A phase
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
■Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS26-50(X)
OSMS26-100(X)
OSMS26-200(X)
OSMS26-300(X)
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G041

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS26-(XY) Stage size □100mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number OSMS26-50(XY) OSMS26-100(XY) OSMS26-200(XY) OSMS26-300(XY)
Part Number (-M6) OSMS26-50(XY)-M6 OSMS26-100(XY)-M6 OSMS26-200(XY)-M6 OSMS26-300(XY)-M6
Part Number (-INCH) OSMS26-50(XY)-INCH OSMS26-100(XY)-INCH OSMS26-200(XY)-INCH OSMS26-300(XY)-INCH
Travel [mm] 50 100 200 300
Mechanical
Specifications
Accuracy
Specifications
Sensor
Table Size [mm]
(M6, INCH)
Feed Screw
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 4.4 5.4 7.6 8.0
Resolution
(Full) [μm/pulse] 4 4 4 4
(Half) [μm/pulse] 2 2 2 2
MAX Speed [mm/sec] 40 40 40 40
Load Capacity [N] 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf)
Backlash [μm] 3 3 3 3
Orthogonality of Motion [μm] 5 5 10 5
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Limit Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Origin Sensor Equipped Equipped Equipped Equipped
Proximity Origin Sensor Equipped Equipped Equipped Equipped
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Motor
Sensor
(Reference) Precision Specifications of Single Axis Stage
Part Number OSMS26-50(X) OSMS26-100(X) OSMS26-200(X) OSMS26-300(X)
Accuracy
Specifications
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK525HPB-C4 (□28mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Positioning Accuracy [μm] 5 10 15 15
Positional Repeatability [μm] 3 3 6 6
Pitch [″/N・cm] 0.23 0.23 0.23 0.23
Moment
Stiffness
Yaw [″/N・cm] 0.12 0.12 0.12 0.12
Roll [″/N・cm] 0.2 0.2 0.2 0.2
Lost Motion [μm] 3 3 5 5
Parallelism [μm] 50 50 50 50
Running Parallelism [μm] 10 10 10 10
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G042
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9068
Outline Drawing
OSMS26-(XY)
Hexagon socket
head cap screw M4×8…6 screws
100
45 45
75
35 35
25 25
16 16
27-M4×0.7 depth 6
E mounting hole
100
90
79
Travel F
Application
Systems
Optics &
Optical
Coatings
Holders
16
16
25 25
35 35
45 45
100
8-M3×0.5 depth 6
OSMS26-(XY)-M6
Hexagon socket
head cap screw M4×8…6 screws
Travel F
A
100
120
100
79
Travel F
B
Travel F 100
B
A
43
86
C D
Part Number A B C D E F
OSMS26-50(XY) 268.5 87 12 150 (25, 50×2, 25) 10-φ7 25
OSMS26-100(XY) 318.5 112 12 200 (50×4) 10-φ7 50
OSMS26-200(XY) 418.5 162 12 300 (50×6) 10-φ7 100
OSMS26-300(XY) 518.5 212 12 400 (50×8) 10-φ7 150
Bases
Manual
Stages
Actuators
Motoeized
Stages
120
50 50
75
35 35
25 25
16 16
17-M6×1 depth 6
10-M4×0.7 depth 6
E mounting hole
Travel F
Light
Sources
Index
1616
25 25
35 35
50 50
120
A
8-M3×0.5 depth 6
Travel F
A
120
Travel F
B
120
Travel F
B
43
86
C D
Part Number A B C D E F
OSMS26-50(XY)-M6 268.5 87 12 150 (25, 50×2, 25) 10-φ7 25
OSMS26-100(XY)-M6 318.5 112 12 200 (50×4) 10-φ7 50
OSMS26-200(XY)-M6 418.5 162 12 300 (50×6) 10-φ7 100
OSMS26-300(XY)-M6 518.5 212 12 400 (50×8) 10-φ7 150
Guide
Controllers/Drivers
Softwares
Stepping Motor
OSMS26-(XY)-INCH
Hexagon socket
head cap screw M4×8…6 screws
120
50.8 50.8
76.2
69.85
25.4 25.4
15.88 15.88
17-1/4-20UNC depth 6
10-8-32UNC depth 6
15.8815.88
25.4 25.4
69.85
50.8 50.8
120
8-6-32UNC depth 6
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
E mounting hole
Travel F
A
120
101.6
79
120
5-Phase Stepping
Motor
E phase
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
Travel F
B
C phase
A phase
Travel F 120 Travel F
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
B
A
43
86
C D
Part Number A B C D E F
OSMS26-50(XY)-INCH 268.5 87 10.8 152.4 (25.4, 50.8×2, 25.4) 10-φ7 25
OSMS26-100(XY)-INCH 318.5 112 10.4 203.2 (50.8×4) 10-φ7 50
OSMS26-200(XY)-INCH 418.5 162 9.6 304.8 (50.8×6) 10-φ7 100
OSMS26-300(XY)-INCH 518.5 212 8.8 406.4 (50.8×8) 10-φ7 150
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS26-50(XY)
OSMS26-100(XY)
OSMS26-200(XY)
OSMS26-300(XY)
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G043

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS26-(Z) Stage size □100mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS26-50(Z) OSMS26-100(Z) OSMS26-200(Z) OSMS26-300(Z)
Part Number (-M6) OSMS26-50(Z)-M6 OSMS26-100(Z)-M6 OSMS26-200(Z)-M6 OSMS26-300(Z)-M6
Part Number (-INCH) OSMS26-50(Z)-INCH OSMS26-100(Z)-INCH OSMS26-200(Z)-INCH OSMS26-300(Z)-INCH
Travel [mm] 50 100 200 150
Mechanical
Specifications
Accuracy
Specifications
Sensor
Table Size [mm]
(M6, INCH)
Feed Screw
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
100×100
(120×120)
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 4.4 4.9 7.2 7.4
(Full) [μm/pulse] 4 4 4 4
Resolution
(Half) [μm/pulse] 2 2 2 2
MAX Speed [mm/sec] 10 10 10 10
Positioning Accuracy [μm] 15 20 30 40
Positional Repeatability [μm] 3 3 6 6
Load Capacity [N] 39.2 (4.0kgf) 39.2 (4.0kgf) 39.2 (4.0kgf) 39.2 (4.0kgf)
Pitch [″/N・cm] 0.4 0.4 0.4 0.4
Moment
Stiffness
Yaw [″/N・cm] 0.15 0.15 0.15 0.15
Roll [″/N・cm] 0.20 0.20 0.20 0.20
Lost Motion [μm] 3 3 5 5
Backlash [μm] 3 3 3 3
Orthogonality of Motion [μm] 30 40 50 40
Pitch [″] / Yaw [″] 50/20 50/20 55/20 55/20
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Limit Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Origin Sensor Equipped Equipped Equipped Equipped
Proximity Origin Sensor Equipped Equipped Equipped Equipped
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK525HPB-C4 (□28mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G044
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9069
Outline Drawing
OSMS26-(Z)
100
45 45
75
35 35
27-M4×0.7 depth 6
25 25
16 16
Hexagon socket head cap screw M4×8…6 screws
Travel C
OSMS26-(Z)-M6
120
50 50
75
35 35
25 25
16 16 17-M6×1 depth 6
10-M4×0.7 depth 6
Hexagon socket head cap screw M4×8…6 screws
Travel C
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
16
25
35
45
16
25
35
45
100
A
16 16
25 25
35 35
50 50
120
A
Manual
Stages
8-M3×0.5 depth 6
B
Travel C
10
8-M3×0.5 depth 6
B
Travel C
10
Actuators
Motoeized
Stages
90 5 90
100
100
100
120
10
100
120
Light
Sources
Part Number A B C
OSMS26-50(Z) 306 125 25
OSMS26-100(Z) 356.5 150 50
OSMS26-200(Z) 463 200 100
OSMS26-300(Z) 556.5 250 150
Part Number A B C
OSMS26-50(Z)-M6 306 125 25
OSMS26-100(Z)-M6 356.5 150 50
OSMS26-200(Z)-M6 463 200 100
OSMS26-300(Z)-M6 556.5 250 150
Index
Guide
OSMS26-(Z)-INCH
Hexagon socket head cap screw M4×8…6 screws
Controllers/Drivers
Softwares
120
50.8 50.8
76.2
69.85
25.4 25.4
15.88 15.88
17-1/4-20UNC depth 6
10-8-32UNC depth 6
Travel C
Stepping Motor
AC Servo Motor
Cables
Piezo
15.88
25.4 25.4
69.85
50.8 50.8
120
A
8-6-32UNC depth 6
B
Travel C
Part Number A B C
101.6
120
10
9.2
101.6
120
OSMS26-50(Z)-INCH 305.6 124.6 25
OSMS26-100(Z)-INCH 356.5 150 50
OSMS26-200(Z)-INCH 463 199.2 100
OSMS26-300(Z)-INCH 556.5 250 150
X Translation
Theta Rotation
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND (0V)
7 ORG
8
+VS
5 − 24VDC
9 RESERVE
10 N.C. (not used)
11 LS (+)
12 LS (−)
13 N.C. (not used)
14 NEAR
15 N.C. (not used)
5-Phase Stepping
Motor
E phase
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15D15A-CA
G108
Cable
Stage
OSMS26-50(Z)
OSMS26-100(Z)
OSMS26-200(Z)
OSMS26-300(Z)
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 2
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
G020 − G021
DAC-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G045

Motion Control Products
Precision Motorized Stages with Built-in Compact Scale
OSMS(CS)26-(X) Stage size □100mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
The dedicated stage controllers (SHOT-302GS/304GS, HIT series) offer a full closed loop system
with high precision and high reliability.
Specifications
Part Number OSMS(CS)26-100(X) OSMS(CS)26-200(X)
Part Number (-M6) OSMS(CS)26-100(X)-M6 OSMS(CS)26-200(X)-M6
Part Number (-INCH) OSMS(CS)26-100(X)-INCH OSMS(CS)26-200(X)-INCH
Travel [mm] 100 200
Table Size [mm]
(M6, INCH)
100×100
(120×120)
100×100
(120×120)
Mechanical
Specifications
Feed Screw
Positioning Slide
Ball screw diameter φ8mm, 2mm lead
Outer rail structure
Ball screw diameter φ8mm, 2mm lead
Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 3.2 4.3
Resolution
(Full) [μm/pulse] 4 4
(Half) [μm/pulse] 2 2
MAX Speed [mm/sec] 40 40
Positioning Accuracy [μm] 10 15
Positional Repeatability [μm] 2 3
Load Capacity [N] 117 (12.0kgf) 117 (12.0kgf)
Accuracy
Pitch [″/N・cm] 0.23 0.23
Specifications Moment
Stiffness
Yaw [″/N・cm] 0.12 0.12
Roll [″/N・cm] 0.2 0.2
Lost Motion [μm] 3 5
Backlash [μm] 3 3
Parallelism [μm] 50 50
Running Parallelism [μm] 10 10
Pitch [″] / Yaw [″] 25/20 30/25
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped Equipped
Proximity Origin Sensor Equipped Equipped
Scale head Resolution [μm] 0.5 0.5
Motor / Sensor Specifications
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor
Motor Part Number
PK525HPB-C4 (□28mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Sensor
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Scale head Power Voltage / Current Consumption DC5V±25% / 50mA
Compatible Cable
Cable
Driver Cable
Scale Cable
◦The stages enable high stiffness and high precision positioning
because their structure, which is strong against
momentum and combined load, is less susceptible to pitching,
rolling and yawing.
◦A compact scale is built in, but the installation space is
the same as that of other OSMS series when the travel
is the same.
Guide
▶Contact our International Sales Division for replacement of motors
or for stabilizing (drop-preventing) mechanism.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶Contact our International Sales Division to use the stage as an XY
axis or a Z axis stage.
D15D15A-CA
GSEF-CA-3
Compatible Driver / Controller
Compatible Driver −
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G046
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9070
Outline Drawing
OSMS26-(X)
Hexagon socket head cap screw M4×8…6 screws
A
100
45 45
75
35 35
25 25
16 16
27-M4×0.7 depth 6
Application
Systems
Optics &
Optical
Coatings
Holders
E mounting hole
Travel F
D
B
Travel F
C
90
100
16 16
25 25
35 35
45 45
100
8-M3×0.5 depth 6
Part Number A B C D E F
Bases
Manual
Stages
34
19
43
OSMS(CS)26-100(X) 318.5 112 12 200 (50×4) 10-φ4.5 50
OSMS(CS)26-200(X) 418.5 162 12 300 (50×6) 14-φ4.5 100
Actuators
OSMS26-(X)-M6
Hexagon socket head cap screw M4×8…6 screws
A
120
50 50
75
35 35
25 25
16 16
17-M6×1 depth 6
10-M4×0.7 depth 6
Motoeized
Stages
Light
Sources
100
120
16 16
25 25
35 35
50 50
120
Index
E mounting hole
D
B
C
8-M3×0.5 depth 6
Guide
34
19
OSMS26-(X)-INCH
Travel F
Travel F
Hexagon socket head cap screw M4×8…6 screws
A
43
Part Number A B C D E F
OSMS(CS)26-100(X)-M6 318.5 112 12 200 (50×4) 10-φ4.5 50
OSMS(CS)26-200(X)-M6 418.5 162 12 300 (50×6) 14-φ4.5 100
120
50.8 50.8
76.2
69.85
25.4 25.4 17-1/4-20UNC depth 6
15.88 15.88 10-8-32UNC depth 6
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
101.6
120
25.4 25.4
69.85
50.8 50.8
120
E mounting hole
D
B
C
15.88
8-6-32UNC depth 6
Travel F
Travel F
34
19
43
Part Number A B C D E F
OSMS(CS)26-100(X)-INCH 318.5 112 10.4 203.2 (50.8×4) 10-φ7 50
OSMS(CS)26-200(X)-INCH 418.5 162 9.6 304.8 (50.8×6) 10-φ7 100
X Translation
Theta Rotation
Goniometer
■Compatible Controllers / Drivers and Cables
Controller
Cable
Stage
Vacuum
Options
□40mm
□60mm
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
D15D15A-CA
G108
Cable
OSMS(CS)
□80mm
□85mm
□100mm
□120mm
Others
G102 − G103
GSEF-CA
G109
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G047

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS33-(X) Stage size □120mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS33-300(X) OSMS33-500(X)
Part Number (-M6) OSMS33-300(X)-M6 OSMS33-500(X)-M6
Part Number (-INCH) OSMS33-300(X)-INCH OSMS33-500(X)-INCH
Travel [mm] 300 500
Table Size [mm] 120×120 120×120
Feed Screw Ball screw diameter φ10mm, 10mm lead Ball screw diameter φ10mm, 10mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 7.0 8.6
(Full) [μm/pulse] 20 20
Resolution
(Half) [μm/pulse] 10 10
MAX Speed [mm/sec] 120 120
Positioning Accuracy [μm] 25 25
Positional Repeatability [μm] 6 6
Load Capacity [N] 196 (20.0kgf) 196 (20.0kgf)
Accuracy
Pitch [″/N・cm] 0.12 0.12
Specifications Moment
Stiffness
Yaw [″/N・cm] 0.08 0.08
Roll [″/N・cm] 0.1 0.1
Lost Motion [μm] 5 5
Backlash [μm] 3 3
Parallelism [μm] 50 50
Running Parallelism [μm] 15 25
Pitch [″] / Yaw [″] 40/25 40/25
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Sensor
Origin Sensor Equipped Equipped
Proximity Origin Sensor Equipped Equipped
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3667N43E967 (□42mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G048
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9071
Outline Drawing
OSMS33-(X)
Hexagon socket head cap screw M5×10…4 screws
A
120
50 50
35 35
25 25
16-M4×0.7 depth 8
Application
Systems
Optics &
Optical
Coatings
100
120
25 25
35 35
50 50
120
Holders
E mounting hole
D
B
C
9-M6×1 depth 8
Bases
48.7
26
Travel F
Travel F
56.7
Part Number A B C D E F
OSMS33-300(X) 530.3 211.8 61.8 300 (50×6) 14-φ6.5 150
OSMS33-500(X) 730.3 311.8 61.8 500 (50×10) 22-φ6.5 250
Manual
Stages
Actuators
OSMS33-(X)-M6
Hexagon socket head cap screw M5×10…4 screws
A
120
50 50
35 35
25 25
8-M4×0.7 depth 8
8-M6×1 depth 8
Motoeized
Stages
E mounting hole
D
B
C
100
120
25 25
35 35
50 50
120
9-M6×1 depth 8
Light
Sources
Index
Travel F
Travel F
Part Number A B C D E F
Guide
48.7
26
56.7
OSMS33-300(X)-M6 530.3 211.8 61.8 300 (50×6) 14-φ6.5 150
OSMS33-500(X)-M6 730.3 311.8 61.8 500 (50×10) 22-φ6.5 250
Controllers/Drivers
Softwares
OSMS33-(X)-INCH
Hexagon socket head cap screw M5×10…4 screws
A
120
50.8 50.8
34.93 34.92
25.4 25.4
8-8-32UNC depth 8
8-1/4-20UNC depth 8
Stepping Motor
AC Servo Motor
Cables
101.6
120
25.4
34.925
50.8
25.4
34.925
50.8
120
Piezo
E mounting hole
D
B
C
9-1/4-20UNC depth 8
Travel F
Travel F
Part Number A B C D E F
48.7
26
56.7
OSMS33-300(X)-INCH 530.3 211.8 59.4 304.8 (50.8×6) 14-φ7 150
OSMS33-500(X)-INCH 730.3 311.8 57.8 508 (50.8×10) 22-φ7 250
X Translation
Theta Rotation
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
6
1
2
3
4
5
6
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND (0V)
7 7 ORG
8 8
+VS
9 9
5 − 24VDC
RESERVE
10 10 N.C. (not used)
11 11 LS (+)
12 12 LS (−)
13 13 N.C. (not used)
14 14 NEAR
15 15 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
Compatible Controllers / Drivers and Cables
Controller
SHOT-702 [2 axes]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G100 − G105
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
OSMS33‐300(X)
OSMS33‐500(X)
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G049

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS33-(XY) Stage size □120mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number OSMS33-300(XY) OSMS33-500(XY)
Part Number (-M6) OSMS33-300(XY)-M6 OSMS33-500(XY)-M6
Part Number (-INCH) OSMS33-300(XY)-INCH OSMS33-500(XY)-INCH
Travel [mm] 300 500
Table Size [mm] 120×120 120×120
Feed Screw Ball screw diameter φ10mm, 10mm lead Ball screw diameter φ10mm, 10mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 14.0 17.2
Resolution
(Full) [μm/pulse] 20 20
(Half) [μm/pulse] 10 10
Accuracy MAX Speed [mm/sec] 80 80
Specifications Load Capacity [N] 156 (16.0kgf) 156 (16.0kgf)
Backlash [μm] 3 3
Orthogonality of Motion [μm] 5 5
Sensor Part Number
Micro photo sensor: GP1S092HCPIF(Sharp Corporation)
Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None
Proximity Origin Sensor None None
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Motor
Sensor
(Reference) Precision Specifications of Single Axis Stage
Part Number OSMS33-300(X) OSMS33-500(X)
Accuracy
Specifications
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3667N43E967 (□42mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
40mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Positioning Accuracy [μm] 15 20
Positional Repeatability [μm] 6 6
Pitch [″/N・cm] 0.12 0.12
Moment
Stiffness
Yaw [″/N・cm] 0.08 0.08
Roll [″/N・cm] 0.08 0.08
Lost Motion [μm] 5 5
Parallelism [μm] 50 50
Running Parallelism [μm] 10 10
Compatible Driver / Controller
Compatible Driver SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G050
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9072
Outline Drawing
OSMS33-(XY)
Hexagon socket
head cap screw M5×10…4 screws
E mounting hole
120
100
89
Application
Systems
Optics &
Optical
Coatings
120
50 50
35 35
16-M4×0.7depth 8
25 25
25
25
35 35
50 50
120
9-M6×1 depth 8
OSMS33-(XY)-M6
Hexagon socket
head cap screw M5×10…4 screws
120
50 50
8-M4×0.7 depth 8
35 35
25 25 8-M6×1 depth 8
25 25
35 35
50 50
120
9-M6×1 depth 8
OSMS33-(XY)-INCH
Hexagon socket
head cap screw M5×10…4 screws
120
50.8 50.8
34.925 34.925
8-8-32UNC depth 8
25.4 25.4 8-1/4-20UNC depth 8
25.4
34.925
50.8 50.8
120
9-1/4-20UNC depth 8
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
6
1
2
3
4
5
6
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND (0V)
7 7 ORG
8 8
+VS
9 9
5 − 24VDC
RESERVE
10 10 N.C. (not used)
11 11 LS (+)
12 12 LS (−)
13 13 N.C. (not used)
14 14 NEAR
15 15 N.C. (not used)
Note 2
Travel 250 120 Travel 250
B
A
E mounting hole
Travel F
E mounting hole
Travel F
A
120
100
89
120
120
101.6
89
Travel F
B
120 Travel F
B
A
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
5-Phase Stepping
Motor
E phase
C phase
Travel F
120
Travel F
Travel F 120 Travel F
120 Travel F
Travel F
A phase
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
B
B
B
A
A
A
56.7
113.4
56.7
113.4
56.7
113.4
C D
C D
C D
Part Number A B C D E F
OSMS33-300(XY) 530.3 211.8 61.8 300 (50×6) 14-φ7 150
OSMS33-500(XY) 730.3 311.8 61.8 500 (50×10) 22-φ7 250
Part Number A B C D E F
OSMS33-300(XY)-M6 530.3 211.8 61.8 300 (50×6) 14-φ7 150
OSMS33-500(XY)-M6 730.3 311.8 61.8 500 (50×10) 22-φ7 250
Part Number A B C D E F
OSMS33-300(XY)-INCH 530.3 211.8 59.4 304.8 (50.8×6) 14-φ7 150
OSMS33-500(XY)-INCH 730.3 311.8 57.8 508 (50.8×10) 22-φ7 250
Compatible Controllers / Drivers and Cables
Controller
SHOT-702 [2 axes]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G100 − G105
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
OSMS33‐300(XY)
OSMS33‐500(XY)
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G051

Motion Control Products
OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor
OSMS33-(Z)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Stepping motor driven stages, ideal for positioning of measuring instruments or inspection tools
from which high stiffness and high precision are required.
◦U-shaped rail offers light weight, and minimized deflection
to achieve high stiffness.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS33-300(Z) OSMS33-500(Z)
Part Number (-M6) OSMS33-300(Z)-M6 OSMS33-500(Z)-M6
Part Number (-INCH) OSMS33-300(Z)-INCH OSMS33-500(Z)-INCH
Travel [mm] 300 500
Table Size [mm] 120×120 120×120
Mechanical
Feed Screw Ball screw diameter φ10mm, 10mm lead Ball screw diameter φ10mm, 10mm lead
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 14.5 16.1
(Full) [μm/pulse] 20 20
Resolution
(Half) [μm/pulse] 10 10
MAX Speed [mm/sec] 30 30
Positioning Accuracy [μm] 50 50
Positional Repeatability [μm] 6 6
Accuracy
Load Capacity [N] 68.6 (7.0kgf) 68.6 (7.0kgf)
Specifications
Pitch [″/N・cm] 0.2 0.2
Moment
Stiffness
Yaw [″/N・cm] 0.15 0.15
Roll [″/N・cm] 0.15 0.15
Lost Motion [μm] 5 5
Backlash [μm] 3 3
Orthogonality of Motion [μm] 30 35
Pitch [″] / Yaw [″] 50/25 55/25
Sensor Part Number
Micro photo sensor: GP1S092HCPIF(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Sensor
Origin Sensor None None
Proximity Origin Sensor None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3667N43E967 (□42mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
40mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Control
System
Compatible Driver
Compatible Controller
SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G052
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9073
Outline Drawing
OSMS33-(Z)
Hexagon socket head cap screw M4×8…6 screws
OSMS33-(Z)-M6
Hexagon socket head cap screw M4×8…6 screws
Application
Systems
Optics &
Optical
Coatings
120
50 50
35 35
25 25
25 25
35 35
50 50
120
16-M4×0.7 depth 8
9-M6×1 depth 8
B
A
Travel C Travel C
20
120
50 50
35 35
25 25
25 25
35 35
50 50
9-M6×1 depth 8
120
8-M4×0.7 depth 8
8-M6×1 depth 8
B
A
Travel C Travel C
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
100 10 100
120
120
100
120
10 100
120
Light
Sources
Part Number A B C
OSMS33-300(Z) 620 250 150
OSMS33-500(Z) 768.5 350 250
Part Number A B C
OSMS33-300(Z)-M6 620 250 150
OSMS33-500(Z)-M6 768.5 350 250
Index
OSMS33-(Z)-INCH
Hexagon socket head cap screw M4×8…6 screws
Guide
Controllers/Drivers
Softwares
120
50.8 50.8
34.925 34.925
25.4 25.4
25.4 25.4
34.93 34.93
50.8 50.8
120
8-8-32UNC depth 8
8-1/4-20UNC depth 8
9-1/4-20UNC depth 8
B
A
Travel C Travel C
Stepping Motor
AC Servo Motor
Cables
Piezo
Part Number A B C
101.6
120
9.2
101.6
120
OSMS33-300(Z)-INCH 620 248.4 150
OSMS33-500(Z)-INCH 768.5 350 250
X Translation
Theta Rotation
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
6
1
2
3
4
5
6
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND (0V)
7 7 ORG
8 8
+VS
9 9
5 − 24VDC
RESERVE
10 10 N.C. (not used)
11 11 LS (+)
12 12 LS (−)
13 13 N.C. (not used)
14 14 NEAR
15 15 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
Originside (ORG)
limit sensor D phase
ON when shaded
Originside (NEAR)
limit sensor
ON when shaded
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
Sharp Corporation
Micro photo sensor
GP1S097HCP1
Compatible Controllers / Drivers and Cables
Controller
SHOT-702 [2 axes]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G100 − G105
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
OSMS33‐300(Z)
OSMS33‐500(Z)
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1
Note 2
The motor side limit sensor is the + direction limit sensor.
Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G053

Motion Control Products
Precision Motorized Stages with Built-in Compact Scale
OSMS(CS)33-(X) Stage size □120mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
The dedicated stage controllers (SHOT-302GS/304GS, HIT series) offer a full closed loop system
with high precision and high reliability.
Specifications
Part Number OSMS(CS)33-300(X) OSMS(CS)33-500(X)
Part Number (-M6) OSMS(CS)33-300(X)-M6 OSMS(CS)33-500(X)-M6
Part Number (-INCH) OSMS(CS)33-300(X)-INCH OSMS(CS)33-500(X)-ICH
Travel [mm] 300 500
Table Size [mm] 120×120 120×120
Feed Screw Ball screw diameter φ10mm, 10mm lead Ball screw diameter φ10mm, 10mm lead
Mechanical
Specifications
Positioning Slide Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 7.8 9.6
(Full) [μm/pulse] 20 20
Resolution
(Half) [μm/pulse] 10 10
MAX Speed [mm/sec] 100 100
Positioning Accuracy [μm] 25 25
Positional Repeatability [μm] 5 5
Load Capacity [N] 196 (20.0kgf) 196 (20.0kgf)
Accuracy
Pitch [″/N・cm] 0.12 0.12
Specifications Moment
Stiffness
Yaw [″/N・cm] 0.08 0.08
Roll [″/N・cm] 0.1 0.1
Lost Motion [μm] 5 5
Backlash 3 3
Parallelism [μm] 50 50
Running Parallelism [μm] 15 25
Pitch [″] / Yaw [″] 40/25 40/25
Sensor Part Number
Micro photo sensor: GP1S092HCPIF (Sharp Corporation)
Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped Equipped
Proximity Origin Sensor Equipped Equipped
Scale head Resolution [μm] 0.5 0.5
Motor / Sensor Specifications
Type
5-phase stepping motor 0.75A/phase (Tamagawa Seiki Co., Ltd.)
Motor
Motor Part Number
TS3667N43E967 (□42mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Sensor
Current Consumption
80mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Scale head Power Voltage / Current Consumption DC5V±5% / 100mA
Compatible Cable
Cable
Driver Cable
Scale Cable
◦The stages enable high stiffness and high precision positioning
because their structure, which is strong against
momentum and combined load, is less susceptible to pitching,
rolling and yawing.
◦A compact scale is built in, but the installation space is
the same as that of other OSMS series when the travel
is the same.
Guide
▶Contact our International Sales Division for replacement of motors
or for stabilizing (drop-preventing) mechanism.
G017, G111 (Motorized Stage System Question Sheet)
▶Grease change is optionally available. G110
▶Contact our International Sales Division to use the stage as an XY
axis or a Z axis stage.
D15D15A-CA
GSEF-CA-3
Compatible Driver / Controller
Compatible Driver −
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G054
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9074
Outline Drawing
OSMS(CS)33-(X)
Hexagon socket head cap screw M5×10…4 screws
A
120
50 50
35 35
25 25
16-M4×0.7 depth 8
Application
Systems
Optics &
Optical
Coatings
100
120
25 25
35 35
50 50
120
Holders
E mounting hole
D
B
C
9-M6×1 depth 8
Bases
48.7
26
Travel F
Travel F
56.7
Part Number A B C D E F
OSMS(CS)33-300(X) 530.3 211.8 61.8 300 (50×6) 14-φ7 150
OSMS(CS)33-500(X) 730.3 311.8 61.8 500 (5×10) 22-φ7 250
Manual
Stages
Actuators
OSMS(CS)33-(X)-M6
Hexagon socket head cap screw M5×10…4 screws
A
120
50 50
35 35
25 25
8-M4×0.7 depth 8
8-M6×1 depth 8
Motoeized
Stages
E mounting hole
D
B
C
100
120
25 25
35 35
50 50
120
9-M6×1 depth 8
Light
Sources
Index
Travel F
Travel F
Part Number A B C D E F
Guide
48.7
26
56.7
OSMS(CS)33-300(X)-M6 530.3 211.8 61.8 300 (50×6) 14-φ7 150
OSMS(CS)33-500(X)-M6 730.3 311.8 61.8 500 (5×10) 22-φ7 250
Controllers/Drivers
Softwares
OSMS(CS)33-(X)-INCH
Hexagon socket head cap screw M5×10…4 screws
A
120
50.8 50.8
34.93 34.92
25.4 25.4
8-8-32UNC depth 8
8-1/4-20UNC depth 8
Stepping Motor
AC Servo Motor
Cables
101.6
120
25.4
34.925
50.8
25.4
34.925
50.8
120
Piezo
E mounting hole
D
B
C
9-1/4-20UNC depth 8
Travel F
Travel F
Part Number A B C D E F
48.7
26
56.7
OSMS(CS)33-300(X)-INCH 530.3 211.8 59.4 304.8 (50.8×6) 14-φ7 150
OSMS(CS)33-500(X)-INCH 730.3 311.8 57.8 508 (50.8×10) 22-φ7 250
X Translation
Theta Rotation
Goniometer
Compatible Controllers / Drivers and Cables
Controller
Cable
Stage
Vacuum
Options
□40mm
□60mm
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
D15D15A-CA
G108
Cable
OSMS(CS)
□80mm
□85mm
□100mm
□120mm
Others
G102 − G103
GSEF-CA
G109
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G055

Motion Control Products
SGMV series Translation Motorized Stages - AC servo Motor
SGMV
High precision/high stiffness stages driven by AC servo motor.
Application
Systems
Optics &
Optical
Coatings
◦The stage structure unifies the functions of precision
linear guide and precision ball screw, places the linear
guide, inner block (table) and drive ball screw at the
same position, and uses high stiffness U-shape outer
rail for the guide to offer small footprint with large load
rating.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Specifications
Part Number SGMV20-35(X) SGMV20-80(X) SGMV26-100(X) SGMV26-200(X)
Travel [mm] 35 80 100 200
Table Size [mm] 60×60 60×60 80×80 80×80
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ8mm,
2mm lead
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 0.7 1 1.7 2.5
(Full) [μm/pulse] 2 2 4 4
Resolution
(Half) [μm/pulse] 1 1 2 2
MAX Speed [mm/sec] 35 80 130 130
Positioning Accuracy [μm] 7 10 10 15
Positional Repeatability [μm] 4 5 5 6
Load Capacity [N] 80 (8kgf) 80 (8kgf) 130 (13kgf) 130 (13kgf)
Pitch [″/N・cm] 0.4 0.4 0.23 0.23
Moment
Stiffness
Yaw [″/N・cm] 0.25 0.25 0.12 0.12
Roll [″/N・cm] 0.35 0.35 0.2 0.2
Lost Motion [μm] 2 2 2 2
Backlash [μm] 2 2 2 2
Parallelism [μm] 30 30 50 50
Running Parallelism [μm] 10 10 10 10
Pitch [″] / Yaw [″] 30/20 30/20 30/20 30/25
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co.,Ltd.)
Limit Sensor
Equipped (NORMAL
CLOSE)
Equipped (NORMAL
CLOSE)
Equipped (NORMAL
CLOSE)
Equipped (NORMAL
CLOSE)
Origin Sensor None None None None
Proximity Origin Sensor None None None None
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Type
Motor
Motor Part Number
Step Angle
Power Voltage
Current Consumption
Sensor
Control Output
Output Logic
AC servo Motor 10W (YASKAWA Electric Corporation)
SGMMV-A1E2A21 (□25mm)
0.0318N・m
DC5 - 24V±10%
30mA or lower (15mA or lower per sensor)
NPN open collector output DC30V or lower, 50mA or lower
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SGDV-2R9EP1A
Control System
Compatible Controller
PGC-04
G056
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9075
Outline Drawing
SGMV20-35(X)
Hexagon socket head cap screw M3×6…6 screws
(223)
60
25 25
16 16
SGMV20-80(X)
Hexagon socket
head cap screw
M3×6…6 screws
(273)
(88.5)
60
25 25
16 16
Application
Systems
Optics &
Optical
Coatings
Encoder cable
Motor cable
Limit sensor cable
(78.4)
Travel 17.5
18
25
16 16
25
8-M4 depth 6
8-M3 depth 6
Travel 17.5
60
Encoder cable
Motor cable
Limit sensor cable
(78.4)
Travel 40 Travel 40
25
18
16 16
25
8-M4 depth 6
8-M3 depth 6
60
Holders
Bases
Manual
Stages
(26.6)
15
(34.5)
14 32 14
2
27
2×4-3.4mounting hole
6.5 counterbore
44
2
27
1
2×5-3.4 mounting hole
16 16 44 29.5 6.5 counterbore
Actuators
SGMV26-100(X)
Hexagon socket
head cap screw M4×8…6 screws
(337)
80
70
25 25
32
(115.6)
Motoeized
Stages
Light
Sources
Encoder cable
(88.4)
16
25
16
25 25
70
80
Index
Motor cable
4-M4 depth 6
8-M4 depth 6
4-M3 depth 6
Travel 50 Travel 50
Guide
Limit sensor cable
Controllers/Drivers
0.2 24.8
55 25 25 55 (36)
2
33
2×5-4.5 mounting hole
8 counterbore
Softwares
Stepping Motor
SGMV26-200(X)
Hexagon socket
head cap screw M4×8…6 screws
(437)
80
70
25 25
32
(165.6)
AC Servo Motor
Cables
Piezo
Encoder cable
Motor cable
Limit sensor cable
Controller / Servo Pack
Part Number
PGC-04
SGDV-2R9EP1A
Cable
(88.4)
Products Name
4-M4 depth 6
Pulus Generating Controller
Servo Packs for Driving Servo Motor
PGC-04
Travel 100
SGDV-2R9EP1A
0.2 24.8
80 15 50 15
Part Number
Cable Length
Controller Side Stage Side Servo Pack Side
[m]
PGC-ACS-2 10126-3000PE DE-957S-NR 10126-3000PE 2
JZSP-CF1M00-03E − − − 3
JZSP-CMP00-03E − − − 3
JZSP-CF1G00-01-E − − − 1
8-M4 depth 6
4-M3 depth 6
Travel 100
80 (46)
2
33
25
16
16
25 25
70
80
2×6-4.5 mounting hole
8 counterbore
Connection Diagram
1
2
3
4
5
6
7
8
9
Note 2
1
2
3
4
5
6
7
8
9
Connector Pin Number
Japan Ariation Electronics Industry, Ltd.
DE-9P-NR
VS
5 − 24VDC
GND (0V)
LS (+)
LS (−)
N.C. (not used)
N.C. (not used)
N.C. (not used)
N.C. (not used)
N.C. (not used)
Encoder cable* 2
Cable Length 280mm
Plug: 55102-0600 (Molex Japan Co., Ltd.)
Motor cable* 2
Cable Length 280mm
Receptacle: 43025-0400 (Molex Japan Co., Ltd.)
Limit sensor cable
Cable Length 280mm
D-sub9Pin (JAE)
Connector DE-9P-NR
Hood DE-C8-J9-F1-1R
*2
Servo Pack SGDV-2R9EP1A
Motor side (+)
limit sensor
ON when light enters
Note 1
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Opposite side (−)
limit sensor
ON when light enters
Note 1
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with origin and proximity origin sensors.
Limit sensors are used as origin detection sensors.
Note 2 Compatible cable connector:
Japan Ariation Electronics Industry, Ltd. DE-C8-J9-F1-1R
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G057

Motion Control Products
Thin Long Travel Stage
KLSA/KLSS
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
These stages are thin but ensure long travel.
These thin motorized stages can minimize the stage height even when used in combination.
◦Four linear guide blocks are located at optimal
positions to improve positional repeatability.
◦To place importance on price, KLSA which has an
aluminum body is recommended. To place importance
on rigidity, KLSS which has a steel body is
recommended.
Guide
▶Please contact us when assembled into XYZ axis or use in
reversion on the ceiling or vertical direction.
▶Opposite model or various motor changes are optionally available.
G030
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number KLSA-100X KLSS-100X KLSA-200X KLSS-200X
Travel [mm] 100 100 200 200
Table Size [mm] 80×80 80×80 120×120 120×120
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ8mm,
2mm lead
Ball screw diameter φ8mm,
2mm lead
Ball screw diameter φ10mm,
5mm lead
Ball screw diameter φ10mm,
5mm lead
Positioning Slide Liner guide Liner guide Liner guide Liner guide
Stage Material Aluminum Steel Aluminum Steel
Finish Black anodized Black chromium oxide Black anodized Black chromium oxide
Weight [kg] 2.2 3.5 5.1 7.7
(Full) [μm/pulse] 4 4 10 10
Resolution
(Half) [μm/pulse] 2 2 5 5
MAX Speed [mm/sec] 30 30 50 50
Positioning Accuracy [μm] 15 15 20 20
Positional Repeatability [μm] ±1 ±1 ±1 ±1
Load Capacity [N] 147 (15kgf) 147 (15kgf) 294 (30kgf) 294 (30kgf)
Pitch [″/N・cm] 0.05 0.05 0.02 0.02
Moment
Stiffness
Yaw [″/N・cm] 0.05 0.05 0.02 0.02
Roll [″/N・cm] 0.1 0.1 0.02 0.02
Lost Motion [μm] 4 4 4 4
Backlash [μm] 1 1 1 1
Parallelism [μm] 50 50 50 50
Orthogonality of Motion [μm] 10 10 10 10
Pitch [″] / Yaw [″] 20/15 20/15 40/20 40/20
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co.,Ltd.) Limit sensor, origin sensor
Limit Sensor Equipped Equipped Equipped Equipped
Origin Sensor Equipped Equipped Equipped Equipped
Proximity Origin Sensor None None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK545-NBW (□42mm)
Step Angle 0.72°
Power Voltage DC+5V - +24V
Current Consumption
45mA or lower (15mA or lower per sensor)
Control Output
NPN open collector output 50mA
Output Logic
In the case of light shielded ,output transistor OFF (No conduction): Limit sensor
In the case of light shielded ,output transistor ON (Conduction): Origin sensor
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G058
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9076
Outline Drawing
KLSA-100X
(63)
Hexagon socket head cap screw M4×8…6 screws
303
240
4-M4×0.7 depth 8
80
70
KLSA-200X
(63)
Hexagon socket head cap screw M4×8…6 screws
433
370
120
100
4-M6×1 depth 8
Application
Systems
Optics &
Optical
Coatings
Holders
100
42
70
80
140
42
100
120
Bases
Manual
Stages
22.5
50 50
25.5
100 100
Actuators
44
0.5
70
70
70
5
45
(15)
8-M5×0.8 Bottom hole 5.2
8 counterbore
49.5
0.5
100
100
100
(35)
4
50
8-M8×1.25 Bottom hole 6.8
11 counterbore
Motoeized
Stages
Light
Sources
KLSS-100X
Hexagon socket head cap screw M4×8…6 screws
KLSS-200X
Hexagon socket head cap screw M4×8…6 screws
Index
(63)
303
240
80
70
4-M4×0.7 depth 8
(63)
433
370
120
100
4-M6×1 depth 8
Guide
Controllers/Drivers
100
42
70
80
140
42
100
120
Softwares
Stepping Motor
AC Servo Motor
44
22.5
50 50
5
45
49.5
25.5
100 100
4
50
Cables
Piezo
0.5
70
70
70
(15)
8-M5×0.8 Bottom hole 4.2
8 counterbore
0.5
100
100
100
(35)
8-M8×1.25 Bottom hole 6.8
11 counterbore
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6
7
6
7
GND
ORG
8 8 +VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
11
12
13
LS (+)
LS (−)
GND Short
14 14 NEAR circoit
15 15 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
Originside
ON when shaded
Note 1
D phase
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with origin and proximity origin sensors.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Compatible Controllers / Drivers and Cables
Controller
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G102 − G105
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
KLSA-100X
KLSS-100X
KLSA-200X
KLSS-200X
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G059

Motion Control Products
Aluminum Crossed Roller Guide Motorized Stage
TAMM Stage size □40/□60/□100mm
Motorized crossed roller stages that combine compactness, low-profile and high durability.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦Linear motorized stages fitted with anti-creep crossed roller
guide and special nut-shape ball screw configuration,
offering low-profile and high durability.
◦ Aluminum is used as a main material to achieve lightweight,
compact and slim body, effective for spacesaving.
Guide
▶A spacer is required when fixing the stage on a vibration isolator
bench. It can be purchased separately. D055 -
▶After purchasing two X axis stages, to assemble them into an XY
axis stage, assembly adjustment cost and performance inspection
cost will be charged separately.
▶Contact our International Sales Division if you desire to change
motors, etc. Or, use the motorized stage system question sheet.
G111
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number TAMM40-10C TAMM60-15C TAMM100-50C TAMM100-100C
Opposite ModelPart Number TAMM40-10CR TAMM60-15CR TAMM100-50CR TAMM100-100CR
Travel [mm] 10 15 50 100
Table Size [mm] 40×40 60×60 100×100 100×175
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ4mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Positioning Slide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 0.33 0.48 1.9 2.9
(Full) [μm/pulse] 2 2 2 2
Resolution
(Half) [μm/pulse] 1 1 1 1
MAX Speed [mm/sec] 10 10 10 10
Positioning Accuracy [μm] 6 6 6 10
Positional Repeatability [μm] 1 1 1 1
Load Capacity [N] 29.4 (3.0kgf) 49 (5.0kgf) 98 (10.0kgf) 98 (10.0kgf)
Moment Stiffness[″/N・cm] 1.5 0.5 0.05 0.03
Lost Motion [μm] 1 1 1 1
Backlash [μm] 1 1 1 1
Parallelism [μm] 30 30 30 30
Running Parallelism [μm] 10 10 10 10
Pitch [″] / Yaw [″] 25/25 20/20 20/15 20/15
Sensor Part Number
Limit Sensor
Origin Sensor
Micro photo sensor: GP1S097HCZ (Sharp Corporation)
Limit Sensor, Origin Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL OPEN)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL OPEN)
Micro photo sensor: PM-L24 (SUNX Co.,Ltd.)
Limit Sensor, Origin Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL OPEN)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL OPEN)
Proximity Origin Sensor None None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number C9863-90215P (□28mm) PK544NBW (□42mm)
Step Angle 0.72°
Power Voltage DC+5V - +24V
Current Consumption
60mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output 50mA
Output Logic
In the case of light shielded ,output transistor OFF (No conduction): Limit sensor
In the case of light shielded ,output transistor ON (Conduction): Origin sensor
Compatible Driver / Controller
Control System
Compatible Driver
Compatible Controller
SG-5M, SG-5MA, SG-55M, SG-55MA,
SG-514MSC, MC-7514PCL
GSC-01, GSC-02, SHOT-702, GIP-101,
SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
SG-5M, SG-55M, SG-514MSC, MC-7514PCL
SHOT-702, SHOT-302GS,
SHOT-304GS, HIT-M・HIT-S
G060
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9009
Outline Drawing
TAMM40-10C
Hexagon socket
head cap screw
M3×6…4 screws
(128.5)
88.5 40
32
20
4-M3 depth 6
4-M2 depth 4
TAMM60-15C
Hexagon socket
head cap screw
M4×8…4 screws
(153.5)
93.5 60
50
32
4-M4 depth 6
4-M3 depth 6
Application
Systems
Optics &
Optical
Coatings
20
16 16
(14.5) 40
(54.5)
32
25
25
60
(74.5)
Holders
Travel 5
Travel 5
2-M3 depth 3
Travel 7.5
(14.5)
2-M4 depth 3
Travel 7.5
Bases
28
1.5
18
28
14
2
20
Connection Diagram
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13JA-12SC
1 1 Motor lead
2 2 Motor lead
3 3 Motor lead
4 4 Motor lead
5 5 Motor lead
6 6 ORG
Sensor
7 7
Power source 12V
8 8 GND (0V)
9 9 LS (+)
10 10 LS (−)
11
12
11
12
FG
FG
Note 2
32
32
4-3.5 mounting hole
6 counterbore
(5)
5-Phase Stepping
Motor
E-Phase
D-Phase
Originside (ORG)
limit sensor
ON when shaded
Opposite side (−)
limit sensor
ON when light enters
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
C-Phase
A phase
B-Phase
Sharp Corporation
Micro photo sensor
GP1S097HCZ
*Regarding sensor power + VS, use current of about 30mA.
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with proximity origin sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
14
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
50 50
4-4.5 mounting hole
8 counterbore
Compatible Controllers / Drivers and Cables
G020 − G021
(4)
Cable
D15RP-CA
G108
Cable
MINI-CA-SG
G108
Stage
TAMM40-10C
TAMM60-15C
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
TAMM100-50C
(104.5)
204.5
Hexagon socket head cap screw M4×8…4 screws
100
90
60
25 25
8-M4×0.7 depth 8
4-M4×0.7 depth 8
6-M4×0.7 depth 8
TAMM100-100C
(122.5)
Hexagon socket head cap screw M4×8…4 screws
297.5
175
90
70
25 25
4-M4×0.7 depth 6
4-M4×0.7 depth 6
8-M4×0.7 depth 6
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
45
25
60
42.5 0.5
0.5
21.5
25
100
25 25
70
90
100
45
(450)
25
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6
7
6
7
GND
ORG
8 8 +VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
11
12
13
LS (+)
LS (−)
GND Short
14 14 NEAR circoit
15 15 N.C. (not used)
Note 2
90
M4×0.7 depth 8
25
16
43
(15)
4-M5×0.8
8 counterbore
4H7
5-Phase Stepping
Motor
E phase
Originside
ON when shaded
Note 1
D phase
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
90
A phase
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with origin and proximity origin sensors.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
42.5 0.5
0.5
21.5
45
90 90
10
43
(15)
6-M5×0.8
8 counterbore
Compatible Controllers / Drivers and Cables
Controller
SHOT-702 [2 axes]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
G100 − G103
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
TAMM100-50C
TAMM100-100C
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G061

Motion Control Products
Precision Motorized Stages - 5 Phase Stepping Motor
KST-X
High precision X axis stages fitted with precision ball screws and precision crossed roller.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦Steel body offers excellent stiffness and high load
capacity.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc. Or, use the motorized stage system question sheet.
G111
Attention
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number KST-50X KST-100X KST-200X
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 50 100 200
Table Size [mm] 165×165 165×200 165×360
Feed Screw
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ14mm,
2mm lead
Positioning Slide Crossed roller Crossed roller Crossed roller
Stage Material Steel (S50C) Steel (S50C) Steel (S50C)
Weight [kg] 8.6 10.2 20.0
(Full) [μm/pulse] 2 2 4
Resolution
(Half) [μm/pulse] 1 1 2
MAX Speed [mm/sec] 10 10 20
Positioning Accuracy [μm] 5 7 8
Positional Repeatability [μm] 2 2 2
Load Capacity [N] 392 (40.0kgf) 392 (40.0kgf) 392 (40.0kgf)
Pitch [″/N・cm] 0.01 0.01 0.01
Moment
Stiffness
Yaw [″/N・cm] 0.01 0.01 0.01
Roll [″/N・cm] 0.005 0.005 0.005
Lost Motion [μm] 1 1 1
Backlash [μm] 1 1 1
Parallelism [μm] 50 70 100
Running Parallelism [μm] 10 10 20
Pitch [″] / Yaw [″] 15/15 20/20 20/20
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co., Ltd.): Limit sensor, origin sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 1.4A/phase (Oriental Motor Co., Ltd.)
Motor Part Number PK564-NBW (□60mm) PK566-NBW (□60mm) PK569-NBW (□60mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Current Consumption
45mA or lower (15mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, SG-5151, KR-525M
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS
G062
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9023
Outline Drawing
KST-50X
Hexagon socket head cap screw M6×15…4 screws
165
150
110
50 50
90
70
50
25-M4 depth 8
4-M6 depth 12
KST-100X
Hexagon socket head cap screw M6×15…4 screws
200
150
110
50 50
90
70
50
25-M4 depth 8
4-M6 depth 12
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
(274.5)
50
70
90
50 50
110
150
165
(350.3)
50
70
90
50 50
110
150
165
Manual
Stages
Travel 25 Travel 25
Travel 50 Travel 50
Actuators
(61)
31
1
150
(209.2)
7
15
8
10
65
Bottom plate 4-mounting notch
7.5
(61)
31
1
65
7
15
Bottom plate 4-mounting notch
150 25
(269.2)
8
10
Motoeized
Stages
Light
Sources
Index
KST-200X
Hexagon socket head cap screw M6×15…8 screws
360
150
110
50 50
90
70
50
25-M4 depth 8
4-M6 depth 12
Guide
Controllers/Drivers
Softwares
Stepping Motor
50
70
90
50
50
110
150
165
AC Servo Motor
Cables
(585)
Piezo
Travel 100 Travel 100
(61)
31
1
7
15
50 150 50 55
(482.2)
8
10
65
Bottom plate 8-mounting notch
X Translation
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
6
7
8
1
2
3
4
5
6
7
8
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND
ORG
+VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
14
11
12
13
14
LS (+)
LS (−)
GND
NEAR
15 15 N.C. (not used)
Note 2
Short
circuit
5-Phase Stepping
Motor
E phase
D phase
Origin sensor
ON when light enters
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Compatible Controllers / Drivers and Cables
Controller
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
Driver
Drivers
G102
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
KST-X
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
KST-50/100/200 is fitted with an origin sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G063

Motion Control Products
Precision Motorized Stages with built in Glass-scale Encoder
KST(GS)
Application
Systems
Optics &
Optical
Coatings
Holders
Linear scales consist of “scales” used as a ruler and a “detector” which obtains positional
information from the scales.
◦Linear scales are used in indispensable processes in
many fields, and mainly used in equipment for manufacturing
electronic devices such as
semiconductors, flat panel displays (FPD), and printed
wiring boards,
electronic component mounting machine, machine
tools, and carrier machine.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Guide
▶Theoretical resolution of the glass scale is set to 0.05μm.
▶Contact our International Sales Division for resolutions not listed in
the catalog.
Attention
▶When operating the KST(GS) series with closed loop control, in
order to use it within the specifications listed in the catalog, the
number of motor divisions of the controller is recommended to be
set to 100 or higher (travel per pulse is 0.05μm or less).
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number KST(GS)-50X KST(GS)-100X KST(GS)-200X
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 50 100 200
Table Size [mm] 165×165 165×200 165×360
Feed Screw
MotorSpecifications
Motor
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ14mm,
2mm lead
guide Crossed roller guide Crossed roller guide Crossed roller guide
Stage Material Steel Steel Steel
Weight [kg] 9.2 14.3 19.4
(Full) [μm/pulse] 2 2 4
Resolution
(Half) [μm/pulse] 1 1 2
MAX Speed [mm/sec] 10 10 20
Positioning Accuracy [μm] 3 4 5
Positional Repeatability [μm] 0.5 0.5 0.8
Load Capacity [N] 392 (40.0kgf) 392 (40.0kgf) 392 (40.0kgf)
Pitch [″/N・cm] 0.01 0.01 0.01
Moment
Stiffness
Yaw [″/N・cm] 0.01 0.01 0.01
Roll [″/N・cm] 0.005 0.005 0.005
Lost Motion [μm] 0.5 0.5 0.5
Backlash [μm] 1 1 1
Parallelism [μm] 50 70 100
Running Parallelism [μm] 10 10 20
Pitch [″] / Yaw [″] 15/15 20/20 20/20
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co.,Ltd.) Limit sensor, origin sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None None
Proximity Origin Sensor None None None
Type
5-phase stepping motor 1.4A/phase (Oriental Motor Co., Ltd.)
Motor Part Number PK564-NBW (□60mm) PK566-NBW (□60mm) PK569-NBW (□60mm)
Step Angle 0.72°
Compatible Controller
Compatible Controller
SHOT-302GS, SHOT-304GS
G064
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9040
Outline Drawing
KST(GS)-50X
Hexagon socket head cap screw M6×15…4 screws
165
150
110
50 50
90
70
50
25-M4 depth 8
4-M6 depth 12
KST(GS)-100X
Hexagon socket head cap screw M6×15…4 screws
200
150
110
50 50
90
25-M4 depth 8
70
50
4-M6 depth 12
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
(174.7)
50
70
90
50 50
110
150
165
(182.7)
50
70
90
50 50
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
KST(GS)-200X
(183)
Hexagon socket head cap screw M6×15…8 screws
360
150
110
50 50
25-M4 depth 8
90
70
4-M6 depth 12
50
50
70
90
50 50
110
150
165
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
(585)
Travel 100 Travel 100
(63)
31
65
110
150
165
(274.5)
(350.3)
Travel 25 Travel 25
Travel 50 Travel 50
(63)
31
1
7
15
150
8
7.5
10
65
Bottom plate 4-mounting notch
(63)
31
1
(345.5)
150
7
15
8
10
65
Bottom plate 4-mounting notch
25
1
7
15
50 150 50 55
10
Bottom plate 8-mounting notch
X Translation
Theta Rotation
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
5-Phase Stepping
Motor
E phase
A phase
Compatible Controllers / Cables
Controller
Cable
Stage
Goniometer
Vacuum
Options
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6
7
6
7
GND
ORG
8 8 +VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
11
12
13
LS (+)
LS (−)
GND Short
14 14 NEAR circoit
15 15 N.C. (not used)
Note 2
D phase
Originside
ON when shaded
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
G102
DHR-CA
G109
Cable
GSE-CA
G109
KST(GS)-50X
KST(GS)-100X
KST(GS)-200X
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
KST-50/100/200 is fitted with an origin sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G065

Motion Control Products
Precision Motorized Stages - 5 Phase Stepping Motor
KST-XY
High precision XY axis stages fitted with precision ball screws and precision crossed roller.
Application
Systems
Optics &
Optical
Coatings
Holders
◦Steel body offers excellent stiffness and high load
capacity.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc. Or, use the motorized stage system question sheet.
G111
▶We will assemble your X axis stage with a newly purchased X axis
stage at a separate cost.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number KST-50XY KST-100XY KST-200XY
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 50 100 200
Table Size [mm] 165×165 165×200 165×360
Feed Screw
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ14mm,
2mm lead
Positioning Slide Crossed roller Crossed roller Crossed roller
Stage Material Steel (S50C) Steel (S50C) Steel (S50C)
Weight [kg] 17.2 20.4 40.0
Resolution
(Full) [μm/pulse] 2 2 4
(Half) [μm/pulse] 1 1 2
MAX Speed [mm/sec] 10 10 20
Positioning Accuracy [μm] 10 12 15
Positional Repeatability [μm] 2 2 2
Load Capacity [N] 196 (20.0kgf) 196 (20.0kgf) 196 (20.0kgf)
Lost Motion [μm] 1 1 1
Backlash [μm] 1 1 1
Orthogonality of Motion [μm] 5 5 10
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co., Ltd.): Limit sensor, origin sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Proximity Origin Sensor None None None
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Motor / Sensor Specifications
Type
5-phase stepping motor 1.4A/phase (Oriental Motor Co., Ltd.)
Motor
Motor Part Number PK564-NBW (□60mm) PK566-NBW (□60mm) PK569-NBW (□60mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Sensor
Current Consumption
45mA or lower (15mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
(Reference) Precision Specifications of Single Axis Stage
Part Number KST-50X KST-100X KST-200X
Accuracy
Specifications
Pitch [″/N・cm] 0.01 0.01 0.01
Moment
Stiffness
Yaw [″/N・cm] 0.01 0.01 0.01
Roll [″/N・cm] 0.005 0.005 0.005
Parallelism [μm] 50 70 100
Running Parallelism [μm] 10 10 20
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, SG-5151, KR-525M
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS
G066
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9024
Outline Drawing
KST-50XY
Hexagon socket head cap screw M6×15…4 screws
25-M4 depth 8
4-M6 depth 12
Travel 25
KST-100XY
Hexagon socket head cap screw M6×15…4 screws
25-M4 depth 8
4-M6 depth 12
Travel 50
Application
Systems
Optics &
Optical
Coatings
Holders
Travel 25
50
70
90
50 50
110
150
165
82.5
(274.5)
50
70
90
50
50
Travel 25
110
150
165
Travel 25
82.5
(274.5)
8
10
65
130
7
15
7.5
Bottom plate 4-mounting notch
150
Travel 50
50
70
90
50 50
110
150
200
(104.8)
(350.3)
50
70
90
50 50
110
150
Travel 50
165
Travel 50
(104.8)
(350.3)
8
10
65
130
7
15
Bottom plate 4-mounting notch
150
25
Bases
Manual
Stages
Actuators
Motoeized
Stages
KST-200XY
Hexagon socket head cap screw M6×15…8 screws
Light
Sources
Index
Guide
Travel 100
(585)
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6
7
6
7
GND
ORG
8 8 +VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
11
12
13
LS (+)
LS (−)
GND Short
14 14 NEAR circoit
15 15 N.C. (not used)
Note 2
50
70
90
50 50
110
150
165
360
180
5-Phase Stepping
Motor
E phase
Originside
ON when shaded
Note 1
D phase
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
Note 1 The motor side limit sensor is the + direction limit sensor.
KST-50/100/200 is fitted with an origin sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
25-M4 depth 8
4-M6 depth 12
50
70
90
Travel 100
C phase
A phase
50
50
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Travel 100
110
150
165
Travel 100
180
(585)
65
130
7
8
10
15
55 50 150 50
Controller
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
Driver
Bottom plate 8-mounting notch
Compatible Controllers / Drivers and Cables
Drivers
G102
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
KST-XY
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G067

Motion Control Products
Precision Motorized Stages - 5 Phase Stepping Motor
KST-Z
High precision Z axis stages fitted with precision ball screws and precision crossed roller.
Application
Systems
Optics &
Optical
Coatings
Holders
◦Steel body offers excellent stiffness and high load
capacity.
Guide
▶Contact our International Sales Division if you desire to change
motors, etc. Or, use the motorized stage system question sheet.
G111
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number KST-50Z KST-100Z KST-200Z
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 50 100 200
Table Size [mm] 165×165 165×200 165×360
Feed Screw
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ8mm,
1mm lead
Ball screw diameter φ14mm,
2mm lead
Positioning Slide Crossed roller Crossed roller Crossed roller
Stage Material Steel (S50C) Steel (S50C) Steel (S50C)
Weight [kg] 12.8 14.5 27.0
(Full) [μm/pulse] 2 2 4
Resolution
(Half) [μm/pulse] 1 1 2
MAX Speed [mm/sec] 10 10 20
Positioning Accuracy [μm] 5 7 8
Positional Repeatability [μm] 2 2 2
Load Capacity [N] 98 (10.0kgf) 98 (10.0kgf) 98 (10.0kgf)
Pitch [″/N・cm] 0.015 (Y pitch) 0.020 (Y pitch) 0.030 (Y pitch)
Moment
Stiffness
Yaw [″/N・cm] 0.01 (X pitch) 0.015 (X pitch) 0.020 (X pitch)
Roll [″/N・cm] 0.005 0.015 0.015
Lost Motion [μm] 1 1 1
Backlash [μm] 1 1 1
Perpendicularity of Motion [μm] 10 15 25
Pitch [″] / Yaw [″] 20/15 25/20 25/25
Sensor Part Number
Micro photo sensor: PM-L24 (SUNX Co., Ltd.): Limit sensor, origin sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 1.4A/phase (Oriental Motor Co., Ltd.)
Motor Part Number PK564-NBW (□60mm) PK566-NBW (□60mm) PK569-NBW (□60mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Current Consumption
45mA or lower (15mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, SG-5151, KR-525M
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS
G068
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9025
Outline Drawing
KST-50Z
Hexagon socket head cap screw M6×20…4 screws
25-M4 depth 8
4-M6 depth 12
Travel 25
KST-100Z
Hexagon socket head cap screw M6×20…4 screws
25-M4 depth 8
4-M6 depth 12
Travel 50
Application
Systems
Optics &
Optical
Coatings
Holders
50
70
90
50 50
110
150
165
(347)
50
70
90
50
50
Bases
Manual
Stages
KST-200Z
Hexagon socket head cap screw M6×20…4 screws
Actuators
Motoeized
Stages
Light
Sources
Index
25-M4 depth 8
4-M6 depth 12
Travel 100
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
325
110
150
200
(440.5)
155
195
50
70
90
50 50
110
150
165
Travel 25
7.5
7.5
150
165
4-7 mounting hole
50
70
90
50 50
110
150
165
Travel 50
10
7.5
7.5
150
165
4-7 mounting hole
50
70
90
50 50
110
150
360
(730)
Travel 100
7.5
50
70
90
50 50
110
150
165
10
7.5
150
165
4-7 mounting hole
X Translation
Theta Rotation
Connection Diagram
Connector
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6
7
6
7
GND
ORG
8 8 +VS
9
10
9 N.C. (not used)
10 N.C. (not used)
11
12
13
11
12
13
LS (+)
LS (−)
GND Short
14 14 NEAR circoit
15 15 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
Originside
ON when shaded
Note 1
D phase
Motor side (+)
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C phase
A phase
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-L24
Compatible Controllers / Drivers and Cables
Controller
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
Driver
Drivers
G102
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
KST-Z
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
KST-50/100/200 is fitted with an origin sensor.
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G069

Motion Control Products
Translation Motorized Stages, Flat Z axis - 5 Phase Stepping Motor
OSMS-ZF Stage size □40/□60/□80mm
Application
Systems
Optics &
Optical
Coatings
Holders
Z axis stepping motor driven stages for measurement and inspection, offering high stiffness and
high precision.
The table that travels up and down is horizontal and offers smooth travel.
◦Originally designed horizontal plane Z axis stages in
which a motor is incorporated in its main body for
space-saving.
◦Minimized protrusions make these stages ideal for
system assembly
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS40-5ZF OSMS60-5ZF OSMS60-10ZF OSMS80-20ZF
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 5 5 10 20
Table Size [mm] 40×40 60×60 60×60 80×80
Feed Screw
Ball screw diameter φ5mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized Black anodized
Weight [kg] 0.35 0.6 0.6 1.6
(Full) [μm/pulse] 1.0 2.0 2.0 0.2
Resolution
(Half) [μm/pulse] 0.5 1.0 1.0 0.1
MAX Speed [mm/sec] 2 4 4 1
Positional Repeatability [μm] 10 10 10 10
Load Capacity [N] 19.6 (2.0kgf) 39.2 (4.0kgf) 39.2 (4.0kgf) 147 (15.0kgf)
Pitch [″/N・cm] 2.0 0.4 0.4 0.2
Moment
Stiffness
Yaw [″/N・cm] 2.0 1.0 1.0 1.0
Roll [″/N・cm] 1.0 1.0 1.0 1.0
Lost Motion [μm] 5 5 5 5
Parallelism [μm] 50 50 50 50
Running Parallelism [μm] 15 15 15 15
Pitch [″] 25 20 20 25
Sensor Part Number
Micro photo sensor: GP1S097HCZ0F (Sharp Corporation): Limit Sensor (60-5ZF/60-10ZF)
Micro photo sensor: PM-U24 (SUNX Co.,Ltd.): Limit Sensor (40-5ZF/80-20ZF)
Limit Sensor
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Equipped
(NORMAL CLOSE)
Origin Sensor None None None None
Proximity Origin Sensor None None None None
Motor / Sensor Specifications
Motor
Sensor
Type
Motor Part Number
5-phase stepping motor 0.35A/
phase (Oriental Motor Co., Ltd.)
PK513PA-C21
(□20mm)
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
PK523HPB-C12
(□28mm)
PK523HPB-C12
(□28mm)
A7177-90215KTG
(□28mm)
Step Angle 0.72° 0.036°
Power Voltage
DC5 − 24V ±10% or lower
Current Consumption
30mA or lower (15mA or lower per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Control System Compatible Driver SG-5MA, SG-55MA,
SG-514MSC
Compatible Controller
SG-5M, SG-5MA, SG-55M, SG-55MA,
SG-514MSC, MC-7514PCL
GSC-01, GSC-02, SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
SG-55M, SG-55MA,
SG-514MSC, MC-7514PCL
G070
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Catalog
Code
W9077
Outline Drawing
OSMS40-5ZF
Hexagon socket head cap screw M3×15…4 screws
OSMS60-5ZF
Hexagon socket head cap screw M4×15…4 screws
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
OSMS60-10ZF
Hexagon socket head cap screw M4×15…4 screws
OSMS80-20ZF
Hexagon socket head cap screw M4×15…4 screws
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Connection Diagram
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13RA-12SD
1 1 Motor lead
2 2 Motor lead
3 3 Motor lead
4 4 Motor lead
5 5 Motor lead
6 6 N.C. (not used)
7
8
9
10
7
8
9
10
+VS
5 − 24VDC
GND (0V)
LS (+)
LS (−)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
D phase
Opposite side (+)
limit sensor
ON when light enters
Note 1
Motor side (−)
limit sensor
ON when shaded
Note 1
C phase
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with proximity origin sensors.
Limit sensors are used as origin detection sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
A phase
B phase
(60-5ZF/60-10ZF)
Sharp Corporation
Micro photo sensor
GP1S097HCZ0F
40-5ZF/80-20ZF
SUNX Co., Ltd.
Micro photo sensor
PM-U24
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
MINI-CA-SG
G020 − G021
G108
* Adaptation SG-5MA, only SG-55MA is (0.35A/phase) OSMS40-5ZF
Stage
OSMS-ZF
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G071

Motion Control Products
Actuator for Objective Lenses (Stepper motor type)
SGSP-OBL
Stepping motor type objective lens actuator compatible with long strokes.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
◦Since this actuator uses a stepping motor, it can be
connected to our various controllers.
◦It is compact and high resolution, best suited for incorporation
into a microscope lens tube or an auto focus
system.
◦Can be used for upright type and inverted type microscopes.
Guide
▶The dedicated adapters are available according to the microscope
and screw size of objective lens of each manufacturer.
Attention
▶The dedicated adapters are required for mounting the actuator on
microscopes and objective lenses.
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number
Mechanical
Specifications
Accuracy
Specifications
Sensor
SGSP-OBL-3
Travel [mm] 3
Table Size [mm]
(Mounted adapter)
Feed Screw
Precision ground screw φ6mm, 0.5mm lead
Positioning Slide
Crossed roller guide
Stage Material
Aluminum
Finish
White anodized
Weight [kg] 0.4
(Full) [μm/pulse] 1
Resolution
(Half) [μm/pulse] 0.5
MAX Speed [mm/sec] 1
Positioning Accuracy [μm] 5
Positional Repeatability [μm] 2
Load Capacity [N]
4.9 (0.5kgf)
Moment Stiffness[″/N・cm]
−
Lost Motion [μm] 2
Backlash [μm] 1
Parallelism [μm]
−
Running Parallelism [μm] 2
Pitch [″] / Yaw [″] 15/15
Sensor Part Number
Micro photo sensor: GP1S092HCPI (Sharp Corporation)
Limit Sensor
Equipped (NORMAL CLOSE)
Origin Sensor
None
Proximity Origin Sensor
None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.35A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK513PA-C21 (□20mm)
Step Angle 0.72°
Power Voltage
DC - 5V - +24V±10%
Current Consumption
40mA or lower (20mA or lower per sensor)
Control Output
NPN open collector output 50mA
Output Logic
In the case of light shielded ,output transistor OFF (No conduction): Limit sensor
Compatible Driver / Controller
Compatible Driver SG-5MA, SG-55MA, SG-514MSC
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G072
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Catalog
Code
W9078
Outline Drawing
52
(4.5)
Application
Systems
Optics &
Optical
Coatings
(1.8)
54
74.6
Holders
(24)
(6)
38.5 (15.518.5)
(5457)
Bases
Manual
Stages
Actuators
(1.8) 40
14
Motoeized
Stages
Connection Diagram
Light
Sources
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13RA-12SD
5-Phase Stepping
Motor
E-Phase
A phase
Index
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6 6 N.C. (not used)
7
8
9
10
7
8
9
10
VS
5 − 24VDC
GND (0V)
LS (+)
LS (−)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
D-Phase
Motor side ()
limit sensor
ON when light enters
Note 1
Opposite side (−)
limit sensor
ON when light enters
Note 1
C-Phase
B-Phase
Sharp Corporation
Micro photo sensor
GP1S092HCPI
*Regarding sensor power + VS, use current of about 30mA.
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with proximity origin sensors.
Limit sensors are used as origin detection sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Objective Lens Adapters
Outline Drawing
Specifications
Part Number
OBL-ADP3-M**A
OBL-ADP3-M**B
Mounting Screw Size
[mm]
OBL-ADP3-MA
30
28
14.5
2 4.5
B
A
38
A
[mm]
OBL-ADP3-MB
A
2
9
28
30
38
OBL-ADP3-M20.32A Microscope side M20.32 M20.32 P=0.706 (W0.8×1/36) 15
OBL-ADP3-M20.32B Objective lens side M20.32 M20.32 P=0.706 (W0.8×1/36) −
OBL-ADP3-M25.0A Microscope side M25.0 M25.0 P=0.75 20
OBL-ADP3-M25.0B Objective lens side M25.0 M25.0 P=0.75 −
OBL-ADP3-M26.0A Microscope side M26.0 M26.0 P=0.706 (W26.0×1/36) 21
OBL-ADP3-M26.0B Objective lens side M26.0 M26.0 P=0.706 (W26.0×1/36) −
B
[mm]
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G073

Motion Control Products
Rotation Motorized Stages
SGSP-YAW
Stepping motor driven rotation stages fitted with bearing guide and worm gear feed mechanism.
Application
Systems
◦Motorized stages suitable for positioning for measuring,
inspection and evaluation instruments.
Optics &
Optical
Coatings
Holders
Guide
▶Rotation Range
Minus limit sensor: −2.5° Scale: 0°
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
▶Homing of rotation motorized stages is performed using the CW
limit sensor as the origin sensor.
▶Origin detection is adjusted so that the stage stops at 0 degrees
when homing is performed in the MINI system at half step.
Attention
Clockwise CW direction
Stops at near 0° (−2.5°)
Counterclockwise
CCW direction to ∞
▶Attention is required when mounting in upside down direction or on
a vertical plane.
▶Precision and load capacity specifications may be partly not
satisfied depending on the mounting direction.
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number SGSP-40YAW SGSP-60YAW-0B SGSP-60YAW-W-0B
Mechanical
Specifications
Accuracy
Specifications
Sensor
Rotation Range
Move in the counterclockwise CCW direction to ∞, and stop at near 0 degree (−2.5°) in the clockwise CW direction.
Table Size [mm] φ40 φ60 φ60
Travel Mechanism
(reduction ratio)
Worm gear (1:144) Worm gear (1:144) Worm gear (1:144)
Positioning Slide Bearing method Bearing method Bearing method
Stage Material Aluminum / Aluminum bronze Aluminum / Aluminum bronze Aluminum / Aluminum bronze
Weight [kg] 0.35 0.45 1.0
(Full) [°/pulse] 0.005 0.005 0.005
Resolution
(Half) [°/pulse] 0.0025 0.0025 0.0025
MAX Speed [°/sec] 30 30 30
Positioning Accuracy [ ° ] 0.1 0.1 −
Positional Repeatability [ ° ] 0.02 0.02 0.02
Load Capacity [N] 19.6 (2.0kgf) 29.4 (3.0kgf) 29.4 (3.0kgf)
Moment Stiffness [″/N・cm] 2 1 −
Lost Motion [ ° ] 0.05 0.05 0.05
Backlash [ ° ] 0.1 0.1 0.1
Parallelism [μm] 50 50 −
Concentricity [μm] 30 30 −
Wobble [mm] 0.02 0.02 −
Sensor Part Number
Micro Photoelectric Sensor:
PM-F24 (SUNX Co., Ltd.)
Micro Photoelectric Sensor:
PM-R24 (SUNX Co., Ltd.)
Micro Photoelectric Sensor:
PM-R24 (SUNX Co., Ltd.)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None None
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.66A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3664N4 (□24mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Current Consumption
15mA or lower
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G074
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9027
Outline Drawing
SGSP-40YAW
14
Hexagon socket head cap screw M3×15…3 screws
(91)
M6 depth 5 21
+0.025
15( +0.005)
SGSP-60YAW-0B
Hexagonal socket head cap screw M4×10…3 screws
(112)
+0.025
25() +0.005
Application
Systems
Optics &
Optical
Coatings
(15)
(56)
20
32
21
51.5
(26)
(70)
32
50
30
64
Holders
(14.5)
86
20
32
4-M2 depth 5
4-M3 depth 5
P.C.D.32
(14)
32
50
60
5
5
4-M3 depth 5.5
Bases
40
4-M4 depth 5.5
P.C.D.50
30
107
60
Manual
Stages
(27.5)
14.5
11
28
(27.5)
14
28
Actuators
0.5
SGSP-60YAW-W-0B
3-3.6 mounting hole
6 counterbore
Hexagonal socket head cap screw M4×10…4 screws
(155.5)
(112)
+0.025
25() +0.005
0.5
5
2-M6 depth 5 3-4.6 mounting hole
8 counterbore
Motoeized
Stages
Light
Sources
75
60
Index
(52.5)
(128.5)
110
55
100
60
32
2-M4
M16×1
Guide
50
60
(19.8)
(60.8)
4-M4 depth 5.5
P.C.D.50
4-M3 depth 5.5
32
50
30
60
60
When homing of SGSP-60YAW-W-0B is
performed, the position will become as
shown below.
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
(74.3)
41
20
6
40
75
Cables
Piezo
Connection Diagram
6.3
6
4-4.5 mounting hole
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13RA-12SC
5-Phase Stepping
Motor
E phase
A phase
1 1 Motor lead
2 2 Motor lead
3 3 Motor lead
4 4 Motor lead
5 5 Motor lead
6 6 N.C. (not used)
7
8
9
7
8
9
+VS
GND (0V)
10 10
Machine origin sensor
(CW limit sensor)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
D phase
Machine origin sensor Note 1
(CW limit sensor)
C phase
SUNX Co., Ltd.
Micro photo sensor
PM-F24/R24
ON when light enters
B phase
Note 1 When a travel command in the “+” direction is issued, the mounting table rotates to ∞ in
the CCW (counterclockwise) direction viewed from the top surface, but it is stopped by
the machine origin sensor (CW limit sensor) in the CW (clockwise) direction.
Detect the machine origin using the method (MINI system) that detects the origin with a
machine origin sensor (CW limit sensor).
Note 2 Compatible cable connector: Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
Machine Origin Detection
MINI System
When the machine origin detection command is
issued, the stage starts traveling in the CW (-)
direction at the operating speed (F) set with the
memory switch, and stops by the CW (-) side
limit sensor. Then it travels in the CCW (+)
direction at the operating speed (F) for 1000
pulses.
After stop, it starts traveling in the CW (-)
direction again at the starting speed (S), and
stops by the CW (-) side limit sensor. After that,
it travels in the CCW (+) direction at the
operating speed (F) for 1000 pulses.
This position is regarded as the machine origin.
Operating speed (F)
Stage
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
Starting speed (S)
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
CW (−) side limit sensor
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
G020 − G021
Cable
D15RP-CA
G108
Cable
MINI-CA-SG
G108
Stage
SGSP-40YAW
SGSP-60YAW-OB
SGSP-60YAW-W-OB
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G075

Motion Control Products
Rotation Motorized Stages
SGSP-YAW
Stepping motor driven rotation stages fitted with bearing guide and worm gear feed mechanism.
Application
Systems
◦Motorized stages suitable for positioning for measuring,
inspection and evaluation instruments.
Optics &
Optical
Coatings
Holders
Guide
▶Rotation Range
Minus limit sensor : −2.5° Scale : 0°
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Clockwise CW direction
Stops at near 0° (−2.5°)
Counterclockwise
CCW direction to ∞
▶Homing of rotation motorized stages is performed using the CW
limit sensor as the origin sensor.
▶Origin detection is adjusted so that the stage stops at 0 degrees
when homing is performed in the MINI system at half step.
Attention
▶Attention is required when mounting in upside down direction or on
a vertical plane.
▶Precision and load capacity specifications may be partly not
satisfied depending on the mounting direction.
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number SGSP-80YAW SGSP-120YAW SGSP-160YAW SGSP-120YAW-W
Mechanical
Specifications
Accuracy
Specifications
Sensor
Rotation Range
Move in the counterclockwise CCW direction to ∞, and stop at near 0 degree (−2.5°) in the clockwise CW direction.
Table Size [mm] φ80 φ120 φ160 φ120
Travel Mechanism
(reduction ratio)
Worm gear (1:144) Worm gear (1:144) Worm gear (1:144) Worm gear (1:144)
Positioning Slide Bearing method Crossed roller Crossed roller Crossed roller
Stage Material
Aluminum / Aluminum bronze Aluminum / Aluminum bronze Aluminum / Aluminum bronze Aluminum / Aluminum bronze
Weight [kg] 1.1 2.0 2.5 5.5
(Full) [°/pulse] 0.005 0.005 0.005 0.005
Resolution
(Half) [°/pulse] 0.0025 0.0025 0.0025 0.0025
MAX Speed [°/sec] 30 30 30 30
Positioning Accuracy [ ° ] 0.15 0.1 0.1 −
Positional Repeatability [ ° ] 0.02 0.02 0.02 0.02
Load Capacity [N] 98 (10.0kgf) 196 (20.0kgf) 196 (20.0kgf) 196 (20.0kgf)
Moment Stiffness [″/N・cm] 0.2 0.1 0.1 −
Lost Motion [ ° ] 0.05 0.05 0.05 −
Backlash [ ° ] 0.08 0.08 0.08 0.08
Parallelism [μm] 50 50 60 −
Concentricity [μm] 30 30 30 −
Wobble [mm] 0.02 0.02 0.02 −
Sensor Part Number
Micro Photoelectric Sensor: PM-F24 (SUNX Co., Ltd.)
Limit Sensor
Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None None None
Proximity Origin Sensor None None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK525HPB-C4 (□28mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Current Consumption
15mA or lower
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G076
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9028
Outline Drawing
SGSP-80YAW
Hexagonal socket head cap screw M4×10…3 screws
(153)
+0.04
32() +0.005
SGSP-120YAW
Hexagon socket head cap screw M6×10…3 screws
(183.5)
Application
Systems
Optics &
Optical
Coatings
SGSP-160YAW
(33)
17
(98)
4-M4 depth 5
1
32
50
70
40
80
80
(117)
32
50
70
5
40
89
4-M3 depth 5
4-M4 depth 5
P.C.D.62
2-M6 depth 5
35
17
3-4.5 mounting hole
8.2 counterbore
Hexagon socket head cap screw M6×10…3 screws
(202.5)
(183.5)
11 mounting hole
(68.7)
(17.5)
SGSP-120YAW-W
(33)
18
(137)
2
+0.05
+0.005
64()
50
100
61
123
120
50
100
122
5
61
128
4-M4 depth 6
4-M4 depth 6
P.C.D.100
35
3-6.5 mounting hole
11 counterbore
Hexagon socket head cap screw M6×18…3 screws
(246)
(183.5)
50
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
(68.7)
(156)
(137)
+0.05
+0.005
60( )
50
100
61
122
(92.7)
(208)
170
150
50
85
4-M4 depth 6
64
()
+0.05
+0.005
145
115
25 25
Index
(17.5)
4-M4 depth 6
50
100
123
61
4-M4 depth 6
(27.5)
(83.5)
4-M4 depth 6
P.C.D.100
50
100
122
61
25 25
M16×160
8-M4
Guide
Controllers/Drivers
Softwares
160
120
Stepping Motor
(33)
18
2
Connection Diagram
5
35
43
3-6.5 mounting hole
11 counterbore
(99)
56
28
10
10
55
101
4-6.5 mounting hole
AC Servo Motor
Cables
Piezo
Connector Pin Number
Hirose Electric Co., Ltd.
SDAB-15P equivalent
5-Phase Stepping
Motor
E phase
A phase
If homing of SGSP-120YAW-W is
performed, the position will become as
shown below.
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Note 2
1 Motor lead
2 Motor lead
3 Mmotor lead
4 Motor lead
5 Mmotor lead
6 GND
7
8 VS
9 N.C. (not used)
10 N.C. (not used)
11
Machine origin sensor
12
(CW limit sensor)
13 GND
14
15 N.C. (not used)
Machine Origin Detection
MINI System
When the machine origin detection command is
issued, the stage starts traveling in the CW (-)
direction at the operating speed (F) set with the
memory switch, and stops by the CW (-) side
limit sensor. Then it travels in the CCW (+)
direction at the operating speed (F) for 1000
pulses.
After stop, it starts traveling in the CW (-)
direction again at the starting speed (S), and
stops by the CW (-) side limit sensor. After that,
it travels in the CCW (+) direction at the
operating speed (F) for 1000 pulses.
This position is regarded as the machine origin.
D phase
Machine origin sensor Note 1
(CW limit sensor)
C phase
Operating speed (F)
Stage
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
Starting speed (S)
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
CW (−) side limit sensor
B phase
SUNX Co., Ltd.
Micro photo sensor
PM-F24
ON when light enters
Note 1 When a travel command in the “+” direction is issued, the mounting table rotates to ∞ in
the CCW (counterclockwise) direction viewed from the top surface, but it is stopped by
the machine origin sensor (CW limit sensor) in the CW (clockwise) direction.
Detect the machine origin using the method (MINI system) that detects the origin with a
machine origin sensor (CW limit sensor).
Note 2 Compatible cable connector: DDK Ltd. 17JE-13150
Compatible Controllers / Drivers and Cables
Controller
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G088 − G096
Driver
Drivers
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
SGSP-80YAW
SGSP-120YAW
SGSP-160YAW
SGSP-120YAW-W
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G077

Motion Control Products
Precision Rotation Motorized Stages
KST-YAW
High precision and high stability rotation motorized stages fitted with bearing positioning slide.
Application
Systems
Optics &
Optical
Coatings
◦Rotation motorized stages suitable for when high load
capacity is required.
◦Back up various inspection instruments according to
usage such as the type, size, and measurement range
of the measuring object.
Holders
Bases
Guide
▶Rotation Range
Minus limit sensor: −2.5° Scale: 0°
Manual
Stages
Clockwise CW direction
Stops at near 0° (−2.5°)
Counterclockwise
CCW direction to ∞
Actuators
Motoeized
Stages
Light
Sources
Index
▶Homing of rotation motorized stages is performed using the CW
limit sensor as the origin sensor.
▶Origin detection is adjusted so that the stage stops at 0 degrees
when homing is performed in the MINI system at half step.
Attention
▶Attention is required when mounting in upside down direction or on
a vertical plane.
▶Precision and load capacity specifications may be partly not
satisfied depending on the mounting direction.
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number KST-120YAW KST-160YAW
Mechanical
Specifications
Accuracy
Specifications
Sensor
Rotation Range
Move in the counterclockwise CCW direction to ∞, and stop at near 0 degree (−2.5°) in the clockwise CW direction.
Table Size [mm] φ120 φ160
Travel Mechanism
(reduction ratio)
Worm gear (1:144) Worm gear (1:144)
Positioning Slide Bearing method Bearing method
Stage Material Aluminum / Aluminum bronze Aluminum / Aluminum bronze
Weight [kg] 5 8.5
Resolution
(Full) [°/pulse] 0.005 0.005
(Half) [°/pulse] 0.0025 0.0025
MAX Speed [°/sec] 30 30
Positioning Accuracy [ ° ] 0.1 0.1
Positional Repeatability [ ° ] 0.01 0.01
Load Capacity [N] 343 (35.0kgf) 392 (40.0kgf)
Moment Stiffness [″/N・cm] 0.015 0.01
Lost Motion [ ° ] 0.01 0.01
Backlash [ ° ] 0.003 0.003
Parallelism [μm] 50 50
Concentricity [μm] 20 20
Wobble [mm] 0.01 0.01
Sensor Part Number Micro Photoelectric Sensor: PM-U24 (SUNX Co., Ltd.) Micro Photo Sensor: PM-R24 (SUNX Co., Ltd.)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None
Proximity Origin Sensor None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 1.4A/phase (Tamagawa Seiki Co., Ltd.)
Motor Part Number
TS3624N42E (□60mm)
Step Angle 0.72°
Power Voltage DC5 − 24V ±10%
Current Consumption
15mA or lower
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
When shaded: Output transistor OFF
Compatible Driver / Controller
Compatible Driver SG-5M*, SG-55M*, SG-514MSC*, MC-7514PCL (* DC36V)
Control System
Compatible Controller
SHOT-302GS, SHOT-304GS
G078
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9029
Outline Drawing
KST-120YAW
Hexagon socket head cap screw M6×154 screws
(228.5)
KST-160YAW
Hexagon socket head cap screw M6×254 screws
(261)
Application
Systems
Optics &
Optical
Coatings
Holders
(50)
(149)
70
+0.04
+0.005
56()
50
100
60
(82)
(197)
112
7 mounting hole
+0.05
+0.005
80()
100
140
150
82
Bases
(42)
8-M4 depth 6
P.C.D.100
30
50
100
60
156
120
4-M4 depth 10
(41.5)
8-M4 depth 10
P.C.D.100
3-M6 depth 12
P.C.D.140
15
100
140
150
189
160
82
3-7
mounting hole
4-M6 depth 12
Manual
Stages
Actuators
Motoeized
Stages
(77)
45
12.5
12
82
4-7 mounting hole
(79.5)
47.5
12.5
12
90
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Note 1
Connector Pin Number
Hirose Electric Co., Ltd.
SDAB-15P equivalent
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 GND
7
8 VS
9 N.C. (not used)
10 N.C. (not used)
11
Machine origin sensor
12
(CW limit sensor)
13 GND
14
15 N.C. (not used)
Machine Origin Detection
MINI System
When the machine origin detection command is
issued, the stage starts traveling in the CW (-)
direction at the operating speed (F) set with the
memory switch, and stops by the CW (-) side
limit sensor. Then it travels in the CCW (+)
direction at the operating speed (F) for 1000
pulses.
After stop, it starts traveling in the CW (-)
direction again at the starting speed (S), and
stops by the CW (-) side limit sensor. After that,
it travels in the CCW (+) direction at the
operating speed (F) for 1000 pulses.
This position is regarded as the machine origin.
5-Phase Stepping
Motor
E phase
D phase
SUNX Co., Ltd.
Micro photo sensor
120YAW PM-U24
160YAW PM-R24
ON when light enters
Machine origin sensor
(CW limit sensor)
Note 1 Compatible cable connector: DDK Ltd. 17JE-13150
C phase
Operating speed (F)
Stage
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
Starting speed (S)
CW (−)
Operating speed (F) 1000 pulse travel
CCW ()
CW (−) side limit sensor
A phase
B phase
Compatible Controllers / Drivers and Cables
Controller
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
Driver
Drivers
G102
G020 − G021
Cable
D15D15A-CA
G108
Cable
DAC-SG
G108
Stage
KST-120YAW
KST-160YAW
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G079

Motion Control Products
High Durability Motorized Rotation Stages
HDS-YAW
It is a small angle adjusting automatic rotation stages using in the alignments for a marker of semiconductor wafer.
Application
Systems
Optics &
Optical
Coatings
Holders
◦Good for the automatic alignment device which needs for adjusting the small angle of rotation by each sample.
◦By using the ball screw system on the drive mechanism, it can reduce abrasion and backlash of parts which realized high
durability.
◦Since it converted linear motion by the ball screw into rotational motion by the steel belt, there is no difference between
traveling center and end by rotation speed and resolution.
Guide
▶Rotation range
CCW (+)
CW (–)
Bases
Manual
Stages
Actuators
HDS-60YAW , HDS-80YAW
Counterclockwise CCW Direction (+)
Stop on +5°
HDS-120YAW
Counterclockwise CCW Direction (+)
Stop on +6°
HDS-60YAW , HDS-80YAW
Clockwise CW Direction (-)
Stop on -5°
HDS-120YAW
Clockwise CW Direction (-)
Stop on -6°
Motoeized
Stages
Light
Sources
Attention
▶Please be mounted HDS series in horizontal. Can not be guaranteed
the performance if used in reversion on the roof or
vertically situation. If you would like a special mounting, please
contact our sales department.
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number HDS-60YAW HDS-80YAW HDS-120YAW
Mechanical
Specifications
Accuracy
Specifications
Sensor
Rotation Range ±5° ±5° ±6°
Table Size [mm] φ60 φ80 φ120
Travel Mechanism Ball screw with steel belt Ball screw with steel belt Ball screw with steel belt
Positioning Slide Bearing method Bearing method Crossed roller guide
Stage Material Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized
Weight [kg] 0.5 0.9 1.4
Resolution
(Full) [°/pulse] ≒0.00053 ≒0.00038 ≒0.00022
(Half) [°/pulse] ≒0.00027 ≒0.00019 ≒0.00011
MAX Speed [°/sec] 60 60 60
Positioning Accuracy [°] 0.05 0.05 0.05
Positional Repeatability [°] 0.003 0.003 0.003
Load Capacity [N] 29.4 (3.0kgf) 58.8 (3.0kgf) 98 (10kgf)
Moment Stiffness [″/N・cm] 1 0.2 0.1
Lost Motion [°] 0.003 0.003 0.003
Backlash [°] 0.05 0.05 0.05
Parallelism [μm] 50 50 50
Concentricity [μm] 10 10 10
Wobble [mm] 0.01 0.01 0.01
Sensor Part Number
Micro photo sensor: GP1S097HCZ(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Equipped (NORMAL OPEN)
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.66A/phase
(Tamagawa Seiki Co., Ltd.)
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number TS3664N4 (□24mm) C9863-90215P (□28mm)
Step Angle 0.72°
Power Voltage
DC5 - 24V±10%
Current Consumption
60mA or lower (20mA per sensor)
Control Output
NPN open collector output DC30V or lower, 50mA or lower
Output Logic
“When shaded: Output transistor OFF (no conduction): Limit sensor
When shaded: Output transistor ON (conduction): Origin sensor”
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC
Control System
Compatible Controller
GSC-01, GIP-101, GSC-02, SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G080
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9079
Outline Drawing
HDS-60YAW
Hexagon socket head cap screw M4×12…3 screws
(126)
25 ( 0.025
0.005)
HDS-80YAW
Hexagon socket head cap screw M4×12…3 screws
(142)
132
Application
Systems
Optics &
Optical
Coatings
32 ( 0.070
0.005)
Holders
90
32
50
30
32
50
70.05
(110.5)
Bases
12.5
4-M4 depth 5.5
P.C.D.50
119.5
32
50
30
60
4-M3 depth 5.5
4.5
28
40
32
4-M3 depth 5
4-M4 depth 5 50
70
4-M4 depth 5
P.C.D.62
40
88
80
Manual
Stages
Actuators
Motoeized
Stages
HDS-120YAW
Hexagon socket
head cap screw M6×12…3 screws
3-4.5 mounting hole
8 counterbore
(164)
155
6.5
35
3-4.5 mounting hole
8.2 counterbore
Light
Sources
Index
Guide
Controllers/Drivers
64 (0.005
−0.050 )
50
100
(161.9)
Softwares
Stepping Motor
AC Servo Motor
60
Cables
50
100
130
60
4-M4 depth 6
4-M4 depth 6
P.C.D.100
Piezo
120
4
35
3-6.5 mounting hole
11 counterbore
X Translation
Theta Rotation
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
Note 2
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13R-12SC
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 ORG
7
Sensor
Power source 12V
8 GND (0V)
9 LS (+)
10 LS (−)
11 FG
12 FG
5-Phase Stepping
Motor
E-Phase A phase
D-Phase
B-Phase
C-Phase
Originside (ORG)
limit sensor
ON when shaded
Opposite side (−)
limit sensor
ON when light enters
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
GP1S097HCZ0F
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
Stage
HDS-60YAW
HDS-80YAW
HDS-120YAW
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the (+) forward direction limit sensor.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
G020 − G021
MINI-CA-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G081

Motion Control Products
Motorized Extended Guide Goniometer
OSMS-40A Stage size □40mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
High precision motorized goniometers with integrated bearing ways for superior stiffness, accuracy
and durability.
Their smooth movement is ideal for frequent angle adjustment.
◦Cost-effective motorized stages achieved by integrated
structure in which guides are directly processed on the
main body to reduce the number of parts and assembly
time.
◦Attachment pins (accessories) are ideal for positioning
when assembling into αβ axis or mounting on various
instruments or devices.
Guide
▶Contact our International Sales Division
if you desire to assemble into an αβ axis
stage.
▶Contact our International Sales Division
if you desire a rotation center height not
listed in the catalog.
▶Manual type (GOHT-40) is also available.
E168
GOHT-40
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS-40A60 OSMS-40A75
(Opposite Model) OSMS-40A60R OSMS-40A75R
Mechanical
Specifications
Size Tolerance
Accuracy
Specifications
Sensor
Travel [°] ±5 ±4
Table Size [mm] 40×40 40×40
Travel Mechanism
(reduction ratio)
Worm gear (1: 332) Worm gear (1: 406)
Positioning Slide Extended Contact Ball Guide Extended Contact Ball Guide
Stage Material SUS440C quench hardened SUS440C quench hardened
Finish Super black chrome Super black chrome
Weight [kg] 0.4 0.4
Stage Height [mm] 15 15
Rotation Center Height [mm] 60±0.1 75±0.1
Rotation Center Deflection Accuracy [mm] Within φ0.01 Within φ0.01
(Full) [°/pulse] about 0.00217 about 0.00177
Resolution
(Half) [°/pulse] about 0.00108 about 0.00089
MAX Speed [°/sec] 10 8.9
Positional Repeatability [°] ±0.004 ±0.004
Load Capacity [N] 19.6(2.0kgf) 19.6(2.0kgf)
Moment Stiffness [″/N・cm] Roll 0.6 Yaw 0.6 Roll 0.6 Yaw 0.6
Lost Motion [°] 0.02 0.02
Sensor Part Number
Micro photo sensor: GP1S092HCPIF(Sharp Corporation): Limit Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK523HPB-C12 (□28mm)
Step Angle 0.72°
Power Voltage DC - 5V - +24V
Current Consumption
40mA or lower (20mA per sensor)
Control Output
NPN open collector output 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G082
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9079
Outline Drawing
OSMS-40A60
(51)
(31.6)
15.8
(125.9)
78.3
M3depth 3
M4depth 3
4 H7
Hexagon socket head cap screw M3×6…4 screws,
Attachment pins
40
16 16
(7.6)
6-M3depth 5
M3depth 3
16
16
40
(14.5)
60
15
(10)
32 32
Rotation center
1
4-3.5 mounting hole
6 counterbore
OSMS-40A60R
Rotation center
1
4-3.5 mounting hole
6 counterbore
32
Hexagon socket head cap screw M3×6…4 screws,
Attachment pins
(125.9)
(7.6) 40
78.3
6-M3depth 5 16 16 M3depth 3
M3depth 3
40
(14.5)
(10) 15 60 16 16
32
M4depth 3
4 H7
(51)
(31.6)
15.8
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
OSMS-40A75
(51)
Hexagon socket head cap screw M3×6…4 screws,
Attachment pins
(125.9)
78.3
40 (7.6)
16 16 6-M3depth 5
M3depth 3
M3depth 3
16 16
40
OSMS-40A75R
Hexagon socket head cap screw M3×6…4 screws,
Attachment pins
(7.6)
6-M3depth 5
M3depth 3
40
16 16
40
16 16
(125.9)
78.3
M3depth 3
(51)
Guide
Controllers/Drivers
Softwares
Stepping Motor
M4depth 3
(14.5)
Rotation center
Rotation center
(14.5)
M4depth 3
AC Servo Motor
Cables
(31.6)
15.8
4 H7
(10) 15 75
32 32
1
4-3.5 mounting hole
6 counterbore
1
4-3.5 mounting hole
6 counterbore
32
(10) 15
75
32
4 H7
15.8
(31.6)
Piezo
X Translation
Theta Rotation
Connection Diagram
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13R-12SD
1 1 Motor lead
2 2 Motor lead
3 3 Motor lead
4 4 Motor lead
5 5 Motor lead
6 6 N.C. (not used)
7
8
9
10
7
8
9
10
VS
5~24VDC
GND (0V)
LS (+)
LS (−)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E-Phase
D-Phase
C-Phase
A phase
B-Phase
Motor side (+)
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
GP1S092HCPI
Opposite side (−)
limit sensor
ON when shaded
Note 1
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with origin and proximity origin sensors.
Limit sensors are used as origin detection sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
G020 − G021
Cable
D15RP-CA
G108
Cable
MINI-CA-SG
G108
Stage
OSMS-40A
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G083

Motion Control Products
Motorized Extended Guide Goniometer
OSMS-60A Stage size □60mm
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
High precision motorized goniometers with integrated bearing ways for superior stiffness, accuracy
and durability.
Their smooth movement is ideal for frequent angle adjustment.
◦Cost-effective motorized stages achieved by integrated
structure in which guides are directly processed on the
main body to reduce the number of parts and assembly
time.
◦Attachment pins (accessories) are ideal for positioning
when assembling into αβ axis or mounting on various
instruments or devices.
Guide
▶Contact our International Sales Division if
you desire to assemble into an αβ axis
stage.
▶Manual type (GOHT-60) is also available.
E172
Motoeized
Stages
GOHT-60
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number OSMS-60A60 OSMS-60A85 OSMS-60A105
(Opposite Model) OSMS-60A60R OSMS-60A85R OSMS-60A105R
Mechanical
Specifications
Size Tolerance
Accuracy
Specifications
Sensor
Travel [°] ±14 ±9 ±7
Table Size [mm] 60×60 60×60 60×60
Travel Mechanism
(reduction ratio)
Worm gear (1: 246) Worm gear (1: 314) Worm gear (1: 380)
Positioning Slide Extended Contact Ball Guide Extended Contact Ball Guide Extended Contact Ball Guide
Stage Material SUS440C quench hardened SUS440C quench hardened SUS440C quench hardened
Finish Super black chrome Super black chrome Super black chrome
Weight [kg] 0.85 0.75 0.75
Stage Height [mm] 25 20 20
Rotation Center Height [mm] 60±0.1 85±0.1 105±0.1
Rotation Center Deflection Accuracy [mm] Within φ0.01 Within φ0.01 Within φ0.01
(Full) [°/pulse] about 0.00293 about 0.00229 about 0.00198
Resolution
(Half) [°/pulse] about 0.00146 about 0.00115 about 0.00095
MAX Speed [°/sec] 10 8 6.6
Positional Repeatability [°] ±0.004 ±0.004 ±0.004
Load Capacity [N] 29.4(3.0kgf) 29.4 (3.0kgf) 29.4 (3.0kgf)
Moment Stiffness [″/N・cm] Roll 0.3 Yaw 0.3 Roll 0.3 Yaw 0.3 Roll 0.3 Yaw 0.3
Lost Motion [°] 0.02 0.02 0.02
Sensor Part Number
Micro photo sensor: GP1S097HCZ0F(Sharp Corporation): Limit Sensor, Origin Sensor
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor Equipped (NORMAL OPEN) Equipped (NORMAL OPEN) Equipped (NORMAL OPEN)
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
PK523HPB-C12 (□28mm)
Step Angle 0.72°
Power Voltage DC - 5V - +24V
Current Consumption
60mA or lower (20mA per sensor)
Control Output
NPN open collector output 50mA
Output Logic
When shaded: Output transistor OFF (no conduction): Limit sensor
When shaded: Output transistor ON (conduction): Origin sensor
Compatible Driver / Controller
Compatible Driver SG-5M, SG-5MA, SG-55M, SG-55MA, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G084
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9080
Outline Drawing
OSMS-60A60
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
80
60 (9.3)
25 25 M4 depth 4
4-M3 depth 4 32
M4 depth 4
OSMS-60A60R
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
(9.3) 60
80
M4 depth 4 25 25
M4 depth 4 32
4-M3 depth 4
Application
Systems
Optics &
Optical
Coatings
(56)
32
25
60
60
25
32
(56)
Holders
25
(13.4)
25
M4 depth 4 6-M4 depth 5
Rotation center
Rotation center
(13.4)
6-M4 depth 5
M4 depth 4
Bases
(31.6)
15.8
OSMS-60A85
4 H7
50
(8) 25 60
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
80
60 (9.3)
M4 depth 4 25 25 6-M4 depth 5
4-M3 depth 4 32 M4 depth 4
25
50
3
4-4.5 mounting hole
8 counterbore
3
4-4.5 mounting hole
8 counterbore
OSMS-60A85R
50
(8) 25 60
50 4 H7
15.8
(31.6)
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
(9.3) 60
80
6-M4 depth 5 25 25 M4 depth 4
M4 depth 4 32 4-M3 depth 4
25
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
(56)
M4 depth 4
32
25
60
Rotation center
Rotation center
60
25
32
M4 depth 4
(56)
Index
(31.6)
15.8
(13.4)
(13.4)
4 H7
OSMS-60A105
(56)
(8) 20 85
50 50
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
80
60 (9.3)
M4 depth 4 25 25
32
6-M4 depth 5
4-M3 depth 4
M4 depth 4
32
25
25
60
2
4-4.5 mounting hole
8 counterbore
2
4-4.5 mounting hole
8 counterbore
OSMS-60A105R
50
(8) 20 85
50
4 H7
15.8
(31.6)
Hexagon socket head cap screw M4×6…4 screws,
Attachment pins
(149.3)
(9.3) 60
80
6-M4 depth 5
25 25 M4 depth 4
32
M4 depth 4
4-M3 depth 4
60
25 25
32
(56)
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
M4 depth 4
Rotation center
Rotation center
M4 depth 4
(13.4)
(31.6)
15.8
(13.4)
1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 ORG
7
+VS
524VDC
8 GND (0V)
9 LS (+)
10 LS (−)
11 FG
12 FG
4 H7
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13R-12SD
50
Connection Diagram
1
2
3
4
5
6
7
8
9
10
11
12
Note 2
(8) 20
105
50
5-Phase Stepping
Motor
E-Phase
D-Phase
Originside (ORG)
limit sensor
ON when shaded
Opposite side (−)
limit sensor
ON when light enters
Note 1
Motor side (+)
limit sensor
ON when light enters
Note 1
2
4-4.5 mounting hole
8 counterbore
C-Phase
A phase
B-Phase
Sharp Corporation
Micro photo sensor
GP1S097HCZ0F
2
4-4.5 mounting hole
8 counterbore
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
50
20 105
(8)
50
Cable
D15RP-CA
G108
Cable
4 H7
15.8
(31.6)
Stage
OSMS-60A
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
Motorized stages are not fitted with proximity origin sensors.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. RP17-13PA-12PC/RP17-PC-122
G020 − G021
MINI-CA-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G085

Motion Control Products
Motorized Goniometers - 5 Phase Stepping Motor
SGSP-A Stage size □60mm
Stepping motor driven motorized goniometer stages fitted with crossed roller guide.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
◦High stiffness goniometer stages fitted with excellent
abrasion-resistant crossed roller guide.
◦Rotation center height from the table face is selectable
according to the usage from 75mm, 100mm or 130mm.
Guide
▶After purchasing two α axis stages, to assemble them into an αβ
axis stage, assembly adjustment cost and performance inspection
cost will be charged separately.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number SGSP-60A75 SGSP-60A100 SGSP-60A130
Mechanical
Specifications
Size Tolerance
Accuracy
Specifications
Sensor
Angle Range [°] ±7 ±5 ±4
Table Size [mm] 60×60 60×60 60×60
Positioning Slide Crossed roller guide Crossed roller guide Crossed roller guide
Travel Mechanism Worm and worm wheel Worm and worm wheel Worm and worm wheel
Stage Material Aluminum Aluminum Aluminum
Finish Black anodized Black anodized Black anodized
Weight [kg] 0.65 0.55 0.65
Stage Height [mm] 35 30 35
Rotation Center Height [mm] 75 100 130
Rotation Center Deflection Accuracy [mm] φ0.05 φ0.05 φ0.05
(Full) [°/pulse] about 0.002 about 0.001 about 0.001
Resolution
(Half) [°/pulse] about 0.001 about 0.0005 about 0.0005
MAX Speed [°/sec] 6 6 6
Positional Repeatability [°] ±0.004 ±0.004 ±0.004
Load Capacity [N] 24.5 (2.5kgf) 24.5 (2.5kgf) 24.5 (2.5kgf)
Moment Stiffness [″/N・cm] 1 1 1
Lost Motion [°] 0.02 0.02 0.02
Sensor Part Number
Micro photo sensor: GP1S092HCPI(Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None None
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
C9863-90215P
Step Angle 0.72°
Power Voltage
DC5 - 24V
Current Consumption
40mA or lower (20mA per sensor)
Control Output
NPN open collector output 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G086
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9034
Outline Drawing
SGSP-60A75
SGSP-60A100
Hexagonal socket head cap screw M4×18…4 screws
Hexagonal socket head cap screw M4×8…4 screws
(137)
(137)
77
60
77 60
9-M4 depth 4
25 25 25 25 9-M4 depth 4
Application
Systems
Optics &
Optical
Coatings
(3.8) (59.6)
25 25
60
Rotation center
(3.8) (59.6)
25 25
60
Rotation center
Holders
Bases
75
100
Manual
Stages
Actuators
(31.1)
(16.7)
15.3
0.52
(112)
50
35
14
4-4.2 mounting hole
8 counterbore
50
(33.2)
(18.8)
17.9
2.62
112
30
4
50
4-4.2 mounting hole
50
8 counterbore
Motoeized
Stages
SGSP-60A130
Hexagonal socket head cap screw M4×18…4 screws
Light
Sources
(137)
77 60
25 25
9-M4 depth 4
Index
(4.3) (59.6)
25 25
60
Rotation center
Guide
Controllers/Drivers
Softwares
Stepping Motor
130
AC Servo Motor
Cables
32.1
35
14
Piezo
16.8
1.52
(112)
50
4-4.2 mounting hole
8 counterbore
50
X Translation
Theta Rotation
Connection Diagram
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13RA-12SD
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6 6 N.C. (not used)
7
8
9
10
7
8
9
10
VS
5 − 24VDC
GND (0V)
LS (+)
LS (−)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
D phase
C phase
A phase
B phase
Motor side ()
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
GP1S092HCPI
Opposite side (−)
limit sensor
ON when light enters
Note 1 1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
G098 − G103
Driver
Drivers
Cable
D15RP-CA
G108
Cable
Stage
SGSP-60A
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. PR17-13PA-12PC/RP17-PC-122
G020 − G021
MINI-CA-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G087

Motion Control Products
Motorized Goniometers - 5 Phase Stepping Motor
SGSP-B Stage size □60mm
Stepping motor driven motorized goniometer stages fitted with crossed roller guide.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
◦Combination of two axes of excellent abrasion-resistant
z stages enables flexible alignment.
◦Rotation center height from the table face is selectable
according to the usage from 75mm or 100mm.
Attention
▶Assembly was adjusted for precision of both α and β axis stages.
Note that if you disassemble the two axes, they might not work
normally and may require assembly readjustment by us.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number SGSP-60B75 SGSP-60B100
Mechanical
Specifications
Size Tolerance
Accuracy
Specifications
Sensor
Angle Range [ ° ]
(Upper) β axis: ±7 β axis: ±5
(Lower) α axis: ±5 α axis: ±4
Table Size [mm] 60×60 60×60
Positioning Slide Crossed roller Crossed roller
Travel Mechanism Worm and worm wheel Worm and worm wheel
Stage Material Aluminum Aluminum
Finish Black anodized Black anodized
Weight [kg] 1.10 (2 axes) 1.20 (2 axes)
Stage Height [mm] 55 65
Rotation Center Height [mm] 75 100
Rotation Center Deflection Accuracy [mm] − −
Resolution
(Full) [°/pulse] α axis: about 0.001, β axis: about 0.002 α axis: about 0.001, β axis: about 0.001
(Half) [°/pulse] α axis: about 0.0005, β axis: about 0.001 α axis: about 0.0005, β axis: about 0.0005
MAX Speed [°/sec] 6 6
Positional Repeatability [ ° ] Within ±0.004 Within ±0.004
Load Capacity [N] 19.1 (1.9kgf) 19.1 (1.9kgf)
Moment Stiffness [″/N・cm] − −
Lost Motion [ ° ] − −
Sensor Part Number
GP1S092HCPI (Sharp Corporation)
Limit Sensor Equipped (NORMAL CLOSE) Equipped (NORMAL CLOSE)
Origin Sensor None None
Proximity Origin Sensor None None
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Motor
Sensor
Type
5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number
C9863-90215P
Step Angle 0.72°
Power Voltage
DC5 − 24V
Current Consumption
40mA or lower (20mA per sensor)
Control Output
NPN open collector output 50mA
Output Logic
When shaded: Output transistor OFF (no conduction)
Configuration
Part Number SGSP-60B75 SGSP-60B100
(Upper) β axis SGSP-60A75 SGSP-60A100
(Lower) α axis SGSP-60A100 SGSP-60A130
(Reference) Precision Specifications of Single Axis Stage
Part Number SGSP-60A75 SGSP-60A100 SGSP-60A130
Accuracy
Specifications
Positional Repeatability [ ° ] ±0.004 ±0.004 ±0.004
Moment Stiffness [″/N・cm] 1 1 1
Lost Motion [ ° ] 0.02 0.02 0.02
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S
G088
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9035
Outline Drawing
SGSP-60B75
(3.8) (59.6)
Hexagonal socket head cap screw M4×8…4 screws
SGSP-60B100
(3.8) (59.6)
Hexagonal socket head cap screw M4×18…4 screws
Application
Systems
Optics &
Optical
Coatings
(3.8) (59.6)
25 25
60
(137)
25
25
60 77
(173)
9-M4 depth 4
(3.8) (59.6)
25 25
60
(137)
25 25
60 77
(173)
9-M4 depth 4
Rotation center
Holders
Bases
Manual
Stages
Rotation center
Actuators
75
100
Motoeized
Stages
(33.2)
4
55
35.8
(36.8)
(51.1)
(32.1)
14
65
(37.6)
52.9
(53.8)
(68.2)
Light
Sources
(112)
50
4-4.2 mounting hole
8 counterbore
50
(112)
16.8
1.52
(112)
50
4-4.2 mounting hole
8 counterbore
50
(112)
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Connection Diagram
Connector Pin Number
Hirose Electric Co., Ltd.
RP17-13RA-12SD
1
2
3
4
5
1
2
3
4
5
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
6 6 N.C. (not used)
7
8
9
10
7
8
9
10
VS
5 − 24VDC
GND (0V)
LS (+)
LS (−)
11
12
11 N.C. (not used)
12 N.C. (not used)
Note 2
5-Phase Stepping
Motor
E phase
D phase
C phase
A phase
B phase
Motor side ()
limit sensor
ON when light enters
Note 1
Sharp Corporation
Micro photo sensor
GP1S092HCPI
Opposite side (−)
limit sensor
ON when light enters
Note 1 1
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
G098 − G103
Driver
Drivers
Cable
D15RP-CA
G108
Cable
Stage
SGSP-60B
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Note 1 The motor side limit sensor is the + direction limit sensor.
Note 2 Compatible cable connector:
Hirose Electric Co., Ltd. PR17-13PA-12PC/RP17-PC-122
G020 − G021
MINI-CA-SG
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G089

Motion Control Products
Vacuum Compatible Motorized Stage Guide
VSGSP Guide
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
For use in vacuum environments, the vacuum compatible stage series offers replacement with a
stainless steel or machined aluminum body as well as replacement with vacuum grease, and uses
a vacuum rated motor and a contact type or mechanical driven type switch, and Teflon coated
cables for signal wires.
The series is suited for positioning in environments where the degree of vacuum is between 10 –4
and 10 –5 Pa. For the vacuum characteristics, see the measurement data of outgas volume, degree
of vacuum, and mass component ratio.
◦In addition to the standard lineup, motor replacement, sensor replacement, special specifications such as vacuum
compatible large mirror holders, and replacement of grease to vacuum grease for the guides or feed screws of standard
specification stages to deal with low vacuum specifications are available. Contact our International Sales Division for
more information.
Manual
Stages
Vacuum Compatible 5 Phase Stepping Motor
The □24mm minimum size and lightest type motor
saves space.
Compact Body
Machined Aluminum and use of a crossed roller
for the linear guide achieved the thin body.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Teflon Coated Cable
Vacuum Grease
(Fomblin Grease)
Rotation Table
The body is made of aluminum machining.
Vacuum Grease
(Fomblin Grease)
Limit Sensor
The copper plate contact type limit sensor
enables limit detection inside a vacuum chamber.
Limit Sensor
The high-vacuum compatible limit switch enables origin
detection with high repeatability inside a vacuum chamber.
* Only for VSGSP-120YAW
Vacuum Compatible 5 Phase Stepping Motor
The motor size for VSGSP-60YAW is □24mm
and VSGSP-120YAW is □42mm.
[Attention]
To use a vacuum compatible stage in a vacuum chamber, the connection cables between the vacuum side and
the atmosphere side need to be relayed using a vacuum current feedthrough or the like. Prepare the feedthrough
according to the vacuum chamber specifications.
Vacuum side (ex.: Vacuum chamber)
Air side
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor Cable
Sensor Cable
Vacuum current feedthrough
D15D15A-CA Cable etc
Guide
▶Because heat dissipation generally deteriorates in vacuum,
specification temperature conditions are stricter than those for
atmosphere. Check the usage conditions such as stage operation
to make sure that the motor case temperature does not exceed
80°C.
[Example of Special Order]
Vacuum Compatible Large Mirror Holder
G090
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

●Emitted amount of gas
Emitted Amount of Gas Q
Part Number
(after 40 minutes of emission)
(Torr・l/s/unit)
(Pa・l/s/unit)
VSGSP26-200 4.77×10 −4 6.36×10 −2
VSGSP-60 6.75×10 −5 9.00×10 −3
VSGSP-120YAW 4.78×10 −4 6.37×10 −2
Emitted amount of gas is found by the following equation:
Evaluation and Device Specifications
Exhaust system: Turbo-Molecular Pump STP-301
Seiyu Instruments Inc. (Now Edwards Japan Limited)
Pumping speed: 300l/sec
Mass spectroscope: Quad Mass Spectrometer QME200
Pfeiffer Vacuum
Mass range: 1 − 200amu
Application
Systems
Optics &
Optical
Coatings
Holders
Q =
(P − P′) × V
t× N
P : Vacuum immediately after seal off
P′: Vacuum after seal-off time has elapsed
N : Number of stage units (1unit)
V : Vacuum chamber volume (l)
t : Seal-off time (600s)
Bases
From the measurement results of gas volume discharged from a vacuum compatible motorized stage
The main components of outgas are water and nitrogen. This is because the gas was caused by residual air on the
stage surface, and grease used for drive components is considered to have little impact on the amount of gas.
●Vacuum of Vacuum Chamber
Vacuum [pa]
1×10 -3 Empty chamber
VSGSP-60
VSGSP-120YAW
1×10 -4
VSGSP26-200
1×10 -5
1×10 -6
1×10 -7
40
300 600 1440
Time [min]
60
●Mass Component Ratio
Mass
Number
1
2
12
13
14
15
16
17
18
20
26
27
28
29
30
31
32
39
41
42
43
44
45
50
Component Ratio [%]
VSGSP-60 VSGSP26-200 VSGSP-120YAW
19.58
2.81
0.60
0.17
0.79
−
3.03
15.77
48.02
0.22
0.33
0.83
2.17
0.73
0.08
0.14
0.26
0.39
0.51
−
0.74
0.40
−
−
19.96
5.28
0.85
−
1.26
2.37
−
−
17.30
−
−
4.53
2.49
6.08
−
0.31
−
2.57
7.44
−
8.00
−
0.31
0.23
17.90
3.34
0.79
−
0.91
−
2.98
14.48
43.89
0.29
0.53
1.52
2.76
1.44
−
0.27
0.27
0.78
1.07
0.41
1.01
0.66
0.31
−
Ion
H +
H2 +
C +
CH +
N + , CO 2+ , CH2 +
CH3 + , NH +
O + , CH4 + , NH2 +
OH + , NH3 +
H2O +
HF + , Ar 2+
C2H2 +
C2H3 +
CO + , N2 + , C2H4 +
C2H5 +
C2H6 + , NO +
C2H2OH +
O 2+ , S +
C3H3 +
C3H5 +
C3H6 +
C3H5 +
C3H8 + , CO2 + , N2O + , C2H4OH +
C2H5O +
C4H2 +
Gas Molecule
H2, water vapor, hydrocarbon
H2, water vapor, hydrocarbon
CO, CO2, hydrocarbon
Hydrocarbon
N2, NH3, CO, hydrocarbon
Hydrocarbon, NH3
O2, CH4, NH3
H2O, NH3
H2O
HF, Ar
Hydrocarbon
Hydrocarbon
CO, CO2, N2, hydrocarbon
Hydrocarbon
C2H6, NO
C2H3OH
O2, H2S, SO2
Hydrocarbon
Hydrocarbon
Hydrocarbon
Hydrocarbon
C3H8, CO2, N2O, C2H4OH
C2H5OH
Hydrocarbon
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Data
●Interpretation of Mass Peak
The following list shows major gases that appear for each mass number when mass peaks (mass spectra) of residual gas
are measured, and their interpretations.
List of Residual Gas Spectra
Mass
Ion
Number
Remarks
Mass
Number
Ion
Remarks
1 H + H2, H2O, hydrocarbons, etc 30 NO + Appears immediately after emission of dirty vacuum system.
2 H2 + H2, H2O, hydrocarbons, etc 31 CH3O + Alcohol
3 HD + Abundance ratio of D is about 0.01%. 32 O2 + Becomes N23 : O32 = 4 : 1 when air leak occurs.
4 He + 35 Cl +
12 C + CO, CO2, hydrocarbons 37 Cl + Cl35 : Cl37 = 3 : 1
14 N + , CH2 + , CO2 + N2, CO2, hydrocarbons 39 K + , C3H3 + K + dissociates from filament.
15 CH3 + Molecule that has CH4, CH3 40 Ar + , C3H4 + Ar makes up 1% of the atmosphere.
16 C + , CH4 + O2, CH4, oxygen compounds 41 C3H5 + Hydrocarbon
17 OH + H2O 42 C3H6 + Hydrocarbon
18 H2O + H2O, OH + : H2O+ ≒ 1 : 5 43 C3H7 + Hydrocarbon
19 F + Sometimes adsorbed to filaments and electrode surface. 44 CO2 +
20 Ar + , H2O + , Ne + H2O(20) is present about 0.2% of abundance ratio of O15. 50 C4H2 + Hydrocarbon
22 CO2 2+ , Ne + Abundance ratio of NE22 is 8.8%. 51 C4H3 + Hydrocarbon
23 Na + Sometimes adsorbed to filaments and electrode surface. 55 C4H7 + Hydrocarbon
27 C2H3 + Hydrocarbon 56 C4H8 + Hydrocarbon
28 N2 + , CO + Remain till the last. 57 C4H9 + Hydrocarbon
29 C2H5 + , N2 + , CO + Abundance ratio of N15 is 0.7%, and that of C13 is 1.1%.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G091

Motion Control Products
Vacuum Applications Miniature Motorized Stages
VSGSP-60
Application
Systems
Optics &
Optical
Coatings
Compact motorized stages used for experiments and inside a chamber of measuring instrument.
Compact slim body is effective for space-saving.
Guide
▶Fitted with 1m teflon coated cable to directly connect the vacuum
motor or vacuum limit switch to the connector of chamber.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Specifications
Part Number VSGSP-60(X) VSGSP-60(XY) VSGSP-60(Z)
Mechanical
Specifications
Accuracy
Specifications
Sensor
Travel [mm] 20 20 20
Table Size [mm] 55×60 55×60 55×60
Feed Screw
Precision ground screw φ4mm,
0.5mm lead
Precision ground screw φ4mm,
0.5mm lead
Precision ground screw φ4mm,
0.5mm lead
Positioning Slide Crossed roller guide Crossed roller guide Crossed roller guide
Stage Material Aluminum Aluminum Aluminum
Finish None None None
Weight [kg] 0.55 1.1 0.6
(Full) [μm] 1 1 1
Resolution
(Half) [μm] 0.5 0.5 0.5
MAX Speed [mm/sec] 5 5 −
Positional Repeatability [μm] 6 6 6
Load Capacity [N] 29.4 (3.0kgf) 19.6 (2.0kgf) 14.7 (1.5kgf)
Lost Motion [μm] 5 5 5
Type Vacuum limit switch Vacuum limit switch Vacuum limit switch
Limit Sensor Contact type Contact type Contact type
Origin Sensor None None None
Proximity Origin Sensor None None None
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Motor / Sensor Specifications
Type
Vacuum compatible 5-phase stepping motor 0.66A/phase (Tamagawa Seiki Co., Ltd.)
Motor
Motor Part Number
TS3664N5 (□24mm)
Step Angle 0.72°
Control Output Contact type Contact type Contact type
Sensor
Output Logic NORMAL OPEN NORMAL OPEN NORMAL OPEN
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G092
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9081
Outline Drawing
VSGSP-60(X)
(115.5)
Hexagonal socket head cap screw M4×10…4 screws
27.8
VSGSP-60(XY)
(127.6)
Hexagonal socket head cap screw M4×10…4 screws
Travel 10
Application
Systems
Optics &
Optical
Coatings
(97.8)
Teflon cable
1m
20
20
60
(146.2)
Teflon cable
1m
20 20
22 22
55
40
Holders
Bases
20 20
22 22
55
2-M4 depth 8
4-M4 depth 8
Travel 10 Travel 10
Travel 10
20 20
60
4-M4 depth 8
2-M4 depth 8
Travel 10
Travel 10
4.5
4-4.5 mounting hole
7.5 counterbore
Manual
Stages
Actuators
27
15
3
40
28
4.5
4-4.5 mounting hole
7.5 counterbore
40
43
15
56
Motoeized
Stages
3
40
Light
Sources
VSGSP-60(Z)
Hexagonal socket head cap screw M4×15…2 screws
Index
Teflon cable 1m
2-M4 depth 8
4-M4 depth 8
60
40
Guide
(128)
Controllers/Drivers
40
55
44
40
8
Softwares
Stepping Motor
40
60 27.8
(97.4)
53
5
2-4.5 mounting hole
AC Servo Motor
Cables
Piezo
Vacuum Limit Switch
GND (0V) black lead
Motor side (+) limit switch
LS (+)white lead
Opposite side (−) limit switch
LS (−)red lead
* Use the motor side and opposite side limit switches as normal open.
Wiring of Vacuum Stages
The vacuum compatible stepping motor TS3664N5 used for vacuum stages
has five bare lead wires.
For wiring, they correspond to the motor lead colors shown in the wiring
diagrams of driver or cable as follows.
(The motor leads shown in the connection diagrams of driver or cable indicate
wiring of stepping motors used for normal stages.)
Corresponding
connection
Vacuum stage motor lead color
1
Blue
2
Red
3
Red White
4
Yellow
5
Black
Vacuum compatible stage motor
connection diagram
E phase
Black
Blue
A phase
Red
Motor lead color
shown in driver or cable connection diagram
Blue
Red
Orange
Green
Black
5-phase stepping motor
connection diagram
E phase
Black
Blue
A phase
Red
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
*
Stage
VSGSP-60(X)
VSGSP-60(XY)
VSGSP-60(Z)
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
D phase
C phase
Yellow
B phase
Red White
D phase
C phase
Green
B phase
Orange
MINI-CA-SG
G020 − G021
G108
* Make the cable into bare wire specification after purchase.
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G093

Motion Control Products
Vacuum Compatible Motorized Stages
VSGSP-(X)
Motorized stages fitted with a limit sensor compatible with vacuum environments.
Application
Systems
Optics &
Optical
Coatings
◦Linear system has a long travel between 35 − 200mm, and is as compact as the conventional SGSP series.
Guide
▶Motor cables and sensor cables are 1m bare wires.
Holders
■Limit Sensor (high vacuum compatible switch)
Bases
Manual
Stages
Linear stage series normal close specification
Actuators
Motoeized
Stages
Rotation stage series normal open specification Note 1
Note 1 Set the controller of vacuum compatible motorized rotation stages to normal open.
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number VSGSP20-35(X) VSGSP20-85(X) VSGSP26-200(X)
Travel [mm] 35 85 200
Table Size [mm] 60×60 60×60 80×80
Mechanical
Specifications
Accuracy
Specifications
Sensor
Feed Screw
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ6mm,
1mm lead
Ball screw diameter φ8mm,
2mm lead
Positioning Slide Outer rail structure Outer rail structure Outer rail structure
Stage Material Aluminum / Stainless steel Aluminum / Stainless steel Aluminum / Stainless steel
Finish None None None
Weight [kg] 1.0 1.1 2.5
(Full) [μm] 2 2 4
Resolution
(Half) [μm] 1 1 2
MAX Speed [mm/sec] 10 10 20
Positional Repeatability [μm] 5 5 10
Load Capacity [N] 39.2(4.0kgf) 39.2(4.0kgf) 58.8(6.0kgf)
Lost Motion [μm] 3 3 10
Sensor Part Number GN-PT5M3B-1 (Metrol Co., Ltd.) GN-PT5M3B-1 (Metrol Co., Ltd.) GN-PT5M3B-1 (Metrol Co., Ltd.)
Limit Sensor
Vacuum touch sensor
(NORMAL CLOSE)
Vacuum touch sensor
(NORMAL CLOSE)
Vacuum touch sensor
(NORMAL CLOSE)
Origin Sensor None None None
Proximity Origin Sensor None None None
Motor / Sensor Specifications
Motor
Sensor
Type
Vacuum compatible 5-phase stepping motor 0.75A/phase (Oriental Motor Co., Ltd.)
Motor Part Number A7298-90215KV (□28mm) A7298-90215KV (□28mm) A7298-90215KV (□28mm)
Step Angle 0.72°
Power Voltage
DC5−24V
Current Consumption
10mA(Max 20mA)
Control Output
Mechanical
Output Logic NORMAL CLOSE NORMAL CLOSE NORMAL CLOSE
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G094
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9082
Outline Drawing
VSGSP20-35(X)
20
28
50
Hexagonal socket head cap screw M4×12…4 screws
209
110
60
25 25
16 16
6-M4×0.7 depth 6
8-M3×0.5 depth 6
16 16
25 25
60
VSGSP20-85(X)
20
28
50
Hexagonal socket head cap screw M4×12…4 screws
259
160
60
25 25
16 16
6-M4×0.7 depth 6
8-M3×0.5 depth 6
16 16
25 25
60
Application
Systems
Optics &
Optical
Coatings
Holders
Motor cable 1m
PTFE lead wire AWG26
5 bare leads
50
Sensor cable 1m
PTFE lead wire equivalent to AWG27
Travel 17.5 60 Travel 17.5
2-M4×0.7 depth 5
Motor cable 1m
PTFE lead wire AWG26
5 bare leads
50
Sensor cable 1m
PTFE lead wire equivalent to AWG27
Travel 42.5 60 Travel 42.5
2-M4×0.7 depth 5
Bases
Manual
Stages
34
20
8-4.5 mounting hole
5 25 25 25 25 5
7
34
34
20
8-4.5 mounting hole
5
50 50 50 5
7
34
8-4.5
Actuators
VSGSP26-200(X)
28
70
Hexagonal socket head cap screw M4×12…8 screws
417
310 5
80
70
4-M3×0.5 depth 6
25 25
8-M4×0.7 depth 6
16 16
4-M4×0.7 depth 6
Motoeized
Stages
Light
Sources
Index
20
16 16
25 25
70
80
1m motor cable
PTFE lead wire AWG26
5 bare leads
Sensor cable 1m
PTFE lead wire equivalent to AWG27
Guide
Controllers/Drivers
Softwares
Travel 100 80 Travel 100
Stepping Motor
AC Servo Motor
38
24
41
10-4.5 mounting hole
15 35 70 70 70 35 15
8
70
Cables
Piezo
X Translation
Theta Rotation
Connection Diagram
1
2
3
4
5
6
1
2
3
4
5
6
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND (0V)
7 7 Origin sensor (not used)
8 8 +VS (not used)
9 9 N.C. (not used)
10 10 N.C. (not used)
11
12
11
12
LS (+)
LS (−)
13 13 GND (not used)
14 14 Origin proximity sensor (not used)
15 15 +VS (not used)
5-Phase Stepping
Motor
E phase
D phase
C phase
Motor side (+)
limit sensor
A phase
B phase
ReverseMotor side (−)
limit sensor
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
*
Stage
VSGSP20-35(X)
VSGSP20-85(X)
VSGSP26-200(X)
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
* Motor cables and sensor cables are bare wires.
MINI-CA-SG
G020 − G021
G108
* Make the cable into bare wire specification after purchase.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G095

Motion Control Products
Vacuum Compatible Rotation Motorized Stage
VSGSP-YAW
Application
Systems
Optics &
Optical
Coatings
Rotation motorized stages for vacuum environment.
The φ60mm compact type is space saving, and best suited for experiments and use in chambers
of inspection equipment.
The φ120mm type is equipped with a limit sensor compatible with vacuum environments. It is thin
but has high load capacity because of its □42mm large motor.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Guide
▶Motor cables and sensor cables are 1m bare wires.
Guide
▶Rotation Range
Minus limit sensor: −2.5° Scale: 0°
Light
Sources
Index
Clockwise CW direction
Stops at near 0° (−2.5°)
Counterclockwise
CCW direction to ∞
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Specifications
Part Number VSGSP-60YAW VSGSP-120YAW
Rotation Range
In the CW or CCW direction to ∞
Counterclockwise CCW direction to ∞, Clockwise CW
direction stops at near 0 degree (−2.5°)
Table Size [mm] φ60 φ120
Mechanical
Feed Screw Worm and worm wheel Worm and worm wheel
Specifications Positioning Slide Bearing Crossed roller
Stage Material Aluminum Aluminum / Stainless steel
Finish None None
Weight [kg] 0.45 1.7
Resolution
(Full) [ ° ] 0.005 0.005
(Half) [ ° ] 0.0025 0.0025
Accuracy MAX Speed [°/sec] 20 20
Specifications Positional Repeatability [ ° ] 0.02 0.02
Load Capacity [N] 29.4 (3.0kgf) 98.0 (10.0kgf)
Lost Motion [ ° ] 0.05 0.05
Type None GN-STM35A-1 (Metrol Co., Ltd.)
Sensor
Limit Sensor None Vacuum touch sensor (NORMAL OPEN)
Origin Sensor None None
Proximity Origin Sensor None None
Motor / Sensor Specifications
Motor
Sensor
Type
Vacuum compatible 5-phase stepping motor 0.66A/phase
(Tamagawa Seiki Co., Ltd.)
▶Homing of rotation motorized stages is performed using the CW
limit sensor as the origin sensor.
▶Origin detection is adjusted so that the stage stops at 0 degrees
when homing is performed in the MINI system at half step.
Vacuum compatible 5-phase stepping motor 0.75A/phase
(Oriental Motor Co., Ltd.)
Motor Part Number TS3664N5 (□24mm) PK543V-NB (□42mm)
Step Angle 0.72° 0.72°
Control Output ー DC5−24V
Output Logic ー Current Consumption 10mA(Max 20mA)
Control Output Contact type Mechanical
Output Logic NORMAL OPEN NORMAL OPEN
Compatible Driver / Controller
Compatible Driver SG-5M, SG-55M, SG-514MSC, MC-7514PCL
Control System
Compatible Controller
GSC-01, GSC-02, SHOT-702, GIP-101, SHOT-302GS, SHOT-304GS, HIT-M・HIT-S, PGC-04
G096
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9083
Outline Drawing
VSGSP-60YAW
Hexagonal socket
head cap screw M4×10…3 screws
VSGSP-120YAW
Hexagon socket
head cap screw M6×10…3 screws
174.5
Application
Systems
Optics &
Optical
Coatings
(117)
0.025
25 () 0.005
20
Holders
70
Teflon
cable
1m
32
50
30
64.5
60
32
50
30
64
4-M3 depth 5.5
4-M4 depth 5.5
P.C.D.50
2-M6 depth 5
138
Motor cable 1m
PTFE lead wire AWG26
5 bare leads
Sensor cable 1m
PTFE lead wire equivalent to AWG27
64
50
100
123
120
61
50
100
61
122
4-M4×0.7 depth 8
P.C.D.100
4-M4×0.7 depth 8
Bases
Manual
Stages
Actuators
Motoeized
Stages
26
14
2
5
14
28
4-4.5 mounting hole
8 counterbore
43
22
3.5
45
3-6.5 mounting hole
11 counterbore
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Wiring of Vacuum Stages
The vacuum compatible stepping motor TS3664N5 used for vacuum stages
has five bare lead wires.
For wiring, they correspond to the motor lead colors shown in the wiring
diagrams of driver or cable as follows.
(The motor leads shown in the connection diagrams of driver or cable indicate
wiring of stepping motors used for normal stages.)
Corresponding
connection
Vacuum stage motor lead color
1
Blue
2
Red
3
Red White
4
Yellow
5
Black
Vacuum compatible stage motor
connection diagram
Black E phase
D phase
Blue
C phase
Yellow
A phase
Red
B phase
Red White
Motor lead color
shown in driver or cable connection diagram
Blue
Red
Orange
Green
Black
5-phase stepping motor connection diagram
(SGSP series)
E phase
Black
D phase
Limit Sensor (high vacuum compatible switch)
Blue
C phase
Green
A phase
Red
B phase
Orange
Linear stage series normal close specification
Compatible Controllers / Drivers and Cables
Controller
GSC-01 [1 axis]
GSC-02 [2 axes]
SHOT-702 [2 axes]
GIP-101 [1 axis]
SHOT-302GS [2 axes]
SHOT-304GS [4 axes]
HIT-M/HIT-S [8 axes]
PGC-04 [4 axes]
G098 − G105
Driver
Drivers
Cable
D15RP-CA
G108
Cable
*
Stage
VSGSP-60YAW
VSGSP-120YAW
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Rotation stage series normal open specification Note 1
Note 1 Set the controller of vacuum compatible motorized rotation stages to normal open.
MINI-CA-SG
G020 − G021
G108
* Make the cable into bare wire specification after purchase.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G097

Motion Control Products
Catalog
Single axis Stage Controller GSC-01 Code W9042
A single axis stage controller with built-in 5-phase stepping motor driver.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦External control with RS232C interface, operation with a jog switch on the front panel, and jog operation with external I/O
are available.
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2012)
Attention
▶Power supply is DC+24V 2A.
You need to purchase the PAT-001-POW1 (AC adapter) or prepare an
adapter separately
Actuators
Motoeized
Stages
Part Name
Single axis Stage Controller
AC Adapter
Part Number
GSC-01
PAT-001-POW1
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
■Primary Functions
Controller Function
○
Number of Control Axes 1
Stored Program Control
−
Feedback Control
−
Circular Interpolation Control −
Linear Interpolation Control −
Driver Function
Standard
Micro-step (Max. Division) 2
Driving Current (A/phase) 0.2 − 0.8
■General Specifications
Power Voltage
DC24V
2A
Power Consumption
48VA
Operating Temperature 5 − 40°C
Storage Temperature
−
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 47×125×90
Weight (kg) 0.4
■Performance Specifications
Coordinate Indication Range −
Max. Travel to Set 16,777,215
Max. Driving Speed (pps) 20,000
Min. Driving Speed (pps) 100
Acceleration/Deceleration Time (ms) 0 − 1,000
■I/O Specification
Origin Sensor
−
Proximity Sensor
−
CW (+) Limit
○
CCW (−) Limit
○
General Purpose Input
4 points
General Purpose Output 4 points
Control Input
3 points
Control Output
−
Trigger Output
−
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
Origin Offset Setting
Jog Operation Speed Setting
○
○
○
○
○
−
−
−
○
○
○
○
○
○
○
○
○
■Interface
GP-IB
RS232C
USB
Ethernet
−
○
−
−
X Translation
Theta Rotation
Goniometer
■GSC-01 System Chart
D15D15A-CA cable
Stepping Motor Stage
OSMS
series
Vacuum
Options
GSC-01
G108
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
PC
Sample softwaer
(download from website)
◦SGCommander
◦LabVIEW
RS232C cable
I/O control
external device
RS232C
I/O
STAGE
DC24V 1.3A
D15RP-CA cable
G108
OSMS-ZF
SGSP-40/60YAW
SGSP-ACT-B0
TAMM
OSMS-A
HPS
HDS
series
For the power supply,
you need to purchase the
optional PAT-001-POW1
or prepare an adapter
separately.
G098
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
2 axis Stage Controller GSC-02 Code W9044
A 2 axis stage controller with built-in 5-phase stepping motor driver.
◦External control with RS232C interface, manual operation and programmed operation with a dedicated controller (SJT-02).
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
Attention
▶Power supply is DC+24V 2A.
You need to purchase the PAT-001-POW1 (AC adapter) or prepare an
adapter separately
Part Name
Part Number
2 axis Stage Controller GSC-02
Joystick Terminal
SJT-02
AC Adapter
PAT-001-POW1
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
■Primary Functions
Controller Function
○
Number of Control Axes 2
Stored Program Control
△
Feedback Control
−
Circular Interpolation Control −
Linear Interpolation Control −
Driver Function
Standard
Micro-step (Max. Division) 2 (half step only)
Driving Current (A/phase) 0.3 − 0.8
△…Programs can be controlled using SJT-02.
■General Specifications
Power Voltage
DC24V
2A
Power Consumption
48VA
Operating Temperature 5 − 40°C
Storage Temperature −20 − 60°C
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 180×40×125
Weight (kg) 0.7
■Interface
GP-IB
RS232C
USB
Ethernet
−
○
−
−
■Optional
CJ-200A
−
JS-300
−
JB-400
−
SJT-02
○
■Performance Specifications
Coordinate Indication Range −
Max. Travel to Set 16,777,214
Max. Driving Speed (pps) 20,000
Min. Driving Speed (pps) 1
Acceleration/Deceleration Time (ms) 0 − 1,000
■I/O Specification
Origin Sensor
○
Proximity Sensor
○
CW (+) Limit
○
CCW (−) Limit
○
General Purpose Input
−
General Purpose Output
−
Control Input
−
Control Output
−
Trigger Output
−
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
○
○
○
−
○
−
−
−
○
○
○
○
○
−
−
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
■GSC-02 System Chart
D15D15A-CA cable
Stepping Motor Stage
OSMS
series
X Translation
Theta Rotation
Goniometer
PC
Sample softwaer
(download from website)
◦SGCommander
◦LabVIEW
RS232C cable
RS232C
SJT-02
* Either a PC or the SJT-02
can be connected.
Connecting both at the same
time is not possible.
GSC-02
STAGE1 — 2
G108
D15RP-CA cable
G108
OSMS-ZF
SGSP-40/60YAW
SGSP-ACT-B0
TAMM
OSMS-A
HPS
HDS
series
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
DC24V 2A
Others
SJT-02
G106
For the power supply, you need to purchase
the optional PAT-001-POW1 or prepare an
adapter separately
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G099

Motion Control Products
Catalog
2 axis Stage Controller SHOT-702 Code W9045
A 2 axis stage controller with built-in micro-step driver.
Application
Systems
Optics &
Optical
Coatings
Holders
◦External control with RS232C interface and manual operation with dedicated controllers (JS-300, JB-400).
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
■Primary Functions
Controller Function
○
Number of Control Axes 2
Stored Program Control
−
Feedback Control
−
Circular Interpolation Control −
Linear Interpolation Control −
Driver Function
Micro-step
Micro-step (Max. Division) 250
Driving Current (A/phase) 0.1 − 1.1
■General Specifications
Power Voltage
AC100 − 240V
50/60Hz
Power Consumption
50VA
Operating Temperature 5 − 40°C
Storage Temperature −20 − 60°C
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 260×70×280
Weight (kg) 2.8
■Interface
GP-IB
RS232C
USB
Ethernet
−
○
−
−
SHOT-702 System Chart
■Optional
CJ-200A
JS-300
JB-400
JD-100
SJT-02
■Performance Specifications
Coordinate Indication Range −
Max. Travel to Set 268,435,455
Max. Driving Speed (pps) 500,000
Min. Driving Speed (pps) 1
Acceleration/Deceleration Time (ms) 1 − 1,000
■I/O Specification
Origin Sensor
Proximity Sensor
CW (+) Limit
CCW (−) Limit
General Purpose Input
General Purpose Output
Control Input
Control Output
Trigger Output
SHOT-702
Part Name
Part Number
2 axis Stage Controller SHOT-702
Joy Stick
JS-300
Jog Operation Box
JB-400
Jog Dial
JD-100
MDR Cable
MDR14-CA-2.5
−
○
○
○
−
○
○
○
○
1 point
1 point
1 point
1 point
−
D15RP-CA cable
G108
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
Stepping Motor Stage
OSMS-ZF
SGSP-40/60YAW
SGSP-ACT-B0
OSMS-A/B
TAMM40/60
HPS
HDS
series
○
○
○
○
○
−
−
−
○
○
○
○
○
○
○
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
PC
Sample softwaer
(download from website)
SGCommander
LabVIEW
RS232C cable
I/O control
external device
RS232C
I/O
MDR cable
STAGE1 - 2
AC100-240V
50/60Hz
Power cable (2m)
comes with main body.
D15D15A-CA cable
OSMS series
SGSP-80/120/160YAW
TAMM100
series
JD-100
G106
JS-300
G107
JB-400
G107
G108
G100
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Intelligent Positioning System GIP-101 Code W9046
A single axis controller with built-in micro-step driver having a 5-point preset function.
◦Compatible with objective lens turrets and other LASER accessory units in addition to motorized stages fitted with
5-phase stepping motor.
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
■Primary Functions
Controller Function
○
Number of Control Axes 1
Stored Program Control
−
Feedback Control
−
Circular Interpolation Control −
Linear Interpolation Control −
Driver Function
Micro-step
Micro-step (Max. Division) 250
Driving Current (A/phase) 0.23 − 0.75
■General Specifications
Power Voltage
AC100 − 240V
50/60Hz
Power Consumption
100VA
Operating Temperature 0 − 40°C
Storage Temperature
−
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 145×205×81
Weight (kg) 2
■Interface
■Performance Specifications
Part Name
Intelligent Positioning System
Coordinate Indication Range −
Max. Travel to Set 16,777,214
Max. Driving Speed (pps) 22,000
Min. Driving Speed (pps) 50
Acceleration/Deceleration Time (ms)
20 − 1,000
16 steps
■I/O Specification
Origin Sensor
Proximity Sensor
CW (+) Limit
CCW (−) Limit
General Purpose Input
General Purpose Output
Control Input
Control Output
Trigger Output
○
○
○
○
−
−
6 points
1 point
−
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
Part Number
GIP-101
○
○
○
○
○
○
−
−
○
○
○
○
○
○
○
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
GP-IB
RS232C
USB
Ethernet
−
○
−
−
X Translation
Theta Rotation
Stepping Motor Stage
Goniometer
■GIP-101 System Chart
D15RP-CA cable
SGSP-40/60YAW
SGSP-ACT-B0
series
Vacuum
Options
PC
Sample softwaer
(download from website)
◦SGCommander
◦LabVIEW
RS232C cable
I/O control
external device
Stop switch
RS232C
I/O
STOP
GIP-101
STAGE
AC100-240V
50/60Hz
Power cable (3m)
comes with main body.
G108
D15D15A-CA cable
OSMS series
SGSP-80/120/160YAW
TAMM100
series
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G101

Motion Control Products
Catalog
2 axis / 4 axis Stage Controllers SHOT-GS Code W9047
2 axis and 4 axis stage controllers with built-in micro-step driver.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
◦External control with RS232C/GP-IB/USB interfaces, manual operation with a control pad (CJ-200A) or dedicated controllers
(JS-300, JB-400,JD-100), and automatic control with two banks of stored programs are available.
◦Full closed loop control is possible when used in combination with a stage with built in glass-scale.
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
◦LabVIEW for GP-IB (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
■Primary Functions
Part Number
Controller Function
SHOT-302GS/304GS System Chart
PC
Sample softwaer
(download from website)
SGCommander
LabVIEW
USB cable
RS232C cable
GP-IB cable
I/O control
external device
SHOT-302GS SHOT-304GS
USB
RS232C
GP-IB
I/O/Terminal Block
○
Number of Control Axes 2 4
Stored Program Control
Feedback Control
Circular Interpolation Control
Linear Interpolation Control
Driver Function
○
GS
○
2 axes
Micro-step
Micro-step (Max. Division) 250
Driving Current (A/phase) 0.25 − 1.4
CJ-200A
■General Specifications
Power Voltage
Required
AC100 − 240V
50/60Hz
Power Consumption 160VA 300VA
Operating Temperature 5 − 40°C
Storage Temperature −20 − 60°C
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 270×302×118
Weight (kg) 5.5 6.5
■Interface
GP-IB
RS232C
USB
Ethernet
○
○
○
−
CJ-200A
SHOT-GS
JD-100
G106
■Optional
CJ-200A
JS-300
JB-400
JD-100
SJT-02
■Performance Specifications
Coordinate Indication Range ±999,999,999
Max. Travel to Set 268,435,455
Max. Driving Speed (pps) 500,000
Min. Driving Speed (pps) 1
Acceleration/Deceleration Time (ms) 0 − 1,000
■I/O Specification
Origin Sensor
Proximity Sensor
CW (+) Limit
CCW (−) Limit
General Purpose Input
General Purpose Output
Control Input
Control Output
Trigger Output
STAGE1 - 4
SCALE1 - 4
AC100-240V
50/60Hz
Power cable (2m)
comes with main body.
MDR cable
JS-300
JB-400
G107
Part Name
Part Number
2 axis Stage Controller SHOT-302GS
4 axis Stage Controller SHOT-304GS
Control Pad
CJ-200A
Joy Stick
JS-300
Jog Operation Box
JB-400
Jog Dial
JD-100
MDR Cable
MDR14-CA-2.5
○
○
○
○
−
○
○
○
○
4 points
4 points
15 points
5 points
○
D15RA-CA cable
G108
D15D15A cable
G108
DHR-CA cable
G108
GSE-CA cable
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
Stepping Motor Stage
OSMS-ZF
SGSP-40/60YAW
OSMS-A/B
SGSP-ACT-B0
TAMM40/60
HPS
HDS
series
OSMS series
SGSP-80/120/160YAW
KST
TAMM100
series
Stages with built in Glass-scale Encoder
OSMS(CS)
KST(GS)
series
○
○
○
○
○
−
○
○
○
○
○
○
○
○
○
G108
G102
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Extensible Stage Controller HIT-M/S Code W9048
Stage control system with Master controller and from one to eight slave Axes.
◦Control with RS232C/USB/Ethernet interfaces is available.
◦Full closed loop control is possible when used in combination with a stage with built in glass-scale.
Guide
▶Sample programs are available for download from our website.
◦HIT sample
◦SGCommander 32-bit version for Windows ® (only for RS232C)
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
◦LabVIEW for RS232C (for v.5.1/v.6i/v7.1/v.8.6/v.2010/v.2012)
Attention
▶Power supply is DC+24V 1A. Depending on the number of stage axes,
rated current of 2A (single axis) to 9A (8 axes) is required. You need to
purchase the PAT-001-POW1 (AC adapter) or prepare an adapter separately.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Part Name
Extensible Stage Controller (Master)
Extensible Stage Controller (Slave)
LAN Cable
AC Adapter
Part Number
HIT-M
HIT-S
LAN-2
PAT-001-POW1
Actuators
Motoeized
Stages
■Primary Functions
■Optional
■Control Command
Light
Sources
Part Number HIT-M HIT-S
CJ-200A
−
Machine Origin Return
○
Controller Function ○ −
Number of Control Axes 8 −
JS-300
JB-400
−
−
Theoretical Origin Setting
Relative Position Drive
○
○
Index
Stored Program Control ○ −
JD-100
−
Absolute Position Drive
○
Feedback Control GS −
SJT-02
−
Jog Operation
○
Circular Interpolation Control ○ −
Linear Interpolation Control 3 axes −
■Performance Specifications
Position Appointment
Circular Interpolation Control
−
○
Guide
Driver Function − Micro-step
Coordinate Indication Range
−
Linear Interpolation Control
○
Controllers/Drivers
Micro-step (Max. Division) − 250
Driving Current (A/phase) − 0.1 − 1.1
Max. Travel to Set 134,217,727
Max. Driving Speed (pps) 500,000
Drive
Deceleration Stop
○
○
Softwares
■General Specifications
Min. Driving Speed (pps) 1
Acceleration/Deceleration Time (ms) 1 − 1,000
Emergency Stop
Speed Setting
○
○
Stepping Motor
Power Voltage
Power Consumption
DC24V
1A
24VA
■I/O Specification
Origin Sensor
○
Motor Free/Hold
Port Input
Port Output
○
○
○
AC Servo Motor
Cables
Operating Temperature 5 − 40°C
Storage Temperature −20 − 60°C
Ambient Humidity
20 − 80%RH
Proximity Sensor
CW (+) Limit
CCW (−) Limit
○
○
○
Stepping Motor Stage
Piezo
External Dimensions (W×H×Dmm) 130×120×50
Weight (kg) 0.62 0.63
■Interface
GP-IB
RS232C
−
○
General Purpose Input
General Purpose Output
Control Input
Control Output
Trigger Output
4 points
4 points
−
−
−
OSMS-A/B
OSMS-ZF
SGSP-40/60YAW
SGSP-ACT-B0
TAMM40/60
HPS
HDS
series
USB
○
D15RP-CA cable
Ethernet
○
X Translation
HIT System Chart
PC
USB cable
RS232C cable
LAN cable
USB
RS232C
ETHERNET
I/O
HIT-M
HIT-S
STAGE
SCALE
STAGE
SCALE
G108
D15D15A-CA cable
OSMS series
SGSP-80/120/160YAW
TAMM100
series
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
Sample softwaer
(download from website)
HIT sample
I/O control
external device
DC24V 1A
DC24V 1A
Link cable
DC24V 1A
Link cable
STAGE
SCALE
G108
D15D15A-CA cable
G108
Stages with built in Glass-scale Encoder
OSMS(CS)
series
□80mm
□85mm
□100mm
□120mm
Others
DC24V 1A
GSE-CA cable
Maximum 8 units
can be linked
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G103

Motion Control Products
Pulse Generating Controller
PGC-04
A 4-axis pulse generator type controller that can be connected to the various motor drivers.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦External control with USB and Ethernet interfaces are available.
◦Can be manually operated by a Handy Terminal (JS-300, JB-400, JD-100).
Guide
▶Sample programs are available for download from our website.
◦SGCommander 32/64-bit version for Windows ® (only for RS232C)
Attention
▶Cable and motor driver are sold separately. Please purchase 5-phase
stepping motor drivers SG-55M or prepare compatible driver of
customer choice.
▶Power supply is DC+24V 2A. You need to purchase the PAT-001-POW1
(AC adapter) or prepare an adapter separately.
Actuators
Motoeized
Stages
Light
Sources
Products Name
Pulse Generating Controller
Joystick Terminal
Jog Operation Box
Jog Dial
AC Adapter
Part Number
PGC-04
JS-300
JB-400
JD-100
PAT-001-POW
Index
■Primary Functions
■Optional
■Control Command
Controller Function
○
CJ-200A
−
Machine Origin Return
○
Guide
Controllers/Drivers
Number of Control Axes 4
Stored Program Control
○
Feedback Control
−
JS-300
JB-400
JD-100
○
○
○
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
○
○
○
Softwares
Stepping Motor
Circular Interpolation Control
Linear Interpolation Control
Driver Function
○
○
−
SJT-02
■Performaifications
−
Jog Operation
Position Appointment
Circular Interpolation Control
○
−
○
AC Servo Motor
Cables
Piezo
Micro-step (Max. Division)
Driving Current (A/phase)
■General Specifications
Power Voltage
−
−
DC24V
Coordinate Indication Range −
Max. Travel to Set 16,777,215
Max. Driving Speed (pps) 4,000,000
Min. Driving Speed (pps) 1
Acceleration/Deceleration Time (ms) 1 − 1,000
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
○
−
○
○
○
Power Consumption 1.4A
Operating Temperature 5 − 40°C
■I/O Specification
Motor Free/Hold
Port Input
○
○
Storage Temperature
−
Origin Sensor
○
Port Output
○
Ambient Humidity
20 − 80%RH
Proximity Sensor
○
External Dimensions (W×H×Dmm) 180×140×60
CW (+) Limit
○
Weight (kg) 1.3
CCW (−) Limit
○
X Translation
Theta Rotation
Goniometer
■Interface
GP-IB
RS232C
USB
−
○
−
General Purpose Input
General Purpose Output
Control Input
Control Output
Trigger Output
4 points
4 points
−
−
−
Vacuum
Ethernet
○
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
G104
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9084
System Diagram
5-phase Stepping Motor Driver
(ex.SG-55M)
5-phase Stepping Motorized Stage (ex.HPS60-20(X)-M5 etc.)
Application
Systems
Optics &
Optical
Coatings
Holders
PGC-55M Cable
Motor Cable: (Oriental Motor Co., Ltd.)etc
Bases
Manual
Stages
Actuators
PC
2-phase Stepping Motor Driver
(ex:A8576-0415Y)
2-phase Stepping Motorized Stages (ex.HPS60-20(X)-M2 etc.)
Motoeized
Stages
Light
Sources
RS232C Cable
LAN Cable
Index
RS232C
Ethernet
PGC-0415Y cable
Guide
(ex.ARD-K)
(ex.ARD-K)
cable
STEP Motorized Stages (ex.HPS60-20(X)-MA etc.)
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
PGC-04
Cables
Piezo
PGC-STEP Cable: PGC-ARD-2
AC Servo Driver
(ex.SGDV-2R9EP1A)
Motor Cable: CC030VAF2
*Supplied to the STEP Driver (Oriental Motor Co., Ltd.)
AC Servo Motorized Stages (ex.SGMV20-35(X))
X Translation
Theta Rotation
Goniometer
Vacuum
Options
PGC-ACS Cable: PGC-ACS-2
Motor Cable: JZSP-CF1M00-03-E (Yasukawa Electric Corporation)
Encoder Cable: JZSP-CMP00-03-E (Yasukawa Electric Corporation)
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G105

Motion Control Products
Joystick Terminal
Jog Dial
SJT-02
JD-100
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
SJT-02
A dedicated joystick terminal for the GSC-02 controller to manually operate a motorized stage.
Internal program memory allows automatic operation without using a PC.
Attention
▶Pin 1 of GSC-02 connector for use with the SJT-02 has an electrical
output of +24V. Under no circumstances should it be connected to
a PC. Although it has a protective circuit, be sure to disconnect
either RS232C or SJT-02, otherwise there is a risk of damage.
* If RS232C and SJT-02 are connected at the same time, neither of
them will function.
Specifications
Part Number
SJT-02
Type
Joystick
Power Supply
Supplied from controller
Display
LCD (16 digits × 2 lines)
External Dimensions [W×H×Dmm] 94×30×140
Weight [kg] 0.45
General Specifications
Catalog
Code
W9049
Power Supply
DC+24V
Supplied from a 2 axis stage controller (GSC-02/SHOT-602).
Operating Temperature 5 − 40°C
Ambient Humidity 20 − 80%RH (without condensation)
External Dimensions (W)94 × (H)30 × (D)140mm
Weight
560g (including a special cable)
Display
LDC 16 digits, 2 lines
Connecting Cable Attached special connecting cable (detachable)
Performance Specifications
Number of Control Axes 2 axes
Operation Mode
MANUAL (M) / TEACHING (T) / RUN (R)
EDIT (E) / MEM SW SET Mode
Coordinate Indication Range
X axis: Approx. −99999999 − +99999999 pulses
Y axis: Approx. −99999999 − +99999999 pulses
Coordinate Input Range
X axis: Approx. −16777214 − +16777214 pulses
Y axis: Approx. −16777214 − +16777214 pulses
X axis: Displayed left side of coordinate symbol
Limit Sensor Status
(“L” is displayed when detected.)
Y axis: Displayed left side of coordinate symbol
(“L” is displayed when detected.)
Speed Parameter Switchable among 10 steps
Min. Driving Speed (S) 1 − 20000pps
Max. Driving Speed (F) 1 − 20000pps
Acceleration /Deceleration Time (R) 0 − 1000mS
Coordinate Display Unit [PLS] [μm] [ ° ]
Program Memory Capacity 128 steps × 4 channels
Program Parameter
Wait time 0 − 25.5 [sec] Unit: 0.1 sec
Repeated 0 − 99999999 [times]
Origin Return Axes X axis only / Y axis only / Both axes
Motor Rotation Direction
X axis: Positive (POS) / Negative (NEG)
Y axis: Positive (POS) / Negative (NEG)
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
JD-100
W9085
Manual operation of motorized stages is possible using the JOG buttons or JOG dial.
The RATE button allows easy switching of the travel per click (2 steps).
Mode switching between SHOT-302GS/SHOT-304GS and switching of travel speed (4 steps) can be
performed at hand.
Functions
LCD Panel
MODE Button
RATE Button
AXIS-SEL
Button
SPEED Button
JOG+/− Button
Specifications
None
Catalog
Code
Switches between SHOT-302GS/SHOT-304GS modes.
Changes the travel per click.
(Normal RATE: 1 pulse/click, High RATE: 5 pulses/click)
Switches the motion axes (1 to 4 axes) using the jog dial.
Switches the travel speed in 4 steps set with the controller.
Operates in +/- direction while the respective button is
being pressed.
Part Number
JD-100
Type
Jog Dial
Cable
MDR14-CA-2.5 (purchase separately)
Display
None
External Dimensions [W×H×Dmm] 130×36×145
Weight [kg] 0.6
G106
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Joy Stick
Jog Operation Box
JS-300
JB-400
Catalog
Code
W9050
A dedicated joystick terminal for the GSC-02 controller to manually operate a motorized stage.
Internal program memory allows automatic operation without using a PC.
JS-300
◦Allows easy manual operation of a motorized stage
using a joystick.
Specifications
Part Number
JS-300
Type
Button operation
Cable
MDR14-CA-2.5 (purchase separately)
Display
LCD (16 digits × 4 lines)
External Dimensions [W×H×Dmm] 120×50×160
Weight [kg] 0.7
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Functions
LCD Panel
MODE Button
E-ORG Button
ZERO Button
Control Axis Switch Button
Joystick
M-ORG Button
Third axis Operating Switch
SPEED Button
STOP Button
JB-400
Display digits: 16 digits × 4 lines
Switches modes (SHOT-302GS/SHOT-304GS)
Returns to theoretical (electric) origin
Sets theoretical (electric) origin
Switches the operating axis of joystick (1, 2 or 3, 4 axes) (Enabled only for SHOT-304GS)
Joystick Controls 1, 2 or 3, 4 axes
Machine Origin Return
Operates third axis
Switches the travel speed (4 stages) set with SHOT-302GS/SHOT-304GS
Emergency stop
◦Enable manual operation of motorized stages. It also
has a program function.
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Functions
LCD Panel
Program Button
SPEED Button
MODE Button
ORG X/Y Button
Reset X/Y Button
STOP Button
JOG/Pulse Button
X axis / Y axis Control Button
CLEAR Button
Numeric Keypad (0 − 9)
SET Button
Display digits: 16 digits × 4 lines
Executes SHOT-302GS/SHOT-304GS internal programs
Switches the travel speed (4 stages) set with SHOT-302GS/SHOT-304GS
Switches between SHOT-302GS/SHOT-304GS models
Returns X/Y axis to machine origin
Sets theoretical (electric) origin of X/Y axis
Emergency stop
Switches between JOG operation and fixed pulse operation
When set to JOG operation:
Move while the button is being pressed
Resets the fixed pulse setting to zero
Inputs the number of fixed pulse
Completes setting of fixed pulse
Specifications
Part Number
JB-400
Type
Button operation
Cable
MDR14-CA-2.5 (purchase separately)
Display
LCD (16 digits × 4 lines)
External Dimensions [W×H×Dmm] 178×38×195
Weight [kg] 0.7
When set to fixed pulse operation:
Move for the registered number of pulses at each press of the button
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G107

Motion Control Products
Cables
Catalog
Code
W9052
Application
Systems
Optics &
Optical
Coatings
Cables for connecting between motorized stages and
controllers or drivers.
Select cables according to control methods or operating
environments.
◦Refer to compatible controllers/drivers and cables described on the
page of each motorized stage.
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
D15RP-CA Cable
Controller side (15 pins)
D-sub15pin
(Male Type)
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND
Origin sensor
+VS
N.C.
N.C.
Limit sensor (+)
Limit sensor (−)
GND
Origin proximity sensor
+VS
D15D15A-CA Cable
Controller side (15 pins)
17JE-23150-02(D1)
(Male Type) DDK Ltd.
Stage side (15 pins)
17JE-13150-02(D1)A
(Female Type) DDK Ltd.
Pin Number
Pin Number
Orange/Black1
1 Motor lead
1 Motor lead
Orange/Red1 Inner shield
2 Motor lead
2 Motor lead
Light grey/Black1
3 Motor lead
3 Motor lead
Light grey/Red1
4 Motor lead
4 Motor lead
White/Black1
5 Motor lead
5 Motor lead
White/Red1
6 GND
6 GND
Yellow/Black1
7 Origin sensor
7 Origin sensor
Yellow/Red1
8 +VS
8 +VS
Pink/Black1
9 Autoconfig
9 Autoconfig
Pink/Red1
10 Reserve
10 Reserve
Orange/Black2
11 Limit sensor (+)
11 Limit sensor (+)
Orange/Red2
12 Limit sensor (−)
12 Limit sensor (−)
Light grey/Black2
13 GND
13 GND
Light grey/Red2
14 Origin proximity sensor
14 Origin proximity sensor
15 N.C.
Outer shield 15 N.C.
For the color of the cable wiring, it is marked
with an insulating color, dot color and number of dots.
(Reference) Rough guide of the minimum bending radius is 60mm.
Specifications
Brown
Red
Orange
Green
Black
Brown
Gray
White
Purple
Black
Stage side (12 pins)
RP17-13PA-12PC
(Male Type)
Hirose Electric Co., Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
Origin sensor
+VS
GND
Limit sensor (+)
Limit sensor (−)
F.G.
F.G.
Black
Outer shield
Black
(Reference) Rough guide of the minimum bending radius is 40mm.
MINI-CA-SG Cable
Driver side
terminal is
not processed
Stage side (12 pins)
RP17-13PA-12PC
(Male Type)
Hirose Electric Co., Ltd.
Pin Number
Brown
1 Motor lead
Red
2 Motor lead
Orange
3 Motor lead
Yellow
4 Motor lead
Green
5 Motor lead
Blue
6 N.C.
Purple
7 +VS
Gray
8 GND
White
9 Limit sensor (+)
Black
10 Limit sensor (−)
11 F.G.
Inner shield
12 F.G.
Outer shield
(Reference) Rough guide of the minimum bending radius is 40mm.
DAC-SG Cable
Driver side
terminal is
not processed
Inner shield
Outer shield
Multiple 13 core cable
Black
White
Red
Green
Yellow
Gray
Brown
Blue
Pink
Light Blue
Light Green
Orange
Purple
Inner shield
Outer shield
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Case
Stage side (15 pins)
17JE-13150-02 (D1)
Hood: 17JE-15H-1A
(Female Type) DDK Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND
Origin sensor
+VS
N.C.
N.C.
Limit sensor (+)
Limit sensor (−)
GND
Origin proximity sensor
+VS
Part Number Controller Side Stage Side
Cable Length
[m]
D15RP-CA-2 D-sub 15pin / male type RP17-13PA-12PC / 12pin 2
D15RP-CA-3 D-sub 15pin / male type RP17-13PA-12PC / 12pin 3
D15RP-CA-5 D-sub 15pin / male type RP17-13PA-12PC / 12pin 5
MINI-CA-SG-1 Unprocessed RP17-13PA-12PC / 12pin 1
MINI-CA-SG-2 Unprocessed RP17-13PA-12PC / 12pin 2
MINI-CA-SG-3 Unprocessed RP17-13PA-12PC / 12pin 3
MINI-CA-SG-4 Unprocessed RP17-13PA-12PC / 12pin 4
MINI-CA-SG-5 Unprocessed RP17-13PA-12PC / 12pin 5
D15D15A-CA-2 17JE-23150 / male type 17JE-13150 / female type 2
D15D15A-CA-3 17JE-23150 / male type 17JE-13150 / female type 3
D15D15A-CA-5 17JE-23150 / male type 17JE-13150 / female type 5
DAC-SG-2 Unprocessed 17JE-13150 / female type 2
DAC-SG-3 Unprocessed 17JE-13150 / female type 3
DAC-SG-4 Unprocessed 17JE-13150 / female type 4
DAC-SG-5 Unprocessed 17JE-13150 / female type 5
G108
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
Code
W9053
Cables for precision motorized stages with built in glass-scale encoder.
MDR14-CA-2.5 Cable
Controller side (14 pins)
Connector: 10114-3000PE
Shell: 10314-52F0-008
Sumitomo 3M Limited
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
Signal GND
+5V
RXD+
TXD+
STOP−
Signal GND
+5V
RXD−
TXD−
CONNECT−
Case
Blue
Red
Gray
White
Orange
Green
Brown
Purple
Black
Yellow
Inner shield
Outer shield
Stage side (14 pins)
Connector: 10114-3000PE
Shell: 10314-52F0-008
Sumitomo 3M Limited
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
Signal GND
+5V
RXD+
TXD+
STOP−
Signal GND
+5V
RXD−
TXD−
CONNECT−
Case
◦The MDR14-CA-2.5 cable is for connecting between
SHOT-302GS/ 304GS/SHOT-702 and JS-300/JB-400.
Specifications
Part Number Controller Side JS/JB side
Cable Length
[m]
MDR14-CA-2.5 10114-3000PE 10114-3000PE 2.5
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
DHR-CA-3 Cable
Controller side (15 pins)
Connector: 17JE-23150-02(D1)
Hood: 17JE-15H-1A-CF
(Male Type) DDK Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
GND
Origin sensor
+VS
Auto config
N.C.
Limit sensor (+)
Limit sensor (−)
GND
Origin proximity sensor
+VS
Clamp bracket
Specifications
Brown
Red
Orange
Yellow
Green
Gray
Green
Blue
White
Black
Green
Green
Purple
Inner shield
Outer shield
Stage side (10 pins)
HR10A-10P-10PC(73)
(Male Type)
Hirose Electric Co., Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
Clamp
Bracket
Motor lead
Motor lead
Motor lead
Motor lead
Motor lead
Auto config
Limit sensor power
GND
Limit sensor (+)
Limit sensor (−)
Part Number Controller Side Stage Side
Cable Length
[m]
DHR-CA-3 17JE-23150-02(D1) HR10A-10P-10PC(73) 3
F.G.
GSE-CA-3 Cable
Controller side (15 pins)
Connector: D02-M15SG-N-F1
Hood: DE-C8-J9-F1-1R
(Male Type)
Japan Aviation Electronics Industry, Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Signal GND
Signal GND
+5V
+5V
Alarm−
A+
A−
B+
B−
FG
Case
Specifications
Blue
Green
Red
Brown
White
Orange
Yellow
Purple
Gray
Black
Inner shield
Outer shield
Stage side (15 pins)
Connector: D02-M15SG-N-FO
Hood: DE-C8-J9-F1-1R
(Female Type)
Japan Aviation Electronics Industry, Ltd.
Pin Number
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
A−
A+
B−
B+
Alarm−
+5V
Signal GND
FG
Case
Part Number Controller Side Stage Side
Cable Length
[m]
GSE-CA-3 D02-M15SG-N-F1 D02-M15SG-N-F0 3
D02-M15SG-N-F1 D02-M15SG-N-F0
GSEF-CA-3
(with ferrite core)
3
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Other Cables
Catalog
Code
W9054
DOS/V PC
(D-sub 9pin female type)
1
2
3
4
5
6
7
8
9
Specifications
RS232C Cable GP-IB Cable USB Cable
Sigma Koki controller
(D-sub 9pin male type)
1
2
3
4
5
6
7
8
9
Part Number
Cable Length
[m]
RS232C/STR-1.8 1.8
RS232C/STR-3 3
RS232C/STR-4.5 4.5
Specifications
Part Number
Cable Length
[m]
GP-IB-0.5 0.5
GP-IB-1 1
GP-IB-2 2
GP-IB-3 3
GP-IB-4 4
USB
A connector
male type
1
2
3
4
Frame
Specifications
Shield
1
2
3
4
Frame
2m
Fully connected straight cable
USB
B connector
male type
Part Number
Cable Length
[m]
USB-1 1
USB-2 2
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G109

Motion Control Products
Maintenance / Grease Replacement
AFA/AFB/AFE/YVAC
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Maintenance
To maintain smooth operation, grease condition needs to be inspected and checked periodically
and grease needs to be supplied if necessary.
Use of grease will prevent rust, extending product life cycle significantly.
Catalog
Code
W9005
Effect of Grease
Minimizes friction to enable smooth drive.
Grease Up Method
1 Wipe off old grease.
2 Pour grease to supply in a syringe or the like.
3 Move the entire travel several times to apply grease thoroughly.
4 Wipe off grease that runs over in step 3.
* Too much grease will cause dust to adhere. Wipe the excess grease
clean.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Guide
▶We will perform filling of grease (charged separately). Contact our
International Sales Division for more information.
Specifications
Attention
▶Handling of grease requires attention. Avoid contamination with
foreign substances, mixing with different type of grease or air, and
heat treatment.
Part Number AFA AFB
Motorized Stages Used
SGSP15 Series
SGSP20 Series
SGSP26 Series
SGSP33 Series
SGSP46 Series
SGSP65 Series
TAMM
Manufacturer THK CO., LTD. THK CO., LTD.
Operating Temperature Range [°C] −45 〜 +160 −15 〜 +100
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Replacement of Grease
Grease used for motorized stages can be replaced with grease for clean room environments or
grease for vacuum applications.
Replacement Sites
Motorized stage : Ball screw part, crossed roller part (TSDM/TAMM series)
Always contact our International Sales Division since grease used for each component (guide part /
screw part) is different.
Rotation stage : Cannot be replaced by customers. Contact our International Sales Division for more information.
Goniometer stage : Cannot be replaced by customers. Contact our International Sales Division for more information.
(Always contact our International Sales Division since grease used for each component is different for goniometer stages.)
Features
Low dust generation grease for clean room environments
Reduces burden for maintenance since it is hard to deteriorate
and has long life.
It may lose fluidity and get hard suddenly in low-temperature
environments.
Catalog
Code
W9006
Fomblin Vacuum Grease
Has excellent heat resistance, lubricity and compatibility
with other materials.
It has long life and is usable in high temperature (−20°C
〜 +250°C).
Specifications
Part Number AFE-GREASE-C YVAC-GREASE-C
Number of Axes [axis] 1 1
Manufacturer THK CO., LTD. Solvay Solexis
Name Low dust generation grease for clean room environments Fomblin Vacuum Grease
Part Number AFE YVAC
Operating Temperature Range [°C] −40 〜 +120 −25 〜 +250
G110
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Question Sheet
Motorized Stage System Question Sheet
To: Sigma Koki Co., Ltd. FAX +81-3-5638-6550
Affiliation
(Organization Name)
Department
Quantity
Usage
Weight of
Sample, etc.
Table Size
Number of Axes
Resolution
Changing Motor
Name
TEL FAX E-mail
Country/Address
Project Name
Drawing number
Desired
Delivery Date
Research and development
For incorporation
(equipment / production)
(Full)
(Half)
Estimate
Budget
Part Number
Axis Direction
Changing Travel
(changing limit sensor position)
mm Travel
Load
Capacity
Positioning
Accuracy
Positional
Repeatability
Yes: byDate
X axis
Electromagnetic brake Reduction gear Other (AC servo)
* Write more detailed specifications here. (Rough illustration is acceptable.)
■Quotation ■Order
Date
XY axis Z axis
(Tentative name is okay)
No
JP Yen
Fill in this column if you desire to modify a product listed on the catalog or if you have a base product.
Combination
mm
kgf
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
X Translation
Theta Rotation
Others
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Sigma Koki Co., Ltd.
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G111

Motion Control Products
Piezo Guide
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
For the guide mechanism, Sigma fine stages adopted a guide system that utilizes elastic deformation of metals
and a mechanism to increase deformation of piezo elements. These originally designed stages achieved readable
resolution of 10nm during closed loop control, ideal for uses that require high-speed high-precision positioning.
Structure of Sigma Fine Stage
Displacement
Magnification Method
Piezo actuator and
displacement magnification
mechanism offer a large
operating range.
Displacement
Force
Digital Sensor
Closed loop control is
possible with a digital
sensor that does not
require any high precision
analog amplifier or AD
conversion circuit.
SFS-H Internal Structural Drawing
Upper plate
X axis mechanism
Baseplate
Piezo
actuator
Sensor counter board
Digital sensor
Piezo actuator
input connector
Digital sensor output connector
Operating Environment of Sigma Fine Stage
Use fine stages within the following operating environment
temperature range. Contact us separately if you desire to
use the stages outside the operating environment temperature
range.
*Operating environment
Temperature: 10°C − 30°C
Humidity: 20% − 60%
(without condensation)
*Recommended environment
Temperature: 20°C ±1°C
Humidity: 40% or lower
Since durability of piezo elements used in the SFS/SFS-H
stage series will deteriorate in high humidity environments,
use them in the above environments.
Guide
Sigma Fine System Chart
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
GP-IB
GP-IB cable
PC
Sample software
(download from website)
SGCommander
LabVIEW
USB cable
RS232C cable
RS232C USB
USB RS232C
Function generator
BNC-BNC cable
Analog input
AC100V
50/60Hz
AC100V
50/60Hz
CJ-200A
FINE-503
PIEZO 1/2/3 SENSOR 1/2/3
FINE-01γ
CJ-200A PIEZO SENSOR
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Single axis
(comes with cables)
SFS-H40X
SFS-H40Z
FINE cable
DS1 cable
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
For objective lens
(comes with cables)
SFS-OBL-1
SFS-OBL-2
SFAI-OBL-1-R
Single axis
SFS-H60X
SFS-H60Z
2 axes
SFS-H60XY
SFS-120XY(WA)
3 axes
SFS-H60XYZ
G112
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Accuracy Measurement Example: Sigma Fine Stage System SFS-H (Linear Stage)
High Speed Convergence Data
The following graph shows the hysteresis
curve unique to piezo actuators during open
loop control travel.
100
80
1st time
2nd time
Travel
Application
Systems
Optics &
Optical
Coatings
Holders
Displacement (µm)
60
40
20
Bases
0⇔75μm pulse rate (16Hz)
Closed loop control
by SFS-H60X at 150g load
(Reference)
(Reference)
0⇒1μm step convergence data (15msec)
Closed loop control
by SFS-H60X at 150g load
0
−20
−10 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150
Voltage (V)
(Reference)
Manual
Stages
Actuators
100
1st forward 5th forward
90
1st backward 5th backward
2nd forward 6th forward
80
2nd backward 6th backward
3rd forward 7th forward
70
3rd backward 7th backward
60 4th forward
4th backward
50
40
30
20
10
0
0 20 40 60 80 100
Command Value [µm]
Travel [µm]
Linearity
0⇔80μm linearity within 0.3%
Closed loop control
by SFS-H60X at 150g load
Measured Value [µm]
0.30
0.25
0.20
0.15
0.10
0.05
0.00
Positional Repeatability
Positional Repeatability (Forward)
Positional Repeatability (Backward)
0 10 20 30 40 50 60 70 80 90 100
Command Position [µm]
0⇔80μm positional repeatability 50nm or lower
by SFS-H60X at 150g load
Characteristics when feed amount is small in
closed loop control. Hysteresis disappears
in open loop control.
Displacement (µm)
6
5
4
3
2
1
Characteristics of Fine Feed
0
0 1 2 3 4 5 6
Indicated Value (µm) (Reference)
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
Straightness
Deviation from the straight line in the
direction of travel.
Pitch
Tilt around the axis in the horizontal plane
perpendicular to the direction of travel.
Characteristics of Yaw
Rotation around the axis in the vertical plane
perpendicular to the direction of travel.
AC Servo Motor
Cables
Piezo
Error (µm)
0.5
0.4
0.3
0.2
0.1
0
-0.1
-0.2
-0.3
-0.4
-0.5
0 8 16 24 32 40 48 56 64 72 80
Machine Position [µm] (Reference)
Pitch (″)
1
0.5
0
-0.5
-1
-1.5
-2
-2.5
1st time
2nd time
3rd time
-3
-10 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150
Voltage (V)
(Reference)
Follow-up example with Respect to Analog Input: SFS-H (Linear Stage) *Controlled by FINE-01γ
Yaw (″)
1
0.5
0
-0.5
-1
-1.5
-2
-2.5
1st time
2nd time
3rd time
-3
-10 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150
Voltage (V)
(Reference)
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Displacement (µm)
-10.6
-10.8
-11
-11.2
-11.4
-11.6
-11.8
-12
Capacitive sensor (user machine)
Position command value
Displacement (µm)
30
20
10
0
-10
-20
-30
-40
High Speed Convergence Data
Capacitive sensor (user machine)
Position command value
Input waveform: Navy/Output waveform: Light blue
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
-12.2 0 5 10 15 20 25
Time (sec)
0 0.4 0.8 1.2 1.6
0.2 0.6 1 1.4 1.8 2
Time (sec)
SFS-H40X
Staircase wave input/output waveforms
(Step 50nm 20-step staircase wave)
SFS-H40X
Saw-tooth wave input/output waveforms
(Uniform motion 35μm1Hz)
SFS-H40X
Rectangular wave input/output (30Hz)
SFS-H40X
Sine wave input/output (30Hz)
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G113

Motion Control Products
Sigma Fine (Piezo) Stages (high stiffness type)
XY Piezo Stages Aperture Type
SFS-H
SFS-120XY(WA)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
These piezo stages achieved fine movement of theoretical resolution of 1nm, offering high
precision, high stiffness and high speed with adoption of digital sensors.
SFS-H
◦These piezo stages offer high precision and high resolution positioning
because full closed loop control is possible with digital sensors.
◦With piezo elements used as actuators, travel between 90μm − 100μm
in open loop control, and fine movement of theoretical resolution of 1nm
are possible.
◦Readable resolution of 10nm is achieved during full closed loop control
with adoption of a digital sensor (micro-displacement sensor based on
the frequency digital conversion method) used as position detection
sensors.
◦Sigma Koki controller FINE series offers high speed. G117
Regarding pulse rate, SFS-H (linear) achieved 10 − 15Hz, or 25Hz when
the current FINE-01γ analog input is used.
Motoeized
Stages
Outline Drawing
Light
Sources
Index
SFS-H40X(CL)
Hexagon socket head cap screw M3×10…2 screws
40
16 16
6-M3 depth 4
2-φ2 +0.01
0
SFS-H40Z(CL)
Hexagon socket head cap screw M3×10…2 screws
40
16 16
2-φ2 +0.01
0
32
8
16 16
40
32
8
16 16
40
Guide
DS cable
2
FINE cable
4.5
FINE cable
2.5
6-M3 depth 4
DS cable
7
Controllers/Drivers
Softwares
Stepping Motor
4
7
20
2-φ3.5 mounting hole
32
φ6 counterbore
Travel direction
6
2-φ3.5 mounting hole
φ6 counterbore
32
4
25
Travel direction
AC Servo Motor
Cables
Piezo
SFS-H60X(CL)
Hexagon socket head cap screw M4×10…4 screws
60
25 25
16 16
8-M3 depth 5
2-φ2 +0.01
0
SFS-H60XY(CL)
Hexagon socket head cap screw M4×10…4 screws
(18.3) 60
25 25
8-M3 depth 5
16 16
2-φ2 +0.01
0
50
16 16
25 25
60
50
16 16
25 25
60
Y axis
travel direction
(11)
(11)
11 12
4-M4 depth 5
6.3
6.3
4-M4 depth 5
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
9.9
4.3
50
Travel direction
6
23
4-φ4.5 mounting hole
φ8 counterbore
Specifications
Part Number SFS-H40X(CL) SFS-H40Z(CL) SFS-H60X(CL) SFS-H60XY(CL)
Travel 90μm±15% 100μm±15% 100μm±15% 100μm±15%
Table Size [mm] 40×40 40×40 60×60 60×60
Actuator Piezo actuator Piezo actuator Piezo actuator Piezo actuator
Weight [kg] 0.28 0.28 0.4 0.43
Theoretical Resolution (open-loop) [nm] 1 1 1 1
Resolution (closed-loop) [nm] 10 10 10 10
Linearity [%] 0.3 or lower 0.3 or lower 0.3 or lower 0.3 or lower
Perpendicularity (Horizontal Direction) [μm] 1 1 1 1
Positional Repeatability [μm] 0.1 or lower 0.1 or lower 0.1 or lower 0.1 or lower
Load Capacity [N] 9.8 (1.0kgf) 6.7 (0.7kgf) 19.6 (2.0kgf) 14.7 (1.5kgf)
Micro-displacement Sensor Digital Sensor Digital Sensor Digital Sensor Digital Sensor
Compatible Cable Attached cable (2m) Attached cable (2m)
9.5
4.3
50
X axis travel direction
FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
6
23
4-φ4.5 mounting hole
φ8 counterbore
FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
G114
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Catalog
Code
Catalog
Code
W9054
W9055
Outline Drawing
SFS-H60Z(CL)
Hexagon socket head cap screw M4×10…4 screws
60
25 25
16 16
4-M4 depth 5
2-φ2 +0.01
0
SFS-H60XYZ(CL)
Hexagon socket head cap screw M4×10…4 screws
(19.3)
60
25 25
16 16
4-M4 depth 5
2-φ2 +0.01
0
Application
Systems
Optics &
Optical
Coatings
50
8.9
4.1
11 11
50
SFS-120XY(WA)
16 16
25 25
8-M3 depth 5
5.5
28
60
(11)
Travel direction
4-φ4.5 mounting hole
φ8 counterbore
8-M3 depth 5
4-φ4.5 mounting hole
φ8 counterbore
◦A high precision positioning XY axis stage with 50×50mm aperture fitted with a piezo element as an actuator and digital
sensor for position feedback, suitable for fine movement of samples under a microscope.
◦Can be driven with the Sigma fine stage controller FINE-503. Since the controller supports RS232C, GP-IB (FINE-503
only) and USB interfaces, position control can be performed easily from a PC using the software for positioning & measurement
SGEMCSE, SGTERME and SGSFSXE.
◦Ideal for applications such as incorporation into various types of microscopes, precision measurement, semiconductor
test equipment, high-precision mask alignment, scanning interferometer, image processor, and biotechnology systems.
50
11
12
12
4.3
12.6 12.6
50
16 16
25 25
6
40
60
(11)
Travel direction
X
Z
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Outline Drawing
SFS-120XY(WA)
Hexagon socket
head cap screw M4×8…4 screws
120
100
60
50 4-M4 through
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Travel direction
100
50
58
100
120
X
Y
(13)
18 7 10 16
Specifications
Part Number SFS-H60Z(CL) SFS-H60XYZ(CL) SFS-120XY(WA)
Travel 100μm±15% 100μm±15% 100μm±10%
Table Size [mm] 60×60 60×60 120×120
Actuator Piezo actuator Piezo actuator Piezo actuator
Weight [kg] 0.33 0.63 1.2
Theoretical Resolution (open-loop) [nm] 1 1 1
Resolution (closed-loop) [nm] 10 10 10
Linearity [%] 0.3 or lower 0.5 or lower −
Perpendicularity (Horizontal Direction) [μm] 1 1 1 or lower
Positional Repeatability [μm] 0.1 or lower 0.15 or lower 0.1 or lower
Load Capacity [N] 9.8 (1.0kgf) 9.8 (1.0kgf) 19.6 (2.0kgf)
Micro-displacement Sensor Digital sensor Digital sensor Digital sensor
Compatible Cable
FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
7
6.5
FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
100
3.5
19.5
20
4-φ4.5 mounting hole
φ8 counterbore
FINE-CA-3: For piezo
DS1-CA-3: For digital sensor
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
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G115

Motion Control Products
Catalog
Piezo Actuator for Objective Lens SFS-OBL (Upright)/SFAI-OBL (Inverted) Code W9056
(SFS-OBL-1 only)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Objective lens actuator for inverted microscope employing a piezo element as actuator and digital
sensor for feedback.
◦Compact, and enabling high-speed high-resolution positioning.
◦Travel is 100μm at open loop.
◦Two types of erected model and inverted model are available for
incorporation into various types of microscopes.
◦In the case of the Sigma fine stage series, these actuators can be
driven with the controller (FINE-01γ/503(CL)). Since RS232C,
GP-IB (FINE-503 only) and USB interfaces are supported, position
control can be performed easily from a PC using the software for
positioning & measurement SGEMCSE, SGTERME and SGSFSXE.
Guide
▶Adapters compatible with screw sizes of other manufacturers’ objective lenses
are also available.
▶SFS-OBL-2 uses a metal enclosure type piezo actuator to improve environment
resistance such as humidity compared to SFS-OBL-1.
Motoeized
Stages
Light
Sources
Outline Drawing
SFS-OBL-1
23
(68.5)
φ36.4
SFS-OBL-2
23
(68.5)
φ36.4
SFAI-OBL-1R
60.8
42
[Accessory] Special adapter
26.5
19.5 7
Index
Guide
Controllers/Drivers
4.2
45
8.1 25.5
7
φ32
29.5 20
φ40
OBL-ADP-M**A
(2)
31
Travel
direction
OBL-ADP-M**B
4.2
55
8.1 25.5
7
φ32
29.5 20
φ40
OBL-ADP-M**A
(2)
41
Travel
direction
OBL-ADP-M**B
30 40
19.5
20
15.5 (2)
(2)
M5 depth 10
φ10
OBL-ADP3-M**B
Travel
direction
M5
OBL-ADP3-M**A
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Specifications
Part Number SFS-OBL-1 SFS-OBL-2 SFAI-OBL-1R
Travel 100μm±15% 100μm±15% 100μm±15%
Objective Lens Diameter [mm] Diameter φ39 or less Diameter φ39 or less Diameter φ39 or less
Dimensions [mm] (W)75.5 × (H)45 × (D)40 (W)75.5 × (H)55 × (D)40 (W)60.8 × (H)30 × (D)40
Actuator Piezo element Piezo element Piezo element
Weight [kg] 0.15 0.24 0.15
Theoretical Resolution (open-loop) [nm] 1 1 about 0.8
Resolution (closed-loop) [nm] 10 10 10
Straightness (Xy Xz Yx Yz) [μm] 1 or lower 1 or lower 0.2 or lower
Positional Repeatability [μm] 0.1 or lower 0.1 or lower 0.1 or lower
Load Capacity [N] − − 4.9 (0.5kgf)
Micro-displacement Sensor Digital sensor Digital sensor Digital sensor
Compatible Adapter OBL-ADP-** OBL-ADP-** OBL-ADP3-**
Accessories Cable (2m) Cable (2m) Cable (2m), four special lift spacers
X Translation
Theta Rotation
Goniometer
Vacuum
Options
OBL-ADP-MA OBL-ADP-MB OBL-ADP3-MA OBL-ADP3-MB
φ36
φ32
Objective Lens Adapters
14.5
3 4.5
φ38
B
A
A
2
4
φ28
φ32
φ38
φ30
φ28
14.5
2 4.5
φ38
B
A
A
2
9
φ28
φ30
φ38
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
SFS-OBL Compatible Adapters
Part Number
Mounting Screw Size
[mm]
A
[mm]
B
[mm]
OBL-ADP-M20.32A Microscope side M20.32 M20.32 P=0.706 (W0.8×1/36) 15
OBL-ADP-M20.32B Objective lens side M20.32 M20.32 P=0.706 (W0.8×1/36) −
OBL-ADP-M25.0A Microscope side M25.0 M25.0 P=0.75 20
OBL-ADP-M25.0B Objective lens side M25.0 M25.0 P=0.75 −
OBL-ADP-M26.0A Microscope side M26.0 M26.0 P=0.706 (W26.0×1/36) 21
OBL-ADP-M26.0B Objective lens side M26.0 M26.0 P=0.706 (W26.0×1/36) −
SFAI-OBL Compatible Adapters
Part Number
Mounting Screw Size
[mm]
A
[mm]
B
[mm]
OBL-ADP3-M20.32A Microscope side M20.32 M20.32 P=0.706 (W0.8×1/36) 15
OBL-ADP3-M20.32B Objective lens side M20.32 M20.32 P=0.706 (W0.8×1/36) −
OBL-ADP3-M25.0A Microscope side M25.0 M25.0 P=0.75 20
OBL-ADP3-M25.0B Objective lens side M25.0 M25.0 P=0.75 −
OBL-ADP3-M26.0A Microscope side M26.0 M26.0 P=0.706 (W26.0×1/36) 21
OBL-ADP3-M26.0B Objective lens side M26.0 M26.0 P=0.706 (W26.0×1/36) −
G116
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Catalog
SFS Controllers FINE Code W9057
Controllers with built-in piezo drivers for single axis / 3 axes.
FINE-01γ
FINE-503(CL)
■Primary Functions
Part Number FINE-01γ FINE-503(CL)
Controller Function
○
Number of Control Axes 1 3
Stored Program Control
○
Feedback Control
Digital sensor
■General Specifications
Power Voltage
AC100V ±10%
50/60Hz
Power Consumption
50VA
Operating Temperature 10 − 30°C
Storage Temperature −20 − 60°C
Ambient Humidity
20 − 80%RH
External Dimensions (W×H×Dmm) 225×118×250 270×118×297
Weight (kg) 3.5 5.3
SFS Software
■Interface
GP-IB − ○
RS232C
○
USB
○
Analog input ○ −
■Optional
CJ-200A
○
SKBNC-BNC-3.0 ○ −
■Performance Specifications
Coordinate Indication Range ±999,999nm
Max. Travel to Set
±999,999nm
◦These controllers are fitted with digital sensor input for
each axis, enabling closed loop control by correcting
hysteresis curve unique to piezo.
◦Being connected to a PC via RS232C, GP-IB, or USB
interface, the FINE-503(CL) allows control of a fine stage
by simple commands sent from a PC.
◦In addition to PC control via RS232C or USB interface,
the FINE-01γ enables high-speed control synchronized
with analog signal input.
Part Name
Part Number
1 axis SFS Controller with Analog Input Function FINE-01γ
3 axes SFS Controller FINE-503(CL)
Control Pad
CJ-200A
FINE Cable
FINE-CA-3
DS Cable
DS1-CA-3
BNC-BNC Cable
SKBNC-BNC-3.0
■Control Command
Machine Origin Return
Theoretical Origin Setting
Relative Position Drive
Absolute Position Drive
Jog Operation
Position Appointment
Circular Interpolation Control
Linear Interpolation Control
Drive
Deceleration Stop
Emergency Stop
Speed Setting
Motor Free/Hold
Port Input
Port Output
○
○
○
○
○
−
−
−
○
−
−
○
−
−
−
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
AC Servo Motor
Cables
Piezo
Free Software|SGCommander (for RS232C) Windows ® Version
Free software is available to operate your controller easily from a PC. Each axis of a connected motorized stage can be
moved using buttons on the screen. The software can be downloaded from our website.
(1) Jog operation
(3) Homing control (4) Travel control
LabVIEW application is
available for LabVIEW
users.
(2) Speed specification
Simple operations are possible such
as travel by specifying an axis, homing
or jog operation.
Free Application
LabVIEW (for v.5.1/v.6i/v.7.1/v.8.6/v.2010) RS232C/GP-IB
Port number
PortInit.vi
Stage drive shaft number
SetSpeed.vi Move.vi
Minimum speed (pulse/sec) Acceleration time (ms) Number of pulses per travel
Maximum speed (pulse/sec) Drive direction (T: +, F: -)
Controllers such as SHOT-30*/702 and
FINE-**, which have a built-in program
function, allow editing of programs
from a PC. Since data can be
downloaded/uploaded from/to Excel
sheets, it is easy to edit programs. In
addition, upload of memory switch or
download mode is available.
Other: 30 Day Trial Version (SGEMCSE/SGTERME)
Trial Version
SGEMCSE.....SGEMCSE is software for collecting data or measuring using
G025 automatic positioning equipment, measuring instrument or
controller, and is offered
30 days for free.
SGTERME.....It allows command input
G024 using Excel for easy
program making.
SGTERME is ideal
software to link with
various devices, and is
offered 30 days for free.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
G117

Motion Control Products
Catalog
ECS Positioners ECS series Code W9200
Application
Systems
Optics &
Optical
Coatings
Holders
With Industrial Line positioners, attocube has genuinely combined highest precision piezodrive
technology with extremely rugged, yet cost effective design.
◦All ECS positioners of the Industrial Line are dedicated for operation at ambient temperature and depending on the model
for pressures ranging from atmospheric to UHV.
◦The ECS drive series features implemented crossed roller bearings and is thus specified for high loads of up to several
kilograms and guiding errors of less than 0.1mrad in pitch, yaw, and roll.
◦This powerful performance is supplemented by travel ranges up to 50mm, step sizes as small as 50nm, and optional
position sensor for closed loop operation with 1nm resolution. Attocube’s Industrial Line positioners are available in a wide
variety of designs, sizes, and travel ranges and can be stacked directly on top of each other for multi axis operation.
Bases
Specifications
Manual
Stages
Exterior
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Controllers/Drivers
Softwares
Stepping Motor
Products Name X axis positioner X axis positioner X axis positioner Goniometer Goniometer Rotator Rotator
Part Number ECS3030 ECS3080 ECS5050 ECGt5050 ECGp5050 ECR3030 ECR5050
Position Resolution 1nm 1nm 1nm 0.000001° 0.000001° 0.00001° −
Closed-loop
travel properties
Position Repeatability 50nm 50nm 50nm ±0.00005° ±0.00005° ±0.0005° −
Accuracy
< 0.01%
of travel range
< 0.01%
of travel range
< 0.01%
of travel range
≒0.001° ≒0.001° ≒0.002° −
Open-loop Minimum step size 50nm 50nm 50nm 0.0001° 0.0001° 0.0004° 0.0002°
travel properties Fine positioning range 1.6μm 1.6μm 1.6μm 0.0014° 0.0011° 0.012° 0.006°
Travel Range 20mm 50mm 30mm 10° 10° 360° 360°
Table Dimensions [mm] 30×30 30×80 50×50 50×50 50×50 30×30 50×50
Positioning Slide
Crossed Roller
Bearing
Crossed Roller
Bearing
Crossed Roller
Bearing
Crossed Roller
Bearing
Crossed Roller
Bearing
Ball Bearing
Ball Bearing
Aluminum 0.029 0.078 0.070 0.137 0.137 0.28 0.1
Weight [kg]
Stainless steel 0.051 0.147 0.247 0.247 0.247 0.66 0.215
Maximum Travel Speed 4.5mm/sec 4.5mm/sec 4.5mm/sec ≒1°/sec ≒1°/sec ≒10°/sec ≒5°/sec
Load Capacity (horizontal mounting) 9kg 24kg 15kg 1kg 1kg 2kg 2kg
* Closed-loop properties are available if “encoder option” is selected. For ordering, add suffix “/NUM” after the model number.
AC Servo Motor
Cables
Piezo
Control of Industrial Line Positioners—ECC100
The three axes controller ECC100 is used for driving all ECS positioners either in open loop or
closed loop mode, depending on the corresponding positioner model.
X Translation
Theta Rotation
Goniometer
Vacuum
Options
Controller Hardware
Part Number
ECC100
Chassis [mm]
about (W)210 × (H)50 × (D)210
Weight [kg] 1.9
Power supply
100/115/230V, 50−60Hz
Power consumption
max. 100W
□40mm
□60mm
□80mm
□85mm
□100mm
□120mm
Others
Software features
The ECC100 is delivered with a basic software package providing
windows based software including LabView driver set and DLL.
A dedicated software package /PRO providing enhanced controller
functionality can be upgraded at any time. The /SYNC option offers
the use of an Ethernet interface and allows for using the controller
with Epics drivers.
Output Signals
Stepping - voltage range
Stepping - frequency range
Stepping - maximum current
Resolution of signal generation
Output connectors
0 − 45V
0 − 5kHz (1 axis)
0 − 2kHz (3 axes simultaneously)
>5A Peak
680μV (16 bit)
SubD 15 connectors
G118
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Light Sources
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Light Sources
I N D E X
Laser Safety Guide
Hazards of Laser Light
A laser is a special man-made light, with completely different characteristics from natural light.
With directional characteristics, and monochromatic action, power is concentrated and reaches high density from the
focusing effect of lenses. under certain conditions a laser can be so strong that it will melt metal in an instant.
No matter how well laser workers know these characteristics, if preventive measures are not taken, it is highly likely that
disasters can occur with serious bodily harm and lasting effects.
Effects of Laser Light on the Human Body
JIS C6802, the safety standards for laser products,
covers the wavelengths ranging from 180nm and
1m with the objective of protecting the human
body.
As shown in Fig. 1, the position of harm to the eyes
is different depending on the wavelength range of
light.
Fig 1 Effect on the Human Body when Exposed to Excessive Laser Light
Overview of absorption in the eyeball CIE * wavelength range (nm)
(Sight focus range)
UV
Ultraviolet
rays
Visible
portion
IR
Infrared
rays
UV-C
UV-B
UV-A
200
280
315
400
780
IR-A
1400
IR-B
3000
IR-C
10 6
Effect on, injury to the eyes
Inflammation accompanied by pain in
cornea, conjunctiva due to photochemical
action, thermal effect
Lenticular opacity (cataracts) due to
thermal effect
Retinal impairment due to photochemical
action of visible light
Retinal injury due to photochemical action,
thermal effect, shock wave
Cornea burn, cataracts due to thermal
effect
* CIE: Abbreviation for Commission Internationale de Eniuminure (International Commission
on Illumination)
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H003

Light Sources
Laser Safety Guide
Injury to the Eyes
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
■Ultraviolet Range (Below 400nm)
Most ultraviolet light is absorbed by the surface of the cornea, and a partially transmitted portion is absorbed by the crystalline
lens of the eye.
If exposed to a high output UV laser, tissue is injured due to photochemical action, inflammation (burns) of the cornea will
occur in the short term, while long term exposure might lead to cataracts due to light action.
■Visible Light Range (400 − 700nm)
Glare is felt immediately, and blinking is a protective response.
However there is a temporal limit, it takes about 0.25 seconds for the
protective response once the hazard is sensed, during which time the
laser enters the eye. Here, the output that is regarded as virtually
safe even though the laser enters the eye within this time is basically
1mW or less. At output above that, the retina (Fig. 2) will receive
local injury due to thermal effects and focusing effect, even permanent
impairment might result.
■Near Infrared Range (700 − 1400nm)
The laser reaches the retina in the same way as the visible light
range. A point of particular caution is that in the non-visible light
range, injury is received without noticing it, so it is a very hazardous
wavelength range for the eyes.
World Safety Standards
[International Organization]
IEC60825-1 [Safety of laser products]
[Japan] JIS C6802 [Safety standards of laser products]
Fig 2 Effect on the Retina due to Thermal Effect and Focusing Effect
Corneal injury
Macular region of
the retinaCentral
fovea injury
Corneal injury
Crystalline lens injury
380nm
1,400nm
Ultraviolet range Visible light range Infrared range
* The site of injury will vary according to the wavelength of the laser
exposed to.
What Are Laser Safety Standards
IEC60825-1 was created as an international standard for
laser equipments, and it is a common safety standard for
IEC member nations.
Guide
Lasers
Detectors
Laser Safety
Equipments
Light Sources
What Is IEC60825-1 “?”
The IEC is the
[International Electrotechnical Commission]
As an organization for international standardization in the
electrical and electronic fields, it has the following objectives
to facilitate and promote international commerce.
* The promotion of the formulation and promulgation of
international standards for the electrical and electronic
engineering technical fields.
On JIS C6802
The Japanese Industrial Standard based on IEC60825-1
As determined by IEC60825-1 a standard to utilize and
manufacture laser products properly world-wide, Japan
has also enacted JIS C6802, safety standards for laser
products on that basis.
JIS C6802, a translation of IEC60825-1 which is the
international standard, is deemed “World Common Safety
Standards”.
The provisions of this standard range from the details of
safety measures required according to the wavelengths
and strength of lasers to the hazard display labels, and it
is considered that as long as based on this standard
“laser light can be utilized safely”.
Classification of Lasers by Class (IEC60825-1)
Each category by class is defined based on AEL (Accessible Emission Limit: the limit of the laser emission level allowed for
that laser class).
Classification of Lasers by Class
Class 1
Class 1M
Class 2
Class 2M
Class 3R
Class 3B
Class 4
Low-power level: Regarded as a safe laser under normal operating conditions (reasonably foreseeable operating conditions).
Low-power level (wavelengths of 302.5nm − 4,000nm), parallel large diameter beam or divergent beam
Safe with the naked eye, viewing of the laser with optical instruments is hazardous.
Low-power visible light (wavelengths of 400nm − 700nm): The same as a conventional visible light laser, safe with blinking and avoidance.
Long-term viewing might cause eye injury, particularly hazardous for long-term viewing of blue light.
●Power conditions: CW visible light 1mW or less
Low-power visible light (wavelengths of 400nm − 700nm), parallel large diameter beam or divergent beam
Applied in visible lasers, safe with the naked eye if blinking or avoidance responses are possible.
Direct viewing of laser light with optical instruments is regarded as potentially hazardous.
Laser light in the wavelengths of 302.5nm − 10⁶nm, and direct viewing of beams is regarded as potentially hazardous.
●Power conditions: CW visible light 5mW or less, otherwise within 5 times of Class 1
Direct intrabeam viewing is hazardous. However, viewing of pulse laser emissions by diffuse reflection not connected to a focal point, is safe
under certain conditions.
●Power conditions: Light 315nm or greater, CW laser 0.5W or less
Lasers that produce high-output (exceeding the AEL of Class 3B) hazardous diffuse reflection
Not merely direct beam contact with the skin or eyes even momentarily is regarded as hazardous, even diffuse reflection is regarded as
injurious to skin and eyes. It is also believed to cause fires.
* It is important to confirm the class of lasers to be used, and carry out measures to prevent injury.
H004
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Measures to Prevent Injury by Laser Classes
Directives from the Ministry of Health, Labor and Welfare [On Measures to Prevent Injury from Laser Radiation] formulate
specific details for safety and preventive measures in work with lasers, with laser equipments other than Class 1 and Class 2
as the subject.
List of Standard Measures for Laser Equipments by Class
Details of Measures (item only)
Class of Laser Equipment
4 3B 3R 2M and 1M
Assignment of Laser Equipment Managers ○ ○ ○ *1
Controlled Area (Sign, Keep Out) ○ ○
Laser light path
Position of optical path ○ ○ ○ ○
Appropriate design and shielding of optical path ○ ○ ○ *1
Appropriate termination ○ ○ ○ *1 ○ *2
Key control ○ ○
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Laser Equipments
Work Management,
Health Management,
etc.
Other
Emergency stop
switches, etc.
Emergency stop switches ○ ○
Alarm device ○ ○ ○ *1
Shutter ○ ○
Interlock system, etc. ○ ○
Emission window display ○ ○ ○
Operation position
Measures for optical system adjustment ○ ○ ○ ○
Protective equipment
Protective eyewear ○ ○ ○ *1
Work clothes to reduce exposure of the skin ○ ○
Use of flame-retardant materials
Inspection and maintenance ○ ○ ○ ○
Safety and hygiene education ○ ○ ○ ○
Examination of anterior eye segments
Health management
(cornea, crystalline lens of the eye)
○ ○ ○ *1
Examination of the fundus of the eye
○
Notices
Laser equipment managers ○ ○ ○ *1
Precautions for hazards, toxicity and handling ○ ○ ○ ○
Display of installation of laser equipments ○ ○
Display of high voltage components of laser equipments ○ ○ ○ ○
No hazardous materials allowed ○ ○
Measures for toxic gas, particulates etc. ○ ○
Medical examination and treatment for those believed injured by laser radiation ○ ○ ○ ○
○
○
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Lasers
Detectors
Laser Safety
Equipments
Light Sources
○ Indicates that measures are required. Details of the measures summarized by our company are the details determined in [Summary of Measures to Prevent Injury
from Laser Radiation]. Always refer to the original document.
*1 Measures are required for laser equipments emitting laser radiation other than the 400 − 700nm wavelengths.
*2 Regarding laser equipments written in JIS Standard 10.6, measures are required for ends of laser light path.
Preventive Measures
There is need to enhance safety measures protecting against laser light to avoid grave injuries and after-effects.
Injuries do not occur merely from exposing the body to laser light, secondary injuries are also possible from inhaling toxic
gases produced by laser light irradiating objects such as workpieces and peripheral equipment (gases and fine particles).
Therefore, there is a need for laser workers and managers to take a variety of measures to avoid laser accidents.
■Protection with Laser Shield Windows and Curtains
H013 to H017
Windows and curtains made of the similar special materials as laser protective eyewear protect the eyes of not only nearby
workers, but also the eyes and skin of people nearby. It is necessary to make a selection based on the type of laser oscillator
(wave length) and output power.
■Protection with Laser Protective Eyewear
H020 to H023
Protection of the eyes with eyewear made of special materials is necessary so that laser light does not accidentally strike
the eyes.
It is necessary to make a selection based on the type of laser oscillator (wave length) and output power.
■Safety Display to Inform of Laser Use with Panels and Plates
H025
There are panels and plates to post at the entrances of rooms to inform that lasers are being used in the vicinity.
These panels and plates need to be posted by users of the laser equipment (device) themselves.
■Safety Displays with Stick-on Seals and Labels for Laser Oscillators and Devices
Hazard displays with seals and labels draw attention to the hazard of lasers and processors.
In compliance with JIS C6802 the manufacturer of the laser equipments must display the seals and labels.
H025
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H005

Light Sources
Laser Diode (Visible)
He-Ne Lasers
LDU33
05-LHP
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
LDU33
Low noise laser diode module and power supply. The compact head with integrated aspheric
collimating lens makes this laser head smaller than optical systems utilizing He-Ne lasers.
The small size and simple operation make this popular for embedding in OEM equipment.
Guide
▶For custom wavelengths, outputs and modulation, contact our
International Sales Division for more information.
▶Can be mounted with the laser mount (MHG-20LDU) for the
kinematic mirror holder. C016
Attention
▶Power supply voltage for the 405nm model is 9V.
◦Collimation can be changed by means of the helicoid
focus ring, making it easy to adjust beam size.
◦Quick startup and stable output due to high quality APC
power supply.
◦With an emphasis on ease of use the laser head is
connected to the power supply with a high reliability
snap-on connector. The laser head is enclosed in a
precision machined aluminum housing, making it easy
to mount in an adjustable holder.
Outline Drawing
■Head
unit
■Power
unit
φ14.7
43 1,500 20
102
Catalog
Code
W5001
Common Specifications
Beam Divergence

Power Supplies for He-Ne Lasers
Stabilized He-Ne Lasers
05-LPL
05-STP
05-LPL
Power supply for standard He-Ne laser head (CDRH compliant).
W5003
◦Compact laser power supply.
◦Constant current, feedback stabilized, low ripple output.
◦Equipped with a protection circuit that automatically shuts down the laser in the
event of frequent arc discharges, open output terminal, output-terminal short or
extremely low input voltage.
Catalog
Code
Application
Systems
Optics &
Optical
Coatings
Holders
Common Specifications
Input Voltage
100VAC±10%
Input Frequency
50 − 60Hz
Current Ripple (RMS) 75%
Delay time of CDRH
3 − 7 secs
Operation −20°C − +40°C
Temperature Range
Storage −40°C − +80°C
Operation 0% − 90%
Ambient Humidity
Storage 0% − 100%
Operation 0 − 3,000m
Altitude
Storage 0 − 5,800m
Shock
25G/11msec
Part Number
Width W
[mm]
Length L
[mm]
Height H
[mm]
Attention
▶Voltage is 100VAC intended for use in Japan, if used abroad, please
contact our International Sales Division for more information.
▶Please note that since this product is imported, prices and delivery
dates are subject to change.
Outline Drawing
Output Current
[mA]
Output Voltage
[VDC]
Drive Voltage
[kVDC]
05-LPL-900-040 129 133 61 4 1,100 − 1,500 >8 1
05-LPL-901-040 129 133 61 4 1,450 − 2,050 >8 1
05-LPL-911-065 129 133 61 6.5 1,700 − 2,100 >10 1
05-LPL-902-065 129 133 61 6.5 1,850 − 2,450 >10 1
05-LPL-951-065 161 241 54 6.5 3,700 − 4,100 >11 1.8
05-LPL-951-070 161 241 54 7 2,500 − 4,100 >11 1.8
05-STP
05-LPL
Power indicator lamp
W
Key switch
H
L
Catalog
Code
(Units: mm)
Weight
[kg]
W5004
Stabilized He-Ne laser head with oscillation wavelength of 632.8nm, Cylindrical aluminum housing
encloses the laser tube, ballast resistor and electric wiring.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Lasers
Detectors
Laser Safety
Equipments
Light Sources
◦Stabilized wavelength with frequency fluctuation in 1 month is 10MHz or.
◦Integrated 1.8m power cable with a special connector at the end.
◦A label of guarantee indicating that the product complies with CDRH requirements
(U.S. safety standard) is attached to the exterior.
Common Specifications
Wavelength
632.8nm
Transverse Mode
TEM00
Polarization
Linear
Extinction Ratio >5000:1
Noise (RMS)
0.1% (30Hz − 10MHz)
Frequency Stability ±1.0MHz(1min)/±2.0MHz(1h)/±3.0MHz(8h)
Power Stability
±0.2% (1min/1h/8h)
Temperature Dependence 0.5MHz/°C
Time to Stabilization

Light Sources
Laser Checker
IR/UV Sensor Cards
LCP
SIRC/SUVC
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
LCP
W5005
Compact and lightweight power meter for checking laser output that is small enough to fit into a
pocket or tool kit.
◦Press the sample/hold button to power up. Allow the laser beam to strike the
sensor for two seconds or more while holding down the button. Then release
the button, and the measured output will appear clearly on the LCD screen.
◦Automatically powers down 10 seconds after measurement is completed.
◦The maximum output density is 30W/cm 2 when the built-in ND attenuator is
used, and 0.5W/cm 2 when the attenuator is not used.
◦The sensor disk is made of silicon and has an 8mm aperture.
◦Battery life is 180,000 measurements at 12 sec/sample. The built-in lithium cell
is not replaceable.
◦“---” will be displayed on the LCD screen and beeping will sound as an overload
warning.
◦Microprocessor controlled, this power meter comes equipped with wavelength
dependent sensitivity-calibration, auto-range (shown in μW or mW), attenuator,
output-overload-warning, and auto-stop functions.
Catalog
Code
Motoeized
Stages
LCP-33
Wavelength selection/
increment button
Over range
sound indicator
Attention
▶Laser-shielding protective gear must be worn during use.
Light
Sources
Index
Sensor
Attenuator position
control slide
3 digit display LCD
with unit indicator
Sample/hold
button
Output/wavelength
display selection
Wavelength selection/decrement button
Specifications
Part
Number
Wavelength
[nm]
Power Range
[W]
Outer Dimensions
[mm]
Weight
[kg]
LCP-33 400 − 1064 0.5μ − 1 168×24×20 0.05
Guide
Lasers
Detectors
Laser Safety
Equipments
Light Sources
SIRC/SUVC
Card-type sensor designed for optical-axis adjustment and verification.
SIRC-1
SUVC-1
W5006
◦The active area is coated with ET (Electron Trapping) material in powder form.
◦Reaches excitation within one minute in natural light or indoor light (especially
450 − 500nm). Emits light for about one minute.
◦Laser damage threshold: 200 mW/cm 2 (reference value)
◦The SIRC-1 emits visible light upon the reception of infrared light to allow visual
observation of the form of infrared light, which is not visible with the naked eyes,
and the intensity of the incident beam, making it effective for observation of the
optical axis of LD and YAG lasers.
◦The SUVC-1 emits visible light upon the reception of ultraviolet light to allow
visual observation of the form of ultraviolet light, which is not visible with the
naked eyes, and the intensity of the incident beam, making it extremely effective
for observation of the optical axis.
Catalog
Code
Attention
Specifications
▶Laser-shielding protective gear must be worn during use.
▶If used continuously in a darkroom, it might stop emitting, in which
case, place it in natural light about one minute to cause excitation.
▶Since ET material is sensitive to humidity, always store in a plastic
bag with a desiccant after use.
Part Number
SIRC-1
SUVC-1
Active area Surface
Dimensions
[mm]
□25
External
Dimensions
[mm]
54×85
thickness 0.5
Luminescence
Color
Orange
Red
Wavelength Characteristic
SIRC-1
Usable in wavelength range of 0.71.6µm,
but most suitable for 1.06µm.
SUVC-1
1
0.8
Relative sensitivity
Sensitivity
0.6
0.4
0.2
600 800 1000 1200 1400 1600 1800
0
250
300
350
400 450
500 550 600
Wavelength [nm]
Wavelength [nm]
H008
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Photodiode Amplifier
PDA-1
Catalog
Code
W5007
A transimpedance amplifier that converts weak photodiode output current to voltage.
Highly sensitive and supports external operation with PC.
◦Includes six conversion ranges 10 5 − 10 10 (V/A) and extremely
large conversion ratio, enabling detection of weak light.
◦Allows operation from the front panel as well as remotely using a
computer via the RS232C interface. Switching of ranges and
acquisition of current values are possible from the PC. Excellent
compatibility has been achieved with measurement control
software such as SGEMCS and SGTERM.
◦Includes temperature control of the photodiode when used with
PDA-PD-1, achieving stable detection of weak light.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Outline Drawing
(Units: mm)
System Configuration
Manual
Stages
PDA-1
Oscilloscope
Current signal from the photodiode
is output here as a voltage signal,
amplified to the amplification
factor specified with the range
switching switch.
Actuators
Motoeized
Stages
150
PDA-1
A transimpedance amplifier
that converts photodiode
output current to voltage.
Photodiode
Uses standard photodiode or
photodiode prepared by the
customer.
Use anode grounded type.
Light
Sources
50
200
PC
Allows remote operation using an
external computer via RS232C
serial interface.
Excellent compatibility has been
achieved with measurement
control software such as SGEMCS
and SGTERM.
RS232C interface and RS232C
cable are required.
Index
Guide
Lasers
Characteristics Table (Ambient Temperature 25°C)
Operation Temperature
0°C − 40°C (Except sensor)
Range 0 10 5 V/A
Range 1 10 6 V/A
Amplifier Gain
Range 2 10 7 V/A
Range 3 10 8 V/A
Range 4 10 9 V/A
Range 5 10 10 V/A
MAX analog output voltage Load 2kΩ 4V
(@Range 0 − 3) 2% vs. max light received in range
Measurement
Gain Error
(@Range 4) 3% vs. max light received in range
(@Range 5) 4% vs. max light received in range
(@Range 1) 3kHz
Cutoff Frequency (@Range 3) 30Hz
(@Range 5) 0.3Hz
A/D Converter Conversion Frequency 16Hz
A/D Converter Resolution
24bits
(but effective resolution is 16bits)
Temperature Control Temperature −10°C (Special photodiode)
Temperature Control Fluctuation Temperature 0.1°C (Special photodiode)
Peltier Output Current
1A (Special Photodiode)
Note) Use of Peltier is limited to the special photodiode.
Specifications
Part Number
PDA-1
Operation Ambient Temperature 0°C − 40°C
Storage Ambient Temperature −20°C − 60°C
Ambient Humidity
20 − 90%RH (without condensation)
External Dimensions [mm] (W)150×(H)50×(D)200 (Except for protrusions)
RS232C
Photodiodo signal input connector
Interface
(Attention: PD and photodiode are anode grounded)
SIGMA’s photodiode special temperature control
connector Signal output connector etc.
Accessories
Special AC adapter (AC100V)
Guide
■Temperature controlled Photodiode
PDA-PD-1
◦The PDA-PD-1 has built-in Peltier cooler, amp, temperature
control circuit, and photo detector.
◦The photodiode maintains low temperature by means
of the Peltier cooling module.
◦ND filters can be mounted to adjust the volume of
received light. Absorption type fixed ND filters can be
used. B211
◦Length of the cable to the amp is about 500mm.
◦Structured to not be affected by peripheral noise.
▶C mount type is available separately. Contact our International
Sales Division for more information.
Specifications
Part Number
PDA-PD-1
Light Receiving Surface Size [mm] 5.8×5.8
Electrical and Optical Characteristics Sensitivity wavelength range λ=190 − 1100nm
(Ambient Temperature 25°C) MAX sensitivity wavelength λp=960nm
Detectors
Laser Safety
Equipments
Light Sources
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H009

Light Sources
Multiple Scanning Knife-Edge beam profiler
OS-BA-SAT
Catalog
Code
W5033
A compact stand-alone type beam measuring device with an integrated touch screen.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
◦Supports a wide wavelength measurement range
(190nm to 2700nm), and capable of measuring beam
profile, beam size, beam shape, position and beam
intensity. It measures beam size between 3μm and
9mm with 0.1μm resolution.
[Features]
◦12-bit A/D converter enables high resolution sampling.
◦Real-time beam profiling displays beam size, beam
intensity and Gaussian fits.
◦Capable of calculating the beam gravity center and
ellipticity of loaded data. In addition, it can save external
control and logging data in Excel or text (.txt) format
using RS232C and TCP/IP communication.
◦USB control type is available as option.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Lasers
Detectors
Laser Safety
Equipments
Light Sources
Outline Drawing
171
35.2 87
15 37.6
15
55
φ11
3×M4
φ68
15 3.5
M4
13
203
105
Cable
50
148
BA7
15
□9
Stand Alone Unit Drawing
M22×0.5
2×M4 depth 3.5
(Units: mm)
BA3
φ5.4
Specifications for Sensorheads
Silicon (Si) 350 − 1100nm
Sensor type
UV-Silicon (UV-Si) 190 − 1100nm
InGaAs (IR) 800 − 1800nm
IR Enhanced (IR) 1200 − 2700nm
Spectral range
3 for BA3 heads
7 for BA7 heads
3μm − 5mm BA3-Si, BA3-UV
15μm − 10mm BA7-Si, BA7-UV(Oval)
15μm − 9mm BA7-Si, BA7-UV(Round)
Beam size range 3μm − 3mm BA3-IR3, BA3-IR3-E
15μm − 3mm BA7-IR3, BA7-IR3-E
3μm − 5mm BA3-IR5
15μm − 5mm BA7-IR5
Beamwidth resolution
1µm for beams >100µm in size,
0.1µm for beams

CCD Type Beam Profiler
OS-BeamOnHR
Catalog
Code
W5034
A CCD type beam profiler for both CW and pulsed lasers, providing improved analytical capability.
◦High resolution CCD sensor supports both CW and pulsed lasers.
◦Supports a wide range of output with a filter (option) set in the accessory filter wheel.
◦Measures beam profiles, position and beam intensity with 350nm to 1310nm sensitivity.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
[Features]
◦Capable of measuring both CW and pulsed lasers.
◦Our original technology enables measurement in a wide
dynamic range.
◦Capable of output the logging data using RS232C and
TCP/IP.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Specifications
Products Name OS-BeamOnHR
Details
Components
CCD camera with 350nm to 1310nm sensitivity
USB2.0 cable, post, filter wheel,
software, carrying case
Index
Guide
Lasers
CCD Specifications
Camera Type
1.4 mega-pixel, 1/2-inch progressive scan
Pixel Size
4.65μm×4.65μm
Sensor Effective Area 6.47mm×4.83mm
Weight
0.165kg
Trigger Terminal RCA female, TTL4.5V rectangular wave.
Power Consumption 4W 6V
System Performance
Wavelength Sensitivity 350nm − 1310nm
Frame Rate 15fps (1392×1040)
Imaging Resolution 1392×1040
Shutter Speed
0.6s − 1μs
Gain Control 1× − 23×
Dynamic Range 60DB (without filter)
Damage Threshold 50W/cm 2 (with filter)
Sensitivity 633nm: 5nW/cm 2 , 1310nm: 60μW/mm 2
Saturation Point 2mW/cm 2
Used with Pulsed Laser
Trigger
Measurement of laser output between 1Hz to 100Hz,
also single shot measurement is possible.
Operate the slide bar on the software display
and decide the detection threshold.
Detectors
Laser Safety
Equipments
Light Sources
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H011

Light Sources
Laser Shield Curtain Guide
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
These products are intended for protection or shielding from accidental exposure to scattered
laser light.
Absorb indirect scattering light of laser light to protect the eye. The type, wavelength and optical
density (OD) of laser light to be absorbed are inscribed on these products.
◦Apply to windows, inset windows or partitions in laser controlled areas in laboratories and factories.
◦Effective as safety measures for expected and unexpected visitors, since laser injuries can occur instantaneously.
How to Attach and Install
Replace curtains periodically because the optical density may deteriorate depending on the usage
or storage environment (direct sunlight, high temperature and high humidity) or due to scratches.
These products are made of flexible PVC, which may be vulnerable to degradation by organic solvents, acids, and alkalies,
depending on the solvent type. If stained, wash with water containing a neutral detergent or wipe with alcohol.
Also wipe with alcohol when curtains become cloudy over time with oily exudations (plasticizer).
Motoeized
Stages
Light
Sources
Index
Installation method of YLC-1 laser shield curtain
(1) Wipe the glass clean.
(2) Spray water onto the glass surface.
(3) Apply the product to the wet glass.
(4) Push out water and air from underneath the product by moving a rubber spatula on top of the product from the center to its edges.
(1) (2) (3) (4)
Guide
Lasers
Detectors
Laser Safety
Equipments
Light Sources
Attaching method of YL-600 laser curtain
Transparent plate
Adhesive
Laser Safety
Attention
▶Do not use with incompatible lasers or wavelengths. (Even if laser names are the same, their wavelengths might be different.)
▶Do not use products that are damaged or after they have received large laser energy.
▶Never subject laser (shield) curtains to direct laser beam exposure. Direct exposure may damage the curtains.
▶These are not protective equipments that completely absorb laser light. (Refer to the absorption characteristic graph.)
▶Do not directly look into the laser beam through laser (shield) curtains.
H012
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Laser Shield Curtain
YLC-1/YLC-2
カタログ
コード
W5008
Protect larger areas (1,000mm) compared to conventional YL-600 (effective width: 330mm), and
offer excellent antistatic and fire retardant properties.
◦Ensure high visibility with improvements in surface accuracy and visible light transmittance.
◦Flexibly used in various shapes repeatedly since it adhere with water instead of band.
Application
Systems
Optics &
Optical
Coatings
YLC-1
Common Specifications
Material
Thickness [mm] 0.5
Flexible PVC
Compatible Wavelength [nm]
YLC-1: 266, 355, 1064, 2100, 10600
YLC-2: 190 − 380, 441 − 532
Color
YLC-1: Clear gray
YLC-2: Clear orange
Optical Density [OD] 3<
Visible Light Transmittance [%]
YLC-1: Standard 40
YLC-2: Standard 30
Antistatic Property
(Surface resistance value)
YLC-1: 1.1×10 10 (JIS K6911)
YLC-2: 1.1×10 13 (JIS K6911)
Fire Retardant Class 2 fire retardant (JIS A1322)
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
YLC-2
Lasers
Detectors
Part Number
Part Number
Length
[mm]
YLC-1(0.5M) YLC-2(0.5M) 500
YLC-1(1M) YLC-2(1M) 1,000
YLC-1(2M) YLC-2(2M) 2,000
YLC-1(3M) YLC-2(3M) 3,000
YLC-1(4M) YLC-2(4M) 4,000
YLC-1(5M) YLC-2(5M) 5,000
YLC-1(6M) YLC-2(6M) 6,000
YLC-1(7M) YLC-2(7M) 7,000
YLC-1(8M) YLC-2(8M) 8,000
YLC-1(9M) YLC-2(9M) 9,000
YLC-1(10M) YLC-2(10M) 10,000
Laser Safety
Equipments
Light Sources
Absorption characteristic graph
T: Transmittance
YLC-1
YLC-2
5
4
T [%]
OD
OD
3
2
1
0
400 500 600 700 (nm)
* Note that the graphs of optical density show measured values, not guaranteed values.
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H013

Light Sources
Laser Safety PVC Films
YL-600
Catalog
Code
W5009
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
These products are intended for protection or shielding from accidental exposure to scattered
laser light.
◦Made of flexible PVC, this material is easily cut with scissors. Apply to a wide range including windows, doors or glass in
laser controlled areas in laboratories and factories.
Outline Drawing
YL-600
* Diagonal lines are tabs.
Common Specifications
Laser Curtain
Max length 10m
Material
Flexible PVC
Thickness [mm] 0.7
External Dimensions [mm] Effective width: 330
20
20 330 (effective width)
370
(Units: mm)
Thickness t=0.7
Light
Sources
Index
Guide
Lasers
Detectors
Laser Safety
Equipments
Light Sources
Part Number
Compatible Laser
Wavelength
[nm]
Optical Density
[OD]
Visible Light
Transmittance
[%]
YL-600-HN(0.5M)
500 0.18
YL-600-HN(1M) 1,000 0.35
YL-600-HN(2M) He-Ne
632.8
Blue
2< 12
570 − 694.3
2,000 0.7
YL-600-HN(5M) 5,000 1.75
YL-600-HN(10M) 10,000 3.5
YL-600-LD(0.5M)
500 0.18
YL-600-LD(1M) 1,000 0.35
YL-600-LD(2M) LD
740 − 910
3<
Green
12
700 − 1000 (However, Ti-Sapphire 1 − 3

Laser Safety Windows (made of acrylic resin)
YL-500
These products are intended for protection or shielding from accidental exposure to scattered
laser light. Appropriate for inspection windows of laser processing devices and partitions in laser
controlled areas.
Guide
▶Contact us for shapes not listed in the catalog or according to the
intended use.
▶Replace laser windows periodically as the optical density may
deteriorate depending on the usage or storage environment (direct
sunlight, high temperature and high humidity) or due to scratches.
◦Designed for safety, which is appropriate for extended adjustment tasks
and normal operations.
◦High optical density blocks visual observation of laser light.
◦Apply to partial windows, inset windows or partitions in laser controlled
areas in laboratories and factories.
◦Effective as safety measures for expected and unexpected visitors, since
laser injuries can occur instantaneously.
Attention
▶Do not use with incompatible lasers or wavelengths. (Even if laser
names are the same, their wavelengths might be different.)
▶Do not use products that are damaged or once they have received
large laser energy.
▶Do not irradiate the laser beam directly at laser safety windows
because it may damage them.
▶These are not protective equipments that completely absorb laser
light. Absorption characteristic graph H016
▶Do not directly look into the laser beam through laser safety
windows.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Part Number
Compatible
Laser
Wavelength
[nm]
Optical Density
[OD]
Color
Visible Light
Transmittance
[%]
External
Dimensions
[mm]
Thickness
t
[mm]
YL-500P-AR(1)
100× 100 3 0.04
YL-500P-AR(2) 100× 150 3 0.07
190 − 380
YL-500P-AR(3) 441.6
Orange
200× 200 3 0.16
Ar
4<
60
YL-500P-AR(4) 488
250× 300 3 0.3
514.5
YL-500P-AR(5) 300× 300 3 0.36
YL-500P-AR(7) 400× 400 3 0.64
YL-500P-Y2(1)
100× 100 3 0.04
YL-500P-Y2(2) 100× 150 3 0.07
YL-500P-Y2(3) 480 − 540
Red
200× 200 3 0.16
YAG2ω
6<
15
YL-500P-Y2(4) 532
250× 300 3 0.3
YL-500P-Y2(5) 300× 300 3 0.36
YL-500P-Y2(7) 400× 400 3 0.64
YL-500P-LD(1)
100× 100 3 0.04
YL-500P-LD(2) 100× 150 3 0.07
YL-500P-LD(3) 632.8
Blue
200× 200 3 0.16
LD
5<
7
YL-500P-LD(4) 760 − 850
250× 300 3 0.3
YL-500P-LD(5) 300× 300 3 0.36
YL-500P-LD(7) 400× 400 3 0.64
YL-500P-Y1(11)
100× 100 3.5 0.04
YL-500P-Y1(12) 100× 150 3.5 0.07
YL-500P-Y1(13) 200× 200 3.5 0.16
YL-500P-Y1(14) Green
250× 300 3.5 0.3
YAG 1064 5<
25
YL-500P-Y1(15) 300× 300 3.5 0.36
YL-500P-Y1(16) 400× 400 3.5 0.65
YL-500P-Y1(17) 500× 600 3.5 1.2
YL-500P-Y1(18) 1,000×1,200 3.5 4.8
YL-500P-CO2(1)
100× 100 4 0.05
YL-500P-CO2(2) 100× 150 4 0.08
YL-500P-CO2(3) Green
200× 200 4 0.2
CO2 10600 10<
60
YL-500P-CO2(4) 250× 300 4 0.37
YL-500P-CO2(5) 300× 300 4 0.45
YL-500P-CO2(7) 400× 400 4 0.8
Weight
[kg]
Lasers
Detectors
Laser Safety
Equipments
Light Sources
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H015

Light Sources
Laser Safety Windows (made of acrylic resin)
YL-500
Catalog
Code
W5010
Absorption characteristic graph * Note that the graphs of optical density show measured values, not guaranteed values.
T: Transmittance
Application
Systems
Optics &
Optical
Coatings
Holders
■Complete absorption type
Part Number
YL-500P-AR
Window Type
Ar
Color Orange
Visible Light Transmittance 60%
Optical Density [OD]
EXCIMER
T [%]
OD
Ar
200 − 514.5nm 4<
Bases
He-Cd
Manual
Stages
Actuators
Part Number
YL-500P-Y2
Window Type
YAG2ω
Color Red
Visible Light Transmittance 15%
T [%]
OD
Motoeized
Stages
Light
Sources
Optical Density [OD]
Ar
YAG2ω
480 − 540nm
532nm
6<
Index
Part Number
Window Type
YL-500P-LD
LD
Guide
Lasers
Detectors
Color Blue
Visible Light Transmittance 7%
Optical Density [OD]
LD
760 − 850nm
He-Ne
632.8nm
5<
T [%]
OD
Laser Safety
Equipments
Light Sources
Part Number
Window Type
YL-500P-Y1
YAG
Color Green
Visible Light Transmittance 25%
T [%]
OD
Optical Density [OD]
YAG
Nd-YVO4
1064nm 5<
Part Number
YL-500P-CO2
Window Type
CO2
Color Green
Visible Light Transmittance 60%
T [%]
OD
Optical Density [OD]
CO2 10600nm 10<
H016
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Laser Safety Panels
OFUP2
Catalog
Code
W5011
Panels for protecting eyes to ensure safety against accidental exposure to scattered laser light.
Enable observation of internal situation by blocking laser lights using laser shield curtains or laser
windows compatible with various wavelengths.
◦Fitted with casters, making it easy to move.
Guide
▶Refer to H013 and H015 pages for the specifications of laser shield
curtains and laser safety windows.
▶Connection of panels is possible as an option.
Attention
▶Delivery cost will be quoted separately.
Connection Examples
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Outline Drawing
(Units: mm)
Laser safety PVC films or laser safety window
1,263 24
Guide
Lasers
Detectors
Laser Safety
Equipments
1,175 (1,152)
475 (452)
Light Sources
1,783
Aluminum
composite plate
(626)
561
205
Dimensions inside ( ) are service area when using laser safety PVC films
Laser Shield Curtain Type (YLC-1 type)
Part Number
Wavelength
[nm]
Optical Density
[OD]
Used
Laser Shield Curtain
Color
Visible Light Transmittance
[%]
Width
[mm]
OFUP2-121750YLC1
266
355
1064
2100
10600
3< YLC-1
Clear gray
40 1,200
OFUP2-121750YLC2
190 − 380
441 − 532
3< YLC-2
Clear orange
30 1,200
Laser Safety Windows Type (YL-500 type)
Part Number
Wavelength
[nm]
Optical Density
[OD]
Used
Laser Shield Curtain
Color
Visible Light Transmittance
[%]
OFUP2-121750PAR 200 − 514.5 4< YL-500P-AR Orange 60 1,200
OFUP2-121750PY2 480 − 540 6< YL-500P-Y2 Red 15 1,200
OFUP2-121750OPLD 632.8, 760 − 850 5< YL-500P-LD Blue 7 1,200
OFUP2-121750PY1 900 − 1200 5< YL-500P-Y1 Green 25 1,200
OFUP2-121750PCO2 10600 10< YL-500P-CO2 Green 60 1,200
Width
[mm]
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H017

Light Sources
Laser Protective Eyewear Guide
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Use of Laser Protective Eyewear
According to the directives from the Ministry of Health, Labor and Welfare [On Measures to Prevent Injury from Laser
Radiation], laser protective eyewear appropriate for the laser type is required in laser controlled areas of the Class 3R laser
equipments that emit lasers at wavelengths other than 400 to 700nm, as well as Class 3B and Class 4 laser equipments as
safety and preventive measures.
Selection of Laser Protective Eyewear
(1) Confirm laser output wavelengths.
(2) Confirm laser output.
For CW output: Output power
For pulse: Energy per pulse, pulse duration, pulse recurrence frequency, etc.
(3) Calculate MPE (maximum permissible exposure).
(4) Determine the maximum exposure duration.
(5) Calculate the maximum radiation exposure value.
(6) Calculate the required optical density.
(7) (Confirm whether it is required to see beams in case of visible lasers.)
(8) (Select the shape of protective eyewear (whether users will wear prescription glasses).)
Light
Sources
Index
Guide
Lasers
What Is MPE (Maximum Permissible Exposure)
The MPE is the value that indicates a safety level for the human body, and defined as 1/10 of the strength of laser output at
which probability of causing hazard is 50%.
Although the MPE is determined by two axes, wavelength and exposure time, attention is required since the MPE value is
given as power density (W/m 2 ) or energy density (J/m 2 ) per unit surface area.
This area is based on the limiting aperture size, and the value varies according to the wavelength, eye or skin, exposure
time and other conditions, considering hazard types.
Detectors
Laser Safety
Equipments
Light Sources
What Is OD Value (Optical Density)
Optical transmission is generally indicated by transmittance (%).
It is commonly expressed in percentage, and indicated by logarithm. That is the OD value (optical density).
Optical density (OD) is the attenuation rate of incident light that passes through the optical filter, in this case laser protective
eyewear, and calculated with the following formula.
OD(λ) = Log10(PI(λ)/PT(λ)) = −log10T(λ)
(PI: Incidence PT: Transmission
T: Transmittance of characteristic wavelength)
* The larger the OD value, the larger the attenuation rate of incident light, thus providing higher protective function.
* If the OD value increases, then the transmittance decreases.
Optical Density (OD value) Transmittance Attenuation Rate Protective Function
0 100% 0 Weak
1 10% 1/10
2 1% 1/100
3 0.1% 1/1000
4 0.01% 1/10000
5 0.001% 1/100000
6 0.0001% 1/1000000
7 0.00001% 1/10000000
8 0.000001% 1/100000000
9 0.0000001% 1/1000000000
10 0.00000001% 1/10000000000 High
H018
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Differences in Usage of Complete Absorption Type, Multi-wavelength Compatible Type and Partially Transmitting Type
■Complete absorption type
Normally, you cannot see visible laser light because the optical density (OD) is set to high.
■Multi-wavelength compatible type
Appropriate for work involving multiple wavelengths.
■Partially transmitting type for maintenance
Appropriate for maintenance involving 100mW or less (OD 1 − 2), and 10W or less (OD 4). Use this type for checking
optical paths or adjusting optical axes.
■Reinforced glass (complete absorption) type
Optical density (OD) and damage threshold are high enough to prevent damage from direct beam exposure.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
YL-760 model (three-way type)
This model offers improved fitting functions including angle adjustment
for the gap with the face and flexible temples. Inner frames (optional)
customized according to lens prescriptions are available for people
who wear prescription glasses.
YL-717 model (over prescription glasses type)
Can be used over prescription glasses.
This model is fitted with top canopy and sides, and the angle of the
front frame and the length of temples are adjustable.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
H020
H021
Index
YL-335 model (over prescription glasses type)
Can be used over prescription glasses. This model is well cushioned
and comfortable to wear. (Some large glasses may not fit.)
YL-290 model (eyeglass shaped)
Light and compact two-lens type is easy to wear and remove.
This model features a highly protective cover frame and wide temples.
Guide
Lasers
Detectors
Laser Safety
Equipments
H022
H022
Light Sources
YL-250G model (over prescription glasses, reinforced glass type)
This model uses reinforced glass for lenses, provides high visible light
transmittance, and offers improved visibility and permeability of light.
Lenses also offer excellent chemical resistance.
YL-130 model (goggle shaped)
This model fits the face snugly, and can be worn over prescription
glasses. Appropriate for use when the angle of beam or scattering
light cannot be identified.
H023
H023
YL-120H model (goggle shaped)
With its laminated glass structure, this model provides high visible light
transmittance and ensures safety with high damage threshold against
laser.
H023
Attention
▶Do not directly look into the laser beam through laser protective
eyewear.
▶Do not irradiate the laser beam directly at laser protective eyewear
because it may damage the eyewear.
▶Do not use with incompatible lasers or wavelengths. (Even if laser
names are the same, their wavelengths might be different.)
▶Do not take off laser protective eyewear during work.
▶Do not use as protective eyewear for welding.
▶Complete absorption type eyewear is not protective equipments that
completely absorb laser light. (Refer to the absorption characteristic
graph.)
▶Do not use products with visible light transmittance of 20% or less
in a darkroom.
▶Cease use of eyewear that is damaged or once it has received high
laser energy.
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H019

Light Sources
YL-760 Model (Three-way type)
YL-760
Catalog
Code
W5013
Adjustable fit including angle adjustment for the gap with the face and flexible temples.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
◦Used for the naked eye, over prescription glasses, and with prescription inner frame (optional).
Guide
▶Wearing laser protective eyewear over prescription glasses causes
a lot of stress. To release the stress, prescription inner frames
(optional) are available. Contact our International Sales Division for
more information.
▶All prescriptions can be supported since these are custom-made.
Common Specifications
Frame
Nylon elastomer
Lens
Polycarbonate (hard coated)
Specifications
Compatible with prescription glasses, adjustable
angle, soft rubber temple (flexibly adjustable)
External Dimensions [mm] (W)160×(H)58×(D)170
Weight [kg] 0.14
Motoeized
Stages
Light
Sources
Function Description
■Rubber Nose Pad
Inner Frame
Index
Guide
Lasers
Detectors
Laser Safety
Equipments
Light Sources
Normal size
The rubber nose pad keeps eyewear from sliding to
provide comfort for extended work. Together with the
normal size, the large size is included as standard so
that eyewear is easy to fit for women as well as people
who use inner frames.
■Angle Adjustment Function
Large size
With its simple attachment structure, the inner frame
can be easily attached or taken off at the time of maintenance.
It eliminates the stress of wearing protective
eyewear over prescription glasses, providing comfortable
work conditions.
(* Ophthalmic prescription data is required for production.)
■Adjustable Earpiece
With the angle adjustment function, it is possible to align
the eyewear with the line of sight, fit it on the nose and
adjust the gap with the face.
Rubber coated earpieces can be shaped into ear hook
type, straight type and other shapes as desired by freely
bending them.
Part Number Type Compatible Laser
Wavelength
[nm]
Optical Density
[OD]
Lens Color
Visible Light
Transmittance
[%]
YL-760-ALX Complete absorption ALEXANDRITE 750 − 800 − 850 4−10−4< Pink 30
YL-760-LDY1 Complete absorption LD−YAG
800 − 810
940, 1064
7< Green 35
YL-760-Y1 Complete absorption YAG 1064 6< Green 50
YL-760C-Y2 Multi-wavelength compatible type YAG
266, 355 10<
532 4<
1064 6<
Amber 35
YL-760M-Y2 Partially transmitting for maintenance YAG2ω 532 2< Red 30
YL-760M-VLD Partially transmitting for maintenance LD
660 − 680
647.1, 676.4
2< Blue 55
H020
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YL-717 Model (Over prescription glasses type)
YL-717
* With exceptions
Catalog
Code
W5014
Can be used with prescription glasses. The adjustable locking rubber ear-piece improves fit.
◦This model is fitted with top canopy and sides, and the angle of the front frame and the length of temples are adjustable.
Function Description
Common Specifications
Frame
Lens
Nylon elastomer
Polycarbonate (hard coated)
Specifications
Compatible with prescription glasses, elastomer
cushion, adjustable temple angle
External Dimensions [mm] (W)163×(H)65×(D)167
Weight [kg] 0.04
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Uses a newly designed straight temple.
Angle of frame edge is adjustable to fit
the face (three adjustment stages).
Newly designed locking rubber ear-piece
for improved fit.
Guide
Lasers
Detectors
Laser Safety
Equipments
Part Number Type Compatible Laser
Wavelength
[nm]
Optical Density
[OD]
Lens Color
Visible Light
Transmittance
[%]
YL-717-EX Complete absorption EXCIMER 190 − 380 10< Clear 85
YL-717-AR(45) Complete absorption Ar 488, 514.5 10< Orange 45
YL-717-Y2 Complete absorption YAG2ω 532 10< Red 16
YL-717-DYE Complete absorption DYE 590 − 598 6< Blue 20
YL-717-HN Complete absorption He-Ne 632.8 5< Blue 25
YL-717-ALX Complete absorption ALEXANDRITE 750 − 800 − 850 4−10−4< Pink 30
YL-717-LD2 Complete absorption LD 790 − 910 3 − 6< Green 27
YL-717-Y1(50) Complete absorption YAG 1064 6< Green 50
YL-717-CO2 Complete absorption CO2 10600 5< Green 60
YL-717C-LD Complete absorption/multi-wavelength LD
YL-717C-Y1 Complete absorption/multi-wavelength YAG
YL-717C-Y2 Complete absorption/multi-wavelength YAG
YL-717C-Y3 Complete absorption/multi-wavelength YAG
660 − 680 2 − 3<
680 − 1100 3 − 5<
266, 355 10<
532 2<
1064 6<
266, 355 10<
532 4<
1064 6<
266, 355 10<
532 7<
1064 6<
Green 7
Amber 40
Amber 35
Amber 30
YL-717M-AR Partially transmitting, OD2 Ar 488, 514.5 3< 2< Orange 57
YL-717M-Y2 Partially transmitting, OD2 YAG2ω 532 2< Red 30
YL-717M-HN Partially transmitting, OD2 He-Ne 627.8, 632.8, 635 2< Blue 47
YL-717M-VLD Partially transmitting, OD2 LD
660 − 680
647.1, 676.4
2< Blue 55
YL-717M-LD Partially transmitting, OD2 LD 780 1< Green 48
YL-717A-AR Partially transmitting, OD4 Ar 488, 514.5 4< Orange 50
YL-717A-Y2 Partially transmitting, OD4 YAG2ω 532 4< Red 25
Light Sources
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H021

Light Sources
YL-335 Model (Over prescription glasses type)
YL-290 Model (Eyeglass shaped)
YL-335
YL-290
Application
Systems
Optics &
Optical
Coatings
Holders
YL-335
Can be used over prescription glasses.
◦This model is well cushioned and
has small gaps to ensure wide
view, providing comfort and excellent
functionality. (Some large
glasses may not fit.)
Common Specifications
Catalog
Code
W5015
Frame
Polycarbonate elastomer
Lens
Polycarbonate (hard coated)
Specifications
Compatible with prescription glasses,
wide temple, soft nose pad, flexible temple
External Dimensions [mm] (W)158×(H)65×(D)168
Weight [kg] 0.05
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Lasers
Detectors
Laser Safety
Equipments
Light Sources
Part Number Type Compatible Laser
Wavelength
[nm]
Optical Density
[OD]
Lens Color
Visible Light
Transmittance
[%]
YL-335-EX Complete absorption EXCIMER 190 − 380 10< Clear 85
YL-335-EX/He-Cd Complete absorption EXCIMER 193 − 442 10< Yellow 75
YL-335-AR(45) Complete absorption Ar 488, 514.5 10< Orange 45
YL-335-Y2 Complete absorption YAG2ω 532 10< Red 16
YL-335-HN Complete absorption He-Ne 632.8 5< Blue 25
YL-335-ALX Complete absorption ALEXANDRITE 750 − 800 − 850 4−10−4< Pink 30
YL-335-LDY1 Complete absorption LD−YAG
800 − 810
940, 1064
7< Green 35
YL-335-Y1(50) Complete absorption YAG 1064 6< Green 50
YL-335-CO2 Complete absorption CO2 10600 6< Green 60
YL-335-CO2-CLA Complete absorption CO2 10600 6< Clear 85
YL-335M-BLD Partially transmitting, OD2 LD 405 3< Clear 85
YL-335M-AR Partially transmitting, OD2 Ar 514.5 2< Orange 57
YL-335M-Y2 Partially transmitting, OD2 YAG2ω 532 2< Red 30
YL-335M-HN Partially transmitting, OD2 He-Ne 627.8, 632.8, 635 2< Blue 47
YL-335M-VLD Partially transmitting, OD2 LD 660 − 680 2< Blue 55
YL-335M-LD Partially transmitting, OD2 LD 780 1< Green 48
YL-335M-LD2 Partially transmitting, OD2 LD 635 − 780 0.5 − 1< Blue 58
YL-335M-RGB Partially transmitting, OD2 RGB-LED 457, 532, 633 2< Purple 8
YL-335A-AR Partially transmitting, OD4 Ar 488, 514.5 4< Orange 50
YL-335A-Y2 Partially transmitting, OD4 YAG2ω 532 4< Red 25
YL-335C-LD
YL-335C-Y1
YL-335C-Y2
YL-335C-Y3
Complete absorption
multi-wavelength
Complete absorption
multi-wavelength
Complete absorption
multi-wavelength
Complete absorption
multi-wavelength
LD
YAG
YAG
YAG
660 − 680
680 − 1100
2 − 3<
3 − 5<
266, 355 10<
532 2<
1064 6<
266, 355 10<
532 4<
1064 6<
266, 355 10<
532 7<
1064 6<
Green 7
Amber 40
Amber 35
Amber 30
YL-290
Lightweight and compact two-lens type.
◦This model features a highly
protective cover frame and wide
temples.
Common Specifications
Catalog
Code
W5016
Frame
Nylon
Lens
Polycarbonate (hard coated)
Specifications
Round frame, wide temple
External Dimensions [mm] (W)138×(H)39×(D)155
Weight [kg] 0.03
Part Number Type Compatible Laser
Wavelength
[nm]
Optical Density
[OD]
Lens Color
Visible Light
Transmittance
[%]
YL-290-EX/He-Cd Complete absorption EXCIMER, He-Cd 193 − 442 10< Yellow 75
YL-290-Y2 Complete absorption YAG2ω 532 10< Red 16
YL-290-ALX Complete absorption ALEXANDRITE 750 − 800 − 850 4−10−4< Pink 30
YL-290-Y1(50) Complete absorption YAG 1064 6< Green 50
YL-290M-Y2 Partially transmitting, OD2 YAG2ω 532 2< Red 30
YL-290M-VLD Partially transmitting, OD2 LD
660 − 680
647.1, 676.4
2< Blue 55
YL-290C-Y2
266, 355 10<
Complete absorption
YAG
532 4<
multi-wavelength
1064 6<
Amber 35
H022
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YL-250G Model (Over prescription glasses, reinforced glass type)
YL-130 Model (Goggle shaped)/YL-120H Model (Goggle shaped, reinforced glass type)
YL-250G
YL-130 / YL-120H
YL-250G
◦Lenses also offer excellent
scratch and chemical resistance.
Part Number Type Compatible Laser
YL-250G-3Y Reinforced glass type Nd-YAG:OD3(3Y)
YL-250G-5Y Reinforced glass type Nd-YAG:OD5(5Y)
YL-250G-7Y Reinforced glass type Nd-YAG:OD7(7Y)
YL-130
◦Appropriate for use when the
angle of beam or scattering light
cannot be identified.
◦Optional parts for supporting use
in clean room (fasteners for
adjustment, with hard cases) are
available.
Part Number Type Compatible Laser
Common Specifications
Frame
Nylon
Lens
Reinforced glass
Specifications
Compatible with prescription glasses
External Dimensions [mm] (W)155×(H)57×(D)141
Weight [kg] 0.07
Wavelength
[nm]
Optical Density
[OD]
780 0.8<
980 3<
1064 3<
1310, 1550 2<
2100, 2940 2<
1064 5<
2100, 2940 3.5<
1064 7<
2100, 2940 5<
Common Specifications
Lens Color
Visible Light
Transmittance
[%]
Green 80
Green 74
Green 69
Frame
PP elastomer
Lens
Polycarbonate (anti-fog hard coated)
Specifications
Compatible with prescription glasses
(some glasses do not fit)
External Dimensions [mm] (W)192×(H)83×(D)92
Weight [kg] 0.09
Wavelength
[nm]
Optical Density
[OD]
* With exceptions
Lens Color
W5017
Reinforced glass lenses provide high visible light transmittance, and offer improved visibility and
permeability of light.
Provides a snug, sealed fit, can be worn over prescription glasses.
* With exceptions
Visible Light
Transmittance
[%]
YL-130-EX Complete absorption EXCIMER 190 − 380 10< Clear 85
YL-130-Y2 Complete absorption YAG2ω 532 10< Red 16
YL-130-ALX Complete absorption ALEXANDRITE 750 − 800 − 850 4−10−4< Pink 30
YL-130-Y1(50) Complete absorption YAG 1064 6< Green 50
266, 355 10<
Complete absorption
YL-130C-Y2
multi-wavelength
YAG
532 4<
Amber 35
1064 6<
YL-130M-Y2 Partially transmitting, OD2 YAG2ω 532 2< Red 30
YL-130M-VLD Partially transmitting, OD2 LD
660 − 680
647.1, 676.4
2< Blue 55
Catalog
Code
Catalog
Code
W5018
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Lasers
Detectors
Laser Safety
Equipments
Light Sources
YL-120H
Laminated glass offers high visible light transmittance.
Damage threshold against high-power laser is high to ensure stability.
Catalog
Code
W5019
Common Specifications
Frame
Special laminating resin
Lens
Special laminating glass
Specifications
Compatible with prescription glasses
External Dimensions [mm] (W)160×(H)80×(D)73
Weight [kg] 0.16
Part Number Type Compatible Laser
Wavelength
[nm]
1064, 1319,5
YL-120H-Y1 Reinforced glass type YAG
1060
1319.5
YL-120H-CO2 Reinforced glass type CO2
10600
193, 248, 308
*1 Damage threshold: Value indicating the degree of power at which damage occurs if laser light is irradiated.
Optical Density
[OD]
Lens Color
Visible Light
Transmittance
[%]
7< Green 67
10< Clear 86
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H023

Light Sources
Laser Protective Eyewear Filter Spectra
Filter Spectra
Application
Systems
Optics &
Optical
Coatings
Holders
■Complete absorption type
Frame Type
YL-130 YL-760 YL-717 YL-335 YL-290
Lens Type
ALEXANDRITE
Color Pink
Visible Light Transmittance 30%
Optical Density [OD]
ALEXANDRITE 755nm 6<
750 − 850nm 4 − 10<
LD
800nm 10<
750 − 850nm 4<
Normally, you cannot see visible laser light because the optical density is set to high.
T [%]
T: Transmittance
OD
Bases
Manual
Stages
Actuators
Frame Type
YL-335 YL-760
Lens Type
LD−YAG
Color Green
Visible Light Transmittance 35%
Optical Density [OD]
FIBER LASER 800 − 1080nm 6<
YAG 1064nm 7<
LD
800 − 810nm 7<
940nm 7<
T [%]
OD
Motoeized
Stages
Light
Sources
Index
Frame Type
YL-130 YL-760 YL-717 YL-335 YL-290
Lens Type
YAG
Color Green
Visible Light Transmittance 50%
Optical Density [OD]
Nd-YLF 1047nm 1053nm 6<
YAG 1064nm 6<
T [%]
OD
Guide
Lasers
Detectors
Laser Safety
Equipments
Frame Type
YL-717
Lens Type
CO2
Color Green
Visible Light Transmittance 60%
Optical Density [OD]
CO2 10600nm 6<
T [%]
OD
Light Sources
■Multi-wavelength compatible type
Frame Type
YL-130 YL-760 YL-717 YL-335 YL-290
Lens Type
YAG
Color Amber
Visible Light Transmittance 40%
Optical Density [OD]
YAG
226nm 10<
355nm 10<
532nm 4<
1064nm 6<
One filter handles multiple wavelengths of laser.
T [%]
OD
■1/100 attenuation partially transmitting type for maintenance
Frame Type
YL-130 YL-760 YL-717 YL-335 YL-290
Lens Type
YAG2ω
Color Red
Visible Light Transmittance 30%
Optical Density [OD]
YAG2ω 532nm 2<
T [%]
For maintenance for 100mW or less (optical density 1 − 2).
Use this type for checking optical paths or adjusting optical axes.
OD
Frame Type
YL-130 YL-760 YL-717 YL-335 YL-290
Lens Type
LD
Color Blue
Visible Light Transmittance 55%
Optical Density [OD]
LD 660 − 680nm 2<
Kr
647.1nm 2<
676.4nm 2<
T [%]
OD
* Note that the graphs of optical density show measured values, not guaranteed values.
H024
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Laser Classification Labels 817
Laser Warning Labels/Laser Controlled Area Signs 817/838
Laser Classification Labels
Part Number Class Size
* The content of this products is only available
in Japanese.
◦Classification labels for laser processing devices and measuring
equipments.
◦Used for production sites of laser processing, laboratories where
laser light is used, or the like.
◦Various sizes are available for Class 1 to Class 4.
◦Compliant with JIS C6802.
Specifications
L size (W)250×(H)100
External Dimensions [mm]
S size (W)148×(H)84
Quantity [pieces] 25
Catalog
Code
W5020
Part Number Class Size
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
817-821A
L
1
817-822A S
817-831A
L
1M
817-832A S
817-841A
L
2
817-842A S
817-851A
L
2M
817-852A S
817-861A
L
3R
(A type)
817-862A S
817-871A
L
3R
(B type)
817-872A S
817-881A
L
3B
817-882A S
817-891A
L
4
817-892A S
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Lasers
Detectors
Laser Warning Labels
* The content of this products is only available
in Japanese.
Catalog
Code
W5021
Laser Safety
Equipments
Light Sources
Part Name Laser Radiation Label (L) Laser Radiation Label (M) Laser Radiation Label (S)
Part Number 817-25 817-26 838-20
External Dimensions [mm] 150 (length of each side) 100 (length of each side) 50×50
Quantity [pieces] 50 50 60
Laser Controlled Area Signs
* The content of this products is only available
in Japanese.
Catalog
Code
W5022
Part Name Laser Controlled Area Sign (1) Laser Controlled Area Sign (2) Laser Controlled Area Sign (3)
Part Number 817-01 817-02 817-03
External Dimensions [mm] (W)450×(H)300×(D)1.2 (W)450×(H)300×(D)1.2 (W)450×(H)300×(D)1.2
Mounting hole φ2.5mm holes on four corners φ2.5mm holes on four corners φ2.5mm holes on four corners
Quantity [pieces] 5 5 5
H025

Light Sources
LED light source for use with light-guide
LLS-W
Catalog
Code
W2015
Application
Systems
Optics &
Optical
Coatings
Holders
Reduces running costs because of its long life time and low power consumption and realizes
brightness equivalent to a metal halide light source.
◦Over 30,000 hours operation life * 1
◦160VA low power consumption
◦White-light emission with brightness over 3000 lumens * 2
◦Output aperture for φ10mm / φ14mm light-guide
◦8bit external dimming control equipped as standard
◦Error messages displayed at front panel and error code
acquirable through RS232C interface.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Lasers
Detectors
Laser Safety
Equipments
Light Sources
Specifications
Part Number
LLS-W
LED
White light
as reference
(correlated color temperature = 6,500K) *
Brightness 3,500lm* 2
LED lifetime 30,000H* 1
Rated input power
AC100V − 240V ±10% (50/60Hz)
Power consumption
160VA
Dimming control
Manual control with front panel control knob
External control by 8bit I/O or RS232C interface
Cooling
Forced-air-cooling
Error indication
(output)
LED element temperature error, Cooling fan error, etc.
Interface
RS232C, I/O
Operating environment
Ambient temperature: 5 − 40°C
Ambient humidity: 20% − 80%RH (without dew condensation)
Dimensions
(W)190 × (H)200 × (D)322mm
(excluding extrusions)
Weight
7.5kg (excluding cables)
*1 Operation life is prescribed by 70% intensity dropping point. Operation life
may vary from the condition of use and not a guaranteed specification.
*2 Brightness is measured at the spreading illumination of 0.5m×0.5m area
(0.25m 2 ), which generated by a rod homogenizer with 12mm on a side.
Relative Sectral Power Distribution [µm/cm 2 ]
1.2
1
0.8
0.6
0.4
0.2
Spectral Distribution
0
400 450 500 550 600 650 700
Wavelength [nm]
Outline Drawing
(Units: mm)
[LED light source ferrule]
CN2
D-Sub9 Pin
switch 1
CN1
D-Sub25 Pin
81.2
200 10
218
LCD
Reset switch
Light switch
Light guide
Fiber connect
Light controller
30
φ20
φ31
Power supply
323.8
8
107
190
Applicable Light Guide
Guide
▶Various light guides are available.
H035, H036
H026

LED Spot Illumination
Power Supply for LED Spot Illumination
SLSI
SPS-SLSI
SLSI
LED illumination for coaxial epi-illumination and spot illumination.
Catalog
Code
W5036
◦It can be used as coaxial epi-illumination for our zoom
microscope, ultra long working distance zoom microscope,
observation unit with coaxial illumination, and various
telecentric lenses.
◦It can be used as spot illumination.
◦It can be used in ring or line illumination when connected
to various light guides using light guide adapters.
Guide
▶Cable extension is available as an option.
▶Various light guides and light guide adapters are available as options.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Attention
▶Use with the dedicated power supply (SPS-SLSI).
Actuators
Outline Drawing
62
(Units: mm)
Specifications
Motoeized
Stages
12 8
2-M3 depth 3
Part Number Luminescence Color Maximum Rated Current
SLSI-22W White 0.7A
Light
Sources
φ8
φ22
14
SLSI-22R Red 0.7A
SLSI-22G Green 0.7A
Index
SLSI-22B Blue 0.7A
Guide
SPS-SLSI
Power supply for LED spot illumination.
It comes in a palm-size slim body capable of being mounted on a DIN rail.
In addition, it allows dimming by volume or USB control.
Catalog
Code
W5037
Lasers
Detectors
Laser Safety
Equipments
Light Sources
◦The volume control on the front panel enables easy
dimming. The switch connectors are all located on the
front panel to facilitate work efficiency. (Comes with a
DIN rail connection adapter)
◦LED ON/OFF and dimming are possible from a PC with
USB connection.
◦Flash operation is available with external trigger input.
Guide
▶The DIN rail connection adapter needs to be installed by the
customer.
Outline Drawing
(Units: mm)
Specifications
Part Number
SPS-SLSI
Controllable Number of LEDs
1ch
100
Power Voltage
AC100 − 240V±10%
Apparent Power
30VA
Operating Temperature 5 − 40°C
Storage Temperature −20 − 60°C
Functions
External Output
Interface
Dimming by volume control, USB control,
flash operation, external gate operation
Output for LED
USB (Mini-B type) USB1.1 compliant
Trigger (Gate) Input Connector
80
25
H027

Light Sources
RGB Color Mixing Unit
SLSI-RGBM
Catalog
Code
W5038
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
A unit used in combination with LED spot illumination to irradiate any color by mixing red, green
and blue lights.
◦Its tip has the shape same as that of the LED spot illumination, allowing direct mounting on various lenses.
◦When connected with various light guides using light guide adapters. It enables irradiation of any color in ring and line
illumination.
Guide
▶Use with LED spot illumination (SLSI).
▶When mounting the LED spot illumination on this unit, remove the
tip portion and check the color position before mounting it.
▶Various light guides and light guide adapters are available as
options.
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Outline Drawing (Units: mm) Specifications
2-M3 depth 4
50 13.5
Part Number
SLSI-RGBM
Index
10
6.5
3.2
24 27.5
Guide
2-φ3.3through hole
Lasers
Detectors
24 24 15.5
20.5
Laser Safety
Equipments
φ8
φ14
22
Light Sources
80.5 8 12
Example of Combination with LED Spot Illumination (SLSI series)
SLSI-22G
SLSI-22B
SLSI-22R
H028

Ring Illumination
Low Angle Ring Illumination
SLRI
SLRI-LA
SLRI
Catalog
Code
W5039
These Light Units are
equipped with high-density
LED arrays in a ring shape.
Direct light can be irradiated
with focus on the center
of the workpiece from any
angle.
Outline Drawing
4-M3 depth 4
(for mounting)
(PCD40)
45°
φ3
φ28
φ50
(Units: mm)
16
Application
Systems
Optics &
Optical
Coatings
Holders
Guide
▶SLRI-42 series (outer diameter φ42, inner diameter φ18) and SLRI-70
series (outer diameter φ70, inner diameter φ35) are also available.
▶Diffusers and polarization plates are available as options. Available
luminance colors are red, white, blue and green.
▶Diffusers, polarization plates and adapters for SLRI-42, 50 and 70
series are available. Contact our International Sales Division for
more information.
Attention
▶Polarization plates for SLRI-42 and 50 require mounting adapters.
▶Use SPS-3024, SPS-3024-3-PI and SPSB-3024VB as power supply.
Ring Illumination
Part Number
SLRI-50RD2
SLRI-50SW2
SLRI-50BL2
SLRI-50GR2
Luminescence
Color
Red
White
Blue
Green
Size
Outer φ50
Inner φ28
Power
Consumption
24V/3.1W
24V/3.8W
Common Specifications
Input Voltage
DC24V
Cable Length 0.3m
Input Connector
SMR-03V-B × 1Piece
Polarity & Signal
1: Anode (+) Brown / 2: No Connection /
3: Cathode (−) Blue
Housing Material
Aluminum alloy
Cooling Method
Natural air cooling
Operating Temperature and Humidity
Temperature: 0 to 40ºC,
Humidity: 20 to 85%RH (No condensation)
Storage Temperature and Humidity
Temperature: −20 to 60ºC,
Humidity: 20 to 85%RH (No condensation)
Accessories
Instruction Guide
Diffuser, Polarization Plate, Mounting Adapter
Part Number
DF-SLRI-50
PL-SLRI-50
AD-SLRI-50
Compatible Products
Diffuser for SLRI-50
Polarization plate for SLRI-50
Adapter for SLRI-50
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Lasers
Detectors
SLRI-LA
Catalog
Code
W5040
These Light Units are equipped with LED arrays in a ring shape, radiating direct light from a low
angle towards the center of the workpiece to achieve shadow-free uniform illumination.
Laser Safety
Equipments
Light Sources
◦Radiate from a low angle
towards the center of the
workpiece.
◦Diffusers and polarization
plates are available as
options.
Outline Drawing
4-M3 depth 4
(for mounting)
(PCD38)
45°
(φ3)
φ22
φ48
(Units: mm)
18.5
Guide
▶SLRI-74 series (outer diameter φ74, inner diameter φ48) are available.
Diffusers and polarization plates are available as options. Available
luminance colors are red, white, blue and green.
▶Diffusers for SLRI-48 or 74 series and sheet polarizers for lens
mounting are available. Contact our International Sales Division for
more information.
Attention
▶Use SPS-3024, SPS-3024-3-PI and SPSB-3024VB as power supply.
Low Angle Ring Illumination
Part Number
SLRI-48RD2-LA
SLRI-48SW2-LA
SLRI-48BL2-LA
SLRI-48GR2-LA
Luminescence
Color
Red
White
Blue
Green
Size
Outer φ48
Inner φ22
Power
Consumption
24V/2.1W
24V/3.1W
Common Specifications
Input Voltage
DC24V
Cable Length 0.3m
Input Connector
SMR-03V-B × 1Piece
Polarity & Signal
1: Anode (+) Brown / 2: No Connection /
3: Cathode (−) Blue
Housing Material
Aluminum alloy
Cooling Method
Natural air cooling
Operating Temperature and Humidity
Temperature: 0 to 40ºC,
Humidity: 20 to 85%RH (No condensation)
Storage Temperature and Humidity
Temperature: −20 to 60ºC,
Humidity: 20 to 85%RH (No condensation)
Accessories
Instruction Guide
Diffuser
Part Number
DF-SLRI-48LA
Compatible Products
Diffuser for SLRI-48LA
H029

Light Sources
Flat Illumination
Coaxial Illumination
SLFI
SLCI
Application
Systems
Optics &
Optical
Coatings
Holders
SLFI
Catalog
Code
W5041
These Light Units radiate high-power diffused light from a flat
light-emitting surface.
◦Matted diffuser surface prevents reflected glare.
◦The frame structure and tapped holes for mounting allow highly flexible
mounting.
◦Light control films and fixing brackets are available as options.
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Lasers
Detectors
Laser Safety
Equipments
Light Sources
Guide
▶SLFI-27 series (light emitting surface 27×27) and SLFI-51 series
(light emitting surface 51×51) are available. Available luminance
colors are red, white and blue.
▶Light control films and fixing brackets for SLFI-27, 43 and 51 are
available. Contact our International Sales Division for more information.
Common Specifications
Input Voltage
DC24V
Cable Length 0.3m
Input Connector
SMR-03V-B × 1Piece
Polarity & Signal
1: Anode (+) Brown / 2: No Connection /
3: Cathode (−) Blue
Housing Material
Diffusion plate: Acrylic resin,
Base/Side panels: Aluminum alloy
Cooling Method
Natural air cooling
Operating Temperature and Humidity
Temperature: 0 to 40ºC,
Humidity: 20 to 85%RH (No condensation)
Storage Temperature and Humidity
Temperature: −20 to 60ºC,
Humidity: 20 to 85%RH (No condensation)
Accessories
Instruction Guide
Flat Illumination
Luminescence Light Emitting Power
Part Number
Color Surface Size [mm] Consumption
SLFI-43X35RD Red 43×35 24V/3.8W
SLFI-43X35SW White 43×35
24V/3.0W
SLFI-43X35BL Blue 43×35
Attention
▶Use SPS-3024, SPS-3024-3-PI and SPSB-3024VB as power
supply. (Reference) Digital power source H031
Outline Drawing
47
6 35
(Light emitting surface)
1
45
43
(Light emitting surface)
7.5 30
Light Control Films
Part Number
LC-SLFI-43X35-HO
LC-SLFI-43X35-VE
Fixing Brackets
Part Number
BK-SLFI-LE12
2 43
(2-core cabtire cable 300 +35
−0 mm)
7.5
8
4-M2 depth 4
(for mounting
optional products)
DC24V
SM3P
(1) Broun(+)
(2) NC
(3) blue (−)
15
4-M3×0.5 tapped hole
depth 4 for mounting
2 slots for M3 nuts
(provided on both sides)
18
300
Compatible Products
For SLFI-43×35, Horizontal louver
For SLFI-43×35, Vertical louver
Note
4 L-shaped fixing brackets
13.5
3 41
5.5
(Units: mm)
Detail Drawing of
M3 Nut Slot (S=4:1)
4.2
2.5
3.5
1.2
(2.5)
SLCI
Catalog
Code
W5042
These Light Units radiate diffused light in the same axis as the
camera axis, allowing uniform irradiation on a mirror-finished
workpiece.
◦Optical glass with surface accuracy of 0.3μm is used for a half mirror and
camera window, enabling photography of high-quality images.
◦A large camera window ensures a large field of view.
◦Polarization plates and light control films are available as options.
Guide
▶SLCI-CP-13 series (light emitting surface 15×15), SLCI-CP-18 series (light emitting
surface 20×20) and SLCI-50 series (light emitting surface 52×52) are available.
▶SLCI-50 series (light emitting surface 52×52) is available. Luminance colors of red,
white and blue are available in each series.
▶Light control films and polarization plates for SLCI-13, 18 and 50 series products
are available. Contact our International Sales Division for more information.
Attention
▶Use SPS-3024, SPS-3024-3-PI and SPSB-3024VB as power supply.
(Reference) Digital power source H031
Common Specifications
Input Voltage
DC24V
Cable Length 0.3m
Input Connector
SMR-03V-B × 1Piece
Polarity & Signal
1: Anode (+) Brown / 2: No Connection /
3: Cathode (−) Blue
Cooling Method
Natural air cooling
Operating Temperature and Humidity
Temperature: 0 to 40ºC,
Humidity: 20 to 85%RH (No condensation)
Storage Temperature and Humidity
Temperature: −20 to 60ºC,
Humidity: 20 to 85%RH (No condensation)
Accessories
Instruction Guide
Outline Drawing
2×2-M3×P0.5 (through hole)
(provided on both sides, for mounting)
Coaxial Illumination
Part Number
(1) 7 20
4-M3×P0.5 tapped hole
depth 6 (for mounting)
3 40
46
28
23
38
Luminescence
Color
48
26
18
3 30
Light Emitting
Surface Size [mm]
(Units: mm)
Power
Consumption
SLCI-34RD Red 34×34 24V/3.7W
SLCI-34SW White 34×34
24V/3.2W
SLCI-34BL Blue 34×34
34
(Light emitting surface)
34
6 (Light emitting surface)
7
1515
35
3 40
SM connector 3P
Cable Length 300mm
4-M3×P0.5 tapped hole
depth 4 (for mounting)
H030

0
Line Sensor Illumination
SLLI (Bright Field)/SLLIH (Dark Field)
SLLI (Bright Field)
Specifications
LED Luminescence Color White light
Peak Wavelength
5500K typ.
Input Voltage
DC24V
Cable Length 0.3m
Input Connector
SMR-03V-B × 1Piece
Polarity & Signal
1: Anode (+) Brown / 2: No Connection /
3: Cathode (−) Blue
Housing Material
Aluminum alloy, Polyacetal
Cooling Method
Natural air cooling
Operating Temperature and Humidity
Temperature: 0 to 40ºC,
Humidity: 20 to 85%RH (No condensation)
Storage Temperature and Humidity
Temperature: −20 to 60ºC,
Humidity: 20 to 85%RH (No condensation)
External Dimensions (W)332mm × (D)27.2mm × (H)18mm
Accessories
Instruction Guide
Part Number
SLLI-100SW
Luminescence
Color
White
Note
Power
Consumption
Light emitting surface
100mm SM connector
24V/23W
Guide
Outline Drawing
Catalog
Code
W5043
These Line Illumination Units emit light of the same brightness as fluorescent light.
◦Lifetime (50,000 hours) is longer than fluorescent light.
▶SLLI-200SW (light emitting surface 200) and SLLI-300SW (light
emitting surface 300) are available.
▶Various cable lengths are available up to 15m. Contact our
International Sales Division for more information.
Attention
▶Use an SM connector type cable extension.
▶To connect these Line Illumination Units with compatible power
supply SPSB3-30024, a dedicated cable is required.
18.2
(light emitting surface)
4.5
7
15.5
132
101
118
2×2-φ4.5/φ8 counterbore depth 4.5 (for mounting)
SM connector 3P
: Brown (+)
: N.C.
: Blue (–)
300 +35
18
15
6.1
13.6
27.2
(Units: mm)
11
2×M5
(provided on both sides)
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
SLLIH (Dark Field)
Catalog
Code
W5044
These Line Illumination Units emit high power light while reducing defused light.
◦Provide high-power illuminance of 4000lx.
◦Capable of narrowing the angle between the illumination and camera,
allowing short distance irradiation.
Lasers
Detectors
Laser Safety
Equipments
Light Sources
Specifications
21 (light emitting surface)
Outline Drawing
70 10.5
42
B: A+26 (length)
8 A:100 − 1,000 (light emitting surface)
(φ6.9)
(18)
42
300 +35
0
(Units: mm)
Detail Drawing
AS=2:1
7.5
1.5 4.2
8
5.4
4-M5
5 32
nut slot
(for mounting)
A
25 24
55
Input Voltage DC24V
Cable Length 0.3m
Input Connector SMR-03V-B × 1Piece
Polarity & Signal
1: Anode (+) Brown / 2: No Connection /
3: Cathode (−) Blue
Housing Material Aluminum alloy
Cooling Method Natural air cooling
Accessories Instruction Guide
Part Number
SLLIH-100SW
Luminescence
Color
White
Note
Light emitting surface
100mm, Metal connector
Power
Consumption
24V/21W
Common to Line Sensor Illumination
for Bright Field and Dark Field
Catalog
Code
W5045
Common to Ring Illumination,
Flat Illumination and Coaxial Illumination
Catalog
Code
W5047
Analog Power Supply, Cable Extension, Dedicated Cable
Part Number
Product Description
SPSB3-30024
Analog Power Supply Units
FCB-1-EL2 Cable extension (Straight Cables 1m)
FCB-W-1-EL2 Cable extension (Two-way Cables 1m)
FCB-0.3-EL2-SM3-OC Dedicated cable for SLLI (bright field)
FCB-0.3-ME7-EL2-OC Dedicated cable for SLLIH (dark field)
Digital Power Supply Units, Cables
Part Number
Note
Digital Power Supply Units
SPS-3024
(1CH, manual and parallel 8-bit external control)
Digital Power Supply Units
SPS-3024-3-PI
(3CH, manual and parallel 8-bit external control)
FCB-1 Extension Cable (Straight Cables 1m)
FCB-W-1 Cable extension (Two-way Cables 1m)
FRCB-1
Cable extension (Straight 1m flexible cable)
NFCB-3
External ON/OFF cable
EXCB2-B3 D-sub 15pin, external control cable for SPS-3024
EXCB2-M10-3 External ON/OFF cable for SPS-3024-3-PI
EXCB2-M20-3 External dimmer cable for SPS-3024-3-PI
BK-PD3
Power supply fixing bracket for SPS-3024-3-PI
H031

Light Sources
LED Light Source Device
SLA-100A
Catalog
Code
W5023
LED light source with illumination intensity approximating 100W halogen using high-intensity white LED.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
◦Its passive cooling design (fanless) is quiet and friendly to environments sensitive to dust or vibration.
◦Enhanced reliability and lifetime due to elimination of mechanical fan.
◦External analog intensity control included as a standard feature.
◦Lifetime approximately 15 to 30 times longer than halogen light source. Can significantly reduce down-time for maintenance.
Guide
▶Optional adapters are available so that light guides of other
companies can be used. (Note that some light guides are incompatible.)
▶Light guides sold separately.
H035
▶Unique optical and cooling design
provides passive cooling design (fanless).
▶Low power consumption of 20W.
▶Power consumption reduced by 67 − 89%
compared to halogen light source.
▶Low heat generation minimized risk of
burn injury or influence on environment.
Cooling
mechanism
Special
optical lens
LED
▶Optional color filters can be mounted in the light guide inlet to
produce a range of colors. Contact our International Sales Division
for more information.
Light
Sources
Index
Guide
Lasers
Detectors
Laser Safety
Equipments
Light Sources
Outline Drawing
SLA-100A
144
97
78 200
Part Number Compatible Light Guide Specifications
SLA-ADP-SU*
25
15
13
20
(Units: mm)
■Light Guide Adapter Compatibility SLA-ADP
φ13mm
L=15mm
Specifications
Part Number
SLA-100A
Luminescence Color White light
Color Temperature (typ.) 5600K *1
Rated Input Voltage AC100V − 240V±10%
Power Consumption 20W
Input Frequency 50/60Hz
Function and
Dimming
Cooling Method
Environment Conditions
(1) LED light ON/OFF function
(2) Continuous dimming by manual full dimming
volume
(3) Remote: Analog input voltage DC0V − +5V
* 8bit digital dimming is optional (contact us separately)
Natural cooling
Ambient temperature: 0°C − +40°C
Ambient humidity: 20% − 80%RH
(without condensation)
Indoor use altitude: Up to 2,000m
φ5mm φ8mm
(W.D.=100mm) 17,900lx 40,000lx
(W.D.=50mm) 68,000lx 130,000lx
(W.D.=15mm) 510,000lx 700,000lx
LED Life 30,000H *3
External Dimensions [mm] (W)78×(H)144×(D)200 (excluding protrusions)
Weight [kg]
2.0 (excluding the power cord)
*1 Color temperature: Reference value
*2 Illuminance: Reference values measured at each working distance (W.D.)
from the edge of light guide (straight type, length=500mm)
*3 Life: Varies depending on the usage environment temperature. Not a
guaranteed value.
SLA-ADP-MO
25
37
15
φ15mm
L=37mm
Spectral intensity comparison
SLA-ADP-HO
SLA-ADP-HA
25
25
31
20
15
15
φ15mm
L=31mm
φ15mm
L=20mm
Radiant intensity [µW/cm 2 ]
60
50
40
30
20
10
Halogen light source 100W
LED light source device (SLA-100)
* SLA-100A comes with SLA-ADP-SU as standard.
Note) Some light guides are incompatible with compatibility adapters.
0
300 400 500 600 700 800
Wavelength [nm]
H032

Tungsten Halogen Fiber Illumination Systems
Replacement Lamps for Tungsten Halogen Fiber Illumination Systems
LS-LHA
HL
LS-LHA
Proportional Intensity control Light source with Universal Power Supply designed for worldwide use.
◦12V100W and 15V150W halogen lamps can be selected with a switch. This product is sold with 150W lamp as standard.
◦Linear control of light intensity provides finer, more useful control.
◦Analog external remote control is available as standard.
Guide
Catalog
Code
W5024
▶Contact our International Sales Division for addition of the shutter
function.
▶Light guide (LS-LHA) is also available. H035
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Outline Drawing
LS-LHA
(Units: mm)
Specifications
Part Number
LS-LHA
Lamp Used 100W: JCR12V100WB 150W: JCR15V150WBN
Average lamp life *1
Nominal 1,000 hours
(DC12V)
Color Temperature *2 about 3,100K
Average Luminance *2
Input Voltage
Power Consumption
Nominal 500 hours
(DC15V)
230,000lx (Reference value) 406,000lx (Reference value)
Rated AC100 − 240V (AC85 − 264V)
50/60Hz (47Hz − 63Hz)
123W/100V
115W/240V
182W/100V
175W/240V
Installation Method
Horizontal installation
Usage Environment 0°C − 40°C / 20 − 85%RH (without condensation)
External Dimensions [mm] (W)100×(H)133×(D)265 (excluding protrusions)
Weight [kg] 2.7
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
(19)
265
226
16
(14.8)
125
8
20 10
100
50
80
23
86
(10)
*1 Time when the ratio of the maximum intensity to the maximum intensity of
the new bulb decreases to 50%
*2 Illumination at 15mm away from the tip of light guide when a light guide of
bundle diameter φ5×L1,000 is used with maximum light intensity
5
Pin assignment of remote terminals
4
3
9 8 7 6
External cable connector
Recommended product
(Japan Aviation Electronics Industry, Ltd.)
Connector Part Number: DEU-9PF-F0
*Select pin contact to match the power cable used.
2
1
Pin
number
1 :
2 :
3 :
4 :
5 :
6 :
7 :
8 :
9 :
Signal name
Light intensity adjustment
5V standard voltage
Shutter open/close
Lamp out detection
Temperature error detection
Analog signal GND
Lamp ON/OFF
Power for photocoupler
GND for Photocoupler
Guide
Lasers
Detectors
Laser Safety
Equipments
Light Sources
Light intensity adjustment power - Illuminance characteristics
Spectral characteristics
Relative light intensity [%]
100.0
90.0
80.0
70.0
60.0
50.0
40.0
30.0
20.0
10.0
Intensity [W/srnm]
10.00
9.00
8.00
7.00
6.00
5.00
4.00
3.00
2.00
1.00
Light guide used: MSL-1500S-10
150W lamp (JCR15V150WBN)
100W lamp (JCR12V100WB)
0.0
0.0 10.0 20.0 30.0 40.0 50.0 60.0 70.0 80.0 90.0 100.0
Light intensity adjustment Voltage [V]
0.00
350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1050
Wavelength [nm]
HL
◦Replacement lamps for tungsten halogen fiber illumination systems (LS-LHA).
◦HL-100-2 and HL-150-2 are compatible with the conventional illumination system PHL-100 and
LS-LHA, respectively.
Catalog
Code
W5025
Guide
▶Contact our International Sales Division for
information on replacement lamps (HL-50)
for the conventional model PHL-50.
Part Number
HL-100-2 (JCR12V100WB)
HL-150-2 (JCR15V150WBN)
Product Description
For 100W (conventional model PHL-100)
For 150W (conventional model PHL-150)
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
H033

Light Sources
Metal Halide Fiber Illumination Systems
Lamps for Metal Halide Fiber Illumination Systems
IMH-250
MHL
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
IMH-250
W5026
High intensity and high precision illumination systems with metal halide lamp and twin mirror system.
◦Bright, efficient illumination using short arc metal halide lamps. Spectral output more closely matched to human spectral
response than other types of high intensity lamps.
◦Newly designed optical system has combined an elliptical mirror and a spherical mirror to focus light into a light guide very
efficiently.
◦Uses a combination of cold mirror and heat absorbing filter to efficiently manage heat output.
◦Lamp replacement is a simple one-touch operation without need for adjustment, as the lamp and the elliptical cold mirror
are integrated.
◦A new mechanical aperture allows control of output intensity without changing spectral characteristics.
◦High stability, low ripple output. The DC metal halide lamp employed has significantly lower ripple than AC metal halide
lamps, which makes this product suitable for high-speed image processing.
Guide
▶Light guides sold separately.
H035
Catalog
Code
Motoeized
Stages
Light
Sources
Outline Drawing
IMH-250
150
316
309
27 135
(Units: mm)
4.3
Index
90
205
Guide
Lasers
Detectors
Common Specifications
Lamp Type
Lamp Life
Power Supply
Mirror integrated metal halide lamp DC250W
Average 2,000 hours (to decrease in light intensity
by 30% from initial value)
AC90 − 132V 50/60Hz
25 100
12
128
243.2 33
100
Laser Safety
Equipments
Light Sources
Input Voltage AC100V±10% 50/60Hz
Power Consumption about 330W
Illumination Intensity
80,000lx or more (initial value) at a position 100mm from
the edge of the light guide of L=500mm and φ5
Fluctuations in
Illumination Intensity
about 1.5%
Color Temperature 7,500°K
Cooling Method Forced-air cooling method
Usage Environment Temperature: 5°C − 35°C, Humidity: 70% or less
External Dimensions [mm]
(W)150×(H)205×(D)309
(excluding rubber feet and protrusions)
Weight [kg] about 6.0
Reference spectral data
The spectral characteristic is an actually measured value, not a guaranteed value.
Light guide used: MSL-1500S-10
100
Spectral characteristic [%]
80
60
40
20
10
400 500
IMH-250
600 700 800 900 1000
Wavelength [nm]
Part Number
Product Description
Light Intensity
Adjustment Method
Shutter
Open/Close
Power Supply
ON/OFF
External control
Connector
IMH-250 Low-light intensity ripple (high stability) type Manual None Manual None None
IMH-250A
IMH-250SL
Low-light intensity ripple (high stability) type
with continuous automatic aperture function
Low-light intensity ripple (high stability) type
with shutter and lamp control function
Manual and remote
selection with switch
Interface
None Manual D-sub25pin TTL level
Manual External control External control BNC TTL level
MHL
Replacement lamps for metal halide fiber illumination system IMH-250.
Catalog
Code
W5027
◦Since this product comes as a unit of the lamp placed and fixed at the focus
position of the elliptical mirror, it is easily fixed in the relative position of the
elliptical mirror, spherical mirror and metal halide lamp just by removing the
cover from a metal halide fiber illumination system and fix the unit with the
spring included in this product.
Specifications
Part Number
MHL-250
H034
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Light Guides
MSL / MTI / MRL / MM80
Catalog
Code
W5028
Light guides used for LED light source device, tungsten halogen fiber illumination systems and metal halide fiber
illumination systems. Light guides are made of bundled glass fibers and assembled in various output shapes.
When combined with a light source light guides provide noiseless and heatless high intensity illumination.
◦Semi-rigid flexible outer tube (gooseneck) can be bent freely and fixed at that position.
Straight light guides (Semi-rigid flexible)—MSL
Application
Systems
Optics &
Optical
Coatings
Outline Drawing
(Units: mm)
Holders
MSL-500L
U groove
(R 1.5, Depth 0.5)
φ25
φ7
φ14
Bases
φ20 +0
−0.1
φ13 −0.05
−0.1
90° V groove,
Depth 0.5
OF φ5
11.5 10.05
15 15 30
500
25 10
35
Manual
Stages
Actuators
Twin light guides (Semi-rigid flexible)—MTI
Motoeized
Stages
Outline Drawing
(Units: mm)
Light
Sources
MTI-500L
30
18.5
25
φ12
Index
φ13
11.5
−0.05
−0.1
φ20
+0
−0.1
20 25
500
OF (φ5.6)
10
φ7
φ14
Guide
Lasers
15
15
16
90° V groove, Depth 0.5
OF φ4
Detectors
Laser Safety
Equipments
Light Sources
Straight light guides (SUS flexible)—MSL-S
◦MSL-1000S-10 and MSL-1500S are intended for use with metal halide fiber illumination systems only. These light guides
have a bundle diameter of φ10mm, which enables more efficient transmission with lower loss compared to other guides.
Outline Drawing
(Units: mm)
MSL-1000S-10/1500S-10
L=1,000 or 1,500
60
40
φ20 +0
−0.1
φ13 −0.05
−0.1
OF (φ10.1)
15 15 30
11.5 10.05
φ25
30
4
10
3 3
Guide
▶Select the type with bundle diameter of φ10mm to increase the intensity
of light transmitting from tangsten halogen fiber illumination systems.
90° V groove, Depth 0.5 U groove (R 1.5, Depth 0.5)
φ12
φ13 −0.05
−0.1
φ17
Straight light guides (Flexible)—MSL-F
Outline Drawing
(Units: mm)
MSL-1000F/1500F
φ20 +0
−0.1
13 −0.05
−0.1
U groove
(R 1.5, Depth 0.5)
Fastener
(φ10, Depth5)
25
Fastener
(φ10, Depth5)
φ7
φ14
90° V groove,
Depth 0.5
OF φ5
11.5 10.05
15 15 30
L=1,000 or 1,500
25
35
10
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H035

Light Sources
Light Guides
MSL / MTI / MRL / MM80
Catalog
Code
W5028
Application
Systems
Ring light guides (SUS flexible)—MRL
Outline Drawing
(Units: mm)
Optics &
Optical
Coatings
MRL-1000
−0.05
−0.1
φ13
OF φ9.5
90° V groove, Depth 0.5
U groove (R 1.5, Depth 0.5)
φ25
φ16
30 φ70
Three points 120° up
Holders
+0
−0.1
φ20
10°
26
Bases
Manual
Stages
11.5 10.05
15 15 30
1,000
φ50
OF inner diameter φ58
OF outer diameter φ58.77
3±0.5
M63×0.75
Filter mounting
portion
Actuators
Surface emitting light guides (SUS flexible)—MM80
Motoeized
Stages
Light
Sources
Index
Guide
Lasers
Outline Drawing
MM80-1500
φ20 +0
−0.1
φ13 −0.05
−0.1
OF (φ7.2)
15 15 30
11.5 10.05
φ25
φ15
U groove
(Width 2, Depth 0.5)
90° V groove, Depth 0.5
1,500
20
10
145
2-φ3.5 Emitter effective width 80 10
A
80
15
A
Polished surface
45 95
Emitter effective width 80
7
(Units: mm)
90
Cross
section
A-A
Black mold
Detectors
Laser Safety
Equipments
Light Sources
Specifications
Part Number Type External Coating
Fiber
Diameter
[μm]
Length
[mm]
Bundle
Diameter (φ)
[mm]
Numerical Aperture
[NA]
MSL-500L Straight Semi-rigid flexible 50 500 5 0.57 (70°)
MTI-500L Twin Semi-rigid flexible 50 500×2 5.6 0.57 (70°)
MSL-1000S-10
SUS flexible 50 1,000 10 0.57 (70°)
MSL-1500S-10 SUS flexible 50 1,500 10 0.57 (70°)
Straight flexible
MSL-1000F Tube 50 1,000 5 0.57 (70°)
MSL-1500F Tube 50 1,500 5 0.57 (70°)
MRL-1000 Ring SUS flexible 30 980 9.5 0.57 (70°)
MM80-1500 Surface emitting SUS flexible 50 1,500 7.2 Surface emitting light
Guide
▶If holders are necessary, contact our International Sales
Division. Improvised holders can be made using standard
catalog products.
LHA-60
RS-12-40
BSP-40100
H036
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Focusing Lenses for Fiber Illumination Systems
Glass Rod Homogenizers for Light Guide
MGF
RHO
MGF
Condenser lens units provide a uniform beam spot when mounted at the tip of light guides.
◦Focuses the output of the light guide and easily create focusing and diverging lights.
◦Mounts on the end of φ7mm light guides.
Catalog
Code
W5029
Application
Systems
Optics &
Optical
Coatings
Outline Drawing
(Units: mm)
Lighting characteristic
Holders
MGF-01
φ24
φ7
φ13
Bases
Specifications
5262
500mm
1,000mm
1,500mm
φ250mm
φ500mm
φ750mm
Manual
Stages
Part Number
MGF-01
2,000mm
φ1,000mm
Actuators
2,500mm
3,000mm
φ1,250mm
φ1,500mm
Motoeized
Stages
RHO-13S-E2
Glass rod homogenizers for MSL-1000S-10 and MSL-1500S-10 light guides.
Catalog
Code
Lighting characteristic
W5030
Light
Sources
Index
◦Mounts on the end of φ13mm light guides.
Outline Drawing
(Units: mm)
0mm
200mm
□50×50mm
Guide
Lasers
RHO-13S-E2
φ27.5
Specifications
Part Number
79 70
155169
40
30
φ13.1
RHO-13S-E2
φ17.1
φ27
400mm
500mm
1,000mm
□90×90mm
□ 110×110mm
□220×220mm
Example of RHO-13S-E2 usage
Detectors
Laser Safety
Equipments
Light Sources
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H037

Light Sources
Light Guide for LED Spot Illumination
S1/S2
Light guides for LED spot illumination and RGB mixed color units.
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Specifications
External Coating
SUS flexible
Fiber Diameter [μm] 50
Bundle Diameter [mm] 6
Numerical Aperture [NA 0.56
SUS flexible tube diameter (φ) [mm] 10±0.2
Guide
▶Contact our International Sales Division for SUS flexible + PVC
wrapped external coating and SUS interlock.
▶To connect with LED spot illumination, use a light guide adapter.
Actuators
Motoeized
Stages
Light
Sources
Index
Guide
Lasers
Detectors
Laser Safety
Equipments
Light Sources
Specifications
Part Number
S1S8-500F
Type
Exit End Shape
[mm]
L=Length
[mm]
S1S8-1000F Straight
φ8
1,000
S1S8-1500F 1,500
S2S8-500I-V Twin φ8 500
S1L30-500F-R
S1L30-1000F-R 30×0.95
1,000
S1L30-1500F-R 1,500
S1L50-500F-R
500
Line
S1L50-1000F-R 50×0.57
1,000
S1L50-1500F-R 1,500
S1L100-1000F-R
1,000
100×0.29
S1L100-1500F-R 1,500
S1R18-500F-R
S1R18-1000F-R R18
1,000
S1R18-1500F-R 1,500
S1R25-500F-R
S1R25-1000F-R Ring
R25
1,000
S1R25-1500F-R 1,500
S1R32-500F-R
S1R32-1000F-R R32
1,000
S1R32-1500F-R 1,500
S1P30-1000F-R
1,000
□30
S1P30-1500F-R 1,500
Surface emitting
S1P60-1000F-R
1,000
□60
S1P60-1500F-R 1,500
500
500
500
500
500
Light Guide Adapter—AD-0808
Outline Drawing
11.5
40.5
33.5
3.5
20.25
4-C0.5
(Units: mm)
Specifications
Part Number
External Dimensions
[mm]
Material
AD-0808 (W)40.5 × (H)23 × (D)23 Aluminum alloy
16
φ14 +0.05
+0.01
φ8 +0.05
+0.01
φ14 +0.05
+0.01
23
3.5
2-φ3.5through hole
φ6counterbore 13
24.5 8
2-M3
φ3.5counterbore depth1
11.5
23
H038
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27.5
Catalog
Code
W5049
Outline Drawing
(Units: mm)
S1S8-500F/S1S8-1000F/S1S8-1500F
14 35
(L)
8 12 23
SUS flexible tube (10)
35
23 12
14
8
O.F6
S1L30-500F-R/S1L30-1000F-R/S1L30-1500F-R
O.F w30×t1
9
16
40
45
15
12
C10
(L)
SUS flexible tube (10)
35
23 12
14
8
O.F6
Application
Systems
Optics &
Optical
Coatings
5
Holders
2-3.5
Bases
S1L50-500F/S1L50-1000F/S1L50-1500F
(L) 35
12
45
5
23 12
O.F w50×t0.6
30
60
C10
SUS flexible tube (10)
14
8
O.F6
S1L100-1000F-R/S1L100-1500F-R
O.F w100×t0.29
15
60
120
60
20
5
20
2-3.5
(L)
SUS flexible tube (10)
35
23 12
14
8
O.F6
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
2-3.5
Index
S1R18-500F/S1R18-1000F/S1R18-1500F
S1R25-500F-R/S1R25-1000F-R/S1R25-1500F-R
3
40 20
18
13
(L) 35
23 12
14
8
3
40
25
20
(L)
35
23 12
14
8
Guide
Lasers
20
Light emission inward angle 20
Light emitting part 20
3-M3
15
120°
M30.5 P0.5
Filter mounting part
SUS flexible tube (10)
O.F6
30
Light emission inward angle 20
Light emitting part 28
3-M3
15
120°
13
SUS flexible tube (10)
O.F6
Detectors
Laser Safety
Equipments
Light Sources
3-knurled screw
120°
4-M3 PCD30 depth4
3-knurled screw
120°
4-M3 PCD30 depth4
S1R32-500F/S1R32-1000F/S1R32-1500F
S1P30-1000F-R/S1P30-1500F-R
30
3
Light emission inward angle 20
Light emitting part
50
32 20
35
3-knurled screw
13
(L)
35
23 12
SUS flexible tube (10)
M43 P0.75
Filter mounting part
14
8
O.F6
15
120°
45°
45°
40
70
Luminescence
side
30
23
30
20
2-M4
(L)
SUS flexible tube (10)
35
23 12
14
8
O.F6
10
5
3-M3
45°
45°
4-M3 P0.5 PCD40 depth4
12
S1P60-1000F/S1P60-1500F
S2S8-500I-V
70
110
Luminescence side
60
38
50
(L) 35
23 12
20
SUS flexible tube (10)
2-M4
14
8
O.F6
2-O.F4.3
14
8
35
12 23
500
SUS interlock tube (12.5)
15
14
8
31
20 11
10
23.5
12 8
43.5
5
15
10
60°
12
O.F6
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H039

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Part Number INDEX
Part Number Products Name Pages
0 − 9
05-LHP He-Ne Lasers H006
05-LPL Power Supplies for He-Ne Lasers H007
05-STP Stabilized He-Ne Lasers H007
817 Laser Classification Labels H025
817 Laser Warning Labels H025
817 Laser Controlled Area Signs H025
838 Laser Warning Labels H025
A
AD-M6-M2 M6-M2 Conversion Adapters D030
AD-M6-M4 M6-M4 Conversion Adapters D030
AFA/AFB Grease G110
AFE-GREASE-C Low dust generation grease for clean room environments G110
AGL Aspheric Condenser Lenses B159
AGL-15/AGL-20 Aspheric Plano Convex Lens B158
AGL2 Aspheric Micro Lens B160
AIS α(β) axis Tilt Stages E194
ALHN-3 Three-axis Lens Holders (Plate Type) C037
ALHN-3RO Three-axis Lens Holders (Post Type) C036
ALHN-5 Five-axis Lens Holders (Plate Type) C037
ALHN-5RO Five-axis Lens Holders (Post Type) C036
AND-M6-M4 Adapter Nuts D063
AND Absorptive Neutral Density Filter Unmounted (Visible) B213
ANDY Absorptive Neutral Density Filter Unmounted (YAG Laser) B213
AOR-M26.0 Adapter A022
AOS-M26.0 Adapter A022
ASS Alignment Software A031
ATL Visible Spectrum Achromats B180
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Part Number
B
BBP Flare Plates C069
BD Beam Dumps C070
BE-10600 Laser Beam Expanders for CO2 Lasers B207
BE Laser Beam Expanders With diopter correction function B200
BE-M Holders for Laser Beam Expanders C054
BHAN-DM Gimbal Beamsplitter Holders C028
BHAN-S Gimbal Beamsplitter Holders C028
BEHP High Power Laser Beam Expander B198
BEZHP High-power zoom type laser beam expander B199
BIOS-LS-S BIOS-Light for upright microscope A059
BIOS-LT-S BIOS-Light for inverted microscopes A058
BIOS-T Motorized XY stage system for inverted microscopes A060
BIOS-S Motorized XY stage system for upright microscope A061
BLF Blue Filters B233
BLZ Z Angle Brackets D046
BRS High Stability Ball Plunger Post Holders D042
BRS Adapters for High Stability Type Post Holders D042
BS4 Beam Samplers B066
BSC Base Clamps D030
BSH2 Shutter Systems for Microscope A057
BSHL-2 Vertical Control Gimbal Mirror and Beamsplitter Holders C022
BSHL-BP Base Plates for Kinematic Mirror Holders C023
BSHL-TF Vertical Control Gimbal Mirror and Beamsplitter Holders C022
BSP Base Plate D028
BSP-1016N Baseplate D062
BSP-1020N Baseplate D062
BSR Beam Steering Holders C032
BSRU Precision Beam Steering Assembly C032
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index 1

Index
Part Number INDEX
Part Number Products Name Pages
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Part Number
C
Case Filter Case B261
CAA-LS Carriers for Medium Optical Rails D025
CAA-L Carriers for Large Optical Rails D023
CAA-MB Carriers for Medium Optical Rails D025
CACM C Mount A019
CCB Corner Cube Prisms B272
CCF Color Correction Filter B237
CCHN Cross Clamps D050
CDL Achromatic cylindrical lens B179
CHA Adjustable Cylindrical Lens Holders C044
CHS Thread Adapters D049
CLB-N Cylindrical Plano-concave Lenses (BK7) B147
CLB-P Cylindrical Plano-convex Lenses (BK7) B140
CLDF Cold Filters B242
CLDM Cold Mirrors B243
CLSQ-N Cylindrical Plano-concave Lenses (Synthetic Fused Silica) B147
CLSQ-P Cylindrical Plano-convex Lenses (Synthetic Fused Silica) B140
CMH Camera Holders C068
CPC Parabolic lens of internal reflection type B280
CRHN Rotary Cross Clamps D051
CSCH Chromium Cube Half Mirrors B049
CSM Dielectric Cube Beamsplitters B060
CSMH Dielectric Cube Half Mirrors B050
Custom-made Z-polarizer B103
Custom-made FAC Collimated Lens B161
Custom-made Polymer Notch Filter B260
Custom-made Etalon B262
Custom-made Brewster dispersing littrow type prism B277
Custom-made Optical flats with hole B299
Custom-made Custom curved mirror B310
Custom-made Master Optics B314
Custom-made Brewster Windows B325
D
D15D15A D15D15A Cable G108
D15RP D15RP-CA Cable G108
DAC-SG DAC Cable G108
DAU-080A Motorized 12-axis (6-axis) Optical Fiber Alignment Stage Unit A028
DAU-080M Manual 12-axis (6-axis) Optical Fiber Alignment Stage Unit A028
DAU-120A Motorized 3-axis XYθ Stage Unit A029
DBH Dove Prisms Holders B089
DBSP-1 D-TOP Base plate A043
DBSP-2 D-TOP Base plate A043
DEQ Quartz Depolarizers B089
DFB1 Ground Glass Diffusers (BK7) B228
DFO Opal Diffusion Glass B229
DFSQ1 Ground Glass Diffusers (Synthetic Fused Silica) B228
DHR-CA-3 DHR-CA Cable G109
DIF Visible range dichroic filters B239
DIM Visible range dichroic filters B241
DIMC Dichroic case for laser introduction A019
DL-NM Negative achromatic lens B177
DL-PNIR Near infrared achromatic lens B176
DLB Achromatic Doublets B172
DOP Dust-Off Plus B366
DOP Dove Prisms B276
DOBC-2632 D-TOP Breadboard A043
DPB Equilateral Dispersing Prisms B274
DPTIH11 Equilateral Dispersing Prisms B274
DPSQ Equilateral Dispersing Prisms B274
index 2
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Part Number Products Name Pages
DR Delrin Washers C039
Drivers Drivers G020
DRU Darkroom Kits D018
DRU Clean Darkroom Equipment D019
DRU Spirit Levels D019
DRUC Clean Darkroom Kits D018
DTM-05-LHP-111 Laser Module A046
DTM-CLMI Coherent Length Measuring Machine A045
DTM-DTPF-15C-32 Mirror Module A046
DTM-HBCH-20-550 Polarizer Module A046
DTM-MLF-SF Hybrid Cube Half Mirror Module A047
DTM-MMHI Micro Observation Interferometer A044
DTM-PSM33-30C03-0W-550 Prototype Beam Splitter Module A046
DTM-PSMH-30C03-10-550 Camera Module A047
DTM-RMFI R Measuring interferometer A044
DTM-SKDCE-3 1/4 (or 1/2) Waveplate Module A046
DTM-PBS-20-6328 PBS Module A047
DTM-SLB (or DLB) Lens Module A046
DTM-TFA-30C05-10 Moveable Mirror Module A047
DTM-WPP-15C0633-4M (or -2M) Optical Path Switching Mirror Module A046
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
E
ECM Color Correction Filter B237
ECS/ECC ECS Positioners – ECS series (Attocube) G118
EDL Excimer Laser Focusing Lenses B184
EL-10-30 Focus Tunable lens B205
EMS Thin film design software (Essential Macleod) B339
EPCMA C Mount Adapters for Eyepiece Port A024
EPL Long Working Distance Objective Lenses B194 etc
EPLE Long Working Distance Objective Lenses B194 etc
ETL Excimer Laser Focusing Lenses B184
Index
Part Number
F
FAD Filter Holder Adapter C065
FBP Base Plate D028
FEL Fly-Eye Lens B152
FH Filter Holders C065
FHS Filter Holder - CS Type C065
FINE 1 axis SFS Controller with Analog Input Function G117
FLM Low Dispersion Mirrors for Femtosecond Laser B011
FLMHP Low Dispersion Mirrors for High Power Femtosecond Laser B011
FMB Optical Path Switching Mounts C018
FND Reflective Neutral Density Filter Unmounted (Visible) B219
FNDU Reflective Neutral Density Filter Unmounted (UV) B219
FOM Fiber Optics Mounts C071
FOP FC Type Fiber Optics Holders C074
FOP-ADP Adapters for Ferrule C074
FOP-SMA SMA Type Fiber Optics Holders C075
FOP-DM-SMA SMA Type Fiber Optics Holders C075
FOP-ADP-SMA Receptacle for SMA Type Fiber Holder C075
FOPT Laser Focusing Holder C076
FPSA Fine-pitch Screw Adjusters F010
FRB Fresnel Rhomb Waveplates B091
FRH Fresnel Rhomb Waveplate Holders B091
FRL Fresnel Lens B153
FSL Precision Pinholes for High Energy Laser C059
fθ fθ Lenses G186
fθ fθ Lenses for YAG G186
fθ-10600 fθ Lenses for CO2 Lasers G206
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index 3

Index
Part Number INDEX
Part Number Products Name Pages
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Part Number
G
GBSMU Frameless Beamsplitter Unit B014
GCM Negative Dispersion Mirrors for Femtosecond Laser B013
GFM Negative Dispersion Mirrors for Femtosecond Laser B013
GIP-101 Intelligent Positioning System G101 etc
GLP Glan Laser Prisms B095
GLPB Glan Laser Prisms B095
GMMUHP Frameless Mirror Unit B014
GOH-15A α axis Goniometers E182
GOH-25A α axis Goniometers E182
GOH-25B αβ axis Goniometers E182
GOH-40A α axis Goniometers E184
GOH-40B αβ axis Goniometers E184
GOH-60A α axis Goniometers E186
GOH-60B αβ axis Goniometers E186
GOH-65A α axis Goniometers E188
GOH-65B αβ axis Goniometers E188
GOHB-40A α axis Screw Goniometers with V-Grooved Guide E190
GOHB-60A α axis Screw Goniometers with V-Grooved Guide E191
GOHS-40A α axis Stainless Steel Goniometers E215
GOHS-40B αβ axis Stainless Steel Goniometers E215
GOHT-AP Attachment Pins E010
GOHT-40A Extended Contact Ball Slide Goniometers E168
GOHT-40A-S Extended Contact Micrometer Goniometers E176
GOHT-40B αβ axis Extended Contact Ball Slide Goniometers E170
GOHT-60A Extended Contact Ball Slide Goniometers E172
GOHT-60A-S Extended Contact Micrometer Goniometers E178
GOHT-60B αβ axis Extended Contact Ball Slide Goniometers E172
GOHT-65A Extended Contact Ball Slide Goniometers E174
GOHT-65A-S Extended Contact Micrometer Goniometers E180
GOHT-65B αβ axis Extended Contact Ball Slide Goniometers E174
GOHTA-120A α axis Goniometers E192
GOHTA-120B αβ axis Goniometers E192
GP-IB GP-IB Cable G109
GP-6BK White LED Light D019
GRF Green Filter B233
GSC-01 Single axis Stage Controller G098 etc
GSC-02 2 axis Stage Controller G099 etc
GSE-CA-3 GSE-CA Cable G109
GTPB Glan Thompson Prisms B094
GTPC-ADP Polarizing Prism Adapter C051
GTPC-SPH Polarizing Prism Holders (Precision Type) C051
GTPC-PH Polarizing Prism Holders (Simple Type) C051
GTPC Glan Thompson Prisms B094
GYPB Glan Tayler Prisms B096
GYPC Glan Tayler Prisms B096
H
H-D-M2 Dry Cabinet (Electronic Drying Case) B348
HAF Heat Absorbing Filters B235
HBCH Hybrid Cube Half Mirrors B048
HCS-H Helicoidal 15mm Jacks D045
HDS-YAW High durability automatic rotation stages G080
HFDLSQ Focusing Lenses for Fiber Laser B182
HFTLSQ Focusing Lenses for Fiber Laser B182
HIT-M/S Extensible Stage Controller G103
HL Replacement Lamps for Tungsten Halogen Fiber Illumination Systems H033
HMPQP Optical Flats B312
HMPZP Optical Flats B312
HOTM Ultra-Violet Hot Mirrors B244
index 4
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Part Number Products Name Pages
HPS High Performance Motorized Stages G028
HPS120-20X-SET Motorized Stage/Controller/Cable Sets (XY axis Set) G026
HPS60-20X-SET Motorized Stage/Controller/Cable Sets (X axis Set) G026
HPS/HDS120-XYθ-SET Motorized Stage/Controller/Cable Sets (Xyθ axis Set) G027
HTFM-MHG Holder Attached Surface Accuracy Guaranteed Mirrors B018
HTFM Surface Accuracy Guaranteed Mirror B016
I
IDC Iris Diaphragm C062
IFC-AL Adjustment Lens Component A040
IFC2-UC Camera Component A039
IFC2-KL Imaging Lens Component A039
IFC2-IR Iris Diaphragm Component A040
IFC2-CL Collimator Lens Component A038
IFC2-SC Screen Component A039
IFC2-SF Spatial Filter Component A038
IFC2-BS Beamsplitter Component A039
IFC2-AF Filter Component A039
IFC2-PF Polarization Filter Component A040
IFC2-M Mirror Component A038
IFC2-BD Stray Light Block Component A039
IFC2-L Laser Component A038
IFS2-FZ-25 Fizeau Interferometer A036
IFS2-MI-25 Michelson Interferometer A036
IFS2-MZ-25 Mach-Zehnder Interferometer A036
IFS2-CMR Camera Observation Unit A037
IH-30N Iris Diaphragm C062
IH Iris Diaphragm Holders C061
IMH-250 Metal Halide Fiber Illumination Systems H034
IPWS Linear Stainless Steel Ways E196
IR-LEGO IR-LEGO Infrared Laser-Evoked Gene Operator A056
ITF IR Transmitting Filters B231
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Part Number
J
JB-400 Jog Operation Box G107
JD-100 Jog Dial G106
JS-300 Joy Stick G107
K
KCL Hex Wrench with Knob F010
KKD Prism Holders C047
KKD θαβ axis Stages E193
KLSA/KLSS Thin Long Travel Stage G058
KMH Square Optics Holders C068
KRPB Knife Edge Right Angle Prisms B270
KRPB4 Knife Edge Right Angle Prisms (with a Coat) B271
KSC θ axis Rotation Stages E164
KSP-256/406 θ axis Rotation Stages E158
KSP-606/656/786 θ axis Rotation Stages E158
KSPA θ axis Rotation Stages with Aperture E160
KSPB θ axis Rotation Stages with Aperture E162
KSPS Stainless Steel Rotation Stages E214
KSPT Thin Type Rotation Stage with Central Aperture E156
KSSA θ axis Rotation Stages with Square Top E164
KST-X Precision Motorized Stages - 5 Phase Stepping Motor G062
KST-XY Precision Motorized Stages - 5 Phase Stepping Motor G066
KST-Z Precision Motorized Stages - 5 Phase Stepping Motor G068
KST-YAW Precision Rotation Motorized Stages G078
KST(GS) Precision Motorized Stages with built in Glass-scale Encoder G064
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index 5

Index
Part Number INDEX
Part Number Products Name Pages
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Part Number
KSW θ axis Rotation Stages (Worm Nut and Gear Drive) E165, E166
KUA Corner Cube Prism Holders B272
L
LA Color Temperature Conversion Filter B236
LACR Motorized Lens Turret A022
LACS Lens switching slider A022
LAH Cylindrical Laser Mounts C052
LAH-3 Adjustable Laser Holders C053
LAHU-A Adjustable Laser Holders (with a stand) C052
LAHU Adjustable Laser Holders C052
LB Color Temperature Conversion Filter B236
LBE-H Holders with integrated Laser Beam Expanders C055
LBE Laser Beam Expanders B202
LBE-ADP Adapters for Laser Beam Expanders C056
LBED-YH Laser Beam Expander [with Collimation Adjustment] (with holder) C054
LBED-H Laser Beam Expander [with Collimation Adjustment] (with holder) C054
LBED Laser Beam Expanders With diopter correction function B200
LBR L Angle Brackets D054
LCBS Concave mirror substrate for laser B308
LCP-33 Laser Checker H008
LDU33 Laser Diode (Visible) H006
LHA Adjustable Round Lens Holders C040
LHCM Caliper Variable Lens Holders C038
LHF Fixed Lens Hoders C035
LHF-S Fixed Lens Hoders C035
LHF-UDL Fixed Multi-element Lens Holders C045
LHF-M Fixed Multi-element Lens Holders C045
LHO Objective Lens Holders C046
LJ/LJA Precision Labjacks E108
LJA-M6 Precision Labjacks E110
LJA-UU Precision Labjacks E110
LJP Platform for Labjacks E112
LJS Adjustable Spacer Kits for Labjacks E114
LLS-W LED light source for use with light-guide H026
LMC Spirit Levels D019
LMHB Topmike Vertical Control Mirror Holders C024
LMHBP Plates for Topmike Mirror Holder C025
LMMH-R Vertical Control Small Mirror Holders C019
LMPAL Infrared (NIR) Objective Lenses B193
LMS Laser Optical tweezers - Mini type A055
LMT Spirit Levels D019
LOPF Long-Pass Filters B246
LPB Light Pipe B279
LPH-ADP Light pipe adapter B279
LPSQ Light Pipe B279
LS-LHA Tungsten Halogen Fiber Illumination Systems H033 etc
LST X axis Long Travel Leadscrew Stages E084
LSV Z axis Long Travel Leadscrew Stages E106
LWZ Zoom Microscope A014
LWZ-M Zoom Microscope A014
M
MAN Absorptive Neutral Density Filter Mounted (Visible) B213
MANY Absorptive Neutral Density Filter Mounted (YAG Laser) B213
MB Magnet Base D026
MB-MX Flexible Post Holder D027
MDC Angled Micrometer Heads F008
MDFPC Beam Shaping Diffuser B227
index 6
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Part Number Products Name Pages
MDR14-CA-2.5 MDR14-CA-2.5 Cable G109
MFND Reflective Neutral Density Filter Mounted (Visible) G219
MFNDU Reflective Neutral Density Filter Mounted (UV) G219
MFH Mini-Fiber Optics Holders C072
MFH-ADP Adapters for Mini-Fiber Optics C072
MGF Focusing Lenses for Fiber Illumination Systems H037
MHA Gimballed Beamsplitter Mounts C026
MHAN-S Gimballed Beamsplitter Mounts C026
MHAN-DM Gimballed Beamsplitter Mounts C026
MHD Larger Precision Gimbal Mirror Holders C030
MHD-P Plates for Larger Precision Gimbal Mirror Holders C030
MHE Close-proximity Mirror Holders C029
MHE-DM Close-proximity Mirror Holders C029
MHF Differential Micrometer Heads F006
MHG-MP-NL NOMI LOCK Model Kinematic Mirror Holder C014
MHG-HA-NL NOMI LOCK Model Kinematic Mirror Holder C014
MHG-PAD Prism Adapter for Kinematic Mirror Holder C017
MHG-BPRO Plates for Kinematic Mirror Holders C016
MHG-MAD Adapter Mounts for Kinematic Mirror Holders C017
MHG-20LDU Laser Mounts C018
MHG-KAD 45° Optics Adapters for Kinematic Mirror Holders C016
MHGT Kinematic Mirror Mount C013
MHI Offset-less Kinematic Mirror Holders C012
MHL-250 Lamps for Metal Halide Fiber Illumination Systems H034
MHN Small Kinematic Mirror Holders F005
MINI-CA-SG MINI-CA-SG Cable G108
MKAD Mirror Case Adapters C021
MLH Small Lens Claws C042
MLH Selfoc® Lens Claws C043
MM80 Surface emitting light guides (SUS flexible) H035
MMHN Small Kinematic Mirror Holders C020
MMS Micro manipulation System A054
MNS Nut Drivers F006
MPH Polarizer Holders C049
MPSMH Thin Plate Beamsplitter B054
MRL Ring light guides (SUS flexible) H035
MS Micro Spheres B154
MSL Straight light guides H035
MSP-25 Aluminum Spacers (□25mm) D035
MSP-40 Aluminum Spacers (□40mm) D036
MSP-60 Aluminum Spacers (□60mm) D037
MX-AM Flexible Post Holder D027
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Part Number
N
NADL Visible Spectrum Achromats B180
NDHN Rotating Variable Reflective ND Filter Holder B224
NDWH Filter Wheels C064
NEDL Excimer Laser Focusing Lenses B184
NF Notch Filter B258
NPAL Ultra-violet Objective Lenses B190
NPAL-YSTF 3-Wavelengths Objective Lens B189
NPCH Non-polarizing Cube Half Mirrors B046
NRS Retaining Ring Spanners C039
NSPFU Sheet Polarizers B099
NUDL Ultra-violet Achromats B185
NYDL YAG Laser Focusing Lenses B181
NYTL YAG Laser Focusing Lenses B181
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index 7

Index
Part Number INDEX
Part Number Products Name Pages
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Part Number
O
OBA-SH Medium Optical Rails D024
OBA-LH Large Optical Rails D022
OBB Optical Baseplates D033
OBC Optical Baseplates D033
OBC Optical Baseplates D032
OBL Microscope Objectives B196
OBLR Reflective Microscope Objectives Lenses B197
OBT-SH/SUU Medium Low-Profile Optical Rails D024
OBT-LH/LUU Large Low-Profile Optical Rails D022
OBT-WL Feet for Large Optical Rails D025
OBT-LS Feet for Large Optical Rails D025
OBT-LW Feet for Large Optical Rails D025
OCK Optical Cleaning Kit B345
OCK-S Optical Cleaning Kit (Handy type) B345
OFB Optical Flats (BK7) B287
OFBP Optical Flats (BK7) B287
OFH Fiber Optics Holders C073
OFH-ADP Fiber Optics Holders C073
OFPXP Optical Flats (BK7) B287
OFSQ Optical Flats (BK7) B287
OFSQP Optical Flats (BK7) B287
OFUP2 Laser Safety Panels H017
OMEC OptMike-E (B type) Controllers F017
OPB Optical Parallels (BK7) B292
OPBA High Parallelism Aluminum Mirrors B030
OPCF CaF2 windows for Ultraviolet and Infrared Laser B320
OPCFU CaF2 windows for Ultraviolet and Infrared Laser B320
OPFL Float glass B291
OPGE Germanium Windows for Infrared Laser B324
OPMFSP Low Scattering Substrates (Synthetic Fused Silica) B286
OPNQ Water Free Synthetic Fused Silica Windows for Infrared Laser B318
OPCFSP Low Scattering Substrates (Synthetic Fused Silica) B286
OPSH Sapphire Windows for Infrared Laser B319
OPSI Silicon Windows for Infrared Laser B323
OPSQ Optical Parallels (Synthetic Fused Silica) B292
OPSQA High Parallelism Aluminum Mirrors B030
OPSQK Optical Parallels (Synthetic Fused Silica) B292
OPSQSP Low Scattering Substrates (Synthetic Fused Silica) B286
OPZS ZnSe Windows for Infrared Laser B321
OS-BA-SAT Multiple Scanning Knife-Edge beam profiler H010
OS-BeamOnHR CCD Type Beam Profiler H011
OSDAC-30 Air Compressor D014
OSDOTS Overhead Table Shelf System D013
OSDVIA Active Vibration Isolation Systems D006
OSDVID-C Desk type vibration Isolation systems D010
OSDVID-L Desk type vibration Isolation systems D010
OSDVIO High-performance Vibration Isolation Systems with Steel Honeycomb Top D007
OSDVIO-B Tabletop Optical Breadbord D012
OSDVIO-R Steel Honeycomb Optical Tables D009
OSDVIT Desktop Vibration Isolation Systems D011
OSMS20-(X) OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor G032
OSMS20-(XY) OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor G034
OSMS20-(Z) OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor G036
OSMS20-XYZ-SET Motorized Stage/Controller/Cable Sets (XYZ axis Set) G027
OSMS26-(X) OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor G040
OSMS26-(XY) OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor G042
OSMS26-(Z) OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor G044
OSMS33-(X) OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor G048
OSMS33-(XY) OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor G050
OSMS33-(Z) OSMS Series Translation Motorized Stages - 5 Phase Stepping Motor G052
index 8
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Part Number Products Name Pages
OSMS-40A Motorized Extended Guide Goniometer G082
OSMS-60A Motorized Extended Guide Goniometer G064
OSMS(CS)20-(X) Precision Motorized Stages with Built-in Compact Scale G038
OSMS(CS)26-(X) Precision Motorized Stages with Built-in Compact Scale G046
OSMS(CS)33-(X) Precision Motorized Stages with Built-in Compact Scale G054
OSMS-ZF Translation Motorized Stages, Flat Z axis - 5 Phase Stepping Motor G070
OTK Optical Tool Kits B345
OUCI-2 Observation unit with coaxial illumination A018
P
PA Precision Pinhole C059
PA-HEL Precision Pinholes for High Energy Laser C059
PAD Prism Holders C048
PAL Near Ultra-violet (NUV) Objective Lenses B192
PBPQ Pellin Broca prism B278
PBS-C Plate-type Polarizing Beamsplitters B074
PBS Polarizing Beamsplitters B079
PBSHP High Power Polarizing Beamsplitters B076
PBSW Broadband Polarizing Beamsplitters B077
PC Silent Air Compressor D017
PDA-1 Photodiode Amplifier H009
PDBS Polka dot beam splitter B067
PELL Pellicle beam splitter B068
PG Protective Windows B183
PGC-04 Pulus Generating Controller G104
PGH Protective Window Holders B183
PH Polarizer Holders C049
PKA Ultrasonic Motor Driven Actuator F014
PLC Polarcor Polarizers B101
PLH Prism Holders C047
PMH Ultra Broadband Dieletric Half Mirrors B052
PO Poles D047
POSB Rod Mount Module D046
PPB Penta Prisms B277
PR Rubber Isolators D017
PRS Prism Sheet B281
PS-20 φ20 Post Holder A042
PS-SP Pedestal Adapters D041
PST Posts holders D040
PSC Pedestal Clamps D040
PSCA Pedestal Clamps D040
PSCS Pedestal Clamps D040
PSCH Chromium Plate Half Mirrors B058
PSL Adjustable Slits C063
PSM Dielectric Plate Beamsplitters B061
PSMH Ultra Broadband Dieletric Half Mirrors B052
PSMH Laser Line Plate Half Mirrors (Laser Line) B055
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Part Number
R
RCCB Hollow Retro-reflectors B273
RC Stand Clamp D044
RCA Stand Base D044
REP Kinematic Bases/Kinematic Base Plate D031
RHO-13S-E2 Glass Rod Homogenizers for Light Guide H037
RO/ROU/ROC Posts D048
RO-EE/UU Posts D049
RODB Rod Lenses B151
RPB Right Angle Prisms B268
RPB1 – 5 Coated Right Angle Prisms B266
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index 9

Index
Part Number INDEX
Part Number Products Name Pages
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Part Number
RPSQ Right Angle Prisms B268
RR Retaining Rings C039
RS Post Holders D043
RS-CB Clamp Screws (For post holders) D045
RS232C/STR RS232C Cable G109
RSF Sharp cut dichroic mirror B247
RSN Helicoidal Post Holders D045
RSPCQ Roshon polarizing Prism B098
RSPMF Roshon polarizing Prism B098
S
S1/S2 Light Guide for LED Spot Illumination H038
S-DLB Reasonable achromatic lens B178
S-OFB Reasonable Optical Flat B290
S-OFBP Reasonable Optical Flat B290
S-OPB Reasonable Optical Flat B290
S-SLB-N Reasonable Plano Concave Lens B138
S-SLB-P Reasonable Plano Convex Lens B134
S-SLB-B-N Reasonable Plano Concave Lens B138
S-SLB-B-P Reasonable Plano Convex Lens B134
S-TFA Reasonable Aluminum Flat Mirrors B035
S-WSB Reasonable Optical Flat B290
SCF Short Wave Cutoff Filters B230
SC Dog Point Set Screws D050
SCR/SKB/SKD/DK Screw Set D063
SDB Micro-step Driver Box with I/O A030
SDLC Dust Cover (Dust-proof Bag) B347
SDM Sharp cut dichroic mirror B248
SFAI-OBL Piezo Actuator for Objective lens of Inverted microscope type G116
SFB Spatial Filter Holders C058
SFN Micrometer Heads F004
SFS-OBL Piezo Actuator for Objective Lens G116
SFS-H Sigma Fine (Piezo) Stages (high stiffness type) G114
SFS-120XY(WA) XY Piezo Stages Aperture Type G115
SGCAMSE Automated Collimation Measurement Software G022
SGDC Remote Actuator F012
SGEMCSE Software for Positioning & Measurement G025
SGLCESE Software for Liquid Crystal Evaluation System G022
SGMACS Software for Positioning, Measurement & Analysis G022
SGMMS Image measuring software A017
SGMV SGMV series Translation Motorized Stages - AC servo Motor G056
SGNETX Component Software for VB.NET G022
SGRM-200R Reflection Measurement Systems A052
SGSP-A Motorized Goniometers - 5 Phase Stepping Motor G086
SGSP-B Motorized Goniometers - 5 Phase Stepping Motor G088
SGSP-ACT Compact Stepping Motor Actuators F018
SGSP-OBL-3 Actuator for Objective Lenses (Stepper motor type) G072
SGSP-40/60YAW Rotation Motorized Stages G074
SGSP-80/120/160YAW Rotation Motorized Stages G076
SGTERME Terminal Software G024
SGVIEW Software for Monitoring & Control G022
SHH Micrometer Heads F005
SHM Micrometer Heads F004
SHN Micrometer Heads F005
SHPF Short Pass Filters B245
SHOT-GS 2 axis / 4 axis Stage Controller G102
SHOT-702 2 axis Stage Controller G100 etc
SHPA Differential Micrometer Heads F009
SHPB Differential Micrometer Heads F009
SHPC Differential Micrometer Heads F009
SHPT Differential Micrometer Heads F009
index 10
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Part Number Products Name Pages
SHPS High Power Laser Shutter Unit C066
SHS Micrometer Heads F004
SHS Micrometer Heads F005
SHSP Smaller Differential Micrometer Heads F009
SHSS Micrometer Heads F004
SHT Micrometer Heads F004
SHTS Micrometer Heads F004
SIRC/SUVC IR/UV Sensor Cards H008
SJT-02 Joystick Terminal G106
SK Color Camera A026
SKBNCF BNC female -RCA female conversion plug A025
SKBNC Connection cable A025
SKH-8003 8-inch monitor A025
SKHDMI Connection cable A026
SKLIR-1 LED Ring Illumination A025
SKRCAF RCA female –RCA female conversion plug A025
SKSZMCTV1/2 C Mount Adapter for Trinocular Scope A024
SKSZMAO Assisted Objective Lenses A025
SLA-100A LED Light Source Device H032 etc
SLB-25.4-SET φ25.4 (BK7) Lens Kit B132
SLB-N Plano Concave Lenses (BK7) B118
SLB-P Plano Convex Lenses (BK7) B108
SLB-B-N Biconcave Lenses (BK7) B129
SLB-B-P Biconvex Lenses (BK7) B123
SLC Lens Cleaner B346
SLCFU Calsium Fluoride Plano Convex Lens B162
SLCI Coaxial Illumination H030
SLD Power supply for LD driving A066
SLFI Flat Illumination H030
SLGE Germanium Single Lens B167
SLH Caliper Variable Lens Holders C041
SLLI Line Sensor Illumination (Bright Field) H031
SLLIH Line Sensor Illumination (Dark Field) H031
SLM Micro Lenses B156
SLP Lens Paper B346
SLRI Ring Illumination H029
SLRI-LA Low Angle Ring Illumination H029
SLSI Silicon Plano Convex Lens B166
SLSI LED Spot Illumination H027
SLSI-RGBM RGB Color Mixing Unit H028
SPS-SLSI Power Supply for LED Spot Illumination H027
SLSH Sapphire Plano Convex Lens B163
SLSQ-N Plano Concave Lenses (Synthetic Fused Silica) B118
SLSQ-P Plano Convex Lenses (Synthetic Fused Silica) B108
SLSQ-B-N Plano Concave Lenses (Synthetic Fused Silica) B129
SLSQ-B-P Plano Convex Lenses (Synthetic Fused Silica) B123
SLSQK-N Plano Concave Lenses (Synthetic fused silica for Excimer Laser) B118
SLSQK-P Plano Convex Lenses (Synthetic Fused Silica) B108
SLX XY Slits for X Ray C063
SLZS Single Lenses for CO2 Lasers B164
SLZS2 Meniscus Lens for CO2 Laser B165
SMC Multi Controller A030
SMD Power supply for LD driving (CW or pulse output) A067
SND Reflective Stepping type Variable ND Filter B226
SOM-C OptMike with Encoder F016
SP-T Adapter Plates for Pedestal D041
SP-102 50×50mm Adapter Plates D056
SP-103 Top Plates for KSP/KSPA D056
SP-104 Bottom Plates for KSP-786M D056
SP-109 Top Plates for TAR D057
SP-113N Conversion Plate D057
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Part Number
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index 11

Index
Part Number INDEX
Part Number Products Name Pages
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Part Number
SP-114N Conversion Plate D057
SP-117 Bottom Plates for KSPA 806M, 1006M D057
SP-121 M16 P1/M6 P1 Adapter Nuts D058
SP-121S M16 P1/M6 P1 Adapter Nuts D058
SP-122 M6P1 Adapter Plates D058
SP-123 Top Plates for KSP-406M— D058
SP/UP Adjustable Adapter Kits D038
SP-127-1 Top Plate Adapters for TAS-2060 D059
SP-129 Adapter Plates D059
SP-130 Adapter Plates D059
SP-131 Adapter Plates D059
SP-132 Adapter Plates D060
SP-133 Adapter Plates D060
SP-134 Adapter Plates D060
SP-135 Conversion Plate D060
SP-201 Conversion Plate D061
SP-301 Conversion Plate D061
SPAHL Long Working Distance Objective Lenses B195 etc
SPAL Long Working Distance Objective Lenses B195 etc
SPD Cooling unit equipped power supply A069
SPF Sheet Polarizers B099
SPFN Sheet Polarizers B099
SPH Polarizer Holders C049
SPS Small Pedestal Base D041
SPS-SP Small Pedestal Adapters D041
SRC Remote Controller F013
SRS-CMR Camera Observation Unit A040
SRS Schlieren A037
SRS-WL White Light Source Component A040
SSH-C Shutter Controller C067 etc
SSH Automatic Shutters C066
STC Color Camera A026
STD Power supply for Peltier A068
STDS Power supply for Peltier A068
SWC Wiping Cloth B347
SXD Cooling unit equipped power supply A068
T
TADC-401 X axis Aluminium Stages E068
TADC-402W XY axis Aluminium Stages E068
TADC-601 X axis Aluminium Stages E070
TADC-602W XY axis Aluminium Stages E070
TADC-L Z axis Aluminium Stages E100
TAF-ES-DM-40 Auto Focus (Separate type) A021
TAF-SS-OBL-3 Auto Focus (TTL type) A020
TAMM Aluminum Crossed Roller Guide Motorized Stage G060
TAM-3L Z axis Aluminum Crossed Roller Slide Stages(Vertical) E098
TAM-401 X axis Aluminum Crossed Roller Slide Stages E046
TAM-4L XZ axis Aluminum Crossed Roller Slide Stages (Vertical) E128, E130
TAM-402 XY axis Aluminum Crossed Roller Slide Stages E046
TAM-5L XYZ axis Aluminum Crossed Roller Slide Stages (Vertical) E148, E150
TAM-601 X axis Aluminum Crossed Roller Slide Stages E048
TAM-602 XY axis Aluminum Crossed Roller Slide Stages E048
TAM-651 X axis Aluminum Crossed Roller Slide Stages E050
TAM-652 XY axis Aluminum Crossed Roller Slide Stages E052
TAM-801 X axis Aluminum Crossed Roller Slide Stages E054
TAM-802 XY axis Aluminum Crossed Roller Slide Stages E054
TAM-1001 X axis Aluminum Crossed Roller Slide Stages E056
TAM-1002 XY axis Aluminum Crossed Roller Slide Stages E056
TAM-1201 X axis Aluminum Crossed Roller Slide Stages E058
index 12
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Part Number Products Name Pages
TAM-1202 X axis Aluminum Crossed Roller Slide Stages E060
TAM-10161 X axis Long Travel Aluminum Crossed Roller Slide Stages E062
TAM-10162 XY axis Long Travel Aluminum Crossed Roller Slide Stages E062
TAMC-1 X axis Long Travel Aluminum Crossed Roller Slide Stages E064
TAMC-2 XY axis Aluminum Crossed Roller Slide Stages (Large) E066
TAR-1 X axis Dual Drive Rack and Pinion Dovetail Stages E080
TAR-3D Z axis Dual Drive Rack and Pinion Dovetail Stages E105
TAR-4L XZ axis Rack and Pinion Dovetail Stages E134
TAR-4D XZ axis Fine and Coarse Drive Rack and pinion Dovetail Stages E135
TAR-5L XYZ axis Rack and Pinion Dovetail Stages E154
TAR-D X axis Dual Drive Rack and Pinion Dovetail Stages E080
TAR-L Z axis Rack and Pinion Dovetail Stages (Vertical) E104
TARW/TAR X axis Rack and Pinion Dovetail Stages E078
TARW/TAR-2 XY axis Rack and Pinion Dovetail Stages E082
TARW-L Z axis Rack and Pinion Dovetail Stages (Vertical) E104
TAS-1 X axis Leadscrew Stages E076
TAS-2 XY axis Leadscrew Stages E076
TAS-4L XZ axis Leadscrew Stages E134
TAS-5L XYZ axis Leadscrew Stages E154
TASB-1 X axis Preset Stages E072
TASB-2 XY axis Preset Stages E074
TASB-3 Z axis Preset Stages E102
TASB-4 XZ axis Preset Stages E132
TASB-5 XYZ axis Preset Stages E152
TAT Two-axis Pinholes / Objective Holders C060
TAT-AD20-TSD-40801S Concave Sample Holder Module A047
TCA Aluminum Concave Mirrors (Protective coating) B304
TCAN Aluminum Concave Mirrors (Without protective coating) B304
TCBS Concave Mirror Substrates B304
TCEA Ellipsoidal mirror B036
TCPA Paraboloid mirror B037
TDC Dry Cabinet (Electronic Drying Case) B348
TFA Aluminum Mirrors B030
TFA-30C05-10-TSD-401S Moveable Mirror Module A047
TFA-30C05-10-TSD-40801S Optical Path Switching Mirror Module A047
TFAE Aluminum Mirrors B030
TFAG Silver Mirrors B040
TFAEFL Large Aluminum Mirrors B034
TFAN Aluminum Mirrors B030
TFAQ Aluminum Mirrors B030
TFAQN Aluminum Mirrors B030
TFG Gold Flat Mirrors B038
TFGS Gold Silicon Mirrors B038
TFHSM Super Mirror B010
TFM Laser Line Mirrors B024
TFMHP Dielectric Mirrors for High Power Laser B020
TFMS Ultra Broadband Dielectric Mirrors B022
TFVM 0-45° Wide Incidence Dielectric Mirrors B027
TGH Test Target Holders C070
TLH Mini Lens Holders C040
TRC C shape intermediate ring D044
TSD-251 X axis Steel Extended Contact Slide Stages E018
TSD-252 XY axis Steel Extended Contact Slide Stages E018
TSD-254 XZ axis Steel Extended Contact Slide Stages E116
TSD-254L XZ axis Steel Extended Contact Slide Stages (Vertical) E124
TSD-255 XYZ axis Steel Extended Contact Slide Stages E136
TSD-255L XYZ axis Steel Extended Contact Slide Stages (Vertical) E144
TSD-3 Z axis Steel Extended Contact Slide Stages E086, E088
TSD-401 X axis Steel Extended Contact Slide Stages E020
TSD-402 XY axis Steel Extended Contact Slide Stages E020
TSD-404 XZ axis Steel Extended Contact Slide Stages E116
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Part Number
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
index 13

Index
Part Number INDEX
Part Number Products Name Pages
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Part Number
TSD-404L XZ axis Steel Extended Contact Slide Stages (Vertical) E124
TSD-405 Z axis Steel Extended Contact Slide Stages E136
TSD-405L XYZ axis Steel Extended Contact Slide Stages(Vertical) E144
TSD-601 X axis Steel Extended Contact Slide Stages E022
TSD-602 XY axis Steel Extended Contact Slide Stages E022
TSD-604 XZ axis Steel Extended Contact Slide Stages E118
TSD-604L XZ axis Steel Extended Contact Slide Stages (Vertical) E126
TSD-605 XYZ axis Steel Extended Contact Slide Stages E138
TSD-605L XYZ axis Steel Extended Contact Slide Stages (Vertical) E146
TSD-654 Z axis Steel Extended Contact Slide Stages E118
TSD-654L XZ axis Steel Extended Contact Slide Stages (Vertical) E126
TSD-655 XYZ axis Steel Extended Contact Slide Stages E138
TSD-655L XZ axis Steel Extended Contact Slide Stages (Vertical) E146
TSD-801 X axis Steel Extended Contact Slide Stages E028
TSD-802 XY axis Steel Extended Contact Slide Stages E028
TSD-804 XZ axis Steel Extended Contact Slide Stages E120
TSD-805 XYZ axis Steel Extended Contact Slide Stages E140
TSD-1001 X axis Steel Extended Contact Slide Stages E030
TSD-1002 XY axis Steel Extended Contact Slide Stages E030
TSD-1004 XZ axis Steel Extended Contact Slide Stages E120
TSD-1005 XYZ axis Steel Extended Contact Slide Stages E140
TSD-1201 X axis Steel Extended Contact Slide Stages (Filtered) E032
TSD-1202 XY axis Steel Extended Contact Slide Stages (Filtered) E034
TSD-1204 XZ axis Steel Extended Contact Slide Stages E122
TSD-1205 XYZ axis Steel Extended Contact Slide Stages E142
TSD X axis Steel Extended Contact Slide Stages E036
TSD-L Z axis Steel Extended Contact Slide Stages (Vertical) E090
TSD-LB L Angle Brackets E092
TSD-SDM X axis Steel Extended Contact Slide Stages (Coarse/Fine Movement) E036
TSD-SZ Z axis Steel Extended Contact Slide Stages (Vertical Mounting) E094
TSD-SZ Z axis Steel Extended Contact Slide Stages (Vertical Mounting) E096
TSD-UD Z axis Steel Extended Contact Slide Stages (Inverted) E086
TSD-651 X axis Steel Extended Contact Slide Stages E024
TSD-652 XY axis Steel Extended Contact Slide Stages E026
TSD-651-M6 X axis Steel Extended Contact Slide Stages E038
TSD-651-UU X axis Steel Extended Contact Slide Stages E038
TSD-652-M6 XY axis Steel Extended Contact Slide Stages E038
TSD-652-UU XY axis Steel Extended Contact Slide Stages E038
TSDH-251 X axis General-purpose type Stainless Stages E040
TSDH-252W XY axis General-purpose type Stainless Stages E040
TSDH-401 X axis General-purpose type Stainless Stages E042
TSDH-402W XY axis General-purpose type Stainless Stages E042
TSDH-601 X axis General-purpose type Stainless Stages E044
TSDH-602 XY axis General-purpose type Stainless Stages E044
TSDH-L Z axis General-purpose type Stainless Stages E093
TSDS-1 X axis Stainless Steel Extended Contact Slide Stages E200
TSDS-2 XY axis Stainless Steel Extended Contact Slide Stages E202
TSDS-3 Z axis Stainless Steel Extended Contact Slide Stages E204
TSDS-3L Z axis Stainless Steel Extended Contact Slide Stages (Vertical) E205
TSDS-4 XZ axis Steel Extended Contact Slide Stages E206
TSDS-4L XZ axis Stainless Steel Extended Contact Slide Stages(Vertical) E208
TSDS-5 XYZ axis Stainless Steel Extended Contact Slide Stages E210
TSDS-5L XYZ axis Stainless Steel Extended Contact Slide Stages (Vertical) E212
TSDT-401 Low-profile X axis Steel Stages E016
TSDT-601 Low-profile X axis Steel Stages E016
TSM High Load Capacity Jacks E115
U
UDL Ultra-violet Achromats B185
UFCL Front converter lenses A015
index 14
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Part Number Products Name Pages
ULWZ Ultra Long Working distance Zoom Microscope A014
ULWZ-M Ultra Long Working distance Zoom Microscope A014
USB USB Cable G109
USP Plastic polarizer B102
UTVAF UV Transmitting Filters B232
UZOL Ultra Long working distance objective lenses A015
V
VBS Variable Beamsplitter B062
VND Variable Reflective Neutral Density Filters B224
VPF Bandpass Interference filters B254
VPF Bandpass Interference filters B257
VPFHT Laser Line Filter B250
VSGSP-60 Vacuum Applications Miniature Motorized Stages G094
VSGSP-(X) Vacuum Compatible Motorized Stages G092
VSGSP-YAW Vacuum Applications Miniature Motorized Stages G096
W
WBMA Optical Windows with anti-reflection coating B316
WBNA Light path corrector B062
WGP Sub-micron Worm Drive Micrometer Heads F007
WGPF Wire grid polarizing filter B100
WPM Mica Waveplates B090
WPPB Wollaston Prisms B097
WPPC Wollaston Prisms B097
WPQ Quartz Waveplates B087
WPQG Air Gap Type Waveplates B086
WPQW Broadband Quartz Waveplates B084
WSB Wedged Substrates (BK7) B300
WSCFSP Low Scattering Wedged Substrats (Synthetic Fused Silica) B286
WSMFSP Low Scattering Wedged Substrats (Synthetic Fused Silica) B286
WSQNA Light path corrector B062
WSQNAHP AR Coated Windows for High Power Laser B317
WSSQ Wedged Substrates (Synthetic Fused Silica) B300
WSSQK Wedged Substrates (Synthetic fused silica for Excimer Laser) B300
WSSQSP Low Scattering Wedged Substrats (Synthetic Fused Silica) B286
WZSA ZnSe Windows for Infrared Laser B321
Application
Systems
Optics &
Optical
Coatings
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Part Number
Y
YHS Harmonic Separators B064
YIF Interference filters B251
YL-120H YL-120H Model (Goggle shaped, reinforced glass type) H023
YL-130 YL-130 Model (Goggle shaped) H023
YL-250G YL-250G Model (Over prescription glasses, reinforced glass type) H023
YL-290 YL-290 Model (Eyeglass shaped) H022
YL-335 YL-335 Model (Over prescription glasses type) H022
YL-500 Laser Safety Windows (made of acrylic resin) H015
YL-600 Laser Safety PVC Films H014
YL-717 YL-717 Model (Over prescription glasses type) H021
YL-760 YL-760 Model (Three-way type) H020
YLC-1 Laser Shield Curtain H013
YLC-2 Laser Shield Curtain H013
YVAC-GREASE-C Fomblin Vacuum Grease G110
Z
ZAS-FAC-PST Focus unit A016 etc
ZBR Z Angle Brackets D052
ZMM Zoom Stereo Microscope A024
ZOL Long working distance objective lenses A015
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list
index 15

Index
Part Number INDEX
Part Number Products Name Pages
Application
Systems
Optics &
Optical
Coatings
ZPSC-T1 Partial Light blocking cassette A016
ZRL-ZOL15 Ring light guide A016
ZRCL Rear Converter A016
Holders
Bases
Manual
Stages
Actuators
Motoeized
Stages
Light
Sources
Index
Part Number
index 16
Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list

Phone: +49 8153 405-0 / price list: ose-p@laser2000.com / Contact us for the lastest price list